Abtahi et al., 2014 - Google Patents
Effects of the van der Waals force, squeeze-film damping, and contact bounce on the dynamics of electrostatic microcantilevers before and after pull-inAbtahi et al., 2014
View PDF- Document ID
- 12257738549385169692
- Author
- Abtahi M
- Vossoughi G
- Meghdari A
- Publication year
- Publication venue
- Nonlinear Dynamics
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Snippet
The operational range of microcantilever beams under electrostatic force can be extended beyond pull-in in the presence of an intermediate dielectric layer. In this paper, a systematic method for deriving dynamic equation of microcantilevers under electrostatic force is …
- 230000000694 effects 0 title abstract description 9
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