Caruntu et al., 2021 - Google Patents
Frequency–amplitude response of superharmonic resonance of second order of electrostatically actuated MEMS cantilever resonatorsCaruntu et al., 2021
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- 9983533643484413168
- Author
- Caruntu D
- Botello M
- Reyes C
- Beatriz J
- Publication year
- Publication venue
- International Journal of Non-Linear Mechanics
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This paper deals with the frequency–amplitude response of superharmonic resonance of second order (order two) of electrostatically actuated Micro-Electro-Mechanical System (MEMS) cantilever resonators. The structure of MEMS resonators consists of a cantilever …
- 230000004044 response 0 title abstract description 83
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