Cheng et al., 2014 - Google Patents
High precision patterning of ITO using femtosecond laser annealing processCheng et al., 2014
View PDF- Document ID
- 1177379408112399571
- Author
- Cheng C
- Lin C
- Publication year
- Publication venue
- Applied surface science
External Links
Snippet
High precision patterning of crystalline indium tin oxide (c-ITO) patterns on amorphous ITO (a-ITO) thin films by femtosecond laser-induced crystallization with a Gaussian beam profile followed by chemical etching is demonstrated. In the proposed approach, the a-ITO thin film …
- 238000000059 patterning 0 title abstract description 19
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Cheng et al. | High precision patterning of ITO using femtosecond laser annealing process | |
| Bian et al. | Femtosecond laser ablation of indium tin-oxide narrow grooves for thin film solar cells | |
| Račiukaitis et al. | Patterning of indium–tin oxide on glass with picosecond lasers | |
| Kuang et al. | Ultrashort pulse laser patterning of indium tin oxide thin films on glass by uniform diffractive beam patterns | |
| Okoshi et al. | Pulsed laser deposition of ZnO thin films using a femtosecond laser | |
| Tseng et al. | Electrode patterning on PEDOT: PSS thin films by pulsed ultraviolet laser for touch panel screens | |
| Krause et al. | Precise microstructuring of indium-tin oxide thin films on glass by selective femtosecond laser ablation | |
| Lin et al. | Electrode patterning of ITO thin films by high repetition rate fiber laser | |
| Wang et al. | Drilling of aluminum and copper films with femtosecond double-pulse laser | |
| Oh et al. | Laser dewetting behaviors of Ag and Au thin films on glass and Si substrates: Experiments and theoretical considerations | |
| Kim et al. | Morphologies of femtosecond laser ablation of ITO thin films using gaussian or quasi-flat top beams for OLED repair | |
| Kim et al. | Ablation depth control with 40 nm resolution on ITO thin films using a square, flat top beam shaped femtosecond NIR laser | |
| Henley et al. | Laser implantation of plasmonic nanostructures into glass | |
| Cheng et al. | Femtosecond laser processing of indium-tin-oxide thin films | |
| Rodriguez et al. | Plasmonic response and transformation mechanism upon single laser exposure of metal discontinuous films | |
| Liang et al. | Surface ablation thresholds of femtosecond laser micropatterning silver nanowires network on flexible substrate | |
| Danilov et al. | Electron-ion coupling and ambipolar diffusion in dense electron-hole plasma in thin amorphous Si films studied by single-shot, pulse-width dependent ultrafast laser ablation | |
| Cheng et al. | Femtosecond laser-induced nanoperiodic structures and simultaneous crystallization in amorphous indium-tin-oxide thin films | |
| Anghel et al. | Femtosecond laser ablation of TiO2 films for two-dimensional photonic crystals | |
| Choi et al. | A study of ultrafast ablation on ITO thin films with wavelengths of 513 and 1026 nm for high resolution patterning | |
| Lim et al. | Ultrafast laser-assisted selective removal of self-assembled Ag network electrodes for flexible and transparent film heaters | |
| Tanaka et al. | Laser etching of indium tin oxide thin films by ultra-short pulsed laser | |
| Cheng et al. | Patterning crystalline indium tin oxide by high repetition rate femtosecond laser-induced crystallization | |
| Tan et al. | Improved patterning of ITO coated with gold masking layer on glass substrate using nanosecond fiber laser and etching | |
| Lee et al. | Micro-scale patterning of indium tin oxide film by spatially modulated pulsed Nd: YAG laser beam |