Tanaka et al., 2003 - Google Patents
Laser etching of indium tin oxide thin films by ultra-short pulsed laserTanaka et al., 2003
- Document ID
- 14268286786436849354
- Author
- Tanaka R
- Takaoka T
- Mizukami H
- Arai T
- Iwai Y
- Publication year
- Publication venue
- Fourth International Symposium on Laser Precision Microfabrication
External Links
Snippet
We have investigated laser etching that removed ITO (Indium Tin Oxide) thin films deposited on glass substrate directly and selectively by laser beam in dry process. At first, in order to examine the dependence of laser wavelengths at ablation, the first, second, third and fourth …
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin data:image/svg+xml;base64,<?xml version='1.0' encoding='iso-8859-1'?>
<svg version='1.1' baseProfile='full'
              xmlns='http://www.w3.org/2000/svg'
                      xmlns:rdkit='http://www.rdkit.org/xml'
                      xmlns:xlink='http://www.w3.org/1999/xlink'
                  xml:space='preserve'
width='300px' height='300px' viewBox='0 0 300 300'>
<!-- END OF HEADER -->
<rect style='opacity:1.0;fill:#FFFFFF;stroke:none' width='300.0' height='300.0' x='0.0' y='0.0'> </rect>
<path class='bond-0 atom-1 atom-2' d='M 183.6,203.4 L 134.1,203.4' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-0 atom-1 atom-2' d='M 134.1,203.4 L 84.7,203.4' style='fill:none;fill-rule:evenodd;stroke:#E84235;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-0 atom-1 atom-2' d='M 183.6,247.6 L 134.1,247.6' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-0 atom-1 atom-2' d='M 134.1,247.6 L 84.7,247.6' style='fill:none;fill-rule:evenodd;stroke:#E84235;stroke-width:2.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<text x='128.9' y='98.4' class='atom-0' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >I</text>
<text x='142.7' y='98.4' class='atom-0' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >n</text>
<text x='233.2' y='245.5' class='atom-1' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >S</text>
<text x='260.8' y='245.5' class='atom-1' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >n</text>
<text x='12.5' y='245.5' class='atom-2' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#E84235' >O</text>
<path d='M 171.2,78.4 L 171.2,78.2 L 171.2,78.0 L 171.2,77.9 L 171.1,77.7 L 171.1,77.5 L 171.0,77.4 L 170.9,77.2 L 170.8,77.1 L 170.7,77.0 L 170.6,76.9 L 170.4,76.8 L 170.3,76.7 L 170.1,76.6 L 170.0,76.5 L 169.8,76.5 L 169.6,76.4 L 169.5,76.4 L 169.3,76.4 L 169.1,76.4 L 168.9,76.4 L 168.8,76.4 L 168.6,76.5 L 168.5,76.5 L 168.3,76.6 L 168.2,76.7 L 168.0,76.8 L 167.9,76.9 L 167.8,77.0 L 167.7,77.2 L 167.6,77.3 L 167.5,77.5 L 167.4,77.6 L 167.3,77.8 L 167.3,78.0 L 167.3,78.1 L 167.2,78.3 L 167.2,78.5 L 167.3,78.6 L 167.3,78.8 L 167.3,79.0 L 167.4,79.1 L 167.5,79.3 L 167.6,79.4 L 167.7,79.6 L 167.8,79.7 L 167.9,79.8 L 168.0,80.0 L 168.2,80.1 L 168.3,80.1 L 168.5,80.2 L 168.6,80.3 L 168.8,80.3 L 168.9,80.4 L 169.1,80.4 L 169.3,80.4 L 169.5,80.4 L 169.6,80.3 L 169.8,80.3 L 170.0,80.2 L 170.1,80.2 L 170.3,80.1 L 170.4,80.0 L 170.6,79.9 L 170.7,79.8 L 170.8,79.7 L 170.9,79.5 L 171.0,79.4 L 171.1,79.2 L 171.1,79.1 L 171.2,78.9 L 171.2,78.7 L 171.2,78.6 L 171.2,78.4 L 169.2,78.4 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 171.2,98.5 L 171.2,98.3 L 171.2,98.1 L 171.2,97.9 L 171.1,97.8 L 171.1,97.6 L 171.0,97.5 L 170.9,97.3 L 170.8,97.2 L 170.7,97.1 L 170.6,96.9 L 170.4,96.8 L 170.3,96.7 L 170.1,96.7 L 170.0,96.6 L 169.8,96.5 L 169.6,96.5 L 169.5,96.5 L 169.3,96.5 L 169.1,96.5 L 168.9,96.5 L 168.8,96.5 L 168.6,96.6 L 168.5,96.6 L 168.3,96.7 L 168.2,96.8 L 168.0,96.9 L 167.9,97.0 L 167.8,97.1 L 167.7,97.2 L 167.6,97.4 L 167.5,97.5 L 167.4,97.7 L 167.3,97.9 L 167.3,98.0 L 167.3,98.2 L 167.2,98.4 L 167.2,98.5 L 167.3,98.7 L 167.3,98.9 L 167.3,99.0 L 167.4,99.2 L 167.5,99.4 L 167.6,99.5 L 167.7,99.7 L 167.8,99.8 L 167.9,99.9 L 168.0,100.0 L 168.2,100.1 L 168.3,100.2 L 168.5,100.3 L 168.6,100.3 L 168.8,100.4 L 168.9,100.4 L 169.1,100.4 L 169.3,100.4 L 169.5,100.4 L 169.6,100.4 L 169.8,100.4 L 170.0,100.3 L 170.1,100.2 L 170.3,100.2 L 170.4,100.1 L 170.6,100.0 L 170.7,99.8 L 170.8,99.7 L 170.9,99.6 L 171.0,99.4 L 171.1,99.3 L 171.1,99.1 L 171.2,99.0 L 171.2,98.8 L 171.2,98.6 L 171.2,98.5 L 169.2,98.5 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 171.2,58.3 L 171.2,58.1 L 171.2,58.0 L 171.2,57.8 L 171.1,57.6 L 171.1,57.5 L 171.0,57.3 L 170.9,57.2 L 170.8,57.0 L 170.7,56.9 L 170.6,56.8 L 170.4,56.7 L 170.3,56.6 L 170.1,56.5 L 170.0,56.4 L 169.8,56.4 L 169.6,56.3 L 169.5,56.3 L 169.3,56.3 L 169.1,56.3 L 168.9,56.3 L 168.8,56.4 L 168.6,56.4 L 168.5,56.5 L 168.3,56.6 L 168.2,56.6 L 168.0,56.7 L 167.9,56.9 L 167.8,57.0 L 167.7,57.1 L 167.6,57.3 L 167.5,57.4 L 167.4,57.6 L 167.3,57.7 L 167.3,57.9 L 167.3,58.1 L 167.2,58.2 L 167.2,58.4 L 167.3,58.6 L 167.3,58.7 L 167.3,58.9 L 167.4,59.1 L 167.5,59.2 L 167.6,59.4 L 167.7,59.5 L 167.8,59.6 L 167.9,59.8 L 168.0,59.9 L 168.2,60.0 L 168.3,60.1 L 168.5,60.1 L 168.6,60.2 L 168.8,60.3 L 168.9,60.3 L 169.1,60.3 L 169.3,60.3 L 169.5,60.3 L 169.6,60.3 L 169.8,60.2 L 170.0,60.2 L 170.1,60.1 L 170.3,60.0 L 170.4,59.9 L 170.6,59.8 L 170.7,59.7 L 170.8,59.6 L 170.9,59.4 L 171.0,59.3 L 171.1,59.1 L 171.1,59.0 L 171.2,58.8 L 171.2,58.7 L 171.2,58.5 L 171.2,58.3 L 169.2,58.3 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 171.2,78.4 L 171.2,78.2 L 171.2,78.0 L 171.2,77.9 L 171.1,77.7 L 171.1,77.5 L 171.0,77.4 L 170.9,77.2 L 170.8,77.1 L 170.7,77.0 L 170.6,76.9 L 170.4,76.8 L 170.3,76.7 L 170.1,76.6 L 170.0,76.5 L 169.8,76.5 L 169.6,76.4 L 169.5,76.4 L 169.3,76.4 L 169.1,76.4 L 168.9,76.4 L 168.8,76.4 L 168.6,76.5 L 168.5,76.5 L 168.3,76.6 L 168.2,76.7 L 168.0,76.8 L 167.9,76.9 L 167.8,77.0 L 167.7,77.2 L 167.6,77.3 L 167.5,77.5 L 167.4,77.6 L 167.3,77.8 L 167.3,78.0 L 167.3,78.1 L 167.2,78.3 L 167.2,78.5 L 167.3,78.6 L 167.3,78.8 L 167.3,79.0 L 167.4,79.1 L 167.5,79.3 L 167.6,79.4 L 167.7,79.6 L 167.8,79.7 L 167.9,79.8 L 168.0,80.0 L 168.2,80.1 L 168.3,80.1 L 168.5,80.2 L 168.6,80.3 L 168.8,80.3 L 168.9,80.4 L 169.1,80.4 L 169.3,80.4 L 169.5,80.4 L 169.6,80.3 L 169.8,80.3 L 170.0,80.2 L 170.1,80.2 L 170.3,80.1 L 170.4,80.0 L 170.6,79.9 L 170.7,79.8 L 170.8,79.7 L 170.9,79.5 L 171.0,79.4 L 171.1,79.2 L 171.1,79.1 L 171.2,78.9 L 171.2,78.7 L 171.2,78.6 L 171.2,78.4 L 169.2,78.4 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 285.1,221.5 L 285.0,221.3 L 285.0,221.2 L 285.0,221.0 L 284.9,220.8 L 284.9,220.7 L 284.8,220.5 L 284.7,220.4 L 284.6,220.2 L 284.5,220.1 L 284.4,220.0 L 284.2,219.9 L 284.1,219.8 L 283.9,219.7 L 283.8,219.6 L 283.6,219.6 L 283.4,219.5 L 283.3,219.5 L 283.1,219.5 L 282.9,219.5 L 282.8,219.5 L 282.6,219.6 L 282.4,219.6 L 282.3,219.7 L 282.1,219.7 L 282.0,219.8 L 281.8,219.9 L 281.7,220.1 L 281.6,220.2 L 281.5,220.3 L 281.4,220.4 L 281.3,220.6 L 281.2,220.8 L 281.1,220.9 L 281.1,221.1 L 281.1,221.3 L 281.1,221.4 L 281.1,221.6 L 281.1,221.8 L 281.1,221.9 L 281.1,222.1 L 281.2,222.3 L 281.3,222.4 L 281.4,222.6 L 281.5,222.7 L 281.6,222.8 L 281.7,223.0 L 281.8,223.1 L 282.0,223.2 L 282.1,223.3 L 282.3,223.3 L 282.4,223.4 L 282.6,223.5 L 282.8,223.5 L 282.9,223.5 L 283.1,223.5 L 283.3,223.5 L 283.4,223.5 L 283.6,223.4 L 283.8,223.4 L 283.9,223.3 L 284.1,223.2 L 284.2,223.1 L 284.4,223.0 L 284.5,222.9 L 284.6,222.8 L 284.7,222.6 L 284.8,222.5 L 284.9,222.3 L 284.9,222.2 L 285.0,222.0 L 285.0,221.9 L 285.0,221.7 L 285.1,221.5 L 283.1,221.5 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 285.1,229.5 L 285.0,229.3 L 285.0,229.2 L 285.0,229.0 L 284.9,228.8 L 284.9,228.7 L 284.8,228.5 L 284.7,228.4 L 284.6,228.2 L 284.5,228.1 L 284.4,228.0 L 284.2,227.9 L 284.1,227.8 L 283.9,227.7 L 283.8,227.6 L 283.6,227.6 L 283.4,227.5 L 283.3,227.5 L 283.1,227.5 L 282.9,227.5 L 282.8,227.5 L 282.6,227.6 L 282.4,227.6 L 282.3,227.7 L 282.1,227.7 L 282.0,227.8 L 281.8,227.9 L 281.7,228.1 L 281.6,228.2 L 281.5,228.3 L 281.4,228.4 L 281.3,228.6 L 281.2,228.8 L 281.1,228.9 L 281.1,229.1 L 281.1,229.3 L 281.1,229.4 L 281.1,229.6 L 281.1,229.8 L 281.1,229.9 L 281.1,230.1 L 281.2,230.3 L 281.3,230.4 L 281.4,230.6 L 281.5,230.7 L 281.6,230.8 L 281.7,231.0 L 281.8,231.1 L 282.0,231.2 L 282.1,231.3 L 282.3,231.3 L 282.4,231.4 L 282.6,231.5 L 282.8,231.5 L 282.9,231.5 L 283.1,231.5 L 283.3,231.5 L 283.4,231.5 L 283.6,231.4 L 283.8,231.4 L 283.9,231.3 L 284.1,231.2 L 284.2,231.1 L 284.4,231.0 L 284.5,230.9 L 284.6,230.8 L 284.7,230.6 L 284.8,230.5 L 284.9,230.3 L 284.9,230.2 L 285.0,230.0 L 285.0,229.9 L 285.0,229.7 L 285.1,229.5 L 283.1,229.5 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
</svg>
 data:image/svg+xml;base64,<?xml version='1.0' encoding='iso-8859-1'?>
<svg version='1.1' baseProfile='full'
              xmlns='http://www.w3.org/2000/svg'
                      xmlns:rdkit='http://www.rdkit.org/xml'
                      xmlns:xlink='http://www.w3.org/1999/xlink'
                  xml:space='preserve'
width='85px' height='85px' viewBox='0 0 85 85'>
<!-- END OF HEADER -->
<rect style='opacity:1.0;fill:#FFFFFF;stroke:none' width='85.0' height='85.0' x='0.0' y='0.0'> </rect>
<path class='bond-0 atom-1 atom-2' d='M 51.9,51.6 L 34.2,51.6' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-0 atom-1 atom-2' d='M 34.2,51.6 L 16.4,51.6' style='fill:none;fill-rule:evenodd;stroke:#E84235;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-0 atom-1 atom-2' d='M 51.9,61.6 L 34.2,61.6' style='fill:none;fill-rule:evenodd;stroke:#3B4143;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<path class='bond-0 atom-1 atom-2' d='M 34.2,61.6 L 16.4,61.6' style='fill:none;fill-rule:evenodd;stroke:#E84235;stroke-width:1.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1' />
<text x='31.3' y='33.4' class='atom-0' style='font-size:19px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >I</text>
<text x='38.1' y='33.4' class='atom-0' style='font-size:19px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >n</text>
<text x='53.2' y='66.6' class='atom-1' style='font-size:19px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >S</text>
<text x='66.9' y='66.6' class='atom-1' style='font-size:19px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >n</text>
<text x='3.4' y='66.6' class='atom-2' style='font-size:19px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#E84235' >O</text>
<path d='M 54.1,23.4 L 54.1,23.3 L 54.1,23.2 L 54.0,23.1 L 54.0,23.1 L 54.0,23.0 L 53.9,22.9 L 53.9,22.8 L 53.9,22.8 L 53.8,22.7 L 53.7,22.6 L 53.7,22.6 L 53.6,22.5 L 53.5,22.5 L 53.4,22.5 L 53.4,22.4 L 53.3,22.4 L 53.2,22.4 L 53.1,22.4 L 53.0,22.4 L 52.9,22.4 L 52.8,22.4 L 52.8,22.5 L 52.7,22.5 L 52.6,22.5 L 52.5,22.6 L 52.5,22.6 L 52.4,22.7 L 52.3,22.7 L 52.3,22.8 L 52.2,22.9 L 52.2,22.9 L 52.2,23.0 L 52.1,23.1 L 52.1,23.2 L 52.1,23.3 L 52.1,23.4 L 52.1,23.4 L 52.1,23.5 L 52.1,23.6 L 52.1,23.7 L 52.2,23.8 L 52.2,23.9 L 52.2,23.9 L 52.3,24.0 L 52.3,24.1 L 52.4,24.1 L 52.5,24.2 L 52.5,24.2 L 52.6,24.3 L 52.7,24.3 L 52.8,24.3 L 52.8,24.4 L 52.9,24.4 L 53.0,24.4 L 53.1,24.4 L 53.2,24.4 L 53.3,24.4 L 53.4,24.4 L 53.4,24.3 L 53.5,24.3 L 53.6,24.3 L 53.7,24.2 L 53.7,24.2 L 53.8,24.1 L 53.9,24.0 L 53.9,24.0 L 53.9,23.9 L 54.0,23.8 L 54.0,23.7 L 54.0,23.7 L 54.1,23.6 L 54.1,23.5 L 54.1,23.4 L 53.1,23.4 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 54.1,27.4 L 54.1,27.3 L 54.1,27.2 L 54.0,27.1 L 54.0,27.1 L 54.0,27.0 L 53.9,26.9 L 53.9,26.8 L 53.9,26.8 L 53.8,26.7 L 53.7,26.6 L 53.7,26.6 L 53.6,26.5 L 53.5,26.5 L 53.4,26.5 L 53.4,26.4 L 53.3,26.4 L 53.2,26.4 L 53.1,26.4 L 53.0,26.4 L 52.9,26.4 L 52.8,26.4 L 52.8,26.4 L 52.7,26.5 L 52.6,26.5 L 52.5,26.6 L 52.5,26.6 L 52.4,26.7 L 52.3,26.7 L 52.3,26.8 L 52.2,26.9 L 52.2,26.9 L 52.2,27.0 L 52.1,27.1 L 52.1,27.2 L 52.1,27.3 L 52.1,27.3 L 52.1,27.4 L 52.1,27.5 L 52.1,27.6 L 52.1,27.7 L 52.2,27.8 L 52.2,27.8 L 52.2,27.9 L 52.3,28.0 L 52.3,28.1 L 52.4,28.1 L 52.5,28.2 L 52.5,28.2 L 52.6,28.3 L 52.7,28.3 L 52.8,28.3 L 52.8,28.4 L 52.9,28.4 L 53.0,28.4 L 53.1,28.4 L 53.2,28.4 L 53.3,28.4 L 53.4,28.3 L 53.4,28.3 L 53.5,28.3 L 53.6,28.2 L 53.7,28.2 L 53.7,28.1 L 53.8,28.1 L 53.9,28.0 L 53.9,28.0 L 53.9,27.9 L 54.0,27.8 L 54.0,27.7 L 54.0,27.6 L 54.1,27.6 L 54.1,27.5 L 54.1,27.4 L 53.1,27.4 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 54.1,19.4 L 54.1,19.3 L 54.1,19.2 L 54.0,19.2 L 54.0,19.1 L 54.0,19.0 L 53.9,18.9 L 53.9,18.9 L 53.9,18.8 L 53.8,18.7 L 53.7,18.7 L 53.7,18.6 L 53.6,18.6 L 53.5,18.5 L 53.4,18.5 L 53.4,18.5 L 53.3,18.4 L 53.2,18.4 L 53.1,18.4 L 53.0,18.4 L 52.9,18.4 L 52.8,18.4 L 52.8,18.5 L 52.7,18.5 L 52.6,18.5 L 52.5,18.6 L 52.5,18.6 L 52.4,18.7 L 52.3,18.7 L 52.3,18.8 L 52.2,18.9 L 52.2,19.0 L 52.2,19.0 L 52.1,19.1 L 52.1,19.2 L 52.1,19.3 L 52.1,19.4 L 52.1,19.5 L 52.1,19.5 L 52.1,19.6 L 52.1,19.7 L 52.2,19.8 L 52.2,19.9 L 52.2,19.9 L 52.3,20.0 L 52.3,20.1 L 52.4,20.1 L 52.5,20.2 L 52.5,20.2 L 52.6,20.3 L 52.7,20.3 L 52.8,20.4 L 52.8,20.4 L 52.9,20.4 L 53.0,20.4 L 53.1,20.4 L 53.2,20.4 L 53.3,20.4 L 53.4,20.4 L 53.4,20.3 L 53.5,20.3 L 53.6,20.3 L 53.7,20.2 L 53.7,20.2 L 53.8,20.1 L 53.9,20.0 L 53.9,20.0 L 53.9,19.9 L 54.0,19.8 L 54.0,19.8 L 54.0,19.7 L 54.1,19.6 L 54.1,19.5 L 54.1,19.4 L 53.1,19.4 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 54.1,23.4 L 54.1,23.3 L 54.1,23.2 L 54.0,23.1 L 54.0,23.1 L 54.0,23.0 L 53.9,22.9 L 53.9,22.8 L 53.9,22.8 L 53.8,22.7 L 53.7,22.6 L 53.7,22.6 L 53.6,22.5 L 53.5,22.5 L 53.4,22.5 L 53.4,22.4 L 53.3,22.4 L 53.2,22.4 L 53.1,22.4 L 53.0,22.4 L 52.9,22.4 L 52.8,22.4 L 52.8,22.5 L 52.7,22.5 L 52.6,22.5 L 52.5,22.6 L 52.5,22.6 L 52.4,22.7 L 52.3,22.7 L 52.3,22.8 L 52.2,22.9 L 52.2,22.9 L 52.2,23.0 L 52.1,23.1 L 52.1,23.2 L 52.1,23.3 L 52.1,23.4 L 52.1,23.4 L 52.1,23.5 L 52.1,23.6 L 52.1,23.7 L 52.2,23.8 L 52.2,23.9 L 52.2,23.9 L 52.3,24.0 L 52.3,24.1 L 52.4,24.1 L 52.5,24.2 L 52.5,24.2 L 52.6,24.3 L 52.7,24.3 L 52.8,24.3 L 52.8,24.4 L 52.9,24.4 L 53.0,24.4 L 53.1,24.4 L 53.2,24.4 L 53.3,24.4 L 53.4,24.4 L 53.4,24.3 L 53.5,24.3 L 53.6,24.3 L 53.7,24.2 L 53.7,24.2 L 53.8,24.1 L 53.9,24.0 L 53.9,24.0 L 53.9,23.9 L 54.0,23.8 L 54.0,23.7 L 54.0,23.7 L 54.1,23.6 L 54.1,23.5 L 54.1,23.4 L 53.1,23.4 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 80.9,54.6 L 80.9,54.5 L 80.9,54.5 L 80.9,54.4 L 80.8,54.3 L 80.8,54.2 L 80.8,54.1 L 80.7,54.1 L 80.7,54.0 L 80.6,53.9 L 80.5,53.9 L 80.5,53.8 L 80.4,53.8 L 80.3,53.7 L 80.2,53.7 L 80.2,53.7 L 80.1,53.6 L 80.0,53.6 L 79.9,53.6 L 79.8,53.6 L 79.7,53.6 L 79.7,53.7 L 79.6,53.7 L 79.5,53.7 L 79.4,53.7 L 79.3,53.8 L 79.3,53.8 L 79.2,53.9 L 79.1,54.0 L 79.1,54.0 L 79.0,54.1 L 79.0,54.2 L 79.0,54.2 L 78.9,54.3 L 78.9,54.4 L 78.9,54.5 L 78.9,54.6 L 78.9,54.7 L 78.9,54.7 L 78.9,54.8 L 78.9,54.9 L 79.0,55.0 L 79.0,55.1 L 79.0,55.1 L 79.1,55.2 L 79.1,55.3 L 79.2,55.3 L 79.3,55.4 L 79.3,55.5 L 79.4,55.5 L 79.5,55.5 L 79.6,55.6 L 79.7,55.6 L 79.7,55.6 L 79.8,55.6 L 79.9,55.6 L 80.0,55.6 L 80.1,55.6 L 80.2,55.6 L 80.2,55.6 L 80.3,55.5 L 80.4,55.5 L 80.5,55.4 L 80.5,55.4 L 80.6,55.3 L 80.7,55.3 L 80.7,55.2 L 80.8,55.1 L 80.8,55.0 L 80.8,55.0 L 80.9,54.9 L 80.9,54.8 L 80.9,54.7 L 80.9,54.6 L 79.9,54.6 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 80.9,58.6 L 80.9,58.5 L 80.9,58.4 L 80.9,58.4 L 80.8,58.3 L 80.8,58.2 L 80.8,58.1 L 80.7,58.0 L 80.7,58.0 L 80.6,57.9 L 80.5,57.9 L 80.5,57.8 L 80.4,57.8 L 80.3,57.7 L 80.2,57.7 L 80.2,57.6 L 80.1,57.6 L 80.0,57.6 L 79.9,57.6 L 79.8,57.6 L 79.7,57.6 L 79.7,57.6 L 79.6,57.7 L 79.5,57.7 L 79.4,57.7 L 79.3,57.8 L 79.3,57.8 L 79.2,57.9 L 79.1,57.9 L 79.1,58.0 L 79.0,58.1 L 79.0,58.2 L 79.0,58.2 L 78.9,58.3 L 78.9,58.4 L 78.9,58.5 L 78.9,58.6 L 78.9,58.6 L 78.9,58.7 L 78.9,58.8 L 78.9,58.9 L 79.0,59.0 L 79.0,59.1 L 79.0,59.1 L 79.1,59.2 L 79.1,59.3 L 79.2,59.3 L 79.3,59.4 L 79.3,59.4 L 79.4,59.5 L 79.5,59.5 L 79.6,59.6 L 79.7,59.6 L 79.7,59.6 L 79.8,59.6 L 79.9,59.6 L 80.0,59.6 L 80.1,59.6 L 80.2,59.6 L 80.2,59.5 L 80.3,59.5 L 80.4,59.5 L 80.5,59.4 L 80.5,59.4 L 80.6,59.3 L 80.7,59.2 L 80.7,59.2 L 80.8,59.1 L 80.8,59.0 L 80.8,58.9 L 80.9,58.9 L 80.9,58.8 L 80.9,58.7 L 80.9,58.6 L 79.9,58.6 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
</svg>
 [In].[Sn]=O 0 title abstract description 39
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0626—Energy control of the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/073—Shaping the laser spot
- B23K26/0732—Shaping the laser spot into a rectangular shape
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
Similar Documents
Publication | Publication Date | Title |
---|---|---|
Neuenschwander et al. | Processing of metals and dielectric materials with ps-laserpulses: results, strategies, limitations and needs | |
Chen et al. | Parametric studies on pulsed near ultraviolet frequency tripled Nd: YAG laser micromachining of sapphire and silicon | |
Qi et al. | Femtosecond laser ablation of sapphire on different crystallographic facet planes by single and multiple laser pulses irradiation | |
Tseng et al. | Laser scribing of indium tin oxide (ITO) thin films deposited on various substrates for touch panels | |
Perrie et al. | Femtosecond laser micro-structuring of aluminium under helium | |
Tanaka et al. | Laser etching of indium tin oxide thin films by ultra-short pulsed laser | |
Tseng et al. | Electrode patterning on PEDOT: PSS thin films by pulsed ultraviolet laser for touch panel screens | |
Farid et al. | Stress assisted selective ablation of ITO thin film by picosecond laser | |
Seo et al. | Removal of oxides from copper surface using femtosecond and nanosecond pulsed lasers | |
Shamir et al. | Large volume ablation of Sapphire with ultra-short laser pulses | |
Wang et al. | Material removal and surface formation mechanism of C-plane sapphire in multipass ablation by a nanosecond UV laser | |
Semaltianos et al. | Femtosecond laser surface texturing of a nickel-based superalloy | |
Sharif et al. | The role of fluence in determining the response of thin molybdenum films to ultrashort laser irradiation; from laser-induced crystallization to ablation via photomechanical ablation and nanostructure formation | |
Wang et al. | Improving the quality of femtosecond laser processing micro-hole array by coated with aluminum film on fused silica sheet | |
Cheng et al. | Femtosecond laser-induced nanoperiodic structures and simultaneous crystallization in amorphous indium-tin-oxide thin films | |
Chen et al. | Laser patterning with beam shaping on indium tin oxide thin films of glass/plastic substrate | |
Chkalov et al. | Thin film elements design: software and possibilities of femtosecond laser techniques | |
He et al. | Large-area regular periodic surface structures on 4H-SiC induced by defocused femtosecond laser | |
KR101385235B1 (en) | Fine TCO patterning method using the laser scribing | |
Lee et al. | Femtosecond laser patterning of Ta0. 1W0. 9Ox/ITO thin film stack | |
WO2023052549A2 (en) | Cutting a substrate or preparing a substrate for cleaving | |
Park et al. | XRD studies on the femtosecond laser ablated single-crystal germanium in air | |
Lan et al. | Laser precision engineering of glass substrates | |
Tanaka et al. | Effects of wavelengths on processing indium tin oxide thin films using diode-pumped Nd: YLF laser | |
Wang et al. | Nd: YVO4 laser direct ablation of indium tin oxide films deposited on glass and polyethylene terephthalate substrates |