Birkgan et al., 2004 - Google Patents
Modelling of surface topography development during ion sputtering of solidsBirkgan et al., 2004
View PDF- Document ID
- 8895805240903756781
- Author
- Birkgan S
- Bachurin V
- Rudy A
- Smirnov V
- Publication year
- Publication venue
- Radiation Effects and Defects in Solids
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Snippet
The mathematical model of surface erosion during ion bombardment is considered, which is reduced into a non-linear wave equation. The solutions obtained by characteristic methods describe a wide class of erosion phenomena, such as the development of arbitrary surfaces …
- 238000004544 sputter deposition 0 title abstract description 42
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