Chuang, 2012 - Google Patents
Robust H∞ control in nano-positioningChuang, 2012
View PDF- Document ID
- 8276533558472024820
- Author
- Chuang N
- Publication year
- Publication venue
- IET Control Theory & Applications
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Snippet
This study considers the use of robust H∞ tracking control in a nano-positioning system. The nano-positioning system uses a high-performance monolithic multilayer piezoelectric stack actuator connected in series with an external capacitor, which is used to provide a measured …
- 238000006073 displacement reaction 0 abstract description 17
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