Downey et al., 2014 - Google Patents
${\rm SiN} _ {x} $/InAlN/AlN/GaN MIS-HEMTs With 10.8${\rm THz}\cdot {\rm V} $ Johnson Figure of MeritDowney et al., 2014
- Document ID
- 7568508802423949709
- Author
- Downey B
- Meyer D
- Katzer D
- Roussos J
- Pan M
- Gao X
- Publication year
- Publication venue
- IEEE electron device letters
External Links
Snippet
A high combination of three-terminal breakdown voltage (VBK) and current gain cutoff frequency (f T) was achieved with SiN x/InAlN/AlN/GaN metal-insulator-semiconductor high- electron mobility transistors (MIS-HEMTs). A 1-nm SiN x gate dielectric was deposited ex situ …
- 229910004541 SiN 0 title abstract description 33
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