Xue et al., 2011 - Google Patents
In0. 7Ga0. 3 as Tunneling Field-Effect-Transistors with LaAlO3 and ZrO2 High-k DielectricsXue et al., 2011
- Document ID
- 7197287756303390286
- Author
- Xue F
- Zhao H
- Chen Y
- Wang Y
- Zhou F
- Lee J
- Publication year
- Publication venue
- ECS Transactions
External Links
Snippet
We investigated the device structure and fabrication process of In0. 7Ga0. 3As tunneling field-effect-transistors (TFETs) with atomiclayer-deposited (ALD) high-k dielectrics. We compared the device performance of In0. 7Ga0. 3As TFETs with p++/i and p++/n+ tunneling …
- 230000005641 tunneling 0 title abstract description 35
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