Le, 2020 - Google Patents
Stability analysis of a proximate time optimal controlled electrostatic suspension system using piezo actuator via Lyapunov functional approachLe, 2020
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- 5257062345026966848
- Author
- Le T
- Publication year
- Publication venue
- Mathematical Problems in Engineering
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An electrostatic suspension of silicon wafer using proximate time optimal control has been successfully developed. In this system, the movable electrodes which are supplied by constant voltage and actuated by the piezoelectric (PZT) actuator are used instead of …
- 239000000725 suspension 0 title abstract description 51
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