Huang et al., 1999 - Google Patents
Analytical modeling and optimization for a laterally-driven polysilicon thermal actuatorHuang et al., 1999
View PDF- Document ID
- 5336530146864656717
- Author
- Huang Q
- Lee N
- Publication year
- Publication venue
- Microsystem technologies
External Links
Snippet
An electro-thermally and laterally driven microactuator is analytically examined which is based on the asymmetrical thermal expansion of the microstructure with different lengths of two beams. Deflection of the microactuator is modeled by the structural analysis. Analytical …
- 229910021420 polycrystalline silicon 0 title description 15
Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
- H02N1/006—Electrostatic motors of the gap-closing type
- H02N1/008—Laterally driven motors, e.g. of the comb-drive type
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