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Article

An analytical model of vehicle-based automated material handling systems in semiconductor fabs

Authors:

Leon F. McGinnisAuthors Info & Claims

WSC '06: Proceedings of the 38th conference on Winter simulation

Pages 1871 - 1879

Published: 03 December 2006 Publication History

Abstract

This research explores analytical models useful in the design of vehicle-based Automated Material Handling Systems (AMHS) to support semiconductor manufacturing. The objective is to correctly estimate the throughput and move request delay. This analysis proposes a computationally effective analytical approach to multi-vehicle AMHS performance modeling for a simple closed loop. A probabilistic model is developed, based on a detailed description of AMHS operations, and the system is analyzed as an extended Markov chain. The model tracks the operations of one vehicle on the closed-loop considering the possibility of vehicle-blocking. This analysis provides the essential parameters such as the blocking probabilities in order to estimate the performance measures. A numerical example is analyzed and simulated using Automod to demonstrate and validate the queuing model.

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Cited By

McGinnis L(2020)An analysis-agnostic system model of the intel minifabProceedings of the Winter Simulation Conference10.5555/3466184.3466391(1837-1848)Online publication date: 14-Dec-2020
https://dl.acm.org/doi/10.5555/3466184.3466391
Chaabane ADauzère-Pérès SYugma CRullière LLamiable GHill RKuhl M(2013)Analyzing the impact of key parameters of vehicle management policies in a unified AMHSProceedings of the 2013 Winter Simulation Conference: Simulation: Making Decisions in a Complex World10.5555/2675983.2675871(3818-3828)Online publication date: 8-Dec-2013
https://dl.acm.org/doi/10.5555/2675983.2675871
Gaxiola GPabst DChristensen EWizelman DHill RKuhl M(2013)Methodology to evaluate the impact of amhs design characteristics on operational fab performanceProceedings of the 2013 Winter Simulation Conference: Simulation: Making Decisions in a Complex World10.5555/2675983.2675870(3806-3817)Online publication date: 8-Dec-2013
https://dl.acm.org/doi/10.5555/2675983.2675870
Show More Cited By

An analytical model of vehicle-based automated material handling systems in semiconductor fabs
1. Applied computing
2. Computing methodologies
  1. Modeling and simulation
    1. Model development and analysis

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Information & Contributors

Information

Published In

cover image ACM Conferences

WSC '06: Proceedings of the 38th conference on Winter simulation

December 2006

2429 pages

ISBN:1424405017

Editors:
L. Felipe Perrone
Bucknell University
,
Barry G. Lawson
University of Richmond
,
Jason Liu
Colorado School of Mines
,
Frederick P. Wieland
Sensis Corporation
,
General Chair:
David Nicol
University of Illinois, Urbana-Champaign
,
Program Chair:
Richard Fujimoto
College of Computing, Georgia Tech

Sponsors

IIE: Institute of Industrial Engineers
ASA: American Statistical Association
IEICE ESS: Institute of Electronics, Information and Communication Engineers, Engineering Sciences Society
IEEE-CS\DATC: The IEEE Computer Society
SIGSIM: ACM Special Interest Group on Simulation and Modeling
NIST: National Institute of Standards and Technology
(SCS): The Society for Modeling and Simulation International
INFORMS-CS: Institute for Operations Research and the Management Sciences-College on Simulation

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Winter Simulation Conference

Publication History

Published: 03 December 2006

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WSC06

Sponsor:

IIE
ASA
IEICE ESS
IEEE-CS\DATC
SIGSIM
NIST
(SCS)
INFORMS-CS

WSC06: Winter Simulation Conference 2006

December 3 - 6, 2006

California, Monterey

Acceptance Rates

WSC '06 Paper Acceptance Rate 177 of 252 submissions, 70%;

Overall Acceptance Rate 3,413 of 5,075 submissions, 67%

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Cited By

McGinnis L(2020)An analysis-agnostic system model of the intel minifabProceedings of the Winter Simulation Conference10.5555/3466184.3466391(1837-1848)Online publication date: 14-Dec-2020
https://dl.acm.org/doi/10.5555/3466184.3466391
Chaabane ADauzère-Pérès SYugma CRullière LLamiable GHill RKuhl M(2013)Analyzing the impact of key parameters of vehicle management policies in a unified AMHSProceedings of the 2013 Winter Simulation Conference: Simulation: Making Decisions in a Complex World10.5555/2675983.2675871(3818-3828)Online publication date: 8-Dec-2013
https://dl.acm.org/doi/10.5555/2675983.2675871
Gaxiola GPabst DChristensen EWizelman DHill RKuhl M(2013)Methodology to evaluate the impact of amhs design characteristics on operational fab performanceProceedings of the 2013 Winter Simulation Conference: Simulation: Making Decisions in a Complex World10.5555/2675983.2675870(3806-3817)Online publication date: 8-Dec-2013
https://dl.acm.org/doi/10.5555/2675983.2675870
Gaxiola GChristensen EHammel CStachura PRose OUhrmacher A(2012)Methodology to best extend AMHS for site expansionProceedings of the Winter Simulation Conference10.5555/2429759.2429990(1-10)Online publication date: 9-Dec-2012
https://dl.acm.org/doi/10.5555/2429759.2429990

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