Article

Capacity analysis of automated material handling systems in semiconductor fabs

Authors:

Michael E. Kuhl,

Julie ChristopherAuthors Info & Claims

WSC '04: Proceedings of the 36th conference on Winter simulation

Pages 1962 - 1966

Published: 05 December 2004 Publication History

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Abstract

A critical aspect of semiconductor manufacturing is the design and analysis of material handling and production control polices to optimize fab performance. As wafer sizes have increased, semiconductor fabs have moved toward the use of automated material handling systems (AMHS). However, the behavior of AMHS and the effects of AMHS on fab productivity is not well understood. This research involves the development of a design and analysis methodology for evaluating the throughput capacity of AMHS. A set of simulation experiments is used to evaluate the throughput capacity of an AMHS and the effects on fab performance measures. The analysis uses SEMATECH fab data for full semiconductor fabs to evaluate the AMHS throughput capacity.

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Cited By

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Wagner TSchwenke CKabitzsch KSchneider GHill RKuhl M(2013)Automated planning, execution and evaluation of simulation experiments of semiconductor AMHSProceedings of the 2013 Winter Simulation Conference: Simulation: Making Decisions in a Complex World10.5555/2675983.2675880(3891-3904)Online publication date: 8-Dec-2013
https://dl.acm.org/doi/10.5555/2675983.2675880
El-Nashar AEl-Kilany KTew J(2007)Reusable tool for 300mm intrabay AMHS modeling and simulationProceedings of the 39th conference on Winter simulation: 40 years! The best is yet to come10.5555/1351542.1351863(1789-1797)Online publication date: 9-Dec-2007
https://dl.acm.org/doi/10.5555/1351542.1351863
Nazzal DEl-Nashar ATew J(2007)Survey of research in modeling conveyor-based automated material handling systems in wafer fabsProceedings of the 39th conference on Winter simulation: 40 years! The best is yet to come10.5555/1351542.1351862(1781-1788)Online publication date: 9-Dec-2007
https://dl.acm.org/doi/10.5555/1351542.1351862

Capacity analysis of automated material handling systems in semiconductor fabs
1. Applied computing

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WSC '04: Proceedings of the 36th conference on Winter simulation

December 2004

2052 pages

ISBN:0780387864

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Winter Simulation Conference

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Published: 05 December 2004

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WSC '04 Paper Acceptance Rate 144 of 171 submissions, 84%;

Overall Acceptance Rate 3,413 of 5,075 submissions, 67%

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Wagner TSchwenke CKabitzsch KSchneider GHill RKuhl M(2013)Automated planning, execution and evaluation of simulation experiments of semiconductor AMHSProceedings of the 2013 Winter Simulation Conference: Simulation: Making Decisions in a Complex World10.5555/2675983.2675880(3891-3904)Online publication date: 8-Dec-2013
https://dl.acm.org/doi/10.5555/2675983.2675880
El-Nashar AEl-Kilany KTew J(2007)Reusable tool for 300mm intrabay AMHS modeling and simulationProceedings of the 39th conference on Winter simulation: 40 years! The best is yet to come10.5555/1351542.1351863(1789-1797)Online publication date: 9-Dec-2007
https://dl.acm.org/doi/10.5555/1351542.1351863
Nazzal DEl-Nashar ATew J(2007)Survey of research in modeling conveyor-based automated material handling systems in wafer fabsProceedings of the 39th conference on Winter simulation: 40 years! The best is yet to come10.5555/1351542.1351862(1781-1788)Online publication date: 9-Dec-2007
https://dl.acm.org/doi/10.5555/1351542.1351862

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Efficient simulations for capacity analysis and automated material handling system design in semiconductor wafer fabs

Automated material handling systems: automated reticle handling: a comparison of distributed and centralized reticle storage and transport

Survey of research in modeling conveyor-based automated material handling systems in wafer fabs