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"EDA solutions to new-defect detection in advanced process technologies."

Erik Jan Marinissen et al. (2012)

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DOI: 10.1109/DATE.2012.6176444

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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  dblp key:
  - conf/date/MarinissenVGHRMB12
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  persistent URL:
  - https://dblp.org/rec/conf/date/MarinissenVGHRMB12
Erik Jan Marinissen, Gilbert Vandling, Sandeep Kumar Goel, Friedrich Hapke, Jason Rivers, Nikolaus Mittermaier, Swapnil Bahl:
EDA solutions to new-defect detection in advanced process technologies. DATE 2012: 123-128

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