ZA200702713B - A flexible nano-imprint stamp - Google Patents

A flexible nano-imprint stamp

Info

Publication number: ZA200702713B
Authority: ZA; South Africa
Prior art keywords: imprint stamp; flexible nano; nano; imprint; stamp
Prior art date: 2004-09-08

Application number

ZA200702713A

Other languages

English (en)

Inventor

Nielsen Theodor

Kristensen Anders

Hansen Ole

Original Assignee

Nil Technology Aps

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2004-09-08

Filing date

2007-03-30

Publication date

2008-08-27

2007-03-30 Application filed by Nil Technology Aps filed Critical Nil Technology Aps

2008-08-27 Publication of ZA200702713B publication Critical patent/ZA200702713B/xx

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41F—PRINTING MACHINES OR PRESSES
- B41F17/00—Printing apparatus or machines of special types or for particular purposes, not otherwise provided for
- B41F17/001—Pad printing apparatus or machines
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
- B81C99/0075—Manufacture of substrate-free structures
- B81C99/009—Manufacturing the stamps or the moulds

Landscapes

Engineering & Computer Science (AREA)
Manufacturing & Machinery (AREA)
Microelectronics & Electronic Packaging (AREA)
Shaping Of Tube Ends By Bending Or Straightening (AREA)
Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

ZA200702713A 2004-09-08 2007-03-30 A flexible nano-imprint stamp ZA200702713B (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DKPA200401354		2004-09-08

Publications (1)

Publication Number	Publication Date
ZA200702713B true ZA200702713B (en)	2008-08-27

Family

ID=38731729

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
ZA200702713A ZA200702713B (en)	2004-09-08	2007-03-30	A flexible nano-imprint stamp

Country Status (10)

Country	Link
US (1)	US8075298B2 (zh)
EP (1)	EP1789848B1 (zh)
JP (1)	JP4733134B2 (zh)
CN (1)	CN101036086B (zh)
AU (1)	AU2005282060A1 (zh)
CA (1)	CA2579603A1 (zh)
DK (1)	DK1789848T3 (zh)
NO (1)	NO20071731L (zh)
WO (1)	WO2006026993A1 (zh)
ZA (1)	ZA200702713B (zh)

Families Citing this family (33)

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US9016221B2 (en)	2004-02-17	2015-04-28	University Of Florida Research Foundation, Inc.	Surface topographies for non-toxic bioadhesion control
US7676088B2 (en) *	2004-12-23	2010-03-09	Asml Netherlands B.V.	Imprint lithography
US8202075B2 (en) *	2005-08-12	2012-06-19	Canon Kabushiki Kaisha	Imprint apparatus and imprint method
JP5268239B2 (ja) *	2005-10-18	2013-08-21	キヤノン株式会社	パターン形成装置、パターン形成方法
US20070138699A1 (en) *	2005-12-21	2007-06-21	Asml Netherlands B.V.	Imprint lithography
US7517211B2 (en)	2005-12-21	2009-04-14	Asml Netherlands B.V.	Imprint lithography
US7500431B2 (en) *	2006-01-12	2009-03-10	Tsai-Wei Wu	System, method, and apparatus for membrane, pad, and stamper architecture for uniform base layer and nanoimprinting pressure
JP4938365B2 (ja) *	2006-06-26	2012-05-23	パナソニック株式会社	カーボン金型、およびその製造方法
US20080315459A1 (en) *	2007-06-21	2008-12-25	3M Innovative Properties Company	Articles and methods for replication of microstructures and nanofeatures
US20090114618A1 (en) *	2007-06-21	2009-05-07	3M Innovative Properties Company	Method of making hierarchical articles
US20090041986A1 (en) *	2007-06-21	2009-02-12	3M Innovative Properties Company	Method of making hierarchical articles
EP2212742B1 (en) *	2007-11-21	2014-07-02	Molecular Imprints, Inc.	Porous template and imprinting stack for nano-imprint lithography
US20090159936A1 (en) *	2007-12-20	2009-06-25	Uday Shah	Device with asymmetric spacers
JP2010009729A (ja) *	2008-06-30	2010-01-14	Toshiba Corp	インプリント用スタンパ、インプリント用スタンパの製造方法、磁気記録媒体、磁気記録媒体の製造方法及び磁気ディスク装置
EP2329319B1 (de) *	2008-08-27	2013-07-17	Amo Gmbh	Verbessertes nanoimprint-verfahren
US8145457B2 (en) *	2008-09-22	2012-03-27	Massachusetts Institute Of Technology	Method and apparatus for modeling deformation of a deformable body embossed with a stamp
US20100104852A1 (en) *	2008-10-23	2010-04-29	Molecular Imprints, Inc.	Fabrication of High-Throughput Nano-Imprint Lithography Templates
CN102245314B (zh) *	2008-11-11	2014-11-19	佛罗里达大学研究基金会有限公司	图案化表面的方法以及包含该表面的制品
US9268215B2 (en)	2009-10-02	2016-02-23	Danmarks Tekniske Universitet	Injection molding tools with micro/nano-meter pattern
US8585954B2 (en) *	2009-11-10	2013-11-19	Massachusetts Institute Of Technology	Method and apparatus for embossing a deformable body
FR2955520B1 (fr) *	2010-01-28	2012-08-31	Commissariat Energie Atomique	Moule pour la lithographie par nano-impression et procedes de realisation
JP5760714B2 (ja) *	2011-06-03	2015-08-12	住友電気工業株式会社	ナノインプリント用モールド
US9937655B2 (en) *	2011-06-15	2018-04-10	University Of Florida Research Foundation, Inc.	Method of manufacturing catheter for antimicrobial control
RU2476917C1 (ru) *	2011-08-12	2013-02-27	Открытое акционерное общество "НИИ молекулярной электроники и завод "Микрон"	Способ изготовления штампа для наноимпринт литографии
JP5328869B2 (ja) *	2011-10-21	2013-10-30	東芝機械株式会社	転写用の型の製造方法
US9149958B2 (en) *	2011-11-14	2015-10-06	Massachusetts Institute Of Technology	Stamp for microcontact printing
WO2014070444A1 (en) *	2012-10-29	2014-05-08	Northwestern University	Heat actuated and projected lithography systems and methods
TWI665078B (zh)	2013-07-22	2019-07-11	皇家飛利浦有限公司	製造圖案化印模以圖案化輪廓表面之方法、供在壓印微影製程中使用之圖案化印模、壓印微影方法、包括圖案化輪廓表面之物件及圖案化印模用於壓印微影之用法
EP3591470A1 (de) *	2014-04-22	2020-01-08	EV Group E. Thallner GmbH	Verfahren und vorrichtung zum prägen einer nanostruktur
CN107077065B (zh)	2014-09-22	2020-10-30	皇家飞利浦有限公司	传递方法和装置以及计算机程序产品
US9704821B2 (en) *	2015-08-11	2017-07-11	X-Celeprint Limited	Stamp with structured posts
CN113329855A (zh) *	2019-01-24	2021-08-31	尼尔技术有限责任公司	用于液体处理的具有自清洁性的部件
GB2612986B (en) *	2021-11-18	2024-07-31	Rockley Photonics Ltd	Stamp for micro-transfer printing

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE69524247T2 (de) *	1995-08-04	2002-08-08	International Business Machines Corp., Armonk	Stempel für lithographie-verfahren
US6482742B1 (en) *	2000-07-18	2002-11-19	Stephen Y. Chou	Fluid pressure imprint lithography
US6365059B1 (en) *	2000-04-28	2002-04-02	Alexander Pechenik	Method for making a nano-stamp and for forming, with the stamp, nano-size elements on a substrate
SE516414C2 (sv) *	2000-05-24	2002-01-15	Obducat Ab	Metod vid tillverkning av en mall, samt mallen tillverkad därav
US20030017424A1 (en) *	2001-07-18	2003-01-23	Miri Park	Method and apparatus for fabricating complex grating structures
US20030071016A1 (en) *	2001-10-11	2003-04-17	Wu-Sheng Shih	Patterned structure reproduction using nonsticking mold
US6743368B2 (en) *	2002-01-31	2004-06-01	Hewlett-Packard Development Company, L.P.	Nano-size imprinting stamp using spacer technique
JP3821069B2 (ja) *	2002-08-01	2006-09-13	株式会社日立製作所	転写パターンによる構造体の形成方法
US6916511B2 (en) *	2002-10-24	2005-07-12	Hewlett-Packard Development Company, L.P.	Method of hardening a nano-imprinting stamp
KR100585951B1 (ko) *	2004-02-18	2006-06-01	한국기계연구원	조합/분리형 독립구동이 가능한 복수 개의 모듈을 갖는 임프린팅 장치

2005
- 2005-09-07 JP JP2007530583A patent/JP4733134B2/ja not_active Expired - Fee Related
- 2005-09-07 AU AU2005282060A patent/AU2005282060A1/en not_active Abandoned
- 2005-09-07 EP EP05777919A patent/EP1789848B1/en active Active
- 2005-09-07 WO PCT/DK2005/000570 patent/WO2006026993A1/en active Application Filing
- 2005-09-07 US US11/574,645 patent/US8075298B2/en not_active Expired - Fee Related
- 2005-09-07 CA CA002579603A patent/CA2579603A1/en not_active Abandoned
- 2005-09-07 CN CN2005800300768A patent/CN101036086B/zh not_active Expired - Fee Related
- 2005-09-07 DK DK05777919.1T patent/DK1789848T3/da active
2007
- 2007-03-30 ZA ZA200702713A patent/ZA200702713B/xx unknown
- 2007-04-02 NO NO20071731A patent/NO20071731L/no not_active Application Discontinuation

Also Published As

Publication number	Publication date
CA2579603A1 (en)	2006-03-16
JP4733134B2 (ja)	2011-07-27
EP1789848A1 (en)	2007-05-30
US8075298B2 (en)	2011-12-13
US20080000375A1 (en)	2008-01-03
CN101036086A (zh)	2007-09-12
NO20071731L (no)	2007-04-02
WO2006026993A1 (en)	2006-03-16
EP1789848B1 (en)	2010-06-30
AU2005282060A1 (en)	2006-03-16
WO2006026993A9 (en)	2006-09-21
CN101036086B (zh)	2011-01-19
DK1789848T3 (da)	2010-10-25
JP2008512274A (ja)	2008-04-24

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