WO2024228322A1 - Semiconductor device - Google Patents
Semiconductor device Download PDFInfo
- Publication number
- WO2024228322A1 WO2024228322A1 PCT/JP2024/014632 JP2024014632W WO2024228322A1 WO 2024228322 A1 WO2024228322 A1 WO 2024228322A1 JP 2024014632 W JP2024014632 W JP 2024014632W WO 2024228322 A1 WO2024228322 A1 WO 2024228322A1
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- WO
- WIPO (PCT)
- Prior art keywords
- island
- semiconductor device
- extension
- thickness direction
- semiconductor element
- Prior art date
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 276
- 238000007789 sealing Methods 0.000 claims abstract description 69
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- 239000002184 metal Substances 0.000 description 7
- 239000010949 copper Substances 0.000 description 5
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
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- 229910002601 GaN Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
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Definitions
- This disclosure relates to a semiconductor device.
- Patent Document 1 discloses an example of a conventional semiconductor device.
- the semiconductor device described in Patent Document 1 comprises a semiconductor element, leads, and a resin package.
- the semiconductor element is, for example, a MOSFET (Metal Oxide Semiconductor Field Effect Transistor) chip.
- MOSFET Metal Oxide Semiconductor Field Effect Transistor
- the semiconductor element is joined to the leads.
- the leads carry the semiconductor element and are electrically connected to the semiconductor element.
- the resin package covers a portion of the leads and the semiconductor element.
- Semiconductor devices are used in a variety of applications, including automobiles such as electric or hybrid automobiles, industrial equipment, and home appliances, and depending on the application, the semiconductor element may be required to have, for example, high output. Increasing the output of such semiconductor elements may result in the semiconductor element's size in plan view becoming larger.
- An object of the present disclosure is to provide a semiconductor device that is an improvement over conventional semiconductor devices.
- an object of the present disclosure is to provide a semiconductor device that is favorable for increasing the planar size of the semiconductor element.
- a semiconductor device based on a first aspect of the present disclosure includes a semiconductor element, an island on which the semiconductor element is mounted, at least one extension portion extending from the periphery of the island when viewed in the thickness direction of the island, and a sealing portion covering the semiconductor element.
- the at least one extension portion has an extension main surface facing one side in the thickness direction, an extension back surface facing the opposite side to the extension main surface in the thickness direction, and an extension side surface disposed between the extension main surface and the extension back surface in the thickness direction. The extension side surface is covered by the sealing portion.
- the above configuration makes it possible to increase the planar size of the semiconductor element in the semiconductor device.
- FIG. 1 is a perspective view showing a semiconductor device according to a first embodiment.
- FIG. 2 is a perspective view showing the semiconductor device according to the first embodiment, as viewed from the bottom side.
- FIG. 3 is a plan view showing the semiconductor device according to the first embodiment.
- FIG. 4 is a plan view of FIG. 3 in which the sealing portion is shown by imaginary lines.
- FIG. 5 is an enlarged view of a main portion of FIG. 4, in which the sealing portion and a plurality of connecting members are omitted and the semiconductor element and the conductive bonding material are shown by imaginary lines.
- FIG. 6 is a front view showing the semiconductor device according to the first embodiment.
- FIG. 7 is a bottom view showing the semiconductor device according to the first embodiment.
- FIG. 8 is a right side view showing the semiconductor device according to the first embodiment.
- FIG. 9 is a cross-sectional view taken along line IX-IX in FIG.
- FIG. 10 is a partially enlarged cross-sectional view of a part of FIG.
- FIG. 11 is a partially enlarged cross-sectional view of a part of FIG.
- FIG. 12 is a cross-sectional view taken along line XII-XII in FIG.
- FIG. 13 is a cross-sectional view taken along line XIII-XIII in FIG.
- FIG. 14 is a cross-sectional view taken along line XIV-XIV in FIG. 4, with a number of connecting members omitted.
- FIG. 15 is a schematic diagram showing a vehicle including the semiconductor device according to the first embodiment.
- FIG. 15 is a schematic diagram showing a vehicle including the semiconductor device according to the first embodiment.
- FIG. 16 is a plan view showing a process for manufacturing the semiconductor device according to the first embodiment.
- FIG. 17 is a plan view showing a semiconductor device according to a first modification of the first embodiment.
- FIG. 18 is an enlarged view of a main part of a semiconductor device according to a second modification of the first embodiment, and corresponds to FIG.
- FIG. 19 is an enlarged view of a main part of a semiconductor device according to a third modification of the first embodiment, and corresponds to FIG.
- FIG. 20 is a plan view showing the semiconductor device according to the second embodiment, in which the sealing portion is shown by imaginary lines.
- FIG. 21 is a cross-sectional view showing the semiconductor device according to the second embodiment, taken along line XXI-XXI in FIG.
- FIG. 22 is a plan view showing a semiconductor device according to the third embodiment, in which a sealing portion is shown by an imaginary line.
- an object A is formed on an object B
- an object A is formed on (an object B)
- an object A is formed directly on an object B
- an object A is formed on an object B with another object interposed between the object A and the object B” unless otherwise specified.
- an object A is disposed on an object B” and “an object A is disposed on (an object B)” include “an object A is disposed directly on an object B” and “an object A is disposed on (an object B) with another object interposed between the object A and the object B” unless otherwise specified.
- an object A is located on (an object B)
- an object A is in contact with an object B and is located on (an object B)” and “an object A is located on (an object B) with another object interposed between the object A and the object B".
- an object A overlaps an object B includes “an object A overlaps the entirety of an object B” and “an object A overlaps a part of an object B” unless otherwise specified.
- An object A (its material) contains a certain material C includes “an object A (its material) is made of a certain material C” and "an object A (its material) mainly consists of a certain material C.”
- FIGS 1 to 4 show a semiconductor device A10 according to a first embodiment.
- the semiconductor device A10 comprises a semiconductor element 1, a conductive bonding material 19, a sealing portion 2, a plurality of leads 3, 4, 5, and a plurality of connecting members 61, 62.
- the semiconductor device A10 is a lead-through type TO (Transistor Outline) package.
- the package structure of the semiconductor device A10 is not limited to a TO package.
- the thickness direction z corresponds to the thickness direction of the semiconductor device A10.
- Planar view refers to the view in the thickness direction z.
- the z1 side of the thickness direction z is sometimes referred to as the bottom, and the z2 side of the thickness direction z is sometimes referred to as the top.
- Terms such as “top,” “bottom,” “upper,” “lower,” “top surface,” and “bottom surface” indicate the relative positional relationship of each component, etc. in the thickness direction z, and are not necessarily terms that define the relationship with the direction of gravity.
- the semiconductor element 1 is the functional core of the semiconductor device A10.
- the semiconductor element 1 is mounted on the lead 3.
- the semiconductor element 1 is, for example, a MOSFET (Metal-Oxide-Semiconductor Field-Effect Transistor).
- the semiconductor element 1 may be other transistors such as a bipolar transistor and an IGBT (Insulated Gate Bipolar Transistor), or may be a diode or an IC (Integrated Circuit) instead of a transistor.
- the semiconductor element 1 includes, for example, silicon (Si) or silicon carbide (SiC), but may also include other semiconductor materials (such as gallium nitride and diamond).
- the semiconductor element 1 has an element principal surface 10a and an element rear surface 10b.
- the element principal surface 10a and the element rear surface 10b are spaced apart from each other in the thickness direction z.
- the element principal surface 10a faces the z2 side in the thickness direction z (upward in the thickness direction z), and the element rear surface 10b faces the z1 side in the thickness direction z (downward in the thickness direction z).
- the element rear surface 10b faces the lead 3.
- the thickness of the semiconductor element 1 (dimension in the thickness direction z) is not limited in any way, but is, for example, 20 ⁇ m or more and 500 ⁇ m or less.
- the thickness of the semiconductor element 1 corresponds to the distance between the element principal surface 10a and the element rear surface 10b along the thickness direction z.
- the semiconductor element 1 has a first electrode 11, a second electrode 12, and a third electrode 13.
- the first electrode 11 is disposed on the back surface 10b of the element.
- the second electrode 12 and the third electrode 13 are each disposed on the main surface 10a of the element.
- the first electrode 11 and the second electrode 12 are switched between a conductive state and a cut-off state by a drive signal input to the third electrode 13.
- the semiconductor element 1 is a MOSFET
- the first electrode 11 is, for example, a drain electrode
- the second electrode 12 is, for example, a source electrode
- the third electrode 13 is, for example, a gate electrode.
- the conductive bonding material 19 bonds the semiconductor element 1. As shown in Figures 9 to 14, the conductive bonding material 19 is interposed between the semiconductor element 1 and the lead 3 (island 31 described below) and electrically bonds them together. In this embodiment, the element back surface 10b of the semiconductor element 1 faces the lead 3 (island 31 described below), so the conductive bonding material 19 electrically connects the first electrode 11 of the semiconductor element 1 to the lead 3 (island 31 described below).
- the conductive bonding material 19 is, for example, solder. Unlike this example, the conductive bonding material 19 may be a metal paste (for example, silver paste) or a sintered metal (for example, sintered silver).
- the sealing portion 2 covers the semiconductor element 1.
- the sealing portion 2 covers the conductive bonding material 19, portions of each of the multiple leads 3, 4, and 5, and the multiple connection members 61 and 62.
- the sealing portion 2 contains an electrically insulating resin material.
- the resin material is not limited to any particular material, but is, for example, epoxy resin.
- the method of forming the sealing portion 2 is not limited to any particular material, but is, for example, mold molding (insert molding).
- the sealing portion 2 has a resin main surface 21, a resin back surface 22, multiple resin side surfaces 23 and 24, and multiple recesses 25 and 26.
- the resin main surface 21 and the resin back surface 22 are spaced apart from each other in the thickness direction z.
- the resin main surface 21 faces the z2 side of the thickness direction z (upward in the thickness direction z), and the resin back surface 22 faces the z1 side of the thickness direction z (downward in the thickness direction z).
- the resin main surface 21 faces the same direction as the element main surface 10a in the thickness direction z, and the resin back surface 22 faces the same direction as the element back surface 10b in the thickness direction z.
- the thickness of the sealing portion 2 (dimension in the thickness direction z) is not limited in any way, but is, for example, 250 ⁇ m or more and 7 mm or less.
- the thickness of the sealing portion 2 corresponds to the distance between the resin main surface 21 and the resin back surface 22 in the thickness direction z.
- the pair of resin side surfaces 23 are spaced apart from each other in the first direction y and face opposite directions.
- the pair of resin side surfaces 23 are connected to the resin main surface 21 and the resin back surface 22.
- each of the multiple leads 3 to 5 protrudes from one of the pair of resin side surfaces 23 (the resin side surface 23 on the y1 side in the first direction y).
- the pair of resin side surfaces 24 are spaced apart from each other in the second direction x and face opposite directions.
- the pair of resin side surfaces 24 are connected to the resin main surface 21 and the resin back surface 22.
- each of the multiple recesses 25 is formed on one of the pair of resin side surfaces 23 (the resin side surface 23 on the y1 side in the first direction y). Each of the multiple recesses 25 is recessed from the resin side surface 23.
- the multiple recesses 25 include one formed between the two leads 3, 4 and one formed between the two leads 3, 5 in the second direction x.
- the multiple recesses 25 can increase the creepage distance along the resin side surface 23 for two adjacent leads out of the multiple leads 3 to 5.
- the sealing portion 2 may not include any of the multiple recesses 25.
- the multiple recesses 26 are recessed from the resin main surface 21 in the thickness direction z, and each individually connects from the resin side surface 23 on the y2 side of the first direction y to a pair of resin side surfaces 24.
- a portion of the lead 3 (an extension portion 34 and a portion of the island 31, which will be described later) is exposed from the multiple recesses 26.
- the sealing portion 2 may not include any of the multiple recesses 26.
- the multiple leads 3-5 form a conductive path between the semiconductor element 1 and a circuit board (not shown) on which the semiconductor device A10 is mounted.
- the multiple leads 3-5 are formed, for example, from the same lead frame.
- the lead frame is copper (Cu) or a copper alloy. Therefore, the composition of each of the multiple leads 3-5 includes copper.
- Each of the multiple leads 3-5 (lead frame) may include a metal other than copper.
- the multiple leads 3-5 are spaced apart from each other.
- Each of the multiple leads 3-5 protrudes from one of a pair of resin side surfaces 23 (the resin side surface 23 on the y1 side in the first direction y) as shown in Figures 3, 4, 6, and 7.
- the lead 3 has the semiconductor element 1 mounted thereon and is electrically connected to the first electrode 11 of the semiconductor element 1. As shown in Figures 4 and 5, the lead 3 includes an island 31, a terminal portion 32, a relay portion 33, and two extension portions 34. In the illustrated example, the lead 3 includes two extension portions 34, but may include three or more extension portions 34. In the lead 3, the island 31, the terminal portion 32, the relay portion 33, and the two extension portions 34 are integrally formed.
- the semiconductor element 1 is mounted on the island 31.
- the island 31 is, for example, rectangular in plan view. Therefore, the periphery 31c of the island 31 is rectangular in plan view. For ease of understanding, the periphery 31c is shown by a thick dashed line in FIG. 5.
- the island 31 includes a base 311 and an outer periphery 312.
- the base 311 overlaps the semiconductor element 1 in a plan view.
- the base 311 has a rectangular shape in a plan view.
- the thickness t311 of the base 311 is not limited in any way, but is, for example, 100 ⁇ m or more and 5 mm or less.
- the outer peripheral portion 312 is disposed around the base 311 in a plan view and surrounds the base 311.
- the outer peripheral portion 312 is rectangular annular in a plan view.
- the outer peripheral portion 312 does not overlap the semiconductor element 1 in a plan view. Unlike this example, a portion of the semiconductor element 1 may overlap the outer peripheral portion 312 in a plan view.
- the outer peripheral portion 312 includes a thin-walled portion 313.
- the thin portion 313 is covered by the sealing portion 2.
- the thin portion 313 is thinner than the base portion 311 and the outer peripheral portion 312 other than the thin portion 313. Therefore, the thickness t313 (dimension in the thickness direction z) of the thin portion 313 is smaller than the thickness t311 (dimension in the thickness direction z) of the base portion 311.
- the thickness t313 of the thin portion 313 is, for example, 15% to 20% of the thickness t311 of the base portion 311.
- the thickness t313 of the thin portion 313 is, for example, 100 ⁇ m to 4.9 mm. As shown in FIGS.
- the thin portion 313 includes, for example, a portion extending along the edge of the outer peripheral portion 312 on the y1 side in the first direction y, and a pair of portions connected to both ends of the portion in the second direction x and extending along the edge in the second direction x.
- the thin-walled portion 313 may be formed only on either one of the edges of the outer peripheral portion 312 in the first direction y or the edges of the outer peripheral portion 312 in the second direction x, or may be formed around the entire circumference of the outer peripheral portion 312.
- the thin-walled portion 313 is not limited to being continuous (see Figures 5 and 7), and may be divided into multiple portions. It is preferable that the thin-walled portion 313 does not overlap the semiconductor element 1 in a plan view, but it may overlap.
- the thin portion 313 includes a protrusion 313a.
- the protrusion 313a protrudes outward in a plan view.
- the protrusion 313a is formed on the z1 side of the thin portion 313 in the thickness direction z.
- the thin portion 313 is formed by crushing a part of the outer periphery 312, and the protrusion 313a is a part of this crushed part that protrudes outward.
- the thin portion 313 may not include the protrusion 313a.
- the island 31 has an island main surface 31a and an island back surface 31b.
- the island main surface 31a and the island back surface 31b are spaced apart from each other in the thickness direction z.
- the island main surface 31a faces the z2 side (upward in the thickness direction z) in the thickness direction z
- the island back surface 31b faces the z1 side (downward in the thickness direction z) in the thickness direction z.
- the island main surface 31a corresponds to the upper surface of the base 311 (surface facing the z2 side in the thickness direction z) and the upper surface of the outer peripheral portion 312 (surface facing the z2 side in the thickness direction z).
- the island back surface 31b corresponds to the lower surface of the base 311 (surface facing the z2 side in the thickness direction z) and the lower surface of the outer peripheral portion 312 excluding the thin portion 313 (surface facing the z1 side in the thickness direction z).
- the semiconductor element 1 is mounted on the island main surface 31a.
- the island back surface 31b is exposed from the resin back surface 22.
- the island back surface 31b is flush with the resin back surface 22.
- the thickness t311 of the base 311 corresponds to the distance along the thickness direction z from the island main surface 31a to the island back surface 31b.
- the terminal portion 32 is exposed from the sealing portion 2.
- the terminal portion 32 is a terminal of the semiconductor device A10, and is joined to the circuit board when the semiconductor device A10 is mounted on the circuit board.
- the terminal portion 32 is a portion of the lead 3 that protrudes from the resin side surface 23 of the sealing portion 2.
- the terminal portion 32 is separated from the island 31.
- the terminal portion 32 is located on the y1 side of the island 31 in the first direction y.
- the terminal portion 32 is located on the z2 side of the island 31 in the thickness direction z.
- the terminal portion 32 is an example of a "first terminal portion.”
- the relay portion 33 is connected to the island 31 and the terminal portion 32.
- the relay portion 33 is interposed between the island 31 and the terminal portion 32.
- the relay portion 33 is covered by the sealing portion 2.
- a part of the relay portion 33 is bent. This connects the island 31 and the terminal portion 32 that are arranged at different positions in the thickness direction z.
- the relay portion 33 is an example of a "first relay portion.”
- the lead 3 does not need to include the relay portion 33.
- the island 31 and the terminal portion 32 are electrically connected by a conductive member (e.g., a metal plate or a bonding wire).
- the two extension portions 34 each extend outward from the periphery 31c of the island 31.
- the two extension portions 34 each extend from the edge of the periphery 31c of the island 31 on the y2 side in the first direction y to the y2 side in the first direction y.
- the two extension portions 34 are each connected to the island 31 and formed integrally with it.
- the two extension portions 34 are each rectangular in a planar view, but the planar view shape of each extension portion 34 is not limited in any way.
- the two extension portions 34 are spaced apart from each other.
- the two extension portions 34 are arranged along the second direction x.
- the three or more extension portions 34 are arranged spaced apart from each other along the second direction x.
- the two extensions 34 are connected to a pair of corners 31d on the edge 31c of the island 31 that are farther from the terminal portion 32 in the first direction y.
- the two extensions 34 do not overlap the semiconductor element 1 and the conductive bonding material 19 in a plan view.
- each of the two extension portions 34 has an extension main surface 34a, an extension back surface 34b, and multiple extension side surfaces 34c and 34d.
- the extended main surface 34a and the extended back surface 34b are spaced apart from each other in the thickness direction z.
- the extended main surface 34a and the extended back surface 34b face opposite each other in the thickness direction z.
- the extended main surface 34a faces the z2 side in the thickness direction z (upward in the thickness direction z), and the extended back surface 34b faces the z1 side in the thickness direction z (downward in the thickness direction z).
- the extended main surface 34a is flush with the island main surface 31a.
- the extended back surface 34b is located on the z2 side in the thickness direction z of the island back surface 31b.
- a portion of the extended main surface 34a is exposed from the sealing portion 2 due to the recess 26, but the entire extended main surface 34a may be covered by the sealing portion 2.
- the extended back surface 34b is covered by the sealing portion 2.
- Each of the multiple extending side surfaces 34c, 34d is located between the extending main surface 34a and the extending back surface 34b in the thickness direction z. Each of the multiple extending side surfaces 34c, 34d extends from the extending main surface 34a to the z1 side in the thickness direction z.
- the extending side surface 34c faces the extending direction in which the extending portion 34 extends relative to the island 31 (in this embodiment, the y2 side of the first direction y).
- the extending side surface 34c is sandwiched between a pair of extending side surfaces 34d in the second direction x.
- the pair of extending side surfaces 34d are individually connected to both end edges of the extending side surface 34c in the thickness direction and in a direction perpendicular to the aforementioned extending direction.
- the pair of extending side surfaces 34d are spaced apart from each other in the second direction x and face opposite sides to each other in the second direction x.
- the pair of extending side surfaces 34d are each connected to the extending main surface 34a and the extending back surface 34b.
- Each of the multiple extending side surfaces 34c, 34d is covered with a sealing portion 2.
- the thickness t34 (dimension in thickness direction z) of each extension portion 34 is smaller than the thickness of the island 31 (thickness t311 of the base 311). As shown in FIG. 10, the thickness t34 of each extension portion 34 corresponds to the distance along the thickness direction z from the extension main surface 34a to the extension back surface 34b. The thickness t34 of each extension portion 34 is smaller than the thickness t313 of the thin portion 313.
- the thickness t34 of each extension portion 34 is not limited in any way, but is 15% or more and 75% or less of the thickness t311 of the base 311. In one example, the thickness t34 of each extension portion 34 is 50 ⁇ m or more and 4.8 mm or less.
- each of the two extension portions 34 includes a protrusion 341.
- the protrusion 341 described below is common to each extension portion 34 unless otherwise specified.
- the protrusion 341 protrudes outward from the island 31 in a plan view.
- the protrusion 341 protrudes from the extending side surface 34c of the corresponding extending portion 34 toward the y2 side in the first direction y.
- the protrusion 341 is formed at the end of the extending side surface 34c of the corresponding extending portion 34 on the z1 side in the thickness direction z.
- each extending portion 34 initially has the same thickness as the base 311. Then, by crushing each extending portion 34 having the same thickness as the base 311, each extending portion 34 becomes thinner than the base 311. The protrusion 341 is a part of this crushed portion protruding outward.
- each extending portion 34 may not include the protrusion 341.
- the protrusion 341 may be formed on the end of the extension side surface 34c of the corresponding extension portion 34 on the z1 side in the thickness direction z as well as on the z2 side in the thickness direction z.
- the width w34 of each extension portion 34 shown in FIG. 5 may be the same as the width w313 of the thin portion 313 shown in FIG. 5, or may be different. In this embodiment, the width w34 of each extension portion 34 is the dimension of the extension main surface 34a in the first direction y.
- the width w313 of the thin portion 313 and the width w34 of each extension portion 34 are not limited in any way, but in one example, the width w34 of each extension portion 34 is 100 ⁇ m or more and 1.5 mm or less, and in one example, the width w313 of the thin portion 313 is 100 ⁇ m or more and 1 mm or less.
- the inventor's research has revealed the following.
- increasing the width w313 of the thin portion 313 reduces the area of the island back surface 31b, which causes a decrease in heat dissipation.
- Increasing the width w313 of the thin portion 313 reduces the planar size of the base 311, which inhibits the expansion of the planar size of the semiconductor element 1. Therefore, there is a limit to how large the width w313 of the thin portion 313 can be.
- the width w34 of each extension 34 is increased, the area of the island back surface 31b does not decrease, so the heat dissipation performance is hardly reduced. Even if the width w34 of each extension 34 is increased, the planar size of the base 311 does not decrease, so there is no effect on the enlargement of the planar size of the semiconductor element 1.
- the width w34 of each extension 34 it is possible to reduce the stress applied to each extension 34 while suppressing the deterioration of heat dissipation.
- the width w34 of each extension 34 is increased, the product size (dimension in the first direction y) of the semiconductor device A10 increases. Therefore, the lower limit of the width w34 of each extension 34 is set in consideration of the thermal stress applied to each extension 34, and the upper limit is set according to the specifications of the semiconductor device A10 (dimension in the first direction y).
- the lead 4 is electrically connected to the second electrode 12 of the semiconductor element 1 via the connection member 61. As shown in FIG. 4, the lead 4 includes a pad portion 41, a terminal portion 42, and a relay portion 43. In the lead 4, the pad portion 41, the terminal portion 42, and the relay portion 43 are integrally formed.
- the pad portion 41 is covered by the sealing portion 2.
- a plurality of connection members 61 are each bonded to the pad portion 41.
- Each connection member 61 is bonded to the upper surface of the pad portion 41 (the surface facing the z2 side in the thickness direction z).
- the pad portion 41 is located on the z2 side in the thickness direction z of the island 31. In a plan view, the pad portion 41 is disposed on the y1 side of the island 31 in the first direction y.
- the terminal portion 42 is exposed from the sealing portion 2.
- the terminal portion 42 is a terminal of the semiconductor device A10, and is joined to the circuit board when the semiconductor device A10 is mounted on the circuit board.
- the terminal portion 42 is spaced apart from the pad portion 41.
- the terminal portion 42 is located on the y1 side of the pad portion 41 in the first direction y.
- the terminal portion 42 is disposed at the same position as the pad portion 41.
- the terminal portion 42 is located on the x2 side of the terminal portion 32 in the second direction x.
- the terminal portion 42 is disposed at the same position as the terminal portion 32.
- the terminal portion 42 is an example of a "second terminal portion.”
- the relay portion 43 is connected to the pad portion 41 and the terminal portion 42.
- the relay portion 43 is interposed between the pad portion 41 and the terminal portion 42.
- the relay portion 43 is covered by the sealing portion 2.
- a through hole is formed in the relay portion 43, but unlike this example, the relay portion 43 does not necessarily have to have a through hole. However, in a configuration in which a through hole is formed, the sealing portion 2 can move through the through hole when the sealing portion 2 is formed. By filling the through hole with the sealing portion 2, it is possible to prevent the lead 4 from coming out of the sealing portion 2.
- the relay portion 43 is an example of a "second relay portion".
- the lead 5 is electrically connected to the third electrode 13 of the semiconductor element 1 via the connection member 62. As shown in FIG. 4, the lead 5 includes a pad portion 51, a terminal portion 52, and a relay portion 53. In the lead 5, the pad portion 51, the terminal portion 52, and the relay portion 53 are integrally formed.
- the pad portion 51 is covered by the sealing portion 2.
- a connection member 62 is bonded to the pad portion 51.
- the connection member 62 is bonded to the upper surface of the pad portion 51 (the surface facing the z2 side in the thickness direction z).
- the pad portion 51 is located on the z2 side in the thickness direction z of the island 31. In a plan view, the pad portion 51 is disposed on the y1 side of the island 31 in the first direction y.
- the terminal portion 52 is exposed from the sealing portion 2.
- the terminal portion 52 is a terminal of the semiconductor device A10, and is joined to the circuit board when the semiconductor device A10 is mounted on the circuit board.
- the terminal portion 52 is a portion of the lead 5 that protrudes from the resin side surface 23 of the sealing portion 2.
- the terminal portion 52 is separated from the pad portion 51.
- the terminal portion 52 is located on the y1 side of the pad portion 51 in the first direction y. In the thickness direction z, the terminal portion 52 is arranged at the same position as the pad portion 51.
- the terminal portion 52 is arranged on the x1 side of the second direction x with respect to the terminal portion 32.
- the terminal portion 32 is arranged between the terminal portion 42 and the terminal portion 52.
- the arrangement order of the terminal portions 32, 42, and 52 in the second direction x is not limited to the illustrated example.
- the terminal portion 52 is arranged at the same position as the terminal portion 32. Therefore, in the thickness direction z, terminal portion 32, terminal portion 42, and terminal portion 52 are arranged at the same position as each other.
- the relay portion 53 is connected to the pad portion 51 and the terminal portion 52.
- the relay portion 53 is interposed between the pad portion 51 and the terminal portion 52.
- the relay portion 53 is covered by the sealing portion 2.
- a through hole is formed in the relay portion 53, but unlike this example, the relay portion 53 does not necessarily have to have a through hole.
- the sealing portion 2 can move through the through hole when the sealing portion 2 is formed. By filling the through hole with the sealing portion 2, it is possible to prevent the lead 5 from coming out of the sealing portion 2.
- the multiple connection members 61, 62 provide electrical conductivity between two parts spaced apart from each other.
- each of the multiple connection members 61, 62 is a bonding wire.
- the multiple connection members 61, 62 include a metal, and the metal is not limited to, but may be, for example, gold, aluminum, copper, silver, or an alloy containing these.
- Each of the multiple connection members 61, 62 may be a metal plate material instead of a bonding wire.
- connection members 61 are joined to the second electrode 12 and the pad portion 41, providing electrical continuity between them.
- the second electrode 12 is electrically connected to the lead 4 via the multiple connection members 61.
- the semiconductor device A10 has four connection members 61, but the number of connection members 61 is not limited in any way. It can be changed as appropriate depending on factors such as the magnitude of the current to be conducted between the second electrode 12 and the lead 4.
- connection member 62 is joined to the third electrode 13 and the pad portion 51, providing electrical continuity between them. Therefore, the third electrode 13 is electrically connected to the lead 5 via the connection member 62.
- the vehicle V is, for example, an electric vehicle (EV).
- EV electric vehicle
- the vehicle V includes an on-board charger 91, a storage battery 92, and a drive system 93.
- the on-board charger 91 is supplied with power wirelessly from a power supply facility (not shown) installed outdoors. Alternatively, the power supply from the power supply facility to the on-board charger 91 may be wired.
- the on-board charger 91 is configured with a step-up DC-DC converter.
- the semiconductor device A10 is part of the on-board charger 91, and is used, for example, in the DC-DC converter described above.
- the voltage of the power supplied to the on-board charger 91 is stepped up by the converter and then supplied to the storage battery 92.
- the stepped-up voltage is, for example, 600V.
- the drive system 93 drives the vehicle V.
- the drive system 93 has an inverter 931 and a drive source 932.
- the power stored in the storage battery 92 is supplied to the inverter 931.
- the power supplied from the storage battery 92 to the inverter 931 is DC power.
- a step-up DC-DC converter may be further provided between the storage battery 92 and the inverter 931.
- the inverter 931 converts DC power into AC power.
- the inverter 931 is conductive to the drive source 932.
- the drive source 932 has an AC motor and a transmission. When the AC power converted by the inverter 931 is supplied to the drive source 932, the AC motor rotates and the rotation is transmitted to the transmission.
- the transmission appropriately reduces the rotation speed transmitted from the AC motor and then rotates the drive shaft of the vehicle V. This drives the vehicle V.
- the inverter 931 is necessary to output AC power with an appropriate frequency change to correspond to the required rotation speed of the AC motor.
- the functions and effects of the semiconductor device A10 are as follows:
- the semiconductor device A10 includes an island 31 on which a semiconductor element 1 is mounted, and an extension 34 extending from the periphery 31c of the island 31.
- FIG. 16 shows a process in the manufacture of the semiconductor device A10, in which a number of leads 3 to 5 are connected to one another by tie bars 70 to form a single lead frame 7.
- the lead frame 7 is fixed by a clamp member. This is to suppress the swinging of the lead frame 7 due to vibrations that occur when the lead frame 7 is transported, when the semiconductor element 1 is bonded, when the lead frame 7 is bonded to the multiple connection members 61 and 62, and when the sealing portion 2 is formed.
- the clamp member can hold down the region R1 (shown by a dot pattern in FIG. 15).
- the extension 34 makes it possible to secure a location to be fixed by the clamp member, so that the range in which the clamp member interferes with the island 31 can be reduced. This also suppresses interference between the semiconductor element 1 and the clamping member, making it possible for the semiconductor device A10 to increase the planar size of the semiconductor element 1.
- the planar size of the semiconductor element 1 can be made the same (or approximately the same) as the planar size of the island 31.
- the multiple extending side surfaces 34c, 34d of each extending portion 34 are each covered by the sealing portion 2.
- This configuration allows the semiconductor device A10 to have an appearance that is the same (or approximately the same) as a conventional TO package. In other words, the semiconductor device A10 makes it possible to increase the planar size of the semiconductor element 1 without changing the appearance from the conventional one.
- the extended back surface 34b is covered by the sealing portion 2. This configuration makes it possible to prevent the lead 3 from coming out of the sealing portion 2.
- the thickness t34 of each extension portion 34 is smaller than the thickness t311 of the base 311 (corresponding to the thickness of the island 31).
- the extension main surface 34a of each extension portion 34 is flush with the island main surface 31a. In this configuration, even if the island back surface 31b is exposed from the resin back surface 22, the extension back surface 34b of each extension portion 34 is covered by the sealing portion 2. Therefore, the semiconductor device A10 can prevent the island 31 from coming out of the sealing portion 2.
- the outer peripheral portion 312 of the island 31 includes a thin portion 313.
- the thickness t313 of the thin portion 313 is smaller than the thickness t311 of the base portion 311.
- the lower surface of the thin portion 313 (the surface facing the z1 side in the thickness direction z) is covered with the sealing portion 2. This configuration makes it possible to prevent the island 31 from coming out of the sealing portion 2.
- the island back surface 31b is exposed from the sealing portion 2 (resin back surface 22). This configuration can improve the heat dissipation properties for the heat generated by the semiconductor element 1.
- each extension portion 34 does not overlap the semiconductor element 1 in a planar view.
- the semiconductor element 1 does not protrude from the island 31 in a planar view. Therefore, the semiconductor device A10 can suppress a decrease in the conduction area between the first electrode 11 of the semiconductor element 1 and the island 31.
- each extension 34 extends in the first direction y from the edge on the y2 side of the periphery 31c of the island 31.
- each extension 34 region R1 in FIG. 15
- the vicinity of the tie bar 70 region R2 in FIG. 15
- the points pressed by the clamp member can be separated in the first direction y, which is preferable in terms of suppressing oscillation of the lead frame 7.
- the semiconductor device A10 has two extending portions 34 spaced apart from each other. With this configuration, the two extending portions 34 (both of the two regions R1 in FIG. 15) are held down by the clamp member described above, and the vicinity of the tie bar 70 (at least one of the three regions R2 in FIG. 15) is held down, so that the lead frame 7 can be held down and fixed at three points. This can further suppress the swinging of the lead frame 7 during the manufacture of the semiconductor device A10.
- the two extending portions 34 are connected to a pair of corners 31d, which are far from the terminal portion 32 in the first direction y, of the periphery 31c of the island 31 as viewed in the thickness direction z. In this case, the planar area of the three points held down by the clamp member can be increased. This is preferable for fixing the lead frame 7, that is, for suppressing the swinging of the lead frame 7 during the manufacture of the semiconductor device A10.
- FIG. 17 shows a semiconductor device A11 according to a first modified example of the first embodiment.
- the semiconductor device A11 differs from the semiconductor device A10 in the following respect. That is, the semiconductor device A11 differs in that the sealing portion 2 does not include any of the multiple recesses 26.
- the sealing portion 2 does not include any of the multiple recesses 26, so the top surface of the island 31 (island main surface 31a) and the top surfaces of each extension portion 34 (extension main surface 34a) are all covered with the sealing portion 2. Therefore, all of the leads 3 of the semiconductor device A11 are covered with the sealing portion 2 except for the terminal portions 32, so unintended short circuits can be suppressed.
- the semiconductor device A11 Similar to the semiconductor device A10, the semiconductor device A11 includes an island 31 on which a semiconductor element 1 is mounted, and an extension portion 34 extending from a periphery 31c of the island 31. Therefore, similar to the semiconductor device A10, the semiconductor device A11 can suppress interference between the semiconductor element 1 and the clamp member, making it possible to increase the size of the semiconductor element 1 in a plan view. In addition, the semiconductor device A11 has a common configuration with the semiconductor device A10, and thus achieves the same effects as the semiconductor device A10.
- FIG. 18 shows a semiconductor device A12 according to a second modified example of the first embodiment.
- the semiconductor device A12 differs from the semiconductor device A10 in the following respect: the island 31 includes a groove portion 314.
- the groove 314 is recessed from the island main surface 31a.
- the groove 314 is, for example, rectangular and annular in plan view. In plan view, the groove 314 is formed along the boundary between the base 311 and the outer periphery 312. In plan view, the groove 314 surrounds the semiconductor element 1 and the conductive bonding material 19. This groove 314 can prevent the conductive bonding material 19 from flowing out. By filling the groove 314 with the sealing portion 2, the adhesion between the sealing portion 2 and the lead 3 is increased.
- the semiconductor device A12 Similar to the semiconductor device A10, the semiconductor device A12 includes an island 31 on which a semiconductor element 1 is mounted, and an extension portion 34 extending from the periphery 31c of the island 31. Therefore, similar to the semiconductor device A10, the semiconductor device A12 can suppress interference between the semiconductor element 1 and the clamp member, making it possible to increase the size of the semiconductor element 1 in a plan view. In addition, the semiconductor device A12 has a common configuration with the semiconductor devices A10 and A11, and thus achieves the same effects as the semiconductor devices A10 and A11.
- FIG. 19 shows a semiconductor device A13 according to a third modified example of the first embodiment.
- the semiconductor device A13 differs from the semiconductor device A10 in the following respect. That is, when viewed in the thickness direction z, the two extension portions 34 are not connected to a pair of corner portions 31d of the periphery 31c of the island 31 that are far from the terminal portion 32 in the first direction y.
- the extension 34 on the x1 side in the second direction x is disposed closer to the x2 side in the second direction x than the semiconductor device A10, and the extension 34 on the x2 side in the second direction x is disposed closer to the x1 side in the second direction x than the semiconductor device A10.
- the semiconductor device A13 Similar to the semiconductor device A10, the semiconductor device A13 includes an island 31 on which a semiconductor element 1 is mounted, and an extension portion 34 extending from the periphery 31c of the island 31. Therefore, similar to the semiconductor device A10, the semiconductor device A13 can suppress interference between the semiconductor element 1 and the clamp member, making it possible to increase the size of the semiconductor element 1 in a plan view. In addition, the semiconductor device A13 has a common configuration with each of the semiconductor devices A10 to A12, and thus achieves the same effects as the semiconductor devices A10 to A12.
- each extension portion 34 is connected to one of a pair of corner portions 31d of the periphery 31c of the island 31.
- FIGS. 20 and 21 show a semiconductor device A20 according to the second embodiment.
- the semiconductor device A20 differs from the semiconductor device A10 in the following respect. That is, two extension portions 34 extend in the second direction x individually from each end edge of the periphery 31c of the island 31 in the second direction x. For ease of understanding, the periphery 31c of the island 31 is shown by a thick dashed line in FIG. 20.
- one of the two extension portions 34 extends from the edge of peripheral edge 31c on the x1 side in the second direction x to the x1 side in the second direction x.
- the other of the two extension portions 34 extends from the edge of peripheral edge 31c on the x2 side in the second direction x to the x2 side in the second direction x.
- the two extension portions 34 of semiconductor device A20 are each connected to a pair of corner portions 31d of peripheral edge 31c of island 31.
- the two extensions 34 may not be connected to a pair of corners 31d of the periphery 31c of the island 31, but may be disposed at the center of each edge of the periphery 31c in the second direction x, or may be connected to a pair of corners of the periphery 31c of the island 31 on opposite sides from the terminal portion 32 in the first direction y.
- each extension 34 extends in the second direction x relative to the island 31, so that the extension side surface 34c of each extension 34 faces in one direction in the second direction x.
- the semiconductor device A20 includes an island 31 on which the semiconductor element 1 is mounted, and an extension portion 34 extending from the periphery 31c of the island 31. Therefore, similar to the semiconductor device A10, the semiconductor device A20 can suppress interference between the semiconductor element 1 and the clamp member, making it possible to increase the size of the semiconductor element 1 in a plan view. In addition, the semiconductor device A20 has a common configuration with each of the semiconductor devices A10 to A13, and thus achieves the same effects as the semiconductor devices A10 to A13.
- each extension portion 34 is not limited to extending from an edge of the periphery 31c of the island 31 in the first direction y, but may extend from an edge in the second direction x. Furthermore, in the semiconductor device of the present disclosure, the multiple extension portions 34 only need to extend from the periphery 31c of the island 31 outward from the island 31, and the arrangement of the multiple extension portions 34 is not limited in any way.
- the multiple extension portions 34 may include a mixture of those extending from an edge of the periphery 31c in the first direction y and those extending from an edge in the second direction x.
- FIG. 22 shows a semiconductor device A30 according to the third embodiment.
- the semiconductor device A30 differs from the semiconductor device A10 in the following respect: the number of extension portions 34 is one.
- the lead 3 of the semiconductor device A30 includes one extension portion 34.
- the periphery 31c of the island 31 is shown by a thick dashed line in FIG. 21.
- the extension 34 extends from the edge of the periphery 31c of the island 31 on the y2 side in the first direction y.
- the extension 34 may extend from the edge of the periphery 31c on the x1 side in the second direction x, or from the edge of the periphery 31c on the x2 side in the second direction x.
- the semiconductor device A30 includes an island 31 on which a semiconductor element 1 is mounted, and an extension portion 34 extending from the periphery 31c of the island 31. Therefore, similar to the semiconductor device A10, the semiconductor device A30 can suppress interference between the semiconductor element 1 and the clamp member, making it possible to increase the size of the semiconductor element 1 in a plan view.
- the semiconductor device A30 has a common configuration with the semiconductor devices A10 to A13, A20, and thus achieves the same effects as the semiconductor devices A10 to A13, A20.
- the number of extension portions 34 may be one or more.
- the semiconductor device according to the present disclosure is not limited to the above-mentioned embodiment.
- the specific configuration of each part of the semiconductor device according to the present disclosure can be freely designed in various ways.
- the semiconductor device according to the present disclosure includes the embodiments described in the following appendix. Appendix 1.
- a semiconductor element an island on which the semiconductor element is mounted; At least one extension portion extending from a periphery of the island when viewed in a thickness direction of the island; a sealing portion for covering the semiconductor element; Equipped with The at least one extension portion has an extension main surface facing one side in the thickness direction, an extension back surface facing the opposite side to the extension main surface in the thickness direction, and an extension side surface arranged between the extension main surface and the extension back surface in the thickness direction, The extending side surface is covered by the sealing portion.
- the island includes a base portion at least a portion of which overlaps with the semiconductor element when viewed in the thickness direction, and an outer periphery portion surrounding the base portion when viewed in the thickness direction, 2.
- the outer periphery includes a thin-walled portion whose dimension in the thickness direction is smaller than the dimension in the thickness direction of the base.
- Appendix 3. The semiconductor device according to claim 2, wherein a dimension in the thickness direction of the at least one extension portion is smaller than a dimension in the thickness direction of the thin portion.
- Appendix 4. the island has an island main surface on which the semiconductor element is mounted, the island main surface facing in the same direction as the extended main surface in the thickness direction; 4.
- the semiconductor device according to claim 1, wherein the island main surface and the extended main surface are flush with each other.
- Appendix 5. 5 The semiconductor device according to claim 4, wherein a dimension of the at least one extension in the thickness direction is smaller than a dimension of the island in the thickness direction.
- Appendix 6 The semiconductor device according to claim 5, wherein the extended back surface is covered by the sealing portion.
- Appendix 7. the island has an island back surface facing a side opposite to the island main surface in the thickness direction, 7.
- the at least one extension portion includes a plurality of extension portions, 8.
- the semiconductor device according to claim 1, wherein the plurality of extension portions are spaced apart from each other.
- Appendix 9. 9.
- the semiconductor device according to claim 1, wherein the at least one extending portion does not overlap the semiconductor element when viewed in the thickness direction.
- Appendix 10. a first terminal portion spaced apart from the island and exposed from the sealing portion; 10.
- the semiconductor device wherein the first terminal portion is electrically connected to the semiconductor element.
- Appendix 11. The semiconductor device according to claim 10, wherein the first terminal portion is located on one side of the island in a first direction perpendicular to the thickness direction when viewed in the thickness direction.
- Appendix 12. The semiconductor device according to claim 11, wherein the at least one extension portion extends from an edge of the island opposite the first terminal portion in the first direction when viewed in the thickness direction.
- Appendix 13 12.
- the semiconductor device wherein the at least one extension portion extends from an edge of the island in a second direction perpendicular to the thickness direction and the first direction when viewed in the thickness direction.
- Appendix 14. The island has a rectangular shape when viewed in the thickness direction, 14.
- the semiconductor device wherein the at least one extension portion is connected to a corner portion of the island that is farthest from the first terminal portion in the first direction when viewed in the thickness direction.
- Appendix 15. a second terminal portion spaced apart from the island and the first terminal portion and exposed from the sealing portion; 15. The semiconductor device according to claim 10, wherein the second terminal is electrically connected to the semiconductor element.
- Appendix 16. A connection member joined to the semiconductor element; A pad portion to which the connection member is joined, 16. The semiconductor device according to claim 15, wherein the second terminal portion is electrically connected to the semiconductor element via the connection member and the pad portion.
- Appendix 17. a first relay portion connected to each of the first terminal portion and the island and integrally formed with each of the first terminal portion and the island; 17.
- the semiconductor device further comprising: a second relay portion connected to each of the second terminal portion and the pad portion and integrally formed with each of the second terminal portion and the pad portion.
- Appendix 18 A driving source; A storage battery that stores power to be supplied to the driving source; an on-board charger that converts power input from an external source and supplies the power to the storage battery; Equipped with 18.
Landscapes
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
Abstract
A semiconductor device (A10) comprises: a semiconductor element (1); an island (31) on which the semiconductor element has been mounted; at least one extension (34) extending from an outer margin of the island as seen in the thickness direction of the island; and a sealing part (2) covering the semiconductor element. The at least one extension comprises an extension principal surface (34a) facing one way in the thickness direction, an extension reverse surface facing the opposite side from the extension principal surface, and an extension side surface (34c, 34d) arranged between the extension principal surface and the extension reverse surface. The extension side surface is covered by the sealing part.
Description
本開示は、半導体装置に関する。
This disclosure relates to a semiconductor device.
従来、ダイオード、トランジスタおよびICなどの半導体素子を樹脂パッケージで覆った半導体装置が知られている。特許文献1には、従来の半導体装置の一例が開示されている。特許文献1に記載の半導体装置は、半導体素子、リードおよび樹脂パッケージを備えている。この半導体装置において、半導体素子は、たとえばMOSFET(Metal Oxide Semiconductor Field Effect Transistor)チップである。半導体素子は、リードに接合される。リードは、半導体素子を搭載するとともに、半導体素子に導通する。樹脂パッケージは、リードの一部および半導体素子を覆っている。
Conventionally, semiconductor devices in which semiconductor elements such as diodes, transistors, and ICs are covered with a resin package are known. Patent Document 1 discloses an example of a conventional semiconductor device. The semiconductor device described in Patent Document 1 comprises a semiconductor element, leads, and a resin package. In this semiconductor device, the semiconductor element is, for example, a MOSFET (Metal Oxide Semiconductor Field Effect Transistor) chip. The semiconductor element is joined to the leads. The leads carry the semiconductor element and are electrically connected to the semiconductor element. The resin package covers a portion of the leads and the semiconductor element.
半導体装置の用途は、電気自動車またはハイブリッド自動車などの自動車、産業機器および家電機器など、様々であり、その用途に応じて、半導体素子には、たとえば高出力化が求められることがある。このような半導体素子の高出力化を図ると、半導体素子の平面視サイズが大きくなることがある。
Semiconductor devices are used in a variety of applications, including automobiles such as electric or hybrid automobiles, industrial equipment, and home appliances, and depending on the application, the semiconductor element may be required to have, for example, high output. Increasing the output of such semiconductor elements may result in the semiconductor element's size in plan view becoming larger.
本開示は、従来より改良が施された半導体装置を提供することを一の課題とする。特に本開示は、上記事情に鑑み、半導体素子の平面視サイズの拡大化を図る上で好ましい半導体装置を提供することを一の課題とする。
An object of the present disclosure is to provide a semiconductor device that is an improvement over conventional semiconductor devices. In particular, in view of the above circumstances, an object of the present disclosure is to provide a semiconductor device that is favorable for increasing the planar size of the semiconductor element.
本開示の第1の側面に基づく半導体装置は、半導体素子と、前記半導体素子が搭載されたアイランドと、前記アイランドの厚さ方向に見て、前記アイランドの周縁から延び出た少なくとも1つの延出部と、前記半導体素子を覆う封止部と、を備える。前記少なくとも1つの延出部は、前記厚さ方向の一方を向く延出主面と、前記厚さ方向において前記延出主面と反対側を向く延出裏面と、前記厚さ方向において前記延出主面と前記延出裏面との間に配置された延出側面と、を有する。前記延出側面は、前記封止部に覆われている。
A semiconductor device based on a first aspect of the present disclosure includes a semiconductor element, an island on which the semiconductor element is mounted, at least one extension portion extending from the periphery of the island when viewed in the thickness direction of the island, and a sealing portion covering the semiconductor element. The at least one extension portion has an extension main surface facing one side in the thickness direction, an extension back surface facing the opposite side to the extension main surface in the thickness direction, and an extension side surface disposed between the extension main surface and the extension back surface in the thickness direction. The extension side surface is covered by the sealing portion.
上記構成によれば、半導体装置において半導体素子の平面視サイズの拡大化を図ることができる。
The above configuration makes it possible to increase the planar size of the semiconductor element in the semiconductor device.
本開示の半導体装置の好ましい実施の形態について、図面を参照して、以下に説明する。以下では、同一あるいは類似の構成要素に、同じ符号を付して、重複する説明を省略する。本開示における「第1」、「第2」、「第3」等の用語は、単にラベルとして用いたものであり、必ずしもそれらの対象物に順列を付することを意図していない。
A preferred embodiment of the semiconductor device of the present disclosure will be described below with reference to the drawings. In the following, identical or similar components will be given the same reference numerals and duplicated descriptions will be omitted. Terms such as "first," "second," and "third" in this disclosure are used merely as labels and are not necessarily intended to assign any order to their objects.
本開示において、「ある物Aがある物Bに形成されている」および「ある物Aがある物B(の)上に形成されている」とは、特段の断りのない限り、「ある物Aがある物Bに直接形成されていること」、および、「ある物Aとある物Bとの間に他の物を介在させつつ、ある物Aがある物Bに形成されていること」を含む。同様に、「ある物Aがある物Bに配置されている」および「ある物Aがある物B(の)上に配置されている」とは、特段の断りのない限り、「ある物Aがある物Bに直接配置されていること」、および、「ある物Aとある物Bとの間に他の物を介在させつつ、ある物Aがある物Bに配置されていること」を含む。同様に、「ある物Aがある物B(の)上に位置している」とは、特段の断りのない限り、「ある物Aがある物Bに接して、ある物Aがある物B(の)上に位置していること」、および、「ある物Aとある物Bとの間に他の物が介在しつつ、ある物Aがある物B(の)上に位置していること」を含む。「ある方向に見てある物Aがある物Bに重なる」とは、特段の断りのない限り、「ある物Aがある物Bのすべてに重なること」、および、「ある物Aがある物Bの一部に重なること」を含む。「ある物A(の材料)がある材料Cを含む」とは、「ある物A(の材料)がある材料Cからなる場合」、および、「ある物A(の材料)の主成分がある材料Cである場合」を含む。
In this disclosure, "an object A is formed on an object B" and "an object A is formed on (an object B)" include "an object A is formed directly on an object B" and "an object A is formed on an object B with another object interposed between the object A and the object B" unless otherwise specified. Similarly, "an object A is disposed on an object B" and "an object A is disposed on (an object B)" include "an object A is disposed directly on an object B" and "an object A is disposed on (an object B) with another object interposed between the object A and the object B" unless otherwise specified. Similarly, "an object A is located on (an object B)" includes "an object A is in contact with an object B and is located on (an object B)" and "an object A is located on (an object B) with another object interposed between the object A and the object B". "When viewed in a certain direction, an object A overlaps an object B" includes "an object A overlaps the entirety of an object B" and "an object A overlaps a part of an object B" unless otherwise specified. "An object A (its material) contains a certain material C" includes "an object A (its material) is made of a certain material C" and "an object A (its material) mainly consists of a certain material C."
図1~図4は、第1実施形態にかかる半導体装置A10を示している。半導体装置A10は、半導体素子1、導電性接合材19、封止部2、複数のリード3,4,5および複数の接続部材61,62を備える。図示された例では、半導体装置A10は、リード挿通型のTO(Transistor Outline)パッケージである。半導体装置A10のパッケージ構造は、TOパッケージに限定されない。
Figures 1 to 4 show a semiconductor device A10 according to a first embodiment. The semiconductor device A10 comprises a semiconductor element 1, a conductive bonding material 19, a sealing portion 2, a plurality of leads 3, 4, 5, and a plurality of connecting members 61, 62. In the illustrated example, the semiconductor device A10 is a lead-through type TO (Transistor Outline) package. The package structure of the semiconductor device A10 is not limited to a TO package.
以下の説明では、互いに直交する厚さ方向z、第1方向yおよび第2方向xを参照する。一例として、厚さ方向zは、半導体装置A10の厚さ方向に相当する。「平面視」とは、厚さ方向zに見たときをいう。厚さ方向zのz1側を下方といい、厚さ方向zのz2側を上方ということがある。「上」、「下」、「上方」、「下方」、「上面」および「下面」などの記載は、厚さ方向zにおける各部品等の相対的位置関係を示すものであり、必ずしも重力方向との関係を規定する用語ではない。
In the following description, reference will be made to the thickness direction z, the first direction y, and the second direction x, which are perpendicular to each other. As an example, the thickness direction z corresponds to the thickness direction of the semiconductor device A10. "Planar view" refers to the view in the thickness direction z. The z1 side of the thickness direction z is sometimes referred to as the bottom, and the z2 side of the thickness direction z is sometimes referred to as the top. Terms such as "top," "bottom," "upper," "lower," "top surface," and "bottom surface" indicate the relative positional relationship of each component, etc. in the thickness direction z, and are not necessarily terms that define the relationship with the direction of gravity.
半導体素子1は、半導体装置A10の機能中枢となるものである。半導体素子1は、リード3に搭載される。半導体素子1は、たとえばMOSFET(Metal-Oxide-Semiconductor Field-Effect Transistor)である。この例と異なり、半導体素子1は、バイポーラトランジスタおよびIGBT(Insulated Gate Bipolar Transistor)などの他のトランジスタであってもよいし、トランジスタではなくダイオードあるいはIC(Integrated Circuit)であってもよい。半導体素子1は、たとえばケイ素(Si)または炭化ケイ素(SiC)を含むが、他の半導体材料(窒化ガリウムおよびダイヤモンドなど)を含んでいてもよい。
The semiconductor element 1 is the functional core of the semiconductor device A10. The semiconductor element 1 is mounted on the lead 3. The semiconductor element 1 is, for example, a MOSFET (Metal-Oxide-Semiconductor Field-Effect Transistor). In contrast to this example, the semiconductor element 1 may be other transistors such as a bipolar transistor and an IGBT (Insulated Gate Bipolar Transistor), or may be a diode or an IC (Integrated Circuit) instead of a transistor. The semiconductor element 1 includes, for example, silicon (Si) or silicon carbide (SiC), but may also include other semiconductor materials (such as gallium nitride and diamond).
半導体素子1は、素子主面10aおよび素子裏面10bを有する。素子主面10aおよび素子裏面10bは、厚さ方向zにおいて、互いに離間する。素子主面10aは、厚さ方向zのz2側(厚さ方向z上方)を向き、素子裏面10bは、厚さ方向zのz1側(厚さ方向z下方)を向く。素子裏面10bは、リード3に対向する。半導体素子1の厚さ(厚さ方向zの寸法)は、何ら限定されないが、たとえば20μm以上500μm以下である。半導体素子1の厚さは、素子主面10aと素子裏面10bとの厚さ方向zに沿う距離に相当する。
The semiconductor element 1 has an element principal surface 10a and an element rear surface 10b. The element principal surface 10a and the element rear surface 10b are spaced apart from each other in the thickness direction z. The element principal surface 10a faces the z2 side in the thickness direction z (upward in the thickness direction z), and the element rear surface 10b faces the z1 side in the thickness direction z (downward in the thickness direction z). The element rear surface 10b faces the lead 3. The thickness of the semiconductor element 1 (dimension in the thickness direction z) is not limited in any way, but is, for example, 20 μm or more and 500 μm or less. The thickness of the semiconductor element 1 corresponds to the distance between the element principal surface 10a and the element rear surface 10b along the thickness direction z.
半導体素子1は、第1電極11、第2電極12および第3電極13を有する。第1電極11は、素子裏面10bに配置される。第2電極12および第3電極13はそれぞれ、素子主面10aに配置される。半導体素子1は、第3電極13に入力される駆動信号により、第1電極11と第2電極12との間が導通状態と遮断状態とで切り替わる。半導体素子1がMOSFETである例において、第1電極11は、たとえばドレイン電極であり、第2電極12は、たとえばソース電極であり、第3電極13は、たとえばゲート電極である。
The semiconductor element 1 has a first electrode 11, a second electrode 12, and a third electrode 13. The first electrode 11 is disposed on the back surface 10b of the element. The second electrode 12 and the third electrode 13 are each disposed on the main surface 10a of the element. In the semiconductor element 1, the first electrode 11 and the second electrode 12 are switched between a conductive state and a cut-off state by a drive signal input to the third electrode 13. In an example where the semiconductor element 1 is a MOSFET, the first electrode 11 is, for example, a drain electrode, the second electrode 12 is, for example, a source electrode, and the third electrode 13 is, for example, a gate electrode.
導電性接合材19は、半導体素子1を接合する。導電性接合材19は、図9~図14に示すように、半導体素子1とリード3(後述のアイランド31)との間に介在し、これらを導通接合する。本実施形態では、半導体素子1の素子裏面10bとリード3(後述のアイランド31)とが対向するので、導電性接合材19は、半導体素子1の第1電極11とリード3(後述のアイランド31)とを導通させる。導電性接合材19は、たとえばはんだである。この例と異なり、導電性接合材19は、金属ペースト(たとえば銀ペースト)あるいは焼結金属(たとえば焼結銀)であってもよい。
The conductive bonding material 19 bonds the semiconductor element 1. As shown in Figures 9 to 14, the conductive bonding material 19 is interposed between the semiconductor element 1 and the lead 3 (island 31 described below) and electrically bonds them together. In this embodiment, the element back surface 10b of the semiconductor element 1 faces the lead 3 (island 31 described below), so the conductive bonding material 19 electrically connects the first electrode 11 of the semiconductor element 1 to the lead 3 (island 31 described below). The conductive bonding material 19 is, for example, solder. Unlike this example, the conductive bonding material 19 may be a metal paste (for example, silver paste) or a sintered metal (for example, sintered silver).
封止部2は、図9~図14に示すように、半導体素子1を覆う。封止部2は、導電性接合材19と、複数のリード3,4,5の一部ずつと、複数の接続部材61,62とを覆う。封止部2は、電気絶縁性の樹脂材料を含む。当該樹脂材料は、何ら限定されないが、たとえばエポキシ樹脂である。封止部2の形成方法は、何ら限定されないが、たとえばモールド成形(インサート成形)である。封止部2は、樹脂主面21、樹脂裏面22、複数の樹脂側面23,24および複数の凹部25,26を有する。
As shown in Figures 9 to 14, the sealing portion 2 covers the semiconductor element 1. The sealing portion 2 covers the conductive bonding material 19, portions of each of the multiple leads 3, 4, and 5, and the multiple connection members 61 and 62. The sealing portion 2 contains an electrically insulating resin material. The resin material is not limited to any particular material, but is, for example, epoxy resin. The method of forming the sealing portion 2 is not limited to any particular material, but is, for example, mold molding (insert molding). The sealing portion 2 has a resin main surface 21, a resin back surface 22, multiple resin side surfaces 23 and 24, and multiple recesses 25 and 26.
図6、図8、図9および図12~図14に示すように、樹脂主面21および樹脂裏面22は、厚さ方向zにおいて互いに離間する。樹脂主面21は、厚さ方向zのz2側(厚さ方向z上方)を向き、樹脂裏面22は、厚さ方向zのz1側(厚さ方向z下方)を向く。樹脂主面21は、厚さ方向zにおいて、素子主面10aと同じ方向を向き、樹脂裏面22は、厚さ方向zにおいて素子裏面10bと同じ方向を向く。封止部2の厚さ(厚さ方向zの寸法)は、何ら限定されないが、たとえば250μm以上7mm以下である。封止部2の厚さは、樹脂主面21と樹脂裏面22の厚さ方向zに沿う距離に相当する。
As shown in Figures 6, 8, 9 and 12 to 14, the resin main surface 21 and the resin back surface 22 are spaced apart from each other in the thickness direction z. The resin main surface 21 faces the z2 side of the thickness direction z (upward in the thickness direction z), and the resin back surface 22 faces the z1 side of the thickness direction z (downward in the thickness direction z). The resin main surface 21 faces the same direction as the element main surface 10a in the thickness direction z, and the resin back surface 22 faces the same direction as the element back surface 10b in the thickness direction z. The thickness of the sealing portion 2 (dimension in the thickness direction z) is not limited in any way, but is, for example, 250 μm or more and 7 mm or less. The thickness of the sealing portion 2 corresponds to the distance between the resin main surface 21 and the resin back surface 22 in the thickness direction z.
図3、図4、図7~図9、図12および図13に示すように、一対の樹脂側面23は、第1方向yにおいて互いに離間し、且つ互いに反対側を向く。一対の樹脂側面23は、樹脂主面21および樹脂裏面22に繋がる。図1、図3、図4、図6および図7に示すように、一対の樹脂側面23のうちの一方(第1方向yのy1側の樹脂側面23)から、複数のリード3~5の各々が突き出ている。
As shown in Figures 3, 4, 7 to 9, 12 and 13, the pair of resin side surfaces 23 are spaced apart from each other in the first direction y and face opposite directions. The pair of resin side surfaces 23 are connected to the resin main surface 21 and the resin back surface 22. As shown in Figures 1, 3, 4, 6 and 7, each of the multiple leads 3 to 5 protrudes from one of the pair of resin side surfaces 23 (the resin side surface 23 on the y1 side in the first direction y).
図3、図4、図6、図7および図14に示すように、一対の樹脂側面24は、第2方向xにおいて互いに離間し、且つ互いに反対側を向く。一対の樹脂側面24は、樹脂主面21および樹脂裏面22に繋がる。
As shown in Figures 3, 4, 6, 7, and 14, the pair of resin side surfaces 24 are spaced apart from each other in the second direction x and face opposite directions. The pair of resin side surfaces 24 are connected to the resin main surface 21 and the resin back surface 22.
複数の凹部25はそれぞれ、図1、図3および図7に示すように、一対の樹脂側面23の一方(第1方向yのy1側の樹脂側面23)に形成されている。複数の凹部25はそれぞれ、当該樹脂側面23から窪んでいる。複数の凹部25には、第2方向xにおいて、2つのリード3,4の間に形成されたものと、2つのリード3,5の間に形成されたものとを含む。複数の凹部25により、複数のリード3~5のうちの隣接する2つに対して、樹脂側面23に沿う沿面距離を大きくできる。半導体装置A10と異なる構成において、封止部2は、複数の凹部25のいずれも含んでいなくてもよい。
As shown in Figures 1, 3 and 7, each of the multiple recesses 25 is formed on one of the pair of resin side surfaces 23 (the resin side surface 23 on the y1 side in the first direction y). Each of the multiple recesses 25 is recessed from the resin side surface 23. The multiple recesses 25 include one formed between the two leads 3, 4 and one formed between the two leads 3, 5 in the second direction x. The multiple recesses 25 can increase the creepage distance along the resin side surface 23 for two adjacent leads out of the multiple leads 3 to 5. In a configuration different from that of the semiconductor device A10, the sealing portion 2 may not include any of the multiple recesses 25.
複数の凹部26は、図1および図3に示すように、樹脂主面21から厚さ方向zに窪むとともに、第1方向yのy2側の樹脂側面23から一対の樹脂側面24にそれぞれ個別に繋がる。本実施形態では、複数の凹部26からリード3の一部(後述の延出部34およびアイランド31の一部)が露出する。半導体装置A10と異なる構成において、封止部2は、複数の凹部26をいずれも含んでいなくてもよい。
As shown in Figures 1 and 3, the multiple recesses 26 are recessed from the resin main surface 21 in the thickness direction z, and each individually connects from the resin side surface 23 on the y2 side of the first direction y to a pair of resin side surfaces 24. In this embodiment, a portion of the lead 3 (an extension portion 34 and a portion of the island 31, which will be described later) is exposed from the multiple recesses 26. In a configuration different from that of the semiconductor device A10, the sealing portion 2 may not include any of the multiple recesses 26.
複数のリード3~5は、半導体装置A10が実装される回路基板(図示略)と、半導体素子1との導通経路をなす。複数のリード3~5は、たとえば、同一のリードフレームから形成される。当該リードフレームは、銅(Cu)、または銅合金である。このため、複数のリード3~5の各組成は、銅を含む。複数のリード3~5はそれぞれ(リードフレーム)は、銅以外の金属を含むものであってもよい。複数のリード3~5は、互いに離間する。複数のリード3~5はそれぞれ、図3、図4、図6および図7に示すように、一対の樹脂側面23の一方(第1方向yのy1側の樹脂側面23)から突き出る。
The multiple leads 3-5 form a conductive path between the semiconductor element 1 and a circuit board (not shown) on which the semiconductor device A10 is mounted. The multiple leads 3-5 are formed, for example, from the same lead frame. The lead frame is copper (Cu) or a copper alloy. Therefore, the composition of each of the multiple leads 3-5 includes copper. Each of the multiple leads 3-5 (lead frame) may include a metal other than copper. The multiple leads 3-5 are spaced apart from each other. Each of the multiple leads 3-5 protrudes from one of a pair of resin side surfaces 23 (the resin side surface 23 on the y1 side in the first direction y) as shown in Figures 3, 4, 6, and 7.
リード3は、半導体素子1が搭載され、半導体素子1の第1電極11に導通する。リード3は、図4および図5に示すように、アイランド31、端子部32、中継部33および2つの延出部34を含む。図示された例では、リード3は、2つの延出部34を含むが、3つ以上の延出部34を含んでいてもよい。リード3において、アイランド31、端子部32、中継部33および2つの延出部34は、一体的に形成されている。
The lead 3 has the semiconductor element 1 mounted thereon and is electrically connected to the first electrode 11 of the semiconductor element 1. As shown in Figures 4 and 5, the lead 3 includes an island 31, a terminal portion 32, a relay portion 33, and two extension portions 34. In the illustrated example, the lead 3 includes two extension portions 34, but may include three or more extension portions 34. In the lead 3, the island 31, the terminal portion 32, the relay portion 33, and the two extension portions 34 are integrally formed.
アイランド31には、半導体素子1が搭載される。アイランド31は、平面視において、たとえば、矩形である。よって、平面視におけるアイランド31の周縁31cは、矩形である。理解の便宜上、図5においては、周縁31cを、太い破線で示す。図5に示すように、アイランド31は、基部311および外周部312を含む。
The semiconductor element 1 is mounted on the island 31. The island 31 is, for example, rectangular in plan view. Therefore, the periphery 31c of the island 31 is rectangular in plan view. For ease of understanding, the periphery 31c is shown by a thick dashed line in FIG. 5. As shown in FIG. 5, the island 31 includes a base 311 and an outer periphery 312.
基部311は、平面視において、半導体素子1に重なる。基部311は、平面視において、矩形状である。基部311の厚さt311(図10および図11参照)は、何ら限定されないが、たとえば100μm以上5mm以下である。
The base 311 overlaps the semiconductor element 1 in a plan view. The base 311 has a rectangular shape in a plan view. The thickness t311 of the base 311 (see Figures 10 and 11) is not limited in any way, but is, for example, 100 μm or more and 5 mm or less.
外周部312は、平面視において、基部311の周りに配置され、基部311を囲む。基部311が平面視矩形である例において、外周部312は、平面視矩形環状である。外周部312は、平面視において、半導体素子1に重ならない。この例とは異なり、平面視において、半導体素子1の一部は、外周部312に重なってもよい。外周部312は、薄肉部313を含む。
The outer peripheral portion 312 is disposed around the base 311 in a plan view and surrounds the base 311. In an example in which the base 311 is rectangular in a plan view, the outer peripheral portion 312 is rectangular annular in a plan view. The outer peripheral portion 312 does not overlap the semiconductor element 1 in a plan view. Unlike this example, a portion of the semiconductor element 1 may overlap the outer peripheral portion 312 in a plan view. The outer peripheral portion 312 includes a thin-walled portion 313.
図11などに示すように、薄肉部313は、封止部2に覆われている。薄肉部313は、基部311および外周部312のうちの薄肉部313以外の部分よりも薄い。よって、薄肉部313の厚さt313(厚さ方向zの寸法)は、基部311の厚さt311(厚さ方向zの寸法)よりも小さい。薄肉部313の厚さt313は、たとえば、基部311の厚さt311の15%以上20%以下である。薄肉部313の厚さt313は、たとえば100μm以上4.9mm以下である。図4および図5に示すように、薄肉部313は、たとえば、外周部312のうちの第1方向yのy1側の端縁に沿って延びる部分と、当該部分の第2方向x両端の各々に繋がり且つ第2方向xの端縁に沿って延びる一対の部分とを含む。この例とは異なり、薄肉部313は、外周部312のうちの第1方向yの各端縁あるいは第2方向xの各端縁のいずれかにのみ形成されていてもよいし、外周部312の全周に渡って形成されていてもよい。薄肉部313は、一続きになっているもの(図5および図7参照)に限定されず、複数に分割されていてもよい。薄肉部313は、平面視において、半導体素子1に重ならないことが好ましいが、重なっていてもよい。
11 and the like, the thin portion 313 is covered by the sealing portion 2. The thin portion 313 is thinner than the base portion 311 and the outer peripheral portion 312 other than the thin portion 313. Therefore, the thickness t313 (dimension in the thickness direction z) of the thin portion 313 is smaller than the thickness t311 (dimension in the thickness direction z) of the base portion 311. The thickness t313 of the thin portion 313 is, for example, 15% to 20% of the thickness t311 of the base portion 311. The thickness t313 of the thin portion 313 is, for example, 100 μm to 4.9 mm. As shown in FIGS. 4 and 5, the thin portion 313 includes, for example, a portion extending along the edge of the outer peripheral portion 312 on the y1 side in the first direction y, and a pair of portions connected to both ends of the portion in the second direction x and extending along the edge in the second direction x. Unlike this example, the thin-walled portion 313 may be formed only on either one of the edges of the outer peripheral portion 312 in the first direction y or the edges of the outer peripheral portion 312 in the second direction x, or may be formed around the entire circumference of the outer peripheral portion 312. The thin-walled portion 313 is not limited to being continuous (see Figures 5 and 7), and may be divided into multiple portions. It is preferable that the thin-walled portion 313 does not overlap the semiconductor element 1 in a plan view, but it may overlap.
薄肉部313は、図11に示すように、突起313aを含む。突起313aは、平面視において外方に突き出る。突起313aは、薄肉部313の厚さ方向zのz1側に形成されている。たとえば、薄肉部313は、外周部312の一部が圧潰することで形成されており、突起313aは、この圧潰された部分の一部が外方に突き出たものである。半導体装置A10と異なる構成において、薄肉部313は、突起313aを含んでいなくてもよい。
As shown in FIG. 11, the thin portion 313 includes a protrusion 313a. The protrusion 313a protrudes outward in a plan view. The protrusion 313a is formed on the z1 side of the thin portion 313 in the thickness direction z. For example, the thin portion 313 is formed by crushing a part of the outer periphery 312, and the protrusion 313a is a part of this crushed part that protrudes outward. In a configuration different from that of the semiconductor device A10, the thin portion 313 may not include the protrusion 313a.
アイランド31は、アイランド主面31aおよびアイランド裏面31bを有する。アイランド主面31aおよびアイランド裏面31bは、厚さ方向zに互いに離間する。アイランド主面31aは、厚さ方向zのz2側(厚さ方向z上方)を向き、アイランド裏面31bは、厚さ方向zのz1側(厚さ方向z下方)を向く。アイランド主面31aは、基部311の上面(厚さ方向zのz2側を向く面)および外周部312の上面(厚さ方向zのz2側を向く面)に相当する。アイランド裏面31bは、基部311の下面(厚さ方向zのz2側を向く面)および外周部312のうちの薄肉部313を除く部分の下面(厚さ方向zのz1側を向く面)に相当する。アイランド主面31aには、半導体素子1が搭載されている。アイランド裏面31bは、樹脂裏面22から露出している。図示された例では、アイランド裏面31bは、樹脂裏面22と面一である。基部311の厚さt311は、アイランド主面31aからアイランド裏面31bまでの厚さ方向zに沿う距離に相当する。
The island 31 has an island main surface 31a and an island back surface 31b. The island main surface 31a and the island back surface 31b are spaced apart from each other in the thickness direction z. The island main surface 31a faces the z2 side (upward in the thickness direction z) in the thickness direction z, and the island back surface 31b faces the z1 side (downward in the thickness direction z) in the thickness direction z. The island main surface 31a corresponds to the upper surface of the base 311 (surface facing the z2 side in the thickness direction z) and the upper surface of the outer peripheral portion 312 (surface facing the z2 side in the thickness direction z). The island back surface 31b corresponds to the lower surface of the base 311 (surface facing the z2 side in the thickness direction z) and the lower surface of the outer peripheral portion 312 excluding the thin portion 313 (surface facing the z1 side in the thickness direction z). The semiconductor element 1 is mounted on the island main surface 31a. The island back surface 31b is exposed from the resin back surface 22. In the illustrated example, the island back surface 31b is flush with the resin back surface 22. The thickness t311 of the base 311 corresponds to the distance along the thickness direction z from the island main surface 31a to the island back surface 31b.
端子部32は、封止部2から露出する。端子部32は、半導体装置A10の端子であり、半導体装置A10を上記回路基板に実装した際、当該回路基板に接合される。端子部32は、リード3のうち、封止部2の樹脂側面23から突き出た部位である。図4に示すように、端子部32は、アイランド31から離間する。図示された例では、端子部32は、アイランド31に対して、第1方向yのy1側に位置する。端子部32は、図12に示すように、アイランド31に対して、厚さ方向zのz2側に位置する。端子部32は、「第1端子部」の一例である。
The terminal portion 32 is exposed from the sealing portion 2. The terminal portion 32 is a terminal of the semiconductor device A10, and is joined to the circuit board when the semiconductor device A10 is mounted on the circuit board. The terminal portion 32 is a portion of the lead 3 that protrudes from the resin side surface 23 of the sealing portion 2. As shown in FIG. 4, the terminal portion 32 is separated from the island 31. In the illustrated example, the terminal portion 32 is located on the y1 side of the island 31 in the first direction y. As shown in FIG. 12, the terminal portion 32 is located on the z2 side of the island 31 in the thickness direction z. The terminal portion 32 is an example of a "first terminal portion."
中継部33は、図4および図12に示すように、アイランド31と端子部32とに繋がる。中継部33は、アイランド31と端子部32との間に介在する。中継部33は、封止部2に覆われている。中継部33の一部は、屈曲している。これにより、厚さ方向zにおいて異なる位置に配置されたアイランド31と端子部32とが連結される。中継部33は、「第1中継部」の一例である。リード3は、中継部33を含んでいなくてもよい。この場合、アイランド31と端子部32とは、導通部材(たとえば金属板あるいはボンディングワイヤ)により電気的に接続される。
As shown in Figures 4 and 12, the relay portion 33 is connected to the island 31 and the terminal portion 32. The relay portion 33 is interposed between the island 31 and the terminal portion 32. The relay portion 33 is covered by the sealing portion 2. A part of the relay portion 33 is bent. This connects the island 31 and the terminal portion 32 that are arranged at different positions in the thickness direction z. The relay portion 33 is an example of a "first relay portion." The lead 3 does not need to include the relay portion 33. In this case, the island 31 and the terminal portion 32 are electrically connected by a conductive member (e.g., a metal plate or a bonding wire).
2つの延出部34はそれぞれ、図5に示すように、アイランド31の周縁31cから、アイランド31の外方に延び出る。本実施形態では、2つの延出部34はそれぞれ、アイランド31の周縁31cのうち、第1方向yのy2側の端縁から第1方向yのy2側に延びる。2つの延出部34はそれぞれ、アイランド31に繋がり、一体的に形成されている。図示された例では、2つの延出部34はそれぞれ、平面視矩形であるが、各延出部34の平面視形状は何ら限定されない。2つの延出部34は、互いに離間する。2つの延出部34は、第2方向xに沿って配置されている。リード3が3つ以上の延出部34を含む場合には、3つ以上の延出部34が、第2方向xに沿って、互いに離間して配置される。本実施形態では、図5に示すように、2つの延出部34はそれぞれ、アイランド31の周縁31cのうち、第1方向yにおいて、端子部32から遠い側の一対の角部31dに繋がる。2つの延出部34はそれぞれ、平面視において、半導体素子1および導電性接合材19に重ならない。
As shown in FIG. 5, the two extension portions 34 each extend outward from the periphery 31c of the island 31. In this embodiment, the two extension portions 34 each extend from the edge of the periphery 31c of the island 31 on the y2 side in the first direction y to the y2 side in the first direction y. The two extension portions 34 are each connected to the island 31 and formed integrally with it. In the illustrated example, the two extension portions 34 are each rectangular in a planar view, but the planar view shape of each extension portion 34 is not limited in any way. The two extension portions 34 are spaced apart from each other. The two extension portions 34 are arranged along the second direction x. When the lead 3 includes three or more extension portions 34, the three or more extension portions 34 are arranged spaced apart from each other along the second direction x. In this embodiment, as shown in FIG. 5, the two extensions 34 are connected to a pair of corners 31d on the edge 31c of the island 31 that are farther from the terminal portion 32 in the first direction y. The two extensions 34 do not overlap the semiconductor element 1 and the conductive bonding material 19 in a plan view.
2つの延出部34はそれぞれ、図5および図10に示すように、延出主面34a、延出裏面34bおよび複数の延出側面34c,34dを有する。
As shown in Figures 5 and 10, each of the two extension portions 34 has an extension main surface 34a, an extension back surface 34b, and multiple extension side surfaces 34c and 34d.
図10に示すように、延出主面34aおよび延出裏面34bは、厚さ方向zに互いに離間する。延出主面34aと延出裏面34bとは、厚さ方向zにおいて互いに反対側を向く。延出主面34aは、厚さ方向zのz2側(厚さ方向z上方)を向き、延出裏面34bは、厚さ方向zのz1側(厚さ方向z下方)を向く。図10に示すように、延出主面34aは、アイランド主面31aと面一である。延出裏面34bは、アイランド裏面31bよりも厚さ方向zのz2側に位置する。本実施形態では、凹部26により、延出主面34aの一部は、封止部2から露出するが、延出主面34aの全てが封止部2で覆われていてもよい。延出裏面34bは、封止部2に覆われている。
10, the extended main surface 34a and the extended back surface 34b are spaced apart from each other in the thickness direction z. The extended main surface 34a and the extended back surface 34b face opposite each other in the thickness direction z. The extended main surface 34a faces the z2 side in the thickness direction z (upward in the thickness direction z), and the extended back surface 34b faces the z1 side in the thickness direction z (downward in the thickness direction z). As shown in FIG. 10, the extended main surface 34a is flush with the island main surface 31a. The extended back surface 34b is located on the z2 side in the thickness direction z of the island back surface 31b. In this embodiment, a portion of the extended main surface 34a is exposed from the sealing portion 2 due to the recess 26, but the entire extended main surface 34a may be covered by the sealing portion 2. The extended back surface 34b is covered by the sealing portion 2.
複数の延出側面34c,34dはそれぞれ、厚さ方向zにおいて、延出主面34aと延出裏面34bとの間に位置する。複数の延出側面34c,34dはそれぞれ、延出主面34aから厚さ方向zのz1側に拡がる。延出側面34cは、アイランド31に対して延出部34が延び出る延出方向(本実施形態では、第1方向yのy2側)を向く。延出側面34cは、第2方向xにおいて、一対の延出側面34dに挟まれている。一対の延出側面34dは、厚さ方向および先述の延出方向に直交する方向における延出側面34cの両端縁にそれぞれ個別に繋がる。一対の延出側面34dは、第2方向xにおいて互いに離間し、且つ、第2方向xにおいて互いに反対側を向く。一対の延出側面34dはそれぞれ、延出主面34aおよび延出裏面34bに繋がる。複数の延出側面34c,34dはそれぞれ封止部2で覆われている。
Each of the multiple extending side surfaces 34c, 34d is located between the extending main surface 34a and the extending back surface 34b in the thickness direction z. Each of the multiple extending side surfaces 34c, 34d extends from the extending main surface 34a to the z1 side in the thickness direction z. The extending side surface 34c faces the extending direction in which the extending portion 34 extends relative to the island 31 (in this embodiment, the y2 side of the first direction y). The extending side surface 34c is sandwiched between a pair of extending side surfaces 34d in the second direction x. The pair of extending side surfaces 34d are individually connected to both end edges of the extending side surface 34c in the thickness direction and in a direction perpendicular to the aforementioned extending direction. The pair of extending side surfaces 34d are spaced apart from each other in the second direction x and face opposite sides to each other in the second direction x. The pair of extending side surfaces 34d are each connected to the extending main surface 34a and the extending back surface 34b. Each of the multiple extending side surfaces 34c, 34d is covered with a sealing portion 2.
図10に示すように、各延出部34の厚さt34(厚さ方向zの寸法)は、アイランド31の厚さ(基部311の厚さt311)よりも小さい。各延出部34の厚さt34は、図10に示すように、延出主面34aから延出裏面34bまでの厚さ方向zに沿う距離に相当する。各延出部34の厚さt34は、薄肉部313の厚さt313よりも小さい。各延出部34の厚さt34は、何ら限定されないが、基部311の厚さt311の15%以上75%以下である。一例では、各延出部34の厚さt34は、50μm以上4.8mm以下である。
As shown in FIG. 10, the thickness t34 (dimension in thickness direction z) of each extension portion 34 is smaller than the thickness of the island 31 (thickness t311 of the base 311). As shown in FIG. 10, the thickness t34 of each extension portion 34 corresponds to the distance along the thickness direction z from the extension main surface 34a to the extension back surface 34b. The thickness t34 of each extension portion 34 is smaller than the thickness t313 of the thin portion 313. The thickness t34 of each extension portion 34 is not limited in any way, but is 15% or more and 75% or less of the thickness t311 of the base 311. In one example, the thickness t34 of each extension portion 34 is 50 μm or more and 4.8 mm or less.
図5および図10に示すように、2つの延出部34はそれぞれ、突起341を含む。以下で説明する突起341は、特段の断りがない限り、各延出部34で共通する。
As shown in Figures 5 and 10, each of the two extension portions 34 includes a protrusion 341. The protrusion 341 described below is common to each extension portion 34 unless otherwise specified.
図5および図10に示すように、突起341は、平面視においてアイランド31の外方に突き出る。突起341は、対応する延出部34の延出側面34cから第1方向yのy2側に突き出ている。突起341は、図10に示すように、対応する延出部34の延出側面34cのうち、厚さ方向zのz1側の端部に形成されている。各延出部34は、半導体装置A10の製造工程において、初めは基部311と同じ厚さである。そして、この基部311と同じ厚さの各延出部34を圧潰することで、各延出部34は、基部311よりも薄くなる。突起341は、この圧潰された部分の一部が外方に突き出たものである。半導体装置A10と異なる構成において、各延出部34は、突起341を含んでいなくてもよい。突起341は、対応する延出部34の延出側面34cのうち、厚さ方向zのz1側の端部とともに、厚さ方向zのz2側の端部にも形成されていてもよい。
5 and 10, the protrusion 341 protrudes outward from the island 31 in a plan view. The protrusion 341 protrudes from the extending side surface 34c of the corresponding extending portion 34 toward the y2 side in the first direction y. As shown in FIG. 10, the protrusion 341 is formed at the end of the extending side surface 34c of the corresponding extending portion 34 on the z1 side in the thickness direction z. In the manufacturing process of the semiconductor device A10, each extending portion 34 initially has the same thickness as the base 311. Then, by crushing each extending portion 34 having the same thickness as the base 311, each extending portion 34 becomes thinner than the base 311. The protrusion 341 is a part of this crushed portion protruding outward. In a configuration different from the semiconductor device A10, each extending portion 34 may not include the protrusion 341. The protrusion 341 may be formed on the end of the extension side surface 34c of the corresponding extension portion 34 on the z1 side in the thickness direction z as well as on the z2 side in the thickness direction z.
図5に示す各延出部34の幅w34は、図5に示す薄肉部313の幅w313と同じであってもよいし、異なっていてもよい。本実施形態において、各延出部34の幅w34は、延出主面34aの第1方向yの寸法である。薄肉部313の幅w313および各延出部34の幅w34は、何ら限定されないが、一例では、各延出部34の幅w34は、100μm以上1.5mm以下であり、一例では、薄肉部313の幅w313は、100μm以上1mm以下である。
The width w34 of each extension portion 34 shown in FIG. 5 may be the same as the width w313 of the thin portion 313 shown in FIG. 5, or may be different. In this embodiment, the width w34 of each extension portion 34 is the dimension of the extension main surface 34a in the first direction y. The width w313 of the thin portion 313 and the width w34 of each extension portion 34 are not limited in any way, but in one example, the width w34 of each extension portion 34 is 100 μm or more and 1.5 mm or less, and in one example, the width w313 of the thin portion 313 is 100 μm or more and 1 mm or less.
本願発明者の研究によれば、次のことが分かった。それは、各延出部34の幅w34が大きい程、延出部34にかかる熱応力が低減することである。同様に、薄肉部313の幅w313が大きい程、薄肉部313にかかる熱応力が低減する。そのため、薄肉部313および各延出部34にかかる熱応力を低減させる上では、薄肉部313の幅w313および各延出部34の幅w34はそれぞれ、大きい程好ましい。しかしながら、薄肉部313の幅w313を大きくすると、アイランド裏面31bの面積が小さくなるため、放熱性が低下する要因となる。薄肉部313の幅w313を大きくすると、基部311の平面視サイズを縮小するため、半導体素子1の平面視サイズの拡大化を阻害する。そのため、薄肉部313の幅w313の大きくするのには限度がある。一方で、各延出部34の幅w34を大きくしても、アイランド裏面31bの面積が小さくならないので、放熱性はほとんど低下しない。各延出部34の幅w34を大きくしても、基部311の平面視サイズが小さくならないので、半導体素子1の平面視サイズの拡大化に影響しない。したがって、各延出部34の幅w34を大きくすればし、放熱性の低下を抑制しつつ、各延出部34にかかる応力を緩和させることが可能である。ただし、各延出部34の幅w34を大きくすると、半導体装置A10の製品サイズ(第1方向yの寸法)が大きくなる。したがって、各延出部34の幅w34は、各延出部34にかかる熱応力を考慮して下限値を設定し、半導体装置A10の仕様(第1方向yの寸法)に応じて上限値を設定すればよい。
The inventor's research has revealed the following. The greater the width w34 of each extension 34, the less thermal stress it will have on the extension 34. Similarly, the greater the width w313 of the thin portion 313, the less thermal stress it will have on the thin portion 313. Therefore, in order to reduce thermal stress on the thin portion 313 and each extension 34, it is preferable that the width w313 of the thin portion 313 and the width w34 of each extension 34 are as large as possible. However, increasing the width w313 of the thin portion 313 reduces the area of the island back surface 31b, which causes a decrease in heat dissipation. Increasing the width w313 of the thin portion 313 reduces the planar size of the base 311, which inhibits the expansion of the planar size of the semiconductor element 1. Therefore, there is a limit to how large the width w313 of the thin portion 313 can be. On the other hand, even if the width w34 of each extension 34 is increased, the area of the island back surface 31b does not decrease, so the heat dissipation performance is hardly reduced. Even if the width w34 of each extension 34 is increased, the planar size of the base 311 does not decrease, so there is no effect on the enlargement of the planar size of the semiconductor element 1. Therefore, by increasing the width w34 of each extension 34, it is possible to reduce the stress applied to each extension 34 while suppressing the deterioration of heat dissipation. However, if the width w34 of each extension 34 is increased, the product size (dimension in the first direction y) of the semiconductor device A10 increases. Therefore, the lower limit of the width w34 of each extension 34 is set in consideration of the thermal stress applied to each extension 34, and the upper limit is set according to the specifications of the semiconductor device A10 (dimension in the first direction y).
リード4は、接続部材61を介して、半導体素子1の第2電極12に導通する。リード4は、図4に示すように、パッド部41、端子部42および中継部43を含む。リード4において、パッド部41、端子部42および中継部43は、一体的に形成されている。
The lead 4 is electrically connected to the second electrode 12 of the semiconductor element 1 via the connection member 61. As shown in FIG. 4, the lead 4 includes a pad portion 41, a terminal portion 42, and a relay portion 43. In the lead 4, the pad portion 41, the terminal portion 42, and the relay portion 43 are integrally formed.
パッド部41は、封止部2に覆われている。パッド部41には、複数の接続部材61の各々が接合されている。各接続部材61は、パッド部41の上面(厚さ方向zのz2側を向く面)に接合されている。パッド部41は、アイランド31よりも厚さ方向zのz2側に位置する。パッド部41は、平面視において、アイランド31の第1方向yのy1側に配置される。
The pad portion 41 is covered by the sealing portion 2. A plurality of connection members 61 are each bonded to the pad portion 41. Each connection member 61 is bonded to the upper surface of the pad portion 41 (the surface facing the z2 side in the thickness direction z). The pad portion 41 is located on the z2 side in the thickness direction z of the island 31. In a plan view, the pad portion 41 is disposed on the y1 side of the island 31 in the first direction y.
端子部42は、封止部2から露出する。端子部42は、半導体装置A10の端子であり、半導体装置A10を上記回路基板に実装した際、当該回路基板に接合される。端子部42は、パッド部41から離間する。図示された例では、端子部42は、パッド部41に対して、第1方向yのy1側に位置する。厚さ方向zにおいて、端子部42は、パッド部41と同じ位置に配置されている。図示された例では、端子部42は、端子部32よりも第2方向xのx2側に配置されている。厚さ方向zにおいて、端子部42は、端子部32と同じ位置に配置されている。端子部42は、「第2端子部」の一例である。
The terminal portion 42 is exposed from the sealing portion 2. The terminal portion 42 is a terminal of the semiconductor device A10, and is joined to the circuit board when the semiconductor device A10 is mounted on the circuit board. The terminal portion 42 is spaced apart from the pad portion 41. In the illustrated example, the terminal portion 42 is located on the y1 side of the pad portion 41 in the first direction y. In the thickness direction z, the terminal portion 42 is disposed at the same position as the pad portion 41. In the illustrated example, the terminal portion 42 is located on the x2 side of the terminal portion 32 in the second direction x. In the thickness direction z, the terminal portion 42 is disposed at the same position as the terminal portion 32. The terminal portion 42 is an example of a "second terminal portion."
中継部43は、パッド部41と端子部42とに繋がる。中継部43は、パッド部41と端子部42との間に介在する。中継部43は、封止部2に覆われている。図示された例では、中継部43に貫通孔が形成されているが、この例と異なり、中継部43に貫通孔が形成されていなくてもよい。ただし、貫通孔が形成された構成では、封止部2の形成時に、当該貫通孔を介して、封止部2の移動が可能となる。貫通孔に封止部2が充填されることで、封止部2からのリード4が抜けることを抑制できる。中継部43は、「第2中継部」の一例である。
The relay portion 43 is connected to the pad portion 41 and the terminal portion 42. The relay portion 43 is interposed between the pad portion 41 and the terminal portion 42. The relay portion 43 is covered by the sealing portion 2. In the illustrated example, a through hole is formed in the relay portion 43, but unlike this example, the relay portion 43 does not necessarily have to have a through hole. However, in a configuration in which a through hole is formed, the sealing portion 2 can move through the through hole when the sealing portion 2 is formed. By filling the through hole with the sealing portion 2, it is possible to prevent the lead 4 from coming out of the sealing portion 2. The relay portion 43 is an example of a "second relay portion".
リード5は、接続部材62を介して、半導体素子1の第3電極13に導通する。リード5は、図4に示すように、パッド部51、端子部52および中継部53を含む。リード5において、パッド部51、端子部52および中継部53は、一体的に形成されている。
The lead 5 is electrically connected to the third electrode 13 of the semiconductor element 1 via the connection member 62. As shown in FIG. 4, the lead 5 includes a pad portion 51, a terminal portion 52, and a relay portion 53. In the lead 5, the pad portion 51, the terminal portion 52, and the relay portion 53 are integrally formed.
パッド部51は、封止部2に覆われている。パッド部51には、接続部材62が接合されている。接続部材62は、パッド部51の上面(厚さ方向zのz2側を向く面)に接合されている。パッド部51は、アイランド31よりも厚さ方向zのz2側に位置する。パッド部51は、平面視において、アイランド31の第1方向yのy1側に配置される。
The pad portion 51 is covered by the sealing portion 2. A connection member 62 is bonded to the pad portion 51. The connection member 62 is bonded to the upper surface of the pad portion 51 (the surface facing the z2 side in the thickness direction z). The pad portion 51 is located on the z2 side in the thickness direction z of the island 31. In a plan view, the pad portion 51 is disposed on the y1 side of the island 31 in the first direction y.
端子部52は、封止部2から露出する。端子部52は、半導体装置A10の端子であり、半導体装置A10を上記回路基板に実装した際、当該回路基板に接合される。端子部52は、リード5のうち、封止部2の樹脂側面23から突き出た部位である。端子部52は、パッド部51から離間する。図示された例では、端子部52は、パッド部51に対して、第1方向yのy1側に位置する。厚さ方向zにおいて、端子部52は、パッド部51と同じ位置に配置されている。図示された例では、端子部52は、端子部32よりも第2方向xのx1側に配置されている。よって、第2方向xにおいて、端子部32は、端子部42と端子部52との間に配置されている。各端子部32,42,52の第2方向xの並び順は、図示された例に限定されない。厚さ方向zにおいて、端子部52は、端子部32と同じ位置に配置されている。よって、厚さ方向zにおいて、端子部32、端子部42および端子部52は、互いに同じ位置に配置されている。
The terminal portion 52 is exposed from the sealing portion 2. The terminal portion 52 is a terminal of the semiconductor device A10, and is joined to the circuit board when the semiconductor device A10 is mounted on the circuit board. The terminal portion 52 is a portion of the lead 5 that protrudes from the resin side surface 23 of the sealing portion 2. The terminal portion 52 is separated from the pad portion 51. In the illustrated example, the terminal portion 52 is located on the y1 side of the pad portion 51 in the first direction y. In the thickness direction z, the terminal portion 52 is arranged at the same position as the pad portion 51. In the illustrated example, the terminal portion 52 is arranged on the x1 side of the second direction x with respect to the terminal portion 32. Therefore, in the second direction x, the terminal portion 32 is arranged between the terminal portion 42 and the terminal portion 52. The arrangement order of the terminal portions 32, 42, and 52 in the second direction x is not limited to the illustrated example. In the thickness direction z, the terminal portion 52 is arranged at the same position as the terminal portion 32. Therefore, in the thickness direction z, terminal portion 32, terminal portion 42, and terminal portion 52 are arranged at the same position as each other.
中継部53は、パッド部51と端子部52とに繋がる。中継部53は、パッド部51と端子部52との間に介在する。中継部53は、封止部2に覆われている。図示された例では、中継部53に貫通孔が形成されているが、この例と異なり、中継部53に貫通孔が形成されていなくてもよい。ただし、貫通孔が形成された構成では、封止部2の形成時に、当該貫通孔を介して、封止部2の移動が可能となる。貫通孔に封止部2が充填されることで、封止部2からのリード5が抜けることを抑制できる。
The relay portion 53 is connected to the pad portion 51 and the terminal portion 52. The relay portion 53 is interposed between the pad portion 51 and the terminal portion 52. The relay portion 53 is covered by the sealing portion 2. In the illustrated example, a through hole is formed in the relay portion 53, but unlike this example, the relay portion 53 does not necessarily have to have a through hole. However, in a configuration in which a through hole is formed, the sealing portion 2 can move through the through hole when the sealing portion 2 is formed. By filling the through hole with the sealing portion 2, it is possible to prevent the lead 5 from coming out of the sealing portion 2.
複数の接続部材61,62は、互いに離間する2つの部位を導通させる。図示された例では、複数の接続部材61,62はそれぞれ、ボンディングワイヤである。複数の接続部材61,62は、金属を含み、当該金属は、何ら限定されないが、たとえば、金、アルミニウム、銅、銀あるいはこれらを含む合金である。複数の接続部材61,62はそれぞれ、ボンディングワイヤではなく、金属製の板材であってもよい。
The multiple connection members 61, 62 provide electrical conductivity between two parts spaced apart from each other. In the illustrated example, each of the multiple connection members 61, 62 is a bonding wire. The multiple connection members 61, 62 include a metal, and the metal is not limited to, but may be, for example, gold, aluminum, copper, silver, or an alloy containing these. Each of the multiple connection members 61, 62 may be a metal plate material instead of a bonding wire.
複数の接続部材61は、第2電極12とパッド部41とに接合され、これらを導通させる。したがって、第2電極12は、複数の接続部材61を介して、リード4に導通する。図示された例では、半導体装置A10は、4つの接続部材61を備えているが、接続部材61の数は、何ら限定されない。第2電極12とリード4とに導通させる電流の大きさなどに応じて、適宜変更されうる。
The multiple connection members 61 are joined to the second electrode 12 and the pad portion 41, providing electrical continuity between them. Thus, the second electrode 12 is electrically connected to the lead 4 via the multiple connection members 61. In the illustrated example, the semiconductor device A10 has four connection members 61, but the number of connection members 61 is not limited in any way. It can be changed as appropriate depending on factors such as the magnitude of the current to be conducted between the second electrode 12 and the lead 4.
接続部材62は、第3電極13とパッド部51とに接合され、これらを導通させる。したがって、第3電極13は、接続部材62を介して、リード5に導通する。
The connection member 62 is joined to the third electrode 13 and the pad portion 51, providing electrical continuity between them. Therefore, the third electrode 13 is electrically connected to the lead 5 via the connection member 62.
次に、図15に基づき、半導体装置A10を備える車両Vについて説明する。車両Vは、たとえば電気自動車(EV:Electric Vehicle)である。
Next, a vehicle V equipped with the semiconductor device A10 will be described with reference to FIG. 15. The vehicle V is, for example, an electric vehicle (EV).
図15に示すように、車両Vは、車載充電器91、蓄電池92および駆動系統93を備える。車載充電器91には、屋外に設置された給電施設(図示略)から無線により電力が供給される。この他、給電施設から車載充電器91への電力の供給手段は、有線でもよい。車載充電器91には、昇圧型のDC-DCコンバータが構成されている。図15に示すように、半導体装置A10は、車載充電器91の一部であり、たとえば先述のDC-DCコンバータに用いられる。車載充電器91に供給された電力の電圧は、当該コンバータにより昇圧された後、蓄電池92に給電される。昇圧された電圧は、たとえば600Vである。
As shown in FIG. 15, the vehicle V includes an on-board charger 91, a storage battery 92, and a drive system 93. The on-board charger 91 is supplied with power wirelessly from a power supply facility (not shown) installed outdoors. Alternatively, the power supply from the power supply facility to the on-board charger 91 may be wired. The on-board charger 91 is configured with a step-up DC-DC converter. As shown in FIG. 15, the semiconductor device A10 is part of the on-board charger 91, and is used, for example, in the DC-DC converter described above. The voltage of the power supplied to the on-board charger 91 is stepped up by the converter and then supplied to the storage battery 92. The stepped-up voltage is, for example, 600V.
駆動系統93は、車両Vを駆動する。駆動系統93は、インバータ931および駆動源932を有する。蓄電池92に蓄えられた電力は、インバータ931に給電される。蓄電池92からインバータ931に給電される電力は、直流電力である。この他、図15に示す電力系統とは異なり、蓄電池92とインバータ931との間に昇圧型のDC-DCコンバータをさらに設けてもよい。インバータ931は、直流電力を交流電力に変換する。インバータ931は、駆動源932に導通している。駆動源932は、交流モータおよび変速機を有する。インバータ931によって変換された交流電力が駆動源932に供給されると、交流モータが回転するとともに、その回転が変速機に伝達される。変速機は、交流モータから伝達された回転数を適宜減じた上で、車両Vの駆動軸を回転させる。これにより、車両Vが駆動する。車両Vの駆動にあたっては、アクセルペダルの変動量などの情報に基づき交流モータの回転数を自在に操作する必要がある。そこで、インバータ931は、要求される交流モータの回転数に対応させるべく、周波数が適宜変化された交流電力を出力するために必要である。
The drive system 93 drives the vehicle V. The drive system 93 has an inverter 931 and a drive source 932. The power stored in the storage battery 92 is supplied to the inverter 931. The power supplied from the storage battery 92 to the inverter 931 is DC power. In addition, unlike the power system shown in FIG. 15, a step-up DC-DC converter may be further provided between the storage battery 92 and the inverter 931. The inverter 931 converts DC power into AC power. The inverter 931 is conductive to the drive source 932. The drive source 932 has an AC motor and a transmission. When the AC power converted by the inverter 931 is supplied to the drive source 932, the AC motor rotates and the rotation is transmitted to the transmission. The transmission appropriately reduces the rotation speed transmitted from the AC motor and then rotates the drive shaft of the vehicle V. This drives the vehicle V. When driving the vehicle V, it is necessary to freely control the rotation speed of the AC motor based on information such as the amount of fluctuation in the accelerator pedal. Therefore, the inverter 931 is necessary to output AC power with an appropriate frequency change to correspond to the required rotation speed of the AC motor.
半導体装置A10の作用および効果は、次の通りである。
The functions and effects of the semiconductor device A10 are as follows:
半導体装置A10は、半導体素子1が搭載されたアイランド31と、当該アイランド31の周縁31cから延び出た延出部34を備える。図16は、半導体装置A10の製造時の一工程を示しており、複数のリード3~5がタイバー70によって互いに繋がり、1つのリードフレーム7である状態を示している。図15に示す状態において、リードフレーム7は、クランプ部材で固定される。これは、リードフレーム7の搬送時、半導体素子1の接合時、複数の接続部材61,62に接合時、および、封止部2の形成時に生じる振動によって、リードフレーム7の揺動を抑制するためである。たとえば、図15に示すリードフレーム7に対して、クランプ部材は、領域R1(図15においてドット柄で示す)を、押さえることが可能である。このように、半導体装置A10では、延出部34によって、クランプ部材で固定する箇所を確保することが可能となるので、クランプ部材がアイランド31に干渉する範囲を小さくすることが可能となる。これにより、半導体素子1とクランプ部材との干渉も抑制することができるので、半導体装置A10は、半導体素子1の平面視サイズの拡大化を図ることが可能となる。たとえば、半導体素子1の平面視サイズは、アイランド31の平面視サイズと同じ(あるいは略同じ)とすることが可能となる。
The semiconductor device A10 includes an island 31 on which a semiconductor element 1 is mounted, and an extension 34 extending from the periphery 31c of the island 31. FIG. 16 shows a process in the manufacture of the semiconductor device A10, in which a number of leads 3 to 5 are connected to one another by tie bars 70 to form a single lead frame 7. In the state shown in FIG. 15, the lead frame 7 is fixed by a clamp member. This is to suppress the swinging of the lead frame 7 due to vibrations that occur when the lead frame 7 is transported, when the semiconductor element 1 is bonded, when the lead frame 7 is bonded to the multiple connection members 61 and 62, and when the sealing portion 2 is formed. For example, for the lead frame 7 shown in FIG. 15, the clamp member can hold down the region R1 (shown by a dot pattern in FIG. 15). In this way, in the semiconductor device A10, the extension 34 makes it possible to secure a location to be fixed by the clamp member, so that the range in which the clamp member interferes with the island 31 can be reduced. This also suppresses interference between the semiconductor element 1 and the clamping member, making it possible for the semiconductor device A10 to increase the planar size of the semiconductor element 1. For example, the planar size of the semiconductor element 1 can be made the same (or approximately the same) as the planar size of the island 31.
半導体装置A10では、各延出部34の複数の延出側面34c,34dはそれぞれ、封止部2に覆われている。この構成によれば、従来のTOパッケージと同等(あるいは略同等)の外観とすることができる。つまり、半導体装置A10は、外観を従来のものから変化させることなく、半導体素子1の平面視サイズを拡大化させることが可能となる。
In the semiconductor device A10, the multiple extending side surfaces 34c, 34d of each extending portion 34 are each covered by the sealing portion 2. This configuration allows the semiconductor device A10 to have an appearance that is the same (or approximately the same) as a conventional TO package. In other words, the semiconductor device A10 makes it possible to increase the planar size of the semiconductor element 1 without changing the appearance from the conventional one.
半導体装置A10では、延出裏面34bは、封止部2に覆われている。この構成によれば、リード3が封止部2から抜けることを抑制できる。
In the semiconductor device A10, the extended back surface 34b is covered by the sealing portion 2. This configuration makes it possible to prevent the lead 3 from coming out of the sealing portion 2.
半導体装置A10では、各延出部34の厚さt34は、基部311の厚さt311(アイランド31の厚さに相当)よりも小さい。各延出部34の延出主面34aは、アイランド主面31aと面一である。この構成では、アイランド裏面31bが樹脂裏面22から露出する場合であっても、各延出部34の延出裏面34bは、封止部2に覆われている。したがって、半導体装置A10は、アイランド31が封止部2から抜けることを抑制できる。
In the semiconductor device A10, the thickness t34 of each extension portion 34 is smaller than the thickness t311 of the base 311 (corresponding to the thickness of the island 31). The extension main surface 34a of each extension portion 34 is flush with the island main surface 31a. In this configuration, even if the island back surface 31b is exposed from the resin back surface 22, the extension back surface 34b of each extension portion 34 is covered by the sealing portion 2. Therefore, the semiconductor device A10 can prevent the island 31 from coming out of the sealing portion 2.
半導体装置A10では、アイランド31の外周部312は、薄肉部313を含む。薄肉部313の厚さt313は、基部311の厚さt311よりも小さい。薄肉部313の下面(厚さ方向zのz1側を向く面)は、封止部2で覆われている。この構成によれば、アイランド31が封止部2から抜けることを抑制できる。
In the semiconductor device A10, the outer peripheral portion 312 of the island 31 includes a thin portion 313. The thickness t313 of the thin portion 313 is smaller than the thickness t311 of the base portion 311. The lower surface of the thin portion 313 (the surface facing the z1 side in the thickness direction z) is covered with the sealing portion 2. This configuration makes it possible to prevent the island 31 from coming out of the sealing portion 2.
半導体装置A10では、アイランド裏面31bは、封止部2(樹脂裏面22)から露出する。この構成では、半導体素子1から生じる熱に対する放熱性を高めることができる。
In the semiconductor device A10, the island back surface 31b is exposed from the sealing portion 2 (resin back surface 22). This configuration can improve the heat dissipation properties for the heat generated by the semiconductor element 1.
半導体装置A10では、各延出部34は、平面視において、半導体素子1に重ならない。この構成では、平面視において、半導体素子1がアイランド31からはみ出していない。したがって、半導体装置A10は、半導体素子1の第1電極11とアイランド31との導通面積の低下を抑制できる。
In the semiconductor device A10, each extension portion 34 does not overlap the semiconductor element 1 in a planar view. In this configuration, the semiconductor element 1 does not protrude from the island 31 in a planar view. Therefore, the semiconductor device A10 can suppress a decrease in the conduction area between the first electrode 11 of the semiconductor element 1 and the island 31.
半導体装置A10では、各延出部34は、アイランド31の周縁31cの第1方向yのy2側の端縁から第1方向yに延びる。先述のクランプ部材でリードフレーム7を固定する際、各延出部34(図15の領域R1)を押さえるとともに、タイバー70付近(図15の領域R2)を押さえることがある。このような場合において、クランプ部材で押さえる箇所を、第1方向yに離すことができるので、リードフレーム7の揺動を抑制する上で好ましい。
In the semiconductor device A10, each extension 34 extends in the first direction y from the edge on the y2 side of the periphery 31c of the island 31. When the lead frame 7 is fixed with the clamp member described above, each extension 34 (region R1 in FIG. 15) is pressed, and the vicinity of the tie bar 70 (region R2 in FIG. 15) may also be pressed. In such a case, the points pressed by the clamp member can be separated in the first direction y, which is preferable in terms of suppressing oscillation of the lead frame 7.
半導体装置A10は、互いに離間する2つの延出部34を備える。この構成によれば、2つの延出部34(図15の2つの領域R1の両方)の両方を先述のクランプ部材で押さえ、且つ、タイバー70付近(図15の3つの領域R2の少なくともいずれか)を押さえることで、リードフレーム7を三点で押さえて固定することができる。これにより、半導体装置A10の製造時におけるリードフレーム7の揺動をさらに抑制することができる。特に、半導体装置A10では、2つの延出部34は、厚さ方向zに見て、アイランド31の周縁31cのうち、第1方向yにおいて端子部32から遠い一対の角部31dにそれぞれ繋がる。この場合、クランプ部材で押さえる三点の平面視面積を大きくできる。このことは、リードフレーム7の固定、つまり、半導体装置A10の製造時におけるリードフレーム7の揺動を抑制する上で好ましい。
The semiconductor device A10 has two extending portions 34 spaced apart from each other. With this configuration, the two extending portions 34 (both of the two regions R1 in FIG. 15) are held down by the clamp member described above, and the vicinity of the tie bar 70 (at least one of the three regions R2 in FIG. 15) is held down, so that the lead frame 7 can be held down and fixed at three points. This can further suppress the swinging of the lead frame 7 during the manufacture of the semiconductor device A10. In particular, in the semiconductor device A10, the two extending portions 34 are connected to a pair of corners 31d, which are far from the terminal portion 32 in the first direction y, of the periphery 31c of the island 31 as viewed in the thickness direction z. In this case, the planar area of the three points held down by the clamp member can be increased. This is preferable for fixing the lead frame 7, that is, for suppressing the swinging of the lead frame 7 during the manufacture of the semiconductor device A10.
以下に、本開示の半導体装置の他の実施形態および変形例について、説明する。各実施形態および各変形例における各部の構成は、技術的な矛盾が生じない範囲において相互に組み合わせ可能である。
Other embodiments and modifications of the semiconductor device of the present disclosure are described below. The configurations of the various parts in each embodiment and each modification can be combined with each other to the extent that no technical contradictions arise.
図17は、第1実施形態の第1変形例にかかる半導体装置A11を示している。半導体装置A11は、半導体装置A10と比較して、次の点で異なる。それは、封止部2が、複数の凹部26のいずれも含んでいない点で異なる。
FIG. 17 shows a semiconductor device A11 according to a first modified example of the first embodiment. The semiconductor device A11 differs from the semiconductor device A10 in the following respect. That is, the semiconductor device A11 differs in that the sealing portion 2 does not include any of the multiple recesses 26.
図17に示すように、半導体装置A11では、封止部2が複数の凹部26のいずれも含んでいないため、アイランド31の上面(アイランド主面31a)および各延出部34の上面(延出主面34a)はすべて、封止部2で覆われている。したがって、半導体装置A11のリード3は、端子部32以外がすべて封止部2で覆われるため、意図せぬ短絡を抑制できる。
As shown in FIG. 17, in the semiconductor device A11, the sealing portion 2 does not include any of the multiple recesses 26, so the top surface of the island 31 (island main surface 31a) and the top surfaces of each extension portion 34 (extension main surface 34a) are all covered with the sealing portion 2. Therefore, all of the leads 3 of the semiconductor device A11 are covered with the sealing portion 2 except for the terminal portions 32, so unintended short circuits can be suppressed.
半導体装置A11では、半導体装置A10と同様に、半導体素子1が搭載されたアイランド31と、当該アイランド31の周縁31cから延び出た延出部34を備える。したがって、半導体装置A11は、半導体装置A10と同様に、半導体素子1とクランプ部材との干渉を抑制することができるので、半導体素子1の平面視サイズの拡大化を図ることが可能となる。その他、半導体装置A11は、半導体装置A10と共通する構成により、半導体装置A10と同様の効果を奏する。
Similar to the semiconductor device A10, the semiconductor device A11 includes an island 31 on which a semiconductor element 1 is mounted, and an extension portion 34 extending from a periphery 31c of the island 31. Therefore, similar to the semiconductor device A10, the semiconductor device A11 can suppress interference between the semiconductor element 1 and the clamp member, making it possible to increase the size of the semiconductor element 1 in a plan view. In addition, the semiconductor device A11 has a common configuration with the semiconductor device A10, and thus achieves the same effects as the semiconductor device A10.
図18は、第1実施形態の第2変形例にかかる半導体装置A12を示している。半導体装置A12は、半導体装置A10と比較して、次の点で異なる。それは、アイランド31が、溝部314を含む点である。
FIG. 18 shows a semiconductor device A12 according to a second modified example of the first embodiment. The semiconductor device A12 differs from the semiconductor device A10 in the following respect: the island 31 includes a groove portion 314.
溝部314は、アイランド主面31aから窪む。溝部314は、たとえば平面視において矩形環状である。溝部314は、平面視において、基部311と外周部312との境界に沿って形成される。溝部314は、平面視において、半導体素子1および導電性接合材19を囲む。この溝部314により、導電性接合材19の流出を抑制できる。この溝部314に封止部2が充填されることで、封止部2とリード3との付着力が高まる。
The groove 314 is recessed from the island main surface 31a. The groove 314 is, for example, rectangular and annular in plan view. In plan view, the groove 314 is formed along the boundary between the base 311 and the outer periphery 312. In plan view, the groove 314 surrounds the semiconductor element 1 and the conductive bonding material 19. This groove 314 can prevent the conductive bonding material 19 from flowing out. By filling the groove 314 with the sealing portion 2, the adhesion between the sealing portion 2 and the lead 3 is increased.
半導体装置A12では、半導体装置A10と同様に、半導体素子1が搭載されたアイランド31と、当該アイランド31の周縁31cから延び出た延出部34を備える。したがって、半導体装置A12は、半導体装置A10と同様に、半導体素子1とクランプ部材との干渉を抑制することができるので、半導体素子1の平面視サイズの拡大化を図ることが可能となる。その他、半導体装置A12は、各半導体装置A10,A11と共通する構成により、当該半導体装置A10,A11と同様の効果を奏する。
Similar to the semiconductor device A10, the semiconductor device A12 includes an island 31 on which a semiconductor element 1 is mounted, and an extension portion 34 extending from the periphery 31c of the island 31. Therefore, similar to the semiconductor device A10, the semiconductor device A12 can suppress interference between the semiconductor element 1 and the clamp member, making it possible to increase the size of the semiconductor element 1 in a plan view. In addition, the semiconductor device A12 has a common configuration with the semiconductor devices A10 and A11, and thus achieves the same effects as the semiconductor devices A10 and A11.
図19は、第1実施形態の第3変形例にかかる半導体装置A13を示している。半導体装置A13は、半導体装置A10と比較して、次の点で異なる。それは、2つの延出部34は、厚さ方向zに見て、アイランド31の周縁31cのうち、第1方向yにおいて端子部32から遠い一対の角部31dにそれぞれ繋がっていない。
FIG. 19 shows a semiconductor device A13 according to a third modified example of the first embodiment. The semiconductor device A13 differs from the semiconductor device A10 in the following respect. That is, when viewed in the thickness direction z, the two extension portions 34 are not connected to a pair of corner portions 31d of the periphery 31c of the island 31 that are far from the terminal portion 32 in the first direction y.
半導体装置A13では、第2方向xのx1側の延出部34は、半導体装置A10よりも第2方向xのx2側に配置され、第2方向xのx2側の延出部34は、半導体装置A10よりも第2方向xのx1側に配置されている。
In the semiconductor device A13, the extension 34 on the x1 side in the second direction x is disposed closer to the x2 side in the second direction x than the semiconductor device A10, and the extension 34 on the x2 side in the second direction x is disposed closer to the x1 side in the second direction x than the semiconductor device A10.
半導体装置A13では、半導体装置A10と同様に、半導体素子1が搭載されたアイランド31と、当該アイランド31の周縁31cから延び出た延出部34を備える。したがって、半導体装置A13は、半導体装置A10と同様に、半導体素子1とクランプ部材との干渉を抑制することができるので、半導体素子1の平面視サイズの拡大化を図ることが可能となる。その他、半導体装置A13は、各半導体装置A10~A12と共通する構成により、当該半導体装置A10~A12と同様の効果を奏する。
Similar to the semiconductor device A10, the semiconductor device A13 includes an island 31 on which a semiconductor element 1 is mounted, and an extension portion 34 extending from the periphery 31c of the island 31. Therefore, similar to the semiconductor device A10, the semiconductor device A13 can suppress interference between the semiconductor element 1 and the clamp member, making it possible to increase the size of the semiconductor element 1 in a plan view. In addition, the semiconductor device A13 has a common configuration with each of the semiconductor devices A10 to A12, and thus achieves the same effects as the semiconductor devices A10 to A12.
半導体装置A13から理解されるように、本開示の半導体装置において、各延出部34は、アイランド31の周縁31cのうち一対の角部31dのいずれかに繋がっているか否かは何ら限定されない。
As can be seen from semiconductor device A13, in the semiconductor device disclosed herein, there is no limitation as to whether each extension portion 34 is connected to one of a pair of corner portions 31d of the periphery 31c of the island 31.
図20および図21は、第2実施形態にかかる半導体装置A20を示している。半導体装置A20は、半導体装置A10と比較して、次の点で異なる。それは、2つの延出部34が、アイランド31の周縁31cのうちの第2方向xの各端縁からそれぞれ個別に第2方向xに延び出る点である。理解の便宜上、図20において、アイランド31の周縁31cを太い破線で示す。
FIGS. 20 and 21 show a semiconductor device A20 according to the second embodiment. The semiconductor device A20 differs from the semiconductor device A10 in the following respect. That is, two extension portions 34 extend in the second direction x individually from each end edge of the periphery 31c of the island 31 in the second direction x. For ease of understanding, the periphery 31c of the island 31 is shown by a thick dashed line in FIG. 20.
図20に示すように、半導体装置A20では、2つの延出部34のうちの一方(第2方向xのx1側の延出部34)は、周縁31cのうちの第2方向xのx1側の端縁から第2方向xのx1側に延びる。2つの延出部34のうちの他方(第2方向xのx2側の延出部34)は、周縁31cのうちの第2方向xのx2側の端縁から第2方向xのx2側に延びる。図20に示す例では、半導体装置A20の2つの延出部34はそれぞれ、アイランド31の周縁31cのうちの一対の角部31dにそれぞれ繋がる。この例とは異なり、2つの延出部34はそれぞれ、アイランド31の周縁31cのうちの一対の角部31dにそれぞれ繋がっていなくてもよく、周縁31cのうちの第2方向xの各端縁のそれぞれ中央に配置されていてもよいし、アイランド31の周縁31cのうちの、第1方向yにおいて、端子部32から違い側の一対の角部にそれぞれ繋がっていてもよい。図20に示すように、本実施形態では、各延出部34がアイランド31に対して第2方向xに延びるので、各延出部34の延出側面34cは、第2方向xのいずれかを向く。
As shown in Figure 20, in semiconductor device A20, one of the two extension portions 34 (extension portion 34 on the x1 side in the second direction x) extends from the edge of peripheral edge 31c on the x1 side in the second direction x to the x1 side in the second direction x. The other of the two extension portions 34 (extension portion 34 on the x2 side in the second direction x) extends from the edge of peripheral edge 31c on the x2 side in the second direction x to the x2 side in the second direction x. In the example shown in Figure 20, the two extension portions 34 of semiconductor device A20 are each connected to a pair of corner portions 31d of peripheral edge 31c of island 31. Unlike this example, the two extensions 34 may not be connected to a pair of corners 31d of the periphery 31c of the island 31, but may be disposed at the center of each edge of the periphery 31c in the second direction x, or may be connected to a pair of corners of the periphery 31c of the island 31 on opposite sides from the terminal portion 32 in the first direction y. As shown in FIG. 20, in this embodiment, each extension 34 extends in the second direction x relative to the island 31, so that the extension side surface 34c of each extension 34 faces in one direction in the second direction x.
半導体装置A20では、半導体装置A10と同様に、半導体素子1が搭載されたアイランド31と、当該アイランド31の周縁31cから延び出た延出部34を備える。したがって、半導体装置A20は、半導体装置A10と同様に、半導体素子1とクランプ部材との干渉を抑制することができるので、半導体素子1の平面視サイズの拡大化を図ることが可能となる。その他、半導体装置A20は、各半導体装置A10~A13と共通する構成により、当該半導体装置A10~A13と同様の効果を奏する。
Similar to the semiconductor device A10, the semiconductor device A20 includes an island 31 on which the semiconductor element 1 is mounted, and an extension portion 34 extending from the periphery 31c of the island 31. Therefore, similar to the semiconductor device A10, the semiconductor device A20 can suppress interference between the semiconductor element 1 and the clamp member, making it possible to increase the size of the semiconductor element 1 in a plan view. In addition, the semiconductor device A20 has a common configuration with each of the semiconductor devices A10 to A13, and thus achieves the same effects as the semiconductor devices A10 to A13.
半導体装置A20から理解されるように、本開示の半導体装置において、各延出部34は、アイランド31の周縁31cのうちの、第1方向yの端縁から延びるものに限定されず、第2方向xの端縁から延びていてもよい。さらに、本開示の半導体装置において、複数の延出部34はそれぞれ、アイランド31の周縁31cからアイランド31の外方に延びていればよく、複数の延出部34の各配置は何ら限定されない。たとえば、複数の延出部34は、周縁31cのうちの第1方向yの端縁から延びるものと、第2方向xの端縁から延びるものとが混在していてもよい。
As can be seen from semiconductor device A20, in the semiconductor device of the present disclosure, each extension portion 34 is not limited to extending from an edge of the periphery 31c of the island 31 in the first direction y, but may extend from an edge in the second direction x. Furthermore, in the semiconductor device of the present disclosure, the multiple extension portions 34 only need to extend from the periphery 31c of the island 31 outward from the island 31, and the arrangement of the multiple extension portions 34 is not limited in any way. For example, the multiple extension portions 34 may include a mixture of those extending from an edge of the periphery 31c in the first direction y and those extending from an edge in the second direction x.
図22は、第3実施形態にかかる半導体装置A30を示している。半導体装置A30は、半導体装置A10と比較して、次の点で異なる。それは、延出部34の数が1つである点である。つまり、半導体装置A30のリード3は、1つの延出部34を含む。理解の便宜上、図21において、アイランド31の周縁31cを太い破線で示す。
FIG. 22 shows a semiconductor device A30 according to the third embodiment. The semiconductor device A30 differs from the semiconductor device A10 in the following respect: the number of extension portions 34 is one. In other words, the lead 3 of the semiconductor device A30 includes one extension portion 34. For ease of understanding, the periphery 31c of the island 31 is shown by a thick dashed line in FIG. 21.
図22に示す例では、延出部34は、アイランド31の周縁31cのうちの第1方向yのy2側の端縁から延びる。この例とは異なり、延出部34は、周縁31cのうちの第2方向xのx1側の端縁から延びていてもよいし、周縁31cの第2方向xのx2側の端縁から延びていてもよい。
In the example shown in FIG. 22, the extension 34 extends from the edge of the periphery 31c of the island 31 on the y2 side in the first direction y. In contrast to this example, the extension 34 may extend from the edge of the periphery 31c on the x1 side in the second direction x, or from the edge of the periphery 31c on the x2 side in the second direction x.
半導体装置A30では、半導体装置A10と同様に、半導体素子1が搭載されたアイランド31と、当該アイランド31の周縁31cから延び出た延出部34を備える。したがって、半導体装置A30は、半導体装置A10と同様に、半導体素子1とクランプ部材との干渉を抑制することができるので、半導体素子1の平面視サイズの拡大化を図ることが可能となる。その他、半導体装置A30は、各半導体装置A10~A13,A20と共通する構成により、当該半導体装置A10~A13,A20と同様の効果を奏する。
Similar to the semiconductor device A10, the semiconductor device A30 includes an island 31 on which a semiconductor element 1 is mounted, and an extension portion 34 extending from the periphery 31c of the island 31. Therefore, similar to the semiconductor device A10, the semiconductor device A30 can suppress interference between the semiconductor element 1 and the clamp member, making it possible to increase the size of the semiconductor element 1 in a plan view. In addition, the semiconductor device A30 has a common configuration with the semiconductor devices A10 to A13, A20, and thus achieves the same effects as the semiconductor devices A10 to A13, A20.
半導体装置A30から理解されるように、本開示の半導体装置において、延出部34の数は、1つであってもよいし、複数であってもよい。
As can be understood from semiconductor device A30, in the semiconductor device disclosed herein, the number of extension portions 34 may be one or more.
本開示にかかる半導体装置は、上記した実施形態に限定されるものではない。本開示の半導体装置の各部の具体的な構成は、種々に設計変更自在である。たとえば、本開示の半導体装置は、以下の付記に記載された実施形態を含む。
付記1.
半導体素子と、
前記半導体素子が搭載されたアイランドと、
前記アイランドの厚さ方向に見て、前記アイランドの周縁から延び出た少なくとも1つの延出部と、
前記半導体素子を覆う封止部と、
を備え、
前記少なくとも1つの延出部は、前記厚さ方向の一方を向く延出主面と、前記厚さ方向において前記延出主面と反対側を向く延出裏面と、前記厚さ方向において前記延出主面と前記延出裏面との間に配置された延出側面と、を有し、
前記延出側面は、前記封止部に覆われている、半導体装置。
付記2.
前記アイランドは、前記厚さ方向に見て少なくとも一部が前記半導体素子に重なる基部と、前記厚さ方向に見て前記基部を囲む外周部とを含み、
前記外周部は、前記厚さ方向の寸法が前記基部の前記厚さ方向の寸法よりも小さい薄肉部を含む、付記1に記載の半導体装置。
付記3.
前記少なくとも1つの延出部の前記厚さ方向の寸法は、前記薄肉部の前記厚さ方向の寸法よりも小さい、付記2に記載の半導体装置。
付記4.
前記アイランドは、前記厚さ方向において前記延出主面と同じ方向を向き且つ前記半導体素子が搭載されたアイランド主面を有し、
前記アイランド主面と前記延出主面とは、面一である、付記1ないし付記3のいずれかに記載の半導体装置。
付記5.
前記少なくとも1つの延出部の前記厚さ方向の寸法は、前記アイランドの前記厚さ方向の寸法よりも小さい、付記4に記載の半導体装置。
付記6.
前記延出裏面は、前記封止部に覆われている、付記5に記載の半導体装置。
付記7.
前記アイランドは、前記厚さ方向において前記アイランド主面と反対側を向くアイランド裏面を有し、
前記アイランド裏面は、前記封止部から露出する、付記6に記載の半導体装置。
付記8.
前記少なくとも1つの延出部は、複数の延出部を含み、
前記複数の延出部は、互いに離間する、付記1ないし付記7のいずれかに記載の半導体装置。
付記9.
前記少なくとも1つの延出部は、前記厚さ方向に見て、前記半導体素子に重ならない、付記1ないし付記8のいずれかに記載の半導体装置。
付記10.
前記アイランドから離間し且つ前記封止部から露出する第1端子部をさらに備え、
前記第1端子部は、前記半導体素子に導通する、付記1ないし付記9のいずれかに記載の半導体装置。
付記11.
前記第1端子部は、前記厚さ方向に見て、前記アイランドに対して、前記厚さ方向に直交する第1方向の一方に位置する、付記10に記載の半導体装置。
付記12.
前記少なくとも1つの延出部は、前記厚さ方向に見て、前記アイランドのうち、前記第1方向において前記第1端子部と反対側の端縁から延び出る、付記11に記載の半導体装置。
付記13.
前記少なくとも1つの延出部は、前記厚さ方向に見て、前記アイランドのうち、前記厚さ方向および前記第1方向に直交する第2方向の端縁から延び出る、付記11に記載の半導体装置。
付記14.
前記アイランドは、前記厚さ方向に見て矩形であり、
前記少なくとも1つの延出部は、前記厚さ方向に見て、前記アイランドのうち、前記第1方向において前記第1端子部から遠い角部に繋がる、付記11ないし付記13のいずれかに記載の半導体装置。
付記15.
前記アイランドおよび前記第1端子部の各々から離間し且つ前記封止部から露出する第2端子部をさらに備え、
前記第2端子部は、前記半導体素子に導通する、付記10ないし付記14のいずれかに記載の半導体装置。
付記16.
前記半導体素子に接合された接続部材と、
前記接続部材が接合されたパッド部と、をさらに備え、
前記第2端子部は、前記接続部材および前記パッド部を介して前記半導体素子に導通する、付記15に記載の半導体装置。
付記17.
前記第1端子部および前記アイランドの各々に繋がり、且つ前記第1端子部および前記アイランドの各々と一体的に形成された第1中継部と、
前記第2端子部および前記パッド部の各々に繋がり、且つ前記第2端子部および前記パッド部の各々と一体的に形成された第2中継部と、をさらに備える、付記16に記載の半導体装置。
付記18.
駆動源と、
前記駆動源に供給する電力を蓄積する蓄電池と、
外部から入力される電力を変換して前記蓄電池に供給する車載充電器と、
を備え、
前記車載充電器は、付記1ないし付記17のいずれかに記載の半導体装置を備える、車両。 The semiconductor device according to the present disclosure is not limited to the above-mentioned embodiment. The specific configuration of each part of the semiconductor device according to the present disclosure can be freely designed in various ways. For example, the semiconductor device according to the present disclosure includes the embodiments described in the following appendix.
Appendix 1.
A semiconductor element;
an island on which the semiconductor element is mounted;
At least one extension portion extending from a periphery of the island when viewed in a thickness direction of the island;
a sealing portion for covering the semiconductor element;
Equipped with
The at least one extension portion has an extension main surface facing one side in the thickness direction, an extension back surface facing the opposite side to the extension main surface in the thickness direction, and an extension side surface arranged between the extension main surface and the extension back surface in the thickness direction,
The extending side surface is covered by the sealing portion.
Appendix 2.
the island includes a base portion at least a portion of which overlaps with the semiconductor element when viewed in the thickness direction, and an outer periphery portion surrounding the base portion when viewed in the thickness direction,
2. The semiconductor device according toclaim 1, wherein the outer periphery includes a thin-walled portion whose dimension in the thickness direction is smaller than the dimension in the thickness direction of the base.
Appendix 3.
3. The semiconductor device according toclaim 2, wherein a dimension in the thickness direction of the at least one extension portion is smaller than a dimension in the thickness direction of the thin portion.
Appendix 4.
the island has an island main surface on which the semiconductor element is mounted, the island main surface facing in the same direction as the extended main surface in the thickness direction;
4. The semiconductor device according toclaim 1, wherein the island main surface and the extended main surface are flush with each other.
Appendix 5.
5. The semiconductor device according toclaim 4, wherein a dimension of the at least one extension in the thickness direction is smaller than a dimension of the island in the thickness direction.
Appendix 6.
The semiconductor device according toclaim 5, wherein the extended back surface is covered by the sealing portion.
Appendix 7.
the island has an island back surface facing a side opposite to the island main surface in the thickness direction,
7. The semiconductor device according to claim 6, wherein a rear surface of the island is exposed from the sealing portion.
Appendix 8.
The at least one extension portion includes a plurality of extension portions,
8. The semiconductor device according toclaim 1, wherein the plurality of extension portions are spaced apart from each other.
Appendix 9.
9. The semiconductor device according toclaim 1, wherein the at least one extending portion does not overlap the semiconductor element when viewed in the thickness direction.
Appendix 10.
a first terminal portion spaced apart from the island and exposed from the sealing portion;
10. The semiconductor device according toclaim 1, wherein the first terminal portion is electrically connected to the semiconductor element.
Appendix 11.
11. The semiconductor device according to claim 10, wherein the first terminal portion is located on one side of the island in a first direction perpendicular to the thickness direction when viewed in the thickness direction.
Appendix 12.
12. The semiconductor device according toclaim 11, wherein the at least one extension portion extends from an edge of the island opposite the first terminal portion in the first direction when viewed in the thickness direction.
Appendix 13.
12. The semiconductor device according toclaim 11, wherein the at least one extension portion extends from an edge of the island in a second direction perpendicular to the thickness direction and the first direction when viewed in the thickness direction.
Appendix 14.
The island has a rectangular shape when viewed in the thickness direction,
14. The semiconductor device according toclaim 11, wherein the at least one extension portion is connected to a corner portion of the island that is farthest from the first terminal portion in the first direction when viewed in the thickness direction.
Appendix 15.
a second terminal portion spaced apart from the island and the first terminal portion and exposed from the sealing portion;
15. The semiconductor device according to claim 10, wherein the second terminal is electrically connected to the semiconductor element.
Appendix 16.
A connection member joined to the semiconductor element;
A pad portion to which the connection member is joined,
16. The semiconductor device according to claim 15, wherein the second terminal portion is electrically connected to the semiconductor element via the connection member and the pad portion.
Appendix 17.
a first relay portion connected to each of the first terminal portion and the island and integrally formed with each of the first terminal portion and the island;
17. The semiconductor device according to claim 16, further comprising: a second relay portion connected to each of the second terminal portion and the pad portion and integrally formed with each of the second terminal portion and the pad portion.
Appendix 18.
A driving source;
A storage battery that stores power to be supplied to the driving source;
an on-board charger that converts power input from an external source and supplies the power to the storage battery;
Equipped with
18. A vehicle, wherein the on-board charger is provided with the semiconductor device according to any one ofSupplementary Note 1 to Supplementary Note 17.
付記1.
半導体素子と、
前記半導体素子が搭載されたアイランドと、
前記アイランドの厚さ方向に見て、前記アイランドの周縁から延び出た少なくとも1つの延出部と、
前記半導体素子を覆う封止部と、
を備え、
前記少なくとも1つの延出部は、前記厚さ方向の一方を向く延出主面と、前記厚さ方向において前記延出主面と反対側を向く延出裏面と、前記厚さ方向において前記延出主面と前記延出裏面との間に配置された延出側面と、を有し、
前記延出側面は、前記封止部に覆われている、半導体装置。
付記2.
前記アイランドは、前記厚さ方向に見て少なくとも一部が前記半導体素子に重なる基部と、前記厚さ方向に見て前記基部を囲む外周部とを含み、
前記外周部は、前記厚さ方向の寸法が前記基部の前記厚さ方向の寸法よりも小さい薄肉部を含む、付記1に記載の半導体装置。
付記3.
前記少なくとも1つの延出部の前記厚さ方向の寸法は、前記薄肉部の前記厚さ方向の寸法よりも小さい、付記2に記載の半導体装置。
付記4.
前記アイランドは、前記厚さ方向において前記延出主面と同じ方向を向き且つ前記半導体素子が搭載されたアイランド主面を有し、
前記アイランド主面と前記延出主面とは、面一である、付記1ないし付記3のいずれかに記載の半導体装置。
付記5.
前記少なくとも1つの延出部の前記厚さ方向の寸法は、前記アイランドの前記厚さ方向の寸法よりも小さい、付記4に記載の半導体装置。
付記6.
前記延出裏面は、前記封止部に覆われている、付記5に記載の半導体装置。
付記7.
前記アイランドは、前記厚さ方向において前記アイランド主面と反対側を向くアイランド裏面を有し、
前記アイランド裏面は、前記封止部から露出する、付記6に記載の半導体装置。
付記8.
前記少なくとも1つの延出部は、複数の延出部を含み、
前記複数の延出部は、互いに離間する、付記1ないし付記7のいずれかに記載の半導体装置。
付記9.
前記少なくとも1つの延出部は、前記厚さ方向に見て、前記半導体素子に重ならない、付記1ないし付記8のいずれかに記載の半導体装置。
付記10.
前記アイランドから離間し且つ前記封止部から露出する第1端子部をさらに備え、
前記第1端子部は、前記半導体素子に導通する、付記1ないし付記9のいずれかに記載の半導体装置。
付記11.
前記第1端子部は、前記厚さ方向に見て、前記アイランドに対して、前記厚さ方向に直交する第1方向の一方に位置する、付記10に記載の半導体装置。
付記12.
前記少なくとも1つの延出部は、前記厚さ方向に見て、前記アイランドのうち、前記第1方向において前記第1端子部と反対側の端縁から延び出る、付記11に記載の半導体装置。
付記13.
前記少なくとも1つの延出部は、前記厚さ方向に見て、前記アイランドのうち、前記厚さ方向および前記第1方向に直交する第2方向の端縁から延び出る、付記11に記載の半導体装置。
付記14.
前記アイランドは、前記厚さ方向に見て矩形であり、
前記少なくとも1つの延出部は、前記厚さ方向に見て、前記アイランドのうち、前記第1方向において前記第1端子部から遠い角部に繋がる、付記11ないし付記13のいずれかに記載の半導体装置。
付記15.
前記アイランドおよび前記第1端子部の各々から離間し且つ前記封止部から露出する第2端子部をさらに備え、
前記第2端子部は、前記半導体素子に導通する、付記10ないし付記14のいずれかに記載の半導体装置。
付記16.
前記半導体素子に接合された接続部材と、
前記接続部材が接合されたパッド部と、をさらに備え、
前記第2端子部は、前記接続部材および前記パッド部を介して前記半導体素子に導通する、付記15に記載の半導体装置。
付記17.
前記第1端子部および前記アイランドの各々に繋がり、且つ前記第1端子部および前記アイランドの各々と一体的に形成された第1中継部と、
前記第2端子部および前記パッド部の各々に繋がり、且つ前記第2端子部および前記パッド部の各々と一体的に形成された第2中継部と、をさらに備える、付記16に記載の半導体装置。
付記18.
駆動源と、
前記駆動源に供給する電力を蓄積する蓄電池と、
外部から入力される電力を変換して前記蓄電池に供給する車載充電器と、
を備え、
前記車載充電器は、付記1ないし付記17のいずれかに記載の半導体装置を備える、車両。 The semiconductor device according to the present disclosure is not limited to the above-mentioned embodiment. The specific configuration of each part of the semiconductor device according to the present disclosure can be freely designed in various ways. For example, the semiconductor device according to the present disclosure includes the embodiments described in the following appendix.
A semiconductor element;
an island on which the semiconductor element is mounted;
At least one extension portion extending from a periphery of the island when viewed in a thickness direction of the island;
a sealing portion for covering the semiconductor element;
Equipped with
The at least one extension portion has an extension main surface facing one side in the thickness direction, an extension back surface facing the opposite side to the extension main surface in the thickness direction, and an extension side surface arranged between the extension main surface and the extension back surface in the thickness direction,
The extending side surface is covered by the sealing portion.
the island includes a base portion at least a portion of which overlaps with the semiconductor element when viewed in the thickness direction, and an outer periphery portion surrounding the base portion when viewed in the thickness direction,
2. The semiconductor device according to
3. The semiconductor device according to
the island has an island main surface on which the semiconductor element is mounted, the island main surface facing in the same direction as the extended main surface in the thickness direction;
4. The semiconductor device according to
5. The semiconductor device according to
Appendix 6.
The semiconductor device according to
the island has an island back surface facing a side opposite to the island main surface in the thickness direction,
7. The semiconductor device according to claim 6, wherein a rear surface of the island is exposed from the sealing portion.
Appendix 8.
The at least one extension portion includes a plurality of extension portions,
8. The semiconductor device according to
Appendix 9.
9. The semiconductor device according to
Appendix 10.
a first terminal portion spaced apart from the island and exposed from the sealing portion;
10. The semiconductor device according to
11. The semiconductor device according to claim 10, wherein the first terminal portion is located on one side of the island in a first direction perpendicular to the thickness direction when viewed in the thickness direction.
12. The semiconductor device according to
12. The semiconductor device according to
Appendix 14.
The island has a rectangular shape when viewed in the thickness direction,
14. The semiconductor device according to
Appendix 15.
a second terminal portion spaced apart from the island and the first terminal portion and exposed from the sealing portion;
15. The semiconductor device according to claim 10, wherein the second terminal is electrically connected to the semiconductor element.
Appendix 16.
A connection member joined to the semiconductor element;
A pad portion to which the connection member is joined,
16. The semiconductor device according to claim 15, wherein the second terminal portion is electrically connected to the semiconductor element via the connection member and the pad portion.
Appendix 17.
a first relay portion connected to each of the first terminal portion and the island and integrally formed with each of the first terminal portion and the island;
17. The semiconductor device according to claim 16, further comprising: a second relay portion connected to each of the second terminal portion and the pad portion and integrally formed with each of the second terminal portion and the pad portion.
Appendix 18.
A driving source;
A storage battery that stores power to be supplied to the driving source;
an on-board charger that converts power input from an external source and supplies the power to the storage battery;
Equipped with
18. A vehicle, wherein the on-board charger is provided with the semiconductor device according to any one of
A10,A11,A12,A13,A20,A30:半導体装置
1:半導体素子 10a:素子主面
10b:素子裏面 11:第1電極
12:第2電極 13:第3電極
19:導電性接合材 2:封止部
21:樹脂主面 22:樹脂裏面
23:樹脂側面 24:樹脂側面
25:凹部 26:凹部
3:リード 31:アイランド
311:基部 312:外周部
313:薄肉部 313a:突起
314:溝部 31a:アイランド主面
31b:アイランド裏面 31c:周縁
31d:角部 32:端子部
33:中継部 34:延出部
34a:延出主面 34b:延出裏面
34c,34d:延出側面 341:突起
4:リード 41:パッド部
42:端子部 43:中継部
5:リード 51:パッド部
52:端子部 53:中継部
61,62:接続部材 7:リードフレーム
70:タイバー 91:車載充電器
92:蓄電池 93:駆動系統
931:インバータ 932:駆動源
V:車両 A10, A11, A12, A13, A20, A30: semiconductor device 1:semiconductor element 10a: element main surface 10b: element back surface 11: first electrode 12: second electrode 13: third electrode 19: conductive bonding material 2: sealing portion 21: resin main surface 22: resin back surface 23: resin side surface 24: resin side surface 25: recess 26: recess 3: lead 31: island 311: base 312: outer periphery 313: thin portion 313a: protrusion 314: groove 31a: island main surface 31b: island back surface 31c: periphery 31d: corner 32: terminal portion 33: relay portion 34: extension portion 34a: extension main surface 34b: extension back surface 34c, 34d: extension side surface 341: protrusion 4: lead 41: pad portion 42: terminal portion 43: relay portion 5: lead 51: pad portion 52: terminal portion 53: relay portion 61, 62: connection member 7: lead frame 70: tie bar 91: on-board charger 92: storage battery 93: drive system 931: inverter 932: drive source V: vehicle
1:半導体素子 10a:素子主面
10b:素子裏面 11:第1電極
12:第2電極 13:第3電極
19:導電性接合材 2:封止部
21:樹脂主面 22:樹脂裏面
23:樹脂側面 24:樹脂側面
25:凹部 26:凹部
3:リード 31:アイランド
311:基部 312:外周部
313:薄肉部 313a:突起
314:溝部 31a:アイランド主面
31b:アイランド裏面 31c:周縁
31d:角部 32:端子部
33:中継部 34:延出部
34a:延出主面 34b:延出裏面
34c,34d:延出側面 341:突起
4:リード 41:パッド部
42:端子部 43:中継部
5:リード 51:パッド部
52:端子部 53:中継部
61,62:接続部材 7:リードフレーム
70:タイバー 91:車載充電器
92:蓄電池 93:駆動系統
931:インバータ 932:駆動源
V:車両 A10, A11, A12, A13, A20, A30: semiconductor device 1:
Claims (18)
- 半導体素子と、
前記半導体素子が搭載されたアイランドと、
前記アイランドの厚さ方向に見て、前記アイランドの周縁から延び出た少なくとも1つの延出部と、
前記半導体素子を覆う封止部と、
を備え、
前記少なくとも1つの延出部は、前記厚さ方向の一方を向く延出主面と、前記厚さ方向において前記延出主面と反対側を向く延出裏面と、前記厚さ方向において前記延出主面と前記延出裏面との間に配置された延出側面と、を有し、
前記延出側面は、前記封止部に覆われている、半導体装置。 A semiconductor element;
an island on which the semiconductor element is mounted;
At least one extension portion extending from a periphery of the island when viewed in a thickness direction of the island;
a sealing portion for covering the semiconductor element;
Equipped with
The at least one extension portion has an extension main surface facing one side in the thickness direction, an extension back surface facing the opposite side to the extension main surface in the thickness direction, and an extension side surface arranged between the extension main surface and the extension back surface in the thickness direction,
The extending side surface is covered by the sealing portion. - 前記アイランドは、前記厚さ方向に見て少なくとも一部が前記半導体素子に重なる基部と、前記厚さ方向に見て前記基部を囲む外周部とを含み、
前記外周部は、前記厚さ方向の寸法が前記基部の前記厚さ方向の寸法よりも小さい薄肉部を含む、請求項1に記載の半導体装置。 the island includes a base portion at least a portion of which overlaps with the semiconductor element when viewed in the thickness direction, and an outer periphery portion surrounding the base portion when viewed in the thickness direction,
The semiconductor device according to claim 1 , wherein said outer periphery includes a thin portion whose dimension in said thickness direction is smaller than the dimension in said thickness direction of said base portion. - 前記少なくとも1つの延出部の前記厚さ方向の寸法は、前記薄肉部の前記厚さ方向の寸法よりも小さい、請求項2に記載の半導体装置。 The semiconductor device according to claim 2, wherein the dimension in the thickness direction of the at least one extension portion is smaller than the dimension in the thickness direction of the thin portion.
- 前記アイランドは、前記厚さ方向において前記延出主面と同じ方向を向き且つ前記半導体素子が搭載されたアイランド主面を有し、
前記アイランド主面と前記延出主面とは、面一である、請求項1ないし請求項3のいずれかに記載の半導体装置。 the island has an island main surface on which the semiconductor element is mounted, the island main surface facing in the same direction as the extended main surface in the thickness direction;
4. The semiconductor device according to claim 1, wherein said island main surface and said extended main surface are flush with each other. - 前記少なくとも1つの延出部の前記厚さ方向の寸法は、前記アイランドの前記厚さ方向の寸法よりも小さい、請求項4に記載の半導体装置。 The semiconductor device of claim 4, wherein the thickness dimension of the at least one extension is smaller than the thickness dimension of the island.
- 前記延出裏面は、前記封止部に覆われている、請求項5に記載の半導体装置。 The semiconductor device according to claim 5, wherein the extended back surface is covered by the sealing portion.
- 前記アイランドは、前記厚さ方向において前記アイランド主面と反対側を向くアイランド裏面を有し、
前記アイランド裏面は、前記封止部から露出する、請求項6に記載の半導体装置。 the island has an island back surface facing a side opposite to the island main surface in the thickness direction,
The semiconductor device according to claim 6 , wherein the back surface of the island is exposed from the sealing portion. - 前記少なくとも1つの延出部は、複数の延出部を含み、
前記複数の延出部は、互いに離間する、請求項1ないし請求項7のいずれかに記載の半導体装置。 The at least one extension portion includes a plurality of extension portions,
The semiconductor device according to claim 1 , wherein the plurality of extending portions are spaced apart from each other. - 前記少なくとも1つの延出部は、前記厚さ方向に見て、前記半導体素子に重ならない、請求項1ないし請求項8のいずれかに記載の半導体装置。 The semiconductor device according to any one of claims 1 to 8, wherein the at least one extension does not overlap the semiconductor element when viewed in the thickness direction.
- 前記アイランドから離間し且つ前記封止部から露出する第1端子部をさらに備え、
前記第1端子部は、前記半導体素子に導通する、請求項1ないし請求項9のいずれかに記載の半導体装置。 a first terminal portion spaced apart from the island and exposed from the sealing portion;
The semiconductor device according to claim 1 , wherein the first terminal portion is electrically connected to the semiconductor element. - 前記第1端子部は、前記厚さ方向に見て、前記アイランドに対して、前記厚さ方向に直交する第1方向の一方に位置する、請求項10に記載の半導体装置。 The semiconductor device according to claim 10, wherein the first terminal portion is located on one side of the island in a first direction perpendicular to the thickness direction when viewed in the thickness direction.
- 前記少なくとも1つの延出部は、前記厚さ方向に見て、前記アイランドのうち、前記第1方向において前記第1端子部と反対側の端縁から延び出る、請求項11に記載の半導体装置。 The semiconductor device according to claim 11, wherein the at least one extension portion extends from an edge of the island opposite the first terminal portion in the first direction when viewed in the thickness direction.
- 前記少なくとも1つの延出部は、前記厚さ方向に見て、前記アイランドのうち、前記厚さ方向および前記第1方向に直交する第2方向の端縁から延び出る、請求項11に記載の半導体装置。 The semiconductor device according to claim 11, wherein the at least one extension portion extends from an edge of the island in a second direction perpendicular to the thickness direction and the first direction, as viewed in the thickness direction.
- 前記アイランドは、前記厚さ方向に見て矩形であり、
前記少なくとも1つの延出部は、前記厚さ方向に見て、前記アイランドのうち、前記第1方向において前記第1端子部から遠い角部に繋がる、請求項11ないし請求項13のいずれかに記載の半導体装置。 The island has a rectangular shape when viewed in the thickness direction,
14. The semiconductor device according to claim 11, wherein the at least one extending portion is connected to a corner portion of the island that is farther from the first terminal portion in the first direction as viewed in the thickness direction. - 前記アイランドおよび前記第1端子部の各々から離間し且つ前記封止部から露出する第2端子部をさらに備え、
前記第2端子部は、前記半導体素子に導通する、請求項10ないし請求項14のいずれかに記載の半導体装置。 a second terminal portion spaced apart from the island and the first terminal portion and exposed from the sealing portion;
15. The semiconductor device according to claim 10, wherein the second terminal is electrically connected to the semiconductor element. - 前記半導体素子に接合された接続部材と、
前記接続部材が接合されたパッド部と、をさらに備え、
前記第2端子部は、前記接続部材および前記パッド部を介して前記半導体素子に導通する、請求項15に記載の半導体装置。 A connection member joined to the semiconductor element;
A pad portion to which the connection member is joined,
The semiconductor device according to claim 15 , wherein the second terminal portion is electrically connected to the semiconductor element via the connection member and the pad portion. - 前記第1端子部および前記アイランドの各々に繋がり、且つ前記第1端子部および前記アイランドの各々と一体的に形成された第1中継部と、
前記第2端子部および前記パッド部の各々に繋がり、且つ前記第2端子部および前記パッド部の各々と一体的に形成された第2中継部と、をさらに備える、請求項16に記載の半導体装置。 a first relay portion connected to each of the first terminal portion and the island and integrally formed with each of the first terminal portion and the island;
17. The semiconductor device according to claim 16, further comprising: a second relay portion connected to each of said second terminal portion and said pad portion and formed integrally with each of said second terminal portion and said pad portion. - 駆動源と、
前記駆動源に供給する電力を蓄積する蓄電池と、
外部から入力される電力を変換して前記蓄電池に供給する車載充電器と、
を備え、
前記車載充電器は、請求項1ないし請求項17のいずれかに記載の半導体装置を備える、車両。 A driving source;
A storage battery that stores power to be supplied to the driving source;
an on-board charger that converts power input from an external source and supplies the power to the storage battery;
Equipped with
The vehicle-mounted charger comprises the semiconductor device according to claim 1 .
Applications Claiming Priority (2)
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JP2023-075727 | 2023-05-01 | ||
JP2023075727 | 2023-05-01 |
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WO2024228322A1 true WO2024228322A1 (en) | 2024-11-07 |
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