WO2024160669A1

WO2024160669A1 - Sensor device having a plurality of optical channels

Info

Publication number: WO2024160669A1
Application number: PCT/EP2024/051893
Authority: WO
Inventors: Julius KOMMA; Holger Pless; Rohan KUNDU; Peter Schreiber
Original assignee: Ams-Osram Ag; Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Priority date: 2023-01-30
Filing date: 2024-01-26
Publication date: 2024-08-08
Also published as: DE102023102131A1

Abstract

The invention relates to a sensor device (1) comprising a detection surface (4) having a plurality of mutually adjacent detection areas (40) for absorbing radiation, and an optical unit (2) which covers the detection surface (4) as viewed in a vertical direction running perpendicularly to the detection surface (4), wherein - the optical unit (2) has a plurality of mutually adjacent optical channels (20); - each optical channel (20) is assigned an optical input unit (21), an optical output unit (22), and an aperture opening (30), wherein the optical output unit (22) is located between the optical input unit (21) and the detection surface (4); - each of the optical input units (21) image at least a portion of a measuring field into an image plane (29); - the aperture openings (30) are located in the image plane (29); and - each of the optical output units (22) image the radiation transmitted by the associated aperture opening (30) onto the detection surface (4).

Description

SENSOR DEVICE WITH A PLURALITY OF OPTICAL CHANNELS

The present application relates to a sensor device having a plurality of optical channels.

In the case of multi-channel sensors which, for example, determine the colour coordinates of radiation from a measuring field or a defined angle range, measurement errors can occur if colour structures or colour gradients of the measuring field are spatially resolved and mapped onto the sensor plane, which is divided into several detection areas. When colour filters in the form of interference filters are used, an exact measurement is further made more difficult by the fact that their spectral transmission depends comparatively strongly on the angle of incidence, so that the angle of incidence must not exceed the acceptance angle of the colour filter.

One task is to provide a sensor device which allows a reliable, multi-channel measurement with a high accuracy in a compact design.

This object is achieved, inter alia, by a sensor device having the features of patent claim 1. Further embodiments and advantages are the subject of the dependent patent claims.

A sensor device is specified.

According to at least one embodiment of the sensor device, the sensor device has a detection surface with a plurality of adjacently arranged, for absorption of radiation. All active areas of the sensor device intended for the detection of radiation are located in particular within the detection area. The radiation to be detected can be in the infrared, visible and/or ultraviolet spectral range. In particular, the sensor device is designed to deliver signals from several detection channels during operation. The detection channels can each be assigned exactly one detection area or a plurality of detection areas. For example, the detection channels can differ from one another with regard to their spectral sensitivity distribution.

According to at least one embodiment of the sensor device, the sensor device has an optical system that covers the detection surface when viewed along a vertical direction running perpendicular to the detection surface. The optical system is designed to focus radiation from a measuring field onto the detection surface.

According to at least one embodiment of the sensor device, the optics comprise a plurality of optical channels arranged next to one another. In particular, each optical channel is designed to focus radiation from at least part of the measuring field onto the detection surface and, in particular, to illuminate the entire detection surface.

According to at least one embodiment of the sensor device, each optical channel is assigned an input optic, in particular exactly one input optic. The input optic is in particular the first imaging element onto which the detected radiation strikes. The input optics can form a radiation entry surface of the sensor device. For example, the input optics are designed as a lens, in particular a plano-convex lens. The curved side of the lens is, for example, spherically, aspherically or torically curved.

According to at least one embodiment of the sensor device, each optical channel is assigned an output optic, in particular exactly one output optic. The output optic is arranged between the input optic and the detection surface. The output optic is in particular the last imaging element in the beam path of the radiation to be detected before it hits the detection surface. For example, the output optic is in each case designed as a lens, in particular a plano-convex lens. The curved side of the lens is, for example, spherically, aspherically or torically curved. The output optic is in particular designed to focus the radiation onto the detection surface. For example, the output optic is designed to image an image generated by the input optic onto the detection surface.

According to at least one embodiment of the sensor device, each optical channel is assigned an aperture, in particular exactly one aperture. For example, the aperture is arranged in the beam path between the input optics and the output optics.

According to at least one embodiment of the sensor device, the input optics each image at least a part of a measuring field in an image plane. According to at least one embodiment of the sensor device, the aperture openings are arranged in the image plane. By means of the aperture openings, the shape of the radiation spot of the radiation to be detected can be adapted to the shape of the detection surface.

According to at least one embodiment of the sensor device, the output optics each image the radiation transmitted by the associated aperture opening onto the detection surface. In particular, the radiation is expediently imaged onto the entire detection surface for each aperture opening.

In at least one embodiment of the sensor device, the sensor device comprises a detection surface with a plurality of detection areas arranged next to one another and intended for absorbing radiation, and an optic, which covers the detection surface when viewed along a vertical direction running perpendicular to the detection surface. The optic comprises a plurality of optical channels arranged next to one another. Each optical channel is assigned an input optic, an output optic and an aperture, the output optic being arranged between the input optic and the detection surface. The input optics each image at least part of a measuring field in an image plane. The apertures are arranged in the image plane and the output optics each image the radiation transmitted by the associated aperture onto the detection surface.

On the detection surface, in particular at every point on the detection surface, there is a superposition of the radiation transmitted through the individual optical channels. This means that there is no sharp image of spatial modulations of the radiation in the detection area, such as in the form of color gradients or color structures within the measuring field. This means that a particularly high level of homogeneity of the radiation from the measuring field can be achieved in the detection area. In other words, the radiation emitted from the measuring field is fed to the individual detection areas in the detection area with a high level of homogeneity. Detection errors caused by such spatial modulations in the measuring field can thus be prevented or at least greatly reduced.

The output optics are field lenses that combine the divergent beams passing through the respective aperture opening on the detection surface. The aperture opening defines the field of view (FOV) for each optical channel.

There is no need to arrange a diffuser in the beam path to avoid a sharp image of the spatial modulations. The use of a diffuser arranged at a sufficiently large distance in front of the detection surface would require a comparatively large length of the optics and thus a comparatively large height of the sensor device along the vertical direction. Furthermore, a diffuser reduces the overall system transmission, which worsens the signal-to-noise ratio of the sensor device. In contrast, with the arrangement described, a high accuracy of the measurement signal can be achieved with a particularly compact design, especially in the vertical direction. According to at least one embodiment of the sensor device, an axis of the output optics for at least one of the optical channels has an offset relative to an axis of the associated input optics. The offset here refers to a lateral direction running perpendicular to the vertical direction. The axes run, for example, through the geometric centers of the corresponding optics. In particular, all optical channels whose channel axis is spaced from the optical axis of the optics can have such an offset.

According to at least one embodiment of the sensor device, an offset between the input optics and the output optics of a first optical channel of the optical channels is smaller than an offset of a second optical channel between the input optics and the output optics of the optical channels, wherein the second optical channel is arranged at a greater distance from an optical axis of the optics than the first optical channel. In other words, the offset of the optical channels increases with increasing distance of the relevant optical channel from the optical axis of the optics.

According to at least one embodiment of the sensor device, the offset for the optical channels is set such that the beam centers of gravity of the radiation passing through the respective aperture openings intersect at a center of gravity of the detection surface. This criterion applies, for example, with a tolerance of 10% of a diagonal of the detection surface.

According to at least one embodiment of the sensor device, the optical channels each image the entire measuring field onto the detection surface. In this case, the entire detection area is illuminated. The optics therefore simultaneously image a common field of view through several optical channels.

According to at least one embodiment of the sensor device, the optical channels each image only a part of the measurement field onto the detection surface. In this case, the entire detection surface is expediently illuminated for each optical channel. However, the field of view of the optics as a whole is divided between the individual optical channels. In other words, at least two optical channels of the optics have different viewing directions from one another. This makes it possible to enlarge the measurement field. In particular, the size of the measurement field is not limited by aberrations of an optical channel. To adjust the viewing direction, for example, the aperture openings for the corresponding optical channels can be arranged decentered, i.e. offset, relative to the respective axis of the optical channel. Optionally, the input optics for the corresponding optical channels can also be arranged decentered relative to the respective axis of the optical channel.

According to at least one embodiment of the sensor device, the aperture openings are each offset along a common direction relative to an axis of the associated input optics, so that a main detection direction of the sensor device runs obliquely to the vertical direction. The measuring field is therefore observed at an angle other than 0° to the vertical direction. This can be advantageous, for example, for suppressing disturbing lighting reflections (also referred to as highlights) when the measuring field is illuminated. By means of the described offset of the aperture openings, such an obliquely running main detection direction can be achieved independently of the orientation of the optics and the detection surface, in particular while maintaining the parallelism of the optics and the detection surface and/or perpendicular incidence on the sensor chip. In particular, the main detection direction is also inclined with respect to a surface normal of the optics. When manufacturing the sensor device, an angle change can be achieved solely by changing the decentering, i.e. without significant changes to the basic structure of the sensor device.

According to at least one embodiment of the sensor device, the optics is a common, connected element that forms the optical channels with the respective input optics, the respective output optics and the respective aperture opening. Different materials can be used for the different parts of the optics. For example, the input optics and the output optics can be formed as lenses that are applied to opposite main surfaces of a planar optics carrier. Depending on the wavelength of the radiation to be detected, a glass or a plastic, for example, is suitable as a transparent material. A radiation-opaque material that surrounds the aperture openings can be used for the apertures. For example, a metal, such as chrome, is suitable. The shape and position of the input optics and the output optics as well as the aperture openings can be defined by lithographic processes, so that a highly precise relative positioning of the input optics, the output optics and The aperture openings can be aligned with each other with high precision during the manufacture of the optics.

According to at least one embodiment of the sensor device, a filter structure is arranged at least in places between the optics and the detection areas, so that at least two detection areas have different spectral sensitivity distributions. For example, the individual filters of the filter structure are interference filters, i.e. multi-layer filters in which the transmission properties are adjusted by utilizing interference effects at the interfaces of the individual layers. With the described arrangement, the optics can be specifically designed so that the radiation to be detected strikes the filter structure within an acceptance angle of the filter. For example, a particularly high measurement accuracy can be achieved for determining the spectral components of the radiation to be detected.

According to at least one embodiment of the sensor device, the optics extend at least in places to side surfaces that delimit the sensor device in the lateral direction. For example, the optics on the side surfaces have at least in places traces of a separation process, such as sawing marks. During the manufacture of the sensor device, the respective detection surfaces are therefore provided with the associated optics at wafer level, i.e. before separation into the individual sensor devices.

According to at least one embodiment of the sensor device, the sensor device is a component which is connected to one of the The mounting side opposite the optics has contact surfaces, preferably all contact surfaces, for the external electrical contacting of the sensor device. The sensor device as a whole is therefore a surface-mounted device (SMD) component in which the optics are already integrated.

According to at least one embodiment of the sensor device, the sensor device has a height of at most 8 mm or at most 5 mm or at most 3 mm in the vertical direction. The lower the height in the vertical direction, the easier it is to integrate the sensor device into a mobile electronic device such as a smartphone.

According to at least one embodiment of the sensor device, the input optics each have a diameter of between 50 pm and 1 mm inclusive. The input optics are therefore micro-optics, but their diameter is preferably at least so large that diffraction effects have no or at least no significant significance.

With the sensor device described, in particular the following effects can be achieved.

By using micro-optical elements, a particularly low installation height can be achieved for the sensor device in the vertical direction, for example of a maximum of 5 mm or a maximum of 3 mm.

When manufacturing the sensor device, the optics can be flexibly adapted to different observation scenarios. This results in a high degree of flexibility for the realization of different measuring fields, fields of view or viewing angles through minor structural changes to the optics.

In particular, the measuring field can be defined independently of the shape of the detection surface simply by the design of the aperture openings. Different fields of view or viewing angles can also be achieved by minimal changes to the installation space.

The size and shape of the transmitted radiation spot on the detection surface is independent of the shape of the measuring field. Rather, it depends only on the distance between the optics and the detection surface, the f-number and the shape of the apertures of the input optics.

A high system transmission can be achieved for the radiation to be detected, for example in comparison to a system with a diffuser in the beam path. The input optics can be arranged with a high area fill factor, for example in the form of a hexagonal grid with round or hexagonal input optics or in the form of a rectangular or square grid with densely packed rectangular or square input optics.

The sensor device described is generally suitable for applications where a homogenized image of a defined location or angle range on a sensor is desired, for example with a controlled angle of incidence for measuring backscattered light or ambient light for color sensors, for distance measurements based on time-of-flight (TOF) measurements. measurements) or generally for remission measurements for distance or angle measurement, especially in conjunction with a minimal height of the sensor device. Due to the low achievable height, the sensor device is particularly suitable for use in mobile devices, for example in smartphones, tablets or notebooks.

Features described in connection with at least one embodiment can also be combined with other features described in connection with at least one embodiment, as long as these features are not mutually exclusive.

Further embodiments and expediencies emerge from the following description of the embodiments in conjunction with the figures.

Show it :

Figures 1A and 1B show an embodiment of a sensor device based on a schematic representation of an illumination beam path in Figure 1A and a schematic representation in sectional view in Figure 1B; Figure 2 shows an embodiment of a sensor device based on a schematic representation of an illumination beam path; and Figure 3 shows an embodiment of a

Sensor device based on a schematic representation of an illumination beam path. The figures are schematic representations and therefore not necessarily to scale. In particular, comparatively small elements or layer thicknesses may be shown exaggeratedly large for improved illustration and/or better understanding.

Identical, similar or equivalent elements are provided with identical reference symbols in the figures.

An exemplary embodiment of a sensor device 1 is described with reference to Figures 1A and 1B, with Figure 1A serving in particular to explain the functional principle of an optics of the sensor device 1 using an illumination beam path. For improved clarity, not all structural details of the sensor device 1 are shown explicitly in Figure 1A. Figure 1B schematically shows a sensor device in which a detection area 4 is illuminated as described in connection with Figure 1A.

In the further embodiments of Figures 2 and 3, the illumination beam path is shown schematically. The structural features for these embodiments can be designed as described in connection with Figure 1B.

In the embodiment according to Figures 1A and 1B, the sensor device 1 comprises a detection surface 4 with a plurality of detection areas 40 arranged next to one another and intended for absorbing radiation. The sensor device 1 further comprises an optic 2 which covers the detection surface when viewed along a vertical direction running perpendicular to the detection surface 4. The Optics 2 comprises a plurality of optical channels 20 arranged next to one another, with each optical channel being assigned an input optic 21 of a field of input optics, an output optic 22 of a field of output optics and an aperture opening 30 of an aperture field 3.

The input optics 21 each image a measuring field located outside the sensor device in an image plane 29. The aperture openings 30 are arranged in the image plane 29. The output optics 22 each image the radiation transmitted by the associated aperture opening 30 onto the entire detection surface 4.

For simplified explanation, it is assumed below that the measuring field is at a distance from the sensor device 1 that is large compared to a focal length F of the input optics 21. The image plane 29 is thus located in the focal plane of the input optics 21. The aperture field 3 is arranged in the image plane 29 and defines a field of view 7 for each optical channel 20. A full angle of the field of view FOV results for a diameter d of the aperture opening 30 and the focal length F of the input optics 21 from the relationship FOV = 2 • arctan (d/2 F).

However, the aperture openings 30 are not limited to a circular shape, but can also be rectangular, for example, so that the measuring field can be determined during the manufacture of the sensor device 1, in particular independently of the shape of the detection surface 4.

The output optics 22 downstream of the input optics 21 images the apertures of the associated input optics 21 into the detection area 4 . At a distance s between the Output optics 22 and the detection surface 4, the focal length f of the output optics 22 results from the imaging equation 1 / f = 1 / F + 1 / s .

For each optical channel, the radiation transmitted by the aperture opening 30 is imaged in the form of a divergent light beam through the associated output optics 22 onto the entire detection surface 4. For this purpose, aperture openings 30, which are arranged offset in the lateral direction to an optical axis 91 of the optics 2, are arranged individually decentered. There is therefore an offset 93 between an axis 92 of the associated input optics 21 and an axis 94 of the output optics 22.

The offset 93 is designed for the optical channels 20 in such a way that the beam centers of gravity of the radiation passing through the respective optical channels 20 intersect in the center of the detection area 4. This is illustrated in Figures 2 and 3 using beam center of gravity lines 95. For this purpose, the center of the detection area 4 and the vertices of the input optics 21 and the output optics 22 are arranged in a line.

The offset 93 increases for the optical channels 20 with increasing distance from the optical axis 91. In the embodiment shown, a first optical channel runs along the optical axis 91 and thus has no offset. A second optical channel 20B is spaced from the optical axis 91 and accordingly has a larger offset.

The shape of a pattern generated on the detection surface 4

Radiation spot corresponds to the shape of the aperture of the Input optics 21 of an optical channel 20 and can thus be selected largely freely when manufacturing the sensor device 1. Preferably, however, the apertures are designed and arranged in such a way that a high area fill factor can be achieved for the input optics 21. The higher the area fill factor, the higher the overall system transmission can be. For example, input optics 21 can be arranged in a round or hexagonal shape in a hexagonal grid. Alternatively, rectangular or square apertures in a rectangular or square grid are suitable.

The diameter DD of a radiation spot on the detection surface 4 results from the relationship DD = D • S / F according to the ray theorem.

The angle of incidence range on the detection surface 4 results from the summation of the divergence in the image space of a single input optics 21, which corresponds to its numerical aperture NA = D/F, and the inclination of the main ray of the optical channel 20 furthest away from the optical axis 91 of the optics through the field of output optics 22. In order to avoid measurement errors, the size of the field of input optics 21 perpendicular to the optical axis 91 of the optics 2 is therefore only so large that the angle of incidence range on the detection surface 4 is at most as large as the acceptance angle of the detection areas 40, in particular at most as large as the smallest acceptance angle for different acceptance angles for the individual detection areas 40.

In the optics 2 shown in Figure 1A, an image of a common field of view 7 on the detection surface 4 is realized simultaneously by a plurality of optical channels 20. This allows a homogeneous illumination of the detection area 4 to be achieved.

As shown in Figure 1B, the input optics 21 and the output optics 22 of the optical channels 20 as well as the respective associated diaphragm openings 30 can be formed by a common, connected optical element. For example, the optics 2 has an optics carrier 25, wherein the input optics 21 and the output optics 22 are arranged on opposite main surfaces of the optics carrier 25. The diaphragm field 3 with the diaphragm openings 30 can be applied to the optics carrier 25 in a manner buried in places under the output optics 22, for example in the form of a metal layer, for example made of chromium.

Such optics can be manufactured with high precision and over a large area using lithographic processes, so that during the manufacture of the sensor device 1, the optics 2 for several sensor devices 1 can be provided in a composite and connected to the other parts of the sensor devices 1 at wafer level. The optics 2 can therefore be applied before the individual sensor devices 1 are separated. In this case, the optics 2 extend at least in places to a side surface 15 of the sensor device 1 and can have separation marks, for example saw marks, on the side surface of the optics 2.

The input optics 21 and the output optics 22 can be formed by structuring the main surfaces of the optics carrier 25 itself or by applying additional material, for example a plastic, to the optics carrier 25. Suitable methods for this are for example in the article "Wafer-Level Hybrid Integration of Complex Micro-Optical Modules" , published in Micromachines 2014 , 5 , 325-340 or in the article "Generation of complex micro-optics by lithography and UV molding" in the annual report from 2005 of the Fraunhofer Institute for Applied Optics and Precision Engineering IOF, the disclosure content of which is incorporated in the present application by reference.

The input optics 21 and the output optics 22 can each be spherical or aspherical, for example toric. A simple aberration correction, for example with regard to astigmatism or coma, can be achieved using toric input optics.

Furthermore, the input optics 21 and/or the output optics 22 may be at least partially different from one another.

The input optics 21 and/or the output optics 22 can also be designed as lens segments. In particular for the output optics 22, the axes of adjacent output optics 22 can thus be positioned closer to one another.

The input optics 21 and/or the output optics 22 are, for example, microlenses with a diameter of between 50 pm and 1 mm inclusive. A focal length of the input optics 21 and/or the output optics 22 is, for example, between 0.5 mm and 3 mm inclusive. The smaller these focal lengths are, the lower the height of the sensor device can be. The number of input optics 21 is, for example, between 2 and 500 inclusive. However, these values depend heavily on the requirements with regard to the size of the sensor device 1 to be manufactured in the lateral direction and the height in the vertical direction and can in principle be varied within wide limits.

The arrangement of the input optics 21 and the output optics 22 in a common, connected optical element is particularly favorable, since the input optics 21 and the output optics 22 can thus be aligned with one another with high precision during the manufacture of the optics 2. The input optics 21 and the output optics 22 can, however, also be designed as separate optical elements.

As shown in Figure 1B, the sensor device 1 has a plurality of detection regions 40 in the detection area 4. The detection regions 40 are each formed, for example, by photodiodes, for example with an active region suitable for radiation absorption based on silicon or another semiconductor material. The photodiodes can be separate components or individually controllable segments of an array of photodiodes.

A filter structure 8 is arranged between the optics 2 and the detection areas 40. The filters are formed, for example, by an interference filter structure. The spectral sensitivity distribution of the respective detection areas 40 can be adjusted via the filter structure 8. In the exemplary embodiment shown, the filters of the filter structure 8 are each formed directly as a coating on the detection areas 40. Deviating from this, the filter structure 8 can also be formed by a separate element in which, for example, the filters for the individual detection areas 40 are arranged on a common filter carrier which extends over several or even all detection areas 40.

The number of detection areas 40 is, for example, between two and 100 inclusive. In this case, two or more detection areas 40 can also be assigned to a common detection channel. For example, during operation of the sensor device, the sensor device 1 delivers a signal from several detection channels in the visible spectral range and, alternatively or additionally, further detection channels in the infrared and/or ultraviolet spectral range.

The detection areas 40 are arranged on a mounting support 5, for example a circuit board or another support with electrical conductor structures. The sensor device 1 can also have further passive or active electronic components, such as a driver circuit for controlling the detection areas 40. This is not shown in Figure 1B for the sake of simplicity.

The optics 2 are attached to the mounting bracket 5, for example via a frame body 6, for example made of a plastic.

On the mounting side 50 opposite the optics 2, the mounting support 5 has contacts 55 for the external electrical contacting of the sensor device. The sensor device 1 is thus designed as a surface-mountable multi-channel component with already integrated optics 2 .

The embodiment shown in Figure 2 essentially corresponds to the embodiment described in connection with Figures 1A and 1B.

In contrast to this, the field of view of the optics 2 is divided into individual optical channels 20. In the illustration shown, the central optical channel 20 remains aligned parallel to the optical axis, while the viewing direction of the optical channel 20 arranged above it is directed upwards in the plane of the drawing and the optical channel 20 arranged below it is directed downwards. For this purpose, the diaphragm openings 30 are arranged individually decentered relative to the optical channel axes. Optionally, the input optics 21 of the respective optical channel 20 can also be arranged individually decentered.

In Figure 2, the beam center of gravity lines 25, which intersect in the area of the detection area 4, are also entered as examples for the upper and lower optical channels. In this embodiment, too, each optical channel 20 individually illuminates the entire detection area 4.

By dividing the field of view in this way, it is possible to ensure that the size of the field of view is no longer limited by the aberrations of a single optical channel 20, in contrast to the embodiment shown in Figures 1A and 1B. A high level of reliability of the measurement signal can thus be achieved even for larger fields of view.

A main detection direction 9 runs as in the

In connection with Figures 1A to 1B From example parallel to the optical axis of the optics 2 and parallel to the vertical direction.

The embodiment shown in Figure 3 essentially corresponds to the embodiment described in connection with Figures 1A and 1B.

In contrast to this, the main detection direction 9 runs obliquely to the vertical direction. This is achieved by the fact that the diaphragm field 3 as a whole is arranged decentered relative to the field of the input optics 21. There is therefore an offset 97 between the axis 92 of the input optics 21 and the geometric center of the associated diaphragm opening. The main detection direction 9 can thus run obliquely to the vertical direction, with the optics 2 still running parallel to the detection surface 4 and the radiation still striking the detection surface 4 essentially perpendicularly. By observing the measurement field at an angle in this way, measurement errors caused by highlights can be suppressed. When producing such a sensor device 1, in order to achieve such an oblique main detection direction, only the diaphragm field 3 as a whole has to be offset compared to the embodiment of Figures 1A and 1B.

Overall, the sensor device 1 described can achieve a high level of measurement accuracy while maintaining a low overall height due to the homogeneous illumination of the detection area 4. For example, the overall height of the sensor device 1 in the vertical direction is at most 5 mm or at most 3 mm. During manufacture, the sensor device 1 can be made more flexible by making minor modifications to the Optics 2 can be adapted to different requirements regarding the desired measuring field and/or different requirements due to a changed acceptance angle of the detection areas.

This patent application claims the priority of the German patent application 10 2023 102 131 . 1 , the disclosure content of which is hereby incorporated by reference. The invention is not limited by the description based on the embodiments. Rather, the invention comprises any new feature and any combination of features, which in particular includes any combination of features in the patent claims, even if this feature or this combination itself is not explicitly stated in the patent claims or the embodiments.

Reference symbol list

1 sensor device

15 Side surface

2 Optics

20 optical channels

21 Entrance optics

22 Output optics

25 optics carriers

29 Image plane

3 aperture field

30 aperture

4 Detection area

40 Detection range

5 mounting brackets

50 Mounting side

55 Contact

6 Frame body

7 Field of view

8 Filter structure

9 Main detection direction

91 optical axis of optics

92 Axis of the entrance optics

93 Offset

94 Axis of the output optics

95 Beam center line

97 Offset of the aperture openings

Claims

Patent claims

1. Sensor device (1) comprising a detection surface (4) with a plurality of detection areas arranged next to one another and intended for the absorption of radiation

(40) and an optic (2) which covers the detection surface (4) along a vertical direction perpendicular to the detection surface (4), wherein

- the optics (2) comprises a plurality of optical channels (20) arranged next to one another;

- each optical channel (20) is assigned an input optic (21), an output optic (22) and an aperture (30), wherein the output optic (22) is arranged between the input optic (21) and the detection surface (4);

- the input optics (21) each image at least a part of a measuring field into an image plane (29);

- the apertures (30) are arranged in the image plane (29); and

- the output optics (22) each image the radiation transmitted from the associated aperture (30) onto the detection surface (4).

2. Sensor device according to claim 1, wherein for at least one of the optical channels (20) an axis

(94) of the output optics (22) has an offset (93) relative to an axis (92) of the associated input optics (21).

3. Sensor device according to claim 2, wherein the offset (93) between input optics (21) and output optics (22) of a first optical channel (20A) of the optical channels (20) is smaller than an offset between input optics (21) and output optics (22) of a second optical channel (20B) of the optical channels, wherein the second Optical channel (20B) is arranged at a greater distance from an optical axis of the optics than the first optical channel.

4. Sensor device according to claim 2 or 3, wherein the offset (93) for the optical channels is set such that the beam centers of gravity of the radiation passing through the respective aperture openings intersect at a center of gravity of the detection surface.

5. Sensor device according to one of the preceding claims, wherein the optical channels (20) each image the entire measuring field onto the detection surface (4).

6. Sensor device according to one of claims 1 to 4, wherein the optical channels (20) each image only a part of the measuring field onto the detection surface (4).

7. Sensor device according to one of the preceding claims, wherein the aperture openings (30) are each offset along a common direction relative to an axis of the associated input optics, so that a main detection direction (9) of the sensor device (1) runs obliquely to the vertical direction.

8. Sensor device according to one of the preceding claims, wherein the optics (2) is a common, continuous element which connects the optics channels (20) with the respective

Input optics (21), the respective output optics (22) and the respective aperture (30).

9. Sensor device according to one of the preceding claims, wherein a filter structure (8) is arranged at least in places between the optics (2) and the detection areas (40). so that at least two detection areas have different spectral sensitivity distributions.

10. Sensor device according to one of the preceding claims, wherein the optics (2) extend at least in places up to side surfaces (15) which delimit the sensor device (1) in the lateral direction.

11. Sensor device according to one of the preceding claims, wherein the sensor device (1) is a surface-mountable component which has contact surfaces (55) for the external electrical contacting of the sensor device (1) on a mounting side (50) opposite the optics.

12. Sensor device according to one of the preceding claims, wherein the sensor device (1) has a height of at most 3 mm in the vertical direction.

13. Sensor device according to one of the preceding claims, wherein the input optics (21) each have a diameter between 50 pm and 1 mm inclusive.