WO2023170730A1

WO2023170730A1 - Skin stimulation device and driving method for skin stimulation device

Info

Publication number: WO2023170730A1
Application number: PCT/JP2022/009622
Authority: WO
Inventors: 順治曽根; 康義松本; 丈宗足立
Original assignee: 順治曽根
Priority date: 2022-03-07
Filing date: 2022-03-07
Publication date: 2023-09-14

Abstract

As a wearable device, this skin stimulation device imparts stimulation that brings about a tactile sensation or a pressure sensation at a desired time, for a desired time period, at a desired location among locations on the skin.　Provided is a skin stimulation device for imparting stimulation to the skin, including: a plate-shaped cantilever that is formed to be bendable; a protrusion that is provided to a free end side of one surface among surfaces of the cantilever, and that has a tip which is formed in a pointed shape; a support base that supports a fixed end of the cantilever such that the cantilever is bendable; a piezoelectric element that is provided to any surface among the surfaces of the plate-shaped cantilever, and that, when a voltage is applied thereto, bends the cantilever so as to cause the tip of the protrusion to project from the support base; and a pressing-against means that, when imparting stimulation to the skin, displaces the support base and presses the protrusion against the skin. The support base is provided with one or a plurality of the cantilever, the protrusion, and the piezoelectric element, and moreover, one or a plurality of the support base and the pressing-against means that presses the protrusion against the skin are provided.

Description

Skin stimulation device and method of driving the skin stimulation device

The present invention relates to a skin stimulation device and a method of driving a skin stimulation device, and particularly relates to a skin stimulation device that applies stimulation to the skin and a method of driving a skin stimulation device.

Haptic and force feedback are important for surgical systems and teleoperation tasks. There are many products for Braille displays, and tactile devices are being researched. Tactile displays require high density and fast response to enable the teleoperation and virtual reality that Braille codes display. One of these tactile displays has been realized using magnetic microactuators based on PDMS (polydimethylsiloxane) elastomer.

Although these tactile displays have been able to achieve high density and high speed, they generate weak forces. Ion-conducting polymer gel membrane actuators achieve high-density and high-speed display in a wet state, but the wet state poses a problem. When it dries out, the ions do not move and it stops working.

Shape memory alloy actuators are one possible solution, but do not have sufficient response speed for use in haptic devices. High-resolution displays using smart hydrogels have also been developed, but the response time is insufficient for tactile sensing. Similar polymer actuators have been developed using dielectric elastomers, resulting in soft, flexible, and thin actuators that can also be used as wearable devices, but cannot present pressure sensations.

A tactile sensation generation device that has multiple ultrasonic transducers arrayed generates a tactile sensation at or near one point by applying vibration stimulation from multiple transducers at a long distance, but it requires a high output drive to create a tactile sensation at multiple points. It is a large device that is difficult to generate. As a pseudo-tactile device, there is also a method that uses electrical stimulation and changes the tactile sensation depending on the polarity (for example, see Non-Patent Document 1). Some use air jets or suction, but the devices are large and obstruct the hand, making them difficult to use as wearable devices.

In this way, tactile sensations are mainly created by vibrations and the raising and lowering of pins, but the generation density is low, the response speed is slow, and the drive mechanism is a large mechanical structure that prevents people from working freely. It was difficult to attach it to the human body without any problems.

The present invention was made in view of this situation, and is a wearable device that applies stimulation that causes a tactile or pressure sensation to a desired part of the skin at a desired time and for a desired period of time. This is to make it possible to do so.

A skin stimulation device according to one aspect of the present invention is a skin stimulation device that applies stimulation to the skin, and includes a plate-shaped first cantilever formed to be bendable, and one surface of the first cantilever. a first protrusion that is provided on the free end side of the surface and has a pointed tip; a support base that supports the fixed end of the first cantilever so that the first cantilever is bendable; When a voltage is applied to one of the surfaces of the plate-shaped first cantilever, the first cantilever is bent so that the tip of the first protrusion protrudes from the support base. a first piezoelectric element; and a pressing means for displacing the support base and pressing the first protrusion against the skin when stimulating the skin, the first cantilever, the first protrusion and the first piezoelectric element; , one or more of the support base is provided, and one or more of the support base and the pressing means for pressing are provided.

The fixed end is supported by a support base so that the positions of each fixed end and each free end overlap with respect to the first cantilever, and the respective bent directions match. a second piezoelectric element that bends the second cantilever in the same direction as the first piezoelectric element bends the first cantilever when a voltage is applied; Among the surfaces of the first cantilever, the free end side of the other surface opposite to the one surface on which the first protrusion is provided, and among the surfaces of the second cantilever, one surface on the first cantilever side. A connecting member for connecting the free end side can further be provided.

The first cantilever can be formed to include an L-shaped portion on one surface where the first piezoelectric element is provided.

A support is provided so that the predetermined surface is bent in the same direction as the first cantilever and is placed a predetermined distance apart in a direction intersecting one surface of the plate-shaped first cantilever. a plate-shaped second cantilever formed to be bendable and whose fixed end is supported; a second projection formed in a shape with a pointed tip and provided on the free end side of the second cantilever through the extension member; a second piezoelectric element provided on one of the surfaces of the second cantilever, which bends the second cantilever so as to cause the tip of the second protrusion to protrude from the support base when a voltage is applied; The distance from the predetermined surface of the support base to the tip of the second protrusion can be made equal to the distance from the predetermined surface of the support base to the tip of the first protrusion.

A reinforcing material may be further provided to reinforce the support of the fixed end of the first cantilever by the support base.

The surface in contact with the skin is curved along the skin, and a hole is provided through which the first protrusion is inserted, and the thickness is such that when the first cantilever is bent, the tip of the first protrusion protrudes from the hole. It is possible to further provide a cover that covers a predetermined surface of the support base, which is formed into a shape, and a film that covers the surface of the cover that is in contact with the skin.

The pressing means can use gas or liquid pressure to displace the support base and press the first protrusion against the skin.

The pressing means can use a cam to displace the support base and press the first protrusion against the skin.

By pulling the pressing means with a wire via a pulley, the support base can be displaced and the first protrusion can be pressed against the skin.

A method for driving a skin stimulation device according to one aspect of the present invention is a method for driving a skin stimulation device that applies stimulation to the skin, and includes a plate-shaped cantilever formed to be bendable, and one surface of the cantilever. A protrusion with a pointed tip provided on the free end side of the surface, a support base that supports the fixed end of the cantilever so that the cantilever can bend, and a plate-like surface of the cantilever. A piezoelectric element is provided on either surface that bends the cantilever so that the tip of the protrusion protrudes from the support when a voltage is applied, and when applying stimulation to the skin, the support is displaced and the protrusion the piezoelectric element of the skin stimulation device, the cantilever, the protrusion, and the piezoelectric element are provided at one or more on the support base; When the protrusion is pressed against the skin by the pressing means, an alternating current voltage with a frequency of 30 Hz to 500 Hz is applied to the piezoelectric element to vibrate the protrusion.

As described above, according to the present invention, as a wearable device, it is possible to apply a stimulus that causes a tactile or pressure sensation to a desired part of the skin at a desired time and for a desired period. .

FIG. 2 is a block diagram of each layer of the tactile presentation system 11 including a tactile generation pad that is an example of a skin stimulation device. 3 is a diagram showing an example of the configuration of a tactile sensation generation pad group 21. FIG. 7 is a diagram showing another example of the configuration of the tactile sensation generation pad group 21. FIG. 7 is a diagram showing still another example of the configuration of the tactile sensation generating pad group 21. FIG. 7 is a plan view showing an example of the configuration of a tactile sensation generating pad 73. FIG. 6 is a cross-sectional view showing a cross section of the tactile sensation generating pad 73 taken along line AA′ in FIG. 5. FIG. FIG. 3 is a plan view showing an example of the configuration of a tactile sensation generating section 212. FIG. FIG. 3 is a cross-sectional view showing an example of the configuration of a tactile sensation generating section 212. FIG. 3 is a plan view showing an example of the configuration of a tactile sensation generating pad 301. FIG. 10 is a cross-sectional view showing a cross section of the tactile sensation generating pad 301 taken along line BB′ in FIG. 9. FIG. FIG. 3 is a plan view showing an example of the configuration of a tactile sensation generating section 312. FIG. 3 is a cross-sectional view showing an example of the configuration of a tactile sensation generating section 312. FIG. 4 is a plan view showing an example of the configuration of a tactile sensation generating pad 401. FIG. 14 is a cross-sectional view showing a cross section of the tactile sensation generating pad 401 taken along line CC' in FIG. 13. FIG. FIG. 4 is a plan view showing an example of the configuration of a tactile sensation generation unit 412 and a tactile sensation generation unit 461. 4 is a cross-sectional view showing an example of the configuration of a tactile sensation generating section 412 and a tactile sensation generating section 461. FIG. 5 is a plan view showing an example of the configuration of a tactile sensation generating section 512. FIG. 3 is a cross-sectional view showing an example of the configuration of a tactile sensation generating section 312. FIG. 6 is a cross-sectional view showing a cross section of a tactile sensation generating pad 601. FIG. It is a figure which shows the state of the tactile sensation generation pad 601 attached to the finger pad.

Hereinafter, a skin stimulation device according to an embodiment of the present invention will be described with reference to FIGS. 1 to 20.

FIG. 1 is a block diagram of each layer of a tactile presentation system 11 including a tactile generation pad that is an example of a skin stimulation device. Haptic presentation system 11 includes a virtual reality computer system and a teleoperation system. The tactile presentation system 11 causes a calculated tactile sensation or a detected tactile sensation to occur to a human being. That is, the tactile presentation system 11 calculates or detects a tactile sensation, and applies a stimulus that causes the human skin to perceive the calculated tactile sensation or the detected tactile sensation. Note that the skin to be stimulated may be human or animal skin.

The tactile presentation system 11 includes a computer system 31, a tactile detection system 32, a vibration frequency calculation section 33, a digital data/analog data conversion section 34, an amplifier 35, and a tactile generation pad group 21. Computer system 31 includes a computer and is configured to calculate skin contact or impact. The computer system 31 includes a collision calculation section 41. The collision calculation unit 41 is realized by a computer executing a predetermined program, and calculates real or virtual human contact or collision. For example, the collision calculation unit 41 calculates contact or collision of the avatar with another avatar or an object in the virtual space, depending on the movement of the avatar in the virtual space. For example, the collision calculation unit 41 calculates haptic information such as tactile sensation, pressure sensation, or vibration sensation of another avatar or object when the avatar contacts or collides with another avatar or object in the virtual space. The computer system 31 supplies the calculated tactile information to the vibration frequency calculation unit 33.

Note that, for example, tactile sensation and pressure sensation are sensations caused by weak mechanical stimulation applied to the skin surface. For example, tactile sensation is a sensation based on receptors in the skin that emit many impulses immediately after a stimulus is applied. Further, for example, pressure sensation refers to a sensation based on receptors that continuously generate impulses during the period when stimulation is applied. For example, a vibration sensation is a sensation caused by repeated stimulation at a frequency of several tens of Hz to several hundred Hz.

The tactile detection system 32 detects tactile sensation. Tactile sensing system 32 includes a shape sensing transducer and robotic system 42. The shape detection transducer and robot system 42 detects a tactile sensation according to the shape or detects tactile information during work. Shape sensing transducer and robot system 42 includes a transducer 52 or a remote robot system 53. The transducer 52 traces the surface of the object and detects a tactile sensation according to the shape of the object. The remote robot system 53 detects tactile information during work from an end effector (tool) of a robot remotely operated by a human. For example, the remote robot system 53 is a medical remote control robot, etc., and detects tactile information of a tool such as a knife or a clamp. For example, the remote robot system 53 detects tactile information such as a tactile sensation, a pressure sensation, or a vibration sensation when a tool such as a knife or a clamp touches a person's body. The tactile detection system 32 supplies the detected tactile information to the vibration frequency calculation unit 33 .

In this way, tactile information indicating tactile sensation, pressure sensation, vibration sensation, etc. is generated from work simulation in a virtual reality environment, tactile data measured by a remote robot, image data, etc.

The vibration frequency calculation unit 33 is composed of a computer or a dedicated device that executes a predetermined program, and calculates the amount and frequency of vibration for perceiving the tactile sensation based on the tactile information supplied from the computer system 31 or the tactile detection system 32. Calculate. For example, if the tactile information supplied from the computer system 31 or the tactile detection system 32 is tactile information indicating a tactile sensation, a pressure sensation, or a vibration sensation, the vibration frequency calculation unit 33 calculates the force, vibration amount, and The frequency is calculated, the vibration amount and frequency are calculated according to the pressure sensation, and the vibration amount and frequency are calculated according to the vibration sensation. The vibration frequency calculation unit 33 supplies digital data indicating the calculated vibration amount and frequency to the digital data/analog data conversion unit 34.

The digital data/analog data conversion unit 34 converts the digital data indicating the amount of vibration and frequency supplied from the vibration frequency calculation unit 33 into analog data. For example, the digital data/analog data converter 34 converts digital data indicating the amount of vibration and frequency into analog data by frequency modulation. The digital data/analog data converter 34 supplies analog data indicating the vibration amount and frequency obtained by the conversion to the amplifier 35.

The amplifier 35 includes a power amplifier, a control output generation section, and the like, and amplifies the analog data indicating the amount of vibration and frequency supplied from the digital data/analog data conversion section 34, and selects the corresponding one from among the plurality of haptic generation pads. A control output of pressure for pressing the tactile sensation generation pad against the skin is generated and supplied to the tactile sensation generation pad group 21.

The tactile sensation generation pad group 21 is an example of a skin stimulation device, and includes a plurality of tactile sensation generation pads and an actuator that presses a predetermined tactile sensation generation pad against the skin. The tactile sensation generation pad group 21 is created using MEMS (Micro Electro Mechanical Systems), ultra-precision cutting, 3D printing technology (three-dimensional modeling technology), and precision lamination technology. The tactile sensation generating pad group 21 is attached to the skin of the body, such as the finger, palm, back of the hand, wrist, elbow, shoulder, chest, back, or waist, using a fixing band, harness, gloves, or clothing. For example, the shape of the tactile sensation generation pad group 21 is a surface shape corresponding to the palm side surface of the distal phalanx of the second finger (index finger), and has a thickness of 0.2 mm or more and less than 2 mm. For example, the tactile sensation generation pad group 21 has a surface shape corresponding to the palm side surface of the right hand, and has a thickness of 0.2 mm or more and less than 2 mm. The tactile sensation generation pad group 21 is driven by the amplifier 35 to generate a stimulus that produces a tactile sensation, a pressure sensation, or a vibration sensation, and transmits the stimulus to a desired skin region among the skin regions. The tactile sensation generation pad group 21 applies stimulation that causes a tactile sensation, a pressure sensation, or a vibration sensation to a desired region of the skin at a desired timing. For example, the tactile sensation generation pad group 21 applies a stimulus that causes the user to perceive vibration, impact sensation, force pressure, or the edge shape of an object at a desired timing on a desired region of the skin. In other words, the tactile sensation generation pad group 21 applies a stimulus that causes a tactile sensation and a pressure sensation to a desired part of the skin at a desired time and for a desired period of time.

The tactile sensation generation pad group 21 selectively generates a stimulus that produces a tactile sensation across one or more of the tactile sensation generation pads 73, which are tactile sensation presentation units described later, in accordance with tactile information, and also produces a pressure sensation at the same time. can be done.

FIG. 2 is a diagram showing an example of the configuration of the tactile sensation generation pad group 21. The tactile sensation generation pad group 21 includes approximately three to ten tactile sensation generation pads 73. Each of the haptic generation pads 73 has 10 to 50 haptic generation points. The tactile sensation generation points on the tactile sensation generation pad 73 are arranged in the left-right direction in FIG. 2 and in the front-rear direction (depth direction) in FIG. That is, the tactile sensation generation points are two-dimensionally arranged on the surface of the tactile sensation generation pad 73 at predetermined intervals on the side of the surface that contacts the skin.

Note that in the following description, some of the tactile sensation generation points of the tactile sensation generation pad 73 will be explained as an example. The tactile sensation generation pad group 21 is a predetermined tactile sensation generation pad 73 among the plurality of tactile sensation generation pads 73 arranged in a row, and when transmitting stimulation to the skin, a predetermined part of the skin 101 of the body such as a finger, hand, arm, etc. A predetermined tactile sensation generating pad 73 is moved toward the skin 101 so as to come into contact with the skin.

Hereinafter, for example, when the haptic sensation generating pad group 21 includes four haptic sensation generating pads 73, when distinguishing the haptic generating pads 73 individually, they will be referred to as haptic generating pads 73-1 to 73-4, etc.

FIG. 2 shows an example of the configuration of the tactile sensation generation pad group 21 when it includes four tactile sensation generation pads 73-1 to 73-4. The haptic generation units 71-1 to 71-4 are configured to include air actuators 72-1 to 72-4, respectively, and tactile generation pads 73-1 to 73-4, respectively. The tactile sensation generating units 71-1 to 71-4 each operate individually and independently to generate a stimulus and transmit the generated stimulus to the skin 101.

Although the details will be described later, the tactile generation pad 73-1 has a plurality of tactile generation chips formed on the surface of the tactile generation pad 73-1 that is in contact with the skin 101. Similarly, each of the tactile sensation generating pads 73-2 to 73-4 has a plurality of A tactile sensation generation chip has been formed. Each of the tactile sensation generating chips applies stimulation by pressing the skin 101.

In each of the tactile sensation generation pads 73-1 to 73-4, a plurality of tactile generation chips formed on the surface in contact with the skin 101 are tactile generation points that generate stimulation that causes a tactile sensation and a pressure sensation. The spacing between the plurality of tactile generation chips formed on each of the tactile generation pads 73-1 to 73-4 is set to be less than the two-point discrimination threshold of human skin. That is, the distance between the tactile generation chips is less than the two-point discrimination threshold of human skin. For example, the two-point discrimination threshold for human skin is 1 to 6 mm at the tip of a finger, and 15 to 20 mm at the palm or sole of the foot. For example, the two-point discrimination threshold for human skin is 2 to 3 mm for the lips, and 30 mm for the dorsum of the hand or foot.

That is, for example, when the tactile sensation generating pads 73-1 to 73-4 are used for fingertips, the distance between the haptic generating chips is less than 2 mm. For example, when the tactile sensation generation pads 73-1 to 73-4 are used on the palm of the hand or the sole of the foot, the distance between the tactile generation chips is less than 30 mm.

Note that the two-point discrimination threshold of human skin is 2 to 3 mm for the lips, which is the shortest on the body. 73-4 can be used on any part of the body.

The tactile sensation generating pads 73-1 to 73-4 are moved toward the skin 101 by the air actuators 72-1 to 72-4, respectively, so as to come into contact with predetermined areas of the skin 101. Air actuators 72-1 to 72-4 are pneumatic actuators each consisting of a cylinder and a piston. Air actuators 72-1 to 72-4 each have a piston that protrudes from the cylinder when compressed air at a predetermined pressure is supplied, and tactile sensation generating pads 73-1 to 73-4 that are fixed to the piston. By displacing either one of them, it is moved in the direction of the skin 101. For example, at a predetermined time, the air actuator 72-2 is supplied with compressed air at a predetermined pressure to displace the haptic sensation generating pad 73-2, thereby moving it toward the skin 101, and the air actuator 72-1, Since compressed air at a predetermined pressure is not supplied to the air actuator 72-3 and the air actuator 72-4, the haptic sensation generation pad 73-1, the haptic sensation generation pad 73-3, and the haptic sensation generation pad 73-4 are moved toward the skin 101. I won't let you. At this time, the tactile sensation generating pad 73-2 generates a stimulus and transmits the stimulus to the skin 101.

At a predetermined time, all or one or more of the haptic generation pads 73-1 to 73-4 actuate the air actuators 72-1 to 72-4. Each of the tactile sensation generating pads 73-1 to 73-4 is moved toward the skin 101 so as to come into contact with a predetermined portion of the skin 101, or all of the tactile sensation generating pads 73-1 to 73-4 are moved away from the skin 101.

Hereinafter, when there is no need to distinguish the tactile sensation generation units 71-1 to 71-4 individually, they will be simply referred to as tactile sensation generation units 71. Hereinafter, when there is no need to distinguish the air actuators 72-1 to 72-4 individually, they will be simply referred to as air actuators 72.

FIG. 3 is a diagram showing another example of the configuration of the tactile sensation generating pad group 21 when it includes four tactile sensation generating pads 73-1 to 73-4. The haptic generation units 121-1 to 121-4 each include haptic generation pads 73-1 to 73-4, cams 122-1 to 122-4, and motors 123-1 to 123-4, respectively. It is configured as follows. The tactile sensation generating units 121-1 to 121-4 each operate individually and independently to generate a stimulus and transmit the generated stimulus to the skin 101.

The tactile sensation generating pads 73-1 to 73-4 in FIG. 3 are brought into contact with predetermined parts of the skin 101 by respective cams 122-1 to 122-4 and motors 123-1 to 123-4, respectively. The skin is moved in the direction of the skin 101 as shown in FIG. For example, each of the cams 122-1 to 122-4 is a rotary plate cam. For example, each of the cams 122-1 to 122-4 is made of an eccentric disk. For example, motors 123-1 to 123-4 are each electric motors. That is, the cams 122-1 to 122-4 are rotated by the motors 123-1 to 123-4, respectively, and are placed at predetermined angular positions relative to the tactile sensation generating pads 73-1 to 73-4, respectively. If this happens, each of the tactile sensation generating pads 73-1 to 73-4 is pushed out toward the skin 101 side.

For example, at a predetermined time, when the cam 122-2 is rotated by the motor 123-2 and the side of the cam 122-2 protruding from the rotation axis moves toward the haptic generation pad 73-2, the cam 122-2 moves to the haptic generation pad 73-2. -2 is pushed out and displaced to move it toward the skin 101, and the cams 122-1, 122-3, and 122-4 are moved by the motors 123-1, 123-3, and 123-4, respectively. Since they do not rotate, the tactile sensation generation pad 73-1, tactile sensation generation pad 73-3, and tactile sensation generation pad 73-4 are not moved toward the skin 101. At this time, the tactile sensation generating pad 73-2 generates a stimulus and transmits the stimulus to the skin 101.

At a predetermined time, all of the tactile sensation generating pads 73-1 to 73-4 or one or more of the tactile sensation generating pads 73-1 to 73-4 act on each of the cams 122-1 to 122-4. Accordingly, either the tactile sensation generating pads 73-1 to 73-4 are moved toward the skin 101 so as to come into contact with a predetermined region of the skin 101, or all of the tactile sensation generating pads 73-1 to 73-4 are moved away from the skin 101.

Note that, for example, the tactile sensation generating pads 73-1 to 73-4 are urged away from the skin 101 by a spring or the like (not shown).

Although each of the cams 122-1 to 122-4 has been described as a plate cam, the present invention is not limited to this, and may be a grooved cam or a three-dimensional cam. Furthermore, although the motors 123-1 to 123-4 have been described as being electric motors, they are not limited to this, and may be a pressure motor, a molecular motor, or an ultrasonic motor that utilizes fluid pressure.

Hereinafter, when there is no need to distinguish the tactile sensation generating units 121-1 to 121-4 individually, they will be simply referred to as the haptic generating unit 121. Hereinafter, when there is no need to distinguish the cams 122-1 to 122-4 individually, they will be simply referred to as cams 122. Further, when there is no need to distinguish the motors 123-1 to 123-4 individually, they are simply referred to as motors 123.

FIG. 4 is a diagram showing still another example of the configuration of the tactile sensation generating pad group 21 when it includes four tactile sensation generating pads 73-1 to 73-4. The tactile sensation generation units 151-1 to 151-4 each generate a tactile sensation generation pad 73-1 to 73-4, each of the wires 152-1 to 152-4, each of the pulleys 153-1 to 153-4, and a pulley. 154-1 to 154-4, and motors 155-1 to 155-4, respectively. The tactile sensation generating units 151-1 to 151-4 each operate individually and independently to generate a stimulus and transmit the generated stimulus to the skin 101.

The tactile sensation generating pads 73-1 to 73-4 in FIG. 4 correspond to the wires 152-1 to 152-4, the pulleys 153-1 to 153-4, and the pulleys 154-1 to 154-4, respectively. , and motors 155-1 to 155-4, it is moved toward the skin 101 so as to contact a predetermined portion of the skin 101. One end of each of the wires 152-1 to 152-4 is fixed to each of the haptic generation pads 73-1 to 73-4, and the other end of each of the wires 152-1 to 152-4 is fixed to one of the pulleys 154-1 to 152-4. 154-4 respectively. The pulleys 153-1 to 153-4 are each rotatably supported. The wires 152-1 to 152-4 are hung on pulleys 153-1 to 153-4, respectively, and the extending directions of the wires 152-1 to 152-4 are changed. Pulleys 154-1 to 154-4 are rotated by motors 155-1 to 155-4, respectively. Motors 155-1 to 155-4 are each electric motors. When each of the pulleys 154-1 to 154-4 is rotated by each of the motors 155-1 to 155-4, the wires 152-1 to 152 wound around each of the pulleys 154-1 to 154-4 are rotated. -4 changes in length, each of the tactile sensation generation pads 73-1 to 73-4 fixed to one end of each of the wires 152-1 to 152-4 is pulled and displaced.

That is, the pulleys 154-1 to 154-4 are rotated by the motors 155-1 to 155-4, respectively, to wind up the wires 152-1 to 152-4, respectively, and wind the tactile sensation generating pad 73-1. Each of the wires 152-1 to 152-4 pulls each of the wires 152-1 to 73-4 and presses them against the skin 101.

For example, at a predetermined time, pulley 154-2 is rotated by motor 155-2 to take up wire 152-2, causing wire 152-2 to pull and displace haptic generating pad 73-2. , toward the skin 101, and the pulleys 154-1, 154-3, and 154-4 are moved toward the skin 101 because the motors 155-1, 155-3, and 155-4 do not rotate. 1. Do not move the tactile sensation generation pad 73-3 and the tactile sensation generation pad 73-4 toward the skin 101. At this time, the tactile sensation generating pad 73-2 generates a stimulus and transmits the stimulus to the skin 101.

At a predetermined time, all of the tactile sensation generating pads 73-1 to 73-4 or one or more of the tactile sensation generating pads 73-1 to 73-4 act on each of the pulleys 153-1 to 153-4. and is pulled by each of the wires 152-1 to 152-4 via each of the pulleys 154-1 to 154-4 to be moved in the direction of the skin 101 so as to contact a predetermined region of the skin 101, Alternatively, all of the tactile sensation generating pads 73-1 to 73-4 are moved away from the skin 101.

For example, the tactile sensation generation pad group 21 including the tactile sensation generation units 151-1 to 151-4 can be realized as a glove-type device.

Although the motors 155-1 to 155-4 are each described as being an electric motor, they are not limited to this, and may be a pressure motor, a molecular motor, or an ultrasonic motor that utilizes fluid pressure.

Hereinafter, when there is no need to distinguish the tactile sensation generation units 151-1 to 151-4 individually, they will be simply referred to as tactile sensation generation units 151. Hereinafter, when there is no need to distinguish the wires 152-1 to 152-4 individually, they will simply be referred to as wires 152. Further, when there is no need to distinguish the pulleys 153-1 to 153-4 individually, they are simply referred to as pulleys 153. When it is not necessary to individually distinguish pulleys 154-1 to 154-4, they are simply referred to as pulleys 154. Further, when there is no need to distinguish the motors 155-1 to 155-4 individually, they are simply referred to as motors 155.

Next, a detailed example of the configuration of the tactile sensation generating pad 73 will be described. FIG. 5 is a plan view showing an example of the configuration of the tactile sensation generating pad 73. FIG. 6 is a cross-sectional view showing a cross section of the tactile sensation generating pad 73 taken along line AA' in FIG. The tactile sensation generation pad 73 includes a support base 211 and tactile sensation generation units 212-1 to 212-8. Note that FIG. 6 shows a cross section of the tactile sensation generating units 212-1 to 212-4 viewed from the line AA' in FIG.

Further, hereinafter, the direction in which the skin 101 is pressed is shown as a Z-axis, with the up-down direction being the up-down direction. According to the right-handed system, the front and rear directions with respect to the Z axis are illustrated by the X axis, and the left and right directions are illustrated by the Y axis. Further, in the following, the left side in the Y-axis direction in FIG. 5 is simply referred to as the left side, and the right side in the Y-axis direction in FIG. 5 is simply referred to as the right side. Furthermore, hereinafter, the lower side in the X-axis direction in FIG. 5 will be simply referred to as the front side, and the upper side in FIG. 5 in the X-axis direction will simply be referred to as the rear side. Furthermore, hereinafter, the front side in FIG. 5 in the Z-axis direction is simply referred to as the upper side, and the back side in FIG. 5 in the Z-axis direction is simply referred to as the lower side. Note that the right side is the positive direction of the Y axis, the front side is the positive direction of the X axis, and the upper side is the positive direction of the Z axis. Further, the Z-axis direction is also simply referred to as the up-down direction, and the direction along a plane parallel to the X-axis and the Y-axis is also simply referred to as the horizontal direction or lateral direction.

The support stand 211 is formed into a plate shape from a ductile material such as stainless steel, copper, tungsten, or aluminum, or a metal such as a silicon substrate. The support stand 211 supports the tactile sensation generating units 212-1 to 212-8. The tactile sensation generating units 212-1 to 212-8 are bent respectively to generate stimulation and transmit the stimulation to the skin 101. On the rear side of the support base 211, from the left, a tactile sensation generating section 212-1, a haptic generating section 212-2, a haptic generating section 212-3, and a haptic generating section 212-4 are arranged in this order. On the front side of the support base 211, from the left, a tactile sensation generating section 212-5, a haptic generating section 212-6, a haptic generating section 212-7, and a haptic generating section 212-8 are arranged in this order.

The support base 211 has recesses 241-1 to 241-8 formed therein. The recesses 241-1 to 241-8 house the tactile sensation generating units 212-1 to 212-8, respectively. The recesses 241-1 to 241-8 are formed so as not to hinder the bending of the tactile sensation generating sections 212-1 to 212-8, respectively. For example, the recesses 241-1 to 241-8 are formed as grooves that separate the tactile sensation generating units 212-1 to 212-8, respectively, and the recesses 241-1 to 241-8 are formed as grooves that separate the tactile sensation generating units 212-1 to 212-8, respectively. Store. As shown in FIG. 6, the upper surface of the support base 211 and the upper surfaces of the tactile generation units 212-1 to 212-8, which are the upper surfaces in FIG. 6, are flush with each other except for the haptic generation chips described later. There is.

For example, the support base 211 and the tactile sensation generating units 212-1 to 212-8 are formed from a silicon wafer.

The tactile sensation generating units 212-1 to 212-8 are arranged so that their longitudinal directions are along the X-axis direction. The tactile sensation generating units 212-1 to 212-4 are supported by the support stand 211 at their rear ends. When each of the tactile sensation generating units 212-1 to 212-4 is bent, the front ends of the tactile generating units 212-1 to 212-4 move up and down, and stimulation is transmitted to the skin 101. The tactile sensation generating units 212-5 to 212-8 are supported by the support stand 211 at their front ends. When each of the tactile sensation generating units 212-5 to 212-8 is bent, the rear ends of the tactile generating units 212-5 to 212-8 move up and down, and stimulation is transmitted to the skin 101.

The positions of the front ends of the tactile sense generating units 212-1 and 212-3 are on the front side with respect to the positions of the front ends of the haptic sense generating units 212-2 and 212-4. The positions of the rear ends of the tactile sensation generating sections 212-5 and 212-7 are on the front side with respect to the positions of the rear ends of the haptic generating sections 212-6 and 212-8.

The tactile sensation generation section 212-1 and the tactile sensation generation section 212-5 are arranged so that the sides that move up and down to transmit stimulation face each other, and the tactile sensation generation section 212-2 and the tactile sensation generation section 212-6 are arranged so that the sides that move up and down to transmit stimulation face each other. The two sides are arranged so that the sides that transmit the stimulus face each other. Similarly, the tactile sensation generation unit 212-3 and the tactile sensation generation unit 212-7 are arranged so that the sides that move up and down to transmit stimulation face each other, and the tactile sensation generation unit 212-4 and the tactile sensation generation unit 212-8 are , are arranged so that the sides that move up and down to transmit stimulation face each other.

By doing so, it is possible to further increase the area for transmitting stimulation to the skin 101 and to further shorten the interval between the tactile sensation generation points.

Hereinafter, when there is no need to distinguish the tactile sensation generating units 212-1 to 212-8 individually, they will be simply referred to as the haptic generating unit 212.

Here, the details of the configuration of the tactile sensation generating section 212 will be explained. FIG. 7 is a plan view showing an example of the configuration of the tactile sensation generating section 212. FIG. 8 is a cross-sectional view showing an example of the configuration of the tactile sensation generating section 212. The tactile sensation generating section 212 includes cantilevers 221-1 and 221-2, piezoelectric elements 223-1 and 223-2, a tactile sensation generating chip 224, and a connecting bar 225.

The cantilevers 221-1 and 221-2 are each made of a ductile material such as stainless steel, copper, tungsten, or aluminum, or a metal such as a silicon substrate, and are formed in a bendable plate shape. The cantilevers 221-1 and 221-2 are each formed into a plate shape, and the directions of the surfaces of the cantilevers 221-1 and 221-2 match the directions of the surfaces of the support base 211, which is formed into a plate shape. It is formed like this.

Cantilevers 221-1 and 221-2 have the same shape. Cantilever 221-2 is stacked on cantilever 221-1 in the thickness direction. The fixed end 261-1 side of the cantilever 221-1 is fixed to the support base 211. A fixed end 261-2 (not shown) side of the cantilever 221-2 is fixed to the support base 211. Fixed end 261-1 is provided above fixed end 261-2. Furthermore, the free end of cantilever 221-1 is provided above the free end of cantilever 221-2. That is, cantilever 221-1 is stacked on top of cantilever 221-2. In other words, the fixed end 261-2 of the cantilever 221-2 is supported by the support base 211 so as to overlap the cantilever 221-1 in the direction in which the cantilever 221-1 is bent. In other words, the cantilever 221-2 is mounted on a support base such that the positions of the fixed ends 261-1 and 261-2 and the free ends of the cantilever 221-1 overlap, and the directions in which they are bent are the same. Fixed end 261-2 is supported by 211.

The support stand 211 supports the fixed end 261-1 of the cantilever 221-1 so that the cantilever 221-1 can bend. The support stand 211 supports the fixed end 261-2 of the cantilever 221-2 so that the cantilever 221-2 can be bent.

The piezoelectric elements 223-1 and 223-2 are made of PZT (lead zirconate titanate), PLZT (La-modified lead zirconate titanate), PMN-PT (magnesium niobate/lead titanate), AlN (aluminum nitride), or ScAlN, respectively. (Scandium aluminum nitride), lead-free materials such as LiNbO3, LiTaO3, La3Ga5SiO14, Li2B4O7, KNbO3, (Bi0.5Na0.5)TiO3 or Bi4Ti3O12. The piezoelectric element 223-1 is formed in the shape of a rectangular plate or film on the upper surface of the cantilever 221-1. Electrodes are provided on both sides of the piezoelectric element 223-1, respectively. When a voltage is applied to the electrode, the piezoelectric element 223-1 bends itself, thereby bending the cantilever 221-1.

The piezoelectric element 223-2 is formed in the shape of a rectangular plate or film on the upper surface of the cantilever 221-2. Electrodes are provided on both sides of the piezoelectric element 223-2, respectively. When a voltage is applied to the electrode, the piezoelectric element 223-2 bends itself, thereby bending the cantilever 221-2.

For example, the cantilever 221-1 is formed on a silicon wafer by MEMS or ultra-precision cutting, oxidized from the surface of the silicon wafer to a thickness of 200 to 500 nm to form SiO2 (insulating layer), and then Then, electrodes of metals such as platinum (Pt), gold (Au), and titanium (Ti), CNT (carbon nanotube) thin films, and graphene are formed, and a piezoelectric film is formed on top of these electrodes. Then, electrodes of metals such as platinum (Pt), gold (Au), titanium (Ti), CNT (carbon nanotube) thin films, or graphene are formed on the piezoelectric film, and the piezoelectric film is sandwiched between the electrodes. , a piezoelectric element 223-1 is generated. Piezoelectric element 223-2 can be produced in the same way as piezoelectric element 223-1.

Note that the piezoelectric element 223-1 or 223-2 can be electrically connected to the outside by wire bonding between the end of the electrode of the piezoelectric element 223-1 or 223-2 and an external current-carrying pad. I can do it. Alternatively, a socket may be formed in the support base 211 to form a wiring circuit up to the electrode of the piezoelectric element 223-1 or 223-2.

The tactile sensation generation chip 224 is an example of a first protrusion, and is provided on the upper surface of the free end of the cantilever 221-1. That is, the tactile sensation generating chip 224 is provided on the free end side of one of the surfaces of the cantilever 221-1. The tip of the tactile sensation generating chip 224 is formed into a pointed shape. For example, the haptic generation chip 224 is formed into a conical shape with an upwardly pointed tip. Since the tactile sensation generating chip 224 needs to bite into the skin 101 when transmitting stimulation, it is molded from hard rubber, plastic, or carbon material that is harder than the skin 101. When the cantilever 221-1 is bent, the tactile sensation generation chip 224 protrudes upward from the upper surface of the support base 211, presses the skin 101, and transmits stimulation to the skin 101. Note that the tactile sensation generation chip 224 may be in the shape of a pyramid, or may be in the shape of a round bar or a square bar whose tip is cut off diagonally. The piezoelectric element 223-1 is provided on one of the surfaces of the plate-shaped cantilever 221-1, and is configured to cause the tip of the tactile sensation generating chip 224 to protrude from the support base 211 when a voltage is applied. The cantilever 221-1 is bent. When a voltage is applied to the piezoelectric element 223-2, the piezoelectric element 223-2 bends the cantilever 221-2 in the same direction as the electric element 223-1 bends the cantilever 221-1.

The connecting bar 225 is an example of a connecting member, and connects the free end of the cantilever 221-1 and the free end of the cantilever 221-2. The connection bar 225 is made of metal, carbon, resin, or the like and is formed into a plate or rod shape. The connecting bar 225 connects the free end side of the lower surface of the cantilever 221-1 and the free end side of the upper surface of the cantilever 221-2. In other words, the connecting bar 225 connects the free end side of the surface of the cantilever 221-1 opposite to the surface on which the haptic sensation generation chip 224 is provided, and the free end side of the surface of the cantilever 221-2 facing the cantilever 221-1 side. Connect the free end side of the surface. The connecting bar 225 can be made of the same material as the cantilever 221-1 or 221-2, or can be made of a different material from the cantilever 221-1 or 221-2.

When an in-phase sine wave, triangular wave, or square wave AC voltage of 30 Hz to 500 Hz is applied to the electrodes of the piezoelectric elements 223-1 and 223-2, the tactile sensation generating pad 73 generates individual waves of 0.5 mm to 3 mm in size. Vibrations can be generated individually in the areas to induce a tactile sensation in the skin 101. In this case, the tactile sensation generating pad 73 generates vibrations according to a waveform such as a sine wave, a triangular wave, or a square wave. Further, when a DC voltage is applied to the electrodes of the piezoelectric elements 223-1 and 223-2, the tactile sensation generation pad 73 can generate a pressing force and induce a local pressure sensation on the skin 101.

When an in-phase AC voltage or a DC voltage is applied to the electrodes of the piezoelectric elements 223-1 and 223-2, the piezoelectric elements 223-1 and 223-2 move to the cantilevers 221-1 and 221-2, respectively. Since each of these is bent in the same direction, a tactile or pressure sensation can be induced in the skin 101 with stronger force.

Although it has been described that the cantilever 221-1 is stacked on top of the cantilever 221-2, the present invention is not limited to this, and the tactile sensation generating section 212 may be configured by stacking three or more cantilevers. Further, a piezoelectric element may be arranged on the lower surface of the cantilever 221-1 or the cantilever 221-2.

The skin 101 has many receptors for sensing vibration, shape, and shear force. When the tactile sensation generating pad 73 comes into contact with the skin 101 and transmits vibration or pressure, the receptors in the skin 101 are activated and a tactile sensation and a pressure sensation can be generated. That is, the tactile sensation generation pad 73 generates a tactile sensation and a pressure sensation by activating receptors in the human skin 101 using vibration and pressure stimulation.

As described with reference to FIGS. 2 to 4, the haptic sensation generating pad 73 is pressed against the skin 101 by the air actuator 72, the cam 122 and the motor 123, or the wire 152, the pulley 153, the pulley 154 and the motor 155. When all or any of the tactile sensation generation units 212-1 to 212-8 are vibrated, the receptors in the skin 101 are activated and a tactile sensation and a pressure sensation can be generated. For example, when the tactile sensation generation pad 73 is pressed against the skin 101 with a relatively weak force and all or any of the tactile sensation generation units 212-1 to 212-8 are vibrated, the receptors on the skin 101 are vibrated. Of these, Merkel's disks and Meissner's corpuscles near the surface of the skin 101 are activated to generate a tactile sensation. For example, when the tactile sensation generation pad 73 is pressed against the skin 101 with a stronger force and vibrates all or any of the tactile sensation generation units 212-1 to 212-8, some of the receptors on the skin 101 are vibrated. , activates Pacinian corpuscles deep in the dermis of the skin 101 and pressure receptors in the joints to generate a pressure sensation.

Next, a detailed example of the configuration of the tactile sensation generation pad 301 that constitutes the tactile sensation generation pad group 21 will be described. The haptic sensation generating pad 301 is used in the same way as the haptic generating pad 73 in the haptic generating pad group 21 . FIG. 9 is a plan view showing an example of the configuration of the tactile sensation generating pad 301. FIG. 10 is a cross-sectional view taken along line BB′ in FIG. The tactile sensation generating pad 301 includes a support base 311 and tactile sensation generating sections 312-1 to 312-6. Note that FIG. 10 shows a cross section of the tactile sensation generating units 312-1 to 312-3 viewed from the BB′ line side in FIG.

The support stand 311 is formed into a plate shape from a ductile material such as stainless steel, copper, tungsten, or aluminum, or a metal such as a silicon substrate. The support stand 311 supports the tactile sensation generating units 312-1 to 312-6. The tactile sensation generating units 312-1 to 312-6 bend respectively to generate stimulation and transmit the stimulation to the skin 101. Each of the tactile sensation generating parts 312-1 to 312-6 has a central part in the longitudinal direction along a horizontal plane, and a part close to the tip that moves up and down is bent at right angles to the transverse direction, and then the longitudinal part is bent at right angles to the transverse direction. direction, and is bent at right angles to the tip side. In other words, each of the tactile sense generation units 312-1 to 312-6 includes an L-shaped portion along the horizontal plane. In other words, each of the tactile sense generating sections 312-1 to 312-6 has a portion bent in a direction crossing the bending direction.

On the rear side of the support stand 311, a tactile sensation generating section 312-1, a haptic generating section 312-2, and a haptic generating section 312-3 are arranged in this order from the left. On the front side of the support base 311, a tactile sensation generating section 312-4, a tactile sensation generating section 312-5, and a haptic generating section 312-6 are arranged in this order from the left.

The support base 311 has recesses 341-1 to 341-6 formed therein. The recesses 341-1 to 341-6 house the tactile sense generating units 312-1 to 312-6, respectively. The recesses 341-1 to 341-6 are formed so as not to hinder the bending of the tactile sensation generating sections 312-1 to 312-6, respectively. The shape of the horizontal cross section of the recesses 341-1 to 341-6 corresponds to the shape of the plane of each of the tactile sensation generating parts 312-1 to 312-6, respectively, and The cross-sectional shape of is a rectangular parallelepiped. For example, the recesses 341-1 to 341-6 are formed as grooves that separate the tactile sensation generating sections 312-1 to 312-6, respectively, and the recesses 341-1 to 341-6 are formed as grooves that separate the tactile sensation generating sections 312-1 to 312-6, respectively. Store. As shown in FIG. 10, the upper surface of the support base 311 and the upper surfaces of the tactile generation units 312-1 to 312-6, which are the upper surfaces in FIG. There is.

For example, the support base 311 and the tactile sensation generating units 312-1 to 312-6 are formed from a silicon wafer.

The tactile sensation generating units 312-1 to 312-6 are arranged such that their longitudinal directions are along the X-axis direction. The tactile sensation generating units 312-1 to 312-3 are supported by the support stand 311 at their rear ends. When each of the tactile sensation generating units 312-1 to 312-3 is bent, the front ends of the tactile generating units 312-1 to 312-3 move up and down, and stimulation is transmitted to the skin 101. The tactile sensation generating units 312-4 to 312-6 are supported by the support stand 311 at their front ends. When each of the tactile sensation generating sections 312-4 to 312-6 is bent, the rear ends of the tactile generating sections 312-4 to 312-6 move up and down, and stimulation is transmitted to the skin 101.

The positions of the front ends of the tactile sensation generating units 312-1 and 312-3 are on the front side with respect to the position of the front end of the haptic generating unit 312-2. The positions of the rear ends of the tactile sensation generating sections 312-4 and 312-6 are on the rear side with respect to the position of the rear end of the haptic generating section 312-5.

The tactile sensation generation unit 312-1 and the tactile sensation generation unit 312-4 are arranged so that the sides that move up and down to transmit stimulation face each other, and the tactile sensation generation unit 312-2 and the tactile sensation generation unit 312-5 are arranged so that the sides that move up and down to transmit stimulation face each other. The two sides are arranged so that the sides that transmit the stimulus face each other. Similarly, the tactile sensation generation section 312-3 and the tactile sensation generation section 312-6 are arranged so that the sides that move up and down to transmit stimulation face each other.

Hereinafter, when there is no need to distinguish the tactile sensation generation units 312-1 to 312-6 individually, they will be simply referred to as tactile sensation generation units 312.

Here, the details of the configuration of the tactile sensation generating section 312 will be explained. FIG. 11 is a plan view showing an example of the configuration of the tactile sensation generating section 312. FIG. 12 is a cross-sectional view showing an example of the configuration of the tactile sensation generating section 312. The tactile sensation generation section 312 includes a cantilever 321, a piezoelectric element 323, a tactile sensation generation chip 324, and a support section 325.

The cantilever 321 is made of a ductile material such as stainless steel, copper, tungsten, or aluminum, or a metal such as a silicon substrate, and is formed into a bendable plate shape. The cantilever 321 is formed so that the direction of the surface of the cantilever 321 formed in a plate shape matches the direction of the surface of the support base 311 formed in a plate shape. The fixed end 361 side of the cantilever 321 is fixed to the support base 311.

Along the horizontal plane, the cantilever 321 is bent at a right angle to the width direction at the central portion in the longitudinal direction and close to the tip side that moves up and down, and then bent at right angles to the tip side in the longitudinal direction. It is bent to. That is, in FIG. 11, the cantilever 321 extends from the fixed end 361 side to the front side along the horizontal plane, bends once at right angles to the left on the way, and then bends at right angles to the front side again and extends to the free end. . In other words, the cantilever 321 includes an L-shaped portion along the horizontal plane. In other words, the cantilever 321 has a portion bent in a direction crossing the bending direction. It can also be said that the cantilever 321 is formed so as to include an L-shaped portion on one surface where the piezoelectric element 323 is provided.

The piezoelectric element 323 is made of a piezoelectric material such as PZT, PLZT, PMN-PT, AlN, or ScAlN. The piezoelectric element 323 is formed on the top surface of the cantilever 321 in the shape of a plate or film that matches the shape of the top surface of the cantilever 321. That is, the piezoelectric element 323 is formed on the upper surface of the cantilever 321 so as to be bent along the shape of the upper surface of the cantilever 321. Electrodes are provided on both sides of the piezoelectric element 323, respectively. When a voltage is applied to the electrode, the piezoelectric element 323 bends itself, thereby bending the cantilever 321.

For example, the cantilever 321 is formed on a silicon wafer by MEMS or ultra-precision cutting, oxidized from the surface of the silicon wafer to a thickness of 200 to 500 nm to form SiO2 (insulating layer), and on the SiO2 (insulating layer), A platinum (Pt) electrode is formed, and a piezoelectric film is formed on it. Then, a piezoelectric element 323 is generated by forming a platinum (Pt) electrode on the piezoelectric film and sandwiching the piezoelectric film between the electrodes.

Note that the piezoelectric element 323 can be electrically connected to the outside by wire bonding between the end of the electrode of the piezoelectric element 323 and an external current-carrying pad. Alternatively, a socket may be formed in the support base 311 to form a wiring circuit up to the electrodes of the piezoelectric element 323.

The tactile sensation generation chip 324 is an example of a first protrusion, and is provided on the upper surface of the free end of the cantilever 321. That is, the haptic generation chip 324 is provided on the free end side of one of the surfaces of the cantilever 321. The tip of the tactile sensation generation chip 324 is formed into a pointed shape. For example, the haptic generation chip 324 is formed into a conical shape with an upwardly pointed tip. Since the tactile sensation generating chip 324 needs to bite into the skin 101 when transmitting stimulation, it is molded from hard rubber, plastic, or carbon material that is harder than the skin 101. When the cantilever 321 is bent, the tactile sensation generating chip 324 protrudes upward from the upper surface of the support base 311, presses the skin 101, and transmits stimulation to the skin 101. Note that the tactile sensation generating chip 324 may be in the shape of a pyramid, or may be in the shape of a round bar or a square bar whose tip is cut off diagonally.

The support portion 325 is formed into a plate shape or a rod shape. The lower end of the support portion 325 is fixed to the support base 311. The upper end of the support portion 325 is placed at a predetermined distance from the center of the cantilever 321 in the longitudinal direction. When the haptic generation chip 324 protrudes upward from the upper surface of the support base 311, the support portion 325 does not prevent the cantilever 321 from bending, and the haptic generation chip 324 pushes the skin 101, causing the cantilever 321 to move downward from the upper surface of the support base 311. When attempting to bend, the cantilever 321 is supported by coming into contact with the lower surface of the cantilever 321.

When the haptic sensation generating pad 301 is pressed against the skin 101 by the air actuator 72, cam 122 and motor 123, or by the wire 152, pulley 153, pulley 154 and motor 155, the support part 325 supports the lower surface of the cantilever 321, so that A stronger sense of pressure can be generated on the skin 101.

When an AC voltage of 30 Hz to 500 Hz in the form of a sine wave, triangular wave, or square wave is applied to the electrodes of the piezoelectric element 323, the tactile sensation generating pad 301 generates vibrations individually in individual regions with a size of 0.5 mm to 3 mm. Thus, a tactile sensation can be induced in the skin 101. In this case, the tactile sensation generating pad 301 generates vibrations according to a waveform such as a sine wave, a triangular wave, or a square wave. Further, when a DC voltage is applied to the electrode of the piezoelectric element 323, the tactile sensation generation pad 301 can generate a pressing force and induce a local pressure sensation in the skin 101.

Note that, similar to the cantilevers 221-1 and 221-2, the tactile sensation generating section 312 may be configured by stacking two or more cantilevers 321.

In this way, if the cantilever 321 includes an L-shaped portion along the horizontal plane and the piezoelectric element 323 is formed into a plate or film shape that matches the shape of the upper surface of the cantilever 321, the cantilever 321 can be fixed. Since the length of the cantilever 321 bent by the piezoelectric element 323 is longer than the distance from the end 361 to the free end where the haptic generation chip 324 is provided, when the haptic generation section 312 is bent, the haptic generation chip 324 can protrude further. In other words, the tactile sensation generation unit 312 can make use of the lateral bending in addition to the longitudinal bending for the displacement of the haptic generating chip 324.

Next, a detailed example of the configuration of the tactile sensation generation pad 401 that constitutes the tactile sensation generation pad group 21 will be described. The haptic sensation generating pad 401 is used in the same way as the haptic generating pad 73 in the haptic generating pad group 21 . FIG. 13 is a plan view showing an example of the configuration of the tactile sensation generating pad 401. FIG. 14 is a cross-sectional view showing a cross section of the tactile sensation generating pad 401 taken along line CC' in FIG. The tactile sensation generation pad 401 includes a support base 411, tactile generation units 412-1 to 412-6, and tactile generation units 461-1 to 461-6. Note that FIG. 14 shows cross sections of the tactile sensation generating sections 412-1 to 412-6 and the tactile sensation generating sections 461-1 to 461-6 as viewed from the CC' line side in FIG. 13.

The support base 411 is formed into a plate shape from a ductile material such as stainless steel, copper, tungsten, or aluminum, or a metal such as a silicon substrate. The support stand 411 supports the tactile sense generating units 412-1 to 412-6 and the tactile sense generating units 461-1 to 461-6. The tactile sensation generating units 412-1 to 412-6 each bend to generate a stimulus and transmit the stimulus to the skin 101. Each of the tactile sensation generating sections 412-1 to 412-6 has a central portion in the longitudinal direction along a horizontal plane, and a portion close to the tip that moves up and down is bent at right angles to the transverse direction, and then direction, and is bent at right angles to the tip side. In other words, each of the tactile sense generation units 412-1 to 412-6 includes an L-shaped portion along the horizontal plane. In other words, each of the tactile sensation generating sections 412-1 to 412-6 has a portion bent in a direction crossing the direction of bending.

The tactile sensation generation units 461-1 to 461-6 are bent respectively to generate stimulation and transmit the stimulation to the skin 101. Each of the tactile sensation generating parts 461-1 to 461-6 has a central part in the longitudinal direction along a horizontal plane, and a part close to the tip that moves up and down is bent at right angles to the transverse direction, and then direction, and is bent at right angles to the tip side. In other words, each of the tactile sense generation units 461-1 to 461-6 includes an L-shaped portion along the horizontal plane. In other words, each of the tactile sense generating sections 461-1 to 461-6 is formed with a bent portion in a direction that intersects with the bending direction.

On the rear side of the support base 411, from the left, a tactile sensation generating section 412-1, a haptic generating section 461-1, a haptic generating section 412-2, a haptic generating section 461-2, a haptic generating section 412-3, and a haptic generating section. 461-3 are arranged in order. On the front side of the support base 411, from the left, a tactile sensation generating section 412-4, a haptic generating section 461-4, a haptic generating section 412-5, a haptic generating section 461-5, a haptic generating section 412-6, and a haptic generating section 461. -6 are arranged in order.

The support base 411 is formed with recesses 441-1 to 441-6 and recesses 481-1 to 481-6. The recesses 441-1 to 441-6 house the tactile sensation generating units 412-1 to 412-6, respectively. The recesses 441-1 to 441-6 are formed so as not to hinder the bending of the tactile sensation generating sections 412-1 to 412-6, respectively. The shape of the horizontal cross section of the recesses 441-1 to 441-6 corresponds to the shape of the plane of each of the tactile sensation generating sections 412-1 to 412-6, respectively, and The cross-sectional shape of is a rectangular parallelepiped. For example, the recesses 441-1 to 441-6 are formed as grooves that separate the tactile sensation generating units 412-1 to 412-6, respectively, and the recesses 441-1 to 441-6 are formed as grooves that separate the tactile sensation generating units 412-1 to 412-6, respectively. Store. As shown in FIG. 14, the upper surfaces of the tactile sense generating units 412-1 to 412-6 are lower than the upper surface of the support base 411.

The recesses 481-1 to 481-6 house the tactile sense generating units 461-1 to 461-6, respectively. The recesses 481-1 to 481-6 are formed so as not to impede the bending of the tactile sensation generating sections 461-1 to 461-6, respectively. The shapes of the horizontal cross sections of the recesses 481-1 to 481-6 correspond to the shapes of the planes of the tactile sensation generating sections 461-1 to 461-6, respectively, and the shapes of the vertical cross sections of the recesses 481-1 to 481-6 respectively is a rectangular parallelepiped. For example, the recesses 481-1 to 481-6 are each formed as a rectangular parallelepiped-shaped depression, and house the rectangular parallelepiped-shaped tactile sensation generating sections 461-1 to 461-6, respectively. As shown in FIG. 10, the upper surface of the support base 411 and the upper surfaces of the tactile generation units 461-1 to 461-6, which are the upper surfaces in FIG. There is.

For example, the support base 411, the tactile sensation generation units 412-1 to 412-6, and the tactile sensation generation units 461-1 to 461-6 are formed from a silicon wafer.

The tactile sensation generating units 412-1 to 412-6 are arranged so that the longitudinal direction is along the X-axis direction. The tactile sensation generating units 412-1 to 412-3 are supported by the support stand 411 at their rear ends. When each of the tactile sensation generating units 412-1 to 412-3 is bent, the front ends of the tactile generating units 412-1 to 412-3 move up and down, and stimulation is transmitted to the skin 101. The tactile sensation generating units 412-4 to 412-6 are supported by a support base 411 at their front ends. When each of the tactile sensation generating units 412-4 to 412-6 is bent, the rear ends of the tactile generating units 412-4 to 412-6 move up and down, and stimulation is transmitted to the skin 101.

The tactile sensation generating units 461-1 to 461-6 are arranged so that the longitudinal direction is along the X-axis direction. The tactile sensation generating units 461-1 to 461-3 are supported by the support stand 411 at their rear ends. When each of the tactile sensation generating units 461-1 to 461-3 is bent, the front ends of the tactile generating units 461-1 to 461-3 move up and down, and stimulation is transmitted to the skin 101. The tactile sensation generating units 461-4 to 461-6 are supported by the support base 411 at their front ends. When each of the tactile sensation generating units 461-4 to 461-6 is bent, the rear ends of the tactile generating units 461-4 to 461-6 move up and down, and stimulation is transmitted to the skin 101.

The front ends of the tactile sensation generating units 412-1 to 412-3 are positioned on the rear side with respect to the front ends of the haptic generating units 461-1 to 461-3. The positions of the rear ends of the tactile sensation generating units 412-4 to 412-6 are on the front side relative to the positions of the rear ends of the haptic generating units 461-4 to 461-6.

The tactile sensation generation units 461-1 to 461-3 and the tactile sensation generation units 461-4 to 461-6 are arranged close to each other so that the sides that move up and down to transmit stimulation face each other.

By doing this, it is possible to further shorten the interval between the tactile sensation generation points.

Hereinafter, when there is no need to distinguish the tactile sensation generating units 412-1 to 412-6 individually, they will simply be referred to as the haptic generating unit 412. Hereinafter, when there is no need to distinguish the tactile sensation generating units 461-1 to 461-6 individually, they will simply be referred to as haptic generating units 461.

Here, the details of the configurations of the tactile sensation generation section 412 and the tactile sensation generation section 461 will be explained. FIG. 15 is a plan view showing an example of the configuration of the tactile sensation generation section 412 and the tactile sensation generation section 461. FIG. 16 is a cross-sectional view showing an example of the configuration of the tactile sensation generation section 412 and the tactile sensation generation section 461. The tactile sensation generation section 412 includes a cantilever 421, a piezoelectric element 423, a tactile sensation generation chip 424, and a connecting bar 425.

The cantilever 421 is made of a ductile material such as stainless steel, copper, tungsten, or aluminum, or a metal such as a silicon substrate, and is formed into a bendable plate shape. The cantilever 421 is formed so that the direction of the surface of the cantilever 421, which is formed in a plate shape, matches the direction of the surface of the support base 411, which is formed in a plate shape. The fixed end 451 side of the cantilever 421 is fixed to the support base 411. As shown in FIG. 16, the cantilever 421 is fixed to the support base 411 such that the upper surface of the cantilever 421 is lowered from the upper surface of the support base 411.

The cantilever 421 is bent along the horizontal plane at a central portion in the longitudinal direction and close to the tip side that moves up and down at a right angle to the short side direction, and then bent at a right angle to the tip side in the longitudinal direction. It is bent to. That is, in FIG. 15, the cantilever 421 extends from the fixed end 451 side to the front side along the horizontal plane, bends once at right angles to the left on the way, and then bends at right angles to the front side again and extends to the free end. . In other words, the cantilever 421 includes an L-shaped portion along the horizontal plane. In other words, the cantilever 421 has a portion bent in a direction crossing the bending direction.

The piezoelectric element 423 is made of a piezoelectric material such as PZT, PLZT, PMN-PT, AlN, or ScAlN. The piezoelectric element 423 is formed on the upper surface of the cantilever 421 in the shape of a plate or film that matches the shape of the upper surface of the cantilever 421. That is, the piezoelectric element 423 is formed on the upper surface of the cantilever 421 so as to be bent along the shape of the upper surface of the cantilever 421. Electrodes are provided on both sides of the piezoelectric element 423, respectively. When a voltage is applied to the electrode, the piezoelectric element 423 bends itself, thereby bending the cantilever 421.

For example, the cantilever 421 is formed on a silicon wafer by MEMS or ultra-precision cutting, oxidized from the surface of the silicon wafer to a thickness of 200 to 500 nm to form SiO2 (insulating layer), and on the SiO2 (insulating layer), A platinum (Pt) electrode is formed, and a piezoelectric film is formed on it. Then, a piezoelectric element 423 is generated by forming a platinum (Pt) electrode on the piezoelectric film and sandwiching the piezoelectric film between the electrodes.

Note that the piezoelectric element 423 can be electrically connected to the outside by wire bonding between the end of the electrode of the piezoelectric element 423 and an external current-carrying pad. Alternatively, a socket may be formed on the support base 411 to form a wiring circuit up to the electrodes of the piezoelectric element 423.

A connecting bar 425 connects the free end of the cantilever 421 and the haptic generation chip 424. The connecting bar 425 is provided on the upper surface of the free end of the cantilever 421 . The connection bar 425 is made of metal, carbon, resin, or the like and is formed into a plate or rod shape. The connecting bar 425 can be formed of the same material as either the cantilever 421 or the haptic sensation generation chip 424, or can be formed of a different material from either the cantilever 421 or the haptic sensation generation chip 424. It can be said that the connecting bar 425 is disposed on the free end side of a predetermined surface of the cantilever 421 so as to extend in a direction intersecting the surface of the cantilever 421.

The tactile sensation generation chip 424 is provided on the upper surface of the free end of the cantilever 421 via a connecting bar 425. The tactile sensation generating chip 424 is provided on the free end side of the cantilever 421 via a connecting bar 425. The tactile sensation generation chip 424 has a pointed tip. Since the tactile sensation generation chip 424 needs to bite into the skin 101 when transmitting stimulation, it is molded from hard rubber, plastic, or carbon material that is harder than the skin 101. For example, the haptic generation chip 424 is formed into a conical shape with an upwardly pointed tip. When the cantilever 421 is bent, the tactile sensation generation chip 424 protrudes upward from the upper surface of the support base 411, presses the skin 101, and transmits stimulation to the skin 101. That is, the piezoelectric element 423 is provided on one of the surfaces of the plate-shaped cantilever 421, and when a voltage is applied to the cantilever, the tip of the tactile sensation generating chip 424 protrudes from the support base 411. 421 is bent. Note that the tactile sensation generating chip 424 may be in the shape of a pyramid, or may be in the shape of a round bar or a square bar whose tip is cut off diagonally.

The tactile sensation generation section 461 includes a cantilever 471, a piezoelectric element 473, and a tactile sensation generation chip 474.

The cantilever 471 is made of a ductile material such as stainless steel, copper, tungsten, or aluminum, or a metal such as a silicon substrate, and is formed into a bendable plate shape. The cantilever 471 is formed so that the direction of the surface of the cantilever 471, which is formed in a plate shape, matches the direction of the surface of the support base 411, which is formed in a plate shape. The fixed end 491 side of the cantilever 471 is fixed to the support base 411. As shown in FIG. 16, the cantilever 471 is fixed to the support base 411 such that the upper surface of the cantilever 471 is flush with the upper surface of the support base 411.

The cantilever 471 is bent along the horizontal plane at a central portion in the longitudinal direction and close to the distal end side that moves up and down at a right angle to the transverse direction, and then bent at a right angle to the distal end side in the longitudinal direction. It is bent to. That is, in FIG. 15, the cantilever 471 extends from the fixed end 491 side to the front side along the horizontal plane, bends once at right angles to the left on the way, and then bends at right angles to the front side again and extends to the free end. . In other words, the cantilever 471 includes an L-shaped portion along the horizontal plane. In other words, the cantilever 471 has a portion bent in a direction crossing the bending direction.

To explain the positional relationship between the cantilever 471 and the cantilever 421, the cantilever 421 is bent in the same direction as the cantilever 471, and is placed a predetermined distance apart in the direction intersecting one surface of the plate-shaped cantilever 421. The fixed end 451 is supported by the support base 411 so that a predetermined surface is arranged.

The piezoelectric element 473 is made of a piezoelectric material such as PZT, PLZT, PMN-PT, AlN, or ScAlN. The piezoelectric element 473 is formed on the upper surface of the cantilever 471 in the shape of a plate or film that matches the shape of the upper surface of the cantilever 471. That is, the piezoelectric element 473 is formed on the upper surface of the cantilever 471 so as to be bent along the shape of the upper surface of the cantilever 471. Electrodes are provided on both sides of the piezoelectric element 473, respectively. When a voltage is applied to the electrode, the piezoelectric element 473 bends itself, thereby bending the cantilever 471.

For example, a cantilever 471 is formed on a silicon wafer by MEMS or ultra-precision cutting, oxidized from the surface of the silicon wafer to a thickness of 200 to 500 nm to form SiO2 (insulating layer), and on top of SiO2 (insulating layer), A platinum (Pt) electrode is formed, and a piezoelectric film is formed on it. Then, a piezoelectric element 473 is generated by forming a platinum (Pt) electrode on the piezoelectric film and sandwiching the piezoelectric film between the electrodes.

Note that the piezoelectric element 473 can be electrically connected to the outside by wire bonding between the end of the electrode of the piezoelectric element 473 and an external current-carrying pad. Alternatively, a socket may be formed on the support base 411 to form a wiring circuit up to the electrodes of the piezoelectric element 473.

The tactile sensation generation chip 474 is provided on the upper surface of the free end of the cantilever 471. The position of the upper end of the haptic generation chip 474 is the same as the position of the upper end of the haptic generation chip 424. That is, the distance from the predetermined surface of the support base 411 to the tip of the haptic generation chip 424 is equal to the distance from the predetermined surface of the support base 411 to the tip of the haptic generation chip 474. Since the tactile sensation generation tip 474 needs to bite into the skin 101 when transmitting stimulation, it is molded from hard rubber, plastic, or carbon material that is harder than the skin 101. For example, the tactile sensation generating chip 474 is formed into a conical shape with an upwardly pointed tip. When the cantilever 471 is bent, the tactile sensation generation chip 474 protrudes upward from the upper surface of the support base 411, presses the skin 101, and transmits stimulation to the skin 101. Note that the tactile sensation generating chip 474 may be in the shape of a pyramid, or may be in the shape of a round bar or a square bar whose tip is cut off diagonally.

The height of the tip of the haptic generation chip 474 is the same as the height of the tip of the haptic generation chip 424. That is, the vertical position of the tip of the haptic generation chip 474 is equal to the vertical position of the tip of the haptic generation chip 424. In other words, the distance from the predetermined surface of the support base 411 to the tip of the haptic generation chip 424 is equal to the distance from the predetermined surface of the support base 411 to the tip of the haptic generation chip 474.

When a sinusoidal, triangular or square wave alternating current voltage of 30Hz to 500Hz is applied to the electrodes of the piezoelectric element 423 or the piezoelectric element 473, the tactile sensation generating pad 401 will be individually activated in discrete areas with a size of 0.5 mm to 3 mm. Vibrations can be generated to induce a tactile sensation on the skin 101. In this case, the tactile sensation generating pad 401 generates vibrations according to a waveform such as a sine wave, a triangular wave, or a square wave. Further, when a DC voltage is applied to the electrodes of the piezoelectric element 423 or the piezoelectric element 473, the tactile sensation generation pad 401 can generate a pressing force and induce a local pressure sensation on the skin 101.

In this way, if the cantilever 421 includes an L-shaped portion along the horizontal plane and the piezoelectric element 423 is formed into a plate or film shape that matches the shape of the upper surface of the cantilever 421, the cantilever 421 can be fixed. Since the length of the cantilever 421 bent by the piezoelectric element 423 is longer than the distance from the end 451 to the free end where the haptic generation chip 424 is provided, when the haptic generation section 412 is bent, the haptic generation chip 424 can protrude further.

If the upper surface of the cantilever 421 is placed a predetermined distance apart in the direction intersecting one surface of the cantilever 471, the cantilever 421 and the cantilever 471 can be placed closer to each other. For example, a part of the upper surface of the cantilever 421 and a part of the upper surface of the cantilever 471 may be arranged so as to overlap in the vertical direction.

Additionally, the fixed end of the cantilever can be reinforced. Instead of the tactile sensation generation section 312 of the tactile sensation generation pad 301, a tactile sensation generation section 512 whose fixed end side is reinforced can be used. FIG. 17 is a plan view showing an example of the configuration of the tactile sensation generating section 512. FIG. 18 is a cross-sectional view showing an example of the configuration of the tactile sensation generating section 312. The tactile sensation generation section 512 includes a cantilever 321, a piezoelectric element 323, a tactile sensation generation chip 324, a support section 325, reinforcing members 531-1 and 531-2, a reinforcing member 532, and a cantilever 533. In FIGS. 17 and 18, the same parts as shown in FIG. 11 or 12 are denoted by the same reference numerals, and the explanation thereof will be omitted.

The reinforcing members 531-1 and 531-2 and the reinforcing member 532 are so-called ribs that reinforce the connection between the fixed end 361 of the cantilever 321 and the support base 311. The reinforcing members 531-1 and 531-2 and the reinforcing member 532 are also referred to as triangular reinforcement. The reinforcing member 531-1 connects and reinforces one of the side surfaces of the cantilever 321 and the support base 311 on the fixed end 361 side. The reinforcing member 531-1 is formed into a generally triangular shape with one curved side. The reinforcing member 531-2 connects and reinforces the other side of the cantilever 321 and the support base 311 on the fixed end 361 side. The reinforcing member 531-2 is formed into a generally triangular shape with one curved side.

The reinforcing member 532 connects and reinforces the lower surface of the cantilever 321 and the support base 311 on the fixed end 361 side. The reinforcing member 532 is formed into a triangular plate shape or a triangular prism shape. In this way, the reinforcing member 531-1, the reinforcing member 531-2, and the reinforcing member 532 reinforce the support of the fixed end 361 of the cantilever 321 by the support base 311.

The cantilever 533 is made of, for example, an elastic body such as rubber or a ductile metal material such as aluminum, copper, or stainless steel, and is attached to the lower side of the cantilever 321. The planar shape of the cantilever 533 is the same as the planar shape of the cantilever 321. The cantilever 533 prevents the cantilever 321 from being damaged by contact with the support portion 325. Furthermore, the cantilever 533 suppresses excessive vibration of the cantilever 321 due to resonance or the like.

Next, a detailed example of the configuration of the tactile sensation generation pad 601 that constitutes the tactile sensation generation pad group 21 will be described. The haptic generation pad 601 is used in the same way as the haptic generation pad 73 in the haptic generation pad group 21 . FIG. 19 is a cross-sectional view showing a cross section of the haptic sensation generating pad 601. The tactile sensation generation pad 301 includes a support base 211, tactile generation sections 612-1 to 612-4, a cover 613, and

films

614 and 615. In FIG. 19, the same parts as in the case shown in FIG. 6 are given the same reference numerals, and the explanation thereof will be omitted.

Each of the tactile sensation generating units 612-1 to 612-4 bends, generates a stimulus, and transmits the stimulus to the skin 101. The tactile sensation generation section 612-1 includes a cantilever 621-1, a piezoelectric element 623-1, and a tactile sensation generation chip 624-1. The tactile sensation generation section 612-2 includes a cantilever 621-2, a piezoelectric element 623-2, and a tactile sensation generation chip 624-2. The tactile sensation generation section 612-4 includes a cantilever 621-3, a piezoelectric element 623-3, and a tactile sensation generation chip 624-3. The tactile sensation generation section 612-4 includes a cantilever 621-4, a piezoelectric element 623-4, and a tactile sensation generation chip 624-4.

The cantilevers 621-1 to 621-4 are each made of a ductile material such as stainless steel, copper, tungsten, or aluminum, or a metal such as a silicon substrate, and are formed in a bendable plate shape. The fixed end sides of each of the cantilevers 621-1 to 621-4 are fixed to the support base 211.

The piezoelectric elements 623-1 to 623-4 are each made of a piezoelectric material such as PZT, PLZT, PMN-PT, AlN, or ScAlN. The piezoelectric elements 623-1 to 623-4 are each formed in the shape of a rectangular plate or film on the upper surface of each of the cantilevers 621-1 to 621-4. Electrodes are provided on both surfaces of each of the piezoelectric elements 623-1 to 623-4. When voltage is applied to the electrodes of the piezoelectric elements 623-1 to 623-4, the piezoelectric elements 623-1 to 623-4 bend themselves, thereby bending the cantilevers 621-1 to 621-4, respectively.

The haptic generation chips 624-1 to 624-1 are provided on the upper surface of the free end of each of the cantilevers 621-1 to 621-4, respectively. That is, the haptic generation chips 624-1 to 624-1 are provided on the free end side of one of the surfaces of the cantilevers 621-1 to 621-4, respectively. The tips of each of the haptic generation chips 624-1 to 624-1 are formed into a pointed shape. Each of the haptic generation chips 624-1 to 624-1 needs to bite into the skin 101 when transmitting stimulation, so they are molded from hard rubber, plastic, or carbon material that is harder than the skin 101. For example, each of the haptic generation chips 624-1 through 624-1 can be molded from a bar of carbon fiber. For example, each of the haptic generation chips 624-1 to 624-1 is formed into a conical shape with an upwardly pointed tip. When the cantilevers 621-1 to 621-4 are respectively bent, the tactile sensation generating chips 624-1 to 624-1 protrude upward from the upper surface of the support base 211, press the skin 101, and stimulate the skin 101. Communicate. Note that the tactile sensation generating chips 624-1 to 624-1 may be pyramid-shaped, or may be shaped like a round bar or a square bar whose tip is cut off diagonally.

The cover 613 is provided on the upper surface of the support base 211, that is, the surface on the side that contacts the skin 101. The upper surface of the cover 613, that is, the surface in contact with the skin 101, is formed into a curved shape corresponding to the shape of the surface of the skin 101. The cover 613 is made of an elastic body such as resin or rubber. The cover 613 is provided with holes 631-1 to 631-4 through which the haptic generation chips 624-1 to 624-1 pass, respectively. The inner diameter of each of the cylindrical holes 631-1 to 631-4 is larger than the outer diameter of each of the haptic generation chips 624-1 to 624-1. The holes 631-1 to 631-4 each penetrate from the bottom surface of the cover 613 to the top surface.

Films

614 and 615 are each made of silicone material, and are stacked on cover 613. By covering the cover 613 with the

films

614 and 615, the respective tips of the haptic sensation generating chips 624-1 to 624-1 do not protrude from the holes 631-1 to 631-4, respectively, and thereby the force from the skin 101 is prevented. This prevents the cantilevers 621-1 to 621-4 from being damaged.

Note that the haptic generation units 612-1 to 612-4 can also have the same configuration as the

haptic generation unit

212, 312, 412, or 461.

Next, an example of the use of the tactile sensation generating pad 601 as a device to be attached to the finger pad will be described. FIG. 20 is a diagram showing the state of the tactile sensation generating pad 601 attached to the finger pad. The tactile sensation generating pad 601 is attached to the finger 801 with a fixing band 811 so that the surfaces of the

films

614 and 615 are in contact with the skin 101 of the finger pad of the finger 801.

For example, the tactile sensation generating pad 601 as a device worn on the finger pad is approximately the same size as the finger 501, and its thickness is 0.2 mm or more and less than 0.5 mm. Haptic sensation generating pad The haptic generating pad 601 is thin and fits the shape of the finger 501 with the cover 613.

When the tactile sensation generation pad 601 is applied with an AC voltage of 30 Hz to 500 Hz in the form of a sine wave, a triangular wave, or a square wave, it generates vibrations individually in individual areas with a size of 1.5 mm to 3 mm, and causes the finger pad of the finger 501 to vibrate. A tactile sensation can be induced on the skin 101 of the patient. Furthermore, when a direct current voltage is applied to the tactile sensation generation pad 601, it can be pressed individually in individual areas having a size of 1.5 mm to 3 mm, thereby inducing a pressure sensation in the skin 101 of the finger pad of the finger 501.

In this way, the tactile sensation generating pad 601 can be used alone as a skin stimulation device.

As described above, as a wearable device, it is possible to apply a stimulus that causes a tactile or pressure sensation to a desired part of the skin at a desired time and for a desired period.

For example, it is possible to generate a stimulus that makes the user perceive the shape or vibration pattern of an object, such as vibration, impact sensation, force pressure, edge or bump shape.

In this way, the tactile sensation generation pad group 21 is a skin stimulation device that applies stimulation to the skin, and includes a bendable plate-shaped cantilever 221-1 and one surface of the cantilever 221-1. A tactile sensation generating chip 224 provided on the free end side of the surface and having a pointed tip; a support base 211 that supports the fixed end of the cantilever 221-1 so that the cantilever 221-1 can bend; , the cantilever 221-1 is arranged so that the tip of the tactile sensation generation chip 224 protrudes from the support base 211 when a voltage is applied to one of the surfaces of the plate-shaped cantilever 221-1. It includes a piezoelectric element 223-1 for bending, and an air actuator 72 that displaces the support base 211 and presses the tactile sensation generating chip 224 against the skin when applying stimulation to the skin. One or more 223-1 are provided on the support stand 211, and one or more air actuators 72 for pressing the support stand 211 are provided.

With respect to the cantilever 221-1, the fixed ends 261-2 and 261-2 are bent by the support base 211 so that the positions of the fixed ends 261-1 and 261-2 and the free ends overlap and the directions in which they are bent are the same. The cantilever 221-2 is supported in the same direction as the direction in which the piezoelectric element 223-1 bends the cantilever 221-1 when a voltage is applied. The piezoelectric element 223-2 that bends the surface of the cantilever 221-1, the free end side of the other surface opposite to the surface on which the tactile sensation generation chip 224 is provided, and the surface of the cantilever 221-2. , and a free end side of one surface on the side of the cantilever 221-1 may further be provided.

The cantilever 321 can be formed to include an L-shaped portion on one surface where the piezoelectric element 323 is provided.

The fixed end 451 is fixed by the support base 411 so that the direction in which the cantilever 471 is bent is the same as that of the cantilever 471, and a predetermined surface is arranged at a predetermined distance apart in a direction intersecting one surface of the plate-shaped cantilever 471. A bendable plate-shaped cantilever 421 is supported, and a connection is arranged on the free end side of a predetermined surface of the cantilever 421 so as to extend in a direction intersecting the surface of the cantilever 421. Any one of the bar 425, the tactile sensation generating chip 424, which is provided on the free end side of the cantilever 421 via the connecting bar 425 and has a pointed tip, and the surface of the plate-shaped cantilever 421. A piezoelectric element 423 that bends the cantilever 421 so that the tip of the tactile sensation generation chip 424 protrudes from the support base 411 when a voltage is applied is further provided on the predetermined surface of the support base 411. The distance from the tip of the haptic generation chip 424 to the tip of the haptic generation chip 424 can be made equal to the distance from the predetermined surface of the support base 411 to the tip of the haptic generation chip 474.

A reinforcing member 531-1, a reinforcing member 531-2, or a reinforcing member 532 that reinforces the support of the fixed end of the cantilever 321 by the support base 311 can be further provided.

The surface in contact with the skin 101 is curved along the skin 101, and holes 631-1 to 631-4 are provided through which the haptic generation chips 624-1 to 624-4 are inserted, and the cantilevers 621-1 to 621- a cover 613 that covers a predetermined surface of the support base 211 and is formed to a thickness such that the tips of the haptic generation chips 624-1 to 624-4 protrude from the holes 631-1 to 631-4 when the tips of the support base 211 are bent; A

film

614 or 615 may be further provided to cover the surface of the cover 613 that is in contact with the skin 101.

The air actuator 72 can be used to displace the support base 211 and press the haptic generation chip 224 against the skin 101 using gas or liquid pressure.

The cam 122 as a pressing means can displace the support base 211 and press the tactile sensation generation chip 224 against the skin 101.

By pulling the wire 152 through the pulley 153 as a pressing means, the support base 211 can be displaced and the tactile sensation generation chip 224 can be pressed against the skin 101.

a plate-shaped cantilever 321 that is formed to be bendable; a tactile sensation generating chip 324 that is formed in a shape with a pointed tip and that is provided on the free end side of one of the surfaces of the cantilever 321; A support base 311 that supports the fixed end of the cantilever 321 so that the cantilever 321 can be bent, and a tactile sensation generation chip that is provided on one of the surfaces of the plate-shaped cantilever 321 when a voltage is applied. It includes a piezoelectric element 323 that bends the cantilever 321 so that the tip of the cantilever 324 protrudes from the support base 311, and an air actuator 72 that displaces the support base 311 and presses the tactile sensation generation chip 324 against the skin when stimulating the skin. , the cantilever 321, the tactile sensation generation chip 324, and the piezoelectric element 323 are provided one or more on the support base 311, and the support base 311 and the pressing air actuator 72 are used to generate the piezoelectric element of the tactile sensation generation pad group 21, which is provided one or more. When the haptic sensation generation chip 324 is pressed against the skin 101 by the air actuator 72, an alternating current voltage with a frequency of 30 Hz to 500 Hz is applied to the piezoelectric element 323 to vibrate the haptic sensation generation chip 324.

By doing so, the wearable device can apply a stimulus that causes a tactile or pressure sensation to a desired part of the skin at a desired time and for a desired period. The above cantilever can also be configured as a beam fixed at both ends.

Further, the embodiments of the present invention are not limited to the embodiments described above, and various changes can be made without departing from the gist of the present invention.

11 Tactile presentation system, 21 Tactile generation pad group, 31 Computer system, 32 Tactile detection system, 33 Vibration frequency calculation section, 34 Digital data/analog data conversion section, 35 Amplifier, 41 Collision calculation section, 42 Robot system, 52 Transducer Sa, 53 Remote robot system, 71 and 71-1 to 71-4 Tactile generation unit, 72 and 72-1 to 72-4 Air actuator, 73 and 73-1 to 73-4 Tactile generation pad, 101 Skin, 121 and 121- 1 to 121-4 Haptic sense generation unit, 122 and 122-1 to 122-4 Cam, 123 and 123-1 to 123-4 Motor, 151 and 151-1 to 151-4 Haptic sense generation unit, 152 and 152-1 to 152-4 Wire, 153, 153-1 to 153-4, 154 and 154-1 to 154-4 Pulley, 155 and 155-1 to 155-4 Motor, 211 Support stand, 212 and 212-1 to 212-8 Tactile sensation generation unit, 221-1 and 221-2 cantilever, 223-1 and 223-2 piezoelectric element, 224 tactile generation chip, 225 connection bar, 241-1 to 241-8 recess, 261-1 and 261-2 fixed end , 301 Tactile sensation generation pad, 311 Support stand, 312-1 to 312-6 Tactile generation section, 321 Cantilever, 323 Piezoelectric element, 324 Tactile generation chip, 325 Support section, 341-1 to 341- 6 recess, 361 fixed end, 401 Tactile sensation generation pad, 411 Support stand, 412-1 to 412-6 and 461-1 to 461-6 Tactile generation unit, 421 Cantilever, 423 Piezoelectric element, 424 Tactile generation chip, 425 Connection bar, 44 1-1 to 441- 6 and 481-1 to 481-6 recess, 451 and 491 fixed end, 471 cantilever, 473 piezoelectric element, 474 tactile sensation generation chip, 531-1 and 531-2 and 532 reinforcing member, 533 cantilever, 6 12-1 to 612- 4 Tactile sensation generation unit, 613 Cover, 614 and 615 Film, 621-1 to 621-4 Cantilever, 623-1 to 623-4 Piezoelectric element, 624-1 to 624-4 Tactile generation chip, 631-1 to 621-4 631-4 Hole, 801 finger, 811 fixed band

Claims

In skin stimulation devices that apply stimulation to the skin,
a plate-shaped first cantilever formed to be bendable;
a first protrusion having a pointed tip and provided on the free end side of one of the surfaces of the first cantilever;
a support base that supports a fixed end of the first cantilever so that the first cantilever is bendable;
The first cantilever is provided on one of the surfaces of the plate-shaped first cantilever so that the tip of the first protrusion protrudes from the support base when a voltage is applied. a first piezoelectric element that bends the cantilever;
when applying stimulation to the skin, pressing means for displacing the support base and pressing the first protrusion against the skin;
One or more of the first cantilever, the first protrusion, and the first piezoelectric element are provided on the support base,
The skin stimulation device includes one or more of the support base and the pressing means.
The skin stimulation device according to claim 1,
The fixed end is supported by the support base so that the positions of each fixed end and each free end overlap with each other with respect to the first cantilever, and the respective bent directions match. a plate-shaped second cantilever,
a second piezoelectric element that bends the second cantilever in the same direction as the first piezoelectric element bends the first cantilever when a voltage is applied;
Among the surfaces of the first cantilever, the free end side of the other surface opposite to the one surface on which the first protrusion is provided, and among the surfaces of the second cantilever, the first cantilever side A skin stimulation device further comprising: a connecting member connecting the free end side of one side of the skin stimulation device to the free end side of one side of the skin stimulation device.
The skin stimulation device according to claim 1,
The first cantilever is a skin stimulation device that is shaped to include an L-shaped portion on one surface on which the first piezoelectric element is provided.
The skin stimulation device according to claim 1,
The predetermined surface is bent in the same direction as the first cantilever, and the predetermined surface is arranged a predetermined distance apart in a direction intersecting one surface of the plate-shaped first cantilever. a second bendable plate-shaped cantilever whose fixed end is supported by a support base;
a stretching member disposed on the free end side of a predetermined surface of the second cantilever so as to extend in a direction intersecting the surface of the second cantilever;
a second protrusion having a pointed tip and provided on the free end side of the second cantilever via the extending member;
The second protrusion is provided on one of the surfaces of the plate-shaped second cantilever so that the tip of the second protrusion protrudes from the support base when a voltage is applied. a second piezoelectric element that bends the cantilever;
The distance from the predetermined surface of the support base to the tip of the second protrusion is equal to the distance from the predetermined surface of the support base to the tip of the first protrusion. The skin stimulation device.
The skin stimulation device according to claim 1,
The skin stimulation device further includes a reinforcing material for reinforcing support of the fixed end of the first cantilever by the support base.
The skin stimulation device according to claim 1,
The surface in contact with the skin is curved along the skin, and a hole is provided through which the first protrusion is inserted, and when the first cantilever is bent, the tip of the first protrusion is a cover that covers a predetermined surface of the support base and is formed to a thickness that protrudes from the hole;
A skin stimulation device further comprising: a film that covers a surface of the covering that is in contact with the skin.
The skin stimulation device according to claim 1,
The pressing means is a skin stimulation device that uses gas or liquid pressure to displace the support base and press the first protrusion against the skin.
The skin stimulation device according to claim 1,
The pressing means is a skin stimulation device that uses a cam to displace the support base and press the first protrusion against the skin.
The skin stimulation device according to claim 1,
In the skin stimulation device, the pressing means displaces the support base and presses the first protrusion against the skin by pulling with a wire via a pulley.
In a method of driving a skin stimulation device that applies stimulation to the skin,
a plate-like cantilever formed to be bendable; a protrusion with a pointed tip provided on the free end side of one of the surfaces of the cantilever; and a projection on which the cantilever is bent. A support base that supports the fixed end of the cantilever and a surface of the plate-shaped cantilever are provided, and when a voltage is applied, the tip of the protrusion is attached to the support base. a piezoelectric element that bends the cantilever so as to protrude from the skin; and a pressing means that displaces the support base and presses the protrusion against the skin when stimulating the skin; One or more elements are provided on the support base, and the support base and a pressing means for pressing the piezoelectric element of the skin stimulation device, which is provided at one or more, by the pressing means, push the protrusion onto the skin. A method of driving a skin stimulation device, wherein when pressed, an alternating current voltage with a frequency of 30 Hz to 500 Hz is applied to the piezoelectric element to vibrate the protrusion.