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WO2022259941A1 - Transducteur ultrasonore et dispositif de présentation de sensation tactile sans contact - Google Patents

Transducteur ultrasonore et dispositif de présentation de sensation tactile sans contact Download PDF

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Publication number
WO2022259941A1
WO2022259941A1 PCT/JP2022/022352 JP2022022352W WO2022259941A1 WO 2022259941 A1 WO2022259941 A1 WO 2022259941A1 JP 2022022352 W JP2022022352 W JP 2022022352W WO 2022259941 A1 WO2022259941 A1 WO 2022259941A1
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WO
WIPO (PCT)
Prior art keywords
ultrasonic transducer
diaphragm
peripheral region
main surface
inner peripheral
Prior art date
Application number
PCT/JP2022/022352
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English (en)
Japanese (ja)
Inventor
隆幸 後藤
茂雄 石井
寛之 清水
純明 岸本
雄一 濤川
Original Assignee
太陽誘電株式会社
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Filing date
Publication date
Application filed by 太陽誘電株式会社 filed Critical 太陽誘電株式会社
Publication of WO2022259941A1 publication Critical patent/WO2022259941A1/fr

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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers

Definitions

  • the present invention relates to an ultrasonic transducer that emits ultrasonic waves and a non-contact tactile presentation device.
  • Ultrasonic transducers are used as vehicle proximity sensors and object distance tracking sensors. Ultrasonic transducers are also used as ultrasonic wave sources in non-contact tactile presentation devices that use ultrasonic waves.
  • Patent Documents 1 to 3 disclose ultrasonic transducers having various configurations.
  • Ultrasonic transducers such as those described in Patent Documents 1 to 3 are configured to obtain excellent sound pressure characteristics by combining substrates, vibrators, diaphragms, horns, and the like.
  • a configuration requires many parts and many processes for manufacturing.
  • the housing has high rigidity, so the resonance frequency tends to be higher than the desired frequency, and the housing tends to be large in size.
  • the piezoelectric material forming the vibrator may be depolarized due to heat treatment during mounting, and the performance may be degraded.
  • an object of the present invention is to provide an ultrasonic transducer and a non-contact tactile sense presentation device having good sound pressure characteristics and stable frequency characteristics, and having a structure suitable for miniaturization and low profile. to provide.
  • an ultrasonic transducer includes a housing and a long ultrasonic transducer.
  • the housing is a diaphragm having a first main surface and a second main surface opposite to the first main surface, and has an inner peripheral region and an outer peripheral region surrounding the inner peripheral region. , an intermediate region located between the inner peripheral region and the outer peripheral region, the intermediate region having a plurality of openings penetrating through the diaphragm and located between the plurality of openings;
  • a diaphragm having beams connecting the inner peripheral area and the outer peripheral area is provided, and an internal space communicating with an external space is formed by the plurality of openings on the first main surface side of the diaphragm.
  • the ultrasonic transducer is joined to the inner peripheral region of the first main surface and accommodated in the internal space.
  • a substrate wherein the ultrasonic transducer faces the first main surface, is bonded to the housing, and forms the internal space together with the housing;
  • An external terminal provided on a surface of the substrate opposite to the first main surface and electrically connected to the ultrasonic transducer may be further provided.
  • the ultrasonic transducer has a positive electrode external electrode and a negative electrode external electrode provided on a bonding surface bonded to the first main surface,
  • the diaphragm may further have an insulating hole that is provided in the inner peripheral region, penetrates the diaphragm, and separates the positive external electrode and the negative external electrode from the diaphragm.
  • the ultrasonic transducer may be one without an ultrasonic resonator.
  • a non-contact tactile presentation device includes a plurality of ultrasonic transducers.
  • the ultrasonic transducer is a vibration plate having a first main surface and a second main surface opposite to the first main surface, and has an inner peripheral region and an outer peripheral region surrounding the inner peripheral region. and an intermediate region positioned between the inner peripheral region and the outer peripheral region, wherein the intermediate region is positioned between a plurality of openings passing through the diaphragm and the plurality of openings,
  • a housing comprising a diaphragm having a beam portion connecting the inner peripheral region and the outer peripheral region, and forming an internal space communicating with an external space by the plurality of openings on the first main surface side of the diaphragm. and an ultrasonic transducer that is joined to the inner peripheral region of the first main surface and accommodated in the internal space.
  • an ultrasonic transducer and a non-contact tactile sense presentation device having good sound pressure characteristics and stable frequency characteristics, and having a structure suitable for miniaturization and low profile. It is possible.
  • FIG. 1 is a cross-sectional view of an ultrasonic transducer according to a first embodiment of the invention
  • FIG. FIG. 4 is a cross-sectional view of a housing included in the ultrasonic transducer; 4 is a perspective view of a housing included in the ultrasonic transducer; FIG. 4 is a perspective view of a housing included in the ultrasonic transducer; FIG. FIG. 4 is a plan view of a diaphragm included in the ultrasonic transducer; FIG. 4 is a plan view showing a region of a diaphragm included in the ultrasonic transducer; 4 is a cross-sectional view of an ultrasonic transducer included in the ultrasonic transducer; FIG. FIG.
  • FIG. 3 is a perspective view of a housing of the ultrasonic transducer, to which an ultrasonic transducer is joined; It is a schematic diagram which shows operation
  • FIG. 11 is a plan view of a diaphragm having an opening having another shape, included in the ultrasonic transducer;
  • FIG. 4 is a plan view showing a region of a diaphragm included in the ultrasonic transducer;
  • FIG. 11 is a plan view of a diaphragm having an opening having another shape, included in the ultrasonic transducer;
  • FIG. 4 is a perspective view of a housing included in the ultrasonic transducer;
  • FIG. FIG. 4 is a plan view of a diaphragm included in the ultrasonic transducer; FIG.
  • FIG. 10 is a plan view of a diaphragm provided with insulating holes having another shape, which is provided in the ultrasonic transducer;
  • FIG. 10 is a plan view of a diaphragm provided with insulating holes having another shape, which is provided in the ultrasonic transducer;
  • FIG. 10 is a plan view of a diaphragm provided with insulating holes having another shape, which is provided in the ultrasonic transducer;
  • FIG. 10 is a plan view of a diaphragm provided with insulating holes having another shape, which is provided in the ultrasonic transducer;
  • FIG. 10 is a plan view of a diaphragm provided with insulating holes having another shape, which is provided in the ultrasonic transducer;
  • FIG. 1 is a cross-sectional view of an ultrasonic transducer 100 according to this embodiment.
  • the ultrasonic transducer 100 includes a housing 101 , a substrate 102 , an ultrasonic transducer 103 , a positive wiring 104 , a negative wiring 105 , a positive external terminal 106 and a negative external terminal 107 .
  • the housing 101 constitutes the diaphragm of the ultrasonic transducer 100 and forms an internal space R together with the substrate 102 .
  • FIG. 2 is a cross-sectional view of the housing 101. As shown in FIG. As shown in the figure, the housing 101 has a diaphragm 121 and side walls 122 .
  • the diaphragm 121 has a flat plate shape, and has a first main surface 121a and a second main surface 121b as shown in FIG.
  • the first main surface 121a and the second main surface 121b are opposite main surfaces of the diaphragm 121 to each other.
  • FIG. 3 and 4 are perspective views of the housing 101.
  • FIG. 3 is a perspective view of the housing 101 viewed from the first main surface 121a side
  • FIG. 4 is a perspective view of the housing 101 viewed from the first main surface 121a side.
  • FIG. 2 is a cross-sectional view taken along line AA in FIGS. 3 and 4.
  • FIG. 5 is a plan view of the diaphragm 121, and is a view of the diaphragm 121 viewed from the second main surface 121b side.
  • FIG. 6 is a schematic diagram showing regions of the diaphragm 121, and is a view of the diaphragm 121 as viewed from the second main surface 121b side.
  • the diaphragm 121 has an inner peripheral area 131, an outer peripheral area 132 and an intermediate area 133.
  • the inner peripheral region 131 is a region located in the central portion of the diaphragm 121 and has a rectangular shape.
  • the outer peripheral region 132 is located on the outer peripheral portion of the diaphragm 121 and surrounds the inner peripheral region 131 .
  • the intermediate area 133 is an area located between the inner peripheral area 131 and the outer peripheral area 132 .
  • the first main surface 121a also has an inner peripheral region 131, an outer peripheral region 132 and an intermediate region 133, like the second main surface 121b.
  • the intermediate region 133 is provided with openings 134 and beams 135 .
  • the openings 134 are holes penetrating through the diaphragm 121 as shown in FIG. 2, and a plurality of openings 134 are provided.
  • the beams 135 are portions of the intermediate region 133 where the openings 134 are not provided and are positioned between the openings 134 .
  • inner peripheral region 131 and outer peripheral region 132 are separated by opening 134 and connected to each other by beam 135 .
  • the side wall portion 122 is a wall-shaped portion extending from the periphery of the diaphragm 121 in a direction perpendicular to the first main surface 121a.
  • the side wall portion 122 is provided along the entire circumference of the diaphragm 121 as shown in FIG. 3, and closes the space between the diaphragm 121 and the substrate 102 as shown in FIG.
  • the material of the housing 101 is not particularly limited, it is made of a material generally used as a diaphragm, such as aluminum, alloy, or copper.
  • the substrate 102 is joined to the housing 101 and forms an internal section together with the housing 101 .
  • the substrate 102 is bonded to the end of the side wall portion 122 to form an internal space R surrounded by the diaphragm 121, the side wall portion 122 and the substrate 102.
  • the substrate 102 has a first major surface 102a and a second major surface 102b.
  • the first main surface 102a is a main surface facing the first main surface 121a (see FIG. 2) of the diaphragm 121
  • the second main surface 102b is a main surface opposite to the first main surface 102a.
  • the substrate 102 includes a positive internal wiring 141 and a negative internal wiring 142 as shown in FIG.
  • the positive electrode internal wiring 141 electrically connects the positive electrode wiring 104 connected to the first main surface 102a and the positive electrode external terminal 106 provided on the second main surface 102b.
  • the negative internal wiring 142 electrically connects the negative wiring 105 connected to the first main surface 102a and the negative external terminal 107 provided on the second main surface 102b.
  • the positive electrode internal wiring 141 and the negative electrode internal wiring 142 are provided via through holes formed in the substrate 102 .
  • FIG. 7 is a cross-sectional view of the ultrasonic transducer 103.
  • the ultrasonic transducer 103 has a single-plate structure and includes a piezoelectric layer 151 , a positive electrode 152 and a negative electrode 153 .
  • the piezoelectric layer 151 is made of a piezoelectric material such as lithium niobate (LiNbO 3 ), lithium tantalate (LiTaO 3 ) or lead zirconate titanate (PbZrO 3 —PbTiO 3 ).
  • the positive electrode 152 and the negative electrode 153 are made of a metal material such as Ni, Cu, or a Ni alloy, and face each other with the piezoelectric layer 151 interposed therebetween.
  • the ultrasonic transducer 103 when a voltage is applied between the positive electrode 152 and the negative electrode 153, an inverse piezoelectric effect occurs in the piezoelectric layer 151, generating ultrasonic vibration.
  • the ultrasonic transducer 103 is bonded to the diaphragm 121 as shown in FIG. Of the surfaces of the ultrasonic transducer 103, the surface on the negative electrode 153 side is the surface to be bonded to the diaphragm 121, and hereinafter this surface is referred to as the bonding surface 103a. This bonding electrically connects the negative electrode 153 to the diaphragm 121 .
  • FIG. 8 is a perspective view showing the ultrasonic transducer 103 bonded to the diaphragm 121. As shown in FIG. As shown in the figure, the ultrasonic transducer 103 is joined to the inner peripheral region 131 of the first main surface 121a. As shown in FIG. 8, the ultrasonic transducer 103 can have a square shape when viewed from the bonding surface 103a, but it may have a circular shape or other shape.
  • the positive electrode wiring 104 (see FIG. 1) is connected to the positive electrode 152 and the positive internal wiring 141 to electrically connect them.
  • the negative wiring 105 (see FIG. 1) is connected to the diaphragm 121 and the negative internal wiring 142 and electrically connects the negative electrode 153 and the negative internal wiring 142 via the diaphragm 121 .
  • a positive electrode external terminal 106 is a positive electrode terminal of the ultrasonic transducer 103 and is provided on the second main surface 102 b of the substrate 102 .
  • the positive electrode external terminal 106 is electrically connected to the positive electrode 152 via the positive electrode internal wiring 141 and the positive electrode wiring 104 .
  • the negative external terminal 107 is a negative terminal for the ultrasonic transducer 103 and is provided on the second main surface 102 b of the substrate 102 .
  • the negative external terminal 107 is electrically connected to the negative electrode 153 via the negative internal wiring 142 , the negative wiring 105 and the diaphragm 121 .
  • the ultrasonic transducer 100 can be surface-mounted on a substrate to be mounted by connecting the positive external terminal 106 and the negative external terminal 107 to terminals provided on the surface of the substrate to be mounted (not shown).
  • the ultrasonic transducer 100 has the configuration as described above. As described above, the housing 101 and the substrate 102 form the internal space R (see FIG. 1), and the ultrasonic transducer 103 is accommodated in this internal space R. As shown in FIG. The internal space R communicates with the external space S through an opening 134 provided in the diaphragm 121 .
  • the positive electrode 152 may be electrically connected to the diaphragm 121 .
  • the positive electrode wiring 104 is connected to the positive electrode internal wiring 141 through the diaphragm 121, and the negative electrode wiring 105 and the negative electrode 153 and the negative electrode internal wiring 142 are directly connected.
  • FIG. 9 is a schematic diagram showing the propagation of ultrasonic waves within the internal space R. As shown in FIG. As indicated by arrows in the figure, the generated ultrasonic waves propagate in the internal space R, pass through the opening 134 from the internal space R, and are emitted to the external space S.
  • FIG. 9 is a schematic diagram showing the propagation of ultrasonic waves within the internal space R. As shown in FIG. As indicated by arrows in the figure, the generated ultrasonic waves propagate in the internal space R, pass through the opening 134 from the internal space R, and are emitted to the external space S.
  • the ultrasonic transducer 100 can improve the sound pressure. Further, the resonance frequency of diaphragm 121 can be controlled to a desired frequency by the position and size of opening 134 . Furthermore, since the rigidity of the housing 101 is reduced by the opening 134 , the problem that the resonance frequency becomes too high due to high rigidity can be avoided, and a desired resonance frequency can be achieved with the small housing 101 .
  • the ultrasonic transducer 100 does not have an ultrasonic resonator such as a horn, and has a structure suitable for low profile. Therefore, the ultrasonic transducer 100 can achieve good sound pressure characteristics and stable frequency characteristics, and has a structure suitable for miniaturization and low profile.
  • the configuration in which the ultrasonic transducer 103 is directly bonded to the housing 101 reduces the number of parts and the number of assembling man-hours, making it possible to realize the ultrasonic transducer 100 at low cost.
  • the ultrasonic transducer 100 is surface-mounted on the substrate to be mounted by means of the positive external terminal 106 and the negative external terminal 107 provided on the second main surface 102b of the substrate 102 .
  • the second main surface 102b is most affected by heat treatment such as reflow and soldering to the positive electrode external terminal 106 and the negative electrode external terminal 107, but the ultrasonic transducer 103 is separated from the second main surface 102b by the internal space R. Therefore, it is possible to reduce the influence of the heat treatment.
  • FIG. 10 is a view of diaphragm 121 having opening 134 having another shape, viewed from the second main surface 121b side.
  • FIG. 11 is a schematic diagram showing regions in this diaphragm 121. As shown in FIG. As shown in FIG. 11, diaphragm 121 may have a rectangular inner peripheral region 131, and as shown in FIG. 10, opening 134 may have a more simplified linear shape. With this configuration, the simplification makes it possible to reduce costs in terms of processing. In addition, since the rigidity of diaphragm 121 is further reduced, the resonance frequency of diaphragm 121 can be adjusted to a lower range.
  • FIG. 12 is a view of the diaphragm 121 having an opening 134 having another shape as viewed from the second main surface 121b side.
  • FIG. 13 is a schematic diagram showing regions in this diaphragm 121. As shown in FIG. As shown in FIG. 13, diaphragm 121 may have a circular inner peripheral region 131, and as shown in FIG. 12, opening 134 may have an annular shape. With this configuration, it is possible to reduce the sound pressure at the specific frequency and further improve the peak split at the resonance frequency.
  • FIG. 14 is a cross-sectional view of the ultrasonic transducer 200 according to this embodiment.
  • the ultrasonic transducer 200 includes a housing 201 , a substrate 202 , an ultrasonic transducer 203 , a positive wiring 204 , a negative wiring 205 , a positive external terminal 206 and a negative external terminal 207 .
  • the housing 201 constitutes the diaphragm of the ultrasonic transducer 200 and forms an internal space R together with the substrate 202 .
  • FIG. 15 is a cross-sectional view of housing 201. As shown in FIG. As shown in the figure, the housing 201 has a diaphragm 221 and side walls 222 .
  • the diaphragm 221 has a flat plate shape and has a first main surface 221a and a second main surface 221b as shown in FIG. The first main surface 221a and the second main surface 221b are opposite main surfaces of the diaphragm 221 to each other.
  • FIG. 16 and 17 are perspective views of the housing 201.
  • FIG. 16 is a perspective view of the housing 201 viewed from the first main surface 221a side
  • FIG. 17 is a perspective view of the housing 201 viewed from the second main surface 221a side.
  • FIG. 15 is a sectional view taken along line BB in FIGS. 16 and 17.
  • FIG. 18 is a plan view of the diaphragm 221, and is a view of the diaphragm 221 viewed from the second main surface 221b side.
  • FIG. 19 is a schematic diagram showing regions in the diaphragm 221, and is a view of the diaphragm 221 as viewed from the second main surface 221b side.
  • the diaphragm 221 has an inner peripheral region 231, an outer peripheral region 232 and an intermediate region 233.
  • the inner peripheral region 231 is a region located in the central portion of the diaphragm 221 and has a rectangular shape.
  • the outer peripheral region 232 is located on the outer peripheral portion of the diaphragm 221 and surrounds the inner peripheral region 231 .
  • the intermediate area 233 is an area located between the inner peripheral area 231 and the outer peripheral area 232 .
  • the first main surface 221a also has an inner peripheral region 231, an outer peripheral region 232 and an intermediate region 233, like the second main surface 221b.
  • the intermediate region 233 is provided with openings 234 and beams 235 .
  • the openings 234 are holes passing through the diaphragm 221 as shown in FIG. 15, and a plurality of openings 234 are provided.
  • the beams 235 are portions of the intermediate region 233 where the openings 234 are not provided and are positioned between the openings 234 .
  • inner peripheral region 231 and outer peripheral region 232 are separated by opening 234 and connected to each other by beam 235 .
  • the inner peripheral region 231 is provided with insulating holes 236 .
  • the insulating holes 236 are holes penetrating the diaphragm 221 as shown in FIG. 15, and two are provided.
  • the insulating hole 236 is a hole for insulating the ultrasonic transducer 203 from the diaphragm 221 as will be described later.
  • the side wall portion 222 is a wall-like portion extending from the periphery of the diaphragm 221 in a direction perpendicular to the first main surface 221a.
  • the side wall portion 222 is provided over the entire circumference of the diaphragm 221 as shown in FIG. 16 and closes the space between the diaphragm 221 and the substrate 202 as shown in FIG.
  • the material of the housing 201 is not particularly limited, it is made of a material generally used as a diaphragm, such as aluminum, alloy, or copper.
  • the substrate 202 is joined to the housing 201 and forms an internal section together with the housing 201 . As shown in FIG. 14, the substrate 202 is bonded to the end of the side wall portion 222 to form an internal space R surrounded by the diaphragm 221, the side wall portion 222 and the substrate 202. As shown in FIG.
  • the substrate 202 has a first major surface 202a and a second major surface 202b.
  • the first principal surface 202a is the principal surface facing the first principal surface 221a (see FIG. 15) of the diaphragm 221
  • the second principal surface 202b is the principal surface opposite to the first principal surface 202a.
  • the substrate 202 includes a positive internal wiring 241 and a negative internal wiring 242 as shown in FIG.
  • the positive electrode internal wiring 241 electrically connects the positive electrode wiring 204 connected to the first main surface 202a and the positive electrode external terminal 206 provided on the second main surface 202b.
  • the negative internal wiring 242 electrically connects the negative wiring 205 connected to the first main surface 202a and the negative external terminal 207 provided on the second main surface 202b.
  • the positive electrode internal wiring 241 and the negative electrode internal wiring 242 are provided via through holes formed in the substrate 202 .
  • the ultrasonic vibrator 203 generates ultrasonic vibrations to vibrate the diaphragm 121 .
  • FIG. 20 is a cross-sectional view of the ultrasonic transducer 203.
  • the ultrasonic transducer 203 has a laminated structure and includes a piezoelectric layer 251 , a positive internal electrode 252 , a negative internal electrode 253 , a positive external electrode 254 and a negative external electrode 255 .
  • the piezoelectric layer 251 is made of a piezoelectric material such as lithium niobate (LiNbO 3 ), lithium tantalate (LiTaO 3 ) or lead zirconate titanate (PbZrO 3 —PbTiO 3 ).
  • the piezoelectric layer 251 has a first major surface 251a and a second major surface 251b opposite to the first major surface 251a.
  • One of the side surfaces of the piezoelectric layer 251 is referred to as a first side surface 251c, and the opposite side surface of the first side surface 251c is referred to as a second side surface 251d.
  • the positive electrode internal electrode 252 and the negative electrode internal electrode 253 are made of a metal material such as Ni, Cu, or a Ni alloy, and are alternately arranged with the piezoelectric layer 151 interposed therebetween.
  • the positive electrode internal electrode 252 is formed so that the end face is exposed on the first side surface 251c of the piezoelectric layer 251 and separated from the second side surface 251d.
  • the negative electrode internal electrode 253 is formed so that the end face is exposed on the second side surface 251d of the piezoelectric layer 251 and separated from the first side surface 251c.
  • the positive electrode external electrode 254 is provided on the first side surface 251 c and near the first side surface 251 c on the first main surface 251 a and the second main surface 251 b and is electrically connected to the positive internal electrode 252 .
  • the negative external electrode 255 is provided on the second side surface 251d and near the second side surface 251d on the first main surface 251a and the second main surface 251b, and is electrically connected to the negative internal electrode 253.
  • FIG. 21 is a perspective view showing the ultrasonic transducer 103 bonded to the diaphragm 121.
  • FIG. 21 As shown in the figure, the ultrasonic transducer 103 is joined to the inner peripheral region 131 of the first main surface 121a.
  • a positive electrode external electrode 254 and a negative electrode external electrode 255 are exposed on the joint surface 203a. It is located inside the insulating hole 236 and separated from the diaphragm 221 . That is, the positive external electrode 254 and the negative external electrode 255 are insulated from the diaphragm 221 by the insulating hole 236 . As shown in FIG. 21, the ultrasonic transducer 203 can have a square shape when viewed from the bonding surface 203a, but it may have a circular shape or other shape.
  • the positive wiring 204 (see FIG. 14) is connected to the positive external electrode 254 and the positive internal wiring 241 to electrically connect them.
  • the negative wiring 205 (see FIG. 14) is connected to the positive external electrode 254 and the negative internal wiring 242 to electrically connect them.
  • a positive electrode external terminal 206 is a positive electrode terminal of the ultrasonic transducer 203 and is provided on the second main surface 202 b of the substrate 202 .
  • the positive external terminal 206 is electrically connected to the positive external electrode 254 via the internal positive wiring 241 and the positive wiring 204 .
  • the negative external terminal 207 is a negative terminal for the ultrasonic transducer 203 and is provided on the second main surface 202 b of the substrate 202 .
  • the negative external terminal 207 is electrically connected to the negative external electrode 255 via the internal negative wiring 242 and the negative wiring 205 .
  • the ultrasonic transducer 200 can be surface-mounted on a mounting target board by joining the positive external terminal 206 and the negative external terminal 207 to terminals provided on the surface of the mounting target board (not shown).
  • the ultrasonic transducer 200 has the configuration as described above. As described above, the housing 201 and the substrate 202 form the internal space R (see FIG. 14), and the ultrasonic transducer 203 is accommodated in this internal space R. As shown in FIG. The internal space R communicates with the external space S through an opening 234 provided in the diaphragm 221 .
  • FIG. 22 is a schematic diagram showing the propagation of ultrasonic waves within the internal space R. As shown in FIG. As indicated by arrows in the figure, the generated ultrasonic waves propagate in the internal space R, pass through the opening 234 from the internal space R, and are emitted to the external space S.
  • FIG. 22 is a schematic diagram showing the propagation of ultrasonic waves within the internal space R. As shown in FIG. As indicated by arrows in the figure, the generated ultrasonic waves propagate in the internal space R, pass through the opening 234 from the internal space R, and are emitted to the external space S.
  • the ultrasonic transducer 200 can improve the sound pressure. Further, the resonance frequency of diaphragm 221 can be controlled to a desired frequency by the position and size of opening 234 . Furthermore, since the rigidity of the housing 201 is reduced by the opening 234 , the problem of the resonance frequency becoming too high due to high rigidity can be avoided, and a desired resonance frequency can be achieved with the small housing 101 .
  • the ultrasonic transducer 200 does not have an ultrasonic resonator such as a horn, and has a structure suitable for low profile. Therefore, the ultrasonic transducer 200 can achieve good sound pressure characteristics and stable frequency characteristics, and has a structure suitable for miniaturization and low profile.
  • the configuration in which the ultrasonic transducer 203 is directly bonded to the housing 201 reduces the number of parts and assembly man-hours, and the ultrasonic transducer 200 can be realized at low cost.
  • the ultrasonic transducer 200 is surface-mounted on the substrate to be mounted by means of the positive external terminal 206 and the negative external terminal 207 provided on the second main surface 202b of the substrate 202 .
  • the second main surface 202b is most affected by heat treatment such as reflow and soldering to the positive electrode external terminal 206 and the negative electrode external terminal 207, but the ultrasonic vibrator 203 is separated from the second main surface 202b by the internal space R. Therefore, it is possible to reduce the influence of the heat treatment.
  • the ultrasonic transducer 203 has a laminated structure (see FIG. 20), and a simple structure like a capacitor can be used without using a technique that is difficult to form, such as through holes, when forming the laminated structure. can.
  • the positive electrode external electrode 254 and the negative electrode external electrode 255 are insulated by the insulating hole 236 to prevent a short circuit caused by the diaphragm 221 .
  • the sound pressure can be further improved by making the ultrasonic transducer 203 have a laminated structure.
  • the shape of the opening 234 is not limited to the one described above, and may have a simplified linear shape (see FIG. 10) or an annular shape (see FIG. 12) as in the first embodiment. can.
  • the shape of the insulating hole 236 is also not limited to the above.
  • 23 to 25 are diagrams of the diaphragm 221 having insulating holes 236 having other shapes as viewed from the second main surface 221b side.
  • the ultrasonic transducer 203 has the positive external electrode 254 and the negative external electrode 255 as described above, these external electrodes may be provided only at the corners of the ultrasonic transducer 203 .
  • the insulating holes 236 may be provided at positions facing the corners of the ultrasonic transducer 203 .
  • the materials for the positive external electrode 254 and the negative external electrode 255 can be reduced. 23 to 25, the central symmetry of the housing 201 is improved, the influence of splitting near the resonance frequency is avoided, and the sound pressure loss at the resonance frequency is suppressed. can do.
  • a non-contact tactile sense presentation device can be configured with the ultrasonic transducers according to the first and second embodiments of the present invention. Specifically, by arranging multiple ultrasonic transducers in a plane and controlling the phase of each ultrasonic transducer so that the ultrasonic waves strengthen each other at the position in the space where you want to present the tactile sensation, the tactile sensation is presented at that position. can do.

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  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Transducers For Ultrasonic Waves (AREA)

Abstract

La présente invention vise à proposer : un transducteur ultrasonore ayant une pression sonore satisfaisante et des caractéristiques de fréquence stables et comportant une structure appropriée pour une réduction de taille et de profil ; et un dispositif de présentation de sensation tactile sans contact. Par conséquent, un transducteur ultrasonore d'après la présente invention comprend un boîtier et un vibreur ultrasonore. Le boîtier comprend une plaque de vibration comportant une première surface principale et une seconde surface principale d'un type opposé à la première surface principale. Ladite plaque de vibration comporte une région périphérique interne, une région périphérique externe entourant la région périphérique interne, ainsi qu'une région intermédiaire positionnée entre la région périphérique interne et la région périphérique externe. La région intermédiaire comporte une pluralité d'ouvertures qui pénètrent dans la plaque de vibration, ainsi qu'une partie formant patte qui est positionnée entre la pluralité d'ouvertures et qui relie la région périphérique interne à la région périphérique externe. Un espace interne qui communique avec un espace externe par l'intermédiaire de la pluralité d'ouvertures est formé sur le côté de la première surface principale de la plaque de vibration. Le vibreur ultrasonore est assemblé à la région périphérique interne de la première surface principale et logé dans l'espace interne.
PCT/JP2022/022352 2021-06-09 2022-06-01 Transducteur ultrasonore et dispositif de présentation de sensation tactile sans contact WO2022259941A1 (fr)

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JP2021-096453 2021-06-09
JP2021096453A JP2022188431A (ja) 2021-06-09 2021-06-09 超音波トランスデューサ及び非接触触覚提示デバイス

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WO2008143463A2 (fr) * 2007-05-21 2008-11-27 Em-Tech. Co., Ltd. Appareil de conversion du son
JP2009148880A (ja) * 2007-12-14 2009-07-09 Ind Technol Res Inst センシング膜及びそれを用いるマイクロエレクトロメカニカルシステムデバイス

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JP2009148880A (ja) * 2007-12-14 2009-07-09 Ind Technol Res Inst センシング膜及びそれを用いるマイクロエレクトロメカニカルシステムデバイス

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