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WO2022255165A1 - Laminated film - Google Patents

Laminated film Download PDF

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Publication number
WO2022255165A1
WO2022255165A1 PCT/JP2022/021273 JP2022021273W WO2022255165A1 WO 2022255165 A1 WO2022255165 A1 WO 2022255165A1 JP 2022021273 W JP2022021273 W JP 2022021273W WO 2022255165 A1 WO2022255165 A1 WO 2022255165A1
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WO
WIPO (PCT)
Prior art keywords
adhesive layer
pressure
sensitive adhesive
separator
examples
Prior art date
Application number
PCT/JP2022/021273
Other languages
French (fr)
Japanese (ja)
Inventor
元気 越智
奈津子 沖田
弘司 野呂
Original Assignee
日東電工株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日東電工株式会社 filed Critical 日東電工株式会社
Priority to KR1020237043634A priority Critical patent/KR20240017845A/en
Priority to CN202280038843.3A priority patent/CN117396572A/en
Publication of WO2022255165A1 publication Critical patent/WO2022255165A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04Interconnection of layers
    • B32B7/06Interconnection of layers permitting easy separation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04Interconnection of layers
    • B32B7/12Interconnection of layers using interposed adhesives or interposed materials with bonding properties
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J133/00Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
    • C09J133/04Homopolymers or copolymers of esters
    • C09J133/14Homopolymers or copolymers of esters of esters containing halogen, nitrogen, sulfur or oxygen atoms in addition to the carboxy oxygen
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J183/00Adhesives based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Adhesives based on derivatives of such polymers
    • C09J183/04Polysiloxanes
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00Adhesives in the form of films or foils
    • C09J7/30Adhesives in the form of films or foils characterised by the adhesive composition
    • C09J7/38Pressure-sensitive adhesives [PSA]
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00Adhesives in the form of films or foils
    • C09J7/40Adhesives in the form of films or foils characterised by release liners
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J9/00Adhesives characterised by their physical nature or the effects produced, e.g. glue sticks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/52Mounting semiconductor bodies in containers
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2203/00Applications of adhesives in processes or use of adhesives in the form of films or foils
    • C09J2203/326Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors

Definitions

  • the present invention relates to laminated films.
  • a semiconductor wafer is singulated by dicing in a state of being temporarily fixed on a dicing tape, and the singulated semiconductor chips are pushed by a pin member from the dicing tape side of the back surface of the wafer to form a collet. It is picked up by a suction jig called and mounted on a mounting board such as a circuit board (for example, Patent Document 1).
  • the present invention has been made in view of the above-mentioned problems, and its object is to prevent mistakes from occurring in the peeling process of the separator when temporarily fixing the semiconductor chip or the like to the carrier substrate to receive the semiconductor chip or the like on the mounting substrate.
  • the present inventors have made intensive studies to achieve the above object, and found that a surface protective film (first separator), a first adhesive layer for temporarily fixing fine electronic components such as semiconductor chips, and a substrate and a second adhesive layer for temporarily fixing to the carrier substrate, and a surface protection film (second separator), the peeling force F (1) of the first separator with respect to the first adhesive layer, the second The peeling force F (2) of the second separator to the adhesive layer, the adhesive force P (2) of the second adhesive layer to the glass plate, and the glass after 5 minutes at 160 ° C.
  • first separator a surface protective film
  • first adhesive layer for temporarily fixing fine electronic components such as semiconductor chips
  • second adhesive layer for temporarily fixing to the carrier substrate
  • second separator a surface protection film
  • the present invention is a laminated film in which a first separator, a first pressure-sensitive adhesive layer, a substrate, a second pressure-sensitive adhesive layer, and a second separator are laminated in this order, and the first pressure-sensitive adhesive layer consists of a low-adhesive pressure-sensitive adhesive layer, and the second pressure-sensitive adhesive layer consists of a peelable pressure-sensitive adhesive layer.
  • H. and a 180° peeling force F(1) (N/50 mm) of the first separator against the first pressure-sensitive adhesive layer measured under the conditions of a peel speed of 0.3 m/min, 23°C, 50%R. H.
  • the laminated film preferably further satisfies the relationship of the following formula. F(2)/F(1) ⁇ 0.80 P(2)/F(1)>1.00
  • the above laminate film was dried at 23° C. and 50% R.I. H. and the 90° trigger peeling force T(1) (N/50 mm) of the first pressure-sensitive adhesive layer against the first separator measured under the conditions of a tensile speed of 0.3 m/min, 23°C, 50%R. H. And the 90-degree trigger peel force T (2) (N/50 mm) of the second adhesive layer against the second separator measured under the conditions of a tensile speed of 0.3 m / min, and the adhesive force P (2) , preferably satisfies the following formula. T(1)/T(2)>1.05 P(2)/T(1) ⁇ 1.00
  • the laminated film of the present invention does not cause an error in the peeling process of the separator when the semiconductor chip or the like is received by temporarily fixing it to the carrier substrate, does not peel off from the carrier substrate when the semiconductor chip or the like is transferred to the mounting substrate, and When a semiconductor chip or the like is transferred to a mounting substrate and then peeled off from the carrier substrate, it can be peeled off without contamination such as adhesive residue and is excellent in reworkability, so that work efficiency can be improved in the manufacturing process of the semiconductor device.
  • the laminated film of the present invention has a laminated structure in which a first separator, a first pressure-sensitive adhesive layer, a substrate, a second pressure-sensitive adhesive layer, and a second separator are laminated in this order. That is, the laminated film of the present invention is the adhesive surface of the double-sided adhesive film for transfer consisting of the first adhesive layer, the base material and the second adhesive layer (the adhesive surface of the first adhesive layer and the second adhesive layer). surface) has a laminated structure protected by the first separator and the second separator.
  • the first pressure-sensitive adhesive layer consists of a low-adhesive pressure-sensitive adhesive layer
  • the second pressure-sensitive adhesive layer consists of a peelable pressure-sensitive adhesive layer.
  • FIG. 4 is a schematic cross-sectional view showing the process from temporarily fixing the laminated film of the present invention to the carrier substrate to peeling it off.
  • the second separator 120 is peeled off from the adhesive layer 12 of the laminated film 1 adsorbed on the adsorption stage (not shown). At this time, no lifting occurs at the interface between the first separator 110 and the first pressure-sensitive adhesive layer 11 . After that, the adhesive surface of the second adhesive layer 12 is attached to the carrier substrate 22 (not shown).
  • the first separator 110 is peeled off from the adhesive layer 11. At this time, no lifting occurs at the interface of the second adhesive layer 22 .
  • a step of receiving the diced electronic component 21 of FIG. A step of transferring the electronic component 21 received by the first adhesive layer 11 of FIG. 3 to the mounting board 30 is performed.
  • the second adhesive layer 12 is peeled off from the carrier substrate 22 (not shown). Since the second pressure-sensitive adhesive layer 12 exhibits excellent reworkability in that it can be peeled off without contamination such as adhesive residue, the carrier substrate 22 can be easily reused.
  • F (2) / F (1) ratio of F (2) to F (1) is 1.00 or less (F (2) / F (1) ⁇ 1.00), preferably 0.90 or less (F(2)/F(1) ⁇ 0.90), more preferably less than 0.80 (F(2)/F(1) ⁇ 0.80), more preferably less than 0.50 (F(2)/F(1) ⁇ 0.50).
  • F(2)/F(1) is not particularly limited, but is preferably 0.10 or more (F(2)/F(1) ⁇ 0.10), for example.
  • F (1) is less than 0.50 N/50 mm (F (1) ⁇ 0.50 ), more preferably 0.40 N/50 mm or less (F(1) ⁇ 0.40), and still more preferably 0.35 N/50 mm or less (F(1) ⁇ 0.35).
  • it is preferably 0.04 N/50 mm or more (F(1) ⁇ 0.04), more preferably 0.05 N/50 mm or more (F(1) ⁇ 0.04).
  • 0.05 , more preferably 0.06 N/50 mm or more (F(1) ⁇ 0.06).
  • F(2) is preferably less than 0.20 N/50 mm (F(2) ⁇ 0.20) from the viewpoint of workability when peeling the second separator and balance with the first separator peeling force F(1). It is more preferably 0.15 N/50 mm or less (F(2) ⁇ 0.15 N), still more preferably 0.10 N/50 mm or less (F(2) ⁇ 0.10). In addition, from the viewpoint of separator floating during transfer sheet processing and transportation, it is preferably 0.01/50 mm or more (F(1) ⁇ 0.01), more preferably 0.02 N/50 mm or more (F(2) ⁇ 0.02), more preferably 0.04/50 mm or more (F(2) ⁇ 0.04).
  • P (2) / F (1) (ratio of P (2) to F (1)) is 1.00 or more (P (2) / F (1) ⁇ 1.00), preferably It is more than 1.00 (P(2)/F(1)>1.00), more preferably 1.20 or more (P(2)/F(1) ⁇ 1.20).
  • P(2)/F(1) is not particularly limited, but is preferably 4.50 or less (P(2)/F(1) ⁇ 4.50), for example.
  • P(2) is preferably less than 1.10 N/50 mm (P(2) ⁇ 1.10), more preferably less than 1.10 N/50 mm from the viewpoint of improving reworkability that can be peeled off from the carrier substrate without contamination such as adhesive residue. 1.00 N/50 mm or less (P(2) ⁇ 1.00), more preferably 0.90 N/50 mm or less (P(2) ⁇ 0.90). From the viewpoint of the adhesiveness of the carrier substrate to the second pressure-sensitive adhesive layer, it is preferably 0.10/50 mm or more (P(2) ⁇ 0.10), more preferably 0.20 N/50 mm or more (P(2) ⁇ 0.20), more preferably 0.30/50 mm or more (P(2) ⁇ 0.30).
  • P'(2)/P(2) (the ratio of P'(2) to P(2)) is the heat generated when the electronic component is transferred to the mounting substrate and mounted. From the viewpoint that the adhesive strength of the second pressure-sensitive adhesive layer to the carrier substrate does not increase even by press-fitting and that the second pressure-sensitive adhesive layer can be peeled off well and is excellent in reworkability, it is less than 1.20 (P'(2)/P(2) ⁇ 1.20). 20), preferably 1.0 or less (P'(2)/P(2) ⁇ 1.0), more preferably 0.8 or less (P'(2)/P(2) ⁇ 0.8 ).
  • P'(2)/P(2) is not particularly limited, for example, it is preferably 0.01 or more (P'(2)/P(2) ⁇ 0.01), more preferably 0.03 or more (P'(2)/P(2) ⁇ 0.03).
  • P'(2) is less than 1.00 N/50 mm (P '(2) ⁇ 1.00), preferably 0.6 N/50 mm or less (P'(2) ⁇ 0.6), more preferably 0.4 N/50 mm or less (P'(2) ⁇ 0.6). 4).
  • P′(2) is not particularly limited, for example, it is preferably 0.01/50 mm or more (P′(2) ⁇ 0.01), more preferably 0.02 N/50 mm or more (P′(2 ) ⁇ 0.02).
  • the double-sided adhesive film for transfer is difficult to peel off from the carrier substrate when transferring the semiconductor chip or the like to the mounting substrate, and the semiconductor chip or the like is mounted. After being transferred to the substrate, the double-sided adhesive film for transfer can be easily peeled off from the carrier substrate, and the adhesive residue is less likely to occur.
  • the temperature is 23° C., 50% R.I. H. and the 90° trigger peeling force T(1) (N/50 mm) of the first pressure-sensitive adhesive layer against the first separator measured under the conditions of a tensile speed of 0.3 m/min, 23°C, 50%R. H.
  • the 90-degree trigger peel force T (2) (N/50 mm) of the second adhesive layer against the second separator measured under the conditions of a tensile speed of 0.3 m / min, and the adhesive force P (2) preferably satisfies the following formula. T(1)/T(2)>1.05 P(2)/T(1) ⁇ 1.90
  • the trigger peel force T(1) means the maximum value (maximum stress) of the peel force recorded at the initial stage of peeling when the first separator is peeled from the first adhesive layer
  • the trigger peel force T(2) means the maximum peel force (maximum stress) recorded at the initial stage of peeling when the second separator is peeled from the second pressure-sensitive adhesive layer.
  • T(1)/T(2) ratio of T(1) to T(2) is the first From the viewpoint of making the separation of the first separator from the pressure-sensitive adhesive layer more difficult, it is preferably greater than 1.05 (T (1) / T (2) > 1.05), more preferably 1.10 or more. (T(1)/T(2) ⁇ 1.10), more preferably 1.15 or more (T(1)/T(2) ⁇ 1.15).
  • T(1)/T(2) is not particularly limited, it is preferably 3.50 or less (T(1)/T(2) ⁇ 3.50), for example.
  • P (2) / T (1) (ratio of P (2) to T (1)) is relative to the carrier substrate when peeling off the first separator from the first adhesive layer From the viewpoint of making it difficult for the second pressure-sensitive adhesive layer to peel off, it is preferably less than 1.90 (P (2) / T (1) ⁇ 1.90), more preferably 1.50 or less (P ( 2)/T(1) ⁇ 1.50), more preferably less than 1.00 (P(2)/T(1) ⁇ 1.00), particularly preferably 0.90 or less (P(2)/T (1) ⁇ 0.90). Also, P(2)/T(1) is not particularly limited, but is preferably 0.20 or more (P(2)/T(1) ⁇ 0.20), more preferably 0.20. 40 or more (P(2)/T(1) ⁇ 0.40).
  • T(1) is preferably 0.10 N/50 mm or more (T(1) ⁇ 0.10), more preferably 0.15 N/50 mm or more (T(1) ⁇ 0.15), still more preferably 0.15 N/50 mm or more (T(1) ⁇ 0.15). 20 N/50 mm or more (T(1) ⁇ 0.20).
  • T(1) is not particularly limited, for example, it is preferably 1.00/50 mm or less (T(1) ⁇ 0.1.00), more preferably 0.85/50 mm or less (T(1) ⁇ 0.85), more preferably 0.70/50 mm or less (PT(1) ⁇ 0.70).
  • T(2) is preferably 0.50 N/50 mm or less (T(2) ⁇ 0.50), more preferably 0.45 N/50 mm or less (T(2) ⁇ 0.45), still more preferably 0.45 N/50 mm or less (T(2) ⁇ 0.45). It is 40 N/50 mm or less (T(2) ⁇ 0.40).
  • T(1) is not particularly limited, for example, it is preferably 0.10/50 mm or more (T(2) ⁇ 0.10), more preferably 0.15 N/50 mm or more (T(2) ⁇ 0 .15).
  • the overall configuration of the peel strength and adhesive strength is such that the above relationships are satisfied for F(1), F(2), P(2), P'(2), T(1) and T(2). can improve work efficiency in the manufacturing process of the semiconductor device.
  • the above F(1), F(2), P(2), P'(2), T(1) and T(2) constitute the first pressure-sensitive adhesive layer and the second pressure-sensitive adhesive layer. Adjustment of adhesive strength by agent type and composition, degree of cross-linking, etc., formation of WBL (Weak Boundary Layer) by blending light release agents and plasticizers, thickness of the first and second separators, constituent materials and release It can be adjusted by treatment or the like.
  • WBL Wood Boundary Layer
  • the first pressure-sensitive adhesive layer is a pressure-sensitive adhesive layer for receiving and holding electronic components, and is composed of a low-adhesive pressure-sensitive adhesive layer.
  • the configuration in which the first pressure-sensitive adhesive layer is composed of a low-adhesive pressure-sensitive adhesive layer is preferable in that it can reduce the force applied to the electronic component when receiving, and can suppress damage to the electronic component.
  • the electronic component is received by the first pressure-sensitive adhesive layer in a non-contact manner, for example, the electronic component is separated from the dicing tape by pressing with a pin member or the like, and dropped onto the first pressure-sensitive adhesive layer.
  • the first pressure-sensitive adhesive layer when the first pressure-sensitive adhesive layer receives the dropped electronic component, it may bounce and may not be received accurately. When this phenomenon occurs, the positional accuracy of the electronic product may be degraded, resulting in poor contact.
  • the structure in which the first pressure-sensitive adhesive layer consists of a low-adhesive pressure-sensitive adhesive layer makes it easy for the electronic component to be caught by the first pressure-sensitive adhesive layer without bouncing when the first pressure-sensitive adhesive layer receives the electronic component without contact. , can be received with high positional accuracy. Furthermore, it is also preferable in that the electronic component can be easily peeled off from the first adhesive layer when the electronic component received by the transfer double-sided pressure-sensitive adhesive film is mounted on the mounting substrate.
  • the first adhesive layer has a low adhesiveness by adjusting the type and composition of the adhesive that constitutes it, the degree of crosslinking, etc., and by forming a WBL (Weak Boundary Layer) by blending a light release agent and a plasticizer. It can be used as an agent layer.
  • WBL Wood Boundary Layer
  • AFM-DMA AFM: Atomic Force Microscope
  • nDMA nano Dynamic Mechanical Analysis
  • the storage modulus (E'1a) of is preferably 50 MPa or less. This configuration is preferable for reliably adhering the electronic component received by the first pressure-sensitive adhesive layer. If E′1a is too high, the adhesiveness of the electronic component to the first pressure-sensitive adhesive layer is lowered, which may cause problems such as misalignment and falling of the electronic component.
  • E′1a is preferably 40 MPa or less, more preferably 30 MPa or less, from the viewpoint of the adhesiveness of the electronic component to the first pressure-sensitive adhesive layer.
  • E′1a is preferably 0.1 MPa or more from the viewpoint of transferability from the first pressure-sensitive adhesive layer to the circuit board. If E'1a is too low, the adhesiveness of the electronic component to the first pressure-sensitive adhesive layer becomes too high, which may impair transferability when mounted on a mounting board.
  • E′1a is preferably 0.2 MPa or more, more preferably 0.5 MPa or more, from the viewpoint of transferability of the electronic component to the mounting board.
  • the storage elastic modulus (E'1b) of the first adhesive layer at a frequency of 1 kHz and 25°C by AFM-DMA is preferably 100 MPa or less.
  • This configuration is preferable in that when the first pressure-sensitive adhesive layer receives the electronic component in a non-contact manner, the electronic component is not repelled by the surface of the first pressure-sensitive adhesive layer and can be received with high positional accuracy. If the E'1b is too high, when the electronic component is dropped and received without contacting the surface of the first adhesive layer, the electronic component is repelled and shifted from a predetermined position or turned over, resulting in poor positional accuracy. tends to decrease.
  • E′1b is preferably 90 MPa or less, more preferably 80 MPa or less, from the viewpoint of the positional accuracy of the electronic component with respect to the first pressure-sensitive adhesive layer. Further, it may be 70 MPa or less, 60 MPa or less, 50 MPa or less, 40 MPa or less, 30 MPa or less, and particularly 20 MPa or less.
  • E'1b is preferably 0.5 MPa or more from the viewpoint of transferability from the first pressure-sensitive adhesive layer to the mounting substrate. If the E'1b is too low, the adhesiveness of the electronic component to the first adhesive layer increases, and when the electronic component falls, it is embedded in the first adhesive layer and mounted on the mounting substrate. transferability may be impaired.
  • E′1b is preferably 0.7 MPa or more, more preferably 1.0 MPa or more, from the viewpoint of the transferability of the electronic component to the mounting board.
  • the storage elastic modulus (E'1a) of the first pressure-sensitive adhesive layer at a frequency of 1 Hz and 25 ° C. by AFM-DMA of the first pressure-sensitive adhesive layer is measured by AFM-DMA at a frequency of 1 kHz and 25 ° C. is preferably greater than 1.00.
  • This configuration is preferable in that the adhesiveness of the electronic component to the first pressure-sensitive adhesive layer, the positional accuracy, the transferability to the mounting substrate, and the like are well balanced.
  • E'1b/E'1a is preferably 1.05 or more, more preferably 1.10 or more, from the viewpoint of balance of adhesiveness of electronic components, positional accuracy, transferability to a mounting substrate, and the like.
  • the upper limit of E'1b/E'1a is not particularly limited, it is preferably 3.00 or less from the viewpoint of the above balance.
  • the loss elastic modulus (E′′1a) of the first pressure-sensitive adhesive layer at a frequency of 1 Hz and 25° C. by AFM-DMA is preferably 7 MPa or less. It is preferable from the viewpoint of excellent transferability to the substrate. If the E′′1a is too high, the adhesiveness of the electronic component to the first pressure-sensitive adhesive layer becomes too high, impairing the transferability when mounted on the mounting substrate.
  • E′′1a is preferably 5 MPa or less, more preferably 3 MPa or less, from the viewpoint of transferability of electronic components to a mounting substrate. This may cause problems such as misalignment or dropping of electronic components. From the viewpoint of the adhesiveness of the electronic component to the first pressure-sensitive adhesive layer, E′′1a is preferably 0.01 MPa or more, more preferably 0.03 MPa or more.
  • the loss elastic modulus (E′′1a) of can be adjusted by the type and composition of the constituent pressure-sensitive adhesive, the degree of cross-linking, and the like.
  • the first pressure-sensitive adhesive layer preferably has a tack force of 10 to 250 gf/ ⁇ 5 mm SUS for a stainless steel plate (5 mm in diameter).
  • the configuration in which the tack force is 250 gf/ ⁇ 5 mm SUS or less is preferable from the viewpoint of transferability to the mounting board of the electronic component, and 200 gf/ ⁇ 5 mm SUS or less is more preferable.
  • the tack force of the first adhesive layer to a stainless steel plate (5 mm in diameter) can be adjusted by adjusting the type and composition of the constituent adhesive, the degree of cross-linking, and additives such as fatty acid esters and fluorosurfactants.
  • the surface force of the first pressure-sensitive adhesive layer is preferably -500 to -100 ⁇ N.
  • the surface strength of the first pressure-sensitive adhesive layer can be adjusted by the type and composition of the pressure-sensitive adhesive that constitutes it, the degree of cross-linking, and additives such as fatty acid esters and fluorosurfactants.
  • the thickness of the first pressure-sensitive adhesive layer is not particularly limited, but is preferably 1 ⁇ m or more, more preferably 3 ⁇ m or more. When the thickness is equal to or greater than a certain value, the first pressure-sensitive adhesive layer can be easily received by the electronic component with high accuracy, which is preferable.
  • the upper limit of the thickness of the first pressure-sensitive adhesive layer is not particularly limited, it is preferably 100 ⁇ m, more preferably 75 ⁇ m. When the thickness is less than a certain value, the electronic component can be easily transferred to the mounting substrate with high accuracy, which is preferable.
  • the haze (according to JIS K7136) of the first pressure-sensitive adhesive layer is not particularly limited, but is preferably 10% or less, more preferably 5.0% or less. When the haze is 10% or less, excellent transparency can be obtained.
  • a pattern applied on the carrier substrate for example, a marker indicating the transfer position of the electronic component.
  • the haze can be measured by, for example, forming the first pressure-sensitive adhesive layer on the separator and allowing it to stand at normal conditions (23° C., 50% RH) for at least 24 hours. Transmittance 91.8%, haze 0.4%) is used as a sample, and measured using a haze meter (product name “HM-150”, manufactured by Murakami Color Research Laboratory). be able to.
  • the total light transmittance (according to JIS K7361-1) of the first adhesive layer in the visible light wavelength region is not particularly limited, but is preferably 85% or more, more preferably 88% or more. be. When the total light transmittance is 85% or more, excellent transparency can be obtained. It is preferable that the marker shown) can be visually recognized.
  • the above total light transmittance can be measured, for example, by forming a first pressure-sensitive adhesive layer on a separator and allowing it to stand in a normal state (23° C., 50% RH) for at least 24 hours, peeling off the separator, and applying a slide glass (for example, , total light transmittance of 91.8%, haze of 0.4%) is used as a sample, and a haze meter (product name “HM-150”, manufactured by Murakami Color Research Laboratory) is used.
  • HM-150 manufactured by Murakami Color Research Laboratory
  • the adhesive constituting the first adhesive layer is not particularly limited, but for example, silicone-based adhesive, urethane-based adhesive, acrylic-based adhesive, rubber-based adhesive, polyester-based adhesive, and polyamide-based adhesive. , epoxy-based adhesives, vinyl alkyl ether-based adhesives, fluorine-based adhesives, and the like.
  • silicone-based adhesives, urethane-based adhesives, and urethane-based adhesives which can be easily controlled to have low adhesiveness, can receive electronic components with high positional accuracy without damaging them, and from the viewpoint of good transferability to mounting substrates.
  • Acrylic adhesives are preferred, silicone adhesives and urethane adhesives are more preferred, and silicone adhesives are even more preferred.
  • the silicone-based pressure-sensitive adhesive is not particularly limited, and known or commonly used silicone-based pressure-sensitive adhesives can be used. agents and the like can be used.
  • the silicone pressure-sensitive adhesive may be either one-pack type or two-pack type.
  • the silicone pressure-sensitive adhesives can be used alone or in combination of two or more.
  • the addition-type silicone-based pressure-sensitive adhesive is generally prepared by an addition reaction ( A pressure-sensitive adhesive that generates a silicone-based polymer through a hydrosilylation reaction.
  • a peroxide-curable silicone-based pressure-sensitive adhesive is generally a pressure-sensitive adhesive that cures (crosslinks) organopolysiloxane with a peroxide to form a silicone-based polymer.
  • Condensation-type silicone-based pressure-sensitive adhesives are generally pressure-sensitive adhesives that generate a silicone-based polymer through a dehydration or dealcoholization reaction between polyorganosiloxanes having hydrolyzable silyl groups such as silanol groups or alkoxysilyl groups at their terminals. .
  • silicone-based pressure-sensitive adhesive for example, a silicone-based pressure-sensitive adhesive composition containing a silicone rubber and a silicone resin can be used because it is easy to control the adhesiveness to be low.
  • the silicone rubber is not particularly limited as long as it is a silicone-based rubber component, but for example, organopolysiloxane having dimethylsiloxane, methylphenylsiloxane, etc. as main structural units can be used.
  • silicone rubber having alkenyl groups bonded to silicon atoms alkenyl group-containing organopolysiloxane; in the case of addition reaction type), silicone rubber having at least methyl groups (peroxide curing type ), a silicone rubber having a terminal silanol group or a hydrolyzable alkoxysilyl group (in the case of condensation type) can be used.
  • the weight average molecular weight of the organopolysiloxane in the silicone rubber is usually 150,000 or more, preferably 280,000 to 1,000,000, and more preferably 500,000 to 900,000.
  • the silicone resin is not particularly limited as long as it is a silicone-based resin that is used in silicone-based pressure -sensitive adhesives. 2 ”, T units consisting of the structural unit “RSiO 3/2 ”, and D units consisting of the structural unit “R 2 SiO”.
  • Examples include silicone resins made of organopolysiloxane.
  • R in the above structural unit represents a hydrocarbon group or a hydroxyl group.
  • examples of the above hydrocarbon groups include aliphatic hydrocarbon groups (alkyl groups such as methyl and ethyl), alicyclic hydrocarbon groups (cycloalkyl groups such as cyclohexyl), aromatic hydrocarbon groups ( phenyl group, aryl group such as naphthyl group, etc.) and the like.
  • Various functional groups such as a vinyl group may be introduced into the organopolysiloxane in such a silicone resin, if necessary.
  • the functional group to be introduced may be a functional group capable of causing a cross-linking reaction.
  • an MQ resin composed of M units and Q units is preferred.
  • the weight average molecular weight of the organopolysiloxane in the silicone resin is usually 1,000 or more, preferably 1,000 to 20,000, and more preferably 1,500 to 10,000.
  • the mixing ratio of the silicone rubber and the silicone resin is not particularly limited, but from the point of view of easy control of low tackiness, for example, 100 parts by weight of the silicone rubber and 100 to 220 parts by weight of the silicone resin (especially 120 parts by weight of the silicone resin) ⁇ 180 parts by weight).
  • the silicone rubber and the silicone resin may be in a mixed state in which they are simply mixed, and react with each other to form condensates (especially partial condensate), a cross-linking reaction product, an addition reaction product, or the like.
  • a silicone pressure-sensitive adhesive composition containing a silicone rubber and a silicone resin usually contains a cross-linking agent in order to form a cross-linked structure, since it is easy to control the adhesiveness to be low.
  • a cross-linking agent is not particularly limited, but siloxane-based cross-linking agents (silicone-based cross-linking agents) and peroxide-based cross-linking agents can be preferably used.
  • a crosslinking agent can be used individually or in combination of 2 or more types.
  • siloxane-based cross-linking agent for example, polyorganohydrogensiloxane having two or more hydrogen atoms bonded to silicon atoms in the molecule can be suitably used.
  • various organic groups other than hydrogen atoms may be bonded to silicon atoms to which hydrogen atoms are bonded.
  • the organic group include alkyl groups such as a methyl group and an ethyl group; aryl groups such as a phenyl group; and halogenated alkyl groups.
  • the skeleton structure of the polyorganohydrogensiloxane may have a linear, branched, or cyclic skeleton structure, but is preferably linear.
  • peroxide-based crosslinking agent examples include diacyl peroxide, alkylperoxyester, peroxydicarbonate, monoperoxycarbonate, peroxyketal, dialkyl peroxide, hydroperoxide, and ketone peroxide.
  • addition-type silicone pressure-sensitive adhesives include trade names “KR-3700”, “KR-3701”, “X-40-3237-1”, “X-40-3240”, and “X-40-3291-1.” ” and “X-40-3306” (manufactured by Shin-Etsu Chemical Co., Ltd.) are commercially available.
  • peroxide-curable silicone-based adhesives for example, trade names “KR-100”, “KR-101-10", “KR-130” (manufactured by Shin-Etsu Chemical Co., Ltd.) and the like are commercially available. It is
  • the addition-type silicone pressure-sensitive adhesive composition preferably contains a curing catalyst such as a platinum catalyst.
  • a platinum catalyst for example, trade name "CAT-PL-50T” (manufactured by Shin-Etsu Chemical Co., Ltd.), trade name “DOWSIL NC-25 Catalyst”, “DOWSIL SRX212 Catalyst” (manufactured by Dow Toray Industries, Inc. ) are commercially available.
  • the content of the curing catalyst is It is preferably about 0.1 to 10 parts by weight with respect to 100 parts by weight.
  • the urethane-based pressure-sensitive adhesive is not particularly limited, and a known or commonly used urethane-based pressure-sensitive adhesive can be used, and from the viewpoint of easy control of low adhesiveness, a urethane containing a polyol, a polyfunctional isocyanate compound, and a catalyst is used. system adhesive compositions are preferred.
  • any appropriate polyol can be adopted as the polyol as long as it has two or more hydroxyl groups.
  • examples of such polyols include polyols having two hydroxyl groups (diols), polyols having three hydroxyl groups (triols), polyols having four hydroxyl groups (tetraols), and polyols having five hydroxyl groups. (pentaol), polyol (hexaol) having six hydroxyl groups, and the like.
  • a polyol can be used individually or in combination of 2 or more types.
  • the above polyol preferably contains a polyol having a number average molecular weight (Mn) of 400 to 20,000.
  • the content of polyols having a number average molecular weight (Mn) of 400 to 20000 in the total amount of polyols is preferably 50 to 100% by weight, more preferably 70 to 100% by weight, and still more preferably 90 to 100% by weight. 100% by weight, particularly preferably 95-100% by weight, most preferably substantially 100% by weight.
  • polyols examples include polyester polyols, polyether polyols, polycaprolactone polyols, polycarbonate polyols, and castor oil-based polyols.
  • the above polyester polyol can be obtained, for example, by an esterification reaction between a polyol component and an acid component.
  • polyol component examples include ethylene glycol, diethylene glycol, 1,3-butanediol, 1,4-butanediol, neopentyl glycol, 3-methyl-1,5-pentanediol, 2-butyl-2-ethyl- 1,3-propanediol, 2,4-diethyl-1,5-pentanediol, 1,2-hexanediol, 1,6-hexanediol, 1,8-octanediol, 1,9-nonanediol, 2- methyl-1,8-octanediol, 1,8-decanediol, octadecanediol, glycerin, trimethylolpropane, pentaerythritol, hexanetriol, polypropylene glycol and the like.
  • the acid component examples include succinic acid, methylsuccinic acid, adipic acid, pimelic acid, azelaic acid, sebacic acid, 1,12-dodecanedioic acid, 1,14-tetradecanedioic acid, dimer acid, 2-methyl-1 ,4-cyclohexanedicarboxylic acid, 2-ethyl-1,4-cyclohexanedicarboxylic acid, terephthalic acid, isophthalic acid, phthalic acid, isophthalic acid, terephthalic acid, 1,4-naphthalenedicarboxylic acid, 4,4'-biphenyldicarboxylic acid acids, acid anhydrides thereof, and the like.
  • polyether polyols examples include water, low-molecular-weight polyols (propylene glycol, ethylene glycol, glycerin, trimethylolpropane, pentaerythritol, etc.), bisphenols (bisphenol A, etc.), dihydroxybenzenes (catechol, resorcinol, hydroquinone, etc.).
  • Polyether polyols obtained by addition polymerization of alkylene oxides such as ethylene oxide, propylene oxide, butylene oxide, etc., as initiators. Specific examples include polyethylene glycol, polypropylene glycol, polytetramethylene glycol and the like.
  • polycaprolactone polyols examples include caprolactone-based polyester diols obtained by ring-opening polymerization of cyclic ester monomers such as ⁇ -caprolactone and ⁇ -valerolactone.
  • polycarbonate polyol examples include polycarbonate polyol obtained by subjecting the polyol component and phosgene to a polycondensation reaction; the polyol component, dimethyl carbonate, diethyl carbonate, dipropyl carbonate, diisopropyl carbonate, dibutyl carbonate, ethylbutyl carbonate, ethylene carbonate , propylene carbonate, diphenyl carbonate, dibenzyl carbonate, and other carbonic acid diesters through transesterification condensation; copolymerized polycarbonate polyols obtained by combining two or more of the above polyol components; various polycarbonate polyols and carboxyl groups above.
  • Polycarbonate polyol obtained by esterification reaction with the containing compound Polycarbonate polyol obtained by etherification reaction of the above various polycarbonate polyols and hydroxyl group-containing compounds; Obtained by transesterifying the above various polycarbonate polyols and ester compounds.
  • Polycarbonate polyols obtained by transesterification of various polycarbonate polyols and hydroxyl group-containing compounds Polyester-based polycarbonate polyols obtained by polycondensation reaction of various polycarbonate polyols and dicarboxylic acid compounds;
  • Various polycarbonates above A copolymerized polyether-based polycarbonate polyol obtained by copolymerizing a polyol and an alkylene oxide may be mentioned.
  • castor oil-based polyols examples include castor oil-based polyols obtained by reacting castor oil fatty acids with the above polyol components. Specific examples include castor oil-based polyols obtained by reacting castor oil fatty acids with polypropylene glycol.
  • the above polyol it is preferable to use a polyol (triol) having three hydroxyl groups as an essential component from the viewpoint of low adhesion and wettability of the first pressure-sensitive adhesive layer to electronic parts.
  • the content of the polyol (triol) having three hydroxyl groups is preferably 50 to 100% by weight, more preferably 70 to 100% by weight, based on the total amount of components constituting the polyol.
  • polyfunctional isocyanate compounds examples include aliphatic polyisocyanates, alicyclic polyisocyanates, and aromatic polyisocyanate compounds.
  • aliphatic polyisocyanate examples include trimethylene diisocyanate, tetramethylene diisocyanate, hexamethylene diisocyanate, pentamethylene diisocyanate, 1,2-propylene diisocyanate, 1,3-butylene diisocyanate, dodecamethylene diisocyanate, 2,4,4- and trimethylhexamethylene diisocyanate.
  • alicyclic polyisocyanate examples include 1,3-cyclopentene diisocyanate, 1,3-cyclohexane diisocyanate, 1,4-cyclohexane diisocyanate, isophorone diisocyanate, hydrogenated diphenylmethane diisocyanate, hydrogenated xylylene diisocyanate, hydrogenated tolylene Isocyanate Hydrogenated tetramethylxylylene diisocyanate and the like can be mentioned.
  • aromatic polyisocyanate examples include phenylene diisocyanate, 2,4-tolylene diisocyanate, 2,6-tolylene diisocyanate, 2,2′-diphenylmethane diisocyanate, 4,4′-diphenylmethane diisocyanate, 4 ,4'-toluidine diisocyanate, 4,4'-diphenyl ether diisocyanate, 4,4'-diphenyl diisocyanate, 1,5-naphthalene diisocyanate, xylylene diisocyanate and the like.
  • aliphatic polyisocyanates and modified products thereof are preferred.
  • Aliphatic polyisocyanates and modified products thereof have a more flexible crosslinked structure than other isocyanate-based crosslinkers, and can be easily controlled to have low tackiness.
  • Hexamethylene diisocyanate and its modified form are particularly preferred as the aliphatic polyisocyanate and its modified form.
  • the polyfunctional isocyanate compound and the polyol are selected from the viewpoints of low adhesion and wettability to electronic parts of the first pressure-sensitive adhesive layer, and the isocyanate group of the polyfunctional isocyanate compound and the hydroxyl group of the polyol.
  • the equivalent ratio (NCO/OH) is preferably 1-5, more preferably 1.1-3, even more preferably 1.2-2.
  • the urethane-based pressure-sensitive adhesive composition preferably contains a catalyst such as an iron-based compound and/or a tin-based compound.
  • a catalyst such as an iron-based compound and/or a tin-based compound.
  • tin-based catalysts such as dibutyltin dilaurate and dioctyltin dilaurate, tris(acetylacetonate)iron, tris(hexane-2,4-dionato)iron, tris(heptane-2,4-dionato)iron , tris(heptane-3,5-dionato)iron, tris(5-methylhexane-2,4-dionato)iron, tris(octane-2,4-dionato)iron, tris(6-methylheptane-2,4 -dionato)iron, tris(2,6-dimethylheptane-3,5-dionato)iron, tris(nonane-2,
  • the content (use amount) of the catalyst contained in the urethane pressure-sensitive adhesive composition is preferably 0.002 to 0.5 parts by weight, preferably 0.005 to 0.3 parts by weight, with respect to 100 parts by weight of the polyol. More preferably, 0.01 to 0.1 parts by weight is even more preferable. Within this range, the speed of the cross-linking reaction is high when the pressure-sensitive adhesive layer is formed, and the pot life of the pressure-sensitive adhesive composition is lengthened, which is a preferred embodiment.
  • a urethane-based adhesive composition containing a urethane prepolymer is also preferable because it is easy to control the adhesiveness to be low.
  • Urethane-based pressure-sensitive adhesive compositions containing urethane prepolymers include, for example, pressure-sensitive adhesive compositions containing polyurethane polyols as urethane prepolymers and polyfunctional isocyanate-based compounds.
  • a urethane prepolymer can be used individually or in combination of 2 or more types.
  • a polyfunctional isocyanate compound can be used individually or in combination of 2 or more types.
  • a polyurethane polyol as a urethane prepolymer is preferably obtained by reacting a polyester polyol and a polyether polyol with an organic polyisocyanate compound in the presence or absence of a catalyst.
  • polyester polyol Any appropriate polyester polyol can be used as the polyester polyol.
  • polyester polyols include polyester polyols obtained by reacting an acid component and a glycol component.
  • acid components include terephthalic acid, adipic acid, azelaic acid, sebacic acid, phthalic anhydride, isophthalic acid, and trimellitic acid.
  • glycol components include ethylene glycol, propylene glycol, diethylene glycol, butylene glycol, 1,6-hexane glycol, 3-methyl-1,5-pentanediol, 3,3′-dimethylolheptane, polyoxyethylene glycol, Examples include polyoxypropylene glycol, 1,4-butanediol, neopentyl glycol, butylethylpentanediol, and polyol components such as glycerin, trimethylolpropane, and pentaerythritol. Polyester polyols also include polyester polyols obtained by ring-opening polymerization of lactones such as polycaprolactone, poly( ⁇ -methyl- ⁇ -valerolactone) and polyvalerolactone.
  • the molecular weight of the polyester polyol can range from low molecular weight to high molecular weight.
  • the number average molecular weight is preferably 500 to 5,000. If the number average molecular weight is less than 500, the reactivity becomes high and gelation may easily occur. If the number-average molecular weight exceeds 5,000, the reactivity may become low, and the cohesive strength of the polyurethane polyol itself may become small.
  • the amount of the polyester polyol used is preferably 10 to 90 mol % of the polyol constituting the polyurethane polyol.
  • polyether polyol can be used as the polyether polyol.
  • polyether polyols include water, propylene glycol, ethylene glycol, glycerin, trimethylolpropane, and other low-molecular-weight polyols as initiators, and ethylene oxide, propylene oxide, butylene oxide, tetrahydrofuran, and other oxirane compounds.
  • examples include polyether polyols obtained by polymerization.
  • Specific examples of such polyether polyols include polyether polyols having two or more functional groups, such as polypropylene glycol, polyethylene glycol, and polytetramethylene glycol.
  • the molecular weight of the polyether polyol can range from low molecular weight to high molecular weight.
  • the number average molecular weight is preferably 1,000 to 5,000. If the number average molecular weight is less than 1,000, the reactivity becomes high and gelation may easily occur. If the number-average molecular weight exceeds 5,000, the reactivity may become low, and the cohesive strength of the polyurethane polyol itself may become small.
  • the amount of polyether polyol used is preferably 20 to 80 mol % of the polyols constituting the polyurethane polyol.
  • Part of the polyether polyol is ethylene glycol, 1,4-butanediol, neopentyl glycol, butylethylpentanediol, glycerin, trimethylolpropane, glycols such as pentaerythritol, ethylenediamine, N - Polyvalent amines such as aminoethylethanolamine, isophoronediamine, and xylylenediamine can be substituted and used in combination.
  • the polyether polyol only a bifunctional polyether polyol may be used, or a polyether polyol having a number average molecular weight of 1000 to 5000 and at least 3 or more hydroxyl groups in one molecule is used. Part or all may be used.
  • a polyether polyol having an average molecular weight of 1000 to 5000 and having at least 3 or more hydroxyl groups in one molecule is partially or wholly used as the polyether polyol, the adhesive strength and removability are well balanced. obtain.
  • the number average molecular weight is less than 1000, the reactivity becomes high and there is a possibility that gelation is likely to occur.
  • the number average molecular weight of such polyether polyols is more preferably 2500-3500.
  • organic polyisocyanate compound can be used as the organic polyisocyanate compound.
  • organic polyisocyanate compounds include aromatic polyisocyanates, aliphatic polyisocyanates, araliphatic polyisocyanates, and alicyclic polyisocyanates.
  • aromatic polyisocyanates examples include 1,3-phenylene diisocyanate, 4,4'-diphenyldiisocyanate, 1,4-phenylene diisocyanate, 4,4'-diphenylmethane diisocyanate, 2,4-tolylene diisocyanate, 2,6 - tolylene diisocyanate, 4,4'-toluidine diisocyanate, 2,4,6-triisocyanatotoluene, 1,3,5-triisocyanatobenzene, dianisidine diisocyanate, 4,4'-diphenyl ether diisocyanate, 4,4', 4′′-triphenylmethane triisocyanate and the like.
  • aliphatic polyisocyanates examples include trimethylene diisocyanate, tetramethylene diisocyanate, hexamethylene diisocyanate, pentamethylene diisocyanate, 1,2-propylene diisocyanate, 2,3-butylene diisocyanate, 1,3-butylene diisocyanate, dodecamethylene diisocyanate, 2,4,4-trimethylhexamethylene diisocyanate and the like.
  • araliphatic polyisocyanates include ⁇ , ⁇ '-diisocyanate-1,3-dimethylbenzene, ⁇ , ⁇ '-diisocyanate-1,4-dimethylbenzene, ⁇ , ⁇ '-diisocyanate-1,4-diethylbenzene , 1,4-tetramethylxylylene diisocyanate, 1,3-tetramethylxylylene diisocyanate, and the like.
  • alicyclic polyisocyanates include 3-isocyanatomethyl-3,5,5-trimethylcyclohexyl isocyanate, 1,3-cyclopentane diisocyanate, 1,3-cyclohexane diisocyanate, 1,4-cyclohexane diisocyanate, methyl-2 ,4-cyclohexane diisocyanate, methyl-2,6-cyclohexane diisocyanate, 4,4′-methylenebis(cyclohexyl isocyanate), 1,4-bis(isocyanatomethyl)cyclohexane, 1,4-bis(isocyanatomethyl)cyclohexane and the like. be done.
  • organic polyisocyanate compound a trimethylolpropane adduct, a water-reacted burette, a trimer having an isocyanurate ring, and the like can also be used in combination.
  • Any suitable catalyst can be used as the catalyst that can be used in obtaining the polyurethane polyol.
  • Examples of such catalysts include tertiary amine compounds and organometallic compounds.
  • tertiary amine compounds include triethylamine, triethylenediamine, 1,8-diazabicyclo(5,4,0)-undecene-7 (DBU), and the like.
  • organometallic compounds examples include tin-based compounds and non-tin-based compounds.
  • tin compounds include dibutyltin dichloride, dibutyltin oxide, dibutyltin dibromide, dibutyltin dimaleate, dibutyltin dilaurate (DBTDL), dibutyltin diacetate, dibutyltin sulfide, tributyltin sulfide, tributyltin oxide, tributyltin Tin acetate, triethyltin ethoxide, tributyltin ethoxide, dioctyltin oxide, tributyltin chloride, tributyltin trichloroacetate, tin 2-ethylhexanoate and the like.
  • DBTDL dibutyltin dilaurate
  • dibutyltin diacetate dibutyltin sulfide, tributyltin sulfide, tributyltin oxide
  • non-tin-based compounds include titanium-based compounds such as dibutyl titanium dichloride, tetrabutyl titanate, and butoxy titanium trichloride; lead-based compounds such as lead oleate, lead 2-ethylhexanoate, lead benzoate, and lead naphthenate.
  • titanium-based compounds such as dibutyl titanium dichloride, tetrabutyl titanate, and butoxy titanium trichloride
  • lead-based compounds such as lead oleate, lead 2-ethylhexanoate, lead benzoate, and lead naphthenate.
  • iron-based compounds such as iron 2-ethylhexanoate and iron acetylacetonate
  • cobalt-based compounds such as cobalt benzoate and cobalt 2-ethylhexanoate
  • zinc-based compounds such as zinc naphthenate and zinc 2-ethylhexanoate
  • zirconium compounds such as zirconium nap
  • a catalyst When a catalyst is used to obtain a polyurethane polyol, in a system in which two kinds of polyols, a polyester polyol and a polyether polyol, are present, gelation or a reaction solution may occur in a single catalyst system due to the difference in reactivity. The problem of turbidity is likely to occur. Therefore, by using two kinds of catalysts when obtaining a polyurethane polyol, the reaction rate, the selectivity of the catalyst, etc. can be easily controlled, and these problems can be solved. Combinations of such two types of catalysts include, for example, tertiary amine/organometallic, tin/non-tin, and tin/tin, preferably tin/tin, and more preferably.
  • tin 2-ethylhexanoate is a combination of dibutyltin dilaurate and tin 2-ethylhexanoate.
  • the weight ratio of tin 2-ethylhexanoate/dibutyltin dilaurate is preferably less than 1, more preferably 0.2 to 0.6. If the compounding ratio is 1 or more, gelation may tend to occur due to the balance of catalytic activity.
  • the amount of catalyst used is preferably 0.01 to 1.0% by weight with respect to the total amount of the polyester polyol, polyether polyol and organic polyisocyanate compound.
  • the reaction temperature is preferably less than 100°C, more preferably 85°C to 95°C. If the temperature is 100° C. or higher, it may become difficult to control the reaction rate and the crosslinked structure, and it may become difficult to obtain a polyurethane polyol having a predetermined molecular weight.
  • a catalyst may not be used when obtaining polyurethane polyol.
  • the reaction temperature is preferably 100° C. or higher, more preferably 110° C. or higher.
  • Methods for obtaining polyurethane polyol include, for example, 1) a method of charging a polyester polyol, a polyether polyol, a catalyst, and an organic polyisocyanate into a volumetric flask, and 2) a method of charging a polyester polyol, a polyether polyol, and a catalyst into a flask to produce an organic polyisocyanate. can be added dropwise.
  • the method 2) is preferable from the viewpoint of controlling the reaction.
  • Any suitable solvent can be used to obtain the polyurethane polyol.
  • suitable solvents include methyl ethyl ketone, ethyl acetate, toluene, xylene and acetone. Among these solvents, toluene is preferred.
  • polyfunctional isocyanate compound those mentioned above can be used.
  • any suitable method may be used as long as it is a method for producing a polyurethane-based resin composition using a so-called "urethane prepolymer" as a raw material. Manufacturing methods may be employed.
  • the acrylic pressure-sensitive adhesive is not particularly limited, and a known or commonly used acrylic pressure-sensitive adhesive can be used. agent compositions.
  • the above acrylic polymer is a polymer that contains structural units derived from acrylic monomers (monomer components having (meth)acryloyl groups in the molecule) as polymer structural units.
  • the acrylic polymer is preferably a polymer containing the largest proportion of structural units derived from (meth)acrylic acid ester.
  • an acrylic polymer can be used individually or in combination of 2 or more types.
  • "(meth)acrylic” means “acrylic” and/or "methacrylic” (either one or both of "acrylic” and “methacrylic"), and others are the same.
  • Examples of the (meth)acrylic acid esters include hydrocarbon group-containing (meth)acrylic acid esters.
  • Hydrocarbon group-containing (meth)acrylic acid esters include (meth)acrylic acid alkyl esters, (meth)acrylic acid cycloalkyl esters, (meth)acrylic acid aryl esters, and the like.
  • Examples of the (meth)acrylic acid alkyl esters include (meth)acrylic acid methyl ester, ethyl ester, propyl ester, isopropyl ester, butyl ester, isobutyl ester, s-butyl ester, t-butyl ester, pentyl ester, Isopentyl ester, hexyl ester, heptyl ester, octyl ester, 2-ethylhexyl ester, isooctyl ester, nonyl ester, decyl ester, isodecyl ester, undecyl ester, dodecyl ester (lauryl ester), tridecyl ester, tetradecyl ester , hexadecyl ester, octadecyl ester, eicosyl ester and the like.
  • Examples of the (meth)acrylic acid cycloalkyl esters include cyclopentyl esters and cyclohexyl esters of (meth)acrylic acid.
  • Examples of the (meth)acrylic acid aryl esters include phenyl esters and benzyl esters of (meth)acrylic acid.
  • the above hydrocarbon group-containing (meth)acrylic acid esters can be used alone or in combination of two or more. All monomer components for forming an acrylic polymer because the basic properties such as adhesiveness of the hydrocarbon group-containing (meth)acrylic acid ester are appropriately expressed in the first adhesive layer and it is easy to control the adhesiveness to be low.
  • the ratio of the hydrocarbon group-containing (meth)acrylic acid ester is preferably 40% by mass or more, more preferably 60% by mass or more.
  • the acrylic polymer contains structural units derived from other monomer components copolymerizable with the hydrocarbon group-containing (meth)acrylic acid ester for the purpose of improving cohesive strength, heat resistance, adhesiveness, etc.
  • Other monomer components include carboxy group-containing monomers, acid anhydride monomers, hydroxyl group-containing monomers, glycidyl group-containing monomers, sulfonic acid group-containing monomers, phosphoric acid group-containing monomers, acrylamide, acrylonitrile, and other functional group-containing monomers. monomers, vinyl ester monomers, and the like.
  • carboxy group-containing monomers examples include acrylic acid, methacrylic acid, carboxyethyl (meth)acrylate, carboxypentyl (meth)acrylate, itaconic acid, maleic acid, fumaric acid, and crotonic acid.
  • acid anhydride monomer examples include maleic anhydride and itaconic anhydride.
  • Examples of the hydroxy group-containing monomer include 2-hydroxyethyl (meth)acrylate, 2-hydroxypropyl (meth)acrylate, 4-hydroxybutyl (meth)acrylate, 6-hydroxyhexyl (meth)acrylate, 8-hydroxyoctyl (meth)acrylate, 10-hydroxydecyl (meth)acrylate, 12-hydroxylauryl (meth)acrylate, (4-hydroxymethylcyclohexyl)methyl (meth)acrylate and the like.
  • Examples of the glycidyl group-containing monomer include glycidyl (meth)acrylate and methylglycidyl (meth)acrylate.
  • Examples of the sulfonic acid group-containing monomer include styrenesulfonic acid, allylsulfonic acid, 2-(meth)acrylamido-2-methylpropanesulfonic acid, (meth)acrylamidopropanesulfonic acid, sulfopropyl (meth)acrylate, (meth) ) acryloyloxynaphthalenesulfonic acid and the like.
  • Examples of the phosphoric acid group-containing monomer include 2-hydroxyethyl acryloyl phosphate and the like.
  • Examples of the vinyl ester monomer include vinyl acetate, vinyl propionate, vinyl butyrate, vinyl pivalate, vinyl cyclohexanecarboxylate, and vinyl benzoate.
  • the above other monomer components can be used alone or in combination of two or more. All monomer components for forming an acrylic polymer because the basic properties such as adhesiveness of the hydrocarbon group-containing (meth)acrylic acid ester are appropriately expressed in the first adhesive layer and it is easy to control the adhesiveness to be low.
  • the total ratio of the other monomer components is preferably 60% by mass or less, more preferably 40% by mass or less.
  • the above acrylic polymer may contain a structural unit derived from a polyfunctional monomer copolymerizable with the monomer component forming the acrylic polymer in order to form a crosslinked structure in the polymer skeleton.
  • the polyfunctional monomer include hexanediol di(meth)acrylate, (poly)ethylene glycol di(meth)acrylate, (poly)propylene glycol di(meth)acrylate, neopentyl glycol di(meth)acrylate, penta Erythritol di(meth)acrylate, trimethylolpropane tri(meth)acrylate, pentaerythritol tri(meth)acrylate, dipentaerythritol hexa(meth)acrylate, epoxy (meth)acrylate (e.g.
  • polyglycidyl (meth)acrylate examples thereof include monomers having a (meth)acryloyl group and other reactive functional groups in the molecule such as (meth)acrylate and urethane (meth)acrylate.
  • the above polyfunctional monomers can be used alone or in combination of two or more. All monomer components for forming an acrylic polymer because the basic properties such as adhesiveness of the hydrocarbon group-containing (meth)acrylic acid ester are appropriately expressed in the first adhesive layer and it is easy to control the adhesiveness to be low. is preferably 40% by mass or less, more preferably 30% by mass or less.
  • An acrylic polymer is obtained by subjecting one or more monomer components including an acrylic monomer to polymerization.
  • Polymerization methods include solution polymerization, emulsion polymerization, bulk polymerization, suspension polymerization and the like.
  • the mass average molecular weight of the acrylic polymer is preferably 100,000 or more, more preferably 200,000 to 3,000,000.
  • weight average molecular weight is 100,000 or more, the amount of low-molecular-weight substances in the pressure-sensitive adhesive layer tends to be small, and contamination of electronic parts and the like can be further suppressed.
  • the acrylic pressure-sensitive adhesive composition forming the first pressure-sensitive adhesive layer may contain a cross-linking agent.
  • the acrylic polymer can be crosslinked to further reduce low-molecular-weight substances in the first pressure-sensitive adhesive layer.
  • the mass average molecular weight of the acrylic polymer can be increased to control the adhesiveness to be low.
  • the cross-linking agent include polyisocyanate compounds, epoxy compounds, polyol compounds (polyphenol-based compounds, etc.), aziridine compounds, melamine compounds, etc., and isocyanate-based cross-linking agents and/or epoxy-based cross-linking agents are preferred.
  • the amount used is preferably about 10 parts by mass or less, more preferably 0.1 to 10 parts by mass, based on 100 parts by mass of the acrylic polymer.
  • isocyanate-based cross-linking agents include aliphatic isocyanates, alicyclic isocyanates, and aromatic isocyanates.
  • Aliphatic isocyanates include, for example, trimethylene diisocyanate, butylene diisocyanate, hexamethylene diisocyanate, and dimer acid diisocyanate.
  • Cycloaliphatic isocyanates include, for example, cyclopentylene diisocyanate, cyclohexylene diisocyanate, isophorone diisocyanate, and 1,3-bis(isocyanatomethyl)cyclohexane.
  • Aromatic isocyanates include, for example, 2,4-tolylene diisocyanate, 4,4'-diphenylmethane diisocyanate, and xylylene diisocyanate.
  • isocyanate-based cross-linking agents include trimethylolpropane adducts of tolylene diisocyanate (trade name: "Coronate L", manufactured by Tosoh Corporation) and isocyanurate of hexamethylene diisocyanate (trade name: "Coronate HX", manufactured by Tosoh Corporation). ) made) are also included.
  • epoxy-based cross-linking agents include N,N,N',N'-tetraglycidyl-m-xylenediamine, diglycidylaniline, 1,3-bis(N,N-diglycidylamino methyl)cyclohexane, 1,6-hexanediol diglycidyl ether, neopentyl glycol diglycidyl ether, ethylene glycol diglycidyl ether, propylene glycol diglycidyl ether, polyethylene glycol diglycidyl ether, polypropylene glycol diglycidyl ether, sorbitol polyglycidyl ether, glycerol polyglycidyl ether, pentaerythritol polyglycidyl ether, polyglycerol polyglycidyl ether, sorbitan polyglycidyl ether, trimethylolpropane polyglycidyl ether,
  • the adhesive composition that constitutes the first adhesive layer preferably contains a light release agent.
  • a WBL Wood Boundary Layer
  • the light release agent is not particularly limited, and known light release agents can be used without limitation. Examples thereof include silicone release agents, fluorosurfactants, aliphatic esters, etc. It can be used alone or in combination of two or more.
  • the silicone-based release agent is not particularly limited, but includes, for example, a thermosetting silicone-based release agent, an ionizing radiation-curable silicone-based release agent, and the like.
  • the silicone-based release agent may be either a solvent-free type that does not contain a solvent or a solvent-type that is dissolved or dispersed in an organic solvent.
  • the silicone release agent can be used alone or in combination of two or more.
  • thermosetting silicone-based release agent is not particularly limited, but preferably contains an organohydrogenpolysiloxane and an organopolysiloxane having an aliphatic unsaturated group. Further, the above silicone-based release agent is preferably a thermal addition reaction-curable silicone-based release agent that is cured by cross-linking caused by a thermal addition reaction.
  • the heat addition reaction-curable silicone-based release agent is not particularly limited, but polysiloxane (Si—H group-containing polysiloxane) having a hydrogen atom (H) bonded to a silicon atom (Si) in the molecule, and a molecule Polysiloxane (Si-H group reactive polysiloxane) containing a functional group (Si-H group reactive functional group) having reactivity to Si-H bond (covalent bond between Si and H) in A release agent containing is preferably exemplified. This release agent is cured by cross-linking through an addition reaction between the Si—H group and the reactive functional group of the Si—H group.
  • the Si to which H is bonded may be either Si in the main chain or Si in the side chain.
  • the Si—H group-containing polysiloxane is preferably polysiloxane containing two or more Si—H groups in the molecule.
  • Polysiloxanes containing two or more Si—H groups preferably include dimethylhydrogensiloxane-based polymers such as poly(dimethylsiloxane-methylsiloxane).
  • the Si—H group-reactive polysiloxane a Si—H group-reactive functional group or a side chain containing such a functional group forms the main chain (skeleton) of the siloxane-based polymer (for example, the main chain Preferred examples include polysiloxanes in a mode in which Si at the terminal and Si in the main chain are bonded. Among them, polysiloxane in which the Si—H group-reactive functional group is directly bonded to Si in the main chain is preferred. Furthermore, as the Si—H group-reactive polysiloxane, a polysiloxane containing two or more Si—H group-reactive functional groups in the molecule is also preferable.
  • Si—H group-reactive functional groups in the above Si—H group-reactive polysiloxane include alkenyl groups such as vinyl groups and hexenyl groups.
  • Examples of the siloxane-based polymer forming the main chain portion of the Si—H group-reactive polysiloxane include polydialkylsiloxanes such as polydimethylsiloxane, polydiethylsiloxane, and polymethylethylsiloxane (the two alkyl groups are the same).
  • polyalkylarylsiloxane poly(dimethylsiloxane-methylsiloxane); a polymer obtained by polymerizing a plurality of Si-containing monomers; Among them, polydimethylsiloxane is preferable as the siloxane-based polymer forming the main chain portion.
  • the thermal addition reaction-curable silicone-based release agent contains a polysiloxane containing two or more Si—H groups in the molecule and a polysiloxane containing two or more Si—H reactive functional groups in the molecule. It is preferably a heat-addition-curable silicone-based release agent to be contained.
  • the ionizing radiation-curable silicone-based release agent is not particularly limited, but preferably includes a UV-curable silicone-based release agent that is cured by a crosslinking reaction caused by ultraviolet (UV) irradiation.
  • UV ultraviolet
  • the above UV-curable silicone-based release agent is a release agent that is cured by chemical reactions such as cationic polymerization, radical polymerization, radical addition polymerization, hydrosilylation reaction, etc., by UV irradiation.
  • the UV-curable silicone release agent is particularly preferably a UV-curable silicone release agent that cures by cationic polymerization.
  • the cationic polymerization type UV curable silicone release agent is not particularly limited, but at least two epoxy groups form the main chain (skeleton) of the siloxane polymer (for example, Si at the main chain terminal, main Si in the chain) and / or Si contained in the side chain, respectively, directly or via a divalent group (alkylene group such as methylene group and ethylene group; alkyleneoxy group such as ethyleneoxy group and propyleneoxy group) Release agents containing epoxy-group-containing polysiloxanes bound together are preferred.
  • the bonding modes of these at least two epoxy groups to Si may be the same or different. That is, release agents containing polysiloxane containing two or more side chains containing one or more epoxy groups are preferred.
  • epoxy group-containing side chains examples include glycidyl group, glycidoxy group (glycidyloxy group), 3,4-epoxycyclohexyl group, 2,3-epoxycyclopentyl group and the like.
  • Epoxy-group-containing polysiloxanes may be linear, branched, or mixtures thereof.
  • the silicone-based pressure-sensitive adhesive preferably contains a thermosetting silicone-based release agent from the viewpoint that the first pressure-sensitive adhesive layer can be easily controlled to have a low adhesiveness. More preferably, it contains a reaction-curable silicone-based release agent.
  • the content of the silicone-based release agent is not particularly limited, but 100 parts by weight of the silicone-based polymer that is the base polymer. is preferably 0.5 parts by weight or more and 100 parts by weight or less.
  • the content is 0.5 parts by weight or more, the effect of easily controlling the adhesiveness of the first pressure-sensitive adhesive layer to be low can be easily obtained. Department or above.
  • the content is 100 parts by weight or less, sufficient adhesiveness cannot be obtained, and it becomes easy to suppress the problem that electronic components are difficult to receive.
  • it is 25 parts by weight or less.
  • the fluorine-based surfactant as a light release agent, it is possible to exhibit a light release effect due to the low surface free energy of the fluorine site.
  • the fluorine-based surfactant is not particularly limited, but examples include fluorine-based oligomers, perfluorobutanesulfonates, perfluoroalkyl group-containing carboxylates, hexafluoropentane trimer derivative-containing sulfonates, and hexafluoropentane trimers. Derivative-containing carboxylates, hexafluoropentane trimer derivative-containing quaternary ammonium salts, hexafluoropentane trimer derivative-containing betaine, hexafluoropentane trimer derivative-containing polyoxyethylene ethers, and the like, among others, fluorine-based oligomers are preferred. In addition, a fluorine-type surfactant can be used individually or in combination of 2 or more types.
  • fluorine-based surfactants include commercially available products such as "Megafac F (1) 14" and “Megafac F-410” (manufactured by DIC Corporation), the product name " Surflon S-211", “Surflon S-221", “Surflon S-231", “Surflon S-232", “Surflon S-233", “Surflon S-241", “Surflon S-242", “Surflon S-243", “Surflon S-420” (manufactured by AGC Seimi Chemical Co., Ltd.), trade names “Futergent 100", “Futergent 100C”, “Futergent 110", “Futergent 150”, “ Futergent 150CH”, “Ftergent 300”, “Ftergent 310”, “Ftergent 320”, “Ftergent 400SW”, “Ftergent 251”, “Ftergent 212M”, “Ftergent 215M”, “Ftergent 250”, “Ftergent 20
  • the weight average molecular weight (Mw) of the fluorine-based oligomer is preferably 3,500 or more, more preferably 5,000 or more, even more preferably 10,000 or more, and particularly preferably 20,000 or more.
  • the weight-average molecular weight of the fluorine-based oligomer is 3500 or more, it becomes easy to control the adhesiveness to be low. Furthermore, when the weight-average molecular weight is 20,000 or more, foaming can be suppressed when the pressure-sensitive adhesive (composition) is blended, and the appearance after the pressure-sensitive adhesive is applied is excellent, which is preferable.
  • the upper limit of the weight average molecular weight (Mw) of the fluorine-based oligomer is preferably 200,000, more preferably 100,000. By setting the upper limit to 200,000, the fluorine-based oligomer tends to be unevenly distributed on the surface, making it easier to exhibit the effect of light release, which is preferable.
  • fluorine-based oligomer for example, commercial products such as "Megafac F(2)51”, “Megafac F(2)53”, “Megafac F(2)81”, “Megafac F-410", “Megafuck F-430", “Megafuck F-444", “Megafuck F-477”, “Megafuck F-510", “Megafuck F-511”, “Megafuck F- 551”, “Megafuck F-552", “Megafuck F-553”, “Megafuck F-554”, “Megafuck F-555”, “Megafuck F-556", “Megafuck F-557” , “Megafuck F-558", "Megafuck F-559”, “Megafuck F-560”, “Megafuck F-561”, “Megafuck F-562”, “Megafuck F-563”, “ Megafac F-565”, “Megafac F-568", “Megafac F-569",
  • the content of the fluorosurfactant is not particularly limited, but the silicone polymer 100, which is the base polymer, is not particularly limited. It is preferably 0.01 parts by weight or more and 5 parts by weight or less. When the content is 0.01 parts by weight or more, the effect of easily controlling the adhesiveness of the first pressure-sensitive adhesive layer to be low can be easily obtained, and the content is more preferably 0.05 parts by weight or more, and even more preferably. It is 0.1 part by weight or more. In addition, if the content is 5 parts by weight or less, sufficient adhesiveness cannot be obtained, and it becomes easy to suppress the problem that it becomes difficult to receive electronic parts. It is more preferably 3 parts by weight or less, and even more preferably 2 parts by weight or less.
  • the adhesive composition that constitutes the first adhesive layer By including a fatty acid ester in the adhesive composition that constitutes the first adhesive layer, low adhesion and wettability of the first adhesive layer to electronic components can be expected.
  • fatty acid ester examples include polyoxyethylene bisphenol A laurate, butyl stearate, 2-ethylhexyl palmitate, 2-ethylhexyl stearate, monoglyceride behenate, cetyl 2-ethylhexanoate, isopropyl myristate, Isopropyl palmitate, cholesteryl isostearate, lauryl methacrylate, methyl cocoate, methyl laurate, methyl oleate, methyl stearate, myristyl myristate, octyldodecyl myristate, pentaerythritol monooleate, pentaerythritol monostearate, penta erythritol tetrapalmitate, stearyl stearate, isotridecyl stearate, 2-ethylhexanoic acid triglyceride, butyl laurate,
  • the content of the fatty acid ester contained in the urethane-based pressure-sensitive adhesive composition is, for example, polyol 100 from the viewpoint of low adhesion to electronic parts of the first pressure-sensitive adhesive layer, wettability, and staining of adherends. It is preferably 1 to 50 parts by weight, more preferably 2 to 40 parts by weight, and even more preferably 3 to 30 parts by weight.
  • the content (total amount) of the pressure-sensitive adhesive layer should From the viewpoint of staining, for example, 0.1 parts by weight or more is preferable, 1 part by weight or more is more preferable, and 3 parts by weight or more is even more preferable with respect to 100 parts by weight of the base polymer. From the viewpoint of preventing coloring of the first pressure-sensitive adhesive layer, it is preferably 50 parts by weight or less, more preferably 30 parts by weight or less, and even more preferably 10 parts by weight or less.
  • the pressure-sensitive adhesive composition that constitutes the first pressure-sensitive adhesive layer preferably contains anti-degradation agents such as antioxidants and ultraviolet absorbers.
  • anti-degradation agents such as antioxidants and ultraviolet absorbers.
  • UV absorber examples include, but are not limited to, triazine-based ultraviolet absorbers, benzotriazole-based ultraviolet absorbers, benzophenone-based ultraviolet absorbers, oxybenzophenone-based ultraviolet absorbers, salicylic acid ester-based ultraviolet absorbers, and cyanoacrylate-based ultraviolet absorbers.
  • UV absorbers and the like can be mentioned, and these can be used alone or in combination of two or more.
  • triazine-based UV absorbers and benzotriazole-based UV absorbers are preferred, triazine-based UV absorbers having two or less hydroxyl groups in one molecule, and benzotriazole having one benzotriazole skeleton in one molecule.
  • At least one UV absorber selected from the group consisting of triazole-based UV absorbers has good solubility in the monomer used to form the acrylic pressure-sensitive adhesive composition and has a wavelength of around 380 nm. It is preferable because it has a high ultraviolet absorption capacity at .
  • triazine-based UV absorbers having two or less hydroxyl groups in one molecule include 2,4-bis-[ ⁇ 4-(4-ethylhexyloxy)-4-hydroxy ⁇ -phenyl]-6 -(4-methoxyphenyl)-1,3,5-triazine (trade name “Tinosorb S”, manufactured by BASF), 2,4-bis[2-hydroxy-4-butoxyphenyl]-6-(2,4 -dibutoxyphenyl)-1,3,5-triazine (trade name “TINUVIN 460”, manufactured by BASF), 2-(4,6-bis(2,4-dimethylphenyl)-1,3,5-triazine -2-yl)-5-hydroxyphenyl and [(C 10 -C 16 (mainly C 12 -C 13 )alkyloxy)methyl]oxirane reaction product (trade name “TINUVIN400”, manufactured by BASF), 2 -[4,6-bis(2,4-dimethylphenyl)-1,3,5-triazin
  • benzophenone-based ultraviolet absorber (benzophenone-based compound) and oxybenzophenone-based ultraviolet absorber (oxybenzophenone-based compound)
  • examples of the benzophenone-based ultraviolet absorber (benzophenone-based compound) and oxybenzophenone-based ultraviolet absorber (oxybenzophenone-based compound) include 2,4-dihydroxybenzophenone, 2-hydroxy-4-methoxybenzophenone, 2-hydroxy -4-methoxybenzophenone-5-sulfonic acid (anhydrous and trihydrate), 2-hydroxy-4-octyloxybenzophenone, 4-dodecyloxy-2-hydroxybenzophenone, 4-benzyloxy-2-hydroxybenzophenone, 2, 2',4,4'-tetrahydroxybenzophenone, 2,2'-dihydroxy-4,4-dimethoxybenzophenone and the like can be mentioned.
  • salicylic acid ester-based ultraviolet absorbers examples include phenyl-2-acryloyloxybenzoate, phenyl-2-acryloyloxy-3-methylbenzoate, and phenyl-2-acryloyloxy.
  • cyanoacrylate-based ultraviolet absorbers examples include alkyl-2-cyanoacrylates, cycloalkyl-2-cyanoacrylates, alkoxyalkyl-2-cyanoacrylates, alkenyl-2-cyanoacrylates, alkynyl- 2-cyanoacrylate and the like can be mentioned.
  • the maximum absorption wavelength of the absorption spectrum of the ultraviolet absorber is preferably in the wavelength range of 300-400 nm, more preferably in the wavelength range of 320-380 nm.
  • antioxidants examples include phenol-based, phosphorus-based, sulfur-based and amine-based antioxidants, and at least one selected from these is used. Among these, phenolic antioxidants are preferred, and hindered phenolic antioxidants are particularly preferred.
  • phenolic antioxidants include monocyclic phenol compounds such as 2,6-di-t-butyl-p-cresol, 2,6-di-t-butyl-4-ethylphenol, 2,6 -dicyclohexyl-4-methylphenol, 2,6-diisopropyl-4-ethylphenol, 2,6-di-t-amyl-4-methylphenol, 2,6-di-t-octyl-4-n-propylphenol , 2,6-dicyclohexyl-4-n-octylphenol, 2-isopropyl-4-methyl-6-t-butylphenol, 2-t-butyl-4-ethyl-6-t-octylphenol, 2-isobutyl-4-ethyl -6-t-hexylphenol, 2-cyclohexyl-4-n-butyl-6-isopropylphenol, styrenated mixed cresol, DL- ⁇ -tocopherol
  • the above deterioration inhibitors can be used alone or in combination of two or more.
  • the content of the anti-deterioration agent contained in the pressure-sensitive adhesive composition is, for example, based on 100 parts by weight of the first pressure-sensitive adhesive composition from the viewpoint of suppressing deterioration such as discoloration during storage and workability of the double-sided pressure-sensitive adhesive film for transfer. , preferably 0.01 to 10 parts by weight, more preferably 0.03 to 5 parts by weight, even more preferably 0.1 to 3 parts by weight.
  • the pressure-sensitive adhesive composition that constitutes the first pressure-sensitive adhesive layer can contain any other appropriate component within a range that does not impair the effects of the present invention.
  • Such other components include, for example, tackifiers, inorganic fillers, organic fillers, metal powders, pigments, foils, softeners, plasticizers, conductive agents, surface lubricants, leveling agents, and heat-stabilizing agents. agents, polymerization inhibitors, lubricants, solvents and the like.
  • the second pressure-sensitive adhesive layer is a pressure-sensitive adhesive layer for temporarily fixing to the carrier substrate, and is composed of a peelable pressure-sensitive adhesive layer.
  • the configuration in which the second pressure-sensitive adhesive layer consists of a peelable pressure-sensitive adhesive layer is preferable in that the second pressure-sensitive adhesive layer can be peeled off from the carrier substrate without contamination such as adhesive residue, and reworkability can be improved.
  • the second pressure-sensitive adhesive layer is formed by adjusting the pressure-sensitive adhesive by adjusting the type and composition of the pressure-sensitive adhesive, the degree of cross-linking, etc., and reducing the pressure-sensitive adhesive strength by physical stimuli such as heat and electromagnetic waves such as ultraviolet rays.
  • physical stimuli such as heat and electromagnetic waves such as ultraviolet rays.
  • the adhesive strength of the second pressure-sensitive adhesive layer can be adjusted by adjusting the type and composition of the pressure-sensitive adhesive that constitutes it, the degree of cross-linking, etc., or by forming a WBL (Weak Boundary Layer) by blending a light release agent or a plasticizer. can be adjusted.
  • WBL Wood Boundary Layer
  • the thickness of the second pressure-sensitive adhesive layer is not particularly limited, but is preferably 1 ⁇ m or more, more preferably 3 ⁇ m or more. When the thickness is at least a certain value, the second pressure-sensitive adhesive layer can be stably and easily fixed to the carrier substrate, which is preferable. Moreover, although the upper limit of the thickness of the second pressure-sensitive adhesive layer is not particularly limited, it is preferably 30 ⁇ m, more preferably 20 ⁇ m. When the thickness is less than a certain value, the second pressure-sensitive adhesive layer can be easily peeled off from the carrier substrate, and reworkability is improved, which is preferable.
  • the pressure-sensitive adhesive that constitutes the second pressure-sensitive adhesive layer is not particularly limited. adhesives, polyester-based adhesives, polyamide-based adhesives, epoxy-based adhesives, vinyl alkyl ether-based adhesives, fluorine-based adhesives, and the like. Among these, silicone-based adhesives, urethane-based adhesives, and acrylic-based adhesives are preferable from the viewpoint of improving reworkability, as they can be removed from the carrier substrate without contamination such as adhesive residue, and urethane-based adhesives and acrylic adhesives are preferred. PSA is more preferred, and acrylic PSA is even more preferred.
  • the second pressure-sensitive adhesive layer in the double-sided pressure-sensitive adhesive film for transfer according to the present invention is a pressure-sensitive adhesive layer capable of intentionally reducing the pressure-sensitive adhesive force by an external action during the process of using the double-sided pressure-sensitive adhesive film for transfer (reduction of pressure-sensitive adhesive force It may be a flexible adhesive layer), or it may be an adhesive layer (adhesive strength non-reducing type adhesive layer) whose adhesive force is hardly or not reduced by external action during the use process of the double-sided adhesive film for transfer. It can be selected as appropriate according to the method, conditions, etc. for transferring an electronic component using the double-sided pressure-sensitive adhesive film for transfer according to the present invention.
  • the second pressure-sensitive adhesive layer is a pressure-sensitive adhesive layer capable of reducing the pressure-sensitive adhesive strength
  • the state in which the pressure-sensitive adhesive layer exhibits relatively high pressure-sensitive adhesive strength in the process of manufacturing or using the double-sided pressure-sensitive adhesive film for transfer according to the present invention. and a state in which the adhesive strength is relatively low can be properly used.
  • the second pressure-sensitive adhesive layer in the step of receiving the electronic component with the first pressure-sensitive adhesive layer, the second pressure-sensitive adhesive layer exhibits relatively high adhesive strength, and the carrier substrate is It is possible to suppress and prevent the transfer double-sided adhesive film from floating.
  • the reworkability can be improved by reducing the adhesive strength of the second pressure-sensitive adhesive layer.
  • Examples of adhesives that form such an adhesive layer capable of reducing adhesive strength include radiation-curable adhesives and heat-foamable adhesives.
  • the pressure-sensitive adhesive that forms the pressure-sensitive adhesive layer capable of reducing the pressure-sensitive adhesive strength can be used alone or in combination of two or more.
  • the radiation-curable adhesive for example, an adhesive that is cured by irradiation with electron beams, ultraviolet rays, ⁇ -rays, ⁇ -rays, ⁇ -rays, or X-rays can be used.
  • Adhesives ultraviolet curable adhesives
  • the same acrylic polymer as the first adhesive layer can be used as the base polymer.
  • the basic properties such as adhesiveness of the hydrocarbon group-containing (meth)acrylic acid ester are appropriately expressed in the second adhesive layer, and the adhesiveness and peelability are easily controlled.
  • the ratio of the hydrocarbon group-containing (meth)acrylic acid ester in the monomer component is preferably 40% by mass or more, more preferably 60% by mass or more.
  • the acrylic polymer may contain a hydroxy group-containing monomer.
  • the second pressure-sensitive adhesive layer tends to have an appropriate cohesive strength.
  • the proportion of the hydroxy group-containing monomer in the acrylic polymer is, for example, 0.1 to 30% by mass, preferably 0.1% by mass. 5 to 20% by mass.
  • the acrylic polymer may contain a carboxy group-containing monomer.
  • the second pressure-sensitive adhesive layer tends to have adequate adhesion reliability.
  • the proportion of the carboxy group-containing monomer in the acrylic polymer is, for example, 0.1 to 30% by mass, preferably 0.5 to 30% by mass. 20% by mass.
  • the acrylic polymer may contain a vinyl ester monomer.
  • the second pressure-sensitive adhesive layer tends to have an appropriate cohesive strength.
  • the proportion of the vinyl ester monomer in the acrylic polymer is, for example, 0.1 to 60% by mass, preferably 0.5 to 50%. % by mass.
  • the acrylic pressure-sensitive adhesive composition forming the second pressure-sensitive adhesive layer may contain a cross-linking agent.
  • the acrylic polymer can be crosslinked to further reduce low-molecular-weight substances in the second pressure-sensitive adhesive layer.
  • the cross-linking agent include polyisocyanate compounds, epoxy compounds, polyol compounds (polyphenol-based compounds, etc.), aziridine compounds, melamine compounds, and the like, and isocyanate-based cross-linking agents and/or epoxy-based cross-linking agents are preferred cross-linking agents.
  • the amount used is preferably about 10 parts by mass or less, more preferably 0.1 to 10 parts by mass, per 100 parts by mass of the acrylic polymer.
  • a cross-linking accelerator may be used in the acrylic pressure-sensitive adhesive composition forming the second pressure-sensitive adhesive layer.
  • the type of cross-linking accelerator can be appropriately selected according to the type of cross-linking agent used.
  • the term "crosslinking accelerator” refers to a catalyst that increases the speed of the cross-linking reaction by the cross-linking agent.
  • Such crosslinking accelerators include tin (Sn)-containing compounds such as dioctyltin dilaurate, dibutyltin dilaurate, dibutyltin diacetate, dibutyltin diacetylacetonate, tetra-n-butyltin, trimethyltin hydroxide;
  • Sn tin
  • examples include amines such as N',N'-tetramethylhexanediamine and triethylamine, and N-containing compounds such as imidazoles.
  • Sn-containing compounds are preferred.
  • cross-linking accelerators are particularly effective when a hydroxyl group-containing monomer is used as the secondary monomer and an isocyanate-based cross-linking agent is used as the cross-linking agent.
  • the amount of the cross-linking accelerator contained in the adhesive composition is, for example, about 0.001 to 0.5 parts by mass (preferably about 0.001 to 0.1 parts by mass with respect to 100 parts by mass of the acrylic polymer. ).
  • Examples of the radiation-polymerizable monomer component include urethane (meth)acrylate, trimethylolpropane tri(meth)acrylate, pentaerythritol tri(meth)acrylate, pentaerythritol tetra(meth)acrylate, dipentaerythritol monohydroxypenta ( meth)acrylate, dipentaerythritol hexa(meth)acrylate, 1,4-butanediol di(meth)acrylate and the like.
  • the radiation-polymerizable oligomer component examples include various oligomers such as urethane-based, polyether-based, polyester-based, polycarbonate-based, and polybutadiene-based oligomers, and those having a molecular weight of about 100 to 30,000 are preferred.
  • the content of the radiation-curable monomer component and oligomer component in the radiation-curable adhesive that forms the second adhesive layer is, for example, 5 to 500 parts by mass, preferably 40 parts by mass, with respect to 100 parts by mass of the base polymer. It is about 150 parts by mass.
  • the additive-type radiation-curable pressure-sensitive adhesive for example, one disclosed in JP-A-60-196956 may be used.
  • an internal radiation-curable adhesive containing a base polymer having a radiation-polymerizable carbon-carbon double bond or other functional group in the polymer side chain, in the polymer main chain, or at the polymer main chain end. Also included are adhesives. When such an internal radiation-curable adhesive is used, it tends to be possible to suppress unintended changes over time in adhesive properties due to migration of low-molecular-weight components within the formed second adhesive layer. be.
  • an acrylic polymer is preferable as the base polymer contained in the internal radiation-curable pressure-sensitive adhesive.
  • a method for introducing a radiation-polymerizable carbon-carbon double bond into an acrylic polymer for example, an acrylic polymer is obtained by polymerizing (copolymerizing) raw material monomers containing a monomer component having a first functional group. After that, a compound having a second functional group capable of reacting with the first functional group and a radiation polymerizable carbon-carbon double bond is added to an acrylic polymer while maintaining the radiation polymerizability of the carbon-carbon double bond. and condensation reaction or addition reaction method.
  • Combinations of the first functional group and the second functional group include, for example, a carboxy group and an epoxy group, an epoxy group and a carboxy group, a carboxy group and an aziridyl group, an aziridyl group and a carboxy group, a hydroxy group and an isocyanate group, An isocyanate group, a hydroxy group, and the like can be mentioned.
  • a combination of a hydroxy group and an isocyanate group, and a combination of an isocyanate group and a hydroxy group are preferred from the viewpoint of ease of reaction tracking.
  • the first functional group is A preferred combination is a hydroxy group and the second functional group is an isocyanate group.
  • Compounds having an isocyanate group and a radiation-polymerizable carbon-carbon double bond, that is, radiation-polymerizable unsaturated functional group-containing isocyanate compounds include, for example, methacryloyl isocyanate, 2-methacryloyloxyethyl isocyanate, m-isopropenyl- ⁇ , ⁇ -dimethylbenzyl isocyanate and the like.
  • acrylic polymer having a hydroxy group those containing structural units derived from the above-mentioned hydroxy group-containing monomers and ether compounds such as 2-hydroxyethyl vinyl ether, 4-hydroxybutyl vinyl ether, and diethylene glycol monovinyl ether. is mentioned.
  • the radiation-curable adhesive preferably contains a photopolymerization initiator.
  • the photopolymerization initiator include ⁇ -ketol compounds, acetophenone compounds, benzoin ether compounds, ketal compounds, aromatic sulfonyl chloride compounds, photoactive oxime compounds, benzophenone compounds, thioxanthone compounds, camphorquinone, halogenated ketone, acylphosphinate, acylphosphonate and the like.
  • Examples of the ⁇ -ketol compounds include 4-(2-hydroxyethoxy)phenyl(2-hydroxy-2-propyl)ketone, ⁇ -hydroxy- ⁇ , ⁇ '-dimethylacetophenone, 2-methyl-2-hydroxy propiophenone, 1-hydroxycyclohexylphenyl ketone, and the like.
  • Examples of the acetophenone compounds include methoxyacetophenone, 2,2-dimethoxy-2-phenylacetophenone, 2,2-diethoxyacetophenone, 2-methyl-1-[4-(methylthio)-phenyl]-2 -Morpholinopropane-1 and the like.
  • Examples of the benzoin ether compounds include benzoin ethyl ether, benzoin isopropyl ether, and anisoin methyl ether.
  • Examples of the ketal compounds include benzyl dimethyl ketal.
  • Examples of the aromatic sulfonyl chloride compounds include 2-naphthalenesulfonyl chloride.
  • Examples of the photoactive oxime compound include 1-phenyl-1,2-propanedione-2-(O-ethoxycarbonyl)oxime.
  • Examples of the benzophenone-based compounds include benzophenone, benzoylbenzoic acid, and 3,3'-dimethyl-4-methoxybenzophenone.
  • thioxanthone compounds include thioxanthone, 2-chlorothioxanthone, 2-methylthioxanthone, 2,4-dimethylthioxanthone, isopropylthioxanthone, 2,4-dichlorothioxanthone, 2,4-diethylthioxanthone, and 2,4-diisopropyl. thioxanthone and the like.
  • the content of the photopolymerization initiator in the radiation-curable adhesive is, for example, 0.05 to 20 parts by weight with respect to 100 parts by weight of the base polymer.
  • the heat-expandable pressure-sensitive adhesive is a pressure-sensitive adhesive containing components that foam or expand when heated (foaming agent, thermally expandable microspheres, etc.).
  • foaming agent include various inorganic foaming agents and organic foaming agents.
  • the inorganic foaming agent include ammonium carbonate, ammonium hydrogencarbonate, sodium hydrogencarbonate, ammonium nitrite, sodium borohydride, and azides.
  • organic foaming agent examples include alkane hydrochlorides such as trichloromonofluoromethane and dichloromonofluoromethane; azo compounds such as azobisisobutyronitrile, azodicarbonamide, and barium azodicarboxylate; and paratoluene.
  • alkane hydrochlorides such as trichloromonofluoromethane and dichloromonofluoromethane
  • azo compounds such as azobisisobutyronitrile, azodicarbonamide, and barium azodicarboxylate
  • paratoluene examples include paratoluene.
  • Hydrazine compounds such as sulfonyl hydrazide, diphenylsulfone-3,3'-disulfonyl hydrazide, 4,4'-oxybis(benzenesulfonylhydrazide), allylbis(sulfonylhydrazide); p-toluylenesulfonyl semicarbazide, 4,4'- Semicarbazide compounds such as oxybis (benzenesulfonyl semicarbazide); triazole compounds such as 5-morpholyl-1,2,3,4-thiatriazole; N,N'-dinitrosopentamethylenetetramine, N,N'-dimethyl- Examples include N-nitroso compounds such as N,N'-dinitrosoterephthalamide.
  • heat-expandable microspheres examples include microspheres having a structure in which a substance that easily gasifies and expands upon heating is encapsulated in the shell.
  • Isobutane, propane, pentane, and the like are examples of substances that easily gasify and expand when heated.
  • Thermally expandable microspheres can be produced by encapsulating a substance that is easily gasified and expanded by heating in a shell-forming substance by a coacervation method, an interfacial polymerization method, or the like.
  • the shell-forming substance a substance exhibiting thermal melting properties and a substance capable of bursting due to the action of thermal expansion of the enclosed substance can be used.
  • Examples of such substances include vinylidene chloride-acrylonitrile copolymer, polyvinyl alcohol, polyvinyl butyral, polymethyl methacrylate, polyacrylonitrile, polyvinylidene chloride, polysulfone, and the like.
  • non-reducing adhesive layer examples include a pressure-sensitive adhesive layer.
  • a pressure-sensitive adhesive layer an adhesive layer formed from the radiation-curable adhesive described above with respect to the adhesive force-reducing adhesive layer is cured by irradiation in advance and has a certain adhesive force.
  • An adhesive layer is included.
  • the pressure-sensitive adhesives forming the non-reducing pressure-sensitive adhesive layer can be used alone or in combination of two or more.
  • the whole second pressure-sensitive adhesive layer may be a non-adhesive force-reducing pressure-sensitive adhesive layer, or a part thereof may be a non-adhesive force-reducing pressure-sensitive adhesive layer.
  • the entire second pressure-sensitive adhesive layer may be a non-adhesion-reducing pressure-sensitive adhesive layer, or a specific portion of the second pressure-sensitive adhesive layer may It may be a non-reducing type pressure-sensitive adhesive layer and the other portion may be a pressure-sensitive adhesive layer capable of reducing the pressure-sensitive adhesive force.
  • all the pressure-sensitive adhesive layers in the laminated structure may be non-adhesive strength-reducing pressure-sensitive adhesive layers, or some of the pressure-sensitive adhesive layers in the laminated structure may be adhesive layers. It may be a non-force-reducing pressure-sensitive adhesive layer.
  • the pressure-sensitive adhesive layer formed by pre-curing the pressure-sensitive adhesive layer (radiation-unexposed radiation-curable pressure-sensitive adhesive layer) formed from a radiation-curable pressure-sensitive adhesive by irradiation with radiation Even if the adhesive strength is reduced by irradiation, it exhibits adhesiveness due to the contained polymer component, and it is possible to exhibit the minimum required adhesive strength for the double-sided adhesive film for transfer according to the present invention.
  • the entire second pressure-sensitive adhesive layer may be the irradiated radiation-curable pressure-sensitive adhesive layer in the surface spreading direction of the second pressure-sensitive adhesive layer.
  • a portion of the agent layer may be a radiation-curable pressure-sensitive adhesive layer that has been exposed to radiation, and the other portion may be a radiation-curable pressure-sensitive adhesive layer that has not been exposed to radiation.
  • radiation-curable pressure-sensitive adhesive layer refers to a pressure-sensitive adhesive layer formed from a radiation-curable pressure-sensitive adhesive. It includes both the radiation-cured radiation-curable pressure-sensitive adhesive layer after the agent layer has been cured by irradiation.
  • the adhesive that forms the pressure-sensitive adhesive layer a known or commonly used pressure-sensitive adhesive can be used, and an acrylic adhesive that uses an acrylic polymer as a base polymer can be preferably used.
  • the acrylic polymer is a polymer containing the structural unit derived from (meth)acrylic acid ester as the largest structural unit in terms of mass ratio. is preferred.
  • the acrylic polymer for example, the acrylic polymer described as the acrylic polymer that can be included in the additive-type radiation-curable pressure-sensitive adhesive can be employed.
  • the substrate in the double-sided pressure-sensitive adhesive film for transfer according to the present invention is an element that functions as a support in the first pressure-sensitive adhesive layer and the second pressure-sensitive adhesive layer.
  • Substrates include, for example, plastic substrates (especially plastic films).
  • the base material may be a single layer or a laminate of the same or different base materials.
  • Examples of the resin constituting the plastic substrate include low-density polyethylene, linear low-density polyethylene, medium-density polyethylene, high-density polyethylene, ultra-low-density polyethylene, random copolymerized polypropylene, block copolymerized polypropylene, and homopolypropylene.
  • polybutene polymethylpentene, ethylene-vinyl acetate copolymer (EVA), ionomer, ethylene-(meth)acrylic acid copolymer, ethylene-(meth)acrylic acid ester (random, alternating) copolymer, ethylene- Polyolefin resins such as butene copolymers and ethylene-hexene copolymers; polyurethanes; polyesters such as polyethylene terephthalate (PET), polyethylene naphthalate, and polybutylene terephthalate (PBT); polycarbonates; polyimides; polyamide such as aramid and wholly aromatic polyamide; polyphenyl sulfide; fluorine resin; polyvinyl chloride; polyvinylidene chloride; cellulose resin;
  • EVA ethylene-vinyl acetate copolymer
  • EVA ethylene-vinyl acetate copolymer
  • ionomer ethylene-(meth)acrylic
  • the heat-resistant resin such as polyimide (PI), polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyamide (PA), polyetheretherketone (PEEK), etc. It preferably contains polyimide as a main component, and more preferably contains polyimide as a main component. In addition, let the main component of a base material be a component which occupies the largest mass ratio in a structural component. The above resins may be used alone or in combination of two or more.
  • the second pressure-sensitive adhesive layer is a radiation-curable pressure-sensitive adhesive layer as described above, the substrate preferably has radiation transparency.
  • the plastic film may be non-oriented, or may be oriented in at least one direction (uniaxial direction, biaxial direction, etc.). It is preferable because it is difficult to exhibit contractility.
  • the first pressure-sensitive adhesive layer and/or the second pressure-sensitive adhesive layer side surface of the base material may be subjected to, for example, corona discharge treatment, plasma treatment, sand matting treatment, Physical treatments such as ozone exposure treatment, flame exposure treatment, high voltage shock exposure treatment, and ionizing radiation treatment; chemical treatment such as chromic acid treatment; coating agent (undercoat); surface treatment such as easy adhesion treatment by silicone primer treatment. may be applied.
  • a conductive deposition layer containing a metal, an alloy, an oxide thereof, or the like may be provided on the substrate surface, or a conductive polymer such as PEDOT-PSS may be coated.
  • the surface treatment for enhancing adhesion is preferably applied to the entire surface of the adhesive layer side of the substrate.
  • the thickness of the substrate is preferably 5 ⁇ m or more, more preferably 10 ⁇ m or more, still more preferably 10 ⁇ m or more, from the viewpoint of ensuring strength for the substrate to function as a support in the double-sided pressure-sensitive adhesive film for transfer according to the present invention. 15 ⁇ m or more, particularly preferably 20 ⁇ m or more. From the viewpoint of achieving appropriate flexibility in the double-sided pressure-sensitive adhesive film for transfer according to the present invention, the thickness of the substrate is preferably 200 ⁇ m or less, more preferably 180 ⁇ m or less, and still more preferably 150 ⁇ m or less. .
  • ⁇ Separator> The pressure-sensitive adhesive layer surfaces (the pressure-sensitive adhesive surfaces of the first pressure-sensitive adhesive layer and the second pressure-sensitive adhesive layer) of the double-sided pressure-sensitive adhesive film for transfer according to the present invention are protected by a release liner (separator) until use.
  • the separator is used as a protective material for the pressure-sensitive adhesive layer, and is peeled off when the pressure-sensitive adhesive film is attached to the adherend.
  • a conventional release paper or the like can be used.
  • a fluoropolymer e.g., polytetrafluoroethylene, Low-adhesive substrates made of polychlorotrifluoroethylene, polyvinyl fluoride, polyvinylidene fluoride, tetrafluoroethylene-hexafluoropropylene copolymer, chlorofluoroethylene-vinylidene fluoride copolymer, etc.
  • non-polar polymers for example, a low-adhesive base material made of olefin resins such as polyethylene and polypropylene can be used.
  • a separator having a release layer formed on at least one surface of a separator substrate can be suitably used.
  • Base materials for such separators include polyester films (polyethylene terephthalate films, etc.), olefin resin films (polyethylene films, polypropylene films, etc.), polyvinyl chloride films, polyimide films, polyamide films (nylon films), rayon films, and the like.
  • plastic base film synthetic resin film
  • paper wooden paper, Japanese paper, kraft paper, glassine paper, synthetic paper, top coat paper, etc.
  • these are multi-layered by lamination or co-extrusion. (composite of 2 to 3 layers) and the like.
  • the release agent that constitutes the release layer is not particularly limited, but for example, a silicone-based release agent, a fluorine-based release agent, a long-chain alkyl-based release agent, a fatty acid amide-based release agent, or the like can be used. Among them, a silicone-based release agent is preferable.
  • the release agents can be used alone or in combination of two or more. Since the first pressure-sensitive adhesive layer is composed of a low-adhesive pressure-sensitive adhesive layer, it is also possible to use a base material that has not been treated with a release treatment agent as a separator.
  • the thickness of the release layer of the first separator is preferably 10 to 2000 nm, more preferably 20 to 500 nm, and even more preferably 30 nm, from the viewpoint of keeping F(1) and T(1) within the numerical ranges described above. to 150 nm, particularly preferably 40 to 80 nm.
  • the thickness of the release layer of the second separator is preferably 10 to 2000 nm from the viewpoint that F(2), P(2), P'(2) and T(2) are within the numerical ranges described above. It is more preferably 30 to 500 nm, still more preferably 50 to 250 nm, particularly preferably 70 to 150 nm.
  • the thickness of the release layer of the first separator is preferably less than the thickness of the release layer of the second separator.
  • the separator may have an antistatic layer formed on at least one surface of the separator substrate in order to prevent adverse effects on electronic components.
  • the antistatic layer may be formed on one side of the separator (release-treated side or untreated side) or may be formed on both sides of the separator (release-treated side and untreated side).
  • Antistatic agents contained in the antistatic resin include quaternary ammonium salts, pyridinium salts, cationic antistatic agents having cationic functional groups such as primary, secondary and tertiary amino groups, and sulfonates. and anionic antistatic agents having anionic functional groups such as sulfates, phosphonates and phosphates, alkylbetaines and derivatives thereof, imidazoline and derivatives thereof, amphoteric antistatic agents such as alanine and derivatives thereof, Nonionic antistatic agents such as aminoalcohols and derivatives thereof, glycerin and derivatives thereof, polyethylene glycol and derivatives thereof, and monomers having cationic, anionic, and zwitterionic ion conductive groups are polymerized or An ion-conductive polymer obtained by copolymerization can be mentioned. These compounds can be used alone or in combination of two or more.
  • the thickness of the first separator is preferably 1 to 150 ⁇ m, more preferably 5 to 100 ⁇ m, still more preferably 10 to 80 ⁇ m, from the viewpoint of keeping F(1) and T(1) within the numerical ranges described above. .
  • the thickness of the second separator is preferably 10 to 150 ⁇ m, more preferably 15 ⁇ m, from the viewpoint of keeping F(2), P(2), P′(2) and T(2) within the numerical ranges described above. ⁇ 100 ⁇ m, more preferably 20-80 ⁇ m.
  • the method for producing the laminated film according to the present invention varies depending on the composition of the pressure-sensitive adhesive composition, etc., and is not particularly limited, and known forming methods can be used. and other methods.
  • the adhesive composition is applied (coated) on a substrate to form a composition layer, and the composition layer is cured (for example, cured by heat curing or irradiation with active energy rays such as ultraviolet rays).
  • the adhesive composition is applied (coated) on a separator to form a composition layer, and the composition layer is cured (for example, A method of producing an adhesive film by forming an adhesive layer by heat curing or curing by irradiation with active energy rays such as ultraviolet rays, and then transferring the adhesive layer onto a substrate to produce an adhesive film (3). , A method of producing an adhesive film by coating (coating) on a substrate and drying to form an adhesive layer. (4) The adhesive composition is coated (coated) on a separator and dried. A method of producing an adhesive film by forming an adhesive layer with a method of transferring the adhesive layer onto a substrate
  • a heat curing method is preferable in terms of excellent productivity and in terms of forming a uniform pressure-sensitive adhesive layer with a smooth surface.
  • a known coating method can be employed, and is not particularly limited, but examples include roll coating, kiss roll coating, gravure coating, and reverse coating. , roll brush, spray coating, dip roll coating, bar coating, knife coating, air knife coating, curtain coating, lip coating, and extrusion coating using a die coater.
  • the thickness (total thickness) of the double-sided pressure-sensitive adhesive film for transfer according to the present invention is not particularly limited, but is preferably 10 ⁇ m or more, more preferably 15 ⁇ m or more. When the thickness is at least a certain value, the first pressure-sensitive adhesive layer can easily receive electronic components with high accuracy, which is preferable.
  • the upper limit of the thickness (total thickness) of the double-sided pressure-sensitive adhesive film for transfer according to the present invention is not particularly limited, but is preferably 500 ⁇ m, more preferably 300 ⁇ m. When the thickness is less than a certain value, the electronic component can be easily transferred to the mounting substrate with high accuracy, which is preferable.
  • the double-sided pressure-sensitive adhesive film for transfer according to the present invention is suitably used in a method for mounting electronic components onto a mounting substrate.
  • a method for mounting an electronic component on a mounting substrate using the transfer double-sided pressure-sensitive adhesive film according to the present invention preferably includes the following steps.
  • FIG. 2 is a schematic cross-sectional view showing an embodiment of the first step in a method for mounting an electronic component onto a mounting substrate using the transfer double-sided pressure-sensitive adhesive film according to the present invention.
  • the transfer double-sided adhesive film 1 is attached to the carrier substrate 22 with the adhesive surface of the second adhesive layer 12 .
  • a marking pattern for arranging electronic components may be provided on the surface of the carrier substrate 22 that is adhered to the second adhesive layer 12 . Since the transfer double-sided pressure-sensitive adhesive film 1 has high transparency, the marking pattern applied to the carrier substrate 22 can be visually recognized.
  • a plurality of electronic components 21 separated into individual pieces by dicing are attached to the dicing tape 20, and the first adhesive layer is formed. 11 and are spaced apart from each other.
  • the electronic component 21 is pushed by the pin member 23 from the side of the dicing tape 20 to which the electronic component 21 is not attached, and the electronic component 21 is brought close to the adhesive surface of the first adhesive layer 11. , the adhesive surface of the first adhesive layer 11 receives.
  • the receiving may be performed by bringing the electronic component 21 into contact with the first adhesive layer 11 or may be performed without contact.
  • the electronic component 21 is pushed until the electronic component 21 is separated from the dicing tape 20 and dropped onto the adhesive surface of the electronic component 21 .
  • the stress applied when the electronic component 21 is received is weak, so damage to the electronic component 21 can be suppressed.
  • the adhesive surface of the first adhesive layer 11 has low adhesiveness, so the dropped electronic component 21 can be caught with high positional accuracy.
  • the electronic component 21 may be peeled off from the dicing tape 20 by irradiating radiation such as ultraviolet rays or laser beams instead of the pin member 23 .
  • FIG. 2(c) is a schematic cross-sectional view showing a state in which all the electronic components 21 of the dicing tape 20 are received on the adhesive surface of the first adhesive layer 11 of the transfer double-sided adhesive film 1.
  • FIG. 3 is a schematic cross-sectional view showing the second step in the method of mounting an electronic component onto a mounting substrate using the double-sided pressure-sensitive adhesive film for transfer according to the present invention.
  • FIG. 3( a ) they are arranged on the adhesive surface of the first adhesive layer 11 of the transfer double-sided adhesive film 1 so as to face the circuit surface 31 (the circuit pattern is not shown) of the mounting substrate 30 , while being spaced apart. Then, the electronic component 21 is arranged. Next, as shown in FIG. 4B, the circuit surface 31 of the mounting substrate 30 and the electronic components 21 arranged on the adhesive surface of the first adhesive layer 11 of the transfer double-sided adhesive film 1 are brought close to each other, The electronic component 21 and the circuit surface 31 of the mounting board 30 are brought into contact with each other.
  • the transfer of the electronic component 21 to the circuit surface 31 of the mounting substrate 30 may be performed by thermocompression bonding (for example, 150° C. for 1 minute). Since the substrate 10, the first adhesive layer 11, and/or the second adhesive layer 12, which constitute the transfer double-sided adhesive film 1, are excellent in heat resistance, they expand, contract, and adhere to each other by thermocompression. is less likely to change, the electronic component 21 can be transferred onto the circuit surface 31 of the mounting board 30 with high accuracy.
  • the electronic component 21 is peeled off from the first adhesive layer 11, and the circuit surface 31 of the mounting substrate 30 is removed. transcribed to Since the first adhesive layer 11 is composed of a low-adhesive adhesive layer, the electronic component 21 can be easily peeled off and efficiently mounted on the mounting substrate 30 without damaging the electronic component 21. .
  • the transfer double-sided adhesive film 1 in FIG. 3(c) after the electronic component 21 has been mounted on the mounting board 30 may be peeled off from the carrier board 22 (not shown). Since the second pressure-sensitive adhesive layer 12 is composed of a peelable pressure-sensitive adhesive layer, it can be peeled off without leaving an adhesive residue and is excellent in reworkability, so that the carrier substrate 22 can be easily reused.
  • the electronic component to be mounted on the mounting board is not particularly limited, but it can be suitably used for fine and thin semiconductor chips and LED chips.
  • Silicone release agent manufactured by Shin-Etsu Chemical Co., Ltd., KS-847: 100 parts by weight, catalyst (manufactured by Shin-Etsu Chemical Co., Ltd., CAT-PL-50T): 3.0 weight A part thereof was diluted with toluene to 1.0% by weight to obtain a silicone-based stripping liquid.
  • the resulting silicone-based release treatment liquid was applied to the surface of a base film (thickness 50 ⁇ m, trade name “Diafoil T100-50S”, manufactured by Mitsubishi Chemical Corporation) as a release layer, and the thickness after drying with a wire bar.
  • a separator (1) consisting of a laminate of
  • ⁇ Production Example 4 Production of separator (2) Using a base film (thickness 25 ⁇ m, trade name “Diafoil T100-25”, manufactured by Mitsubishi Chemical Corporation), the release layer has a thickness of 100 nm after drying.
  • a separator (2) consisting of a laminate of [release layer (thickness: 100 nm, release treatment B)]/[base material layer] was produced in the same manner as in Production Example 3 except that the coating was performed in the above manner.
  • separators used as the second separator were produced by changing the thickness of the base film as shown in Table 1.
  • Silicone adhesive (addition reaction type silicone adhesive, trade name "X-40-3306", manufactured by Shin-Etsu Chemical Co., Ltd.) 100 parts by weight, platinum catalyst 1 (trade name "CAT-PL-50T”, Shin-Etsu Chemical Co., Ltd.) 1.4 parts by weight, silicone-based release agent 1 (addition reaction type silicone-based release agent containing dimethylpolysiloxane as a main component, trade name “KS-776A” and Shin-Etsu Chemical Co., Ltd. ) was added, diluted with toluene so that the total solid content was 25% by weight, and mixed with a disper to prepare a silicone pressure-sensitive adhesive composition.
  • a base film (polyester film with one side treated with a silicone primer, thickness 75 ⁇ m, trade name "Diafoil MRF #75", manufactured by Mitsubishi Plastics Co., Ltd.) was coated with a silicone-based pressure-sensitive adhesive composition on the silicone-primed side.
  • the product was applied so that the glue thickness after drying was 10 ⁇ m, and cured by drying under the conditions of a drying temperature of 120° C. and a drying time of 5 minutes.
  • a film having a silicone pressure-sensitive adhesive layer on the silicone primer-treated layer of the base film was obtained.
  • the release layer side of the separator (1) produced in Production Example 3 is attached to the silicone-based pressure-sensitive adhesive layer to protect it, [first separator layer] / [silicone-based pressure-sensitive adhesive layer] / A laminate (1) having a laminate structure of [base film layer] was obtained.
  • TETRAD-C manufactured by Mitsubishi Gas Chemical Co., Ltd.
  • a cross-linking agent is added to 100 parts by weight of the solid content in terms of solid content.
  • 6 parts by weight of the second separator (separator (2)) diluted with ethyl acetate so that the total solid content is 25% by weight, and stirred with a disper. It was coated on the release layer side with a fountain roll so as to have a thickness of 5 ⁇ m after drying, and cured and dried under the conditions of a drying temperature of 130° C. and a drying time of 30 seconds.
  • an acrylic pressure-sensitive adhesive layer (1) was formed on the second separator.
  • the base film side (silicone primer-untreated surface) of the laminate (1) obtained above is attached to the surface of the acrylic pressure-sensitive adhesive layer (1), [first separator layer] / [silicone-based A laminated film having a laminated structure of adhesive layer (first adhesive layer)]/[base film layer]/[acrylic adhesive (1) layer (second adhesive layer)]/[second separator layer] got
  • Example 2 The thickness of the adhesive after drying the silicone-based pressure-sensitive adhesive in the first pressure-sensitive adhesive layer is set to 25 ⁇ m, and the base film in the separator (2) is used instead of the separator (2) for the second separator (thickness 38 ⁇ m, product A laminated film was obtained in the same manner as in Example 1, except that a separator changed to the name "Diafoil T100C38" (manufactured by Mitsubishi Chemical Corporation) was used.
  • Example 3 The thickness of the adhesive after drying the silicone-based pressure-sensitive adhesive in the first pressure-sensitive adhesive layer is 50 ⁇ m, and the second separator is replaced with the base film (thickness 50 ⁇ m, commercial product) in place of the separator (2).
  • a laminate film was obtained in the same manner as in Example 1, except that a separator changed to the name "Diafoil T100-50S" (manufactured by Mitsubishi Chemical Corporation) was used.
  • Example 4 The thickness of the adhesive after drying the silicone-based pressure-sensitive adhesive in the first pressure-sensitive adhesive layer is set to 75 ⁇ m, and the base film in the separator (2) is used instead of the separator (2) for the second separator (thickness 75 ⁇ m, product A laminated film was obtained in the same manner as in Example 1, except that a separator with the name "Diafoil T100-75S" (manufactured by Mitsubishi Chemical Corporation) was used.
  • Example 5 A laminate film was obtained in the same manner as in Example 1, except that the adhesive thickness of the silicone-based pressure-sensitive adhesive in the first pressure-sensitive adhesive layer after drying was 50 ⁇ m, and the separator (2) was used as the first separator.
  • Example 6> A laminated film was obtained in the same manner as in Example 5, except that the adhesive thickness of the silicone adhesive in the first adhesive layer after drying was 75 ⁇ m.
  • Example 7 The adhesive thickness of the silicone adhesive in the first adhesive layer after drying is 25 ⁇ m, the separator (3) is used as the first separator, and the acrylic adhesive (1) is replaced with the acrylic adhesive for the first adhesive layer.
  • a laminated film was obtained in the same manner as in Example 1, except that the adhesive (2) was used.
  • Example 8> A laminated film was obtained in the same manner as in Example 7, except that the adhesive thickness of the silicone-based pressure-sensitive adhesive in the first pressure-sensitive adhesive layer after drying was 50 ⁇ m.
  • Example 9 A laminated film was obtained in the same manner as in Example 7, except that the adhesive thickness of the silicone-based pressure-sensitive adhesive in the first pressure-sensitive adhesive layer after drying was 75 ⁇ m.
  • the separator of the second pressure-sensitive adhesive layer was peeled off, and the pressure was applied at 23°C and 50% R.I. H.
  • the surface of the second adhesive layer was laminated to a glass plate (trade name “S200423”, manufactured by Matsunami Glass Industry Co., Ltd.) with a roller of 0.25 MPa and 0.3 m / min, and then a universal tensile tester (product Using the name "TCM-1kNB", manufactured by Minebea Co., Ltd.), the peeling force F ( 1) was measured.
  • the separator of the first pressure-sensitive adhesive layer was peeled off and placed at 23°C and 50% R.I. H.
  • the surface of the first adhesive layer was laminated to a glass plate (trade name “S200423”, manufactured by Matsunami Glass Industry Co., Ltd.) with a roller of 0.25 MPa and 0.3 m / min, and then a universal tensile tester (product Using the name "TCM-1kNB", manufactured by Minebea Co., Ltd.), the peeling force F ( 2) was measured.
  • the surface of the second adhesive layer from which the separator of the evaluation sample has been peeled is applied to a glass plate (trade name “S200423”, manufactured by Matsunami Glass Industry Co., Ltd.) with a roller of 0.25 MPa and 0.3 m / min.
  • a glass plate trade name “S200423”, manufactured by Matsunami Glass Industry Co., Ltd.
  • TCM-1kNB universal tensile tester
  • the second adhesive was applied from the glass plate at a peeling angle of 180 degrees and a tensile speed of 0.3 m / min.
  • the peel adhesion P(2) was measured by peeling off the agent layer.
  • the surface of the second adhesive layer from which the separator of the evaluation sample has been peeled is applied to a glass plate (trade name “S200423”, manufactured by Matsunami Glass Industry Co., Ltd.) with a roller of 0.25 MPa and 0.3 m / min. Affixed and cured for 30 minutes.
  • the separator of the second adhesive layer is peeled off, and the surface of the second adhesive layer is applied to a glass plate (trade name “S200423”, manufactured by Matsunami Glass Industry Co., Ltd.) at 23 ° C. and 50% at 0.25 MPa and 0.3 m. /min, then 23°C, 50% R.I. H. 315 (trade name, 19 mm width, manufactured by Nitto Denko Corporation) was crimped to the center of the back surface of the surface protection film in the width direction with a hand roller.
  • a glass plate trade name “S200423”, manufactured by Matsunami Glass Industry Co., Ltd.
  • the first separator was peeled from the first pressure-sensitive adhesive layer under the conditions of a tensile speed of 0.3 m / min and a peeling angle of 90 degrees, and the maximum stress applied at the beginning of peeling was the trigger peel strength T (1) [N / 50 mm].
  • the separator of the second pressure-sensitive adhesive layer was peeled off, and the pressure was applied at 23°C and 50% R.I. H.
  • the surface of the second pressure-sensitive adhesive layer was laminated to a glass plate (trade name “S200423”, manufactured by Matsunami Glass Industry Co., Ltd.) with a roller of 0.25 MPa and 0.3 m / min, and then 23 ° C. ⁇ 50% R . H. 315 (trade name, 19 mm width, manufactured by Nitto Denko Corporation) is crimped to the center of the back of the surface protective film in the width direction with a hand roller.
  • the second separator was peeled from the second pressure-sensitive adhesive layer under the conditions of a tensile speed of 0.3 m / min and a peeling angle of 90 degrees, and the maximum stress applied at the beginning of peeling was the trigger peel strength T (2) [N / 50 mm].
  • the separator of the second pressure-sensitive adhesive layer was peeled off, and the pressure was applied at 23°C and 50% R.I. H.
  • the surface of the second adhesive layer was attached to a glass plate (trade name "S200423", manufactured by Matsunami Glass Industry Co., Ltd.) with a roller of 0.25 MPa and 0.3 m / min, and then the right angle part of the evaluation sample 23° C., 50% R.I. H.
  • the first separator was peeled from the first pressure-sensitive adhesive layer at a peel angle of 180 degrees and a peel speed of 0.3 m/min, and the peelability of the first separator was evaluated according to the following criteria.
  • the evaluation sample was fixed by placing it on the adsorption stage with the first separator side down and sucking it.
  • An acrylic adhesive tape (trade name: "NO.31B", manufactured by Nitto Denko Corporation) was pressed with a hand roller to the right-angled part of the fixed sample for evaluation, and was held at 23°C and 50% RH. H.
  • the second separator was peeled from the second pressure-sensitive adhesive layer at a peel angle of 180 degrees and a peel speed of 0.3 m/min, and the peelability of the second separator was evaluated according to the following criteria.

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Abstract

Provided is a laminated film capable of improving work efficiency in a process for producing a semiconductor device. The laminated film according to the present invention is such that a first separator, a first adhesive layer composed of a low-tack adhesive layer, a base material, a second adhesive layer composed of a releasable adhesive layer, and a second separator are laminated in the stated order, the 180° peeling peel strength F(1), F(2) of the first and second separators with respect to the first and second adhesive layers, the 180° peeling adhesive strength P(2) of the second adhesive layer with respect to a glass plate, and 180° peeling adhesive strength P'(2) after five minutes at 160°C (N/50 mm) satisfying the following formulas. F(2)≤F(1) P(2)≥F(1) P'(2)/P(2)<1.20P'(2)<1.00 Because "F(1)≤F(2)" in claim 1 is a typographical error for "F(2)≤F(1)" in view of the descriptions in paragraphs [0009], [0015], and [0018]-[0022], the examples, and claim 2, the examination was conducted using the reading "F(2)≤F(1)."

Description

積層フィルムlaminated film
 本発明は、積層フィルムに関する。 The present invention relates to laminated films.
 半導体装置の製造過程においては、一般に、ダイシングテープ上に仮固定した状態で半導体ウェハをダイシングにより個片化し、個片化された半導体チップはウェハ裏面のダイシングテープ側からピン部材により突き押して、コレットと呼ばれる吸着治具によりピックアップし、回路基板などの実装基板に実装されている(例えば、特許文献1)。 In the manufacturing process of a semiconductor device, generally, a semiconductor wafer is singulated by dicing in a state of being temporarily fixed on a dicing tape, and the singulated semiconductor chips are pushed by a pin member from the dicing tape side of the back surface of the wafer to form a collet. It is picked up by a suction jig called and mounted on a mounting board such as a circuit board (for example, Patent Document 1).
特開2019-9203号公報Japanese Patent Application Laid-Open No. 2019-9203
 しかし、微細加工技術の進歩により半導体チップの微小化、薄型化が進んでおり、コレットでピックアップする際に半導体チップが損傷しやすくなっている。また、半導体装置の小型化、多層化が進んでおり、多数の微細な半導体チップを実装基板上に密に多層実装することも要求されており、コレットでピックアップして個別に実装する方法は、効率の悪いものとなりつつある。 However, due to advances in microfabrication technology, semiconductor chips are becoming smaller and thinner, making it easier for semiconductor chips to be damaged when picked up by a collet. In addition, semiconductor devices are becoming more compact and multi-layered, and there is a demand for dense multi-layer mounting of a large number of fine semiconductor chips on a mounting substrate. It is becoming inefficient.
 このような半導体チップの損傷や実装の効率の悪さを解消するための方法として、例えば、キャリア基板に仮固定した転写用両面粘着フィルム上に、ダイシングにより個片化された複数の電子部品を受け取ってから、これらを一括して実装基板に転写するという方法が考えられる。 As a method for eliminating such damage to semiconductor chips and inefficiency in mounting, for example, a plurality of electronic components separated into individual pieces by dicing are received on a transfer double-sided adhesive film temporarily fixed to a carrier substrate. Then, a method of collectively transferring them to the mounting board is conceivable.
 しかしながら、このような方法では、転写用両面粘着フィルムの両面がセパレータで保護された積層フィルムにおいて、粘着面の表面保護フィルム(セパレータ)の剥離処理にミスが生じたり、キャリア基板へ貼り付けた後に表面保護フィルム(セパレータ)を剥離する際にキャリア基板から浮きが生じたり、回収する際に転写用両面粘着フィルムがキャリア基板から剥がれにくかったり、また、糊残りが生じたりするなど、作業効率を低下させる問題が生じやすい。 However, in such a method, in the laminated film in which both sides of the double-sided adhesive film for transfer are protected by separators, mistakes may occur in the peeling process of the surface protective film (separator) on the adhesive surface, or after pasting to the carrier substrate. Work efficiency is reduced because the surface protective film (separator) lifts from the carrier substrate when peeled off, the transfer double-sided adhesive film is difficult to peel off from the carrier substrate when collecting, and adhesive residue is left behind. problems can arise.
 本発明は上記の問題に鑑みてなされたものであり、その目的は、キャリア基板に仮固定して半導体チップ等を受け取る際のセパレータの剥離処理にミスが生じず、半導体チップ等を実装基板に転写する際にキャリア基板から剥がれず、かつ、半導体チップ等を実装基板に転写した後にキャリア基板から剥がす際に糊残り等の汚染がなく剥離することができリワーク性に優れる積層フィルムを提供することにある。 The present invention has been made in view of the above-mentioned problems, and its object is to prevent mistakes from occurring in the peeling process of the separator when temporarily fixing the semiconductor chip or the like to the carrier substrate to receive the semiconductor chip or the like on the mounting substrate. To provide a laminated film excellent in reworkability which is not peeled off from a carrier substrate when transferred, can be peeled off from the carrier substrate without contamination such as adhesive residue when peeled from the carrier substrate after transferring a semiconductor chip or the like to a mounting substrate, and has excellent reworkability. It is in.
 本発明者らは、上記目的を達成するため鋭意検討した結果、表面保護フィルム(第1セパレータ)と、半導体チップ等の微細な電子部品を仮固定するための第1粘着剤層と、基材と、キャリア基板に仮固定するための第2粘着剤層と、表面保護フィルム(第2セパレータ)とを有し、第1粘着剤層に対する上記第1セパレータの剥離力F(1)、第2粘着剤層に対する上記第2セパレータの剥離力F(2)、ガラス板に対する第2粘着剤層の粘着力P(2)、および、ガラス板に貼付して160℃で5分経過した後のガラス板に対する第2粘着剤層の粘着力P’(2)について特定の関係を満たす積層フィルムを用いると、キャリア基板へ貼り付けて電子部品を仮固定する際にセパレータの剥離にミスが生じず、電子部品を実装基板に転写する際にキャリア基板から剥がれず、かつ、電子部品を実装基板に転写した後にキャリア基板から剥がす際に剥がれやすく糊残りを抑制できることを見出した。本発明は、これらの知見に基づいて完成されたものである。 The present inventors have made intensive studies to achieve the above object, and found that a surface protective film (first separator), a first adhesive layer for temporarily fixing fine electronic components such as semiconductor chips, and a substrate and a second adhesive layer for temporarily fixing to the carrier substrate, and a surface protection film (second separator), the peeling force F (1) of the first separator with respect to the first adhesive layer, the second The peeling force F (2) of the second separator to the adhesive layer, the adhesive force P (2) of the second adhesive layer to the glass plate, and the glass after 5 minutes at 160 ° C. after being attached to the glass plate Using a laminated film that satisfies a specific relationship for the adhesive strength P'(2) of the second pressure-sensitive adhesive layer to the plate prevents mistakes in peeling off the separator when temporarily fixing the electronic component by attaching it to the carrier substrate. It has been found that the electronic component is not peeled off from the carrier substrate when transferred to the mounting substrate, and is easy to peel off when peeled from the carrier substrate after transferring the electronic component to the mounting substrate, thereby suppressing adhesive residue. The present invention has been completed based on these findings.
 すなわち、本発明は、第1セパレータと、第1粘着剤層と、基材と、第2粘着剤層と、第2セパレータとがこの順に積層された積層フィルムであり、上記第1粘着剤層は、低粘着性粘着剤層からなり、上記第2粘着剤層は、剥離性粘着剤層からなり、23℃、50%R.H.および剥離速度0.3m/分の条件で測定される上記第1粘着剤層に対する上記第1セパレータの180°引き剥がし剥離力F(1)(N/50mm)、23℃、50%R.H.および剥離速度0.3m/分の条件で測定される上記第2粘着剤層に対する上記第2セパレータの180°引き剥がし剥離力F(2)(N/50mm)、23℃、50%R.H.および引張速度0.3m/分の条件で測定されるガラス板に対する上記第2粘着剤層の180°引き剥がし粘着力P(2)(N/50mm)、ならびに、上記第2粘着剤層をガラス板に貼付して160℃で5分経過した後、23℃、50%R.H.および引張速度0.3m/分の条件で測定されるガラス板に対する上記第2粘着剤層の180°引き剥がし粘着力P’(2)(N/50mm)が、下記式の関係を満たす、積層フィルムを提供する。
F(2)≦F(1)
P(2)≧F(1)
P’(2)/P(2)<1.20
P’(2)<1.00
That is, the present invention is a laminated film in which a first separator, a first pressure-sensitive adhesive layer, a substrate, a second pressure-sensitive adhesive layer, and a second separator are laminated in this order, and the first pressure-sensitive adhesive layer consists of a low-adhesive pressure-sensitive adhesive layer, and the second pressure-sensitive adhesive layer consists of a peelable pressure-sensitive adhesive layer. H. and a 180° peeling force F(1) (N/50 mm) of the first separator against the first pressure-sensitive adhesive layer measured under the conditions of a peel speed of 0.3 m/min, 23°C, 50%R. H. and a 180° peeling force F(2) (N/50 mm) of the second separator from the second pressure-sensitive adhesive layer measured under the conditions of a peeling speed of 0.3 m/min, 23°C, 50%R. H. and the 180° peeling adhesive strength P (2) (N/50 mm) of the second pressure-sensitive adhesive layer against a glass plate measured under the conditions of a tensile speed of 0.3 m / min, and the second pressure-sensitive adhesive layer on the glass After being attached to the plate and kept at 160°C for 5 minutes, it was heated at 23°C and 50% R.I. H. And the 180 ° peeling adhesive strength P' (2) (N / 50 mm) of the second adhesive layer against a glass plate measured under the conditions of a tensile speed of 0.3 m / min satisfies the relationship of the following formula, lamination provide the film.
F(2)≤F(1)
P(2)≧F(1)
P′(2)/P(2)<1.20
P′(2)<1.00
 上記積層フィルムは、更に、下記式の関係を満たすことが好ましい。
F(2)/F(1)<0.80
P(2)/F(1)>1.00
The laminated film preferably further satisfies the relationship of the following formula.
F(2)/F(1)<0.80
P(2)/F(1)>1.00
 上記積層フィルムは、23℃、50%R.H.および引張速度0.3m/分の条件で測定される第1セパレータに対する上記第1粘着剤層の90°きっかけ剥離力T(1)(N/50mm)、23℃、50%R.H.および引張速度0.3m/分の条件で測定される第2セパレータに対する上記第2粘着剤層の90度きっかけ剥離力T(2)(N/50mm)、ならびに、上記粘着力P(2)が、下記式の関係を満たすことが好ましい。
T(1)/T(2)>1.05
P(2)/T(1)<1.00
The above laminate film was dried at 23° C. and 50% R.I. H. and the 90° trigger peeling force T(1) (N/50 mm) of the first pressure-sensitive adhesive layer against the first separator measured under the conditions of a tensile speed of 0.3 m/min, 23°C, 50%R. H. And the 90-degree trigger peel force T (2) (N/50 mm) of the second adhesive layer against the second separator measured under the conditions of a tensile speed of 0.3 m / min, and the adhesive force P (2) , preferably satisfies the following formula.
T(1)/T(2)>1.05
P(2)/T(1)<1.00
 本発明の積層フィルムは、キャリア基板に仮固定して半導体チップ等を受け取る際のセパレータの剥離処理にミスが生じず、半導体チップ等を実装基板に転写する際にキャリア基板から剥がれず、かつ、半導体チップ等を実装基板に転写した後にキャリア基板から剥がす際に糊残り等の汚染がなく剥離することができリワーク性に優れるので、半導体装置の製造過程において作業効率を向上させることができる。 The laminated film of the present invention does not cause an error in the peeling process of the separator when the semiconductor chip or the like is received by temporarily fixing it to the carrier substrate, does not peel off from the carrier substrate when the semiconductor chip or the like is transferred to the mounting substrate, and When a semiconductor chip or the like is transferred to a mounting substrate and then peeled off from the carrier substrate, it can be peeled off without contamination such as adhesive residue and is excellent in reworkability, so that work efficiency can be improved in the manufacturing process of the semiconductor device.
本発明の積層フィルムの一実施形態を示す断面模式図である。BRIEF DESCRIPTION OF THE DRAWINGS It is a cross-sectional schematic diagram which shows one Embodiment of the laminated|multilayer film of this invention. 図1に示す積層フィルムを用いた電子部品の実装基板上への実装方法における第1工程の一実施形態を表す断面模式図である。1. It is a cross-sectional schematic diagram showing one Embodiment of the 1st process in the mounting method on the mounting board|substrate of the electronic component using the laminated film shown in FIG. 図1に示す積層フィルムを用いた電子部品の実装基板上への実装方法における第2工程の一実施形態を表す断面模式図である。1. It is a cross-sectional schematic diagram showing one Embodiment of the 2nd process in the mounting method on the mounting board|substrate of the electronic component using the laminated film shown in FIG. 本発明の積層フィルムをキャリア基板に仮固定してから剥がすまでの過程を表す断面模式図である。It is a cross-sectional schematic diagram showing the process from temporarily fixing the laminated|multilayer film of this invention to a carrier substrate to peeling off.
[積層フィルム]
 本発明の積層フィルムは、第1セパレータと、第1粘着剤層と、基材と、第2粘着剤層と、第2セパレータとがこの順に積層された積層構造を有する。すなわち、本発明の積層フィルムは、上記第1粘着剤層、上記基材及び上記第2粘着剤層からなる転写用両面粘着フィルムの粘着面(第1粘着剤層および第2粘着剤層の粘着面)が、上記第1セパレータおよび上記第2セパレータにより保護された積層構造を有する。
[Laminated film]
The laminated film of the present invention has a laminated structure in which a first separator, a first pressure-sensitive adhesive layer, a substrate, a second pressure-sensitive adhesive layer, and a second separator are laminated in this order. That is, the laminated film of the present invention is the adhesive surface of the double-sided adhesive film for transfer consisting of the first adhesive layer, the base material and the second adhesive layer (the adhesive surface of the first adhesive layer and the second adhesive layer). surface) has a laminated structure protected by the first separator and the second separator.
 上記第1粘着剤層は、低粘着性粘着剤層からなり、上記第2粘着剤層は、剥離性粘着剤層からなり、23℃、50%R.H.および剥離速度0.3m/分の条件で測定される上記第1粘着剤層に対する上記第1セパレータの180°引き剥がし剥離力F(1)(N/50mm)、23℃、50%R.H.および剥離速度0.3m/分の条件で測定される上記第2粘着剤層に対する上記第2セパレータの180°引き剥がし剥離力F(2)(N/50mm)、23℃、50%R.H.および引張速度0.3m/分の条件で測定されるガラス板に対する上記第2粘着剤層の180°引き剥がし粘着力P(2)(N/50mm)、ならびに、上記第2粘着剤層をガラス板に貼付して160℃で5分経過した後、23℃、50%R.H.および引張速度0.3m/分の条件で測定されるガラス板に対する上記第2粘着剤層の180°引き剥がし粘着力P’(2)(N/50mm)が、下記式の関係を満たす。
F(2)≦F(1)
P(2)≧F(1)
P’(2)/P(2)<1.20
P’(2)<1.00
The first pressure-sensitive adhesive layer consists of a low-adhesive pressure-sensitive adhesive layer, and the second pressure-sensitive adhesive layer consists of a peelable pressure-sensitive adhesive layer. H. and a 180° peeling force F(1) (N/50 mm) of the first separator against the first pressure-sensitive adhesive layer measured under the conditions of a peel speed of 0.3 m/min, 23°C, 50%R. H. and a 180° peeling force F(2) (N/50 mm) of the second separator from the second pressure-sensitive adhesive layer measured under the conditions of a peeling speed of 0.3 m/min, 23°C, 50%R. H. and the 180° peeling adhesive strength P (2) (N/50 mm) of the second pressure-sensitive adhesive layer against a glass plate measured under the conditions of a tensile speed of 0.3 m / min, and the second pressure-sensitive adhesive layer on the glass After being attached to the plate and kept at 160°C for 5 minutes, it was heated at 23°C and 50% R.I. H. and the 180° peeling adhesive strength P′(2) (N/50 mm) of the second pressure-sensitive adhesive layer against a glass plate measured under the conditions of a tensile speed of 0.3 m/min, satisfies the relationship of the following formula.
F(2)≤F(1)
P(2)≧F(1)
P′(2)/P(2)<1.20
P′(2)<1.00
 本発明の積層フィルムの一実施形態について、図面を参照して、以下に説明することがあるが、本発明の積層フィルムは当該実施形態に限定されるものではない。 An embodiment of the laminated film of the present invention will be described below with reference to the drawings, but the laminated film of the present invention is not limited to this embodiment.
 図4は、本発明の積層フィルムをキャリア基板に仮固定してから剥がすまでの過程を表す断面模式図である。 FIG. 4 is a schematic cross-sectional view showing the process from temporarily fixing the laminated film of the present invention to the carrier substrate to peeling it off.
 図4(a)において、吸着ステージ(図示略)に吸着させた積層フィルム1の粘着剤層12から、第2セパレータ120を剥がしている。この際、第1セパレータ110と第1粘着剤層11の界面には浮きが生じない。この後、第2粘着剤層12の粘着面はキャリア基材22に貼り合わされる(図示略)。 In FIG. 4(a), the second separator 120 is peeled off from the adhesive layer 12 of the laminated film 1 adsorbed on the adsorption stage (not shown). At this time, no lifting occurs at the interface between the first separator 110 and the first pressure-sensitive adhesive layer 11 . After that, the adhesive surface of the second adhesive layer 12 is attached to the carrier substrate 22 (not shown).
 図4(b)において、粘着剤層11から、第1セパレータ110を剥がしている。この際、第2粘着剤層22の界面には浮きが生じない。 In FIG. 4(b), the first separator 110 is peeled off from the adhesive layer 11. At this time, no lifting occurs at the interface of the second adhesive layer 22 .
 図4(c)において、第2粘着剤層12によってキャリア基材22に仮固定された両面粘着シートを用いて、図2のダイシングされた電子部品21を第1粘着剤層11が受け取る工程、図3の第1粘着剤層11が受け取った電子部品21を実装基板30に転写する工程が行われる。 4(c), a step of receiving the diced electronic component 21 of FIG. A step of transferring the electronic component 21 received by the first adhesive layer 11 of FIG. 3 to the mounting board 30 is performed.
 図4(d)では、キャリア基材22から第2粘着剤層12が剥がされる(図示略)。第2粘着剤層12は糊残り等の汚染がなく剥離できるという優れたリワーク性を示すので、キャリア基材22を容易に再利用できる。 In FIG. 4(d), the second adhesive layer 12 is peeled off from the carrier substrate 22 (not shown). Since the second pressure-sensitive adhesive layer 12 exhibits excellent reworkability in that it can be peeled off without contamination such as adhesive residue, the carrier substrate 22 can be easily reused.
 本発明の積層フィルムにおいて、F(2)≦F(1)とすることにより、上記第2セパレータを上記第2粘着剤層から引き剥がす際に上記第1粘着剤層に対する上記第1セパレータの剥離を生じにくくすることができる。 In the laminated film of the present invention, by satisfying F(2) ≤ F(1), peeling of the first separator from the first adhesive layer when peeling the second separator from the second adhesive layer can be made less likely to occur.
 ここで、F(2)/F(1)(F(1)に対するF(2)の比)は1.00以下(F(2)/F(1)≦1.00)であり、好ましくは0.90以下(F(2)/F(1)≦0.90)、より好ましくは0.80未満(F(2)/F(1)<0.80)、さらに好ましくは0.50未満(F(2)/F(1)<0.50)である。また、F(2)/F(1)は、特に限定されないが、例えば、0.10以上(F(2)/F(1)≧0.10)であることが好ましい。 Here, F (2) / F (1) (ratio of F (2) to F (1)) is 1.00 or less (F (2) / F (1) ≤ 1.00), preferably 0.90 or less (F(2)/F(1)≦0.90), more preferably less than 0.80 (F(2)/F(1)<0.80), more preferably less than 0.50 (F(2)/F(1)<0.50). F(2)/F(1) is not particularly limited, but is preferably 0.10 or more (F(2)/F(1)≧0.10), for example.
 F(1)は、第1セパレータ剥離時の作業性やキャリア基板に対する粘着剤2の粘着力P(2)とのバランスの観点から、0.50N/50mm未満(F(1)<0.50)が好ましく、より好ましくは0.40N/50mm以下(F(1)≦0.40)、さらに好ましくは0.35N/50mm以下(F(1)≦0.35)である。また、転写シート加工時や搬送時のセパレータ浮きの観点から、0.04N/50mm以上(F(1)≧0.04)が好ましく、より好ましくは0.05N/50mm以上(F(1)≧0.05、さらに好ましくは0.06N/50mm以上(F(1)≧0.06)である。 F (1) is less than 0.50 N/50 mm (F (1) < 0.50 ), more preferably 0.40 N/50 mm or less (F(1)≦0.40), and still more preferably 0.35 N/50 mm or less (F(1)≦0.35). In addition, from the viewpoint of separator floating during transfer sheet processing and transportation, it is preferably 0.04 N/50 mm or more (F(1) ≥ 0.04), more preferably 0.05 N/50 mm or more (F(1) ≥ 0.04). 0.05 ) , more preferably 0.06 N/50 mm or more (F(1)≧0.06).
 F(2)は、第2セパレータ剥離時の作業性や第1セパレータ剥離力F(1)とのバランスの観点から、0.20N/50mm未満(F(2)<0.20)が好ましく、より好ましくは0.15N/50mm以下(F(2)≦0.15N)、さらに好ましくは0.10N/50mm以下(F(2)≦0.10)である。また、転写シート加工時や搬送時のセパレータ浮きの観点から、0.01/50mm以上(F(1)≧0.01)が好ましく、より好ましくは0.02N/50mm以上(F(2)≧0.02)、さらに好ましくは0.04/50mm以上(F(2)≧0.04)である。 F(2) is preferably less than 0.20 N/50 mm (F(2)<0.20) from the viewpoint of workability when peeling the second separator and balance with the first separator peeling force F(1). It is more preferably 0.15 N/50 mm or less (F(2) ≤ 0.15 N), still more preferably 0.10 N/50 mm or less (F(2) ≤ 0.10). In addition, from the viewpoint of separator floating during transfer sheet processing and transportation, it is preferably 0.01/50 mm or more (F(1) ≥ 0.01), more preferably 0.02 N/50 mm or more (F(2) ≥ 0.02), more preferably 0.04/50 mm or more (F(2)≧0.04).
 本発明の積層フィルムにおいて、P(2)≧F(1)とすることにより、上記第1セパレータを上記第1粘着剤層から引き剥がす際にキャリア基板に対する上記第2粘着剤層の剥離を生じにくくすることができる。 In the laminated film of the present invention, by satisfying P(2)≧F(1), peeling of the second pressure-sensitive adhesive layer from the carrier substrate occurs when the first separator is peeled off from the first pressure-sensitive adhesive layer. can be made difficult.
 ここで、P(2)/F(1)(F(1)に対するP(2)の比)は1.00以上(P(2)/F(1)≧1.00)であり、好ましくは1.00超(P(2)/F(1)>1.00)、より好ましくは1.20以上(P(2)/F(1)≧1.20)である。また、P(2)/F(1)は、特に限定されないが、例えば、4.50以下(P(2)/F(1)≦4.50)であることが好ましい。 Here, P (2) / F (1) (ratio of P (2) to F (1)) is 1.00 or more (P (2) / F (1) ≥ 1.00), preferably It is more than 1.00 (P(2)/F(1)>1.00), more preferably 1.20 or more (P(2)/F(1)≧1.20). Moreover, P(2)/F(1) is not particularly limited, but is preferably 4.50 or less (P(2)/F(1)≦4.50), for example.
 P(2)は、キャリア基板から糊残り等の汚染がなく剥離することができるリワーク性向上の観点から、1.10N/50mm未満(P(2)<1.10)が好ましく、より好ましくは1.00N/50mm以下(P(2)≦1.00)、さらに好ましくは0.90N/50mm以下(P(2)≦0.90)である。また、第2粘着剤層に対するキャリア基板の接着性の観点から、0.10/50mm以上(P(2)≧0.10)が好ましく、より好ましくは0.20N/50mm以上(P(2)≧0.20)、さらに好ましくは0.30/50mm以上(P(2)≧0.30)である。 P(2) is preferably less than 1.10 N/50 mm (P(2)<1.10), more preferably less than 1.10 N/50 mm from the viewpoint of improving reworkability that can be peeled off from the carrier substrate without contamination such as adhesive residue. 1.00 N/50 mm or less (P(2)≦1.00), more preferably 0.90 N/50 mm or less (P(2)≦0.90). From the viewpoint of the adhesiveness of the carrier substrate to the second pressure-sensitive adhesive layer, it is preferably 0.10/50 mm or more (P(2)≧0.10), more preferably 0.20 N/50 mm or more (P(2) ≧0.20), more preferably 0.30/50 mm or more (P(2)≧0.30).
 F(1)、F(2)およびP(2)について、上記関係を満たすことによって、上記転写用両面粘着フィルムをキャリア基板に張り付ける際のセパレータ剥離処理にミスが生じにくくなる。 By satisfying the above relationships for F(1), F(2), and P(2), mistakes are less likely to occur in the separator peeling process when the transfer double-sided pressure-sensitive adhesive film is attached to the carrier substrate.
 本発明に係る第2粘着層において、P’(2)/P(2)(P(2)に対するP’(2)の比)は、電子部品を実装基板に転写して実装する際の熱圧着によってもキャリア基板に対する第2粘着剤層の粘着力が上昇せず、良好に剥離してリワーク性に優れるという観点から、1.20未満(P’(2)/P(2)<1.20)であり、好ましくは1.0以下(P’(2)/P(2)≦1.0)、より好ましくは0.8以下(P’(2)/P(2)≦0.8)である。また、P’(2)/P(2)は、特に限定されないが、例えば、0.01以上(P’(2)/P(2)≧0.01)であることが好ましく、より好ましくは0.03以上(P’(2)/P(2)≧0.03)である。 In the second adhesive layer according to the present invention, P'(2)/P(2) (the ratio of P'(2) to P(2)) is the heat generated when the electronic component is transferred to the mounting substrate and mounted. From the viewpoint that the adhesive strength of the second pressure-sensitive adhesive layer to the carrier substrate does not increase even by press-fitting and that the second pressure-sensitive adhesive layer can be peeled off well and is excellent in reworkability, it is less than 1.20 (P'(2)/P(2)<1.20). 20), preferably 1.0 or less (P'(2)/P(2) ≤ 1.0), more preferably 0.8 or less (P'(2)/P(2) ≤ 0.8 ). In addition, although P'(2)/P(2) is not particularly limited, for example, it is preferably 0.01 or more (P'(2)/P(2) ≥ 0.01), more preferably 0.03 or more (P'(2)/P(2)≧0.03).
 本発明に係る第2粘着層において、P’(2)は、転写用両面粘着フィルムをキャリア基板から糊残りもなく十分に剥がしやすくリワーク性に優れるという観点から、1.00N/50mm未満(P’(2)<1.00)であり、好ましくは0.6N/50mm以下(P’(2)≦0.6)、より好ましくは0.4N/50mm以下(P’(2)≦0.4)である。また、P’(2)は、特に限定されないが、例えば、0.01/50mm以上(P’(2)≧0.01)が好ましく、より好ましくは0.02N/50mm以上(P’(2)≧0.02)である。 In the second adhesive layer according to the present invention, P'(2) is less than 1.00 N/50 mm (P '(2) < 1.00), preferably 0.6 N/50 mm or less (P'(2) ≤ 0.6), more preferably 0.4 N/50 mm or less (P'(2) ≤ 0.6). 4). In addition, although P′(2) is not particularly limited, for example, it is preferably 0.01/50 mm or more (P′(2)≧0.01), more preferably 0.02 N/50 mm or more (P′(2 )≧0.02).
 P(2)およびP’(2)について、上記関係を満たすことによって、半導体チップ等を実装基板に転写する際に上記転写用両面粘着フィルムがキャリア基板から剥がれにくく、かつ、半導体チップ等を実装基板に転写した後に上記転写用両面粘着フィルムをキャリア基板から剥がれやすく、糊残りを生じにくくすることができる。 By satisfying the above relationship for P(2) and P'(2), the double-sided adhesive film for transfer is difficult to peel off from the carrier substrate when transferring the semiconductor chip or the like to the mounting substrate, and the semiconductor chip or the like is mounted. After being transferred to the substrate, the double-sided adhesive film for transfer can be easily peeled off from the carrier substrate, and the adhesive residue is less likely to occur.
 また、本発明の積層フィルムにおいて、23℃、50%R.H.および引張速度0.3m/分の条件で測定される第1セパレータに対する上記第1粘着剤層の90°きっかけ剥離力T(1)(N/50mm)、23℃、50%R.H.および引張速度0.3m/分の条件で測定される第2セパレータに対する上記第2粘着剤層の90度きっかけ剥離力T(2)(N/50mm)、ならびに、上記粘着力P(2)は、下記式の関係を満たすことが好ましい。
T(1)/T(2)>1.05
P(2)/T(1)<1.90
Moreover, in the laminated film of the present invention, the temperature is 23° C., 50% R.I. H. and the 90° trigger peeling force T(1) (N/50 mm) of the first pressure-sensitive adhesive layer against the first separator measured under the conditions of a tensile speed of 0.3 m/min, 23°C, 50%R. H. And the 90-degree trigger peel force T (2) (N/50 mm) of the second adhesive layer against the second separator measured under the conditions of a tensile speed of 0.3 m / min, and the adhesive force P (2) , preferably satisfies the following formula.
T(1)/T(2)>1.05
P(2)/T(1)<1.90
 きっかけ剥離力T(1)は、第1セパレータを第1粘着剤層から剥離させる際に剥離初期に記録される剥離力の最大値(最大応力)を意味し、きっかけ剥離力T(2)は、第2セパレータを第2粘着剤層から剥離させる際に剥離初期に記録される剥離力の最大値(最大応力)を意味する。 The trigger peel force T(1) means the maximum value (maximum stress) of the peel force recorded at the initial stage of peeling when the first separator is peeled from the first adhesive layer, and the trigger peel force T(2) is , means the maximum peel force (maximum stress) recorded at the initial stage of peeling when the second separator is peeled from the second pressure-sensitive adhesive layer.
 本発明の積層フィルムにおいて、T(1)/T(2)(T(2)に対するT(1)の比)は、上記第2セパレータを上記第2粘着剤層から引き剥がす際に上記第1粘着剤層に対する上記第1セパレータの剥離をより生じにくくする観点から、1.05超(T(1)/T(2)>1.05)であることが好ましく、より好ましくは1.10以上(T(1)/T(2)≧1.10)、さらに好ましくは1.15以上(T(1)/T(2)≧1.15)である。また、T(1)/T(2)は、特に限定されないが、例えば、3.50以下(T(1)/T(2)≦3.50)であることが好ましい。 In the laminated film of the present invention, T(1)/T(2) (ratio of T(1) to T(2)) is the first From the viewpoint of making the separation of the first separator from the pressure-sensitive adhesive layer more difficult, it is preferably greater than 1.05 (T (1) / T (2) > 1.05), more preferably 1.10 or more. (T(1)/T(2)≧1.10), more preferably 1.15 or more (T(1)/T(2)≧1.15). Although T(1)/T(2) is not particularly limited, it is preferably 3.50 or less (T(1)/T(2)≦3.50), for example.
 本発明の積層フィルムにおいて、P(2)/T(1)(T(1)に対するP(2)の比)は、上記第1セパレータを上記第1粘着剤層から引き剥がす際にキャリア基板に対する上記第2粘着剤層の剥離を生じにくくする観点から、1.90未満(P(2)/T(1)<1.90)であることが好ましく、より好ましくは1.50以下(P(2)/T(1)≦1.50)、さらに好ましくは1.00未満(P(2)/T(1)<1.00)、特に好ましくは0.90以下(P(2)/T(1)≦0.90)である。また、P(2)/T(1)は、特に限定されないが、例えば、0.20以上(P(2)/T(1)≧0.20)であることが好ましく、より好ましくは0.40以上(P(2)/T(1)≧0.40)である。 In the laminated film of the present invention, P (2) / T (1) (ratio of P (2) to T (1)) is relative to the carrier substrate when peeling off the first separator from the first adhesive layer From the viewpoint of making it difficult for the second pressure-sensitive adhesive layer to peel off, it is preferably less than 1.90 (P (2) / T (1) < 1.90), more preferably 1.50 or less (P ( 2)/T(1)≦1.50), more preferably less than 1.00 (P(2)/T(1)<1.00), particularly preferably 0.90 or less (P(2)/T (1) ≤ 0.90). Also, P(2)/T(1) is not particularly limited, but is preferably 0.20 or more (P(2)/T(1)≧0.20), more preferably 0.20. 40 or more (P(2)/T(1)≧0.40).
 T(1)は、0.10N/50mm以上(T(1)≧0.10)が好ましく、より好ましくは0.15N/50mm以上(T(1)≧0.15)、さらに好ましくは0.20N/50mm以上(T(1)≧0.20)である。また、T(1)は、特に限定されないが、例えば、1.00/50mm以下(T(1)≦0.1.00)が好ましく、より好ましくは0.85/50mm以下(T(1)≦0.85)、さらに好ましくは0.70/50mm以下(PT(1)≦0.70)である。 T(1) is preferably 0.10 N/50 mm or more (T(1)≧0.10), more preferably 0.15 N/50 mm or more (T(1)≧0.15), still more preferably 0.15 N/50 mm or more (T(1)≧0.15). 20 N/50 mm or more (T(1)≧0.20). In addition, although T(1) is not particularly limited, for example, it is preferably 1.00/50 mm or less (T(1) ≤ 0.1.00), more preferably 0.85/50 mm or less (T(1) ≦0.85), more preferably 0.70/50 mm or less (PT(1)≦0.70).
 T(2)は、0.50N/50mm以下(T(2)≦0.50)が好ましく、より好ましくは0.45N/50mm以下(T(2)≦0.45)、さらに好ましくは0.40N/50mm以下(T(2)≦0.40)である。また、T(1)は、特に限定されないが、例えば、0.10/50mm以上(T(2)≧0.10)が好ましく、より好ましくは0.15N/50mm以上(T(2)≧0.15)である。 T(2) is preferably 0.50 N/50 mm or less (T(2) ≤ 0.50), more preferably 0.45 N/50 mm or less (T(2) ≤ 0.45), still more preferably 0.45 N/50 mm or less (T(2) ≤ 0.45). It is 40 N/50 mm or less (T(2)≦0.40). In addition, although T(1) is not particularly limited, for example, it is preferably 0.10/50 mm or more (T(2)≧0.10), more preferably 0.15 N/50 mm or more (T(2)≧0 .15).
 T(1)、T(2)およびP(2)について、上記関係を満たすことによって、上記転写用両面粘着フィルムをキャリア基板に張り付ける際のセパレータ剥離処理にミスが一層生じにくくなる。 By satisfying the above relationships for T(1), T(2), and P(2), mistakes are less likely to occur in the separator peeling process when attaching the double-sided pressure-sensitive adhesive film for transfer to the carrier substrate.
 以上のように、F(1)、F(2)、P(2)、P’(2)、T(1)およびT(2)について上記関係を満たすように剥離力および粘着力について全体構成を最適化することによって、半導体装置の製造過程において作業効率を向上させることができる。 As described above, the overall configuration of the peel strength and adhesive strength is such that the above relationships are satisfied for F(1), F(2), P(2), P'(2), T(1) and T(2). can improve work efficiency in the manufacturing process of the semiconductor device.
 上記の、F(1)、F(2)、P(2)、P’(2)、T(1)およびT(2)は、第1粘着剤層および第2粘着剤層を構成する粘着剤の種類や組成、架橋度等による粘着力の調整、軽剥離化剤や可塑剤の配合によるWBL(Weak Boundary Layer)の形成や、第1セパレータおよび第2セパレータの厚み、構成する材質や剥離処理等により調節することができる。 The above F(1), F(2), P(2), P'(2), T(1) and T(2) constitute the first pressure-sensitive adhesive layer and the second pressure-sensitive adhesive layer. Adjustment of adhesive strength by agent type and composition, degree of cross-linking, etc., formation of WBL (Weak Boundary Layer) by blending light release agents and plasticizers, thickness of the first and second separators, constituent materials and release It can be adjusted by treatment or the like.
<第1粘着剤層>
 本発明に係る転写用両面粘着フィルムにおいて、第1粘着剤層は、電子部品を受け取って保持するための粘着剤層であり、低粘着性粘着剤層からなるものである。第1粘着剤層が低粘着性粘着剤層からなるという構成は、受け取る際に電子部品にかかる力を低減でき、電子部品の損傷を抑制できる点で好適である。また、電子部品を非接触で第1粘着剤層が受け取る際には、例えば、電子部品をダイシングテープからピン部材で押す等して剥離させ、第1粘着剤層上に落下させる。しかし、落下した電子部品を第1粘着剤層が受け取る際に跳ねて精度よく受け取ることができない場合がある。当該現象が発生した場合には、電子製品の位置精度が低下し、接触不良が生じる場合がある。上記第1粘着剤層が低粘着性粘着剤層からなるという構成は、電子部品を非接触で第1粘着剤層が受け取る際に、電子部品が跳ねずに第1粘着剤層にキャッチされやすく、位置精度よく受け取ることができる点でも好適である。さらには、転写用両面粘着フィルムが受け取った電子部品を実装基板に実装する際に、第1粘着剤層から電子部品を容易に剥離できる点でも好ましい。
<First adhesive layer>
In the double-sided pressure-sensitive adhesive film for transfer according to the present invention, the first pressure-sensitive adhesive layer is a pressure-sensitive adhesive layer for receiving and holding electronic components, and is composed of a low-adhesive pressure-sensitive adhesive layer. The configuration in which the first pressure-sensitive adhesive layer is composed of a low-adhesive pressure-sensitive adhesive layer is preferable in that it can reduce the force applied to the electronic component when receiving, and can suppress damage to the electronic component. When the electronic component is received by the first pressure-sensitive adhesive layer in a non-contact manner, for example, the electronic component is separated from the dicing tape by pressing with a pin member or the like, and dropped onto the first pressure-sensitive adhesive layer. However, when the first pressure-sensitive adhesive layer receives the dropped electronic component, it may bounce and may not be received accurately. When this phenomenon occurs, the positional accuracy of the electronic product may be degraded, resulting in poor contact. The structure in which the first pressure-sensitive adhesive layer consists of a low-adhesive pressure-sensitive adhesive layer makes it easy for the electronic component to be caught by the first pressure-sensitive adhesive layer without bouncing when the first pressure-sensitive adhesive layer receives the electronic component without contact. , can be received with high positional accuracy. Furthermore, it is also preferable in that the electronic component can be easily peeled off from the first adhesive layer when the electronic component received by the transfer double-sided pressure-sensitive adhesive film is mounted on the mounting substrate.
 上記第1粘着剤層は、構成する粘着剤の種類や組成、架橋度等を調整することや、軽剥離化剤や可塑剤の配合によるWBL(Weak Boundary Layer)の形成により、低粘着性粘着剤層とすることができる。 The first adhesive layer has a low adhesiveness by adjusting the type and composition of the adhesive that constitutes it, the degree of crosslinking, etc., and by forming a WBL (Weak Boundary Layer) by blending a light release agent and a plasticizer. It can be used as an agent layer.
 本発明の積層フィルムにおいて、第1粘着剤層のAFM-DMA(原子間力顕微鏡(AFM:Atomic Force Microscope)の動的粘弾性測定(nDMA:nano Dynamic Mechanical Analysis))による周波数1Hz、25℃での貯蔵弾性率(E’1a)は50MPa以下であることが好ましい。当該構成は、上記第1粘着剤層が受け取った電子部品を確実に接着する上で好ましい。上記E’1aが高すぎると、上記第1粘着剤層に対する電子部品の接着性が低下して、電子部品の位置ずれや落下などの不具合が生じる場合がある。上記第1粘着剤層に対する電子部品の接着性の観点から、E’1aは40MPa以下が好ましく、30MPa以下がより好ましい。また、20MPa以下、10MPa以下であってもよい。一方、上記第1粘着剤層から回路基板への転写性の観点から、E’1aは、0.1MPa以上であることが好ましい。上記E’1aが低すぎる場合は、上記第1粘着剤層に対する電子部品の接着性が高くなりすぎ、実装基板へ実装する際の転写性が損なわれる場合がある。電子部品の実装基板への転写性の観点から、E’1aは0.2MPa以上が好ましく、0.5MPa以上がより好ましい。 In the laminated film of the present invention, AFM-DMA (AFM: Atomic Force Microscope) dynamic viscoelasticity measurement (nDMA: nano Dynamic Mechanical Analysis)) of the first adhesive layer at a frequency of 1 Hz at 25 ° C. The storage modulus (E'1a) of is preferably 50 MPa or less. This configuration is preferable for reliably adhering the electronic component received by the first pressure-sensitive adhesive layer. If E′1a is too high, the adhesiveness of the electronic component to the first pressure-sensitive adhesive layer is lowered, which may cause problems such as misalignment and falling of the electronic component. E′1a is preferably 40 MPa or less, more preferably 30 MPa or less, from the viewpoint of the adhesiveness of the electronic component to the first pressure-sensitive adhesive layer. Moreover, it may be 20 MPa or less and 10 MPa or less. On the other hand, E′1a is preferably 0.1 MPa or more from the viewpoint of transferability from the first pressure-sensitive adhesive layer to the circuit board. If E'1a is too low, the adhesiveness of the electronic component to the first pressure-sensitive adhesive layer becomes too high, which may impair transferability when mounted on a mounting board. E′1a is preferably 0.2 MPa or more, more preferably 0.5 MPa or more, from the viewpoint of transferability of the electronic component to the mounting board.
 本発明の積層フィルムにおいて、上記第1粘着剤層のAFM-DMAによる周波数1kHz、25℃での貯蔵弾性率(E’1b)は100MPa以下であることが好ましい。当該構成は、上記第1粘着剤層が電子部品を非接触で受け取る場合に、第1粘着剤層の表面で電子部品が弾かれず、位置精度よく受け取ることができる点で好ましい。上記E’1bが高すぎると、上記第1粘着剤層の表面に電子部品を接触させずに落として受け取る際に、電子部品が弾かれて所定の位置からずれたり、裏返るなどして位置精度が低下しやすくなる。上記第1粘着剤層に対する電子部品の位置精度の観点から、E’1bは90MPa以下が好ましく、80MPa以下がより好ましい。また、70MPa以下、60MPa以下、50MPa以下、40MPa以下、30MPa以下であってもよく、特に20MPa以下であってもよい。一方、上記第1粘着剤層から実装基板への転写性の観点から、E’1bは、0.5MPa以上であることが好ましい。上記E’1bが低すぎる場合は、上記第1粘着剤層に対する電子部品の接着性が高くなり、また、電子部品が落下する際に第1粘着剤層に埋まるなどして、実装基板へ実装する際の転写性が損なわれる場合がある。電子部品の実装基板への転写性の観点から、E’1bは0.7MPa以上が好ましく、1.0MPa以上がより好ましい。 In the laminated film of the present invention, the storage elastic modulus (E'1b) of the first adhesive layer at a frequency of 1 kHz and 25°C by AFM-DMA is preferably 100 MPa or less. This configuration is preferable in that when the first pressure-sensitive adhesive layer receives the electronic component in a non-contact manner, the electronic component is not repelled by the surface of the first pressure-sensitive adhesive layer and can be received with high positional accuracy. If the E'1b is too high, when the electronic component is dropped and received without contacting the surface of the first adhesive layer, the electronic component is repelled and shifted from a predetermined position or turned over, resulting in poor positional accuracy. tends to decrease. E′1b is preferably 90 MPa or less, more preferably 80 MPa or less, from the viewpoint of the positional accuracy of the electronic component with respect to the first pressure-sensitive adhesive layer. Further, it may be 70 MPa or less, 60 MPa or less, 50 MPa or less, 40 MPa or less, 30 MPa or less, and particularly 20 MPa or less. On the other hand, E'1b is preferably 0.5 MPa or more from the viewpoint of transferability from the first pressure-sensitive adhesive layer to the mounting substrate. If the E'1b is too low, the adhesiveness of the electronic component to the first adhesive layer increases, and when the electronic component falls, it is embedded in the first adhesive layer and mounted on the mounting substrate. transferability may be impaired. E′1b is preferably 0.7 MPa or more, more preferably 1.0 MPa or more, from the viewpoint of the transferability of the electronic component to the mounting board.
 本発明の積層フィルムにおいて、上記第1粘着剤層のAFM-DMAによる周波数1Hz、25℃での貯蔵弾性率(E’1a)に対する上記第1粘着剤層のAFM-DMAによる周波数1kHz、25℃での貯蔵弾性率(E’1b)の割合(E’1b/E’1a)が1.00よりも大きいこと好ましい。当該構成は、上記第1粘着剤層に対する電子部品の接着性、位置精度、実装基板への転写性などのバランスがよくなる点で好ましい。電子部品の接着性、位置精度、実装基板への転写性などのバランスの観点から、E’1b/E’1aは、1.05以上が好ましく、1.10以上がより好ましい。E’1b/E’1aの上限は特に限定されないが、上記バランスの観点から3.00以下が好ましい。 In the laminated film of the present invention, the storage elastic modulus (E'1a) of the first pressure-sensitive adhesive layer at a frequency of 1 Hz and 25 ° C. by AFM-DMA of the first pressure-sensitive adhesive layer is measured by AFM-DMA at a frequency of 1 kHz and 25 ° C. is preferably greater than 1.00. This configuration is preferable in that the adhesiveness of the electronic component to the first pressure-sensitive adhesive layer, the positional accuracy, the transferability to the mounting substrate, and the like are well balanced. E'1b/E'1a is preferably 1.05 or more, more preferably 1.10 or more, from the viewpoint of balance of adhesiveness of electronic components, positional accuracy, transferability to a mounting substrate, and the like. Although the upper limit of E'1b/E'1a is not particularly limited, it is preferably 3.00 or less from the viewpoint of the above balance.
 本発明の積層フィルムにおいて、上記第1粘着剤層のAFM-DMAによる周波数1Hz、25℃での損失弾性率(E"1a)は7MPa以下であることが好ましい。当該構成は、電子部品の実装基板への転写性に優れる観点から、好ましい。上記E"1aが高すぎる場合は、上記第1粘着剤層に対する電子部品の接着性が高くなりすぎ、実装基板へ実装する際の転写性が損なわれる場合がある。電子部品の実装基板への転写性の観点から、E"1aは5MPa以下が好ましく、3MPa以下がより好ましい。上記E"1aが低すぎると、上記第1粘着剤層に対する電子部品の接着性が低下して、電子部品の位置ずれや落下などの不具合が生じる場合がある。上記第1粘着剤層に対する電子部品の接着性の観点から、E"1aは0.01MPa以上が好ましく、0.03MPa以上がより好ましい。 In the laminated film of the present invention, the loss elastic modulus (E″1a) of the first pressure-sensitive adhesive layer at a frequency of 1 Hz and 25° C. by AFM-DMA is preferably 7 MPa or less. It is preferable from the viewpoint of excellent transferability to the substrate. If the E″1a is too high, the adhesiveness of the electronic component to the first pressure-sensitive adhesive layer becomes too high, impairing the transferability when mounted on the mounting substrate. may be E″1a is preferably 5 MPa or less, more preferably 3 MPa or less, from the viewpoint of transferability of electronic components to a mounting substrate. This may cause problems such as misalignment or dropping of electronic components. From the viewpoint of the adhesiveness of the electronic component to the first pressure-sensitive adhesive layer, E″1a is preferably 0.01 MPa or more, more preferably 0.03 MPa or more.
 上記第1粘着剤層のAFM-DMAによる周波数1Hz、25℃での貯蔵弾性率(E’1a)、周波数1kHz、25℃での貯蔵弾性率(E’1b)、及び周波数1Hz、25℃での損失弾性率(E"1a)は、構成する粘着剤の種類や組成、架橋度などにより調整することができる。 Storage modulus (E'1a) at a frequency of 1 kHz and 25°C by AFM-DMA of the first pressure-sensitive adhesive layer, a storage modulus (E'1b) at a frequency of 1 kHz and 25°C, and a frequency of 1 Hz and 25°C The loss elastic modulus (E″1a) of can be adjusted by the type and composition of the constituent pressure-sensitive adhesive, the degree of cross-linking, and the like.
 本発明の積層フィルムにおいて、上記第1粘着剤層のステンレス板(直径5mm)に対するタック力が、10~250gf/Φ5mmSUSであることが好ましい。上記タック力が10gf/Φ5mmSUS以上であるという構成は、上記第1粘着剤層に電子部品の接着性、位置精度の観点から好ましく、20gf/Φ5mmSUS以上がより好ましい。一方、上記タック力が250gf/Φ5mmSUS以下であるという構成は、電子部品の実装基板への転写性の観点から好ましく、200gf/Φ5mmSUS以下がより好ましい。 In the laminated film of the present invention, the first pressure-sensitive adhesive layer preferably has a tack force of 10 to 250 gf/Φ5 mm SUS for a stainless steel plate (5 mm in diameter). A configuration in which the tack force is 10 gf/Φ5 mm SUS or more is preferable from the viewpoint of adhesion of electronic parts to the first pressure-sensitive adhesive layer and positional accuracy, and 20 gf/Φ5 mm SUS or more is more preferable. On the other hand, the configuration in which the tack force is 250 gf/Φ5 mm SUS or less is preferable from the viewpoint of transferability to the mounting board of the electronic component, and 200 gf/Φ5 mm SUS or less is more preferable.
 上記第1粘着剤層のステンレス板(直径5mm)に対するタック力は、構成する粘着剤の種類や組成、架橋度、脂肪酸エステルやフッ素系界面活性剤等の添加剤などにより調整することができる。 The tack force of the first adhesive layer to a stainless steel plate (5 mm in diameter) can be adjusted by adjusting the type and composition of the constituent adhesive, the degree of cross-linking, and additives such as fatty acid esters and fluorosurfactants.
 本発明の積層フィルムにおいて、上記第1粘着剤層の表面力が、-500~-100μNであることが好ましい。上記表面力が-500μN以上であるという構成は、上記第1粘着剤層に電子部品の接着性、位置精度の観点から好ましく、-400μN以上がより好ましい。一方、上記表面力が-100μN以下であるという構成は、電子部品の実装基板への転写性の観点から好ましく、-50μN以下がより好ましい。 In the laminated film of the present invention, the surface force of the first pressure-sensitive adhesive layer is preferably -500 to -100 μN. The configuration in which the surface force is −500 μN or more is preferable from the viewpoint of adhesion of the electronic component to the first pressure-sensitive adhesive layer and positional accuracy, and −400 μN or more is more preferable. On the other hand, the configuration in which the surface force is −100 μN or less is preferable from the viewpoint of transferability of the electronic component to the mounting substrate, and −50 μN or less is more preferable.
 上記第1粘着剤層の表面力は、構成する粘着剤の種類や組成、架橋度、脂肪酸エステルやフッ素系界面活性剤等の添加剤等により調整することができる。 The surface strength of the first pressure-sensitive adhesive layer can be adjusted by the type and composition of the pressure-sensitive adhesive that constitutes it, the degree of cross-linking, and additives such as fatty acid esters and fluorosurfactants.
 本発明に係る転写用両面粘着フィルムにおいて、第1粘着剤層の厚みは、特に限定されないが、1μm以上が好ましく、より好ましくは3μm以上である。厚みが一定以上であると、第1粘着剤層が電子部品が精度よく受け取りやすくなり、好ましい。また、第1粘着剤層の厚みの上限は、特に限定されないが、100μmが好ましく、より好ましくは75μmである。厚みが一定以下であると、電子部品を精度よく実装基板に転写しやすくなり、好ましい。 In the double-sided pressure-sensitive adhesive film for transfer according to the present invention, the thickness of the first pressure-sensitive adhesive layer is not particularly limited, but is preferably 1 μm or more, more preferably 3 μm or more. When the thickness is equal to or greater than a certain value, the first pressure-sensitive adhesive layer can be easily received by the electronic component with high accuracy, which is preferable. Moreover, although the upper limit of the thickness of the first pressure-sensitive adhesive layer is not particularly limited, it is preferably 100 μm, more preferably 75 μm. When the thickness is less than a certain value, the electronic component can be easily transferred to the mounting substrate with high accuracy, which is preferable.
 本発明の積層フィルムにおいて、第1粘着剤層のヘイズ(JIS K7136に準じる)は、特に限定されないが、10%以下が好ましく、より好ましくは5.0%以下である。ヘイズが10%以下であると、優れた透明性が得られ、例えば、積層フィルムをキャリア基板に貼付した際に、キャリア基板上に付されたパターン(例えば、電子部品の転写位置を示すマーカー)を視認することができ、好ましい。なお、上記ヘイズは、例えば、第1粘着剤層をセパレータ上に形成して常態(23℃、50%RH)に少なくとも24時間静置した後、セパレータを剥離し、スライドガラス(例えば、全光線透過率91.8%、ヘイズ0.4%のもの)に貼り合わせたものを試料とし、ヘイズメーター(製品名「HM-150」、(株)村上色彩技術研究所製)を用いて測定することができる。 In the laminated film of the present invention, the haze (according to JIS K7136) of the first pressure-sensitive adhesive layer is not particularly limited, but is preferably 10% or less, more preferably 5.0% or less. When the haze is 10% or less, excellent transparency can be obtained. For example, when the laminated film is attached to the carrier substrate, a pattern applied on the carrier substrate (for example, a marker indicating the transfer position of the electronic component). can be visually recognized, which is preferable. The haze can be measured by, for example, forming the first pressure-sensitive adhesive layer on the separator and allowing it to stand at normal conditions (23° C., 50% RH) for at least 24 hours. Transmittance 91.8%, haze 0.4%) is used as a sample, and measured using a haze meter (product name “HM-150”, manufactured by Murakami Color Research Laboratory). be able to.
 本発明の積層フィルムにおいて、第1粘着剤層の可視光波長領域における全光線透過率(JIS K7361-1に準じる)は、特に限定されないが、85%以上が好ましく、より好ましくは88%以上である。全光線透過率が85%以上であると、優れた透明性が得られ、例えば、積層フィルムをキャリア基板に貼付した際に、キャリア基板上に付されたパターン(例えば、電子部品の転写位置を示すマーカー)を視認することができ、好ましい。なお、上記全光線透過率は、例えば、第1粘着剤層をセパレータ上に形成して常態(23℃、50%RH)に少なくとも24時間静置した後、セパレータを剥離し、スライドガラス(例えば、全光線透過率91.8%、ヘイズ0.4%のもの)に貼り合わせたものを試料とし、ヘイズメーター(製品名「HM-150」、(株)村上色彩技術研究所製)を用いて測定することができる。 In the laminated film of the present invention, the total light transmittance (according to JIS K7361-1) of the first adhesive layer in the visible light wavelength region is not particularly limited, but is preferably 85% or more, more preferably 88% or more. be. When the total light transmittance is 85% or more, excellent transparency can be obtained. It is preferable that the marker shown) can be visually recognized. The above total light transmittance can be measured, for example, by forming a first pressure-sensitive adhesive layer on a separator and allowing it to stand in a normal state (23° C., 50% RH) for at least 24 hours, peeling off the separator, and applying a slide glass (for example, , total light transmittance of 91.8%, haze of 0.4%) is used as a sample, and a haze meter (product name “HM-150”, manufactured by Murakami Color Research Laboratory) is used. can be measured by
 上記第1粘着剤層を構成する粘着剤としては、特に限定されないが、例えば、シリコーン系粘着剤、ウレタン系粘着剤、アクリル系粘着剤、ゴム系粘着剤、ポリエステル系粘着剤、ポリアミド系粘着剤、エポキシ系粘着剤、ビニルアルキルエーテル系粘着剤、フッ素系粘着剤等が挙げられる。これらの中でも、電子部品が損傷することなく、位置精度よく受け取ることができ、さらに実装基板への良好な転写性の観点から、低粘着性に制御しやすいシリコーン系粘着剤、ウレタン系粘着剤、アクリル系粘着剤が好ましく、シリコーン系粘着剤、ウレタン系粘着剤がより好ましく、シリコーン系粘着剤がさらに好ましい。 The adhesive constituting the first adhesive layer is not particularly limited, but for example, silicone-based adhesive, urethane-based adhesive, acrylic-based adhesive, rubber-based adhesive, polyester-based adhesive, and polyamide-based adhesive. , epoxy-based adhesives, vinyl alkyl ether-based adhesives, fluorine-based adhesives, and the like. Among these, silicone-based adhesives, urethane-based adhesives, and urethane-based adhesives, which can be easily controlled to have low adhesiveness, can receive electronic components with high positional accuracy without damaging them, and from the viewpoint of good transferability to mounting substrates. Acrylic adhesives are preferred, silicone adhesives and urethane adhesives are more preferred, and silicone adhesives are even more preferred.
(シリコーン系粘着剤)
 シリコーン系粘着剤としては、特に制限されず、公知乃至慣用のシリコーン系粘着剤を用いることができ、例えば、付加型シリコーン系粘着剤、過酸化物硬化型シリコーン系粘着剤、縮合型シリコーン系粘着剤等を用いることができる。シリコーン系粘着剤は1液型、2液型のいずれであってもよい。シリコーン系粘着剤は、単独でまたは2種以上組み合わせて用いることができる。
(Silicone adhesive)
The silicone-based pressure-sensitive adhesive is not particularly limited, and known or commonly used silicone-based pressure-sensitive adhesives can be used. agents and the like can be used. The silicone pressure-sensitive adhesive may be either one-pack type or two-pack type. The silicone pressure-sensitive adhesives can be used alone or in combination of two or more.
 上記付加型シリコーン系粘着剤は、一般に、ケイ素原子にビニル基等のアルケニル基を有するオルガノポリシロキサンとヒドロシリル基を有するオルガノポリシロキサンとを、塩化白金酸等の白金化合物触媒を用いて付加反応(ヒドロシリル化反応)させることによりシリコーン系ポリマーを生成させる粘着剤である。過酸化物硬化型シリコーン系粘着剤は、一般に、オルガノポリシロキサンを過酸化物により硬化(架橋)させてシリコーン系ポリマーを生成させる粘着剤である。また、縮合型シリコーン系粘着剤は、一般に、末端にシラノール基またはアルコキシシリル基等の加水分解性シリル基を有するポリオルガノシロキサン間の脱水または脱アルコール反応によりシリコーン系ポリマーを生成させる粘着剤である。 The addition-type silicone-based pressure-sensitive adhesive is generally prepared by an addition reaction ( A pressure-sensitive adhesive that generates a silicone-based polymer through a hydrosilylation reaction. A peroxide-curable silicone-based pressure-sensitive adhesive is generally a pressure-sensitive adhesive that cures (crosslinks) organopolysiloxane with a peroxide to form a silicone-based polymer. Condensation-type silicone-based pressure-sensitive adhesives are generally pressure-sensitive adhesives that generate a silicone-based polymer through a dehydration or dealcoholization reaction between polyorganosiloxanes having hydrolyzable silyl groups such as silanol groups or alkoxysilyl groups at their terminals. .
 シリコーン系粘着剤としては、低粘着性にコントロールしやすい点より、例えば、シリコーンゴムとシリコーンレジンとを含有するシリコーン系粘着剤組成物が挙げられる。 As the silicone-based pressure-sensitive adhesive, for example, a silicone-based pressure-sensitive adhesive composition containing a silicone rubber and a silicone resin can be used because it is easy to control the adhesiveness to be low.
 上記シリコーンゴムとしては、シリコーン系のゴム成分であれば特に制限されないが、例えば、ジメチルシロキサン、メチルフェニルシロキサン等を主な構成単位とするオルガノポリシロキサンを使用できる。また、反応の型に応じて、ケイ素原子に結合したアルケニル基を有するシリコーン系ゴム(アルケニル基含有オルガノポリシロキサン;付加反応型の場合)、メチル基を少なくとも有するシリコーン系ゴム(過酸化物硬化型の場合)、末端にシラノール基または加水分解性のアルコキシシリル基を有するシリコーン系ゴム(縮合型の場合)等を用いることができる。なお、シリコーンゴムにおけるオルガノポリシロキサンの重量平均分子量は、通常、15万以上であるが、好ましくは28万~100万であり、特に50万~90万が好適である。 The silicone rubber is not particularly limited as long as it is a silicone-based rubber component, but for example, organopolysiloxane having dimethylsiloxane, methylphenylsiloxane, etc. as main structural units can be used. In addition, depending on the type of reaction, silicone rubber having alkenyl groups bonded to silicon atoms (alkenyl group-containing organopolysiloxane; in the case of addition reaction type), silicone rubber having at least methyl groups (peroxide curing type ), a silicone rubber having a terminal silanol group or a hydrolyzable alkoxysilyl group (in the case of condensation type) can be used. The weight average molecular weight of the organopolysiloxane in the silicone rubber is usually 150,000 or more, preferably 280,000 to 1,000,000, and more preferably 500,000 to 900,000.
 また、上記シリコーンレジンとしては、シリコーン系粘着剤に使用されているシリコーン系のレジンであれば特に制限されないが、例えば、構成単位「R3Si1/2」からなるM単位、構成単位「SiO2」からなるQ単位、構成単位「RSiO3/2」からなるT単位、および構成単位「R2SiO」からなるD単位から選択される少なくとも1種の単位を有する(共)重合体からなるオルガノポリシロキサンからなるシリコーンレジン等が挙げられる。なお、上記構成単位におけるRは炭化水素基またはヒドロキシル基を示す。上記炭化水素基としては、例えば、脂肪族炭化水素基(メチル基、エチル基等のアルキル基等)、脂環式炭化水素基(シクロヘキシル基等のシクロアルキル基等)、芳香族炭化水素基(フェニル基、ナフチル基等のアリール基等)等が挙げられる。上記M単位と、Q単位、T単位およびD単位から選択された少なくとも1種の単位との割合(比)としては、例えば、前者/後者(モル比)=0.3/1~1.5/1(好ましくは0.5/1~1.3/1)程度であることが望ましい。このようなシリコーンレジンにおけるオルガノポリシロキサンには、必要に応じて、ビニル基等の各種官能基が導入されていてもよい。なお、導入される官能基は、架橋反応を生じることが可能な官能基であってもよい。シリコーンレジンとしては、M単位とQ単位からなるMQレジンが好ましい。シリコーンレジンにおけるオルガノポリシロキサンの重量平均分子量は、通常、1000以上であるが、好ましくは1000~20000であり、特に1500~10000が好適である。 The silicone resin is not particularly limited as long as it is a silicone-based resin that is used in silicone-based pressure -sensitive adhesives. 2 ”, T units consisting of the structural unit “RSiO 3/2 ”, and D units consisting of the structural unit “R 2 SiO”. Examples include silicone resins made of organopolysiloxane. In addition, R in the above structural unit represents a hydrocarbon group or a hydroxyl group. Examples of the above hydrocarbon groups include aliphatic hydrocarbon groups (alkyl groups such as methyl and ethyl), alicyclic hydrocarbon groups (cycloalkyl groups such as cyclohexyl), aromatic hydrocarbon groups ( phenyl group, aryl group such as naphthyl group, etc.) and the like. The ratio (ratio) between the M unit and at least one unit selected from the Q unit, T unit and D unit is, for example, the former/latter (molar ratio) = 0.3/1 to 1.5. /1 (preferably 0.5/1 to 1.3/1). Various functional groups such as a vinyl group may be introduced into the organopolysiloxane in such a silicone resin, if necessary. The functional group to be introduced may be a functional group capable of causing a cross-linking reaction. As the silicone resin, an MQ resin composed of M units and Q units is preferred. The weight average molecular weight of the organopolysiloxane in the silicone resin is usually 1,000 or more, preferably 1,000 to 20,000, and more preferably 1,500 to 10,000.
 シリコーンゴムとシリコーンレジンとの配合割合としては、特に制限されないが、低粘着性にコントロールしやすい点より、例えば、シリコーンゴム100重量部に対して、シリコーンレジンが100~220重量部(特に、120~180重量部)であることが好ましい。 The mixing ratio of the silicone rubber and the silicone resin is not particularly limited, but from the point of view of easy control of low tackiness, for example, 100 parts by weight of the silicone rubber and 100 to 220 parts by weight of the silicone resin (especially 120 parts by weight of the silicone resin) ~180 parts by weight).
 なお、シリコーンゴムとシリコーンレジンとを含有するシリコーン系粘着剤組成物において、シリコーンゴムとシリコーンレジンとは、単に混合されている混合状態であってもよく、互いに反応して、縮合物(特に部分縮合物)、架橋反応物、付加反応生成物等となっていてもよい。 In the silicone pressure-sensitive adhesive composition containing the silicone rubber and the silicone resin, the silicone rubber and the silicone resin may be in a mixed state in which they are simply mixed, and react with each other to form condensates (especially partial condensate), a cross-linking reaction product, an addition reaction product, or the like.
 また、シリコーンゴムとシリコーンレジンとを含有するシリコーン系粘着剤組成物では、低粘着性にコントロールしやすい点より、架橋構造体とするために、通常、架橋剤を含んでいる。このような架橋剤としては、特に制限されないが、シロキサン系架橋剤(シリコーン系架橋剤)、過酸化物系架橋剤を好適に用いることができる。架橋剤は、単独でまたは2種以上組み合わせて用いることができる。 In addition, a silicone pressure-sensitive adhesive composition containing a silicone rubber and a silicone resin usually contains a cross-linking agent in order to form a cross-linked structure, since it is easy to control the adhesiveness to be low. Such a cross-linking agent is not particularly limited, but siloxane-based cross-linking agents (silicone-based cross-linking agents) and peroxide-based cross-linking agents can be preferably used. A crosslinking agent can be used individually or in combination of 2 or more types.
 上記シロキサン系架橋剤としては、例えば、分子中にケイ素原子に結合している水素原子を2個以上有するポリオルガノハイドロジェンシロキサンを好適に用いることができる。このようなポリオルガノハイドロジェンシロキサンにおいて、水素原子が結合しているケイ素原子には、水素原子以外に各種有機基が結合していてもよい。該有機基としては、メチル基、エチル基等のアルキル基;フェニル基等のアリール基の他、ハロゲン化アルキル基等が挙げられるが、合成や取り扱いの観点から、メチル基が好ましい。また、ポリオルガノハイドロジェンシロキサンの骨格構造は、直鎖状、分岐状、環状のいずれの骨格構造を有していてもよいが、直鎖状が好適である。 As the siloxane-based cross-linking agent, for example, polyorganohydrogensiloxane having two or more hydrogen atoms bonded to silicon atoms in the molecule can be suitably used. In such a polyorganohydrogensiloxane, various organic groups other than hydrogen atoms may be bonded to silicon atoms to which hydrogen atoms are bonded. Examples of the organic group include alkyl groups such as a methyl group and an ethyl group; aryl groups such as a phenyl group; and halogenated alkyl groups. Moreover, the skeleton structure of the polyorganohydrogensiloxane may have a linear, branched, or cyclic skeleton structure, but is preferably linear.
 上記過酸化物系架橋剤としては、例えば、ジアシルパーオキサイド、アルキルパーオキシエステル、パーオキシジカーボネート、モノパーオキシカーボネート、パーオキシケタール、ジアルキルパーオキサイド、ハイドロパーオキサイド、ケトンパーオキサイド等を使用できる。より具体的には、例えば、過酸化ベンゾイル、t-ブチルパーオキシベンゾエート、ジクミルパーオキサイド、t-ブチルクミルパーオキサイド、ジ-t-ブチルパーオキサイド、2,5-ジメチル-2,5-ジ-t-ブチルパーオキシヘキサン、2,4-ジクロロ-ベンゾイルパーオキサイド、ジ-t-ブチルパーオキシ-ジイソプロピルベンゼン、1,1-ビス(t-ブチルパーオキシ)-3,3,5-トリメチルシクロヘキサン、2,5-ジメチル-2,5-ジ-t-ブチルパーオキシヘキシン-3等が挙げられる。 Examples of the peroxide-based crosslinking agent include diacyl peroxide, alkylperoxyester, peroxydicarbonate, monoperoxycarbonate, peroxyketal, dialkyl peroxide, hydroperoxide, and ketone peroxide. . More specifically, for example, benzoyl peroxide, t-butyl peroxybenzoate, dicumyl peroxide, t-butyl cumyl peroxide, di-t-butyl peroxide, 2,5-dimethyl-2,5-di -t-butylperoxyhexane, 2,4-dichloro-benzoyl peroxide, di-t-butylperoxy-diisopropylbenzene, 1,1-bis(t-butylperoxy)-3,3,5-trimethylcyclohexane , 2,5-dimethyl-2,5-di-t-butylperoxyhexyne-3 and the like.
 付加型シリコーン系粘着剤として、例えば、商品名「KR-3700」、「KR-3701」、「X-40-3237-1」、「X-40-3240」、「X-40-3291-1」、「X-40-3306」(以上、信越化学工業(株)製)が市販されている。また、過酸化物硬化型シリコーン系粘着剤として、例えば、商品名「KR-100」、「KR-101-10」、「KR-130」(以上、信越化学工業(株)製)等が市販されている。 Examples of addition-type silicone pressure-sensitive adhesives include trade names "KR-3700", "KR-3701", "X-40-3237-1", "X-40-3240", and "X-40-3291-1." ” and “X-40-3306” (manufactured by Shin-Etsu Chemical Co., Ltd.) are commercially available. In addition, as peroxide-curable silicone-based adhesives, for example, trade names "KR-100", "KR-101-10", "KR-130" (manufactured by Shin-Etsu Chemical Co., Ltd.) and the like are commercially available. It is
 上記付加型シリコーン系粘着剤組成物には、白金触媒等の硬化触媒を含むことが好ましい。白金触媒として、例えば、商品名「CAT-PL-50T」(信越化学工業(株)製)、商品名「DOWSIL NC-25 Catalyst」、「DOWSIL SRX212 Catalyst」(以上、ダウ・東レ(株)製)等が市販されている。第1粘着剤層の電子部品の受け取り性、位置精度、実装基板への転写性等のバランスの観点から、硬化触媒の含有量は、ベースポリマーとしてのシリコーン系ポリマー(シリコーンゴム、シリコーンレジン等を含む)100重量部に対して、0.1~10重量部程度が好ましい。 The addition-type silicone pressure-sensitive adhesive composition preferably contains a curing catalyst such as a platinum catalyst. As a platinum catalyst, for example, trade name "CAT-PL-50T" (manufactured by Shin-Etsu Chemical Co., Ltd.), trade name "DOWSIL NC-25 Catalyst", "DOWSIL SRX212 Catalyst" (manufactured by Dow Toray Industries, Inc. ) are commercially available. From the viewpoint of the balance of the receptivity of the electronic parts of the first adhesive layer, the positional accuracy, the transferability to the mounting board, etc., the content of the curing catalyst is It is preferably about 0.1 to 10 parts by weight with respect to 100 parts by weight.
(ウレタン系粘着剤)
 ウレタン系粘着剤としては、特に制限されず、公知乃至慣用のウレタン系粘着剤を用いることができ、低粘着性にコントロールしやすい点より、ポリオール、多官能イソシアネート系化合物、および触媒を含有するウレタン系粘着剤組成物が好ましい。
(urethane adhesive)
The urethane-based pressure-sensitive adhesive is not particularly limited, and a known or commonly used urethane-based pressure-sensitive adhesive can be used, and from the viewpoint of easy control of low adhesiveness, a urethane containing a polyol, a polyfunctional isocyanate compound, and a catalyst is used. system adhesive compositions are preferred.
 上記ポリオールとしては、ヒドロキシル基を2個以上有するポリオールであれば、任意の適切なポリオールを採用し得る。このようなポリオールとしては、例えば、ヒドロキシル基を2個有するポリオール(ジオール)、ヒドロキシル基を3個有するポリオール(トリオール)、ヒドロキシル基を4個有するポリオール(テトラオール)、ヒドロキシル基を5個有するポリオール(ペンタオール)、ヒドロキシル基を6個有するポリオール(ヘキサオール)等が挙げられる。ポリオールは、単独でまたは2種以上組み合わせて用いることができる。 Any appropriate polyol can be adopted as the polyol as long as it has two or more hydroxyl groups. Examples of such polyols include polyols having two hydroxyl groups (diols), polyols having three hydroxyl groups (triols), polyols having four hydroxyl groups (tetraols), and polyols having five hydroxyl groups. (pentaol), polyol (hexaol) having six hydroxyl groups, and the like. A polyol can be used individually or in combination of 2 or more types.
 上記ポリオールとしては、好ましくは、数平均分子量(Mn)が400~20000のポリオールを含むことが好ましい。また、ポリオール全量中の、数平均分子量(Mn)が400~20000のポリオールの含有割合は、好ましくは50~100重量%であり、より好ましくは70~100重量%であり、さらに好ましくは90~100重量%であり、特に好ましくは95~100重量%であり、最も好ましくは実質的に100重量%である。ポリオール中の、数平均分子量(Mn)が400~20000のポリオールの含有割合を、上記範囲内に調整することにより、例えば、低粘着性にコントロールされたウレタン系粘着剤を提供することができる。 The above polyol preferably contains a polyol having a number average molecular weight (Mn) of 400 to 20,000. In addition, the content of polyols having a number average molecular weight (Mn) of 400 to 20000 in the total amount of polyols is preferably 50 to 100% by weight, more preferably 70 to 100% by weight, and still more preferably 90 to 100% by weight. 100% by weight, particularly preferably 95-100% by weight, most preferably substantially 100% by weight. By adjusting the content of polyol having a number average molecular weight (Mn) of 400 to 20,000 in the polyol, it is possible to provide, for example, a urethane-based pressure-sensitive adhesive with controlled low adhesiveness.
 上記ポリオールとしては、例えば、ポリエステルポリオール、ポリエーテルポリオール、ポリカプロラクトンポリオール、ポリカーボネートポリオール、ひまし油系ポリオール等が挙げられる。 Examples of the polyols include polyester polyols, polyether polyols, polycaprolactone polyols, polycarbonate polyols, and castor oil-based polyols.
 上記ポリエステルポリオールとしては、例えば、ポリオール成分と酸成分とのエステル化反応によって得ることができる。 The above polyester polyol can be obtained, for example, by an esterification reaction between a polyol component and an acid component.
 上記ポリオール成分としては、例えば、エチレングリコール、ジエチレングリコール、1,3-ブタンジオール、1,4-ブタンジオール、ネオペンチルグリコール、3-メチル-1,5-ペンタンジオール、2-ブチル-2-エチル-1,3-プロパンジオール、2,4-ジエチル-1,5-ペンタンジオール、1,2-ヘキサンジオール、1,6-ヘキサンジオール、1,8-オクタンジオール、1,9-ノナンジオール、2-メチル-1,8-オクタンジオール、1,8-デカンジオール、オクタデカンジオール、グリセリン、トリメチロールプロパン、ペンタエリスリトール、ヘキサントリオール、ポリプロピレングリコール等が挙げられる。 Examples of the polyol component include ethylene glycol, diethylene glycol, 1,3-butanediol, 1,4-butanediol, neopentyl glycol, 3-methyl-1,5-pentanediol, 2-butyl-2-ethyl- 1,3-propanediol, 2,4-diethyl-1,5-pentanediol, 1,2-hexanediol, 1,6-hexanediol, 1,8-octanediol, 1,9-nonanediol, 2- methyl-1,8-octanediol, 1,8-decanediol, octadecanediol, glycerin, trimethylolpropane, pentaerythritol, hexanetriol, polypropylene glycol and the like.
 上記酸成分としては、例えば、コハク酸、メチルコハク酸、アジピン酸、ピメリック酸、アゼライン酸、セバシン酸、1,12-ドデカン二酸、1,14-テトラデカン二酸、ダイマー酸、2-メチル-1,4-シクロヘキサンジカルボン酸、2-エチル-1,4-シクロヘキサンジカルボン酸、テレフタル酸、イソフタル酸、フタル酸、イソフタル酸、テレフタル酸、1,4-ナフタレンジカルボン酸、4,4’-ビフェエルジカルボン酸、これらの酸無水物等が挙げられる。 Examples of the acid component include succinic acid, methylsuccinic acid, adipic acid, pimelic acid, azelaic acid, sebacic acid, 1,12-dodecanedioic acid, 1,14-tetradecanedioic acid, dimer acid, 2-methyl-1 ,4-cyclohexanedicarboxylic acid, 2-ethyl-1,4-cyclohexanedicarboxylic acid, terephthalic acid, isophthalic acid, phthalic acid, isophthalic acid, terephthalic acid, 1,4-naphthalenedicarboxylic acid, 4,4'-biphenyldicarboxylic acid acids, acid anhydrides thereof, and the like.
 上記ポリエーテルポリオールとしては、例えば、水、低分子ポリオール(プロピレングリコール、エチレングリコール、グリセリン、トリメチロールプロパン、ペンタエリスリトール等)、ビスフェノール類(ビスフェノールA等)、ジヒドロキシベンゼン(カテコール、レゾルシン、ハイドロキノン等)等を開始剤として、エチレンオキサイド、プロピレンオキサイド、ブチレンオキサイド等のアルキレンオキサイドを付加重合させることによって得られるポリエーテルポリオールが挙げられる。具体的には、例えば、ポリエチレングリコール、ポリプロピレングリコール、ポリテトラメチレングリコール等が挙げられる。 Examples of the polyether polyols include water, low-molecular-weight polyols (propylene glycol, ethylene glycol, glycerin, trimethylolpropane, pentaerythritol, etc.), bisphenols (bisphenol A, etc.), dihydroxybenzenes (catechol, resorcinol, hydroquinone, etc.). Polyether polyols obtained by addition polymerization of alkylene oxides such as ethylene oxide, propylene oxide, butylene oxide, etc., as initiators. Specific examples include polyethylene glycol, polypropylene glycol, polytetramethylene glycol and the like.
 上記ポリカプロラクトンポリオールとしては、例えば、ε-カプロラクトン、σ-バレーロラクトン等の環状エステルモノマーの開環重合により得られるカプロラクトン系ポリエステルジオール等が挙げられる。 Examples of the polycaprolactone polyols include caprolactone-based polyester diols obtained by ring-opening polymerization of cyclic ester monomers such as ε-caprolactone and σ-valerolactone.
 上記ポリカーボネートポリオールとしては、例えば、上記ポリオール成分とホスゲンとを重縮合反応させて得られるポリカーボネートポリオール;上記ポリオール成分と、炭酸ジメチル、炭酸ジエチル、炭酸ジプロビル、炭酸ジイソプロピル、炭酸ジブチル、エチルブチル炭酸、エチレンカーボネート、プロピレンカーボネート、炭酸ジフェニル、炭酸ジベンジル等の炭酸ジエステル類とをエステル交換縮合させて得られるポリカーボネートポリオール;上記ポリオール成分を2種以上併用して得られる共重合ポリカーボネートポリオール;上記各種ポリカーボネートポリオールとカルボキシル基含有化合物とをエステル化反応させて得られるポリカーボネートポリオール;上記各種ポリカーボネートポリオールとヒドロキシル基含有化合物とをエーテル化反応させて得られるポリカーボネートポリオール;上記各種ポリカーボネートポリオールとエステル化合物とをエステル交換反応させて得られるポリカーボネートポリオール;上記各種ポリカーボネートポリオールとヒドロキシル基含有化合物とをエステル交換反応させて得られるポリカーボネートポリオール;上記各種ポリカーボネートポリオールとジカルボン酸化合物とを重縮合反応させて得られるポリエステル系ポリカーボネートポリオール;上記各種ポリカーボネートポリオールとアルキレンオキサイドとを共重合させて得られる共重合ポリエーテル系ポリカーボネートポリオール等が挙げられる。 Examples of the polycarbonate polyol include polycarbonate polyol obtained by subjecting the polyol component and phosgene to a polycondensation reaction; the polyol component, dimethyl carbonate, diethyl carbonate, dipropyl carbonate, diisopropyl carbonate, dibutyl carbonate, ethylbutyl carbonate, ethylene carbonate , propylene carbonate, diphenyl carbonate, dibenzyl carbonate, and other carbonic acid diesters through transesterification condensation; copolymerized polycarbonate polyols obtained by combining two or more of the above polyol components; various polycarbonate polyols and carboxyl groups above. Polycarbonate polyol obtained by esterification reaction with the containing compound; Polycarbonate polyol obtained by etherification reaction of the above various polycarbonate polyols and hydroxyl group-containing compounds; Obtained by transesterifying the above various polycarbonate polyols and ester compounds. Polycarbonate polyols obtained by transesterification of various polycarbonate polyols and hydroxyl group-containing compounds; Polyester-based polycarbonate polyols obtained by polycondensation reaction of various polycarbonate polyols and dicarboxylic acid compounds; Various polycarbonates above A copolymerized polyether-based polycarbonate polyol obtained by copolymerizing a polyol and an alkylene oxide may be mentioned.
 上記ひまし油系ポリオールとしては、例えば、ひまし油脂肪酸と上記ポリオール成分とを反応させて得られるひまし油系ポリオールが挙げられる。具体的には、例えば、ひまし油脂肪酸とポリプロピレングリコールとを反応させて得られるひまし油系ポリオールが挙げられる。 Examples of the castor oil-based polyols include castor oil-based polyols obtained by reacting castor oil fatty acids with the above polyol components. Specific examples include castor oil-based polyols obtained by reacting castor oil fatty acids with polypropylene glycol.
 上記ポリオールとしては、第1粘着剤層体の電子部品への低粘着性、濡れ性等の観点から、ヒドロキシル基を3個有するポリオール(トリオール)を必須成分として用いることが好ましい。ヒドロキシル基を3個有するポリオール(トリオール)は、上記ポリオールを構成する成分全量に対して、50~100重量%含量することが好ましく、70~100重量%含量することがより好ましい。 As the above polyol, it is preferable to use a polyol (triol) having three hydroxyl groups as an essential component from the viewpoint of low adhesion and wettability of the first pressure-sensitive adhesive layer to electronic parts. The content of the polyol (triol) having three hydroxyl groups is preferably 50 to 100% by weight, more preferably 70 to 100% by weight, based on the total amount of components constituting the polyol.
 上記多官能イソシアネート系化合物としては、例えば、脂肪族系ポリイソシアネート、脂環族系ポリイソシアネート、芳香族系ポリイソシアネート化合物等が挙げられる。 Examples of the polyfunctional isocyanate compounds include aliphatic polyisocyanates, alicyclic polyisocyanates, and aromatic polyisocyanate compounds.
 上記脂肪族ポリイソシアネートとしては、例えば、トリメチレンジイソシアネート、テトラメチレンジイソシアネート、ヘキサメチレンジイソシアネート、ペンタメチレンジイソシアネート、1,2-プロピレンジイソシアネート、1,3-ブチレンジイソシアネート、ドデカメチレンジイソシアネート、2,4,4-トリメチルヘキサメチレンジイソシアネート等が挙げられる。 Examples of the aliphatic polyisocyanate include trimethylene diisocyanate, tetramethylene diisocyanate, hexamethylene diisocyanate, pentamethylene diisocyanate, 1,2-propylene diisocyanate, 1,3-butylene diisocyanate, dodecamethylene diisocyanate, 2,4,4- and trimethylhexamethylene diisocyanate.
 上記脂環族ポリイソシアネートとしては、例えば、1,3-シクロペンテンジイソシアネート、1,3-シクロヘキサンジイソシアネート、1,4-シクロヘキサンジイソシアネート、イソホロンジイソシアネート、水素添加ジフェニルメタンジイソシアネート、水素添加キシリレンジイソシアネート、水素添加トリレンジイソシアネート水素添加テトラメチルキシリレンジイソシアネート等が挙げられる。 Examples of the alicyclic polyisocyanate include 1,3-cyclopentene diisocyanate, 1,3-cyclohexane diisocyanate, 1,4-cyclohexane diisocyanate, isophorone diisocyanate, hydrogenated diphenylmethane diisocyanate, hydrogenated xylylene diisocyanate, hydrogenated tolylene Isocyanate Hydrogenated tetramethylxylylene diisocyanate and the like can be mentioned.
 上記芳香族ポリイソシアネートとしては、例えば、フェニレンジイソシアネート、2,4-トリレンジイソソアネート、2,6-トリレンジイソソアネート、2,2’-ジフェニルメタンジイソシアネート、4,4’-ジフェニルメタンジイソシアネート、4,4’-トルイジンジイソシアネート、4,4’-ジフェニルエーテルジイソシアネート、4,4’-ジフェニルジイソシアネート、1,5-ナフタレンジイソシアネート、キシリレンジイソシアネート等が挙げられる。 Examples of the aromatic polyisocyanate include phenylene diisocyanate, 2,4-tolylene diisocyanate, 2,6-tolylene diisocyanate, 2,2′-diphenylmethane diisocyanate, 4,4′-diphenylmethane diisocyanate, 4 ,4'-toluidine diisocyanate, 4,4'-diphenyl ether diisocyanate, 4,4'-diphenyl diisocyanate, 1,5-naphthalene diisocyanate, xylylene diisocyanate and the like.
 中でも、脂肪族ポリイソシアネートおよびその変性体が好ましい。脂肪族ポリイソシアネートおよびその変性体は、他のイソシアネート系架橋剤に比べて、架橋構造が柔軟性に富み、低粘着性にコントロールしやすい。脂肪族ポリイソシアネートおよびその変性体としては、特に、ヘキサメチレンジイソシアネートおよびその変性体が好ましい。 Among them, aliphatic polyisocyanates and modified products thereof are preferred. Aliphatic polyisocyanates and modified products thereof have a more flexible crosslinked structure than other isocyanate-based crosslinkers, and can be easily controlled to have low tackiness. Hexamethylene diisocyanate and its modified form are particularly preferred as the aliphatic polyisocyanate and its modified form.
 上記多官能イソシアネート系化合物、および上記ポリオールは、第1粘着剤層体の電子部品への低粘着性、濡れ性の観点から、上記多官能イソシアネート系化合物のイソシアネート基、および上記ポリオールのヒドロキシル基の当量比(NCO/OH)が1~5であることが好ましく、1.1~3であることがより好ましく、1.2~2であることがさらに好ましい。 The polyfunctional isocyanate compound and the polyol are selected from the viewpoints of low adhesion and wettability to electronic parts of the first pressure-sensitive adhesive layer, and the isocyanate group of the polyfunctional isocyanate compound and the hydroxyl group of the polyol. The equivalent ratio (NCO/OH) is preferably 1-5, more preferably 1.1-3, even more preferably 1.2-2.
 上記ウレタン系粘着剤組成物には、鉄系化合物、および/または錫系化合物等の触媒を含むことが好ましい。具体的には、ジラウリン酸ジブチルスズ、ジラウリン酸ジオクチルスズ等の錫系触媒、トリス(アセチルアセトナート)鉄、トリス(ヘキサン-2,4-ジオナト)鉄、トリス(ヘプタン-2,4-ジオナト)鉄、トリス(ヘプタン-3,5-ジオナト)鉄、トリス(5-メチルヘキサン-2,4-ジオナト)鉄、トリス(オクタン-2,4-ジオナト)鉄、トリス(6-メチルヘプタン-2,4-ジオナト)鉄、トリス(2,6-ジメチルヘプタン-3,5-ジオナト)鉄、トリス(ノナン-2,4-ジオナト)鉄、トリス(ノナン-4,6-ジオナト)鉄、トリス(2,2,6,6-テトラメチルヘプタン-3,5-ジオナト)鉄、トリス(トリデカン-6,8-ジオナト)鉄、トリス(1-フェニルブタン-1,3-ジオナト)鉄、トリス(ヘキサフルオロアセチルアセトナト)鉄、トリス(アセト酢酸エチル)鉄、トリス(アセト酢酸-n-プロピル)鉄、トリス(アセト酢酸イソプロピル)鉄、トリス(アセト酢酸-n-ブチル)鉄、トリス(アセト酢酸-sec-ブチル)鉄、トリス(アセト酢酸-tert-ブチル)鉄、トリス(プロピオニル酢酸メチル)鉄、トリス(プロピオニル酢酸エチル)鉄、トリス(プロピオニル酢酸-n-プロピル)鉄、トリス(プロピオニル酢酸イソプロピル)鉄、トリス(プロピオニル酢酸-n-ブチル)鉄、トリス(プロピオニル酢酸-sec-ブチル)鉄、トリス(プロピオニル酢酸-tert-ブチル)鉄、トリス(アセト酢酸ベンジル)鉄、トリス(マロン酸ジメチル)鉄、トリス(マロン酸ジエチル)鉄、トリメトキシ鉄、トリエトキシ鉄、トリイソプロポキシ鉄、塩化第二鉄等の鉄系触媒が挙げられる。 The urethane-based pressure-sensitive adhesive composition preferably contains a catalyst such as an iron-based compound and/or a tin-based compound. Specifically, tin-based catalysts such as dibutyltin dilaurate and dioctyltin dilaurate, tris(acetylacetonate)iron, tris(hexane-2,4-dionato)iron, tris(heptane-2,4-dionato)iron , tris(heptane-3,5-dionato)iron, tris(5-methylhexane-2,4-dionato)iron, tris(octane-2,4-dionato)iron, tris(6-methylheptane-2,4 -dionato)iron, tris(2,6-dimethylheptane-3,5-dionato)iron, tris(nonane-2,4-dionato)iron, tris(nonane-4,6-dionato)iron, tris(2, 2,6,6-tetramethylheptane-3,5-dionato)iron, tris(tridecan-6,8-dionato)iron, tris(1-phenylbutane-1,3-dionato)iron, tris(hexafluoroacetyl Acetonato) iron, Tris(ethyl acetoacetate) iron, Tris(acetoacetate-n-propyl) iron, Tris(isopropyl acetoacetate) iron, Tris(acetoacetate-n-butyl) iron, Tris(acetoacetate-sec- butyl)iron, tris(tert-butylacetoacetate)iron, tris(methylpropionylacetate)iron, tris(ethylpropionylacetate)iron, tris(propionylacetate-n-propyl)iron, tris(isopropylpropionylacetate)iron, Tris(propionylacetate-n-butyl)iron, Tris(propionylacetate-sec-butyl)iron, Tris(propionylacetate-tert-butyl)iron, Tris(benzylacetoacetate)iron, Tris(dimethylmalonate)iron, Tris Iron-based catalysts such as (diethyl malonate)iron, trimethoxyiron, triethoxyiron, triisopropoxyiron, and ferric chloride can be mentioned.
 上記ウレタン系粘着剤組成物に含有する触媒の含有量(使用量)は、ポリオール100重量部に対して、0.002~0.5重量部が好ましく、0.005~0.3重量部がより好ましく、0.01~0.1重量部がさらに好ましい。この範囲内にあると、粘着剤層を形成した際に架橋反応の速度が速く、粘着剤組成物のポットライフも長くなり、好ましい態様となる。 The content (use amount) of the catalyst contained in the urethane pressure-sensitive adhesive composition is preferably 0.002 to 0.5 parts by weight, preferably 0.005 to 0.3 parts by weight, with respect to 100 parts by weight of the polyol. More preferably, 0.01 to 0.1 parts by weight is even more preferable. Within this range, the speed of the cross-linking reaction is high when the pressure-sensitive adhesive layer is formed, and the pot life of the pressure-sensitive adhesive composition is lengthened, which is a preferred embodiment.
 また、ウレタン系粘着剤としては、低粘着性にコントロールしやすい点より、ウレタンプレポリマーを含有するウレタン系粘着剤組成物も好ましい。 In addition, as the urethane-based adhesive, a urethane-based adhesive composition containing a urethane prepolymer is also preferable because it is easy to control the adhesiveness to be low.
 ウレタンプレポリマーを含有するウレタン系粘着剤組成物は、例えば、ウレタンプレポリマーとしてのポリウレタンポリオールと多官能イソシアネート系化合物を含有する粘着剤組成物が挙げられる。ウレタンプレポリマーは、単独でまたは2種以上組み合わせて用いることができる。多官能イソシアネート系化合物は、単独でまたは2種以上組み合わせて用いることができる。 Urethane-based pressure-sensitive adhesive compositions containing urethane prepolymers include, for example, pressure-sensitive adhesive compositions containing polyurethane polyols as urethane prepolymers and polyfunctional isocyanate-based compounds. A urethane prepolymer can be used individually or in combination of 2 or more types. A polyfunctional isocyanate compound can be used individually or in combination of 2 or more types.
 ウレタンプレポリマーとしてのポリウレタンポリオールは、好ましくは、ポリエステルポリオールと、ポリエーテルポリオールとを、触媒存在下または無触媒下で、有機ポリイソシアネ-ト化合物と反応させてなるものである。 A polyurethane polyol as a urethane prepolymer is preferably obtained by reacting a polyester polyol and a polyether polyol with an organic polyisocyanate compound in the presence or absence of a catalyst.
 ポリエステルポリオールとしては、任意の適切なポリエステルポリオールを用い得る。このようなポリエステルポリオールとして、例えば、酸成分とグリコール成分とを反応させて得られるポリエステルポリオールが挙げられる。酸成分としては、例えば、テレフタル酸、アジピン酸、アゼライン酸、セバチン酸、無水フタル酸、イソフタル酸、トリメリット酸等が挙げられる。グリコール成分としては、例えば、エチレングリコール、プロピレングリコール、ジエチレングリコール、ブチレングリコール、1,6-ヘキサングリコール、3-メチル-1,5-ペンタンジオール、3,3’-ジメチロールヘプタン、ポリオキシエチレングリコール、ポリオキシプロピレングリコール、1,4-ブタンジオール、ネオペンチルグリコール、ブチルエチルペンタンジオール、ポリオール成分としてグリセリン、トリメチロールプロパン、ペンタエリスリトール等が挙げられる。ポリエステルポリオールとしては、その他に、ポリカプロラクトン、ポリ(β-メチル-γ-バレロラクトン)、ポリバレロラクトン等のラクトン類を開環重合して得られるポリエステルポリオール等も挙げられる。 Any appropriate polyester polyol can be used as the polyester polyol. Examples of such polyester polyols include polyester polyols obtained by reacting an acid component and a glycol component. Examples of acid components include terephthalic acid, adipic acid, azelaic acid, sebacic acid, phthalic anhydride, isophthalic acid, and trimellitic acid. Examples of glycol components include ethylene glycol, propylene glycol, diethylene glycol, butylene glycol, 1,6-hexane glycol, 3-methyl-1,5-pentanediol, 3,3′-dimethylolheptane, polyoxyethylene glycol, Examples include polyoxypropylene glycol, 1,4-butanediol, neopentyl glycol, butylethylpentanediol, and polyol components such as glycerin, trimethylolpropane, and pentaerythritol. Polyester polyols also include polyester polyols obtained by ring-opening polymerization of lactones such as polycaprolactone, poly(β-methyl-γ-valerolactone) and polyvalerolactone.
 ポリエステルポリオールの分子量としては、低分子量から高分子量まで使用可能である。ポリエステルポリオールの分子量としては、数平均分子量が、好ましくは500~5000である。数平均分子量が500未満では、反応性が高くなり、ゲル化しやすくなるおそれがある。数平均分子量が5000を超えると、反応性が低くなり、さらにはポリウレタンポリオール自体の凝集力が小さくなるおそれがある。ポリエステルポリオールの使用量は、ポリウレタンポリオールを構成するポリオール中、好ましくは10~90モル%である。 The molecular weight of the polyester polyol can range from low molecular weight to high molecular weight. As for the molecular weight of the polyester polyol, the number average molecular weight is preferably 500 to 5,000. If the number average molecular weight is less than 500, the reactivity becomes high and gelation may easily occur. If the number-average molecular weight exceeds 5,000, the reactivity may become low, and the cohesive strength of the polyurethane polyol itself may become small. The amount of the polyester polyol used is preferably 10 to 90 mol % of the polyol constituting the polyurethane polyol.
 ポリエーテルポリオールとしては、任意の適切なポリエーテルポリオールを用い得る。このようなポリエーテルポリオールとしては、例えば、水、プロピレングリコール、エチレングリコール、グリセリン、トリメチロールプロパン等の低分子量ポリオールを開始剤として用いて、エチレンオキシド、プロピレンオキシド、ブチレンオキシド、テトラヒドロフラン等のオキシラン化合物を重合させることにより得られるポリエーテルポリオールが挙げられる。このようなポリエーテルポリオールとしては、具体的には、例えば、ポリプロピレングリコール、ポリエチレングリコール、ポリテトラメチレングリコール等の官能基数が2以上のポリエーテルポリオールが挙げられる。 Any appropriate polyether polyol can be used as the polyether polyol. Examples of such polyether polyols include water, propylene glycol, ethylene glycol, glycerin, trimethylolpropane, and other low-molecular-weight polyols as initiators, and ethylene oxide, propylene oxide, butylene oxide, tetrahydrofuran, and other oxirane compounds. Examples include polyether polyols obtained by polymerization. Specific examples of such polyether polyols include polyether polyols having two or more functional groups, such as polypropylene glycol, polyethylene glycol, and polytetramethylene glycol.
 ポリエーテルポリオールの分子量としては、低分子量から高分子量まで使用可能である。ポリエーテルポリオールの分子量としては、数平均分子量が、好ましくは1000~5000である。数平均分子量が1000未満では、反応性が高くなり、ゲル化しやすくなるおそれがある。数平均分子量が5000を超えると、反応性が低くなり、さらにはポリウレタンポリオール自体の凝集力が小さくなるおそれがある。ポリエーテルポリオールの使用量は、ポリウレタンポリオールを構成するポリオール中、好ましくは20~80モル%である。 The molecular weight of the polyether polyol can range from low molecular weight to high molecular weight. As for the molecular weight of the polyether polyol, the number average molecular weight is preferably 1,000 to 5,000. If the number average molecular weight is less than 1,000, the reactivity becomes high and gelation may easily occur. If the number-average molecular weight exceeds 5,000, the reactivity may become low, and the cohesive strength of the polyurethane polyol itself may become small. The amount of polyether polyol used is preferably 20 to 80 mol % of the polyols constituting the polyurethane polyol.
 ポリエーテルポリオールは、必要に応じてその一部を、エチレングリコール、1,4-ブタンジオール、ネオペンチルグリコール、ブチルエチルペンタンジオール、グリセリン、トリメチロールプロパン、ペンタエリスリトール等のグリコール類や、エチレンジアミン、N-アミノエチルエタノールアミン、イソホロンジアミン、キシリレンジアミン等の多価アミン類等に置き換えて併用することができる。 Part of the polyether polyol, if necessary, is ethylene glycol, 1,4-butanediol, neopentyl glycol, butylethylpentanediol, glycerin, trimethylolpropane, glycols such as pentaerythritol, ethylenediamine, N - Polyvalent amines such as aminoethylethanolamine, isophoronediamine, and xylylenediamine can be substituted and used in combination.
 ポリエーテルポリオールとしては、2官能性のポリエーテルポリオールのみを用いてもよいし、数平均分子量が1000~5000であり、且つ、1分子中に少なくとも3個以上の水酸基を有するポリエーテルポリオールを一部もしくは全部用いてもよい。ポリエーテルポリオールとして、平均分子量が1000~5000であり、且つ、1分子中に少なくとも3個以上の水酸基を有するポリエーテルポリオールを一部もしくは全部用いると、粘着力と再剥離性のバランスが良好となり得る。このようなポリエーテルポリオールにおいては、数平均分子量が1000未満では、反応性が高くなり、ゲル化しやすくなるおそれがある。また、このようなポリエーテルポリオールにおいては、数平均分子量が5000を超えると、反応性が低くなり、さらにはポリウレタンポリオール自体の凝集力が小さくなるおそれがある。このようなポリエーテルポリオールの数平均分子量は、より好ましくは2500~3500である。 As the polyether polyol, only a bifunctional polyether polyol may be used, or a polyether polyol having a number average molecular weight of 1000 to 5000 and at least 3 or more hydroxyl groups in one molecule is used. Part or all may be used. When a polyether polyol having an average molecular weight of 1000 to 5000 and having at least 3 or more hydroxyl groups in one molecule is partially or wholly used as the polyether polyol, the adhesive strength and removability are well balanced. obtain. In such a polyether polyol, if the number average molecular weight is less than 1000, the reactivity becomes high and there is a possibility that gelation is likely to occur. Moreover, in such a polyether polyol, if the number average molecular weight exceeds 5,000, the reactivity may be lowered, and the cohesive strength of the polyurethane polyol itself may be lowered. The number average molecular weight of such polyether polyols is more preferably 2500-3500.
 有機ポリイソシアネート化合物としては、任意の適切な有機ポリイソシアネート化合物を用い得る。このような有機ポリイソシアネート化合物としては、例えば、芳香族ポリイソシアネート、脂肪族ポリイソシアネート、芳香脂肪族ポリイソシアネート、脂環族ポリイソシアネート等が挙げられる。 Any appropriate organic polyisocyanate compound can be used as the organic polyisocyanate compound. Examples of such organic polyisocyanate compounds include aromatic polyisocyanates, aliphatic polyisocyanates, araliphatic polyisocyanates, and alicyclic polyisocyanates.
 芳香族ポリイソシアネートとしては、例えば、1,3-フェニレンジイソシアネート、4,4’-ジフェニルジイソシアネート、1,4-フェニレンジイソシアネート、4,4’-ジフェニルメタンジイソシアネート、2,4-トリレンジイソシアネート、2,6-トリレンジイソシアネート、4,4’-トルイジンジイソシアネート、2,4,6-トリイソシアネートトルエン、1,3,5-トリイソシアネートベンゼン、ジアニシジンジイソシアネート、4,4’-ジフェニルエーテルジイソシアネート、4,4’,4"-トリフェニルメタントリイソシアネート等が挙げられる。 Examples of aromatic polyisocyanates include 1,3-phenylene diisocyanate, 4,4'-diphenyldiisocyanate, 1,4-phenylene diisocyanate, 4,4'-diphenylmethane diisocyanate, 2,4-tolylene diisocyanate, 2,6 - tolylene diisocyanate, 4,4'-toluidine diisocyanate, 2,4,6-triisocyanatotoluene, 1,3,5-triisocyanatobenzene, dianisidine diisocyanate, 4,4'-diphenyl ether diisocyanate, 4,4', 4″-triphenylmethane triisocyanate and the like.
 脂肪族ポリイソシアネートとしては、例えば、トリメチレンジイソシアネート、テトラメチレンジイソシアネート、ヘキサメチレンジイソシアネート、ペンタメチレンジイソシアネート、1,2-プロピレンジイソシアネート、2,3-ブチレンジイソシアネート、1,3-ブチレンジイソシアネート、ドデカメチレンジイソシアネート、2,4,4-トリメチルヘキサメチレンジイソシアネート等が挙げられる。 Examples of aliphatic polyisocyanates include trimethylene diisocyanate, tetramethylene diisocyanate, hexamethylene diisocyanate, pentamethylene diisocyanate, 1,2-propylene diisocyanate, 2,3-butylene diisocyanate, 1,3-butylene diisocyanate, dodecamethylene diisocyanate, 2,4,4-trimethylhexamethylene diisocyanate and the like.
 芳香脂肪族ポリイソシアネートとしては、例えば、ω,ω’-ジイソシアネート-1,3-ジメチルベンゼン、ω,ω’-ジイソシアネート-1,4-ジメチルベンゼン、ω,ω’-ジイソシアネート-1,4-ジエチルベンゼン、1,4-テトラメチルキシリレンジイソシアネート、1,3-テトラメチルキシリレンジイソシアネート等が挙げられる。 Examples of araliphatic polyisocyanates include ω,ω'-diisocyanate-1,3-dimethylbenzene, ω,ω'-diisocyanate-1,4-dimethylbenzene, ω,ω'-diisocyanate-1,4-diethylbenzene , 1,4-tetramethylxylylene diisocyanate, 1,3-tetramethylxylylene diisocyanate, and the like.
 脂環族ポリイソシアネートとしては、例えば、3-イソシアネートメチル-3,5,5-トリメチルシクロヘキシルイソシアネート、1,3-シクロペンタンジイソシアネート、1,3-シクロヘキサンジイソシアネート、1,4-シクロヘキサンジイソシアネート、メチル-2,4-シクロヘキサンジイソシアネート、メチル-2,6-シクロヘキサンジイソシアネート、4,4’-メチレンビス(シクロヘキシルイソシアネート)、1,4-ビス(イソシアネートメチル)シクロヘキサン、1,4-ビス(イソシアネートメチル)シクロヘキサン等が挙げられる。 Examples of alicyclic polyisocyanates include 3-isocyanatomethyl-3,5,5-trimethylcyclohexyl isocyanate, 1,3-cyclopentane diisocyanate, 1,3-cyclohexane diisocyanate, 1,4-cyclohexane diisocyanate, methyl-2 ,4-cyclohexane diisocyanate, methyl-2,6-cyclohexane diisocyanate, 4,4′-methylenebis(cyclohexyl isocyanate), 1,4-bis(isocyanatomethyl)cyclohexane, 1,4-bis(isocyanatomethyl)cyclohexane and the like. be done.
 有機ポリイソシアネート化合物としては、トリメチロールプロパンアダクト体、水と反応したビュウレット体、イソシアヌレート環を有する3量体等も併用することができる。 As the organic polyisocyanate compound, a trimethylolpropane adduct, a water-reacted burette, a trimer having an isocyanurate ring, and the like can also be used in combination.
 ポリウレタンポリオールを得る際に用い得る触媒としては、任意の適切な触媒を用い得る。このような触媒としては、例えば、3級アミン系化合物、有機金属系化合物等が挙げられる。 Any suitable catalyst can be used as the catalyst that can be used in obtaining the polyurethane polyol. Examples of such catalysts include tertiary amine compounds and organometallic compounds.
 3級アミン系化合物としては、例えば、トリエチルアミン、トリエチレンジアミン、1,8-ジアザビシクロ(5,4,0)-ウンデセン-7(DBU)等が挙げられる。 Examples of tertiary amine compounds include triethylamine, triethylenediamine, 1,8-diazabicyclo(5,4,0)-undecene-7 (DBU), and the like.
 有機金属系化合物としては、例えば、錫系化合物、非錫系化合物等が挙げられる。 Examples of organometallic compounds include tin-based compounds and non-tin-based compounds.
 錫系化合物としては、例えば、ジブチル錫ジクロライド、ジブチル錫オキサイド、ジブチル錫ジブロマイド、ジブチル錫ジマレエート、ジブチル錫ジラウレート(DBTDL)、ジブチル錫ジアセテート、ジブチル錫スルファイド、トリブチル錫スルファイド、トリブチル錫オキサイド、トリブチル錫アセテート、トリエチル錫エトキサイド、トリブチル錫エトキサイド、ジオクチル錫オキサイド、トリブチル錫クロライド、トリブチル錫トリクロロアセテート、2-エチルヘキサン酸錫等が挙げられる。 Examples of tin compounds include dibutyltin dichloride, dibutyltin oxide, dibutyltin dibromide, dibutyltin dimaleate, dibutyltin dilaurate (DBTDL), dibutyltin diacetate, dibutyltin sulfide, tributyltin sulfide, tributyltin oxide, tributyltin Tin acetate, triethyltin ethoxide, tributyltin ethoxide, dioctyltin oxide, tributyltin chloride, tributyltin trichloroacetate, tin 2-ethylhexanoate and the like.
 非錫系化合物としては、例えば、ジブチルチタニウムジクロライド、テトラブチルチタネート、ブトキシチタニウムトリクロライド等のチタン系化合物;オレイン酸鉛、2-エチルヘキサン酸鉛、安息香酸鉛、ナフテン酸鉛等の鉛系化合物;2-エチルヘキサン酸鉄、鉄アセチルアセトネート等の鉄系化合物;安息香酸コバルト、2-エチルヘキサン酸コバルト等のコバルト系化合物;ナフテン酸亜鉛、2-エチルヘキサン酸亜鉛等の亜鉛系化合物;ナフテン酸ジルコニウム等のジルコニウム系化合物等が挙げられる。 Examples of non-tin-based compounds include titanium-based compounds such as dibutyl titanium dichloride, tetrabutyl titanate, and butoxy titanium trichloride; lead-based compounds such as lead oleate, lead 2-ethylhexanoate, lead benzoate, and lead naphthenate. iron-based compounds such as iron 2-ethylhexanoate and iron acetylacetonate; cobalt-based compounds such as cobalt benzoate and cobalt 2-ethylhexanoate; zinc-based compounds such as zinc naphthenate and zinc 2-ethylhexanoate; Examples include zirconium compounds such as zirconium naphthenate.
 ポリウレタンポリオールを得る際に触媒を使用する場合、ポリエステルポリオールとポリエーテルポリオールの2種類のポリオールが存在する系では、その反応性の相違のため、単独の触媒の系では、ゲル化したり反応溶液が濁ったりするという問題が生じやすい。そこで、ポリウレタンポリオールを得る際に2種類の触媒を用いることにより、反応速度、触媒の選択性等が制御しやすくなり、これらの問題を解決し得る。このような2種類の触媒の組み合わせとしては、例えば、3級アミン/有機金属系、錫系/非錫系、錫系/錫系が挙げられ、好ましくは錫系/錫系であり、より好ましくはジブチル錫ジラウレートと2-エチルヘキサン酸錫の組み合わせである。その配合比は、重量比で、2-エチルヘキサン酸錫/ジブチル錫ジラウレートが、好ましくは1未満であり、より好ましくは0.2~0.6である。配合比が1以上では、触媒活性のバランスによりゲル化しやすくなるおそれがある。 When a catalyst is used to obtain a polyurethane polyol, in a system in which two kinds of polyols, a polyester polyol and a polyether polyol, are present, gelation or a reaction solution may occur in a single catalyst system due to the difference in reactivity. The problem of turbidity is likely to occur. Therefore, by using two kinds of catalysts when obtaining a polyurethane polyol, the reaction rate, the selectivity of the catalyst, etc. can be easily controlled, and these problems can be solved. Combinations of such two types of catalysts include, for example, tertiary amine/organometallic, tin/non-tin, and tin/tin, preferably tin/tin, and more preferably. is a combination of dibutyltin dilaurate and tin 2-ethylhexanoate. The weight ratio of tin 2-ethylhexanoate/dibutyltin dilaurate is preferably less than 1, more preferably 0.2 to 0.6. If the compounding ratio is 1 or more, gelation may tend to occur due to the balance of catalytic activity.
 ポリウレタンポリオールを得る際に触媒を使用する場合、触媒の使用量は、ポリエステルポリオールとポリエーテルポリオールと有機ポリイソシアネ-ト化合物の総量に対して、好ましくは0.01~1.0重量%である。 When a catalyst is used in obtaining the polyurethane polyol, the amount of catalyst used is preferably 0.01 to 1.0% by weight with respect to the total amount of the polyester polyol, polyether polyol and organic polyisocyanate compound.
 ポリウレタンポリオールを得る際に触媒を使用する場合、反応温度は、好ましくは100℃未満であり、より好ましくは85℃~95℃である。100℃以上になると反応速度、架橋構造の制御が困難となるおそれがあり、所定の分子量を有するポリウレタンポリオールが得難くなるおそれがある。 When using a catalyst in obtaining the polyurethane polyol, the reaction temperature is preferably less than 100°C, more preferably 85°C to 95°C. If the temperature is 100° C. or higher, it may become difficult to control the reaction rate and the crosslinked structure, and it may become difficult to obtain a polyurethane polyol having a predetermined molecular weight.
 ポリウレタンポリオールを得る際には、触媒を用いなくてもよい。その場合は、反応温度が、好ましくは100℃以上であり、より好ましくは110℃以上である。また、無触媒下でポリウレタンポリオールを得る際は、3時間以上反応させることが好ましい。 A catalyst may not be used when obtaining polyurethane polyol. In that case, the reaction temperature is preferably 100° C. or higher, more preferably 110° C. or higher. Moreover, when obtaining a polyurethane polyol under no catalyst, it is preferable to carry out reaction for 3 hours or more.
 ポリウレタンポリオールを得る方法としては、例えば、1)ポリエステルポリオール、ポリエーテルポリオール、触媒、有機ポリイソシアネートを全量フラスコに仕込む方法、2)ポリエステルポリオール、ポリエーテルポリオール、触媒をフラスコに仕込んで有機ポリイソシアネ-トを滴下する添加する方法が挙げられる。ポリウレタンポリオールを得る方法として、反応を制御する上では、2)の方法が好ましい。 Methods for obtaining polyurethane polyol include, for example, 1) a method of charging a polyester polyol, a polyether polyol, a catalyst, and an organic polyisocyanate into a volumetric flask, and 2) a method of charging a polyester polyol, a polyether polyol, and a catalyst into a flask to produce an organic polyisocyanate. can be added dropwise. As a method for obtaining a polyurethane polyol, the method 2) is preferable from the viewpoint of controlling the reaction.
 ポリウレタンポリオールを得る際には、任意の適切な溶剤を用い得る。このような溶剤としては、例えば、メチルエチルケトン、酢酸エチル、トルエン、キシレン、アセトン等が挙げられる。これらの溶剤の中でも、好ましくはトルエンである。 Any suitable solvent can be used to obtain the polyurethane polyol. Examples of such solvents include methyl ethyl ketone, ethyl acetate, toluene, xylene and acetone. Among these solvents, toluene is preferred.
 多官能イソシアネート系化合物としては、前述したものを援用し得る。 As the polyfunctional isocyanate compound, those mentioned above can be used.
 ウレタンプレポリマーを含有する組成物から得られるポリウレタン系組成物を製造する方法としては、いわゆる「ウレタンプレポリマー」を原料として用いてポリウレタン系樹脂組成物を製造する方法であれば、任意の適切な製造方法を採用し得る。 As a method for producing a polyurethane-based composition obtained from a composition containing a urethane prepolymer, any suitable method may be used as long as it is a method for producing a polyurethane-based resin composition using a so-called "urethane prepolymer" as a raw material. Manufacturing methods may be employed.
(アクリル系粘着剤)
 アクリル系粘着剤としては、特に制限されず、公知乃至慣用のアクリル系粘着剤を用いることができ、例えば、低粘着性にコントロールしやすい点より、アクリル系ポリマーをベースポリマーとして含有するアクリル系粘着剤組成物が挙げられる。
(Acrylic adhesive)
The acrylic pressure-sensitive adhesive is not particularly limited, and a known or commonly used acrylic pressure-sensitive adhesive can be used. agent compositions.
 上記アクリル系ポリマーは、ポリマーの構成単位として、アクリル系モノマー(分子中に(メタ)アクリロイル基を有するモノマー成分)に由来する構成単位を含むポリマーである。上記アクリル系ポリマーは、(メタ)アクリル酸エステルに由来する構成単位を質量割合で最も多く含むポリマーであることが好ましい。なお、アクリル系ポリマーは、単独でまたは2種以上組み合わせて用いることができる。また、本明細書において、「(メタ)アクリル」とは、「アクリル」および/または「メタクリル」(「アクリル」および「メタクリル」のうち、いずれか一方または両方)を表し、他も同様である The above acrylic polymer is a polymer that contains structural units derived from acrylic monomers (monomer components having (meth)acryloyl groups in the molecule) as polymer structural units. The acrylic polymer is preferably a polymer containing the largest proportion of structural units derived from (meth)acrylic acid ester. In addition, an acrylic polymer can be used individually or in combination of 2 or more types. In the present specification, "(meth)acrylic" means "acrylic" and/or "methacrylic" (either one or both of "acrylic" and "methacrylic"), and others are the same.
 上記(メタ)アクリル酸エステルとしては、例えば、炭化水素基含有(メタ)アクリル酸エステルが挙げられる。炭化水素基含有(メタ)アクリル酸エステルとしては、(メタ)アクリル酸アルキルエステル、(メタ)アクリル酸シクロアルキルエステル、(メタ)アクリル酸アリールエステル等が挙げられる。上記(メタ)アクリル酸アルキルエステルとしては、例えば、(メタ)アクリル酸のメチルエステル、エチルエステル、プロピルエステル、イソプロピルエステル、ブチルエステル、イソブチルエステル、s-ブチルエステル、t-ブチルエステル、ペンチルエステル、イソペンチルエステル、ヘキシルエステル、ヘプチルエステル、オクチルエステル、2-エチルヘキシルエステル、イソオクチルエステル、ノニルエステル、デシルエステル、イソデシルエステル、ウンデシルエステル、ドデシルエステル(ラウリルエステル)、トリデシルエステル、テトラデシルエステル、ヘキサデシルエステル、オクタデシルエステル、エイコシルエステル等が挙げられる。上記(メタ)アクリル酸シクロアルキルエステルとしては、例えば、(メタ)アクリル酸のシクロペンチルエステル、シクロヘキシルエステル等が挙げられる。上記(メタ)アクリル酸アリールエステルとしては、例えば、(メタ)アクリル酸のフェニルエステル、ベンジルエステルが挙げられる。 Examples of the (meth)acrylic acid esters include hydrocarbon group-containing (meth)acrylic acid esters. Hydrocarbon group-containing (meth)acrylic acid esters include (meth)acrylic acid alkyl esters, (meth)acrylic acid cycloalkyl esters, (meth)acrylic acid aryl esters, and the like. Examples of the (meth)acrylic acid alkyl esters include (meth)acrylic acid methyl ester, ethyl ester, propyl ester, isopropyl ester, butyl ester, isobutyl ester, s-butyl ester, t-butyl ester, pentyl ester, Isopentyl ester, hexyl ester, heptyl ester, octyl ester, 2-ethylhexyl ester, isooctyl ester, nonyl ester, decyl ester, isodecyl ester, undecyl ester, dodecyl ester (lauryl ester), tridecyl ester, tetradecyl ester , hexadecyl ester, octadecyl ester, eicosyl ester and the like. Examples of the (meth)acrylic acid cycloalkyl esters include cyclopentyl esters and cyclohexyl esters of (meth)acrylic acid. Examples of the (meth)acrylic acid aryl esters include phenyl esters and benzyl esters of (meth)acrylic acid.
 上記炭化水素基含有(メタ)アクリル酸エステルは、単独でまたは2種以上組み合わせて用いることができる。炭化水素基含有(メタ)アクリル酸エステルによる粘着性等の基本特性を第1粘着剤層において適切に発現させ、低粘着性にコントロールしやすい点より、アクリル系ポリマーを形成するための全モノマー成分における、炭化水素基含有(メタ)アクリル酸エステルの割合は、40質量%以上が好ましく、より好ましくは60質量%以上である。 The above hydrocarbon group-containing (meth)acrylic acid esters can be used alone or in combination of two or more. All monomer components for forming an acrylic polymer because the basic properties such as adhesiveness of the hydrocarbon group-containing (meth)acrylic acid ester are appropriately expressed in the first adhesive layer and it is easy to control the adhesiveness to be low. , the ratio of the hydrocarbon group-containing (meth)acrylic acid ester is preferably 40% by mass or more, more preferably 60% by mass or more.
 上記アクリル系ポリマーは、凝集力、耐熱性、粘着性等の改質を目的として、上記炭化水素基含有(メタ)アクリル酸エステルと共重合可能な他のモノマー成分に由来する構成単位を含んでいてもよい。上記他のモノマー成分としては、例えば、カルボキシ基含有モノマー、酸無水物モノマー、ヒドロキシ基含有モノマー、グリシジル基含有モノマー、スルホン酸基含有モノマー、リン酸基含有モノマー、アクリルアミド、アクリロニトリル等の官能基含有モノマー、ビニルエステル系モノマー等が挙げられる。上記カルボキシ基含有モノマーとしては、例えば、アクリル酸、メタクリル酸、カルボキシエチル(メタ)アクリレート、カルボキシペンチル(メタ)アクリレート、イタコン酸、マレイン酸、フマル酸、クロトン酸等が挙げられる。上記酸無水物モノマーとしては、例えば、無水マレイン酸、無水イタコン酸等が挙げられる。上記ヒドロキシ基含有モノマーとしては、例えば、(メタ)アクリル酸2-ヒドロキシエチル、(メタ)アクリル酸2-ヒドロキシプロピル、(メタ)アクリル酸4-ヒドロキシブチル、(メタ)アクリル酸6-ヒドロキシヘキシル、(メタ)アクリル酸8-ヒドロキシオクチル、(メタ)アクリル酸10-ヒドロキシデシル、(メタ)アクリル酸12-ヒドロキシラウリル、(4-ヒドロキシメチルシクロヘキシル)メチル(メタ)アクリレート等が挙げられる。上記グリシジル基含有モノマーとしては、例えば、(メタ)アクリル酸グリシジル、(メタ)アクリル酸メチルグリシジル等が挙げられる。上記スルホン酸基含有モノマーとしては、例えば、スチレンスルホン酸、アリルスルホン酸、2-(メタ)アクリルアミド-2-メチルプロパンスルホン酸、(メタ)アクリルアミドプロパンスルホン酸、スルホプロピル(メタ)アクリレート、(メタ)アクリロイルオキシナフタレンスルホン酸等が挙げられる。上記リン酸基含有モノマーとしては、例えば、2-ヒドロキシエチルアクリロイルホスフェート等が挙げられる。上記ビニルエステル系モノマーとしては、例えば、例えば、酢酸ビニル、プロピオン酸ビニル、酪酸ビニル、ピバリン酸ビニル、シクロヘキサンカルボン酸ビニル、安息香酸ビニルが挙げられる。上記他のモノマー成分は、単独でまたは2種以上組み合わせて用いることができる。炭化水素基含有(メタ)アクリル酸エステルによる粘着性等の基本特性を第1粘着剤層において適切に発現させ、低粘着性にコントロールしやすい点より、アクリル系ポリマーを形成するための全モノマー成分における、上記他のモノマー成分の合計割合は、60質量%以下が好ましく、より好ましくは40質量%以下である。 The acrylic polymer contains structural units derived from other monomer components copolymerizable with the hydrocarbon group-containing (meth)acrylic acid ester for the purpose of improving cohesive strength, heat resistance, adhesiveness, etc. You can Examples of other monomer components include carboxy group-containing monomers, acid anhydride monomers, hydroxyl group-containing monomers, glycidyl group-containing monomers, sulfonic acid group-containing monomers, phosphoric acid group-containing monomers, acrylamide, acrylonitrile, and other functional group-containing monomers. monomers, vinyl ester monomers, and the like. Examples of the carboxy group-containing monomers include acrylic acid, methacrylic acid, carboxyethyl (meth)acrylate, carboxypentyl (meth)acrylate, itaconic acid, maleic acid, fumaric acid, and crotonic acid. Examples of the acid anhydride monomer include maleic anhydride and itaconic anhydride. Examples of the hydroxy group-containing monomer include 2-hydroxyethyl (meth)acrylate, 2-hydroxypropyl (meth)acrylate, 4-hydroxybutyl (meth)acrylate, 6-hydroxyhexyl (meth)acrylate, 8-hydroxyoctyl (meth)acrylate, 10-hydroxydecyl (meth)acrylate, 12-hydroxylauryl (meth)acrylate, (4-hydroxymethylcyclohexyl)methyl (meth)acrylate and the like. Examples of the glycidyl group-containing monomer include glycidyl (meth)acrylate and methylglycidyl (meth)acrylate. Examples of the sulfonic acid group-containing monomer include styrenesulfonic acid, allylsulfonic acid, 2-(meth)acrylamido-2-methylpropanesulfonic acid, (meth)acrylamidopropanesulfonic acid, sulfopropyl (meth)acrylate, (meth) ) acryloyloxynaphthalenesulfonic acid and the like. Examples of the phosphoric acid group-containing monomer include 2-hydroxyethyl acryloyl phosphate and the like. Examples of the vinyl ester monomer include vinyl acetate, vinyl propionate, vinyl butyrate, vinyl pivalate, vinyl cyclohexanecarboxylate, and vinyl benzoate. The above other monomer components can be used alone or in combination of two or more. All monomer components for forming an acrylic polymer because the basic properties such as adhesiveness of the hydrocarbon group-containing (meth)acrylic acid ester are appropriately expressed in the first adhesive layer and it is easy to control the adhesiveness to be low. , the total ratio of the other monomer components is preferably 60% by mass or less, more preferably 40% by mass or less.
 上記アクリル系ポリマーは、そのポリマー骨格中に架橋構造を形成するために、アクリル系ポリマーを形成するモノマー成分と共重合可能な多官能性モノマーに由来する構成単位を含んでいてもよい。上記多官能性モノマーとしては、例えば、ヘキサンジオールジ(メタ)アクリレート、(ポリ)エチレングリコールジ(メタ)アクリレート、(ポリ)プロピレングリコールジ(メタ)アクリレート、ネオペンチルグリコールジ(メタ)アクリレート、ペンタエリスリトールジ(メタ)アクリレート、トリメチロールプロパントリ(メタ)アクリレート、ペンタエリスリトールトリ(メタ)アクリレート、ジペンタエリスリトールヘキサ(メタ)アクリレート、エポキシ(メタ)アクリレート(例えば、ポリグリシジル(メタ)アクリレート)、ポリエステル(メタ)アクリレート、ウレタン(メタ)アクリレート等の分子内に(メタ)アクリロイル基と他の反応性官能基を有する単量体等が挙げられる。上記多官能性モノマーは、単独でまたは2種以上組み合わせて用いることができる。炭化水素基含有(メタ)アクリル酸エステルによる粘着性等の基本特性を第1粘着剤層において適切に発現させ、低粘着性にコントロールしやすい点より、アクリル系ポリマーを形成するための全モノマー成分における上記多官能性モノマーの割合は、40質量%以下が好ましく、より好ましくは30質量%以下である。 The above acrylic polymer may contain a structural unit derived from a polyfunctional monomer copolymerizable with the monomer component forming the acrylic polymer in order to form a crosslinked structure in the polymer skeleton. Examples of the polyfunctional monomer include hexanediol di(meth)acrylate, (poly)ethylene glycol di(meth)acrylate, (poly)propylene glycol di(meth)acrylate, neopentyl glycol di(meth)acrylate, penta Erythritol di(meth)acrylate, trimethylolpropane tri(meth)acrylate, pentaerythritol tri(meth)acrylate, dipentaerythritol hexa(meth)acrylate, epoxy (meth)acrylate (e.g. polyglycidyl (meth)acrylate), polyester Examples thereof include monomers having a (meth)acryloyl group and other reactive functional groups in the molecule such as (meth)acrylate and urethane (meth)acrylate. The above polyfunctional monomers can be used alone or in combination of two or more. All monomer components for forming an acrylic polymer because the basic properties such as adhesiveness of the hydrocarbon group-containing (meth)acrylic acid ester are appropriately expressed in the first adhesive layer and it is easy to control the adhesiveness to be low. is preferably 40% by mass or less, more preferably 30% by mass or less.
 アクリル系ポリマーは、アクリル系モノマーを含む1種以上のモノマー成分を重合に付すことにより得られる。重合方法としては、溶液重合、乳化重合、塊状重合、懸濁重合等が挙げられる。 An acrylic polymer is obtained by subjecting one or more monomer components including an acrylic monomer to polymerization. Polymerization methods include solution polymerization, emulsion polymerization, bulk polymerization, suspension polymerization and the like.
 アクリル系ポリマーの質量平均分子量は、10万以上が好ましく、より好ましくは20万~300万である。質量平均分子量が10万以上であると、粘着剤層中の低分子量物質が少ない傾向にあり、電子部品等への汚染をより抑制することができる。 The mass average molecular weight of the acrylic polymer is preferably 100,000 or more, more preferably 200,000 to 3,000,000. When the weight average molecular weight is 100,000 or more, the amount of low-molecular-weight substances in the pressure-sensitive adhesive layer tends to be small, and contamination of electronic parts and the like can be further suppressed.
 第1粘着剤層を形成するアクリル系粘着剤組成物は、架橋剤を含有していてもよい。例えば、アクリル系ポリマーを架橋させ、第1粘着剤層中の低分子量物質をより低減させることができる。また、アクリル系ポリマーの質量平均分子量を高め、低粘着性にコントロールすることができる。上記架橋剤としては、例えば、ポリイソシアネート化合物、エポキシ化合物、ポリオール化合物(ポリフェノール系化合物等)、アジリジン化合物、メラミン化合物等が挙げられ、イソシアネート系架橋剤および/またはエポキシ系架橋剤が好ましい。架橋剤を使用する場合、その使用量は、アクリル系ポリマー100質量部に対して、10質量部程度以下が好ましく、より好ましくは0.1~10質量部である。 The acrylic pressure-sensitive adhesive composition forming the first pressure-sensitive adhesive layer may contain a cross-linking agent. For example, the acrylic polymer can be crosslinked to further reduce low-molecular-weight substances in the first pressure-sensitive adhesive layer. In addition, the mass average molecular weight of the acrylic polymer can be increased to control the adhesiveness to be low. Examples of the cross-linking agent include polyisocyanate compounds, epoxy compounds, polyol compounds (polyphenol-based compounds, etc.), aziridine compounds, melamine compounds, etc., and isocyanate-based cross-linking agents and/or epoxy-based cross-linking agents are preferred. When a cross-linking agent is used, the amount used is preferably about 10 parts by mass or less, more preferably 0.1 to 10 parts by mass, based on 100 parts by mass of the acrylic polymer.
 イソシアネート系架橋剤としては、例えば、脂肪族イソシアネート類、脂環式イソシアネート類、および芳香族イソシアネート類が挙げられる。脂肪族イソシアネート類としては、例えば、トリメチレンジイソシアネート、ブチレンジイソシアネート、ヘキサメチレンジイソシアネート、およびダイマー酸ジイソシアネートが挙げられる。脂環式イソシアネート類としては、例えば、シクロペンチレンジイソシアネート、シクロヘキシレンジイソシアネート、イソホロンジイソシアネート、および1,3-ビス(イソシアナトメチル)シクロヘキサンが挙げられる。芳香族イソシアネート類としては、例えば、2,4-トリレンジイソシアネート、4,4’-ジフェニルメタンジイソシアネート、およびキシリレンジイソシアネートが挙げられる。また、イソシアネート系架橋剤としては、トリレンジイソシアネートのトリメチロールプロパン付加物(商品名「コロネートL」,東ソー(株)製)やヘキサメチレンジイソシアネートのイソシアヌル体(商品名「コロネートHX」,東ソー(株)製)も挙げられる。 Examples of isocyanate-based cross-linking agents include aliphatic isocyanates, alicyclic isocyanates, and aromatic isocyanates. Aliphatic isocyanates include, for example, trimethylene diisocyanate, butylene diisocyanate, hexamethylene diisocyanate, and dimer acid diisocyanate. Cycloaliphatic isocyanates include, for example, cyclopentylene diisocyanate, cyclohexylene diisocyanate, isophorone diisocyanate, and 1,3-bis(isocyanatomethyl)cyclohexane. Aromatic isocyanates include, for example, 2,4-tolylene diisocyanate, 4,4'-diphenylmethane diisocyanate, and xylylene diisocyanate. Examples of isocyanate-based cross-linking agents include trimethylolpropane adducts of tolylene diisocyanate (trade name: "Coronate L", manufactured by Tosoh Corporation) and isocyanurate of hexamethylene diisocyanate (trade name: "Coronate HX", manufactured by Tosoh Corporation). ) made) are also included.
 エポキシ系架橋剤(多官能エポキシ化合物)としては、例えば、N,N,N’,N’-テトラグリシジル-m-キシレンジアミン、ジグリシジルアニリン、1,3-ビス(N,N-ジグリシジルアミノメチル)シクロヘキサン、1,6-ヘキサンジオールジグリシジルエーテル、ネオペンチルグリコールジグリシジルエーテル、エチレングリコールジグリシジルエーテル、プロピレングリコールジグリシジルエーテル、ポリエチレングリコールジグリシジルエーテル、ポリプロピレングリコールジグリシジルエーテル、ソルビトールポリグリシジルエーテル、グリセロールポリグリシジルエーテル、ペンタエリスリトールポリグリシジルエーテル、ポリグリセロールポリグリシジルエーテル、ソルビタンポリグリシジルエーテル、トリメチロールプロパンポリグリシジルエーテル、アジピン酸ジグリシジルエステル、o-フタル酸ジグリシジルエステル、トリグリシジル-トリス(2-ヒドロキシエチル)イソシアヌレート、レゾルシンジグリシジルエーテル、およびビスフェノール-S-ジグリシジルエーテルが挙げられ、また、分子内にエポキシ基を二つ以上有するエポキシ系樹脂も挙げられる。市販のエポキシ系架橋剤としては、例えば、三菱ガス化学(株)製の「テトラッドC」が挙げられる。 Examples of epoxy-based cross-linking agents (polyfunctional epoxy compounds) include N,N,N',N'-tetraglycidyl-m-xylenediamine, diglycidylaniline, 1,3-bis(N,N-diglycidylamino methyl)cyclohexane, 1,6-hexanediol diglycidyl ether, neopentyl glycol diglycidyl ether, ethylene glycol diglycidyl ether, propylene glycol diglycidyl ether, polyethylene glycol diglycidyl ether, polypropylene glycol diglycidyl ether, sorbitol polyglycidyl ether, glycerol polyglycidyl ether, pentaerythritol polyglycidyl ether, polyglycerol polyglycidyl ether, sorbitan polyglycidyl ether, trimethylolpropane polyglycidyl ether, adipate diglycidyl ester, o-phthalate diglycidyl ester, triglycidyl-tris(2- hydroxyethyl) isocyanurate, resorcinol diglycidyl ether, and bisphenol-S-diglycidyl ether, and also epoxy resins having two or more epoxy groups in the molecule. Examples of commercially available epoxy-based cross-linking agents include "Tetrad C" manufactured by Mitsubishi Gas Chemical Company, Inc.
 第1粘着剤層を構成する粘着剤組成物には、軽剥離化剤を含むことが好ましい。軽剥離化剤を含むことにより、第1粘着剤層の表面にWBL(Weak Boundary Layer;弱境界層)が形成され、低粘着性に制御しやすくなる。 The adhesive composition that constitutes the first adhesive layer preferably contains a light release agent. By including a light release agent, a WBL (Weak Boundary Layer) is formed on the surface of the first pressure-sensitive adhesive layer, making it easier to control low adhesion.
 軽剥離化剤としては、特に限定されず、公知の軽剥離化剤を制限なく使用することができ、例えば、シリコーン系剥離剤、フッ素系界面活性剤、脂肪族エステル等が挙げられ、これらは単独でまたは2種以上組み合わせて用いることができる。 The light release agent is not particularly limited, and known light release agents can be used without limitation. Examples thereof include silicone release agents, fluorosurfactants, aliphatic esters, etc. It can be used alone or in combination of two or more.
 上記シリコーン系剥離剤としては、特に限定されないが、例えば、熱硬化性シリコーン系剥離剤、電離性放射線硬化性シリコーン系剥離剤等が挙げられる。また、シリコーン系剥離剤は、溶剤を含まない無溶剤型、有機溶剤に溶解あるいは分散した溶剤型のいずれであってもよい。なお、シリコーン系剥離剤は、単独でまたは2種以上組み合わせて用いることができる。 The silicone-based release agent is not particularly limited, but includes, for example, a thermosetting silicone-based release agent, an ionizing radiation-curable silicone-based release agent, and the like. The silicone-based release agent may be either a solvent-free type that does not contain a solvent or a solvent-type that is dissolved or dispersed in an organic solvent. In addition, the silicone release agent can be used alone or in combination of two or more.
 上記熱硬化性シリコーン系剥離剤としては、特に限定されないが、オルガノハイドロジェンポリシロキサンと脂肪族不飽和基を有するオルガノポリシロキサンとを含むものが好ましい。また、上記シリコーン系剥離剤は、熱付加反応による架橋が起こって硬化する熱付加反応硬化性シリコーン系剥離剤であることが好ましい。 The thermosetting silicone-based release agent is not particularly limited, but preferably contains an organohydrogenpolysiloxane and an organopolysiloxane having an aliphatic unsaturated group. Further, the above silicone-based release agent is preferably a thermal addition reaction-curable silicone-based release agent that is cured by cross-linking caused by a thermal addition reaction.
 上記熱付加反応硬化性シリコーン系剥離剤としては、特に限定されないが、分子中にケイ素原子(Si)に結合した水素原子(H)を有するポリシロキサン(Si-H基含有ポリシロキサン)と、分子中にSi-H結合(SiとHとの共有結合)に対して反応性を有する官能基(Si-H基反応性官能基)を含むポリシロキサン(Si-H基反応性ポリシロキサン)とを含む剥離剤が好ましく挙げられる。なお、この剥離剤は、Si-H基とSi-H基反応性官能基とが付加反応して架橋することにより硬化する。 The heat addition reaction-curable silicone-based release agent is not particularly limited, but polysiloxane (Si—H group-containing polysiloxane) having a hydrogen atom (H) bonded to a silicon atom (Si) in the molecule, and a molecule Polysiloxane (Si-H group reactive polysiloxane) containing a functional group (Si-H group reactive functional group) having reactivity to Si-H bond (covalent bond between Si and H) in A release agent containing is preferably exemplified. This release agent is cured by cross-linking through an addition reaction between the Si—H group and the reactive functional group of the Si—H group.
 上記Si-H基含有ポリシロキサンにおいて、Hが結合したSiは、主鎖中のSiおよび側鎖中のSiのいずれであってもよい。上記Si-H基含有ポリシロキサンは、分子中にSi-H基を2個以上含むポリシロキサンが好ましい。2個以上のSi-H基を含有するポリシロキサンとしては、ポリ(ジメチルシロキサン-メチルシロキサン)等のジメチルハイドロジェンシロキサン系ポリマーが好ましく挙げられる。 In the Si—H group-containing polysiloxane, the Si to which H is bonded may be either Si in the main chain or Si in the side chain. The Si—H group-containing polysiloxane is preferably polysiloxane containing two or more Si—H groups in the molecule. Polysiloxanes containing two or more Si—H groups preferably include dimethylhydrogensiloxane-based polymers such as poly(dimethylsiloxane-methylsiloxane).
 また、上記Si-H基反応性ポリシロキサンとしては、Si-H基反応性官能基またはかかる官能基を含む側鎖が、シロキサン系ポリマーの主鎖(骨格)を形成するSi(例えば、主鎖末端のSi、主鎖内部のSi)に結合した態様のポリシロキサンが好ましく挙げられる。中でも、Si-H基反応性官能基が主鎖中のSiに直接結合したポリシロキサンが好ましい。さらには、上記Si-H基反応性ポリシロキサンとしては、分子中にSi-H基反応性官能基を2個以上含むポリシロキサンも好ましく挙げられる。 In addition, as the Si—H group-reactive polysiloxane, a Si—H group-reactive functional group or a side chain containing such a functional group forms the main chain (skeleton) of the siloxane-based polymer (for example, the main chain Preferred examples include polysiloxanes in a mode in which Si at the terminal and Si in the main chain are bonded. Among them, polysiloxane in which the Si—H group-reactive functional group is directly bonded to Si in the main chain is preferred. Furthermore, as the Si—H group-reactive polysiloxane, a polysiloxane containing two or more Si—H group-reactive functional groups in the molecule is also preferable.
 上記Si-H基反応性ポリシロキサンにおけるSi-H基反応性官能基としては、例えば、ビニル基、ヘキセニル基等のアルケニル基等が挙げられる。また、上記Si-H基反応性ポリシロキサンにおける主鎖部分を形成するシロキサン系ポリマーとしては、例えば、ポリジメチルシロキサン、ポリジエチルシロキサン、ポリメチルエチルシロキサン等のポリジアルキルシロキサン(2つのアルキル基は同じでも、異なってもよい。);ポリアルキルアリールシロキサン;ポリ(ジメチルシロキサンッメチルシロキサン)、複数のSi含有モノマーを重合してなるポリマー等が挙げられる。中でも、主鎖部分を形成するシロキサン系ポリマーとしては、ポリジメチルシロキサンが好ましい。 Examples of Si—H group-reactive functional groups in the above Si—H group-reactive polysiloxane include alkenyl groups such as vinyl groups and hexenyl groups. Examples of the siloxane-based polymer forming the main chain portion of the Si—H group-reactive polysiloxane include polydialkylsiloxanes such as polydimethylsiloxane, polydiethylsiloxane, and polymethylethylsiloxane (the two alkyl groups are the same). polyalkylarylsiloxane; poly(dimethylsiloxane-methylsiloxane); a polymer obtained by polymerizing a plurality of Si-containing monomers; Among them, polydimethylsiloxane is preferable as the siloxane-based polymer forming the main chain portion.
 特に、上記熱付加反応硬化性シリコーン系剥離剤は、分子中にSi-H基を2個以上含むポリシロキサンと、分子中にSi-H基反応性官能基を2個以上含むポリシロキサンとを含有する熱付加反応硬化性シリコーン系剥離剤であることが好ましい。 In particular, the thermal addition reaction-curable silicone-based release agent contains a polysiloxane containing two or more Si—H groups in the molecule and a polysiloxane containing two or more Si—H reactive functional groups in the molecule. It is preferably a heat-addition-curable silicone-based release agent to be contained.
 また、上記電離性放射線硬化性シリコーン系剥離剤としては、特に限定されないが、紫外線(UV)照射により架橋反応が起こって硬化するUV硬化性シリコーン系剥離剤が好ましく挙げられる。 The ionizing radiation-curable silicone-based release agent is not particularly limited, but preferably includes a UV-curable silicone-based release agent that is cured by a crosslinking reaction caused by ultraviolet (UV) irradiation.
 上記UV硬化性シリコーン系剥離剤は、UV照射によって、カチオン重合、ラジカル重合、ラジカル付加重合、ヒドロシリル化反応等の化学反応が起こって硬化する剥離剤である。上記UV硬化性シリコーン系剥離剤は、カチオン重合により硬化するUV硬化性シリコーン系剥離剤が特に好ましい。 The above UV-curable silicone-based release agent is a release agent that is cured by chemical reactions such as cationic polymerization, radical polymerization, radical addition polymerization, hydrosilylation reaction, etc., by UV irradiation. The UV-curable silicone release agent is particularly preferably a UV-curable silicone release agent that cures by cationic polymerization.
 カチオン重合型のUV硬化性シリコーン系剥離剤としては、特に限定されないが、少なくとも2個のエポキシ基が、シロキサン系ポリマーの主鎖(骨格)を形成するSi(例えば、主鎖末端のSi、主鎖内部のSi)および/または側鎖に含まれるSiに、それぞれ直接または2価の基(メチレン基、エチレン基等のアルキレン基;エチレンオキシ基、プロピレンオキシ基等のアルキレンオキシ基等)を介して結合したエポキシ基含有ポリシロキサンを含む剥離剤が好ましく挙げられる。これら少なくとも2個のエポキシ基のSiへの結合態様は、同じでも異なってもよい。すなわち、1種または2種以上のエポキシ基含有側鎖を2個以上含むポリシロキサンを含む剥離剤が好ましく挙げられる。エポキシ基含有側鎖としては、グリシジル基、グリシドキシ基(グリシジルオキシ基)、3,4-エポキシシクロヘキシル基、2,3-エポキシシクロペンチル基等が挙げられる。エポキシ基含有ポリシロキサンは、直鎖状、分岐鎖状、またはそれらの混合物のいずれであってもよい。 The cationic polymerization type UV curable silicone release agent is not particularly limited, but at least two epoxy groups form the main chain (skeleton) of the siloxane polymer (for example, Si at the main chain terminal, main Si in the chain) and / or Si contained in the side chain, respectively, directly or via a divalent group (alkylene group such as methylene group and ethylene group; alkyleneoxy group such as ethyleneoxy group and propyleneoxy group) Release agents containing epoxy-group-containing polysiloxanes bound together are preferred. The bonding modes of these at least two epoxy groups to Si may be the same or different. That is, release agents containing polysiloxane containing two or more side chains containing one or more epoxy groups are preferred. Examples of epoxy group-containing side chains include glycidyl group, glycidoxy group (glycidyloxy group), 3,4-epoxycyclohexyl group, 2,3-epoxycyclopentyl group and the like. Epoxy-group-containing polysiloxanes may be linear, branched, or mixtures thereof.
 特に、本発明に係る転写用両面粘着フィルムでは、第1粘着剤層を低粘着性に制御しやすいという観点から、シリコーン系粘着剤に熱硬化性シリコーン系剥離剤を含むことが好ましく、熱付加反応硬化性シリコーン系剥離剤を含むことがより好ましい。 In particular, in the double-sided pressure-sensitive adhesive film for transfer according to the present invention, the silicone-based pressure-sensitive adhesive preferably contains a thermosetting silicone-based release agent from the viewpoint that the first pressure-sensitive adhesive layer can be easily controlled to have a low adhesiveness. More preferably, it contains a reaction-curable silicone-based release agent.
 本発明に係る転写用両面粘着フィルムでの第1粘着剤層がシリコーン系粘着剤を含む場合、上記シリコーン系剥離剤の含有量は、特に限定されないが、ベースポリマーであるシリコーン系ポリマー100重量部に対して、0.5重量部以上100重量部以下であることが好ましい。上記含有量が0.5重量部以上であると、第1粘着剤層を低粘着性に制御しやすいという効果を得やすくなり、より好ましくは1重量部以上であり、さらにより好ましくは3重量部以上である。また、上記含有量が100重量部以下であると、十分な粘着性が得られず、電子部品の受け取りが難しくなるという不具合を抑制しやすくなり、より好ましくは30重量部以下であり、さらにより好ましくは25重量部以下である。 When the first pressure-sensitive adhesive layer in the double-sided pressure-sensitive adhesive film for transfer according to the present invention contains a silicone-based pressure-sensitive adhesive, the content of the silicone-based release agent is not particularly limited, but 100 parts by weight of the silicone-based polymer that is the base polymer. is preferably 0.5 parts by weight or more and 100 parts by weight or less. When the content is 0.5 parts by weight or more, the effect of easily controlling the adhesiveness of the first pressure-sensitive adhesive layer to be low can be easily obtained. Department or above. In addition, when the content is 100 parts by weight or less, sufficient adhesiveness cannot be obtained, and it becomes easy to suppress the problem that electronic components are difficult to receive. Preferably, it is 25 parts by weight or less.
 上記フッ素系界面活性剤を軽剥離化剤として使用することにより、フッ素部位の低表面自由エネルギーによる軽剥離効果を発揮することができる。 By using the fluorine-based surfactant as a light release agent, it is possible to exhibit a light release effect due to the low surface free energy of the fluorine site.
 上記フッ素系界面活性剤としては、特に限定されないが、例えば、フッ素系オリゴマー、パーフルオロブタンスルホン酸塩、パーフルオロアルキル基含有カルボン酸塩、ヘキサフルオロペンタントリマー誘導体含有スルホン酸塩、ヘキサフルオロペンタントリマー誘導体含有カルボン酸塩、ヘキサフルオロペンタントリマー誘導体含有四級アンモニウム塩、ヘキサフルオロペンタントリマー誘導体含有ベタイン、ヘキサフルオロペンタントリマー誘導体含有ポリオキシエチレンエーテル等等が挙げられ、中でも、フッ素系オリゴマーが好ましい。なお、フッ素系界面活性剤は、単独でまたは2種以上組み合わせて用いることができる。 The fluorine-based surfactant is not particularly limited, but examples include fluorine-based oligomers, perfluorobutanesulfonates, perfluoroalkyl group-containing carboxylates, hexafluoropentane trimer derivative-containing sulfonates, and hexafluoropentane trimers. Derivative-containing carboxylates, hexafluoropentane trimer derivative-containing quaternary ammonium salts, hexafluoropentane trimer derivative-containing betaine, hexafluoropentane trimer derivative-containing polyoxyethylene ethers, and the like, among others, fluorine-based oligomers are preferred. In addition, a fluorine-type surfactant can be used individually or in combination of 2 or more types.
 上記フッ素系界面活性剤の具体例としては、たとえば、市販品として、商品名「メガファックF(1)14」、「メガファックF-410」(以上、DIC(株)製)、商品名「サーフロンS-211」、「サーフロンS-221」、「サーフロンS-231」、「サーフロンS-232」、「サーフロンS-233」、「サーフロンS-241」、「サーフロンS-242」、「サーフロンS-243」、「サーフロンS-420」(以上、AGCセイミケミカル(株)製)、商品名「フタージェント100」、「フタージェント100C」、「フタージェント110」、「フタージェント150」、「フタージェント150CH」、「フタージェント300」、「フタージェント310」、「フタージェント320」、「フタージェント400SW」、「フタージェント251」、「フタージェント212M」、「フタージェント215M」、「フタージェント250」、「フタージェント209F」、「フタージェント222F」、「フタージェント245F」、「フタージェント208G」、「フタージェント218GL」、「フタージェント240G」、「フタージェント212P」、「フタージェント220P」、「フタージェント228P」、「フタージェントFTX-218」、「フタージェントDFX-18(以上(株)ネオス製)等が挙げられる。これらの化合物は、単独でまたは2種以上組み合わせて用いることができる。 Specific examples of the fluorine-based surfactants include commercially available products such as "Megafac F (1) 14" and "Megafac F-410" (manufactured by DIC Corporation), the product name " Surflon S-211", "Surflon S-221", "Surflon S-231", "Surflon S-232", "Surflon S-233", "Surflon S-241", "Surflon S-242", "Surflon S-243", "Surflon S-420" (manufactured by AGC Seimi Chemical Co., Ltd.), trade names "Futergent 100", "Futergent 100C", "Futergent 110", "Futergent 150", " Futergent 150CH”, “Ftergent 300”, “Ftergent 310”, “Ftergent 320”, “Ftergent 400SW”, “Ftergent 251”, “Ftergent 212M”, “Ftergent 215M”, “Ftergent 250”, “Ftergent 209F”, “Ftergent 222F”, “Ftergent 245F”, “Ftergent 208G”, “Ftergent 218GL”, “Ftergent 240G”, “Ftergent 212P”, “Ftergent 220P” , “Futergent 228P”, “Futergent FTX-218”, “Futergent DFX-18” (manufactured by Neos Co., Ltd.), etc. These compounds may be used alone or in combination of two or more. can.
 上記フッ素系オリゴマーの重量平均分子量(Mw)は、3500以上が好ましく、より好ましくは5000以上、さらに好ましくは10000以上、特に好ましくは20000以上である。上記フッ素系オリゴマーの重量平均分子量が3500以上であると、低粘着性に制御しやすくなる。さらに、重量平均分子量が20000以上であると、粘着剤(組成物)の配合時の泡立ちを抑制でき、粘着剤塗工後の外観に優れるため、好ましい。また、上記フッ素系オリゴマーの重量平均分子量(Mw)の上限としては、20万が好ましく、10万がより好ましい。上限を20万とすることで、フッ素系オリゴマーが表面に偏在しやすく、軽剥離効果をより発揮しやすくなり、好ましい。 The weight average molecular weight (Mw) of the fluorine-based oligomer is preferably 3,500 or more, more preferably 5,000 or more, even more preferably 10,000 or more, and particularly preferably 20,000 or more. When the weight-average molecular weight of the fluorine-based oligomer is 3500 or more, it becomes easy to control the adhesiveness to be low. Furthermore, when the weight-average molecular weight is 20,000 or more, foaming can be suppressed when the pressure-sensitive adhesive (composition) is blended, and the appearance after the pressure-sensitive adhesive is applied is excellent, which is preferable. The upper limit of the weight average molecular weight (Mw) of the fluorine-based oligomer is preferably 200,000, more preferably 100,000. By setting the upper limit to 200,000, the fluorine-based oligomer tends to be unevenly distributed on the surface, making it easier to exhibit the effect of light release, which is preferable.
 また、上記フッ素系オリゴマーとしては、たとえば、市販品として、商品名「メガファックF(2)51」、「メガファックF(2)53」、「メガファックF(2)81」、「メガファックF-410」、「メガファックF-430」、「メガファックF-444」、「メガファックF-477」、「メガファックF-510」、「メガファックF-511」、「メガファックF-551」、「メガファックF-552」、「メガファックF-553」、「メガファックF-554」、「メガファックF-555」、「メガファックF-556」、「メガファックF-557」、「メガファックF-558」、「メガファックF-559」、「メガファックF-560」、「メガファックF-561」、「メガファックF-562」、「メガファックF-563」、「メガファックF-565」、「メガファックF-568」、「メガファックF-569」、「メガファックF-570」、「メガファックF-571」、「メガファックF-572(以上、DIC(株)製)、商品名「サーフロンS-611」、「サーフロンS-651」、「サーフロンS-386(以上、AGCセイミケミカル(株)製)、商品名「フタージェント610FM」、「フタージェント710FL」、「フタージェント710FM」、「フタージェント710FS」、「フタージェント730FL」、「フタージェント730LM(以上(株)ネオス製)等があげられる。これらの化合物は、単独でまたは2種以上組み合わせて用いることができる。 Further, as the fluorine-based oligomer, for example, commercial products such as "Megafac F(2)51", "Megafac F(2)53", "Megafac F(2)81", "Megafac F-410", "Megafuck F-430", "Megafuck F-444", "Megafuck F-477", "Megafuck F-510", "Megafuck F-511", "Megafuck F- 551", "Megafuck F-552", "Megafuck F-553", "Megafuck F-554", "Megafuck F-555", "Megafuck F-556", "Megafuck F-557" , "Megafuck F-558", "Megafuck F-559", "Megafuck F-560", "Megafuck F-561", "Megafuck F-562", "Megafuck F-563", " Megafac F-565", "Megafac F-568", "Megafac F-569", "Megafac F-570", "Megafac F-571", "Megafac F-572 (above, DIC ( Ltd.), trade names “Surflon S-611”, “Surflon S-651”, “Surflon S-386” (manufactured by AGC Seimi Chemical Co., Ltd.), trade names “Ftergent 610FM”, “Ftergent 710FL” ", "Futergent 710FM", "Futergent 710FS", "Futergent 730FL", "Futergent 730LM" (manufactured by Neos Co., Ltd.), etc. These compounds may be used alone or in combination of two or more. can be used.
 本発明に係る転写用両面粘着フィルムでの第1粘着剤層がフッ素系界面活性剤を含む場合、上記フッ素系界面活性剤の含有量は、特に限定されないが、ベースポリマーであるシリコーン系ポリマー100重量部に対して、0.01重量部以上5重量部以下であることが好ましい。上記含有量が0.01重量部以上であると、第1粘着剤層を低粘着性に制御しやすいという効果を得やすくなり、より好ましくは0.05重量部以上であり、さらにより好ましくは0.1重量部以上である。また、上記含有量が5重量部以下であると、十分な粘着性が得られず、電子部品の受け取りが難しくなるという不具合を抑制しやすくなり、また、透明性の低下を抑制する観点から、より好ましくは3重量部以下であり、さらにより好ましくは2重量部以下である。 When the first pressure-sensitive adhesive layer in the double-sided pressure-sensitive adhesive film for transfer according to the present invention contains a fluorosurfactant, the content of the fluorosurfactant is not particularly limited, but the silicone polymer 100, which is the base polymer, is not particularly limited. It is preferably 0.01 parts by weight or more and 5 parts by weight or less. When the content is 0.01 parts by weight or more, the effect of easily controlling the adhesiveness of the first pressure-sensitive adhesive layer to be low can be easily obtained, and the content is more preferably 0.05 parts by weight or more, and even more preferably. It is 0.1 part by weight or more. In addition, if the content is 5 parts by weight or less, sufficient adhesiveness cannot be obtained, and it becomes easy to suppress the problem that it becomes difficult to receive electronic parts. It is more preferably 3 parts by weight or less, and even more preferably 2 parts by weight or less.
 第1粘着剤層を構成する粘着剤組成物が脂肪酸エステルを含むことにより、第1粘着剤層体の電子部品への低粘着性、濡れ性が期待できる。 By including a fatty acid ester in the adhesive composition that constitutes the first adhesive layer, low adhesion and wettability of the first adhesive layer to electronic components can be expected.
 上記脂肪酸エステルとしては、例えば、ポリオキシエチレンビスフェノールAラウリン酸エステル、ステアリン酸ブチル、パルミチン酸2-エチルヘキシル、ステアリン酸2-エチルヘキシル、べへニン酸モノグリセライド、2-エチルヘキサン酸セチル、ミリスチン酸イソプロピル、パルミチン酸イソプロピル、イソステアリン酸コレステリル、メタクリル酸ラウリル、ヤシ脂肪酸メチル、ラウリン酸メチル、オレイン酸メチル、ステアリン酸メチル、ミリスチン酸ミリスチル、ミリスチン酸オクチルドデシル、ペンタエリスリトールモノオレエート、ペンタエリスリトールモノステアレート、ペンタエリスリトールテトラパルミテート、ステアリン酸ステアリル、ステアリン酸イソトリデシル、2-エチルヘキサン酸トリグリセライド、ラウリン酸ブチル、オレイン酸オクチル、イソノナン酸トリデシル等が挙げられる。脂肪酸エステルは、単独でまたは2種以上組み合わせて用いることができる。 Examples of the fatty acid ester include polyoxyethylene bisphenol A laurate, butyl stearate, 2-ethylhexyl palmitate, 2-ethylhexyl stearate, monoglyceride behenate, cetyl 2-ethylhexanoate, isopropyl myristate, Isopropyl palmitate, cholesteryl isostearate, lauryl methacrylate, methyl cocoate, methyl laurate, methyl oleate, methyl stearate, myristyl myristate, octyldodecyl myristate, pentaerythritol monooleate, pentaerythritol monostearate, penta erythritol tetrapalmitate, stearyl stearate, isotridecyl stearate, 2-ethylhexanoic acid triglyceride, butyl laurate, octyl oleate, tridecyl isononanoate and the like. A fatty acid ester can be used individually or in combination of 2 or more types.
 上記ウレタン系粘着剤組成物に含有する脂肪酸エステルの含有量は、第1粘着剤層体の電子部品への低粘着性、濡れ性や被着体への汚染性の観点から、例えば、ポリオール100重量部に対して、1~50重量部が好ましく、2~40重量部がより好ましく、3~30重量部がさらに好ましい。 The content of the fatty acid ester contained in the urethane-based pressure-sensitive adhesive composition is, for example, polyol 100 from the viewpoint of low adhesion to electronic parts of the first pressure-sensitive adhesive layer, wettability, and staining of adherends. It is preferably 1 to 50 parts by weight, more preferably 2 to 40 parts by weight, and even more preferably 3 to 30 parts by weight.
 第1粘着剤層を構成する粘着剤組成物が軽剥離化剤を含む場合、その含有量(総量)は、第1粘着剤層体の電子部品への低粘着性、濡れ性や電子部品への汚染性の観点から、例えば、ベースポリマー100重量部に対して、0.1重量部以上が好ましく、1重量部以上がより好ましく、3重量部以上がさらに好ましい。第1粘着剤層の着色を防止する観点から、50重量部以下が好ましく、30重量部以下がより好ましく、10重量部以下がさらに好ましい。 When the pressure-sensitive adhesive composition constituting the first pressure-sensitive adhesive layer contains a light release agent, the content (total amount) of the pressure-sensitive adhesive layer should From the viewpoint of staining, for example, 0.1 parts by weight or more is preferable, 1 part by weight or more is more preferable, and 3 parts by weight or more is even more preferable with respect to 100 parts by weight of the base polymer. From the viewpoint of preventing coloring of the first pressure-sensitive adhesive layer, it is preferably 50 parts by weight or less, more preferably 30 parts by weight or less, and even more preferably 10 parts by weight or less.
 第1粘着剤層を構成する粘着剤組成物には、酸化防止剤、紫外線吸収剤などの劣化防止剤を含むことが好ましい。劣化防止剤を含むことにより、本発明に係る転写用両面粘着フィルムの保管時の変色等の劣化を抑制することができ、また、転写用両面粘着フィルムを切断しやすくなるなど加工性を向上することができる。 The pressure-sensitive adhesive composition that constitutes the first pressure-sensitive adhesive layer preferably contains anti-degradation agents such as antioxidants and ultraviolet absorbers. By containing a deterioration inhibitor, it is possible to suppress deterioration such as discoloration during storage of the double-sided pressure-sensitive adhesive film for transfer according to the present invention, and to improve processability such as making it easier to cut the double-sided pressure-sensitive adhesive film for transfer. be able to.
 上記紫外線吸収剤としては、特に限定されないが、例えば、トリアジン系紫外線吸収剤、ベンゾトリアゾール系紫外線吸収剤、ベンゾフェノン系紫外線吸収剤、オキシベンゾフェノン系紫外線吸収剤、サリチル酸エステル系紫外線吸収剤、シアノアクリレート系紫外線吸収剤等を挙げることができ、これらは、単独でまたは2種以上組み合わせて用いることができる。これらの中でも、トリアジン系紫外線吸収剤、ベンゾトリアゾール系紫外線吸収剤が好ましく、1分子中にヒドロキシル基を2個以下有するトリアジン系紫外線吸収剤、および、1分子中にベンゾトリアゾール骨格を1個有するベンゾトリアゾール系紫外線吸収剤からなる群から選択される少なくとも1種の紫外線吸収剤であることが、アクリル系粘着剤組成物の形成に用いられるモノマーへの溶解性が良好であり、かつ、波長380nm付近での紫外線吸収能力が高いため好ましい。 Examples of the ultraviolet absorber include, but are not limited to, triazine-based ultraviolet absorbers, benzotriazole-based ultraviolet absorbers, benzophenone-based ultraviolet absorbers, oxybenzophenone-based ultraviolet absorbers, salicylic acid ester-based ultraviolet absorbers, and cyanoacrylate-based ultraviolet absorbers. UV absorbers and the like can be mentioned, and these can be used alone or in combination of two or more. Among these, triazine-based UV absorbers and benzotriazole-based UV absorbers are preferred, triazine-based UV absorbers having two or less hydroxyl groups in one molecule, and benzotriazole having one benzotriazole skeleton in one molecule. At least one UV absorber selected from the group consisting of triazole-based UV absorbers has good solubility in the monomer used to form the acrylic pressure-sensitive adhesive composition and has a wavelength of around 380 nm. It is preferable because it has a high ultraviolet absorption capacity at .
 1分子中にヒドロキシル基を2個以下有するトリアジン系紫外線吸収剤としては、具体的には、2,4-ビス-[{4-(4-エチルヘキシルオキシ)-4-ヒドロキシ}-フェニル]-6-(4-メトキシフェニル)-1,3,5-トリアジン(商品名「Tinosorb S」、BASF社製)、2,4-ビス[2-ヒドロキシ-4-ブトキシフェニル]-6-(2,4-ジブトキシフェニル)-1,3,5-トリアジン(商品名「TINUVIN 460」、BASF社製)、2-(4,6-ビス(2,4-ジメチルフェニル)-1,3,5-トリアジン-2-イル)-5-ヒドロキシフェニルと[(C10-C16(主としてC12-C13)アルキルオキシ)メチル]オキシランとの反応生成物(商品名「TINUVIN400」、BASF社製)、2-[4,6-ビス(2,4-ジメチルフェニル)-1,3,5-トリアジン-2-イル]-5-[3-(ドデシルオキシ)-2-ヒドロキシプロポキシ]フェノール)、2-(2,4-ジヒドロキシフェニル)-4,6-ビス-(2,4-ジメチルフェニル)-1,3,5-トリアジンと(2-エチルヘキシル)-グリシド酸エステルの反応生成物(商品名「TINUVIN405」、BASF社製)、2-(4,6-ジフェニル-1,3,5-トリアジン-2-イル)-5-[(ヘキシル)オキシ]-フェノール(商品名「TINUVIN1577」、BASF社製)、2-(4,6-ジフェニル-1,3,5-トリアジン-2-イル)-5-[2-(2-エチルヘキサノイルオキシ)エトキシ]-フェノール(商品名「ADK STAB LA46」、ADEKA社製)、2-(2-ヒドロキシ-4-[1-オクチルオキシカルボニルエトキシ]フェニル)-4,6-ビス(4-フェニルフェニル)-1,3,5-トリアジン(商品名「TINUVIN479」、BASF社製)等を挙げることができる。 Specific examples of triazine-based UV absorbers having two or less hydroxyl groups in one molecule include 2,4-bis-[{4-(4-ethylhexyloxy)-4-hydroxy}-phenyl]-6 -(4-methoxyphenyl)-1,3,5-triazine (trade name “Tinosorb S”, manufactured by BASF), 2,4-bis[2-hydroxy-4-butoxyphenyl]-6-(2,4 -dibutoxyphenyl)-1,3,5-triazine (trade name “TINUVIN 460”, manufactured by BASF), 2-(4,6-bis(2,4-dimethylphenyl)-1,3,5-triazine -2-yl)-5-hydroxyphenyl and [(C 10 -C 16 (mainly C 12 -C 13 )alkyloxy)methyl]oxirane reaction product (trade name “TINUVIN400”, manufactured by BASF), 2 -[4,6-bis(2,4-dimethylphenyl)-1,3,5-triazin-2-yl]-5-[3-(dodecyloxy)-2-hydroxypropoxy]phenol), 2-( Reaction product of 2,4-dihydroxyphenyl)-4,6-bis-(2,4-dimethylphenyl)-1,3,5-triazine and (2-ethylhexyl)-glycidate (trade name “TINUVIN405” , manufactured by BASF), 2-(4,6-diphenyl-1,3,5-triazin-2-yl)-5-[(hexyl)oxy]-phenol (trade name “TINUVIN1577”, manufactured by BASF), 2-(4,6-diphenyl-1,3,5-triazin-2-yl)-5-[2-(2-ethylhexanoyloxy)ethoxy]-phenol (trade name “ADK STAB LA46”, ADEKA ), 2-(2-hydroxy-4-[1-octyloxycarbonylethoxy]phenyl)-4,6-bis(4-phenylphenyl)-1,3,5-triazine (trade name “TINUVIN479”, BASF company) and the like.
 また、1分子中にベンゾトリアゾール骨格を1個有するベンゾトリアゾール系紫外線吸収剤としては、2-(2H-ベンゾトリアゾール-2-イル)-6-(1-メチル-1-フェニルエチル)-4-(1,1,3,3-テトラメチルブチル)フェノール(商品名「TINUVIN 928」、BASF社製)、2-(2-ヒドロキシ-5-tert-ブチルフェニル)-2H-ベンゾトリアゾール(商品名「TINUVIN PS」、BASF社製)、ベンゼンプロパン酸および3-(2H-ベンゾトリアゾール-2-イル)-5-(1,1-ジメチルエチル)-4-ヒドロキシ(C7-9側鎖および直鎖アルキル)のエステル化合物(商品名「TINUVIN384-2」、BASF社製)、2-(2H-ベンゾトリアゾール-2-イル)-4,6-ビス(1-メチル-1-フェニルエチル)フェノール(商品名「TINUVIN900」、BASF社製)、2-(2H-ベンゾトリアゾール-2-イル)-6-(1-メチル-1-フェニルエチル)-4-(1,1,3,3-テトラメチルブチル)フェノール(商品名「TINUVIN928」、BASF社製)、メチル-3-(3-(2H-ベンゾトリアゾール-2-イル)-5-t-ブチル-4-ヒドロキシフェニル)プロピオネート/ポリエチレングリコール300の反応生成物(商品名「TINUVIN1130」、BASF社製)、2-(2H-ベンゾトリアゾール-2-イル)-p-クレゾール(商品名「TINUVIN P」、BASF社製)、2(2H-ベンゾトリアゾール-2-イル)-4-6-ビス(1-メチル-1-フェニルエチル)フェノール(商品名「TINUVIN234」、BASF社製)、2-〔5-クロロ(2H)-ベンゾトリアゾール-2-イル〕-4-メチル-6-(tert-ブチル)フェノール(商品名「TINUVIN326」、BASF社製)、2-(2H-ベンゾトリアゾール-2-イル)-4,6-ジ-tert-ペンチルフェノール(商品名「TINUVIN328」、BASF社製)、2-(2H-ベンゾトリアゾール-2-イル)-4-(1,1,3,3-テトラメチルブチル)フェノール(商品名「TINUVIN329」、BASF社製)、メチル3-(3-(2H-ベンゾトリアゾール-2-イル)-5-tert-ブチル-4-ヒドロキシフェニル)プロピオネートとポリエチレングリコール300との反応生成物(商品名「TINUVIN213」、BASF社製)、2-(2H-ベンゾトリアゾール-2-イル)-6-ドデシル-4-メチルフェノール(商品名「TINUVIN571」、BASF社製)、2-[2-ヒドロキシ-3-(3、4、5,6-テトラヒドロフタルイミドーメチル)-5-メチルフェニル]ベンゾトリアゾール(商品名「Sumisorb250」、住友化学工業(株)製)等を挙げることができる。 Further, as a benzotriazole-based UV absorber having one benzotriazole skeleton in one molecule, 2-(2H-benzotriazol-2-yl)-6-(1-methyl-1-phenylethyl)-4- (1,1,3,3-tetramethylbutyl) phenol (trade name “TINUVIN 928”, manufactured by BASF), 2-(2-hydroxy-5-tert-butylphenyl)-2H-benzotriazole (trade name “ TINUVIN PS", manufactured by BASF), benzenepropanoic acid and 3-(2H-benzotriazol-2-yl)-5-(1,1-dimethylethyl)-4-hydroxy (C 7-9 side chain and linear alkyl) ester compound (trade name “TINUVIN384-2”, manufactured by BASF), 2-(2H-benzotriazol-2-yl)-4,6-bis(1-methyl-1-phenylethyl)phenol (trade name name "TINUVIN900", manufactured by BASF), 2-(2H-benzotriazol-2-yl)-6-(1-methyl-1-phenylethyl)-4-(1,1,3,3-tetramethylbutyl ) Reaction of phenol (trade name “TINUVIN928”, manufactured by BASF), methyl-3-(3-(2H-benzotriazol-2-yl)-5-t-butyl-4-hydroxyphenyl)propionate/polyethylene glycol 300 Product (trade name “TINUVIN1130”, manufactured by BASF), 2-(2H-benzotriazol-2-yl)-p-cresol (trade name “TINUVIN P”, manufactured by BASF), 2(2H-benzotriazole- 2-yl)-4-6-bis(1-methyl-1-phenylethyl)phenol (trade name “TINUVIN234”, manufactured by BASF), 2-[5-chloro(2H)-benzotriazol-2-yl] -4-methyl-6-(tert-butyl) phenol (trade name "TINUVIN326", manufactured by BASF), 2-(2H-benzotriazol-2-yl)-4,6-di-tert-pentylphenol (trade name name “TINUVIN328”, manufactured by BASF), 2-(2H-benzotriazol-2-yl)-4-(1,1,3,3-tetramethylbutyl)phenol (trade name “TINUVIN329”, manufactured by BASF) , methyl 3-(3-(2H-benzotriazol-2-yl)-5-tert-butyl-4-hydroxyphenyl)propionate and polyethylene glycol 3 00 (trade name “TINUVIN213”, manufactured by BASF), 2-(2H-benzotriazol-2-yl)-6-dodecyl-4-methylphenol (trade name “TINUVIN571”, manufactured by BASF) , 2-[2-hydroxy-3-(3,4,5,6-tetrahydrophthalimidomethyl)-5-methylphenyl]benzotriazole (trade name “Sumisorb 250”, manufactured by Sumitomo Chemical Co., Ltd.) and the like. be able to.
 また、上記ベンゾフェノン系紫外線吸収剤(ベンゾフェノン系化合物)、オキシベンゾフェノン系紫外線吸収剤(オキシベンゾフェノン系化合物)としては、例えば、2,4-ジヒドロキシベンゾフェノン、2-ヒドロキシ-4-メトキシベンゾフェノン、2-ヒドロキシ-4-メトキシベンゾフェノン-5-スルホン酸(無水および三水塩)、2-ヒドロキシ-4-オクチルオキシベンゾフェノン、4-ドデシルオキシ-2-ヒドロキシベンゾフェノン、4-ベンジルオキシ-2-ヒドロキシベンゾフェノン、2,2’,4,4’-テトラヒドロキシベンゾフェノン、2,2’-ジヒドロキシ-4,4-ジメトキシベンゾフェノン等を挙げることができる。 Examples of the benzophenone-based ultraviolet absorber (benzophenone-based compound) and oxybenzophenone-based ultraviolet absorber (oxybenzophenone-based compound) include 2,4-dihydroxybenzophenone, 2-hydroxy-4-methoxybenzophenone, 2-hydroxy -4-methoxybenzophenone-5-sulfonic acid (anhydrous and trihydrate), 2-hydroxy-4-octyloxybenzophenone, 4-dodecyloxy-2-hydroxybenzophenone, 4-benzyloxy-2-hydroxybenzophenone, 2, 2',4,4'-tetrahydroxybenzophenone, 2,2'-dihydroxy-4,4-dimethoxybenzophenone and the like can be mentioned.
 また上記サリチル酸エステル系紫外線吸収剤(サリチル酸エステル系化合物)としては、例えば、フェニル-2-アクリロイルオキシベンゾエ-ト、フェニル-2-アクロリイルオキシ-3-メチルベンゾエ-ト、フェニル-2-アクリロイルオキシ-4-メチルベンゾエ-ト、フェニル-2-アクリロイルオキシ-5-メチルベンゾエ-ト、フェニル-2-アクリロイルオキシ-3-メトキシベンゾエ-ト、フェニル-2-ヒドロキシベンゾエ-ト、フェニル-2-ヒドロキシ-3-メチルベンゾエ-ト、フェニル-2-ヒドロキシ-4メチルベンゾエ-ト、フェニル-2-ヒドロキシ-5-メチルベンゾエ-ト、フェニル2-ヒドロキシ-3-メトキシベンゾエ-ト、2,4-ジ-tert-ブチルフェニル-3,5-ジ-tert-ブチル-4-ヒドロキシベンゾエート(商品名「TINUVIN120」、BASF社製)等を挙げることができる。 Examples of the salicylic acid ester-based ultraviolet absorbers (salicylic acid ester-based compounds) include phenyl-2-acryloyloxybenzoate, phenyl-2-acryloyloxy-3-methylbenzoate, and phenyl-2-acryloyloxy. -4-methylbenzoate, phenyl-2-acryloyloxy-5-methylbenzoate, phenyl-2-acryloyloxy-3-methoxybenzoate, phenyl-2-hydroxybenzoate, phenyl-2-hydroxy -3-methylbenzoate, phenyl-2-hydroxy-4-methylbenzoate, phenyl-2-hydroxy-5-methylbenzoate, phenyl 2-hydroxy-3-methoxybenzoate, 2,4-di-tert -Butylphenyl-3,5-di-tert-butyl-4-hydroxybenzoate (trade name "TINUVIN120", manufactured by BASF) and the like.
 上記シアノアクリレート系紫外線吸収剤(シアノアクリレート系化合物)としては、例えば、アルキル-2-シアノアクリレート、シクロアルキル-2-シアノアクリレート、アルコキシアルキル-2-シアノアクリレート、アルケニル-2-シアノアクリレート、アルキニル-2-シアノアクリレート等を挙げることができる。 Examples of the cyanoacrylate-based ultraviolet absorbers (cyanoacrylate-based compounds) include alkyl-2-cyanoacrylates, cycloalkyl-2-cyanoacrylates, alkoxyalkyl-2-cyanoacrylates, alkenyl-2-cyanoacrylates, alkynyl- 2-cyanoacrylate and the like can be mentioned.
 上記紫外線吸収剤の吸収スペクトルの最大吸収波長は、300~400nmの波長領域に存在することが好ましく、320~380nmの波長領域に存在することがより好ましい。 The maximum absorption wavelength of the absorption spectrum of the ultraviolet absorber is preferably in the wavelength range of 300-400 nm, more preferably in the wavelength range of 320-380 nm.
 上記酸化防止剤としては、例えば、フェノール系、リン系、イオウ系およびアミン系の酸化防止剤があげられ、これらから選ばれるいずれか少なくとも1種を用いる。これらの中でも、フェノール系酸化防止剤が好ましく、特にヒンダードフェノール系酸化防止剤が好ましい。 Examples of the antioxidant include phenol-based, phosphorus-based, sulfur-based and amine-based antioxidants, and at least one selected from these is used. Among these, phenolic antioxidants are preferred, and hindered phenolic antioxidants are particularly preferred.
 上記フェノール系酸化防止剤の具体例としては、単環フェノール化合物として、2,6-ジ-t-ブチル-p-クレゾール、2,6-ジ-t-ブチル-4-エチルフェノール、2,6-ジシクロヘキシル-4-メチルフェノール、2,6-ジイソプロピル-4-エチルフェノール、2,6-ジ-t-アミル-4-メチルフェノール、2,6-ジ-t-オクチル-4-n-プロピルフェノール、2,6-ジシクロヘキシル-4-n-オクチルフェノール、2-イソプロピル-4-メチル-6-t-ブチルフェノール、2-t-ブチル-4-エチル-6-t-オクチルフェノール、2-イソブチル-4-エチル-6-t-ヘキシルフェノール、2-シクロヘキシル-4-n-ブチル-6-イソプロピルフェノール、スチレン化混合クレゾール、DL-α-トコフェロール、ステアリルβ-(3,5-ジ-t-ブチル-4-ヒドロキシフェニル)プロピオネート等を、2環フェノール化合物として、2,2’-メチレンビス(4-メチル-6-t-ブチルフェノール)、4,4'-ブチリデンビス(3-メチル-6-t-ブチルフェノール)、4,4'-チオビス(3-メチル-6-t-ブチルフェノール)、2,2'-チオビス(4-メチル-6-t-ブチルフェノール)、4,4'-メチレンビス(2,6-ジ-t-ブチルフェノール)、2,2'-メチレンビス[6-(1-メチルシクロヘキシル)-p-クレゾール]、2,2'-エチリデンビス(4,6-ジ-t-ブチルフェノール)、2,2'-ブチリデンビス(2-t-ブチル-4-メチルフェノール)、3,6-ジオキサオクタメチレンビス[3-(3-t-ブチル-4-ヒドロキシ-5-メチルフェニル)プロピオネート]、トリエチレングリコールビス[3-(3-t-ブチル-5-メチル-4-ヒドロキシフェニル)プロピオネート]、1,6-ヘキサンジオール ビス[3-(3,5-ジ-t-ブチル-4-ヒドロキシフェニル)プロピオネート]、2,2'-チオジエチレンビス[3-(3,5-ジ-t-ブチル-4-ヒドロキシフェニル)プロピオネート]等を、3環フェノール化合物として、1,1,3-トリス(2-メチル-4-ヒドロキシ-5-t-ブチルフェニル)ブタン、1,3,5-トリス(2,6-ジメチル-3-ヒドロキシ-4-t-ブチルベンジル)イソシアヌレート、1,3,5-トリス[(3,5-ジ-t-ブチル-4-ヒドロキシフェニル)プロピオニルオキシエチル]イソシアヌレート、トリス(4-t-ブチル-2,6-ジメチル-3-ヒドロキシベンジル)イソシアヌレート、1,3,5-トリメチル-2,4,6-トリス(3,5-ジ-t-ブチル-4-ヒドロキシベンジル)ベンゼン等を、4環フェノール化合物として、テトラキス[メチレン-3-(3,5-ジ-t-ブチル-4-ヒドロキシフェニル)プロピオネート]メタン等を、リン含有フェノール化合物として、ビス(3,5-ジ-t-ブチル-4-ヒドロキシベンジルホスホン酸エチル)カルシウム、ビス(3,5-ジ-t-ブチル-4-ヒドロキシベンジルホスホン酸エチル)ニッケル等を挙げることができる。 Specific examples of the above phenolic antioxidants include monocyclic phenol compounds such as 2,6-di-t-butyl-p-cresol, 2,6-di-t-butyl-4-ethylphenol, 2,6 -dicyclohexyl-4-methylphenol, 2,6-diisopropyl-4-ethylphenol, 2,6-di-t-amyl-4-methylphenol, 2,6-di-t-octyl-4-n-propylphenol , 2,6-dicyclohexyl-4-n-octylphenol, 2-isopropyl-4-methyl-6-t-butylphenol, 2-t-butyl-4-ethyl-6-t-octylphenol, 2-isobutyl-4-ethyl -6-t-hexylphenol, 2-cyclohexyl-4-n-butyl-6-isopropylphenol, styrenated mixed cresol, DL-α-tocopherol, stearyl β-(3,5-di-t-butyl-4- hydroxyphenyl) propionate, etc., as bicyclic phenol compounds, 2,2′-methylenebis(4-methyl-6-t-butylphenol), 4,4′-butylidenebis(3-methyl-6-t-butylphenol), 4 , 4′-thiobis(3-methyl-6-t-butylphenol), 2,2′-thiobis(4-methyl-6-t-butylphenol), 4,4′-methylenebis(2,6-di-t- butylphenol), 2,2′-methylenebis[6-(1-methylcyclohexyl)-p-cresol], 2,2′-ethylidenebis(4,6-di-t-butylphenol), 2,2′-butylidenebis( 2-t-butyl-4-methylphenol), 3,6-dioxaoctamethylenebis[3-(3-t-butyl-4-hydroxy-5-methylphenyl)propionate], triethylene glycol bis[3- (3-t-butyl-5-methyl-4-hydroxyphenyl)propionate], 1,6-hexanediol bis[3-(3,5-di-t-butyl-4-hydroxyphenyl)propionate], 2, 2'-Thiodiethylene bis [3-(3,5-di-t-butyl-4-hydroxyphenyl) propionate] etc., as a tricyclic phenol compound, 1,1,3-tris(2-methyl-4- hydroxy-5-t-butylphenyl)butane, 1,3,5-tris(2,6-dimethyl-3-hydroxy-4-t-butylbenzyl)isocyanurate, 1,3,5-tris[(3, 5-di-t-butyl-4-hi droxyphenyl)propionyloxyethyl]isocyanurate, tris(4-t-butyl-2,6-dimethyl-3-hydroxybenzyl)isocyanurate, 1,3,5-trimethyl-2,4,6-tris(3 ,5-di-t-butyl-4-hydroxybenzyl)benzene, etc., as a tetracyclic phenol compound, tetrakis[methylene-3-(3,5-di-t-butyl-4-hydroxyphenyl)propionate]methane, etc. as phosphorus-containing phenol compounds, bis(3,5-di-t-butyl-4-hydroxybenzylphosphonate ethyl) calcium, bis(3,5-di-t-butyl-4-hydroxybenzylphosphonate ethyl) Nickel and the like can be mentioned.
 上記劣化防止剤は、単独でまたは2種以上組み合わせて用いることができる。粘着剤組成物に含有する劣化防止剤の含有量は、保管時の変色等の劣化抑制、転写用両面粘着フィルムの加工性の観点から、例えば、上記第1粘着組成物100重量部に対して、0.01~10重量部が好ましく、0.03~5重量部がより好ましく、0.1~3重量部がさらに好ましい。 The above deterioration inhibitors can be used alone or in combination of two or more. The content of the anti-deterioration agent contained in the pressure-sensitive adhesive composition is, for example, based on 100 parts by weight of the first pressure-sensitive adhesive composition from the viewpoint of suppressing deterioration such as discoloration during storage and workability of the double-sided pressure-sensitive adhesive film for transfer. , preferably 0.01 to 10 parts by weight, more preferably 0.03 to 5 parts by weight, even more preferably 0.1 to 3 parts by weight.
 上記第1粘着剤層を構成する粘着剤組成物には、本発明の効果を損なわない範囲で、任意の適切なその他の成分を含むことができる。このようなその他の成分としては、例えば、粘着付与剤、無機充填剤、有機充填剤、金属粉、顔料、箔状物、軟化剤、可塑剤、導電剤、表面潤滑剤、レベリング剤、耐熱安定剤、重合禁止剤、滑剤、溶剤等が挙げられる。 The pressure-sensitive adhesive composition that constitutes the first pressure-sensitive adhesive layer can contain any other appropriate component within a range that does not impair the effects of the present invention. Such other components include, for example, tackifiers, inorganic fillers, organic fillers, metal powders, pigments, foils, softeners, plasticizers, conductive agents, surface lubricants, leveling agents, and heat-stabilizing agents. agents, polymerization inhibitors, lubricants, solvents and the like.
<第2粘着剤層>
 本発明に係る転写用両面粘着フィルムにおいて、第2粘着剤層は、キャリア基板に仮固定するための粘着剤層であり、剥離性粘着剤層からなるものである。上記第2粘着剤層が剥離性粘着剤層からなるという構成は、当該第2粘着剤層をキャリア基板から糊残り等の汚染がなく剥離することができ、リワーク性が向上できる点で好ましい。
<Second adhesive layer>
In the double-sided pressure-sensitive adhesive film for transfer according to the present invention, the second pressure-sensitive adhesive layer is a pressure-sensitive adhesive layer for temporarily fixing to the carrier substrate, and is composed of a peelable pressure-sensitive adhesive layer. The configuration in which the second pressure-sensitive adhesive layer consists of a peelable pressure-sensitive adhesive layer is preferable in that the second pressure-sensitive adhesive layer can be peeled off from the carrier substrate without contamination such as adhesive residue, and reworkability can be improved.
 上記第2粘着剤層は、粘着剤の種類や組成、架橋度等による粘着性の調整や、熱、紫外線等の電磁波等の物理的刺激により粘着力を低下させることにより、剥離性粘着剤層とすることができる。 The second pressure-sensitive adhesive layer is formed by adjusting the pressure-sensitive adhesive by adjusting the type and composition of the pressure-sensitive adhesive, the degree of cross-linking, etc., and reducing the pressure-sensitive adhesive strength by physical stimuli such as heat and electromagnetic waves such as ultraviolet rays. can be
 上記第2粘着剤層の上記粘着力は、構成する粘着剤の種類や組成、架橋度等を調整することや、軽剥離化剤や可塑剤の配合によるWBL(Weak Boundary Layer)の形成により、調整することができる。 The adhesive strength of the second pressure-sensitive adhesive layer can be adjusted by adjusting the type and composition of the pressure-sensitive adhesive that constitutes it, the degree of cross-linking, etc., or by forming a WBL (Weak Boundary Layer) by blending a light release agent or a plasticizer. can be adjusted.
 本発明に係る転写用両面粘着フィルムにおいて、第2粘着剤層の厚みは、特に限定されないが、1μm以上が好ましく、より好ましくは3μm以上である。厚みが一定以上であると、第2粘着剤層がキャリア基板に安定して固定しやすくなり、好ましい。また、第2粘着剤層の厚みの上限は、特に限定されないが、30μmが好ましく、より好ましくは20μmである。厚みが一定以下であると、第2粘着剤層をキャリア基板から剥離しやすくなり、リワーク性が向上し、好ましい。 In the double-sided pressure-sensitive adhesive film for transfer according to the present invention, the thickness of the second pressure-sensitive adhesive layer is not particularly limited, but is preferably 1 μm or more, more preferably 3 μm or more. When the thickness is at least a certain value, the second pressure-sensitive adhesive layer can be stably and easily fixed to the carrier substrate, which is preferable. Moreover, although the upper limit of the thickness of the second pressure-sensitive adhesive layer is not particularly limited, it is preferably 30 μm, more preferably 20 μm. When the thickness is less than a certain value, the second pressure-sensitive adhesive layer can be easily peeled off from the carrier substrate, and reworkability is improved, which is preferable.
 上記第2粘着剤層を構成する粘着剤としては、特に限定されないが、例えば、上記で第1粘着剤層で使用されるシリコーン系粘着剤、ウレタン系粘着剤、アクリル系粘着剤、ゴム系粘着剤、ポリエステル系粘着剤、ポリアミド系粘着剤、エポキシ系粘着剤、ビニルアルキルエーテル系粘着剤、フッ素系粘着剤等が挙げられる。これらの中でも、キャリア基板から糊残り等の汚染がなく剥離することができ、リワーク性向上の観点から、シリコーン系粘着剤、ウレタン系粘着剤、アクリル系粘着剤が好ましく、ウレタン系粘着剤、アクリル系粘着剤がより好ましく、アクリル系粘着剤がさらに好ましい。 The pressure-sensitive adhesive that constitutes the second pressure-sensitive adhesive layer is not particularly limited. adhesives, polyester-based adhesives, polyamide-based adhesives, epoxy-based adhesives, vinyl alkyl ether-based adhesives, fluorine-based adhesives, and the like. Among these, silicone-based adhesives, urethane-based adhesives, and acrylic-based adhesives are preferable from the viewpoint of improving reworkability, as they can be removed from the carrier substrate without contamination such as adhesive residue, and urethane-based adhesives and acrylic adhesives are preferred. PSA is more preferred, and acrylic PSA is even more preferred.
 本発明に係る転写用両面粘着フィルムにおける第2粘着剤層は、転写用両面粘着フィルムの使用過程において外部からの作用によって意図的に粘着力を低減させることが可能な粘着剤層(粘着力低減可能型粘着剤層)であってもよいし、転写用両面粘着フィルムの使用過程において外部からの作用によっては粘着力がほとんどまたは全く低減しない粘着剤層(粘着力非低減型粘着剤層)であってもよく、本発明に係る転写用両面粘着フィルムを使用して電子部品を転写する手法や条件等に応じて適宜に選択することができる。 The second pressure-sensitive adhesive layer in the double-sided pressure-sensitive adhesive film for transfer according to the present invention is a pressure-sensitive adhesive layer capable of intentionally reducing the pressure-sensitive adhesive force by an external action during the process of using the double-sided pressure-sensitive adhesive film for transfer (reduction of pressure-sensitive adhesive force It may be a flexible adhesive layer), or it may be an adhesive layer (adhesive strength non-reducing type adhesive layer) whose adhesive force is hardly or not reduced by external action during the use process of the double-sided adhesive film for transfer. It can be selected as appropriate according to the method, conditions, etc. for transferring an electronic component using the double-sided pressure-sensitive adhesive film for transfer according to the present invention.
 第2粘着剤層が粘着力低減可能型粘着剤層である場合、本発明に係る転写用両面粘着フィルムの製造過程や使用過程において、第2粘着剤層が相対的に高い粘着力を示す状態と相対的に低い粘着力を示す状態とを使い分けることが可能となる。例えば、本発明に係る転写用両面粘着フィルムの使用過程で第1粘着剤層が電子部品を受け取る工程では、第2粘着剤層が相対的に高い粘着力を示す状態を利用して、キャリア基板からの転写用両面粘着フィルムの浮きを抑制・防止することが可能となる。一方で、その後、本発明に係る転写用両面粘着フィルムをキャリア基板から剥離過程では、第2粘着剤層の粘着力を低減させることで、リワーク性を向上させることができる。 When the second pressure-sensitive adhesive layer is a pressure-sensitive adhesive layer capable of reducing the pressure-sensitive adhesive strength, the state in which the pressure-sensitive adhesive layer exhibits relatively high pressure-sensitive adhesive strength in the process of manufacturing or using the double-sided pressure-sensitive adhesive film for transfer according to the present invention. and a state in which the adhesive strength is relatively low can be properly used. For example, in the process of using the double-sided pressure-sensitive adhesive film for transfer according to the present invention, in the step of receiving the electronic component with the first pressure-sensitive adhesive layer, the second pressure-sensitive adhesive layer exhibits relatively high adhesive strength, and the carrier substrate is It is possible to suppress and prevent the transfer double-sided adhesive film from floating. On the other hand, after that, in the process of peeling the double-sided pressure-sensitive adhesive film for transfer according to the present invention from the carrier substrate, the reworkability can be improved by reducing the adhesive strength of the second pressure-sensitive adhesive layer.
 このような粘着力低減可能型粘着剤層を形成する粘着剤としては、例えば、放射線硬化性粘着剤、加熱発泡型粘着剤等が挙げられる。粘着力低減可能型粘着剤層を形成する粘着剤は、単独でまたは2種以上組み合わせて用いることができる。 Examples of adhesives that form such an adhesive layer capable of reducing adhesive strength include radiation-curable adhesives and heat-foamable adhesives. The pressure-sensitive adhesive that forms the pressure-sensitive adhesive layer capable of reducing the pressure-sensitive adhesive strength can be used alone or in combination of two or more.
 上記放射線硬化性粘着剤としては、例えば、電子線、紫外線、α線、β線、γ線、またはX線の照射により硬化するタイプの粘着剤を用いることができ、紫外線照射によって硬化するタイプの粘着剤(紫外線硬化性粘着剤)を特に好ましく用いることができる。 As the radiation-curable adhesive, for example, an adhesive that is cured by irradiation with electron beams, ultraviolet rays, α-rays, β-rays, γ-rays, or X-rays can be used. Adhesives (ultraviolet curable adhesives) can be particularly preferably used.
 上記放射線硬化性粘着剤としては、例えば、アクリル系ポリマー等のベースポリマーと、放射線重合性の炭素-炭素二重結合等の官能基を有する放射線重合性のモノマー成分やオリゴマー成分とを含有する添加型の放射線硬化性粘着剤が挙げられる。 As the radiation-curable adhesive, for example, an additive containing a base polymer such as an acrylic polymer and a radiation-polymerizable monomer component or oligomer component having a functional group such as a radiation-polymerizable carbon-carbon double bond type radiation curable adhesives.
 ベースポリマーとしては、第1粘着剤層と同様のアクリル系ポリマーを使用することができる。炭化水素基含有(メタ)アクリル酸エステルによる粘着性等の基本特性を第2粘着剤層において適切に発現させ、粘着性、剥離性をコントロールしやすい点より、アクリル系ポリマーを形成するための全モノマー成分における、炭化水素基含有(メタ)アクリル酸エステルの割合は、40質量%以上が好ましく、より好ましくは60質量%以上である。 The same acrylic polymer as the first adhesive layer can be used as the base polymer. The basic properties such as adhesiveness of the hydrocarbon group-containing (meth)acrylic acid ester are appropriately expressed in the second adhesive layer, and the adhesiveness and peelability are easily controlled. The ratio of the hydrocarbon group-containing (meth)acrylic acid ester in the monomer component is preferably 40% by mass or more, more preferably 60% by mass or more.
 上記アクリル系ポリマーは、ヒドロキシ基含有モノマーを含んでもよい。第2粘着剤層内のアクリル系ポリマーがヒドロキシ基含有モノマーを含む場合、第2粘着剤層において適度な凝集力が得られやすい。第2粘着剤層において適度な接着性や凝集力を実現するという観点からは、上記アクリル系ポリマーにおける、ヒドロキシ基含有モノマーの割合は、例えば0.1~30質量%であり、好ましくは0.5~20質量%である。 The acrylic polymer may contain a hydroxy group-containing monomer. When the acrylic polymer in the second pressure-sensitive adhesive layer contains a hydroxy group-containing monomer, the second pressure-sensitive adhesive layer tends to have an appropriate cohesive strength. From the viewpoint of achieving appropriate adhesiveness and cohesion in the second pressure-sensitive adhesive layer, the proportion of the hydroxy group-containing monomer in the acrylic polymer is, for example, 0.1 to 30% by mass, preferably 0.1% by mass. 5 to 20% by mass.
 上記アクリル系ポリマーは、カルボキシ基含有モノマーを含んでもよい。第2粘着剤層内のアクリル系ポリマーがカルボキシ基含有モノマーを含む場合、第2粘着剤層において適度な接着信頼性が得られやすい。第2粘着剤層において適度な接着信頼性を実現するという観点からは、上記アクリル系ポリマーにおける、カルボキシ基含有モノマーの割合は、例えば0.1~30質量%であり、好ましくは0.5~20質量%である。 The acrylic polymer may contain a carboxy group-containing monomer. When the acrylic polymer in the second pressure-sensitive adhesive layer contains a carboxyl group-containing monomer, the second pressure-sensitive adhesive layer tends to have adequate adhesion reliability. From the viewpoint of achieving moderate adhesion reliability in the second pressure-sensitive adhesive layer, the proportion of the carboxy group-containing monomer in the acrylic polymer is, for example, 0.1 to 30% by mass, preferably 0.5 to 30% by mass. 20% by mass.
 上記アクリル系ポリマーは、ビニルエステル系モノマーを含んでもよい。第2粘着剤層内のアクリル系ポリマーがビニルエステル系モノマーを含む場合、第2粘着剤層において適度な凝集力が得られやすい。第2粘着剤層において適度な凝集力を実現するという観点からは、上記アクリル系ポリマーにおける、ビニルエステル系モノマーの割合は、例えば0.1~60質量%であり、好ましくは0.5~50質量%である。 The acrylic polymer may contain a vinyl ester monomer. When the acrylic polymer in the second pressure-sensitive adhesive layer contains a vinyl ester-based monomer, the second pressure-sensitive adhesive layer tends to have an appropriate cohesive strength. From the viewpoint of realizing an appropriate cohesive force in the second pressure-sensitive adhesive layer, the proportion of the vinyl ester monomer in the acrylic polymer is, for example, 0.1 to 60% by mass, preferably 0.5 to 50%. % by mass.
 第2粘着剤層を形成するアクリル系粘着剤組成物は、架橋剤を含有していてもよい。例えば、アクリル系ポリマーを架橋させ、第2粘着剤層中の低分子量物質をより低減させることができる。また、アクリル系ポリマーの質量平均分子量を高め、低粘着性、剥離性にコントロールすることができる。上記架橋剤としては、例えば、ポリイソシアネート化合物、エポキシ化合物、ポリオール化合物(ポリフェノール系化合物等)、アジリジン化合物、メラミン化合物等が挙げられ、イソシアネート系架橋剤および/またはエポキシ系架橋剤が好ましい架橋剤を使用する場合、その使用量は、アクリル系ポリマー100質量部に対して、10質量部程度以下が好ましく、より好ましくは0.1~10質量部である。 The acrylic pressure-sensitive adhesive composition forming the second pressure-sensitive adhesive layer may contain a cross-linking agent. For example, the acrylic polymer can be crosslinked to further reduce low-molecular-weight substances in the second pressure-sensitive adhesive layer. In addition, it is possible to increase the mass average molecular weight of the acrylic polymer and control the adhesion to be low and the peelability to be low. Examples of the cross-linking agent include polyisocyanate compounds, epoxy compounds, polyol compounds (polyphenol-based compounds, etc.), aziridine compounds, melamine compounds, and the like, and isocyanate-based cross-linking agents and/or epoxy-based cross-linking agents are preferred cross-linking agents. When used, the amount used is preferably about 10 parts by mass or less, more preferably 0.1 to 10 parts by mass, per 100 parts by mass of the acrylic polymer.
 第2粘着剤層を形成するアクリル系粘着剤組成物は、架橋促進剤が用いられていてもよい。架橋促進剤の種類は、使用する架橋剤の種類に応じて適宜選択することができる。なお、本明細書において、架橋促進剤とは、架橋剤による架橋反応の速度を高める触媒を指す。かかる架橋促進剤としては、ジオクチル錫ジラウレート、ジブチル錫ジラウレート、ジブチル錫ジアセテート、ジブチル錫ジアセチルアセトナート、テトラ-n-ブチル錫、トリメチル錫ヒドロキシド等の錫(Sn)含有化合物;N,N,N',N'-テトラメチルヘキサンジアミンやトリエチルアミン等のアミン類、イミダゾール類等のN含有化合物等が例示される。なかでも、Sn含有化合物が好ましい。これら架橋促進剤の使用は、上記副モノマーとしてヒドロキシル基含有モノマーを用い、かつ架橋剤としてイソシアネート系架橋剤を用いた場合に特に効果的である。上記粘着剤組成物に含まれる架橋促進剤の量は、上記アクリル系ポリマー100質量部に対し、例えば、0.001~0.5質量部程度(好ましくは0.001~0.1質量部程度)とすることができる。 A cross-linking accelerator may be used in the acrylic pressure-sensitive adhesive composition forming the second pressure-sensitive adhesive layer. The type of cross-linking accelerator can be appropriately selected according to the type of cross-linking agent used. In the present specification, the term "crosslinking accelerator" refers to a catalyst that increases the speed of the cross-linking reaction by the cross-linking agent. Such crosslinking accelerators include tin (Sn)-containing compounds such as dioctyltin dilaurate, dibutyltin dilaurate, dibutyltin diacetate, dibutyltin diacetylacetonate, tetra-n-butyltin, trimethyltin hydroxide; Examples include amines such as N',N'-tetramethylhexanediamine and triethylamine, and N-containing compounds such as imidazoles. Among them, Sn-containing compounds are preferred. The use of these cross-linking accelerators is particularly effective when a hydroxyl group-containing monomer is used as the secondary monomer and an isocyanate-based cross-linking agent is used as the cross-linking agent. The amount of the cross-linking accelerator contained in the adhesive composition is, for example, about 0.001 to 0.5 parts by mass (preferably about 0.001 to 0.1 parts by mass with respect to 100 parts by mass of the acrylic polymer. ).
 上記放射線重合性のモノマー成分としては、例えば、ウレタン(メタ)アクリレート、トリメチロールプロパントリ(メタ)アクリレート、ペンタエリスリトールトリ(メタ)アクリレート、ペンタエリスリトールテトラ(メタ)アクリレート、ジペンタエリスリトールモノヒドロキシペンタ(メタ)アクリレート、ジペンタエリスリトールヘキサ(メタ)アクリレート、1,4-ブタンジオールジ(メタ)アクリレート等挙げられる。上記放射線重合性のオリゴマー成分としては、例えば、ウレタン系、ポリエーテル系、ポリエステル系、ポリカーボネート系、ポリブタジエン系等の種々のオリゴマーが挙げられ、分子量が100~30000程度のものが好ましい。第2粘着剤層を形成する放射線硬化性粘着剤中の上記放射線硬化性のモノマー成分およびオリゴマー成分の含有量は、上記ベースポリマー100質量部に対して、例えば5~500質量部、好ましくは40~150質量部程度である。また、添加型の放射線硬化性粘着剤としては、例えば特開昭60-196956号公報に開示のものを用いてもよい。 Examples of the radiation-polymerizable monomer component include urethane (meth)acrylate, trimethylolpropane tri(meth)acrylate, pentaerythritol tri(meth)acrylate, pentaerythritol tetra(meth)acrylate, dipentaerythritol monohydroxypenta ( meth)acrylate, dipentaerythritol hexa(meth)acrylate, 1,4-butanediol di(meth)acrylate and the like. Examples of the radiation-polymerizable oligomer component include various oligomers such as urethane-based, polyether-based, polyester-based, polycarbonate-based, and polybutadiene-based oligomers, and those having a molecular weight of about 100 to 30,000 are preferred. The content of the radiation-curable monomer component and oligomer component in the radiation-curable adhesive that forms the second adhesive layer is, for example, 5 to 500 parts by mass, preferably 40 parts by mass, with respect to 100 parts by mass of the base polymer. It is about 150 parts by mass. Further, as the additive-type radiation-curable pressure-sensitive adhesive, for example, one disclosed in JP-A-60-196956 may be used.
 上記放射線硬化性粘着剤としては、放射線重合性の炭素-炭素二重結合等の官能基をポリマー側鎖や、ポリマー主鎖中、ポリマー主鎖末端に有するベースポリマーを含有する内在型の放射線硬化性粘着剤も挙げられる。このような内在型の放射線硬化性粘着剤を用いると、形成された第2粘着剤層内での低分子量成分の移動に起因する粘着特性の意図しない経時的変化を抑制することができる傾向がある。 As the radiation-curable pressure-sensitive adhesive, an internal radiation-curable adhesive containing a base polymer having a radiation-polymerizable carbon-carbon double bond or other functional group in the polymer side chain, in the polymer main chain, or at the polymer main chain end. Also included are adhesives. When such an internal radiation-curable adhesive is used, it tends to be possible to suppress unintended changes over time in adhesive properties due to migration of low-molecular-weight components within the formed second adhesive layer. be.
 上記内在型の放射線硬化性粘着剤に含有されるベースポリマーとしては、アクリル系ポリマーが好ましい。アクリル系ポリマーへの放射線重合性の炭素-炭素二重結合の導入方法としては、例えば、第1の官能基を有するモノマー成分を含む原料モノマーを重合(共重合)させてアクリル系ポリマーを得た後、上記第1の官能基と反応し得る第2の官能基および放射線重合性の炭素-炭素二重結合を有する化合物を、炭素-炭素二重結合の放射線重合性を維持したままアクリル系ポリマーに対して縮合反応または付加反応させる方法が挙げられる。 An acrylic polymer is preferable as the base polymer contained in the internal radiation-curable pressure-sensitive adhesive. As a method for introducing a radiation-polymerizable carbon-carbon double bond into an acrylic polymer, for example, an acrylic polymer is obtained by polymerizing (copolymerizing) raw material monomers containing a monomer component having a first functional group. After that, a compound having a second functional group capable of reacting with the first functional group and a radiation polymerizable carbon-carbon double bond is added to an acrylic polymer while maintaining the radiation polymerizability of the carbon-carbon double bond. and condensation reaction or addition reaction method.
 上記第1の官能基と上記第2の官能基の組み合わせとしては、例えば、カルボキシ基とエポキシ基、エポキシ基とカルボキシ基、カルボキシ基とアジリジル基、アジリジル基とカルボキシ基、ヒドロキシ基とイソシアネート基、イソシアネート基とヒドロキシ基等が挙げられる。これらの中でも、反応追跡の容易さの観点から、ヒドロキシ基とイソシアネート基の組み合わせ、イソシアネート基とヒドロキシ基の組み合わせが好ましい。中でも、反応性の高いイソシアネート基を有するポリマーを作製することは技術的難易度が高く、一方でヒドロキシ基を有するアクリル系ポリマーの作製および入手の容易性の観点から、上記第1の官能基がヒドロキシ基であり、上記第2の官能基がイソシアネート基である組み合わせが好ましい。イソシアネート基および放射性重合性の炭素-炭素二重結合を有する化合物、すなわち、放射線重合性の不飽和官能基含有イソシアネート化合物としては、例えば、メタクリロイルイソシアネート、2-メタクリロイルオキシエチルイソシアネート、m-イソプロペニル-α,α-ジメチルベンジルイソシアネート等が挙げられる。また、ヒドロキシ基を有するアクリル系ポリマーとしては、上述のヒドロキシ基含有モノマーや、2-ヒドロキシエチルビニルエーテル、4-ヒドロキシブチルビニルエーテル、ジエチレングルコールモノビニルエーテル等のエーテル系化合物に由来する構成単位を含むものが挙げられる。 Combinations of the first functional group and the second functional group include, for example, a carboxy group and an epoxy group, an epoxy group and a carboxy group, a carboxy group and an aziridyl group, an aziridyl group and a carboxy group, a hydroxy group and an isocyanate group, An isocyanate group, a hydroxy group, and the like can be mentioned. Among these, a combination of a hydroxy group and an isocyanate group, and a combination of an isocyanate group and a hydroxy group are preferred from the viewpoint of ease of reaction tracking. Among them, it is technically difficult to produce a polymer having a highly reactive isocyanate group, and on the other hand, from the viewpoint of ease of production and availability of an acrylic polymer having a hydroxy group, the first functional group is A preferred combination is a hydroxy group and the second functional group is an isocyanate group. Compounds having an isocyanate group and a radiation-polymerizable carbon-carbon double bond, that is, radiation-polymerizable unsaturated functional group-containing isocyanate compounds include, for example, methacryloyl isocyanate, 2-methacryloyloxyethyl isocyanate, m-isopropenyl- α,α-dimethylbenzyl isocyanate and the like. Further, as the acrylic polymer having a hydroxy group, those containing structural units derived from the above-mentioned hydroxy group-containing monomers and ether compounds such as 2-hydroxyethyl vinyl ether, 4-hydroxybutyl vinyl ether, and diethylene glycol monovinyl ether. is mentioned.
 上記放射線硬化性粘着剤は、光重合開始剤を含有することが好ましい。上記光重合開始剤としては、例えば、α-ケトール系化合物、アセトフェノン系化合物、ベンゾインエーテル系化合物、ケタール系化合物、芳香族スルホニルクロリド系化合物、光活性オキシム系化合物、ベンゾフェノン系化合物、チオキサントン系化合物、カンファーキノン、ハロゲン化ケトン、アシルホスフィノキシド、アシルホスフォナート等が挙げられる。上記α-ケトール系化合物としては、例えば、4-(2-ヒドロキシエトキシ)フェニル(2-ヒドロキシ-2-プロピル)ケトン、α-ヒドロキシ-α,α’-ジメチルアセトフェノン、2-メチル-2-ヒドロキシプロピオフェノン、1-ヒドロキシシクロヘキシルフェニルケトン等が挙げられる。上記アセトフェノン系化合物としては、例えば、メトキシアセトフェノン、2,2-ジメトキシ-2-フェニルアセトフエノン、2,2-ジエトキシアセトフェノン、2-メチル-1-[4-(メチルチオ)-フェニル]-2-モルホリノプロパン-1等が挙げられる。上記ベンゾインエーテル系化合物としては、例えば、ベンゾインエチルエーテル、ベンゾインイソプロピルエーテル、アニソインメチルエーテル等が挙げられる。上記ケタール系化合物としては、例えば、ベンジルジメチルケタール等が挙げられる。上記芳香族スルホニルクロリド系化合物としては、例えば、2-ナフタレンスルホニルクロリド等が挙げられる。上記光活性オキシム系化合物としては、例えば、1-フェニル-1,2-プロパンジオン-2-(O-エトキシカルボニル)オキシム等が挙げられる。上記ベンゾフェノン系化合物としては、例えば、ベンゾフェノン、ベンゾイル安息香酸、3,3'-ジメチル-4-メトキシベンゾフェノン等が挙げられる。上記チオキサントン系化合物としては、例えば、チオキサントン、2-クロロチオキサントン、2-メチルチオキサントン、2,4-ジメチルチオキサントン、イソプロピルチオキサントン、2,4-ジクロロチオキサントン、2,4-ジエチルチオキサントン、2,4-ジイソプロピルチオキサントン等が挙げられる。放射線硬化性粘着剤中の光重合開始剤の含有量は、ベースポリマー100質量部に対して、例えば0.05~20質量部である。 The radiation-curable adhesive preferably contains a photopolymerization initiator. Examples of the photopolymerization initiator include α-ketol compounds, acetophenone compounds, benzoin ether compounds, ketal compounds, aromatic sulfonyl chloride compounds, photoactive oxime compounds, benzophenone compounds, thioxanthone compounds, camphorquinone, halogenated ketone, acylphosphinate, acylphosphonate and the like. Examples of the α-ketol compounds include 4-(2-hydroxyethoxy)phenyl(2-hydroxy-2-propyl)ketone, α-hydroxy-α,α'-dimethylacetophenone, 2-methyl-2-hydroxy propiophenone, 1-hydroxycyclohexylphenyl ketone, and the like. Examples of the acetophenone compounds include methoxyacetophenone, 2,2-dimethoxy-2-phenylacetophenone, 2,2-diethoxyacetophenone, 2-methyl-1-[4-(methylthio)-phenyl]-2 -Morpholinopropane-1 and the like. Examples of the benzoin ether compounds include benzoin ethyl ether, benzoin isopropyl ether, and anisoin methyl ether. Examples of the ketal compounds include benzyl dimethyl ketal. Examples of the aromatic sulfonyl chloride compounds include 2-naphthalenesulfonyl chloride. Examples of the photoactive oxime compound include 1-phenyl-1,2-propanedione-2-(O-ethoxycarbonyl)oxime. Examples of the benzophenone-based compounds include benzophenone, benzoylbenzoic acid, and 3,3'-dimethyl-4-methoxybenzophenone. Examples of the thioxanthone compounds include thioxanthone, 2-chlorothioxanthone, 2-methylthioxanthone, 2,4-dimethylthioxanthone, isopropylthioxanthone, 2,4-dichlorothioxanthone, 2,4-diethylthioxanthone, and 2,4-diisopropyl. thioxanthone and the like. The content of the photopolymerization initiator in the radiation-curable adhesive is, for example, 0.05 to 20 parts by weight with respect to 100 parts by weight of the base polymer.
 上記加熱発泡型粘着剤は、加熱によって発泡や膨張をする成分(発泡剤、熱膨張性微小球等)を含有する粘着剤である。上記発泡剤としては、種々の無機系発泡剤や有機系発泡剤が挙げられる。上記無機系発泡剤としては、例えば、炭酸アンモニウム、炭酸水素アンモニウム、炭酸水素ナトリウム、亜硝酸アンモニウム、水素化ホウ素ナトリウム、アジド類等が挙げられる。上記有機系発泡剤としては、例えば、トリクロロモノフルオロメタン、ジクロロモノフルオロメタン等の塩フッ化アルカン;アゾビスイソブチロニトリル、アゾジカルボンアミド、バリウムアゾジカルボキシレート等のアゾ系化合物;パラトルエンスルホニルヒドラジド、ジフェニルスルホン-3,3'-ジスルホニルヒドラジド、4,4'-オキシビス(ベンゼンスルホニルヒドラジド)、アリルビス(スルホニルヒドラジド)等のヒドラジン系化合物;p-トルイレンスルホニルセミカルバジド、4,4'-オキシビス(ベンゼンスルホニルセミカルバジド)等のセミカルバジド系化合物;5-モルホリル-1,2,3,4-チアトリアゾール等のトリアゾール系化合物;N,N'-ジニトロソペンタメチレンテトラミン、N,N'-ジメチル-N,N'-ジニトロソテレフタルアミド等のN-ニトロソ系化合物等が挙げられる。上記熱膨張性微小球としては、例えば、加熱によって容易にガス化して膨張する物質が殻内に封入された構成の微小球が挙げられる。上記加熱によって容易にガス化して膨張する物質としては、例えば、イソブタン、プロパン、ペンタン等が挙げられる。加熱によって容易にガス化して膨張する物質をコアセルべーション法や界面重合法等によって殻形成物質内に封入することによって、熱膨張性微小球を作製することができる。上記殻形成物質としては、熱溶融性を示す物質や、封入物質の熱膨張の作用によって破裂し得る物質を用いることができる。そのような物質としては、例えば、塩化ビニリデン・アクリロニトリル共重合体、ポリビニルアルコール、ポリビニルブチラール、ポリメチルメタクリレート、ポリアクリロニトリル、ポリ塩化ビニリデン、ポリスルホン等が挙げられる。 The heat-expandable pressure-sensitive adhesive is a pressure-sensitive adhesive containing components that foam or expand when heated (foaming agent, thermally expandable microspheres, etc.). Examples of the foaming agent include various inorganic foaming agents and organic foaming agents. Examples of the inorganic foaming agent include ammonium carbonate, ammonium hydrogencarbonate, sodium hydrogencarbonate, ammonium nitrite, sodium borohydride, and azides. Examples of the organic foaming agent include alkane hydrochlorides such as trichloromonofluoromethane and dichloromonofluoromethane; azo compounds such as azobisisobutyronitrile, azodicarbonamide, and barium azodicarboxylate; and paratoluene. Hydrazine compounds such as sulfonyl hydrazide, diphenylsulfone-3,3'-disulfonyl hydrazide, 4,4'-oxybis(benzenesulfonylhydrazide), allylbis(sulfonylhydrazide); p-toluylenesulfonyl semicarbazide, 4,4'- Semicarbazide compounds such as oxybis (benzenesulfonyl semicarbazide); triazole compounds such as 5-morpholyl-1,2,3,4-thiatriazole; N,N'-dinitrosopentamethylenetetramine, N,N'-dimethyl- Examples include N-nitroso compounds such as N,N'-dinitrosoterephthalamide. Examples of the heat-expandable microspheres include microspheres having a structure in which a substance that easily gasifies and expands upon heating is encapsulated in the shell. Isobutane, propane, pentane, and the like are examples of substances that easily gasify and expand when heated. Thermally expandable microspheres can be produced by encapsulating a substance that is easily gasified and expanded by heating in a shell-forming substance by a coacervation method, an interfacial polymerization method, or the like. As the shell-forming substance, a substance exhibiting thermal melting properties and a substance capable of bursting due to the action of thermal expansion of the enclosed substance can be used. Examples of such substances include vinylidene chloride-acrylonitrile copolymer, polyvinyl alcohol, polyvinyl butyral, polymethyl methacrylate, polyacrylonitrile, polyvinylidene chloride, polysulfone, and the like.
 上記粘着力非低減型粘着剤層としては、例えば、感圧型粘着剤層が挙げられる。なお、感圧型粘着剤層には、粘着力低減可能型粘着剤層に関して上述した放射線硬化性粘着剤から形成された粘着剤層を予め放射線照射によって硬化させつつも一定の粘着力を有する形態の粘着剤層が含まれる。粘着力非低減型粘着剤層を形成する粘着剤は、単独でまたは2種以上組み合わせて用いることができる。また、第2粘着剤層の全体が粘着力非低減型粘着剤層であってもよいし、一部が粘着力非低減型粘着剤層であってもよい。例えば、第2粘着剤層が単層構造を有する場合、第2粘着剤層の全体が粘着力非低減型粘着剤層であってもよいし、第2粘着剤層における特定の部位が粘着力非低減型粘着剤層であり、他の部位が粘着力低減可能型粘着剤層であってもよい。また、第2粘着剤層が積層構造を有する場合、積層構造における全ての粘着剤層が粘着力非低減型粘着剤層であってもよいし、積層構造中の一部の粘着剤層が粘着力非低減型粘着剤層であってもよい。 Examples of the non-reducing adhesive layer include a pressure-sensitive adhesive layer. In the pressure-sensitive adhesive layer, an adhesive layer formed from the radiation-curable adhesive described above with respect to the adhesive force-reducing adhesive layer is cured by irradiation in advance and has a certain adhesive force. An adhesive layer is included. The pressure-sensitive adhesives forming the non-reducing pressure-sensitive adhesive layer can be used alone or in combination of two or more. Moreover, the whole second pressure-sensitive adhesive layer may be a non-adhesive force-reducing pressure-sensitive adhesive layer, or a part thereof may be a non-adhesive force-reducing pressure-sensitive adhesive layer. For example, when the second pressure-sensitive adhesive layer has a single-layer structure, the entire second pressure-sensitive adhesive layer may be a non-adhesion-reducing pressure-sensitive adhesive layer, or a specific portion of the second pressure-sensitive adhesive layer may It may be a non-reducing type pressure-sensitive adhesive layer and the other portion may be a pressure-sensitive adhesive layer capable of reducing the pressure-sensitive adhesive force. Further, when the second pressure-sensitive adhesive layer has a laminated structure, all the pressure-sensitive adhesive layers in the laminated structure may be non-adhesive strength-reducing pressure-sensitive adhesive layers, or some of the pressure-sensitive adhesive layers in the laminated structure may be adhesive layers. It may be a non-force-reducing pressure-sensitive adhesive layer.
 放射線硬化性粘着剤から形成された粘着剤層(放射線未照射放射線硬化型粘着剤層)を予め放射線照射によって硬化させた形態の粘着剤層(放射線照射済放射線硬化型粘着剤層)は、放射線照射によって粘着力が低減されているとしても、含有するポリマー成分に起因する粘着性を示し、本発明に係る転写用両面粘着フィルムに最低限必要な粘着力を発揮することが可能である。放射線照射済放射線硬化型粘着剤層を用いる場合、第2粘着剤層の面広がり方向において、第2粘着剤層の全体が放射線照射済放射線硬化型粘着剤層であってもよく、第2粘着剤層の一部が放射線照射済放射線硬化型粘着剤層であり且つ他の部分が放射線未照射の放射線硬化型粘着剤層であってもよい。なお、本明細書において、「放射線硬化型粘着剤層」とは、放射線硬化性粘着剤から形成された粘着剤層をいい、放射線硬化性を有する放射線未照射放射線硬化型粘着剤層および当該粘着剤層が放射線照射により硬化した後の放射線硬化済放射線硬化型粘着剤層の両方を含む。 The pressure-sensitive adhesive layer (irradiated radiation-curable pressure-sensitive adhesive layer) formed by pre-curing the pressure-sensitive adhesive layer (radiation-unexposed radiation-curable pressure-sensitive adhesive layer) formed from a radiation-curable pressure-sensitive adhesive by irradiation with radiation Even if the adhesive strength is reduced by irradiation, it exhibits adhesiveness due to the contained polymer component, and it is possible to exhibit the minimum required adhesive strength for the double-sided adhesive film for transfer according to the present invention. When the irradiated radiation-curable pressure-sensitive adhesive layer is used, the entire second pressure-sensitive adhesive layer may be the irradiated radiation-curable pressure-sensitive adhesive layer in the surface spreading direction of the second pressure-sensitive adhesive layer. A portion of the agent layer may be a radiation-curable pressure-sensitive adhesive layer that has been exposed to radiation, and the other portion may be a radiation-curable pressure-sensitive adhesive layer that has not been exposed to radiation. In this specification, the term "radiation-curable pressure-sensitive adhesive layer" refers to a pressure-sensitive adhesive layer formed from a radiation-curable pressure-sensitive adhesive. It includes both the radiation-cured radiation-curable pressure-sensitive adhesive layer after the agent layer has been cured by irradiation.
 上記感圧型粘着剤層を形成する粘着剤としては、公知乃至慣用の感圧型の粘着剤を用いることができ、アクリル系ポリマーをベースポリマーとするアクリル系粘着剤を好ましく用いることができる。第2粘着剤層が感圧型の粘着剤としてアクリル系ポリマーを含有する場合、当該アクリル系ポリマーは、(メタ)アクリル酸エステルに由来する構成単位を質量割合で最も多い構成単位として含むポリマーであることが好ましい。上記アクリル系ポリマーとしては、例えば、上述の添加型の放射線硬化性粘着剤に含まれ得るアクリル系ポリマーとして説明されたアクリル系ポリマーを採用することができる。 As the adhesive that forms the pressure-sensitive adhesive layer, a known or commonly used pressure-sensitive adhesive can be used, and an acrylic adhesive that uses an acrylic polymer as a base polymer can be preferably used. When the second pressure-sensitive adhesive layer contains an acrylic polymer as a pressure-sensitive pressure-sensitive adhesive, the acrylic polymer is a polymer containing the structural unit derived from (meth)acrylic acid ester as the largest structural unit in terms of mass ratio. is preferred. As the acrylic polymer, for example, the acrylic polymer described as the acrylic polymer that can be included in the additive-type radiation-curable pressure-sensitive adhesive can be employed.
<基材>
 本発明に係る転写用両面粘着フィルムにおける基材は、第1粘着剤層や第2粘着剤層において支持体として機能する要素である。基材としては、例えば、プラスチック基材(特にプラスチックフィルム)が挙げられる。上記基材は、単層であってもよいし、同種または異種の基材の積層体であってもよい。
<Base material>
The substrate in the double-sided pressure-sensitive adhesive film for transfer according to the present invention is an element that functions as a support in the first pressure-sensitive adhesive layer and the second pressure-sensitive adhesive layer. Substrates include, for example, plastic substrates (especially plastic films). The base material may be a single layer or a laminate of the same or different base materials.
 上記プラスチック基材を構成する樹脂としては、例えば、低密度ポリエチレン、直鎖状低密度ポリエチレン、中密度ポリエチレン、高密度ポリエチレン、超低密度ポリエチレン、ランダム共重合ポリプロピレン、ブロック共重合ポリプロピレン、ホモポリプロレン、ポリブテン、ポリメチルペンテン、エチレン-酢酸ビニル共重合体(EVA)、アイオノマー、エチレン-(メタ)アクリル酸共重合体、エチレン-(メタ)アクリル酸エステル(ランダム、交互)共重合体、エチレン-ブテン共重合体、エチレン-ヘキセン共重合体等のポリオレフィン樹脂;ポリウレタン;ポリエチレンテレフタレート(PET)、ポリエチレンナフタレート、ポリブチレンテレフタレート(PBT)等のポリエステル;ポリカーボネート;ポリイミド;ポリエーテルエーテルケトン;ポリエーテルイミド;アラミド、全芳香族ポリアミド等のポリアミド;ポリフェニルスルフィド;フッ素樹脂;ポリ塩化ビニル;ポリ塩化ビニリデン;セルロース樹脂;シリコーン樹脂等が挙げられる。本発明に係る転写用両面粘着フィルムが受け取った電子部品を実装基板上に熱圧着(例えば、150℃)して転写して実装する際に、熱による膨張や収縮を起こしにくい良好な耐熱性を示し、精度よく実装できるという観点から、基材は、ポリイミド(PI)、ポリエチレンテレフタレート(PET)、ポリエチレンナフタレート(PEN)、ポリアミド(PA)、ポリエーテルエーテルケトン(PEEK)等の耐熱性樹脂を主成分として含むことが好ましく、ポリイミドを主成分として含むことがより好ましい。なお、基材の主成分とは、構成成分中で最も大きな質量割合を占める成分とする。上記樹脂は、単独でまたは2種以上組み合わせて用いることができる。第2粘着剤層が前述のように放射線硬化型粘着剤層である場合、基材は放射線透過性を有することが好ましい。 Examples of the resin constituting the plastic substrate include low-density polyethylene, linear low-density polyethylene, medium-density polyethylene, high-density polyethylene, ultra-low-density polyethylene, random copolymerized polypropylene, block copolymerized polypropylene, and homopolypropylene. , polybutene, polymethylpentene, ethylene-vinyl acetate copolymer (EVA), ionomer, ethylene-(meth)acrylic acid copolymer, ethylene-(meth)acrylic acid ester (random, alternating) copolymer, ethylene- Polyolefin resins such as butene copolymers and ethylene-hexene copolymers; polyurethanes; polyesters such as polyethylene terephthalate (PET), polyethylene naphthalate, and polybutylene terephthalate (PBT); polycarbonates; polyimides; polyamide such as aramid and wholly aromatic polyamide; polyphenyl sulfide; fluorine resin; polyvinyl chloride; polyvinylidene chloride; cellulose resin; When the electronic component received by the double-sided pressure-sensitive adhesive film for transfer according to the present invention is heat-pressed (for example, 150° C.) onto a mounting substrate and transferred and mounted, it has good heat resistance that does not easily cause expansion or contraction due to heat. heat-resistant resin such as polyimide (PI), polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyamide (PA), polyetheretherketone (PEEK), etc. It preferably contains polyimide as a main component, and more preferably contains polyimide as a main component. In addition, let the main component of a base material be a component which occupies the largest mass ratio in a structural component. The above resins may be used alone or in combination of two or more. When the second pressure-sensitive adhesive layer is a radiation-curable pressure-sensitive adhesive layer as described above, the substrate preferably has radiation transparency.
 基材がプラスチックフィルムである場合、上記プラスチックフィルムは、無配向であってもよく、少なくとも一方向(一軸方向、二軸方向等)に配向していてもよいが、無配向であることが熱収縮性を示しにくいことから好ましい。 When the substrate is a plastic film, the plastic film may be non-oriented, or may be oriented in at least one direction (uniaxial direction, biaxial direction, etc.). It is preferable because it is difficult to exhibit contractility.
 基材の第1粘着剤層および/または第2粘着剤層側表面は、粘着剤層との密着性、保持性等を高める目的で、例えば、コロナ放電処理、プラズマ処理、サンドマット加工処理、オゾン暴露処理、火炎暴露処理、高圧電撃暴露処理、イオン化放射線処理等の物理的処理;クロム酸処理等の化学的処理;コーティング剤(下塗り剤);シリコーンプライマー処理による易接着処理等の表面処理が施されていてもよい。また、帯電防止能を付与するため、金属、合金、これらの酸化物等を含む導電性の蒸着層を基材表面に設けるほか、PEDOT-PSS等の導電性高分子をコーティングしてもよい。密着性を高めるための表面処理は、基材における粘着剤層側の表面全体に施されていることが好ましい。 The first pressure-sensitive adhesive layer and/or the second pressure-sensitive adhesive layer side surface of the base material may be subjected to, for example, corona discharge treatment, plasma treatment, sand matting treatment, Physical treatments such as ozone exposure treatment, flame exposure treatment, high voltage shock exposure treatment, and ionizing radiation treatment; chemical treatment such as chromic acid treatment; coating agent (undercoat); surface treatment such as easy adhesion treatment by silicone primer treatment. may be applied. In addition, in order to impart antistatic properties, a conductive deposition layer containing a metal, an alloy, an oxide thereof, or the like may be provided on the substrate surface, or a conductive polymer such as PEDOT-PSS may be coated. The surface treatment for enhancing adhesion is preferably applied to the entire surface of the adhesive layer side of the substrate.
 基材の厚さは、本発明に係る転写用両面粘着フィルムにおける支持体として基材が機能するための強度を確保するという観点からは、5μm以上が好ましく、より好ましくは10μm以上、さらに好ましくは15μm以上、特に好ましくは20μm以上である。また、本発明に係る転写用両面粘着フィルムにおいて適度な可撓性を実現するという観点からは、基材の厚さは、200μm以下が好ましく、より好ましくは180μm以下、さらに好ましくは150μm以下である。 The thickness of the substrate is preferably 5 μm or more, more preferably 10 μm or more, still more preferably 10 μm or more, from the viewpoint of ensuring strength for the substrate to function as a support in the double-sided pressure-sensitive adhesive film for transfer according to the present invention. 15 μm or more, particularly preferably 20 μm or more. From the viewpoint of achieving appropriate flexibility in the double-sided pressure-sensitive adhesive film for transfer according to the present invention, the thickness of the substrate is preferably 200 µm or less, more preferably 180 µm or less, and still more preferably 150 µm or less. .
<セパレータ>
 本発明に係る転写用両面粘着フィルムの粘着剤層表面(第1粘着剤層および第2粘着剤層の粘着面)は、使用時までは剥離ライナー(セパレータ)により保護される。セパレータは粘着剤層の保護材として用いられ、粘着フィルムを被着体に貼付する際に剥がされる。
<Separator>
The pressure-sensitive adhesive layer surfaces (the pressure-sensitive adhesive surfaces of the first pressure-sensitive adhesive layer and the second pressure-sensitive adhesive layer) of the double-sided pressure-sensitive adhesive film for transfer according to the present invention are protected by a release liner (separator) until use. The separator is used as a protective material for the pressure-sensitive adhesive layer, and is peeled off when the pressure-sensitive adhesive film is attached to the adherend.
 上記セパレータとしては、慣用の剥離紙等を利用でき、具体的には、例えば、剥離処理剤による剥離層を少なくとも一方の表面に有する基材の他、フッ素系ポリマー(例えば、ポリテトラフルオロエチレン、ポリクロロトリフルオロエチレン、ポリフッ化ビニル、ポリフッ化ビニリデン、テトラフルオロエチレン-ヘキサフルオロプロピレン共重合体、クロロフルオロエチレン-フッ化ビニリデン共重合体等)からなる低接着性基材や、無極性ポリマー(例えば、ポリエチレン、ポリプロピレン等のオレフィン系樹脂等)からなる低接着性基材等を用いることができる。 As the separator, a conventional release paper or the like can be used. Specifically, for example, in addition to a base material having a release layer formed by a release agent on at least one surface, a fluoropolymer (e.g., polytetrafluoroethylene, Low-adhesive substrates made of polychlorotrifluoroethylene, polyvinyl fluoride, polyvinylidene fluoride, tetrafluoroethylene-hexafluoropropylene copolymer, chlorofluoroethylene-vinylidene fluoride copolymer, etc.) and non-polar polymers ( For example, a low-adhesive base material made of olefin resins such as polyethylene and polypropylene can be used.
 上記セパレータとしては、例えば、セパレータ用基材の少なくとも一方の面に剥離層が形成されているセパレータを好適に用いることができる。このようなセパレータ用基材としては、ポリエステルフィルム(ポリエチレンテレフタレートフィルム等)、オレフィン系樹脂フィルム(ポリエチレンフィルム、ポリプロピレンフィルム等)、ポリ塩化ビニルフィルム、ポリイミドフィルム、ポリアミドフィルム(ナイロンフィルム)、レーヨンフィルム等のプラスチック系基材フィルム(合成樹脂フィルム)や紙類(上質紙、和紙、クラフト紙、グラシン紙、合成紙、トップコート紙等)の他、これらを、ラミネートや共押し出し等により、複層化したもの(2~3層の複合体)等が挙げられる。 As the separator, for example, a separator having a release layer formed on at least one surface of a separator substrate can be suitably used. Base materials for such separators include polyester films (polyethylene terephthalate films, etc.), olefin resin films (polyethylene films, polypropylene films, etc.), polyvinyl chloride films, polyimide films, polyamide films (nylon films), rayon films, and the like. In addition to plastic base film (synthetic resin film) and paper (wooden paper, Japanese paper, kraft paper, glassine paper, synthetic paper, top coat paper, etc.), these are multi-layered by lamination or co-extrusion. (composite of 2 to 3 layers) and the like.
 上記剥離層を構成する剥離処理剤としては、特に限定されないが、例えば、シリコーン系剥離処理剤、フッ素系剥離処理剤、長鎖アルキル系剥離処理剤、脂肪酸アミド系剥離処理剤等を用いることができ、中でも、シリコーン系剥離処理剤が好ましい。剥離処理剤は単独でまたは2種以上組み合わせて使用することができる。なお、第1粘着剤層は、低粘着性粘着剤層で構成されているため、剥離処理剤で処理されていない基材をセパレータとして使用することも可能である。 The release agent that constitutes the release layer is not particularly limited, but for example, a silicone-based release agent, a fluorine-based release agent, a long-chain alkyl-based release agent, a fatty acid amide-based release agent, or the like can be used. Among them, a silicone-based release agent is preferable. The release agents can be used alone or in combination of two or more. Since the first pressure-sensitive adhesive layer is composed of a low-adhesive pressure-sensitive adhesive layer, it is also possible to use a base material that has not been treated with a release treatment agent as a separator.
 第1セパレータに係る剥離層の厚みは、F(1)およびT(1)について上述の数値範囲内のものとする観点から、10~2000nmが好ましく、より好ましくは20~500nm、さらに好ましくは30~150nnm、特に好ましくは40~80nmである。 The thickness of the release layer of the first separator is preferably 10 to 2000 nm, more preferably 20 to 500 nm, and even more preferably 30 nm, from the viewpoint of keeping F(1) and T(1) within the numerical ranges described above. to 150 nm, particularly preferably 40 to 80 nm.
 第2セパレータに係る剥離層の厚みは、F(2)、P(2)、P’(2)およびT(2)について上述の数値範囲内のものとする観点から、10~2000nmが好ましく、より好ましくは30~500nm、さらに好ましくは50~250nm、特に好ましくは70~150nmである。 The thickness of the release layer of the second separator is preferably 10 to 2000 nm from the viewpoint that F(2), P(2), P'(2) and T(2) are within the numerical ranges described above. It is more preferably 30 to 500 nm, still more preferably 50 to 250 nm, particularly preferably 70 to 150 nm.
 なお、第1セパレータに係る剥離層の厚みは、第2セパレータに係る剥離層の厚み未満であることが好ましい。 The thickness of the release layer of the first separator is preferably less than the thickness of the release layer of the second separator.
 上記セパレータは、電子部品への悪影響を防止するため、セパレータ用基材の少なくとも一方の面に帯電防止層が形成されていてもよい。帯電防止層はセパレータの一方の面(剥離処理面または未処理面)に形成されていてもよく、セパレータの両面(剥離処理面および未処理面)に形成されていてもよい。 The separator may have an antistatic layer formed on at least one surface of the separator substrate in order to prevent adverse effects on electronic components. The antistatic layer may be formed on one side of the separator (release-treated side or untreated side) or may be formed on both sides of the separator (release-treated side and untreated side).
 帯電防止性樹脂に含有される帯電防止剤としては、第4級アンモニウム塩、ピリジニウム塩、第1、第2、第3アミノ基等のカチオン性官能基を有するカチオン型帯電防止剤、スルホン酸塩や硫酸エステル塩、ホスホン酸塩、リン酸エステル塩等のアニオン性官能基を有するアニオン型帯電防止剤、アルキルベタインおよびその誘導体、イミダゾリンおよびその誘導体、アラニンおよびその誘導体等の両性型帯電防止剤、アミノアルコールおよびその誘導体、グリセリンおよびその誘導体、ポリエチレングリコールおよびその誘導体等のノニオン型帯電防止剤、さらには、上記カチオン型、アニオン型、両性イオン型のイオン導電性基を有する単量体を重合もしくは共重合して得られたイオン導電性重合体が挙げられる。これらの化合物は、単独でまたは2種以上組み合わせて用いることができる。 Antistatic agents contained in the antistatic resin include quaternary ammonium salts, pyridinium salts, cationic antistatic agents having cationic functional groups such as primary, secondary and tertiary amino groups, and sulfonates. and anionic antistatic agents having anionic functional groups such as sulfates, phosphonates and phosphates, alkylbetaines and derivatives thereof, imidazoline and derivatives thereof, amphoteric antistatic agents such as alanine and derivatives thereof, Nonionic antistatic agents such as aminoalcohols and derivatives thereof, glycerin and derivatives thereof, polyethylene glycol and derivatives thereof, and monomers having cationic, anionic, and zwitterionic ion conductive groups are polymerized or An ion-conductive polymer obtained by copolymerization can be mentioned. These compounds can be used alone or in combination of two or more.
 第1セパレータの厚みは、F(1)およびT(1)について上述の数値範囲内のものとする観点から、1~150μmが好ましく、より好ましくは5~100μm、さらに好ましくは10~80μmである。 The thickness of the first separator is preferably 1 to 150 μm, more preferably 5 to 100 μm, still more preferably 10 to 80 μm, from the viewpoint of keeping F(1) and T(1) within the numerical ranges described above. .
 第2セパレータの厚みは、F(2)、P(2)、P’(2)およびT(2)について上述の数値範囲内のものとする観点から、10~150μmが好ましく、より好ましくは15~100μm、さらに好ましくは20~80μmである。 The thickness of the second separator is preferably 10 to 150 μm, more preferably 15 μm, from the viewpoint of keeping F(2), P(2), P′(2) and T(2) within the numerical ranges described above. ~100 μm, more preferably 20-80 μm.
 本発明に係る積層フィルムの製造方法は、上記粘着剤組成物の組成等によって異なり、特に限定されず、公知の形成方法を利用することができるが、例えば、以下の(1)~(4)等の方法が挙げられる。
(1)上記粘着剤組成物を基材上に塗布(塗工)して組成物層を形成し、該組成物層を硬化(例えば、熱硬化や紫外線等の活性エネルギー線照射による硬化)させて粘着剤層を形成して粘着フィルムを製造する方法
(2)上記粘着剤組成物を、セパレータ上に塗布(塗工)して組成物層を形成し、該組成物層を硬化(例えば、熱硬化や紫外線等の活性エネルギー線照射による硬化)させて粘着剤層を形成した後、該粘着剤層を基材上に転写して粘着フィルムを製造する方法
(3)上記粘着剤組成物を、基材上に塗布(塗工)し、乾燥させて粘着剤層を形成して粘着フィルムを製造する方法
(4)上記粘着剤組成物を、セパレータ上に塗布(塗工)し、乾燥させて粘着剤層を形成した後、該粘着剤層を基材上に転写して粘着フィルムを製造する方法
The method for producing the laminated film according to the present invention varies depending on the composition of the pressure-sensitive adhesive composition, etc., and is not particularly limited, and known forming methods can be used. and other methods.
(1) The adhesive composition is applied (coated) on a substrate to form a composition layer, and the composition layer is cured (for example, cured by heat curing or irradiation with active energy rays such as ultraviolet rays). (2) The adhesive composition is applied (coated) on a separator to form a composition layer, and the composition layer is cured (for example, A method of producing an adhesive film by forming an adhesive layer by heat curing or curing by irradiation with active energy rays such as ultraviolet rays, and then transferring the adhesive layer onto a substrate to produce an adhesive film (3). , A method of producing an adhesive film by coating (coating) on a substrate and drying to form an adhesive layer. (4) The adhesive composition is coated (coated) on a separator and dried. A method of producing an adhesive film by forming an adhesive layer with a method of transferring the adhesive layer onto a substrate
 上記(1)~(4)における硬化方法としては、生産性に優れるという点で、均質で表面平滑な粘着剤層を形成できる点で、熱硬化させる方法が好ましい。 As the curing method in the above (1) to (4), a heat curing method is preferable in terms of excellent productivity and in terms of forming a uniform pressure-sensitive adhesive layer with a smooth surface.
 上記粘着剤組成物を所定の面上に塗布(塗工)する方法としては、公知のコーティング方法を採用することがき、特に限定されないが、例えば、ロールコート、キスロールコート、グラビアコート、リバースコート、ロールブラッシュ、スプレーコート、ディップロールコート、バーコート、ナイフコート、エアーナイフコート、カーテンコート、リップコート、ダイコーター等による押出しコート法等が挙げられる。 As a method for applying (coating) the pressure-sensitive adhesive composition onto a predetermined surface, a known coating method can be employed, and is not particularly limited, but examples include roll coating, kiss roll coating, gravure coating, and reverse coating. , roll brush, spray coating, dip roll coating, bar coating, knife coating, air knife coating, curtain coating, lip coating, and extrusion coating using a die coater.
 本発明に係る転写用両面粘着フィルムの厚み(総厚み)は、特に限定されないが、10μm以上が好ましく、より好ましくは15μm以上である。厚みが一定以上であると、第1粘着剤層が電子部品を精度よく受け取りやすくなり、好ましい。また、本発明に係る転写用両面粘着フィルムの厚み(総厚み)の上限は、特に限定されないが、500μmが好ましく、より好ましくは300μmである。厚みが一定以下であると、電子部品を精度よく実装基板に転写しやすくなり、好ましい。 The thickness (total thickness) of the double-sided pressure-sensitive adhesive film for transfer according to the present invention is not particularly limited, but is preferably 10 μm or more, more preferably 15 μm or more. When the thickness is at least a certain value, the first pressure-sensitive adhesive layer can easily receive electronic components with high accuracy, which is preferable. The upper limit of the thickness (total thickness) of the double-sided pressure-sensitive adhesive film for transfer according to the present invention is not particularly limited, but is preferably 500 μm, more preferably 300 μm. When the thickness is less than a certain value, the electronic component can be easily transferred to the mounting substrate with high accuracy, which is preferable.
 本発明に係る転写用両面粘着フィルムは、電子部品の実装基板上への実装方法に好適に使用されるものである。本発明に係る転写用両面粘着フィルムを使用した電子部品の実装基板上への実装方法は、好ましくは、以下の工程を含む。 The double-sided pressure-sensitive adhesive film for transfer according to the present invention is suitably used in a method for mounting electronic components onto a mounting substrate. A method for mounting an electronic component on a mounting substrate using the transfer double-sided pressure-sensitive adhesive film according to the present invention preferably includes the following steps.
 ダイシングされた電子部品を、転写用両面粘着フィルムの第1粘着剤層が受け取る工程(第1工程) The process of receiving the diced electronic parts on the first adhesive layer of the transfer double-sided adhesive film (first process)
 上記第1粘着剤層が受け取った電子部品を実装基板に転写する工程(第2工程) The process of transferring the electronic components received by the first adhesive layer to the mounting board (second process)
 図2は、本発明に係る転写用両面粘着フィルムを使用した電子部品の実装基板上への実装方法における第1工程の一実施形態を表す断面模式図である。 FIG. 2 is a schematic cross-sectional view showing an embodiment of the first step in a method for mounting an electronic component onto a mounting substrate using the transfer double-sided pressure-sensitive adhesive film according to the present invention.
 図2(a)において、転写用両面粘着フィルム1は、第2粘着剤層12の粘着面でキャリア基板22に貼着している。キャリア基板22の第2粘着剤層12と貼着している面には、電子部品を配置するためのマーキングパターンが付されていてもよい。転写用両面粘着フィルム1は透明性が高いため、キャリア基板22に付されたマーキングパターンを視認することができる。 In FIG. 2( a ), the transfer double-sided adhesive film 1 is attached to the carrier substrate 22 with the adhesive surface of the second adhesive layer 12 . A marking pattern for arranging electronic components may be provided on the surface of the carrier substrate 22 that is adhered to the second adhesive layer 12 . Since the transfer double-sided pressure-sensitive adhesive film 1 has high transparency, the marking pattern applied to the carrier substrate 22 can be visually recognized.
 転写用両面粘着フィルム1の第1粘着剤層11の粘着面の上部には、ダイシングにより個片化された複数の電子部品21がダイシングテープ20に貼着された状態で、第1粘着剤層11の粘着面に対向して、離間して配置されている。 On the upper part of the adhesive surface of the first adhesive layer 11 of the transfer double-sided adhesive film 1, a plurality of electronic components 21 separated into individual pieces by dicing are attached to the dicing tape 20, and the first adhesive layer is formed. 11 and are spaced apart from each other.
 図2(b)において、ダイシングテープ20の電子部品21が貼着していない面からピン部材23で電子部品21を突き押して、電子部品21を第1粘着剤層11の粘着面に近接させて、第1粘着剤層11の粘着面が受け取る。受け取りは、電子部品21を第1粘着剤層11を接触させて行ってもよく、また、非接触で行ってもよい。非接触で受け取る場合は、電子部品21がダイシングテープ20から剥離するまで電子部品21を突き押し、電子部品21の粘着面に落下させる。接触させて受け取る場合、第1粘着剤層11の粘着面は低粘着性のため、電子部品21が受け取られる際に係る応力は弱いため、電子部品21の損傷を抑制することができる。非接触で受け取る場合は、第1粘着剤層11の粘着面は低粘着性のため、落下した電子部品21を位置精度よくキャッチすることができる。なお、ピン部材23の代わりに紫外線、レーザー光線等の放射線を照射することにより、電子部品21をダイシングテープ20から剥離させてもよい。 In FIG. 2B, the electronic component 21 is pushed by the pin member 23 from the side of the dicing tape 20 to which the electronic component 21 is not attached, and the electronic component 21 is brought close to the adhesive surface of the first adhesive layer 11. , the adhesive surface of the first adhesive layer 11 receives. The receiving may be performed by bringing the electronic component 21 into contact with the first adhesive layer 11 or may be performed without contact. When receiving in a non-contact manner, the electronic component 21 is pushed until the electronic component 21 is separated from the dicing tape 20 and dropped onto the adhesive surface of the electronic component 21 . When received by contact, since the adhesive surface of the first adhesive layer 11 has low adhesiveness, the stress applied when the electronic component 21 is received is weak, so damage to the electronic component 21 can be suppressed. When receiving without contact, the adhesive surface of the first adhesive layer 11 has low adhesiveness, so the dropped electronic component 21 can be caught with high positional accuracy. Note that the electronic component 21 may be peeled off from the dicing tape 20 by irradiating radiation such as ultraviolet rays or laser beams instead of the pin member 23 .
 電子部品21の第1粘着剤層11への受け取りは個別に行ってもよく、複数個を一括して行ってもよい。図2(c)は、ダイシングテープ20の全ての電子部品21が、転写用両面粘着フィルム1の第1粘着剤層11の粘着面上に受け取られた形態を示す断面模式図である。 The receipt of the electronic components 21 onto the first adhesive layer 11 may be performed individually, or a plurality of components may be received at once. FIG. 2(c) is a schematic cross-sectional view showing a state in which all the electronic components 21 of the dicing tape 20 are received on the adhesive surface of the first adhesive layer 11 of the transfer double-sided adhesive film 1. FIG.
 図3は、本発明に係る転写用両面粘着フィルムを使用した電子部品の実装基板上への実装方法における第2工程を表す断面模式図である。 FIG. 3 is a schematic cross-sectional view showing the second step in the method of mounting an electronic component onto a mounting substrate using the double-sided pressure-sensitive adhesive film for transfer according to the present invention.
 図3(a)に示すように、実装基板30の回路面31(回路パターンは図示略)に対向、離間して、転写用両面粘着フィルム1の第1粘着剤層11の粘着面上に配列された電子部品21を配置する。次に、図4(b)に示すように、実装基板30の回路面31と転写用両面粘着フィルム1の第1粘着剤層11の粘着面上に配列された電子部品21を近接させて、電子部品21と実装基板30の回路面31を接触させる。 As shown in FIG. 3( a ), they are arranged on the adhesive surface of the first adhesive layer 11 of the transfer double-sided adhesive film 1 so as to face the circuit surface 31 (the circuit pattern is not shown) of the mounting substrate 30 , while being spaced apart. Then, the electronic component 21 is arranged. Next, as shown in FIG. 4B, the circuit surface 31 of the mounting substrate 30 and the electronic components 21 arranged on the adhesive surface of the first adhesive layer 11 of the transfer double-sided adhesive film 1 are brought close to each other, The electronic component 21 and the circuit surface 31 of the mounting board 30 are brought into contact with each other.
 電子部品21の実装基板30の回路面31への転写は、熱圧着(例えば、150℃、1分間)で行ってもよい。転写用両面粘着フィルム1を構成する基材10、第1粘着剤層11、および/または第2粘着剤層12は耐熱性に優れるので、熱圧着により、膨張したり、収縮したり、粘着力が変化しにくいので、精度よく、電子部品21の実装基板30の回路面31への転写することができる。 The transfer of the electronic component 21 to the circuit surface 31 of the mounting substrate 30 may be performed by thermocompression bonding (for example, 150° C. for 1 minute). Since the substrate 10, the first adhesive layer 11, and/or the second adhesive layer 12, which constitute the transfer double-sided adhesive film 1, are excellent in heat resistance, they expand, contract, and adhere to each other by thermocompression. is less likely to change, the electronic component 21 can be transferred onto the circuit surface 31 of the mounting board 30 with high accuracy.
 次に、図3(c)に示すように、転写用両面粘着フィルム1と実装基板30を離間させることにより、第1粘着剤層11から電子部品21が剥離し、実装基板30の回路面31へ転写される。第1粘着剤層11は低粘着性粘着剤層で構成されているため、電子部品21が容易に剥離し、電子部品21が損傷することなく、効率的に実装基板30に実装することができる。 Next, as shown in FIG. 3C, by separating the transfer double-sided adhesive film 1 and the mounting substrate 30, the electronic component 21 is peeled off from the first adhesive layer 11, and the circuit surface 31 of the mounting substrate 30 is removed. transcribed to Since the first adhesive layer 11 is composed of a low-adhesive adhesive layer, the electronic component 21 can be easily peeled off and efficiently mounted on the mounting substrate 30 without damaging the electronic component 21. .
 電子部品21が実装基板30に実装された後の図3(c)の転写用両面粘着フィルム1は、キャリア基板22から剥離してもよい(図示略)。第2粘着剤層12は剥離性粘着剤層で構成されているため、糊残りなく剥離でき、リワーク性に優れるため、キャリア基板22を容易に再利用することができる。 The transfer double-sided adhesive film 1 in FIG. 3(c) after the electronic component 21 has been mounted on the mounting board 30 may be peeled off from the carrier board 22 (not shown). Since the second pressure-sensitive adhesive layer 12 is composed of a peelable pressure-sensitive adhesive layer, it can be peeled off without leaving an adhesive residue and is excellent in reworkability, so that the carrier substrate 22 can be easily reused.
 実装基板上への実装する電子部品としては、特に限定されないが、微細で薄型の半導体チップやLEDチップに好適に使用することができる。 The electronic component to be mounted on the mounting board is not particularly limited, but it can be suitably used for fine and thin semiconductor chips and LED chips.
 以下に実施例を挙げて本発明をより詳細に説明するが、本発明はこれらの実施例により何ら限定されるものではない。 Although the present invention will be described in more detail below with reference to examples, the present invention is not limited by these examples.
<製造例1> アクリル系共重合体(1)の製造
 攪拌羽根、温度計、窒素ガス導入管、冷却器を備えた四つ口フラスコに、ブチルアクリレート(日本触媒社製):95重量部、アクリル酸(東亜合成社製):5重量部、重合開始剤として2,2’-アゾビスイソブチロニトリル(和光純薬工業社製):0.2重量部、酢酸エチル:156重量部を仕込み、緩やかに攪拌しながら窒素ガスを導入し、フラスコ内の液温を63℃付近に保って10時間重合反応を行い、重量平均分子量70万のアクリル系共重合体(1)の溶液(固形分:40重量%)を調製した。
<Production Example 1> Production of acrylic copolymer (1) In a four-necked flask equipped with a stirring blade, a thermometer, a nitrogen gas inlet tube, and a cooler, butyl acrylate (manufactured by Nippon Shokubai Co., Ltd.): 95 parts by weight, Acrylic acid (manufactured by Toagosei Co., Ltd.): 5 parts by weight, 2,2'-azobisisobutyronitrile as a polymerization initiator (manufactured by Wako Pure Chemical Industries, Ltd.): 0.2 parts by weight, ethyl acetate: 156 parts by weight After charging, nitrogen gas was introduced while gently stirring, the liquid temperature in the flask was maintained at around 63°C, and the polymerization reaction was carried out for 10 hours. minutes: 40% by weight) were prepared.
<製造例2> アクリル系共重合体(2)の製造
 攪拌羽根、温度計、窒素ガス導入管、冷却器を備えた四つ口フラスコに、80%アクリル酸(AA)(大阪有機化学工業社製):2.8重量部、2-エチルヘキシルアクリレート(2EHA)(日本触媒社製):44重量部、酢酸ビニル:35.2重量部(デンカ社製)、トルエン:20重量部を仕込み緩やかに攪拌しながら窒素ガスを導入し1時間撹拌した。その後、トルエン:96重量部にて稀釈した重合開始剤としてナイパーBW:0.2重量部(日油社製)を滴下し、フラスコ内の液温を40℃付近に保った。その後フラスコ内の液温を60℃に昇温し8時間重合反応を行い、次いで95℃に昇温し4時間撹拌し、重量平均分子量56万のアクリル系共重合体(2)の溶液(固形分:35重量%)を調製した。
<Production Example 2> Production of acrylic copolymer (2) 80% acrylic acid (AA) (Osaka Organic Chemical Industry Co., Ltd. ): 2.8 parts by weight, 2-ethylhexyl acrylate (2EHA) (manufactured by Nippon Shokubai Co., Ltd.): 44 parts by weight, vinyl acetate: 35.2 parts by weight (manufactured by Denka Co., Ltd.), and toluene: 20 parts by weight. Nitrogen gas was introduced while stirring, and the mixture was stirred for 1 hour. Thereafter, 0.2 parts by weight of Nyper BW (manufactured by NOF Corporation) as a polymerization initiator diluted with 96 parts by weight of toluene was added dropwise, and the liquid temperature in the flask was maintained at around 40°C. After that, the temperature of the liquid in the flask was raised to 60° C. and the polymerization reaction was carried out for 8 hours, then the temperature was raised to 95° C. and stirred for 4 hours. minutes: 35% by weight) were prepared.
<製造例3> セパレータ(1)の製造
 シリコーン離型剤(信越化学工業社製、KS-847):100重量部、触媒(信越化学工業社製、CAT-PL-50T):3.0重量部をトルエンで1.0重量%に希釈し、シリコーン系剥離処理液を得た。得られたシリコーン系剥離処理液を、基材フィルム(厚み50μm、商品名「ダイアホイルT100-50S」、三菱ケミカル(株)製)の表面に、離型層として、ワイヤーバーで乾燥後の厚みが50nmとなるよう塗布し、乾燥温度130℃、乾燥時間3分の条件でキュアーして乾燥し(剥離処理A)、〔剥離層(厚み50nm、離型処理A)〕/〔基材層〕の積層体からなるセパレータ(1)を製造した。
<Production Example 3> Production of separator (1) Silicone release agent (manufactured by Shin-Etsu Chemical Co., Ltd., KS-847): 100 parts by weight, catalyst (manufactured by Shin-Etsu Chemical Co., Ltd., CAT-PL-50T): 3.0 weight A part thereof was diluted with toluene to 1.0% by weight to obtain a silicone-based stripping liquid. The resulting silicone-based release treatment liquid was applied to the surface of a base film (thickness 50 μm, trade name “Diafoil T100-50S”, manufactured by Mitsubishi Chemical Corporation) as a release layer, and the thickness after drying with a wire bar. is 50 nm, cured and dried under the conditions of a drying temperature of 130 ° C. and a drying time of 3 minutes (release treatment A), [release layer (thickness 50 nm, release treatment A)] / [base layer] A separator (1) consisting of a laminate of
<製造例4> セパレータ(2)の製造
 基材フィルム(厚み25μm、商品名「ダイアホイルT100-25」、三菱ケミカル(株)製)を用い、剥離層について、乾燥後の厚みが100nmとなるように塗布した以外は製造例3と同様にし、〔剥離層(厚み100nm、離型処理B)〕/〔基材層〕の積層体からなるセパレータ(2)を製造した。また、基材フィルムの厚みを表1に記載するように任意に変更することで第2セパレータとして用いるセパレータを製造した。
<Production Example 4> Production of separator (2) Using a base film (thickness 25 μm, trade name “Diafoil T100-25”, manufactured by Mitsubishi Chemical Corporation), the release layer has a thickness of 100 nm after drying. A separator (2) consisting of a laminate of [release layer (thickness: 100 nm, release treatment B)]/[base material layer] was produced in the same manner as in Production Example 3 except that the coating was performed in the above manner. In addition, separators used as the second separator were produced by changing the thickness of the base film as shown in Table 1.
<製造例5>セパレーター(3)の製造
 触媒(信越化学工業(株)製、CAT-PL-50T)を1.0重量部とする以外は製造例3と同様にして、〔剥離層(厚み50nm、離型処理C)〕/〔基材層〕の積層体からなるセパレータ(3)を製造した。
<Production Example 5> Production of separator (3) In the same manner as in Production Example 3, except that the catalyst (manufactured by Shin-Etsu Chemical Co., Ltd., CAT-PL-50T) is 1.0 parts by weight [Peeling layer (thickness 50 nm, release treatment C)]/[base material layer] to produce a separator (3).
<実施例1>
 シリコーン系粘着剤(付加反応型シリコーン系粘着剤、商品名「X-40-3306」、信越化学工業(株)製)100重量部、白金系触媒1(商品名「CAT-PL-50T」、信越化学工業(株)製)1.4重量部、シリコーン系剥離剤1(ジメチルポリシロキサンを主成分とした付加反応型のシリコーン系剥離剤、商品名「KS-776A」および信越化学工業(株)製)5重量部を加え、全体の固形分が25重量%となるようにトルエンで稀釈し、ディスパーで混合してシリコーン系粘着剤組成物を調製した。
<Example 1>
Silicone adhesive (addition reaction type silicone adhesive, trade name "X-40-3306", manufactured by Shin-Etsu Chemical Co., Ltd.) 100 parts by weight, platinum catalyst 1 (trade name "CAT-PL-50T", Shin-Etsu Chemical Co., Ltd.) 1.4 parts by weight, silicone-based release agent 1 (addition reaction type silicone-based release agent containing dimethylpolysiloxane as a main component, trade name “KS-776A” and Shin-Etsu Chemical Co., Ltd. ) was added, diluted with toluene so that the total solid content was 25% by weight, and mixed with a disper to prepare a silicone pressure-sensitive adhesive composition.
 基材フィルム(一方の面がシリコーンプライマー処理されたポリエステルフィルム、厚み75μm、商品名「ダイアホイル MRF#75」、三菱樹脂(株)製)のシリコーンプライマー処理された面に、シリコーン系粘着剤組成物を乾燥後の糊厚みが10μmとなるように塗布し、乾燥温度120℃、乾燥時間5分の条件でキュアーして乾燥した。このようにして基材フィルムのシリコーンプライマー処理層上にシリコーン系粘着剤層を有するフィルムを得た。 A base film (polyester film with one side treated with a silicone primer, thickness 75 μm, trade name "Diafoil MRF #75", manufactured by Mitsubishi Plastics Co., Ltd.) was coated with a silicone-based pressure-sensitive adhesive composition on the silicone-primed side. The product was applied so that the glue thickness after drying was 10 μm, and cured by drying under the conditions of a drying temperature of 120° C. and a drying time of 5 minutes. Thus, a film having a silicone pressure-sensitive adhesive layer on the silicone primer-treated layer of the base film was obtained.
 シリコーン系粘着剤層に、第1セパレータとして、製造例3にて製造したセパレータ(1)の離型層側と貼り合わせて保護し、〔第1セパレータ層〕/〔シリコーン系粘着剤層〕/〔基材フィルム層〕の積層構造を有する積層体(1)を得た。 As a first separator, the release layer side of the separator (1) produced in Production Example 3 is attached to the silicone-based pressure-sensitive adhesive layer to protect it, [first separator layer] / [silicone-based pressure-sensitive adhesive layer] / A laminate (1) having a laminate structure of [base film layer] was obtained.
 次いで、製造例1で得られたアクリル系共重合体(1)の溶液に、その固形分100重量部に対して、架橋剤としてTETRAD-C(三菱瓦斯化学(株)製)を固形分換算で6重量部を加え、全体の固形分が25重量%となるように酢酸エチルで希釈し、ディスパーで攪拌したアクリル系粘着剤組成物(1)を、第2セパレータ(セパレータ(2))の離型層側にファウンテンロールで乾燥後の厚みが5μmとなるように塗布し、乾燥温度130℃、乾燥時間30秒の条件でキュアーして乾燥した。このようにして、第2セパレータ上にアクリル系粘着剤層(1)を形成した。 Next, in the solution of the acrylic copolymer (1) obtained in Production Example 1, TETRAD-C (manufactured by Mitsubishi Gas Chemical Co., Ltd.) as a cross-linking agent is added to 100 parts by weight of the solid content in terms of solid content. 6 parts by weight of the second separator (separator (2)), diluted with ethyl acetate so that the total solid content is 25% by weight, and stirred with a disper. It was coated on the release layer side with a fountain roll so as to have a thickness of 5 μm after drying, and cured and dried under the conditions of a drying temperature of 130° C. and a drying time of 30 seconds. Thus, an acrylic pressure-sensitive adhesive layer (1) was formed on the second separator.
 次いで、アクリル系粘着剤層(1)の表面に、上記で得られた積層体(1)の基材フィルム側(シリコーンプライマー非処理面)を貼り合わせ、〔第1セパレータ層〕/〔シリコーン系粘着剤層(第1粘着剤層)〕/〔基材フィルム層〕/〔アクリル系粘着剤(1)層(第2粘着剤層)〕/〔第2セパレータ層〕の積層構造を有する積層フィルムを得た。 Next, the base film side (silicone primer-untreated surface) of the laminate (1) obtained above is attached to the surface of the acrylic pressure-sensitive adhesive layer (1), [first separator layer] / [silicone-based A laminated film having a laminated structure of adhesive layer (first adhesive layer)]/[base film layer]/[acrylic adhesive (1) layer (second adhesive layer)]/[second separator layer] got
<実施例2>
 第1粘着剤層のシリコーン系粘着剤の乾燥後の糊厚みを25μmとし、第2セパレータについて、セパレータ(2)の代わりに、セパレータ(2)における基材フィルムを基材フィルム(厚み38μm、商品名「ダイアホイルT100C38」、三菱ケミカル(株)製)に変更したセパレータを用いた以外は、実施例1と同様にして積層フィルムを得た。
<Example 2>
The thickness of the adhesive after drying the silicone-based pressure-sensitive adhesive in the first pressure-sensitive adhesive layer is set to 25 μm, and the base film in the separator (2) is used instead of the separator (2) for the second separator (thickness 38 μm, product A laminated film was obtained in the same manner as in Example 1, except that a separator changed to the name "Diafoil T100C38" (manufactured by Mitsubishi Chemical Corporation) was used.
<実施例3>
 第1粘着剤層のシリコーン系粘着剤の乾燥後の糊厚みを50μmとし、第2セパレータについて、セパレータ(2)の代わりに、セパレータ(2)における基材フィルムを基材フィルム(厚み50μm、商品名「ダイアホイルT100―50S」、三菱ケミカル(株)製)に変更したセパレータを用いた以外は、実施例1と同様にして積層フィルムを得た。
<Example 3>
The thickness of the adhesive after drying the silicone-based pressure-sensitive adhesive in the first pressure-sensitive adhesive layer is 50 μm, and the second separator is replaced with the base film (thickness 50 μm, commercial product) in place of the separator (2). A laminate film was obtained in the same manner as in Example 1, except that a separator changed to the name "Diafoil T100-50S" (manufactured by Mitsubishi Chemical Corporation) was used.
<実施例4>
 第1粘着剤層のシリコーン系粘着剤の乾燥後の糊厚みを75μmとし、第2セパレータについて、セパレータ(2)の代わりに、セパレータ(2)における基材フィルムを基材フィルム(厚み75μm、商品名「ダイアホイルT100-75S」、三菱ケミカル(株)製)に変更したセパレータを用いた以外は、実施例1と同様にして積層フィルムを得た。
<Example 4>
The thickness of the adhesive after drying the silicone-based pressure-sensitive adhesive in the first pressure-sensitive adhesive layer is set to 75 μm, and the base film in the separator (2) is used instead of the separator (2) for the second separator (thickness 75 μm, product A laminated film was obtained in the same manner as in Example 1, except that a separator with the name "Diafoil T100-75S" (manufactured by Mitsubishi Chemical Corporation) was used.
<実施例5>
 第1粘着剤層のシリコーン系粘着剤の乾燥後の糊厚みを50μmとし、第1セパレータについてセパレータ(2)を用いた以外は、実施例1と同様にして積層フィルムを得た。
<Example 5>
A laminate film was obtained in the same manner as in Example 1, except that the adhesive thickness of the silicone-based pressure-sensitive adhesive in the first pressure-sensitive adhesive layer after drying was 50 μm, and the separator (2) was used as the first separator.
<実施例6>
 第1粘着剤層のシリコーン系粘着剤の乾燥後の糊厚みを75μmとした以外は、実施例5と同様にして積層フィルムを得た。
<Example 6>
A laminated film was obtained in the same manner as in Example 5, except that the adhesive thickness of the silicone adhesive in the first adhesive layer after drying was 75 μm.
<実施例7>
 第1粘着剤層のシリコーン系粘着剤の乾燥後の糊厚みを25μmとし、第1セパレータとしてセパレータ(3)を用い、第1粘着剤層について、アクリル系粘着剤(1)の代わりにアクリル系粘着剤(2)を用いた以外は、実施例1と同様にして積層フィルムを得た。
<Example 7>
The adhesive thickness of the silicone adhesive in the first adhesive layer after drying is 25 μm, the separator (3) is used as the first separator, and the acrylic adhesive (1) is replaced with the acrylic adhesive for the first adhesive layer. A laminated film was obtained in the same manner as in Example 1, except that the adhesive (2) was used.
<実施例8>
 第1粘着剤層のシリコーン系粘着剤の乾燥後の糊厚みを50μmとした以外は、実施例7と同様にして積層フィルムを得た。
<Example 8>
A laminated film was obtained in the same manner as in Example 7, except that the adhesive thickness of the silicone-based pressure-sensitive adhesive in the first pressure-sensitive adhesive layer after drying was 50 µm.
<実施例9>
 第1粘着剤層のシリコーン系粘着剤の乾燥後の糊厚みを75μmとした以外は実施例7と同様にして積層フィルムを得た。
<Example 9>
A laminated film was obtained in the same manner as in Example 7, except that the adhesive thickness of the silicone-based pressure-sensitive adhesive in the first pressure-sensitive adhesive layer after drying was 75 μm.
<比較例1>
 第1セパレータとしてセパレータ(2)を用いた以外は、実施例1と同様にして積層フィルムを得た。
<Comparative Example 1>
A laminated film was obtained in the same manner as in Example 1, except that the separator (2) was used as the first separator.
<比較例2>
 第1セパレータとしてセパレータ(2)を用いた以外は実施例2と同様にして積層フィルムを得た。
<Comparative Example 2>
A laminated film was obtained in the same manner as in Example 2, except that the separator (2) was used as the first separator.
<評価>
 実施例および比較例で得られた転写用両面粘着フィルムについて、以下の評価を行った。結果を表2に示す。
<Evaluation>
The double-sided pressure-sensitive adhesive films for transfer obtained in Examples and Comparative Examples were evaluated as follows. Table 2 shows the results.
<第1粘着剤層に対する第1セパレータの引き剥がし剥離力F(1)の測定>
 実施例および比較例の転写用両面粘着フィルムを、幅50mm、長さ100mmに切断し、評価用サンプルとした。
<Measurement of the peeling force F(1) of the first separator against the first pressure-sensitive adhesive layer>
The double-sided pressure-sensitive adhesive film for transfer of Examples and Comparative Examples was cut into a width of 50 mm and a length of 100 mm to obtain an evaluation sample.
 第2粘着剤層のセパレータを剥離し、23℃、50%R.H.において、第2粘着剤層表面をガラス板(商品名「S200423」、松浪硝子工業(株)製)に0.25MPa、0.3m/分のローラーで貼り合わせた後、万能引張試験機(製品名「TCM-1kNB」、ミネベア(株)製)を用い、剥離角度180度、剥離速度0.3m/分で第1粘着剤層から第1セパレータを剥離することによって、引き剥がし剥離力F(1)を測定した。 The separator of the second pressure-sensitive adhesive layer was peeled off, and the pressure was applied at 23°C and 50% R.I. H. In , the surface of the second adhesive layer was laminated to a glass plate (trade name “S200423”, manufactured by Matsunami Glass Industry Co., Ltd.) with a roller of 0.25 MPa and 0.3 m / min, and then a universal tensile tester (product Using the name "TCM-1kNB", manufactured by Minebea Co., Ltd.), the peeling force F ( 1) was measured.
<第2粘着剤層に対する第2セパレータの引き剥がし剥離力F(2)の測定>
 実施例および比較例の転写用両面粘着フィルムを、幅50mm、長さ100mmに切断し、評価用サンプルとした。
<Measurement of the peeling force F(2) of the second separator from the second pressure-sensitive adhesive layer>
The double-sided pressure-sensitive adhesive film for transfer of Examples and Comparative Examples was cut into a width of 50 mm and a length of 100 mm to obtain an evaluation sample.
 第1粘着剤層のセパレータを剥離し、23℃、50%R.H.において、第1粘着剤層表面をガラス板(商品名「S200423」、松浪硝子工業(株)製)に0.25MPa、0.3m/分のローラーで貼り合わせた後、万能引張試験機(製品名「TCM-1kNB」、ミネベア(株)製)を用い、剥離角度180度、剥離速度0.3m/分で第2粘着剤層から第2セパレータを剥離することによって、引き剥がし剥離力F(2)を測定した。 The separator of the first pressure-sensitive adhesive layer was peeled off and placed at 23°C and 50% R.I. H. In , the surface of the first adhesive layer was laminated to a glass plate (trade name “S200423”, manufactured by Matsunami Glass Industry Co., Ltd.) with a roller of 0.25 MPa and 0.3 m / min, and then a universal tensile tester (product Using the name "TCM-1kNB", manufactured by Minebea Co., Ltd.), the peeling force F ( 2) was measured.
<キャリア基板に対する第2粘着剤層の引き剥がし粘着力P(2)の測定>
 実施例および比較例の転写用両面シートを、幅50mm、長さ100mmに切断し、評価用サンプルとした。
<Measurement of peeling adhesive strength P(2) of second adhesive layer to carrier substrate>
The transfer double-sided sheets of Examples and Comparative Examples were cut into a width of 50 mm and a length of 100 mm to obtain samples for evaluation.
 23℃、50%R.H.の環境下において、評価用サンプルのセパレータを剥離した第2粘着剤層表面をガラス板(商品名「S200423」、松浪硝子工業(株)製)に0.25MPa、0.3m/分のローラーで貼り付け、30分間養生した後、万能引張試験機(製品名「TCM-1kNB」、ミネベア(株)製)を用い、剥離角度180度、引張り速度0.3m/分でガラス板から第2粘着剤層を剥離することによって、引き剥がし粘着力P(2)を測定した。 23°C, 50% R.I. H. Under the environment of , the surface of the second adhesive layer from which the separator of the evaluation sample has been peeled is applied to a glass plate (trade name “S200423”, manufactured by Matsunami Glass Industry Co., Ltd.) with a roller of 0.25 MPa and 0.3 m / min. After pasting and curing for 30 minutes, using a universal tensile tester (product name “TCM-1kNB”, manufactured by Minebea Co., Ltd.), the second adhesive was applied from the glass plate at a peeling angle of 180 degrees and a tensile speed of 0.3 m / min. The peel adhesion P(2) was measured by peeling off the agent layer.
<ガラス板に対する第2粘着剤層の160℃、5分後の引き剥がし粘着力P’(2)の測定>
 実施例および比較例の転写用両面粘着フィルムを、幅50mm、長さ100mmに切断し、評価用サンプルとした。
<Measurement of peel adhesive strength P'(2) after 5 minutes at 160°C of the second adhesive layer to the glass plate>
The double-sided pressure-sensitive adhesive film for transfer of Examples and Comparative Examples was cut into a width of 50 mm and a length of 100 mm to obtain an evaluation sample.
 23℃、50%R.H.の環境下において、評価用サンプルのセパレータを剥離した第2粘着剤層表面をガラス板(商品名「S200423」、松浪硝子工業(株)製)に0.25MPa、0.3m/分のローラーで貼り付け、30分間養生した。 23°C, 50% R.I. H. Under the environment of , the surface of the second adhesive layer from which the separator of the evaluation sample has been peeled is applied to a glass plate (trade name “S200423”, manufactured by Matsunami Glass Industry Co., Ltd.) with a roller of 0.25 MPa and 0.3 m / min. Affixed and cured for 30 minutes.
 次いで、160℃の空気循環式恒温オーブンで5分間加熱してから、23℃、50%R.H.の環境下で30分間放冷した後、万能引張試験機(製品名「TCM-1kNB」、ミネベア(株)製)を用い、剥離角度180度、引張り速度0.3m/分でガラス板から第2粘着剤層を剥離することによって、粘着力P’(2)を測定した。 Then, after heating for 5 minutes in an air circulation type constant temperature oven at 160°C, it was heated to 23°C and 50% R.I. H. After cooling for 30 minutes under the environment, using a universal tensile tester (product name “TCM-1kNB”, manufactured by Minebea Co., Ltd.), the peel angle was 180 degrees and the tensile speed was 0.3 m / min from the glass plate. The adhesive force P'(2) was measured by peeling off the two adhesive layers.
<第1粘着剤層に対する第1セパレータのきっかけ剥離力T(1)の測定>
 実施例および比較例の転写用両面粘着フィルムを、押し切り式ペーパーカッターで幅50mm、長さ100mmに切断し、評価用サンプルとした。
<Measurement of trigger peel force T(1) of the first separator to the first pressure-sensitive adhesive layer>
The double-sided pressure-sensitive adhesive film for transfer of Examples and Comparative Examples was cut into a width of 50 mm and a length of 100 mm with a push-cut paper cutter to obtain samples for evaluation.
 第2粘着剤層のセパレータを剥離し、23℃、50%において、第2粘着剤層表面をガラス板(商品名「S200423」、松浪硝子工業(株)製)に0.25MPa、0.3m/分のローラーで貼り合わせた後、23℃、50%R.H.の環境下にて、ゴム系粘着テープ(商品名「NO.315」、19mm幅、日東電工(株)製)を表面保護フィルム背面の幅方向の中心部にハンドローラーで圧着した。同環境下にて、引張速度0.3m/分、剥離角度90度の条件で第1粘着剤層から第1セパレータを剥離し、剥離はじめにかかる最大応力をきっかけ剥離強度T(1)[N/50mm]として記録した。 The separator of the second adhesive layer is peeled off, and the surface of the second adhesive layer is applied to a glass plate (trade name “S200423”, manufactured by Matsunami Glass Industry Co., Ltd.) at 23 ° C. and 50% at 0.25 MPa and 0.3 m. /min, then 23°C, 50% R.I. H. 315 (trade name, 19 mm width, manufactured by Nitto Denko Corporation) was crimped to the center of the back surface of the surface protection film in the width direction with a hand roller. Under the same environment, the first separator was peeled from the first pressure-sensitive adhesive layer under the conditions of a tensile speed of 0.3 m / min and a peeling angle of 90 degrees, and the maximum stress applied at the beginning of peeling was the trigger peel strength T (1) [N / 50 mm].
<第2粘着剤層に対する第2セパレータのきっかけ剥離力T(2)の測定>
 実施例および比較例の転写用両面粘着フィルムを、押し切り式ペーパーカッターで幅50mm、長さ100mmに切断し、評価用サンプルとした。
<Measurement of trigger peel force T(2) of the second separator to the second pressure-sensitive adhesive layer>
The double-sided pressure-sensitive adhesive film for transfer of Examples and Comparative Examples was cut into a width of 50 mm and a length of 100 mm with a push-cut paper cutter to obtain samples for evaluation.
 第2粘着剤層のセパレータを剥離し、23℃、50%R.H.において、第2粘着剤層表面をガラス板(商品名「S200423」、松浪硝子工業(株)製)に0.25MPa、0.3m/分のローラーで貼り合わせた後、23℃×50%R.H.の環境下にて、ゴム系粘着テープ(商品名「NO.315」、19mm幅、日東電工(株)製)を表面保護フィルム背面の幅方向の中心部にハンドローラーで圧着する。同環境下にて、引張速度0.3m/分、剥離角度90度の条件で第2粘着剤層から第2セパレータを剥離し、剥離はじめにかかる最大応力をきっかけ剥離強度T(2)[N/50mm]として記録した。 The separator of the second pressure-sensitive adhesive layer was peeled off, and the pressure was applied at 23°C and 50% R.I. H. In, the surface of the second pressure-sensitive adhesive layer was laminated to a glass plate (trade name “S200423”, manufactured by Matsunami Glass Industry Co., Ltd.) with a roller of 0.25 MPa and 0.3 m / min, and then 23 ° C. × 50% R . H. 315 (trade name, 19 mm width, manufactured by Nitto Denko Corporation) is crimped to the center of the back of the surface protective film in the width direction with a hand roller. Under the same environment, the second separator was peeled from the second pressure-sensitive adhesive layer under the conditions of a tensile speed of 0.3 m / min and a peeling angle of 90 degrees, and the maximum stress applied at the beginning of peeling was the trigger peel strength T (2) [N / 50 mm].
<第1セパレータの剥離性の評価>
 実施例および比較例の転写用両面粘着フィルムを、幅10mm、長さ10mmに切断し、評価用サンプルとした。
<Evaluation of Peelability of First Separator>
The double-sided pressure-sensitive adhesive film for transfer of Examples and Comparative Examples was cut into a width of 10 mm and a length of 10 mm to obtain an evaluation sample.
 第2粘着剤層のセパレータを剥離し、23℃、50%R.H.において、第2粘着剤層表面をガラス板(商品名「S200423」、松浪硝子工業(株)製)に0.25MPa、0.3m/分のローラーで貼り合わせた後、評価用サンプルの直角部にハンドローラーで圧着したアクリル系粘着テープ(商品名「NO.31B」、日東電工(株)製)を持ち手として、23℃、50%R.H.において、剥離角度180度、剥離速度0.3m/分で第1粘着剤層から第1セパレータを剥離し、以下の基準に従って、第1セパレータの剥離性を評価した。 The separator of the second pressure-sensitive adhesive layer was peeled off, and the pressure was applied at 23°C and 50% R.I. H. In, the surface of the second adhesive layer was attached to a glass plate (trade name "S200423", manufactured by Matsunami Glass Industry Co., Ltd.) with a roller of 0.25 MPa and 0.3 m / min, and then the right angle part of the evaluation sample 23° C., 50% R.I. H. , the first separator was peeled from the first pressure-sensitive adhesive layer at a peel angle of 180 degrees and a peel speed of 0.3 m/min, and the peelability of the first separator was evaluated according to the following criteria.
(評価基準)
〇(良好):第2粘着剤層とガラス板の界面に浮きが生じることなく、第1セパレータが剥離した
△(可) :第1セパレータは剥離するが、第2粘着剤層とガラス板の界面に浮きが生じた
×(不可):第1セパレータを剥離する前に、第2粘着剤層とガラス板とが剥離した
(Evaluation criteria)
○ (Good): The first separator was peeled off without floating at the interface between the second adhesive layer and the glass plate △ (Fair): The first separator was peeled off, but the second adhesive layer and the glass plate Floating occurred at the interface × (impossible): The second adhesive layer and the glass plate were peeled before peeling the first separator
<第2セパレータの剥離性の評価>
 実施例および比較例の転写用両面粘着フィルムを、幅10mm、長さ10mmに切断し、評価用サンプルとした。
<Evaluation of Peelability of Second Separator>
The double-sided pressure-sensitive adhesive film for transfer of Examples and Comparative Examples was cut into a width of 10 mm and a length of 10 mm to obtain an evaluation sample.
 評価サンプルを、第1セパレータ側を下にして吸着ステージに載置して吸引することによって固定した。固定した評価用サンプルの直角部にハンドローラーで圧着したアクリル系粘着テープ(商品名「NO.31B」、日東電工(株)製)を持ち手として、23℃、50%R.H.において、剥離角度180度、剥離速度0.3m/分で第2粘着剤層から第2セパレータを剥離し、以下の基準に従って、第2セパレータの剥離性を評価した。 The evaluation sample was fixed by placing it on the adsorption stage with the first separator side down and sucking it. An acrylic adhesive tape (trade name: "NO.31B", manufactured by Nitto Denko Corporation) was pressed with a hand roller to the right-angled part of the fixed sample for evaluation, and was held at 23°C and 50% RH. H. , the second separator was peeled from the second pressure-sensitive adhesive layer at a peel angle of 180 degrees and a peel speed of 0.3 m/min, and the peelability of the second separator was evaluated according to the following criteria.
(評価基準)
〇(良好):第1粘着剤層と第1セパレータの界面に浮きが生じることなく剥離した
△(可) :剥離したが、第1粘着剤層と第1セパレータの界面に浮きが生じた
×(不可):剥離する前に、第1粘着剤層と第1セパレータとが剥離した
(Evaluation criteria)
○ (Good): Peeled off without lifting at the interface between the first pressure-sensitive adhesive layer and the first separator △ (Fair): Peeled off, but lifting occurred at the interface between the first pressure-sensitive adhesive layer and the first separator × (Unacceptable): The first pressure-sensitive adhesive layer and the first separator were peeled before peeling
<ガラスリワーク性>
 ガラス板に対する第2粘着剤層の160℃、5分後の引き剥がし粘着力P’(2)の測定後のサンプルを目視により観察し、以下の基準に従って、リワーク性を判断した。
<Glass reworkability>
After measuring the peel adhesive strength P′(2) of the second pressure-sensitive adhesive layer to the glass plate after 5 minutes at 160° C., the sample was visually observed, and reworkability was judged according to the following criteria.
(評価基準)
◎(優良):ガラス板について、ガラスの破壊や糊残り等の汚染が全く見られなかった
〇(良好):ガラス板について、ガラスの破壊や糊残り等の汚染が殆ど見られなかった
×(不可):ガラス板について、ガラスの破壊や糊残り等の汚染が見られた
(Evaluation criteria)
◎ (Excellent): No glass breakage or contamination such as adhesive residue was observed on the glass plate 〇 (Good): Almost no glass breakage or contamination such as adhesive residue was observed on the glass plate Impossible): Contamination such as broken glass or adhesive residue was observed on the glass plate
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000002
Figure JPOXMLDOC01-appb-T000002
1         積層フィルム
10        基材
11        第1粘着剤層
12        第2粘着剤層
110       第1セパレータ
120       第2セパレータ
20        ダイシングテープ
21        電子部品
22        キャリア基板
23        ピン部材
30        実装基板
31        回路面
1 Laminated film 10 Base material 11 First adhesive layer 12 Second adhesive layer 110 First separator 120 Second separator 20 Dicing tape 21 Electronic component 22 Carrier substrate 23 Pin member 30 Mounting substrate 31 Circuit surface

Claims (3)

  1.  第1セパレータと、第1粘着剤層と、基材と、第2粘着剤層と、第2セパレータとがこの順に積層された積層フィルムであり、前記第1粘着剤層は、低粘着性粘着剤層からなり、前記第2粘着剤層は、剥離性粘着剤層からなり、
     23℃、50%R.H.および剥離速度0.3m/分の条件で測定される前記第1粘着剤層に対する前記第1セパレータの180°引き剥がし剥離力F(1)(N/50mm)、
     23℃、50%R.H.および剥離速度0.3m/分の条件で測定される前記第2粘着剤層に対する前記第2セパレータの180°引き剥がし剥離力F(2)(N/50mm)、
     23℃、50%R.H.および引張速度0.3m/分の条件で測定されるガラス板に対する前記第2粘着剤層の180°引き剥がし粘着力P(2)(N/50mm)、ならびに、
     前記第2粘着剤層をガラス板に貼付して160℃で5分経過した後、23℃、50%R.H.および引張速度0.3m/分の条件で測定されるガラス板に対する前記第2粘着剤層の180°引き剥がし粘着力P’(2)(N/50mm)が、下記式の関係を満たす、積層フィルム。
     F(1)≦F(2)
     P(2)≧F(1)
     P’(2)/P(2)<1.20
     P’(2)<1.00
    A laminated film in which a first separator, a first adhesive layer, a base material, a second adhesive layer, and a second separator are laminated in this order, and the first adhesive layer is a low-adhesive adhesive consisting of an adhesive layer, the second pressure-sensitive adhesive layer consists of a peelable pressure-sensitive adhesive layer,
    23°C, 50% R.I. H. and 180° peeling force F (1) (N/50 mm) of the first separator against the first pressure-sensitive adhesive layer measured under the condition of a peel speed of 0.3 m/min,
    23°C, 50% R.I. H. and a 180° peeling force F (2) (N/50 mm) of the second separator against the second pressure-sensitive adhesive layer measured under the condition of a peel speed of 0.3 m/min,
    23°C, 50% R.I. H. and 180 ° peeling adhesive strength P (2) (N / 50 mm) of the second adhesive layer against a glass plate measured under the conditions of a tensile speed of 0.3 m / min, and
    After the second pressure-sensitive adhesive layer was adhered to a glass plate and kept at 160°C for 5 minutes, it was applied at 23°C and 50% R.I. H. And the 180 ° peeling adhesive strength P' (2) (N / 50 mm) of the second adhesive layer against a glass plate measured under the conditions of a tensile speed of 0.3 m / min satisfies the relationship of the following formula, laminated the film.
    F(1)≤F(2)
    P(2)≧F(1)
    P′(2)/P(2)<1.20
    P′(2)<1.00
  2.  更に、下記式の関係を満たす、請求項1に記載の積層フィルム。
     F(2)/F(1)<0.80
     P(2)/F(1)>1.00
    2. The laminated film according to claim 1, further satisfying the following formula.
    F(2)/F(1)<0.80
    P(2)/F(1)>1.00
  3.  23℃、50%R.H.および引張速度0.3m/分の条件で測定される第1セパレータに対する前記第1粘着剤層の90°きっかけ剥離力T(1)(N/50mm)、
     23℃、50%R.H.および引張速度0.3m/分の条件で測定される第2セパレータに対する前記第2粘着剤層の90度きっかけ剥離力T(2)(N/50mm)、ならびに、
     前記粘着力P(2)が、下記式の関係を満たす、請求項1または2に記載の積層フィルム。
     T(1)/T(2)>1.05
     P(2)/T(1)<1.00
    23°C, 50% R.I. H. and the 90° trigger peel force T (1) (N/50 mm) of the first pressure-sensitive adhesive layer against the first separator measured under the conditions of a tensile speed of 0.3 m / min,
    23°C, 50% R.I. H. and the 90-degree trigger peel force T (2) (N/50 mm) of the second pressure-sensitive adhesive layer against the second separator measured under the conditions of a tensile speed of 0.3 m / min, and
    3. The laminated film according to claim 1, wherein the adhesive force P(2) satisfies the relationship of the following formula.
    T(1)/T(2)>1.05
    P(2)/T(1)<1.00
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