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WO2022124296A1 - Photosensitive resin composition, cured product, black matrix, and image display device - Google Patents

Photosensitive resin composition, cured product, black matrix, and image display device Download PDF

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Publication number
WO2022124296A1
WO2022124296A1 PCT/JP2021/044876 JP2021044876W WO2022124296A1 WO 2022124296 A1 WO2022124296 A1 WO 2022124296A1 JP 2021044876 W JP2021044876 W JP 2021044876W WO 2022124296 A1 WO2022124296 A1 WO 2022124296A1
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WIPO (PCT)
Prior art keywords
mass
group
preferable
resin composition
photosensitive resin
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PCT/JP2021/044876
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French (fr)
Japanese (ja)
Inventor
知子 砂留
和裕 中谷
貴裕 宮崎
貴志 野口
Original Assignee
三菱ケミカル株式会社
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Application filed by 三菱ケミカル株式会社 filed Critical 三菱ケミカル株式会社
Priority to KR1020237019040A priority Critical patent/KR20230117134A/en
Priority to CN202180082473.9A priority patent/CN116568717A/en
Priority to JP2022568286A priority patent/JPWO2022124296A1/ja
Publication of WO2022124296A1 publication Critical patent/WO2022124296A1/en

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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F290/00Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups
    • C08F290/02Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups on to polymers modified by introduction of unsaturated end groups
    • C08F290/06Polymers provided for in subclass C08G
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2/00Processes of polymerisation
    • C08F2/44Polymerisation in the presence of compounding ingredients, e.g. plasticisers, dyestuffs, fillers
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2/00Processes of polymerisation
    • C08F2/46Polymerisation initiated by wave energy or particle radiation
    • C08F2/48Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
    • C08F2/50Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light with sensitising agents
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F222/00Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a carboxyl radical and containing at least one other carboxyl radical in the molecule; Salts, anhydrides, esters, amides, imides, or nitriles thereof
    • C08F222/10Esters
    • C08F222/1006Esters of polyhydric alcohols or polyhydric phenols
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F290/00Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/14Polycondensates modified by chemical after-treatment
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds

Definitions

  • the present invention relates to a photosensitive resin composition, a cured product, a black matrix (Black Matrix, hereinafter abbreviated as "BM”), and an image display device.
  • BM Black Matrix
  • a color filter usually forms a black matrix on the surface of a transparent substrate such as glass or plastic, and then pixels of three or more different colors such as red, green, and blue are sequentially arranged in a grid pattern and stripes. It is formed by a pattern such as a shape or a mosaic shape. The pattern size varies depending on the use of the color filter and each color, but is usually about 5 to 700 ⁇ m.
  • the pigment dispersion method is known as a typical manufacturing method for color filters.
  • a color filter is manufactured by the pigment dispersion method
  • a photosensitive resin composition containing a black pigment such as carbon black is first applied onto a transparent substrate, dried under reduced pressure in a vacuum drying device, and then heated and dried in a hot plate.
  • BM is formed by curing (curing) by a high temperature treatment of 200 ° C. or higher, and this is repeated for each color such as red, green, and blue to form pixels.
  • BM is formed by curing (curing) by a high temperature treatment of 200 ° C. or higher, and this is repeated for each color such as red, green, and blue to form pixels.
  • the BM is generally arranged in a grid pattern, a stripe pattern, or a mosaic pattern between pixels such as red, green, and blue, and has a role of improving contrast or preventing light leakage by suppressing color mixing between the pixels. .. Therefore, the BM is required to have a high light-shielding property. Further, since the edge portion of the pixels such as red, green, and blue formed after the BM is partially overlapped with the BM, a step is formed at the overlapped portion due to the influence of the film thickness of the BM. At this overlapping portion, the flatness of the pixels is impaired, non-uniformity of the liquid crystal cell gap or disorder of the orientation of the liquid crystal occurs, which causes a decrease in display capability.
  • the output of the backlight tends to be low, and the thin line of BM, which is a light-shielding part, can display images with high brightness even under such conditions. Is being promoted.
  • miniaturization such as tablets has become the mainstream, while the demand for high resolution is increasing in large-sized televisions. For these reasons, the demand for higher definition of BM is increasing, and in recent years, BM thin lines with a line width of about 6 to 8 ⁇ m have been required from the conventional line width of about 10 ⁇ m. It's coming.
  • the fine line width is 10 ⁇ m or more, the fine line adhesion with the substrate can be maintained even if an insertion of about 1 to 2 ⁇ m occurs on one side of the BM fine line (a total of about 2 to 4 ⁇ m on both sides of the thin line), but the line width is 10 ⁇ m. If the fine line pattern is less than, the contact area of the BM / substrate interface becomes small, so that the decrease in the fine line adhesion becomes remarkably large every time the line width is narrowed by 1 ⁇ m.
  • the frame part was conventionally formed separately, and a sealant was applied to it and attached to the array substrate.
  • a method has come to be used in which a frame portion is formed at the same time, and a sealing agent is applied to the frame portion and bonded to the frame portion. Therefore, more than before, the contact stress between the color filter substrate and the BM is required.
  • Patent Document 1 describes a photosensitive resin composition containing an organosilicon compound having a specific structure and a surfactant exhibiting specific physical characteristics.
  • Patent Document 2 describes a photosensitive resin composition containing 20% to 80% of a monomer having a caprolactone structure in the molecule among all photopolymerizable monomers.
  • an object of the present invention is to provide a photosensitive resin composition excellent in fine wire adhesion, adhesion stress, and suppression of pin unevenness during hot plate drying.
  • the present inventors have found that the above-mentioned problems can be solved by using a specific alkali-soluble resin, a specific photopolymerizable monomer, and a specific surfactant. That is, the gist of the present invention lies below.
  • a photosensitive resin composition containing (a) an alkali-soluble resin, (b) a photopolymerizable monomer, (c) a photopolymerization initiator, and (e) a surfactant.
  • the alkali-soluble resin (a) contains an alkali-soluble resin (a1) having a partial structure represented by the following general formula (a1-1).
  • the photopolymerizable monomer (b) contains a photopolymerizable monomer (b6) having a partial structure represented by the following general formula (b5).
  • the surfactant (e) is characterized by containing a surfactant (e1) having a surface tension of a 0.5 mass% propylene glycol monomethyl ether acetate solution at 23 ° C. of 23.0 mN / m or less. Sex resin composition.
  • R 7 represents a hydrogen atom or a methyl group.
  • N represents a repeating unit. * Each represents a bond.
  • R 1 represents an alkylene group having 2 to 6 carbon atoms which may have a substituent
  • R 2 represents a hydrogen atom or a methyl group
  • m represents an integer of 1 to 3. Represents. * Represents a bond.
  • R b is a group shown in the general formula (b5)
  • R c is a group shown in the formula (b7)
  • p2 is an integer of 1 to 6, and * indicates a bond. .
  • (meth) acrylic means “acrylic and / or methacrylic", and the same applies to "(meth) acrylate” and "(meth) acryloyl”.
  • the "total solid content” means all the components other than the solvent contained in the photosensitive resin composition or the ink described later. Even if the components other than the solvent are liquid at room temperature, the components are not included in the solvent and are included in the total solid content.
  • the weight average molecular weight refers to the polystyrene-equivalent weight average molecular weight (Mw) by GPC (gel permeation chromatography).
  • the "amine value” represents an amine value in terms of effective solid content, and is a value represented by the amount of base per 1 g of solid content of the dispersant and the equivalent mass of KOH, unless otherwise specified. .. The measurement method will be described later.
  • the photosensitive resin composition of the present invention contains (a) an alkali-soluble resin, (b) a photopolymerizable monomer, (c) a photopolymerization initiator and (e) a surfactant, and (a) an alkali-soluble resin is described below.
  • the monomer (b6) is contained, and the (e) surfactant contains a surfactant (e1) having a surface tension of a 0.5 mass% propylene glycol monomethyl ether acetate solution at 23 ° C. of 23.0 mN / m or less. ..
  • R 7 represents a hydrogen atom or a methyl group.
  • N represents a repeating unit. * Each represents a bond.
  • R 1 represents an alkylene group having 2 to 6 carbon atoms which may have a substituent
  • R 2 represents a hydrogen atom or a methyl group
  • m represents an integer of 1 to 3. Represents. * Represents a bond.
  • the photosensitive resin composition of the present invention may contain a dispersant, a thiol, an adhesion improver, a pigment derivative, and a compounding component such as a development improver, an ultraviolet absorber, and an antioxidant, if necessary. It is preferable that each compounding component is used in a state of being dissolved or dispersed in an organic solvent.
  • the photosensitive resin composition of the present invention contains (a) an alkali-soluble resin.
  • the alkali-soluble resin is particularly limited as long as the solubility of the exposed portion and the non-exposed portion in alkaline development changes after the coating film obtained by applying and drying the photosensitive resin composition is exposed.
  • an alkali-soluble resin having a carboxy group is preferable.
  • an alkali-soluble resin having an ethylenically unsaturated group is preferable, and an alkali-soluble resin having an ethylenically unsaturated group and a carboxy group is more preferable.
  • the alkali-soluble resin (a) in the present invention includes an alkali-soluble resin (a1) having a partial structure represented by the following general formula (a1-1).
  • a1-1 alkali-soluble resin having a partial structure represented by the following general formula (a1-1).
  • R 7 represents a hydrogen atom or a methyl group.
  • N represents a repeating unit. * Each represents a bond.
  • the repeating unit represented by n is preferably an integer of 0 to 4, preferably 0 to 3, more preferably 0 to 2, and even more preferably 0 from the viewpoint of sensitivity.
  • R 7 is preferably a hydrogen atom.
  • X is preferably directly bonded from the viewpoint of sensitivity.
  • the content ratio of the alkali-soluble resin (a1) in the alkali-soluble resin is preferably 10% by mass or more, more preferably 30% by mass or more, and 50% by mass. % Or more is further preferable, 70% by mass or more is further preferable, and 90% by mass or more is particularly preferable. Further, from the viewpoint of the linearity of the pattern, 100% by mass or less is preferable, 99% by mass or less is more preferable, and 98% by mass or less is further preferable. The above upper and lower limits can be combined arbitrarily. For example, 10 to 100% by mass is preferable, 30 to 100% by mass is more preferable, 50 to 99% by mass is further preferable, 70 to 99% by mass is further preferable, and 90 to 98% by mass is particularly preferable.
  • the alkali-soluble resin (a1) having a partial structure represented by the formula (a1-1) is obtained by adding (meth) acrylic acid to, for example, an epoxy resin having a cardo skeleton represented by the following structural formula (a7-1). It is preferably an alkali-soluble resin obtained by reacting with a polybasic acid and / or an anhydride thereof.
  • benzene ring in formula (a7-1) may be further substituted with any substituent.
  • n represents an integer of 0 to 4, preferably 0 to 3, more preferably 0 to 2, and even more preferably 0.
  • a known method can be used as a method for adding (meth) acrylic acid to the epoxy resin.
  • the reaction can be carried out at a temperature of 50 to 150 ° C. in the presence of an esterification catalyst.
  • the catalyst used here includes tertiary phosphines such as triethylphosphine, tributylphosphine, tricyclohexylphosphine and triphenylphosphine, tertiary amines such as triethylamine, trimethylamine, benzyldimethylamine and benzyldiethylamine, tetramethylammonium chloride and tetraethylammonium chloride.
  • Quaternary ammonium salts such as dodecyltrimethylammonium chloride can be used.
  • the amount of (meth) acrylic acid used is preferably in the range of 0.5 to 1.2 equivalents, more preferably in the range of 0.7 to 1.1 equivalents, with respect to 1 equivalent of the epoxy group of the epoxy resin.
  • the amount of (meth) acrylic acid is preferably at least the above lower limit, the amount of unsaturated group introduced is sufficient, the subsequent reaction with polybasic acid and / or its anhydride is sufficient, and a large amount of epoxy group is used. There is a tendency to suppress the residual of.
  • the amount to be used to be equal to or less than the upper limit, it tends to be possible to suppress the residual (meth) acrylic acid as an unreacted product.
  • polybasic acid and / or its anhydride examples include maleic acid, succinic acid, itaconic acid, phthalic acid, tetrahydrophthalic acid, hexahydrophthalic acid, pyromellitic acid, trimellitic acid, benzophenone tetracarboxylic acid and methylhexa. Included is one or more selected from hydrophthalic acid, endomethylenetetrahydrophthalic acid, chlorendic acid, methyltetrahydrophthalic acid, biphenyltetracarboxylic acid, and anhydrides thereof.
  • a known method can also be used for the addition reaction of polybasic acid and / or its anhydride, and the desired product can be obtained by continuing the reaction under the same conditions as the addition reaction of (meth) acrylic acid. ..
  • the alkali-soluble resin (a1) is, for example, after mixing a polybasic acid and / or its anhydride with a reaction product of an epoxy resin and (meth) acrylic acid, or after mixing an epoxy resin with (meth) acrylic acid. It is obtained by mixing the reaction product with a polybasic acid and / or its anhydride and a polyhydric alcohol, and then heating the reaction product. In this case, the mixing order of the polybasic acid and / or its anhydride and the polyhydric alcohol is not particularly limited. Upon heating, the polybasic acid and / or its anhydride undergoes an addition reaction with any hydroxyl group present in the mixture of the reaction product with (meth) acrylic acid and the polyhydric alcohol.
  • the amount of the polyhydric alcohol used is the reaction product of the epoxy resin and (meth) acrylic acid, and the polybasic acid and / or its anhydride from the viewpoint of exhibiting the effect while suppressing thickening and gelation. It is preferably about 0.01 to 0.5 times by mass, more preferably about 0.02 to 0.2 times by mass with respect to the reaction product.
  • alkali-soluble resin (a1) one type may be used alone, or two or more types of resins may be mixed and used.
  • the acid value of the alkali-soluble resin (a1) is preferably 10 mgKOH / g or more, more preferably 50 mgKOH / g or more, further preferably 80 mgKOH / g or more, and preferably 200 mgKOH / g or less, and 150 mgKOH / g or less. Is more preferable, and 120 mgKOH / g or less is further preferable.
  • the value is equal to or higher than the lower limit, the residue tends to be reduced. Further, by setting the value to the upper limit or less, there is a tendency that the fine line adhesion can be improved.
  • the above upper and lower limits can be combined arbitrarily. For example, 10 to 200 mgKOH / g is preferable, 50 to 150 mgKOH / g is more preferable, and 80 to 120 mgKOH / g is further preferable.
  • the weight average molecular weight (Mw) in terms of polystyrene as measured by gel permeation chromatography (GPC) of the alkali-soluble resin (a1) is preferably 1,000 or more, more preferably 2,000 or more, and 4 It is more preferably 5,000 or more, and particularly preferably 5,000 or more. Further, it is preferably 20,000 or less, more preferably 15,000 or less, further preferably 10,000 or less, further preferably 8,000 or less, and 7,000 or less. Is particularly preferable. When it is set to the lower limit or more, the fine wire adhesion and the adhesion stress with the substrate tend to be good. Further, by setting the value to the upper limit or less, there is a tendency that the developability and the resolubility can be improved.
  • the photosensitive resin composition of the present invention may contain an alkali-soluble resin other than the alkali-soluble resin (a1).
  • the alkali-soluble resin other than the alkali-soluble resin (a1) the solubility of the exposed portion and the non-exposed portion in alkali development changes after the coating film obtained by applying and drying the photosensitive resin composition is exposed.
  • the alkali-soluble resin having a carboxy group is preferable.
  • an alkali-soluble resin having an ethylenically unsaturated group is preferable, and an alkali-soluble resin having an ethylenically unsaturated group and a carboxy group is more preferable.
  • Specific examples thereof include an epoxy (meth) acrylate resin (a2) having a carboxy group other than the alkali-soluble resin (a1), an acrylic copolymer resin (a3), and other resins (a4).
  • Epoxy (meth) acrylate resin (a2) having a carboxy group other than the alkali-soluble resin (a1) examples include the following epoxy (meth) acrylate resin (a2-1) and / or epoxy (meth) acrylate resin (a2). -2) can be mentioned.
  • ⁇ Epoxy (meth) acrylate resin (a2-2)> An ⁇ , ⁇ -unsaturated monocarboxylic acid or an ⁇ , ⁇ -unsaturated monocarboxylic acid ester having a carboxy group is added to the epoxy resin, and further reacted with a polyhydric alcohol and a polybasic acid and / or its anhydride. The resulting alkali-soluble resin.
  • the epoxy resin as a raw material examples include bisphenol A type epoxy resin (for example, "jER (registered trademark; the same applies hereinafter) 828", “jER1001", “jER1002", “jER1004", etc.) manufactured by Mitsubishi Chemical Corporation, bisphenol.
  • Epoxy obtained by the reaction of the alcoholic hydroxyl group of the A-type epoxy resin with epichlorohydrin for example, "NER-1302” (epoxy equivalent 323, softening point 76 ° C.) manufactured by Nippon Kayaku Co., Ltd.
  • bisphenol F-type resin for example, Mitsubishi.
  • Epoxy resin for example, "EXA-7200” manufactured by DIC, “NC-7300” manufactured by Nippon Kayaku Co., Ltd.
  • Epoxy resin can be preferably used.
  • "XD-1000” manufactured by Nippon Kayaku Co., Ltd. is used as the epoxy resin represented by the following general formula (a1)
  • Nippon Kayaku Co., Ltd. is used as the epoxy resin represented by the following general formula (a2).
  • "NC-3000" can be mentioned.
  • b11 indicates an average value and indicates a number from 0 to 10.
  • R 11 represents a hydrogen atom, a halogen atom, an alkyl group having 1 to 8 carbon atoms, a cycloalkyl group having 3 to 10 carbon atoms, a phenyl group, a naphthyl group, or a biphenyl group.
  • the plurality of R 11s existing in one molecule may be the same or different from each other.
  • R 21 represents a hydrogen atom, a halogen atom, an alkyl group having 1 to 8 carbon atoms, a cycloalkyl group having 3 to 10 carbon atoms, a phenyl group, a naphthyl group, or a biphenyl group.
  • the plurality of R 21s existing in one molecule may be the same or different from each other.
  • X represents a linking group represented by the following general formula (a3-1) or (a3-2).
  • the molecular structure contains one or more adamantane structures.
  • b13 indicates an integer of 2 or 3.
  • R 31 to R 34 and R 35 to R 37 each independently have an adamantyl group, a hydrogen atom, and a substituent which may have a substituent. Indicates an alkyl group having 1 to 12 carbon atoms which may be used, or a phenyl group which may have a substituent. Further, the * mark in the formula represents the bond in (a3).
  • R 51 to R 54 are independently hydrogen atoms, alkyl groups having 1 to 20 carbon atoms, aryl groups having 6 to 20 carbon atoms, or aralkyl groups having 7 to 20 carbon atoms.
  • R 55 is an alkyl group having 1 to 20 carbon atoms, an aryl group having 6 to 20 carbon atoms, or an aralkyl group having 7 to 20 carbon atoms, and
  • R 56 is an alkylene group having 1 to 5 carbon atoms independently.
  • k is an integer of 1 to 5
  • l is an integer of 0 to 13
  • m is an integer of 0 to 5 independently.
  • R 23 represents a hydrogen atom, a halogen atom, an alkyl group having 1 to 8 carbon atoms, a cycloalkyl group having 3 to 10 carbon atoms, a phenyl group, a naphthyl group, or a biphenyl group. It should be noted that the plurality of R 23s existing in one molecule may be the same or different from each other.
  • an epoxy resin represented by any of the general formulas (a1) to (a3), (a5), or (a6).
  • Examples of the ⁇ , ⁇ -unsaturated monocarboxylic acid ester having an ⁇ , ⁇ -unsaturated monocarboxylic acid or a carboxy group include (meth) acrylic acid, crotonic acid, o-vinylbenzoic acid, and m-vinylbenzoic acid.
  • p-vinylbenzoic acid ⁇ -position haloalkyl of (meth) acrylic acid, monocarboxylic acids such as alkoxyl, halogen, nitro, cyano-substituted, 2- (meth) acryloyloxyethyl succinic acid, 2- (meth) acryloy Loxyethyl adipic acid, 2- (meth) acryloyloxyethyl phthalic acid, 2- (meth) acryloyloxyethyl hexahydrophthalic acid, 2- (meth) acryloyloxyethyl maleic acid, 2- (meth) acryloy Loxypropyl succinic acid, 2- (meth) acryloyloxypropyladipic acid, 2- (meth) acryloyloxypropyltetrahydrophthalic acid, 2- (meth) acryloyloxypropylphthalic acid, 2- (meth) acryloyloxy Propy
  • (meth) acrylic acid ester for example, lactones such as ⁇ -caprolactone, ⁇ -propiolactone, ⁇ -butyrolactone, and ⁇ -valerolactone are added to (meth) acrylic acid to have one hydroxyl group at the end.
  • a monomer; or a monomer having one hydroxyl group at the end such as hydroxyalkyl (meth) acrylate; or a compound having one hydroxyl group at the end such as pentaerythritol tri (meth) acrylate (anhydrous).
  • (meth) acrylic acid is particularly preferable.
  • a known method can be used as a method for adding an ⁇ , ⁇ -unsaturated monocarboxylic acid or an ⁇ , ⁇ -unsaturated monocarboxylic acid ester having a carboxy group to the epoxy resin.
  • an esterification catalyst an ⁇ , ⁇ -unsaturated monocarboxylic acid or an ⁇ , ⁇ -unsaturated monocarboxylic acid ester having a carboxy group can be reacted with an epoxy resin at a temperature of 50 to 150 ° C. can.
  • the catalyst used here includes tertiary phosphines such as triethylphosphine, tributylphosphine, tricyclohexylphosphine and triphenylphosphine, tertiary amines such as triethylamine, trimethylamine, benzyldimethylamine and benzyldiethylamine, tetramethylammonium chloride and tetraethylammonium chloride.
  • Quaternary ammonium salts such as dodecyltrimethylammonium chloride can be used.
  • the epoxy resin ⁇ , ⁇ -unsaturated monocarboxylic acid or ⁇ , ⁇ -unsaturated monocarboxylic acid ester having a carboxy group, and the esterification catalyst, one type may be used alone or two types may be used. The above may be used together.
  • the amount of ⁇ , ⁇ -unsaturated monocarboxylic acid or ⁇ , ⁇ -unsaturated monocarboxylic acid ester having a carboxy group is preferably in the range of 0.5 to 1.2 equivalents with respect to 1 equivalent of the epoxy group of the epoxy resin. , 0.7 to 1.1 equivalents are more preferred.
  • the amount of ⁇ , ⁇ -unsaturated monocarboxylic acid or ⁇ , ⁇ -unsaturated monocarboxylic acid ester having a carboxy group By setting the amount of ⁇ , ⁇ -unsaturated monocarboxylic acid or ⁇ , ⁇ -unsaturated monocarboxylic acid ester having a carboxy group to the above lower limit or more, the amount of unsaturated group introduced becomes sufficient, and the subsequent polybasic acid And / or its reaction with the anhydride is sufficient, and there is a tendency that a large amount of residual epoxy group can be suppressed.
  • the amount to be used by setting the amount to be used to the upper limit or less, it is possible to suppress the ⁇ , ⁇ -unsaturated monocarboxylic acid or the ⁇ , ⁇ -unsaturated monocarboxylic acid ester having a carboxy group from remaining as an unreacted product. Tend.
  • the same compound as the alkali-soluble resin (a1) can be used. Further, as the synthesis method, the same synthesis method as that of the alkali-soluble resin (a1) can be used.
  • the acid value of the epoxy (meth) acrylate resin (a2-1, a2-2) thus obtained is preferably 10 mgKOH / g or more, more preferably 50 mgKOH / g or more, still more preferably 80 mgKOH / g or more. Further, it is preferably 200 mgKOH / g or less, and more preferably 150 mgKOH / g or less. When the value is equal to or higher than the lower limit, the developability tends to be good. Further, the alkali resistance tends to be improved by setting the value to the upper limit or less. The above upper and lower limits can be combined arbitrarily. For example, 10 to 200 mgKOH / g is preferable, 50 to 200 mgKOH / g is more preferable, and 80 to 150 mgKOH / g is further preferable.
  • the polystyrene-equivalent weight average molecular weight (Mw) of the epoxy (meth) acrylate resin (a2-1, a2-2) measured by gel permeation chromatography (GPC) is preferably 1,000 or more, more preferably 1,500 or more. It is preferable, more preferably 2,000 or more, and particularly preferably 2,300 or more. Further, 20,000 or less is preferable, 15,000 or less is more preferable, 10,000 or less is further preferable, 8,000 or less is further preferable, and 6,000 or less is particularly preferable. When the value is equal to or higher than the lower limit, the sensitivity, coating film strength, and alkali resistance tend to be good.
  • the value when the value is not more than the upper limit, the developability and resolubility tend to be good.
  • the above upper and lower limits can be combined arbitrarily. For example, 1,000 to 20,000 is preferable, 1,000 to 15,000 is more preferable, 1,500 to 10,000 is more preferable, 2,000 to 8,000 is even more preferable, and 2,300 to 8,000. 6,000 is particularly preferred.
  • acrylic copolymer resin (a3) examples include Japanese Patent Laid-Open No. 7-2072111, Japanese Patent Application Laid-Open No. 8-259876, Japanese Patent Application Laid-Open No. 10-300922, and Japanese Patent Application Laid-Open No. 11-140144.
  • the following resins (a3-1) to (a3-4) are preferable, and the resin of (a3-1) is particularly preferable.
  • (A3-1) With respect to a polymer of an epoxy group-containing (meth) acrylate and another radically polymerizable monomer, unsaturated monobasic acid is added to at least a part of the epoxy group of the copolymer.
  • Resin (a3-3) Resin in which an epoxy group-containing unsaturated compound is added to the carboxy group portion of the resin of (a3-2)
  • (a3-4) (meth) acrylic resin.
  • the other alkali-soluble resin (a4) is alkali-soluble except for the alkali-soluble resin (a1), the epoxy (meth) acrylate resin (a2) having a carboxy group other than the alkali-soluble resin (a1), and the acrylic copolymer resin (a3).
  • a resin there is no particular limitation, and it may be selected from the resins usually used for the photosensitive resin composition for a color filter.
  • the alkali-soluble resins described in Japanese Patent Application Laid-Open No. 2007-27172, Japanese Patent Application Laid-Open No. 2007-316620, and Japanese Patent Application Laid-Open No. 2007-334290 can be mentioned.
  • the content ratio of the alkali-soluble resin is not particularly limited, but is preferably 5% by mass or more, more preferably 10% by mass or more, still more preferably 10% by mass, based on the total solid content of the photosensitive resin composition of the present invention. It is 15% by mass or more, and particularly preferably 20% by mass or more. Further, it is preferably 90% by mass or less, more preferably 70% by mass or less, further preferably 50% by mass or less, still more preferably 30% by mass or less, and particularly preferably 25% by mass or less. By setting the value to the lower limit or more, the solubility of the unexposed portion in the developing solution tends to be good.
  • the value to the upper limit or less by setting the value to the upper limit or less, excessive penetration of the developing solution into the exposed portion can be suppressed, and the sharpness and fine line adhesion of the image tend to be improved.
  • the above upper and lower limits can be combined arbitrarily. For example, 5 to 90% by mass is preferable, 5 to 70% by mass is more preferable, 10 to 50% by mass is further preferable, 15 to 30% by mass is further preferable, and 20 to 25% by mass is particularly preferable.
  • the content ratio of the alkali-soluble resin (a1) is not particularly limited, but is preferably 5% by mass or more, more preferably 10% by mass or more, still more preferably 10% by mass, based on the total solid content of the photosensitive resin composition of the present invention. It is 15% by mass or more, preferably 90% by mass or less, more preferably 70% by mass or less, still more preferably 50% by mass or less, still more preferably 30% by mass or less, and particularly preferably 25% by mass or less. By setting the value to the lower limit or more, the solubility of the unexposed portion in the developing solution tends to be good.
  • the value to the upper limit or less by setting the value to the upper limit or less, excessive penetration of the developing solution into the exposed portion can be suppressed, and the sharpness and fine line adhesion of the image tend to be improved.
  • the above upper and lower limits can be combined arbitrarily. For example, 5 to 90% by mass is preferable, 5 to 70% by mass is more preferable, 10 to 50% by mass is further preferable, 10 to 30% by mass is further preferable, and 15 to 25% by mass is particularly preferable.
  • the content ratio of the alkali-soluble resin (a1) with respect to the total content of the alkali-soluble resin is preferably 10% by mass or more, more preferably 30% by mass or more, still more preferably 50% by mass or more, and particularly preferably. Is 90% by mass or more. Further, it is preferably 100% by mass or less.
  • the above upper and lower limits can be combined arbitrarily. For example, 10 to 100% by mass is preferable, 30 to 100% by mass is more preferable, 50 to 100% by mass is further preferable, and 90 to 100% by mass is particularly preferable.
  • the content of the (a) alkali-soluble resin with respect to 100 parts by mass of the photopolymerizable monomer is preferably 100 parts by mass or more, more preferably 150 parts by mass or more, still more preferably 200 parts by mass or more. Further, 1000 parts by mass or less is preferable, 800 parts by mass or more is more preferable, 600 parts by mass or more is further preferable, and 400 parts by mass or more is particularly preferable. When it is at least the above lower limit value, the solubility of the unexposed portion in the developing solution tends to be good. Further, when the value is not more than the upper limit, excessive penetration of the developing solution into the exposed portion can be suppressed, and the sharpness and fine line adhesion of the image tend to be improved. The above upper and lower limits can be combined arbitrarily. For example, 100 to 1000 parts by mass is preferable, 100 to 800 parts by mass is more preferable, 150 to 600 parts by mass is further preferable, and 200 to 400 parts by mass is particularly preferable.
  • the photosensitive resin composition of the present invention contains (b) a photopolymerizable monomer from the viewpoint of sensitivity and the like.
  • Examples of the (b) photopolymerizable monomer used in the present invention include compounds having at least one ethylenically unsaturated group in the molecule (hereinafter, may be referred to as “ethylenic monomer”). .. Specific examples thereof include (meth) acrylic acid, (meth) acrylic acid alkyl ester, acrylonitrile, styrene and a carboxylic acid having one ethylenically unsaturated bond, and an ester of a polyvalent or monovalent alcohol.
  • the (b) photopolymerizable monomer used in the present invention includes a photopolymerizable monomer (b6) having a partial structure represented by the following general formula (b5).
  • R 1 represents an alkylene group having 2 to 6 carbon atoms which may have a substituent
  • R 2 represents a hydrogen atom or a methyl group
  • m represents an integer of 1 to 3. Represents. * Represents a bond.
  • the photopolymerizable monomer (b6) having the partial structure represented by (b5) used in the present invention is represented by any of the following general formulas (b1) to (b4). It is preferable to have a structure to be polymerized.
  • R b is a group shown in the formula (b5)
  • R c is a group shown in the following general formula (b7)
  • p1 is an integer of 1 to 4
  • * indicates a bond. ..
  • R 2 has the same meaning as described above, and * indicates a bond.
  • R b is a group shown in the formula (b5)
  • R c is a group shown in the formula (b7)
  • p2 is an integer of 1 to 6
  • * indicates a bond.
  • R b is a group represented by the formula (b5)
  • R c is a group represented by the formula (b7)
  • R 8 is an alkyl group having 1 to 6 carbon atoms
  • p3 is 1 to 1 to. It is an integer of 3, and * indicates a bond.
  • R b is a group represented by the formula (b5)
  • R c is a group represented by the formula (b7)
  • R 9 is an alkylene group having 1 to 10 carbon atoms and 7 to 10 carbon atoms. It is an arylene alkylene group or an arylene group having 6 to 10 carbon atoms.
  • the plurality of R9s existing in one molecule may be the same or different from each other.
  • p4 is an integer of 1 to 3, and * indicates a bond.
  • R 1 represents an alkylene group in which the main chain may have branches having 2 to 6 carbon atoms, and R 2 represents a hydrogen atom or a methyl group.
  • m represents an integer of 1 to 3.
  • the plurality of R 1s may be the same or different.
  • R 1 represents an alkylene group that may have branches of the main chain having 2 to 6 carbon atoms.
  • the carbon number thereof is preferably 3 or more, more preferably 4 or more, preferably 6 or less, and more preferably 5 or less.
  • the above upper and lower limits can be combined arbitrarily. For example, 3 to 6 is preferable, and 4 to 5 is more preferable.
  • the alkylene group may or may not have a branch. From the viewpoint of fine wire adhesion and adhesion stress with the substrate, it is preferable that there is no branching.
  • alkylene group having a branch having 2 to 6 carbon atoms in the main chain examples include a methylene group, an ethylene group, a 1,3-propylene group, a 1,2-propylene group and a 1,4-butylene group.
  • examples thereof include 1,2-butylene group, 1,3-butylene group, 1,5-pentylene group, 1,2-pentylene group, 1,3-pentylene group, 1,6-hexylene group and cyclohexylene group. From the viewpoint of fine wire adhesion and adhesion stress with the substrate, 1,4-butylene group and 1,5-pentylene group are preferable, and 1,5-pentylene group is more preferable.
  • p1 is 1 or more, preferably 2 or more, and 4 or less, preferably 3 or less.
  • the above upper and lower limits can be combined arbitrarily. For example, 1 to 3 is preferable, and 2 to 3 is more preferable.
  • p2 is 1 or more, preferably 2 or more, more preferably 3 or more, and 6 or less, preferably 5 or less.
  • the lower limit there is an effect of improving the adhesion stress with the substrate, and by setting it below the upper limit, it is possible to suppress excessive penetration of the developer into the exposed area, resulting in sharpness of the image and adhesion of fine lines. It has the effect of improving the sex.
  • the above upper and lower limits can be combined arbitrarily. For example, 2 to 6 is preferable, 2 to 5 is more preferable, and 3 to 5 is even more preferable.
  • R 8 in the formula (b3) is an alkyl group having 1 to 6 carbon atoms, but the carbon number is 1 or more, preferably 2 or more, and 6 or less, preferably 5 from the viewpoint of adhesion to the substrate. Hereinafter, it is more preferably 4 or less.
  • the alkyl group having 1 to 6 carbon atoms include a methyl group, an ethyl group, a 1-propyl group, a 2-propyl group, a 1-butyl group, a 2-butyl group, a 1-pentyl group, a 1-hexyl group and a cyclohexyl. The group is mentioned. From the viewpoint of fine wire adhesion and adhesion stress with the substrate, a methyl group and an ethyl group are preferable, and an ethyl group is more preferable.
  • p3 is 1 or more, preferably 2 or more, and 3 or less. Setting it above the lower limit has the effect of improving adhesion, and setting it below the upper limit suppresses excessive penetration of the developer into the exposed area, resulting in good image sharpness and fine line adhesion. There is an effect.
  • the above upper and lower limits can be combined arbitrarily. For example, 2 to 3 are preferable.
  • the carbon number of the alkylene group of R 9 is 1 or more, preferably 2 or more, preferably 6 or less, and more preferably 3 or less from the viewpoint of adhesion to the substrate.
  • the alkyl group having 1 to 10 carbon atoms include a methylene group, an ethylene group, a 1,3-propylene group, a 1,2-propylene group, a 1,4-butylene group, a 1,2-butylene group and 1,5.
  • -Pentylene group, 1,6-hexylene group, cyclohexylene group, methylenecyclohexylene group can be mentioned.
  • the arylene alkylene group of R9 has 7 or more carbon atoms, and preferably 9 or less carbon atoms from the viewpoint of adhesion to the substrate.
  • the arylene alkylene group having 7 to 10 carbon atoms include a phenylene methylene group, a phenylene ethylene group, and a phenylene propylene group.
  • a phenylene methylene group and a phenylene ethylene group are preferable, and a phenylene methylene group is more preferable.
  • the carbon number of the arylene group of R9 is 6 or more and 10 or less from the viewpoint of adhesion to the substrate.
  • the arylene group having 6 to 10 carbon atoms include a phenylene group and a naphthylene group.
  • a phenylene group is preferable from the viewpoint of adhesion to the substrate.
  • R 9 in the formula (b4) a methylene group, an ethylene group, and a propylene group are preferable, and an ethylene group is more preferable, from the viewpoint of fine wire adhesion and adhesion stress with the substrate.
  • p4 is 1 or more, preferably 2 or more, and 3 or less.
  • the photopolymerizable monomer (b6) is a commercially available product, for example, "DPCA-20", “DPCA-30”, “DPCA-60”, “DPCA-120” manufactured by Nippon Kayaku Co., Ltd., manufactured by Shin-Nakamura Chemical Co., Ltd. "A9300-CL1" and “A9300-CL3" are mentioned.
  • a photopolymerizable monomer other than the photopolymerizable monomer (b6) can be used.
  • the number of ethylenically unsaturated groups in the polyfunctional ethylenic monomer is preferably 2 or more, more preferably 3 or more, still more preferably 4 or more, still more preferably 5 or more, and particularly preferably 6 or more. , And more preferably 10 or less, more preferably 8 or less.
  • the photosensitive resin composition tends to have high sensitivity, and when it is at least the above upper limit value, the curing shrinkage during polymerization tends to be small.
  • the above upper and lower limits can be combined arbitrarily. For example, 2 to 10 pieces are preferable, 3 to 10 pieces are more preferable, 4 to 10 pieces are further preferable, 5 to 8 pieces are more preferable, and 6 to 8 pieces are particularly preferable.
  • Examples of the polyfunctional ethylenic monomer include an ester of an aliphatic polyhydroxy compound and an unsaturated carboxylic acid; an ester of an aromatic polyhydroxy compound and an unsaturated carboxylic acid; an aliphatic polyhydroxy compound and an aromatic polyhydroxy.
  • Examples thereof include an ester obtained by an esterification reaction between a polyvalent hydroxy compound such as a compound and an unsaturated carboxylic acid and a polybasic carboxylic acid.
  • ester of the aliphatic polyhydroxy compound and the unsaturated carboxylic acid examples include ethylene glycol diacrylate, triethylene glycol diacrylate, trimethylolpropane triacrylate, trimethylol ethanetriacrylate, pentaerythritol diacrylate, pentaerythritol triacrylate, and penta.
  • Acrylic acid esters of aliphatic polyhydroxy compounds such as erythritol tetraacrylate, dipentaerythritol tetraacrylate, dipentaerythritol pentaacrylate, dipentaerythritol hexaacrylate, and glycerol acrylate; methacrylic acid esters in which the acrylates of these exemplary compounds are replaced with methacrylate; Examples thereof include itaconic acid esters in which the acrylates of these exemplary compounds are replaced with itaconates; crotonic acid esters in which the acrylates of these exemplary compounds are replaced with clonates; maleic acid esters in which the acrylates of these exemplary compounds are replaced with maleates.
  • ester of the aromatic polyhydroxy compound and the unsaturated carboxylic acid examples include acrylic acid esters and methacrylic acid esters of aromatic polyhydroxy compounds such as hydroquinone diacrylate, hydroquinone dimethacrylate, resorcin diacrylate, resorcin dimethacrylate, and pyrogalloltriacrylate. Can be mentioned.
  • the ester obtained by the esterification reaction of a polybasic carboxylic acid and an unsaturated carboxylic acid with a polyvalent hydroxy compound is not necessarily a single substance, but typical specific examples include acrylic acid, phthalic acid, and Condensations of ethylene glycol; condensates of acrylic acid, maleic acid, and diethylene glycol; condensates of methacrylic acid, terephthalic acid and pentaerythritol; condensates of acrylic acid, adipic acid, butanediol and glycerin;
  • polyfunctional ethylenic monomer used in the present invention for example, a polyisocyanate compound and a hydroxyl group-containing (meth) acrylic acid ester or a polyisocyanate compound and a polyol and a hydroxyl group-containing (meth) acrylic acid ester are reacted.
  • Acrylate esters such as; vinyl group-containing compounds such as divinylphthalate; These may be used alone or in combination of two or more.
  • the content ratio of the photopolymerizable monomer is not particularly limited, but is preferably 90% by mass or less, more preferably 70% by mass or less, still more preferably 50% by mass, based on the total solid content of the photosensitive resin composition. % Or less, more preferably 30% by mass or less, particularly preferably 20% by mass or less, and particularly preferably 10% by mass or less.
  • the lower limit of the content ratio of the photopolymerizable monomer is not particularly limited, but is preferably 1% by mass or more, more preferably 5% by mass or more.
  • the photocuring due to ultraviolet irradiation is improved and the fine line adhesion tends to be good.
  • the above upper and lower limits can be combined arbitrarily. For example, 1 to 90% by mass is preferable, 1 to 70% by mass is more preferable, 1 to 50% by mass is further preferable, 5 to 30% by mass is further preferable, and 5 to 20% by mass is particularly preferable. Mass% is particularly preferred.
  • the content ratio of the photopolymerizable monomer (b6) is not particularly limited, but is preferably 90% by mass or less, more preferably 70% by mass or less, still more preferably 50% by mass, based on the total solid content of the photosensitive resin composition. % Or less, more preferably 30% by mass or less, particularly preferably 20% by mass or less, and particularly preferably 10% by mass or less.
  • the lower limit of the content ratio of the photopolymerizable monomer is not particularly limited, but is preferably 1% by mass or more, more preferably 5% by mass or more.
  • the adhesion stress with the substrate tends to be good.
  • the above upper and lower limits can be combined arbitrarily. For example, 1 to 90% by mass is preferable, 1 to 70% by mass is more preferable, 1 to 50% by mass is further preferable, 5 to 30% by mass is further preferable, and 5 to 20% by mass is particularly preferable. Mass% is particularly preferred.
  • the content ratio of the photopolymerizable monomer (b6) to the total content of the photopolymerizable monomer is preferably 30% by mass or more, more preferably 50% by mass or more, still more preferably 80% by mass or more. Further, it is preferably 100% by mass or less. When it is at least the above lower limit value, the adhesion stress with the substrate tends to be improved.
  • the above upper and lower limits can be combined arbitrarily. For example, 30 to 100% by mass is preferable, 50 to 100% by mass is more preferable, and 80 to 100% by mass is further preferable.
  • the photosensitive resin composition of the present invention contains (c) a photopolymerization initiator.
  • the photopolymerization initiator is a component having a function of directly absorbing light, causing a decomposition reaction or a hydrogen abstraction reaction, and generating a polymerization active radical. If necessary, an additive such as a sensitizing dye may be added and used.
  • the photopolymerization initiator for example, a metallocene compound containing a titanosen compound described in JP-A-59-152396 and JP-A-61-151197 of Japan; Japanese Patent Application Laid-Open No. 2000-56118. Hexaaryl-biimidazole derivative according to Japanese Patent Application Laid-Open No. 10-39503, halomethylated oxadiazole derivative, halomethyl-s-triazine derivative, N-aryl- ⁇ -amino acids such as N-phenylglycine, N.
  • -Radical activators such as aryl- ⁇ -amino acid salts, N-aryl- ⁇ -amino acid esters, ⁇ -aminoalkylphenone derivatives; Japanese Patent Laid-Open No. 2000-80068, Japanese Patent Application Laid-Open No. 2006-36750, etc. Examples thereof include the oxime ester derivative described in 1.
  • titanocene derivatives include dicyclopentadienyl titanium dichloride, dicyclopentadienyl titanium bisphenyl, and dicyclopentadienyl titanium bis (2,3,4,5,6-pentafluoropheni-1-yl).
  • Dicyclopentadienyl Titanium Bis (2,3,5,6-Tetrafluoropheni-1-yl), Dicyclopentadienyl Titanium Bis (2,4,6-Trifluoropheni-1-yl), Dicyclopentadienyl Titanium Di (2,6-difluoropheni-1-yl), Dicyclopentadienyl Titanium Di (2,4-difluoropheni-1-yl), Di (Methylcyclopentadienyl) Titanium Bis (2,3,4,5,6-pentafluoropheni-1-yl), di (methylcyclopentadienyl) titanium bis (2,6-difluoropheni-1-yl), dicyclopentadienyl titanium [ 2,6-Di-fluoro-3- (pyro-1-yl) -pheni-1-yl].
  • biimidazole derivatives examples include 2- (2'-chlorophenyl) -4,5-diphenylimidazole dimer and 2- (2'-chlorophenyl) -4,5-bis (3'-methoxyphenyl) imidazole.
  • halomethylated oxadiazole derivatives examples include 2-trichloromethyl-5- (2'-benzofuryl) -1,3,4-oxadiazole and 2-trichloromethyl-5-[ ⁇ - (2'-).
  • Benzofuryl) vinyl] -1,3,4-oxadiazole 2-trichloromethyl-5-[ ⁇ - (2'-(6''-benzofuryl) vinyl)]-1,3,4-oxadiazole
  • Examples thereof include 2-trichloromethyl-5-furyl-1,3,4-oxadiazole.
  • halomethyl-s-triazine derivatives examples include 2- (4-methoxyphenyl) -4,6-bis (trichloromethyl) -s-triazine and 2- (4-methoxynaphthyl) -4,6-bis ( Trichloromethyl) -s-triazine, 2- (4-ethoxynaphthyl) -4,6-bis (trichloromethyl) -s-triazine, 2- (4-ethoxycarbonylnaphthyl) -4,6-bis (trichloromethyl) -S-Triazine is mentioned.
  • Examples of ⁇ -aminoalkylphenone derivatives include 2-methyl-1 [4- (methylthio) phenyl] -2-morpholinopropane-1-one and 2-benzyl-2-dimethylamino-1- (4-). Morphorinophenyl) Butane-1-one, 4-dimethylaminoethylbenzoate, 4-dimethylaminoisoamylbenzoate, 4-diethylaminoacetophenone, 4-dimethylaminopropiophenone, 2-ethylhexyl-1,4 -Dimethylaminobenzoate, 2,5-bis (4-diethylaminobenzal) cyclohexanone, 7-diethylamino-3- (4-diethylaminobenzoyl) coumarin, 4- (diethylamino) chalcone.
  • oxime derivatives are particularly preferable in terms of sensitivity.
  • an alkali-soluble resin containing a phenolic hydroxyl group it may be disadvantageous in terms of sensitivity. Therefore, oxime derivatives (oxime ester compounds and ketooxime compounds) having particularly excellent sensitivity are useful. From the viewpoint of adhesion to the substrate, an oxime ester compound is more preferable.
  • the photopolymerization initiator of an oxime ester compound has a structure that absorbs ultraviolet rays, a structure that transmits light energy, and a structure that generates radicals in its structure, so that it is highly sensitive in a small amount and has a thermal reaction. It is possible to design a photosensitive resin composition that is stable and highly sensitive in a small amount.
  • an oxime ester-based compound containing a optionally substituted carbazolyl group (a group having a optionally substituted carbazole ring) from the viewpoint of light absorption of an exposure light source for i-ray (365 nm). This structural property is well expressed and is more preferable.
  • BM black matrix
  • oxime ester compound examples include a compound containing a structural portion represented by the following general formula (22), and preferably an oxime ester compound represented by the following general formula (23).
  • R 22 may be substituted with an alkanoyl group having 2 to 12 carbon atoms, a heteroaryl alkanoyl group having 1 to 20 carbon atoms, an alkenoyl group having 3 to 25 carbon atoms, and 3 carbon atoms.
  • Cyclo alkanoyl group of 8 to 8 alkoxycarbonyl alkanoyl group of 3 to 20 carbon atoms, phenoxycarbonyl alkanoyl group of 8 to 20 carbon atoms, heteroallyloxycarbonyl alkanoyl group of 3 to 20 carbon atoms, amino of 2 to 10 carbon atoms.
  • alkylcarbonyl group An alkylcarbonyl group, an allylloyl group having 7 to 20 carbon atoms, a heteroallyloyl group having 1 to 20 carbon atoms, an alkoxycarbonyl group having 2 to 10 carbon atoms, or an aryloxycarbonyl group having 7 to 20 carbon atoms is shown.
  • R 21a is hydrogen, or an alkyl group having 1 to 20 carbon atoms, an alkenyl group having 2 to 25 carbon atoms, and a heteroarylalkyl group having 1 to 20 carbon atoms, which may be substituted respectively.
  • An alkoxycarbonyl group having 2 to 10 carbon atoms, an aryloxycarbonyl group having 7 to 20 carbon atoms, or a cycloalkylalkyl group having 1 to 10 carbon atoms is shown.
  • R 21b represents any substituent, including aromatic or heteroaromatic rings.
  • R 22a represents the same group as R 22 in the formula (22).
  • the R 22 in the formula (22) and the R 22a in the formula (23) are preferably an alkanoyl group having 2 to 12 carbon atoms, a heteroaryl alkanoyl group having 1 to 20 carbon atoms, and a cycloalkanoyl group having 3 to 8 carbon atoms. Can be mentioned.
  • the R 21a in the formula (23) is preferably a linear alkyl group such as an unsubstituted methyl group, an ethyl group or a propyl group, or a cycloalkylalkyl group, or a propyl substituted with an N-acetyl-N-acetoxyamino group. Group is mentioned.
  • R 21b in the formula (23) include a optionally substituted carbazolyl group, an optionally substituted thioxanthonyl group, and an optionally substituted phenylsulfide group.
  • a compound in which R 21b in the formula (23) is a carbazolyl group which may be substituted is more preferable for the above-mentioned reason. Further, an aryl group having 6 to 25 carbon atoms which may be substituted, an arylcarbonyl group having 7 to 25 carbon atoms which may be substituted, a heteroaryl group having 5 to 25 carbon atoms which may be substituted, and the substitution.
  • a carbazolyl group having at least one group selected from the group consisting of a heteroarylcarbonyl group having 6 to 25 carbon atoms and a nitro group may be preferable.
  • a carbazolyl group having at least one group selected from the group consisting of a benzoyl group, a toluoil group, a naphthoyl group, a thienylcarbonyl group, and a nitro group is preferable. It is desirable that the substituent on the carbazolyl group (or one of the substituents if it has two or more substituents) is attached to the 3-position of the carbazolyl group.
  • Examples of commercially available products of such photopolymerization initiators of oxime ester compounds include OXE-02 manufactured by BASF, TR-PBG-304 and TR-PBG-314 manufactured by Joshu Power Electronics Co., Ltd.
  • photopolymerization initiator of the oxime ester compound suitable for the present invention include the compounds exemplified below, but the present invention is not limited to these compounds.
  • ketooxime ester-based compound examples include compounds containing a structural portion represented by the following general formula (24). Preferred examples thereof include ketooxime ester compounds represented by the following general formula (25).
  • R 24 is synonymous with R 22 in equation (22).
  • R 23a may be substituted with a phenyl group, an alkyl group having 1 to 20 carbon atoms, an alkenyl group having 2 to 25 carbon atoms, a heteroarylalkyl group having 1 to 20 carbon atoms, respectively.
  • a heteroarylloyl group having 1 to 20, an alkoxycarbonyl group having 2 to 10 carbon atoms, an aryloxycarbonyl group having 7 to 20 carbon atoms, or a cycloalkylalkyl group having 1 to 10 carbon atoms is shown.
  • R 23b represents any substituent, including aromatic or heteroaromatic rings.
  • R 24a may be substituted with an alkanoyl group having 2 to 12 carbon atoms, an alkenoyl group having 3 to 25 carbon atoms, a cycloalkanoyl group having 4 to 8 carbon atoms, a benzoyl group having 7 to 20 carbon atoms, and carbon.
  • the R 24 in the formula (24) and the R 24a in the formula (25) include an alkanoyl group having 2 to 12 carbon atoms, a heteroarylalkanoyl group having 1 to 20 carbon atoms, a cycloalkanoyl group having 3 to 8 carbon atoms, and a carbon number of carbon atoms. 7 to 20 aryloyl groups are preferred.
  • R 23a in the formula (25) an unsubstituted ethyl group, a propyl group, a butyl group, an ethyl group substituted with a methoxycarbonyl group, or a propyl group is preferable.
  • R 23b in the formula (25) a optionally substituted carbazoyl group and an optionally substituted phenylsulfide group are preferable.
  • the ketooxime ester-based compound suitable for the present invention include, but are not limited to, the following compounds.
  • Examples of commercially available products of photopolymerization initiators for ketooxime ester compounds include OXE-01 manufactured by BASF and TR-PBG-305 manufactured by Joshu Strong Electronics.
  • the oxime ester-based compound and the keto-oxime ester-based compound may be, for example, one of a series of compounds described in Japanese Patent Application Laid-Open No. 2000-80068 and Japanese Patent Application Laid-Open No. 2006-36750.
  • One type of photopolymerization initiator may be used alone, or two or more types may be used in combination.
  • benzoin alkyl ethers such as benzoin methyl ether, benzoin phenyl ether, benzoin isobutyl ether, benzoin isopropyl ether; 2-methylanthraquinone, 2-ethylanthraquinone, 2-t-butylanthraquinone, 1 -Anthraquinone derivatives such as chloroanthraquinone; benzophenone derivatives such as benzophenone, Michelers ketone, 2-methylbenzophenone, 3-methylbenzophenone, 4-methylbenzophenone, 2-chlorobenzophenone, 4-bromobenzophenone, 2-carboxybenzophenone; 2, 2-Dimethoxy-2-phenylacetophenone, 2,2-diethoxyacetophenone, 1-hydroxycyclohexylphenyl ketone, ⁇ -hydroxy-2-methylphenylpropanol, 1-hydroxy-1-methylethyl
  • benzoic acid ester derivatives such as ethyl p-dimethylaminobenzoate and ethyl p-diethylaminobenzoate
  • aclysine derivatives such as 9-phenylaclydin and 9- (p-methoxyphenyl) acridin
  • 9,10-dimethyl Phenazine derivatives such as benzphenazine
  • Anthron derivatives such as benzanthrone can be mentioned.
  • oxime ester derivatives are particularly preferable for the above-mentioned reasons.
  • the photopolymerization initiator may be used in combination with a sensitizing dye according to the wavelength of the image exposure light source for the purpose of increasing the sensitivity.
  • sensitizing dyes include the xanthene dyes described in Japanese Patent Application Laid-Open No. 4-221958 and Japanese Patent Application Laid-Open No. 4-219756; A coumarin dye having a heterocycle described in Japanese Patent Application Laid-Open No. 289335; a 3-ketocoumarin compound described in Japanese Patent Application Laid-Open No. 3-239703 and Japanese Patent Application Laid-Open No. 5-289335; Pyromethene dyes described; Japanese Patent Laid-Open No.
  • Japanese Patent Application Laid-Open No. 54-155292 Japanese Patent Application Laid-Open No. 45-373777, Japanese Patent Application Laid-Open No. 48-84183, Japan.
  • Japanese Patent Application Laid-Open No. 52-112681 Japanese Patent Application Laid-Open No. 58-15503, Japanese Patent Application Laid-Open No. 60-88805, Japanese Patent Application Laid-Open No. 59-56403, Japanese Patent Application Laid-Open No. 2-69
  • an amino group-containing sensitizing dye is preferable, and a compound having an amino group and a phenyl group in the same molecule is more preferable.
  • the sensitizing dye include 4,4'-dimethylaminobenzophenone, 4,4'-diethylaminobenzophenone, 2-aminobenzophenone, 4-aminobenzophenone, 4,4'-diaminobenzophenone, and 3,3'-diaminobenzophenone.
  • the content ratio of the photopolymerization initiator is not particularly limited, but is preferably 1% by mass or more, more preferably 2% by mass or more, still more preferably, with respect to the total solid content of the photosensitive resin composition of the present invention. Is 3% by mass or more, more preferably 4% by mass or more, preferably 30% by mass or less, more preferably 20% by mass or less, still more preferably 15% by mass or less, still more preferably 10% by mass or less. Particularly preferably, it is 8% by mass or less. Sensitivity tends to improve when the value is equal to or higher than the lower limit. Further, when the value is not more than the upper limit, the adhesion stress with the substrate tends to be improved.
  • the above upper and lower limits can be combined arbitrarily. For example, 1 to 30% by mass is preferable, 1 to 20% by mass is more preferable, 2 to 15% by mass is further preferable, 3 to 10% by mass is further preferable, and 4 to 8% by mass is particularly preferable.
  • the content ratio of the oxime ester photopolymerization initiator (c1) is not particularly limited, but the photosensitive resin composition of the present invention is not particularly limited. It is preferably 1% by mass or more, more preferably 2% by mass or more, still more preferably 3% by mass or more, still more preferably 4% by mass or more, based on the total solid content. Further, it is preferably 30% by mass or less, more preferably 20% by mass or less, further preferably 15% by mass or less, still more preferably 10% by mass or less, and particularly preferably 8% by mass or less.
  • the value When the value is equal to or higher than the lower limit, the sensitivity tends to be improved and the fine line adhesion is improved. Further, when the value is not more than the upper limit, the solubility of the unexposed portion in the developing solution tends to be improved.
  • the above upper and lower limits can be combined arbitrarily. For example, 1 to 30% by mass is preferable, 1 to 20% by mass is more preferable, 2 to 15% by mass is further preferable, 3 to 10% by mass is further preferable, and 4 to 8% by mass is particularly preferable.
  • the content ratio of the sensitizing dye is preferably 0 to 20% by mass, more preferably 0 to 15% by mass, still more preferably 0 to 10% by mass in the total solid content of the photosensitive resin composition. %.
  • the photosensitive resin composition of the present invention preferably contains (d) a coloring material.
  • the coloring material refers to a material that colors the photosensitive resin composition of the present invention.
  • dyes and pigments can be used, but pigments are preferable from the viewpoint of heat resistance, light resistance and the like.
  • pigments of various colors such as blue pigment, green pigment, red pigment, yellow pigment, purple pigment, orange pigment, brown pigment and black pigment can be used.
  • organic pigments such as azo, phthalocyanine, quinacridone, benzimidazolone, isoindolenone, dioxazine, indanthrone, and perylene
  • various inorganic pigments can be used as the structure. Is.
  • pigments that can be used in the present invention are shown below by pigment numbers.
  • the terms such as "CI Pigment Red 2" listed below mean the color index (CI).
  • examples of the red pigment include C.I. I. Pigment Red 1, 2, 3, 4, 5, 6, 7, 8, 9, 12, 14, 15, 16, 17, 21, 22, 23, 31, 32, 37, 38, 41, 47, 48, 48: 1, 48: 2, 48: 3, 48: 4, 49, 49: 1, 49: 2, 50: 1, 52: 1, 52: 2, 53, 53: 1, 53: 2, 53: 3, 57, 57: 1, 57: 2, 58: 4, 60, 63, 63: 1, 63: 2, 64, 64: 1, 68, 69, 81, 81: 1, 81: 2, 81: 3, 81: 4, 83, 88, 90: 1, 101, 101: 1, 104, 108, 108: 1, 109, 112, 113, 114, 122, 123, 144, 146, 147, 149, 151, 166, 168, 169, 170, 172
  • C.I. I. Pigment Red 48 1, 122, 168, 177, 202, 206, 207, 209, 224, 242, 254, more preferably C.I. I. Pigment Red 177, 209, 224, 254 can be mentioned.
  • blue pigment examples include C.I. I. Pigment Blue 1, 1: 2, 9, 14, 15, 15: 1, 15: 2, 15: 3, 15: 4, 15: 6, 16, 17, 19, 25, 27, 28, 29, 33, 35, 36, 56, 56: 1, 60, 61, 61: 1, 62, 63, 66, 67, 68, 71, 72, 73, 74, 75, 76, 78, 79 can be mentioned.
  • C.I. I. Pigment Blue 15, 15: 1, 15: 2, 15: 3, 15: 4, 15: 6, 60 more preferably C.I. I. Pigment Blue 15: 6, 60 can be mentioned.
  • green pigment examples include C.I. I. Pigment Greens 1, 2, 4, 7, 8, 10, 13, 14, 15, 17, 18, 19, 26, 36, 45, 48, 50, 51, 54, 55, 58 can be mentioned.
  • C.I. I. Pigment Greens 7, 36 and 58 can be mentioned.
  • yellow pigment examples include C.I. I. Pigment Yellow 1, 1: 1, 2, 3, 4, 5, 6, 9, 10, 12, 13, 14, 16, 17, 24, 31, 32, 34, 35, 35: 1, 36, 36: 1,37,37: 1,40,41,42,43,48,53,55,61,62,62: 1,63,65,73,74,75,81,83,87,93,94, 95, 97, 100, 101, 104, 105, 108, 109, 110, 111, 116, 117, 119, 120, 126, 127, 127: 1, 128, 129, 133, 134, 136, 138, 139, 142, 147, 148, 150, 151, 153, 154, 155, 157, 158, 159, 160, 161, 162, 163, 164, 165, 166, 167, 168, 169, 170, 172, 173, 174, 175, 176, 180, 181, 182, 183, 184, 185, 188, 189,
  • C.I. I. Pigment Yellow 83, 117, 129, 138, 139, 150, 154, 155, 180, 185, more preferably C.I. I. Pigment Yellow 83, 138, 139, 150, 180 can be mentioned.
  • orange pigments examples include C.I. I. Pigment Orange 1, 2, 5, 13, 16, 17, 19, 20, 21, 22, 23, 24, 34, 36, 38, 39, 43, 46, 48, 49, 61, 62, 64, 65, 67, 68, 69, 70, 71, 72, 73, 74, 75, 77, 78, 79 can be mentioned.
  • C.I. I. Pigment Orange 38, 64, 71 can be mentioned.
  • C.I. I. Pigment Violet 1, 1: 1, 2, 2: 2, 3, 3: 1, 3: 3, 5, 5: 1, 14, 15, 16, 19, 23, 25, 27, 29, 31, 32, 37, 39, 42, 44, 47, 49, 50 can be mentioned.
  • C.I. I. Pigment Violet 19, 23, 29 More preferably C.I. I. Pigment Violet 23, 29 can be mentioned.
  • a black coloring material can be used as the (d) coloring material.
  • the black color material may be a black color material alone or a mixture of red, green, blue and the like. These coloring materials can be appropriately selected from inorganic or organic pigments and dyes. Examples of the color materials that can be mixed and used to prepare the black color material include Victoria Pure Blue (42595), Auramine O (41000), Cachilon Brilliant Flavin (Basic 13), Rhodamine 6 GCP (45160), and Rhodamine B ( 45170), Safranin OK70: 100 (50240), Eriograusin X (42080), No.
  • black color material examples include carbon black, acetylene black, lamp black, bone black, graphite, iron black, aniline black, cyanine black, titanium black, perylene black, and lactam black.
  • carbon black is preferable from the viewpoint of light shielding rate and image characteristics.
  • Examples of the carbon black include the following carbon blacks.
  • black pigments for example, titanium black, aniline black, iron oxide-based black pigments, and organic pigments of three colors of red, green, and blue can be mixed and used as black pigments.
  • the pigment for example, barium sulfate, lead sulfate, titanium oxide, yellow lead, red iron oxide, and chromium oxide can be used.
  • a plurality of these various pigments can be used in combination.
  • a green pigment and a yellow pigment can be used in combination, or a blue pigment and a purple pigment can be used in combination for adjusting the chromaticity.
  • the average particle size of the pigment used in the present invention may be any as long as it can develop a desired color when used as a colored layer of a color filter, and is not particularly limited and varies depending on the type of pigment used. It is preferably in the range of about 100 nm, and more preferably in the range of 10 to 70 nm. When the average particle size of the pigment is in the above range, the color characteristics of the liquid crystal display device manufactured by using the photosensitive resin composition of the present invention tend to be high quality. When the pigment is carbon black, the average particle size is preferably 60 nm or less, more preferably 50 nm or less, and more preferably 20 nm or more.
  • the average particle size of the pigment can be determined by a method of directly measuring the size of the primary particles from an electron micrograph.
  • the minor axis diameter and the major axis diameter of each primary particle are measured, and the average thereof is taken as the particle size of the particle.
  • the volume (mass) of each particle is obtained by approximating it to a rectangular parallelepiped having the obtained particle size, and the volume average particle size is obtained and used as the average particle size.
  • TEM transmission electron microscope
  • SEM scanning electron microscope
  • the photosensitive resin composition of the present invention preferably contains at least a pigment as the (d) coloring material, but in addition, a dye may be used in combination as long as it does not affect the effect of the present invention.
  • a dye may be used in combination as long as it does not affect the effect of the present invention. Examples of dyes that can be used in combination include azo dyes, anthraquinone dyes, phthalocyanine dyes, quinoneimine dyes, quinoline dyes, nitro dyes, carbonyl dyes, and methine dyes.
  • azo dye examples include C.I. I. Acid Yellow 11, C.I. I. Acid Orange 7, C.I. I. Acid Red 37, C.I. I. Acid Red 180, C.I. I. Acid Blue 29, C.I. I. Direct Red 28, C.I. I. Direct Red 83, C.I. I. Direct Yellow 12, C.I. I. Direct Orange 26, C.I. I. Direct Green 28, C.I. I. Direct Green 59, C.I. I. Reactive Yellow 2, C.I. I. Reactive Red 17, C.I. I. Reactive Red 120, C.I. I. Reactive Black 5, C.I. I. Disperse Orange 5, C.I. I. Disperse thread 58, C.I. I. Disperse Blue 165, C.I. I. Basic Blue 41, C.I. I. Basic Red 18, C.I. I. Moldant Red 7, C.I. I. Moldant Yellow 5, C.I. I. Moldant Black 7 can be mentioned.
  • anthraquinone dyes examples include C.I. I. Bat Blue 4, C.I. I. Acid Blue 40, C.I. I. Acid Green 25, C.I. I. Reactive Blue 19, C.I. I. Reactive Blue 49, C.I. I. Disperse thread 60, C.I. I. Disperse Blue 56, C.I. I. Disperse blue 60 can be mentioned.
  • Examples of the phthalocyanine dye include C.I. I. Pad blue 5 can be mentioned.
  • Examples of the quinoneimine dye include C.I. I. Basic Blue 3, C.I. I. Basic blue 9 can be mentioned.
  • Examples of the quinoline dye include C.I. I. Solvent Yellow 33, C.I. I. Acid Yellow 3, C.I. I. Disperse Yellow 64 can be mentioned.
  • Examples of the nitro dye include C.I. I. Acid Yellow 1, C.I. I. Acid Orange 3, C.I. I. Disperse Yellow 42 can be mentioned.
  • the photosensitive resin composition of the present invention can be used for various purposes as described above, but excellent image forming property is particularly effective when used for forming a black matrix for a color filter. ..
  • a black color material such as carbon black or titanium black described above, or mix multiple types of color materials other than black and adjust to black. Just do it.
  • carbon black it is particularly preferable to use carbon black from the viewpoint of dispersion stability and light-shielding property.
  • the photosensitive resin composition of the present invention has a large effect of suppressing pin unevenness in a region where the density of the coloring material is high. Especially in recent years, it is necessary to increase the density of the coloring material in order to increase the degree of shading.
  • the content ratio of the (d) coloring material in the region where the effect is large is preferably 30% by mass or more, more preferably 40% by mass or more, and more preferably 50% by mass or more with respect to the total solid content of the photosensitive resin composition. More preferably, 52% by mass or more is particularly preferable. Further, from the viewpoint of image forming performance, 70% by mass or less is preferable, and 65% by mass or less is more preferable. The above upper and lower limits can be combined arbitrarily. For example, 30 to 70% by mass is preferable, 40 to 70% by mass is more preferable, 50 to 65% by mass is further preferable, and 52 to 65% by mass is particularly preferable.
  • a photosensitive resin composition having a high light-shielding property (optical density, OD value) can be obtained.
  • the optical density in the case of forming the above can be set to a value of 4.0 or more.
  • the optical density is more preferably 4.1 or more, still more preferably 4.2 or more.
  • the content ratio of (d) the coloring material is not particularly limited, but (a) 100 parts by mass of the alkali-soluble resin, preferably 20 parts by mass or more. It is more preferably 50 parts by mass or more, further preferably 100 parts by mass or more, still more preferably 120 parts by mass or more, particularly preferably 150 parts by mass or more, particularly preferably 180 parts by mass or more, and most preferably 200 parts by mass or more. Further, it is preferably 500 parts by mass or less, more preferably 300 parts by mass or less, and further preferably 250 parts by mass or less.
  • (D) By setting the content ratio of the coloring material to the lower limit value or more, it tends to be easy to suppress the decrease in the solubility of the unexposed portion in the developing solution, and by setting it to the upper limit value or less, the fine line during development tends to be suppressed. Adhesion tends to improve.
  • the above upper and lower limits can be combined arbitrarily. For example, 20 to 500 parts by mass is preferable, 50 to 500 parts by mass is more preferable, 100 to 500 parts by mass is further preferable, 120 to 300 parts by mass is more preferable, 150 to 300 parts by mass is particularly preferable, and 180 to 250 parts is particularly preferable. Parts by mass are particularly preferable, and parts by mass of 200 to 250 are most preferable.
  • the content ratio of carbon black is not particularly limited, but from the viewpoint of obtaining a cured film having a high light-shielding property, all of the photosensitive resin compositions. It is preferably 30% by mass or more, more preferably 40% by mass or more, further preferably 50% by mass or more, and particularly preferably 52% by mass or more with respect to the solid content. Further, from the viewpoint of image forming performance, 70% by mass or less is preferable, and 65% by mass or less is more preferable. The above upper and lower limits can be combined arbitrarily. For example, 30 to 70% by mass is preferable, 40 to 70% by mass is more preferable, 50 to 65% by mass is further preferable, and 52 to 65% by mass is particularly preferable.
  • the photosensitive resin composition of the present invention contains (e) a surfactant from the viewpoint of improving coatability and suppressing pin unevenness during hot plate drying.
  • the photosensitive resin composition of the present invention has a surface tension of a 0.5 mass% propylene glycol monomethyl ether acetate solution at 23 ° C. (hereinafter, simply referred to as "surface tension") in order to suppress pin unevenness during hot plate drying.
  • a surface active agent (e1) having a value of 23.0 mN / m or less.
  • the surfactant (e1) is not particularly limited as long as the surface tension is 23.0 mN / m or less, but from the viewpoint of suppressing pin unevenness, a silicone-based surfactant and a fluorine-based surfactant are preferable, and a fluorine-based surfactant is preferable.
  • Surfactants are particularly preferred.
  • surfactant (e1) various surfactants such as anionic, cationic, nonionic and amphoteric surfactants can be used. Nonionic surfactants are preferred because they are less likely to adversely affect properties.
  • surfactant (e1) examples include F-559 (manufactured by DIC Corporation, surface tension: 22.5 mN / m).
  • the (e) surfactant in the present invention may contain other surfactants in addition to the surfactant (e1) for the purpose of adjusting the coatability.
  • examples of other surfactants include BYK-330 (manufactured by Big Chemie, surface tension: 24.4 mN / m), F-475 (manufactured by DIC, surface tension: 25.4 mN / m), F-554 (manufactured by DIC). DIC, surface tension: 23.3 mN / m).
  • the other surfactant one type may be used, or two or more types may be used in combination in any combination and ratio.
  • the surface tension of the surfactant is measured by a suspension method under the condition of 23 ° C. using a surface tensiometer and a solution prepared by adding 0.5% by mass of the surfactant to a propylene glycol monomethyl ether acetate solution. can do. Further, the d / D method can be used as the analysis method.
  • the content ratio of the surfactant is not particularly limited, but is preferably 0.01% by mass or more, more preferably 0.05% by mass or more, and 0.1% by mass, based on the total solid content of the photosensitive resin composition.
  • the above is more preferable, and 0.15% by mass or more is particularly preferable.
  • 1.0% by mass or less is preferable, 0.7% by mass or less is more preferable, 0.5% by mass or less is further preferable, and 0.3% by mass or less is particularly preferable.
  • Pin unevenness tends to be suppressed by setting the value to the lower limit value or more, and sensitivity tends to improve by setting the value to the upper limit value or less.
  • the above upper and lower limits can be combined arbitrarily. For example, 0.01 to 1.0% by mass is preferable, 0.05 to 0.7% by mass is more preferable, 0.1 to 0.5% by mass is further preferable, and 0.15 to 0.3% by mass is particularly preferable. preferable.
  • the content ratio of the surfactant (e1) is not particularly limited, but is preferably 0.01% by mass or more, more preferably 0.05% by mass or more, based on the total solid content of the photosensitive resin composition. , 0.1% by mass or more is more preferable, and 0.15% by mass or more is particularly preferable. Further, it is preferably 1.0% by mass or less, more preferably 0.7% by mass or less, further preferably 0.5% by mass or less, and more preferably 0.3% by mass or less. Especially preferable.
  • By setting the value to the lower limit or higher pin unevenness during hot plate drying tends to be suppressed. Further, the resist sensitivity tends to be improved by setting the value to the upper limit or less.
  • the above upper and lower limits can be combined arbitrarily. For example, 0.01 to 1.0% by mass is preferable, 0.05 to 0.7% by mass is more preferable, 0.1 to 0.5% by mass is further preferable, and 0.15 to 0.3% by mass is particularly preferable. preferable.
  • the content ratio of the surfactant (e1) with respect to the total content of the surfactant is preferably 10% by mass or more, more preferably 30% by mass or more, still more preferably 50% by mass or more, and particularly preferably. Is 90% by mass or more. Moreover, it is 100% by mass or less. By setting the value to the lower limit or higher, pin unevenness during hot plate drying tends to be suppressed.
  • the above upper and lower limits can be combined arbitrarily. For example, 10 to 100% by mass is preferable, 30 to 100% by mass is more preferable, 50 to 100% by mass is further preferable, and 90 to 100% by mass is particularly preferable.
  • a dispersant it is preferable to include a dispersant because it is important to finely disperse the coloring material and stabilize the dispersed state thereof in order to ensure the stability of quality.
  • a polymer dispersant having a functional group is preferable, and further, from the viewpoint of dispersion stability, a carboxy group, a phosphoric acid group, a sulfonic acid group, or a base thereof; a primary, secondary or tertiary amino group.
  • a polymer dispersant having a functional group such as a quaternary ammonium base; a group derived from a nitrogen-containing heterocycle such as pyridine, pyrimidine, or pyrazine; is preferable.
  • Polymer dispersants having basic functional groups such as primary, secondary or tertiary amino groups; quaternary ammonium bases; groups derived from nitrogen-containing heterocycles such as pyridine, pyrimidine, pyrazine; etc. are particularly preferred.
  • a polymer dispersant having a basic functional group By using a polymer dispersant having a basic functional group, the dispersibility can be improved and a high light-shielding property tends to be achieved.
  • polymer dispersant examples include urethane dispersants, acrylic dispersants, polyethyleneimine dispersants, polyallylamine dispersants, dispersants consisting of monomers having amino groups and macromonomers, and polyoxyethylene alkyl ethers.
  • examples thereof include dispersants, polyoxyethylene diester dispersants, polyether phosphate dispersants, polyester phosphate dispersants, sorbitan aliphatic ester dispersants, and aliphatic modified polyester dispersants.
  • dispersant examples include EFKA (registered trademark, manufactured by EFKA), Disperbyk (registered trademark, manufactured by Big Chemie), and Disparon (registered trademark, manufactured by Kusumoto Kasei Co., Ltd.) under the trade names.
  • SOLPERSE registered trademark, manufactured by Lubrizol
  • KP manufactured by Shin-Etsu Chemical Co., Ltd.
  • Polyflow or Floren registered trademark, manufactured by Kyoeisha Chemical Co., Ltd.
  • Azisper registered trademark, manufactured by Ajinomoto Fine Techno Co., Ltd.
  • One type of polymer dispersant may be used alone, or two or more types may be used in combination.
  • the dispersant preferably contains a urethane-based polymer dispersant having a basic functional group and / or an acrylic polymer dispersant. Urethane-based polymer dispersants are particularly preferable in terms of fine wire adhesion. From the viewpoint of dispersibility and storage stability, the dispersant preferably contains a polymer dispersant having a basic functional group and having a polyester and / or a polyether bond.
  • the weight average molecular weight (Mw) of the polymer dispersant is preferably 700 or more, more preferably 1000 or more, preferably 100,000 or less, more preferably 50,000 or less, still more preferably 30,000 or less. Is. By setting the value to the upper limit or less, the alkali developability tends to be good even when the pigment concentration is high.
  • the above upper and lower limits can be combined arbitrarily. For example, 700 to 100,000 is preferable, 700 to 50,000 is more preferable, and 1,000 to 30,000 is even more preferable.
  • Disperbyk 160 to 167, 182 series all urethane-based
  • Disperbyk2000, 2001 all acrylic-based
  • Disperbyk 167, 182 is mentioned as a particularly preferable polymer dispersant having a basic functional group and having a polyester and / or a polyether bond and having a weight average molecular weight of 30,000 or less.
  • urethane-based polymer dispersant examples include a polyisocyanate compound, a compound having one or two hydroxyl groups in the molecule and a number average molecular weight of 300 to 10,000, and active hydrogen and a tertiary amino group in the same molecule.
  • examples thereof include a dispersed resin having a weight average molecular weight of 1,000 to 200,000, which is obtained by reacting with a compound having a weight average of 1,000 to 200,000.
  • polyisocyanate compound examples include aromatics such as paraphenylenediocyanate, 2,4-tolylene diisocyanate, 2,6-tolylene diisocyanate, 4,4'-diphenylmethane diisocyanate, naphthalene-1,5-diisocyanate, and trizine diisocyanate.
  • Diisocyanate Diisocyanate; aliphatic diisocyanates such as hexamethylene diisocyanate, lysine methyl ester diisocyanate, 2,4,4-trimethylhexamethylene diisocyanate, dimerate diisocyanate; isophorone diisocyanate, 4,4'-methylenebis (cyclohexylisocyanate), ⁇ , ⁇ '- Alicyclic diisocyanates such as diisocinatedimethylcyclohexane; aliphatic diisocyanates having aromatic rings such as xylylene diisocyanate, ⁇ , ⁇ , ⁇ ', ⁇ '-tetramethylxylylene diisocyanate; lysine ester triisocyanates, 1,6.
  • aliphatic diisocyanates such as hexamethylene diisocyanate, lysine methyl ester diisocyanate, 2,4,4-trimethylhexamethylene diisocyanate,
  • 11-Undecantriisocyanate 1,8-diisocyanate-4-isocyanatemethyloctane, 1,3,6-hexamethylenetriisocyanate, bicycloheptantriisocyanate, tris (isocyanatephenylmethane), tris (isocyanatephenyl) thiophosphate, etc.
  • Triisocyanates these trimers, water adducts, and polyol adducts thereof.
  • a trimer of organic diisocyanate is preferable, and a trimer of tolylene diisocyanate and a trimer of isophorone diisocyanate are particularly preferable. These may be used alone or in combination of two or more.
  • an appropriate trimerization catalyst such as a tertiary amine, a phosphine, an alkoxide, a metal oxide, or a carboxylate is used to prepare an isocyanate group of a polyisocyanate compound.
  • a method of partially trimerizing, stopping the trimerization by adding a catalytic poison, and then removing the unreacted polyisocyanate by solvent extraction and thin film distillation to obtain the desired isocyanurate group-containing polyisocyanate can be mentioned. ..
  • polyether glycol As a compound having one or two hydroxyl groups in the same molecule and having a number average molecular weight of 300 to 10,000, for example, polyether glycol, polyester glycol, polycarbonate glycol, polyolefin glycol, and one-terminal hydroxyl group of these compounds are carbon. Examples thereof include those which are alkoxylated with an alkyl group having a number of 1 to 25, and mixtures of two or more of these.
  • polyether glycol examples include a polyether diol, a polyether ester diol, and a mixture of two or more of these.
  • polyether diol examples include polyether diols obtained by using alkylene oxide alone or in copolymerization, for example, polyethylene glycol, polypropylene glycol, polyethylene-propylene glycol, polyoxytetramethylene glycol, polyoxyhexamethylene glycol, and polyoxyoctamethylene. Glycols and mixtures of two or more thereof can be mentioned.
  • polyether ester diol a polyether ester diol obtained by reacting an ether group-containing diol or a mixture with other glycols with a dicarboxylic acid or an anhydride thereof, or by reacting a polyester glycol with an alkylene oxide, for example.
  • Poly (polyoxytetramethylene) adipate a polyether ester diol obtained by reacting an ether group-containing diol or a mixture with other glycols with a dicarboxylic acid or an anhydride thereof, or by reacting a polyester glycol with an alkylene oxide, for example.
  • Poly (polyoxytetramethylene) adipate Poly (polyoxytetramethylene) adipate.
  • polyether glycol polyethylene glycol, polypropylene glycol, polyoxytetramethylene glycol or a compound in which one terminal hydroxyl group of these compounds is alkoxylated with an alkyl group having 1 to 25 carbon atoms is preferable.
  • polyester glycols examples include dicarboxylic acids (succinic acid, glutaric acid, adipic acid, sebacic acid, fumaric acid, maleic acid, phthalic acid, etc.) or their anhydrides and glycols (ethylene glycol, diethylene glycol, triethylene glycol, propylene glycol, etc.).
  • dicarboxylic acids succinic acid, glutaric acid, adipic acid, sebacic acid, fumaric acid, maleic acid, phthalic acid, etc.
  • glycols ethylene glycol, diethylene glycol, triethylene glycol, propylene glycol, etc.
  • the polyester glycol polycaprolactone glycol or polycaprolactone using an alcohol having 1 to 25 carbon atoms as an initiator is preferable.
  • polycarbonate glycol examples include poly (1,6-hexylene) carbonate and poly (3-methyl-1,5-pentylene) carbonate.
  • polyolefin glycol examples include polybutadiene glycol, hydrogenated polybutadiene glycol, and hydrogenated polyisoprene glycol. These may be used alone or in combination of two or more.
  • the number average molecular weight of a compound having one or two hydroxyl groups in the same molecule and having a number average molecular weight of 300 to 10,000 is preferably 500 to 6,000, more preferably 1,000 to 4,000.
  • Active hydrogen in a compound having active hydrogen and a tertiary amino group in the same molecule that is, a hydrogen atom directly bonded to an oxygen atom, a nitrogen atom or a sulfur atom is a functional group such as a hydroxyl group, an amino group or a thiol group.
  • the hydrogen atom in the above is mentioned, and among them, the hydrogen atom of an amino group, particularly a primary amino group is preferable.
  • the tertiary amino group in the compound having an active hydrogen and a tertiary amino group in the same molecule is not particularly limited, but is, for example, an amino group having an alkyl group having 1 to 4 carbon atoms; nitrogen-containing such as an imidazole ring and a triazole ring.
  • a heterocyclic structure can be mentioned.
  • Examples of compounds having active hydrogen and a tertiary amino group in the same molecule include N, N-dimethyl-1,3-propanediamine, N, N-diethyl-1,3-propanediamine, N, N-dipropyl.
  • the nitrogen-containing heterocyclic structure of the tertiary amino group in the compound having active hydrogen and a tertiary amino group in the same molecule includes a pyrazole ring, an imidazole ring, a triazole ring, a tetrazole ring, an indole ring, a carbazole ring, an indazole ring, and benz.
  • Nitrogen-containing hetero 5-membered ring such as imidazole ring, benzotriazole ring, benzoxazole ring, benzothiazole ring, benzothiazol ring; Nitrogen hetero 6-membered ring; As the nitrogen-containing heterocyclic structure, an imidazole ring and a triazole ring are preferable.
  • Examples of the compound having an imidazole ring and an amino group include 1- (3-aminopropyl) imidazole, histidine, 2-aminoimidazole, 1- (2-aminoethyl) imidazole and the like.
  • Examples of the compound having a triazole ring and an amino group include 3-amino-1,2,4-triazole and 5- (2-amino-5-chlorophenyl) -3-phenyl-1H-1,2,4-triazole.
  • Compounds having active hydrogen and a tertiary amino group in the same molecule include N, N-dimethyl-1,3-propanediamine, N, N-diethyl-1,3-propanediamine, 1- (3-aminopropyl). ) Imidazole and 3-amino-1,2,4-triazole are preferable. These may be used alone or in combination of two or more.
  • the preferred blending ratio of the raw materials for producing the urethane-based polymer dispersant is 100 parts by mass of the polyisocyanate compound; a compound having one or two hydroxyl groups in the same molecule and having a number average molecular weight of 300 to 10,000. 10 to 200 parts by mass, preferably 20 to 190 parts by mass, more preferably 30 to 180 parts by mass; 0.2 to 25 parts by mass, preferably 0. 3 to 24 parts by mass;
  • the urethane-based polymer dispersant can be produced according to a known method for producing a polyurethane resin.
  • Solvents that can be used in the production of urethane-based polymer dispersants include ketones such as acetone, methyl ethyl ketone, methyl isobutyl ketone, cyclopentanone, cyclohexanone, and isophorone; esters such as ethyl acetate, butyl acetate, and cellosolve acetate; benzene, Hydrocarbons such as toluene, xylene and hexane; some alcohols such as diacetone alcohol, isopropanol, second butanol and tertiary butanol; chlorides such as methylene chloride and chloroform; ethers such as tetrahydrofuran and diethyl ether; Aprotonic polar solvents such as dimethylformamide, N-methylpyrrolidone,
  • a urethanization reaction catalyst can be used in the production of the urethane-based polymer dispersant.
  • the urethanization reaction catalyst include tin-based catalysts such as dibutyltin dilaurate, dioctyltin dilaurate, dibutyltin dioctate, and stanas octoate; iron-based catalysts such as iron acetylacetonate and ferric chloride; triethylamine and tri.
  • tertiary amine-based catalysts such as ethylenediamine;
  • the amine value of the dispersant is expressed by the amount of base per 1 g of solid content excluding the solvent in the dispersant sample and the equivalent mass of KOH, and can be measured by the following method. Weigh 0.5-1.5 g of the dispersant sample into a 100 mL beaker and dissolve in 50 mL of acetic acid. This solution is neutralized and titrated with 0.1 mol / L HClO 4 (perchloric acid) acetic acid solution using an automatic titrator equipped with a pH electrode. The amine value is calculated by the following formula with the inflection point of the titration pH curve as the titration end point.
  • Amine value [mgKOH / g] (561 ⁇ V) / (W ⁇ S) [However, W: Dispersant sample weighing amount [g], V: Titration quantification at the end point of titration [mL], S: Solid content concentration [mass%] of the dispersant sample. ]
  • the amount of the compound having an active hydrogen and a tertiary amino group in the same molecule is preferably controlled in the range of 1 to 100 mgKOH / g, more preferably 5 to 95 mgKOH / g in terms of the amine value after the reaction. ..
  • the amine value is set to the lower limit value or more, the dispersibility tends to be good, and when the amine value is set to the upper limit value or less, the developability tends to be good.
  • the isocyanate group remains in the polymer dispersant, it is preferable to further consume the isocyanate group by using an alcohol or an amino compound because the stability of the product with time becomes high.
  • the weight average molecular weight (Mw) of the urethane-based polymer dispersant is preferably 1,000 to 200,000, more preferably 2,000 to 100,000, and even more preferably 3,000 to 50,000. Further, it is even more preferably 1,000 to 30,000, particularly preferably 2,000 to 30,000, and particularly preferably 3,000 to 30,000. When it is at least the above lower limit value, the dispersibility and dispersion stability tend to be good, and when it is at least the above upper limit value, the solubility tends to be good. In particular, when the weight average molecular weight of the urethane-based polymer dispersant is 30,000 or less, the alkali developability tends to be good even when the pigment concentration is high.
  • Preferred commercially available urethane dispersants include, for example, Disperbyk 167, 182 (Big Chemie).
  • the content ratio of the dispersant is preferably 50% by mass or less, more preferably 30% by mass or less, still more preferably 30% by mass, based on the total solid content of the photosensitive resin composition. Is 20% by mass or less, preferably 1% by mass or more, more preferably 3% by mass or more, still more preferably 5% by mass or more, still more preferably 7% by mass or more, and particularly preferably 10% by mass or more.
  • the above upper and lower limits can be combined arbitrarily. For example, 1 to 50% by mass is preferable, 3 to 50% by mass is more preferable, 5 to 30% by mass is further preferable, 7 to 30% by mass is further preferable, and 10 to 20% by mass is particularly preferable.
  • the content ratio of the dispersant is preferably 5 parts by mass or more, more preferably 10 parts by mass or more, and further, with respect to 100 parts by mass of (d) the coloring material. It is preferably 15 parts by mass or more, preferably 200 parts by mass or less, more preferably 80 parts by mass or less, and further preferably 50 parts by mass or less.
  • the value is equal to or higher than the lower limit, it tends to be easy to secure sufficient dispersibility.
  • the value is not more than the upper limit, the color density, sensitivity, film forming property and the like tend to be sufficient without reducing the ratio of other components.
  • the above upper and lower limits can be combined arbitrarily. For example, 5 to 200 parts by mass is preferable, 10 to 80 parts by mass is more preferable, and 15 to 50 parts by mass is further preferable.
  • the photosensitive resin composition of the present invention comprises (a) an alkali-soluble resin, (b) a photopolymerizable monomer, (c) a photopolymerization initiator, (e) a surfactant, and various materials used as necessary. However, it may be in a state of being dissolved or dispersed in an organic solvent.
  • an organic solvent a solvent having a boiling point of 100 to 300 ° C. (under pressure 1013.25 [hPa] conditions; hereinafter, the boiling points are all the same) is preferable.
  • a solvent having a boiling point of 120 to 280 ° C. is more preferable.
  • organic solvent examples include the following. Ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monopropyl ether, ethylene glycol monobutyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol mono-n-butyl ether, propylene glycol-t-butyl ether, diethylene glycol monomethyl Ether, diethylene glycol monoethyl ether, diethylene glycol mono-n-butyl ether, methoxymethylpentanol, dipropylene glycol monoethyl ether, dipropylene glycol monomethyl ether, 3-methyl-3-methoxybutanol, triethylene glycol monomethyl ether, triethylene glycol Glycol monoalkyl ethers such as monoethyl ether, tripropylene glycol methyl ether;
  • Glycoldialkyl ethers such as ethylene glycol dimethyl ether, ethylene glycol diethyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol dipropyl ether, diethylene glycol dibutyl ether, dipropylene glycol dimethyl ether; Ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, ethylene glycol mono-n-butyl ether acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monopropyl ether acetate, propylene glycol monobutyl ether acetate, methoxybutyl Acetate, 3-methoxybutyl acetate, methoxypentyl acetate, diethylene glycol monomethyl ether acetate, diethylene glycol monoethyl ether acetate, diethylene glycol mono-n
  • Glycol diacetates such as ethylene glycol diacetate, 1,3-butylene glycol diacetate, 1,6-hexanol diacetate; Alkyl acetates such as cyclohexanol acetate; Ethers such as amyl ether, diethyl ether, dipropyl ether, diisopropyl ether, dibutyl ether, diamil ether, ethylisobutyl ether, dihexyl ether; Like acetone, methyl ethyl ketone, methyl amyl ketone, methyl isopropyl ketone, methyl isoamyl ketone, diisopropyl ketone, diisobutyl ketone, methyl isobutyl ketone, cyclohexanone, ethyl amyl ketone, methyl butyl ketone, methylhexyl ketone, methylnonyl
  • Ketones Monohydric or polyhydric alcohols such as ethanol, propanol, butanol, hexanol, cyclohexanol, ethylene glycol, propylene glycol, butanediol, diethylene glycol, dipropylene glycol, triethylene glycol, methoxymethylpentanol, glycerin, benzyl alcohol; Aliphatic hydrocarbons such as n-pentane, n-octane, diisobutylene, n-hexane, hexene, isoprene, dipentene, dodecane; Alicyclic hydrocarbons such as cyclohexane, methylcyclohexane, methylcyclohexene, bicyclohexyl;
  • Aromatic hydrocarbons such as benzene, toluene, xylene, cumene; Amilformate, ethylformate, ethyl acetate, butyl acetate, propyl acetate, amyl acetate, methylisobutyrate, ethylene glycol acetate, ethylpropionate, propylpropionate, butyl butyrate, isobutyl butyrate, methyl isobutyrate, ethyl Caprilate, butyl stearate, ethyl benzoate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, propyl 3-methoxypropionate, 3-methoxypropionic acid Chain or cyclic esters such as butyl, ⁇ -butyrolactone; Alkoxycarboxylic acids such as 3-methoxyprop
  • Halogenated hydrocarbons such as butyl chloride, amilk chloride; Etheretones such as methoxymethylpentanone; Nitriles such as acetonitrile and benzonitrile.
  • solvents examples include Mineral Spirit, Barsol # 2, Apco # 18 Solvent, Apco Thinner, and Sokal Solvent No. 1 and No. 2.
  • Solvento # 150 Shell TS28 Solvent, Carbitol, Ethyl Carbitol, Butyl Carbitol, Methyl Cellosolve (“Cellosolve” is a registered trademark; the same shall apply hereinafter), Ethyl Cellosolve, Ethyl Cellosolve Acetate, Methyl Cellosolve Acetate, Diglime (any of them). Also the product name).
  • the solvent may be used alone or in combination of two or more.
  • an organic solvent having a boiling point of 100 to 250 ° C. is preferable.
  • An organic solvent having a boiling point of 120 to 230 ° C. is more preferable.
  • Glycol alkyl ether acetates are preferable because they have a good balance of coatability, surface tension and the like, and the solubility of each component of the photosensitive resin composition is relatively high.
  • Glycol alkyl ether acetates may be used alone or in combination with other organic solvents.
  • Glycol monoalkyl ethers are preferable as other organic solvents that may be used in combination.
  • Propylene glycol monomethyl ether is more preferred because of the solubility of the constituents in the composition.
  • Glycol monoalkyl ethers have high polarity, and if the amount added is too large, the pigment tends to aggregate, and the viscosity of the photosensitive resin composition obtained later tends to increase, and the storage stability tends to decrease.
  • the proportion of glycol monoalkyl ethers in the mixture is preferably 5% by mass to 30% by mass, more preferably 5% by mass to 20% by mass.
  • an organic solvent having a boiling point of 200 ° C. or higher (hereinafter, may be referred to as “high boiling point solvent”) may be used in combination.
  • high boiling point solvent an organic solvent having a boiling point of 200 ° C. or higher
  • the photosensitive resin composition becomes difficult to dry, but there is an effect of preventing the uniformly dispersed state of the pigment in the composition from being destroyed by rapid drying. For example, it has an effect of preventing the generation of foreign matter defects due to precipitation and solidification of coloring materials and the like at the tip of the slit nozzle.
  • dipropylene glycol methyl ether acetate diethylene glycol mono-n-butyl ether acetate, diethylene glycol monoethyl ether acetate, 1,4-butanediol diacetate, 1,3-butanediol diacetate, and 1,3-butanediol diacetate are highly effective when used in combination.
  • Butylene glycol diacetate, triacetin and 1,6-hexanediol diacetate are preferred.
  • the content ratio of the high boiling point solvent in the organic solvent is preferably 0% by mass to 50% by mass, more preferably 0.5% by mass to 40% by mass, and particularly preferably 1% by mass to 30% by mass.
  • the drying temperature of the composition By setting it to the above lower limit value or more, for example, it tends to be possible to suppress the precipitation and solidification of coloring materials and the like at the tip of the slit nozzle to cause foreign matter defects, and by setting it to the above upper limit value or less, the drying temperature of the composition. There is a tendency that problems such as poor tact in the vacuum drying process and pin marks of prebake can be suppressed in the color filter manufacturing process.
  • the content ratio of the organic solvent is not particularly limited, but the total solid content in the photosensitive resin composition is preferable from the viewpoint of ease of application and viscosity stability. 5% by mass or more, more preferably 8% by mass or more, further preferably 10% by mass or more, preferably 40% by mass or less, more preferably 30% by mass or less, still more preferably 25% by mass or less, particularly preferably 20. It is less than mass%.
  • the above upper and lower limits can be combined arbitrarily. For example, 5 to 40% by mass is preferable, 5 to 30% by mass is more preferable, 8 to 25% by mass is further preferable, and 10 to 20% by mass is particularly preferable.
  • thiols for example, thiols, adhesion improvers, pigment derivatives, development improvers, ultraviolet absorbers, and antioxidants can be appropriately added to the photosensitive resin composition of the present invention.
  • the photosensitive resin composition of the present invention preferably contains thiols in order to increase the sensitivity and the adhesion to the substrate.
  • thiols include hexanedithiol, decandithiol, 1,4-dimethylmercaptobenzene, butanediol bisthiopropionate, butanediol bisthioglycolate, ethylene glycol bisthioglycolate, and trimethylolpropanetristhioglycolate.
  • Butanediol Bisthiopropionate Trimethylol Propane Tristhiopropionate, Trimethylol Propane Tristhio Glycolate, Pentaerythritol Tetrakissthiopropionate, Pentaerythritol Tetrakissthioglycolate, Trishydroxyethyl Tristhiopropionate, Ethylene glycol bis (3-mercaptobutyrate), propylene glycol bis (3-mercaptobutyrate) (PGMB), butanediol bis (3-mercaptobutyrate), 1,4-bis (3-mercaptobutyryloxy) butane (Product name: Karenz MT BD1, manufactured by Showa Denko Co., Ltd.), Butanediol Trimethylol Propanthris (3-mercaptobutyrate), Pentaerythritol tetrakis (3-mercaptobutyrate) (Product name: Karenz MT PE
  • thiols polyfunctional thiols such as PGMB, TPMB, TPMIB, Karenz MT BD1, Karenz MT PE1 and Karenz MT NR1 are preferable, Karenz MT BD1, Karenz MT PE1 and Karenz MT NR1 are more preferable, and Karenz MT PE1 is particularly preferable. preferable.
  • the content ratio of the thiols is preferably 0.1% by mass or more, more preferably 0.3% by mass or more, still more preferably, with respect to the total solid content of the photosensitive resin composition of the present invention. Is 0.5% by mass or more, preferably 10% by mass or less, and more preferably 5% by mass or less.
  • the value By setting the value to the lower limit or more, there is a tendency that the decrease in sensitivity can be suppressed. Further, when the value is not more than the upper limit, the storage stability tends to be good.
  • the above upper and lower limits can be combined arbitrarily. For example, 0.1 to 10% by mass is preferable, 0.3 to 10% by mass is more preferable, and 0.5 to 5% by mass is further preferable.
  • an adhesion improver may be contained, and examples thereof include a silane coupling agent and a titanium coupling agent, and a silane coupling agent is particularly preferable.
  • the silane coupling agent include KBM-402, KBM-403, KBM-502, KBM-5103, KBE-9007, X-12-1048, X-12-1050 (manufactured by Shinetsu Silicone Co., Ltd.), Z-6040. , Z-6043, Z-6062 (manufactured by Toray Dow Corning).
  • the silane coupling agent one type may be used, or two or more types may be used in combination in any combination and ratio.
  • An adhesion improver other than the silane coupling agent may be contained in the photosensitive resin composition of the present invention, and examples thereof include a phosphoric acid-based adhesion improver.
  • (meth) acryloyloxy group-containing phosphates are preferable, and (meth) acryloyloxy group-containing phosphates represented by the following general formulas (g1), (g2), and (g3) are preferable.
  • R 51 independently represents a hydrogen atom or a methyl group
  • m are independently 1, 2 respectively. Or it is 3.
  • adhesion improvers examples include TEGO * Add Bond LTH (manufactured by Evonik).
  • TEGO * Add Bond LTH manufactured by Evonik
  • phosphoric acid-based adhesion improver and other adhesion improvers one type may be used alone or two or more types may be used in combination.
  • the content ratio of the adhesion improver is not particularly limited, but is preferably 0.01% by mass or more in the total solid content of the photosensitive resin composition, and 0. 1% by mass or more is more preferable, 0.5% by mass or more is further preferable, 5.0% by mass or less is preferable, 3.0% by mass or less is more preferable, and 2.0% by mass or less is further preferable. 5.5% by mass or less is particularly preferable.
  • the value is equal to or higher than the lower limit, the adhesion tends to be improved. Further, when the value is not more than the upper limit value, the developability tends to be good.
  • the above upper and lower limits can be combined arbitrarily. For example, 0.01 to 5.0% by mass is preferable, 0.01 to 3.0% by mass is more preferable, 0.1 to 2.0% by mass is further preferable, and 0.5 to 1.5% by mass is preferable. Especially preferable.
  • the photosensitive resin composition of the present invention may contain a pigment derivative in order to improve dispersibility and storage stability.
  • Pigment derivatives include, for example, azo-based, phthalocyanine-based, quinacridone-based, benzimidazolone-based, quinophthalone-based, isoindoleinone-based, dioxazine-based, anthraquinone-based, indanthrone-based, perylene-based, perinone-based, and diketopyrrolopyrrole. Examples include systems and dioxazine-based derivatives.
  • a phthalocyanine-based derivative and a quinophthalone-based derivative are preferable.
  • a substituent such as a sulfonic acid group, a sulfonamide group, a quaternary salt of a sulfonamide group, a phthalimidemethyl group, a dialkylaminoalkyl group, a hydroxyl group, a carboxy group or an amide group is directly on the pigment skeleton or an alkyl group. Examples thereof include derivatives bonded via an aryl group, a heterocyclic group and the like.
  • the substituent of the pigment derivative is preferably a sulfonic acid group.
  • one pigment skeleton may be substituted with a plurality of substituents.
  • the pigment derivative examples include a sulfonic acid derivative of phthalocyanine, a sulfonic acid derivative of quinophthalone, a sulfonic acid derivative of anthraquinone, a sulfonic acid derivative of quinacridone, a sulfonic acid derivative of diketopyrrolopyrrole, and a sulfonic acid derivative of dioxazine. These may be used alone or in combination of two or more.
  • the content ratio of the pigment derivative is not particularly limited, but is preferably 0.1% by mass or more, preferably 0.5% by mass, based on the total solid content of the photosensitive resin composition.
  • mass or more is more preferable, 1.0% by mass or more is further preferable, 10% by mass or less is preferable, and 5% by mass or less is more preferable.
  • the value is equal to or higher than the lower limit, the dispersion stability tends to be improved. Further, when the value is not more than the upper limit value, the developability tends to be good.
  • the above upper and lower limits can be combined arbitrarily. For example, 0.1 to 10% by mass is preferable, 0.5 to 10% by mass is more preferable, and 1.0 to 5% by mass is further preferable.
  • the photosensitive resin composition of the present invention can be suitably used for forming a black matrix, and from such a viewpoint, it is preferably black.
  • the optical density (OD) per 1 ⁇ m of the film thickness of the coating film on which the photosensitive resin composition of the present invention is cured is preferably 4.0 or more, more preferably 4.1 or more, still more preferably 4.2 or more. Further, it is preferably 6.0 or less.
  • the optical density means a transmission optical density in which the spectral sensitivity characteristic of the light receiving portion is indicated by ISO visual density in the ISO 5-3 standard.
  • the light source the A light source specified by the CIE (Commission Internationale de l'Eclairage) is used.
  • CIE Commission Internationale de l'Eclairage
  • X-Rite 361T (V) manufactured by Sakata Inx Corporation can be mentioned.
  • the photosensitive resin composition of the present invention is produced by a conventional method.
  • the coloring material is preferably dispersed in advance using a paint conditioner, a sand grinder, a ball mill, a roll mill, a stone mill, a jet mill, a homogenizer or the like. Since the (d) coloring material is made into fine particles by the dispersion treatment, the coating characteristics of the photosensitive resin composition are improved.
  • a black color material is used as the color material, it contributes to the improvement of the light-shielding ability.
  • the dispersion treatment it is preferable to carry out the dispersion treatment in a system in which (d) a coloring material, a solvent, and a dispersant as necessary, and (a) a part or all of the alkali-soluble resin are used in combination (hereinafter, a mixture to be subjected to the dispersion treatment, and a mixture).
  • the mixture obtained by the dispersion treatment may be referred to as "ink” or "pigment dispersion”).
  • a polymer dispersant as the dispersant because the obtained ink and the photosensitive resin composition are excellent in dispersion stability and thickening with time is suppressed.
  • the highly reactive components may be denatured due to the heat generated during the dispersion treatment. Therefore, in that case, it is preferable to carry out the dispersion treatment in a system containing a polymer dispersant.
  • the coloring material is dispersed with a sand grinder
  • glass beads or zirconia beads having a diameter of about 0.1 to 8 mm are preferably used.
  • the temperature is preferably in the range of 0 ° C to 100 ° C, more preferably in the range of room temperature to 80 ° C.
  • the dispersion time will be adjusted as appropriate because the appropriate time will vary depending on the composition of the liquid and the size of the dispersion treatment device.
  • the guideline for dispersion is to control the gloss of the ink so that the 20-degree mirror gloss (JIS Z8741) of the photosensitive resin composition is in the range of 100 to 200.
  • the dispersion treatment is not sufficient and rough pigment (coloring material) particles often remain, resulting in insufficient developability, adhesion, resolution and the like. there is a possibility.
  • the dispersion treatment is performed until the gloss value exceeds the above range, the pigment is crushed and a large number of ultrafine particles are generated, so that the dispersion stability tends to be impaired.
  • the ink obtained by the dispersion treatment and other components contained in the photosensitive resin composition are mixed to obtain a uniform solution.
  • the cured product of the present invention can be obtained by curing the photosensitive resin composition of the present invention.
  • the cured product obtained by curing the photosensitive resin composition can be suitably used as a member constituting a color filter such as a pixel, a black matrix or a colored spacer.
  • the black matrix of the present invention comprises the cured product of the present invention.
  • the black matrix of the present invention will be described according to the production method using the photosensitive resin composition of the present invention.
  • the material of the support for forming the black matrix is not particularly limited as long as it has an appropriate strength.
  • a transparent substrate is mainly used, and as the material, for example, polyester resin such as polyethylene terephthalate, polyolefin resin such as polypropylene and polyethylene, thermoplastic resin sheet such as polycarbonate, polymethylmethacrylate and polysulphon, and epoxy resin.
  • a heat-curable resin sheet such as an unsaturated polyester resin or a poly (meth) acrylic resin, or various types of glass. Among these, glass and heat-resistant resin are preferable from the viewpoint of heat resistance.
  • a transparent electrode such as ITO or IZO may be formed on the surface of the substrate. Other than the transparent substrate, it can be formed on the TFT array.
  • the thickness of the transparent substrate is preferably 0.05 to 10 mm, more preferably 0.1 to 7 mm.
  • the film thickness is preferably 0.01 to 10 ⁇ m, more preferably 0.05 to 5 ⁇ m.
  • the photosensitive resin composition of the present invention is applied on a transparent substrate, and a photomask is placed on a dried sample.
  • a black matrix is formed by image exposure, development, and heat curing or photocuring as required through a photomask.
  • the thickness of the coating film is preferably 0.2 to 10 ⁇ m, more preferably 0.5 to 6 ⁇ m, and even more preferably 1 to 4 ⁇ m as the film thickness after drying.
  • (3-2) Drying of coating film Drying of the coating film after applying the photosensitive resin composition to the substrate is performed by a vacuum drying method using a vacuum drying device and heating using a hot plate, an IR oven, or a convection oven.
  • the drying method is preferable. In the case of the heat drying method using a hot plate, it may be supported by a pin from the back surface of the substrate.
  • the conditions for heat drying can be appropriately selected according to the type of the solvent component, the performance of the dryer used, and the like.
  • the drying time is preferably selected in the range of 15 seconds to 5 minutes at a temperature of 40 to 200 ° C., more preferably at a temperature of 50 to 130 ° C., depending on the type of solvent component, the performance of the dryer used, and the like. It is selected in the range of 30 seconds to 3 minutes.
  • the higher the drying temperature the better the adhesiveness of the coating film to the transparent substrate. If the drying temperature is not too high, the decomposition of the alkali-soluble resin can be suppressed, and development defects can be suppressed without inducing thermal polymerization. Further, if the drying proceeds uniformly, the film thickness becomes uniform and the occurrence of unevenness can be suppressed.
  • Exposure Image exposure is performed by superimposing a negative mask pattern on a coating film of a photosensitive resin composition and irradiating light having a wavelength from the ultraviolet region to the visible region through the mask pattern.
  • exposure may be performed after forming an oxygen blocking layer such as a polyvinyl alcohol layer on the photopolymerizable coating film.
  • the light source used for the above image exposure is not particularly limited. Examples of the light source include lamp light sources such as xenon lamps, halogen lamps, tungsten lamps, high pressure mercury lamps, ultrahigh pressure mercury lamps, metal halide lamps, medium pressure mercury lamps, low pressure mercury lamps, and carbon arcs.
  • An optical filter can also be used when irradiating light of a specific wavelength for use.
  • a coating film made of a photosensitive resin composition is subjected to image exposure with the above-mentioned light source, and then an organic solvent or an aqueous solution containing a surfactant and an alkaline compound is applied.
  • an organic solvent or an aqueous solution containing a surfactant and an alkaline compound is applied.
  • an image can be formed and produced on the substrate.
  • the aqueous solution may further contain an organic solvent, a buffer, a complexing agent, a dye or a pigment.
  • alkaline compounds include sodium hydroxide, potassium hydroxide, lithium hydroxide, sodium carbonate, potassium carbonate, sodium hydrogencarbonate, potassium hydrogencarbonate, sodium silicate, potassium silicate, sodium metasilicate, sodium phosphate, and potassium phosphate.
  • Inorganic alkaline compounds such as sodium hydrogen phosphate, potassium hydrogen phosphate, sodium dihydrogen phosphate, potassium dihydrogen phosphate, ammonium hydroxide, mono-, di- or triethanolamine, mono-, di- or trimethylamine.
  • the surfactant examples include nonionic surfactants such as polyoxyethylene alkyl ethers, polyoxyethylene alkylaryl ethers, polyoxyethylene alkyl esters, sorbitan alkyl esters, and monoglyceride alkyl esters, and alkylbenzene sulfonic acids.
  • nonionic surfactants such as polyoxyethylene alkyl ethers, polyoxyethylene alkylaryl ethers, polyoxyethylene alkyl esters, sorbitan alkyl esters, and monoglyceride alkyl esters, and alkylbenzene sulfonic acids.
  • anionic surfactants such as salts, alkylnaphthalene sulfonates, alkyl sulfates, alkyl sulfonates and sulfosuccinic acid ester salts
  • amphoteric surfactants such as alkylbetaines and amino acids.
  • organic solvent examples include isopropyl alcohol, benzyl alcohol, ethyl cellosolve, butyl cellosolve, phenyl cellosolve, propylene glycol and diacetone alcohol.
  • the organic solvent may be used alone or in combination with an aqueous solution.
  • the conditions of the development process are not particularly limited, and the development temperature is 10 to 50 ° C., preferably 15 to 45 ° C., particularly preferably 20 to 40 ° C., and a dip development method, a spray development method, a brush development method, or an ultrasonic development method. It can be done by such a method.
  • thermosetting treatment or a photocuring treatment, preferably a thermosetting treatment.
  • the thermosetting treatment conditions at this time are selected in the range of 100 to 280 ° C., preferably 150 to 250 ° C., and the time is selected in the range of 5 to 60 minutes.
  • the height of the black matrix formed as described above is preferably 0.5 to 5 ⁇ m, more preferably 0.8 to 4 ⁇ m.
  • the optical density (OD) per 1 ⁇ m of the film thickness of the black matrix of the present invention is preferably 4.0 or more, more preferably 4.1 or more, still more preferably 4.2 or more. Further, it is preferably 6.0 or less. By setting the value to the lower limit or more, there is a tendency that sufficient light-shielding property can be ensured.
  • the above upper and lower limits can be combined arbitrarily. For example, 4.0 to 6.0 is preferable, 4.1 to 6.0 is more preferable, and 4.2 to 6.0 is even more preferable.
  • a photosensitive resin composition containing one of red, green, and blue coloring materials is applied onto a transparent substrate provided with a black matrix by the same process as in (3-1) to (3-5) above, and dried. After that, a photomask is superposed on the coating film, and a pixel image is formed through the photomask by image exposure, development, and if necessary, heat curing or photocuring to create a colored layer.
  • a color filter can be formed by performing this operation on each of the three color photosensitive resin compositions of red, green, and blue. These orders are not limited to the above.
  • the photosensitive resin composition of the present invention can also be used as a resist for a colored spacer in addition to the black matrix.
  • the spacer When the spacer is used for the TFT type LCD, the TFT may malfunction as a switching element due to the light incident on the TFT, and the colored spacer is used to prevent this.
  • Japanese Patent Application Laid-Open No. 8-234212 The publication describes that the spacer has a light-shielding property.
  • the colored spacer can be formed by the same method as the above-mentioned black matrix except that a mask for the colored spacer is used.
  • a color filter forms a transparent electrode such as ITO on an image in this state and is used as a part of parts such as a color display and a liquid crystal display device, but the surface is smooth. If necessary, a top coat layer such as polyamide or polyimide can be provided on the image in order to improve the properties and durability. Further, in some applications such as a plane alignment type drive system (IPS mode), a transparent electrode may not be formed.
  • IPS mode plane alignment type drive system
  • the image display device of the present invention has a black matrix of the present invention, a cured product of the present invention, or a cured product obtained by curing the photosensitive resin composition of the present invention.
  • the image display device is not particularly limited as long as it is a device that displays an image or a moving image. Examples of the image display device include a liquid crystal display device and an organic EL display.
  • the image display device of the present invention may be a liquid crystal display device and has the black matrix of the present invention.
  • the formation order and formation position of the color pixels and the black matrix are not particularly limited.
  • a liquid crystal display device usually forms an alignment film on a color filter, sprays a spacer on the alignment film, attaches the spacer to the facing substrate to form a liquid crystal cell, and injects liquid crystal into the formed liquid crystal cell. It is completed by connecting to the counter electrode.
  • the alignment film a resin film such as polyimide is suitable.
  • a gravure printing method and / or a flexographic printing method is usually adopted for forming the alignment film, and the thickness of the alignment film is several tens of nm. After the alignment film is cured by heat firing, it is surface-treated by irradiation with ultraviolet rays or treatment with a rubbing cloth to obtain a surface state in which the inclination of the liquid crystal can be adjusted.
  • a spacer having a size corresponding to the gap (gap) with the facing substrate is used, and a spacer having a size of 2 to 8 ⁇ m is preferable.
  • a photospacer (PS) of a transparent resin film can be formed on a color filter substrate by a photolithography method, and this can be used instead of the spacer.
  • the facing substrate an array substrate is usually used, and a TFT (thin film transistor) substrate is particularly suitable.
  • the gap for bonding to the facing substrate varies depending on the application of the liquid crystal display device, but is preferably selected in the range of 2 to 8 ⁇ m.
  • the parts other than the liquid crystal injection port are sealed with a sealing material such as epoxy resin.
  • the sealing material is cured by UV irradiation and / or heating, and the periphery of the liquid crystal cell is sealed.
  • the liquid crystal cell whose periphery is sealed is cut into panel units, then depressurized in a vacuum chamber, the liquid crystal injection port is immersed in the liquid crystal, and then the inside of the chamber leaks to inject the liquid crystal into the liquid crystal cell. ..
  • the degree of decompression in the liquid crystal cell is preferably 1 ⁇ 10 ⁇ 2 to 1 ⁇ 10 -7 Pa, but more preferably 1 ⁇ 10 -3 to 1 ⁇ 10 -6 Pa. Further, it is preferable to heat the liquid crystal cell at the time of depressurization, and the heating temperature is preferably 30 to 100 ° C, more preferably 50 to 90 ° C.
  • the warming retention at the time of depressurization is preferably in the range of 10 to 60 minutes, and then immersed in the liquid crystal display.
  • a liquid crystal display device (panel) is completed by sealing the liquid crystal injection port of the liquid crystal cell into which the liquid crystal is injected by curing the UV curable resin.
  • the type of liquid crystal is not particularly limited, and is a conventionally known liquid crystal such as an aromatic type, an aliphatic type, or a polycyclic compound, and may be any of a liotropic liquid crystal, a thermotropic liquid crystal, and the like.
  • a thermotropic liquid crystal a nematic liquid crystal, a smestic liquid crystal, a cholesteric liquid crystal and the like are known, but any of them may be used.
  • the image display device of the present invention may be an organic EL display and has the black matrix of the present invention.
  • the organic EL display having the black matrix of the present invention is produced, for example, as shown in FIG. 1, a pattern formed by the photosensitive resin composition (that is, pixels 20 and adjacent pixels) is formed on the transparent support substrate 10. A color filter in which a resin black matrix (not shown) provided between 20 is formed is produced, and an organic illuminant 500 is laminated on the color filter via an organic protective layer 30 and an inorganic oxide film 40. Thereby, the organic EL element 100 can be manufactured.
  • the resin black matrix is produced by using the photosensitive resin composition of the present invention.
  • a method of laminating the organic illuminant 500 a method of sequentially forming a transparent anode 50, a hole injection layer 51, a hole transport layer 52, a light emitting layer 53, an electron injection layer 54, and a cathode 55 on the upper surface of a color filter, or Examples thereof include a method of bonding the organic light emitter 500 formed on another substrate onto the inorganic oxide film 40.
  • the organic EL element 100 thus produced, for example, the method described in "Organic EL Display” (Ohmsha, August 20, 2004, Luminescent, Shizushi Tokito, Chihaya Adachi, Hideyuki Murata), etc. , An organic EL display can be manufactured.
  • the black matrix of the present invention can be applied to both a passive drive type organic EL display and an active drive type organic EL display.
  • TMP trimethylolpropane
  • BPDA biphenyltetracarboxylic acid dianhydride
  • THPA tetrahydrophthalic acid anhydride
  • Alkali-soluble resin-II Resin described in Synthesis Example 1
  • Alkali-soluble resin-III resin described in Synthesis Example 2 ⁇ photopolymerizable monomer>
  • DPHA "KAYARAD DPHA” (polyfunctional acrylate) manufactured by Nippon Kayaku Co., Ltd. It does not have a partial structure represented by the chemical formula (b5).
  • DPCA-20 "KAYARAD DPCA-20” (polyfunctional acrylate) manufactured by Nippon Kayaku Co., Ltd.
  • DPCA-20 has the following structure and corresponds to a photopolymerizable monomer (b6) having a partial structure represented by the chemical formula (b5).
  • Table 1 shows the surface tension values of propylene glycol monomethyl ether acetate (PGMEA) to which 0.5% by mass of the above surfactant was added at 23 ° C.
  • the surface tension value was measured by the suspension method using the DropMaster DMo-601 manufactured by Kyowa Surface Chemistry, and analyzed by the d / D method. In addition, 3.5 ⁇ L droplets were used for the measurement.
  • dispersion-I dispersion-II
  • This carbon black ink (dispersion liquid-I, dispersion liquid-II) had good dispersibility without thickening.
  • the photosensitive resin composition is applied onto a glass substrate with a spin coater so that the film thickness after heat curing is 1.2 ⁇ m, dried under reduced pressure at 100 Pa for 60 seconds, and then dried on a hot plate at 100 ° C. for 120 seconds. did.
  • the obtained coating film was subjected to full-scale exposure treatment so that the exposure amount was 40 mJ / cm 2 using ultraviolet rays having an intensity of 60 mW / cm 2 at a wavelength of 365 nm without using a photomask.
  • the optical density (OD) of the obtained substrate is measured with a transmission densitometer (361T (V) manufactured by X-Rite), and the film thickness of the cured film of the photosensitive resin composition is measured with a scanning white interference microscope (Hitachi High Technology). It was measured by VS1530) manufactured by the company.
  • the optical density (unit / ⁇ m) per unit film thickness (1.0 ⁇ m) was calculated from the optical density (OD) and the film thickness, and is shown in Table 3.
  • the OD value is a numerical value indicating the light-shielding ability, and the larger the value is, the higher the light-shielding property is.
  • a substrate for evaluating fine line adhesion was prepared in the same manner as the substrate for optical density measurement, except that a photomask having a line width opening of 1 ⁇ m to 20 ⁇ m in 1 ⁇ m increments was used as the photomask.
  • the linear pattern of the obtained substrate was observed with an optical microscope (Eclipse L200ND manufactured by Nikon Corporation), the mask aperture size of the smallest pattern remaining without chipping was measured as fine line adhesion, and the obtained results were evaluated as follows. did.
  • a substrate for measuring adhesion stress was produced in the same manner as the substrate for measuring optical density.
  • a sample prepared by joining an aluminum stud pin (manufactured by Quad) to the cured film side of the photosensitive resin composition of the obtained substrate using a sealing agent (XN-21-S manufactured by Mitsui Kagaku Co., Ltd.) is pulled.
  • a testing machine Romulus manufactured by Quad
  • the stud pin was pulled at a speed of 2.0 kg / s to perform a tensile test, and when the cured film of the photosensitive resin composition and the glass substrate were broken.
  • the adhesion stress was calculated from the breaking strength and the adhesive area by the following formula.
  • Adhesion stress (kgf / cm 2 ) breaking strength (kgf) / adhesive area (cm 2 )
  • Adhesion stress was evaluated as follows. A: Adhesion stress ⁇ 175kgf / cm 2 B: 175kgf / cm 2 > Adhesion stress ⁇ 150kgf / cm 2 C: 150kgf / cm 2 > Adhesion stress
  • the photosensitive resin composition was applied onto a glass substrate with a spin coater so that the film thickness after heat curing was 1.2 ⁇ m, and dried under reduced pressure at 100 Pa for 60 seconds to obtain a sample (glass substrate / coating film).
  • a sample is placed on a columnar metal pin (diameter 1 cm, height 1 cm) placed on a hot plate so that the glass substrate side is in contact with the metal pin, dried at a hot plate temperature of 100 ° C. for 120 seconds, and then metal.
  • the photosensitive resin composition of Example 1 has good fine wire adhesion and adhesion stress with the substrate even when the optical density per unit film thickness is 4.0 or more. Surprisingly, it can be seen that the pin unevenness during hot plate drying is also good.
  • Example 1 By comparing Example 1 and Comparative Examples 3 and 4, by containing a photopolymerizable monomer (b6) containing a partial structure represented by the general formula (b5) in addition to the alkali-soluble resin having a cardo skeleton. It can be seen that both fine wire adhesion and adhesion stress are compatible. This is because the inclusion of the alkali-soluble resin (a1) having a highly hydrophobic cardo skeleton suppresses the penetration of the developing solution during the developing process and improves the fine line adhesion, while the cardo skeleton has an aromatic ring. Since the structure has an integrated high rigidity, the film tends to warp, which causes a decrease in the adhesion stress of the substrate. However, by containing the photopolymerizable monomer (b6) containing a flexible alkylene chain, the warp is likely to occur. Is relaxed, and it is considered that the decrease in adhesion stress is suppressed.
  • Example 1 by comparing Example 1 and Comparative Examples 1 to 4, among the alkali-soluble resin (a1) having a cardo skeleton, the photopolymerizable monomer (b6) having a partial structure represented by the general formula (b5), and PGMEA. It can be seen that the pin unevenness evaluation during hot plate drying is particularly good when the surfactant (e1) having a surface tension of 23.0 mN / m or less when 0.5% by mass is added is used in combination.
  • the photosensitive resin composition of Example 1 contains a resin having a cardo skeleton in which an aromatic ring having a high affinity with carbon black is accumulated, thereby preventing carbon black from agglomerating even when the hot plate is dried, and further.
  • the photosensitive resin composition of Example 1 sufficiently heat-flows even in a portion where the metal pin having a relatively low temperature does not come into contact with the hot plate, and heat flows with the portion in contact with the metal pin having a high temperature. It is considered that when the difference in sex becomes small, the difference in surface roughness becomes small, and as a result, the occurrence of pin unevenness is suppressed.
  • Transparent support substrate 20 pixels 30 Organic protective layer 40 Inorganic oxide film 50 Transparent anode 51 Hole injection layer 52 Hole transport layer 53 Light emitting layer 54 Electron injection layer 55 Cathode 100 Organic EL element 500 Organic light emitter

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Abstract

Provided is a photosensitive resin composition having excellent fine line adhesion, adhesion stress, and suppression of pin unevenness during hot plate drying. The photosensitive resin composition according to the present invention is characterized by containing (a) an alkali-soluble resin, (b) a photopolymerizable monomer, (c) a photoinitiator, and (e) a surfactant, wherein: said (a) alkali-soluble resin includes an alkali-soluble resin (a1) having a specific partial structure; said (b) photopolymerizable monomer includes a photopolymerizable monomer (b6) having a specific partial structure; and said (e) surfactant includes a surfactant (e1) in which 0.5 mass % of propylene glycol monomethyl ether acetate solution has a surface tension of 23.0 mN/m or less at 23 °C.

Description

感光性樹脂組成物、硬化物、ブラックマトリックス及び画像表示装置Photosensitive resin composition, cured product, black matrix and image display device
 本発明は、感光性樹脂組成物、硬化物、ブラックマトリックス(Black Matrix。以下「BM」と略称することがある。)及び画像表示装置に関する。
 本願は、2020年12月10日に日本に出願された特願2020-205091号に基づき優先権を主張し、その内容をここに援用する。
The present invention relates to a photosensitive resin composition, a cured product, a black matrix (Black Matrix, hereinafter abbreviated as "BM"), and an image display device.
This application claims priority based on Japanese Patent Application No. 2020-205591 filed in Japan on December 10, 2020, the contents of which are incorporated herein by reference.
 カラーフィルターは、通常、ガラス、プラスチック等の透明基板の表面に、黒色のブラックマトリックスを形成し、続いて、赤、緑、青等の3種以上の異なる色の画素を順次、格子状、ストライプ状またはモザイク状等のパターンで形成したものである。パターンサイズはカラーフィルターの用途並びにそれぞれの色により異なるが通常5~700μm程度である。 A color filter usually forms a black matrix on the surface of a transparent substrate such as glass or plastic, and then pixels of three or more different colors such as red, green, and blue are sequentially arranged in a grid pattern and stripes. It is formed by a pattern such as a shape or a mosaic shape. The pattern size varies depending on the use of the color filter and each color, but is usually about 5 to 700 μm.
 カラーフィルターの代表的な製造方法として、現在、顔料分散法が知られている。顔料分散法によりカラーフィルターを製造する場合、まずカーボンブラック等の黒色顔料を含有する感光性樹脂組成物を透明基板上に塗布した後に真空乾燥装置にて減圧乾燥し、その後ホットプレートにて加熱乾燥させ、さらに画像露光、現像した後、200℃以上の高温処理により硬化(キュア)させることでBMを形成し、これを赤、緑、青等の各色ごとに繰り返し、画素を形成することで、BM及び画素を有するカラーフィルターを形成する。しかし、上記のホットプレートでの加熱乾燥が不均一に進行すると膜厚均一性が悪化し、BM及び画素上にムラが発生することがあり、特に基板の裏面よりピンで支えながら乾燥する場合には、ピンに接する部分と接しない部分とのムラ(ピンムラ)が顕著となる問題があった。 Currently, the pigment dispersion method is known as a typical manufacturing method for color filters. When a color filter is manufactured by the pigment dispersion method, a photosensitive resin composition containing a black pigment such as carbon black is first applied onto a transparent substrate, dried under reduced pressure in a vacuum drying device, and then heated and dried in a hot plate. After the image is exposed and developed, BM is formed by curing (curing) by a high temperature treatment of 200 ° C. or higher, and this is repeated for each color such as red, green, and blue to form pixels. Form a color filter with BM and pixels. However, if the heating and drying on the hot plate proceeds non-uniformly, the film thickness uniformity deteriorates and unevenness may occur on the BM and the pixels, especially when drying while being supported by a pin from the back surface of the substrate. Has a problem that unevenness (pin unevenness) between a portion in contact with a pin and a portion not in contact with a pin becomes remarkable.
 BMは、赤、緑、青等の画素の間に格子状、ストライプ状またはモザイク状に配置するのが一般的であり、各画素間の混色抑制によるコントラスト向上あるいは光漏れを防止する役目がある。このため、BMには高い遮光性が要求される。また、BM形成後に形成する赤、緑、青等の画素のエッジ部は、このBMと一部が重なるため、BMの膜厚の影響を受けて、重なり部分で段差が形成される。この重なり部分では、画素の平坦性が損なわれ、液晶セルギャップの不均一化あるいは液晶の配向の乱れが発生して、表示能力低下の原因となる。そこで近年は特にBMの膜厚を薄膜化することが求められており、薄膜化した際でも十分な遮光性を発現するために、BM中の色材濃度が高くなる方向にあり、膜厚不均一性によるムラが特に顕著になる。 The BM is generally arranged in a grid pattern, a stripe pattern, or a mosaic pattern between pixels such as red, green, and blue, and has a role of improving contrast or preventing light leakage by suppressing color mixing between the pixels. .. Therefore, the BM is required to have a high light-shielding property. Further, since the edge portion of the pixels such as red, green, and blue formed after the BM is partially overlapped with the BM, a step is formed at the overlapped portion due to the influence of the film thickness of the BM. At this overlapping portion, the flatness of the pixels is impaired, non-uniformity of the liquid crystal cell gap or disorder of the orientation of the liquid crystal occurs, which causes a decrease in display capability. Therefore, in recent years, it has been particularly required to reduce the film thickness of the BM, and in order to exhibit sufficient light-shielding properties even when the film thickness is reduced, the concentration of the coloring material in the BM tends to increase, and the film thickness is not sufficient. Unevenness due to uniformity becomes particularly noticeable.
 一方で、省エネルギー化やモバイルバッテリーの長寿命化のため、バックライトの出力は低くなる方向にあり、そのような条件下にあっても高輝度で画像表示できるよう、遮光部であるBMの細線化が進められている。また、近年では、液晶ディスプレイの市場において、タブレットなどのような小型化が主流となってきている一方で、大型のテレビにおいては高解像度の要求が高くなってきている。これらの理由からも、BMの高精細化の要望が高くなってきており、近年では、従来の10μm前後の線幅から、現在では6~8μm前後の線幅のBM細線が求められるようになってきている。 On the other hand, in order to save energy and extend the life of the mobile battery, the output of the backlight tends to be low, and the thin line of BM, which is a light-shielding part, can display images with high brightness even under such conditions. Is being promoted. Further, in recent years, in the liquid crystal display market, miniaturization such as tablets has become the mainstream, while the demand for high resolution is increasing in large-sized televisions. For these reasons, the demand for higher definition of BM is increasing, and in recent years, BM thin lines with a line width of about 6 to 8 μm have been required from the conventional line width of about 10 μm. It's coming.
 また、露光後の現像においては、残渣を無くすために現像時間を長めに設定するのが一般的であるが、これにより基板との界面部分のBMの溶解(差込み)が進行し、BM細線ラインパターンの剥離が起こりやすくなる。パターン線幅が10μm以上の場合はBM細線片側に約1~2μmの差込み(細線ライン両側の合計で約2~4μm)が生じても基板との細線密着性を維持できるが、線幅が10μm未満の細線パターンではBM/基板界面の密着面積が小さくなるため、線幅を1μm狭めるごとの細線密着性の低下幅が顕著に大きくなってくる。 Further, in the development after exposure, it is common to set the development time longer in order to eliminate the residue, but this promotes the dissolution (insertion) of BM at the interface with the substrate, and the BM fine line line. Pattern peeling is likely to occur. When the pattern line width is 10 μm or more, the fine line adhesion with the substrate can be maintained even if an insertion of about 1 to 2 μm occurs on one side of the BM fine line (a total of about 2 to 4 μm on both sides of the thin line), but the line width is 10 μm. If the fine line pattern is less than, the contact area of the BM / substrate interface becomes small, so that the decrease in the fine line adhesion becomes remarkably large every time the line width is narrowed by 1 μm.
 また、近年、製造したカラーフィルターをパネルに組み上げる際に、従来、額縁部を別に形成して、そこにシール剤を塗ってアレイ基板と貼り合わせていたが、工程削減の為、BM形成時にBMで額縁部を同時に形成し、そこにシール剤を塗って貼り合わせる方式が行われるようになってきた。そのため従来にも増して、カラーフィルター基板とBMとの密着応力が要求されるようになってきている。 Also, in recent years, when assembling the manufactured color filter to the panel, the frame part was conventionally formed separately, and a sealant was applied to it and attached to the array substrate. A method has come to be used in which a frame portion is formed at the same time, and a sealing agent is applied to the frame portion and bonded to the frame portion. Therefore, more than before, the contact stress between the color filter substrate and the BM is required.
 こうした背景から、細線密着性、密着応力、及びホットプレート乾燥時のピンムラの発生抑制に優れた感光性樹脂組成物が求められている。 Against this background, there is a demand for a photosensitive resin composition that is excellent in fine line adhesion, adhesion stress, and suppression of pin unevenness during hot plate drying.
 例えば、特許文献1には特定構造の有機ケイ素化合物及び特定物性を示す界面活性剤を含む感光性樹脂組成物が記載されている。 For example, Patent Document 1 describes a photosensitive resin composition containing an organosilicon compound having a specific structure and a surfactant exhibiting specific physical characteristics.
 また、特許文献2には全光重合性モノマーにおいて、分子内にカプロラクトン構造を有するモノマーを20%~80%含む感光性樹脂組成物が記載されている。 Further, Patent Document 2 describes a photosensitive resin composition containing 20% to 80% of a monomer having a caprolactone structure in the molecule among all photopolymerizable monomers.
日本国特開2017-129740号公報Japanese Patent Application Laid-Open No. 2017-129740 韓国公開特許第10-2012-0089914号公報Korean Published Patent No. 10-2012-089914
 本発明者らが、特許文献1~2に記載の感光性樹脂組成物を用いてBM評価を行ったところ、細線密着性、密着応力、及びホットプレート乾燥時のピンムラの発生抑制が十分ではないことが分かった。 When the present inventors performed BM evaluation using the photosensitive resin compositions described in Patent Documents 1 and 2, the fine wire adhesion, adhesion stress, and suppression of pin unevenness during hot plate drying were not sufficient. It turned out.
 そこで本発明は、細線密着性、密着応力、及びホットプレート乾燥時のピンムラの発生抑制に優れた感光性樹脂組成物を提供することを目的とする。 Therefore, an object of the present invention is to provide a photosensitive resin composition excellent in fine wire adhesion, adhesion stress, and suppression of pin unevenness during hot plate drying.
 本発明者らは前記課題を解決すべく鋭意検討した結果、特定のアルカリ可溶性樹脂、特定の光重合性モノマー、及び特定の界面活性剤を用いることにより、前記課題を解決できることを見出した。即ち本発明の要旨は以下に存する。 As a result of diligent studies to solve the above-mentioned problems, the present inventors have found that the above-mentioned problems can be solved by using a specific alkali-soluble resin, a specific photopolymerizable monomer, and a specific surfactant. That is, the gist of the present invention lies below.
[1](a)アルカリ可溶性樹脂、(b)光重合性モノマー、(c)光重合開始剤及び(e)界面活性剤を含む感光性樹脂組成物であって、
 前記(a)アルカリ可溶性樹脂が、下記一般式(a1-1)で表される部分構造を有するアルカリ可溶性樹脂(a1)を含み、
 前記(b)光重合性モノマーが、下記一般式(b5)で表される部分構造を有する光重合性モノマー(b6)を含み、
 前記(e)界面活性剤が、0.5質量%プロピレングリコールモノメチルエーテルアセテート溶液の23℃での表面張力が23.0mN/m以下である界面活性剤(e1)を含むことを特徴とする感光性樹脂組成物。
[1] A photosensitive resin composition containing (a) an alkali-soluble resin, (b) a photopolymerizable monomer, (c) a photopolymerization initiator, and (e) a surfactant.
The alkali-soluble resin (a) contains an alkali-soluble resin (a1) having a partial structure represented by the following general formula (a1-1).
The photopolymerizable monomer (b) contains a photopolymerizable monomer (b6) having a partial structure represented by the following general formula (b5).
The surfactant (e) is characterized by containing a surfactant (e1) having a surface tension of a 0.5 mass% propylene glycol monomethyl ether acetate solution at 23 ° C. of 23.0 mN / m or less. Sex resin composition.
Figure JPOXMLDOC01-appb-C000005
Figure JPOXMLDOC01-appb-C000005
(式(a1-1)中のベンゼン環は、さらに任意の置換基により置換されていてもよい。Rは水素原子又はメチル基を表す。Xは、O、S、C(=O)、または直接結合を表す。nは繰り返し単位を表す。*は各々結合手を表す。) (The benzene ring in the formula (a1-1) may be further substituted with any substituent. R 7 represents a hydrogen atom or a methyl group. X represents O, S, C (= O),. Or, it represents a direct bond. N represents a repeating unit. * Each represents a bond.)
Figure JPOXMLDOC01-appb-C000006
Figure JPOXMLDOC01-appb-C000006
(式(b5)中、Rは置換基を有していてもよい炭素数が2~6のアルキレン基を表し、Rは水素原子又はメチル基を表す。mは1~3の整数を表す。*は結合手を表す。)
[2]前記界面活性剤(e1)がフッ素系界面活性剤である[1]の感光性樹脂組成物。
[3]前記光重合性モノマー(b6)が、下記一般式(b2)で表される構造を有する[1]又は[2]の感光性樹脂組成物。
(In the formula (b5), R 1 represents an alkylene group having 2 to 6 carbon atoms which may have a substituent, R 2 represents a hydrogen atom or a methyl group, and m represents an integer of 1 to 3. Represents. * Represents a bond.)
[2] The photosensitive resin composition of [1], wherein the surfactant (e1) is a fluorine-based surfactant.
[3] The photosensitive resin composition of [1] or [2], wherein the photopolymerizable monomer (b6) has a structure represented by the following general formula (b2).
Figure JPOXMLDOC01-appb-C000007
Figure JPOXMLDOC01-appb-C000007
(式(b2)中、Rは一般式(b5)に示す基であり、Rは式(b7)に示す基であり、p2は1~6の整数であり、*は結合手を示す。) (In the formula (b2), R b is a group shown in the general formula (b5), R c is a group shown in the formula (b7), p2 is an integer of 1 to 6, and * indicates a bond. .)
Figure JPOXMLDOC01-appb-C000008
Figure JPOXMLDOC01-appb-C000008
(式(b7)中、Rは式(b5)と同義であり、*は結合手を示す。)
[4]さらに(d)色材を含む、[1]~[3]のいずれかの感光性樹脂組成物。
[5]前記(d)色材が、カーボンブラックを含有する[4]の感光性樹脂組成物。
[6]全固形分中のカーボンブラックの含有割合が、30質量%以上である[5]の感光性樹脂組成物。
[7]全固形分中の(d)色材の含有割合が、50質量%以上である[4]~[6]のいずれかの感光性樹脂組成物。
[8]硬化した塗膜の膜厚1μmあたりの光学濃度が4.0以上である[1]~[7]のいずれかの感光性樹脂組成物。
[9][1]~[8]のいずれかの感光性樹脂組成物を硬化させた硬化物。
[10][9]の硬化物からなるブラックマトリックス。
[11]膜厚1μmあたりの光学濃度が4.0以上である、[10]のブラックマトリックス。
[12][10]又は[11]のブラックマトリックスを有する画像表示装置。
(In equation (b7), R 2 is synonymous with equation (b5), and * indicates a bond.)
[4] The photosensitive resin composition according to any one of [1] to [3], further comprising (d) a coloring material.
[5] The photosensitive resin composition of [4], wherein the coloring material (d) contains carbon black.
[6] The photosensitive resin composition according to [5], wherein the content of carbon black in the total solid content is 30% by mass or more.
[7] The photosensitive resin composition according to any one of [4] to [6], wherein the content ratio of the (d) coloring material in the total solid content is 50% by mass or more.
[8] The photosensitive resin composition according to any one of [1] to [7], wherein the optical density per 1 μm of the cured coating film is 4.0 or more.
[9] A cured product obtained by curing the photosensitive resin composition according to any one of [1] to [8].
[10] A black matrix composed of the cured product of [9].
[11] The black matrix of [10] having an optical density of 4.0 or more per 1 μm film thickness.
[12] An image display device having the black matrix of [10] or [11].
 本発明によれば、細線密着性、密着応力、及びホットプレート乾燥時のピンムラの発生抑制に優れた感光性樹脂組成物を提供することができる。 According to the present invention, it is possible to provide a photosensitive resin composition excellent in fine wire adhesion, adhesion stress, and suppression of pin unevenness during hot plate drying.
カラーフィルターを備えた有機EL素子の一例を示す断面概略図である。It is sectional drawing which shows an example of the organic EL element provided with a color filter.
 以下、本発明の実施の形態を具体的に説明するが、本発明は、以下の実施の形態に限定されるものではなく、その要旨の範囲内で種々に変更して実施することができる。
 本発明において、「(メタ)アクリル」とは「アクリル及び/又はメタクリル」を意味し、「(メタ)アクリレート」、「(メタ)アクリロイル」についても同様である。
Hereinafter, embodiments of the present invention will be specifically described, but the present invention is not limited to the following embodiments, and can be variously modified and implemented within the scope of the gist thereof.
In the present invention, "(meth) acrylic" means "acrylic and / or methacrylic", and the same applies to "(meth) acrylate" and "(meth) acryloyl".
 本発明において「全固形分」とは、感光性樹脂組成物中又は後述するインク中に含まれる、溶剤以外の全成分を意味するものとする。溶剤以外の成分が常温で液体であっても、その成分は溶剤には含めず、全固形分に含める。
 本発明において、重量平均分子量とは、GPC(ゲルパーミエーションクロマトグラフィー)によるポリスチレン換算の重量平均分子量(Mw)を指す。
 本発明において、「アミン価」とは、特に断りのない限り、有効固形分換算のアミン価を表し、分散剤の固形分1gあたりの塩基量と当量のKOHの質量で表される値である。なお、測定方法については後述する。
In the present invention, the "total solid content" means all the components other than the solvent contained in the photosensitive resin composition or the ink described later. Even if the components other than the solvent are liquid at room temperature, the components are not included in the solvent and are included in the total solid content.
In the present invention, the weight average molecular weight refers to the polystyrene-equivalent weight average molecular weight (Mw) by GPC (gel permeation chromatography).
In the present invention, the "amine value" represents an amine value in terms of effective solid content, and is a value represented by the amount of base per 1 g of solid content of the dispersant and the equivalent mass of KOH, unless otherwise specified. .. The measurement method will be described later.
[感光性樹脂組成物]
 本発明の感光性樹脂組成物は(a)アルカリ可溶性樹脂、(b)光重合性モノマー、(c)光重合開始剤及び(e)界面活性剤を含み、(a)アルカリ可溶性樹脂が、下記一般式(a1-1)で表される部分構造を有するアルカリ可溶性樹脂(a1)を含み、(b)光重合性モノマーが、下記一般式(b5)で表される部分構造を有する光重合性モノマー(b6)を含み、(e)界面活性剤が、0.5質量%プロピレングリコールモノメチルエーテルアセテート溶液の23℃での表面張力が23.0mN/m以下である界面活性剤(e1)を含む。
[Photosensitive resin composition]
The photosensitive resin composition of the present invention contains (a) an alkali-soluble resin, (b) a photopolymerizable monomer, (c) a photopolymerization initiator and (e) a surfactant, and (a) an alkali-soluble resin is described below. A photopolymerizable monomer containing an alkali-soluble resin (a1) having a partial structure represented by the general formula (a1-1) and (b) a photopolymerizable monomer having a partial structure represented by the following general formula (b5). The monomer (b6) is contained, and the (e) surfactant contains a surfactant (e1) having a surface tension of a 0.5 mass% propylene glycol monomethyl ether acetate solution at 23 ° C. of 23.0 mN / m or less. ..
Figure JPOXMLDOC01-appb-C000009
(式(a1-1)中のベンゼン環は、さらに任意の置換基により置換されていてもよい。Rは水素原子又はメチル基を表す。Xは、O、S、C(=O)、または直接結合を表す。nは繰り返し単位を表す。*は各々結合手を表す。)
Figure JPOXMLDOC01-appb-C000009
(The benzene ring in the formula (a1-1) may be further substituted with any substituent. R 7 represents a hydrogen atom or a methyl group. X represents O, S, C (= O),. Or, it represents a direct bond. N represents a repeating unit. * Each represents a bond.)
Figure JPOXMLDOC01-appb-C000010
(式(b5)中、Rは置換基を有していてもよい炭素数が2~6のアルキレン基を表し、Rは水素原子又はメチル基を表す。mは1~3の整数を表す。*は結合手を表す。)
Figure JPOXMLDOC01-appb-C000010
(In the formula (b5), R 1 represents an alkylene group having 2 to 6 carbon atoms which may have a substituent, R 2 represents a hydrogen atom or a methyl group, and m represents an integer of 1 to 3. Represents. * Represents a bond.)
 本発明の感光性樹脂組成物は必要に応じて、分散剤、チオール類、密着向上剤、顔料誘導体、さらに現像改良剤、紫外線吸収剤、酸化防止剤等の配合成分を含んでいてもよく、各配合成分が、有機溶剤に溶解又は分散した状態で使用されることが好ましい。 The photosensitive resin composition of the present invention may contain a dispersant, a thiol, an adhesion improver, a pigment derivative, and a compounding component such as a development improver, an ultraviolet absorber, and an antioxidant, if necessary. It is preferable that each compounding component is used in a state of being dissolved or dispersed in an organic solvent.
<(a)アルカリ可溶性樹脂>
 本発明の感光性樹脂組成物は(a)アルカリ可溶性樹脂を含む。(a)アルカリ可溶性樹脂は、感光性樹脂組成物を塗布、乾燥して得られる塗膜を露光後、露光部と非露光部のアルカリ現像に対する溶解性が変化するようなものであれば特に限定されないが、カルボキシ基を有するアルカリ可溶性樹脂が好ましい。また、エチレン性不飽和基を有するアルカリ可溶性樹脂が好ましく、エチレン性不飽和基とカルボキシ基を有するアルカリ可溶性樹脂がさらに好ましい。
<(A) Alkali-soluble resin>
The photosensitive resin composition of the present invention contains (a) an alkali-soluble resin. (A) The alkali-soluble resin is particularly limited as long as the solubility of the exposed portion and the non-exposed portion in alkaline development changes after the coating film obtained by applying and drying the photosensitive resin composition is exposed. However, an alkali-soluble resin having a carboxy group is preferable. Further, an alkali-soluble resin having an ethylenically unsaturated group is preferable, and an alkali-soluble resin having an ethylenically unsaturated group and a carboxy group is more preferable.
<アルカリ可溶性樹脂(a1)>
 本発明における(a)アルカリ可溶性樹脂は、下記一般式(a1-1)で表される部分構造を有するアルカリ可溶性樹脂(a1)を含む。アルカリ可溶性樹脂(a1)を含むことにより、細線密着性及びホットプレート乾燥時のピンムラが良好となる傾向がある。
<Alkali-soluble resin (a1)>
The alkali-soluble resin (a) in the present invention includes an alkali-soluble resin (a1) having a partial structure represented by the following general formula (a1-1). By containing the alkali-soluble resin (a1), the fine line adhesion and pin unevenness during hot plate drying tend to be improved.
Figure JPOXMLDOC01-appb-C000011
(式(a1-1)中のベンゼン環は、さらに任意の置換基により置換されていてもよい。Rは水素原子又はメチル基を表す。Xは、O、S、C(=O)、または直接結合を表す。nは繰り返し単位を表す。*は各々結合手を表す。)
Figure JPOXMLDOC01-appb-C000011
(The benzene ring in the formula (a1-1) may be further substituted with any substituent. R 7 represents a hydrogen atom or a methyl group. X represents O, S, C (= O),. Or, it represents a direct bond. N represents a repeating unit. * Each represents a bond.)
 式(a1-1)において、nで表される繰り返し単位は0~4の整数であることが好ましく、感度の観点からは0~3が好ましく、0~2がより好ましく、0がさらに好ましい。
 Rは水素原子であることが好ましい。
In the formula (a1-1), the repeating unit represented by n is preferably an integer of 0 to 4, preferably 0 to 3, more preferably 0 to 2, and even more preferably 0 from the viewpoint of sensitivity.
R 7 is preferably a hydrogen atom.
 式(a1-1)において、感度の観点からは、Xは直接結合が好ましい。 In the formula (a1-1), X is preferably directly bonded from the viewpoint of sensitivity.
 細線密着性及びホットプレート乾燥時のピンムラの観点からは、(a)アルカリ可溶性樹脂中のアルカリ可溶性樹脂(a1)の含有割合は10質量%以上が好ましく、30質量%以上がより好ましく、50質量%以上がさらに好ましく、70質量%以上がよりさらに好ましく、90質量%以上が特に好ましい。また、パターンの直線性の観点からは、100質量%以下が好ましく、99質量%以下がより好ましく、98質量%以下がさらに好ましい。
 上記の上限及び下限は任意に組み合わせることができる。例えば、10~100質量%が好ましく、30~100質量%がより好ましく、50~99質量%がさらに好ましく、70~99質量%がよりさらに好ましく、90~98質量%が特に好ましい。
From the viewpoint of fine wire adhesion and pin unevenness during hot plate drying, (a) the content ratio of the alkali-soluble resin (a1) in the alkali-soluble resin is preferably 10% by mass or more, more preferably 30% by mass or more, and 50% by mass. % Or more is further preferable, 70% by mass or more is further preferable, and 90% by mass or more is particularly preferable. Further, from the viewpoint of the linearity of the pattern, 100% by mass or less is preferable, 99% by mass or less is more preferable, and 98% by mass or less is further preferable.
The above upper and lower limits can be combined arbitrarily. For example, 10 to 100% by mass is preferable, 30 to 100% by mass is more preferable, 50 to 99% by mass is further preferable, 70 to 99% by mass is further preferable, and 90 to 98% by mass is particularly preferable.
 式(a1-1)で表される部分構造を有するアルカリ可溶性樹脂(a1)は、例えば、下記構造式(a7-1)で表されるカルド骨格を有するエポキシ樹脂に(メタ)アクリル酸を付加させ、さらに、多塩基酸及び/又はその無水物を反応させることによって得られたアルカリ可溶性樹脂であることが好ましい。 The alkali-soluble resin (a1) having a partial structure represented by the formula (a1-1) is obtained by adding (meth) acrylic acid to, for example, an epoxy resin having a cardo skeleton represented by the following structural formula (a7-1). It is preferably an alkali-soluble resin obtained by reacting with a polybasic acid and / or an anhydride thereof.
Figure JPOXMLDOC01-appb-C000012
(式(a7-1)中のベンゼン環は、さらに任意の置換基により置換されていてもよい。Xは、O、S、C(=O)、または直接結合を示す。)
Figure JPOXMLDOC01-appb-C000012
(The benzene ring in formula (a7-1) may be further substituted with any substituent. X indicates O, S, C (= O), or a direct bond.)
 式(a7-1)において、nは0~4の整数を表し、0~3が好ましく、0~2がより好ましく、0がさらに好ましい。 In the formula (a7-1), n represents an integer of 0 to 4, preferably 0 to 3, more preferably 0 to 2, and even more preferably 0.
 エポキシ樹脂に(メタ)アクリル酸を付加させる方法としては、公知の手法を用いることができる。例えば、エステル化触媒の存在下、50~150℃の温度で、反応させることができる。ここで用いる触媒としては、トリエチルホスフィン、トリブチルホスフィン、トリシクロヘキシルホスフィン、トリフェニルホスフィン等の3級ホスフィン、トリエチルアミン、トリメチルアミン、ベンジルジメチルアミン、ベンジルジエチルアミン等の3級アミン、テトラメチルアンモニウムクロライド、テトラエチルアンモニウムクロライド、ドデシルトリメチルアンモニウムクロライド等の4級アンモニウム塩を用いることができる。 A known method can be used as a method for adding (meth) acrylic acid to the epoxy resin. For example, the reaction can be carried out at a temperature of 50 to 150 ° C. in the presence of an esterification catalyst. The catalyst used here includes tertiary phosphines such as triethylphosphine, tributylphosphine, tricyclohexylphosphine and triphenylphosphine, tertiary amines such as triethylamine, trimethylamine, benzyldimethylamine and benzyldiethylamine, tetramethylammonium chloride and tetraethylammonium chloride. , Quaternary ammonium salts such as dodecyltrimethylammonium chloride can be used.
 (メタ)アクリル酸の使用量は、エポキシ樹脂のエポキシ基1当量に対し0.5~1.2当量の範囲が好ましく、0.7~1.1当量の範囲がより好ましい。
 (メタ)アクリル酸の使用量を前記下限値以上とすることで不飽和基の導入量が十分となり、引き続く多塩基酸及び/又はその無水物との反応も十分となり、また、多量のエポキシ基の残存を抑制できる傾向がある。一方で、前記使用量を前記上限値以下とすることで(メタ)アクリル酸が未反応物として残存するのを抑制できる傾向がある。
The amount of (meth) acrylic acid used is preferably in the range of 0.5 to 1.2 equivalents, more preferably in the range of 0.7 to 1.1 equivalents, with respect to 1 equivalent of the epoxy group of the epoxy resin.
By setting the amount of (meth) acrylic acid to be at least the above lower limit, the amount of unsaturated group introduced is sufficient, the subsequent reaction with polybasic acid and / or its anhydride is sufficient, and a large amount of epoxy group is used. There is a tendency to suppress the residual of. On the other hand, by setting the amount to be used to be equal to or less than the upper limit, it tends to be possible to suppress the residual (meth) acrylic acid as an unreacted product.
 多塩基酸及び/又はその無水物としては、例えば、マレイン酸、コハク酸、イタコン酸、フタル酸、テトラヒドロフタル酸、ヘキサヒドロフタル酸、ピロメリット酸、トリメリット酸、ベンゾフェノンテトラカルボン酸、メチルヘキサヒドロフタル酸、エンドメチレンテトラヒドロフタル酸、クロレンド酸、メチルテトラヒドロフタル酸、ビフェニルテトラカルボン酸、及びこれらの無水物から選ばれた、1種又は2種以上が挙げられる。 Examples of the polybasic acid and / or its anhydride include maleic acid, succinic acid, itaconic acid, phthalic acid, tetrahydrophthalic acid, hexahydrophthalic acid, pyromellitic acid, trimellitic acid, benzophenone tetracarboxylic acid and methylhexa. Included is one or more selected from hydrophthalic acid, endomethylenetetrahydrophthalic acid, chlorendic acid, methyltetrahydrophthalic acid, biphenyltetracarboxylic acid, and anhydrides thereof.
 多塩基酸及び/又はその無水物の付加反応に関しても、公知の手法を用いることができ、(メタ)アクリル酸の付加反応と同様な条件下で、継続反応させて目的物を得ることができる。 A known method can also be used for the addition reaction of polybasic acid and / or its anhydride, and the desired product can be obtained by continuing the reaction under the same conditions as the addition reaction of (meth) acrylic acid. ..
 アルカリ可溶性樹脂(a1)の多塩基酸及び/又はその無水物の付加反応合成時に、トリメチロールプロパン、ペンタエリスリトール、ジペンタエリスリトールなどの多価アルコールを添加し、多分岐構造を導入したものとしてもよい。 Even if a polyhydric alcohol such as trimethylolpropane, pentaerythritol, or dipentaerythritol is added during the addition reaction synthesis of the polybasic acid and / or its anhydride of the alkali-soluble resin (a1) to introduce a multi-branched structure. good.
 アルカリ可溶性樹脂(a1)は、例えば、エポキシ樹脂と(メタ)アクリル酸との反応物に、多塩基酸及び/又はその無水物を混合した後、もしくは、エポキシ樹脂と(メタ)アクリル酸との反応物に、多塩基酸及び/又はその無水物及び多価アルコールを混合した後に、加温することにより得られる。この場合、多塩基酸及び/又はその無水物と多価アルコールの混合順序に、特に制限はない。加温により、(メタ)アクリル酸との反応物と多価アルコールとの混合物中に存在するいずれかの水酸基に対して多塩基酸及び/又はその無水物が付加反応する。 The alkali-soluble resin (a1) is, for example, after mixing a polybasic acid and / or its anhydride with a reaction product of an epoxy resin and (meth) acrylic acid, or after mixing an epoxy resin with (meth) acrylic acid. It is obtained by mixing the reaction product with a polybasic acid and / or its anhydride and a polyhydric alcohol, and then heating the reaction product. In this case, the mixing order of the polybasic acid and / or its anhydride and the polyhydric alcohol is not particularly limited. Upon heating, the polybasic acid and / or its anhydride undergoes an addition reaction with any hydroxyl group present in the mixture of the reaction product with (meth) acrylic acid and the polyhydric alcohol.
 多価アルコールの使用量は、増粘やゲル化を抑制しつつ効果を発現するとの観点から、エポキシ樹脂と(メタ)アクリル酸との反応物と、多塩基酸及び/又はその無水物との反応物に対して、好ましくは0.01~0.5質量倍程度、より好ましくは0.02~0.2質量倍程度である。 The amount of the polyhydric alcohol used is the reaction product of the epoxy resin and (meth) acrylic acid, and the polybasic acid and / or its anhydride from the viewpoint of exhibiting the effect while suppressing thickening and gelation. It is preferably about 0.01 to 0.5 times by mass, more preferably about 0.02 to 0.2 times by mass with respect to the reaction product.
 アルカリ可溶性樹脂(a1)は、1種を単独で用いても、2種以上の樹脂を混合して用いてもよい。 As the alkali-soluble resin (a1), one type may be used alone, or two or more types of resins may be mixed and used.
 アルカリ可溶性樹脂(a1)の酸価は、10mgKOH/g以上が好ましく、50mgKOH/g以上がより好ましく、80mgKOH/g以上がさらに好ましく、また、200mgKOH/g以下であることが好ましく、150mgKOH/g以下であることがより好ましく、120mgKOH/g以下であることがさらに好ましい。前記下限値以上とすることで残渣が低減する傾向がある。また、前記上限値以下とすることで細線密着性を良好にすることができる傾向がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、10~200mgKOH/gが好ましく、50~150mgKOH/gがより好ましく、80~120mgKOH/gがさらに好ましい。
The acid value of the alkali-soluble resin (a1) is preferably 10 mgKOH / g or more, more preferably 50 mgKOH / g or more, further preferably 80 mgKOH / g or more, and preferably 200 mgKOH / g or less, and 150 mgKOH / g or less. Is more preferable, and 120 mgKOH / g or less is further preferable. When the value is equal to or higher than the lower limit, the residue tends to be reduced. Further, by setting the value to the upper limit or less, there is a tendency that the fine line adhesion can be improved.
The above upper and lower limits can be combined arbitrarily. For example, 10 to 200 mgKOH / g is preferable, 50 to 150 mgKOH / g is more preferable, and 80 to 120 mgKOH / g is further preferable.
 アルカリ可溶性樹脂(a1)のゲルパーミエーションクロマトグラフィー(GPC)測定によるポリスチレン換算の重量平均分子量(Mw)は、1,000以上であることが好ましく、2,000以上であることがより好ましく、4,000以上であることがさらに好ましく、5,000以上であることが特に好ましい。また、20,000以下であることが好ましく、15,000以下であることがより好ましく、10,000以下であることがさらに好ましく、8,000以下であることがよりさらに好ましく、7,000以下であることが特に好ましい。前記下限値以上とすることで細線密着性、基板との密着応力が良好となる傾向がある。また、前記上限値以下とすることで現像性や再溶解性を良好なものとすることができる傾向がある。 The weight average molecular weight (Mw) in terms of polystyrene as measured by gel permeation chromatography (GPC) of the alkali-soluble resin (a1) is preferably 1,000 or more, more preferably 2,000 or more, and 4 It is more preferably 5,000 or more, and particularly preferably 5,000 or more. Further, it is preferably 20,000 or less, more preferably 15,000 or less, further preferably 10,000 or less, further preferably 8,000 or less, and 7,000 or less. Is particularly preferable. When it is set to the lower limit or more, the fine wire adhesion and the adhesion stress with the substrate tend to be good. Further, by setting the value to the upper limit or less, there is a tendency that the developability and the resolubility can be improved.
 本発明の感光性樹脂組成物はアルカリ可溶性樹脂(a1)以外のアルカリ可溶性樹脂を含有してもよい。
 アルカリ可溶性樹脂(a1)以外のアルカリ可溶性樹脂としては、感光性樹脂組成物を塗布、乾燥して得られる塗膜を露光後、露光部と非露光部のアルカリ現像に対する溶解性が変化するようなものであれば特に限定されないが、カルボキシ基を有するアルカリ可溶性樹脂が好ましい。また、エチレン性不飽和基を有するアルカリ可溶性樹脂が好ましく、エチレン性不飽和基とカルボキシ基を有するアルカリ可溶性樹脂がさらに好ましい。
 具体的には、アルカリ可溶性樹脂(a1)以外のカルボキシ基を有するエポキシ(メタ)アクリレート樹脂(a2)、アクリル共重合樹脂(a3)、それ以外の樹脂(a4)が挙げられる。
The photosensitive resin composition of the present invention may contain an alkali-soluble resin other than the alkali-soluble resin (a1).
As the alkali-soluble resin other than the alkali-soluble resin (a1), the solubility of the exposed portion and the non-exposed portion in alkali development changes after the coating film obtained by applying and drying the photosensitive resin composition is exposed. However, the alkali-soluble resin having a carboxy group is preferable. Further, an alkali-soluble resin having an ethylenically unsaturated group is preferable, and an alkali-soluble resin having an ethylenically unsaturated group and a carboxy group is more preferable.
Specific examples thereof include an epoxy (meth) acrylate resin (a2) having a carboxy group other than the alkali-soluble resin (a1), an acrylic copolymer resin (a3), and other resins (a4).
<アルカリ可溶性樹脂(a1)以外のカルボキシ基を有するエポキシ(メタ)アクリレート樹脂(a2)>
 アルカリ可溶性樹脂(a1)以外のカルボキシ基を有するエポキシ(メタ)アクリレート樹脂(a2)としては、例えば、以下のエポキシ(メタ)アクリレート樹脂(a2-1)及び/又はエポキシ(メタ)アクリレート樹脂(a2-2)が挙げられる。
<Epoxy (meth) acrylate resin (a2) having a carboxy group other than the alkali-soluble resin (a1)>
Examples of the epoxy (meth) acrylate resin (a2) having a carboxy group other than the alkali-soluble resin (a1) include the following epoxy (meth) acrylate resin (a2-1) and / or epoxy (meth) acrylate resin (a2). -2) can be mentioned.
 <エポキシ(メタ)アクリレート樹脂(a2-1)>
 エポキシ樹脂にα,β-不飽和モノカルボン酸又はカルボキシ基を有するα,β-不飽和モノカルボン酸エステルを付加させ、さらに、多塩基酸及び/又はその無水物を反応させることによって得られたアルカリ可溶性樹脂。
<Epoxy (meth) acrylate resin (a2-1)>
It was obtained by adding an α, β-unsaturated monocarboxylic acid or an α, β-unsaturated monocarboxylic acid ester having a carboxy group to an epoxy resin, and further reacting with a polybasic acid and / or its anhydride. Alkaline-soluble resin.
 <エポキシ(メタ)アクリレート樹脂(a2-2)>
 エポキシ樹脂にα,β-不飽和モノカルボン酸又はカルボキシ基を有するα,β-不飽和モノカルボン酸エステルを付加させ、さらに、多価アルコール、及び多塩基酸及び/又はその無水物と反応させることによって得られたアルカリ可溶性樹脂。
<Epoxy (meth) acrylate resin (a2-2)>
An α, β-unsaturated monocarboxylic acid or an α, β-unsaturated monocarboxylic acid ester having a carboxy group is added to the epoxy resin, and further reacted with a polyhydric alcohol and a polybasic acid and / or its anhydride. The resulting alkali-soluble resin.
<エポキシ(メタ)アクリレート樹脂(a2-1)>
 原料となるエポキシ樹脂として、例えば、ビスフェノールA型エポキシ樹脂(例えば、三菱ケミカル社製の「jER(登録商標。以下同じ。)828」、「jER1001」、「jER1002」、「jER1004」等)、ビスフェノールA型エポキシ樹脂のアルコール性水酸基とエピクロルヒドリンの反応により得られるエポキシ(例えば、日本化薬社製の「NER-1302」(エポキシ当量323,軟化点76℃))、ビスフェノールF型樹脂(例えば、三菱ケミカル社製の「jER807」、「EP-4001」、「EP-4002」、「EP-4004等」)、ビスフェノールF型エポキシ樹脂のアルコール性水酸基とエピクロルヒドリンの反応により得られるエポキシ樹脂(例えば、日本化薬社製の「NER-7406」(エポキシ当量350,軟化点66℃))、ビスフェノールS型エポキシ樹脂、ビフェニルグリシジルエーテル(例えば、三菱ケミカル社製の「YX-4000」)、フェノールノボラック型エポキシ樹脂(例えば、日本化薬社製の「EPPN-201」、三菱ケミカル社製の「EP-152」、「EP-154」、ダウケミカル社製の「DEN-438」)、(o,m,p-)クレゾールノボラック型エポキシ樹脂(例えば、日本化薬社製の「EOCN(登録商標。以下同じ。)-102S」、「EOCN-1020」、「EOCN-104S」)、トリグリシジルイソシアヌレート(例えば、日産化学社製の「TEPIC(登録商標)」)、トリスフェノールメタン型エポキシ樹脂(例えば、日本化薬社製の「EPPN(登録商標。以下同じ。)-501」、「EPPN-502」、「EPPN-503」)、脂環式エポキシ樹脂(ダイセル社製の「セロキサイド(登録商標。以下同じ。)2021P」、「セロキサイドEHPE」)、ジシクロペンタジエンとフェノールの反応によるフェノール樹脂をグリシジル化したエポキシ樹脂(例えば、DIC社製の「EXA-7200」、日本化薬社製の「NC-7300」)、下記一般式(a1)~(a3)、(a5)、又は(a6)で表されるエポキシ樹脂を好適に用いることができる。具体的には、例えば、下記一般式(a1)で表されるエポキシ樹脂として日本化薬社製の「XD-1000」、下記一般式(a2)で表されるエポキシ樹脂として日本化薬社製の「NC-3000」が挙げられる。
<Epoxy (meth) acrylate resin (a2-1)>
Examples of the epoxy resin as a raw material include bisphenol A type epoxy resin (for example, "jER (registered trademark; the same applies hereinafter) 828", "jER1001", "jER1002", "jER1004", etc.) manufactured by Mitsubishi Chemical Corporation, bisphenol. Epoxy obtained by the reaction of the alcoholic hydroxyl group of the A-type epoxy resin with epichlorohydrin (for example, "NER-1302" (epoxy equivalent 323, softening point 76 ° C.) manufactured by Nippon Kayaku Co., Ltd.), bisphenol F-type resin (for example, Mitsubishi). "JER807", "EP-4001", "EP-4002", "EP-4004", etc. manufactured by Chemical Corporation), an epoxy resin obtained by the reaction of an alcoholic hydroxyl group of a bisphenol F type epoxy resin with epichlorohydrin (for example, Japan). "NER-7406" manufactured by Kayakusha (epoxy equivalent 350, softening point 66 ° C), bisphenol S type epoxy resin, biphenyl glycidyl ether (for example, "YX-4000" manufactured by Mitsubishi Chemical Corporation), phenol novolac type epoxy Resins (for example, "EPPN-201" manufactured by Nippon Kayaku Co., Ltd., "EP-152", "EP-154" manufactured by Mitsubishi Chemical Corporation, "DEN-438" manufactured by Dow Chemical Corporation), (o, m, p-) Cresol novolak type epoxy resin (for example, "EOCN (registered trademark. The same shall apply hereinafter) -102S", "EOCN-1020", "EOCN-104S") manufactured by Nippon Kayaku Co., Ltd., triglycidyl isocyanurate (for example). , Nissan Chemical Corporation "TEPIC (registered trademark)"), Trisphenol methane type epoxy resin (for example, "EPPN (registered trademark; the same shall apply hereinafter) -501", "EPPN-502" manufactured by Nippon Kayaku Co., Ltd., "EPPN-503"), alicyclic epoxy resin ("Ceroxide (registered trademark; the same shall apply hereinafter) 2021P" manufactured by Daicel Co., Ltd., "Ceroxyside EHPE"), and a phenol resin obtained by the reaction of dicyclopentadiene and phenol was glycidylated. Epoxy resin (for example, "EXA-7200" manufactured by DIC, "NC-7300" manufactured by Nippon Kayaku Co., Ltd.), represented by the following general formulas (a1) to (a3), (a5), or (a6). Epoxy resin can be preferably used. Specifically, for example, "XD-1000" manufactured by Nippon Kayaku Co., Ltd. is used as the epoxy resin represented by the following general formula (a1), and Nippon Kayaku Co., Ltd. is used as the epoxy resin represented by the following general formula (a2). "NC-3000" can be mentioned.
Figure JPOXMLDOC01-appb-C000013
Figure JPOXMLDOC01-appb-C000013
 式(a1)において、b11は平均値を示し0~10の数を示す。R11は水素原子、ハロゲン原子、炭素数1~8のアルキル基、炭素数3~10のシクロアルキル基、フェニル基、ナフチル基、又はビフェニル基を表す。なお、1分子中に存在する複数のR11は互いに同一であっても異なっていてもよい。 In the formula (a1), b11 indicates an average value and indicates a number from 0 to 10. R 11 represents a hydrogen atom, a halogen atom, an alkyl group having 1 to 8 carbon atoms, a cycloalkyl group having 3 to 10 carbon atoms, a phenyl group, a naphthyl group, or a biphenyl group. The plurality of R 11s existing in one molecule may be the same or different from each other.
Figure JPOXMLDOC01-appb-C000014
Figure JPOXMLDOC01-appb-C000014
 式(a2)において、b12は平均値を示し0~10の数を示す。R21は水素原子、ハロゲン原子、炭素数1~8のアルキル基、炭素数3~10のシクロアルキル基、フェニル基、ナフチル基、又はビフェニル基を表す。なお、1分子中に存在する複数のR21は互いに同一であっても異なっていてもよい。 In the formula (a2), b12 indicates an average value and indicates a number from 0 to 10. R 21 represents a hydrogen atom, a halogen atom, an alkyl group having 1 to 8 carbon atoms, a cycloalkyl group having 3 to 10 carbon atoms, a phenyl group, a naphthyl group, or a biphenyl group. The plurality of R 21s existing in one molecule may be the same or different from each other.
Figure JPOXMLDOC01-appb-C000015
Figure JPOXMLDOC01-appb-C000015
 式(a3)において、Xは下記一般式(a3-1)又は(a3-2)で表される連結基を示す。但し、分子構造中に1つ以上のアダマンタン構造を含む。b13は2又は3の整数を示す。 In the formula (a3), X represents a linking group represented by the following general formula (a3-1) or (a3-2). However, the molecular structure contains one or more adamantane structures. b13 indicates an integer of 2 or 3.
Figure JPOXMLDOC01-appb-C000016
Figure JPOXMLDOC01-appb-C000016
 式(a3-1)及び(a3-2)において、R31~R34及びR35~R37は、各々独立に、置換基を有していてもよいアダマンチル基、水素原子、置換基を有していてもよい炭素数1~12のアルキル基、又は置換基を有していてもよいフェニル基を示す。また、式中の*印は(a3)中の結合手を表す。 In the formulas (a3-1) and (a3-2), R 31 to R 34 and R 35 to R 37 each independently have an adamantyl group, a hydrogen atom, and a substituent which may have a substituent. Indicates an alkyl group having 1 to 12 carbon atoms which may be used, or a phenyl group which may have a substituent. Further, the * mark in the formula represents the bond in (a3).
Figure JPOXMLDOC01-appb-C000017
Figure JPOXMLDOC01-appb-C000017
 式(a5)において、R51~R54は各々独立に、水素原子、炭素数1~20のアルキル基、炭素原子6~20のアリール基、又は、炭素原子7~20のアラルキル基であり、R55は炭素数1~20のアルキル基、炭素数6~20のアリール基、又は炭素数7~20のアラルキル基であり、R56は各々独立に炭素数1~5のアルキレン基である。kは1~5の整数であり、lは0~13の整数であり、mは各々独立に0~5の整数である。 In the formula (a5), R 51 to R 54 are independently hydrogen atoms, alkyl groups having 1 to 20 carbon atoms, aryl groups having 6 to 20 carbon atoms, or aralkyl groups having 7 to 20 carbon atoms. R 55 is an alkyl group having 1 to 20 carbon atoms, an aryl group having 6 to 20 carbon atoms, or an aralkyl group having 7 to 20 carbon atoms, and R 56 is an alkylene group having 1 to 5 carbon atoms independently. k is an integer of 1 to 5, l is an integer of 0 to 13, and m is an integer of 0 to 5 independently.
Figure JPOXMLDOC01-appb-C000018
Figure JPOXMLDOC01-appb-C000018
 式(a6)において、n及びoはそれぞれ独立に1~9の整数である。
 R23は水素原子、ハロゲン原子、炭素数1~8のアルキル基、炭素数3~10のシクロアルキル基、フェニル基、ナフチル基、又はビフェニル基を表す。なお、1分子中に存在する複数のR23は互いに同一であっても異なっていてもよい。
In the formula (a6), n and o are independently integers of 1 to 9.
R 23 represents a hydrogen atom, a halogen atom, an alkyl group having 1 to 8 carbon atoms, a cycloalkyl group having 3 to 10 carbon atoms, a phenyl group, a naphthyl group, or a biphenyl group. It should be noted that the plurality of R 23s existing in one molecule may be the same or different from each other.
 これらの中で、一般式(a1)~(a3)、(a5)、又は(a6)のいずれかで表されるエポキシ樹脂を用いることが好ましい。 Among these, it is preferable to use an epoxy resin represented by any of the general formulas (a1) to (a3), (a5), or (a6).
 α,β-不飽和モノカルボン酸又はカルボキシ基を有するα,β-不飽和モノカルボン酸エステルとしては、例えば、(メタ)アクリル酸、クロトン酸、o-ビニル安息香酸、m-ビニル安息香酸、p-ビニル安息香酸、(メタ)アクリル酸のα位ハロアルキル、アルコキシル、ハロゲン、ニトロ、シアノ置換体などのモノカルボン酸、2-(メタ)アクリロイロキシエチルコハク酸、2-(メタ)アクリロイロキシエチルアジピン酸、2-(メタ)アクリロイロキシエチルフタル酸、2-(メタ)アクリロイロキシエチルヘキサヒドロフタル酸、2-(メタ)アクリロイロキシエチルマレイン酸、2-(メタ)アクリロイロキシプロピルコハク酸、2-(メタ)アクリロイロキシプロピルアジピン酸、2-(メタ)アクリロイロキシプロピルテトラヒドロフタル酸、2-(メタ)アクリロイロキシプロピルフタル酸、2-(メタ)アクリロイロキシプロピルマレイン酸、2-(メタ)アクリロイロキシブチルコハク酸、2-(メタ)アクリロイロキシブチルアジピン酸、2-(メタ)アクリロイロキシブチルヒドロフタル酸、2-(メタ)アクリロイロキシブチルフタル酸、2-(メタ)アクリロイロキシブチルマレイン酸が挙げられる。
 (メタ)アクリル酸エステルとしては、例えば、(メタ)アクリル酸にε-カプロラクトン、β-プロピオラクトン、γ-ブチロラクトン、δ-バレロラクトン等のラクトン類を付加させ末端に1個の水酸基を有する単量体;あるいはヒドロキシアルキル(メタ)アクリレートのような末端に1個の水酸基を有する単量体;ペンタエリスリトールトリ(メタ)アクリレートのような末端に1個の水酸基を有する化合物に、(無水)コハク酸、(無水)フタル酸、(無水)マレイン酸などの酸(無水物)を付加させ、1個以上のエチレン不飽和基と末端に1個のカルボキシ基を有する(メタ)アクリル酸エステル;(メタ)アクリル酸ダイマー;が挙げられる。
Examples of the α, β-unsaturated monocarboxylic acid ester having an α, β-unsaturated monocarboxylic acid or a carboxy group include (meth) acrylic acid, crotonic acid, o-vinylbenzoic acid, and m-vinylbenzoic acid. p-vinylbenzoic acid, α-position haloalkyl of (meth) acrylic acid, monocarboxylic acids such as alkoxyl, halogen, nitro, cyano-substituted, 2- (meth) acryloyloxyethyl succinic acid, 2- (meth) acryloy Loxyethyl adipic acid, 2- (meth) acryloyloxyethyl phthalic acid, 2- (meth) acryloyloxyethyl hexahydrophthalic acid, 2- (meth) acryloyloxyethyl maleic acid, 2- (meth) acryloy Loxypropyl succinic acid, 2- (meth) acryloyloxypropyladipic acid, 2- (meth) acryloyloxypropyltetrahydrophthalic acid, 2- (meth) acryloyloxypropylphthalic acid, 2- (meth) acryloyloxy Propylmaleic acid, 2- (meth) acryloyloxybutyl succinic acid, 2- (meth) acryloyloxybutyl adipic acid, 2- (meth) acryloyloxybutyl hydrophthalic acid, 2- (meth) acryloyloxybutyl Examples include phthalic acid and 2- (meth) acryloyloxybutylmaleic acid.
As the (meth) acrylic acid ester, for example, lactones such as ε-caprolactone, β-propiolactone, γ-butyrolactone, and δ-valerolactone are added to (meth) acrylic acid to have one hydroxyl group at the end. A monomer; or a monomer having one hydroxyl group at the end such as hydroxyalkyl (meth) acrylate; or a compound having one hydroxyl group at the end such as pentaerythritol tri (meth) acrylate (anhydrous). A (meth) acrylic acid ester having one or more ethylene unsaturated groups and one carboxy group at the end by adding an acid (anhydrous) such as succinic acid, (anhydrous) phthalic acid, and (anhydrous) maleic acid; (Meta) acrylic acid dimer;
 感度の点から、(メタ)アクリル酸が特に好ましい。
 エポキシ樹脂にα,β-不飽和モノカルボン酸又はカルボキシ基を有するα,β-不飽和モノカルボン酸エステルを付加させる方法としては、公知の手法を用いることができる。例えば、エステル化触媒の存在下、50~150℃の温度で、α,β-不飽和モノカルボン酸又はカルボキシ基を有するα,β-不飽和モノカルボン酸エステルとエポキシ樹脂とを反応させることができる。
 ここで用いる触媒としては、トリエチルホスフィン、トリブチルホスフィン、トリシクロヘキシルホスフィン、トリフェニルホスフィン等の3級ホスフィン、トリエチルアミン、トリメチルアミン、ベンジルジメチルアミン、ベンジルジエチルアミン等の3級アミン、テトラメチルアンモニウムクロライド、テトラエチルアンモニウムクロライド、ドデシルトリメチルアンモニウムクロライド等の4級アンモニウム塩を用いることができる。
From the viewpoint of sensitivity, (meth) acrylic acid is particularly preferable.
A known method can be used as a method for adding an α, β-unsaturated monocarboxylic acid or an α, β-unsaturated monocarboxylic acid ester having a carboxy group to the epoxy resin. For example, in the presence of an esterification catalyst, an α, β-unsaturated monocarboxylic acid or an α, β-unsaturated monocarboxylic acid ester having a carboxy group can be reacted with an epoxy resin at a temperature of 50 to 150 ° C. can.
The catalyst used here includes tertiary phosphines such as triethylphosphine, tributylphosphine, tricyclohexylphosphine and triphenylphosphine, tertiary amines such as triethylamine, trimethylamine, benzyldimethylamine and benzyldiethylamine, tetramethylammonium chloride and tetraethylammonium chloride. , Quaternary ammonium salts such as dodecyltrimethylammonium chloride can be used.
 なお、エポキシ樹脂、α,β-不飽和モノカルボン酸又はカルボキシ基を有するα,β-不飽和モノカルボン酸エステル、及びエステル化触媒は、いずれも1種を単独で用いてもよく、2種以上を併用してもよい。
 α,β-不飽和モノカルボン酸又はカルボキシ基を有するα,β-不飽和モノカルボン酸エステルの使用量は、エポキシ樹脂のエポキシ基1当量に対し0.5~1.2当量の範囲が好ましく、0.7~1.1当量の範囲がより好ましい。
 α,β-不飽和モノカルボン酸又はカルボキシ基を有するα,β-不飽和モノカルボン酸エステルの使用量を前記下限値以上とすることで不飽和基の導入量が十分となり、引き続く多塩基酸及び/又はその無水物との反応も十分となり、また、多量のエポキシ基の残存を抑制できる傾向がある。一方で、前記使用量を前記上限値以下とすることでα,β-不飽和モノカルボン酸又はカルボキシ基を有するα,β-不飽和モノカルボン酸エステルが未反応物として残存するのを抑制できる傾向がある。
As the epoxy resin, α, β-unsaturated monocarboxylic acid or α, β-unsaturated monocarboxylic acid ester having a carboxy group, and the esterification catalyst, one type may be used alone or two types may be used. The above may be used together.
The amount of α, β-unsaturated monocarboxylic acid or α, β-unsaturated monocarboxylic acid ester having a carboxy group is preferably in the range of 0.5 to 1.2 equivalents with respect to 1 equivalent of the epoxy group of the epoxy resin. , 0.7 to 1.1 equivalents are more preferred.
By setting the amount of α, β-unsaturated monocarboxylic acid or α, β-unsaturated monocarboxylic acid ester having a carboxy group to the above lower limit or more, the amount of unsaturated group introduced becomes sufficient, and the subsequent polybasic acid And / or its reaction with the anhydride is sufficient, and there is a tendency that a large amount of residual epoxy group can be suppressed. On the other hand, by setting the amount to be used to the upper limit or less, it is possible to suppress the α, β-unsaturated monocarboxylic acid or the α, β-unsaturated monocarboxylic acid ester having a carboxy group from remaining as an unreacted product. Tend.
 多塩基酸及び/又はその無水物、多価アルコールとしては、アルカリ可溶性樹脂(a1)と同様の化合物を使用することができる。また合成法もアルカリ可溶性樹脂(a1)と同様の合成方法を用いることができる。 As the polybasic acid and / or its anhydride and the polyhydric alcohol, the same compound as the alkali-soluble resin (a1) can be used. Further, as the synthesis method, the same synthesis method as that of the alkali-soluble resin (a1) can be used.
 このようにして得られるエポキシ(メタ)アクリレート樹脂(a2-1、a2-2)の酸価は、10mgKOH/g以上が好ましく、50mgKOH/g以上がより好ましく、80mgKOH/g以上がさらに好ましい。また、200mgKOH/g以下であることが好ましく、150mgKOH/g以下であることがより好ましい。前記下限値以上とすることで現像性が良好となる傾向がある。また、前記上限値以下とすることでアルカリ耐性を良好にすることができる傾向がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、10~200mgKOH/gが好ましく、50~200mgKOH/gがより好ましく、80~150mgKOH/gがさらに好ましい。
The acid value of the epoxy (meth) acrylate resin (a2-1, a2-2) thus obtained is preferably 10 mgKOH / g or more, more preferably 50 mgKOH / g or more, still more preferably 80 mgKOH / g or more. Further, it is preferably 200 mgKOH / g or less, and more preferably 150 mgKOH / g or less. When the value is equal to or higher than the lower limit, the developability tends to be good. Further, the alkali resistance tends to be improved by setting the value to the upper limit or less.
The above upper and lower limits can be combined arbitrarily. For example, 10 to 200 mgKOH / g is preferable, 50 to 200 mgKOH / g is more preferable, and 80 to 150 mgKOH / g is further preferable.
 エポキシ(メタ)アクリレート樹脂(a2-1、a2-2)のゲルパーミエーションクロマトグラフィー(GPC)測定によるポリスチレン換算の重量平均分子量(Mw)は、1,000以上が好ましく、1,500以上がより好ましく、2,000以上がさらに好ましく、2,300以上が特に好ましい。また、20,000以下が好ましく、15,000以下がより好ましく、10,000以下がさらに好ましく、8,000以下がよりさらに好ましく、6,000以下が特に好ましい。前記下限値以上とすることで感度、塗膜強度、アルカリ耐性が良好となる傾向がある。また、前記上限値以下とすることで現像性や再溶解性を良好なものとすることができる傾向がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、1,000~20,000が好ましく、1,000~15,000がより好ましく、1,500~10,000がさらに好ましく、2,000~8,000がよりさらに好ましく、2,300~6,000が特に好ましい。
The polystyrene-equivalent weight average molecular weight (Mw) of the epoxy (meth) acrylate resin (a2-1, a2-2) measured by gel permeation chromatography (GPC) is preferably 1,000 or more, more preferably 1,500 or more. It is preferable, more preferably 2,000 or more, and particularly preferably 2,300 or more. Further, 20,000 or less is preferable, 15,000 or less is more preferable, 10,000 or less is further preferable, 8,000 or less is further preferable, and 6,000 or less is particularly preferable. When the value is equal to or higher than the lower limit, the sensitivity, coating film strength, and alkali resistance tend to be good. Further, when the value is not more than the upper limit, the developability and resolubility tend to be good.
The above upper and lower limits can be combined arbitrarily. For example, 1,000 to 20,000 is preferable, 1,000 to 15,000 is more preferable, 1,500 to 10,000 is more preferable, 2,000 to 8,000 is even more preferable, and 2,300 to 8,000. 6,000 is particularly preferred.
<アクリル共重合樹脂(a3)>
 アクリル共重合樹脂(a3)としては、例えば、日本国特開平7-207211号公報、日本国特開平8-259876号公報、日本国特開平10-300922号公報、日本国特開平11-140144号公報、日本国特開平11-174224号公報、日本国特開2000-56118号公報、日本国特開2003-233179号公報、日本国特開2007-270147号公報の各公報に記載された様々な高分子化合物を使用することができる。好ましくは、下記(a3-1)~(a3-4)の樹脂が挙げられ、(a3-1)の樹脂が特に好ましい。
<Acrylic copolymer resin (a3)>
Examples of the acrylic copolymer resin (a3) include Japanese Patent Laid-Open No. 7-2072111, Japanese Patent Application Laid-Open No. 8-259876, Japanese Patent Application Laid-Open No. 10-300922, and Japanese Patent Application Laid-Open No. 11-140144. Various publications described in Japanese Patent Laid-Open No. 11-174224, Japanese Patent Application Laid-Open No. 2000-563118, Japanese Patent Application Laid-Open No. 2003-233179, and Japanese Patent Application Laid-Open No. 2007-270147. High polymer compounds can be used. The following resins (a3-1) to (a3-4) are preferable, and the resin of (a3-1) is particularly preferable.
 (a3-1):エポキシ基含有(メタ)アクリレートと、他のラジカル重合性単量体との共重合体に対し、当該共重合体が有するエポキシ基の少なくとも一部に不飽和一塩基酸を付加させてなる樹脂、あるいは当該付加反応により生じた水酸基の少なくとも一部に多塩基酸無水物を付加させて得られる樹脂
 (a3-2):主鎖にカルボキシ基を含有する直鎖状アルカリ可溶性樹脂
 (a3-3):(a3-2)の樹脂のカルボキシ基部分に、エポキシ基含有不飽和化合物を付加させた樹脂
 (a3-4):(メタ)アクリル系樹脂
(A3-1): With respect to a polymer of an epoxy group-containing (meth) acrylate and another radically polymerizable monomer, unsaturated monobasic acid is added to at least a part of the epoxy group of the copolymer. Resin to be added, or resin obtained by adding a polybasic acid anhydride to at least a part of the hydroxyl group generated by the addition reaction (a3-2): Linear alkali-soluble having a carboxy group in the main chain. Resin (a3-3): Resin in which an epoxy group-containing unsaturated compound is added to the carboxy group portion of the resin of (a3-2) (a3-4): (meth) acrylic resin.
<その他のアルカリ可溶性樹脂(a4)>
 その他のアルカリ可溶性樹脂(a4)は、アルカリ可溶性樹脂(a1)、アルカリ可溶性樹脂(a1)以外のカルボキシ基を有するエポキシ(メタ)アクリレート樹脂(a2)及びアクリル共重合樹脂(a3)を除くアルカリ可溶性樹脂であれば特に制限はなく、カラーフィルター用感光性樹脂組成物に通常使用される樹脂から選択すればよい。例えば、日本国特開2007-271727号公報、日本国特開2007-316620号公報、日本国特開2007-334290号公報に記載のアルカリ可溶性樹脂が挙げられる。
<Other alkali-soluble resin (a4)>
The other alkali-soluble resin (a4) is alkali-soluble except for the alkali-soluble resin (a1), the epoxy (meth) acrylate resin (a2) having a carboxy group other than the alkali-soluble resin (a1), and the acrylic copolymer resin (a3). As long as it is a resin, there is no particular limitation, and it may be selected from the resins usually used for the photosensitive resin composition for a color filter. For example, the alkali-soluble resins described in Japanese Patent Application Laid-Open No. 2007-27172, Japanese Patent Application Laid-Open No. 2007-316620, and Japanese Patent Application Laid-Open No. 2007-334290 can be mentioned.
 (a)アルカリ可溶性樹脂の含有割合は、特に限定されないが、本発明の感光性樹脂組成物の全固形分に対して、好ましくは5質量%以上、より好ましくは10質量%以上、さらに好ましくは15質量%以上であり、特に好ましくは20質量%以上である。また、好ましくは90質量%以下、より好ましくは70質量%以下、さらに好ましくは50質量%以下、よりさらに好ましくは30質量%以下、特に好ましくは25質量%以下である。前記下限値以上とすることで未露光部分の現像液に対する溶解性が良好となる傾向がある。また、前記上限値以下とすることで露光部への現像液の過剰な浸透を抑制することができ、画像のシャープ性や細線密着性が良好となる傾向がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、5~90質量%が好ましく、5~70質量%がより好ましく、10~50質量%がさらに好ましく、15~30質量%がよりさらに好ましく、20~25質量%が特に好ましい。
(A) The content ratio of the alkali-soluble resin is not particularly limited, but is preferably 5% by mass or more, more preferably 10% by mass or more, still more preferably 10% by mass, based on the total solid content of the photosensitive resin composition of the present invention. It is 15% by mass or more, and particularly preferably 20% by mass or more. Further, it is preferably 90% by mass or less, more preferably 70% by mass or less, further preferably 50% by mass or less, still more preferably 30% by mass or less, and particularly preferably 25% by mass or less. By setting the value to the lower limit or more, the solubility of the unexposed portion in the developing solution tends to be good. Further, by setting the value to the upper limit or less, excessive penetration of the developing solution into the exposed portion can be suppressed, and the sharpness and fine line adhesion of the image tend to be improved.
The above upper and lower limits can be combined arbitrarily. For example, 5 to 90% by mass is preferable, 5 to 70% by mass is more preferable, 10 to 50% by mass is further preferable, 15 to 30% by mass is further preferable, and 20 to 25% by mass is particularly preferable.
 アルカリ可溶性樹脂(a1)の含有割合は、特に限定されないが、本発明の感光性樹脂組成物の全固形分に対して、好ましくは5質量%以上、より好ましくは10質量%以上、さらに好ましくは15質量%以上であり、好ましくは90質量%以下、より好ましくは70質量%以下、さらに好ましくは50質量%以下、よりさらに好ましくは30質量%以下、特に好ましくは25質量%以下である。前記下限値以上とすることで未露光部分の現像液に対する溶解性が良好となる傾向がある。また、前記上限値以下とすることで露光部への現像液の過剰な浸透を抑制することができ、画像のシャープ性や細線密着性が良好となる傾向がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、5~90質量%が好ましく、5~70質量%がより好ましく、10~50質量%がさらに好ましく、10~30質量%がよりさらに好ましく、15~25質量%が特に好ましい。
The content ratio of the alkali-soluble resin (a1) is not particularly limited, but is preferably 5% by mass or more, more preferably 10% by mass or more, still more preferably 10% by mass, based on the total solid content of the photosensitive resin composition of the present invention. It is 15% by mass or more, preferably 90% by mass or less, more preferably 70% by mass or less, still more preferably 50% by mass or less, still more preferably 30% by mass or less, and particularly preferably 25% by mass or less. By setting the value to the lower limit or more, the solubility of the unexposed portion in the developing solution tends to be good. Further, by setting the value to the upper limit or less, excessive penetration of the developing solution into the exposed portion can be suppressed, and the sharpness and fine line adhesion of the image tend to be improved.
The above upper and lower limits can be combined arbitrarily. For example, 5 to 90% by mass is preferable, 5 to 70% by mass is more preferable, 10 to 50% by mass is further preferable, 10 to 30% by mass is further preferable, and 15 to 25% by mass is particularly preferable.
 (a)アルカリ可溶性樹脂の全含有量に対する、アルカリ可溶性樹脂(a1)の含有割合は、好ましくは10質量%以上、より好ましくは30質量%以上、さらに好ましくは50質量%以上であり、特に好ましくは90質量%以上である。また、好ましくは100質量%以下である。前記下限値以上とすることで露光部への現像液の過剰な浸透を抑制することができ、細線密着性が良好となる傾向がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、10~100質量%が好ましく、30~100質量%がより好ましく、50~100質量%がさらに好ましく、90~100質量%が特に好ましい。
(A) The content ratio of the alkali-soluble resin (a1) with respect to the total content of the alkali-soluble resin is preferably 10% by mass or more, more preferably 30% by mass or more, still more preferably 50% by mass or more, and particularly preferably. Is 90% by mass or more. Further, it is preferably 100% by mass or less. By setting the value to the lower limit or more, excessive penetration of the developing solution into the exposed portion can be suppressed, and the fine line adhesion tends to be good.
The above upper and lower limits can be combined arbitrarily. For example, 10 to 100% by mass is preferable, 30 to 100% by mass is more preferable, 50 to 100% by mass is further preferable, and 90 to 100% by mass is particularly preferable.
 (b)光重合性モノマー100質量部に対する(a)アルカリ可溶性樹脂の含有量は、100質量部以上が好ましく、150質量部以上がより好ましく、200質量部以上がさらに好ましい。また、1000質量部以下が好ましく、800質量部以上がより好ましく、600質量部以上がさらに好ましく、400質量部以上が特に好ましい。前記下限値以上であることで、未露光部分の現像液に対する溶解性が良好となる傾向がある。また、前記上限値以下であることで、露光部への現像液の過剰な浸透を抑制することができ、画像のシャープ性や細線密着性が良好となる傾向がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、100~1000質量部が好ましく、100~800質量部がより好ましく、150~600質量部がさらに好ましく、200~400質量部が特に好ましい。
(B) The content of the (a) alkali-soluble resin with respect to 100 parts by mass of the photopolymerizable monomer is preferably 100 parts by mass or more, more preferably 150 parts by mass or more, still more preferably 200 parts by mass or more. Further, 1000 parts by mass or less is preferable, 800 parts by mass or more is more preferable, 600 parts by mass or more is further preferable, and 400 parts by mass or more is particularly preferable. When it is at least the above lower limit value, the solubility of the unexposed portion in the developing solution tends to be good. Further, when the value is not more than the upper limit, excessive penetration of the developing solution into the exposed portion can be suppressed, and the sharpness and fine line adhesion of the image tend to be improved.
The above upper and lower limits can be combined arbitrarily. For example, 100 to 1000 parts by mass is preferable, 100 to 800 parts by mass is more preferable, 150 to 600 parts by mass is further preferable, and 200 to 400 parts by mass is particularly preferable.
<(b)光重合性モノマー>
 本発明の感光性樹脂組成物は、感度等の点から(b)光重合性モノマーを含有する。
 本発明に用いられる(b)光重合性モノマーとしては、分子内にエチレン性不飽和基を少なくとも1個有する化合物(以下、「エチレン性単量体」と称することがある)を挙げることができる。具体的には、例えば、(メタ)アクリル酸、(メタ)アクリル酸アルキルエステル、アクリロニトリル、スチレン及びエチレン性不飽和結合を1個有するカルボン酸と、多価又は1価アルコールのエステルが挙げられる。
<(B) Photopolymerizable monomer>
The photosensitive resin composition of the present invention contains (b) a photopolymerizable monomer from the viewpoint of sensitivity and the like.
Examples of the (b) photopolymerizable monomer used in the present invention include compounds having at least one ethylenically unsaturated group in the molecule (hereinafter, may be referred to as “ethylenic monomer”). .. Specific examples thereof include (meth) acrylic acid, (meth) acrylic acid alkyl ester, acrylonitrile, styrene and a carboxylic acid having one ethylenically unsaturated bond, and an ester of a polyvalent or monovalent alcohol.
<下記一般式(b5)で表される部分構造を有する光重合性モノマー(b6)>
 本発明に用いられる(b)光重合性モノマーは下記一般式(b5)で表される部分構造を有する光重合性モノマー(b6)を含む。光重合性モノマー(b6)を含むことにより、基板との密着応力及びホットプレート乾燥時のピンムラが良好となる傾向がある。
<Photopolymerizable monomer (b6) having a partial structure represented by the following general formula (b5)>
The (b) photopolymerizable monomer used in the present invention includes a photopolymerizable monomer (b6) having a partial structure represented by the following general formula (b5). By containing the photopolymerizable monomer (b6), the adhesion stress with the substrate and the pin unevenness at the time of hot plate drying tend to be good.
Figure JPOXMLDOC01-appb-C000019
Figure JPOXMLDOC01-appb-C000019
(式(b5)中、Rは置換基を有していてもよい炭素数が2~6のアルキレン基を表し、Rは水素原子又はメチル基を表す。mは1~3の整数を表す。*は結合手を表す。) (In the formula (b5), R 1 represents an alkylene group having 2 to 6 carbon atoms which may have a substituent, R 2 represents a hydrogen atom or a methyl group, and m represents an integer of 1 to 3. Represents. * Represents a bond.)
 特に、基板との密着性の観点から、本発明で用いる(b5)で表される部分構造を有する光重合性モノマー(b6)は、下記一般式(b1)~(b4)のいずれかで表される構造を有することが好ましい。 In particular, from the viewpoint of adhesion to the substrate, the photopolymerizable monomer (b6) having the partial structure represented by (b5) used in the present invention is represented by any of the following general formulas (b1) to (b4). It is preferable to have a structure to be polymerized.
Figure JPOXMLDOC01-appb-C000020
Figure JPOXMLDOC01-appb-C000020
 式(b1)中、Rは式(b5)に示す基であり、Rは下記一般式(b7)に示す基であり、p1は1~4の整数であり、*は結合手を示す。 In the formula (b1), R b is a group shown in the formula (b5), R c is a group shown in the following general formula (b7), p1 is an integer of 1 to 4, and * indicates a bond. ..
Figure JPOXMLDOC01-appb-C000021
Figure JPOXMLDOC01-appb-C000021
 式(b7)中、Rは前述と同義であり、*は結合手を示す。 In equation (b7), R 2 has the same meaning as described above, and * indicates a bond.
Figure JPOXMLDOC01-appb-C000022
Figure JPOXMLDOC01-appb-C000022
 式(b2)中、Rは式(b5)に示す基であり、Rは式(b7)に示す基であり、p2は1~6の整数であり、*は結合手を示す。 In the formula (b2), R b is a group shown in the formula (b5), R c is a group shown in the formula (b7), p2 is an integer of 1 to 6, and * indicates a bond.
Figure JPOXMLDOC01-appb-C000023
Figure JPOXMLDOC01-appb-C000023
 式(b3)中、Rは式(b5)に示す基であり、Rは式(b7)に示す基であり、Rは炭素数1~6のアルキル基であり、p3は1~3の整数であり、*は結合手を示す。 In the formula (b3), R b is a group represented by the formula (b5), R c is a group represented by the formula (b7), R 8 is an alkyl group having 1 to 6 carbon atoms, and p3 is 1 to 1 to. It is an integer of 3, and * indicates a bond.
Figure JPOXMLDOC01-appb-C000024
Figure JPOXMLDOC01-appb-C000024
 式(b4)中、Rは式(b5)に示す基であり、Rは式(b7)に示す基であり、Rは炭素数1~10のアルキレン基、炭素数7~10のアリーレンアルキレン基、又は炭素数6~10のアリーレン基である。なお、1分子中に存在する複数のRは互いに同一であっても異なっていてもよい。p4は1~3の整数であり、*は結合手を示す。 In the formula (b4), R b is a group represented by the formula (b5), R c is a group represented by the formula (b7), and R 9 is an alkylene group having 1 to 10 carbon atoms and 7 to 10 carbon atoms. It is an arylene alkylene group or an arylene group having 6 to 10 carbon atoms. The plurality of R9s existing in one molecule may be the same or different from each other. p4 is an integer of 1 to 3, and * indicates a bond.
 式(b5)中、Rは主鎖の炭素数が2~6の分岐があってもよいアルキレン基を表し、Rは水素原子又はメチル基を表す。mは1~3の整数を表す。複数のRは同じであっても異なっていてもよい。 In formula (b5), R 1 represents an alkylene group in which the main chain may have branches having 2 to 6 carbon atoms, and R 2 represents a hydrogen atom or a methyl group. m represents an integer of 1 to 3. The plurality of R 1s may be the same or different.
 式(b5)において、Rは主鎖の炭素数が2~6の分岐があってもよいアルキレン基を表す。細線密着性及び基板との密着応力の観点から、その炭素数は3以上が好ましく、4以上がより好ましく、また、6以下が好ましく、5以下がより好ましい。上記の上限及び下限は任意に組み合わせることができる。例えば、3~6が好ましく、4~5がより好ましい。
 アルキレン基は分岐を有していても有していなくともよい。細線密着性及び基板との密着応力の観点からは分岐を有さないことが好ましい。
 主鎖の炭素数が2~6の分岐があってもよいアルキレン基としては、例えば、メチレン基、エチレン基、1,3-プロピレン基、1,2-プロピレン基、1,4-ブチレン基、1,2-ブチレン基、1,3-ブチレン基、1,5-ペンチレン基、1,2-ペンチレン基、1,3-ペンチレン基、1,6-ヘキシレン基、シクロヘキシレン基が挙げられる。細線密着性及び基板との密着応力の観点から、1,4-ブチレン基、1,5-ペンチレン基が好ましく、1,5-ペンチレン基がより好ましい。
In formula (b5), R 1 represents an alkylene group that may have branches of the main chain having 2 to 6 carbon atoms. From the viewpoint of fine wire adhesion and adhesion stress with the substrate, the carbon number thereof is preferably 3 or more, more preferably 4 or more, preferably 6 or less, and more preferably 5 or less. The above upper and lower limits can be combined arbitrarily. For example, 3 to 6 is preferable, and 4 to 5 is more preferable.
The alkylene group may or may not have a branch. From the viewpoint of fine wire adhesion and adhesion stress with the substrate, it is preferable that there is no branching.
Examples of the alkylene group having a branch having 2 to 6 carbon atoms in the main chain include a methylene group, an ethylene group, a 1,3-propylene group, a 1,2-propylene group and a 1,4-butylene group. Examples thereof include 1,2-butylene group, 1,3-butylene group, 1,5-pentylene group, 1,2-pentylene group, 1,3-pentylene group, 1,6-hexylene group and cyclohexylene group. From the viewpoint of fine wire adhesion and adhesion stress with the substrate, 1,4-butylene group and 1,5-pentylene group are preferable, and 1,5-pentylene group is more preferable.
 式(b1)においてp1は、1以上、好ましくは2以上であり、また、4以下、好ましくは3以下である。下限値以上とすることで基板との密着応力向上の効果があり、また上限値以下とすることで露光部への現像液の過剰な浸透を抑制することができ、画像のシャープ性や細線密着性が良好となる効果がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、1~3が好ましく、2~3がより好ましい。
In the formula (b1), p1 is 1 or more, preferably 2 or more, and 4 or less, preferably 3 or less. By setting it above the lower limit, there is an effect of improving the adhesion stress with the substrate, and by setting it below the upper limit, it is possible to suppress excessive penetration of the developer into the exposed area, resulting in sharpness of the image and adhesion of fine lines. It has the effect of improving the sex.
The above upper and lower limits can be combined arbitrarily. For example, 1 to 3 is preferable, and 2 to 3 is more preferable.
 式(b2)においてp2は、1以上、好ましくは2以上、より好ましくは3以上であり、また、6以下、好ましくは5以下である。下限値以上とすることで基板との密着応力向上の効果があり、また上限値以下とすることで露光部への現像液の過剰な浸透を抑制することができ、画像のシャープ性や細線密着性が良好となる効果がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、2~6が好ましく、2~5がより好ましく、3~5がさらに好ましい。
In the formula (b2), p2 is 1 or more, preferably 2 or more, more preferably 3 or more, and 6 or less, preferably 5 or less. By setting it above the lower limit, there is an effect of improving the adhesion stress with the substrate, and by setting it below the upper limit, it is possible to suppress excessive penetration of the developer into the exposed area, resulting in sharpness of the image and adhesion of fine lines. It has the effect of improving the sex.
The above upper and lower limits can be combined arbitrarily. For example, 2 to 6 is preferable, 2 to 5 is more preferable, and 3 to 5 is even more preferable.
 式(b3)におけるRは、炭素数1~6のアルキル基であるが、基板との密着性の観点から、その炭素数は1以上、好ましくは2以上、また、6以下、好ましくは5以下、より好ましくは4以下である。炭素数1~6のアルキル基としては、例えば、メチル基、エチル基、1-プロピル基、2-プロピル基、1-ブチル基、2-ブチル基、1-ペンチル基、1-ヘキシル基、シクロヘキシル基が挙げられる。細線密着性及び基板との密着応力の観点から、メチル基、エチル基が好ましく、エチル基がより好ましい。 R 8 in the formula (b3) is an alkyl group having 1 to 6 carbon atoms, but the carbon number is 1 or more, preferably 2 or more, and 6 or less, preferably 5 from the viewpoint of adhesion to the substrate. Hereinafter, it is more preferably 4 or less. Examples of the alkyl group having 1 to 6 carbon atoms include a methyl group, an ethyl group, a 1-propyl group, a 2-propyl group, a 1-butyl group, a 2-butyl group, a 1-pentyl group, a 1-hexyl group and a cyclohexyl. The group is mentioned. From the viewpoint of fine wire adhesion and adhesion stress with the substrate, a methyl group and an ethyl group are preferable, and an ethyl group is more preferable.
 式(b3)においてp3は、1以上、好ましくは2以上であり、3以下である。下限値以上とすることで密着力向上の効果があり、上限値以下とすることで露光部への現像液の過剰な浸透を抑制することができ、画像のシャープ性や細線密着性が良好となる効果がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、2~3が好ましい。
In the formula (b3), p3 is 1 or more, preferably 2 or more, and 3 or less. Setting it above the lower limit has the effect of improving adhesion, and setting it below the upper limit suppresses excessive penetration of the developer into the exposed area, resulting in good image sharpness and fine line adhesion. There is an effect.
The above upper and lower limits can be combined arbitrarily. For example, 2 to 3 are preferable.
 式(b4)において、Rのアルキレン基の炭素数は、基板との密着性の観点から、1以上、好ましくは2以上、また、好ましくは6以下、より好ましくは3以下である。炭素数1~10のアルキル基としては、例えば、メチレン基、エチレン基、1,3-プロピレン基、1,2-プロピレン基、1,4-ブチレン基、1,2-ブチレン基、1,5-ペンチレン基、1,6-ヘキシレン基、シクロヘキシレン基、メチレンシクロヘキシレン基が挙げられる。基板との密着性の観点から、メチレン基、エチレン基、1,3-プロピレン基が好ましく、エチレン基がより好ましい。
 式(b4)において、Rのアリーレンアルキレン基の炭素数は、基板との密着性の観点から、7以上、また、好ましくは9以下である。炭素数7~10のアリーレンアルキレン基としては、例えば、フェニレンメチレン基、フェニレンエチレン基、フェニレンプロピレン基が挙げられる。基板との密着性の観点から、フェニレンメチレン基、フェニレンエチレン基が好ましく、フェニレンメチレン基がより好ましい。
 式(b4)において、Rのアリーレン基の炭素数は、基板との密着性の観点から、6以上、また、10以下である。炭素数6~10のアリーレン基としては、例えば、フェニレン基、ナフチレン基が挙げられる。基板との密着性の観点から、フェニレン基が好ましい。
 式(b4)におけるRとしては、細線密着性及び基板との密着応力の観点から、メチレン基、エチレン基、プロピレン基が好ましく、エチレン基がより好ましい。
In the formula (b4), the carbon number of the alkylene group of R 9 is 1 or more, preferably 2 or more, preferably 6 or less, and more preferably 3 or less from the viewpoint of adhesion to the substrate. Examples of the alkyl group having 1 to 10 carbon atoms include a methylene group, an ethylene group, a 1,3-propylene group, a 1,2-propylene group, a 1,4-butylene group, a 1,2-butylene group and 1,5. -Pentylene group, 1,6-hexylene group, cyclohexylene group, methylenecyclohexylene group can be mentioned. From the viewpoint of adhesion to the substrate, a methylene group, an ethylene group, and a 1,3-propylene group are preferable, and an ethylene group is more preferable.
In the formula (b4), the arylene alkylene group of R9 has 7 or more carbon atoms, and preferably 9 or less carbon atoms from the viewpoint of adhesion to the substrate. Examples of the arylene alkylene group having 7 to 10 carbon atoms include a phenylene methylene group, a phenylene ethylene group, and a phenylene propylene group. From the viewpoint of adhesion to the substrate, a phenylene methylene group and a phenylene ethylene group are preferable, and a phenylene methylene group is more preferable.
In the formula (b4), the carbon number of the arylene group of R9 is 6 or more and 10 or less from the viewpoint of adhesion to the substrate. Examples of the arylene group having 6 to 10 carbon atoms include a phenylene group and a naphthylene group. A phenylene group is preferable from the viewpoint of adhesion to the substrate.
As R 9 in the formula (b4), a methylene group, an ethylene group, and a propylene group are preferable, and an ethylene group is more preferable, from the viewpoint of fine wire adhesion and adhesion stress with the substrate.
 式(b4)においてp4は、1以上、好ましくは2以上であり、また、3以下である。下限値以上とすることで基板との密着応力向上の効果があり、また、上限値以下とすることで露光部への現像液の過剰な浸透を抑制することができ、画像のシャープ性や細線密着性が良好となる効果がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、2~3が好ましい。
In the formula (b4), p4 is 1 or more, preferably 2 or more, and 3 or less. By setting it above the lower limit, there is an effect of improving the adhesion stress with the substrate, and by setting it below the upper limit, it is possible to suppress excessive penetration of the developer into the exposed area, resulting in sharpness of the image and fine lines. It has the effect of improving adhesion.
The above upper and lower limits can be combined arbitrarily. For example, 2 to 3 are preferable.
 光重合性モノマー(b6)は、市販品では、例えば、日本化薬社製の「DPCA-20」、「DPCA-30」、「DPCA-60」、「DPCA-120」、新中村化学社製の「A9300-CL1」、「A9300-CL3」が挙げられる。 The photopolymerizable monomer (b6) is a commercially available product, for example, "DPCA-20", "DPCA-30", "DPCA-60", "DPCA-120" manufactured by Nippon Kayaku Co., Ltd., manufactured by Shin-Nakamura Chemical Co., Ltd. "A9300-CL1" and "A9300-CL3" are mentioned.
 式(b1)~(b4)で表される構造を有する光重合性モノマー(b6)において、基板との密着応力の観点から、式(b2)で表される構造を有することが好ましい。 The photopolymerizable monomer (b6) having the structure represented by the formulas (b1) to (b4) preferably has the structure represented by the formula (b2) from the viewpoint of the adhesion stress with the substrate.
 基板との密着性の観点から、式(b5)で表される部分構造を有する光重合性モノマー(b6)の中でも、以下の構造の化合物を含むことが好ましい。 From the viewpoint of adhesion to the substrate, it is preferable to contain a compound having the following structure among the photopolymerizable monomers (b6) having a partial structure represented by the formula (b5).
Figure JPOXMLDOC01-appb-C000025
Figure JPOXMLDOC01-appb-C000025
<その他の光重合性モノマー>
 本発明において、光重合性モノマー(b6)以外の光重合性モノマーを使用することができる。
 本発明においては、特に、1分子中にエチレン性不飽和基を2個以上有する多官能エチレン性単量体を使用することが好ましい。多官能エチレン性単量体におけるエチレン性不飽和基の数は好ましくは2個以上、より好ましくは3個以上、さらに好ましくは4個以上、よりさらに好ましくは5個以上、特に好ましくは6個以上、また好ましくは10個以下、より好ましくは8個以下である。前記下限値以上とすることで感光性樹脂組成物が高感度となる傾向があり、また、前記上限値以下とすることで重合時の硬化収縮が小さくなる傾向がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、2~10個が好ましく、3~10個がより好ましく、4~10個がさらに好ましく、5~8個がよりさらに好ましく、6~8個が特に好ましい。
<Other photopolymerizable monomers>
In the present invention, a photopolymerizable monomer other than the photopolymerizable monomer (b6) can be used.
In the present invention, it is particularly preferable to use a polyfunctional ethylenic monomer having two or more ethylenically unsaturated groups in one molecule. The number of ethylenically unsaturated groups in the polyfunctional ethylenic monomer is preferably 2 or more, more preferably 3 or more, still more preferably 4 or more, still more preferably 5 or more, and particularly preferably 6 or more. , And more preferably 10 or less, more preferably 8 or less. When it is at least the above lower limit value, the photosensitive resin composition tends to have high sensitivity, and when it is at least the above upper limit value, the curing shrinkage during polymerization tends to be small.
The above upper and lower limits can be combined arbitrarily. For example, 2 to 10 pieces are preferable, 3 to 10 pieces are more preferable, 4 to 10 pieces are further preferable, 5 to 8 pieces are more preferable, and 6 to 8 pieces are particularly preferable.
 多官能エチレン性単量体としては、例えば、脂肪族ポリヒドロキシ化合物と不飽和カルボン酸とのエステル;芳香族ポリヒドロキシ化合物と不飽和カルボン酸とのエステル;脂肪族ポリヒドロキシ化合物、芳香族ポリヒドロキシ化合物等の多価ヒドロキシ化合物と、不飽和カルボン酸及び多塩基性カルボン酸とのエステル化反応により得られるエステル;が挙げられる。 Examples of the polyfunctional ethylenic monomer include an ester of an aliphatic polyhydroxy compound and an unsaturated carboxylic acid; an ester of an aromatic polyhydroxy compound and an unsaturated carboxylic acid; an aliphatic polyhydroxy compound and an aromatic polyhydroxy. Examples thereof include an ester obtained by an esterification reaction between a polyvalent hydroxy compound such as a compound and an unsaturated carboxylic acid and a polybasic carboxylic acid.
 脂肪族ポリヒドロキシ化合物と不飽和カルボン酸とのエステルとしては、エチレングリコールジアクリレート、トリエチレングリコールジアクリレート、トリメチロールプロパントリアクリレート、トリメチロールエタントリアクリレート、ペンタエリスリトールジアクリレート、ペンタエリスリトールトリアクリレート、ペンタエリスリトールテトラアクリレート、ジペンタエリスリトールテトラアクリレート、ジペンタエリスリトールペンタアクリレート、ジペンタエリスリトールヘキサアクリレート、グリセロールアクリレート等の脂肪族ポリヒドロキシ化合物のアクリル酸エステル;これら例示化合物のアクリレートをメタクリレートに代えたメタクリル酸エステル;これら例示化合物のアクリレートをイタコネートに代えたイタコン酸エステル;これら例示化合物のアクリレートをクロネートに代えたクロトン酸エステル;これら例示化合物のアクリレートをマレエートに代えたマレイン酸エステルが挙げられる。 Examples of the ester of the aliphatic polyhydroxy compound and the unsaturated carboxylic acid include ethylene glycol diacrylate, triethylene glycol diacrylate, trimethylolpropane triacrylate, trimethylol ethanetriacrylate, pentaerythritol diacrylate, pentaerythritol triacrylate, and penta. Acrylic acid esters of aliphatic polyhydroxy compounds such as erythritol tetraacrylate, dipentaerythritol tetraacrylate, dipentaerythritol pentaacrylate, dipentaerythritol hexaacrylate, and glycerol acrylate; methacrylic acid esters in which the acrylates of these exemplary compounds are replaced with methacrylate; Examples thereof include itaconic acid esters in which the acrylates of these exemplary compounds are replaced with itaconates; crotonic acid esters in which the acrylates of these exemplary compounds are replaced with clonates; maleic acid esters in which the acrylates of these exemplary compounds are replaced with maleates.
 芳香族ポリヒドロキシ化合物と不飽和カルボン酸とのエステルとしては、ハイドロキノンジアクリレート、ハイドロキノンジメタクリレート、レゾルシンジアクリレート、レゾルシンジメタクリレート、ピロガロールトリアクリレート等の芳香族ポリヒドロキシ化合物のアクリル酸エステル及びメタクリル酸エステルが挙げられる。
 多塩基性カルボン酸及び不飽和カルボン酸と、多価ヒドロキシ化合物のエステル化反応により得られるエステルとしては必ずしも単一物ではないが、代表的な具体例を挙げれば、アクリル酸、フタル酸、及びエチレングリコールの縮合物;アクリル酸、マレイン酸、及びジエチレングリコールの縮合物;メタクリル酸、テレフタル酸及びペンタエリスリトールの縮合物;アクリル酸、アジピン酸、ブタンジオール及びグリセリンの縮合物;が挙げられる。
Examples of the ester of the aromatic polyhydroxy compound and the unsaturated carboxylic acid include acrylic acid esters and methacrylic acid esters of aromatic polyhydroxy compounds such as hydroquinone diacrylate, hydroquinone dimethacrylate, resorcin diacrylate, resorcin dimethacrylate, and pyrogalloltriacrylate. Can be mentioned.
The ester obtained by the esterification reaction of a polybasic carboxylic acid and an unsaturated carboxylic acid with a polyvalent hydroxy compound is not necessarily a single substance, but typical specific examples include acrylic acid, phthalic acid, and Condensations of ethylene glycol; condensates of acrylic acid, maleic acid, and diethylene glycol; condensates of methacrylic acid, terephthalic acid and pentaerythritol; condensates of acrylic acid, adipic acid, butanediol and glycerin;
 その他、本発明に用いられる多官能エチレン性単量体としては、例えば、ポリイソシアネート化合物と水酸基含有(メタ)アクリル酸エステル又はポリイソシアネート化合物とポリオール及び水酸基含有(メタ)アクリル酸エステルを反応させて得られるようなウレタン(メタ)アクリレート類;多価エポキシ化合物とヒドロキシ(メタ)アクリレート又は(メタ)アクリル酸との付加反応物のようなエポキシアクリレート類;エチレンビスアクリルアミド等のアクリルアミド類;フタル酸ジアリル等のアリルエステル類;ジビニルフタレート等のビニル基含有化合物;が挙げられる。
 これらは1種を単独で用いてもよく、2種以上を併用してもよい。
In addition, as the polyfunctional ethylenic monomer used in the present invention, for example, a polyisocyanate compound and a hydroxyl group-containing (meth) acrylic acid ester or a polyisocyanate compound and a polyol and a hydroxyl group-containing (meth) acrylic acid ester are reacted. Urethane (meth) acrylates as obtained; epoxy acrylates such as an addition reaction product of a polyvalent epoxy compound and hydroxy (meth) acrylate or (meth) acrylic acid; acrylamides such as ethylenebisacrylamide; diallyl phthalate. Acrylate esters such as; vinyl group-containing compounds such as divinylphthalate;
These may be used alone or in combination of two or more.
 (b)光重合性モノマーの含有割合は、特に限定されないが、感光性樹脂組成物の全固形分に対して、好ましくは90質量%以下、より好ましくは70質量%以下、さらに好ましくは50質量%以下、よりさらに好ましくは30質量%以下、ことさら好ましくは20質量%以下、特に好ましくは10質量%以下である。光重合性モノマーの含有量が上記上限値以下であることで、露光部への現像液の浸透性が適度となり良好な画像を得ることができる傾向にある。(b)光重合性モノマーの含有割合の下限は、特に制限されないが、好ましくは1質量%以上、より好ましくは5質量%以上である。上記下限値以上であることで、紫外線照射による光硬化を向上させるとともに細線密着性も良好となる傾向にある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、1~90質量%が好ましく、1~70質量%がより好ましく、1~50質量%がさらに好ましく、5~30質量%がよりさらに好ましく、5~20質量%がことさら好ましく、5~10質量%が特に好ましい。
(B) The content ratio of the photopolymerizable monomer is not particularly limited, but is preferably 90% by mass or less, more preferably 70% by mass or less, still more preferably 50% by mass, based on the total solid content of the photosensitive resin composition. % Or less, more preferably 30% by mass or less, particularly preferably 20% by mass or less, and particularly preferably 10% by mass or less. When the content of the photopolymerizable monomer is not more than the above upper limit value, the permeability of the developing solution to the exposed portion becomes appropriate, and a good image tends to be obtained. (B) The lower limit of the content ratio of the photopolymerizable monomer is not particularly limited, but is preferably 1% by mass or more, more preferably 5% by mass or more. When it is at least the above lower limit value, the photocuring due to ultraviolet irradiation is improved and the fine line adhesion tends to be good.
The above upper and lower limits can be combined arbitrarily. For example, 1 to 90% by mass is preferable, 1 to 70% by mass is more preferable, 1 to 50% by mass is further preferable, 5 to 30% by mass is further preferable, and 5 to 20% by mass is particularly preferable. Mass% is particularly preferred.
 光重合性モノマー(b6)の含有割合は、特に制限されないが、感光性樹脂組成物の全固形分に対して、好ましくは90質量%以下、より好ましくは70質量%以下、さらに好ましくは50質量%以下、よりさらに好ましくは30質量%以下、ことさら好ましくは20質量%以下、特に好ましくは10質量%以下である。光重合性モノマー(b6)の含有量が上記上限値以下であることで、露光部への現像液の浸透性が適度となり良好な画像を得ることができる傾向にある。(b)光重合性モノマーの含有割合の下限は、特に制限されないが、好ましくは1質量%以上、より好ましくは5質量%以上である。上記下限値以上であることで、基板との密着応力も良好となる傾向にある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、1~90質量%が好ましく、1~70質量%がより好ましく、1~50質量%がさらに好ましく、5~30質量%がよりさらに好ましく、5~20質量%がことさら好ましく、5~10質量%が特に好ましい。
The content ratio of the photopolymerizable monomer (b6) is not particularly limited, but is preferably 90% by mass or less, more preferably 70% by mass or less, still more preferably 50% by mass, based on the total solid content of the photosensitive resin composition. % Or less, more preferably 30% by mass or less, particularly preferably 20% by mass or less, and particularly preferably 10% by mass or less. When the content of the photopolymerizable monomer (b6) is not more than the above upper limit value, the permeability of the developing solution to the exposed portion becomes appropriate and a good image tends to be obtained. (B) The lower limit of the content ratio of the photopolymerizable monomer is not particularly limited, but is preferably 1% by mass or more, more preferably 5% by mass or more. When it is at least the above lower limit value, the adhesion stress with the substrate tends to be good.
The above upper and lower limits can be combined arbitrarily. For example, 1 to 90% by mass is preferable, 1 to 70% by mass is more preferable, 1 to 50% by mass is further preferable, 5 to 30% by mass is further preferable, and 5 to 20% by mass is particularly preferable. Mass% is particularly preferred.
 (b)光重合性モノマーの全含有量に対する光重合性モノマー(b6)の含有割合は、30質量%以上が好ましく、50質量%以上がより好ましく、80質量%以上がさらに好ましい。また、100質量%以下が好ましい。前記下限値以上であることで、基板との密着応力が向上する傾向にある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、30~100質量%が好ましく、50~100質量%がより好ましく、80~100質量%がさらに好ましい。
(B) The content ratio of the photopolymerizable monomer (b6) to the total content of the photopolymerizable monomer is preferably 30% by mass or more, more preferably 50% by mass or more, still more preferably 80% by mass or more. Further, it is preferably 100% by mass or less. When it is at least the above lower limit value, the adhesion stress with the substrate tends to be improved.
The above upper and lower limits can be combined arbitrarily. For example, 30 to 100% by mass is preferable, 50 to 100% by mass is more preferable, and 80 to 100% by mass is further preferable.
<(c)光重合開始剤>
 本発明の感光性樹脂組成物は(c)光重合開始剤を含む。光重合開始剤は光を直接吸収し、分解反応又は水素引き抜き反応を起こし、重合活性ラジカルを発生する機能を有する成分である。必要に応じて増感色素等の付加剤を添加して使用しても良い。
<(C) Photopolymerization Initiator>
The photosensitive resin composition of the present invention contains (c) a photopolymerization initiator. The photopolymerization initiator is a component having a function of directly absorbing light, causing a decomposition reaction or a hydrogen abstraction reaction, and generating a polymerization active radical. If necessary, an additive such as a sensitizing dye may be added and used.
 光重合開始剤としては、例えば、日本国特開昭59-152396号公報、日本国特開昭61-151197号各公報に記載のチタノセン化合物を含むメタロセン化合物;日本国特開2000-56118号公報に記載のヘキサアリールビイミダゾール誘導体;日本国特開平10-39503号公報記載のハロメチル化オキサジアゾール誘導体、ハロメチル-s-トリアジン誘導体、N-フェニルグリシン等のN-アリール-α-アミノ酸類、N-アリール-α-アミノ酸塩類、N-アリール-α-アミノ酸エステル類等のラジカル活性剤、α-アミノアルキルフェノン誘導体;日本国特開2000-80068号公報、日本国特開2006-36750号公報等に記載されているオキシムエステル誘導体が挙げられる。 As the photopolymerization initiator, for example, a metallocene compound containing a titanosen compound described in JP-A-59-152396 and JP-A-61-151197 of Japan; Japanese Patent Application Laid-Open No. 2000-56118. Hexaaryl-biimidazole derivative according to Japanese Patent Application Laid-Open No. 10-39503, halomethylated oxadiazole derivative, halomethyl-s-triazine derivative, N-aryl-α-amino acids such as N-phenylglycine, N. -Radical activators such as aryl-α-amino acid salts, N-aryl-α-amino acid esters, α-aminoalkylphenone derivatives; Japanese Patent Laid-Open No. 2000-80068, Japanese Patent Application Laid-Open No. 2006-36750, etc. Examples thereof include the oxime ester derivative described in 1.
 チタノセン誘導体類としては、例えば、ジシクロペンタジエニルチタニウムジクロライド、ジシクロペンタジエニルチタニウムビスフェニル、ジシクロペンタジエニルチタニウムビス(2,3,4,5,6-ペンタフルオロフェニ-1-イル)、ジシクロペンタジエニルチタニウムビス(2,3,5,6-テトラフルオロフェニ-1-イル)、ジシクロペンタジエニルチタニウムビス(2,4,6-トリフルオロフェニ-1-イル)、ジシクロペンタジエニルチタニウムジ(2,6-ジフルオロフェニ-1-イル)、ジシクロペンタジエニルチタニウムジ(2,4-ジフルオロフェニ-1-イル)、ジ(メチルシクロペンタジエニル)チタニウムビス(2,3,4,5,6-ペンタフルオロフェニ-1-イル)、ジ(メチルシクロペンタジエニル)チタニウムビス(2,6-ジフルオロフェニ-1-イル)、ジシクロペンタジエニルチタニウム〔2,6-ジ-フルオロ-3-(ピロ-1-イル)-フェニ-1-イル〕が挙げられる。 Examples of titanocene derivatives include dicyclopentadienyl titanium dichloride, dicyclopentadienyl titanium bisphenyl, and dicyclopentadienyl titanium bis (2,3,4,5,6-pentafluoropheni-1-yl). ), Dicyclopentadienyl Titanium Bis (2,3,5,6-Tetrafluoropheni-1-yl), Dicyclopentadienyl Titanium Bis (2,4,6-Trifluoropheni-1-yl), Dicyclopentadienyl Titanium Di (2,6-difluoropheni-1-yl), Dicyclopentadienyl Titanium Di (2,4-difluoropheni-1-yl), Di (Methylcyclopentadienyl) Titanium Bis (2,3,4,5,6-pentafluoropheni-1-yl), di (methylcyclopentadienyl) titanium bis (2,6-difluoropheni-1-yl), dicyclopentadienyl titanium [ 2,6-Di-fluoro-3- (pyro-1-yl) -pheni-1-yl].
 ビイミダゾール誘導体類としては、例えば、2-(2’-クロロフェニル)-4,5-ジフェニルイミダゾール2量体、2-(2’-クロロフェニル)-4,5-ビス(3’-メトキシフェニル)イミダゾール2量体、2-(2’-フルオロフェニル)-4,5-ジフェニルイミダゾール2量体、2-(2’-メトキシフェニル)-4,5-ジフェニルイミダゾール2量体、(4’-メトキシフェニル)-4,5-ジフェニルイミダゾール2量体が挙げられる。 Examples of the biimidazole derivatives include 2- (2'-chlorophenyl) -4,5-diphenylimidazole dimer and 2- (2'-chlorophenyl) -4,5-bis (3'-methoxyphenyl) imidazole. Dimeric, 2- (2'-fluorophenyl) -4,5-diphenylimidazole dimer, 2- (2'-methoxyphenyl) -4,5-diphenylimidazole dimer, (4'-methoxyphenyl) ) -4,5-Diphenylimidazole dimer.
 ハロメチル化オキサジアゾール誘導体類としては、例えば、2-トリクロロメチル-5-(2’-ベンゾフリル)-1,3,4-オキサジアゾール、2-トリクロロメチル-5-〔β-(2’-ベンゾフリル)ビニル〕-1,3,4-オキサジアゾール、2-トリクロロメチル-5-〔β-(2’-(6’’-ベンゾフリル)ビニル)〕-1,3,4-オキサジアゾール、2-トリクロロメチル-5-フリル-1,3,4-オキサジアゾールが挙げられる。 Examples of the halomethylated oxadiazole derivatives include 2-trichloromethyl-5- (2'-benzofuryl) -1,3,4-oxadiazole and 2-trichloromethyl-5-[β- (2'-). Benzofuryl) vinyl] -1,3,4-oxadiazole, 2-trichloromethyl-5-[β- (2'-(6''-benzofuryl) vinyl)]-1,3,4-oxadiazole, Examples thereof include 2-trichloromethyl-5-furyl-1,3,4-oxadiazole.
 ハロメチル-s-トリアジン誘導体類としては、例えば、2-(4-メトキシフェニル)-4,6-ビス(トリクロロメチル)-s-トリアジン、2-(4-メトキシナフチル)-4,6-ビス(トリクロロメチル)-s-トリアジン、2-(4-エトキシナフチル)-4,6-ビス(トリクロロメチル)-s-トリアジン、2-(4-エトキシカルボニルナフチル)-4,6-ビス(トリクロロメチル)-s-トリアジンが挙げられる。 Examples of the halomethyl-s-triazine derivatives include 2- (4-methoxyphenyl) -4,6-bis (trichloromethyl) -s-triazine and 2- (4-methoxynaphthyl) -4,6-bis ( Trichloromethyl) -s-triazine, 2- (4-ethoxynaphthyl) -4,6-bis (trichloromethyl) -s-triazine, 2- (4-ethoxycarbonylnaphthyl) -4,6-bis (trichloromethyl) -S-Triazine is mentioned.
 α-アミノアルキルフェノン誘導体類としては、例えば、2-メチル-1〔4-(メチルチオ)フェニル〕-2-モルフォリノプロパン-1-オン、2-ベンジル-2-ジメチルアミノ-1-(4-モルフォリノフェニル)ブタン-1-オン、4-ジメチルアミノエチルベンゾエ-ト、4-ジメチルアミノイソアミルベンゾエ-ト、4-ジエチルアミノアセトフェノン、4-ジメチルアミノプロピオフェノン、2-エチルヘキシル-1,4-ジメチルアミノベンゾエート、2,5-ビス(4-ジエチルアミノベンザル)シクロヘキサノン、7-ジエチルアミノ-3-(4-ジエチルアミノベンゾイル)クマリン、4-(ジエチルアミノ)カルコンが挙げられる。 Examples of α-aminoalkylphenone derivatives include 2-methyl-1 [4- (methylthio) phenyl] -2-morpholinopropane-1-one and 2-benzyl-2-dimethylamino-1- (4-). Morphorinophenyl) Butane-1-one, 4-dimethylaminoethylbenzoate, 4-dimethylaminoisoamylbenzoate, 4-diethylaminoacetophenone, 4-dimethylaminopropiophenone, 2-ethylhexyl-1,4 -Dimethylaminobenzoate, 2,5-bis (4-diethylaminobenzal) cyclohexanone, 7-diethylamino-3- (4-diethylaminobenzoyl) coumarin, 4- (diethylamino) chalcone.
 光重合開始剤としては、特に、感度の点でオキシム誘導体類(オキシムエステル系化合物及びケトオキシムエステル系化合物)が好ましい。フェノール性水酸基を含むアルカリ可溶性樹脂を用いる場合などは、感度の点で不利になる場合があるため、特に感度に優れたオキシム誘導体類(オキシムエステル系化合物及びケトオキシム系化合物)が有用である。基板との密着性の観点から、オキシムエステル系化合物がより好ましい。 As the photopolymerization initiator, oxime derivatives (oxime ester-based compounds and keto-oxime ester-based compounds) are particularly preferable in terms of sensitivity. When an alkali-soluble resin containing a phenolic hydroxyl group is used, it may be disadvantageous in terms of sensitivity. Therefore, oxime derivatives (oxime ester compounds and ketooxime compounds) having particularly excellent sensitivity are useful. From the viewpoint of adhesion to the substrate, an oxime ester compound is more preferable.
 オキシムエステル系化合物の光重合開始剤は、その構造の中に紫外線を吸収する構造と光エネルギーを伝達する構造とラジカルを発生する構造を併せ持っているために、少量で感度が高く、かつ熱反応に対しては安定であり、少量で高感度な感光性樹脂組成物の設計が可能である。特に、露光光源のi線(365nm)に対する光吸収性の観点から、置換されていてもよいカルバゾリル基(置換されていてもよいカルバゾール環を有する基)を含有するオキシムエステル系化合物の場合に、この構造特性が良好に発現され、より好ましい。現在、市場では、遮光度が高く、薄膜なBM(ブラックマトリックス)が要求されており、顔料濃度も、ますます大きくなっている。このような状況においては、特に有効である。 The photopolymerization initiator of an oxime ester compound has a structure that absorbs ultraviolet rays, a structure that transmits light energy, and a structure that generates radicals in its structure, so that it is highly sensitive in a small amount and has a thermal reaction. It is possible to design a photosensitive resin composition that is stable and highly sensitive in a small amount. In particular, in the case of an oxime ester-based compound containing a optionally substituted carbazolyl group (a group having a optionally substituted carbazole ring) from the viewpoint of light absorption of an exposure light source for i-ray (365 nm). This structural property is well expressed and is more preferable. Currently, the market demands a thin BM (black matrix) with a high degree of shading, and the pigment concentration is also increasing. It is especially effective in such situations.
 オキシムエステル系化合物としては、下記一般式(22)で示される構造部分を含む化合物が挙げられ、好ましくは、下記一般式(23)で示されるオキシムエステル系化合物が挙げられる。 Examples of the oxime ester compound include a compound containing a structural portion represented by the following general formula (22), and preferably an oxime ester compound represented by the following general formula (23).
Figure JPOXMLDOC01-appb-C000026
Figure JPOXMLDOC01-appb-C000026
 式(22)中、R22は、それぞれ置換されていてもよい、炭素数2~12のアルカノイル、炭素数1~20のヘテロアリールアルカノイル基、炭素数3~25のアルケノイル基、炭素数3~8のシクロアルカノイル基、炭素数3~20のアルコキシカルボニルアルカノイル基、炭素数8~20のフェノキシカルボニルアルカノイル基、炭素数3~20のヘテロアリ-ルオキシカルボニルアルカノイル基、炭素数2~10のアミノアルキルカルボニル基、炭素数7~20のアリーロイル基、炭素数1~20のヘテロアリーロイル基、炭素数2~10のアルコキシカルボニル基、又は炭素数7~20のアリールオキシカルボニル基を示す。 In formula (22), R 22 may be substituted with an alkanoyl group having 2 to 12 carbon atoms, a heteroaryl alkanoyl group having 1 to 20 carbon atoms, an alkenoyl group having 3 to 25 carbon atoms, and 3 carbon atoms. Cyclo alkanoyl group of 8 to 8, alkoxycarbonyl alkanoyl group of 3 to 20 carbon atoms, phenoxycarbonyl alkanoyl group of 8 to 20 carbon atoms, heteroallyloxycarbonyl alkanoyl group of 3 to 20 carbon atoms, amino of 2 to 10 carbon atoms. An alkylcarbonyl group, an allylloyl group having 7 to 20 carbon atoms, a heteroallyloyl group having 1 to 20 carbon atoms, an alkoxycarbonyl group having 2 to 10 carbon atoms, or an aryloxycarbonyl group having 7 to 20 carbon atoms is shown.
Figure JPOXMLDOC01-appb-C000027
Figure JPOXMLDOC01-appb-C000027
 式(23)中、R21aは、水素、またはそれぞれ置換されていてもよい、炭素数1~20のアルキル基、炭素数2~25のアルケニル基、炭素数1~20のヘテロアリールアルキル基、炭素数3~20のアルコキシカルボニルアルキル基、炭素数8~20のフェノキシカルボニルアルキル基、炭素数1~20のヘテロアリールオキシカルボニルアルキル基もしくはヘテロアリールチオアルキル基、炭素数1~20のアミノアルキル基、炭素数2~12のアルカノイル基、炭素数3~25のアルケノイル基、炭素数3~8のシクロアルカノイル基、炭素数7~20のアリーロイル基、炭素数1~20のヘテロアリーロイル基、炭素数2~10のアルコキシカルボニル基、炭素数7~20のアリールオキシカルボニル基、又は炭素数1~10のシクロアルキルアルキル基を示す。
 R21bは芳香環あるいはヘテロ芳香環を含む任意の置換基を示す。
In formula (23), R 21a is hydrogen, or an alkyl group having 1 to 20 carbon atoms, an alkenyl group having 2 to 25 carbon atoms, and a heteroarylalkyl group having 1 to 20 carbon atoms, which may be substituted respectively. An alkoxycarbonylalkyl group having 3 to 20 carbon atoms, a phenoxycarbonylalkyl group having 8 to 20 carbon atoms, a heteroaryloxycarbonylalkyl group or a heteroarylthioalkyl group having 1 to 20 carbon atoms, and an aminoalkyl group having 1 to 20 carbon atoms. , Arcanoyl group with 2 to 12 carbon atoms, alkenoyl group with 3 to 25 carbon atoms, cycloalkanoyl group with 3 to 8 carbon atoms, allylloyl group with 7 to 20 carbon atoms, heteroallyloyl group with 1 to 20 carbon atoms, carbon An alkoxycarbonyl group having 2 to 10 carbon atoms, an aryloxycarbonyl group having 7 to 20 carbon atoms, or a cycloalkylalkyl group having 1 to 10 carbon atoms is shown.
R 21b represents any substituent, including aromatic or heteroaromatic rings.
 R21aはR21bと共に環を形成してもよく、その連結基は、それぞれ置換基を有していてもよい炭素数1~10のアルキレン基、ポリエチレン基(-(CH=CH)r-)、ポリエチニレン基(-(C≡C)r-)あるいはこれらを組み合わせてなる基が挙げられる(なお、rは0~3の整数である。)。
 R22aは、式(22)のおけるR22と同様の基を示す。
 式(22)におけるR22及び式(23)におけるR22aとしては、好ましくは、炭素数2~12のアルカノイル基、炭素数1~20のヘテロアリールアルカノイル基、炭素数3~8のシクロアルカノイル基が挙げられる。
R 21a may form a ring together with R 21b , and the linking group thereof may be an alkylene group having 1 to 10 carbon atoms and a polyethylene group (-(CH = CH) r- ), each of which may have a substituent. , Polyethynylene group (-(C≡C) r- ) or a group composed of a combination thereof (where r is an integer of 0 to 3).
R 22a represents the same group as R 22 in the formula (22).
The R 22 in the formula (22) and the R 22a in the formula (23) are preferably an alkanoyl group having 2 to 12 carbon atoms, a heteroaryl alkanoyl group having 1 to 20 carbon atoms, and a cycloalkanoyl group having 3 to 8 carbon atoms. Can be mentioned.
 式(23)におけるR21aとしては、好ましくは無置換のメチル基、エチル基、プロピル基などの直鎖アルキル基又はシクロアルキルアルキル基や、N-アセチル-N-アセトキシアミノ基で置換されたプロピル基が挙げられる。
 式(23)におけるR21bとしては、好ましくは置換されていてもよいカルバゾリル基、置換されていてもよいチオキサントニル基、置換されていてもよいフェニルスルフィド基が挙げられる。
The R 21a in the formula (23) is preferably a linear alkyl group such as an unsubstituted methyl group, an ethyl group or a propyl group, or a cycloalkylalkyl group, or a propyl substituted with an N-acetyl-N-acetoxyamino group. Group is mentioned.
Examples of R 21b in the formula (23) include a optionally substituted carbazolyl group, an optionally substituted thioxanthonyl group, and an optionally substituted phenylsulfide group.
 オキシムエステル系化合物の光重合開始剤としては、式(23)におけるR21bが、置換されていてもよいカルバゾリル基である化合物が、前述の理由からより好ましい。さらに、置換されていてもよい炭素数6~25のアリール基、置換されていてもよい炭素数7~25のアリールカルボニル基、置換されていてもよい炭素数5~25のヘテロアリール基、置換されていてもよい炭素数6~25のヘテロアリールカルボニル基、及びニトロ基からなる群から選ばれる少なくとも1種の基を有するカルバゾリル基が好ましい。特に、ベンゾイル基、トルオイル基、ナフトイル基、チエニルカルボニル基、及びニトロ基からなる群から選ばれる少なくとも1種の基を有するカルバゾリル基が好ましい。カルバゾリル基上の置換基(2つ以上の置換基を有する場合には、そのうちの1つの置換基)は、カルバゾリル基の3位に結合していることが望ましい。 As the photopolymerization initiator of the oxime ester compound, a compound in which R 21b in the formula (23) is a carbazolyl group which may be substituted is more preferable for the above-mentioned reason. Further, an aryl group having 6 to 25 carbon atoms which may be substituted, an arylcarbonyl group having 7 to 25 carbon atoms which may be substituted, a heteroaryl group having 5 to 25 carbon atoms which may be substituted, and the substitution. A carbazolyl group having at least one group selected from the group consisting of a heteroarylcarbonyl group having 6 to 25 carbon atoms and a nitro group may be preferable. In particular, a carbazolyl group having at least one group selected from the group consisting of a benzoyl group, a toluoil group, a naphthoyl group, a thienylcarbonyl group, and a nitro group is preferable. It is desirable that the substituent on the carbazolyl group (or one of the substituents if it has two or more substituents) is attached to the 3-position of the carbazolyl group.
 このようなオキシムエステル系化合物の光重合開始剤の市販品として、例えば、BASF社製のOXE-02、常州強力電子社製のTR-PBG-304、TR-PBG-314が挙げられる。 Examples of commercially available products of such photopolymerization initiators of oxime ester compounds include OXE-02 manufactured by BASF, TR-PBG-304 and TR-PBG-314 manufactured by Joshu Power Electronics Co., Ltd.
 本発明に好適なオキシムエステル系化合物の光重合開始剤として具体的には、以下に例示されるような化合物が挙げられるが、何らこれらの化合物に限定されるものではない。 Specific examples of the photopolymerization initiator of the oxime ester compound suitable for the present invention include the compounds exemplified below, but the present invention is not limited to these compounds.
Figure JPOXMLDOC01-appb-C000028
Figure JPOXMLDOC01-appb-C000028
Figure JPOXMLDOC01-appb-C000029
Figure JPOXMLDOC01-appb-C000029
Figure JPOXMLDOC01-appb-C000030
Figure JPOXMLDOC01-appb-C000030
 ケトオキシムエステル系化合物としては、下記一般式(24)で示される構造部分を含む化合物が挙げられる。好ましくは、下記一般式(25)で示されるケトオキシムエステル系化合物が挙げられる。 Examples of the ketooxime ester-based compound include compounds containing a structural portion represented by the following general formula (24). Preferred examples thereof include ketooxime ester compounds represented by the following general formula (25).
Figure JPOXMLDOC01-appb-C000031
Figure JPOXMLDOC01-appb-C000031
 式(24)において、R24は、式(22)におけるR22と同義である。 In equation (24), R 24 is synonymous with R 22 in equation (22).
Figure JPOXMLDOC01-appb-C000032
Figure JPOXMLDOC01-appb-C000032
 式(25)において、R23aは、それぞれ置換されていてもよい、フェニル基、炭素数1~20のアルキル基、炭素数2~25のアルケニル基、炭素数1~20のヘテロアリールアルキル基、炭素数3~20のアルコキシカルボニルアルキル基、炭素数8~20のフェノキシカルボニルアルキル基、炭素数2~20のアルキルチオアルキル基、炭素数1~20のヘテロアリールオキシカルボニルアルキル基もしくはヘテロアリールチオアルキル基、炭素数1~20のアミノアルキル基、炭素数2~12のアルカノイル基、炭素数3~25のアルケノイル基、炭素数3~8のシクロアルカノイル基、炭素数7~20のアリーロイル基、炭素数1~20のヘテロアリーロイル基、炭素数2~10のアルコキシカルボニル基、炭素数7~20のアリールオキシカルボニル基、又は炭素数1~10のシクロアルキルアルキル基を示す。
 R23bは芳香環あるいはヘテロ芳香環を含む任意の置換基を示す。
In formula (25), R 23a may be substituted with a phenyl group, an alkyl group having 1 to 20 carbon atoms, an alkenyl group having 2 to 25 carbon atoms, a heteroarylalkyl group having 1 to 20 carbon atoms, respectively. An alkoxycarbonylalkyl group having 3 to 20 carbon atoms, a phenoxycarbonylalkyl group having 8 to 20 carbon atoms, an alkylthioalkyl group having 2 to 20 carbon atoms, a heteroaryloxycarbonylalkyl group having 1 to 20 carbon atoms or a heteroarylthioalkyl group. , Aminoalkyl group with 1 to 20 carbon atoms, alkanoyl group with 2 to 12 carbon atoms, alkenoyl group with 3 to 25 carbon atoms, cycloalkanoyl group with 3 to 8 carbon atoms, allylloyl group with 7 to 20 carbon atoms, carbon number of carbon atoms A heteroarylloyl group having 1 to 20, an alkoxycarbonyl group having 2 to 10 carbon atoms, an aryloxycarbonyl group having 7 to 20 carbon atoms, or a cycloalkylalkyl group having 1 to 10 carbon atoms is shown.
R 23b represents any substituent, including aromatic or heteroaromatic rings.
 R23aはR23bと共に環を形成してもよく、その連結基は、それぞれ置換基を有していてもよい炭素数1~10のアルキレン基、ポリエチレン基(-(CH=CH)r-)、ポリエチニレン基(-(C≡C)r-)あるいはこれらを組み合わせてなる基が挙げられる(なお、rは0~3の整数である。)。 R 23a may form a ring together with R 23b , and the linking group thereof may be an alkylene group having 1 to 10 carbon atoms and a polyethylene group (-(CH = CH) r- ), each of which may have a substituent. , Polyethynylene group (-(C≡C) r- ) or a group composed of a combination thereof (where r is an integer of 0 to 3).
 R24aは、それぞれ置換されていてもよい、炭素数2~12のアルカノイル基、炭素数3~25のアルケノイル基、炭素数4~8のシクロアルカノイル基、炭素数7~20のベンゾイル基、炭素数3~20のヘテロアリーロイル基、炭素数2~10のアルコキシカルボニル基、炭素数7~20のアリールオキシカルボニル基、炭素数2~20のヘテロアリール基、又は炭素数2~20のアルキルアミノカルボニル基を表す。
 式(24)におけるR24及び式(25)におけるR24aとしては、炭素数2~12のアルカノイル基、炭素数1~20のヘテロアリールアルカノイル基、炭素数3~8のシクロアルカノイル基、炭素数7~20のアリーロイル基が好ましい。
R 24a may be substituted with an alkanoyl group having 2 to 12 carbon atoms, an alkenoyl group having 3 to 25 carbon atoms, a cycloalkanoyl group having 4 to 8 carbon atoms, a benzoyl group having 7 to 20 carbon atoms, and carbon. A heteroarylloyl group having 3 to 20 carbon atoms, an alkoxycarbonyl group having 2 to 10 carbon atoms, an aryloxycarbonyl group having 7 to 20 carbon atoms, a heteroaryl group having 2 to 20 carbon atoms, or an alkylamino having 2 to 20 carbon atoms. Represents a carbonyl group.
The R 24 in the formula (24) and the R 24a in the formula (25) include an alkanoyl group having 2 to 12 carbon atoms, a heteroarylalkanoyl group having 1 to 20 carbon atoms, a cycloalkanoyl group having 3 to 8 carbon atoms, and a carbon number of carbon atoms. 7 to 20 aryloyl groups are preferred.
 式(25)におけるR23aとしては、無置換のエチル基、プロピル基、ブチル基、メトキシカルボニル基で置換されたエチル基またはプロピル基が好ましい。
 式(25)におけるR23bとしては、置換されていてもよいカルバゾイル基、置換されていてもよいフェニルスルフィド基が好ましい。
 本発明に好適なケトオキシムエステル系化合物としては、以下の化合物が挙げられるが、何らこれらの化合物に限定されるものではない。
As R 23a in the formula (25), an unsubstituted ethyl group, a propyl group, a butyl group, an ethyl group substituted with a methoxycarbonyl group, or a propyl group is preferable.
As R 23b in the formula (25), a optionally substituted carbazoyl group and an optionally substituted phenylsulfide group are preferable.
Examples of the ketooxime ester-based compound suitable for the present invention include, but are not limited to, the following compounds.
Figure JPOXMLDOC01-appb-C000033
Figure JPOXMLDOC01-appb-C000033
Figure JPOXMLDOC01-appb-C000034
Figure JPOXMLDOC01-appb-C000034
Figure JPOXMLDOC01-appb-C000035
Figure JPOXMLDOC01-appb-C000035
 ケトオキシムエステル系化合物の光重合開始剤の市販品として、例えば、BASF社製のOXE-01、常州強力電子社製のTR-PBG-305が挙げられる。 Examples of commercially available products of photopolymerization initiators for ketooxime ester compounds include OXE-01 manufactured by BASF and TR-PBG-305 manufactured by Joshu Strong Electronics.
 オキシムエステル系化合物及びケトオキシムエステル系化合物は、例えば、日本国特開2000-80068号公報や、日本国特開2006-36750号公報に記載されている一連の化合物の一種であってよい。
 光重合開始剤は1種を単独で用いてもよく、2種以上を併用してもよい。
The oxime ester-based compound and the keto-oxime ester-based compound may be, for example, one of a series of compounds described in Japanese Patent Application Laid-Open No. 2000-80068 and Japanese Patent Application Laid-Open No. 2006-36750.
One type of photopolymerization initiator may be used alone, or two or more types may be used in combination.
 その他の光重合開始剤として、例えば、ベンゾインメチルエーテル、ベンゾインフェニルエーテル、ベンゾインイソブチルエーテル、ベンゾインイソプロピルエーテル等のベンゾインアルキルエーテル類;2-メチルアントラキノン、2-エチルアントラキノン、2-t-ブチルアントラキノン、1-クロロアントラキノン等のアントラキノン誘導体類;ベンゾフェノン、ミヒラーズケトン、2-メチルベンゾフェノン、3-メチルベンゾフェノン、4-メチルベンゾフェノン、2-クロロベンゾフェノン、4-ブロモベンゾフェノン、2-カルボキシベンゾフェノン等のベンゾフェノン誘導体類;2,2-ジメトキシ-2-フェニルアセトフェノン、2,2-ジエトキシアセトフェノン、1-ヒドロキシシクロへキシルフェニルケトン、α-ヒドロキシ-2-メチルフェニルプロパノン、1-ヒドロキシ-1-メチルエチル-(p-イソプロピルフェニル)ケトン、1-ヒドロキシ-1-(p-ドデシルフェニル)ケトン、2-メチル-(4’-メチルチオフェニル)-2-モルホリノ-1-プロパノン、1,1,1-トリクロロメチル-(p-ブチルフェニル)ケトン等のアセトフェノン誘導体類;チオキサントン、2-エチルチオキサントン、2-イソプロピルチオキサントン、2-クロロチオキサントン、2,4-ジメチルチオキサントン、2,4-ジエチルチオキサントン、2,4-ジイソプロピルチオキサントン等のチオキサントン誘導体類;p-ジメチルアミノ安息香酸エチル、p-ジエチルアミノ安息香酸エチル等の安息香酸エステル誘導体類;9-フェニルアクリジン、9-(p-メトキシフェニル)アクリジン等のアクリジン誘導体類;9,10-ジメチルベンズフェナジン等のフェナジン誘導体類;ベンズアンスロン等のアンスロン誘導体類が挙げられる。
 光重合開始剤としては、前述の理由からオキシムエステル誘導体類が特に好ましい。
As other photopolymerization initiators, for example, benzoin alkyl ethers such as benzoin methyl ether, benzoin phenyl ether, benzoin isobutyl ether, benzoin isopropyl ether; 2-methylanthraquinone, 2-ethylanthraquinone, 2-t-butylanthraquinone, 1 -Anthraquinone derivatives such as chloroanthraquinone; benzophenone derivatives such as benzophenone, Michelers ketone, 2-methylbenzophenone, 3-methylbenzophenone, 4-methylbenzophenone, 2-chlorobenzophenone, 4-bromobenzophenone, 2-carboxybenzophenone; 2, 2-Dimethoxy-2-phenylacetophenone, 2,2-diethoxyacetophenone, 1-hydroxycyclohexylphenyl ketone, α-hydroxy-2-methylphenylpropanol, 1-hydroxy-1-methylethyl- (p-isopropyl) Phenyl) Ketone, 1-Hydroxy-1- (p-dodecylphenyl) Ketone, 2-Methyl- (4'-Methylthiophenyl) -2-morpholino-1-propanol, 1,1,1-Trichloromethyl- (p-) Acetphenone derivatives such as butylphenyl) ketone; thioxanthone such as thioxanthone, 2-ethylthioxanthone, 2-isopropylthioxanthone, 2-chlorothioxanthone, 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2,4-diisopropylthioxanthone. Derivatives; benzoic acid ester derivatives such as ethyl p-dimethylaminobenzoate and ethyl p-diethylaminobenzoate; aclysine derivatives such as 9-phenylaclydin and 9- (p-methoxyphenyl) acridin; 9,10-dimethyl Phenazine derivatives such as benzphenazine; Anthron derivatives such as benzanthrone can be mentioned.
As the photopolymerization initiator, oxime ester derivatives are particularly preferable for the above-mentioned reasons.
<増感色素>
 光重合開始剤には、必要に応じて、感応感度を高める目的で、画像露光光源の波長に応じた増感色素を併用させることができる。これら増感色素としては、例えば、日本国特開平4-221958号公報、日本国特開平4-219756号公報に記載のキサンテン色素;日本国特開平3-239703号公報、日本国特開平5-289335号公報に記載の複素環を有するクマリン色素;日本国特開平3-239703号公報、日本国特開平5-289335号公報に記載の3-ケトクマリン化合物;日本国特開平6-19240号公報に記載のピロメテン色素;日本国特開昭47-2528号公報、日本国特開昭54-155292号公報、日本国特公昭45-37377号公報、日本国特開昭48-84183号公報、日本国特開昭52-112681号公報、日本国特開昭58-15503号公報、日本国特開昭60-88005号公報、日本国特開昭59-56403号公報、日本国特開平2-69号公報、日本国特開昭57-168088号公報、日本国特開平5-107761号公報、日本国特開平5-210240号公報、日本国特開平4-288818号公報に記載のジアルキルアミノベンゼン骨格を有する色素;を挙げることができる。
<Sensitizer>
If necessary, the photopolymerization initiator may be used in combination with a sensitizing dye according to the wavelength of the image exposure light source for the purpose of increasing the sensitivity. Examples of these sensitizing dyes include the xanthene dyes described in Japanese Patent Application Laid-Open No. 4-221958 and Japanese Patent Application Laid-Open No. 4-219756; A coumarin dye having a heterocycle described in Japanese Patent Application Laid-Open No. 289335; a 3-ketocoumarin compound described in Japanese Patent Application Laid-Open No. 3-239703 and Japanese Patent Application Laid-Open No. 5-289335; Pyromethene dyes described; Japanese Patent Laid-Open No. 47-2528, Japanese Patent Application Laid-Open No. 54-155292, Japanese Patent Application Laid-Open No. 45-373777, Japanese Patent Application Laid-Open No. 48-84183, Japan. Japanese Patent Application Laid-Open No. 52-112681, Japanese Patent Application Laid-Open No. 58-15503, Japanese Patent Application Laid-Open No. 60-88805, Japanese Patent Application Laid-Open No. 59-56403, Japanese Patent Application Laid-Open No. 2-69 The dialkylaminobenzene frameworks described in Japanese Patent Laid-Open No. 57-168888, Japanese Patent Application Laid-Open No. 5-107761, Japanese Patent Application Laid-Open No. 5-210240, and Japanese Patent Application Laid-Open No. 4-288818. Dyes with; can be mentioned.
 増感色素としては、アミノ基含有増感色素が好ましく、アミノ基及びフェニル基を同一分子内に有する化合物がより好ましい。増感色素としては、例えば、4,4’-ジメチルアミノベンゾフェノン、4,4’-ジエチルアミノベンゾフェノン、2-アミノベンゾフェノン、4-アミノベンゾフェノン、4,4’-ジアミノベンゾフェノン、3,3’-ジアミノベンゾフェノン、3,4-ジアミノベンゾフェノン等のベンゾフェノン系化合物;2-(p-ジメチルアミノフェニル)ベンゾオキサゾール、2-(p-ジエチルアミノフェニル)ベンゾオキサゾール、2-(p-ジメチルアミノフェニル)ベンゾ[4,5]ベンゾオキサゾール、2-(p-ジメチルアミノフェニル)ベンゾ[6,7]ベンゾオキサゾール、2,5-ビス(p-ジエチルアミノフェニル)1,3,4-オキサゾール、2-(p-ジメチルアミノフェニル)ベンゾチアゾール、2-(p-ジエチルアミノフェニル)ベンゾチアゾール、2-(p-ジメチルアミノフェニル)ベンズイミダゾール、2-(p-ジエチルアミノフェニル)ベンズイミダゾール、2,5-ビス(p-ジエチルアミノフェニル)1,3,4-チアジアゾール、(p-ジメチルアミノフェニル)ピリジン、(p-ジエチルアミノフェニル)ピリジン、(p-ジメチルアミノフェニル)キノリン、(p-ジエチルアミノフェニル)キノリン、(p-ジメチルアミノフェニル)ピリミジン、(p-ジエチルアミノフェニル)ピリミジン等のp-ジアルキルアミノフェニル基含有化合物が特に好ましい。4,4’-ジアルキルアミノベンゾフェノンが最も好ましい。
 増感色素は1種を単独で用いてもよく、2種以上を併用してもよい。
As the sensitizing dye, an amino group-containing sensitizing dye is preferable, and a compound having an amino group and a phenyl group in the same molecule is more preferable. Examples of the sensitizing dye include 4,4'-dimethylaminobenzophenone, 4,4'-diethylaminobenzophenone, 2-aminobenzophenone, 4-aminobenzophenone, 4,4'-diaminobenzophenone, and 3,3'-diaminobenzophenone. , 3,4-Diaminobenzophenone and other benzophenone compounds; 2- (p-dimethylaminophenyl) benzoxazole, 2- (p-diethylaminophenyl) benzoxazole, 2- (p-dimethylaminophenyl) benzo [4,5 ] Benzoxazole, 2- (p-dimethylaminophenyl) benzo [6,7] benzoxazole, 2,5-bis (p-diethylaminophenyl) 1,3,4-oxazole, 2- (p-dimethylaminophenyl) Benzothiazole, 2- (p-diethylaminophenyl) benzothiazole, 2- (p-dimethylaminophenyl) benzimidazole, 2- (p-diethylaminophenyl) benzimidazole, 2,5-bis (p-diethylaminophenyl) 1, 3,4-Thiadiazol, (p-dimethylaminophenyl) pyridine, (p-diethylaminophenyl) pyridine, (p-dimethylaminophenyl) quinoline, (p-diethylaminophenyl) quinoline, (p-dimethylaminophenyl) pyrimidine, ( A p-dialkylaminophenyl group-containing compound such as p-diethylaminophenyl) pyrimidine is particularly preferred. 4,4'-Dialkylaminobenzophenone is most preferred.
One type of sensitizing dye may be used alone, or two or more types may be used in combination.
 (c)光重合開始剤の含有割合は、特に限定されないが、本発明の感光性樹脂組成物の全固形分に対して、好ましくは1質量%以上、より好ましくは2質量%以上、さらに好ましくは3質量以上、よりさらに好ましくは4質量%以上である、また、好ましくは30質量%以下、より好ましくは20質量%以下、さらに好ましくは15質量%以下、よりさらに好ましくは10質量%以下、特に好ましくは8質量%以下である。前記下限値以上とすることで感度が向上する傾向がある。また、前記上限値以下とすることで基板との密着応力が向上する傾向がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、1~30質量%が好ましく、1~20質量%がより好ましく、2~15質量%がさらに好ましく、3~10質量%がよりさらに好ましく、4~8質量%が特に好ましい。
(C) The content ratio of the photopolymerization initiator is not particularly limited, but is preferably 1% by mass or more, more preferably 2% by mass or more, still more preferably, with respect to the total solid content of the photosensitive resin composition of the present invention. Is 3% by mass or more, more preferably 4% by mass or more, preferably 30% by mass or less, more preferably 20% by mass or less, still more preferably 15% by mass or less, still more preferably 10% by mass or less. Particularly preferably, it is 8% by mass or less. Sensitivity tends to improve when the value is equal to or higher than the lower limit. Further, when the value is not more than the upper limit, the adhesion stress with the substrate tends to be improved.
The above upper and lower limits can be combined arbitrarily. For example, 1 to 30% by mass is preferable, 1 to 20% by mass is more preferable, 2 to 15% by mass is further preferable, 3 to 10% by mass is further preferable, and 4 to 8% by mass is particularly preferable.
 本発明の感光性樹脂組成物がオキシムエステル光重合開始剤(c1)を含む場合、オキシムエステル光重合開始剤(c1)の含有割合は、特に限定されないが、本発明の感光性樹脂組成物の全固形分に対して、好ましくは1質量%以上、より好ましくは2質量%以上、さらに好ましくは3質量以上、よりさらに好ましくは4質量%以上である。また、好ましくは30質量%以下、より好ましくは20質量%以下、さらに好ましくは15質量%以下、よりさらに好ましくは10質量%以下、特に好ましくは8質量%以下である。前記下限値以上とすることで感度が向上する傾向があり、細線密着性が良好となる。また、前記上限値以下とすることで未露光部分の現像液に対する溶解性が向上する傾向がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、1~30質量%が好ましく、1~20質量%がより好ましく、2~15質量%がさらに好ましく、3~10質量%がよりさらに好ましく、4~8質量%が特に好ましい。
When the photosensitive resin composition of the present invention contains the oxime ester photopolymerization initiator (c1), the content ratio of the oxime ester photopolymerization initiator (c1) is not particularly limited, but the photosensitive resin composition of the present invention is not particularly limited. It is preferably 1% by mass or more, more preferably 2% by mass or more, still more preferably 3% by mass or more, still more preferably 4% by mass or more, based on the total solid content. Further, it is preferably 30% by mass or less, more preferably 20% by mass or less, further preferably 15% by mass or less, still more preferably 10% by mass or less, and particularly preferably 8% by mass or less. When the value is equal to or higher than the lower limit, the sensitivity tends to be improved and the fine line adhesion is improved. Further, when the value is not more than the upper limit, the solubility of the unexposed portion in the developing solution tends to be improved.
The above upper and lower limits can be combined arbitrarily. For example, 1 to 30% by mass is preferable, 1 to 20% by mass is more preferable, 2 to 15% by mass is further preferable, 3 to 10% by mass is further preferable, and 4 to 8% by mass is particularly preferable.
 増感色素を用いる場合、増感色素の含有割合は、感光性樹脂組成物の全固形分中、好ましくは0~20質量%、より好ましくは0~15質量%、さらに好ましくは0~10質量%である。 When a sensitizing dye is used, the content ratio of the sensitizing dye is preferably 0 to 20% by mass, more preferably 0 to 15% by mass, still more preferably 0 to 10% by mass in the total solid content of the photosensitive resin composition. %.
<(d)色材>
 本発明の感光性樹脂組成物は(d)色材を含むことが好ましい。(d)色材は本発明の感光性樹脂組成物を着色するものをいう。(d)色材としては、染料や顔料が使用できるが、耐熱性、耐光性等の点から顔料が好ましい。
<(D) Color material>
The photosensitive resin composition of the present invention preferably contains (d) a coloring material. (D) The coloring material refers to a material that colors the photosensitive resin composition of the present invention. (D) As the coloring material, dyes and pigments can be used, but pigments are preferable from the viewpoint of heat resistance, light resistance and the like.
 顔料としては青色顔料、緑色顔料、赤色顔料、黄色顔料、紫色顔料、オレンジ顔料、ブラウン顔料、黒色顔料等各種の色の顔料を使用することができる。また、その構造としてはアゾ系、フタロシアニン系、キナクリドン系、ベンズイミダゾロン系、イソインドリノン系、ジオキサジン系、インダンスレン系、ペリレン系等の有機顔料の他に種々の無機顔料等も利用可能である。 As the pigment, pigments of various colors such as blue pigment, green pigment, red pigment, yellow pigment, purple pigment, orange pigment, brown pigment and black pigment can be used. In addition to organic pigments such as azo, phthalocyanine, quinacridone, benzimidazolone, isoindolenone, dioxazine, indanthrone, and perylene, various inorganic pigments can be used as the structure. Is.
 以下に、本発明に使用できる顔料の具体例をピグメントナンバーで示す。なお、以下に挙げる「C.I.ピグメントレッド2」等の用語は、カラーインデックス(C.I.)を意味する。
 赤色顔料としては、例えば、C.I.ピグメントレッド1、2、3、4、5、6、7、8、9、12、14、15、16、17、21、22、23、31、32、37、38、41、47、48、48:1、48:2、48:3、48:4、49、49:1、49:2、50:1、52:1、52:2、53、53:1、53:2、53:3、57、57:1、57:2、58:4、60、63、63:1、63:2、64、64:1、68、69、81、81:1、81:2、81:3、81:4、83、88、90:1、101、101:1、104、108、108:1、109、112、113、114、122、123、144、146、147、149、151、166、168、169、170、172、173、174、175、176、177、178、179、181、184、185、187、188、190、193、194、200、202、206、207、208、209、210、214、216、220、221、224、230、231、232、233、235、236、237、238、239、242、243、245、247、249、250、251、253、254、255、256、257、258、259、260、262、263、264、265、266、267、268、269、270、271、272、273、274、275、276を挙げることができる。好ましくはC.I.ピグメントレッド48:1、122、168、177、202、206、207、209、224、242、254、さらに好ましくはC.I.ピグメントレッド177、209、224、254を挙げることができる。
Specific examples of pigments that can be used in the present invention are shown below by pigment numbers. The terms such as "CI Pigment Red 2" listed below mean the color index (CI).
Examples of the red pigment include C.I. I. Pigment Red 1, 2, 3, 4, 5, 6, 7, 8, 9, 12, 14, 15, 16, 17, 21, 22, 23, 31, 32, 37, 38, 41, 47, 48, 48: 1, 48: 2, 48: 3, 48: 4, 49, 49: 1, 49: 2, 50: 1, 52: 1, 52: 2, 53, 53: 1, 53: 2, 53: 3, 57, 57: 1, 57: 2, 58: 4, 60, 63, 63: 1, 63: 2, 64, 64: 1, 68, 69, 81, 81: 1, 81: 2, 81: 3, 81: 4, 83, 88, 90: 1, 101, 101: 1, 104, 108, 108: 1, 109, 112, 113, 114, 122, 123, 144, 146, 147, 149, 151, 166, 168, 169, 170, 172, 173, 174, 175, 176, 177, 178, 179, 181, 184, 185, 187, 188, 190, 193, 194, 200, 202, 206, 207, 208, 209, 210, 214, 216, 220, 221, 224, 230, 231, 232, 233, 235, 236, 237, 238, 239, 242, 243, 245, 247, 249, 250, 251, 253, 254, 255, 256, 257, 258, 259, 260, 262, 263, 264, 265, 266, 267, 268, 269, 270, 271, 272, 273, 274, 275, 276 can be mentioned. Preferably C.I. I. Pigment Red 48: 1, 122, 168, 177, 202, 206, 207, 209, 224, 242, 254, more preferably C.I. I. Pigment Red 177, 209, 224, 254 can be mentioned.
 青色顔料としては、例えば、C.I.ピグメントブルー1、1:2、9、14、15、15:1、15:2、15:3、15:4、15:6、16、17、19、25、27、28、29、33、35、36、56、56:1、60、61、61:1、62、63、66、67、68、71、72、73、74、75、76、78、79を挙げることができる。好ましくはC.I.ピグメントブルー15、15:1、15:2、15:3、15:4、15:6、60、さらに好ましくはC.I.ピグメントブルー15:6、60を挙げることができる。 Examples of the blue pigment include C.I. I. Pigment Blue 1, 1: 2, 9, 14, 15, 15: 1, 15: 2, 15: 3, 15: 4, 15: 6, 16, 17, 19, 25, 27, 28, 29, 33, 35, 36, 56, 56: 1, 60, 61, 61: 1, 62, 63, 66, 67, 68, 71, 72, 73, 74, 75, 76, 78, 79 can be mentioned. Preferably C.I. I. Pigment Blue 15, 15: 1, 15: 2, 15: 3, 15: 4, 15: 6, 60, more preferably C.I. I. Pigment Blue 15: 6, 60 can be mentioned.
 緑色顔料としては、例えば、C.I.ピグメントグリーン1、2、4、7、8、10、13、14、15、17、18、19、26、36、45、48、50、51、54、55、58を挙げることができる。好ましくはC.I.ピグメントグリーン7、36、58を挙げることができる。 Examples of the green pigment include C.I. I. Pigment Greens 1, 2, 4, 7, 8, 10, 13, 14, 15, 17, 18, 19, 26, 36, 45, 48, 50, 51, 54, 55, 58 can be mentioned. Preferably C.I. I. Pigment Greens 7, 36 and 58 can be mentioned.
 黄色顔料としては、例えば、C.I.ピグメントイエロー1、1:1、2、3、4、5、6、9、10、12、13、14、16、17、24、31、32、34、35、35:1、36、36:1、37、37:1、40、41、42、43、48、53、55、61、62、62:1、63、65、73、74、75、81、83、87、93、94、95、97、100、101、104、105、108、109、110、111、116、117、119、120、126、127、127:1、128、129、133、134、136、138、139、142、147、148、150、151、153、154、155、157、158、159、160、161、162、163、164、165、166、167、168、169、170、172、173、174、175、176、180、181、182、183、184、185、188、189、190、191、191:1、192、193、194、195、196、197、198、199、200、202、203、204、205、206、207、208を挙げることができる。好ましくはC.I.ピグメントイエロー83、117、129、138、139、150、154、155、180、185、さらに好ましくはC.I.ピグメントイエロー83、138、139、150、180を挙げることができる。 Examples of the yellow pigment include C.I. I. Pigment Yellow 1, 1: 1, 2, 3, 4, 5, 6, 9, 10, 12, 13, 14, 16, 17, 24, 31, 32, 34, 35, 35: 1, 36, 36: 1,37,37: 1,40,41,42,43,48,53,55,61,62,62: 1,63,65,73,74,75,81,83,87,93,94, 95, 97, 100, 101, 104, 105, 108, 109, 110, 111, 116, 117, 119, 120, 126, 127, 127: 1, 128, 129, 133, 134, 136, 138, 139, 142, 147, 148, 150, 151, 153, 154, 155, 157, 158, 159, 160, 161, 162, 163, 164, 165, 166, 167, 168, 169, 170, 172, 173, 174, 175, 176, 180, 181, 182, 183, 184, 185, 188, 189, 190, 191, 191: 1, 192, 193, 194, 195, 196, 197, 198, 199, 200, 202, 203, 204, 205, 206, 207, 208 can be mentioned. Preferably C.I. I. Pigment Yellow 83, 117, 129, 138, 139, 150, 154, 155, 180, 185, more preferably C.I. I. Pigment Yellow 83, 138, 139, 150, 180 can be mentioned.
 オレンジ顔料としては、例えば、C.I.ピグメントオレンジ1、2、5、13、16、17、19、20、21、22、23、24、34、36、38、39、43、46、48、49、61、62、64、65、67、68、69、70、71、72、73、74、75、77、78、79を挙げることができる。好ましくは、C.I.ピグメントオレンジ38、64、71を挙げることができる。 Examples of orange pigments include C.I. I. Pigment Orange 1, 2, 5, 13, 16, 17, 19, 20, 21, 22, 23, 24, 34, 36, 38, 39, 43, 46, 48, 49, 61, 62, 64, 65, 67, 68, 69, 70, 71, 72, 73, 74, 75, 77, 78, 79 can be mentioned. Preferably, C.I. I. Pigment Orange 38, 64, 71 can be mentioned.
 紫色顔料としては、例えば、C.I.ピグメントバイオレット1、1:1、2、2:2、3、3:1、3:3、5、5:1、14、15、16、19、23、25、27、29、31、32、37、39、42、44、47、49、50を挙げることができる。好ましくはC.I.ピグメントバイオレット19、23、29さらに好ましくはC.I.ピグメントバイオレット23、29を挙げることができる。 As the purple pigment, for example, C.I. I. Pigment Violet 1, 1: 1, 2, 2: 2, 3, 3: 1, 3: 3, 5, 5: 1, 14, 15, 16, 19, 23, 25, 27, 29, 31, 32, 37, 39, 42, 44, 47, 49, 50 can be mentioned. Preferably C.I. I. Pigment Violet 19, 23, 29 More preferably C.I. I. Pigment Violet 23, 29 can be mentioned.
 本発明の感光性樹脂組成物が、カラーフィルターの樹脂ブラックマトリックス用感光性樹脂組成物である場合、(d)色材としては、黒色の色材を用いることができる。黒色色材は、黒色色材単独としてもよく、赤、緑、青等の混合としてもよい。これら色材は無機又は有機の顔料、染料の中から適宜選択することができる。
 黒色色材を調製するために混合使用可能な色材としては、例えば、ビクトリアピュアブルー(42595)、オーラミンO(41000)、カチロンブリリアントフラビン(ベーシック13)、ローダミン6GCP(45160)、ローダミンB(45170)、サフラニンOK70:100(50240)、エリオグラウシンX(42080)、No.120/リオノールイエロー(21090)、リオノールイエローGRO(21090)、シムラーファーストイエロー8GF(21105)、ベンジジンイエロー4T-564D(21095)、シムラーファーストレッド4015(12355)、リオノールレッド7B4401(15850)、ファーストゲンブルーTGR-L(74160)、リオノールブルーSM(26150)、リオノールブルーES(ピグメントブルー15:6)、リオノーゲンレッドGD(ピグメントレッド168)、リオノールグリーン2YS(ピグメントグリーン36)が挙げられる(なお、上記の( )内の数字は、カラーインデックス(C.I.)を意味する。)。
When the photosensitive resin composition of the present invention is a photosensitive resin composition for a resin black matrix of a color filter, a black coloring material can be used as the (d) coloring material. The black color material may be a black color material alone or a mixture of red, green, blue and the like. These coloring materials can be appropriately selected from inorganic or organic pigments and dyes.
Examples of the color materials that can be mixed and used to prepare the black color material include Victoria Pure Blue (42595), Auramine O (41000), Cachilon Brilliant Flavin (Basic 13), Rhodamine 6 GCP (45160), and Rhodamine B ( 45170), Safranin OK70: 100 (50240), Eriograusin X (42080), No. 120 / Lionol Yellow (21090), Lionol Yellow GRO (21090), Simler First Yellow 8GF (21105), Benzidine Yellow 4T-564D (21095), Simler First Red 4015 (12355), Lionol Red 7B4401 (15850), Firstgen Blue TGR-L (74160), Lionor Blue SM (26150), Lionor Blue ES (Pigment Blue 15: 6), Lionor Gen Red GD (Pigment Red 168), Lionor Green 2YS (Pigment Green 36) (Note that the numbers in () above mean the color index (CI)).
 さらに他の混合使用可能な顔料についてC.I.ナンバーにて示すと、例えば、C.I.黄色顔料20、24、86、93、109、110、117、125、137、138、147、148、153、154、166;C.I.オレンジ顔料36、43、51、55、59、61、64;C.I.赤色顔料9、97、122、123、149、168、177、180、192、215、216、217、220、223、224、226、227、228、240、254;C.I.バイオレット顔料19、23、29、30、37、40、50;C.I.青色顔料15、15:1、15:4、22、60、64;C.I.緑色顔料7;C.I.ブラウン顔料23、25、26;を挙げることができる。 Regarding other pigments that can be mixed and used, C.I. I. Indicated by number, for example, C.I. I. Yellow pigments 20, 24, 86, 93, 109, 110, 117, 125, 137, 138, 147, 148, 153, 154, 166; C.I. I. Orange pigments 36, 43, 51, 55, 59, 61, 64; C.I. I. Red pigments 9, 97, 122, 123, 149, 168, 177, 180, 192, 215, 216, 217, 220, 223, 224, 226, 227, 228, 240, 254; C.I. I. Violet pigments 19, 23, 29, 30, 37, 40, 50; C.I. I. Blue pigments 15, 15: 1, 15: 4, 22, 60, 64; C.I. I. Green pigment 7; C.I. I. Brown pigments 23, 25, 26; can be mentioned.
 単独使用可能な黒色色材としては、例えば、カーボンブラック、アセチレンブラック、ランプブラック、ボーンブラック、黒鉛、鉄黒、アニリンブラック、シアニンブラック、チタンブラック、ペリレンブラック、ラクタムブラックが挙げられる。
 これらの(d)色材の中で黒色の色材を用いる場合には、遮光率、画像特性の観点からカーボンブラックが好ましい。カーボンブラックとしては、例えば、以下のカーボンブラックが挙げられる。
Examples of the black color material that can be used alone include carbon black, acetylene black, lamp black, bone black, graphite, iron black, aniline black, cyanine black, titanium black, perylene black, and lactam black.
When a black color material is used among these (d) color materials, carbon black is preferable from the viewpoint of light shielding rate and image characteristics. Examples of the carbon black include the following carbon blacks.
 三菱ケミカル社製:MA7、MA77、MA8、MA11、MA100、MA100R、MA220、MA230、MA600、#5、#10、#20、#25、#30、#32、#33、#40、#44、#45、#47、#50、#52、#55、#650、#750、#850、#950、#960、#970、#980、#990、#1000、#2200、#2300、#2350、#2400、#2600、#3050、#3150、#3250、#3600、#3750、#3950、#4000、#4010、OIL7B、OIL9B、OIL11B、OIL30B、OIL31B
 デグサ社製:Printex(登録商標。以下同じ。)3、Printex3OP、Printex30、Printex30OP、Printex40、Printex45、Printex55、Printex60、Printex75、Printex80、Printex85、Printex90、Printex A、Printex L、Printex G、Printex P、Printex U、Printex V、PrintexG、SpecialBlack550、SpecialBlack350、SpecialBlack250、SpecialBlack100、SpecialBlack6、SpecialBlack5、SpecialBlack4、Color Black FW1、Color Black FW2、Color Black FW2V、Color Black FW18、Color Black FW18、Color Black FW200、Color Black S160、Color Black S170
 キャボット社製:Monarch(登録商標。以下同じ。)120、Monarch280、Monarch460、Monarch800、Monarch880、Monarch900、Monarch1000、Monarch1100、Monarch1300、Monarch1400、Monarch4630、REGAL(登録商標。以下同じ。)99、REGAL99R、REGAL415、REGAL415R、REGAL250、REGAL250R、REGAL330、REGAL400R、REGAL55R0、REGAL660R、BLACK PEARLS480、PEARLS130、VULCAN(登録商標) XC72R、ELFTEX(登録商標)-8
 ビルラー社製:RAVEN11、RAVEN14、RAVEN15、RAVEN16、RAVEN22RAVEN30、RAVEN35、RAVEN40、RAVEN410、RAVEN420、RAVEN450、RAVEN500、RAVEN780、RAVEN850、RAVEN890H、RAVEN1000、RAVEN1020、RAVEN1040、RAVEN1060U、RAVEN1080U、RAVEN1170、RAVEN1190U、RAVEN1250、RAVEN1500、RAVEN2000、RAVEN2500U、RAVEN3500、RAVEN5000、RAVEN5250、RAVEN5750、RAVEN7000
Made by Mitsubishi Chemical Corporation: MA7, MA77, MA8, MA11, MA100, MA100R, MA220, MA230, MA600, # 5, # 10, # 20, # 25, # 30, # 32, # 33, # 40, # 44, # 45, # 47, # 50, # 52, # 55, # 650, # 750, # 850, # 950, # 960, # 970, # 980, # 990, # 1000, # 2200, # 2300, # 2350 , # 2400, # 2600, # 3050, # 3150, # 3250, # 3600, # 3750, # 3950, # 4000, # 4010, OIL7B, OIL9B, OIL11B, OIL30B, OIL31B
Made by Degusa: Printex (registered trademark; the same applies hereinafter) 3, Printex3OP, Printex30, Printex30OP, Printex40, Printex45, Printex55, Printex60, Printex75, Printex80, Printex85, Printex90, PrintexA, PrintexA. U、Printex V、PrintexG、SpecialBlack550、SpecialBlack350、SpecialBlack250、SpecialBlack100、SpecialBlack6、SpecialBlack5、SpecialBlack4、Color Black FW1、Color Black FW2、Color Black FW2V、Color Black FW18、Color Black FW18、Color Black FW200、Color Black S160、Color Black S170
Manufactured by Cabot: Monarch (registered trademark; the same applies hereinafter) 120, Monarch280, Monarch460, Monarch800, Monarch880, Monarch900, Monarch1000, Monarch1100, Monarch1300, Monarch1400, Monarch4630, REGAL (registered trademark, same as REGAL). REGAL415R, REGAL250, REGAL250R, REGAL330, REGAL400R, REGAL55R0, REGAL660R, BLACK PEARLS480, PEARLS130, VULCAN® XC72R, ELFTEX®-8
Made by Biller: RAVEN11, RAVEN14, RAVEN15, RAVEN16, RAVEN22RAVEN30, RAVEN35, RAVEN40, RAVEN410, RAVEN420, RAVEN450, RAVEN500, RAVEN780, RAVEN850, RAVEN890H, RAVEN1000, RAVEN10URA RAVEN2000, RAVEN2500U, RAVEN3500, RAVEN5000, RAVEN5250, RAVEN5750, RAVEN7000
 他の黒色顔料としては、例えば、チタンブラック、アニリンブラック、酸化鉄系黒色顔料、及び、赤色、緑色、青色の三色の有機顔料を混合して黒色顔料として用いることができる。 As other black pigments, for example, titanium black, aniline black, iron oxide-based black pigments, and organic pigments of three colors of red, green, and blue can be mixed and used as black pigments.
 顔料として、例えば、硫酸バリウム、硫酸鉛、酸化チタン、黄色鉛、ベンガラ、酸化クロムを用いることもできる。これら各種の顔料は、複数種を併用することもできる。例えば、色度の調整のために、緑色顔料と黄色顔料とを併用したり、青色顔料と紫色顔料とを併用したりすることができる。 As the pigment, for example, barium sulfate, lead sulfate, titanium oxide, yellow lead, red iron oxide, and chromium oxide can be used. A plurality of these various pigments can be used in combination. For example, a green pigment and a yellow pigment can be used in combination, or a blue pigment and a purple pigment can be used in combination for adjusting the chromaticity.
 本発明に用いられる顔料の平均粒径としては、カラーフィルターの着色層とした場合に、所望の発色が可能なものであればよく、特に限定されず、用いる顔料の種類によっても異なるが、10~100nmの範囲内であることが好ましく、10~70nmの範囲内であることがより好ましい。顔料の平均粒径が上記範囲であることにより、本発明の感光性樹脂組成物を用いて製造された液晶表示装置の色特性を高品質なものとすることができる傾向がある。
 顔料がカーボンブラックの場合、平均粒径は60nm以下が好ましく、50nm以下がさらに好ましく、また、20nm以上が好ましい。平均粒径を前記上限値以下とすることで、散乱が小さくなり、遮光性やコントラストなどの色特性の低下を抑制できる傾向がある。また、平均粒径を前記下限値以上とすることで、分散剤の量が過度に多くならずに済み、分散性が良好となる傾向がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、20~60nmが好ましく、20~50nmがより好ましい。
 顔料の平均粒径は、電子顕微鏡写真から一次粒子の大きさを直接計測する方法で求めることができる。具体的には、個々の一次粒子の短軸径と長軸径を計測し、その平均をその粒子の粒径とする。次に、100個以上の粒子について、それぞれの粒子の体積(質量)を、求めた粒径の直方体と近似して求め、体積平均粒径を求めそれを平均粒径とする。なお、透過型電子顕微鏡(TEM)または走査型電子顕微鏡(SEM)のいずれを用いても同じ結果を得ることができる。
The average particle size of the pigment used in the present invention may be any as long as it can develop a desired color when used as a colored layer of a color filter, and is not particularly limited and varies depending on the type of pigment used. It is preferably in the range of about 100 nm, and more preferably in the range of 10 to 70 nm. When the average particle size of the pigment is in the above range, the color characteristics of the liquid crystal display device manufactured by using the photosensitive resin composition of the present invention tend to be high quality.
When the pigment is carbon black, the average particle size is preferably 60 nm or less, more preferably 50 nm or less, and more preferably 20 nm or more. By setting the average particle size to the upper limit or less, the scattering becomes small, and there is a tendency that deterioration of color characteristics such as light-shielding property and contrast can be suppressed. Further, by setting the average particle size to the lower limit value or more, the amount of the dispersant does not need to be excessively large, and the dispersibility tends to be good.
The above upper and lower limits can be combined arbitrarily. For example, 20 to 60 nm is preferable, and 20 to 50 nm is more preferable.
The average particle size of the pigment can be determined by a method of directly measuring the size of the primary particles from an electron micrograph. Specifically, the minor axis diameter and the major axis diameter of each primary particle are measured, and the average thereof is taken as the particle size of the particle. Next, for 100 or more particles, the volume (mass) of each particle is obtained by approximating it to a rectangular parallelepiped having the obtained particle size, and the volume average particle size is obtained and used as the average particle size. The same result can be obtained by using either a transmission electron microscope (TEM) or a scanning electron microscope (SEM).
 本発明の感光性樹脂組成物は、(d)色材として,少なくとも顔料を含むことが好ましいが、その他に、本発明の効果に影響を及ぼさない範囲で染料を併用してもよい。併用できる染料としては、例えば、アゾ系染料、アントラキノン系染料、フタロシアニン系染料、キノンイミン系染料、キノリン系染料、ニトロ系染料、カルボニル系染料、メチン系染料が挙げられる。 The photosensitive resin composition of the present invention preferably contains at least a pigment as the (d) coloring material, but in addition, a dye may be used in combination as long as it does not affect the effect of the present invention. Examples of dyes that can be used in combination include azo dyes, anthraquinone dyes, phthalocyanine dyes, quinoneimine dyes, quinoline dyes, nitro dyes, carbonyl dyes, and methine dyes.
 アゾ系染料としては、例えば、C.I.アシッドイエロー11、C.I.アシッドオレンジ7、C.I.アシッドレッド37、C.I.アシッドレッド180、C.I.アシッドブルー29、C.I.ダイレクトレッド28、C.I.ダイレクトレッド83、C.I.ダイレクトイエロー12、C.I.ダイレクトオレンジ26、C.I.ダイレクトグリーン28、C.I.ダイレクトグリーン59、C.I.リアクティブイエロー2、C.I.リアクティブレッド17、C.I.リアクティブレッド120、C.I.リアクティブブラック5、C.I.ディスパースオレンジ5、C.I.ディスパースレッド58、C.I.ディスパースブルー165、C.I.ベーシックブルー41、C.I.ベーシックレッド18、C.I.モルダントレッド7、C.I.モルダントイエロー5、C.I.モルダントブラック7が挙げられる。 Examples of the azo dye include C.I. I. Acid Yellow 11, C.I. I. Acid Orange 7, C.I. I. Acid Red 37, C.I. I. Acid Red 180, C.I. I. Acid Blue 29, C.I. I. Direct Red 28, C.I. I. Direct Red 83, C.I. I. Direct Yellow 12, C.I. I. Direct Orange 26, C.I. I. Direct Green 28, C.I. I. Direct Green 59, C.I. I. Reactive Yellow 2, C.I. I. Reactive Red 17, C.I. I. Reactive Red 120, C.I. I. Reactive Black 5, C.I. I. Disperse Orange 5, C.I. I. Disperse thread 58, C.I. I. Disperse Blue 165, C.I. I. Basic Blue 41, C.I. I. Basic Red 18, C.I. I. Moldant Red 7, C.I. I. Moldant Yellow 5, C.I. I. Moldant Black 7 can be mentioned.
 アントラキノン系染料としては、例えば、C.I.バットブルー4、C.I.アシッドブルー40、C.I.アシッドグリーン25、C.I.リアクティブブルー19、C.I.リアクティブブルー49、C.I.ディスパースレッド60、C.I.ディスパースブルー56、C.I.ディスパースブルー60が挙げられる。 Examples of anthraquinone dyes include C.I. I. Bat Blue 4, C.I. I. Acid Blue 40, C.I. I. Acid Green 25, C.I. I. Reactive Blue 19, C.I. I. Reactive Blue 49, C.I. I. Disperse thread 60, C.I. I. Disperse Blue 56, C.I. I. Disperse blue 60 can be mentioned.
 フタロシアニン系染料としては、例えば、C.I.パッドブルー5が挙げられる。
 キノンイミン系染料としては、例えば、C.I.ベーシックブルー3、C.I.ベーシックブルー9が挙げられる。
 キノリン系染料としては、例えば、C.I.ソルベントイエロー33、C.I.アシッドイエロー3、C.I.ディスパースイエロー64が挙げられる。
 ニトロ系染料としては、例えば、C.I.アシッドイエロー1、C.I.アシッドオレンジ3、C.I.ディスパースイエロー42が挙げられる。
Examples of the phthalocyanine dye include C.I. I. Pad blue 5 can be mentioned.
Examples of the quinoneimine dye include C.I. I. Basic Blue 3, C.I. I. Basic blue 9 can be mentioned.
Examples of the quinoline dye include C.I. I. Solvent Yellow 33, C.I. I. Acid Yellow 3, C.I. I. Disperse Yellow 64 can be mentioned.
Examples of the nitro dye include C.I. I. Acid Yellow 1, C.I. I. Acid Orange 3, C.I. I. Disperse Yellow 42 can be mentioned.
 本発明の感光性樹脂組成物は、前述したように種々な用途に使用することができるが、優れた画像形成性は、カラーフィルター用ブラックマトリックスの形成に使用した場合に、特に効果的である。ブラックマトリックス形成に使用する場合には(d)色材として、前述したカーボンブラックやチタンブラック等の黒色色材を使用するか、黒色以外の色材を複数種類混合し黒色に調整して使用すればよい。その中でも分散安定性及び遮光性の観点から、カーボンブラックを使用することが、特に好ましい。 The photosensitive resin composition of the present invention can be used for various purposes as described above, but excellent image forming property is particularly effective when used for forming a black matrix for a color filter. .. When used to form a black matrix, (d) use a black color material such as carbon black or titanium black described above, or mix multiple types of color materials other than black and adjust to black. Just do it. Among them, it is particularly preferable to use carbon black from the viewpoint of dispersion stability and light-shielding property.
 本発明の感光性樹脂組成物は、色材濃度が大きくなる領域でピンムラ抑制の効果が大きい。特に近年は遮光度を上げるために色材濃度を多くする必要がある。このように効果が大きくなる領域における(d)色材の含有割合は、感光性樹脂組成物の全固形分に対し30質量%以上が好ましく、40質量%以上がより好ましく、50質量%以上がさらに好ましく、52質量%以上が特に好ましい。また、画像形成性能の観点からは、70質量%以下が好ましく、65質量%以下がより好ましい。
 上記の上限及び下限は任意に組み合わせることができる。例えば、30~70質量%が好ましく、40~70質量%がより好ましく、50~65質量%がさらに好ましく、52~65質量%が特に好ましい。
The photosensitive resin composition of the present invention has a large effect of suppressing pin unevenness in a region where the density of the coloring material is high. Especially in recent years, it is necessary to increase the density of the coloring material in order to increase the degree of shading. The content ratio of the (d) coloring material in the region where the effect is large is preferably 30% by mass or more, more preferably 40% by mass or more, and more preferably 50% by mass or more with respect to the total solid content of the photosensitive resin composition. More preferably, 52% by mass or more is particularly preferable. Further, from the viewpoint of image forming performance, 70% by mass or less is preferable, and 65% by mass or less is more preferable.
The above upper and lower limits can be combined arbitrarily. For example, 30 to 70% by mass is preferable, 40 to 70% by mass is more preferable, 50 to 65% by mass is further preferable, and 52 to 65% by mass is particularly preferable.
 本発明の感光性樹脂組成物において、(d)色材の含有割合が上記範囲内であることにより、遮光性(光学密度、OD値)の高い感光性樹脂組成物を得ることができる。具体的には、感光性樹脂組成物の全固形分に対する(d)色材の含有割合を50質量%以上とすることにより、本発明の感光性樹脂組成物を用いて厚さ1μmのブラックマトリックスを形成した場合における光学濃度を4.0以上の値とすることができる。光学濃度はより好ましくは4.1以上であり、さらに好ましくは4.2以上である。遮光性が高い領域ではホットプレートを用いた加熱乾燥時のムラが観察されやすいが、本発明の感光性樹脂組成物を用いた場合は、特に(d)色材の含有割合が大きい場合に、加熱乾燥時のムラ抑制効果をよく確認できる。 In the photosensitive resin composition of the present invention, (d) when the content ratio of the coloring material is within the above range, a photosensitive resin composition having a high light-shielding property (optical density, OD value) can be obtained. Specifically, by setting the content ratio of the (d) coloring material to the total solid content of the photosensitive resin composition to 50% by mass or more, a black matrix having a thickness of 1 μm using the photosensitive resin composition of the present invention. The optical density in the case of forming the above can be set to a value of 4.0 or more. The optical density is more preferably 4.1 or more, still more preferably 4.2 or more. In the region where the light-shielding property is high, unevenness during heating and drying using a hot plate is easily observed, but when the photosensitive resin composition of the present invention is used, especially when the content ratio of (d) the coloring material is large, it is easy to observe. The effect of suppressing unevenness during heating and drying can be confirmed well.
 本発明の感光性樹脂組成物が(d)色材を含む場合、(d)色材の含有割合は特に限定されないが、(a)アルカリ可溶性樹脂100質量部あたり、好ましくは20質量部以上、より好ましくは50質量部以上、さらに好ましくは100質量部以上、よりさらに好ましくは120質量部以上、ことさら好ましくは150質量部以上、特に好ましくは180質量部以上、最も好ましくは200質量部以上であり、また好ましくは500質量部以下、より好ましくは300質量部以下、さらに好ましくは250質量部以下である。(d)色材の含有割合を前記下限値以上とすることで未露光部の現像液に対する溶解性の低下を抑制しやすい傾向があり、また、前記上限値以下とすることで現像時の細線密着性が向上する傾向がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、20~500質量部が好ましく、50~500質量部がより好ましく、100~500質量部がさらに好ましく、120~300質量部がよりさらに好ましく、150~300質量部がことさら好ましく、180~250質量部が特に好ましく、200~250質量部が最も好ましい。
When the photosensitive resin composition of the present invention contains (d) a coloring material, the content ratio of (d) the coloring material is not particularly limited, but (a) 100 parts by mass of the alkali-soluble resin, preferably 20 parts by mass or more. It is more preferably 50 parts by mass or more, further preferably 100 parts by mass or more, still more preferably 120 parts by mass or more, particularly preferably 150 parts by mass or more, particularly preferably 180 parts by mass or more, and most preferably 200 parts by mass or more. Further, it is preferably 500 parts by mass or less, more preferably 300 parts by mass or less, and further preferably 250 parts by mass or less. (D) By setting the content ratio of the coloring material to the lower limit value or more, it tends to be easy to suppress the decrease in the solubility of the unexposed portion in the developing solution, and by setting it to the upper limit value or less, the fine line during development tends to be suppressed. Adhesion tends to improve.
The above upper and lower limits can be combined arbitrarily. For example, 20 to 500 parts by mass is preferable, 50 to 500 parts by mass is more preferable, 100 to 500 parts by mass is further preferable, 120 to 300 parts by mass is more preferable, 150 to 300 parts by mass is particularly preferable, and 180 to 250 parts is particularly preferable. Parts by mass are particularly preferable, and parts by mass of 200 to 250 are most preferable.
 本発明の感光性樹脂組成物が(d)色材としてカーボンブラックを含む場合、カーボンブラックの含有割合は特に限定されないが、遮光性の高い硬化膜を得る観点から、感光性樹脂組成物の全固形分に対し30質量%以上であることが好ましく、40質量%以上であることがより好ましく、50質量%以上であることがさらに好ましく、52質量%以上が特に好ましい。また、画像形成性能の観点からは、70質量%以下が好ましく、65質量%以下がより好ましい。
 上記の上限及び下限は任意に組み合わせることができる。例えば、30~70質量%が好ましく、40~70質量%がより好ましく、50~65質量%がさらに好ましく、52~65質量%が特に好ましい。
When the photosensitive resin composition of the present invention contains (d) carbon black as a coloring material, the content ratio of carbon black is not particularly limited, but from the viewpoint of obtaining a cured film having a high light-shielding property, all of the photosensitive resin compositions. It is preferably 30% by mass or more, more preferably 40% by mass or more, further preferably 50% by mass or more, and particularly preferably 52% by mass or more with respect to the solid content. Further, from the viewpoint of image forming performance, 70% by mass or less is preferable, and 65% by mass or less is more preferable.
The above upper and lower limits can be combined arbitrarily. For example, 30 to 70% by mass is preferable, 40 to 70% by mass is more preferable, 50 to 65% by mass is further preferable, and 52 to 65% by mass is particularly preferable.
<(e)界面活性剤>
 本発明の感光性樹脂組成物は、塗布性向上及びホットプレート乾燥時のピンムラ抑制の観点から(e)界面活性剤を含む。
<(E) Surfactant>
The photosensitive resin composition of the present invention contains (e) a surfactant from the viewpoint of improving coatability and suppressing pin unevenness during hot plate drying.
<界面活性剤(e1)>
 本発明の感光性樹脂組成物は、ホットプレート乾燥時のピンムラ抑制のため、0.5質量%プロピレングリコールモノメチルエーテルアセテート溶液の23℃での表面張力(以下、単に「表面張力」と称することがある。)が23.0mN/m以下である界面活性剤(e1)を含む。
 界面活性剤(e1)としては、表面張力が23.0mN/m以下であれば、特に限定されないが、ピンムラ抑制の観点からは、シリコーン系界面活性剤、フッ素系界面活性剤が好ましく、フッ素系界面活性剤が特に好ましい。
<Surfactant (e1)>
The photosensitive resin composition of the present invention has a surface tension of a 0.5 mass% propylene glycol monomethyl ether acetate solution at 23 ° C. (hereinafter, simply referred to as "surface tension") in order to suppress pin unevenness during hot plate drying. Includes a surface active agent (e1) having a value of 23.0 mN / m or less.
The surfactant (e1) is not particularly limited as long as the surface tension is 23.0 mN / m or less, but from the viewpoint of suppressing pin unevenness, a silicone-based surfactant and a fluorine-based surfactant are preferable, and a fluorine-based surfactant is preferable. Surfactants are particularly preferred.
 界面活性剤(e1)としては、アニオン系、カチオン系、非イオン系および両性界面活性剤等各種の界面活性剤を用いることができる。諸特性に悪影響を及ぼす可能性が低い点で、非イオン系界面活性剤が好ましい。 As the surfactant (e1), various surfactants such as anionic, cationic, nonionic and amphoteric surfactants can be used. Nonionic surfactants are preferred because they are less likely to adversely affect properties.
 界面活性剤(e1)としては、例えば、F-559(DIC社製、表面張力:22.5mN/m)が挙げられる。 Examples of the surfactant (e1) include F-559 (manufactured by DIC Corporation, surface tension: 22.5 mN / m).
<その他の界面活性剤>
 本発明における(e)界面活性剤は、塗布性を調整する目的で界面活性剤(e1)の他に、その他の界面活性剤を含有していてもよい。
 その他の界面活性剤としては、例えば、BYK-330(ビックケミー社製、表面張力:24.4mN/m)、F-475(DIC社製、表面張力:25.4mN/m)、F-554(DIC社製、表面張力:23.3mN/m)が挙げられる。
 その他の界面活性剤は、1種を用いてもよく、2種以上を任意の組み合わせ及び比率で併用してもよい。
<Other surfactants>
The (e) surfactant in the present invention may contain other surfactants in addition to the surfactant (e1) for the purpose of adjusting the coatability.
Examples of other surfactants include BYK-330 (manufactured by Big Chemie, surface tension: 24.4 mN / m), F-475 (manufactured by DIC, surface tension: 25.4 mN / m), F-554 (manufactured by DIC). DIC, surface tension: 23.3 mN / m).
As the other surfactant, one type may be used, or two or more types may be used in combination in any combination and ratio.
 界面活性剤の表面張力は、表面張力計を使用し、プロピレングリコールモノメチルエーテルアセテート溶液に界面活性剤を0.5質量%添加した溶液を用いて、23℃の条件下にて懸滴法で計測することができる。また解析手法として、d/D法を用いることができる。 The surface tension of the surfactant is measured by a suspension method under the condition of 23 ° C. using a surface tensiometer and a solution prepared by adding 0.5% by mass of the surfactant to a propylene glycol monomethyl ether acetate solution. can do. Further, the d / D method can be used as the analysis method.
 (e)界面活性剤の含有割合は特に限定されないが、感光性樹脂組成物の全固形分中、0.01質量%以上が好ましく、0.05質量%以上がより好ましく、0.1質量%以上がさらに好ましく0.15質量%以上が特に好ましい。また、1.0質量%以下が好ましく、0.7質量%以下がより好ましく、0.5質量%以下がさらに好ましく、0.3質量%以下が特に好ましい。前記下限値以上とすることでピンムラが抑制できる傾向があり、また、前記上限値以下とすることで感度が向上する傾向がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、0.01~1.0質量%が好ましく、0.05~0.7質量%がより好ましく、0.1~0.5質量%がさらに好ましく0.15~0.3質量%が特に好ましい。
(E) The content ratio of the surfactant is not particularly limited, but is preferably 0.01% by mass or more, more preferably 0.05% by mass or more, and 0.1% by mass, based on the total solid content of the photosensitive resin composition. The above is more preferable, and 0.15% by mass or more is particularly preferable. Further, 1.0% by mass or less is preferable, 0.7% by mass or less is more preferable, 0.5% by mass or less is further preferable, and 0.3% by mass or less is particularly preferable. Pin unevenness tends to be suppressed by setting the value to the lower limit value or more, and sensitivity tends to improve by setting the value to the upper limit value or less.
The above upper and lower limits can be combined arbitrarily. For example, 0.01 to 1.0% by mass is preferable, 0.05 to 0.7% by mass is more preferable, 0.1 to 0.5% by mass is further preferable, and 0.15 to 0.3% by mass is particularly preferable. preferable.
 界面活性剤(e1)の含有割合は特に限定されないが、感光性樹脂組成物の全固形分中、0.01質量%以上であることが好ましく、0.05質量%以上であることがより好ましく、0.1質量%以上であることがさらに好ましく0.15質量%以上であることが特に好ましい。また、1.0質量%以下であることが好ましく、0.7質量%以下であることがより好ましく、0.5質量%以下であることがさらに好ましく、0.3質量%以下であることが特に好ましい。前記下限値以上とすることでホットプレート乾燥時のピンムラが抑制できる傾向がある。また、前記上限値以下とすることでレジスト感度が向上する傾向がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、0.01~1.0質量%が好ましく、0.05~0.7質量%がより好ましく、0.1~0.5質量%がさらに好ましく0.15~0.3質量%が特に好ましい。
The content ratio of the surfactant (e1) is not particularly limited, but is preferably 0.01% by mass or more, more preferably 0.05% by mass or more, based on the total solid content of the photosensitive resin composition. , 0.1% by mass or more is more preferable, and 0.15% by mass or more is particularly preferable. Further, it is preferably 1.0% by mass or less, more preferably 0.7% by mass or less, further preferably 0.5% by mass or less, and more preferably 0.3% by mass or less. Especially preferable. By setting the value to the lower limit or higher, pin unevenness during hot plate drying tends to be suppressed. Further, the resist sensitivity tends to be improved by setting the value to the upper limit or less.
The above upper and lower limits can be combined arbitrarily. For example, 0.01 to 1.0% by mass is preferable, 0.05 to 0.7% by mass is more preferable, 0.1 to 0.5% by mass is further preferable, and 0.15 to 0.3% by mass is particularly preferable. preferable.
 (e)界面活性剤の全含有量に対する、界面活性剤(e1)の含有割合は、好ましくは10質量%以上、より好ましくは30質量%以上、さらに好ましくは50質量%以上であり、特に好ましくは90質量%以上である。また、100質量%以下である。前記下限値以上とすることでホットプレート乾燥時のピンムラが抑制できる傾向がある。
 上述の上限及び下限は任意に組み合わせることができる。例えば、10~100質量%が好ましく、30~100質量%がより好ましく、50~100質量%がさらに好ましく、90~100質量%が特に好ましい。
(E) The content ratio of the surfactant (e1) with respect to the total content of the surfactant is preferably 10% by mass or more, more preferably 30% by mass or more, still more preferably 50% by mass or more, and particularly preferably. Is 90% by mass or more. Moreover, it is 100% by mass or less. By setting the value to the lower limit or higher, pin unevenness during hot plate drying tends to be suppressed.
The above upper and lower limits can be combined arbitrarily. For example, 10 to 100% by mass is preferable, 30 to 100% by mass is more preferable, 50 to 100% by mass is further preferable, and 90 to 100% by mass is particularly preferable.
<分散剤>
 本発明においては、色材を微細に分散させ、且つその分散状態を安定化させることが品質の安定性確保には重要なため、分散剤を含むことが好ましい。
 分散剤としては、官能基を有する高分子分散剤が好ましく、さらには、分散安定性の面からカルボキシ基、リン酸基、スルホン酸基、又はこれらの塩基;一級、二級又は三級アミノ基;四級アンモニウム塩基;ピリジン、ピリミジン、ピラジン等の含窒素ヘテロ環由来の基;等の官能基を有する高分子分散剤が好ましい。一級、二級又は三級アミノ基;四級アンモニウム塩基;ピリジン、ピリミジン、ピラジン等の含窒素ヘテロ環由来の基;等の塩基性官能基を有する高分子分散剤が特に好ましい。塩基性官能基を有する高分子分散剤を使用することにより、分散性を良好にでき、高い遮光性を達成できる傾向がある。
<Dispersant>
In the present invention, it is preferable to include a dispersant because it is important to finely disperse the coloring material and stabilize the dispersed state thereof in order to ensure the stability of quality.
As the dispersant, a polymer dispersant having a functional group is preferable, and further, from the viewpoint of dispersion stability, a carboxy group, a phosphoric acid group, a sulfonic acid group, or a base thereof; a primary, secondary or tertiary amino group. A polymer dispersant having a functional group such as a quaternary ammonium base; a group derived from a nitrogen-containing heterocycle such as pyridine, pyrimidine, or pyrazine; is preferable. Polymer dispersants having basic functional groups such as primary, secondary or tertiary amino groups; quaternary ammonium bases; groups derived from nitrogen-containing heterocycles such as pyridine, pyrimidine, pyrazine; etc. are particularly preferred. By using a polymer dispersant having a basic functional group, the dispersibility can be improved and a high light-shielding property tends to be achieved.
 高分子分散剤としては、例えば、ウレタン系分散剤、アクリル系分散剤、ポリエチレンイミン系分散剤、ポリアリルアミン系分散剤、アミノ基を持つモノマーとマクロモノマーからなる分散剤、ポリオキシエチレンアルキルエーテル系分散剤、ポリオキシエチレンジエステル系分散剤、ポリエーテルリン酸系分散剤、ポリエステルリン酸系分散剤、ソルビタン脂肪族エステル系分散剤、脂肪族変性ポリエステル系分散剤を挙げることができる。 Examples of the polymer dispersant include urethane dispersants, acrylic dispersants, polyethyleneimine dispersants, polyallylamine dispersants, dispersants consisting of monomers having amino groups and macromonomers, and polyoxyethylene alkyl ethers. Examples thereof include dispersants, polyoxyethylene diester dispersants, polyether phosphate dispersants, polyester phosphate dispersants, sorbitan aliphatic ester dispersants, and aliphatic modified polyester dispersants.
 分散剤としては、例えば、商品名で、EFKA(登録商標。エフカーケミカルズビーブイ(EFKA)社製。)、Disperbyk(登録商標。ビックケミー社製。)、ディスパロン(登録商標。楠本化成社製。)、SOLSPERSE(登録商標。ルーブリゾール社製。)、KP(信越化学工業社製)、ポリフロー又はフローレン(登録商標。共栄社化学社製。)、アジスパー(登録商標。味の素ファインテクノ社製。)を挙げることができる。
 高分子分散剤は1種を単独で使用してもよく、2種以上を併用してもよい。
Examples of the dispersant include EFKA (registered trademark, manufactured by EFKA), Disperbyk (registered trademark, manufactured by Big Chemie), and Disparon (registered trademark, manufactured by Kusumoto Kasei Co., Ltd.) under the trade names. , SOLPERSE (registered trademark, manufactured by Lubrizol), KP (manufactured by Shin-Etsu Chemical Co., Ltd.), Polyflow or Floren (registered trademark, manufactured by Kyoeisha Chemical Co., Ltd.), Azisper (registered trademark, manufactured by Ajinomoto Fine Techno Co., Ltd.). be able to.
One type of polymer dispersant may be used alone, or two or more types may be used in combination.
 細線密着性及び直線性の面から、分散剤は塩基性官能基を有するウレタン系高分子分散剤及び/又はアクリル系高分子分散剤を含むことが好ましい。ウレタン系高分子分散剤が細線密着性の面で特に好ましい。
 分散性、保存性の面から、分散剤は塩基性官能基を有し、ポリエステル及び/又はポリエーテル結合を有する高分子分散剤を含むことが好ましい。
From the viewpoint of fine line adhesion and linearity, the dispersant preferably contains a urethane-based polymer dispersant having a basic functional group and / or an acrylic polymer dispersant. Urethane-based polymer dispersants are particularly preferable in terms of fine wire adhesion.
From the viewpoint of dispersibility and storage stability, the dispersant preferably contains a polymer dispersant having a basic functional group and having a polyester and / or a polyether bond.
 高分子分散剤の重量平均分子量(Mw)は好ましくは700以上、より好ましくは1000以上であり、また好ましくは100,000以下、より好ましくは50,000以下であり、さらに好ましくは30,000以下である。前記上限値以下とすることで、顔料濃度が高い時でもアルカリ現像性が良好となる傾向がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、700~100,000が好ましく、700~50,000がより好ましく、1,000~30,000がさらに好ましい。
The weight average molecular weight (Mw) of the polymer dispersant is preferably 700 or more, more preferably 1000 or more, preferably 100,000 or less, more preferably 50,000 or less, still more preferably 30,000 or less. Is. By setting the value to the upper limit or less, the alkali developability tends to be good even when the pigment concentration is high.
The above upper and lower limits can be combined arbitrarily. For example, 700 to 100,000 is preferable, 700 to 50,000 is more preferable, and 1,000 to 30,000 is even more preferable.
 ウレタン系及びアクリル系高分子分散剤としては、例えば、Disperbyk160~167、182シリーズ(いずれもウレタン系)、Disperbyk2000、2001等(いずれもアクリル系)(以上すべてビックケミー社製)が挙げられる。塩基性官能基を有し、ポリエステル及び/又はポリエーテル結合を有するウレタン系高分子分散剤で重量平均分子量30,000以下の特に好ましい高分子分散剤として、例えば、Disperbyk167、182が挙げられる。 Examples of the urethane-based and acrylic polymer dispersants include Disperbyk 160 to 167, 182 series (all urethane-based), Disperbyk2000, 2001 (all acrylic-based) (all manufactured by Big Chemie). Disperbyk 167, 182 is mentioned as a particularly preferable polymer dispersant having a basic functional group and having a polyester and / or a polyether bond and having a weight average molecular weight of 30,000 or less.
<ウレタン系高分子分散剤>
 ウレタン系高分子分散剤としては、例えば、ポリイソシアネート化合物と、分子内に水酸基を1個又は2個有する数平均分子量300~10,000の化合物と、同一分子内に活性水素と3級アミノ基を有する化合物とを反応させることによって得られる、重量平均分子量1,000~200,000の分散樹脂が挙げられる。
<Urethane-based polymer dispersant>
Examples of the urethane polymer dispersant include a polyisocyanate compound, a compound having one or two hydroxyl groups in the molecule and a number average molecular weight of 300 to 10,000, and active hydrogen and a tertiary amino group in the same molecule. Examples thereof include a dispersed resin having a weight average molecular weight of 1,000 to 200,000, which is obtained by reacting with a compound having a weight average of 1,000 to 200,000.
 ポリイソシアネート化合物としては、例えば、パラフェニレンジイソシアネート、2,4-トリレンジイソシアネート、2,6-トリレンジイソシアネート、4,4’-ジフェニルメタンジイソシアネート、ナフタレン-1,5-ジイソシアネート、トリジンジイソシアネート等の芳香族ジイソシアネート;ヘキサメチレンジイソシアネート、リジンメチルエステルジイソシアネート、2,4,4-トリメチルヘキサメチレンジイソシアネート、ダイマー酸ジイソシアネート等の脂肪族ジイソシアネート;イソホロンジイソシアネート、4,4’-メチレンビス(シクロヘキシルイソシアネート)、ω,ω’-ジイソシネートジメチルシクロヘキサン等の脂環族ジイソシアネート;キシリレンジイソシアネート、α,α,α’,α’-テトラメチルキシリレンジイソシアネート等の芳香環を有する脂肪族ジイソシアネート;リジンエステルトリイソシアネート、1,6,11-ウンデカントリイソシアネート、1,8-ジイソシアネート-4-イソシアネートメチルオクタン、1,3,6-ヘキサメチレントリイソシアネート、ビシクロヘプタントリイソシアネート、トリス(イソシアネートフェニルメタン)、トリス(イソシアネートフェニル)チオホスフェート等のトリイソシアネート;これらの3量体、水付加物、これらのポリオール付加物が挙げられる。ポリイソシアネートとしては有機ジイソシアネートの三量体が好ましく、トリレンジイソシアネートの三量体とイソホロンジイソシアネートの三量体が特に好ましい。
 これらは1種を単独で用いてもよく、2種以上を併用してもよい。
Examples of the polyisocyanate compound include aromatics such as paraphenylenediocyanate, 2,4-tolylene diisocyanate, 2,6-tolylene diisocyanate, 4,4'-diphenylmethane diisocyanate, naphthalene-1,5-diisocyanate, and trizine diisocyanate. Diisocyanate; aliphatic diisocyanates such as hexamethylene diisocyanate, lysine methyl ester diisocyanate, 2,4,4-trimethylhexamethylene diisocyanate, dimerate diisocyanate; isophorone diisocyanate, 4,4'-methylenebis (cyclohexylisocyanate), ω, ω'- Alicyclic diisocyanates such as diisocinatedimethylcyclohexane; aliphatic diisocyanates having aromatic rings such as xylylene diisocyanate, α, α, α', α'-tetramethylxylylene diisocyanate; lysine ester triisocyanates, 1,6. 11-Undecantriisocyanate, 1,8-diisocyanate-4-isocyanatemethyloctane, 1,3,6-hexamethylenetriisocyanate, bicycloheptantriisocyanate, tris (isocyanatephenylmethane), tris (isocyanatephenyl) thiophosphate, etc. Triisocyanates; these trimers, water adducts, and polyol adducts thereof. As the polyisocyanate, a trimer of organic diisocyanate is preferable, and a trimer of tolylene diisocyanate and a trimer of isophorone diisocyanate are particularly preferable.
These may be used alone or in combination of two or more.
 イソシアネートの三量体の製造方法としては、例えば、第3級アミン類、ホスフィン類、アルコキシド類、金属酸化物、カルボン酸塩類等の適当な三量化触媒を用いて、ポリイソシアネート化合物のイソシアネート基の部分的な三量化を行い、触媒毒の添加により三量化を停止させた後、未反応のポリイソシアネートを溶剤抽出、薄膜蒸留により除去して目的のイソシアヌレート基含有ポリイソシアネートを得る方法が挙げられる。 As a method for producing an isocyanate trimer, for example, an appropriate trimerization catalyst such as a tertiary amine, a phosphine, an alkoxide, a metal oxide, or a carboxylate is used to prepare an isocyanate group of a polyisocyanate compound. A method of partially trimerizing, stopping the trimerization by adding a catalytic poison, and then removing the unreacted polyisocyanate by solvent extraction and thin film distillation to obtain the desired isocyanurate group-containing polyisocyanate can be mentioned. ..
 同一分子内に水酸基を1個又は2個有する数平均分子量300~10,000の化合物としては、例えば、ポリエーテルグリコール、ポリエステルグリコール、ポリカーボネートグリコール、ポリオレフィングリコール、及びこれらの化合物の片末端水酸基が炭素数1~25のアルキル基でアルコキシ化されたもの、並びにこれら2種類以上の混合物が挙げられる。 As a compound having one or two hydroxyl groups in the same molecule and having a number average molecular weight of 300 to 10,000, for example, polyether glycol, polyester glycol, polycarbonate glycol, polyolefin glycol, and one-terminal hydroxyl group of these compounds are carbon. Examples thereof include those which are alkoxylated with an alkyl group having a number of 1 to 25, and mixtures of two or more of these.
 ポリエーテルグリコールとしては、例えば、ポリエーテルジオール、ポリエーテルエステルジオール、及びこれら2種類以上の混合物が挙げられる。 Examples of the polyether glycol include a polyether diol, a polyether ester diol, and a mixture of two or more of these.
 ポリエーテルジオールとしては、アルキレンオキシドを単独又は共重合させて得られるポリエーテルジオール、例えば、ポリエチレングリコール、ポリプロピレングリコール、ポリエチレン-プロピレングリコール、ポリオキシテトラメチレングリコール、ポリオキシヘキサメチレングリコール、ポリオキシオクタメチレングリコール及びそれらの2種以上の混合物が挙げられる。 Examples of the polyether diol include polyether diols obtained by using alkylene oxide alone or in copolymerization, for example, polyethylene glycol, polypropylene glycol, polyethylene-propylene glycol, polyoxytetramethylene glycol, polyoxyhexamethylene glycol, and polyoxyoctamethylene. Glycols and mixtures of two or more thereof can be mentioned.
 ポリエーテルエステルジオールとしては、エーテル基含有ジオールもしくは他のグリコールとの混合物をジカルボン酸又はそれらの無水物と反応させるか、又はポリエステルグリコールにアルキレンオキシドを反応させることによって得られるポリエーテルエステルジオール、例えば、ポリ(ポリオキシテトラメチレン)アジペートが挙げられる。 As the polyether ester diol, a polyether ester diol obtained by reacting an ether group-containing diol or a mixture with other glycols with a dicarboxylic acid or an anhydride thereof, or by reacting a polyester glycol with an alkylene oxide, for example. , Poly (polyoxytetramethylene) adipate.
 ポリエーテルグリコールとしては、ポリエチレングリコール、ポリプロピレングリコール、ポリオキシテトラメチレングリコール又はこれらの化合物の片末端水酸基が炭素数1~25のアルキル基でアルコキシ化された化合物が好ましい。 As the polyether glycol, polyethylene glycol, polypropylene glycol, polyoxytetramethylene glycol or a compound in which one terminal hydroxyl group of these compounds is alkoxylated with an alkyl group having 1 to 25 carbon atoms is preferable.
 ポリエステルグリコールとしては、ジカルボン酸(コハク酸、グルタル酸、アジピン酸、セバシン酸、フマル酸、マレイン酸、フタル酸等)又はそれらの無水物とグリコール(エチレングリコール、ジエチレングリコール、トリエチレングリコール、プロピレングリコール、ジプロピレングリコール、トリプロピレングリコール、1,2-ブタンジオール、1,3-ブタンジオール、1,4-ブタンジオール、2,3-ブタンジオール、3-メチル-1,5-ペンタンジオール、ネオペンチルグリコール、2-メチル-1,3-プロパンジオール、2-メチル-2-プロピル-1,3-プロパンジオール、2-ブチル-2-エチル-1,3-プロパンジオール、1,5-ペンタンジオール、1,6-ヘキサンジオール、2-メチル-2,4-ペンタンジオール、2,2,4-トリメチル-1,3-ペンタンジオール、2-エチル-1,3-ヘキサンジオール、2,5-ジメチル-2,5-ヘキサンジオール、1,8-オクタメチレングリコール、2-メチル-1,8-オクタメチレングリコール、1,9-ノナンジオール等の脂肪族グリコール、ビスヒドロキシメチルシクロヘキサン等の脂環族グリコール、キシリレングリコール、ビスヒドロキシエトキシベンゼン等の芳香族グリコール、N-メチルジエタノールアミン等のN-アルキルジアルカノールアミン等)とを重縮合させて得られたポリエステルグリコール、例えば、ポリエチレンアジペート、ポリブチレンアジペート、ポリヘキサメチレンアジペート、ポリエチレン/プロピレンアジペート;グリコール又は炭素数1~25の1価アルコールを開始剤として用いて得られるポリラクトンジオール又はポリラクトンモノオール、例えば、ポリカプロラクトングリコール、ポリメチルバレロラクトン;これらの2種以上の混合物が挙げられる。
 ポリエステルグリコールとしては、ポリカプロラクトングリコール又は炭素数1~25のアルコールを開始剤としたポリカプロラクトンが好ましい。
Examples of polyester glycols include dicarboxylic acids (succinic acid, glutaric acid, adipic acid, sebacic acid, fumaric acid, maleic acid, phthalic acid, etc.) or their anhydrides and glycols (ethylene glycol, diethylene glycol, triethylene glycol, propylene glycol, etc.). Dipropylene glycol, tripropylene glycol, 1,2-butanediol, 1,3-butanediol, 1,4-butanediol, 2,3-butanediol, 3-methyl-1,5-pentanediol, neopentyl glycol , 2-Methyl-1,3-propanediol, 2-methyl-2-propyl-1,3-propanediol, 2-butyl-2-ethyl-1,3-propanediol, 1,5-pentanediol, 1 , 6-Glycoldiol, 2-Methyl-2,4-Pentanediol, 2,2,4-trimethyl-1,3-Pentanediol, 2-Ethyl-1,3-Hexanediol, 2,5-dimethyl-2 , 5-Hexanediol, 1,8-octamethylene glycol, 2-methyl-1,8-octamethylene glycol, 1,9-nonanediol and other aliphatic glycols, bishydroxymethylcyclohexane and other alicyclic glycols, xyl Polyester glycol obtained by polycondensation with aromatic glycols such as len glycol and bishydroxyethoxybenzene, N-alkyldialkanolamine such as N-methyldiethanolamine), for example, polyethylene adipate, polybutylene adipate, polyhexa. Methylene adipate, polyethylene / propylene adipate; polylactone diol or polylactone monool obtained using glycol or a monovalent alcohol having 1 to 25 carbon atoms as an initiator; for example, polycaprolactone glycol, polymethylvalerolactone; 2 of these. Glycols above the seed can be mentioned.
As the polyester glycol, polycaprolactone glycol or polycaprolactone using an alcohol having 1 to 25 carbon atoms as an initiator is preferable.
 ポリカーボネートグリコールとしては、例えば、ポリ(1,6-ヘキシレン)カーボネート、ポリ(3-メチル-1,5-ペンチレン)カーボネートが挙げられる。
 ポリオレフィングリコールとしては、例えば、ポリブタジエングリコール、水素添加型ポリブタジエングリコール、水素添加型ポリイソプレングリコールが挙げられる。
 これらは1種を単独で用いてもよく、2種以上を併用してもよい。
Examples of the polycarbonate glycol include poly (1,6-hexylene) carbonate and poly (3-methyl-1,5-pentylene) carbonate.
Examples of the polyolefin glycol include polybutadiene glycol, hydrogenated polybutadiene glycol, and hydrogenated polyisoprene glycol.
These may be used alone or in combination of two or more.
 同一分子内に水酸基を1個又は2個有する数平均分子量300~10,000の化合物の数平均分子量は、好ましくは500~6,000、さらに好ましくは1,000~4,000である。 The number average molecular weight of a compound having one or two hydroxyl groups in the same molecule and having a number average molecular weight of 300 to 10,000 is preferably 500 to 6,000, more preferably 1,000 to 4,000.
 同一分子内に活性水素と3級アミノ基を有する化合物における活性水素、即ち、酸素原子、窒素原子又はイオウ原子に直接結合している水素原子としては、水酸基、アミノ基、チオール基等の官能基中の水素原子が挙げられ、中でもアミノ基、特に1級アミノ基の水素原子が好ましい。 Active hydrogen in a compound having active hydrogen and a tertiary amino group in the same molecule, that is, a hydrogen atom directly bonded to an oxygen atom, a nitrogen atom or a sulfur atom is a functional group such as a hydroxyl group, an amino group or a thiol group. The hydrogen atom in the above is mentioned, and among them, the hydrogen atom of an amino group, particularly a primary amino group is preferable.
 同一分子内に活性水素と3級アミノ基を有する化合物における3級アミノ基は、特に限定されないが、例えば、炭素数1~4のアルキル基を有するアミノ基;イミダゾール環、トリアゾール環等の含窒素ヘテロ環構造が挙げられる。
 同一分子内に活性水素と3級アミノ基を有する化合物としては、例えば、N,N-ジメチル-1,3-プロパンジアミン、N,N-ジエチル-1,3-プロパンジアミン、N,N-ジプロピル-1,3-プロパンジアミン、N,N-ジブチル-1,3-プロパンジアミン、N,N-ジメチルエチレンジアミン、N,N-ジエチルエチレンジアミン、N,N-ジプロピルエチレンジアミン、N,N-ジブチルエチレンジアミン、N,N-ジメチル-1,4-ブタンジアミン、N,N-ジエチル-1,4-ブタンジアミン、N,N-ジプロピル-1,4-ブタンジアミン、N,N-ジブチル-1,4-ブタンジアミンが挙げられる。
The tertiary amino group in the compound having an active hydrogen and a tertiary amino group in the same molecule is not particularly limited, but is, for example, an amino group having an alkyl group having 1 to 4 carbon atoms; nitrogen-containing such as an imidazole ring and a triazole ring. A heterocyclic structure can be mentioned.
Examples of compounds having active hydrogen and a tertiary amino group in the same molecule include N, N-dimethyl-1,3-propanediamine, N, N-diethyl-1,3-propanediamine, N, N-dipropyl. -1,3-propanediamine, N, N-dibutyl-1,3-propanediamine, N, N-dimethylethylenediamine, N, N-diethylethylenediamine, N, N-dipropylethylenediamine, N, N-dibutylethylenediamine, N, N-dimethyl-1,4-butanediamine, N, N-diethyl-1,4-butanediamine, N, N-dipropyl-1,4-butanediamine, N, N-dibutyl-1,4-butane Diamine can be mentioned.
 同一分子内に活性水素と3級アミノ基を有する化合物における3級アミノ基の含窒素ヘテロ環構造としては、ピラゾール環、イミダゾール環、トリアゾール環、テトラゾール環、インドール環、カルバゾール環、インダゾール環、ベンズイミダゾール環、ベンゾトリアゾール環、ベンゾオキサゾール環、ベンゾチアゾール環、ベンゾチアジアゾール環等の含窒素ヘテロ5員環;ピリジン環、ピリダジン環、ピリミジン環、トリアジン環、キノリン環、アクリジン環、イソキノリン環等の含窒素ヘテロ6員環;が挙げられる。
 含窒素ヘテロ環構造としては、イミダゾール環、トリアゾール環が好ましい。
The nitrogen-containing heterocyclic structure of the tertiary amino group in the compound having active hydrogen and a tertiary amino group in the same molecule includes a pyrazole ring, an imidazole ring, a triazole ring, a tetrazole ring, an indole ring, a carbazole ring, an indazole ring, and benz. Nitrogen-containing hetero 5-membered ring such as imidazole ring, benzotriazole ring, benzoxazole ring, benzothiazole ring, benzothiazol ring; Nitrogen hetero 6-membered ring;
As the nitrogen-containing heterocyclic structure, an imidazole ring and a triazole ring are preferable.
 イミダゾール環とアミノ基を有する化合物としては、例えば、1-(3-アミノプロピル)イミダゾール、ヒスチジン、2-アミノイミダゾール、1-(2-アミノエチル)イミダゾール等が挙げられる。
 トリアゾール環とアミノ基を有する化合物としては、例えば、3-アミノ-1,2,4-トリアゾール、5-(2-アミノ-5-クロロフェニル)-3-フェニル-1H-1,2,4-トリアゾール、4-アミノ-4H-1,2,4-トリアゾール-3,5-ジオール、3-アミノ-5-フェニル-1H-1,3,4-トリアゾール、5-アミノ-1,4-ジフェニル-1,2,3-トリアゾール、3-アミノ-1-ベンジル-1H-2,4-トリアゾール等が挙げられる。
Examples of the compound having an imidazole ring and an amino group include 1- (3-aminopropyl) imidazole, histidine, 2-aminoimidazole, 1- (2-aminoethyl) imidazole and the like.
Examples of the compound having a triazole ring and an amino group include 3-amino-1,2,4-triazole and 5- (2-amino-5-chlorophenyl) -3-phenyl-1H-1,2,4-triazole. , 4-Amino-4H-1,2,4-Triazole-3,5-diol, 3-amino-5-phenyl-1H-1,3,4-triazole, 5-amino-1,4-diphenyl-1 , 2,3-Triazole, 3-amino-1-benzyl-1H-2,4-triazole and the like.
 同一分子内に活性水素と3級アミノ基を有する化合物としては、N,N-ジメチル-1,3-プロパンジアミン、N,N-ジエチル-1,3-プロパンジアミン、1-(3-アミノプロピル)イミダゾール、3-アミノ-1,2,4-トリアゾールが好ましい。
 これらは1種を単独で用いてもよく、2種以上を併用してもよい。
Compounds having active hydrogen and a tertiary amino group in the same molecule include N, N-dimethyl-1,3-propanediamine, N, N-diethyl-1,3-propanediamine, 1- (3-aminopropyl). ) Imidazole and 3-amino-1,2,4-triazole are preferable.
These may be used alone or in combination of two or more.
 ウレタン系高分子分散剤を製造する際の原料の好ましい配合比率は、ポリイソシアネート化合物100質量部に対し;同一分子内に水酸基を1個又は2個有する数平均分子量300~10,000の化合物が10~200質量部、好ましくは20~190質量部、さらに好ましくは30~180質量部;同一分子内に活性水素と3級アミノ基を有する化合物が0.2~25質量部、好ましくは0.3~24質量部;である。 The preferred blending ratio of the raw materials for producing the urethane-based polymer dispersant is 100 parts by mass of the polyisocyanate compound; a compound having one or two hydroxyl groups in the same molecule and having a number average molecular weight of 300 to 10,000. 10 to 200 parts by mass, preferably 20 to 190 parts by mass, more preferably 30 to 180 parts by mass; 0.2 to 25 parts by mass, preferably 0. 3 to 24 parts by mass;
 ウレタン系高分子分散剤の製造はポリウレタン樹脂製造の公知の方法に従って行うことができる。
 ウレタン系高分子分散剤の製造に用いうる溶媒としては、アセトン、メチルエチルケトン、メチルイソブチルケトン、シクロペンタノン、シクロヘキサノン、イソホロン等のケトン類;酢酸エチル、酢酸ブチル、酢酸セロソルブ等のエステル類;ベンゼン、トルエン、キシレン、ヘキサン等の炭化水素類;ダイアセトンアルコール、イソプロパノール、第二ブタノール、第三ブタノール等の一部のアルコール類;塩化メチレン、クロロホルム等の塩化物;テトラヒドロフラン、ジエチルエーテル等のエーテル類;ジメチルホルムアミド、N-メチルピロリドン、ジメチルスルホキサイド等の非プロトン性極性溶媒;が挙げられる。
 これらは1種を単独で用いてもよく、2種以上を併用してもよい。
The urethane-based polymer dispersant can be produced according to a known method for producing a polyurethane resin.
Solvents that can be used in the production of urethane-based polymer dispersants include ketones such as acetone, methyl ethyl ketone, methyl isobutyl ketone, cyclopentanone, cyclohexanone, and isophorone; esters such as ethyl acetate, butyl acetate, and cellosolve acetate; benzene, Hydrocarbons such as toluene, xylene and hexane; some alcohols such as diacetone alcohol, isopropanol, second butanol and tertiary butanol; chlorides such as methylene chloride and chloroform; ethers such as tetrahydrofuran and diethyl ether; Aprotonic polar solvents such as dimethylformamide, N-methylpyrrolidone, dimethylsulfoxide; and the like;
These may be used alone or in combination of two or more.
 ウレタン系高分子分散剤の製造に際して、ウレタン化反応触媒を用いうる。ウレタン化反応触媒としては、例えば、ジブチルチンジラウレート、ジオクチルチンジラウレート、ジブチルチンジオクトエート、スタナスオクトエート等の錫系触媒;鉄アセチルアセトナート、塩化第二鉄等の鉄系触媒;トリエチルアミン、トリエチレンジアミン等の3級アミン系触媒;の1種又は2種以上が挙げられる。 A urethanization reaction catalyst can be used in the production of the urethane-based polymer dispersant. Examples of the urethanization reaction catalyst include tin-based catalysts such as dibutyltin dilaurate, dioctyltin dilaurate, dibutyltin dioctate, and stanas octoate; iron-based catalysts such as iron acetylacetonate and ferric chloride; triethylamine and tri. One or more of tertiary amine-based catalysts such as ethylenediamine;
<アミン価の測定方法>
 分散剤のアミン価は、分散剤試料中の溶剤を除いた固形分1gあたりの塩基量と当量のKOHの質量で表し、次の方法により測定することができる。
 100mLのビーカーに分散剤試料の0.5~1.5gを精秤し、50mLの酢酸で溶解する。pH電極を備えた自動滴定装置を使って、この溶液を0.1mol/LのHClO4(過塩素酸)酢酸溶液にて中和滴定する。滴定pH曲線の変曲点を滴定終点とし次式によりアミン価を求める。
<Measuring method of amine value>
The amine value of the dispersant is expressed by the amount of base per 1 g of solid content excluding the solvent in the dispersant sample and the equivalent mass of KOH, and can be measured by the following method.
Weigh 0.5-1.5 g of the dispersant sample into a 100 mL beaker and dissolve in 50 mL of acetic acid. This solution is neutralized and titrated with 0.1 mol / L HClO 4 (perchloric acid) acetic acid solution using an automatic titrator equipped with a pH electrode. The amine value is calculated by the following formula with the inflection point of the titration pH curve as the titration end point.
 アミン価[mgKOH/g]=(561×V)/(W×S)
〔但し、W:分散剤試料秤取量[g]、V:滴定終点での滴定量[mL]、S:分散剤試料の固形分濃度[質量%]を表す。〕
Amine value [mgKOH / g] = (561 × V) / (W × S)
[However, W: Dispersant sample weighing amount [g], V: Titration quantification at the end point of titration [mL], S: Solid content concentration [mass%] of the dispersant sample. ]
 同一分子内に活性水素と3級アミノ基を有する化合物の導入量は、反応後のアミン価で、好ましくは1~100mgKOH/g、より好ましくは5~95mgKOH/gの範囲に制御するのが好ましい。アミン価を前記下限値以上とすることで分散性が良好となる傾向があり、また、前記上限値以下とすることで現像性が良好となる傾向がある。 The amount of the compound having an active hydrogen and a tertiary amino group in the same molecule is preferably controlled in the range of 1 to 100 mgKOH / g, more preferably 5 to 95 mgKOH / g in terms of the amine value after the reaction. .. When the amine value is set to the lower limit value or more, the dispersibility tends to be good, and when the amine value is set to the upper limit value or less, the developability tends to be good.
 高分子分散剤にイソシアネート基が残存する場合には、さらにアルコールやアミノ化合物を用いてイソシアネート基を消費すると生成物の経時安定性が高くなるので好ましい。 When the isocyanate group remains in the polymer dispersant, it is preferable to further consume the isocyanate group by using an alcohol or an amino compound because the stability of the product with time becomes high.
 ウレタン系高分子分散剤の重量平均分子量(Mw)は、好ましくは1,000~200,000、より好ましくは2,000~100,000、さらに好ましくは3,000~50,000である。また、よりさらに好ましくは1,000~30,000、ことさら好ましくは2,000~30,000、特に好ましくは3,000~30,000である。前記下限値以上とすることで分散性及び分散安定性が良好となる傾向があり、前記上限値以下とすることで溶解性が良好となる傾向がある。特に、ウレタン系高分子分散剤の重量平均分子量が30,000以下であると、顔料濃度の高い場合でも、アルカリ現像性が良好となる傾向がある。 The weight average molecular weight (Mw) of the urethane-based polymer dispersant is preferably 1,000 to 200,000, more preferably 2,000 to 100,000, and even more preferably 3,000 to 50,000. Further, it is even more preferably 1,000 to 30,000, particularly preferably 2,000 to 30,000, and particularly preferably 3,000 to 30,000. When it is at least the above lower limit value, the dispersibility and dispersion stability tend to be good, and when it is at least the above upper limit value, the solubility tends to be good. In particular, when the weight average molecular weight of the urethane-based polymer dispersant is 30,000 or less, the alkali developability tends to be good even when the pigment concentration is high.
 好ましい市販のウレタン分散剤として、例えば、Disperbyk167、182(ビックケミー社)が挙げられる。 Preferred commercially available urethane dispersants include, for example, Disperbyk 167, 182 (Big Chemie).
 本発明の感光性樹脂組成物が分散剤を含む場合、分散剤の含有割合は、感光性樹脂組成物の全固形分中、好ましくは50質量%以下、より好ましくは30質量%以下、さらに好ましくは20質量%以下、また、好ましくは1質量%以上、より好ましくは3質量%以上、さらに好ましくは5質量%以上、よりさらに好ましくは7質量%以上、特に好ましくは10質量%以上である。
 上記の上限及び下限は任意に組み合わせることができる。例えば、1~50質量%が好ましく、3~50質量%がより好ましく、5~30質量%がさらに好ましく、7~30質量%がよりさらに好ましく、10~20質量%が特に好ましい。
When the photosensitive resin composition of the present invention contains a dispersant, the content ratio of the dispersant is preferably 50% by mass or less, more preferably 30% by mass or less, still more preferably 30% by mass, based on the total solid content of the photosensitive resin composition. Is 20% by mass or less, preferably 1% by mass or more, more preferably 3% by mass or more, still more preferably 5% by mass or more, still more preferably 7% by mass or more, and particularly preferably 10% by mass or more.
The above upper and lower limits can be combined arbitrarily. For example, 1 to 50% by mass is preferable, 3 to 50% by mass is more preferable, 5 to 30% by mass is further preferable, 7 to 30% by mass is further preferable, and 10 to 20% by mass is particularly preferable.
 本発明の感光性樹脂組成物が分散剤を含む場合、分散剤の含有割合は、(d)色材100質量部に対して、好ましくは5質量部以上、より好ましくは10質量部以上、さらに好ましくは15質量部以上であり、好ましくは200質量部以下、より好ましくは80質量部以下、さらに好ましくは50質量部以下である。前記下限値以上とすることで十分な分散性を確保しやすい傾向がある。また、前記上限値以下とすることで他の成分の割合を減らすことなく、色濃度、感度、成膜性などを十分なものとしやすい傾向がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、5~200質量部が好ましく、10~80質量部がより好ましく、15~50質量部がさらに好ましい。
When the photosensitive resin composition of the present invention contains a dispersant, the content ratio of the dispersant is preferably 5 parts by mass or more, more preferably 10 parts by mass or more, and further, with respect to 100 parts by mass of (d) the coloring material. It is preferably 15 parts by mass or more, preferably 200 parts by mass or less, more preferably 80 parts by mass or less, and further preferably 50 parts by mass or less. When the value is equal to or higher than the lower limit, it tends to be easy to secure sufficient dispersibility. Further, when the value is not more than the upper limit, the color density, sensitivity, film forming property and the like tend to be sufficient without reducing the ratio of other components.
The above upper and lower limits can be combined arbitrarily. For example, 5 to 200 parts by mass is preferable, 10 to 80 parts by mass is more preferable, and 15 to 50 parts by mass is further preferable.
<溶剤>
 本発明の感光性樹脂組成物は、(a)アルカリ可溶性樹脂、(b)光重合性モノマー、(c)光重合開始剤、(e)界面活性剤、及び必要に応じて使用される各種材料が、有機溶剤に溶解又は分散した状態であってもよい。
 有機溶剤としては、100~300℃の沸点(圧力1013.25[hPa]条件下。以下、沸点に関しては全て同様。)を有する溶剤が好ましい。120~280℃の沸点を有する溶剤がより好ましい。
<Solvent>
The photosensitive resin composition of the present invention comprises (a) an alkali-soluble resin, (b) a photopolymerizable monomer, (c) a photopolymerization initiator, (e) a surfactant, and various materials used as necessary. However, it may be in a state of being dissolved or dispersed in an organic solvent.
As the organic solvent, a solvent having a boiling point of 100 to 300 ° C. (under pressure 1013.25 [hPa] conditions; hereinafter, the boiling points are all the same) is preferable. A solvent having a boiling point of 120 to 280 ° C. is more preferable.
 有機溶剤としては、例えば、以下が挙げられる。
 エチレングリコールモノメチルエーテル、エチレングリコールモノエチルエーテル、エチレングリコールモノプロピルエーテル、エチレングリコールモノブチルエーテル、プロピレングリコールモノメチルエーテル、プロピレングリコールモノエチルエーテル、プロピレングリコールモノ-n-ブチルエーテル、プロピレングリコール-t-ブチルエーテル、ジエチレングリコールモノメチルエーテル、ジエチレングリコールモノエチルエーテル、ジエチレングリコールモノ-n-ブチルエーテル、メトキシメチルペンタノール、ジプロピレングリコールモノエチルエーテル、ジプロピレングリコールモノメチルエーテル、3-メチル-3-メトキシブタノール、トリエチレングリコールモノメチルエーテル、トリエチレングリコールモノエチルエーテル、トリプロピレングリコールメチルエーテルのようなグリコールモノアルキルエーテル類;
Examples of the organic solvent include the following.
Ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monopropyl ether, ethylene glycol monobutyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol mono-n-butyl ether, propylene glycol-t-butyl ether, diethylene glycol monomethyl Ether, diethylene glycol monoethyl ether, diethylene glycol mono-n-butyl ether, methoxymethylpentanol, dipropylene glycol monoethyl ether, dipropylene glycol monomethyl ether, 3-methyl-3-methoxybutanol, triethylene glycol monomethyl ether, triethylene glycol Glycol monoalkyl ethers such as monoethyl ether, tripropylene glycol methyl ether;
 エチレングリコールジメチルエーテル、エチレングリコールジエチルエーテル、ジエチレングリコールジメチルエーテル、ジエチレングリコールジエチルエーテル、ジエチレングリコールジプロピルエーテル、ジエチレングリコールジブチルエーテル、ジプロピレングリコールジメチルエーテルのようなグリコールジアルキルエーテル類;
 エチレングリコールモノメチルエーテルアセテート、エチレングリコールモノエチルエーテルアセテート、エチレングリコールモノ-n-ブチルエーテルアセテート、プロピレングリコールモノメチルエーテルアセテート、プロピレングリコールモノエチルエーテルアセテート、プロピレングリコールモノプロピルエーテルアセテート、プロピレングリコールモノブチルエーテルアセテート、メトキシブチルアセテート、3-メトキシブチルアセテート、メトキシペンチルアセテート、ジエチレングリコールモノメチルエーテルアセテート、ジエチレングリコールモノエチルエーテルアセテート、ジエチレングリコールモノ-n-ブチルエーテルアセテート、ジプロピレングリコールモノメチルエーテルアセテート、トリエチレングリコールモノメチルエーテルアセテート、トリエチレングリコールモノエチルエーテルアセテート、3-メチル-3-メトキシブチルアセテートのようなグリコールアルキルエーテルアセテート類;
Glycoldialkyl ethers such as ethylene glycol dimethyl ether, ethylene glycol diethyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol dipropyl ether, diethylene glycol dibutyl ether, dipropylene glycol dimethyl ether;
Ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, ethylene glycol mono-n-butyl ether acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monopropyl ether acetate, propylene glycol monobutyl ether acetate, methoxybutyl Acetate, 3-methoxybutyl acetate, methoxypentyl acetate, diethylene glycol monomethyl ether acetate, diethylene glycol monoethyl ether acetate, diethylene glycol mono-n-butyl ether acetate, dipropylene glycol monomethyl ether acetate, triethylene glycol monomethyl ether acetate, triethylene glycol monoethyl Glycolalkyl ether acetates such as ether acetate, 3-methyl-3-methoxybutyl acetate;
 エチレングリコールジアセテート、1,3-ブチレングリコールジアセテート、1,6-ヘキサノールジアセテートなどのグリコールジアセテート類;
 シクロヘキサノールアセテートなどのアルキルアセテート類;
 アミルエーテル、ジエチルエーテル、ジプロピルエーテル、ジイソプロピルエーテル、ジブチルエーテル、ジアミルエーテル、エチルイソブチルエーテル、ジヘキシルエーテルのようなエーテル類;
 アセトン、メチルエチルケトン、メチルアミルケトン、メチルイソプロピルケトン、メチルイソアミルケトン、ジイソプロピルケトン、ジイソブチルケトン、メチルイソブチルケトン、シクロヘキサノン、エチルアミルケトン、メチルブチルケトン、メチルヘキシルケトン、メチルノニルケトン、メトキシメチルペンタノンのようなケトン類;
 エタノール、プロパノール、ブタノール、ヘキサノール、シクロヘキサノール、エチレングリコール、プロピレングリコール、ブタンジオール、ジエチレングリコール、ジプロピレングリコール、トリエチレングリコール、メトキシメチルペンタノール、グリセリン、ベンジルアルコールのような1価又は多価アルコール類;
 n-ペンタン、n-オクタン、ジイソブチレン、n-ヘキサン、ヘキセン、イソプレン、ジペンテン、ドデカンのような脂肪族炭化水素類;
 シクロヘキサン、メチルシクロヘキサン、メチルシクロヘキセン、ビシクロヘキシルのような脂環式炭化水素類;
Glycol diacetates such as ethylene glycol diacetate, 1,3-butylene glycol diacetate, 1,6-hexanol diacetate;
Alkyl acetates such as cyclohexanol acetate;
Ethers such as amyl ether, diethyl ether, dipropyl ether, diisopropyl ether, dibutyl ether, diamil ether, ethylisobutyl ether, dihexyl ether;
Like acetone, methyl ethyl ketone, methyl amyl ketone, methyl isopropyl ketone, methyl isoamyl ketone, diisopropyl ketone, diisobutyl ketone, methyl isobutyl ketone, cyclohexanone, ethyl amyl ketone, methyl butyl ketone, methylhexyl ketone, methylnonyl ketone, methoxymethylpentanone. Ketones;
Monohydric or polyhydric alcohols such as ethanol, propanol, butanol, hexanol, cyclohexanol, ethylene glycol, propylene glycol, butanediol, diethylene glycol, dipropylene glycol, triethylene glycol, methoxymethylpentanol, glycerin, benzyl alcohol;
Aliphatic hydrocarbons such as n-pentane, n-octane, diisobutylene, n-hexane, hexene, isoprene, dipentene, dodecane;
Alicyclic hydrocarbons such as cyclohexane, methylcyclohexane, methylcyclohexene, bicyclohexyl;
 ベンゼン、トルエン、キシレン、クメンのような芳香族炭化水素類;
 アミルホルメート、エチルホルメート、酢酸エチル、酢酸ブチル、酢酸プロピル、酢酸アミル、メチルイソブチレート、エチレングリコールアセテート、エチルプロピオネート、プロピルプロピオネート、酪酸ブチル、酪酸イソブチル、イソ酪酸メチル、エチルカプリレート、ブチルステアレート、エチルベンゾエート、3-エトキシプロピオン酸メチル、3-エトキシプロピオン酸エチル、3-メトキシプロピオン酸メチル、3-メトキシプロピオン酸エチル、3-メトキシプロピオン酸プロピル、3-メトキシプロピオン酸ブチル、γ-ブチロラクトンのような鎖状又は環状エステル類;
 3-メトキシプロピオン酸、3-エトキシプロピオン酸のようなアルコキシカルボン酸類;
Aromatic hydrocarbons such as benzene, toluene, xylene, cumene;
Amilformate, ethylformate, ethyl acetate, butyl acetate, propyl acetate, amyl acetate, methylisobutyrate, ethylene glycol acetate, ethylpropionate, propylpropionate, butyl butyrate, isobutyl butyrate, methyl isobutyrate, ethyl Caprilate, butyl stearate, ethyl benzoate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, propyl 3-methoxypropionate, 3-methoxypropionic acid Chain or cyclic esters such as butyl, γ-butyrolactone;
Alkoxycarboxylic acids such as 3-methoxypropionic acid, 3-ethoxypropionic acid;
 ブチルクロライド、アミルクロライドのようなハロゲン化炭化水素類;
 メトキシメチルペンタノンのようなエーテルケトン類;
 アセトニトリル、ベンゾニトリルのようなニトリル類。
Halogenated hydrocarbons such as butyl chloride, amilk chloride;
Etheretones such as methoxymethylpentanone;
Nitriles such as acetonitrile and benzonitrile.
 市販の溶剤としては、例えば、ミネラルスピリット、バルソル#2、アプコ#18ソルベント、アプコシンナー、ソーカルソルベントNo.1及びNo.2、ソルベッソ#150、シェルTS28 ソルベント、カルビトール、エチルカルビトール、ブチルカルビトール、メチルセロソルブ(「セロソルブ」は登録商標。以下同じ。)、エチルセロソルブ、エチルセロソルブアセテート、メチルセロソルブアセテート、ジグライム(いずれも商品名)が挙げられる。
 溶剤は、単独で用いてもよく、2種以上を併用してもよい。
Examples of commercially available solvents include Mineral Spirit, Barsol # 2, Apco # 18 Solvent, Apco Thinner, and Sokal Solvent No. 1 and No. 2. Solvento # 150, Shell TS28 Solvent, Carbitol, Ethyl Carbitol, Butyl Carbitol, Methyl Cellosolve (“Cellosolve” is a registered trademark; the same shall apply hereinafter), Ethyl Cellosolve, Ethyl Cellosolve Acetate, Methyl Cellosolve Acetate, Diglime (any of them). Also the product name).
The solvent may be used alone or in combination of two or more.
 フォトリソグラフィー法にてカラーフィルターの画素又はブラックマトリックスを形成する場合、100~250℃の沸点を有する有機溶剤が好ましい。120~230℃の沸点を有する有機溶剤がより好ましい。
 塗布性、表面張力などのバランスが良く、感光性樹脂組成物の各構成成分の溶解度が比較的大きい点から、グリコールアルキルエーテルアセテート類が好ましい。
When forming the pixels of a color filter or a black matrix by a photolithography method, an organic solvent having a boiling point of 100 to 250 ° C. is preferable. An organic solvent having a boiling point of 120 to 230 ° C. is more preferable.
Glycol alkyl ether acetates are preferable because they have a good balance of coatability, surface tension and the like, and the solubility of each component of the photosensitive resin composition is relatively high.
 グリコールアルキルエーテルアセテート類は、単独で使用してもよいが、他の有機溶剤を併用してもよい。併用してもよい他の有機溶剤としては、グリコールモノアルキルエーテル類が好ましい。組成物中の構成成分の溶解性から、プロピレングリコールモノメチルエーテルがより好ましい。
 グリコールモノアルキルエーテル類は極性が高く、添加量が多すぎると顔料が凝集しやすく、後に得られる感光性樹脂組成物の粘度が上がっていくなどの保存安定性が低下する傾向があるので、溶剤中のグリコールモノアルキルエーテル類の割合は5質量%~30質量%が好ましく、5質量%~20質量%がより好ましい。
Glycol alkyl ether acetates may be used alone or in combination with other organic solvents. Glycol monoalkyl ethers are preferable as other organic solvents that may be used in combination. Propylene glycol monomethyl ether is more preferred because of the solubility of the constituents in the composition.
Glycol monoalkyl ethers have high polarity, and if the amount added is too large, the pigment tends to aggregate, and the viscosity of the photosensitive resin composition obtained later tends to increase, and the storage stability tends to decrease. The proportion of glycol monoalkyl ethers in the mixture is preferably 5% by mass to 30% by mass, more preferably 5% by mass to 20% by mass.
 溶剤として、200℃以上の沸点をもつ有機溶剤(以下「高沸点溶剤」と称す場合がある。)を併用してもよい。高沸点溶剤を併用することにより、感光性樹脂組成物は乾きにくくなるが、組成物中における顔料の均一な分散状態が、急激な乾燥により破壊されることを防止する効果がある。例えば、スリットノズル先端における、色材などの析出や固化による異物欠陥の発生を防止する効果がある。
 高沸点溶剤としては、併用することによる効果が高い点から、ジプロピレングリコールメチルエーテルアセテート、ジエチレングリコールモノ-n-ブチルエーテルアセテート、ジエチレングリコールモノエチルエーテルアセテート、1,4-ブタンジオールジアセテート、1,3-ブチレングリコールジアセテート、トリアセチン、1,6-ヘキサンジオールジアセテートが好ましい。
As the solvent, an organic solvent having a boiling point of 200 ° C. or higher (hereinafter, may be referred to as “high boiling point solvent”) may be used in combination. By using a high boiling point solvent in combination, the photosensitive resin composition becomes difficult to dry, but there is an effect of preventing the uniformly dispersed state of the pigment in the composition from being destroyed by rapid drying. For example, it has an effect of preventing the generation of foreign matter defects due to precipitation and solidification of coloring materials and the like at the tip of the slit nozzle.
As a high boiling point solvent, dipropylene glycol methyl ether acetate, diethylene glycol mono-n-butyl ether acetate, diethylene glycol monoethyl ether acetate, 1,4-butanediol diacetate, 1,3-butanediol diacetate, and 1,3-butanediol diacetate are highly effective when used in combination. Butylene glycol diacetate, triacetin and 1,6-hexanediol diacetate are preferred.
 有機溶剤中の高沸点溶剤の含有割合は、0質量%~50質量%が好ましく、0.5質量%~40質量%がより好ましく、1質量%~30質量%が特に好ましい。前記下限値以上とすることで、例えばスリットノズル先端で色材などが析出・固化して異物欠陥を惹き起こすことを抑制できる傾向があり、また前記上限値以下とすることで組成物の乾燥温度が遅くなってカラーフィルター製造工程における、減圧乾燥プロセスのタクト不良や、プリベークのピン跡といった問題の発生を抑制できる傾向がある。 The content ratio of the high boiling point solvent in the organic solvent is preferably 0% by mass to 50% by mass, more preferably 0.5% by mass to 40% by mass, and particularly preferably 1% by mass to 30% by mass. By setting it to the above lower limit value or more, for example, it tends to be possible to suppress the precipitation and solidification of coloring materials and the like at the tip of the slit nozzle to cause foreign matter defects, and by setting it to the above upper limit value or less, the drying temperature of the composition. There is a tendency that problems such as poor tact in the vacuum drying process and pin marks of prebake can be suppressed in the color filter manufacturing process.
 本発明の感光性樹脂組成物が有機溶剤を含む場合、有機溶剤の含有割合は特に限定されないが、塗布し易さや粘度安定性の観点から、感光性樹脂組成物中の全固形分が好ましくは5質量%以上、より好ましくは8質量%以上、さらに好ましくは10質量%以上、また、好ましくは40質量%以下、より好ましくは30質量%以下、さらに好ましくは25質量%以下、特に好ましくは20質量%以下である。
 上記の上限及び下限は任意に組み合わせることができる。例えば、5~40質量%が好ましく、5~30質量%がより好ましく、8~25質量%がさらに好ましく、10~20質量%が特に好ましい。
When the photosensitive resin composition of the present invention contains an organic solvent, the content ratio of the organic solvent is not particularly limited, but the total solid content in the photosensitive resin composition is preferable from the viewpoint of ease of application and viscosity stability. 5% by mass or more, more preferably 8% by mass or more, further preferably 10% by mass or more, preferably 40% by mass or less, more preferably 30% by mass or less, still more preferably 25% by mass or less, particularly preferably 20. It is less than mass%.
The above upper and lower limits can be combined arbitrarily. For example, 5 to 40% by mass is preferable, 5 to 30% by mass is more preferable, 8 to 25% by mass is further preferable, and 10 to 20% by mass is particularly preferable.
<感光性樹脂組成物のその他の配合成分>
 本発明の感光性樹脂組成物には、上述の成分の他、例えば、チオール類、密着向上剤、顔料誘導体、現像改良剤、紫外線吸収剤、酸化防止剤を適宜配合することができる。
<Other ingredients of the photosensitive resin composition>
In addition to the above-mentioned components, for example, thiols, adhesion improvers, pigment derivatives, development improvers, ultraviolet absorbers, and antioxidants can be appropriately added to the photosensitive resin composition of the present invention.
<チオール類>
 本発明の感光性樹脂組成物は、高感度化、基板への密着性の向上のため、チオール類を含有することが好ましい。チオール類としては、例えば、ヘキサンジチオール、デカンジチオール、1,4-ジメチルメルカプトベンゼン、ブタンジオールビスチオプロピオネート、ブタンジオールビスチオグリコレート、エチレングリコールビスチオグリコレート、トリメチロールプロパントリスチオグリコレート、ブタンジオールビスチオプロピオネート、トリメチロールプロパントリスチオプロピオネート、トリメチロールプロパントリスチオグリコレート、ペンタエリスリトールテトラキスチオプロピオネート、ペンタエリスリトールテトラキスチオグリコレート、トリスヒドロキシエチルトリスチオプロピオネート、エチレングリコールビス(3-メルカプトブチレート)、プロピレングリコールビス(3-メルカプトブチレート)(PGMB),ブタンジオールビス(3-メルカプトブチレート)、1,4-ビス(3-メルカプトブチリルオキシ)ブタン(商品名;カレンズMT BD1、昭和電工(株)製)、ブタンジオールトリメチロールプロパントリス(3-メルカプトブチレート)、ペンタエリスリトールテトラキス(3-メルカプトブチレート)(商品名;カレンズMT PE1、昭和電工(株)製)、ペンタエリスリトールトリス(3-メルカプトブチレート)、エチレングリコールビス(3-メルカプトイソブチレート)、ブタンジオールビス(3-メルカプトイソブチレート)、トリメチロールプロパントリス(3-メルカプトイソブチレート)、トリメチロールプロパントリス(3-メルカプトブチレート)(TPMB)、トリメチロールプロパントリス(2-メルカプトイソブチレート)(TPMIB)、1,3,5-トリス(3-メルカプトブチルオキシエチル)-1,3,5-トリアジン-2,4,6(1H,3H,5H)-トリオン(商品名;カレンズMT NR1、昭和電工(株)製)が挙げられる。
 これらは1種を単独で、あるいは2種以上を混合して使用できる。
 チオール類としては、PGMB、TPMB、TPMIB、カレンズMT BD1、カレンズMT PE1、カレンズMT NR1などの多官能チオールが好ましく、カレンズMT BD1、カレンズMT PE1、カレンズMT NR1がより好ましく、カレンズMT PE1が特に好ましい。
<Thiols>
The photosensitive resin composition of the present invention preferably contains thiols in order to increase the sensitivity and the adhesion to the substrate. Examples of thiols include hexanedithiol, decandithiol, 1,4-dimethylmercaptobenzene, butanediol bisthiopropionate, butanediol bisthioglycolate, ethylene glycol bisthioglycolate, and trimethylolpropanetristhioglycolate. , Butanediol Bisthiopropionate, Trimethylol Propane Tristhiopropionate, Trimethylol Propane Tristhio Glycolate, Pentaerythritol Tetrakissthiopropionate, Pentaerythritol Tetrakissthioglycolate, Trishydroxyethyl Tristhiopropionate, Ethylene glycol bis (3-mercaptobutyrate), propylene glycol bis (3-mercaptobutyrate) (PGMB), butanediol bis (3-mercaptobutyrate), 1,4-bis (3-mercaptobutyryloxy) butane (Product name: Karenz MT BD1, manufactured by Showa Denko Co., Ltd.), Butanediol Trimethylol Propanthris (3-mercaptobutyrate), Pentaerythritol tetrakis (3-mercaptobutyrate) (Product name: Karenz MT PE1, Showa Denko) (Manufactured by Co., Ltd.), Pentaerythritoltris (3-mercaptobutyrate), ethylene glycol bis (3-mercaptoisobutyrate), butanediol bis (3-mercaptoisobutyrate), trimethylolpropanthris (3-mercaptoisobutyrate) Butylate), Trimethylol Propanitris (3-Mercapto Butyrate) (TPMB), Trimethylol Propanthris (2-Mercaptoisobutyrate) (TPMIB), 1,3,5-Tris (3-Mercaptobutyloxyethyl) -1,3,5-triazine-2,4,6 (1H, 3H, 5H) -trion (trade name; Karenz MT NR1, manufactured by Showa Denko Co., Ltd.) can be mentioned.
These can be used alone or in admixture of two or more.
As the thiols, polyfunctional thiols such as PGMB, TPMB, TPMIB, Karenz MT BD1, Karenz MT PE1 and Karenz MT NR1 are preferable, Karenz MT BD1, Karenz MT PE1 and Karenz MT NR1 are more preferable, and Karenz MT PE1 is particularly preferable. preferable.
 チオール類を用いる場合、チオール類の含有割合は、本発明の感光性樹脂組成物の全固形分に対して、好ましくは0.1質量%以上、より好ましくは0.3質量%以上、さらに好ましくは0.5質量%以上であり、また、好ましくは10質量%以下、より好ましくは5質量%以下である。前記下限値以上とすることで感度低下を抑制できる傾向がある。また、前記上限値以下とすることで保存安定性を良好なものとしやすい傾向がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、0.1~10質量%が好ましく、0.3~10質量%がより好ましく、0.5~5質量%がさらに好ましい。
When thiols are used, the content ratio of the thiols is preferably 0.1% by mass or more, more preferably 0.3% by mass or more, still more preferably, with respect to the total solid content of the photosensitive resin composition of the present invention. Is 0.5% by mass or more, preferably 10% by mass or less, and more preferably 5% by mass or less. By setting the value to the lower limit or more, there is a tendency that the decrease in sensitivity can be suppressed. Further, when the value is not more than the upper limit, the storage stability tends to be good.
The above upper and lower limits can be combined arbitrarily. For example, 0.1 to 10% by mass is preferable, 0.3 to 10% by mass is more preferable, and 0.5 to 5% by mass is further preferable.
<密着向上剤>
 基板との密着性を改善するため、密着向上剤を含有させてもよく、例えば、シランカップリング剤、チタンカップリング剤が挙げられるが、特にシランカップリング剤が好ましい。
 シランカップリング剤としては、例えば、KBM-402、KBM-403、KBM-502、KBM-5103、KBE-9007、X-12-1048、X-12-1050(信越シリコーン社製)、Z-6040、Z-6043、Z-6062(東レ・ダウコーニング社製)が挙げられる。
 シランカップリング剤は、1種を用いてもよく、2種以上を任意の組み合わせ及び比率で併用してもよい。
 シランカップリング剤以外の密着向上剤を本発明の感光性樹脂組成物に含有させてもよく、例えば、リン酸系密着向上剤が挙げられる。
<Adhesion improver>
In order to improve the adhesion to the substrate, an adhesion improver may be contained, and examples thereof include a silane coupling agent and a titanium coupling agent, and a silane coupling agent is particularly preferable.
Examples of the silane coupling agent include KBM-402, KBM-403, KBM-502, KBM-5103, KBE-9007, X-12-1048, X-12-1050 (manufactured by Shinetsu Silicone Co., Ltd.), Z-6040. , Z-6043, Z-6062 (manufactured by Toray Dow Corning).
As the silane coupling agent, one type may be used, or two or more types may be used in combination in any combination and ratio.
An adhesion improver other than the silane coupling agent may be contained in the photosensitive resin composition of the present invention, and examples thereof include a phosphoric acid-based adhesion improver.
 リン酸系密着向上剤としては、(メタ)アクリロイルオキシ基含有ホスフェート類が好ましく、下記一般式(g1)、(g2)、(g3)で表される(メタ)アクリロイルオキシ基含有ホスフェートが好ましい。 As the phosphoric acid-based adhesion improver, (meth) acryloyloxy group-containing phosphates are preferable, and (meth) acryloyloxy group-containing phosphates represented by the following general formulas (g1), (g2), and (g3) are preferable.
Figure JPOXMLDOC01-appb-C000036
Figure JPOXMLDOC01-appb-C000036
 式(g1)、(g2)、(g3)において、R51は各々独立に水素原子又はメチル基を示し、l及びl’は各々独立に1~10の整数、mは各々独立に1、2又は3である。 In the formulas (g1), (g2) and (g3), R 51 independently represents a hydrogen atom or a methyl group, l and l'are independently integers of 1 to 10, and m are independently 1, 2 respectively. Or it is 3.
 本発明において密着向上剤として用いうるその他の密着向上剤としては、例えば、TEGO*Add Bond LTH(Evonik社製)が挙げられる。
 リン酸系密着向上剤、その他の密着向上剤は、1種類を単独で用いても、2種以上を組み合わせて使用してもよい。
Examples of other adhesion improvers that can be used as the adhesion improver in the present invention include TEGO * Add Bond LTH (manufactured by Evonik).
As the phosphoric acid-based adhesion improver and other adhesion improvers, one type may be used alone or two or more types may be used in combination.
 本発明の感光性樹脂組成物が密着向上剤を含む場合、密着向上剤の含有割合は特に限定されないが、感光性樹脂組成物の全固形分中、0.01質量%以上が好ましく、0.1質量%以上がより好ましく、0.5質量%以上がさらに好ましく、また、5.0質量%以下が好ましく、3.0質量%以下がより好ましく、2.0質量%以下がさらに好ましく、1.5質量%以下が特に好ましい。前記下限値以上とすることで密着力が向上する傾向がある。また、前記上限値以下とすることで現像性が良好となる傾向がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、0.01~5.0質量%が好ましく、0.01~3.0質量%がより好ましく、0.1~2.0質量%がさらに好ましく、0.5~1.5質量%が特に好ましい。
When the photosensitive resin composition of the present invention contains an adhesion improver, the content ratio of the adhesion improver is not particularly limited, but is preferably 0.01% by mass or more in the total solid content of the photosensitive resin composition, and 0. 1% by mass or more is more preferable, 0.5% by mass or more is further preferable, 5.0% by mass or less is preferable, 3.0% by mass or less is more preferable, and 2.0% by mass or less is further preferable. 5.5% by mass or less is particularly preferable. When the value is equal to or higher than the lower limit, the adhesion tends to be improved. Further, when the value is not more than the upper limit value, the developability tends to be good.
The above upper and lower limits can be combined arbitrarily. For example, 0.01 to 5.0% by mass is preferable, 0.01 to 3.0% by mass is more preferable, 0.1 to 2.0% by mass is further preferable, and 0.5 to 1.5% by mass is preferable. Especially preferable.
<顔料誘導体>
 本発明の感光性樹脂組成物には、分散性、保存性向上のため、顔料誘導体を含有させてもよい。顔料誘導体としては、例えば、アゾ系、フタロシアニン系、キナクリドン系、ベンズイミダゾロン系、キノフタロン系、イソインドリノン系、ジオキサジン系、アントラキノン系、インダンスレン系、ペリレン系、ペリノン系、ジケトピロロピロール系、ジオキサジン系誘導体が挙げられる。顔料誘導体としては、フタロシアニン系誘導体、キノフタロン系誘導体が好ましい。
<Pigment derivative>
The photosensitive resin composition of the present invention may contain a pigment derivative in order to improve dispersibility and storage stability. Pigment derivatives include, for example, azo-based, phthalocyanine-based, quinacridone-based, benzimidazolone-based, quinophthalone-based, isoindoleinone-based, dioxazine-based, anthraquinone-based, indanthrone-based, perylene-based, perinone-based, and diketopyrrolopyrrole. Examples include systems and dioxazine-based derivatives. As the pigment derivative, a phthalocyanine-based derivative and a quinophthalone-based derivative are preferable.
 顔料誘導体としては、スルホン酸基、スルホンアミド基、スルホンアミド基の4級塩、フタルイミドメチル基、ジアルキルアミノアルキル基、水酸基、カルボキシ基、アミド基等の置換基が顔料骨格に直接又はアルキル基、アリール基、複素環基等を介して結合した誘導体が挙げられる。顔料誘導体の置換基として、好ましくはスルホン酸基である。顔料誘導体において、一つの顔料骨格に複数の置換基が置換していてもよい。
 顔料誘導体としては、例えば、フタロシアニンのスルホン酸誘導体、キノフタロンのスルホン酸誘導体、アントラキノンのスルホン酸誘導体、キナクリドンのスルホン酸誘導体、ジケトピロロピロールのスルホン酸誘導体、ジオキサジンのスルホン酸誘導体が挙げられる。
 これらは1種を単独で用いてもよく、2種以上を併用してもよい。
As the pigment derivative, a substituent such as a sulfonic acid group, a sulfonamide group, a quaternary salt of a sulfonamide group, a phthalimidemethyl group, a dialkylaminoalkyl group, a hydroxyl group, a carboxy group or an amide group is directly on the pigment skeleton or an alkyl group. Examples thereof include derivatives bonded via an aryl group, a heterocyclic group and the like. The substituent of the pigment derivative is preferably a sulfonic acid group. In the pigment derivative, one pigment skeleton may be substituted with a plurality of substituents.
Examples of the pigment derivative include a sulfonic acid derivative of phthalocyanine, a sulfonic acid derivative of quinophthalone, a sulfonic acid derivative of anthraquinone, a sulfonic acid derivative of quinacridone, a sulfonic acid derivative of diketopyrrolopyrrole, and a sulfonic acid derivative of dioxazine.
These may be used alone or in combination of two or more.
 本発明の感光性樹脂組成物が顔料誘導体を含む場合、顔料誘導体の含有割合は特に限定されないが、感光性樹脂組成物の全固形分に対して0.1質量%以上が好ましく、0.5質量%以上がより好ましく、1.0質量%以上がさらに好ましく、また、10質量%以下が好ましく、5質量%以下がより好ましい。前記下限値以上とすることで分散安定性が向上する傾向がある。また、前記上限値以下とすることで現像性が良好となる傾向がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、0.1~10質量%が好ましく、0.5~10質量%がより好ましく、1.0~5質量%がさらに好ましい。
When the photosensitive resin composition of the present invention contains a pigment derivative, the content ratio of the pigment derivative is not particularly limited, but is preferably 0.1% by mass or more, preferably 0.5% by mass, based on the total solid content of the photosensitive resin composition. By mass or more is more preferable, 1.0% by mass or more is further preferable, 10% by mass or less is preferable, and 5% by mass or less is more preferable. When the value is equal to or higher than the lower limit, the dispersion stability tends to be improved. Further, when the value is not more than the upper limit value, the developability tends to be good.
The above upper and lower limits can be combined arbitrarily. For example, 0.1 to 10% by mass is preferable, 0.5 to 10% by mass is more preferable, and 1.0 to 5% by mass is further preferable.
<感光性樹脂組成物の物性>
 本発明の感光性樹脂組成物は、ブラックマトリックス形成用に好適に使用することができ、係る観点からは黒色を呈していることが好ましい。
 本発明の感光性樹脂組成物が硬化した塗膜の膜厚1μm当たりの光学濃度(OD)は、4.0以上が好ましく、4.1以上がより好ましく、4.2以上がさらに好ましい。また、好ましくは6.0以下である。前記下限値以上とすることで十分な遮光性が確保できる傾向がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、4.0~6.0が好ましく、4.1~6.0がより好ましく、4.2~6.0がさらに好ましい。
 光学濃度とは、受光部の分光感度特性がISO 5-3規格におけるISO visual densityで示される透過光学濃度をいう。通常、光源としては、CIE(国際照明委員会)が規定するA光源が用いられる。透過光学濃度の測定に用いることができる測定器としては、例えば、サカタインクスエンジニアリング社のX-Rite 361T(V)を挙げることができる。
<Physical characteristics of photosensitive resin composition>
The photosensitive resin composition of the present invention can be suitably used for forming a black matrix, and from such a viewpoint, it is preferably black.
The optical density (OD) per 1 μm of the film thickness of the coating film on which the photosensitive resin composition of the present invention is cured is preferably 4.0 or more, more preferably 4.1 or more, still more preferably 4.2 or more. Further, it is preferably 6.0 or less. By setting the value to the lower limit or more, there is a tendency that sufficient light-shielding property can be ensured.
The above upper and lower limits can be combined arbitrarily. For example, 4.0 to 6.0 is preferable, 4.1 to 6.0 is more preferable, and 4.2 to 6.0 is even more preferable.
The optical density means a transmission optical density in which the spectral sensitivity characteristic of the light receiving portion is indicated by ISO visual density in the ISO 5-3 standard. Usually, as the light source, the A light source specified by the CIE (Commission Internationale de l'Eclairage) is used. As a measuring instrument that can be used for measuring the transmitted optical density, for example, X-Rite 361T (V) manufactured by Sakata Inx Corporation can be mentioned.
<感光性樹脂組成物の製造方法>
 本発明の感光性樹脂組成物は、常法によって製造される。
 (d)色材は、予めペイントコンディショナー、サンドグラインダー、ボールミル、ロールミル、ストーンミル、ジェットミル、ホモジナイザー等を用いて分散処理するのが好ましい。分散処理により(d)色材が微粒子化されるため、感光性樹脂組成物の塗布特性が向上する。(d)色材として黒色色材を使用した場合は遮光能力の向上に寄与する。
<Manufacturing method of photosensitive resin composition>
The photosensitive resin composition of the present invention is produced by a conventional method.
(D) The coloring material is preferably dispersed in advance using a paint conditioner, a sand grinder, a ball mill, a roll mill, a stone mill, a jet mill, a homogenizer or the like. Since the (d) coloring material is made into fine particles by the dispersion treatment, the coating characteristics of the photosensitive resin composition are improved. (D) When a black color material is used as the color material, it contributes to the improvement of the light-shielding ability.
 (d)色材、溶剤、及び必要に応じて分散剤、(a)アルカリ可溶性樹脂の一部又は全部を併用した系にて分散処理を行うことが好ましい(以下、分散処理に供する混合物、及び分散処理にて得られた混合物を「インク」又は「顔料分散液」と称することがある。)。特に、分散剤として高分子分散剤を用いると、得られたインク及び感光性樹脂組成物の分散安定性に優れ、経時の増粘が抑制されるため好ましい。
 感光性樹脂組成物に配合する全成分を含有する液に対して分散処理を行った場合、分散処理時に生じる発熱のため、高反応性の成分が変性する可能性がある。従って、その場合には、高分子分散剤を含む系にて分散処理を行うことが好ましい。
It is preferable to carry out the dispersion treatment in a system in which (d) a coloring material, a solvent, and a dispersant as necessary, and (a) a part or all of the alkali-soluble resin are used in combination (hereinafter, a mixture to be subjected to the dispersion treatment, and a mixture). The mixture obtained by the dispersion treatment may be referred to as "ink" or "pigment dispersion"). In particular, it is preferable to use a polymer dispersant as the dispersant because the obtained ink and the photosensitive resin composition are excellent in dispersion stability and thickening with time is suppressed.
When a liquid containing all the components to be blended in the photosensitive resin composition is subjected to the dispersion treatment, the highly reactive components may be denatured due to the heat generated during the dispersion treatment. Therefore, in that case, it is preferable to carry out the dispersion treatment in a system containing a polymer dispersant.
 サンドグラインダーで(d)色材を分散させる場合には、0.1~8mm程度の径のガラスビーズ又はジルコニアビーズが好ましく用いられる。分散処理条件として、温度は、好ましくは0℃から100℃であり、より好ましくは室温から80℃の範囲である。分散時間は液の組成及び分散処理装置のサイズ等により適正時間が異なるため適宜調節する。感光性樹脂組成物の20度鏡面光沢度(JIS Z8741)が100~200の範囲となるように、インキの光沢を制御するのが分散の目安である。感光性樹脂組成物の光沢度が低い場合には、分散処理が十分でなく荒い顔料(色材)粒子が残っていることが多く、現像性、密着性、解像性等が不十分となる可能性がある。光沢値が上記範囲を超えるまで分散処理を行うと、顔料が破砕して超微粒子が多数生じるため、却って分散安定性が損なわれる傾向がある。 When (d) the coloring material is dispersed with a sand grinder, glass beads or zirconia beads having a diameter of about 0.1 to 8 mm are preferably used. As the dispersion treatment conditions, the temperature is preferably in the range of 0 ° C to 100 ° C, more preferably in the range of room temperature to 80 ° C. The dispersion time will be adjusted as appropriate because the appropriate time will vary depending on the composition of the liquid and the size of the dispersion treatment device. The guideline for dispersion is to control the gloss of the ink so that the 20-degree mirror gloss (JIS Z8741) of the photosensitive resin composition is in the range of 100 to 200. When the glossiness of the photosensitive resin composition is low, the dispersion treatment is not sufficient and rough pigment (coloring material) particles often remain, resulting in insufficient developability, adhesion, resolution and the like. there is a possibility. When the dispersion treatment is performed until the gloss value exceeds the above range, the pigment is crushed and a large number of ultrafine particles are generated, so that the dispersion stability tends to be impaired.
 次に、分散処理により得られたインキと、感光性樹脂組成物中に含まれる、他の成分を混合して均一な溶液とする。製造工程において混入した微細なゴミを除去するため、得られた感光性樹脂組成物はフィルター等により濾過処理することが望ましい。 Next, the ink obtained by the dispersion treatment and other components contained in the photosensitive resin composition are mixed to obtain a uniform solution. In order to remove fine dust mixed in the manufacturing process, it is desirable to filter the obtained photosensitive resin composition with a filter or the like.
[硬化物]
 本発明の硬化物は、本発明の感光性樹脂組成物を硬化させることで得ることができる。感光性樹脂組成物を硬化してなる硬化物は、画素、ブラックマトリックスや着色スペーサーなどのカラーフィルターを構成する部材として好適に用いることができる。
[Cursed product]
The cured product of the present invention can be obtained by curing the photosensitive resin composition of the present invention. The cured product obtained by curing the photosensitive resin composition can be suitably used as a member constituting a color filter such as a pixel, a black matrix or a colored spacer.
[ブラックマトリックス]
 本発明のブラックマトリックスは、本発明の硬化物からなる。
 本発明のブラックマトリックスについて、本発明の感光性樹脂組成物を用いた製造方法に従って説明する。
[Black Matrix]
The black matrix of the present invention comprises the cured product of the present invention.
The black matrix of the present invention will be described according to the production method using the photosensitive resin composition of the present invention.
 (1)支持体
 ブラックマトリックスを形成するための支持体としては、適度の強度があれば、その材質は特に限定されるものではない。おもに透明基板が使用されるが、材質としては、例えば、ポリエチレンテレフタレートなどのポリエステル系樹脂、ポリプロピレン、ポリエチレンなどのポリオレフィン系樹脂、ポリカーボネート、ポリメチルメタクリレート、ポリスルフォンなどの熱可塑性樹脂製シート、エポキシ樹脂、不飽和ポリエステル樹脂、ポリ(メタ)アクリル系樹脂などの熱硬化性樹脂シート、又は各種ガラスなどが挙げられる。この中でも、耐熱性の観点からガラス、耐熱性樹脂が好ましい。また、基板の表面にITO、IZO等の透明電極が成膜されている場合も有る。透明基板以外では、TFTアレイ上に形成することも可能である。
(1) Support The material of the support for forming the black matrix is not particularly limited as long as it has an appropriate strength. A transparent substrate is mainly used, and as the material, for example, polyester resin such as polyethylene terephthalate, polyolefin resin such as polypropylene and polyethylene, thermoplastic resin sheet such as polycarbonate, polymethylmethacrylate and polysulphon, and epoxy resin. , A heat-curable resin sheet such as an unsaturated polyester resin or a poly (meth) acrylic resin, or various types of glass. Among these, glass and heat-resistant resin are preferable from the viewpoint of heat resistance. Further, a transparent electrode such as ITO or IZO may be formed on the surface of the substrate. Other than the transparent substrate, it can be formed on the TFT array.
 支持体には、接着性などの表面物性の改良のため、必要に応じ、コロナ放電処理、オゾン処理、大気圧プラズマ処理、シランカップリング剤や、ウレタン系樹脂などの各種樹脂の薄膜形成処理などを行ってもよい。
 透明基板の厚さは、好ましくは0.05~10mm、より好ましくは0.1~7mmである。各種樹脂の薄膜形成処理を行う場合、その膜厚は、好ましくは0.01~10μm、より好ましくは0.05~5μmである。
For the support, in order to improve the surface physical properties such as adhesiveness, if necessary, corona discharge treatment, ozone treatment, atmospheric pressure plasma treatment, silane coupling agent, thin film formation treatment of various resins such as urethane resin, etc. May be done.
The thickness of the transparent substrate is preferably 0.05 to 10 mm, more preferably 0.1 to 7 mm. When the thin film forming treatment of various resins is performed, the film thickness is preferably 0.01 to 10 μm, more preferably 0.05 to 5 μm.
 (2)ブラックマトリックス
 本発明の感光性樹脂組成物により、ブラックマトリックスを形成するには、透明基板上に本発明の感光性樹脂組成物を塗布して、乾燥した試料の上にフォトマスクを置き、フォトマスクを介して画像露光、現像、必要に応じて熱硬化あるいは光硬化することによりブラックマトリックスを形成させる。
(2) Black Matrix In order to form a black matrix with the photosensitive resin composition of the present invention, the photosensitive resin composition of the present invention is applied on a transparent substrate, and a photomask is placed on a dried sample. A black matrix is formed by image exposure, development, and heat curing or photocuring as required through a photomask.
 (3)ブラックマトリックスの形成
 (3-1)感光性樹脂組成物の塗布
 ブラックマトリックス用の感光性樹脂組成物の透明基板上への塗布は、スピナー法、ワイヤーバー法、フローコート法、ダイコート法、ロールコート法、又はスプレーコート法などによって行うことができる。中でも、ダイコート法によれば、塗布液使用量が大幅に削減され、かつ、スピンコート法によった際に付着するミストなどの影響が全くなく、異物発生が抑制されるなど、総合的な観点から好ましい。
(3) Formation of Black Matrix (3-1) Application of Photosensitive Resin Composition The application of the photosensitive resin composition for black matrix onto a transparent substrate is performed by a spinner method, a wire bar method, a flow coat method, or a die coat method. , The roll coating method, the spray coating method, or the like. Above all, according to the die coating method, the amount of coating liquid used is significantly reduced, and there is no influence of mist or the like adhering when the spin coating method is used, and the generation of foreign substances is suppressed. It is preferable from.
 塗膜の厚さは、乾燥後の膜厚として、0.2~10μmが好ましく、0.5~6μmがより好ましく、1~4μmがさらに好ましい。前記上限値以下とすることで、パターン現像が容易となり、液晶セル化工程でのギャップ調整も容易となる傾向がある。前記下限値以上とすることで、所望の色発現が容易となる傾向がある。 The thickness of the coating film is preferably 0.2 to 10 μm, more preferably 0.5 to 6 μm, and even more preferably 1 to 4 μm as the film thickness after drying. By setting the value to the upper limit or less, pattern development tends to be easy, and gap adjustment in the liquid crystal cell formation step tends to be easy. By setting the value to the lower limit or more, the desired color expression tends to be facilitated.
 (3-2)塗膜の乾燥
 基板に感光性樹脂組成物を塗布した後の塗膜の乾燥は、真空乾燥装置を使用した減圧乾燥法及びホットプレート、IRオーブン、又はコンベクションオーブンを使用した加熱乾燥法によるのが好ましい。ホットプレートを用いた加熱乾燥法の場合、基板の裏面よりピンで支える場合がある。加熱乾燥の条件は、前記溶剤成分の種類、使用する乾燥機の性能などに応じて適宜選択することができる。乾燥時間は、溶剤成分の種類、使用する乾燥機の性能などに応じて、好ましくは40~200℃の温度で15秒~5分間の範囲で選ばれ、より好ましくは50~130℃の温度で30秒~3分間の範囲で選ばれる。
(3-2) Drying of coating film Drying of the coating film after applying the photosensitive resin composition to the substrate is performed by a vacuum drying method using a vacuum drying device and heating using a hot plate, an IR oven, or a convection oven. The drying method is preferable. In the case of the heat drying method using a hot plate, it may be supported by a pin from the back surface of the substrate. The conditions for heat drying can be appropriately selected according to the type of the solvent component, the performance of the dryer used, and the like. The drying time is preferably selected in the range of 15 seconds to 5 minutes at a temperature of 40 to 200 ° C., more preferably at a temperature of 50 to 130 ° C., depending on the type of solvent component, the performance of the dryer used, and the like. It is selected in the range of 30 seconds to 3 minutes.
 乾燥温度は、高いほど透明基板に対する塗膜の接着性が向上する。乾燥温度が高すぎなければ、アルカリ可溶性樹脂の分解を抑制し、熱重合を誘発せずに現像不良を抑制できる。また、乾燥が均一に進行すれば、膜厚が均一となり、ムラの発生を抑制できる。 The higher the drying temperature, the better the adhesiveness of the coating film to the transparent substrate. If the drying temperature is not too high, the decomposition of the alkali-soluble resin can be suppressed, and development defects can be suppressed without inducing thermal polymerization. Further, if the drying proceeds uniformly, the film thickness becomes uniform and the occurrence of unevenness can be suppressed.
(3-3)露光
 画像露光は、感光性樹脂組成物の塗膜上に、ネガのマスクパターンを重ね、このマスクパターンを介し、紫外域から可視域に至る波長の光を照射して行う。この際、必要に応じ、酸素による光重合性層の感度の低下を防ぐため、光重合性の塗膜上にポリビニルアルコール層などの酸素遮断層を形成した後に露光を行ってもよい。上記の画像露光に使用される光源は、特に限定されるものではない。光源としては、例えば、キセノンランプ、ハロゲンランプ、タングステンランプ、高圧水銀灯、超高圧水銀灯、メタルハライドランプ、中圧水銀灯、低圧水銀灯、カーボンアークなどのランプ光源などが挙げられる。特定の波長の光を照射して使用する場合には、光学フィルターを利用することもできる。
(3-3) Exposure Image exposure is performed by superimposing a negative mask pattern on a coating film of a photosensitive resin composition and irradiating light having a wavelength from the ultraviolet region to the visible region through the mask pattern. At this time, if necessary, in order to prevent the sensitivity of the photopolymerizable layer from being lowered by oxygen, exposure may be performed after forming an oxygen blocking layer such as a polyvinyl alcohol layer on the photopolymerizable coating film. The light source used for the above image exposure is not particularly limited. Examples of the light source include lamp light sources such as xenon lamps, halogen lamps, tungsten lamps, high pressure mercury lamps, ultrahigh pressure mercury lamps, metal halide lamps, medium pressure mercury lamps, low pressure mercury lamps, and carbon arcs. An optical filter can also be used when irradiating light of a specific wavelength for use.
 (3-4)現像
 本発明のブラックマトリックスは、感光性樹脂組成物による塗膜を、上記の光源によって画像露光を行った後、有機溶剤、又は、界面活性剤とアルカリ性化合物とを含む水溶液を用いる現像によって、基板上に画像を形成して作製することができる。この水溶液には、さらに有機溶剤、緩衝剤、錯化剤、染料又は顔料を含ませることができる。
(3-4) Development In the black matrix of the present invention, a coating film made of a photosensitive resin composition is subjected to image exposure with the above-mentioned light source, and then an organic solvent or an aqueous solution containing a surfactant and an alkaline compound is applied. Depending on the development used, an image can be formed and produced on the substrate. The aqueous solution may further contain an organic solvent, a buffer, a complexing agent, a dye or a pigment.
 アルカリ性化合物としては、水酸化ナトリウム、水酸化カリウム、水酸化リチウム、炭酸ナトリウム、炭酸カリウム、炭酸水素ナトリウム、炭酸水素カリウム、ケイ酸ナトリウム、ケイ酸カリウム、メタケイ酸ナトリウム、リン酸ナトリウム、リン酸カリウム、リン酸水素ナトリウム、リン酸水素カリウム、リン酸二水素ナトリウム、リン酸二水素カリウム、水酸化アンモニウムなどの無機アルカリ性化合物や、モノ-、ジ-又はトリエタノールアミン、モノ-、ジ-又はトリメチルアミン、モノ-、ジ-又はトリエチルアミン、モノ-又はジイソプロピルアミン、n-ブチルアミン、モノ-、ジ-又はトリイソプロパノールアミン、エチレンイミン、エチレンジイミン、テトラメチルアンモニウムヒドロキシド(TMAH)、コリンなどの有機アルカリ性化合物が挙げられる。
 これらのアルカリ性化合物は、2種以上の混合物であってもよい。
Examples of alkaline compounds include sodium hydroxide, potassium hydroxide, lithium hydroxide, sodium carbonate, potassium carbonate, sodium hydrogencarbonate, potassium hydrogencarbonate, sodium silicate, potassium silicate, sodium metasilicate, sodium phosphate, and potassium phosphate. , Inorganic alkaline compounds such as sodium hydrogen phosphate, potassium hydrogen phosphate, sodium dihydrogen phosphate, potassium dihydrogen phosphate, ammonium hydroxide, mono-, di- or triethanolamine, mono-, di- or trimethylamine. , Mono-, di- or triethylamine, mono- or diisopropylamine, n-butylamine, mono-, di- or triisopropanolamine, ethyleneimine, ethylenediimine, tetramethylammonium hydroxide (TMAH), organic alkaline such as choline Examples include compounds.
These alkaline compounds may be a mixture of two or more kinds.
 界面活性剤としては、例えば、ポリオキシエチレンアルキルエーテル類、ポリオキシエチレンアルキルアリールエーテル類、ポリオキシエチレンアルキルエステル類、ソルビタンアルキルエステル類、モノグリセリドアルキルエステル類などのノニオン系界面活性剤、アルキルベンゼンスルホン酸塩類、アルキルナフタレンスルホン酸塩類、アルキル硫酸塩類、アルキルスルホン酸塩類、スルホコハク酸エステル塩類などのアニオン性界面活性剤、アルキルベタイン類、アミノ酸類などの両性界面活性剤が挙げられる。 Examples of the surfactant include nonionic surfactants such as polyoxyethylene alkyl ethers, polyoxyethylene alkylaryl ethers, polyoxyethylene alkyl esters, sorbitan alkyl esters, and monoglyceride alkyl esters, and alkylbenzene sulfonic acids. Examples thereof include anionic surfactants such as salts, alkylnaphthalene sulfonates, alkyl sulfates, alkyl sulfonates and sulfosuccinic acid ester salts, and amphoteric surfactants such as alkylbetaines and amino acids.
 有機溶剤としては、例えば、イソプロピルアルコール、ベンジルアルコール、エチルセロソルブ、ブチルセロソルブ、フェニルセロソルブ、プロピレングリコール、ジアセトンアルコールが挙げられる。
 有機溶剤は、単独で用いてもよく、また、水溶液と併用してもよい。
Examples of the organic solvent include isopropyl alcohol, benzyl alcohol, ethyl cellosolve, butyl cellosolve, phenyl cellosolve, propylene glycol and diacetone alcohol.
The organic solvent may be used alone or in combination with an aqueous solution.
 現像処理の条件は特に制限はなく、現像温度は10~50℃、好ましくは15~45℃、特に好ましくは20~40℃で、浸漬現像法、スプレー現像法、ブラシ現像法、超音波現像法などの方法によることができる。 The conditions of the development process are not particularly limited, and the development temperature is 10 to 50 ° C., preferably 15 to 45 ° C., particularly preferably 20 to 40 ° C., and a dip development method, a spray development method, a brush development method, or an ultrasonic development method. It can be done by such a method.
 (3-5)熱硬化処理
 現像の後の基板には、熱硬化処理又は光硬化処理、好ましくは熱硬化処理を施す。この際の熱硬化処理条件は、温度は100~280℃の範囲、好ましくは150~250℃の範囲で選ばれ、時間は5~60分間の範囲で選ばれる。
 以上のようにして形成させたブラックマトリックスの高さは、好ましくは0.5~5μm、より好ましくは0.8~4μmである。
(3-5) Thermosetting Treatment The substrate after development is subjected to a thermosetting treatment or a photocuring treatment, preferably a thermosetting treatment. The thermosetting treatment conditions at this time are selected in the range of 100 to 280 ° C., preferably 150 to 250 ° C., and the time is selected in the range of 5 to 60 minutes.
The height of the black matrix formed as described above is preferably 0.5 to 5 μm, more preferably 0.8 to 4 μm.
 本発明のブラックマトリックスの膜厚1μm当たりの光学濃度(OD)は、4.0以上が好ましく、4.1以上がより好ましく、4.2以上がさらに好ましい。また、好ましくは6.0以下である。前記下限値以上とすることで十分な遮光性が確保できる傾向がある。
 上記の上限及び下限は任意に組み合わせることができる。例えば、4.0~6.0が好ましく、4.1~6.0がより好ましく、4.2~6.0がさらに好ましい。
The optical density (OD) per 1 μm of the film thickness of the black matrix of the present invention is preferably 4.0 or more, more preferably 4.1 or more, still more preferably 4.2 or more. Further, it is preferably 6.0 or less. By setting the value to the lower limit or more, there is a tendency that sufficient light-shielding property can be ensured.
The above upper and lower limits can be combined arbitrarily. For example, 4.0 to 6.0 is preferable, 4.1 to 6.0 is more preferable, and 4.2 to 6.0 is even more preferable.
[その他のカラーフィルターの形成]
 ブラックマトリックスを設けた透明基板上に、上記(3-1)~(3-5)と同じプロセスで赤色、緑色、青色のうち一色の色材を含有する感光性樹脂組成物を塗布し、乾燥した後、塗膜の上にフォトマスクを重ね、このフォトマスクを介して画像露光、現像、必要に応じて熱硬化又は光硬化により画素画像を形成させ、着色層を作成する。この操作を、赤色、緑色、青色の三色の感光性樹脂組成物についてそれぞれ行うことによって、カラーフィルターを形成することができる。これらの順番は上記に限定されるものではない。
[Formation of other color filters]
A photosensitive resin composition containing one of red, green, and blue coloring materials is applied onto a transparent substrate provided with a black matrix by the same process as in (3-1) to (3-5) above, and dried. After that, a photomask is superposed on the coating film, and a pixel image is formed through the photomask by image exposure, development, and if necessary, heat curing or photocuring to create a colored layer. A color filter can be formed by performing this operation on each of the three color photosensitive resin compositions of red, green, and blue. These orders are not limited to the above.
[着色スペーサー]
 本発明の感光性樹脂組成物は、ブラックマトリックス以外に着色スペーサー用のレジストとして使用することも可能である。スペーサーをTFT型LCDに使用する場合、TFTに入射する光によりスイッチング素子としてTFTが誤作動を起こすことがあり、着色スペーサーはこれを防止するために用いられ、例えば、日本国特開平8-234212号公報にスペーサーを遮光性とすることが記載されている。着色スペーサーは着色スペーサー用のマスクを用いる以外は前述のブラックマトリックスと同様の方法で形成することができる。
[Colored spacer]
The photosensitive resin composition of the present invention can also be used as a resist for a colored spacer in addition to the black matrix. When the spacer is used for the TFT type LCD, the TFT may malfunction as a switching element due to the light incident on the TFT, and the colored spacer is used to prevent this. For example, Japanese Patent Application Laid-Open No. 8-234212 The publication describes that the spacer has a light-shielding property. The colored spacer can be formed by the same method as the above-mentioned black matrix except that a mask for the colored spacer is used.
 (3-6)透明電極の形成
 カラーフィルターは、このままの状態で画像上にITOなどの透明電極を形成して、カラーディスプレー、液晶表示装置などの部品の一部として使用されるが、表面平滑性や耐久性を高めるため、必要に応じ、画像上にポリアミド、ポリイミドなどのトップコート層を設けることもできる。また一部、平面配向型駆動方式(IPSモード)などの用途においては、透明電極を形成しないこともある。
(3-6) Formation of transparent electrode A color filter forms a transparent electrode such as ITO on an image in this state and is used as a part of parts such as a color display and a liquid crystal display device, but the surface is smooth. If necessary, a top coat layer such as polyamide or polyimide can be provided on the image in order to improve the properties and durability. Further, in some applications such as a plane alignment type drive system (IPS mode), a transparent electrode may not be formed.
[画像表示装置]
 本発明の画像表示装置は、本発明のブラックマトリックス、本発明の硬化物、若しくは本発明の感光性樹脂組成物を硬化させた硬化物を有する。画像表示装置は、画像や映像を表示する装置であれば特に限定されない。画像表示装置としては、例えば、液晶表示装置や有機ELディスプレイが挙げられる。
[Image display device]
The image display device of the present invention has a black matrix of the present invention, a cured product of the present invention, or a cured product obtained by curing the photosensitive resin composition of the present invention. The image display device is not particularly limited as long as it is a device that displays an image or a moving image. Examples of the image display device include a liquid crystal display device and an organic EL display.
[液晶表示装置]
 本発明の画像表示装置は液晶表示装置であってもよく、本発明のブラックマトリックスを有する。カラー画素やブラックマトリックスの形成順序や形成位置等、特に制限を受けるものではない。
[Liquid crystal display device]
The image display device of the present invention may be a liquid crystal display device and has the black matrix of the present invention. The formation order and formation position of the color pixels and the black matrix are not particularly limited.
 液晶表示装置は、通常、カラーフィルター上に配向膜を形成し、この配向膜上にスペーサーを散布した後、対向基板と貼り合わせて液晶セルを形成し、形成した液晶セルに液晶を注入し、対向電極に結線して完成する。配向膜としては、ポリイミド等の樹脂膜が好適である。配向膜の形成には、通常、グラビア印刷法及び/又はフレキソ印刷法が採用され、配向膜の厚さは数10nmとされる。熱焼成によって配向膜の硬化処理を行った後、紫外線の照射やラビング布による処理によって表面処理し、液晶の傾きを調整しうる表面状態に加工される。 A liquid crystal display device usually forms an alignment film on a color filter, sprays a spacer on the alignment film, attaches the spacer to the facing substrate to form a liquid crystal cell, and injects liquid crystal into the formed liquid crystal cell. It is completed by connecting to the counter electrode. As the alignment film, a resin film such as polyimide is suitable. A gravure printing method and / or a flexographic printing method is usually adopted for forming the alignment film, and the thickness of the alignment film is several tens of nm. After the alignment film is cured by heat firing, it is surface-treated by irradiation with ultraviolet rays or treatment with a rubbing cloth to obtain a surface state in which the inclination of the liquid crystal can be adjusted.
 スペーサーとしては、対向基板とのギャップ(隙間)に応じた大きさのものが用いられ、2~8μmのものが好適である。カラーフィルター基板上に、フォトリソグラフィー法によって透明樹脂膜のフォトスペーサー(PS)を形成し、これをスペーサーの代わりに活用することもできる。対向基板としては、通常、アレイ基板が用いられ、特にTFT(薄膜トランジスタ)基板が好適である。 As the spacer, a spacer having a size corresponding to the gap (gap) with the facing substrate is used, and a spacer having a size of 2 to 8 μm is preferable. A photospacer (PS) of a transparent resin film can be formed on a color filter substrate by a photolithography method, and this can be used instead of the spacer. As the facing substrate, an array substrate is usually used, and a TFT (thin film transistor) substrate is particularly suitable.
 対向基板との貼り合わせのギャップは、液晶表示装置の用途によって異なるが、好ましくは2~8μmの範囲で選ばれる。対向基板と貼り合わせた後、液晶注入口以外の部分は、エポキシ樹脂等のシール材によって封止する。シール材は、UV照射及び/又は加熱することによって硬化させ、液晶セル周辺がシールされる。
 周辺をシールされた液晶セルは、パネル単位に切断した後、真空チャンバー内で減圧とし、上記液晶注入口を液晶に浸漬した後、チャンバー内をリークすることによって、液晶を液晶セル内に注入する。液晶セル内の減圧度は、好ましくは1×10-2~1×10-7Paであるが、より好ましくは1×10-3~1×10-6Paである。また、減圧時に液晶セルを加温するのが好ましく、加温温度は好ましくは30~100℃であり、より好ましくは50~90℃である。減圧時の加温保持は、好ましくは10~60分間の範囲とされ、その後液晶中に浸漬される。液晶を注入した液晶セルは、液晶注入口を、UV硬化樹脂を硬化させて封止することによって、液晶表示装置(パネル)が完成する。
The gap for bonding to the facing substrate varies depending on the application of the liquid crystal display device, but is preferably selected in the range of 2 to 8 μm. After bonding to the facing substrate, the parts other than the liquid crystal injection port are sealed with a sealing material such as epoxy resin. The sealing material is cured by UV irradiation and / or heating, and the periphery of the liquid crystal cell is sealed.
The liquid crystal cell whose periphery is sealed is cut into panel units, then depressurized in a vacuum chamber, the liquid crystal injection port is immersed in the liquid crystal, and then the inside of the chamber leaks to inject the liquid crystal into the liquid crystal cell. .. The degree of decompression in the liquid crystal cell is preferably 1 × 10 −2 to 1 × 10 -7 Pa, but more preferably 1 × 10 -3 to 1 × 10 -6 Pa. Further, it is preferable to heat the liquid crystal cell at the time of depressurization, and the heating temperature is preferably 30 to 100 ° C, more preferably 50 to 90 ° C. The warming retention at the time of depressurization is preferably in the range of 10 to 60 minutes, and then immersed in the liquid crystal display. A liquid crystal display device (panel) is completed by sealing the liquid crystal injection port of the liquid crystal cell into which the liquid crystal is injected by curing the UV curable resin.
 液晶の種類には特に制限がなく、芳香族系、脂肪族系、多環状化合物等、従来から知られている液晶であって、リオトロピック液晶、サーモトロピック液晶等のいずれでもよい。サーモトロピック液晶には、ネマティック液晶、スメスティック液晶及びコレステリック液晶等が知られているが、いずれであってもよい。 The type of liquid crystal is not particularly limited, and is a conventionally known liquid crystal such as an aromatic type, an aliphatic type, or a polycyclic compound, and may be any of a liotropic liquid crystal, a thermotropic liquid crystal, and the like. As the thermotropic liquid crystal, a nematic liquid crystal, a smestic liquid crystal, a cholesteric liquid crystal and the like are known, but any of them may be used.
[有機ELディスプレイ]
 本発明の画像表示装置は有機ELディスプレイであってもよく、本発明のブラックマトリックスを有する。
[Organic EL display]
The image display device of the present invention may be an organic EL display and has the black matrix of the present invention.
 本発明のブラックマトリックスを有する有機ELディスプレイを作製する場合、例えば図1に示すように、透明支持基板10上に、感光性樹脂組成物により形成されたパターン(すなわち、画素20、及び隣接する画素20の間に設けられた樹脂ブラックマトリックス(図示せず))が形成されてなるカラーフィルターを作製し、カラーフィルター上に有機保護層30及び無機酸化膜40を介して有機発光体500を積層することによって、有機EL素子100を作製することができる。なお、樹脂ブラックマトリックスは本発明の感光性樹脂組成物を用いて作製される。有機発光体500の積層方法としては、カラーフィルター上面へ透明陽極50、正孔注入層51、正孔輸送層52、発光層53、電子注入層54、及び陰極55を逐次形成していく方法や、別基板上へ形成した有機発光体500を無機酸化膜40上に貼り合わせる方法などが挙げられる。このようにして作製された有機EL素子100を用い、例えば「有機ELディスプレイ」(オーム社,2004年8月20日発光,時任静士、安達千波矢、村田英幸著)に記載された方法等にて、有機ELディスプレイを作製することができる。 When the organic EL display having the black matrix of the present invention is produced, for example, as shown in FIG. 1, a pattern formed by the photosensitive resin composition (that is, pixels 20 and adjacent pixels) is formed on the transparent support substrate 10. A color filter in which a resin black matrix (not shown) provided between 20 is formed is produced, and an organic illuminant 500 is laminated on the color filter via an organic protective layer 30 and an inorganic oxide film 40. Thereby, the organic EL element 100 can be manufactured. The resin black matrix is produced by using the photosensitive resin composition of the present invention. As a method of laminating the organic illuminant 500, a method of sequentially forming a transparent anode 50, a hole injection layer 51, a hole transport layer 52, a light emitting layer 53, an electron injection layer 54, and a cathode 55 on the upper surface of a color filter, or Examples thereof include a method of bonding the organic light emitter 500 formed on another substrate onto the inorganic oxide film 40. Using the organic EL element 100 thus produced, for example, the method described in "Organic EL Display" (Ohmsha, August 20, 2004, Luminescent, Shizushi Tokito, Chihaya Adachi, Hideyuki Murata), etc. , An organic EL display can be manufactured.
 本発明のブラックマトリックスは、パッシブ駆動方式の有機ELディスプレイにもアクティブ駆動方式の有機ELディスプレイにも適用可能である。 The black matrix of the present invention can be applied to both a passive drive type organic EL display and an active drive type organic EL display.
 合成例、実施例及び比較例を挙げて本発明をより具体的に説明するが、本発明はその要旨を超えない限り以下の実施例に限定されるものではない。 The present invention will be described in more detail with reference to synthetic examples, examples and comparative examples, but the present invention is not limited to the following examples as long as the gist of the present invention is not exceeded.
<合成例1:アルカリ可溶性樹脂-IIの合成> <Synthesis Example 1: Synthesis of Alkali Soluble Resin-II>
Figure JPOXMLDOC01-appb-C000037
Figure JPOXMLDOC01-appb-C000037
 上記構造のエポキシ化合物(エポキシ当量249)240質量部、アクリル酸68.3質量部、メトキシブチルアセテート263.1質量部、トリフェニルホスフィン6.4質量部、及び2,6-ジ-tert-ブチル-4-クレゾール(BHT)0.16質量部を、温度計、攪拌機、冷却管を取り付けたフラスコに入れ、攪拌しながら90℃で酸価が5mgKOH/g以下になるまで12時間反応させた。
 次いで、上記反応により得られた反応液にビフェニルテトラカルボン酸2無水物(BPDA)100.0質量部、テトラヒドロフタル酸無水物(THPA)68.9質量部を、温度計、攪拌機、冷却管を取り付けたフラスコに入れ、攪拌しながら105℃までゆっくり昇温し反応させ、固形分酸価105mgKOH/g、GPCで測定したポリスチレン換算の重量平均分子量(Mw)6900であるアルカリ可溶性樹脂-IIを得た。
 アルカリ可溶性樹脂-IIはカルド骨格を有する。
240 parts by mass of an epoxy compound (epoxy equivalent 249) having the above structure, 68.3 parts by mass of acrylic acid, 263.1 parts by mass of methoxybutyl acetate, 6.4 parts by mass of triphenylphosphine, and 2,6-di-tert-butyl. 0.16 parts by mass of -4-cresol (BHT) was placed in a flask equipped with a thermometer, a stirrer and a cooling tube, and reacted at 90 ° C. at 90 ° C. for 12 hours until the acid value became 5 mgKOH / g or less.
Next, 100.0 parts by mass of biphenyltetracarboxylic acid dianhydride (BPDA) and 68.9 parts by mass of tetrahydrophthalic acid anhydride (THPA) were added to the reaction solution obtained by the above reaction, and a thermometer, a stirrer and a cooling tube were added. Placed in the attached flask and slowly heated to 105 ° C. with stirring to react to obtain an alkali-soluble resin-II having a solid acid value of 105 mgKOH / g and a polystyrene-equivalent weight average molecular weight (Mw) of 6900 measured by GPC. rice field.
The alkali-soluble resin-II has a cardo skeleton.
<合成例2:アルカリ可溶性樹脂-IIIの合成>  <Synthesis Example 2: Synthesis of Alkali Soluble Resin-III>
Figure JPOXMLDOC01-appb-C000038
Figure JPOXMLDOC01-appb-C000038
 上記構造のエポキシ化合物(エポキシ当量264)240質量部、メタクリル酸81.6質量部、メトキシブチルアセテート263.1質量部、トリフェニルホスフィン6.4質量部、及びパラメトキシフェノール0.16質量部を、温度計、攪拌機、冷却管を取り付けたフラスコに入れ、攪拌しながら90℃で酸価が5mgKOH/g以下になるまで12時間反応させた。
 次いで、上記反応により得られた反応液にトリメチロールプロパン(TMP)8.3質量部、ビフェニルテトラカルボン酸2無水物(BPDA)80.7質量部、テトラヒドロフタル酸無水物(THPA)51.6質量部を、温度計、攪拌機、冷却管を取り付けたフラスコに入れ、攪拌しながら105℃までゆっくり昇温し反応させ、固形分酸価112mgKOH/g、GPCで測定したポリスチレン換算の重量平均分子量(Mw)2500であるアルカリ可溶性樹脂-IIIを得た。
 アルカリ可溶性樹脂-IIIは前記式(a1-1)で表される部分構造を有さない。
240 parts by mass of an epoxy compound (epoxy equivalent 264) having the above structure, 81.6 parts by mass of methacrylic acid, 263.1 parts by mass of methoxybutyl acetate, 6.4 parts by mass of triphenylphosphine, and 0.16 parts by mass of paramethoxyphenol. The mixture was placed in a flask equipped with a thermometer, a stirrer and a cooling tube, and reacted at 90 ° C. for 12 hours until the acid value became 5 mgKOH / g or less.
Next, 8.3 parts by mass of trimethylolpropane (TMP), 80.7 parts by mass of biphenyltetracarboxylic acid dianhydride (BPDA), and 51.6 parts by mass of tetrahydrophthalic acid anhydride (THPA) were added to the reaction solution obtained by the above reaction. The mass part was placed in a flask equipped with a thermometer, a stirrer, and a cooling tube, and the temperature was slowly raised to 105 ° C. while stirring to react. An alkali-soluble resin-III of Mw) 2500 was obtained.
The alkali-soluble resin-III does not have a partial structure represented by the above formula (a1-1).
 以下の実施例及び比較例で用いた感光性樹脂組成物の構成成分は、次の通りである。
<色材(顔料)>
 R1060:BIRLA CARBON社製「RAVEN1060」(カーボンブラック)
 R1080:BIRLA CARBON社製「RAVEN1080」(カーボンブラック)
<分散剤>
 BYK167:ビックケミー社製「DISPERBYK-167」(ウレタン系高分子分散剤)
<分散助剤>
 S12000:ルーブリゾール社製「S12000」(フタロシアニン酸性誘導体)
<アルカリ可溶性樹脂>
 アルカリ可溶性樹脂-I:ADEKA社製「WR-301」のエポキシアクリレート樹脂(重量平均分子量(Mw)=5700、固形分酸価=100mgKOH/g)であり、前記式(a1-1)で表される部分構造を有さないアルカリ可溶性樹脂である。
 アルカリ可溶性樹脂-II:合成例1に記載の樹脂
 アルカリ可溶性樹脂-III:合成例2に記載の樹脂
<光重合性モノマー>
 DPHA:日本化薬社製「KAYARAD DPHA」(多官能アクリレート)。化学式(b5)で表される部分構造を有さない。
 DPCA-20:日本化薬社製「KAYARAD DPCA-20」(多官能アクリレート)。DPCA-20は以下の構造を含有し、化学式(b5)で表される部分構造を有する光重合性モノマー(b6)に相当する。
The constituent components of the photosensitive resin composition used in the following Examples and Comparative Examples are as follows.
<Color material (pigment)>
R1060: "RAVEN1060" manufactured by BIRLA CARBON (carbon black)
R1080: "RAVEN1080" manufactured by BIRLA CARBON (carbon black)
<Dispersant>
BYK167: "DISPERBYK-167" manufactured by Big Chemie (urethane-based polymer dispersant)
<Dispersion aid>
S12000: "S12000" manufactured by Lubrizol (acidic derivative of phthalocyanine)
<Alkali-soluble resin>
Alkali-soluble resin-I: An epoxy acrylate resin of "WR-301" manufactured by ADEKA (weight average molecular weight (Mw) = 5700, solid acid value = 100 mgKOH / g), which is represented by the above formula (a1-1). It is an alkali-soluble resin that does not have a partial structure.
Alkali-soluble resin-II: Resin described in Synthesis Example 1 Alkali-soluble resin-III: resin described in Synthesis Example 2 <photopolymerizable monomer>
DPHA: "KAYARAD DPHA" (polyfunctional acrylate) manufactured by Nippon Kayaku Co., Ltd. It does not have a partial structure represented by the chemical formula (b5).
DPCA-20: "KAYARAD DPCA-20" (polyfunctional acrylate) manufactured by Nippon Kayaku Co., Ltd. DPCA-20 has the following structure and corresponds to a photopolymerizable monomer (b6) having a partial structure represented by the chemical formula (b5).
Figure JPOXMLDOC01-appb-C000039
Figure JPOXMLDOC01-appb-C000039
<光重合開始剤>
 TR-PBG-304:常州強力電子新材料社製「TR-PBG-304」(カルバゾール骨格を有するオキシムエステル系化合物)
<密着向上剤>
 X-12-1048:信越化学工業社製「X-12-1048」(多官能アクリルシラン)
<界面活性剤>
 F-559:DIC社製「メガファックF559」(フッ素系界面活性剤)
 F-475:DIC社製「メガファックF475」(フッ素系界面活性剤)
 F-554:DIC社製「メガファックF554」(フッ素系界面活性剤)
<Photopolymerization initiator>
TR-PBG-304: "TR-PBG-304" manufactured by Changzhou Strong Electronics New Materials Co., Ltd. (oxime ester compound having a carbazole skeleton)
<Adhesion improver>
X-12-1048: "X-12-1048" manufactured by Shin-Etsu Chemical Co., Ltd. (polyfunctional acrylic silane)
<Surfactant>
F-559: DIC's "Megafuck F559" (fluorine-based surfactant)
F-475: "Megafuck F475" manufactured by DIC (fluorine-based surfactant)
F-554: "Megafuck F554" manufactured by DIC (fluorine-based surfactant)
 上記界面活性剤を0.5質量%添加したプロピレングリコールモノメチルエーテルアセテート(PGMEA)の、23℃での表面張力値を表1に示す。
 表面張力値は協和界面化学社製のDropMaster DMo‐601を用いて、懸滴法により計測し、d/D法により解析した。また、測定には3.5μLの液滴を用いた。
Table 1 shows the surface tension values of propylene glycol monomethyl ether acetate (PGMEA) to which 0.5% by mass of the above surfactant was added at 23 ° C.
The surface tension value was measured by the suspension method using the DropMaster DMo-601 manufactured by Kyowa Surface Chemistry, and analyzed by the d / D method. In addition, 3.5 μL droplets were used for the measurement.
Figure JPOXMLDOC01-appb-T000040
Figure JPOXMLDOC01-appb-T000040
<分散液-I、分散液-IIの調製>
 表2に記載の顔料、分散剤、分散助剤、アルカリ可溶性樹脂及び溶剤を、表2に記載の質量比となるように混合して混合液を得た。なお表2中の溶剤の配合割合には、分散剤、分散助剤及びアルカリ可溶性樹脂由来の溶剤の量も含まれる。
 この混合液をペイントシェーカーにより25~45℃の範囲で3時間分散処理を行った。ビーズとしては、0.5mmφのジルコニアビーズを用い、分散液の2.5倍の質量を加えた。分散終了後、フィルターによりビーズと分散液を分離して、分散液-I、分散液-IIを調製した。
 このカ-ボンブラックインク(分散液-I、分散液-II)は増粘もなく分散性が良好であった。
<Preparation of dispersion-I and dispersion-II>
The pigments, dispersants, dispersion aids, alkali-soluble resins and solvents shown in Table 2 were mixed so as to have the mass ratios shown in Table 2 to obtain a mixed solution. The blending ratio of the solvent in Table 2 also includes the amounts of the dispersant, the dispersion aid, and the solvent derived from the alkali-soluble resin.
This mixed solution was dispersed with a paint shaker in the range of 25 to 45 ° C. for 3 hours. As the beads, 0.5 mmφ zirconia beads were used, and a mass 2.5 times that of the dispersion was added. After the dispersion was completed, the beads and the dispersion were separated by a filter to prepare dispersion-I and dispersion-II.
This carbon black ink (dispersion liquid-I, dispersion liquid-II) had good dispersibility without thickening.
Figure JPOXMLDOC01-appb-T000041
Figure JPOXMLDOC01-appb-T000041
<感光性樹脂組成物の調製>
[実施例1及び比較例1~4]
 上記調製した分散液-I、分散液-IIを用いて、感光性樹脂組成物の全固形分における各成分の固形分比率が表3の配合割合となるように各成分を加え、さらにプロピレングリコールモノメチルエーテルアセテート(PGMEA)、3-メトキシブチルアセテート(MBA)、及びジエチレングリコールモノエチルエーテルアセテート(EDGAC)を、感光性樹脂組成物の全固形分の含有割合が14質量%となり、さらには溶剤中の比率がPGMEA/MBA/EDGACが68/30/2質量%となるように加え、攪拌、溶解させて、感光性樹脂組成物を調製した。得られた各感光性樹脂組成物を用いて、後述する方法で評価を行った。
<Preparation of photosensitive resin composition>
[Example 1 and Comparative Examples 1 to 4]
Using the above-prepared dispersion-I and dispersion-II, add each component so that the solid content ratio of each component in the total solid content of the photosensitive resin composition is the blending ratio shown in Table 3, and further add propylene glycol. The total solid content of the photosensitive resin composition containing monomethyl ether acetate (PGMEA), 3-methoxybutyl acetate (MBA), and diethylene glycol monoethyl ether acetate (EDGAC) was 14% by mass, and further in the solvent. A photosensitive resin composition was prepared by adding PGMEA / MBA / EDGAC in a ratio of 68/30/2% by mass, stirring and dissolving. Each of the obtained photosensitive resin compositions was evaluated by the method described later.
Figure JPOXMLDOC01-appb-T000042
Figure JPOXMLDOC01-appb-T000042
(感光性樹脂組成物の評価)
<単位膜厚当たりの光学濃度(単位OD値)の測定>
 ガラス基板上に感光性樹脂組成物を加熱硬化後の膜厚が1.2μmとなるようにスピンコーターにて塗布し、100Paで60秒間減圧乾燥した後に、ホットプレートで100℃にて120秒間乾燥した。得られた塗膜に、フォトマスクを使用せず、波長365nmでの強度が60mW/cmである紫外線を用いて、露光量が40mJ/cmとなるよう全面露光処理を施した。
 続いて、0.04質量%のKOH(水酸化カリウム)水溶液よりなる現像液を用い、23℃において水圧0.05MPaのシャワー現像を75秒間施した後、純水にて現像を停止し、水洗スプレーにて洗浄した。当該基板をオーブン中、230℃で25分間加熱硬化(ポストベーク)させることで、光学濃度測定用基板を得た。
(Evaluation of photosensitive resin composition)
<Measurement of optical density (unit OD value) per unit film thickness>
The photosensitive resin composition is applied onto a glass substrate with a spin coater so that the film thickness after heat curing is 1.2 μm, dried under reduced pressure at 100 Pa for 60 seconds, and then dried on a hot plate at 100 ° C. for 120 seconds. did. The obtained coating film was subjected to full-scale exposure treatment so that the exposure amount was 40 mJ / cm 2 using ultraviolet rays having an intensity of 60 mW / cm 2 at a wavelength of 365 nm without using a photomask.
Subsequently, using a developer consisting of a 0.04 mass% KOH (potassium hydroxide) aqueous solution, shower development at a water pressure of 0.05 MPa was performed for 75 seconds at 23 ° C., then development was stopped with pure water, and the cells were washed with water. Washed with a spray. The substrate was heat-cured (post-baked) at 230 ° C. for 25 minutes in an oven to obtain a substrate for optical density measurement.
 得られた基板の光学濃度(OD)を透過濃度計(X-Rite社製 361T(V))により測定し、感光性樹脂組成物の硬化膜の膜厚を走査型白色干渉顕微鏡(日立ハイテクノロジー社製 VS1530)により測定した。光学濃度(OD)及び膜厚から、単位膜厚(1.0μm)当たりの光学濃度(単位/μm)を算出し、表3に示した。
 OD値は遮光能力を示す数値であり、数値が大きいほど高遮光性であることを示す。
The optical density (OD) of the obtained substrate is measured with a transmission densitometer (361T (V) manufactured by X-Rite), and the film thickness of the cured film of the photosensitive resin composition is measured with a scanning white interference microscope (Hitachi High Technology). It was measured by VS1530) manufactured by the company. The optical density (unit / μm) per unit film thickness (1.0 μm) was calculated from the optical density (OD) and the film thickness, and is shown in Table 3.
The OD value is a numerical value indicating the light-shielding ability, and the larger the value is, the higher the light-shielding property is.
<細線密着性の評価>
 フォトマスクとして、1μm刻みで1μm~20μmの線幅開口を有するフォトマスクを使用した以外は、光学濃度測定用基板と同様にして、細線密着性評価用基板を作成した。
 得られた基板の線形パターンを光学顕微鏡(ニコン社製 Eclipse L200ND)により観察し、欠けずに残った最小のパターンのマスク開口サイズを細線密着性として測定し、得られた結果を以下の通り評価した。
 A:1μm~9μm
 C:10μm以上
<Evaluation of fine line adhesion>
A substrate for evaluating fine line adhesion was prepared in the same manner as the substrate for optical density measurement, except that a photomask having a line width opening of 1 μm to 20 μm in 1 μm increments was used as the photomask.
The linear pattern of the obtained substrate was observed with an optical microscope (Eclipse L200ND manufactured by Nikon Corporation), the mask aperture size of the smallest pattern remaining without chipping was measured as fine line adhesion, and the obtained results were evaluated as follows. did.
A: 1 μm to 9 μm
C: 10 μm or more
<密着応力評価>
 光学濃度測定用基板と同様にして、密着応力測定用基板を作製した。
 シール剤(三井化学社製 XN-21-S)を用いて、得られた基板の感光性樹脂組成物の硬化膜側にアルミ製スタッドピン(Quad社製)を接合し作製したサンプルを、引っ張り試験機(Quad社製 Romulus)を用い、基板を固定した上でスタッドピンを2.0kg/sの速さで引っ張り試験を行い、感光性樹脂組成物の硬化膜とガラス基板が破断したときの破断強度と接着面積から、密着応力を以下の式により求めた。
 密着応力(kgf/cm)=破断強度(kgf)/接着面積(cm
 また、得られた密着応力を以下の通り評価した。
 A:密着応力≧175kgf/cm
 B:175kgf/cm>密着応力≧150kgf/cm
 C:150kgf/cm>密着応力
<Adhesion stress evaluation>
A substrate for measuring adhesion stress was produced in the same manner as the substrate for measuring optical density.
A sample prepared by joining an aluminum stud pin (manufactured by Quad) to the cured film side of the photosensitive resin composition of the obtained substrate using a sealing agent (XN-21-S manufactured by Mitsui Kagaku Co., Ltd.) is pulled. Using a testing machine (Romulus manufactured by Quad), after fixing the substrate, the stud pin was pulled at a speed of 2.0 kg / s to perform a tensile test, and when the cured film of the photosensitive resin composition and the glass substrate were broken. The adhesion stress was calculated from the breaking strength and the adhesive area by the following formula.
Adhesion stress (kgf / cm 2 ) = breaking strength (kgf) / adhesive area (cm 2 )
In addition, the obtained adhesion stress was evaluated as follows.
A: Adhesion stress ≧ 175kgf / cm 2
B: 175kgf / cm 2 > Adhesion stress ≧ 150kgf / cm 2
C: 150kgf / cm 2 > Adhesion stress
<ホットプレート乾燥時のピンムラ評価>
 ガラス基板上に感光性樹脂組成物を加熱硬化後の膜厚が1.2μmとなるようにスピンコーターにて塗布し、100Paで60秒間減圧乾燥し試料(ガラス基板/塗布膜)を得た。
 ホットプレート上に置いた円柱状の金属製ピン(直径1cm、高さ1cm)の上にガラス基板側が金属製ピンと接するように試料を配置し、ホットプレート温度100℃にて120秒間乾燥し、金属製ピンが接していた部分と金属ピンが接していない部分の算術平均表面粗度(Sa)を、走査型白色干渉顕微鏡(日立ハイテクノロジー社製 VS1530)を用いて計測し、以下の式でその差(ΔSa)を算出した。
 ΔSa=(ピンが接していた部分のSa)―(ピンが接していなかった部分のSa)
 また、得られたΔSaを以下の通り評価した。なお、ΔSaの数値が小さいほどピンムラが小さいことを示す。
 A:ΔSa<11Å
 B:11Å≦ΔSa<17Å
 C:17Å≦ΔSa
<Evaluation of pin unevenness when the hot plate is dried>
The photosensitive resin composition was applied onto a glass substrate with a spin coater so that the film thickness after heat curing was 1.2 μm, and dried under reduced pressure at 100 Pa for 60 seconds to obtain a sample (glass substrate / coating film).
A sample is placed on a columnar metal pin (diameter 1 cm, height 1 cm) placed on a hot plate so that the glass substrate side is in contact with the metal pin, dried at a hot plate temperature of 100 ° C. for 120 seconds, and then metal. The arithmetic mean surface roughness (Sa) of the part where the metal pin was in contact and the part where the metal pin was not in contact was measured using a scanning white interference microscope (VS1530 manufactured by Hitachi High-Technology Co., Ltd.). The difference (ΔSa) was calculated.
ΔSa = (Sa in the part where the pin was in contact)-(Sa in the part where the pin was not in contact)
Moreover, the obtained ΔSa was evaluated as follows. The smaller the value of ΔSa, the smaller the pin unevenness.
A: ΔSa <11Å
B: 11Å≤ΔSa <17Å
C: 17Å≤ΔSa
 表3から明らかなように、実施例1の感光性樹脂組成物は、単位膜厚当たりの光学濃度が4.0以上であっても、細線密着性や基板との密着応力が良好であり、また意外なことにホットプレート乾燥時のピンムラも良好であることが分かる。 As is clear from Table 3, the photosensitive resin composition of Example 1 has good fine wire adhesion and adhesion stress with the substrate even when the optical density per unit film thickness is 4.0 or more. Surprisingly, it can be seen that the pin unevenness during hot plate drying is also good.
 実施例1と比較例3及び4の比較により、カルド骨格を有するアルカリ可溶性樹脂に加えて、一般式(b5)で表される部分構造を含む光重合性モノマー(b6)を含有することにより、細線密着性と密着応力が両立可能となることが分かる。
 これは、疎水性の高いカルド骨格を有するアルカリ可溶性樹脂(a1)を含有することにより、現像工程時に現像液の浸透が抑制され、細線密着性が向上する一方で、カルド骨格は芳香族環が集積した剛直性が高い構造であるため、基板の密着応力の低下を引き起こす膜の反りが発生しやすくなるが、柔軟なアルキレン鎖を含有する光重合性モノマー(b6)を含有することにより、反りが緩和され、密着応力の低下が抑制されると考えられる。
By comparing Example 1 and Comparative Examples 3 and 4, by containing a photopolymerizable monomer (b6) containing a partial structure represented by the general formula (b5) in addition to the alkali-soluble resin having a cardo skeleton. It can be seen that both fine wire adhesion and adhesion stress are compatible.
This is because the inclusion of the alkali-soluble resin (a1) having a highly hydrophobic cardo skeleton suppresses the penetration of the developing solution during the developing process and improves the fine line adhesion, while the cardo skeleton has an aromatic ring. Since the structure has an integrated high rigidity, the film tends to warp, which causes a decrease in the adhesion stress of the substrate. However, by containing the photopolymerizable monomer (b6) containing a flexible alkylene chain, the warp is likely to occur. Is relaxed, and it is considered that the decrease in adhesion stress is suppressed.
 また、実施例1と比較例1~4の比較により、カルド骨格を有するアルカリ可溶性樹脂(a1)、一般式(b5)で表される部分構造を有する光重合性モノマー(b6)、及びPGMEA中に0.5質量%添加時の表面張力が23.0mN/m以下である界面活性剤(e1)を組み合わせて使用することでホットプレート乾燥時のピンムラ評価が特に良好になることが分かる。
 実施例1の感光性樹脂組成物は、カーボンブラックとの親和性の高い芳香族環が集積したカルド骨格を有する樹脂を含有することにより、ホットプレート乾燥時にもカーボンブラックの凝集を防ぎ、さらには柔軟性の高い光重合性モノマーと、表面張力が低い界面活性剤を含有することから、加熱時の熱流動性は高いと考えられる。そのため、ホットプレート加熱時に相対的に温度が低い金属製ピンの接しない部分でも、実施例1の感光性樹脂組成物は十分に熱流動し、温度の高い金属製ピンの接する部分との熱流動性の差が小さくなることで、表面粗度の差が小さくなり、結果としてピンムラの発生が抑制されると考えられる。
Further, by comparing Example 1 and Comparative Examples 1 to 4, among the alkali-soluble resin (a1) having a cardo skeleton, the photopolymerizable monomer (b6) having a partial structure represented by the general formula (b5), and PGMEA. It can be seen that the pin unevenness evaluation during hot plate drying is particularly good when the surfactant (e1) having a surface tension of 23.0 mN / m or less when 0.5% by mass is added is used in combination.
The photosensitive resin composition of Example 1 contains a resin having a cardo skeleton in which an aromatic ring having a high affinity with carbon black is accumulated, thereby preventing carbon black from agglomerating even when the hot plate is dried, and further. Since it contains a highly flexible photopolymerizable monomer and a surfactant having a low surface tension, it is considered that the heat fluidity during heating is high. Therefore, the photosensitive resin composition of Example 1 sufficiently heat-flows even in a portion where the metal pin having a relatively low temperature does not come into contact with the hot plate, and heat flows with the portion in contact with the metal pin having a high temperature. It is considered that when the difference in sex becomes small, the difference in surface roughness becomes small, and as a result, the occurrence of pin unevenness is suppressed.
 10 透明支持基板
 20 画素
 30 有機保護層
 40 無機酸化膜
 50 透明陽極
 51 正孔注入層
 52 正孔輸送層
 53 発光層
 54 電子注入層
 55 陰極
 100 有機EL素子
 500 有機発光体
10 Transparent support substrate 20 pixels 30 Organic protective layer 40 Inorganic oxide film 50 Transparent anode 51 Hole injection layer 52 Hole transport layer 53 Light emitting layer 54 Electron injection layer 55 Cathode 100 Organic EL element 500 Organic light emitter

Claims (12)

  1.  (a)アルカリ可溶性樹脂、(b)光重合性モノマー、(c)光重合開始剤及び(e)界面活性剤を含む感光性樹脂組成物であって、
     前記(a)アルカリ可溶性樹脂が、下記一般式(a1-1)で表される部分構造を有するアルカリ可溶性樹脂(a1)を含み、
     前記(b)光重合性モノマーが、下記一般式(b5)で表される部分構造を有する光重合性モノマー(b6)を含み、
     前記(e)界面活性剤が、0.5質量%プロピレングリコールモノメチルエーテルアセテート溶液の23℃での表面張力が23.0mN/m以下である界面活性剤(e1)を含むことを特徴とする感光性樹脂組成物。
    Figure JPOXMLDOC01-appb-C000001
    (式(a1-1)中のベンゼン環は、さらに任意の置換基により置換されていてもよい。Rは水素原子又はメチル基を表す。Xは、O、S、C(=O)、または直接結合を表す。nは繰り返し単位を表す。*は各々結合手を表す。)
    Figure JPOXMLDOC01-appb-C000002
    (式(b5)中、Rは置換基を有していてもよい炭素数が2~6のアルキレン基を表し、Rは水素原子又はメチル基を表す。mは1~3の整数を表す。*は結合手を表す。)
    A photosensitive resin composition comprising (a) an alkali-soluble resin, (b) a photopolymerizable monomer, (c) a photopolymerization initiator and (e) a surfactant.
    The alkali-soluble resin (a) contains an alkali-soluble resin (a1) having a partial structure represented by the following general formula (a1-1).
    The photopolymerizable monomer (b) contains a photopolymerizable monomer (b6) having a partial structure represented by the following general formula (b5).
    The surfactant (e) is characterized by containing a surfactant (e1) having a surface tension of a 0.5 mass% propylene glycol monomethyl ether acetate solution at 23 ° C. of 23.0 mN / m or less. Sex resin composition.
    Figure JPOXMLDOC01-appb-C000001
    (The benzene ring in the formula (a1-1) may be further substituted with any substituent. R 7 represents a hydrogen atom or a methyl group. X represents O, S, C (= O),. Or, it represents a direct bond. N represents a repeating unit. * Each represents a bond.)
    Figure JPOXMLDOC01-appb-C000002
    (In the formula (b5), R 1 represents an alkylene group having 2 to 6 carbon atoms which may have a substituent, R 2 represents a hydrogen atom or a methyl group, and m represents an integer of 1 to 3. Represents. * Represents a bond.)
  2.  前記界面活性剤(e1)がフッ素系界面活性剤である請求項1に記載の感光性樹脂組成物。 The photosensitive resin composition according to claim 1, wherein the surfactant (e1) is a fluorine-based surfactant.
  3.  前記光重合性モノマー(b6)が、下記一般式(b2)で表される構造を有する請求項1又は2に記載の感光性樹脂組成物。
    Figure JPOXMLDOC01-appb-C000003
    (式(b2)中、Rは一般式(b5)に示す基であり、Rは式(b7)に示す基であり、p2は1~6の整数であり、*は結合手を示す。)
    Figure JPOXMLDOC01-appb-C000004
    (式(b7)中、Rは式(b5)と同義であり、*は結合手を示す。)
    The photosensitive resin composition according to claim 1 or 2, wherein the photopolymerizable monomer (b6) has a structure represented by the following general formula (b2).
    Figure JPOXMLDOC01-appb-C000003
    (In the formula (b2), R b is a group shown in the general formula (b5), R c is a group shown in the formula (b7), p2 is an integer of 1 to 6, and * indicates a bond. .)
    Figure JPOXMLDOC01-appb-C000004
    (In equation (b7), R 2 is synonymous with equation (b5), and * indicates a bond.)
  4.  さらに(d)色材を含む、請求項1~3のいずれか1項に記載の感光性樹脂組成物。 The photosensitive resin composition according to any one of claims 1 to 3, further comprising (d) a coloring material.
  5.  前記(d)色材が、カーボンブラックを含有する請求項4に記載の感光性樹脂組成物。 The photosensitive resin composition according to claim 4, wherein the coloring material (d) contains carbon black.
  6.  全固形分中のカーボンブラックの含有割合が、30質量%以上である請求項5に記載の感光性樹脂組成物。 The photosensitive resin composition according to claim 5, wherein the content ratio of carbon black in the total solid content is 30% by mass or more.
  7.  全固形分中の(d)色材の含有割合が、50質量%以上である請求項4~6のいずれか1項に記載の感光性樹脂組成物。 The photosensitive resin composition according to any one of claims 4 to 6, wherein the content ratio of the (d) coloring material in the total solid content is 50% by mass or more.
  8.  硬化した塗膜の膜厚1μmあたりの光学濃度が4.0以上である請求項1~7のいずれか1項に記載の感光性樹脂組成物。 The photosensitive resin composition according to any one of claims 1 to 7, wherein the optical density per 1 μm of the cured coating film is 4.0 or more.
  9.  請求項1~8のいずれか1項に記載の感光性樹脂組成物を硬化してなる硬化物。 A cured product obtained by curing the photosensitive resin composition according to any one of claims 1 to 8.
  10.  請求項9に記載の硬化物からなるブラックマトリックス。 A black matrix made of the cured product according to claim 9.
  11.  膜厚1μmあたりの光学濃度が4.0以上である、請求項10に記載のブラックマトリックス。 The black matrix according to claim 10, wherein the optical density per 1 μm of the film thickness is 4.0 or more.
  12.  請求項10又は11に記載のブラックマトリックスを有する画像表示装置。 An image display device having the black matrix according to claim 10 or 11.
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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017077662A1 (en) * 2015-11-02 2017-05-11 互応化学工業株式会社 Photosensitive resin composition, dry film and printed wiring board
JP2017142475A (en) * 2016-02-10 2017-08-17 Dic株式会社 Colored curable resin composition and cured film thereof
JP2018025612A (en) * 2016-08-08 2018-02-15 株式会社Dnpファインケミカル Colored composition for color filter, color filter and display device
WO2018061525A1 (en) * 2016-09-30 2018-04-05 東レ株式会社 Negative photosensitive resin composition, cured film, element provided with cured film, display device provided with cured film and method for producing same
WO2019004365A1 (en) * 2017-06-29 2019-01-03 三菱ケミカル株式会社 Photosensitive resin composition, cured product, black matrix and image display device
JP2019144543A (en) * 2018-02-16 2019-08-29 三菱ケミカル株式会社 Coloring resin composition, color filter, and image display device
WO2021111860A1 (en) * 2019-12-02 2021-06-10 東レ株式会社 Photosensitive composition, negative-type photosensitive composition, pixel division layer, and organic el display device
JP2022022537A (en) * 2020-06-26 2022-02-07 東レ株式会社 Photosensitive composition, cured product and organic EL display device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101400195B1 (en) 2010-12-21 2014-06-19 제일모직 주식회사 Photosensitive resin composition and black matrix using the same
JP6607054B2 (en) 2016-01-20 2019-11-20 三菱ケミカル株式会社 Photosensitive resin composition, cured product, black matrix, and image display device

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017077662A1 (en) * 2015-11-02 2017-05-11 互応化学工業株式会社 Photosensitive resin composition, dry film and printed wiring board
JP2017142475A (en) * 2016-02-10 2017-08-17 Dic株式会社 Colored curable resin composition and cured film thereof
JP2018025612A (en) * 2016-08-08 2018-02-15 株式会社Dnpファインケミカル Colored composition for color filter, color filter and display device
WO2018061525A1 (en) * 2016-09-30 2018-04-05 東レ株式会社 Negative photosensitive resin composition, cured film, element provided with cured film, display device provided with cured film and method for producing same
WO2019004365A1 (en) * 2017-06-29 2019-01-03 三菱ケミカル株式会社 Photosensitive resin composition, cured product, black matrix and image display device
JP2019144543A (en) * 2018-02-16 2019-08-29 三菱ケミカル株式会社 Coloring resin composition, color filter, and image display device
WO2021111860A1 (en) * 2019-12-02 2021-06-10 東レ株式会社 Photosensitive composition, negative-type photosensitive composition, pixel division layer, and organic el display device
JP2022022537A (en) * 2020-06-26 2022-02-07 東レ株式会社 Photosensitive composition, cured product and organic EL display device

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