WO2022030535A1

WO2022030535A1 - Sheet supply device and sheet supply method

Info

Publication number: WO2022030535A1
Application number: PCT/JP2021/028924
Authority: WO
Inventors: 芳昭杉下
Original assignee: リンテック株式会社
Priority date: 2020-08-07
Filing date: 2021-08-04
Publication date: 2022-02-10
Also published as: CN115697850A; TW202212205A; JP2022030571A; JP7576595B2; JP2022172188A; JP7129447B2; KR20230044356A

Abstract

This sheet supply device makes it possible to prevent the timing at which an adhesive sheet is detached from a release sheet from deviating from the desired timing. The sheet supply device comprises: a feeding means 20 that repeatedly feeds and stops feeding of a web RS having an adhesive sheet AS temporarily attached at predetermined intervals to a band-shaped release sheet RL, and thereby performs intermittent feeding of the web RS; and a release means 30 that detaches the adhesive sheet AS of the web RS fed by the feeding means 20 from the release sheet RL. When feeding of the web RS is stopped, the feeding means 20 maintains a braking state in which movement of the web RS is inhibited.

Description

Sheet supply device and sheet supply method

The present invention relates to a seat supply device and a seat supply method.

A sheet supply device that supplies an adhesive sheet is known (see, for example, Patent Document 1).

Japanese Unexamined Patent Publication No. 2008-174247

In the sheet pasting device 1 (sheet supply device) described in Patent Document 1, the tension adjusting roller 3 is performing intermittent feeding in which the feeding of the raw fabric R (raw fabric) and the feeding stop of the raw fabric are repeated. When the (feeding means) is stopped, there may be a case where an error in feeding the original fabric such as an unexpected feeding or pulling back of the original fabric in the feeding means occurs. When the raw fabric is unwound in this way, the timing of peeling the adhesive sheet S (adhesive sheet) from the release sheet RL (peeling sheet) by the peel plate 5 (peeling means) deviates from the desired timing, and the bonding is performed. The inconvenience that the sheet cannot be attached to a predetermined position on the wafer W (adhesive body) occurs.

An object of the present invention is to provide a sheet supply device and a sheet supply method capable of preventing the timing of peeling the adhesive sheet from the release sheet from deviating from a desired timing.

The present invention has adopted the configuration described in the claims.

According to the present invention, since the braking state that suppresses the movement of the raw fabric is maintained while the feeding of the raw fabric is stopped, an error in feeding the raw fabric is eliminated. Therefore, it is possible to prevent the timing of peeling the adhesive sheet from the release sheet from deviating from the desired timing.

(A) is an explanatory view of a sheet pasting device which adopted the sheet supply device which concerns on one Embodiment of this invention, and (B) and (C) are explanatory views which concern on the modification of this invention.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
The X-axis, Y-axis, and Z-axis in the present embodiment are orthogonal to each other, the X-axis and the Y-axis are axes in a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. do. Further, in the present embodiment, "up" is "down" in the direction of the arrow on the Z axis when the direction is shown without specifying the figure, based on the case of viewing from the front direction in FIG. 1 parallel to the Y axis. Is the opposite direction, "left" is the arrow direction of the X axis, "right" is the opposite direction, "front" is the middle front direction parallel to the Y axis, and "rear" is the opposite direction.

The sheet sticking device EA1 to which the sheet supply device EA of the present invention is adopted has a support shaft 11 that supports the original fabric RS temporarily attached to the strip-shaped release sheet RL with the adhesive sheet AS at predetermined intervals. The raw fabric supporting means 10 having the guide roller 12, the feeding means 20 for intermittently feeding the raw fabric RS by repeating the feeding of the raw fabric RS and the feeding stop of the raw fabric RS, and the feeding means 20 are used to feed the raw fabric RS. A peeling means 30 having a peeling plate 31 for peeling the adhesive sheet AS of the original fabric RS from the peeling sheet RL, and a pressing roller 41 for pressing and attaching the adhesive sheet AS peeled by the peeling means 30 to the adherend WK. A pressing means 40 having the pressing means 40 and a collecting means 50 for collecting the peeling sheet RL from which the adhesive sheet AS has been peeled off by the peeling means 30 are provided, and are arranged in the vicinity of the adherend transporting means 60 for transporting the adherend WK. ..
The sheet supply device EA of the present invention is composed of a feeding means 20, a peeling means 30, and a collecting means 50.

The feeding means 20 includes a rotating motor 21 as a driving device having a braking means (not shown), and a driving roller 22 supported by an output shaft (not shown) and sandwiching the raw material RS with a pinch roller 23. The feeding means 20 is configured to maintain a braking state in which the movement of the raw fabric RS is suppressed while the feeding of the raw fabric RS is stopped. In the case of the present embodiment, a motor with a brake is adopted as the rotary motor 21, and the electromagnetic brake of the motor with a brake functions as a braking means to suppress the movement of the original fabric RS.

The recovery means 50 is supported by a rotation motor 51 as a drive device and an output shaft (not shown) thereof, and is supported by a drive roller 52 that sandwiches the release sheet RL between the pinch rollers 53 and an output shaft of a drive device (not shown). While the automatic operation of the sheet pasting device EA1 (sheet supply device EA) is being performed, a recovery roller 54 that constantly applies a predetermined tension to the release sheet RL existing between the sheet sticking device EA1 and the pinch roller 53 is provided. The collecting means 50 is configured to always impart a collecting force to the peeling sheet RL existing between the collecting means 50 and the feeding means 20 while the feeding of the raw fabric RS is stopped. As a result, the release sheet RL is pulled back from the side of the collection means 50, and it is possible to prevent the release sheet RL from being loosened between the feeding means 20 and the collection means 50.
In the collecting means 50, the tension applied to the release sheet RL during the feeding of the raw fabric RS and the tension applied to the peeling sheet RL while the feeding of the raw fabric RS is stopped are different values. Be controlled. In the case of the present embodiment, the tension during stoppage is set to be smaller than the tension during feeding, and when the feeding output is not applied to the raw fabric RS, too much tension is applied to the peeling sheet RL and the peeling is performed. Prevents the sheet RL from breaking or being damaged.

The adherend transport means 60 is supported by a slider 61A of a linear motor 61 as a drive device, and has a support table 62A having a holding surface 62A that can be sucked and held by a decompression means (holding means) (not shown) such as a decompression pump or a vacuum ejector. 62 is provided.

The operation of the sheet pasting device EA1 in which the above sheet supply device EA is adopted will be described.
First, with respect to the sheet pasting device EA1 in which each member is arranged at the initial position shown by the solid line in FIG. 1 (A), the user of the sheet pasting device EA1 (hereinafter, simply referred to as “user”) is as shown in the figure. After setting the original RS in, a signal for starting automatic operation is input via an operation means such as an operation panel (not shown) or a personal computer. Then, the feeding means 20 and the collecting means 50 drive the

rotation motors

21 and 51 to feed the raw fabric RS, and the tip portion of the leading adhesive sheet AS in the feeding direction is a peeling edge 31A of the peeling plate 31 and has a predetermined length. When peeled off, the feeding means 20 and the collecting means 50 stop driving the

rotary motors

21 and 51, and the feeding of the original fabric RS is stopped. The feeding means 20 drives the braking means at the moment when the driving of the rotation motor 21 is stopped and the feeding of the original fabric RS is stopped, and the unexpected feeding and pulling back of the raw fabric RS in the feeding means 20 is performed. A braking state is maintained in which the rotation of the drive roller 22 is suppressed and the movement of the original fabric RS is suppressed so as not to occur.

Next, when a user or a transport means (not shown) such as an articulated robot or a belt conveyor places the adherend WK on the support table 62, the adherend transport means 60 drives a decompression means (not shown) to support the support surface. The adsorption and retention of the adherend WK at 62A is started. After that, the adherend transporting means 60 drives the linear motor 61 to move the support table 62 to the left, and when the adherend WK reaches a predetermined position, the payout means 20 drives the braking means and is in a braking state. The feeding means 20 and the collecting means 50 drive the

rotation motors

21 and 51 to feed the original fabric RS according to the moving speed of the adherend WK. As a result, the adhesive sheet AS is peeled off from the release sheet RL, and the adhesive sheet AS peeled off from the release sheet RL is attached to the adherend WK by the pressing roller 41 as shown by the alternate long and short dash line in FIG. 1 (A). It is pressed and pasted. Next, the entire leading adhesive sheet AS is attached to the adherend WK to form an integral UP, and the tip of the next adhesive sheet AS following the leading adhesive sheet AS is the peeling edge of the release plate 31. When the sheet is peeled off by a predetermined length at 31A, the feeding means 20 and the collecting means 50 stop driving the

rotary motors

21 and 51, and the feeding of the original fabric RS is stopped. Again, the feeding means 20 drives the braking means at the moment when the driving of the rotation motor 21 is stopped and the feeding of the original fabric RS is stopped, and the braking state is maintained in the same manner as described above. Then, when the integral UP reaches a predetermined position on the left side of the pressing roller 41, the adherend transporting means 60 stops driving the linear motor 61, then stops driving the decompression means (not shown), and the support surface 62A. Releases the adsorption and retention of the adherend WK. Next, when the user or a transport means (not shown) transports the integrated object UP to the next step, the adherend transport means 60 drives the linear motor 61 to return the support table 62 to the initial position, and thereafter, the same operation as described above is performed. Repeated.

According to the above embodiment, the braking state that suppresses the movement of the original fabric RS is maintained while the original fabric RS is stopped, so that the error of feeding the original fabric RS does not occur. Therefore, it is possible to prevent the timing of peeling the adhesive sheet AS from the peeling sheet RL from deviating from a desired timing.

The means and processes in the present invention are not limited as long as they can perform the operations, functions or processes described for the means and processes, much less the constituents of the mere embodiment shown in the above embodiments. It is not limited to the process at all. For example, the peeling means may be any one as long as the adhesive sheet of the raw material unwound by the feeding means can be peeled from the peeling sheet, and may be within the technical scope in light of the common general technical knowledge at the time of filing. There is no limitation (same for other means and processes).

The original fabric supporting means 10 has a band-shaped adhesive sheet base material temporarily attached to the release sheet RL by forming a closed loop-shaped or short cut in the entire width direction, so that a predetermined region partitioned by the cut is formed. May support the raw fabric as the adhesive sheet AS so as to be able to be fed out, or the strip-shaped adhesive sheet base material supports the raw fabric temporarily attached to the release sheet RL so as to be able to be fed out. By forming a closed loop shape or a cut in the entire short width direction in the adhesive sheet base material by a cutting means, a predetermined region partitioned by the cut may be used as the adhesive sheet AS, or a closed loop shape. The inside of the notch may be an adhesive sheet AS, and the outside may be an unnecessary sheet to support the original fabric so that it can be unwound. It may be something to support. The original fabric support means 10 may or may not be provided in the sheet supply device EA or the sheet attachment device EA1 of the present invention, and the original fabric support means 10 may or may not be provided in the sheet supply device EA or the sheet attachment device EA1 of the present invention. If the device EA1 is not provided, a configuration may be provided in which the original fabric RS can be fed and supported by another device.

The feeding means 20 may maintain the braking state by adopting a servo motor as the rotating motor 21 and using the servo lock of the servo motor as the braking means, or the rotating motor 21 having no braking means. , A drive device such as a chuck cylinder may be adopted as a braking means, and the drive roller 22 or the original fabric RS may be sandwiched between the drive equipment such as the chuck cylinder to maintain the braking state, and the feedout of the original fabric RS may be stopped. Anything can be used as long as the braking state can be maintained.

The pressing means 40 employs a driving device as a pressing member contacting / detaching means for separating and approaching the pressing roller 41 to the adherend WK so as to prevent the adherend WK from being stressed or damaged. Alternatively, as shown in FIG. 1C, it is supported by a linear motion motor 42 as a drive device and its output shaft 42A, and is attracted and held by a decompression means (holding means) (not shown) such as a decompression pump or a vacuum ejector. The adhesive sheet AS, which is composed of a holding member 43 having a holding surface 43A capable of being formed, is sucked and held by the holding surface 43A from the peeling sheet RL by the peeling means 30, and the held adhesive sheet AS is used as an adherend WK. It may be pressed and attached. The pressing means 40 may or may not be provided in the sheet feeding device EA or the sheet sticking device EA1 of the present invention, and the pressing means 40 is provided in the sheet feeding device EA or the sheet sticking device EA1 of the present invention. If not, a configuration may be provided in which the adhesive sheet AS is pressed against the adherend WK by another device.

The collecting means 50 may be configured to apply a collecting force to the peeling sheet RL existing between the original fabric RS and the feeding means 20 at a predetermined timing, and the predetermined timing is, for example, , It may be a predetermined time following after the feeding means 20 has stopped giving the feeding output, or once or once or at a predetermined time after the feeding means 20 and the collecting means 50 have stopped giving the feeding output and the collecting force. It may be times.
The recovery means 50 may be set so that the tension during feeding is the same as the tension during stopping, or the tension during feeding may be set to be smaller than the tension during stopping. As shown in FIG. 1B, imaging means such as a camera or a projector for detecting slack in the peeling sheet RL located between the peeling edge 31A and the drive roller 52, and various types such as an optical sensor and an ultrasonic sensor. A slack detecting means 54 such as a sensor may be provided. In this case, when the slack detecting means 54 detects the slack of the peeling sheet RL, the collecting means 50 can drive the rotation motor 51 to eliminate the slack of the peeling sheet RL. In addition, such a slack detecting means 54 may detect the slack of the peeling sheet RL on the upstream side in the original fabric feeding direction from the peeling edge 31A, or may contact the sensor arm with the peeling sheet RL to detect the slack. A contact type sensor or a pressure sensor may be adopted.
The collecting means 50 may fold the collected release sheet RL into a fan fold, chop it with a shredder or the like, or randomly accumulate it. The collecting means 50 may or may not be provided in the sheet feeding device EA or the sheet sticking device EA1 of the present invention, and the collecting means 50 is provided in the sheet feeding device EA or the sheet sticking device EA1 of the present invention. If not, a configuration may be provided in which the release sheet RL is wound or collected by another device.

The adherend transporting means 60 may employ a drive device for moving the support table 62 in the front-rear direction to position the adherend WK, or employ a belt conveyor 63 as shown in FIG. 1 (C). You may. The adherend transporting means 60 may or may not be included in the sheet supply device EA or the sheet sticking device EA1 of the present invention.

The sheet supply device EA may be arranged upside down or arranged sideways to supply the adhesive sheet AS, for example, an adhesive sheet stacking device for stacking a plurality of adhesive sheet ASs one by one. , The adhesive sheet AS may be used as a component other than the sheet attachment devices EA1 and EA2, such as a transfer device for transferring the adhesive sheet AS to another release sheet, or the adhesive sheet AS may be manually attached to the adherend WK. It may be used alone as a semi-automatic sheet pasting device.

In the above embodiment, the sheet affixing device EA1 moves the adherend WK to the non-moving sheet supply device EA and the pressing means 40, and affixes the adhesive sheet AS to the adherend WK. The sheet supply device EA and the pressing means 40 may be moved without moving the adherend WK or while moving the adherend WK, and the adhesive sheet AS may be attached to the adherend WK.

The materials, types, shapes, etc. of the adhesive sheet AS and the adherend WK in the present invention are not particularly limited. For example, the adhesive sheet AS and the adherend WK may have a circular shape, an elliptical shape, a polygonal shape such as a triangle or a square shape, or any other shape, and the adhesive sheet AS may have pressure-sensitive adhesiveness, heat-sensitive adhesiveness, or the like. It may be of an adhesive form, and when a heat-sensitive adhesive sheet AS is adopted, it is appropriate to provide an appropriate coil heater for heating the adhesive sheet AS or a heating means such as a heating side of a heat pipe. It may be glued by a method. Further, such an adhesive sheet AS has three layers, for example, a single layer having only an adhesive layer, an intermediate layer between a base material and an adhesive layer, and a cover layer on the upper surface of the base material. Further, it may be a so-called double-sided adhesive sheet capable of peeling the base material from the adhesive layer, and the double-sided adhesive sheet may have a single-layer or multi-layer intermediate layer. It may be a single layer or a multi-layer without an intermediate layer. The adherend WK includes, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit boards, information recording boards such as optical disks, glass plates, steel plates, pottery, wood boards or resins. It may be a single object, or it may be a compound formed by two or more of them, and any form of a member, an article, or the like can be targeted. The adhesive sheet AS may be replaced with a functional and versatile reading, for example, an information description label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, and a recording layer forming resin. Any sheet such as a sheet, a film, a tape, or the like may be used.

The drive equipment in the above embodiment includes electric equipment such as a rotary motor, a linear motor, a linear motor, a single-axis robot, and an articulated robot having two-axis or three-axis or more joints, an air cylinder, a hydraulic cylinder, and a rod. Actuators such as less cylinders and rotary cylinders can be adopted, and those in which they are directly or indirectly combined can also be adopted.
In the above embodiment, when a rotating member such as a roller is adopted, a driving device for rotationally driving the rotating member may be provided, or the surface of the rotating member or the rotating member itself can be deformed by rubber, resin, or the like. It may be composed of a member, the surface of the rotating member or the rotating member itself may be composed of a member that does not deform, or another member such as a shaft or a blade that rotates or does not rotate may be adopted instead of the roller. Alternatively, when a pressing means such as a pressing roller or a pressing head or a pressing member that presses a pressed object is adopted, a roller, a round bar, or a blade may be used in place of or in combination with the above-exemplified ones. In addition to materials and brush-like members, those by spraying gas such as air or gas may be adopted, and those to be pressed may be composed of deformable members such as rubber, resin, and sponge, or metal. It may be composed of a non-deformable member such as a resin or a resin, or if a peeling means such as a peeling plate or a peeling roller or a peeling member that peels off an object to be peeled is adopted, it may be replaced with the one exemplified above. Alternatively, in combination with each other, a plate-shaped member, a round bar, a roller, or the like may be adopted, or the material to be peeled off may be made of a deformable member such as rubber or resin, or may be made of a non-deformable member. Alternatively, when a supporting (holding) means or a supporting (holding) member such as a supported (holding) member is used, a gripping means such as a mechanical chuck or a chuck cylinder is used. , Coulomb force, adhesive (adhesive sheet, adhesive tape), adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli suction, suction suction, drive equipment, etc. to support (hold) the supported member. Alternatively, when a material for cutting a member to be cut such as a cutting means or a cutting member or forming a cut or a cutting line in the member to be cut is adopted, it may be used in place of or in combination with the above-exemplified one. , Cutter blade, laser cutter, ion beam, thermal power, heat, water pressure, heating wire, those that cut by spraying gas or liquid, etc., or those that cut by combining appropriate drive equipment are moved. You may let it cut.

EA ... Sheet supply device 20 ... Feeding means 30 ... Peeling means 50 ... Recovery means AS ... Adhesive sheet RS ... Original fabric RL ... Peeling sheet

Claims

A feeding means in which an adhesive sheet is temporarily attached to a strip-shaped release sheet at a predetermined interval, and the feeding of the raw fabric is repeatedly stopped, and the raw fabric is intermittently fed.
A peeling means for peeling the adhesive sheet of the raw fabric unwound by the feeding means from the peeling sheet is provided.
The feeding means is a sheet feeding device characterized by maintaining a braking state that suppresses the movement of the raw fabric while the feeding of the raw fabric is stopped.
A collecting means for collecting the peeling sheet from which the adhesive sheet has been peeled by the peeling means is provided.
The first aspect of the present invention, wherein the collecting means imparts a collecting force to the peeling sheet existing between the collecting means and the original fabric while the feeding means is stopped, always or at a predetermined timing. Seat feeder.
The collecting means is controlled so that the tension during feeding applied to the release sheet during the feeding of the raw fabric and the tension during stopping applied to the peeling sheet while the feeding of the raw fabric is stopped are different values. The sheet supply device according to claim 2, wherein the sheet supply device is characterized by the above.
A feeding process in which an adhesive sheet is temporarily attached to a strip-shaped release sheet at predetermined intervals, and the feeding of the raw fabric is stopped, and the feeding of the raw fabric is stopped to perform intermittent feeding of the raw fabric.
A peeling step of peeling the adhesive sheet of the raw fabric unwound in the feeding step from the peeling sheet,
A recovery step of collecting the peeled sheet from which the adhesive sheet was peeled off was carried out in the peeling step.
The sheet feeding method is characterized in that, in the feeding step, a braking state for suppressing the movement of the raw fabric is maintained while the feeding of the raw fabric is stopped.