WO2021226993A1

WO2021226993A1 - Gyroscope and inertial sensor

Info

Publication number: WO2021226993A1
Application number: PCT/CN2020/090473
Authority: WO
Inventors: 娄迅; 王红超; 沈健
Original assignee: 深圳市汇顶科技股份有限公司
Priority date: 2020-05-15
Filing date: 2020-05-15
Publication date: 2021-11-18
Also published as: CN114096802A; CN114096802B

Abstract

Disclosed are a gyroscope and an inertial sensor. The gyroscope comprises a magnetic component (1), at least two resonant rings (21) and a plurality of metal wires (3), wherein the resonant rings (31) are concentrically arranged to form a resonant multi-ring (2); the magnetic component (1) is located in a resonant multi-ring inner cavity (22); and at least part of the metal wires (3) is arranged at the resonant rings (21). By means of increasing the number of resonant rings (21), the set length of the metal wires (3) can be increased, thereby improving the Ampere force applied to the metal wires (3). By means of arranging the plurality of resonant rings (21), the vibration quality of the gyroscope can also be increased, such that Brown noise generated when the gyroscope operates is reduced, and the signal-to-noise ratio and shock resistance performance of the gyroscope are improved.

Description

Gyroscope and inertial sensor

Technical field

This application relates to the technical field of motion detection devices, in particular to a gyroscope and an inertial sensor.

Background technique

The gyroscope is one of the commonly used motion detection devices, and has a wide range of applications in industry, military and other fields. The driving principle of the gyroscope can include electromagnetic drive, electrostatic drive, and piezoelectric drive. Electromagnetically driven gyroscopes usually include a resonant ring located in a magnetic field. The resonant ring is provided with a metal wire. By connecting the metal wire with alternating current, the metal wire is subjected to ampere force and drives the resonant ring to vibrate. When working, the signal-to-noise ratio of the gyroscope will be reduced due to the influence of Brown noise.

Application content

In view of the problems in the background art, the purpose of this application is to provide a gyroscope and an inertial sensor, which can improve the signal-to-noise ratio of the gyroscope.

An embodiment of the present application provides a gyroscope, and the gyroscope includes:

Magnetic components, used to generate magnetic fields;

The resonant multi-ring is located in the magnetic field. The resonant multi-ring includes n resonant rings and a resonant multi-ring cavity. The n resonant rings have different diameters and are arranged concentrically. The innermost of the n resonant rings A resonant ring encloses the resonant multi-ring cavity, and the magnetic component is at least partially located in the resonant multi-ring cavity, wherein n is greater than or equal to 2;

m metal wires, m is greater than or equal to 2;

At least a part of each of the metal wires is arranged on the resonance ring, and when the metal wire has alternating current passing through, the metal wires are arranged on the resonance ring and located in the magnetic field to generate driving force to drive the The resonant multi-ring produces vibration.

In a possible design, along the circumferential direction of the resonant multi-ring, the resonant multi-ring is divided into at least k driving parts and at least k detecting parts, and k is greater than or equal to 4;

The driving part and the detecting part are arranged alternately;

The metal wire includes a plurality of driving metal wires arranged in the at least k driving parts and a plurality of detecting metal wires arranged in the at least k detecting parts, and the plurality of driving metal wires are respectively connected to the The driving electrode corresponding to the driving part connects an external current to the driving metal wire through the driving electrode, and the plurality of detecting metal wires are respectively connected to the detecting electrode corresponding to the detecting part, and all the detecting electrodes are connected to each other. The current output generated by the detection metal wire.

In a possible design, the resonant multi-ring further includes a connecting portion, and the connecting portion is used to connect the n resonant rings.

In a possible design, the resonant multi-ring is integrally formed.

In a possible design, the connecting portion includes a first connecting portion and a second connecting portion, and the second connecting portion is arranged along the radial direction of the resonant multi-ring and connects the n resonant rings into one body, The first connecting portion is bent and extends from the tail end of the second connecting portion toward the outer side of the resonant multi-ring.

In a possible design, the cross-sectional area of the second connecting portion gradually increases in a direction away from the center of the resonant multi-ring.

In a possible design, each of the driving parts is provided with a pair of the connecting parts, and a pair of the connecting parts are located at the boundary of the driving part; each of the detecting parts is provided with a pair of the connecting parts , And a pair of the connecting parts are located at the boundary of the detecting part.

In a possible design, each of the driving parts is provided with one driving metal wire, and the driving metal wire is serpentinely arranged on the driving part, and/or;

Each detection part is provided with one detection metal wire, and the detection metal wire is serpentinely arranged on the detection part.

In a possible design, each of the driving parts is provided with n driving metal lines, and the n driving metal lines are respectively conformal to the connecting parts and connected to the same pair of driving electrodes, and /or;

Each of the detection portions is provided with n detection metal wires, and the n detection metal wires are respectively connected to the connecting portion conformally and to the same pair of detection electrodes.

In a possible design, each of the driving parts and the corresponding detecting part are arranged at an angle of 45°.

In a possible design, the gyroscope further includes a supporting member, and the resonant multi-ring is fixed to the supporting member through the first connecting portion.

In a possible design, the driving electrode and the detecting electrode are arranged on the surface of the supporting member.

In a possible design, the gyroscope further includes a base, and the supporting member is fixed to the base.

In a possible design, the material of the base is glass, and the material of the supporting member is silicon.

In a possible design, the first connecting portion and the second connecting portion can be elastically deformed.

In a possible design, in a direction away from the center of the resonant multi-ring, the cross-sectional areas of the n resonant rings are sequentially increased or decreased proportionally.

In a possible design, the magnetic component includes a main body, a first external part and a second external part, the main body has magnetism, and the main body is arranged perpendicular to the plane where the resonant multi-ring is located, and The magnetic poles of the main body are respectively located on opposite sides of the resonant polycyclic ring, and the first outer circumstance and the second outer circumstance are respectively connected with different magnetic poles of the main body for drawing out magnetic poles.

In a possible design, at least one of the first circumscribed portion and the second circumscribed portion is provided with n raised portions, and the raised portions are ring-shaped and are convex toward the resonant polycyclic ring. Therefore, the protrusions are arranged corresponding to the resonant ring, and along the height direction of the gyroscope, the projected area of each protrusion is larger than the projected area of the corresponding resonant ring.

The present application also provides an inertial sensor, characterized in that the inertial sensor includes the gyroscope described in any one of the above.

The embodiment of the application provides a gyroscope, wherein the gyroscope includes a magnetic component, at least two resonant rings, and a plurality of metal wires. The resonant rings are arranged concentrically to form a multi-resonant ring, and the magnetic component is located in the multi-resonant ring. In the ring cavity, multiple resonant rings are arranged to form a resonant multi-ring to improve the vibration quality of the gyroscope during operation and reduce the Brown noise generated by the gyroscope during operation. Due to the increase in the number of resonant rings, it can be used for setting The area of the metal wire increases, which in turn increases the length of the metal wire in the magnetic field, which increases the ampere force received by the metal wire, thereby increasing the driving force of the metal wire to the resonance ring, increasing the strength of the gyroscope output signal, and making the gyroscope as a whole The signal-to-noise ratio is increased to improve the accuracy of gyroscope motion detection.

It should be understood that the above general description and the following detailed description are only exemplary and cannot limit the application.

Description of the drawings

FIG. 1 is a schematic diagram of the structure of a resonant multi-ring, a first connection part, and a second connection part provided by an embodiment of the application;

2 is a schematic diagram of the structure of a gyroscope provided by an embodiment of the application;

FIG. 3 is a schematic structural diagram of a driving part provided by an embodiment of the application;

FIG. 4 is a first embodiment of a metal wire arrangement method provided by an embodiment of the application;

FIG. 5 is a second embodiment of the metal wire setting method provided by the embodiment of the application;

FIG. 6 is a schematic diagram of the vibration shape of the gyroscope provided by the embodiment of the application in the driving mode;

FIG. 7 is a schematic diagram of the vibration shape of the gyroscope provided by the embodiment of the application in the detection mode.

Reference signs:

1- Magnetic components;

11- The main body;

12-The first external part;

121-Protrusion;

13- The second external part;

2-resonant multi-ring;

21-resonant ring;

211-The first resonance ring;

212-Second resonance ring;

213-The third resonance ring;

22-Resonant multi-ring cavity;

23-Drive part;

24-Detection Department;

25-Connecting part;

251-The first connecting part;

252-The second connecting part;

3-metal wire;

31-The first connecting section;

32- The second connecting section;

33-The third connecting section;

4-electrode;

41-Positive;

42- negative electrode;

5- Supporting parts;

6-Base.

The drawings herein are incorporated into the specification and constitute a part of the specification, show embodiments that conform to the application, and are used together with the specification to explain the principle of the application.

Detailed ways

In order to better understand the technical solutions of the present application, the following describes the embodiments of the present application in detail with reference to the accompanying drawings.

It should be clear that the described embodiments are only a part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of this application.

The terms used in the embodiments of the present application are only for the purpose of describing specific embodiments, and are not intended to limit the present application. The singular forms of "a", "the" and "the" used in the embodiments of the present application and the appended claims are also intended to include plural forms, unless the context clearly indicates other meanings.

It should be understood that the term "and/or" used in this text is only an association relationship describing the associated objects, indicating that there can be three types of relationships, for example, A and/or B can mean that A alone exists, and both A and A exist at the same time. B, there are three cases of B alone. In addition, the character "/" in this text generally indicates that the associated objects before and after are in an "or" relationship.

It should be noted that the “upper”, “lower”, “left”, “right” and other directional words described in the embodiments of the present application are described from the angle shown in the drawings, and should not be construed as implementing the present application. Limitations of examples. In addition, in the context, it should also be understood that when it is mentioned that an element is connected "on" or "under" another element, it can not only be directly connected "on" or "under" the other element, but also It is indirectly connected "on" or "under" another element through an intermediate element.

The gyroscope is one of the commonly used motion detection devices, and it is widely used in industrial and military fields. The signal-to-noise ratio is the ratio of the signal output by the device to the noise generated by the device. It is one of the important indicators for evaluating the performance of the gyroscope. Brown noise will be generated during operation, which will interfere with the signal sent by the gyroscope, reduce the signal-to-noise ratio of the gyroscope, and affect the accuracy of motion detection by the gyroscope.

In view of this, the embodiments of the present application provide a gyroscope and an inertial sensor, which are used to reduce the signal-to-noise ratio of the gyroscope and improve the accuracy of the motion detection of the gyroscope.

As shown in FIGS. 1 to 3, the embodiments of the present application provide a gyroscope, wherein the gyroscope includes a magnetic component 1, a resonant multi-ring 2, and m metal wires 3, and the resonant multi-ring 2 includes n resonant rings 21 , Where n is greater than or equal to 2, and m is greater than or equal to 2. For example, a group of resonant multi-rings 2 may include a first resonant ring 211, a second resonant ring 212, and a third resonant ring 213 as shown in FIG. The radii of the rings 21 are different, and the resonant rings 21 are located in the same plane and are arranged concentrically to form a resonant multi-ring 2. The radius of each resonant ring 21 can be 1 mm to 30 mm. In a possible design, the outermost resonance The radius of the ring 21 is 4 mm, and the actual radius of the resonance ring 21 can be adjusted according to the overall size of the gyroscope. The radius of the resonance ring 21 provided in the embodiment of the present application includes but is not limited to the above range.

The inner hollow part of the resonant ring 21 located at the innermost side of the resonant multi-ring 2 forms a resonant multi-ring cavity 22, and at least part of the magnetic component 1 is located in the resonant multi-ring cavity 22, so that the resonant multi-ring 2 can be located in the magnetic field of the magnetic component 1. In a possible design, the magnetic component 1 can be a bar magnet. Along the length of the bar magnet, part of the bar magnet passes through the resonant multi-ring cavity 22. Specifically, the arrangement of the bar magnet The situation may be: along the length of the bar magnet, opposite ends of the bar magnet are located outside the resonant multi-ring cavity 22, and the middle of the bar magnet is located in the resonant multi-ring cavity 22, or one end of the bar magnet It is located outside the resonant multi-ring cavity 22, and the other end is located in the resonant multi-ring cavity 22, or the entire bar magnet is located in the resonant multi-ring cavity 22. At least part of the metal wire 3 is arranged in the resonance ring 21, and each resonance ring 21 is provided with a metal wire 3. When the metal wire 3 has an alternating current passing through, the metal wire 3 is subjected to ampere force under the combined action of the magnetic field and the alternating current , The ampere force can be used as the driving force to drive the resonant ring 21 corresponding to the metal wire 3 to deform. Since the metal wire 3 passes through alternating current, the ampere force received by the metal wire 3 also changes with the change of the frequency of the alternating current. , The direction of the deformation generated by the resonance ring 21 also changes accordingly, thereby forming vibration. Specifically, along the thickness direction of the gyroscope (that is, the direction perpendicular to the plane where the resonant multi-ring 2 is located), the two poles of the magnetic component 1 can be located on opposite sides of the plane where the resonant multi-ring 2 is located, and each part of the same resonant ring 21 The intensity of the received magnetic field is basically the same. In a specific embodiment, the center of the resonant multi-ring 2 can be located on the axis of the magnetic component 1, so that each part of the same resonant ring 21 receives the same intensity of the magnetic field. The metal wires 3 of the same resonant ring 21 receive the same ampere force under the same alternating current frequency, so that the resonant ring 21 can vibrate stably, thereby generating an effective signal.

The gyroscope provided by the embodiment of the present application drives the resonant ring 21 to move through an electromagnetic drive. Because under similar conditions, compared with electrostatic drive and piezoelectric drive, electromagnetic drive has a greater driving force, so it can improve the gyroscope. The output signal of the gyroscope improves the signal-to-noise ratio of the gyroscope.

The Brownian noise formula of the gyroscope:

Among them, Ω is Brown noise, q _Drive is the drive amplitude of the resonance ring 21, ω is the resonance frequency of the resonance ring 21, M is the inertial mass of the resonance ring 21, Q is the quality factor of the resonance ring 21, and K _B is Boltz Mann’s constant, T is the absolute temperature, and BW is the bandwidth of the resonance ring 21.

It can be seen from the above formula that the inertial mass M is inversely proportional to the Brownian noise Ω. When the vibration mass increases, the Brownian noise decreases, thereby reducing the noise generated by the gyroscope. The overall mass of the resonant multi-ring 2 can be used as the inertial mass. The part 3 is set in the resonant multi-ring 2. Because the mass of the metal wire 3 is very small, the influence on the calculation result is also very small, so it can be ignored in the calculation process. The signal-to-noise ratio of the gyroscope is the ratio of the signal generated by the gyroscope to the noise. When the noise generated by the gyroscope decreases, the signal-to-noise ratio of the gyroscope increases.

In the gyroscope provided by the embodiment of the present application, multiple resonant rings 21 are formed to form the resonant multi-ring 2 to increase the overall mass of the resonant multi-ring 2, thereby increasing the vibration quality of the gyroscope and reducing the Brownian noise of the gyroscope. At the same time, each resonant ring 21 of the resonant multi-ring 2 is provided with a metal wire 3, and when an alternating current passes through, each metal wire 3 can be subjected to ampere force.

Compared with the solution of increasing the quality of the resonant ring 21 by changing the material of the resonant ring 21 and increasing the cross-sectional area of the resonant ring 21, the solution provided by the embodiment of the present application is to increase the number of the resonant ring 21, which is better for the single ring. The structure has not changed, and the impact on the vibration of each resonance ring 21 driven by the ampere force is small. By changing the material of the resonance ring 21 and increasing the cross-sectional area of the resonance ring 21, the structure of the single ring will be changed. The increased structural strength makes the resonant ring 21 less likely to be deformed. Therefore, it will affect the vibration of the resonant ring 21 driven by the ampere force, resulting in a weaker signal, which is not conducive to improving the signal-to-noise ratio.

The ampere force formula F=BIL, where F is the ampere force, B is the strength of the magnetic field, I is the current in the energized wire, and L is the length of the energized wire in the magnetic field.

It can be seen from the above formula that when the intensity of the magnetic field and the magnitude of the current are constant, the length of the energized wire in the magnetic field is proportional to the magnitude of the ampere force it receives. Wire. When the length of the part of the metal wire 3 that passes through the alternating current in the magnetic field increases, the ampere force received by the metal wire 3 also increases. The solution provided by the embodiment of the present application increases the number of resonance rings 21, and each resonance ring 21 is equal to The metal wire 3 is provided. Therefore, the length of the metal wire 3 in the magnetic field is increased, which can increase the driving force of the metal wire 3 to the resonant multi-ring 2 and improve the stability of the vibration of the resonant ring 21, thereby improving the quality of the output signal of the gyroscope. , Improve the signal-to-noise ratio.

Compared with the gyroscope provided with only a single resonance ring 21, the gyroscope provided in the embodiment of the present application can not only improve the vibration quality of the gyroscope by increasing the number of the resonance rings 21, but also reduce the Brownian generated by the gyroscope during operation. Noise. At the same time, each resonance ring 21 is provided with a metal wire 3, so the length of the metal wire 3 as a whole in the magnetic field can be increased, and the ampere force received by the metal wire 3 can be increased, thereby increasing the driving force of each resonance ring 21 and improving the gyroscope. The quality of the generated signal, in turn, improves the signal-to-noise ratio.

It should be noted here that the number of resonant rings 21 of the gyroscope provided in the embodiment of the present application includes but is not limited to three. For ease of description, the drawings and statements of the present application refer to a gyroscope including three resonant rings 21. As an example, in practical applications, the gyroscope provided in the embodiment of the present application may include two, four, five, or more resonance rings 21.

When processing the resonant multi-loop 2, a Micro-Electro-Mechanical System (MEMS) method can be used. This processing method has high processing accuracy, can improve the accuracy of each part of the gyroscope, and can reduce the gyroscope. The mechanical noise generated by the instrument when it is working.

The gyroscope provided by the embodiment of the present application can simultaneously increase the driving force of the metal wire 3 to the resonance ring 21 and increase the vibration quality, thereby improving the signal quality of the gyroscope while reducing the Brown noise generated by the gyroscope, thereby making The signal-to-noise ratio is reduced, and the accuracy of the gyroscope's motion detection is improved. At the same time, the resonant multi-ring 2 of the present application is composed of multiple resonant rings 21. Compared with the structure provided with only one resonant ring 21, the resonant multi-ring 2 composed of multiple resonant rings 21 has better shock resistance. In order to make the gyroscope have better environmental adaptability, so that the gyroscope has a wider range of applications.

Specifically, as shown in FIG. 1, an embodiment of the present application provides a gyroscope, in which the resonant multi-ring 2 is evenly divided into at least eight parts along the circumferential direction, and each part is provided with a metal wire 3, which is arranged at The metal wires 3 of different parts are not connected, that is, the metal wires of each part are connected to different electrode terminals, respectively, and receive AC signals input through different electrodes, and only one AC signal is input to the corresponding part of the metal at any time Wire, that is, when the metal wire 3 provided in a certain part of the metal wire 3 passes through, the current flows only in the metal wire 3 located in the part, and will not flow to the adjacent or other part of the metal wire 3, specifically, the gyroscope can Including multiple sets of electrodes 4, each set of electrodes 4 includes a positive electrode 41 and a negative electrode 42, each part of the resonant multi-ring 2 is provided with a corresponding electrode 4, when the metal wire 3 is connected to the corresponding electrode 4, alternating current can flow into the metal Line 3, so that the corresponding part of the resonant multi-ring 2 is deformed by the ampere force of the metal line 3, and then vibrates.

In the part of the resonant multi-ring 2 through which the alternating current passes, the metal wire 3 can be subjected to the ampere force, so the metal wire 3 can drive the corresponding part of the resonant multi-ring 2 to produce deformation, thereby causing the part of the resonant multi-ring 2 to vibrate without The part where the alternating current passes is because the metal wire 3 cannot receive the ampere force, so the metal wire 3 cannot drive the corresponding part of the resonant multi-ring 2 to deform by the ampere force it receives. Through this design, each part of the resonant multi-ring 2 can be relatively independent. During the use of the gyroscope, only part of the resonant multi-ring 2 can be vibrated, and then the corresponding part can generate signals, which can reduce the interference generated by other parts. , Improve signal quality.

Specifically, as shown in FIG. 1, an embodiment of the present application provides a gyroscope, in which the resonant multi-ring 2 can be divided into eight parts. Of course, the embodiment of the present application only lists one of the cases. In a possible design, the resonant multi-ring 2 can be divided into more parts, such as sixteen parts, etc. Since the resonant multi-ring 2 is divided into more parts, the area of each part is relatively smaller, and the size of each part is relatively small. The metal wires 3 need to be arranged separately and cannot be connected to each other. Therefore, the more parts the resonant multi-ring 2 is divided into, the more difficult it is to install the metal wire 3, so the embodiment of the application selects the solution of dividing the resonant multi-ring 2 into eight parts. , While meeting the use requirements, it can also reduce the difficulty of setting the metal wire 3, facilitate the processing of the gyroscope, and improve the production efficiency.

Along the circumferential direction of the multi-resonant ring 2, the multi-resonant ring 2 is divided into at least k driving parts 23 and k detection parts 24, where k is greater than or equal to 4, and the driving parts 23 and the detection parts 24 are arranged alternately. For ease of description, this The embodiment provided by the application takes the resonant multi-ring 2 including eight parts as an example.

Specifically, the eight parts of the resonant multi-ring 2 can be divided into four driving parts 23 and four detecting parts 24. The driving parts 23 and the detecting parts 24 are alternately arranged along the circumferential direction of the resonant multi-ring 2, that is, along the resonant multi-ring 2 In the circumferential direction, a detection portion 24 is provided between two adjacent driving portions 23, that is, two adjacent driving portions 23 are separated by a detection portion 24, and two adjacent detection portions 24 are provided between One driving part 23, and the driving parts 23 are symmetrical about the center of the resonant multi-ring 2 in pairs, the angle between the two adjacent driving parts 23 is 90°, and the distance between the driving part 23 and the corresponding detecting part 24 is 90°. The included angle is 45°. In a possible implementation, when the resonant multi-ring 2 includes four driving parts 23 and four detecting parts 24, the driving part 23 and the adjacent detecting part 24 are arranged at 45°, The detecting part 24 adjacent to the driving part 23 is the detecting part 24 corresponding to the driving part 23. When the resonant multi-ring 2 includes eight driving parts 23 and eight detecting parts 24, the driving part 23 is connected to it. Between the detecting parts 24 arranged at 45°, there is a driving part 23 and a detecting part 24 spaced apart. The electrode 4 provided corresponding to the driving part 23 is a driving electrode, and the electrode 4 provided corresponding to the detecting part 24 is a detection electrode.

It should be noted here that in the embodiment provided in this application, the resonant multi-ring 2 includes, but is not limited to, eight parts. When the resonant multi-ring 2 is divided into more parts, for example, sixteen parts, each drive The part 23 and the detecting part 24 are alternately arranged along the circumferential direction of the resonant multi-ring 2, and the angle between the driving part 23 and the corresponding detecting part 24 is 45° (there is a gap between the driving part 23 and the corresponding detecting part 24 The driving part 23 and a detecting part 24), this design also has the same technical effect as when the resonant multi-ring 2 is divided into eight parts.

A group of driving parts 23 in the resonant multi-ring 2 divided into eight parts, for example, a group of (two) driving parts 23 symmetrical about the center of the resonant multi-ring 2, and a group of detecting parts 24, for example, about the resonant multi-ring 2 As an example, a group (two) of the detection parts 24 with the center of the ring 2 symmetrical, the metal wire 3 includes a driving metal wire and a detection metal wire, the driving metal wire is arranged in the driving part 23, and the detection metal wire is arranged in the detection part 24, as shown in the figure As shown in 6, when the gyroscope is working, the driving electrodes of a group of driving parts 23 are respectively connected to the driving metal wires provided in each driving part 23, so that the driving metal wires can pass alternating current. When the gyroscope detects motion, for example, when the gyroscope is used in a car navigation device, when the vehicle is not turning, that is, when the gyroscope does not produce rotation, and the resonant multi-ring 2 does not produce angular velocity, due to the operation of each drive unit 23 The driving wire is connected to the driving electrode, and AC power passes through the driving wire. Therefore, the driving wire of each driving part 23 receives the ampere force and can drive the deformation of the resonance ring 21 of each driving part 23. Regarding the center of the resonant multi-ring 2 The working modes of a symmetrical group of driving parts 23 are the same, so that the resonant multi-ring 2 can make circular-ellipse four-antinode bending vibration in the plane where it is located. At this time, the gyroscope is in the driving mode and is located in each driving part 23. The resonant multi-loop 2 is located at the antinode, vibrates and outputs a signal. The resonant multi-loop 2 located at the detection part 24 is at the node, no vibration occurs, and no signal is output. The detection metal wire located at the detection part 24 is in the magnetic field At rest, no movement of cutting the magnetic lines of induction occurs, so the detection part 24 does not generate induced electromotive force. The working principles of the other group of driving parts 23 and the other group of detecting parts 24 in the resonant multi-loop 2 are the same as the above-mentioned working principles, and will not be repeated here.

When the car is turning, the gyroscope rotates, that is, the resonant multi-ring 2 has an angular velocity. At this time, the gyroscope is in the detection mode. Under the combined action of ampere force), a vibration component will be generated, and the movement direction of the generated vibration component is 45° with the vibration direction of the resonant multi-ring 2 of the driving part 23, that is, the generated vibration component will act on a group of detection parts 24 , Make the resonant multi-ring 2 located in the detection part 24 vibrate in the plane where it is located. Since the resonant ring 21 of this part of the resonant multi-ring 2 is provided with a detection wire, when the resonant multi-ring 2 of the detection part 24 vibrates, The detection metal wire located in this part cuts the movement of the magnetic induction wire, so an induced electromotive force will be generated. The amplitude of the vibration component is proportional to the angular velocity of the resonant multi-loop 2. When the angular velocity of the resonant multi-loop 2 is greater, the greater the amplitude of the vibration component, the greater the induced electromotive force generated by the detection unit 24, which can pass through the detection unit 24 The detection electrode connected to the metal wire measures the induced electromotive force generated by the detection section 24. The angular velocity can be obtained through the corresponding relationship between the induced electromotive force and the angular velocity, and then the turning angle of the vehicle can be calculated. In areas, when satellite positioning or navigation is not possible, the turning angle of the car can be measured by the gyroscope and the data can be transmitted to the driver, so that the driver can obtain the running status of the car and reduce the possibility of accidents.

It should be noted here that the above embodiment only designs one of the application fields of the gyroscope. The application fields of the gyroscope provided in the embodiments of this application include, but are not limited to, car navigation. Other fields such as drones, robots, etc. are the same. The gyroscope provided in the embodiment of the present application can be applied, which will not be repeated here.

Since the resonant multi-ring cavity 22 of the resonant multi-ring 2 needs to be provided with a magnetic component 1, the magnetic component 1 is located in the center of the resonant multi-ring cavity 22 and occupies the position of the central anchor point. Therefore, the gyroscope provided in the embodiment of the present application It is impossible to fix the resonant multi-ring 2 through the central anchor point. In view of this, please refer to Figs. 2 and 3 again. An embodiment of the present application provides a gyroscope, wherein the supporting member 5 is arranged on the outer side of the resonant multi-ring 2, and the resonance The multi-ring 2 further includes a connecting portion 25, and the connecting portion 25 includes a first connecting portion 251 and a second connecting portion 252, and the resonant multi-ring 2 is connected to the supporting member 5 through the first connecting portion 251. Along the thickness direction of the gyroscope, the supporting member 5 is arranged on the upper part of the base 6, and the driving electrode and the detecting electrode can be arranged at corresponding positions of the supporting member 5, respectively. In a possible design, the material of the supporting member 5 is silicon, and the material of the base 6 is glass. The adjacent resonant rings 21 are connected by the second connecting portion 252 so that the positions of the resonant rings 21 are relatively fixed to form a resonant multi-ring 2 with an integral structure.

Such a design not only solves the installation problem of the resonant multi-ring 2 but also fixedly connects the resonant rings 21 to each other, which improves the integrity of the resonant multi-ring 2 and the impact resistance.

The tail ends of the first connecting portion 251 and the second connecting portion 252 are bent and extended toward the outside of the resonant polycyclic ring 2, that is, away from the resonant polycyclic ring. Such a design makes it easier to connect the first connecting portion 251 to the supporting member 5, and the specific bending angle of the first connecting portion 251 can be set according to the specific positions of the resonant multi-ring 2 and the supporting member 5. Specifically, the second connecting portion 252 may be disposed between the adjacent driving portion 23 and the detecting portion 24, the first connecting portion 251 and the second connecting portion 252 may be integrally formed with the resonant multi-ring 2, and the driving portion 23 and the detecting portion The arrangement of the metal wires 3 of 24 can be the same. Taking a driving part 23 as an example, a driving part 23 may include at least one set of driving electrodes, for example, including a positive electrode 41 and a negative electrode 42. In a possible design, the resonance The multi-ring 2 can be composed of three resonant rings 21, one drive part 23 can be provided with three sets of drive electrodes, and each resonant ring 21 is located in the part of the same drive part 23 with a drive metal wire, wherein each drive metal wire can be It includes a first connecting section 31 and a second connecting section 32. The first connecting section 31 is arranged on the surface of the resonance ring 21 and can be arranged by coating. The first connecting section 31 can be arranged along the circumferential direction of the resonance ring 21, each The two ends of the first connecting section 31 are respectively connected to the driving electrode through the second connecting section 32, and the arrangement of each driving metal line may be as shown in FIG. 4. Specifically, in a possible design, the resonant multi-ring 2 has a first resonant ring 211, a second resonant ring 212, and a third resonant ring 213, and the metal wire 3 includes a plurality of first connecting sections 31, each of which is connected The segments 31 are respectively arranged in the part where the first resonant ring 211, the second resonant ring 212 and the third resonant ring 213 are located in the same driving part 23, and each first connecting segment 31 is connected to the corresponding driving electrode through the second connecting segment 32. connect. Specifically, the second connecting section 32 may be arranged at the second connecting section 252, and the second connecting section 32 is supported by the second connecting section 252. The driving metal lines of the resonance rings 21 located in the same driving section 23 are respectively connected to the corresponding The driving electrode is connected so that the driving metal line can form a complete circuit with the driving electrode, so that the alternating current can pass through the driving metal line, so that the driving metal line can receive the ampere force, and then drive the resonant multi-ring 2 of the driving part 23 Each resonance ring 21 vibrates.

In this way, by providing multiple metal wires 3 and multiple sets of electrodes 4 on the same driving portion 23 or detection portion 24, the difficulty of installing the metal wires 3 can be reduced, and processing can be facilitated.

Taking one of the driving parts 23 of the resonant multi-ring 2 as an example, in a possible design, one driving part 23 may include a set of driving electrodes and a driving wire, and the resonant multi-ring 2 includes a plurality of first resonant rings. 211. A plurality of second resonant rings 212 and a plurality of third resonant rings 213, the driving metal line includes a first connecting section 31, a second connecting section 32, and a third connecting section 33, and each resonant ring 21 is provided with a first A connecting section 31, and along the circumferential direction of the resonant ring 21, two connecting sections 32 are provided at both ends of the first connecting section 31, and the second connecting sections 32 can be arranged on the second connecting portion 252 and on the same driving portion 23 One of the resonant rings 21, for example, the driving wire of the first resonant ring 211 includes a first connecting section 31 and two second connecting sections 32 respectively connected to both ends of the first connecting section 31. In a possible design , The positive electrode 41 or the negative electrode 42 can be connected to one end of the first connection section 31 provided at the first resonance ring 211 through the second connection section 32, and the second connection section 32 located at the other end of the first connection section 31 can pass through the second connection section 32. One of the second connecting sections 32 of the second resonance ring 212 of the three connecting sections 33 is connected, and the other second connecting section 32 of the second resonance ring 212 is connected to one of the first connecting sections of the first resonance ring 211 through another third connecting section 33. The two connecting sections 32 are connected, and the other second connecting section 32 of the first resonant ring 211 is connected to the other electrode 4, and the driving metal wire is spirally arranged on the single driving part 23. For the specific arrangement, refer to FIG. 5 at that time.

It should be noted here that in the gyroscope provided by the embodiment of the present application, the metal wire 3 is sequentially arranged on the first resonant ring 211, the second resonant ring 212, and the third resonant ring 213 along the arrangement position of the resonant ring 21. The solution is only one way to arrange the metal wire 3. The metal wire 3 can also be arranged in the third resonant ring 213, the second resonant ring 212 and the first resonant ring 211 in sequence. The specific arrangement of the metal wire 3 is not described in this application. It is limited as long as the metal wire 3 can be provided in each resonance ring 21 of the driving unit 23.

Such a design can be provided by one metal wire 3 in the part where each resonant ring 21 is located in the same driving part 23, instead of multiple metal wires 3, and at the same time, because the number of resonant rings 21 increases, and each resonant ring 21 is located in the magnetic field Therefore, the length of the metal wire 3 in the magnetic field is also increased accordingly, thereby increasing the ampere force of the part of the metal wire 3 in the magnetic field, because the parts of the resonance rings 21 located in the same driving part 23 pass through the same metal wire 3 is driven, so it is possible to increase the uniformity of vibration of the same driving part 23.

When the same driving section 23 includes multiple drive metal lines and multiple sets of drive electrodes, since the current output by each drive electrode will be different, the ampere force received by the metal connected to each electrode 4 will also be different, and the resonance ring will be different. There is a difference in the vibration of 21, which reduces the consistency of the resonant multi-ring 2, and the provision of multiple sets of driving electrodes will increase the space occupied by the driving electrodes and the power consumption. Therefore, in the gyroscope provided by the embodiment of the present application, the same driving part 23 includes A set of driving electrodes and a driving metal line can reduce the number of electrodes 4 and also improve the consistency of the vibration of the resonance ring 21.

More specifically, as shown in FIG. 3, when the same driving part 23 includes a group of electrodes 4 and a metal wire 3, since the metal wires 3 are arranged in a spiral manner, there will be a plurality of second connecting sections 32 arranged on the same first connection section. In the case of the second connecting portion 252, in a possible design, the number of the second connecting sections 32 located at each second connecting portion 252 gradually increases along the direction away from the center of the resonant multi-ring 2, because when alternating current passes through , The capacitive coupling between the second connecting sections 32 is prone to cause errors. Therefore, it is necessary to have a certain interval between the second connecting sections 32 located on the same second connecting portion 252 to reduce the second connecting sections 32. In a possible design, the cross-sectional area of the second connecting portion 252 gradually increases in the direction away from the center of the resonant multi-ring 2, so that the second connecting portion 252 has enough space for the second The connecting section 32, and reducing the possibility of coupling between the second connecting sections 32 provided on the same second connecting section 252 when alternating current passes through. The width of the first connecting section 251 and the second connecting section 252 can be 10um ~300um. In a possible design, along the direction away from the center of the resonant multi-ring 2, the width of the second connecting portion 252 is 15um and 30um in turn, and the width of the first connecting portion 251 is 45um. This change in width guarantees both The distance between the metal wires 3 can be reduced, and the internal stress of the resonant multi-ring 2 can be reduced, and the overall performance of the gyroscope can be improved.

In a possible design, the cross-sectional area of each resonant ring 21 increases or decreases proportionally in the direction away from the center of the multi-resonant multi-ring 2, compared to the way of equal cross-sectional area of each resonant ring 21, this method can improve the resonance. The overall stiffness distribution of the multi-ring 2 improves the overall performance of the gyroscope. Specifically, the wall thickness of the resonance ring 21 may be 10 um to 300 um.

As shown in FIG. 2, an embodiment of the present application provides a gyroscope, in which the magnetic component 1 includes a main body 11, a first circumscribed section 12, and a second circumscribed section 13. The main body 11 has magnetism, and the first circumscribed section 12 and The second circumscribed portion 13 is respectively connected with different magnetic poles of the main body portion 11 to draw out the magnetic poles. Along the height direction of the gyroscope, the first circumscribed portion 12 and the second circumscribed portion 13 are located on opposite sides of the resonant multi-ring 2 Through this design, the magnetic poles can be drawn out, and the strength of the magnetic field received by the resonant multi-loop 2 can be enhanced, thereby increasing the ampere force received by the metal wire 3, increasing the driving force on the resonating multi-loop 2, and enhancing the output signal of the gyroscope. In turn, the signal-to-noise ratio is improved.

Specifically, as shown in FIG. 2, at least one of the first external portion 12 and the second external portion 13 is provided with two protrusions 121, as shown in the gyroscope with three resonance rings 21 As an example, the first circumscribed portion 12 may include three protrusions 121, and each protrusion 121 protrudes toward the resonant multi-ring 2, and the protrusion 121 is arranged corresponding to the resonant ring 21, and the protrusion 121 may also have a ring shape. Along the height direction of the gyroscope, the projected area of each protrusion 121 is larger than the projected area of the corresponding resonant ring 21, so that when the resonant ring 21 is deformed, the projection of the resonant ring 21 can still be located on the protrusion 121 Within the projection range, that is, the resonance ring 21 is still located within the range of the magnetic poles drawn by the corresponding protrusion 121.

Such a design can reduce the ampere force received by the metal wire 3 of the second connection portion 252. Since the extension direction of the metal wire 3 provided on the second connection portion 252 is different from the extension direction of the metal wire 3 provided on the resonance ring 21, When alternating current passes through, the metal wire 3 provided in the second connecting portion 252 will also receive the ampere force, and the direction of the ampere force is different from the direction of the ampere force received by the metal wire 3 provided in the resonance ring 21, so it will This affects the deformation of the resonant ring 21, which in turn affects the vibration of the resonant ring 21. By changing the structure of the first external part 12 and/or the second external part 13 in this application, the intensity of the magnetic field at other positions can be reduced, thereby reducing the magnetic field of other components. The force received in the vibration ring reduces the influence of other components on the vibration of the resonance ring 21.

The embodiments of the present application also provide an inertial sensor, where the inertial sensor may include the gyroscope in any of the above embodiments. Since the gyroscope has the above technical effects, the inertial sensor including the gyroscope also has corresponding technology The effect will not be repeated here.

The gyroscope provided by the embodiment of the present application increases the vibration quality by increasing the number of resonance rings 21, thereby reducing the Brownian noise generated by the gyroscope during operation. At the same time, due to the increase in the number of resonance rings 21, the overall use of the gyroscope is The area where the metal wire 3 is provided is also correspondingly increased, which can increase the length of the metal wire 3 in the magnetic field, thereby increasing the ampere force received by the metal wire 3, increasing the driving force of the metal wire 3 on the resonance ring 21, and improving the resonance. The stability of the vibration of the ring 21 can also improve the overall impact resistance of the resonance ring 21 and improve the accuracy of motion detection by the gyroscope.

The above descriptions are only preferred embodiments of the application, and are not intended to limit the application. For those skilled in the art, the application can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of this application shall be included in the protection scope of this application.

Claims

A gyroscope, characterized in that the gyroscope includes:

Magnetic components, used to generate magnetic fields;

The resonant multi-ring is located in the magnetic field. The resonant multi-ring includes n resonant rings and a resonant multi-ring cavity. The n resonant rings have different diameters and are arranged concentrically. The innermost of the n resonant rings A resonant ring encloses the resonant multi-ring cavity, and the magnetic component is at least partially located in the resonant multi-ring cavity, wherein n is greater than or equal to 2;

m metal wires, m is greater than or equal to 2;

At least a part of each of the metal wires is arranged on the resonance ring, and when the metal wire has alternating current passing through, the metal wires are arranged on the resonance ring and located in the magnetic field to generate driving force to drive the The resonant multi-ring produces vibration.
The gyroscope according to claim 1, wherein along the circumferential direction of the resonant multi-ring, the resonant multi-ring is divided into at least k driving parts and at least k detecting parts, and k is greater than or equal to 4;

The driving part and the detecting part are arranged alternately;

The metal wire includes a plurality of driving metal wires arranged in the at least k driving parts and a plurality of detecting metal wires arranged in the at least k detecting parts, and the plurality of driving metal wires are respectively connected to the The driving electrode corresponding to the driving part connects an external current to the driving metal wire through the driving electrode, and the plurality of detecting metal wires are respectively connected to the detecting electrode corresponding to the detecting part, and all the detecting electrodes are connected to each other. The current output generated by the detection metal wire.
The gyroscope according to claim 2, wherein the resonant multi-ring further comprises a connecting part, and the connecting part is used to connect the n resonant rings.
The gyroscope according to claim 3, wherein the resonant multi-ring is integrally formed.
The gyroscope according to claim 3, wherein the connecting part comprises a first connecting part and a second connecting part, and the second connecting part is arranged along the radial direction of the resonant multi-ring and connects the n The resonant rings are connected as a whole, and the first connecting portion is bent and extended from the tail end of the second connecting portion toward the outer side of the resonant multi-ring.
The gyroscope according to claim 5, wherein the cross-sectional area of the second connecting portion gradually increases in a direction away from the center of the resonant polycyclic ring.
The gyroscope according to claim 5, wherein each of the driving parts is provided with a pair of the connecting parts, and a pair of the connecting parts is located at the boundary of the driving part; each of the detecting parts is provided There is a pair of said connecting parts, and a pair of said connecting parts is located at the boundary of said detecting part.
The gyroscope according to any one of claims 3-7, wherein each of the driving parts is provided with one driving metal wire, and the driving metal wire is serpentinely arranged on the driving part, and/ or;

Each detection part is provided with one detection metal wire, and the detection metal wire is serpentinely arranged on the detection part.
The gyroscope according to any one of claims 3-7, wherein each of the driving parts is provided with n driving metal wires, and the n driving metal wires are respectively conformal to the connecting part And connected to the same pair of driving electrodes, and/or;

Each of the detection portions is provided with n detection metal wires, and the n detection metal wires are respectively connected to the connecting portion conformally and to the same pair of detection electrodes.
7. The gyroscope according to any one of claims 3-7, wherein each of the driving parts and the corresponding detecting part are arranged at an angle of 45°.
The gyroscope according to any one of claims 3-7, wherein the gyroscope further comprises a supporting member, and the resonant multi-ring is fixed to the supporting member through the first connecting portion.
The gyroscope according to claim 11, wherein the driving electrode and the detecting electrode are arranged on the surface of the supporting member.
The gyroscope according to claim 11, wherein the gyroscope further comprises a base, and the supporting member is fixed to the base.
The gyroscope according to claim 13, wherein the material of the base is glass, and the material of the supporting member is silicon.
7. The gyroscope according to any one of claims 5-7, wherein the first connecting portion and the second connecting portion can be elastically deformed.
7. The gyroscope according to any one of claims 3-7, wherein the cross-sectional areas of the n resonant rings increase or decrease in an equal proportion in a direction away from the center of the resonant multi-ring.
The gyroscope according to any one of claims 1-7, wherein the magnetic component comprises a main body, a first circumscribed section, and a second circumscribed section, the main body has magnetism, and the main body is vertical Are arranged on the plane where the resonant multi-ring is located, and the magnetic poles of the main body are respectively located on opposite sides of the resonant multi-ring. Different magnetic poles are connected to lead out magnetic poles.
The gyroscope according to claim 17, wherein at least one of the first circumscribed part and the second circumscribed part is provided with n protrusions, and the protrusions are ring-shaped and face For the resonant multi-ring protrusions, the protrusions are arranged corresponding to the resonant ring, and along the height direction of the gyroscope, the projected area of each protrusion is larger than that of the corresponding resonant ring. shadow area.
An inertial sensor, characterized in that the inertial sensor comprises the gyroscope according to any one of claims 1-18.