WO2021251527A1

WO2021251527A1 - Closed chamber

Info

Publication number: WO2021251527A1
Application number: PCT/KR2020/007603
Authority: WO
Inventors: 송동욱
Original assignee: 엘지전자 주식회사
Priority date: 2020-06-11
Filing date: 2020-06-11
Publication date: 2021-12-16
Also published as: KR20220124729A; CN115769353A

Abstract

A closed chamber comprises: a base plate; a plurality of support frames on the base plate; a plurality of connecting blocks for connecting the plurality of support frames; a plurality of panels for covering the open region between the plurality of support frames; and first closing members disposed between the plurality of support frames and the plurality of connecting blocks.

Description

sealed chamber

The embodiment relates to a closed chamber.

A glove box or an airtight chamber applied to a semiconductor or display manufacturing process must be closed to the outside to keep its interior space in a specific gas atmosphere.

Conventional methods of manufacturing a closed chamber include a cutting method, a casting method, and the like.

The cutting method manufactures an ingot having a size greater than or equal to the sealed chamber, and then cuts the inside of the ingot to manufacture the sealed chamber. In the casting method, casting is performed using a mold corresponding to a closed chamber.

On the other hand, as semiconductors or OLED displays have recently increased in capacity and area, the size of the sealed chamber is also increasing accordingly.

Accordingly, it is gradually becoming difficult to manufacture the sealed chamber.

In particular, the conventional hermetic chamber is difficult to move due to its weight once manufactured, and has a problem in that a high manufacturing cost is required.

The embodiments aim to solve the above and other problems.

Embodiments provide a closed chamber that is easy to move.

Embodiments provide a closed chamber that is easy to assemble.

Embodiments provide a closed chamber that is inexpensive to manufacture.

Embodiments provide a closed chamber that is easy to change in size.

According to one aspect of the embodiment to achieve the above or other objects, the hermetic chamber comprises: a base plate; a plurality of support frames on the base plate: a plurality of connecting blocks connecting the plurality of support frames; a plurality of panels covering an open area between the plurality of support frames; and a first sealing member disposed between the plurality of support frames and the plurality of connection blocks.

The effect of the closed chamber according to the embodiment will be described as follows.

According to at least one of the embodiments, by manufacturing the closed chamber using a base plate formed of a lightweight material, a plurality of support frames, and a plurality of connection blocks, there is an advantage in that the load of the closed chamber is reduced and movement is easy.

According to at least one of the embodiments, there is an advantage of easy assembly by assembling a plurality of pre-made sub-plates, a plurality of support frames, and a plurality of connecting blocks according to predetermined standards and procedures.

According to at least one of the embodiments, there is no need for a separate process such as welding in addition to assembly, so the manufacturing cost is low.

According to at least one of the embodiments, a base plate suitable for a pre-designed size is processed and manufactured, and a frame frame is formed on the base plate using a plurality of support frames and a plurality of connection blocks, and then the pre-made panel is supported. By fastening it to the frame, there is an advantage that it can easily respond to a change in the size required by the customer.

Further scope of applicability of embodiments will become apparent from the following detailed description. However, it should be understood that the specific embodiments such as the detailed description and preferred embodiments are given by way of example only, since various changes and modifications within the spirit and scope of the embodiments may be clearly understood by those skilled in the art.

1 is a perspective view illustrating a closed chamber according to an embodiment.

2 is an exploded perspective view illustrating a closed chamber according to an embodiment.

FIG. 3 shows a state before the panel is mounted in FIG. 1 .

4A is a perspective view illustrating a closed chamber according to an embodiment.

FIG. 4B is a first exemplary view of a connection block shown in area A of the hermetic chamber of FIG. 4A .

Fig. 5 is a front view showing the sealed chamber including the connection block of the first exemplary view.

FIG. 6 is an enlarged view illustrating area A in FIG. 5 .

7 is a cross-sectional view taken along line X-X' in FIG. 6 .

8 shows a first sealing member.

9A is a perspective view illustrating a closed chamber according to an embodiment.

FIG. 9B is a second exemplary view of the connecting block shown in area B of the hermetic chamber of FIG. 9A .

10A is a perspective view illustrating a closed chamber according to an embodiment.

FIG. 10B is a third exemplary view of a connection block shown in region C of the hermetic chamber of FIG. 10A .

11 is a front view showing the closed chamber including the connecting block of the third exemplary view.

12 is an enlarged view illustrating region D in FIG. 11 .

13 shows the base plate.

14 is an exploded perspective view in which the second sub-plate and the third sub-plate of FIG. 13 are disassembled;

15 is a cross-sectional view illustrating a fastening relationship between a support plate, a base plate, and a support frame.

16 shows the sealing test results.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the technical spirit of the present invention is not limited to some embodiments described, but may be implemented in various different forms, and within the scope of the technical spirit of the present invention, one or more of the components may be selected between the embodiments. It can be combined and substituted for use. In addition, terms (including technical and scientific terms) used in the embodiments of the present invention may be generally understood by those of ordinary skill in the art to which the present invention belongs, unless specifically defined and described explicitly. It may be interpreted as a meaning, and generally used terms such as terms defined in advance may be interpreted in consideration of the contextual meaning of the related art. In addition, the terminology used in the embodiments of the present invention is for describing the embodiments and is not intended to limit the present invention. In this specification, the singular form may also include the plural form unless otherwise specified in the phrase, and when it is described as "at least one (or more than one) of B and (and) C", it can be combined with A, B, and C. It may include one or more of all combinations. In addition, in describing the components of the embodiment of the present invention, terms such as first, second, A, B, (a), (b), etc. may be used. These terms are only for distinguishing the component from other components, and are not limited to the essence, order, or order of the component by the term. And, when it is described that a component is 'connected', 'coupled' or 'connected' to another component, the component is not only directly connected, coupled or connected to the other component, but also with the component It may also include a case of 'connected', 'coupled' or 'connected' due to another element between the other elements. In addition, when it is described as being formed or disposed on "above (above) or under (below)" of each component, the upper (above) or lower (below) is not only when two components are in direct contact with each other, but also one Also includes a case in which another component as described above is formed or disposed between two components. In addition, when expressed as “up (up) or down (down)”, it may include not only the upward direction but also the meaning of the downward direction based on one component.

FIG. 1 is a perspective view showing a closed chamber according to an embodiment, FIG. 2 is an exploded perspective view illustrating the sealed chamber according to the embodiment, and FIG. 3 shows a state before the panel is mounted in FIG. 1 .

1 to 3 , the closed chamber 100 according to the embodiment includes a support plate 105 , a base plate 110 , a plurality of support frames 120 , a plurality of connection blocks 130 , and a panel 140 . ) may be included. The closed chamber 100 according to the embodiment may include more components than this.

The support plate 105 according to the embodiment may serve to support the entire closed chamber. The support plate 105 may be formed of a lightweight material having excellent strength. For example, the support plate 105 may be formed of a stainless steel material, but is not limited thereto.

A plurality of movable bodies (not shown) are mounted on the lower side of the support plate 105 , so that the closed chamber 100 can be moved. The movable body may be, for example, a wheel capable of rotational movement in up, down, left, and right directions. Although not shown, a fixing member for fixing the movement may be mounted on one side of the movable body. The closed chamber moved to a specific place may be fixed by such a fixing member.

The base plate 110 according to the embodiment may be disposed on the support plate 105 . The base plate 110 may serve to seal the lower side of the sealed chamber 100 .

The base plate 110 may be formed of a lightweight material having excellent strength. For example, the base plate 110 may be formed of aluminum or an aluminum alloy, but is not limited thereto.

For example, the size of the base plate 110 may be the same as the size of the support plate 105 , but is not limited thereto.

For example, the base plate 110 may be fastened to the support plate 105 using a plurality of fastening members (not shown).

The base plate 110 will be described in detail later.

The plurality of support frames 120 according to the embodiment may serve to support the hermetic chamber 100 by forming a skeleton of the hermetic chamber 100 .

The support frame 120 may be formed of a lightweight material having excellent strength. For example, the support frame 120 may be formed of aluminum or an aluminum alloy, but is not limited thereto. Even if a plurality of support frames 120 are used, since the support frame 120 is formed of a lightweight material, the weight of the hermetic chamber 100 may not be greatly increased, so that the hermetic chamber 100 may be easily moved. .

For example, the plurality of support frames 120 may be connected to each other to form a skeleton along the x-axis direction. For example, the plurality of support frames 120 may be connected to each other to form a skeleton along the y-axis direction. For example, the plurality of support frames 120 may be connected to each other to form a skeleton along the z-axis direction. For example, the support frame 120 having a skeleton along the x-axis direction may be connected to the support frame 120 having a skeleton along the y-axis direction and/or the support frame 120 having a skeleton along the x-axis direction. can

For example, a first side area of the hermetic chamber 100 is formed by the connection of the plurality of support frames 120 , and a second side area of the hermetic chamber 100 is formed by the connection of the plurality of support frames 120 . can be For example, a third side area of the hermetic chamber 100 is formed by the connection of the plurality of support frames 120 , and a fourth side area of the hermetic chamber 100 is formed by the connection of the plurality of support frames 120 . can be The first side region and the third side region may be spaced apart from each other and face each other. The second side region and the fourth side region may be spaced apart from each other and face each other. For example, the upper region of the closed chamber 100 may be formed by connecting the plurality of support frames 120 .

Although the first to fourth side regions are illustrated in the embodiment, five or more side regions may be formed by connecting the plurality of support frames 120 .

Accordingly, by connecting the plurality of support frames 120 to each other, a skeleton for forming the inner space of the closed chamber 100 may be formed.

Open regions 191 to 194 having different sizes may be formed by connecting the plurality of support frames 120 . At least four or more supporting frames 120 are required to form one open area 191 to 194 . In this case, the size of the open areas 191 to 194 formed by the four support frames 120 and the size of the open areas 191 to 194 formed by the eight support frames 120 or 16 support frames 120 are may be different.

The hermetic chamber 100 may be designed to have different open areas 191 to 194 in consideration of the load or support strength of the hermetically sealed chamber 100 or connection with an external device, for example, a gas piping facility.

The plurality of connection blocks 130 according to the embodiment may be a medium capable of connecting the plurality of support frames 120 to each other. That is, at least two or more support frames 120 may be connected to the connection block 130 through the connection block 130 to be disposed in different directions, that is, the x-axis, the y-axis, and the z-axis.

The connection block 130 may be formed of a lightweight material having excellent strength. For example, the connection block 130 may be formed of aluminum or an aluminum alloy.

For example, the connection block 130 may connect at least two or more support frames 120 . The connection block 130 according to the embodiment may include the connection block 131 illustrated in FIG. 4B , the connection block 132 illustrated in FIG. 9B , and the connection block 133 illustrated in FIG. 10B , but for this do not limit

For example, the connection block 131 illustrated in FIG. 4B may connect the three support frames 1201 to 1203 to each other. For example, the connection blocks 132 and 133 shown in FIGS. 9B and 10B may connect the four support frames 1211 to 1214 to each other.

When connecting the connection block 130 and the plurality of support frames 120 , a plurality of connection parts (221 to 223 in FIG. 4B , 231 to 233 in FIG. 9B , 241 to 243 in FIG. 10B ) of the connection block 130 and a plurality of A first sealing member ( 150 in FIG. 8 ) may be disposed between the supporting frames 120 of the . The first sealing member 150 may be a gasket, but is not limited thereto.

For example, with the first sealing member 150 interposed between the plurality of connection parts 221 to 223 , 231 to 233 , 241 to 243 of the connection block 130 and the plurality of support frames 120 , the fastening member (not shown) time), the plurality of support frames 120 may be fastened to the plurality of connection portions 221 to 223 , 231 to 233 , and 241 to 243 of the connection block 130 . The plurality of support frames 120 and the plurality of connection parts 221 to 223 , 231 to 233 , and 241 to 243 of the connection block 130 may be pressed toward each other by the fastening member. In this case, the support frame 120 presses one surface of the first sealing member 150 , and the connection parts 221 to 223 , 231 to 233 , and 241 to 243 of the connection block 130 are connected to the first sealing member 150 . ) by pressing the other surface, the connection block 130 and the support frame 120 can be completely sealed.

The plurality of panels 140 according to the embodiment may cover the plurality of open areas 191 to 194 formed by the connection of the plurality of support frames 120 . For example, the plurality of panels 140 may be fastened to the plurality of support frames 120 . That is, the plurality of panels 140 may be fastened to the plurality of support frames 120 using a fastening member.

For example, the panel 140 may be formed of a material having excellent strength. For example, the panel 140 may be formed of an uninterruptible PC (polycarbonate)-based or PVC (polyvinyl chloride)-based material.

When the plurality of panels 140 are fastened to the plurality of support frames 120 , second sealing members 161 to 164 may be disposed between the plurality of panels 140 and the plurality of support frames 120 . The second sealing members 161 to 164 may be O-rings.

For example, with the second sealing members 161 to 164 interposed between the plurality of panels 140 and the plurality of support frames 120 , the plurality of panels 140 is connected to the plurality of panels using a fastening member (not shown). It may be fastened to the support frame 120 . The plurality of panels 140 and the plurality of support frames 120 may be pressed toward each other by the fastening member. In this case, since the panel 140 presses one side of the second sealing members 161 to 164 and the support frame 120 presses the other side of the second sealing members 161 to 164, the panel 140 and support Between the frames 120 may be completely sealed.

Although not shown, a groove is formed in the support frame 120 , and the second sealing members 161 to 164 may be inserted into the groove.

For example, the two second sealing members 161 to 164 may be positioned on each support frame 120 . For example, the second-first sealing member 161 may be positioned on at least four support frames including a specific support frame (hereinafter, referred to as a first support frame group). For example, the 2-2 sealing member 162 may be positioned on another at least four support frames (hereinafter referred to as a second support frame group) including a specific support frame. In this case, the first panel is fastened to at least four support frames of the first support frame group via the 2-1 sealing member 161 , and the second panel adjacent to the first panel has a 2-2 sealing member It may be fastened to at least four support frames of the second support frame group via 162 .

In this way, all of the plurality of support frame groups formed by the plurality of support frames 120 are fastened to the plurality of panels 140 using the second sealing members 161 to 164 to support the panel 140 and support. Between the frames 120 may be sealed.

Hereinafter, assembly of the closed chamber 100 will be described.

First, the skeleton of the closed chamber 100 may be formed using the plurality of support frames 120 and the plurality of connection blocks 130 . For example, after disposing the connection block 130 between the support frames 120 , the support frame 120 may be fastened to the connection block 130 using a fastening member.

For example, by using the plurality of support frames 120 and the plurality of connection blocks 130 , the lowermost edge skeleton of the closed chamber 100 may be formed along the x-axis direction and the y-axis direction. Subsequently, the support frame 120 disposed along the z-axis direction may be fastened to each connection block 130 formed of the lowermost frame frame. Next, the connection block 130 is disposed at each end of the plurality of support frames 120 disposed along the z-axis direction, and the plurality of support frames 120 are disposed along the x-axis direction and the y-axis direction. , by fastening the plurality of support frames 120 to the corresponding connection block 130 to form a second frame skeleton spaced apart from the lowermost edge of the closed chamber 100 upward. In this way, the third and fourth frame frames may be formed up to a desired height. After the frame frame is formed to the desired height, the last frame frame, that is, the plurality of support frames 120 and the plurality of connection blocks 130 disposed in the x-axis direction and the y-axis direction in the uppermost frame frame, are fastened to each other, so that the ceiling A skeleton corresponding to can be formed.

Separately, the base plate 110 may be manufactured and disposed on the support plate 105 .

In addition, as described above, the frame frame formed by the coupling of the plurality of support frames 120 and the connection block 130 may be disposed on the base plate 110 .

Thereafter, the support plate 105 , the base plate 110 , and the plurality of support frames 120 may be fastened using a fastening member (not shown). For example, as shown in FIG. 15 , each of a plurality of fastening members (not shown) may pass through the support frame 120 and the base plate 110 to be fastened to the support frame 120 , but the present invention is not limited thereto. .

Thereafter, by fastening the plurality of panels 140 to the plurality of support frames 120 , the hermetic chamber 100 may be manufactured.

As another example, the plurality of panels 140 may be fastened to the plurality of support frames 120 of the corresponding edge skeleton before the frame skeleton formed by the plurality of support frames 120 is moved onto the base plate 110 . have.

As another example, the frame frame may be directly formed on the base plate 110 . After the base plate 110 is disposed on the support plate 105 , a frame frame may be formed by connecting the plurality of support frames 120 and the plurality of connection blocks 130 on the base plate 110 .

Hereinafter, a method of connecting the support frame 120 using the connecting blocks 130 having different shapes will be described.

4A is a perspective view illustrating a closed chamber according to an embodiment, and FIG. 4B is a first exemplary view of a connection block shown in area A of the sealed chamber of FIG. 4A . Fig. 5 is a front view showing the sealed chamber including the connection block of the first exemplary view. FIG. 6 is an enlarged view illustrating area A in FIG. 5 , and FIG. 7 is a cross-sectional view taken along line X-X′ in FIG. 6 .

4A to 7 , the connection block 131 may be used to connect the three support frames 1201 to 1203 .

The connection block 131 may include a groove part 220 , a first connection part 221 , a second connection part 222 , and a third connection part 223 .

For example, the groove 220 may have an inside shape. For example, the first connection part 221 may be disposed on the first shaft and connected to the first support frame 1201 . For example, the second connection part 222 may be disposed on the second shaft and connected to the second support frame 1202 . For example, the third connection part 223 may be disposed on the third shaft and connected to the third support frame 1203 . The first axis may be an x-axis, the second axis may be a y-axis perpendicular to the first axis, and the third axis may be a z-axis perpendicular to each of the first and second axes.

The first to third connecting portions 221 to 223 may be integrally formed. The first to third connection parts 221 to 223 may contact the groove part 220 . For example, the first side 222a of the second connection part 222 may contact the first side 221a of the first connection part 221 . The first side 223a of the third connection part 223 is in contact with the second side 221b of the first connection part 221 , and the second side 223b of the third connection part 223 is connected to the second connection part 222 . may be in contact with the second side 222b of

The first connection part 221 may have a surface perpendicular to each of the second connection part 222 and the third connection part 223 . The second connection part 222 may have a surface perpendicular to each of the first connection part 221 and the third connection part 223 . The third connection part 223 may have a surface perpendicular to each of the first connection part 221 and the second connection part 222 .

For example, the first connection part 221 has one surface in contact with the first support frame 1201 , the second connection part 222 has one surface in contact with the second support frame 1202 , and the third connection part 223 . may have a surface in contact with the third support frame 1203 . Accordingly, the first support frame 1201 is in contact with one surface of the first connection part 221 in a face-to-face manner, and the second support frame 1202 is in contact with one surface of the second connection part 222 in a face-to-face manner, and the third The support frame 1203 may be in contact with one surface of the third connection part 223 in a face-to-face manner.

For example, the first sealing member 150 may be disposed between each of the first to third connection parts 221 to 223 of the connection block 131 and the first to third support frames 1201 to 1203 . Accordingly, when each of the first to third connection parts 221 to 223 of the connection block 131 and the first to third support frames 1201 to 1203 are fastened by the fastening member, the connecting block 131 is fastened by the fastening member. ) of the first to third connection parts 221 to 223 and the first to third support frames 1201 to 1203, the first sealing member 150 is compressed, and the connection block 131 by the fastening member. Each of the first to third connection parts 221 to 223 and the first to third support frames 1201 to 1203 may be sealed.

For example, a 1-1 sealing member is disposed between the first connection part 221 and the first support frame 1201 , and a 1-2 sealing member is disposed between the second connection part 222 and the second support frame 1202 . is disposed, and the 1-3 sealing member may be disposed between the third connection part 223 and the third support frame 1203 .

For example, the first sealing member 150 may be a gasket. For example, the first sealing member 150 may have a sheet shape. For example, the first sealing member 150 may be formed of a material having excellent elastic properties. For example, the first sealing member 150 may be formed of a silicon-based material.

For example, one surface of the gasket may be in contact with one surface of each of the first to third connection parts 221 to 223 , and the other surface of the gasket may be in contact with one surface of the first to third support frames 1201 to 1203 . Accordingly, both the first to third connecting portions 221 to 223 and the first to third supporting frames 1201 to 1203 press the gasket face-to-face, thereby further improving sealing performance.

For example, the

second sealing members

171 and 172 may be disposed on the first to third support frames 1201 to 1203 coupled to the first to third panels. When the first to third panels are fastened to the first to third support frames 1201 to 1203 using the fastening member, by the first to third panels and the first to third support frames 1201 to 1203 As the

second sealing members

171 and 172 are compressed, spaces between the first to third panels and the first to third support frames 1201 to 1203 may be sealed. The

second sealing members

171 and 172 may be O-rings, but the present invention is not limited thereto.

For example, a plurality of holes 251 to 254 may be formed in each of the first to third connection parts 221 to 223 of the connection block 131 . For example, a plurality of holes 261 to 264 may be formed in the first sealing member 150 , that is, the gasket.

When the first sealing member 150 is disposed on the first to third connection parts 221 to 223 of the connection block 131 , the plurality of holes 261 to 264 of the first sealing member 150 are formed in the first The plurality of holes 251 to 254 of the to third connection parts 221 to 223 may be positioned in the same way. Accordingly, after the fastening member passes through the plurality of holes 251 to 254 of the first to third connecting parts 221 to 223 and the plurality of holes 261 to 264 of the first sealing member 150 , the first to It may be fastened to the third support frames 1201 to 1203.

Although a plurality of holes 261 to 263 are formed in the first sealing member 150 to penetrate the fastening member, the first sealing member 150 is formed in a sheet shape to form the first to third connecting parts 221 to 223 and the first sealing member 150 . Since the first to third support frames 1201 to 1203 are in face-to-face contact, the first to third connecting portions 221 to 223 and the first to third support frames 1201 to 1203 may be completely sealed. .

Although not shown, a plurality of holes for fixing the first sealing member 150 to the first to third connecting parts 221 to 223 may be formed in the first sealing member 150 .

FIG. 9A is a perspective view illustrating the hermetic chamber according to the embodiment, and FIG. 9B is a second exemplary view of a connection block shown in area B of the hermetically sealed chamber of FIG. 9A.

Referring to FIGS. 9A and 9B , the connection block 132 may be used to connect the four support frames 1211 to 1214 .

The connection block 132 may include a groove part 230 , a first connection part 231 , a second connection part 232 , a third connection part 233 , and a fourth connection part 234 .

For example, the groove portion 230 may have an inside shape. For example, the first connection part 231 may be disposed on the first shaft and connected to the first support frame 1211 . The first axis may be a y-axis. For example, the second connection part 232 may be disposed on the second shaft to be connected to the second support frame 1212 . The second axis may be a y-axis. For example, the third connection part 233 may be disposed on the third shaft and connected to the third support frame 1213 . The third axis may be the x-axis. The first axis, the second axis, and the third axis may be perpendicular to each other. For example, the fourth connection part 234 may be disposed to face the first connection part 231 to be connected to the fourth support frame 1214 . The fourth connection part 234 may be disposed to be spaced apart from the first connection part 231 with the groove part 230 interposed therebetween.

The first to fourth connecting portions 231 to 234 may be integrally formed. The first to fourth connecting portions 231 to 234 may be in contact with the groove portion 230 . For example, the first side of the second connection part 232 may be in contact with the first side of the first connection part 231 . The first side of the third connection part 233 may be in contact with the second side of the first connection part 231 , and the second side of the third connection part 233 may be in contact with the second side of the second connection part 232 . The first side of the fourth connection part 234 may be in contact with the third side of the second connection part 232 , and the second side of the fourth connection part 234 may be in contact with the third side of the third connection part 233 .

The first connection part 231 may have a surface perpendicular to each of the second connection part 232 and the third connection part 233 and parallel to the fourth connection part 234 . The second connection part 232 may have a surface perpendicular to each of the first connection part 231 and the third connection part 233 . The third connection part 233 may have a surface perpendicular to each of the first connection part 231 and the second connection part 232 .

For example, the first connection part 231 may have one surface in contact with the first support frame 1211 , and the second connection part 232 may have one surface in contact with the second support frame 1212 . For example, the third connection part 233 may have one surface in contact with the third support frame 1213 , and the fourth connection part 234 may have one surface in contact with the fourth support frame 1214 . Accordingly, the first support frame 1211 may be in face-to-face contact with one surface of the first connection part 231 , and the second support frame 1212 may be in contact with one surface of the second connection part 232 in a face-to-face manner. In addition, the third support frame 1213 may be in face-to-face contact with one surface of the third connecting part 233 , and the fourth support frame 1214 may be in face-to-face contact with one surface of the fourth connecting part 234 .

For example, the first sealing member 150 may be disposed between each of the first to fourth connection parts 231 to 234 of the connection block 132 and the first to fourth support frames 1211 to 1214 . Accordingly, when each of the first to fourth connection parts 231 to 234 of the connection block 132 and the first to fourth support frames 1211 to 1214 are fastened by the fastening member, the connecting block 132 by the fastening member ) of the first to fourth connection parts 231 to 234 and the first to fourth support frames 1211 to 1214, the first sealing member 150 is compressed, and the connection block 132 by the fastening member. Each of the first to fourth connection parts 231 to 234 and the first to fourth support frames 1211 to 1214 may be sealed.

For example, a 1-1 sealing member is disposed between the first connection part 231 and the first support frame 1211 , and a 1-2 sealing member is disposed between the second connection part 232 and the second support frame 1212 . can be placed. For example, a 1-3 sealing member is disposed between the third connection part 233 and the third support frame 1213 , and a 1-4 sealing member is disposed between the fourth connection part 234 and the fourth support frame 1214 . can be placed.

For example, the first sealing member 150 may be a gasket. This gasket may have the same shape as the gasket shown in FIG. 8 , but is not limited thereto.

For example, the first sealing member 150 may have a sheet shape. For example, the first sealing member 150 may be formed of a material having excellent elastic properties. For example, the first sealing member 150 may be formed of a silicon-based material.

For example, one surface of the gasket may be in contact with one surface of each of the first to fourth connection parts 231 to 234 , and the other surface of the gasket may be in contact with one surface of the first to fourth support frames 1211 to 1214 . Accordingly, both the first to fourth connecting portions 231 to 234 and the first to fourth support frames 1211 to 1214 press the gasket face-to-face, thereby further improving sealing performance.

For example, second sealing members ( 171 and 172 of FIG. 7 ) may be disposed on the first to fourth support frames 1211 to 1214 coupled to the first to fourth panels 1511 to 1514 . When the first to fourth panels 1511 to 1514 are fastened to the first to fourth support frames 1211 to 1214 using a fastening member, the first to fourth panels 1511 to 1514 and the first to fourth As the

second sealing members

171 and 172 are compressed by the fourth support frames 1211 to 1214, the first to fourth panels 1511 to 1514 and the first to fourth support frames 1211 to 1214 are sealed. can be The

second sealing members

171 and 172 may be O-rings, but the present invention is not limited thereto.

For example, a plurality of holes 271 to 274 may be formed in each of the first to fourth connection parts 231 to 234 of the connection block 132 . For example, a plurality of holes ( 261 to 264 in FIG. 8 ) may be formed in the first sealing member 150 , that is, the gasket.

When the first sealing member 150 is disposed on the first to fourth connection portions 231 to 234 of the connection block 132 , the plurality of holes 261 to 264 of the first sealing member 150 are formed in the first The plurality of holes 271 to 274 of the to fourth connecting parts 231 to 234 may be positioned in the same way. Accordingly, after the fastening member passes through the plurality of holes 271 to 274 of the first to fourth connecting parts 231 to 234 and the plurality of holes 261 to 264 of the first sealing member 150, the first to It may be fastened to the fourth support frames 1211 to 1214 .

Although a plurality of holes 261 to 263 are formed in the first sealing member 150 to penetrate the fastening member, the first sealing member 150 is formed in a sheet shape to form the first to fourth connecting parts 231 to 234 and the first sealing member 150 . Since the first to fourth support frames 1211 to 1214 are in face-to-face contact, the first to fourth connecting portions 231 to 234 and the first to fourth support frames 1211 to 1214 may be completely sealed. .

Although not shown, a plurality of holes for fixing the first sealing member 150 to the first to fourth connecting parts 231 to 234 may be formed in the first sealing member 150 .

10A is a perspective view illustrating a closed chamber according to an embodiment, and FIG. 10B is a third exemplary view of a connection block shown in region C of the sealed chamber of FIG. 10A . 11 is a front view illustrating a closed chamber including a connection block of the third exemplary view, and FIG. 12 is an enlarged view illustrating area D in FIG. 11 .

10A to 12 , the connection block 133 may be used to connect the four support frames 1221 to 1224 .

The connection block 133 may include a groove part 240 , a first connection part 241 , a second connection part 242 , a third connection part 243 , a fourth connection part 244 , and a dummy part 245 .

For example, the groove portion 240 may have an inside shape. For example, the first connection part 241 may be disposed on the first shaft and connected to the first support frame 1221 . The first axis may be a y-axis. For example, the second connection part 242 may be disposed on the second shaft and connected to the second support frame 1222 . The second axis may be a z-axis. For example, the third connection part 243 may be disposed to face the first connection part 241 . The fourth connection part 244 may be disposed to face the second connection part 242 . The first axis and the second axis may be perpendicular to each other.

The first to fourth connecting portions 241 to 244 may be integrally formed. The first to fourth connecting portions 241 to 244 may be in contact with the groove portion 240 . For example, the first side 242a of the second connection part 242 is in contact with the first side 241a of the first connection part 241, and the first side 243a of the third connection part 243 is connected to the second connection part ( The second side 242b of 242 may be in contact. The first side 244a of the fourth connection portion 244 is in contact with the second side 243b of the third connection portion 243 , and the second side 244b of the fourth connection portion 244 is connected to the first connection portion 241 . may be in contact with the second side 241b of

The first connection part 241 may have a surface perpendicular to each of the second connection part 242 and the fourth connection part 244 and parallel to the third connection part 243 . The second connection part 242 may have a surface perpendicular to each of the first connection part 241 and the third connection part 243 and parallel to the fourth connection part 244 .

For example, the first connection part 241 may have a surface in contact with the first support frame 1221 , and the second connection part 242 may have a surface in contact with the second support frame 1222 . For example, the third connection part 243 may have a surface in contact with the third support frame 1223 , and the fourth connection part 244 may have a surface in contact with the fourth support frame 1224 . Accordingly, the first support frame 1221 may be in face-to-face contact with one surface of the first connection part 241 , and the second support frame 1222 may be in contact with one surface of the second connection part 242 in a face-to-face manner. In addition, the third support frame 1223 may be in face-to-face contact with one surface of the third connection part 243 , and the fourth support frame 1224 may be in contact with one surface of the fourth connection part 244 in a face-to-face manner.

The dummy part 245 may be in contact with each of the first to fourth connecting parts 241 to 244 . The groove portion 240 may be formed by the first to fourth connecting portions 241 to 244 and the dummy portion 245 . The dummy part 245 may be a bottom part of the groove part 240 . The dummy part 245 may be in contact with the inner space of the hermetic chamber 100 . That is, the inside of the hermetic chamber 100 may be blocked from the outside by the dummy part 245 .

The dummy part 245 may have a quadrangular shape having first to third sides. In this case, the first side of the dummy part 245 may contact the third side of the first connection part 241 , and the second side of the dummy part 245 may contact the third side of the second connection part 242 . The third side of the dummy part 245 may contact the third side of the third connection part 243 , and the fourth side of the dummy part 245 may contact the third side of the fourth connection part 244 .

For example, the first sealing member 150 may be disposed between each of the first to fourth connection parts 241 to 244 of the connection block 133 and the first to fourth support frames 1221 to 1224 . Accordingly, when each of the first to fourth connection parts 241 to 244 of the connection block 133 and the first to fourth support frames 1221 to 1224 are fastened by the fastening member, the connecting block 133 by the fastening member ) of the first to fourth connection parts 241 to 244 and the first to fourth support frames 1221 to 1224 respectively, the first sealing member 150 is compressed, and the connection block 133 by the fastening member. Each of the first to fourth connection parts 241 to 244 and the first to fourth support frames 1221 to 1224 may be sealed.

For example, a 1-1 sealing member is disposed between the first connection part 241 and the first support frame 1221 , and a 1-2 sealing member is disposed between the second connection part 242 and the second support frame 1222 . can be placed. For example, a 1-3 sealing member is disposed between the third connection part 243 and the third supporting frame 1223 , and a 1-4 sealing member is disposed between the fourth connection part 244 and the fourth supporting frame 1224 . can be placed.

For example, one surface of the gasket may be in contact with one surface of each of the first to fourth connection parts 241 to 244 , and the other surface of the gasket may be in contact with one surface of the first to fourth support frames 1221 to 1224 . Accordingly, both the first to fourth connecting portions 241 to 244 and the first to fourth support frames 1221 to 1224 press the gasket face-to-face, thereby further improving sealing performance.

For example, the second sealing members 161 to 164 may be disposed on the first to fourth support frames 1221 to 1224 coupled to the first to fourth panels 1521 to 1524 . When the first to fourth panels 1521 to 1524 are fastened to the first to fourth support frames 1221 to 1224 using a fastening member, the first to fourth panels 1521 to 1524 and the first to fourth As the second sealing members 161 to 164 are compressed by the 4 support frames 1221 to 1224, the first to fourth panels 1521 to 1524 and the first to fourth support frames 1221 to 1224 are sealed. can be The second sealing members 161 to 164 may be O-rings, but is not limited thereto.

For example, a plurality of holes 281 to 284 may be formed in each of the first to fourth connection parts 241 to 244 of the connection block 133 . For example, a plurality of holes ( 261 to 264 in FIG. 8 ) may be formed in the first sealing member 150 , that is, the gasket.

When the first sealing member 150 is disposed on the first to fourth connection portions 241 to 244 of the connection block 133 , the plurality of holes 261 to 264 of the first sealing member 150 are formed in the first The plurality of holes 281 to 284 of the to fourth connecting portions 241 to 244 may be positioned in the same manner. Accordingly, after the fastening member passes through the plurality of holes 281 to 284 of the first to fourth connecting parts 241 to 244 and the plurality of holes 261 to 264 of the first sealing member 150 , the first to It may be fastened to the fourth support frames 1221 to 1224 .

Although a plurality of holes 261 to 263 are formed in the first sealing member 150 to penetrate the fastening member, the first sealing member 150 is formed in a sheet shape to form the first to fourth connecting parts 241 to 244 and the first sealing member 150 . Since the first to fourth support frames 1221 to 1224 are in face-to-face contact, the first to fourth connecting portions 241 to 244 and the first to fourth support frames 1221 to 1224 may be completely sealed. .

Although not shown, a plurality of holes for fixing the first sealing member 150 to the first to fourth connecting parts 241 to 244 may be formed in the first sealing member 150 .

13 is an exploded perspective view illustrating a base plate, and FIG. 14 is an exploded perspective view of the second sub-plate and the third sub-plate of FIG. 13 .

13 and 14 , the base plate 110 may include a plurality of sub-plates 111 to 115 .

The base plate 110 may be disposed on the support plate 105 to seal the lower side of the hermetic chamber 100 . The base plate 110 may be formed of a lightweight material having excellent strength. For example, the base plate 110 may be formed of aluminum or an aluminum alloy, but is not limited thereto.

The plurality of sub-plates 111 to 115 may be fastened to each other using a fastening member (not shown).

For example, one side of the sub-plates 111 to 115 has a first extension 1110 having a lower side extending in the lateral direction, and the other side of the sub-plates 111 to 115 has a second upper side extending in the lateral direction. It may have an extension 1120 .

In this case, the first extension portion 1110 of one sub-plate 112 of the adjacent sub-plates and the second extension portion 1120 of the other sub-plate 113 may vertically overlap each other. Accordingly, an overlapping region in which the first extension 1110 and the second extension 1120 overlap may be formed.

The first extension 1110 of one sub-plate 112 and the second extension 1120 of the other sub-plate 113 may be fastened using a fastening member. At this time, for sealing between the first extension part 1110 of one sub-plate 112 and the second extension part 1120 of the other sub-plate 113, the first extension part of one sub-plate 112 is The fourth sealing member 180 may be disposed between the second extension part 1120 of the sub-plate 113 and the other sub-plate 113 . That is, a space between the first extension part 1110 of one sub-plate 112 and the second extension part 1120 of the other sub-plate 113 may be sealed by the fourth sealing member.

For example, a groove 117 may be formed on the second extension 1120 of the sub-plate 113 . The fourth sealing member may be inserted into the groove 117 . When the fourth sealing member is inserted into the groove 117 , the upper surface of the fourth sealing member may protrude higher than the upper surface of the second extension part 1120 . By pressing the first extension portion 1110 of one sub-plate 112 using a fastening member, the fourth sealing member 180 is pressed against the first extension portion 1110 of one sub-plate 112 to form one A space between the first extension 1110 of the sub-plate 112 and the second extension 1120 of the other sub-plate 113 may be completely sealed.

Meanwhile, a groove 116 may be formed along the outer edge of the base plate 110 . A third sealing member ( 170 of FIG. 15 ) may be disposed in the groove 116 . For example, one side of the third sealing member 170 may be inserted into the groove 116 , and the other side of the third sealing member 170 may protrude higher than the upper surface of the base plate 110 .

Referring to FIG. 15 , a plurality of support frames 1332 constituting the lowermost skeleton may be coupled to the base plate 110 and the support plate 105 .

The support frames 1331 and 1332 disposed in different axial directions may be connected to each other by the connection block 131 .

For example, when the plurality of support frames 1332 and the base plate 110 constituting the lowermost frame frame are fastened using a fastening member (not shown), the plurality of support frames 1332 and the base plate 110 are attached to each other. Accordingly, the third sealing member 170 may be compressed to completely seal between the plurality of support frames 1332 and the base plate 110 .

For example, the fastening member may pass through the support plate 105 and the base plate 110 to be fastened to the support frame 1332 .

As another example, the support plate 105 and the base plate 110 may be fastened using one fastening member, and the base plate 110 and the support frame 1332 may be fastened using another fastening member.

When the base plate 110 is pressed by the fastening member, the third sealing member 170 disposed on the base plate 110 is compressed by the base plate 110 and the support plate 105 to support the plurality of supports. A space between the frame 1332 and the base plate 110 may be completely sealed.

16 shows the sealing test results.

After the closed chamber 100 according to the embodiment was manufactured, a pressure test was performed. That is, the leakage pressure fluctuation when the inside of the sealed chamber 100 was pressurized at a pressure of 1 kPa for 1 hour was measured.

As shown in FIG. 16 , it can be seen that the leakage pressure fluctuation is within 0.25 kPa throughout 1 hour, which means that it is completely sealed.

The above detailed description should not be construed as restrictive in all respects and should be considered as exemplary. The scope of the embodiments should be determined by a reasonable interpretation of the appended claims, and all modifications within the equivalent scope of the embodiments are included in the scope of the embodiments.

The embodiment may be applied to fields that must be kept in a specific gas atmosphere by being blocked from the outside. For example, the embodiment may be applied to a semiconductor or display field, but is not limited thereto.

Claims

base plate;

a plurality of support frames on the base plate:

a plurality of connection blocks connecting the plurality of support frames;

a plurality of panels covering an open area between the plurality of support frames; and

and a first sealing member disposed between the plurality of support frames and the plurality of connection blocks.

sealed chamber.
According to claim 1,

The first sealing member is in contact with each of the support frame and the connection block in a face-to-face manner.

sealed chamber.
According to claim 1,

The first sealing member is a gasket

sealed chamber.
According to claim 1,

The first sealing member has a sheet shape

sealed chamber.
According to claim 1,

The first sealing member is formed of a silicon-based material.

sealed chamber.
According to claim 1,

The first sealing member,

groove; and

It is disposed in contact with the groove portion, comprising at least three or more connecting portions connected to at least three or more support frames

sealed chamber.
7. The method of claim 6,

Each of the at least three or more connecting parts is connected to the at least three or more support frames via the first sealing member.

sealed chamber.
7. The method of claim 6,

The at least three or more connecting portions include first to third connecting portions,

The first connection portion is disposed on a first shaft,

The second connection part is disposed on a second axis perpendicular to the first axis,

The third connection part is disposed on a third axis perpendicular to each of the first axis and the second axis.

sealed chamber.
7. The method of claim 6,

The at least three or more connecting portions include first to fourth connecting portions,

The first connection portion is disposed on a first shaft,

The second connection part is disposed on a second axis perpendicular to the first axis,

The third connection part is disposed on a third axis perpendicular to each of the first axis and the second axis,

The fourth connection part is disposed to face the first connection part

sealed chamber.
7. The method of claim 6,

The at least three or more connecting portions include first to fourth connecting portions,

The first connection portion is disposed on a first shaft,

The second connection part is disposed on a second axis perpendicular to the first axis,

The third connection part is disposed to face the first connection part,

The fourth connection part is disposed to face the second connection part

sealed chamber.
11. The method of claim 10,

The first sealing member,

Further comprising a dummy portion disposed on a third axis in contact with each of the first to fourth connection portions and perpendicular to each of the first axis and the second axis

sealed chamber.
According to claim 1,

and a second sealing member disposed between the plurality of support frames and the plurality of panels.

sealed chamber.
13. The method of claim 12,

and a third sealing member disposed between the plurality of support frames and the base plate.

sealed chamber.
14. The method of claim 13,

The base plate includes a groove 116 disposed along the perimeter of the upper surface,

The third sealing member is disposed in the groove.

sealed chamber.
14. The method of claim 13,

The base play includes a plurality of sub-plates,

and a fourth sealing member disposed between the plurality of sub-plates.

sealed chamber.
16. The method of claim 15,

The sub-plate includes a groove disposed along a longitudinal direction of an overlapping region overlapping with an adjacent sub-plate,

The fourth sealing member is disposed in the groove.

sealing member.
16. The method of claim 15,

The first to third sealing members are O-rings.

sealed chamber.
According to claim 1,

a support plate under the base plate;

sealed chamber.