WO2020130090A1

WO2020130090A1 - Light irradiation device for light exposure device

Info

Publication number: WO2020130090A1
Application number: PCT/JP2019/049905
Authority: WO
Inventors: 芳幸吉本
Original assignee: 株式会社ブイ・テクノロジー
Priority date: 2018-12-21
Filing date: 2019-12-19
Publication date: 2020-06-25
Also published as: TW202032285A

Abstract

The present invention comprises: a support body (58) comprising a plurality of cassettes (55) that have light source units (51) attached to light source support units (54), said plurality of cassettes (55) being attached to cassette support units (56); and an exhaust device (76) that cools the plurality of light source units (51). The output of the exhaust device (76) is controlled on the basis of the temperature detected by a temperature sensor (75) for a dummy light source unit (71), such that the temperature of the light source units (51) is within a prescribed temperature range. As a result, the temperature of light source units can be controlled within an appropriate range and deterioration in performance of or damage to the light source units can be suppressed, using a simple mechanism.

Description

Light irradiation device for exposure equipment

The present invention relates to a light irradiation device for an exposure device, and more particularly to a light irradiation device for an exposure device having a cooling mechanism that cools a light source unit.

In a multi-lamp type light irradiation device equipped with a plurality of lamps used in an exposure device, the light irradiation device tends to reach a high temperature due to heat generation of the lamp, and in order to maintain the lamp performance, each lamp is properly It is necessary to control the temperature. The temperature of the lamp is determined by the balance between the amount of heat generated by the lamp itself and the cooling performance of the lamp cooling mechanism. Also,
Since the lamp is a consumable item, in order to maintain the illuminance of the lamp, it is necessary to increase the amount of power supplied to the lamp according to the usage time. The amount of heat generated by the lamp itself is approximately proportional to the amount of power supplied to the lamp. Therefore, in order to maintain the temperature of the lamp within a certain range, the cooling performance of the cooling mechanism is also controlled approximately in proportion to the amount of power. There is a need to.

As shown in FIG. 9, a conventional air-cooling type cooling mechanism 100 draws in air on the upstream side of a lamp 102 by a blower 101, passes the air inside the lamp 102 to cool the lamp 102, and then exhausts it to the outside. There is. For the temperature of the lamp 102, the air volume used for cooling is indirectly obtained from the air velocity detected by the Pitot tube 103, and the air volume of the blower 101 is controlled by a control device (not shown).

Also, various light irradiation devices for exposure apparatuses equipped with a cooling mechanism are disclosed (for example, refer to Patent Documents 1 and 2). Patent Document 1 discloses a light irradiation device for an exposure apparatus in which a plurality of heat radiation fins are arranged along the outer peripheral edge on the front surface side of a cassette to which a plurality of light source units can be attached, and the light source unit is cooled by heat radiation from the heat radiation fins. It is disclosed. In Patent Document 2, a predetermined number of light source units are attached to a cassette to form a unit, the cassette is further attached to a support body including a forced exhaust unit (blower), and the lamp is cooled by cooling air from the forced exhaust unit. At the same time, there is disclosed a light irradiation apparatus for an exposure apparatus, which shortens the lamp replacement time and the apparatus downtime.

Japanese Patent Laid-Open No. 2012-177799 Japanese Patent Laid-Open No. 2015-172775

However, in the case of the cooling mechanism 100 that cools the lamp 102 with the cooling air, the temperature of the lamp 102 may not be appropriately managed unless the temperature and the amount of the cooling air that actually passes through the lamp 102 are constantly monitored. .. For example, as shown in FIG. 9, when the wind speed of the exhaust gas is detected by the Pitot tube 103 arranged on the outlet side of the cooling mechanism 100, unexpected air flow (gap between the lamp 102 and the Pitot tube 103) occurs. If there is wind, the amount of cooling air that has actually passed through the lamp 102 is not detected, and the temperature of the lamp 102 cannot be controlled appropriately. Further, even when the temperature of the air taken into the cooling mechanism 100 is different from the assumed temperature, it acts as a disturbance factor that makes the temperature of the lamp 102 unstable.

Also, in Patent Document 1 and Patent Document 2, although lamp cooling is performed by heat radiation from the radiation fins or forced exhaustion means, there is no mention of properly managing the temperature of the lamp.

The present invention has been made in view of the above-described problems, and an object thereof is an exposure apparatus capable of controlling the temperature of a light source unit within an appropriate range by a simple mechanism to suppress performance deterioration and damage of the light source unit. It is to provide a light irradiation device for use.

The above object of the present invention is achieved by the following configurations.
(1) A plurality of light source units each including a light emitting unit and a reflective optical system that emits light emitted from the light emitting unit with directivity.
A plurality of cassettes having a plurality of light source support parts capable of mounting a predetermined number of the light source parts,
A support having a plurality of cassette support parts to which the plurality of cassettes can be attached;
A cooling mechanism for cooling the plurality of light source units,
A light irradiation apparatus for an exposure apparatus, comprising:
A temperature sensor for acquiring the temperature of the light source unit,
A light irradiation device for an exposure apparatus, which controls the output of the cooling mechanism so that the temperature of the light source unit falls within a predetermined temperature range based on the temperature detected by the temperature sensor.
(2) A plurality of light source units each including a light emitting unit and a reflective optical system that emits light emitted from the light emitting unit with directivity.
A dummy light source unit including the reflective optical system, a heating element arranged inside the reflective optical system, and a thermocouple for measuring the temperature of the heating element;
A plurality of cassettes having a plurality of light source support portions to which a predetermined number of the light source portions and the dummy light source portions can be attached respectively,
A support having a plurality of cassette support parts to which the plurality of cassettes can be attached;
A light irradiation device for an exposure apparatus, comprising:

According to the light irradiation device for an exposure apparatus of the present invention, the output of the cooling mechanism is controlled so that the temperature of the light source unit falls within a predetermined temperature range based on the temperature detected by the temperature sensor. By controlling the temperature within an appropriate range, it is possible to suppress performance deterioration and damage of the light source unit.

Further, according to another light irradiation apparatus for an exposure apparatus of the present invention, by providing a dummy light source unit including a heating element and a thermocouple inside the reflective optical system, it is possible to separately process the cassette and the support. It is possible to manage the temperatures of a plurality of light source units.

FIG. 3 is a front view of the exposure apparatus according to the first embodiment of the present invention. It is a figure which shows the structure of the illumination optical system shown in FIG. FIG. 3 is a front view of the light irradiation device shown in FIG. 2. It is a perspective view of the cassette which comprises a light irradiation apparatus. It is sectional drawing of a light source part. It is sectional drawing of a dummy light source part. It is sectional drawing which shows the structure of a cooling mechanism. It is a front view of the light irradiation device which concerns on 2nd Embodiment of this invention. It is a block diagram which shows the structure of the conventional cooling mechanism.

Hereinafter, each embodiment of the light irradiation apparatus for an exposure apparatus according to the present invention will be described in detail with reference to the drawings.

(First embodiment)
As shown in FIG. 1, the proximity exposure apparatus PE uses a mask M smaller than a work W as a material to be exposed, holds the mask M on a mask stage (mask support portion) 1, and holds the work W on a work stage (workpiece). By holding the mask M and the work W in close proximity to each other with a predetermined exposure gap, the illumination optical system 3 irradiates the mask M with light for pattern exposure. The pattern of the mask M is exposed and transferred onto the work W. Further, the work stage 2 is moved stepwise in the biaxial directions of the X-axis direction and the Y-axis direction with respect to the mask M, and the exposure transfer is performed for each step.

In order to move the work stage 2 stepwise in the X-axis direction, an X-axis stage feed mechanism 5 that moves the X-axis feed table 5a in the X-axis step is installed on the device base 4. On the X-axis feed table 5a of the X-axis stage feed mechanism 5, a Y-axis stage feed mechanism 6 for step-moving the Y-axis feed table 6a in order to move the work stage 2 in the Y-axis direction is installed. Has been done. The work stage 2 is installed on the Y-axis feed table 6 a of the Y-axis stage feed mechanism 6. The work W is held on the upper surface of the work stage 2 in a state of being vacuum-sucked by a work chuck or the like. A substrate side displacement sensor 15 for measuring the height of the lower surface of the mask M is arranged on the side of the work stage 2. Therefore, the substrate side displacement sensor 15 is movable in the X and Y axis directions together with the work stage 2.

A plurality of (four in the illustrated embodiment) X-axis linear guide guide rails 31 are arranged on the device base 4 in the X-axis direction, and each guide rail 31 has a lower surface of the X-axis feed table 5a. A slider 32 fixed to the bridge is straddled. As a result, the X-axis feed table 5 a is driven by the first linear motor 20 of the X-axis stage feed mechanism 5 and can reciprocate in the X-axis direction along the guide rail 31. A plurality of guide rails 33 of Y-axis linear guides are arranged in the Y-axis direction on the X-axis feed table 5a, and sliders 34 fixed to the lower surface of the Y-axis feed table 6a are provided on the respective guide rails 33. Is straddled. As a result, the Y-axis feed table 6a is
It is driven by the second linear motor 21 of the Y-axis stage feed mechanism 6 and can reciprocate in the Y-axis direction along the guide rail 33.

Between the Y-axis stage feed mechanism 6 and the work stage 2, since the work stage 2 is moved in the vertical direction, the vertical coarse movement device 7 and the vertical coarse movement device 7 having relatively large positioning resolution but large movement stroke and movement speed, and the vertical coarse movement. A vertical fine movement device 8 is provided which can perform positioning with a higher resolution than the device 7 and finely moves the work stage 2 up and down to finely adjust the gap between the facing surfaces of the mask M and the work W to a predetermined amount. ..

The vertical coarse movement device 7 moves the work stage 2 up and down with respect to the fine movement stage 6b by an appropriate drive mechanism provided on the fine movement stage 6b described later. The stage coarse movement shafts 14 fixed at four positions on the bottom surface of the work stage 2 are engaged with the linear motion bearings 14a fixed to the fine movement stage 6b, and are guided in the vertical direction with respect to the fine movement stage 6b. It should be noted that the vertical coarse movement device 7 preferably has high repetitive positioning accuracy even if the resolution is low.

The vertical fine movement device 8 is provided with a fixed base 9 fixed to the Y-axis feed base 6a, and a guide rail 10 of a linear guide attached to the fixed base 9 with its inner end side inclined obliquely downward. A nut (not shown) of a ball screw is connected to a slide body 12 that reciprocates along the guide rail 10 via a slider 11 that is bridged over the guide rail 10, and an upper end surface of the slide body 12 is Is slidably in contact with a flange 12a fixed to the fine movement stage 6b in the horizontal direction.

Then, when the screw shaft of the ball screw is rotationally driven by the motor 17 attached to the fixed base 9, the nut, the slider 11 and the slide body 12 are integrally moved in an oblique direction along the guide rail 10, and thereby, The flange 12a slightly moves up and down.
The vertical fine movement device 8 may drive the slide body 12 by a linear motor instead of driving the slide body 12 by the motor 17 and the ball screw.

The vertical fine movement device 8 is installed at one end side (left end side in FIG. 1) in the Y-axis direction of the Z-axis feed table 6a, and two at the other end side, a total of three units, each of which is independently driven and controlled. It has become so. As a result, the vertical fine movement device 8 independently finely adjusts the heights of the flanges 12a at the three positions based on the measurement results of the gap amounts between the mask M and the work W at the plurality of positions by the gap sensor 27, and the work stage 2 Finely adjust the height and inclination of.
If the height of the work stage 2 can be sufficiently adjusted by the fine vertical movement device 8, the vertical coarse movement device 7 may be omitted.

Further, on the Y-axis feed table 6a, a bar mirror 19 that faces the Y-axis laser interferometer 18 that detects the position of the work stage 2 in the Y direction, and an X-axis laser that detects the position of the work stage 2 in the X-axis direction. A bar mirror (both not shown) facing the interferometer is installed. The bar mirror 19 facing the Y-axis laser interferometer 18 is arranged along the X-axis direction on one side of the Y-axis feed base 6a, and the bar mirror facing the X-axis laser interferometer is of the Y-axis feed base 6a. It is arranged along the Y-axis direction at one end side.

The Y-axis laser interferometer 18 and the X-axis laser interferometer are always arranged so as to face the corresponding bar mirrors and supported by the device base 4. Two Y-axis laser interferometers 18 are installed apart from each other in the X-axis direction. The two Y-axis laser interferometers 18 detect the Y-axis position and the yawing error of the Y-axis feed table 6a and by extension, the work stage 2 via the bar mirror 19. Further, the X-axis laser interferometer detects the position in the X-axis direction of the X-axis feed table 5a and eventually the work stage 2 via the facing bar mirror.

The mask stage 1 is inserted into a mask base frame 24 formed of a substantially rectangular frame body and a central opening of the mask base frame 24 through a gap, and is inserted in the X, Y, and θ directions (in the X, Y plane). The mask base frame 24 is movably supported, and the mask base frame 24 is held at a fixed position above the work stage 2 by a column 4a protruding from the apparatus base 4.

A frame-shaped mask holder 26 is provided on the lower surface of the central opening of the mask frame 25. That is, a plurality of mask holder suction grooves connected to a vacuum suction device (not shown) are provided on the lower surface of the mask frame 25, and the mask holder 26 sucks the mask frame 25 through the plurality of mask holder suction grooves. Retained.

On the lower surface of the mask holder 26, a plurality of mask suction grooves (not shown) for sucking the peripheral portion of the mask M on which the mask pattern is not drawn are formed, and the mask M passes through the mask suction grooves. It is detachably held on the lower surface of the mask holder 26 by a vacuum suction device (not shown).
The X-axis stage feed mechanism 5, the Y-axis stage feed mechanism 6, the vertical coarse movement device 7, and the vertical fine movement device 8 are driven under the control of the control unit 90.

As shown in FIG. 2, the illumination optical system 3 of the exposure apparatus PE of the present embodiment is arranged on the light irradiation device 50, a plane mirror 81 for changing the direction of the optical path EL, and on the downstream side of the plane mirror 81. An optical filter 82 including a plurality of cells, an exposure control shutter unit 83 that controls opening and closing of an irradiation light path, and a fly including a plurality of lens elements arranged on the downstream side of the exposure control shutter unit 83 and arranged in a matrix. An eye lens 84, a plane mirror 85 for changing the direction of the optical path EL emitted from the fly-eye lens 84, a collimation mirror 86 for irradiating the light from the light irradiation device 50 as parallel light, and a mask M for the parallel light. And a plane mirror 87 that irradiates the light toward the.

In the illumination optical system 3, when the exposure control shutter unit 83 is controlled to be opened during exposure, the light emitted from the light irradiation device 50 is reflected by the plane mirror 81, and the fly-eye lens 84 is passed through the optical filter 82. Is incident on the incident surface of. The fly-eye lens 84 is used to make the incident light a illuminance distribution as uniform as possible on the irradiation surface. Then, the light emitted from the exit surface of the fly-eye lens 84 is changed in its traveling direction by the plane mirror 85, the collimation mirror 86, and the plane mirror 87, and is converted into parallel light.
Then, the parallel light is irradiated as light for pattern exposure substantially perpendicularly to the surface of the mask M held by the mask stage 1 and further the surface of the work W held by the work stage 2, and the pattern of the mask M is changed. It is exposed and transferred onto the work W.

As shown in FIGS. 3, 4 and 7, in the light irradiation device 50, a plurality of light source units 51 and a predetermined number of the light source units 51 among the plurality of light source units 51 are attached to each light source support unit 54. A plurality of cassettes 55, and a plurality of cassettes 55, and a support member 58 attached to each cassette support portion 56. A support cover 57 that covers the rear portion of each cassette 55 and forms a closed space S on the back side of each cassette 55 is fixed to the support 58.

The number of light source units 51 that the light irradiation device 50 should have depends on the type (generation) of the flat panel to be manufactured. Here, as shown in FIGS. 3 and 4, the cassette 55 has a total of 20 light source support portions 54 in five rows in the α direction and four rows in the β direction, and the support body 58 has three rows. It has a total of nine cassette support portions 56 of ×3 stages. Therefore, in the present embodiment, the light irradiation device 50 is capable of arranging a total of 180 light source units 51, and the light emitted from each light source unit 51 is arranged in a substantially spherical shape so as to gather at the fly-eye lens 84. Has been done. However, in the present embodiment, among the 180 light source support portions 54 of the cassette 55 attached to the support body 58 shown in FIG. 3, the four light source support portions 54 arranged at the four corners of the support body 58 have an apparent appearance. A dummy light source unit 71, which will be described later, is formed to have substantially the same shape as the other light source units 51.

As shown in FIG. 7, in the closed space S of the support cover 57, there is nothing that blocks the flow of air in the closed space S other than the reflection mirror 53 of the light source unit 51, and good air flowability is obtained. Given. An exhaust device 76, which is a cooling mechanism, is connected to the support cover 57 to exhaust the air in the closed space S to the outside.

As shown in FIG. 5, the light source unit 51 includes a light emitting unit 52 for irradiating ultraviolet rays, such as a high pressure mercury lamp, and a reflecting mirror as a reflection optical system that emits light generated from the light emitting unit 52 with directivity. 53 and an insulator 59 to which the light emitting unit 52 and the reflecting mirror 53 are attached.

The light emitting unit 52 is connected to both ends of the arc tube 62, which is an ellipsoidal arc tube 62 in which an anode (anode) 60 and a cathode (cathode) 61, which are a pair of electrodes, face each other. , And a pair of

side tube portions

63 and 64 extending along the longitudinal axis of the pair of

electrodes

60 and 61. A halogen gas, mercury, starting argon, and the like are enclosed in the internal space of the arc tube portion 62, and the pair of

side tube portions

63 and 64 seal the internal space of the arc tube portion 62.

The side tube portion 64 is inserted into the insertion hole 65 provided in the reflecting mirror 53 with a gap g, and one end thereof is fixed to the insulator 59. A gap g between the side tube portion 64 and the insertion hole 65 of the reflecting mirror 53 communicates with the outside through a notch portion 66 provided in the insulator 59.

Then, as shown in FIG. 7, the air in the closed space S of the support body cover 57 that covers the rear portion of each cassette 55 is exhausted to the outside by the exhaust device 76 that is a cooling mechanism. Air is taken in from the side and flows through the gap g between the side tube portion 64 and the insertion hole 65 of the reflecting mirror 53 to cool each light source portion 51.

As shown in FIG. 6, the four dummy light source parts 71 arranged at the four corners of the light irradiation device 50 are provided with a dummy arc tube part 72 having the same shape as the light source part 51, a reflecting mirror 53, and an insulator 59. Inside the dummy arc tube portion 72, a heating element 74 such as an electric resistance is arranged in place of the anode (anode) 60 and the cathode (cathode) 61. That is, the dummy light source unit 71 does not emit the light for UV irradiation.

Further, a temperature sensor 75 such as a thermocouple is attached to the dummy light emitting tube portion 72 of the dummy light source portion 71 so that the temperature of the dummy light emitting tube portion 72 can be measured. The temperatures of the light source unit 51 and the dummy light source unit 71 depending on the supplied power are measured in advance when the light irradiation device 50 is shipped. Thereby, for example, when a predetermined power is supplied, the temperature of the light emitting tube portion 62 of the light emitting portion 52 is 800° C., the temperature of the heating element 74 of the dummy light source portion 71 is 100° C., and so on. Is given. Further, this correlation is stored in the storage unit or the like in the control unit 90.

By approximating the shape of the dummy light source section 71 to the shape of the light source section 51, the accuracy of the correlation between the temperatures of the light source section 51 and the dummy light source section 71 is improved.

In this way, by measuring the temperature of the dummy light source unit 71 by the temperature sensor 75, the temperature of the light source unit 51 can be indirectly obtained. Then, based on the temperature of the dummy light source unit 71 measured by the temperature sensor 75, the control unit 90 controls the rotation speed of the exhaust device 76, that is, the exhaust amount, so that the temperature of the light source unit 51 falls within a predetermined range. To control.

In this embodiment, the dummy light source units 71 are arranged in the four cassettes 55. For this reason, in the closed space S, when the flow volume can be adjusted by changing the size of the flow path depending on the position, even if the air volume passing through the light source unit 51 in the region where the temperature is high is increased. Good. That is, a partition whose size can be adjusted may be provided behind each cassette 55 to adjust the size of the flow path at each position.
That is, in the present embodiment, the exhaust amount of the exhaust device 76 may be controlled on the basis of the average temperature of the four dummy light source units 71, but the flow passage of the flow path is changed according to each temperature of the four dummy light source units 71. The size may be adjusted to control the temperatures of the plurality of light source units 51 to be uniform.
Further, in the present embodiment, in addition to the above-described control based on the average temperature, at least one of the upper limit temperature and the lower limit temperature of the four dummy light source units 71 is set, and the temperature of any one dummy light source unit 71 becomes the upper limit temperature. When it reaches, the cooling is strengthened to lower the overall temperature, and when the temperature of any one of the dummy light source units 71 reaches the lower limit temperature, the cooling is weakened to raise the overall temperature. Good.

It is possible to control the temperature of the light source unit 51 within a predetermined range by attaching a temperature sensor to each light emitting unit 52 and controlling the rotation speed of the exhaust device 76 based on the measured value of the temperature sensor. However, replacement of the light emitting unit 52 integrated with the temperature sensor requires adjustment of the temperature sensor after replacement, and replacement on site without a dedicated adjusting device is difficult. Further, the replacement work requires a large number of man-hours, and the light irradiation device 50 must be stopped during that time, which is not preferable because the productivity is reduced.

As described above, in the light irradiation device 50 of the present embodiment, the temperature of the light source unit 51 is indirectly obtained from the temperature measured by the temperature sensor 75 installed in the dummy light source unit 71, and the temperature of the light source unit 51 falls within a predetermined range. Since the air volume of the cooling air is controlled so that it is inside, it is possible to suppress the performance deterioration and the damage due to the temperature rise of the light source unit 51.
Further, the dummy light source unit 71 includes a heating element 74 and a temperature sensor 75, and is detachably attached to the light source support unit 54 of the cassette 55 that detachably supports the light source unit 51. Therefore, the dummy light source unit 71 can be used as it is even when the plurality of light source units 51 are replaced, and can be easily replaced with another cassette 55. That is, by using the dummy light source unit 71, workability can be improved as compared with the case where the temperature sensor 75 is attached to the light source unit 51.

(Second embodiment)
Next, the light irradiation device for an exposure apparatus of the second embodiment will be described with reference to FIG. FIG. 8 is a front view of the light irradiation device according to the second embodiment of the present invention.

As shown in FIG. 8, in the light irradiation device 50A of the present embodiment, openings are formed at four corners 80a of the outer frame part 80 around the plurality of cassette support parts 56 of the support 58, and the openings are formed. In addition, a temperature sensor unit 79 in which the heating element 74 of the first embodiment and a temperature sensor 75 such as a thermocouple are unitized is arranged. The temperature sensor unit 79 may be the dummy light source unit 71 of the first embodiment. Also in this case, the temperature of the light emitting tube portion 62 of the light emitting portion 52 and the temperature of the heating element 74 of the temperature sensor unit 79 are measured in advance when a predetermined power is applied, and the correlation between the temperatures is grasped. I'll do it.
Accordingly, the temperatures of the plurality of light source units 51 can be managed without reducing the number of light source units 51.
Other parts are the same as those of the light irradiation device 50 for the exposure apparatus of the first embodiment of the present invention.

As a modified example of the present embodiment, only the temperature sensors may be provided at the four corners 80a of the support 58. However, in this case, it is necessary to grasp the correlation between the temperature of the temperature sensor and the temperature of the predetermined light source unit 51 in advance. For example, by grasping the correlation between the temperature of the central light source 51, which tends to rise in temperature, and the temperature of the temperature sensor, the light source 51, which tends to rise in temperature, can be reliably cooled.

It should be noted that the present invention is not limited to the above-described respective embodiments, and modifications, improvements, etc. can be appropriately made.
For example, the number of temperature sensors is not limited to four, and at least one may be provided in the light irradiation device 50, and it is arbitrary as long as a good correlation with the temperature of the light source unit can be secured. When the dummy light source unit is arranged in the cassette, the dummy light source unit is arranged at a position where the influence on the exposure is as small as possible (for example, the corner of the irradiation area formed by the plurality of light source units 51 as in the present embodiment). Is preferred.

Further, the closed space S exhausted by the exhaust device 76 is not limited to the space formed by the support body 58 and the support body cover 57 of the above-described embodiment, but is, for example, a space formed by a housing that surrounds the illumination optical system 3. May be

As described above, the following items are disclosed in this specification.
(1) A plurality of light source units each including a light emitting unit and a reflective optical system that emits light emitted from the light emitting unit with directivity.
A plurality of cassettes having a plurality of light source support parts capable of mounting a predetermined number of the light source parts,
A support having a plurality of cassette support parts to which the plurality of cassettes can be attached;
A cooling mechanism for cooling the plurality of light source units,
A light irradiation apparatus for an exposure apparatus, comprising:
A temperature sensor for acquiring the temperature of the light source unit,
A light irradiation device for an exposure apparatus, which controls the output of the cooling mechanism so that the temperature of the light source unit falls within a predetermined temperature range based on the temperature detected by the temperature sensor.
According to this configuration, the output of the cooling mechanism is controlled so that the temperature of the light source unit falls within a predetermined temperature range based on the temperature detected by the temperature sensor, so that performance deterioration and damage of the light source unit are suppressed. be able to.

(2) On the light source supporting portion of the cassette, the reflection optical system, a heating element arranged inside the reflection optical system, and a thermocouple constituting the temperature sensor for measuring the temperature of the heating element. The light irradiation device for an exposure apparatus according to (1), to which a dummy light source unit including is attached.
According to this configuration, the temperatures of the plurality of light source units can be managed without separately processing the cassette or the support.

(3) The light irradiation device for an exposure apparatus according to (1), wherein the temperature sensor is attached to the support.
According to this configuration, the temperatures of the plurality of light source units can be managed without reducing the number of light source units.

(4) The light irradiation device for an exposure apparatus according to (3), wherein the support is provided with a heating element whose temperature is measured by the temperature sensor.
With this configuration, the temperatures of the plurality of light source units can be controlled by the temperature of the heat generating element provided on the support.

(5) The light irradiation device for an exposure apparatus according to any one of (1) to (4), wherein the temperature of the temperature sensor and the temperature of the light source section are correlated with each other.
According to this configuration, the temperature of the light source unit can be accurately grasped.

(6) A plurality of light source units each including a light emitting unit and a reflective optical system that emits light emitted from the light emitting unit with directivity.
A dummy light source unit including the reflective optical system, a heating element arranged inside the reflective optical system, and a thermocouple for measuring the temperature of the heating element;
A plurality of cassettes having a plurality of light source support portions to which a predetermined number of the light source portions and the dummy light source portions can be attached, respectively.
A support having a plurality of cassette support parts to which the plurality of cassettes can be attached;
And a light irradiation device for an exposure device.
With this configuration, it is possible to manage the temperatures of the plurality of light source units without separately processing the cassette or the support.

(7) The light irradiation device for an exposure apparatus according to (6), wherein the temperature of the heating element and the temperature of the light source section are correlated with each other.
According to this configuration, the temperature of the light source unit can be accurately grasped.

The present application is based on the Japanese patent application (Japanese Patent Application No. 2018-239345) filed on December 21, 2018, the contents of which are incorporated by reference in the present application.

50, 50A Exposure apparatus light irradiation device 51 Light source unit 52 Light emitting unit 53 Reflecting mirror (reflection optical system)
54 light source support 55 cassette 56 cassette support 58 support 71 dummy light source 74 heat generator 75 temperature sensor (thermocouple)
76 Exhaust device (cooling mechanism)

Claims

A light emitting unit, and a plurality of light source units each including a reflective optical system that emits light emitted from the light emitting unit with directivity,
A plurality of cassettes having a plurality of light source support parts capable of mounting a predetermined number of the light source parts,
A support having a plurality of cassette support parts to which the plurality of cassettes can be attached;
A cooling mechanism for cooling the plurality of light source units,
A light irradiation apparatus for an exposure apparatus, comprising:
A temperature sensor for acquiring the temperature of the light source unit,
A light irradiation device for an exposure apparatus, which controls the output of the cooling mechanism so that the temperature of the light source unit falls within a predetermined temperature range based on the temperature detected by the temperature sensor.
The light source support portion of the cassette includes the reflective optical system, a heating element disposed inside the reflective optical system, and a thermocouple that constitutes the temperature sensor and measures the temperature of the heating element. The light irradiation device for an exposure apparatus according to claim 1, wherein a dummy light source unit is attached.
The light irradiation device for an exposure apparatus according to claim 1, wherein the temperature sensor is attached to the support.
The light irradiation device for an exposure apparatus according to claim 3, wherein a heating element whose temperature is measured by the temperature sensor is provided on the support.
The light irradiation apparatus for an exposure apparatus according to any one of claims 1 to 4, wherein the temperature of the temperature sensor and the temperature of the light source section are correlated with each other.
A light emitting unit, and a plurality of light source units each including a reflective optical system that emits light emitted from the light emitting unit with directivity,
A dummy light source unit including the reflective optical system, a heating element arranged inside the reflective optical system, and a thermocouple for measuring the temperature of the heating element;
A plurality of cassettes having a plurality of light source support portions to which a predetermined number of the light source portions and the dummy light source portions can be attached, respectively.
A support having a plurality of cassette support parts to which the plurality of cassettes can be attached;
And a light irradiation device for an exposure device.
The light irradiation apparatus for an exposure apparatus according to claim 6, wherein the temperature of the heating element and the temperature of the light source section are correlated with each other.