WO2019131846A1 - Grinding method and grinding device - Google Patents
Grinding method and grinding device Download PDFInfo
- Publication number
- WO2019131846A1 WO2019131846A1 PCT/JP2018/048065 JP2018048065W WO2019131846A1 WO 2019131846 A1 WO2019131846 A1 WO 2019131846A1 JP 2018048065 W JP2018048065 W JP 2018048065W WO 2019131846 A1 WO2019131846 A1 WO 2019131846A1
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- Prior art keywords
- polishing
- grinding
- grinding fluid
- diamond
- grindstone
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/007—Cleaning of grinding wheels
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
Definitions
- the present invention relates to a polishing method and a polishing apparatus using a hard grindstone such as a diamond grindstone or a CBN grindstone.
- the diamond grindstone is obtained by bonding diamond abrasive grains with a binder, and is a hard grindstone as compared to a conventional grindstone using aluminum oxide or the like. Further, as a hard grindstone, there is a CBN grindstone.
- the CBN grinding wheel is a hard grinding wheel using cubic Boron Nitride which is a compound consisting of boron and nitrogen.
- the diamond grindstone and the CBN grindstone described above are widely used from a conventional work to a work made of a super alloy such as, for example, Inconel (registered trademark).
- a super alloy such as, for example, Inconel (registered trademark).
- clogging occurs in the grindstone.
- one layer of the clogged polishing surface is scraped off by a diamond dresser or the like.
- the workpiece is polished while the liquid exudes from the inside of the rotating polishing tool during polishing and / or the liquid is sprayed onto the polishing tool from the outside of the polishing tool.
- Patent Document 1 See, for example, Patent Document 1.
- the abrasive powder causing the clogging firmly intrudes between the diamond abrasive grains and exudes the liquid. It is difficult to suppress clogging only by polishing the work while spraying and / or spraying liquid onto the polishing tool from the outside of the polishing tool.
- the present invention provides a polishing method and a polishing apparatus capable of suppressing clogging of a polishing surface such as a diamond grindstone.
- the polishing method is a polishing method for polishing a workpiece made of a super alloy while rotating a diamond grinding wheel formed by bonding diamond abrasive grains with a binder, and the diamond for polishing the workpiece It is characterized in that the work is polished while spraying a high-pressure grinding fluid while changing a part to be sprayed on the polishing surface of the grindstone.
- the grinding fluid when polishing, the grinding fluid is sprayed with a high pressure to the polishing surface (abrasive grain surface) while changing the spray site, so that the abrasive powder that causes clogging is washed away, and dressing
- the polishing operation can be continued for a long time without performing
- the number of dressings can be reduced.
- the grinding fluid is mainly used for the purpose of suppressing clogging removal and clogging of the abrasive grain surface of the grinding stone, but also acts as a coolant for cooling the abrasive grain surface.
- purified water is used as an example.
- the diamond grinding stone is separated at a high pressure of 8 MPa or more and 50 MPa or less at a position different from the position where the grinding fluid grinds the workpiece, 1 mm to 20 mm away from the direction orthogonal to the grinding surface. It is desirable to spray on the polished surface.
- the spouting position of the grinding fluid is approximately 5 mm away from the direction orthogonal to the polishing surface.
- spraying of the grinding fluid is linear injection with an injection angle of 0 degrees or injection with an injection angle of 15 degrees or less.
- high pressure spraying of the grinding fluid is possible.
- the spray area to the abrasive surface becomes larger by adding the injection angle.
- polishing surface when providing an injection angle, 5 mm or less is preferable.
- polishing surface of the said diamond grindstone is a high voltage
- the diamond grinding wheel has an annular polishing surface having a fixed length in the radial direction, and a portion to which the grinding fluid is sprayed to the polishing surface is an inner diameter side portion in the radial direction. It is desirable to rock between the outer diameter side portion.
- high-pressure grinding fluid can be sprayed over the abraded portion of the diamond wheel where the workpiece is abraded.
- the portion to which the grinding fluid is sprayed to the polishing surface may be reciprocated in the radial direction between the inner diameter side portion and the outer diameter side portion. In this way, when the work is large, high-pressure grinding fluid can be sprayed on the entire polishing surface regardless of the inner diameter side portion and the outer diameter side portion. If the size of the work is small, the portion to which the grinding fluid is sprayed may be fixed.
- the work is polished while supplying the coolant to the polishing surface separately from the high-pressure grinding fluid sprayed onto the polishing surface of the diamond grindstone.
- grinding can be performed while cooling the grindstone and the work, and cooling liquid intervenes on the ground surface of the grindstone and the work to enable smooth grinding.
- purified water is used as the high-pressure grinding fluid, and purified water after being used as the grinding fluid is used as the coolant.
- purified water without using a liquid with impurities such as ground water and tap water in the high-pressure grinding fluid, it is possible to suppress the existence of foreign matter in the pump, the nozzle, etc. Life span is extended.
- the coolant since the coolant is used without passing through a high pressure nozzle or the like, the used grinding fluid may be used.
- you may use as a cooling fluid.
- this polishing method is carbonized by combining a CBN whetstone, or an aluminous-based whetstone formed by bonding aluminous-based abrasive grains with a binder instead of the diamond whetstone, or a silicon carbide-based abrading grain with a binder.
- the present invention is also applicable to the case of using a silicon-based grindstone.
- a polishing apparatus is a polishing apparatus for polishing a workpiece made of a super alloy while rotating a diamond grinding wheel formed by bonding diamond abrasive grains with a binder, and the above-mentioned diamond is used during polishing.
- Grinding fluid spraying means for spraying grinding fluid at high pressure from a direction perpendicular to the polishing surface on the grinding surface of the grinding wheel through a nozzle is provided, and the grinding fluid spraying means is a nozzle that changes the spraying location of the grinding fluid by moving the nozzle. It is characterized by having a moving means.
- the nozzle that sprays the high-pressure grinding fluid sprays on the polishing surface while changing the spraying site, so that the polishing powder that tends to adhere to the polishing surface is washed away evenly, and the polishing operation is performed for a long period of time Can continue.
- the diamond grinding wheel has an annular polishing surface having a fixed length in the radial direction
- the nozzle moving means performs the polishing at a position different from the polishing position for polishing the workpiece.
- the nozzle is swung between the inner diameter side and the outer diameter side in the radial direction with respect to the surface.
- the portion to which the grinding fluid is sprayed to the polishing surface may be configured to be reciprocally movable between the inner diameter side portion and the outer diameter side portion in the radial direction. In this way, when the work is large, high-pressure grinding fluid can be sprayed on the entire polishing surface regardless of the inner diameter side portion and the outer diameter side portion. If the size of the work is small, the portion to which the grinding fluid is sprayed may be fixed.
- the grinding fluid spraying means can spray the grinding fluid at a high pressure of 8 MPa or more and 50 MPa or less. In this way, clogging can be significantly suppressed as compared with the conventional polishing apparatus.
- the nozzle is a nozzle in which the spray of the grinding fluid is a linear injection with an injection angle of 0 degrees or an injection with an injection angle of 15 degrees or less.
- the spray of the grinding fluid is a linear injection with an injection angle of 0 degrees or an injection with an injection angle of 15 degrees or less.
- the pressure sprayed by the grinding fluid spraying means is a high pressure of 10 MPa or more and 15 MPa or less. This is desirable not only in terms of the workability of the polishing operation but also in terms of cost.
- the polishing apparatus further comprises means for supplying a coolant to the polishing surface separately from the high-pressure grinding fluid sprayed onto the polishing surface of the diamond grindstone.
- the polishing apparatus may use purified water as the high-pressure grinding fluid and use purified water after being used as the grinding fluid in the coolant.
- this polishing apparatus is carbonized by combining a CBN whetstone, an aluminous-based whetstone formed by bonding aluminous-based abrasive grains with a binder instead of the diamond whetstone, or a silicon carbide-based abrading grains with a binder.
- the present invention is also applicable to the case of using a silicon-based grindstone.
- a high pressure grinding fluid is sprayed to the polishing surface (abrasive grain surface) while changing a portion to be sprayed, so clogging occurs. It is possible to wash away the abrasive powder causing the cause and continue the polishing operation for a long time without dressing. Therefore, it is possible to reduce the number of operations for removing one layer of the polishing surface (abrasive particle surface) clogged by the diamond dresser. In particular, not only spraying with high pressure, but also spraying while changing the site to be sprayed, it is possible to wash out clogging evenly.
- FIG. 1 It is a figure showing a schematic structure of a polish device concerning one embodiment of the present invention. It is a front view of the whetstone used for the above-mentioned polish device. It is a figure which shows schematic structure of the grinding
- FIG. 1 is a view showing a schematic configuration of a polishing apparatus according to an embodiment of the present invention.
- FIG. 2 is a front view of a rotary grindstone used in a polishing apparatus.
- the polishing apparatus 1 has a disc-shaped rotary grindstone 2 rotatably supported, and the rotary grindstone 2 has a binder of diamond abrasive grains around a core metal 2a.
- a diamond grindstone 2b to be bonded is provided.
- the rotary grindstone 2 is rotated at a constant speed around the horizontal rotation axis, and the polishing surface 2ba which is the side surface of the rotary grindstone 2 is made of superalloy such as Inconel (registered trademark).
- the workpiece W (for example, a cylindrical member or a cylindrical member) is polished.
- the polishing apparatus 1 is provided with a grinding fluid spraying means 3 for spraying a high-pressure grinding fluid from the direction perpendicular to the polishing surface 2ba to the polishing surface 2ba in parallel with the grindstone 2 during polishing.
- a grinding fluid spraying means 3 for spraying a high-pressure grinding fluid from the direction perpendicular to the polishing surface 2ba to the polishing surface 2ba in parallel with the grindstone 2 during polishing.
- purified water containing a rust inhibitor, surfactant and the like and subjected to concentration control is used as the grinding fluid.
- polishing surface 2ba of the grindstone 2 is a high pressure of 8 Mpa or more and 50 Mpa or less (preferably 10 Mpa or more and 15 Mpa or less).
- the spraying direction by the nozzle 3 is orthogonal to the polishing surface 2ba, it may be inclined.
- the grinding fluid spraying means 3 has a thin nozzle 3a connected to a pump (not shown), thereby enabling high pressure grinding fluid to be jetted. Further, the nozzle 3 a of the grinding fluid spraying means 3 is configured to be swingable with respect to the polishing surface 2 ba of the grindstone 2. By swinging the nozzle 3a of the grinding fluid spraying means 3, it becomes possible to spray the grinding fluid on a predetermined range of the polishing surface 2ba.
- the grinding liquid spraying position P1 by the grinding liquid spraying means 3 is set to a position different from the w-work grinding position P2 for grinding the work W.
- the grinding fluid spray position P1 is at the lower position
- the workpiece polishing position P2 is at the upper position.
- the abrasive powder generated by spraying the grinding fluid on the grinding surface 2 ba flows downward, and the workpiece W is polished on the abrasive surface 2 ba from which the abrasive powder has been removed.
- the apparatus 1 when the work W is polished by the polishing surface 2ba while rotating the disc-shaped rotary grindstone 2, the abrasive powder attached to the polishing surface 2ba of the rotary grindstone 2 is washed away by the high pressure grinding fluid While, the work W can be polished. This makes it possible to polish the work efficiently while suppressing clogging by the abrasive powder.
- the spraying of the grinding fluid is performed at the grinding fluid spraying position P1 different from the workpiece polishing position P2 for polishing the workpiece W, and the polishing powder adhering to the polishing surface 2ba is washed away, and the workpiece W is polished. There is no risk of interfering with work.
- the grinding fluid is sprayed while moving at a high pressure of 8 Mpa or more from a position about 5 mm away from the direction orthogonal to the polishing surface 2ba, the high pressure grinding fluid acts to dig out the polishing powder and the polishing powder acts to polish The abrasive powder is washed away by overcoming the force to adhere to the surface 2ba. Therefore, for a long period of time, it is not necessary to cut the abrasive grain surface clogged with the diamond dresser by one layer.
- the grinding fluid spraying means 3 is configured to be able to swing between the inner diameter side portion and the outer diameter side portion in the radial direction with respect to the polishing surface 2 ba of the rotary grindstone 2, polishing for polishing the workpiece W
- the grinding fluid can be sprayed uniformly at a high pressure of 8 MPa or more over the predetermined range of the surface 2ba.
- the rotary grindstone 2 is arranged to rotate around the horizontal rotation axis, but as shown in FIG. 3, it is arranged to rotate around the vertical rotation axis You may
- FIG. 5 is a view showing a schematic configuration of a polishing apparatus according to a modified embodiment.
- the same reference numerals are used for configurations common to the above embodiment.
- the main difference between the polishing apparatus 10 of this modification and the polishing apparatus 1 of the above embodiment is that the polishing apparatus 1 of the above embodiment has a configuration in which the grinding liquid spraying means 3 swings, whereas The polishing apparatus 10 is a nozzle moving means (not shown) in which the grinding fluid spraying means 30 linearly reciprocates the nozzle 30a from the inner diameter side portion to the outer diameter side portion in the radial direction with respect to the grinding surface 2ba of the grinding wheel 2 ) Is a point.
- the nozzle 30a of the grinding fluid spraying means 30 reciprocates from the inner diameter side portion to the outer diameter side portion of the grinding surface 2ba of the grinding wheel 2 and sprays a high-pressure grinding fluid to the entire grinding surface 2ba.
- the grinding wheel can be ground uniformly throughout.
- the workpiece when the workpiece is polished, the workpiece can be polished while washing away the polishing powder adhering to the entire polishing surface 2 ba, and efficient polishing can be performed. It is particularly suitable when the size of the work is large.
- FIG. 6 is a figure which shows schematic structure of the grinding device of embodiment of another modification.
- the disk-like work support board 40 is provided with its rotation axis eccentrically in the radial direction with respect to the rotation axis of the rotary grindstone 2, and the side surface of the work support board 40 on the rotary grindstone 2 side
- a plurality of works W are supported in the circumferential direction at regular intervals, and each work W is polished by the rotating whetstone 2 while rotating the work supporting disc 40 in a direction opposite to the rotating direction of the rotating whetstone 2, for example
- the polishing workability can also be enhanced by polishing the plurality of workpieces W together.
- the diamond grindstone is used as the grindstone, but the present invention can also be applied to a CBN (Borazon) grindstone, an alumina-based grindstone, a silicon carbide-based grindstone, and the like.
- the shape of the grindstone is not limited to the shape of the present embodiment, and a grindstone of another shape may be used (see, for example, FIG. 7).
- the side surface (plane) of a grindstone is used as a grinding
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Abstract
The present invention performs grinding wherein adhesion of machining dust to the abrasive grain surface of a diamond grindstone is prevented as much as possible. A grinding device (1) is for grinding a workpiece (W) made of a superalloy on the grinding surface (2ba) of a diamond grindstone (2b) of a grinding wheel (2) while rotating the grinding wheel (2). This grinding device is provided with an abrasion liquid spraying means (3) for spraying, on the grinding surface (2ba), a high-pressure abrasion liquid through a nozzle (3a) from a direction orthogonal to the grinding surface (2ba) so as to wash off grinding powder. The abrasion liquid spraying means (3) is disposed at an abrasion liquid spraying position (P1) different from a workpiece grinding position (P2) for grinding the workpiece (W). A nozzle (3a) of the abrasion liquid spraying means (3) is configured to oscillate.
Description
本発明は、ダイヤモンド砥石やCBN砥石などの硬質の砥石を用いた研磨方法及び研磨装置に関する。
The present invention relates to a polishing method and a polishing apparatus using a hard grindstone such as a diamond grindstone or a CBN grindstone.
ダイヤモンド砥石とは、ダイヤモンド砥粒をバインダーで結合したものであり、通常の酸化アルミニウムなどを用いた砥石に比べて硬質の砥石である。また、硬質の砥石として、CBN砥石がある。CBN砥石とは、ホウ素や窒素からなる化合物である立方晶窒化ホウ素(cubic Boron Nitride)を用いた硬質の砥石である。
The diamond grindstone is obtained by bonding diamond abrasive grains with a binder, and is a hard grindstone as compared to a conventional grindstone using aluminum oxide or the like. Further, as a hard grindstone, there is a CBN grindstone. The CBN grinding wheel is a hard grinding wheel using cubic Boron Nitride which is a compound consisting of boron and nitrogen.
上記したダイヤモンド砥石やCBN砥石は、従来のワークから例えばインコネル(登録商標)などの超合金からなるワークまで幅広く利用される。また、超合金のワークなどを研磨する場合など、砥石に目詰まりが生ずる。従来、そのような目詰まりが生じた場合は、研磨性能を回復させるために、ダイヤモンドドレッサーなどにより、目詰まりした研磨面(砥粒面)を1層削り取るようにしている。
The diamond grindstone and the CBN grindstone described above are widely used from a conventional work to a work made of a super alloy such as, for example, Inconel (registered trademark). In addition, when grinding a superalloy work or the like, clogging occurs in the grindstone. Conventionally, when such clogging occurs, in order to restore the polishing performance, one layer of the clogged polishing surface (abrasive grain surface) is scraped off by a diamond dresser or the like.
このような砥石は、従来の砥石に比べて高価であるため、ドレッサーによる削り取りを可能なかぎりせずに、できるだけ長期間に亘って研磨できるようにしたいという要求がある。
Since such a whetstone is expensive as compared with the conventional whetstone, there is a demand to be able to polish for as long as possible without cutting off with a dresser as much as possible.
ところで、研磨面の目詰まりを防止するために、研磨の際に回転中の研磨具の内側から液体を染み出させながら及び/又は研磨具の外側から液体を研磨具に吹き付けながらワークを研磨することが知られている(例えば、特許文献1参照)。
By the way, in order to prevent clogging of the polishing surface, the workpiece is polished while the liquid exudes from the inside of the rotating polishing tool during polishing and / or the liquid is sprayed onto the polishing tool from the outside of the polishing tool. (See, for example, Patent Document 1).
前述したようなダイヤモンド砥石等で、例えばインコネル(登録商標)などの超合金からなるワークを研磨する場合、目詰まりの原因となる研磨粉がダイヤモンド砥粒の間にしっかりと入り込み、液体を染み出させながら及び/又は研磨具の外側から液体を研磨具に吹き付けながらワークを研磨するだけでは、目詰まりを抑制することが困難である。
For example, when polishing a workpiece made of a super alloy such as Inconel (registered trademark) with a diamond grinding wheel or the like as described above, the abrasive powder causing the clogging firmly intrudes between the diamond abrasive grains and exudes the liquid. It is difficult to suppress clogging only by polishing the work while spraying and / or spraying liquid onto the polishing tool from the outside of the polishing tool.
本発明は、ダイヤモンド砥石などの研磨面の目詰まりを抑制できる研磨方法及び研磨装置を提供する。
The present invention provides a polishing method and a polishing apparatus capable of suppressing clogging of a polishing surface such as a diamond grindstone.
本発明に係る一の態様の研磨方法は、ダイヤモンド砥粒をバインダーで結合してなるダイヤモンド砥石を回転させながら、超合金からなるワークを研磨する研磨方法であって、前記ワークを研磨する前記ダイヤモンド砥石の研磨面に、吹き付ける部位を変えつつ高圧の研削液を吹き付けながら、前記ワークを研磨することを特徴とする。
The polishing method according to one aspect of the present invention is a polishing method for polishing a workpiece made of a super alloy while rotating a diamond grinding wheel formed by bonding diamond abrasive grains with a binder, and the diamond for polishing the workpiece It is characterized in that the work is polished while spraying a high-pressure grinding fluid while changing a part to be sprayed on the polishing surface of the grindstone.
このようにすれば、研磨する際に、研磨面(砥粒面)に対し高圧でもって研削液が、吹き付ける部位を変えながら吹き付けられるので、目詰まりを起こす原因となる研磨粉が洗い流され、ドレッシングを行うことなく、長期間に亘って研磨作業を継続することができる。よって、ドレッシングの回数を減らすことができる。とくに、高圧で吹き付けるだけでなく、吹き付ける部位を変えながら吹き付けるので、洗い流しをムラなく行うことができる。ここで、研削液は、主として砥石の砥粒面の目詰まり除去や目詰まりを抑制する目的で用いるが、あわせて、砥粒面を冷却する冷却液としても作用する。また、研削液には、一例として精製水を用いる。
In this way, when polishing, the grinding fluid is sprayed with a high pressure to the polishing surface (abrasive grain surface) while changing the spray site, so that the abrasive powder that causes clogging is washed away, and dressing The polishing operation can be continued for a long time without performing Thus, the number of dressings can be reduced. In particular, not only spraying with high pressure, but also spraying while changing the site to be sprayed, washing can be performed evenly. Here, the grinding fluid is mainly used for the purpose of suppressing clogging removal and clogging of the abrasive grain surface of the grinding stone, but also acts as a coolant for cooling the abrasive grain surface. For the grinding fluid, purified water is used as an example.
特に、上記したダイヤモンド砥粒を用いたダイヤモンド砥石の場合、ドレッシングを行うと、高価なダイヤモンド砥粒が多数存在する層を削除しなければならないため、コストが非常にかかっていた。また、ダイヤモンド砥粒は極めて硬度が高いため、通常の砥石のように、砥石の表面をメンテナンス用の砥石などで研削して、砥石の表面を削って研磨性能を回復させることが非常に困難であった。ダイヤモンド砥粒がメンテナンス用の砥石よりも硬いためである。そのため、ダイヤモンド砥石のメンテナンスは非常に困難であったところ、上記した本発明を用いることで、ダイヤモンド砥石の表面をダイヤモンド砥粒を研削せずとも回復させることができ、非常に画期的である。
In particular, in the case of the diamond grinding wheel using the above-mentioned diamond abrasive, when dressing is performed, it is necessary to remove a layer in which many expensive diamond abrasives are present, which is very costly. In addition, since the diamond abrasive grains have extremely high hardness, it is very difficult to grind the surface of the grinding wheel with a maintenance grinding wheel or the like to grind the surface of the grinding wheel and restore the polishing performance like a normal grinding wheel. there were. This is because the diamond abrasive is harder than the maintenance grindstone. Therefore, while the maintenance of the diamond grinding wheel was very difficult, the surface of the diamond grinding wheel can be recovered without grinding the diamond abrasive grains by using the above-described present invention, which is very revolutionary. .
また、この研磨方法は、前記研削液が、前記ワークを研磨する位置とは異なる位置で、前記研磨面に直交する方向から1mm~20mm離れて、8Mpa以上50MPa以下の高圧で、前記ダイヤモンド砥石の研磨面に吹き付けられることが望ましい。
Further, in this polishing method, the diamond grinding stone is separated at a high pressure of 8 MPa or more and 50 MPa or less at a position different from the position where the grinding fluid grinds the workpiece, 1 mm to 20 mm away from the direction orthogonal to the grinding surface. It is desirable to spray on the polished surface.
このようにすれば、研磨作業の作業性を損なうことなく、目詰まりを効果的に抑制することができる。ここで、前記研削液の噴出位置は、研磨面と直交する方向から5mm程度離れた位置であると、より効果的である。
In this way, clogging can be effectively suppressed without impairing the workability of the polishing operation. Here, it is more effective that the spouting position of the grinding fluid is approximately 5 mm away from the direction orthogonal to the polishing surface.
また、この研磨方法は、前記研削液の吹き付けが噴射角0度の直線噴射又は噴射角15度以内の噴射である。このようにすれば、研削液の高圧の吹き付けが可能となる。また、噴射角0度とすればより高圧となる一方、噴射角を付けることで砥面への吹き付け面積が大きくなる。なお、噴射角を付ける場合は、研磨面からの離間距離は5mm以内が好ましい。
Further, in this polishing method, spraying of the grinding fluid is linear injection with an injection angle of 0 degrees or injection with an injection angle of 15 degrees or less. In this way, high pressure spraying of the grinding fluid is possible. Moreover, while the pressure becomes higher when the injection angle is 0 degree, the spray area to the abrasive surface becomes larger by adding the injection angle. In addition, as for the separation distance from a grinding | polishing surface, when providing an injection angle, 5 mm or less is preferable.
また、この研磨方法は、前記ダイヤモンド砥石の研磨面に吹き付けられる圧力が10Mpa以上15MPa以下の高圧であることが好ましい。このようにすれば、研磨作業の作業性、コストの面からより望ましい。
Moreover, it is preferable that the pressure sprayed on the grinding | polishing surface of the said diamond grindstone is a high voltage | pressure of 10-15 Mpa as this grinding | polishing method. This is more desirable from the viewpoint of workability and cost of the polishing operation.
また、この研磨方法は、前記ダイヤモンド砥石が、半径方向に一定長さを有する環状の研磨面を有するもので、前記研磨面に対し前記研削液を吹き付ける部位を前記半径方向において、内径側部分と外径側部分との間で揺動させることが望ましい。
Further, in this polishing method, the diamond grinding wheel has an annular polishing surface having a fixed length in the radial direction, and a portion to which the grinding fluid is sprayed to the polishing surface is an inner diameter side portion in the radial direction. It is desirable to rock between the outer diameter side portion.
このようにすれば、高圧の研削液を、ダイヤモンド砥石におけるワークが研磨される研磨部分にわたり吹き付けることができる。なお、研磨面に対し研削液を吹き付ける部位を、半径方向において、内径側部分と外径側部分との間で往復移動させてもよい。このようにすれば、ワークが大きい場合に高圧の研削液を内径側部分、外径側部分にかかわりなく研磨面全体に吹き付けることができる。なお、ワークのサイズが小さい場合は、研削液を吹き付ける部位を固定させてもよい。
In this way, high-pressure grinding fluid can be sprayed over the abraded portion of the diamond wheel where the workpiece is abraded. The portion to which the grinding fluid is sprayed to the polishing surface may be reciprocated in the radial direction between the inner diameter side portion and the outer diameter side portion. In this way, when the work is large, high-pressure grinding fluid can be sprayed on the entire polishing surface regardless of the inner diameter side portion and the outer diameter side portion. If the size of the work is small, the portion to which the grinding fluid is sprayed may be fixed.
また、この研磨方法は、前記ダイヤモンド砥石の研磨面に吹き付ける高圧の研削液とは別に、前記研磨面に冷却液を供給しながら、前記ワークを研磨する。このようにすれば、砥石やワークを冷却しながら研磨できるとともに、砥石とワークの接地面に冷却液が介在してスムーズな研磨が可能となる。
Further, in this polishing method, the work is polished while supplying the coolant to the polishing surface separately from the high-pressure grinding fluid sprayed onto the polishing surface of the diamond grindstone. In this way, grinding can be performed while cooling the grindstone and the work, and cooling liquid intervenes on the ground surface of the grindstone and the work to enable smooth grinding.
また、この研磨方法は、前記高圧の研削液に精製水を用い、前記冷却液に前記研削液として使用された後の精製水を用いる。このようにすれば、高圧の研削液に地下水や水道水などの不純物が存在する液体を用いずに精製水を用いることで、ポンプやノズルなどに異物が介在することを抑制して、これらの寿命がのびる。一方、冷却液は高圧ノズル等を介さず使用するため、使用後の研削液を用いてもよい。なお、使用後の研削液を濾過した後に冷却液として用いてもよい。
In this polishing method, purified water is used as the high-pressure grinding fluid, and purified water after being used as the grinding fluid is used as the coolant. In this way, by using purified water without using a liquid with impurities such as ground water and tap water in the high-pressure grinding fluid, it is possible to suppress the existence of foreign matter in the pump, the nozzle, etc. Life span is extended. On the other hand, since the coolant is used without passing through a high pressure nozzle or the like, the used grinding fluid may be used. In addition, after filtering the used grinding fluid, you may use as a cooling fluid.
また、この研磨方法は、前記ダイヤモンド砥石にかえて、CBN砥石、又はアルミナ質系砥粒をバインダーで結合してなるアルミナ質系砥石、若しくは炭化けい素質系砥粒をバインダーで結合してなる炭化けい素質系砥石を用いた場合にも適用できる。
In addition, this polishing method is carbonized by combining a CBN whetstone, or an aluminous-based whetstone formed by bonding aluminous-based abrasive grains with a binder instead of the diamond whetstone, or a silicon carbide-based abrading grain with a binder. The present invention is also applicable to the case of using a silicon-based grindstone.
本発明に係る一の態様の研磨装置は、ダイヤモンド砥粒をバインダーで結合してなるダイヤモンド砥石を回転させながら、超合金からなるワークを研磨する研磨装置であって、研磨の際に、前記ダイヤモンド砥石の研磨面に、前記研磨面に直交する方向からノズルを通じて高圧で研削液を吹き付ける研削液吹き付け手段を備え前記研削液吹き付け手段は、前記ノズルを移動させることで研削液の吹き付け部位を変えるノズル移動手段を有することを特徴とする。
A polishing apparatus according to one aspect of the present invention is a polishing apparatus for polishing a workpiece made of a super alloy while rotating a diamond grinding wheel formed by bonding diamond abrasive grains with a binder, and the above-mentioned diamond is used during polishing. Grinding fluid spraying means for spraying grinding fluid at high pressure from a direction perpendicular to the polishing surface on the grinding surface of the grinding wheel through a nozzle is provided, and the grinding fluid spraying means is a nozzle that changes the spraying location of the grinding fluid by moving the nozzle. It is characterized by having a moving means.
このようにすれば、高圧の研削液を吹き付けるノズルが、研磨面に対し、吹き付ける部位を変えながら吹き付けるので、研磨面に付着しようとする研磨粉がムラなく洗い流され、長期間に亘って研磨作業を継続することができる。
In this way, the nozzle that sprays the high-pressure grinding fluid sprays on the polishing surface while changing the spraying site, so that the polishing powder that tends to adhere to the polishing surface is washed away evenly, and the polishing operation is performed for a long period of time Can continue.
また、この研磨装置は、前記ダイヤモンド砥石が、半径方向に一定長さを有する環状の研磨面を有するもので、前記ノズル移動手段は、前記ワークを研磨する研磨位置とは異なる位置で、前記研磨面に対し半径方向において、内径側部分と外径側部分との間で前記ノズルを揺動させるものであることが望ましい。
Further, in this polishing apparatus, the diamond grinding wheel has an annular polishing surface having a fixed length in the radial direction, and the nozzle moving means performs the polishing at a position different from the polishing position for polishing the workpiece. Preferably, the nozzle is swung between the inner diameter side and the outer diameter side in the radial direction with respect to the surface.
このようにすれば、高圧の研削液を、ダイヤモンド砥石におけるワークが研磨される研磨部分にわたり吹き付けることができ、効率のよい研磨を実現できる。なお、研磨面に対し研削液を吹き付ける部位を、半径方向において、内径側部分と外径側部分との間で往復移動可能な構成としてもよい。このようにすれば、ワークが大きい場合に高圧の研削液を内径側部分、外径側部分にかかわりなく研磨面全体に吹き付けることができる。なお、ワークのサイズが小さい場合は、研削液を吹き付ける部位を固定させてもよい。
In this way, high-pressure grinding fluid can be sprayed over the abraded portion of the diamond wheel where the workpiece is abraded, and efficient polishing can be realized. The portion to which the grinding fluid is sprayed to the polishing surface may be configured to be reciprocally movable between the inner diameter side portion and the outer diameter side portion in the radial direction. In this way, when the work is large, high-pressure grinding fluid can be sprayed on the entire polishing surface regardless of the inner diameter side portion and the outer diameter side portion. If the size of the work is small, the portion to which the grinding fluid is sprayed may be fixed.
また、この研磨装置は、前記研削液吹き付け手段が、8Mpa以上50MPa以下の高圧で研削液を吹き付け可能である。このようにすれば、従来の研磨装置よりも大幅に目詰まりを抑制することができる。
Further, in the polishing apparatus, the grinding fluid spraying means can spray the grinding fluid at a high pressure of 8 MPa or more and 50 MPa or less. In this way, clogging can be significantly suppressed as compared with the conventional polishing apparatus.
また、この研磨装置は、前記ノズルが、前記研削液の吹き付けが噴射角0度の直線噴射、又は噴射角15度以内の噴射となるノズルである。このようにすれば、研削液の高圧の吹き付けが可能となる。また、噴射角0度とすればより高圧となる一方、噴射角を付けることで砥面への吹き付け面積が大きくなる。
Further, in this polishing apparatus, the nozzle is a nozzle in which the spray of the grinding fluid is a linear injection with an injection angle of 0 degrees or an injection with an injection angle of 15 degrees or less. In this way, high pressure spraying of the grinding fluid is possible. Moreover, while the pressure becomes higher when the injection angle is 0 degree, the spray area to the abrasive surface becomes larger by adding the injection angle.
また、この研磨装置は、さらに、この研削液吹き付け手段が吹き付ける圧力は、10Mpa以上15MPa以下の高圧である、ことが望ましい。このようにすれば、研磨作業の作業性だけでなく、コストの面からより望ましい。
Further, in the polishing apparatus, preferably, the pressure sprayed by the grinding fluid spraying means is a high pressure of 10 MPa or more and 15 MPa or less. This is desirable not only in terms of the workability of the polishing operation but also in terms of cost.
また、この研磨装置は、前記ダイヤモンド砥石の研磨面に吹き付ける高圧の研削液とは別に、前記研磨面に冷却液を供給する手段をさらに備えることが好ましい。
Preferably, the polishing apparatus further comprises means for supplying a coolant to the polishing surface separately from the high-pressure grinding fluid sprayed onto the polishing surface of the diamond grindstone.
また、この研磨装置は、前記高圧の研削液に精製水を用い、前記冷却液に前記研削液として使用された後の精製水を用いてもよい。
Further, the polishing apparatus may use purified water as the high-pressure grinding fluid and use purified water after being used as the grinding fluid in the coolant.
また、この研磨装置は、前記ダイヤモンド砥石にかえて、CBN砥石、又はアルミナ質系砥粒をバインダーで結合してなるアルミナ質系砥石、若しくは炭化けい素質系砥粒をバインダーで結合してなる炭化けい素質系砥石を用いた場合にも適用できる。
In addition, this polishing apparatus is carbonized by combining a CBN whetstone, an aluminous-based whetstone formed by bonding aluminous-based abrasive grains with a binder instead of the diamond whetstone, or a silicon carbide-based abrading grains with a binder. The present invention is also applicable to the case of using a silicon-based grindstone.
本発明は、ダイヤモンド砥石を回転させながら、超合金からなるワークを研磨する際に、高圧の研削液を研磨面(砥粒面)に対し、吹き付ける部位を変えつつ高圧状態で吹き付けるので、目詰まりを起こす原因となる研磨粉を洗い流し、ドレッシングを行うことなく、長期間に亘って研磨作業を継続することができる。よって、ダイヤモンドドレッサーにて目詰まりした研磨面(砥粒面)を、1層削り取る作業回数を減らすことができる。とくに、高圧で吹き付けるだけでなく、吹き付ける部位を変えながら吹き付けるので、目詰まりの洗い流しをムラなく行うことができる。
In the present invention, when a workpiece made of super alloy is polished while rotating a diamond grindstone, a high pressure grinding fluid is sprayed to the polishing surface (abrasive grain surface) while changing a portion to be sprayed, so clogging occurs. It is possible to wash away the abrasive powder causing the cause and continue the polishing operation for a long time without dressing. Therefore, it is possible to reduce the number of operations for removing one layer of the polishing surface (abrasive particle surface) clogged by the diamond dresser. In particular, not only spraying with high pressure, but also spraying while changing the site to be sprayed, it is possible to wash out clogging evenly.
(本実施形態の研磨装置)
以下、本発明の実施の形態を図面に沿って説明する。図1は本発明の一実施形態に係る研磨装置の概略構成を示す図である。図2は研磨装置に用いる回転砥石の正面図である。 (Polishing apparatus of the present embodiment)
Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a view showing a schematic configuration of a polishing apparatus according to an embodiment of the present invention. FIG. 2 is a front view of a rotary grindstone used in a polishing apparatus.
以下、本発明の実施の形態を図面に沿って説明する。図1は本発明の一実施形態に係る研磨装置の概略構成を示す図である。図2は研磨装置に用いる回転砥石の正面図である。 (Polishing apparatus of the present embodiment)
Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a view showing a schematic configuration of a polishing apparatus according to an embodiment of the present invention. FIG. 2 is a front view of a rotary grindstone used in a polishing apparatus.
図1および図2に示すように、研磨装置1は、回転可能に支持される円板状の回転砥石2を有し、回転砥石2は、芯金2aの周囲にダイヤモンド砥粒がバインダーにて結合されてなるダイヤモンド砥石2bが設けられたものである。そして、研磨作業の際には、水平方向の回転軸回りに一定速度で回転砥石2を回転させ、回転砥石2の側面である研磨面2baで、例えばインコネル(登録商標)などの超合金からなるワークW(例えば、円柱状部材あるいは円筒状部材)を研磨するものである。
As shown in FIGS. 1 and 2, the polishing apparatus 1 has a disc-shaped rotary grindstone 2 rotatably supported, and the rotary grindstone 2 has a binder of diamond abrasive grains around a core metal 2a. A diamond grindstone 2b to be bonded is provided. Then, at the time of polishing work, the rotary grindstone 2 is rotated at a constant speed around the horizontal rotation axis, and the polishing surface 2ba which is the side surface of the rotary grindstone 2 is made of superalloy such as Inconel (registered trademark). The workpiece W (for example, a cylindrical member or a cylindrical member) is polished.
研磨装置1は、砥石2と並んで、研磨の際に研磨面2baに対し、研磨面2baに直交する方向から細いノズル3aを通じて高圧の研削液を吹き付ける研削液吹き付け手段3が設けられている。なお、本実施形態においては、研削液には、例えば、防錆剤、界面活性剤などを含み濃度管理がされている精製水が用いられる。そして、砥石2の研磨面2baに吹き付ける圧力は、8Mpa以上50MPa以下(好ましくは10Mpa以上15MPa以下)の高圧である。ノズル3による吹き付け方向は、研磨面2baに直交しているが、傾斜していてもよい。
The polishing apparatus 1 is provided with a grinding fluid spraying means 3 for spraying a high-pressure grinding fluid from the direction perpendicular to the polishing surface 2ba to the polishing surface 2ba in parallel with the grindstone 2 during polishing. In the present embodiment, for example, purified water containing a rust inhibitor, surfactant and the like and subjected to concentration control is used as the grinding fluid. And the pressure sprayed on grinding | polishing surface 2ba of the grindstone 2 is a high pressure of 8 Mpa or more and 50 Mpa or less (preferably 10 Mpa or more and 15 Mpa or less). Although the spraying direction by the nozzle 3 is orthogonal to the polishing surface 2ba, it may be inclined.
研削液吹き付け手段3は、図示しないポンプに接続された細いノズル3aを有し、これにより高圧の研削液の噴出を可能としている。また、研削液吹き付け手段3のノズル3aは、砥石2の研磨面2baに対し揺動可能な構成となっている。研削液吹き付け手段3のノズル3aが揺動することで、研削液を研磨面2baの所定範囲に吹き付けることが可能となる。
The grinding fluid spraying means 3 has a thin nozzle 3a connected to a pump (not shown), thereby enabling high pressure grinding fluid to be jetted. Further, the nozzle 3 a of the grinding fluid spraying means 3 is configured to be swingable with respect to the polishing surface 2 ba of the grindstone 2. By swinging the nozzle 3a of the grinding fluid spraying means 3, it becomes possible to spray the grinding fluid on a predetermined range of the polishing surface 2ba.
また、研削液吹き付け手段3による研削液吹き付け位置P1は、ワークWを研磨するwワーク研磨位置P2と異なる位置とする。図1に示す例では、研削液吹き付け位置P1が下位置で、ワーク研磨位置P2が上位置としている。これにより、回転中の砥石2において、研削面2baに研削液が吹き付けされて生じる研磨粉は下方に流され、研磨粉が取り除かれた研磨面2baでワークWの研磨が行われることになる。
Further, the grinding liquid spraying position P1 by the grinding liquid spraying means 3 is set to a position different from the w-work grinding position P2 for grinding the work W. In the example shown in FIG. 1, the grinding fluid spray position P1 is at the lower position, and the workpiece polishing position P2 is at the upper position. As a result, in the rotating grindstone 2, the abrasive powder generated by spraying the grinding fluid on the grinding surface 2 ba flows downward, and the workpiece W is polished on the abrasive surface 2 ba from which the abrasive powder has been removed.
上記装置1によれば、円板状の回転砥石2を回転させながら、研磨面2baでワークWを研磨する際に、回転砥石2の研磨面2baに付着した研磨粉を高圧の研削液で洗い流しながら、ワークWを研磨することができる。これにより、研磨粉による目詰まりを抑制しながら、ワークを効率よく研磨することができる。
According to the apparatus 1, when the work W is polished by the polishing surface 2ba while rotating the disc-shaped rotary grindstone 2, the abrasive powder attached to the polishing surface 2ba of the rotary grindstone 2 is washed away by the high pressure grinding fluid While, the work W can be polished. This makes it possible to polish the work efficiently while suppressing clogging by the abrasive powder.
また、研削液の吹き付けは、ワークWを研磨するワーク研磨位置P2とは異なる研削液吹き付け位置P1で行われ、研磨面2baに付着している研磨粉を洗い流すものであり、ワークWを研磨する作業を妨げるおそれがない。
The spraying of the grinding fluid is performed at the grinding fluid spraying position P1 different from the workpiece polishing position P2 for polishing the workpiece W, and the polishing powder adhering to the polishing surface 2ba is washed away, and the workpiece W is polished. There is no risk of interfering with work.
また、研削液は、8Mpa以上の高圧で研磨面2baに直交する方向から5mm程度離れたところから移動しながら吹き付けられるので、高圧の研削液が研磨粉を掘り起こすように作用し、研磨粉が研磨面2baに付着しようとする力に打ち勝って、研磨粉を洗い流す。よって、長期間に亘って、ダイヤモンドドレッサーにて目詰まりした砥粒面を1層削り取るという作業が必要なくなる。
In addition, since the grinding fluid is sprayed while moving at a high pressure of 8 Mpa or more from a position about 5 mm away from the direction orthogonal to the polishing surface 2ba, the high pressure grinding fluid acts to dig out the polishing powder and the polishing powder acts to polish The abrasive powder is washed away by overcoming the force to adhere to the surface 2ba. Therefore, for a long period of time, it is not necessary to cut the abrasive grain surface clogged with the diamond dresser by one layer.
また、研削液吹き付け手段3が回転砥石2の研磨面2baに対し半径方向において、内径側部分と外径側部分との間で揺動可能な構成であるため、ワークWを研磨している研磨面2baの所定範囲に亘って一様に8MPa以上の高圧で研削液を吹き付けることができる。これにより、ワークWを研磨する研磨面2baに付着した研磨粉を洗い残しながら、ワークWの研磨ができるため、効率のよい研磨が可能となる。
In addition, since the grinding fluid spraying means 3 is configured to be able to swing between the inner diameter side portion and the outer diameter side portion in the radial direction with respect to the polishing surface 2 ba of the rotary grindstone 2, polishing for polishing the workpiece W The grinding fluid can be sprayed uniformly at a high pressure of 8 MPa or more over the predetermined range of the surface 2ba. As a result, since the work W can be polished while washing away the polishing powder attached to the polishing surface 2 ba for polishing the work W, efficient polishing is possible.
なお、上記の実施形態では、回転砥石2が、水平方向の回転軸回りに回転するように配置されているが、図3に示されるように、鉛直方向の回転軸回りに回転するように配置してもよい。
In the above embodiment, the rotary grindstone 2 is arranged to rotate around the horizontal rotation axis, but as shown in FIG. 3, it is arranged to rotate around the vertical rotation axis You may
(本実施形態の効果)
上記した本実施形態の研磨装置によれば、ダイヤモンド砥石をドレッシングして、高価なダイヤモンド砥粒が多数存在する層を削除することを抑え、コストを抑えることができる。また、ダイヤモンド砥粒は極めて硬度が高いため、通常の砥石のようにメンテナンス用の砥石などで研削することが困難であったところ、本実施形態の研磨装置を用いることで、ダイヤモンド砥石の研磨面を、ダイヤモンド砥粒を研削することなく目詰まりをなくして、研磨性能を回復させることができる、非常に画期的なものである。図4に目詰まりしたダイヤモンド砥石の表面と、研削液吹き付け手段を用いた後のダイヤモンド砥石の表面とを比較した写真を示す。 (Effect of this embodiment)
According to the above-described polishing apparatus of the present embodiment, it is possible to suppress the removal of the layer in which a large number of expensive diamond abrasive grains exist by dressing the diamond grindstone, and to suppress the cost. In addition, since the diamond abrasive grains have extremely high hardness, it is difficult to grind with a maintenance grindstone or the like like a normal grindstone. However, by using the polishing apparatus of the present embodiment, the polished surface of the diamond grindstone The polishing performance can be recovered without clogging by grinding the diamond abrasive grains, which is a very revolutionary thing. The photograph which compared the surface of the clogged diamond whetstone with the surface of the diamond whetstone after using grinding fluid spraying means in FIG. 4 is shown.
上記した本実施形態の研磨装置によれば、ダイヤモンド砥石をドレッシングして、高価なダイヤモンド砥粒が多数存在する層を削除することを抑え、コストを抑えることができる。また、ダイヤモンド砥粒は極めて硬度が高いため、通常の砥石のようにメンテナンス用の砥石などで研削することが困難であったところ、本実施形態の研磨装置を用いることで、ダイヤモンド砥石の研磨面を、ダイヤモンド砥粒を研削することなく目詰まりをなくして、研磨性能を回復させることができる、非常に画期的なものである。図4に目詰まりしたダイヤモンド砥石の表面と、研削液吹き付け手段を用いた後のダイヤモンド砥石の表面とを比較した写真を示す。 (Effect of this embodiment)
According to the above-described polishing apparatus of the present embodiment, it is possible to suppress the removal of the layer in which a large number of expensive diamond abrasive grains exist by dressing the diamond grindstone, and to suppress the cost. In addition, since the diamond abrasive grains have extremely high hardness, it is difficult to grind with a maintenance grindstone or the like like a normal grindstone. However, by using the polishing apparatus of the present embodiment, the polished surface of the diamond grindstone The polishing performance can be recovered without clogging by grinding the diamond abrasive grains, which is a very revolutionary thing. The photograph which compared the surface of the clogged diamond whetstone with the surface of the diamond whetstone after using grinding fluid spraying means in FIG. 4 is shown.
(変形例1)
次に、上記の実施形態の変形例について説明する。図5は、変形例の実施形態の研磨装置の概略構成を示す図である。なお、上記の実施形態と共通する構成については、同じ符号を用いる。 (Modification 1)
Next, modifications of the above embodiment will be described. FIG. 5 is a view showing a schematic configuration of a polishing apparatus according to a modified embodiment. The same reference numerals are used for configurations common to the above embodiment.
次に、上記の実施形態の変形例について説明する。図5は、変形例の実施形態の研磨装置の概略構成を示す図である。なお、上記の実施形態と共通する構成については、同じ符号を用いる。 (Modification 1)
Next, modifications of the above embodiment will be described. FIG. 5 is a view showing a schematic configuration of a polishing apparatus according to a modified embodiment. The same reference numerals are used for configurations common to the above embodiment.
この変形例の研磨装置10と、上記実施形態の研磨装置1との主な相違点は、上記実施形態の研磨装置1は研削液吹き付け手段3が揺動する構成であるのに対し、変形例の研磨装置10は、研削液吹き付け手段30が砥石2の研磨面2baに対しその半径方向において、内径側部分から外径側部分にかけてノズル30aを直線的に往復移動させるノズル移動手段(図示せず)を有する点である。
The main difference between the polishing apparatus 10 of this modification and the polishing apparatus 1 of the above embodiment is that the polishing apparatus 1 of the above embodiment has a configuration in which the grinding liquid spraying means 3 swings, whereas The polishing apparatus 10 is a nozzle moving means (not shown) in which the grinding fluid spraying means 30 linearly reciprocates the nozzle 30a from the inner diameter side portion to the outer diameter side portion in the radial direction with respect to the grinding surface 2ba of the grinding wheel 2 ) Is a point.
この構成によれば、研削液吹き付け手段30のノズル30aが、砥石2の研磨面2baの内径側部分から外径側部分にかけて往復移動して高圧の研削液を吹き付けることで、研磨面2ba全体に亘って一様に砥石を研削できる。これにより、ワークの研磨時に、研磨面2ba全体に付着した研磨粉を洗い残しながらワークを研磨でき、効率のよい研磨が可能となる。特にワークのサイズが大きい場合に好適である。
According to this configuration, the nozzle 30a of the grinding fluid spraying means 30 reciprocates from the inner diameter side portion to the outer diameter side portion of the grinding surface 2ba of the grinding wheel 2 and sprays a high-pressure grinding fluid to the entire grinding surface 2ba. The grinding wheel can be ground uniformly throughout. As a result, when the workpiece is polished, the workpiece can be polished while washing away the polishing powder adhering to the entire polishing surface 2 ba, and efficient polishing can be performed. It is particularly suitable when the size of the work is large.
(変形例2)
また、図6は、別の変形例の実施形態の研磨装置の概略構成を示す図である。図6に示すように、円盤状のワーク支持盤40を、それの回転軸を回転砥石2の回転軸に対し半径方向に偏心して設け、そのワーク支持盤40の、回転砥石2側の側面において複数のワークWを周方向に一定間隔で並べた状態で支持させ、ワーク支持盤40を、例えば回転砥石2の回転方向とは反対方向に回転させながら、回転砥石2によって各ワークWを研磨する構成とし、複数のワークWを一緒に研磨することで、研磨作業性を高めることもできる。 (Modification 2)
Moreover, FIG. 6 is a figure which shows schematic structure of the grinding device of embodiment of another modification. As shown in FIG. 6, the disk-likework support board 40 is provided with its rotation axis eccentrically in the radial direction with respect to the rotation axis of the rotary grindstone 2, and the side surface of the work support board 40 on the rotary grindstone 2 side A plurality of works W are supported in the circumferential direction at regular intervals, and each work W is polished by the rotating whetstone 2 while rotating the work supporting disc 40 in a direction opposite to the rotating direction of the rotating whetstone 2, for example The polishing workability can also be enhanced by polishing the plurality of workpieces W together.
また、図6は、別の変形例の実施形態の研磨装置の概略構成を示す図である。図6に示すように、円盤状のワーク支持盤40を、それの回転軸を回転砥石2の回転軸に対し半径方向に偏心して設け、そのワーク支持盤40の、回転砥石2側の側面において複数のワークWを周方向に一定間隔で並べた状態で支持させ、ワーク支持盤40を、例えば回転砥石2の回転方向とは反対方向に回転させながら、回転砥石2によって各ワークWを研磨する構成とし、複数のワークWを一緒に研磨することで、研磨作業性を高めることもできる。 (Modification 2)
Moreover, FIG. 6 is a figure which shows schematic structure of the grinding device of embodiment of another modification. As shown in FIG. 6, the disk-like
(その他の実施形態)
以上のとおり、図面を参照しながら本発明の好適な実施形態を説明したが、本発明の趣旨を逸脱しない範囲内で、種々の追加、変更または削除が可能である。例えば、上記した実施形態では、砥石にダイヤモンド砥石を用いているが、CBN(ボラゾン)砥石、アルミナ質系砥石や炭化けい素質系砥石などにも適用することもできる。また、砥石の形状は、本実施形態の形状に限らず、その他の形状の砥石を用いてもよい(例えば図7参照)。 (Other embodiments)
As described above, although the preferred embodiments of the present invention have been described with reference to the drawings, various additions, modifications, or deletions can be made without departing from the spirit of the present invention. For example, in the above-described embodiment, the diamond grindstone is used as the grindstone, but the present invention can also be applied to a CBN (Borazon) grindstone, an alumina-based grindstone, a silicon carbide-based grindstone, and the like. Further, the shape of the grindstone is not limited to the shape of the present embodiment, and a grindstone of another shape may be used (see, for example, FIG. 7).
以上のとおり、図面を参照しながら本発明の好適な実施形態を説明したが、本発明の趣旨を逸脱しない範囲内で、種々の追加、変更または削除が可能である。例えば、上記した実施形態では、砥石にダイヤモンド砥石を用いているが、CBN(ボラゾン)砥石、アルミナ質系砥石や炭化けい素質系砥石などにも適用することもできる。また、砥石の形状は、本実施形態の形状に限らず、その他の形状の砥石を用いてもよい(例えば図7参照)。 (Other embodiments)
As described above, although the preferred embodiments of the present invention have been described with reference to the drawings, various additions, modifications, or deletions can be made without departing from the spirit of the present invention. For example, in the above-described embodiment, the diamond grindstone is used as the grindstone, but the present invention can also be applied to a CBN (Borazon) grindstone, an alumina-based grindstone, a silicon carbide-based grindstone, and the like. Further, the shape of the grindstone is not limited to the shape of the present embodiment, and a grindstone of another shape may be used (see, for example, FIG. 7).
また、本実施形態では砥石の側面(平面)を研磨面とするものであるが、砥石の周面(曲面)を研磨面とする砥石を用いてもよい。そのほか、吹き付けられた研削液は、一旦回収してから濾過し、前記吹き付けられる研削液とは別に研磨面2baに対して垂れ流して、研磨部位を冷却するクーラントとして利用することも可能である。したがって、そのようなものも本発明の範囲内に含まれる。
Moreover, although the side surface (plane) of a grindstone is used as a grinding | polishing surface in this embodiment, you may use the grindstone which makes the surrounding surface (curved surface) of a grindstone a grinding | polishing surface. In addition, it is also possible to collect the sprayed liquid, filter it once and then to flow separately to the polishing surface 2 ba separately from the sprayed liquid to be used as a coolant for cooling the polishing site. Therefore, such is also included in the scope of the present invention.
1 研磨装置
2 回転砥石
2a 芯金
2b ダイヤモンド砥石
2ba 研磨面
3 研削液吹き付け手段
3a ノズル
10 研磨装置
30 研削液吹き付け手段
30a ノズル
40 ワーク支持盤
P1 研削液吹き付け位置
P2 ワーク研磨位置
W ワーク
DESCRIPTION OFSYMBOLS 1 Polishing device 2 Rotating grindstone 2a Core metal 2b Diamond grindstone 2ba Polishing surface 3 Grinding fluid spraying means 3a Nozzle 10 Polishing device 30 Grinding fluid spraying means 30a Nozzle 40 Work support board P1 Grinding fluid spraying position P2 Work polishing position W Work
2 回転砥石
2a 芯金
2b ダイヤモンド砥石
2ba 研磨面
3 研削液吹き付け手段
3a ノズル
10 研磨装置
30 研削液吹き付け手段
30a ノズル
40 ワーク支持盤
P1 研削液吹き付け位置
P2 ワーク研磨位置
W ワーク
DESCRIPTION OF
Claims (16)
- ダイヤモンド砥粒をバインダーで結合してなるダイヤモンド砥石を回転させながら、超合金からなるワークを研磨する研磨方法であって、
前記ワークを研磨する前記ダイヤモンド砥石の研磨面に、吹き付ける部位を変えつつ高圧の研削液を吹き付けながら、前記ワークを研磨することを特徴とする、
研磨方法。 A polishing method for polishing a workpiece made of superalloy while rotating a diamond grinding wheel formed by bonding diamond abrasive grains with a binder,
The workpiece is polished while spraying a high-pressure grinding fluid while changing a portion to be sprayed on the polishing surface of the diamond grindstone for polishing the workpiece.
Polishing method. - 前記研削液は、前記ワークを研磨する位置とは異なる位置で、前記研磨面に直交する方向から1mm~20mm程度離れて8Mpa以上50MPa以下の高圧で、前記ダイヤモンド砥石の研磨面に吹き付けられる、
請求項1記載の研磨方法。 The grinding fluid is sprayed on the grinding surface of the diamond grinding wheel at a high pressure of 8 MPa to 50 MPa and separated from the direction orthogonal to the polishing surface at a position different from the position where the workpiece is polished, at a high pressure of 8 MPa to 50 MPa.
The polishing method according to claim 1. - 前記研削液の吹き付けは、噴射角0度の直線噴射、又は噴射角15度以内の噴射である、
請求項2記載の研磨方法。 Spraying of the grinding fluid is linear injection at an injection angle of 0 degrees or injection within an injection angle of 15 degrees.
The polishing method according to claim 2. - 前記ダイヤモンド砥石の研磨面に吹き付けられる圧力は、10Mpa以上15MPa以下の高圧である、
請求項3記載の研磨方法。 The pressure applied to the polishing surface of the diamond grindstone is a high pressure of 10 MPa or more and 15 MPa or less.
The polishing method according to claim 3. - 前記ダイヤモンド砥石は、半径方向に一定長さを有する環状の研磨面を有するもので、
前記研磨面に対し前記研削液を吹き付ける部位を前記半径方向において、内径側部分と外径側部分との間で揺動させる、
請求項1記載の研磨方法。 The diamond grinding wheel has an annular grinding surface having a fixed length in the radial direction,
Swinging a portion to which the grinding fluid is sprayed to the polishing surface between the inner diameter side portion and the outer diameter side portion in the radial direction;
The polishing method according to claim 1. - 前記ダイヤモンド砥石の研磨面に吹き付ける高圧の研削液とは別に、
前記研磨面に冷却液を供給しながら、前記ワークを研磨する、
請求項2記載の研磨方法。 Apart from the high pressure grinding fluid sprayed on the grinding surface of the diamond wheel,
Polishing the workpiece while supplying a coolant to the polishing surface;
The polishing method according to claim 2. - 前記高圧の研削液に、精製水を用い、
前記冷却液に、前記研削液として使用された後の精製水を用いる、
請求項6記載の研磨方法。 Using purified water as the high pressure grinding fluid,
Using purified water after being used as the grinding fluid as the cooling fluid,
A polishing method according to claim 6. - 前記ダイヤモンド砥石にかえて、CBN砥石、又はアルミナ質系砥粒をバインダーで結合してなるアルミナ質系砥石、若しくは炭化けい素質系砥粒をバインダーで結合してなる炭化けい素質系砥石を用いる、
請求項1乃至7のいずれか1項に記載の研磨方法。 Instead of the diamond grindstone, a CBN grindstone, an alumina-based grindstone formed by bonding alumina-based abrasives with a binder, or a silicon carbide-based grindstone formed by bonding silicon carbide-based abrasives with a binder is used.
The polishing method according to any one of claims 1 to 7. - ダイヤモンド砥粒をバインダーで結合してなるダイヤモンド砥石を回転させながら、超合金からなるワークを研磨する研磨装置であって、
研磨の際に、前記ダイヤモンド砥石の研磨面に、前記研磨面に直交する方向からノズルを通じて高圧で研削液を吹き付ける研削液吹き付け手段を備え、
前記研削液吹き付け手段は、前記ノズルを移動させることで研削液の吹き付け部位を変えるノズル移動手段を有することを特徴とする、
研磨装置。 A polishing apparatus for polishing a workpiece made of super alloy while rotating a diamond grinding wheel formed by bonding diamond abrasive grains with a binder,
The apparatus further comprises a grinding fluid spraying means for spraying a grinding fluid at a high pressure through a nozzle from a direction perpendicular to the polishing surface on the polishing surface of the diamond grindstone during polishing.
The grinding fluid spraying means is characterized by having a nozzle moving means for changing the spraying site of the grinding fluid by moving the nozzle.
Polishing device. - 前記ダイヤモンド砥石は、半径方向に一定長さを有する環状の研磨面を有するもので、
前記ノズル移動手段は、前記ワークを研磨する研磨位置とは異なる位置で、前記研磨面に対し半径方向において、内径側部分と外径側部分との間で前記ノズルを揺動させるものである、
請求項9記載の研磨装置。 The diamond grinding wheel has an annular grinding surface having a fixed length in the radial direction,
The nozzle moving means swings the nozzle between an inner diameter side portion and an outer diameter side portion in a radial direction with respect to the polishing surface at a position different from a polishing position for polishing the workpiece.
A polishing apparatus according to claim 9. - 前記研削液吹き付け手段は、8Mpa以上50MPa以下の高圧で研削液を吹き付け可能である、
請求項9記載の研磨装置。 The grinding fluid spraying means can spray the grinding fluid at a high pressure of 8 MPa or more and 50 MPa or less.
A polishing apparatus according to claim 9. - 前記ノズルは、前記研削液の吹き付けが噴射角0度の直線噴射、又は噴射角15度以内の噴射となるノズルである、
請求項11記載の研磨装置。 The nozzle is a nozzle in which the spray of the grinding fluid is a linear injection at an injection angle of 0 degrees or an injection within an injection angle of 15 degrees.
A polishing apparatus according to claim 11. - 前記研削液吹き付け手段が吹き付ける圧力は、10Mpa以上15MPa以下の高圧である、
請求項12記載の研磨装置。 The pressure sprayed by the grinding fluid spraying means is a high pressure of 10 MPa or more and 15 MPa or less.
A polishing apparatus according to claim 12. - 前記ダイヤモンド砥石の研磨面に吹き付ける高圧の研削液とは別に、前記研磨面に冷却液を供給する手段をさらに備える、
請求項10記載の研磨装置。 A means for supplying a cooling fluid to the polishing surface is further provided separately from the high-pressure grinding fluid sprayed onto the polishing surface of the diamond grindstone.
The polishing apparatus according to claim 10. - 前記高圧の研削液に精製水を用い、前記冷却液に前記研削液として使用された後の精製水を用いる、
請求項14記載の研磨装置。 Using purified water as the high pressure grinding fluid and using purified water after being used as the grinding fluid as the cooling fluid,
The polishing apparatus according to claim 14. - 前記ダイヤモンド砥石にかえて、CBN砥石、又はアルミナ質系砥粒をバインダーで結合してなるアルミナ質系砥石、若しくは炭化けい素質系砥粒をバインダーで結合してなる炭化けい素質系砥石を用いる、
請求項9乃至15のいずれか1項に記載の研磨装置。 Instead of the diamond grindstone, a CBN grindstone, an alumina-based grindstone formed by bonding alumina-based abrasives with a binder, or a silicon carbide-based grindstone formed by bonding silicon carbide-based abrasives with a binder is used.
A polishing apparatus according to any one of claims 9 to 15.
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JP2021070080A (en) * | 2019-10-30 | 2021-05-06 | 株式会社トクピ製作所 | Polishing system |
WO2024193947A1 (en) * | 2023-03-21 | 2024-09-26 | Asml Netherlands B.V. | Plasma fluorination of diamond for spotless flatness puck performance extension |
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JP2021070080A (en) * | 2019-10-30 | 2021-05-06 | 株式会社トクピ製作所 | Polishing system |
WO2024193947A1 (en) * | 2023-03-21 | 2024-09-26 | Asml Netherlands B.V. | Plasma fluorination of diamond for spotless flatness puck performance extension |
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