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WO2019164016A1 - Transfer film, resin pattern forming method using transfer film, and cured film pattern forming method - Google Patents

Transfer film, resin pattern forming method using transfer film, and cured film pattern forming method Download PDF

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Publication number
WO2019164016A1
WO2019164016A1 PCT/JP2019/007370 JP2019007370W WO2019164016A1 WO 2019164016 A1 WO2019164016 A1 WO 2019164016A1 JP 2019007370 W JP2019007370 W JP 2019007370W WO 2019164016 A1 WO2019164016 A1 WO 2019164016A1
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WO
WIPO (PCT)
Prior art keywords
transfer film
photosensitive resin
resin composition
compound
acid
Prior art date
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PCT/JP2019/007370
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French (fr)
Japanese (ja)
Inventor
下田 浩一朗
智史 渋井
誠 中出
華菜子 水村
真由紀 吉田
Original Assignee
旭化成株式会社
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Publication of WO2019164016A1 publication Critical patent/WO2019164016A1/en

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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2/00Processes of polymerisation
    • C08F2/46Polymerisation initiated by wave energy or particle radiation
    • C08F2/48Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
    • C08F2/50Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light with sensitising agents
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F290/00Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups
    • C08F290/02Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups on to polymers modified by introduction of unsaturated end groups
    • C08F290/06Polymers provided for in subclass C08G
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F299/00Macromolecular compounds obtained by interreacting polymers involving only carbon-to-carbon unsaturated bond reactions, in the absence of non-macromolecular monomers
    • C08F299/02Macromolecular compounds obtained by interreacting polymers involving only carbon-to-carbon unsaturated bond reactions, in the absence of non-macromolecular monomers from unsaturated polycondensates
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings

Definitions

  • the present invention relates to a photosensitive resin composition, a transfer film, a resin pattern manufacturing method using the transfer film, and a cured film pattern manufacturing method. More specifically, the present invention relates to a liquid crystal display device, an organic EL display device, a touch panel display device, an integrated circuit element, a solid-state imaging device, a planarization film of an electronic component such as a semiconductor element, formation of a protective film and an interlayer insulating film, or The present invention relates to a photosensitive resin composition suitable for a rigid printed wiring board, a solder resist of a flexible printed wiring board, or an interlayer insulating film, a transfer film, and a resin pattern manufacturing method using the same.
  • Touch panels are used not only for large electronic devices such as personal computers and televisions, but also for small electronic devices such as car navigation systems, mobile phones, and electronic dictionaries, and display devices such as OA / FA devices.
  • An electrode made of a material is provided.
  • ITO Indium-Tin-Oxide
  • indium oxide Indium oxide
  • tin oxide As the transparent conductive electrode material, ITO (Indium-Tin-Oxide), indium oxide, and tin oxide are known, and these materials have high visible light transmittance, so that electrode materials for substrates for liquid crystal display elements, etc. It is mainly used as.
  • Existing touch panel methods include resistive film method, optical method, pressure method, capacitance method, electromagnetic wave induction method, image recognition method, vibration detection method, ultrasonic method, etc. ing.
  • capacitive touch panels In recent years, the use of capacitive touch panels has been most advanced. In a capacitive touch panel, when a fingertip, which is a conductor, contacts the touch input surface, capacitive coupling occurs between the fingertip and the conductive film, thereby forming a capacitor. For this reason, the capacitive touch panel detects the coordinates of the contact position by capturing a change in charge at the contact position of the fingertip. In particular, the projected capacitive touch panel can detect multiple points on the fingertip, and thus has a good operability to give complicated instructions.
  • a plurality of X electrodes and a plurality of Y electrodes orthogonal to the plurality of X electrodes have a two-layer structure in order to express two-dimensional coordinates by the X axis and the Y axis.
  • ITO is used as the electrode material.
  • the frame area of the touch panel is an area where the touch position cannot be detected, reducing the area of the frame area is an important factor for improving the product value.
  • metal wiring is required to transmit a touch position detection signal, but in order to reduce the frame area, it is necessary to reduce the width of the metal wiring. Since the conductivity of ITO is not sufficiently high, copper is generally used for metal wiring.
  • corrosive components such as moisture and salt may enter the sensing region from the inside. If a corrosive component enters the inside of the touch panel, the metal wiring will corrode, which may increase the electrical resistance between the electrode and the drive circuit, or cause a disconnection. To prevent these, a protective film with an antirust effect on the metal wiring is necessary. Generally, there exists a tendency for the rust prevention effect of metal wiring to increase, so that the moisture permeability of a protective film is low.
  • the metal wiring for transmitting the detection signal is connected to other members at the terminal portion, it is necessary to ensure conduction, and the protective film must be removed from the terminal portion. For this reason, the protective film is required to have good developability, and it is required to have good detachability in various patterns such as circular holes.
  • a dilute alkaline aqueous solution such as an aqueous sodium carbonate solution is most often used, and development at a low temperature of less than 30 ° C. is desired in order to maintain the long-term stability of the developer concentration.
  • the photosensitive resin composition for forming the protective film is provided as a transfer film, not as a liquid resist.
  • a vacuum roll laminator is usually used in the process of attaching the transfer film to the substrate by the roll-to-roll method.
  • the temperature is applied to the photosensitive resin composition layer due to the heat of the roll after the transfer film is attached, and oxygen is not present in the environment for suppressing radical polymerization.
  • the photopolymerization initiator is cleaved, and the dark reaction proceeds to cause a significant decrease in developability. Therefore, the roll temperature of the vacuum roll laminate is required to be low, specifically, less than 100 ° C.
  • a protective film for protecting the wiring board surface or pattern circuit provided on the substrate in addition to the protective film, a photosensitive solder resist, a photosensitive film Various film-like photosensitive materials such as dry film resists are also used depending on the application.
  • Patent Document 1 Although the composition which combined two types of epoxy acrylate acid modified products is used as a photosensitive coverlay film, the description regarding low temperature developability, low temperature laminating property, or moisture permeability is not made
  • Patent Documents 2 and 3 a composition containing an acrylic copolymer having a weight average molecular weight of 30,000 or more or a carboxyl group-containing polyurethane having a weight average molecular weight of 10,000 and an epoxy acrylate acid modified product is photosensitive. Used as a conductive dry film solder resist. None of the documents describes low-temperature developability, low-temperature laminating properties, or adhesion to a substrate, and it is assumed that these performances are not all satisfied.
  • Patent Document 4 a composition containing an acrylic copolymer having a weight average molecular weight of 12,000 and a modified cresol novolac epoxy acrylate is used as a photosensitive dry film solder resist. There is no description of properties, low-temperature laminating properties or adhesion to a substrate. Moreover, although the solder resist of patent document 4 has provided the moisture resistance of a fixed level, the request
  • the transfer film has a tack property, a low temperature developability, a low temperature laminate property, a moisture permeability as a cured film, and a good adhesion to a conductor substrate, and a conductor portion such as an electrode. It is providing the photosensitive resin composition suitable for protection of a film, a transfer film, and its manufacturing method.
  • a transfer film for forming a conductor protective film comprising a support film and a photosensitive resin composition layer wherein the photosensitive resin composition layer comprises the following components: (A) Alkali-soluble resin (excluding acid-modified epoxy (meth) acrylate compounds); (B) a compound containing a carboxyl group and an ethylenically unsaturated group; (C) a photopolymerizable compound; and (D) a photopolymerizable initiator; Containing
  • the (A) alkali-soluble resin has a weight average molecular weight of 11,000 or more and 29,000 or less, and an acid value of 100 mgKOH / g or more
  • the compound (B) containing a carboxyl group and an ethylenically unsaturated group has a weight average molecular weight of 1,000 to 9,500, an acid value of 60 mgKOH / g or more, and a refractive index of 1.570 or more.
  • a conductor characterized in that the mass ratio (A) / (B) of the (A) alkali-soluble resin to the compound containing (B) a carboxyl group and an ethylenically unsaturated group is 0.18 to 6.0.
  • Transfer film for forming a protective film [2] Item 2. The transfer film according to Item 1, wherein the acid value of the alkali-soluble resin (A) is 200 mgKOH / g or less. [3] Item 3. The transfer film according to Item 1 or 2, wherein the acid value of the compound (B) containing a carboxyl group and an ethylenically unsaturated group is 200 mgKOH / g or less and the refractive index is 1.650 or less.
  • Item 4 The transfer film according to any one of Items 1 to 3, wherein the photosensitive resin composition layer has a hydroxyl value of 15.0 mgKOH / g or less.
  • Item 5 The transfer film according to Item 4, wherein the photosensitive resin composition layer has a hydroxyl value of 0.01 mgKOH / g or more.
  • Item 6 The transfer film according to any one of Items 1 to 5, wherein the refractive index of the photosensitive resin composition layer is 1.550 or more.
  • Item 7 The transfer film according to Item 6, wherein the refractive index of the photosensitive resin composition layer is 1.630 or less.
  • the (A) alkali-soluble resin contains a structure derived from (meth) acrylic acid in an amount of 12% by mass to 30% by mass and a structure derived from styrene or a derivative thereof in an amount of 30% by mass to 80% by mass.
  • Item 9 The transfer film according to any one of Items 1 to 8, wherein the compound (B) containing a carboxyl group and an ethylenically unsaturated group is an acid-modified epoxy (meth) acrylate compound.
  • Item 10 Item 10. The transfer film according to any one of Items 1 to 9, which is used for either a protective film for a touch panel or a protective film for a force sensor.
  • a conductor part protective film-forming transfer film comprising a support film and a photosensitive resin composition layer, wherein the photosensitive resin composition layer comprises the following (I) and (II):
  • the area ratio S ⁇ 50k of the region having the molecular weight M ⁇ 50000 is 1.0 to 9.0% when the area of the region having the molecular weight M ⁇ 2000 is 100%; and (II) tetrahydrofuran at 23 ° C.
  • the transfer film for forming a conductor protective film according to Item 16 wherein the acid value A1 is 200 mgKOH / g or less.
  • Item 18 The transfer film according to Item 16 or 17, which is used for either a touch panel protective film or a force sensor protective film.
  • a transfer film for forming a conductor protective film comprising a support film and a photosensitive resin composition layer wherein the photosensitive resin composition layer comprises the following components: (A) Alkali-soluble resin (excluding acid-modified epoxy (meth) acrylate compounds); (B) a compound containing a carboxyl group and an ethylenically unsaturated group; (C) a photopolymerizable compound; and (D) a photopolymerizable initiator; Containing
  • the (A) alkali-soluble resin has a weight average molecular weight of 11,000 or more and 29,000 or less, and an acid value of 100 mgKOH / g or more
  • the compound (B) containing a carboxyl group and an ethylenically unsaturated group has a weight average molecular weight of 1,000 to 9,500, an acid value of 60 mgKOH / g or more, and the following general formulas (1) to (3): ): Including at least the structure according to any one of A
  • Item 20 The transfer film according to Item 19, wherein the acid value of the (A) alkali-soluble resin is 200 mgKOH / g or less.
  • Item 21 The transfer film according to Item 19 or 20, wherein the acid value of the compound containing (B) a carboxyl group and an ethylenically unsaturated group is 200 mgKOH / g or less.
  • Item 20 The transfer film according to Item 19, wherein the photosensitive resin composition layer has a hydroxyl value of 15.0 mgKOH / g or less.
  • Item 23 Item 23.
  • Items (19) to (19), wherein the (A) alkali-soluble resin contains a structure derived from (meth) acrylic acid in an amount of 12% by mass to 30% by mass and a structure derived from styrene or a derivative thereof in an amount of 30% by mass to 80% by mass.
  • Item 27 The transfer film according to any one of Items 19 to 26, wherein the compound (B) containing a carboxyl group and an ethylenically unsaturated group is an acid-modified epoxy (meth) acrylate compound.
  • Item 28 The transfer film according to any one of Items 19 to 27, which is used for either a protective film for a touch panel or a protective film for a force sensor.
  • a pattern production method comprising producing a pattern by laminating, exposing and developing the transfer film according to any one of items 1 to 28 on a substrate. [30] 30.
  • a cured film pattern manufacturing method wherein a pattern obtained by the pattern manufacturing method according to item 29 is subjected to post-exposure processing and / or heat treatment.
  • a photosensitive resin composition and a transfer film in which the transfer film has good tack properties, low-temperature developability, low-temperature laminating properties, moisture permeability as a cured film, and good adhesion to a conductor substrate. be able to.
  • FIG. 1 is a differential molecular weight distribution curve obtained from the GPC elution curve of the photosensitive resin layer contained in the transfer film obtained in Example 5.
  • the (A) alkali-soluble resin according to the present embodiment is not limited as long as it contains a carboxyl group but does not contain an acid-modified epoxy (meth) acrylate compound.
  • the acid value (mgKOH / g) of the alkali-soluble resin is 100 or more, preferably 100 to 200.
  • the acid value is preferably 200 or less from the viewpoint of reducing moisture permeability and improving the rust prevention property of the conductor, and is 100 or more from the viewpoint of improving the low temperature developability, and the balance between the rust prevention property and the low temperature developability of the conductor. From the viewpoint, 110 to 180 is more preferable, and 120 to 160 is still more preferable.
  • the acid value is measured by a potentiometric titration method using a Hiranuma automatic titrator (COM-555) manufactured by Hiranuma Sangyo Co., Ltd., using 0.1 mol / L potassium hydroxide.
  • the alkali-soluble resin may have an ethylenically unsaturated group at the main chain terminal and / or side chain.
  • the weight average molecular weight of alkali-soluble resin is 11,000 or more and 29,000 or less from a viewpoint of applicability
  • the weight-average molecular weight of the alkali-soluble resin is determined based on the properties of the development aggregate, the tack properties when used as a transfer film, the properties of the unexposed film such as edge fuse properties, cut chip properties, etc. It is 11,000 or more from the viewpoint of adhesion to the substrate after film formation and curing on the substrate, and 29,000 or less from the viewpoint of low-temperature developability.
  • the edge fuse property is a phenomenon in which the photosensitive resin composition layer protrudes from the end face of the roll when the transfer film is wound into a roll shape.
  • the cut chip property is a phenomenon in which a chip flies when an unexposed film is cut with a cutter. If the scattered chips adhere to the upper surface of the transfer film or the like, it is transferred to a mask in the subsequent exposure process or the like, causing a defect.
  • the weight average molecular weight of the alkali-soluble resin is more preferably from 13,000 to 27,000, still more preferably from 15,000 to 26,000.
  • the measurement of the weight average molecular weight according to the present embodiment is performed using gel permeation chromatography (GPC) manufactured by JASCO Corporation set under the following conditions.
  • the obtained weight average molecular weight is a polystyrene equivalent value.
  • Pump Gulliver, PU-1580 type
  • Shodex registered trademark
  • RI Column temperature: 40 ° C
  • Flow rate 1.0 mL / min
  • Injection volume 0.02 mL
  • Moving bed solvent Tetrahydrofuran calibration curve: Calibration curve defined using polystyrene standard sample ⁇ Use of calibration curve based on polystyrene standard sample (Shodex STANDARD SM-105 manufactured by Showa Denko KK) ⁇
  • the hydroxyl value (mgKOH / g) of the alkali-soluble resin is preferably 40 or less, and more preferably 30 or less.
  • the moisture permeability of the cured product after the photosensitive resin composition is exposed and thermally cured can be lowered, so that the rust prevention property of the conductor is improved.
  • the hydroxyl value of alkali-soluble resin can be measured as follows. First, the (A) alkali-soluble resin solution to be measured for hydroxyl value is placed on an aluminum dish and heated at a temperature 10 ° C. higher than the boiling point of the solvent in the solution for 4 hours to completely remove the solvent. 1 g of the solid content of the alkali-soluble resin (A) thus obtained is precisely weighed, and 10 mL of 10% by mass acetic anhydride pyridine solution is added and dissolved uniformly, followed by heating at 100 ° C. for 1 hour. After heating, 10 mL of water and 10 mL of pyridine are added and heated at 100 ° C. for 10 minutes.
  • hydroxyl value (AB) ⁇ f ⁇ 28.05 / sample (g) + acid value ⁇ wherein A represents the amount (mL) of 0.1 mol / L potassium hydroxide ethanol solution used in the blank test. , B indicates the amount (mL) of 0.1 mol / L potassium hydroxide ethanol solution used for titration, and f indicates a factor. ⁇
  • the (A1) acrylic copolymer according to the present embodiment includes, for example, (meth) acrylic acid, (meth) acrylic acid ester, (meth) acrylonitrile, (meth) acrylamide, and styrene. And copolymers such as derivatives thereof.
  • copolymer in addition to the structural units already described, other monomers copolymerizable with those structural units may be contained as the structural units.
  • Other monomers include, for example, hydroxyalkyl (meth) acrylate, fumaric acid, cinnamic acid, crotonic acid, itaconic acid, maleic anhydride, (meth) acrylic acid tetrahydrofurfuryl ester, dimethylaminoethyl (meth) acrylate Ester, (meth) acrylic acid diethylaminoethyl ester, (meth) acrylic acid glycidyl ester, (meth) acrylic acid benzyl ester, 2,2,2-trifluoroethyl (meth) acrylate, 2,2,3,3-tetra Examples thereof include fluoropropyl (meth) acrylate, styrene and derivatives thereof.
  • styrene derivative examples include 4-methylstyrene, 4-hydroxystyrene, 4-methoxystyrene, 4-chlorostyrene, 4- (chloromethyl) styrene, and 4-vinylbenzoic acid.
  • a copolymer containing a structural unit is more preferable.
  • the structure derived from (meth) acrylic acid is 12% by mass or more and 30% by mass or less, and the structure derived from styrene or its derivative is 30 as (A1) acrylic copolymer in that both low temperature developability and moisture permeability reduction can be achieved. More preferably, the content is from 80% by weight to 80% by weight.
  • the acrylic copolymer is synthesized by radical polymerization by combining the above monomers in a specific weight ratio.
  • an azo polymerization initiator is preferably used as the photopolymerization initiator.
  • Examples of commercially available azo initiators include V-601 (manufactured by FUJIFILM Wako Pure Chemical Industries, Ltd.).
  • the (A2) polyimide precursor according to the present embodiment does not mean only polyamic acid but also includes imidized part of the polyamic acid.
  • the polyimide precursor can be obtained, for example, by reacting a mixture of tetracarboxylic dianhydride and diamine in an organic solvent at a molar ratio of 0.8: 1 to 1.2: 1.
  • tetracarboxylic dianhydride A conventionally well-known tetracarboxylic dianhydride can be used.
  • tetracarboxylic dianhydride aromatic tetracarboxylic acid, aliphatic tetracarboxylic dianhydride, etc. can be applied.
  • limiting in the diamine to be used A conventionally well-known diamine can be used.
  • tetracarboxylic dianhydrides include biphenyl-3,3 ′, 4,4′-tetracarboxylic dianhydride, benzophenone-3,3 ′, 4,4′-tetracarboxylic dianhydride, oxydiphthalic acid Anhydride, diphenylsulfone-3,3 ′, 4,4′-tetracarboxylic dianhydride, ethylene glycol bis (trimellitic acid monoester acid anhydride), p-phenylenebis (trimellitic acid monoester acid anhydride) ), P-biphenylenebis (trimellitic acid monoester acid anhydride), m-phenylenebis (tomellitic acid monoester acid anhydride), o-phenylenebis (trimellitic acid monoester acid anhydride), pentanediol bis (Trimellitic acid monoester acid anhydride), decanediol bis (trimellitic acid monoester acid an
  • diamine examples include 1,3-bis (4-aminophenoxy) alkane, 1,4-bis (4-aminophenoxy) alkane, 1,5-bis (4-aminophenoxy) alkane, 1,4-diaminobenzene, 1,3-diaminobenzene, 2,4-diaminotoluene, 4,4'-diaminodiphenylmethane, 4,4'-diaminodiphenyl ether, 3,4'-diaminodiphenyl ether, 3,3'-dimethyl-4,4'- Diaminobiphenyl, 2,2′-dimethyl-4,4′-diaminobiphenyl, 2,2′-bis (trifluoromethyl) -4,4′-diaminobiphenyl, 3,7-diamino-dimethyldibenzothiophene-5 5-dioxide, 4,4′-diaminobenzophenone, 3,3′-diamino
  • the main chain terminal of the polyimide precursor is not particularly limited as long as it does not affect the performance, and may be an acid dianhydride or a terminal structure derived from a diamine used for producing the polyimide precursor.
  • the terminal may be sealed with other acid anhydrides or amine compounds.
  • a polyimide precursor having a polyimide structure and a polyamic acid structure as repeating units, respectively, is a step of reacting acid dianhydride and diamine in a non-equal molar amount to synthesize a first-stage polyimide portion (step 1), followed by 2 It can be produced by a step of synthesizing the polyamic acid portion at the stage (step 2).
  • step 1 is not necessarily included.
  • each process will be described.
  • the process of synthesizing the first stage polyimide portion will be described.
  • the step of synthesizing the first-stage polyimide portion is not particularly limited, and a known method can be applied. More specifically, the polyimide portion can be synthesized by the following method. First, diamine is dissolved and / or dispersed in a polymerization solvent, and acid dianhydride powder is added thereto. Then, a solvent that is azeotroped with water is added, and the mixture is heated and stirred for 0.5 to 96 hours, more preferably for 0.5 to 30 hours while removing by-product water azeotropically using a mechanical stirrer.
  • the polyimide part can be synthesized by adding a known imidization catalyst or without a catalyst.
  • the imidation catalyst is not particularly limited, but may be an acid anhydride such as acetic anhydride, ⁇ -valerolactone, ⁇ -butyrolactone, ⁇ -tetronic acid, ⁇ -phthalide, ⁇ -coumarin, and ⁇ -phthalido acid. Lactone compounds, and tertiary amines such as pyridine, quinoline, N-methylmorpholine, and triethylamine. Moreover, you may use 1 type, or 2 or more types of these mixtures as needed. Among these, a mixed system of ⁇ -valerolactone and pyridine and non-catalyst are particularly preferable from the viewpoint of high reactivity and reducing the influence on the next reaction.
  • the reaction solvent used in the synthesis of the polyimide part includes 2 or more carbon atoms such as dimethyl ether, diethyl ether, methyl ethyl ether, tetrahydrofuran, dioxane, ethylene glycol dimethyl ether, diethylene glycol dimethyl ether, and triethylene glycol dimethyl ether.
  • Particularly preferable solvents include ether compounds having 2 to 9 carbon atoms, ester compounds having 3 to 12 carbon atoms, aromatic hydrocarbon compounds having 6 to 10 carbon atoms, and 2 carbon atoms. Examples thereof include nitrogen-containing compounds having 10 or less carbon atoms. These can be arbitrarily selected in consideration of industrial productivity and influence on the next reaction.
  • the reaction temperature is preferably 100 ° C. or higher and 250 ° C. or lower.
  • the synthesis of the polyamic acid moiety at the second stage can be carried out by using the polyimide moiety obtained in Step 1 as a starting material and adding diamine and / or acid dianhydride for polymerization.
  • the polymerization temperature in the synthesis of the second stage polyamic acid moiety is preferably 0 ° C. or higher and 80 ° C. or lower.
  • the time required for the reaction varies depending on the purpose or reaction conditions, but is usually in the range of 30 minutes to 30 hours.
  • step 2 When performing step 2 without performing step 1, first, diamine is dissolved and / or dispersed in a polymerization solvent, and acid dianhydride powder is added thereto.
  • the polymerization solvent is the same as that exemplified in Step 1.
  • the polymerization temperature is preferably 0 ° C. or higher and 80 ° C. or lower.
  • the time required for the reaction is usually from 30 minutes to 30 hours.
  • a carboxyl group-containing polyimide is synthesized by mixing tetracarboxylic dianhydride and diamine in an organic solvent at a molar ratio of 0.8: 1 to 1.2: 1 and reacting them.
  • the skeleton is characterized by containing a carboxyl group even after imidization, but the polyamic acid structure may partially remain.
  • the carboxyl group-containing polyimide is usually synthesized using a carboxyl group-containing diamine. From the viewpoint of solubility in organic solvents or availability, 3,5-diaminobenzoic acid, 3,3′-dicarboxy-4,4′-diaminodiphenylmethane, or the like may be used as the carboxyl group-containing diamine. It can. These diamines may be used alone or in combination of two or more.
  • Examples of the tetracarboxylic dianhydride, the diamine used in combination with the carboxyl group-containing diamine, the solvent used for the synthesis, and the imidization catalyst are the same as those described above for the (A2) polyimide precursor.
  • the carboxyl group-containing polyurethane according to the present embodiment is a known disulfide compound, a carboxyl group-containing diol compound, and other diol compounds in an aprotic solvent having an activity corresponding to the respective reactivity. It is synthesized by adding a catalyst and heating.
  • the molar ratio of the diisocyanate and diol compound to be used is preferably 0.8: 1 to 1.2: 1. When an isocyanate group remains at the end of the polymer, the molar ratio can be determined by treating with an alcohol or an amine. Is synthesized in a form in which no isocyanate group remains.
  • Diisocyanate compounds include 2,4-tolylene diisocyanate, dimer of 2,4-tolylene diisocyanate, 2,6-tolylene diisocyanate, p-xylylene diisocyanate, m-xylylene diisocyanate, 4,4'- Aromatic diisocyanate compounds such as diphenylmethane diisocyanate, 1,5-naphthylene diisocyanate, 3,3′-dimethylhyphenyl-4,4′-diisocyanate: hexamethylene diisocyanate, trimethylhexamethylene diisocyanate, lysine diisocyanate, dimer acid diisocyanate, etc.
  • Aromatic diisocyanate compounds such as diphenylmethane diisocyanate, 1,5-naphthylene diisocyanate, 3,3′-dimethylhyphenyl-4,4′-diisocyanate: hexamethylene diisocyanate
  • Aliphatic diisocyanate compounds such as: isophorone diisocyanate, 4,4′-methylenebis (cyclohexyl isocyanate), methylcyclohexane-2,4- (or 2 6)
  • Alicyclic diisocyanate compounds such as diisocyanate and 1,3- (isocyanatomethyl) cyclohexane; reaction product of diol and diisocyanate such as an adduct of 1 mol of 1,3-butylene glycol and 2 mol of tolylene diisocyanate The diisocyanate compound etc. which are are mentioned.
  • carboxyl group-containing diols examples include 3,5-dihydroxybenzoic acid, 2,2-bis (hydroxymethyl) propionic acid, 2,2-bis (2-hydroxyethyl) propionic acid, and 2,2-bis (3-hydroxy Propyl) propionic acid, bis (hydroxymethyl) acetic acid, bis (4-hydroxydiphenyl) acetic acid, 4,4-bis (4-hydroxydiphenyl) pentanoic acid, tartaric acid, N, N-dihydroxyethylglycine, N, N-bis (2-hydroxyethyl) -3-carboxy-propionamide and the like.
  • diol compounds used in combination with a carboxyl group-containing diol compound include high molecular weight diols such as polytetramethylene diol, polybutadiene diol, hydrogenated polybutadiene diol, polycarbonate diol, polyester diol, and polycaprolactone diol; or ethylene glycol, 1 , 2-propylene glycol, 1,3-propylene glycol, 1,3-butylene glycol, 2,3-butylene glycol, 1,4-butanediol, 2,2′-dimethyl-1,3-propanediol, diethylene glycol, Triethylene glycol, 1,5-pentamethylene glycol, dipropylene glycol, neopentyl glycol, 1,6-hexamethylene glycol, cyclohexane-1,4-dio , Cyclohexane-1,4-diol, cyclohexane-1,4-dimethanol, 2-butene-1
  • (B) Compound containing carboxyl group and ethylenically unsaturated group
  • (B) The compound containing carboxyl group and ethylenically unsaturated group according to the present embodiment has one or more carboxyl groups and one in the molecule.
  • (B1) epoxy (meth) acrylate acid modified material can be used conveniently.
  • the acid value (mgKOH / g) of the compound containing a carboxyl group and an ethylenically unsaturated group is 60 or more, preferably 60 to 200.
  • the acid value is preferably 200 or less from the viewpoint of reducing the moisture permeability of the cured film of the photosensitive resin composition and improving the rust prevention property of the conductor, and from the viewpoint of improving the low temperature developability of the photosensitive resin composition layer. From the viewpoint of balance of both performances, 70 to 170 is more preferable, and 80 to 150 is still more preferable.
  • the acid value is measured in the same manner as described above for the (A) alkali-soluble resin.
  • the weight average molecular weight of the compound containing a carboxyl group and an ethylenically unsaturated group is (A) compatible with an alkali-soluble resin, tackiness when used as a transfer film, and low-temperature developability. 1,000 or more and 9,500 or less.
  • the weight average molecular weight of the compound containing a carboxyl group and an ethylenically unsaturated group is 1,000 or more from the viewpoint of the properties of the unexposed film such as tackiness, edge fuse property and cut chip property when used as a transfer film. From the viewpoint of low temperature developability and low temperature laminating property of the photosensitive resin composition layer, it is 9,500 or less, preferably 2,000 or more and 8,000 or less.
  • the hydroxyl value (mgKOH / g) of the compound containing a carboxyl group and an ethylenically unsaturated group is preferably 30 or less, and more preferably 20 or less.
  • the moisture permeability of the cured product of the photosensitive resin composition can be lowered, so that the rust prevention property of the conductor is improved.
  • the measurement of the hydroxyl value is performed in the same manner as described above for the (A) alkali-soluble resin.
  • the compound (B) containing a carboxyl group and an ethylenically unsaturated group according to the present embodiment is 1) a refractive index of 1.570 or more, and / or 2) the following general formulas (1) to (3) It includes at least one of the skeletons represented by By satisfying the above 1) and / or 2), the moisture permeability of the cured product obtained from the photosensitive resin composition according to the present embodiment can be lowered, so that the rust prevention property of the conductor is improved.
  • the refractive index of the component (B) is preferably 1.570 or more, and preferably 1.650 or less from the viewpoint of low-temperature developability of the photosensitive resin composition layer.
  • the refractive index of the component (B) according to the present embodiment is measured by the following method.
  • an organic solvent having a boiling point of 200 ° C. or less at 1 atm that dissolves a compound containing a carboxyl group and an ethylenically unsaturated group for example, ethanol, acetone, methyl ethyl ketone, 1-methoxy-2-propanol, propylene) Glycol-1-monomethyl ether-2-acetate
  • the solid content concentration is adjusted to 30 to 70% by mass.
  • the obtained solution was coated on a commercially available polyethylene terephthalate (PET) film (thickness 16 ⁇ m) with a bar coater, dried in a hot air oven at 100 ° C. for 10 minutes, and (B) carboxyl group and ethylenically unsaturated group.
  • PET polyethylene terephthalate
  • a layered product having a thickness of 5 ⁇ m is obtained.
  • Refractive index measurement is performed using a prism made by Metricon, Prism Coupler Model 2010 / M, laser beam wavelength: 532 nm, and in a state where a layer made of a compound containing (B) a carboxyl group and an ethylenically unsaturated group is in contact with the prism. Is called.
  • Epoxy (meth) acrylate acid-modified product is defined as a compound that satisfies the following two conditions, and is an acid-modified epoxy (meth) acrylate Also called a compound.
  • a compound containing two or more epoxy groups in the molecule can be synthesized as a starting material. ii) It contains one or more carboxyl groups and one or more (meth) acryloyl groups in the molecule.
  • a carboxyl group of a monocarboxylic acid having a (meth) acryloyl group is reacted with an epoxy group of a compound containing two or more epoxy groups in the molecule.
  • the monocarboxylic acid having a (meth) acryloyl group is, for example, acrylic acid or methacrylic acid.
  • Known reaction conditions can be applied to this reaction.
  • the epoxy group is cleaved by the reaction to generate a hydroxyl group.
  • the second reaction is a reaction between the hydroxyl group of the compound produced in the first reaction and a dicarboxylic acid anhydride.
  • a dicarboxylic acid anhydride either a saturated dicarboxylic acid anhydride or an unsaturated dicarboxylic acid anhydride can be used.
  • dicarboxylic anhydrides include, for example, succinic anhydride, maleic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, methyltetrahydrophthalic anhydride, methylhexahydrophthalic anhydride, endomethylenetetrahydroanhydride.
  • Examples thereof include phthalic acid and methylbutenyl tetrahydrophthalic anhydride. Of these, succinic anhydride, phthalic anhydride, tetrahydrophthalic anhydride and methyltetrahydrophthalic anhydride are particularly preferred. These dicarboxylic acid anhydrides can be used individually by 1 type, and 2 or more types can also be mixed and used for them. Known reaction conditions can also be used for the second reaction between the hydroxyl group and the anhydride group. By the reaction, the anhydride group is cleaved to produce an ester group and a carboxyl group.
  • the amount of the acid anhydride group of the dicarboxylic dianhydride in the second reaction is usually 60 to 100 parts by mole, preferably 75 parts by mole or more and 100 parts by mole or less with respect to 100 parts by mole of the hydroxyl group produced in the first reaction.
  • the epoxy (meth) acrylate modified product synthesized through the first and second reactions is further reacted with a compound having one epoxy group and one or more radically polymerizable unsaturated groups in the molecule. It is also possible to increase the content of ethylenically unsaturated groups (third reaction).
  • the compound having one epoxy group and one or more radically polymerizable unsaturated groups in the molecule include glycidyl acrylate, glycidyl methacrylate, and allyl glycidyl ether.
  • ⁇ Synthesis method (2)> As the first reaction, as in the above synthesis method (1), the carboxyl group of a monocarboxylic acid having a (meth) acryloyl group is reacted with the epoxy group of a compound containing two or more epoxy groups in the molecule. .
  • the monocarboxylic acid having a (meth) acryloyl group is, for example, acrylic acid or methacrylic acid.
  • Known reaction conditions can be applied to this reaction.
  • the epoxy group is cleaved by the reaction to generate a hydroxyl group.
  • the second reaction is a reaction between the hydroxyl group of the compound produced in the first reaction and a tetracarboxylic anhydride.
  • tetracarboxylic acid anhydrides include biphenyl-3,3 ′, 4,4′-tetracarboxylic dianhydride, benzophenone-3,3 ′, 4,4′-tetracarboxylic dianhydride, oxydiphthalic acid dianhydride , Diphenylsulfone-3,3 ′, 4,4′-tetracarboxylic dianhydride, ethylene glycol bis (trimellitic acid monoester anhydride), p-phenylenebis (trimellitic acid monoester acid anhydride) , P-biphenylenebis (trimellitic acid monoester acid anhydride), m-phenylenebis (tomellitic acid monoester acid anhydride), o-phenylenebis (trimellitic acid monoester acid anhydride), pentan
  • the third reaction is a reaction between the residual hydroxyl group of the compound produced in the second reaction and a dicarboxylic acid anhydride.
  • a dicarboxylic acid anhydride either a saturated dicarboxylic acid anhydride or an unsaturated dicarboxylic acid anhydride can be used.
  • dicarboxylic anhydrides include, for example, succinic anhydride, maleic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, methyltetrahydrophthalic anhydride, methylhexahydrophthalic anhydride, endomethylenetetrahydroanhydride.
  • Examples thereof include phthalic acid and methylbutenyl tetrahydrophthalic anhydride. Of these, succinic anhydride, phthalic anhydride, tetrahydrophthalic anhydride and methyltetrahydrophthalic anhydride are particularly preferred. These dicarboxylic acid anhydrides can be used individually by 1 type, and 2 or more types can also be mixed and used for them. Known reaction conditions can be used for the third reaction between the hydroxyl group and the dicarboxylic anhydride group. By the reaction, the anhydride group is cleaved to produce an ester group and a carboxyl group, and an epoxy (meth) acrylate acid modified product can be obtained.
  • the total amount of acid anhydride groups in the tetracarboxylic dianhydride in the second reaction and the dicarboxylic anhydride in the third reaction is usually 60 to 100 moles per 100 moles of the hydroxyl group produced in the first reaction. Part, preferably 75 parts by mole or more and 100 parts by mole or less.
  • the second reaction and the third reaction can also be performed simultaneously. As a specific synthesis method, the method described in JP-A-06-001938 can be used.
  • the modified epoxy (meth) acrylate acid synthesized through the first to third reactions is further reacted with a compound having one epoxy group and one or more radically polymerizable unsaturated groups in the molecule. It is also possible to increase the content of ethylenically unsaturated groups (fourth reaction).
  • the compound having one epoxy group and one or more radically polymerizable unsaturated groups in the molecule include glycidyl acrylate, glycidyl methacrylate, and allyl glycidyl ether.
  • the epoxy (meth) acrylate modified product according to this embodiment can be obtained by the synthesis method (1), the synthesis method (2), or the like, but a commercially available product can also be used.
  • Commercially available epoxy (meth) acrylate modified products containing the general formula (1) include ZCR-1569H, ZCR-1601H, ZCR-1797H, ZCR-1798H (manufactured by Nippon Kayaku Co., Ltd.), etc.
  • Commercially available epoxy (meth) acrylate modified products containing formula (3) include FCA-954, FCA-293, FCA-506 (manufactured by Nagase ChemteX) or TR-B201, TR-B202 (Strong Changzhou) Electronic material company) etc. are mentioned.
  • Mass ratio A / B of (A) alkali-soluble resin and compound containing (B) carboxyl group and ethylenically unsaturated group according to the present embodiment ((A) mass of alkali-soluble resin / (B) carboxyl group and The mass of the compound containing an ethylenically unsaturated group is 0.18 to 6.0.
  • a / B is 0.18 or more, the tackiness of the transfer film is improved, and the adhesion to the conductor base material is improved.
  • a / B is 6.0 or less, the low temperature laminating property and the moisture permeability of the cured film are reduced. Surprisingly, the low temperature developability deteriorates when A / B is less than 0.18 and more than 6.0. From the viewpoint of balance of various performances, a more preferable range of A / B is 0.40 to 1.0.
  • the photopolymerizable compound according to the present embodiment is a compound having an ethylenically unsaturated double bond, for example, a compound having polymerizability by having an ethylenically unsaturated group in the structure thereof.
  • the compound having an ethylenically unsaturated double bond preferably includes (c1) a compound having three or more polymerizable groups in the molecule and / or (c2) a compound having one polymerizable group in the molecule. It is more preferable to contain.
  • the compound which has an ethylenically unsaturated double bond can be used in combination with compounds other than the above.
  • Component (c1) contains a compound having three or more polymerizable groups in the molecule, thereby increasing the crosslink density of the protective film, making it difficult for moisture to permeate, and reducing the moisture permeability of the cured film. Can do.
  • the compound having three or more polymerizable groups in the molecule has at least 3 moles of a group capable of adding an alkylene oxide group in the molecule as a central skeleton, and this group has an ethylene oxide group and a propylene oxide group. Alternatively, it can be obtained by converting an alcohol obtained by adding an alkylene oxide group such as a butylene oxide group into (meth) acrylate.
  • (meth) acrylic acid may be reacted directly with the central skeleton without modifying the central skeleton with an alkylene oxide group.
  • the compound that can be a central skeleton include glycerin, trimethylolpropane, pentaerythritol, diglycerin, ditrimethylolpropane, dipentaerythritol, and isocyanurate rings.
  • the photosensitive resin composition further preferably includes (c1) a compound having a molecular weight of 430 or less as the compound having three or more polymerizable groups in the molecule.
  • the molecular weight of the component (c1) is 430 or less, the low temperature developability of the photosensitive resin composition layer is improved.
  • Examples of the compound having a molecular weight of 430 or less include compounds having glycerin, trimethylolpropane, pentaerythritol and the like as a central skeleton.
  • the component (C) may contain pentaerythritol tetra (meth) acrylate or trimethylolpropane tri (meth) acrylate. preferable.
  • (C1) Without compound or in addition to (c1) compound, (c2) By including a compound having one polymerizable group in the molecule, (C) the entire compound having an ethylenically unsaturated double bond The reaction rate is improved, and the moisture permeability of the cured film can be expected to be reduced. Moreover, the improvement of the low temperature developability of the photosensitive resin composition layer may be seen.
  • (C2) As a compound having one polymerizable group in the molecule, a compound obtained by adding (meth) acrylic acid to one end of polyalkylene oxide, (meth) acrylic acid added to one end, and the other end And the like, and the like.
  • compound (c3) having an ethylenically unsaturated double bond for example, a compound having a (meth) acryloyl group at both ends of a polyalkylene oxide chain, or a polyethylene oxide chain and a polypropylene oxide chain And a compound having a (meth) acryloyl group at both ends of an alkylene oxide chain bonded to each other in a random or block manner, a compound having bisphenol A modified with an alkylene oxide and having a (meth) acryloyl group at both ends It is done.
  • the compound (c3) having an ethylenically unsaturated double bond is a urethane which is a reaction product of a diisocyanate compound and a compound having a hydroxyl group and a (meth) acryl group in one molecule.
  • Compounds and the like Compounds and the like.
  • Commercially available compounds having an ethylenically unsaturated double bond include A-TMMT (made by Shin-Nakamura Chemical Co., Ltd.) as pentaerythritol tetraacrylate, and POB-A (Kyoeisha Chemical Co., Ltd.) as m-phenoxybenzyl acrylate.
  • the content of the compound having an ethylenically unsaturated double bond in the photosensitive resin composition is the mass of the photosensitive resin composition from the viewpoints of resolution, conductor adhesion of the cured film, and moisture permeability reduction.
  • the reference is preferably 20% by mass to 60% by mass, and more preferably 30% by mass to 50% by mass.
  • the photopolymerization initiator (D) is a compound capable of generating radicals with active light and polymerizing an ethylenically unsaturated group-containing compound.
  • the photopolymerization initiator according to the present embodiment is a compound capable of generating radicals with active light and polymerizing an ethylenically unsaturated group-containing compound or the like.
  • benzophenone N, N, N ′, N′-tetramethyl-4,4′-diaminobenzophenone (Michler ketone), N, N, N ′, N′-tetraethyl- 4,4′-diaminobenzophenone, 4-methoxy-4′-dimethylaminobenzophenone, 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butanone-1,2-methyl-1- [4- Aromatic ketones such as (methylthio) phenyl] -2-morpholino-propanone-1, acrylated benzophenone, 4-benzoyl-4′-methyldiphenyl sulfide; benzoin ether compounds such as benzoin methyl ether, benzoin ethyl ether and benzoin phenyl ether Benzoins such as benzoin, methylbenzoin and
  • oxime ester compounds are preferable from the viewpoints of improving the rust prevention property of the conductor, reducing the moisture permeability of the cured film, and improving the chemical resistance, and among these, compounds having a high molar extinction coefficient of 365 nm are more preferable.
  • an oxime initiator having a high absorption coefficient at a wavelength of 365 nm a highly sensitive protective film can be obtained by i-line exposure.
  • an oxime ester compound is preferable, and among these, a compound having a high molar extinction coefficient of 365 nm is more preferable.
  • a highly sensitive protective film can be obtained by i-line exposure. Thereby, high surface curability is obtained, it is speculated that the penetration of sodium ions in the development process as described above can be suppressed, and as a result, high rust prevention property of the conductor can be obtained.
  • 1,2-octanedione, 1-[(4-phenylthio) phenyl-, 2- (O-benzoyloxime)] (manufactured by BASF Japan Ltd., Irgacure Oxe01, product name) Ethanone, 1- [9-ethyl-6- (2-methylbenzoyl) -9H-carbazol-3-yl]-, 1- (O-acetyloxime) (manufactured by BASF Japan Ltd., Irgacure Oxe02), 1 -[4- (phenylthio) phenyl] -3-cyclopentylpropane-1,2-dione-2- (O-benzoyloxime) (TR-PBG-305, product name) from Changzhou Power Electronics New Materials Co., Ltd., and 1, 2-propanedione, 3-cyclohexyl-1- [9-ethyl-6- (2-furanylcarbonyl) -9H-
  • the content of the photopolymerization initiator in the photosensitive resin composition is 0.1% by mass to 10% by mass based on the mass of the photosensitive resin composition, and is a viewpoint of sensitivity and resolution. Therefore, the content is more preferably 0.3% by mass to 5% by mass. If the content of the photopolymerization initiator is in the range of 0.1% by mass to 10% by mass, the photosensitivity will be sufficient, and the absorption on the surface of the composition will increase when irradiated with actinic rays. Problems such as insufficient internal photocuring and a decrease in visible light transmittance can be suppressed.
  • Thermal crosslinking agent is a compound containing (A) an alkali-soluble resin, (B) a carboxyl group and an ethylenically unsaturated group or an unreacted (B) ethylenically unsaturated double bond by heat.
  • a thermal cross-linking agent added at the same time it means a compound causing an addition reaction or a condensation polymerization reaction.
  • the temperature at which the addition reaction or condensation polymerization reaction occurs is preferably 100 ° C to 150 ° C. The addition reaction or condensation reaction occurs during heat treatment after pattern formation by development.
  • thermal crosslinking agent examples include, but are not limited to, a blocked isocyanate compound, a diol compound, an epoxy compound, and a thermal crosslinking agent described in paragraph [0054] of International Publication No. 2016/047691.
  • the blocked isocyanate compound is a compound obtained by reacting a blocking agent with an isocyanate compound having two or more isocyanate groups in the molecule.
  • isocyanate compound examples include 1,6-hexane diisocyanate, 4,4′-diphenylmethane diisocyanate, 2,4-tolylene diisocyanate, and 2,6-tolylene diisocyanate.
  • the blocking agent examples include alcohols, phenols, ⁇ -caprolactam, oximes, active methylenes, mercaptans, amines, imides, acid amides, imidazoles, ureas, and carbamine.
  • examples include acid salts, imines, and sulfites.
  • blocked isocyanate compound examples include hexamethylene diisocyanate block isocyanate (for example, Duranate SBN-70D, SBB-70P, SBF-70E, TPA-B80E, 17B-60P, MF-B60B, E402- manufactured by Asahi Kasei Corporation).
  • hexamethylene diisocyanate block isocyanate for example, Duranate SBN-70D, SBB-70P, SBF-70E, TPA-B80E, 17B-60P, MF-B60B, E402- manufactured by Asahi Kasei Corporation.
  • a diol compound refers to a compound containing two hydroxyl groups per molecular chain.
  • the skeleton include those containing hydrocarbon groups such as aliphatic, aromatic and alicyclic groups.
  • Specific examples of the diol compound include polytetramethylene diol (for example, P4TMG650, PTMG850, PTMG1000, PTMG1300, PTMG1500, PTMG1800, PTMG2000, and PTMG3000 manufactured by Mitsubishi Chemical Corporation), polybutadiene diol (for example, Nippon Soda Co., Ltd.) Manufactured by G-1000, G-2000, and G-3000), hydrogenated polybutadiene diol (for example, GI-1000, GI-2000, and GO-3000 manufactured by Nippon Soda Co., Ltd.), polycarbonate diol (for example, Asahi Kasei) DURANOL T5651, DURANOL T5652, DURANOL T4671
  • the thermal crosslinking agent is preferably a blocked isocyanate compound from the viewpoint of storage stability of the transfer film and reduced moisture permeability of the cured film, and is further used in combination with a diol compound from the viewpoint of low-temperature developability of the photosensitive resin composition layer. It is more preferable.
  • the content of the thermal crosslinking agent in the photosensitive resin composition is 0.2% by mass to 40% by mass based on the mass of the photosensitive resin composition, and from the viewpoint of developability and low water permeability.
  • the content is more preferably 1% by mass to 30% by mass, and further preferably 2% by mass to 20% by mass.
  • the block isocyanate compound is a carboxyl group or hydroxyl group of a compound containing (A) an alkali-soluble resin or (B) a carboxyl group and an ethylenically unsaturated group, or a combined diol compound in a heat treatment after pattern formation by development. Since it reacts with the hydroxyl group, the moisture permeability of the cured film is lowered, and the rust prevention property for protecting the substrate, the electrode and the like is improved.
  • the blocked isocyanate compound is crosslinked with (A) an alkali-soluble resin and / or (B) a compound containing a carboxyl group and an ethylenically unsaturated group, thereby increasing the crosslinking density of the cured film and reducing the water diffusibility. Therefore, it is considered that the moisture permeability of the cured film is lowered and the rust prevention property of the conductor is improved. Moreover, since the isocyanate group is sealed with the blocking agent in the blocked isocyanate, the reaction with the (A) alkali-soluble resin or diol compound at room temperature is suppressed, and the stability of the photosensitive resin composition and the transfer film is improved. Kept.
  • the diol compound Since the diol compound has a hydrophilic hydroxyl group, the developability is good. In addition, in the heat treatment after pattern formation by development, the hydroxyl group of the diol compound reacts with the blocked isocyanate compound, so that excellent rust resistance of the conductor is maintained.
  • the molecular weight of the diol compound is preferably from 300 to 3,000, more preferably from 500 to 2,000, from the viewpoint of developability.
  • the moisture permeability of the cured film is deteriorated, which may be a factor that impairs the rust prevention performance of the conductor.
  • the diol compound is preferably added so that the hydroxyl value of the photosensitive resin composition is 20 mgKOH / g or less, and more preferably 15.0 mgKOH / g or less. Since the moisture permeability of the hardened
  • the (F) rosin ester compound according to the present embodiment is a rosin acid that is a non-volatile component of rosin, a rosin acid that is a tricyclic diterpenoid having 20 carbon atoms, a dimer of rosin acid, a hydrogenated product of rosin acid, and A compound having an ester bond by reacting a compound selected from the group consisting of disproportionates of rosin acid (hereinafter collectively referred to as “rosin acid derivative”) with any of a hydroxyl compound, a phenol compound, and a glycidyl compound, It is a compound having an ester bond by glycidylating a rosin acid derivative and reacting either a carboxyl compound or a phenol compound.
  • rosin acid derivative a compound selected from the group consisting of disproportionates of rosin acid
  • rosin ester compounds include, for example, Arakawa Chemical Co., Ltd. products such as the ester gum series, pine crystal series, super ester series, pencel series, beam set 101, etc.
  • the company's products include the Harrier Star Series, Neotor Series, and Harituck Series.
  • the rosin ester compound has a cycloaliphatic structure and an ester structure, so that the hydrophobicity is increased, but (A) an alkali-soluble resin, (B) a carboxyl group and ethylene in the photosensitive resin composition. Since the compatibility with the compound containing a polymerizable unsaturated group, (C) the photopolymerizable compound, and (D) the photopolymerization initiator is good, the developability as a composition is not hindered. It has excellent performance balance of low temperature developability, moisture permeability of cured film, and rust prevention of conductor.
  • the acid value of the (F) rosin ester compound is more preferably 20 mgKOH / g or less.
  • the acid value of the (F) rosin ester compound is more preferably 20 mgKOH / g or less.
  • the above-mentioned products of Arakawa Chemical Co., Ltd. and Harima Kasei Co., Ltd. For example, Pine Crystal KE-100, Ester Gum 105, Super Ester A-115, Super Ester A-125, Pencel A, Pencel C, Pencel D-125, Pencel D-135, Pencel D-160, Beam Set 101, Harrier Star S, Neotol 125HK, Haritac F105, Haritac FK125, Haritac PCJ, and the like.
  • the rosin ester compound (F) preferably has a softening point of 100 ° C. or higher.
  • Specific examples of compounds satisfying these conditions include, for example, ester gum 105, Superester A-115, Superester A-125, Pencel A, Pencel C, Pencel D-125, Pencel D-135, Pencel D-160, Neotol 125HK, etc., with a softening point of 110 ° C. or higher
  • Particularly preferred specific compounds satisfying these conditions are Superester A-115, Superester A-125, Pencel A, Pencel C, Pencel D-125, Pencel D-135, Pencel D-160, Neotol 125HK is mentioned.
  • the rosin ester compound may be used alone or in combination of two or more.
  • the content of the rosin ester compound in the photosensitive resin composition is 1% by mass to 20% by mass with respect to 100% by mass of the total solid content of the photosensitive resin composition. From 5% by mass to 20% by mass, more preferably from 5% by mass to 15% by mass from the viewpoint of adhesion to the substrate. (F) When the content of the rosin ester compound is in the range of 1% by mass to 20% by mass, the performance balance between the low temperature developability of the transfer film and the moisture permeability of the cured film is good.
  • the rust preventive agent according to the present embodiment refers to a compound having a rust preventive effect, such as a substance that forms a film on a metal surface to prevent corrosion or rust of the metal.
  • heterocyclic compounds containing N, S, O and the like are preferable.
  • heterocyclic compounds containing N, S, O and the like are preferable.
  • the derivatives described here include compounds in which a substituent is introduced into the base structure.
  • a substituent is introduced into the base structure.
  • transduced the substituent into tetrazole is contained.
  • the substituent is not particularly limited.
  • the substituent may be a hydrocarbon group (saturated or unsaturated, may be linear or branched, and may include a cyclic structure in its structure), or a hydroxyl group or a carbonyl group.
  • Carboxyl groups amino groups, amide groups, nitro groups, cyano groups, thiol groups, and substituents containing one or more functional groups having heteroatoms such as halogen (fluorine, chlorine, bromine, iodine, etc.) groups.
  • halogen fluorine, chlorine, bromine, iodine, etc.
  • the heterocyclic compound has a heterocyclic ring composed of C and N and / or S, and the number of N atoms in the same heterocyclic ring is 3 or less, or S A compound having 3 or less atoms or a total number of N and S atoms of 3 or less is preferred.
  • More preferred heterocyclic compounds are triazole and its derivatives, imidazole and its derivatives, imidazoline and its derivatives, thiazole and its derivatives, isothiazole and its derivatives, thiadiazole and its derivatives, thiophene and its derivatives, and the like.
  • the compound is more preferably benzotriazole and its derivatives, and imidazole and its derivatives.
  • Triazoles such as 1,2,3-triazole, 1,2,4-triazole, etc .
  • Triazole derivatives such as 3-mercaptotriazole, 3-amino-5-mercaptotriazole, benzotriazole, 1H-benzotriazole-1-acetonitrile, 1- [N, N-bis (2-ethylhexyl) aminomethyl] benzotriazole, 1- (2-di-n-butylaminomethyl) -5-carboxybenzotriazole, 1- (2-di-n-butylaminomethyl) -6-carboxybenzotriazole, 1H-benzotriazole-1-methanol, 5 -Met
  • Imidazole Imidazole derivatives such as undecyl imidazole, benzimidazole, 5-carboxybenzimidazole, 6-bromobenzimidazole, 5-chlorobenzimidazole, 2-hydroxybenzimidazole, 2- (1-hydroxymethyl) benzimidazole, 2 -Methylbenzimidazole, 5-nitrobenzimidazole, 2-phenylbenzimidazole, 2-aminobenzimidazole, 5-aminobenzimidazole, 5-amino-2-mercaptobenzimidazole, etc .; An imidazoline; an imidazoline derivative such as 2-undecylimidazoline, 2-propyl-2-imidazoline, 2-phenylimidazoline; Thiazole; thiazole derivatives such as 2-amino-4-methylthiazole, 5- (2-hydroxyethyl) -4-methylthiazole, benzothiazole, 2-mercaptobenzothiazole, 2-amino
  • Isothiazole isothiazole derivatives such as 3-chloro-1,2-benzisothiazole; Thiadiazoles such as 1,2,3-thiadiazole, 1,2,5-thiadiazole, 1,3,4-thiadiazole and the like; thiadiazole derivatives such as 4-amino-2,1,3-benzothiadiazole, 2-amino -5-mercapto-1,3,4-thiadiazole, 2-amino-5-methyl-1,3,4-thiadiazole, 2-amino-1,3,4-thiadiazole, 5-amino-1,2,3 -Thiadiazole, 2-mercapto-5-methyl-1,3,4-thiadiazole, etc .; Thiophene; thiophene derivatives such as 2-thiophenecarboxylic acid, methyl 3-amino-2-thiophenecarboxylate, 3-methylbenzothiophene and the like.
  • benzotriazole, 5-carboxybenzotriazole, 1-hydroxybenzotriazole, and 5-chlorobenzotriazole are particularly preferable from the viewpoints of rust prevention of the conductor and low-temperature developability of the transfer film.
  • component (G) tetrazole and its derivatives, triazole and its derivatives, indazole and its derivatives, and thiadiazole and its derivatives are preferable from the viewpoint of the rust prevention property of the conductor and the adhesion between the cured film and the base material.
  • tetrazole examples include 1H-tetrazole.
  • tetrazole derivatives include 5-amino-1H-tetrazole, 5-methyl-1H-tetrazole, 1-methyl-5-ethyl-1H-tetrazole, 1-methyl-5-mercapto-1H-tetrazole, 1- Examples include phenyl-5-mercapto-1H-tetrazole, 1- (dimethylaminoethyl) -5-mercapto-1H-tetrazole, and 5-phenyl-1H-tetrazole.
  • indazole is 1H-indazole.
  • indazole derivatives include 5-aminoindazole, 6-aminoindazole, 1-benzyl-3-hydroxy-1H-indazole, 5-bromoindazole, 6-bromoindazole, 6-hydroxyindazole, 3-carboxyindazole and 5-nitroindazole. And indazole.
  • triazole and its derivatives and thiadiazole and its derivatives are as already described above.
  • 5-amino-1H-tetrazole, 5-carboxybenzotriazole, 5-aminoindazole and 5-amino-1,2, 3-thiadiazole is particularly preferred.
  • 1 type of the antirust agent demonstrated above may be used independently, and 2 or more types may be used together.
  • the content of the rust inhibitor in the photosensitive resin composition is preferably 0.05% by mass or more based on the mass of the photosensitive resin composition from the viewpoint of rust prevention of the conductor or low temperature developability of the transfer film. It is 10% by mass, more preferably 0.1% by mass to 5% by mass, and still more preferably 0.2% by mass to 3% by mass.
  • ⁇ Other ingredients> in addition to components (A) to (G), as other component (H), an oligomer having a carboxyl group and an ethylenically unsaturated group, an aluminum salt to which 3 mol of nitrosophenylhydroxylamine has been added, etc.
  • Polymerization inhibitors, antioxidants, adhesion aids, leveling agents, fillers, antifoaming agents, flame retardants, etc. can also be included in the photosensitive resin composition, and these can be used alone or in combination of two or more. Can be used.
  • GPC gel permeation chromatography
  • S ⁇ 50k is in the range of 1.0 to 9.0%, a photosensitive resin composition having excellent low-temperature developability can be provided.
  • S ⁇ 50k is preferably in the range of 2.5 to 6.7% from the viewpoint of low-temperature developability.
  • the component belonging to the region of molecular weight M ⁇ 50000 in the differential molecular weight distribution curve contains an aromatic ring.
  • the component having a molecular weight M ⁇ 50000 and containing an aromatic ring can be derived from, for example, the components (A1) to (A4) described above.
  • the high molecular weight component of the photosensitive resin composition in the present embodiment includes an acidic functional group and has a refractive index n2 of 1.560 or more.
  • the refractive index of the photosensitive resin composition layer is preferably 1.550 or more.
  • it is preferable that the refractive index of the photosensitive resin composition layer is 1.630 or less.
  • 10.0 g of the photosensitive resin composition or its layer was precisely weighed as a sample in a 100 mL Erlenmeyer flask, 30.0 g of tetrahydrofuran (THF) was added thereto, the container was sealed, Stir with a stirrer for 1 hour. After removing insolubles by filtration, 60.0 g of cyclohexane (Cy) is added dropwise to the THF solution over 10 minutes, and the mixture is stirred at 23 ° C. for 1 hour.
  • THF tetrahydrofuran
  • the acid value is measured in the same manner as described above for (A) the alkali-soluble resin.
  • a method for measuring the refractive index n2 of a component insoluble in a THF / Cy mixed solvent is shown below.
  • an organic solvent for example, ethanol, acetone, methyl ethyl ketone, 1-methoxy-2-propanol
  • a solution dissolved in propylene glycol-1-monomethyl ether-2-acetate At this time, the solid content concentration is adjusted to 10 to 70% by mass.
  • the resulting solution can be applied to any substrate that is resistant to the solution.
  • PET polyethylene terephthalate
  • the organic component constituting the photosensitive resin composition in the present embodiment has a molecular weight (M) of an insoluble component when the mass ratio of tetrahydrofuran (THF) / cyclohexane (Cy) mixed solvent is 1 / 1.3.
  • M molecular weight of an insoluble component when the mass ratio of tetrahydrofuran (THF) / cyclohexane (Cy) mixed solvent is 1 / 1.3.
  • the acid value A1 is 100 mgKOH / g or more and / or
  • the refractive index n1 is 0.005 or less smaller than the n2.
  • acid value A1 is 200 mgKOH / g or less.
  • 10.0 g of the photosensitive resin composition or its layer was precisely weighed as a sample in a 100 mL Erlenmeyer flask, 39.1 g of tetrahydrofuran (THF) was added thereto, the container was sealed, Stir with a stirrer for 1 hour. After removing insolubles by filtration, 50.9 g of cyclohexane (Cy) is added dropwise to the THF solution over 10 minutes, and the mixture is stirred at 23 ° C. for 1 hour.
  • THF tetrahydrofuran
  • the hydroxyl value (mgKOH / g) of the photosensitive resin composition in the present embodiment is preferably 20 or less, and more preferably 15.0 or less. Since the moisture permeability of the hardened
  • the refractive index of the photosensitive resin composition in the present embodiment is preferably 1.550 or more. Moreover, it is preferable that the refractive index of the photosensitive resin composition layer is 1.630 or less.
  • the photosensitive resin layer according to the present embodiment has a thickness of 40 ⁇ m or less, and the absorbance at a wavelength of 365 nm of the photosensitive resin layer is 0.01 to 0.05 per 1 ⁇ m of the thickness of the photosensitive resin layer. It is preferable. Since the flexibility deteriorates if the film thickness of the photosensitive resin layer is too thick, the thickness of the photosensitive resin layer is preferably 40 ⁇ m or less, from the viewpoint of following the unevenness of the wiring, and from the viewpoint of ensuring rust prevention, 3 ⁇ m or more is preferable.
  • the transfer film includes a photosensitive resin layer made of a photosensitive resin composition and a support film. Specifically, a layer made of the above-described photosensitive resin composition is laminated on the support film. If necessary, the transfer film may have a protective film on the surface of the photosensitive resin layer opposite to the support film side.
  • the support film used in this embodiment is preferably a transparent film that transmits light emitted from the exposure light source.
  • support films include polyethylene terephthalate film, polyvinyl alcohol film, polyvinyl chloride film, vinyl chloride copolymer film, polyvinylidene chloride film, vinylidene chloride copolymer film, and polymethyl methacrylate copolymer film.
  • the haze of the support film is preferably 5 or less. The smaller the thickness of the support film, the more advantageous in terms of resolution and economy. However, in order to maintain the strength, the thickness is preferably 10 ⁇ m to 30 ⁇ m.
  • the protective film used for the transfer film is sufficiently smaller in adhesion to the photosensitive resin layer than the support film and can be easily peeled off.
  • a protective layer a polyethylene film, a polypropylene film, etc. can be used preferably, for example.
  • the production method of the transfer film includes a step of applying a coating liquid on a support (for example, a support film) and drying, and further includes a step of laminating a protective film on the photosensitive resin layer as necessary.
  • the coating liquid can be obtained by uniformly dissolving the photosensitive resin composition described above in a solvent.
  • Examples of the solvent that dissolves the photosensitive resin composition include ketones typified by methyl ethyl ketone (MEK); alcohols typified by methanol, ethanol, or isopropanol.
  • MEK methyl ethyl ketone
  • the solvent is preferably added to the photosensitive resin composition so that the viscosity of the solution of the photosensitive resin composition applied onto the support is 10 mPa ⁇ s to 800 mPa ⁇ s at 25 ° C.
  • Application methods include, for example, doctor blade coating method, Meyer bar coating method, roll coating method, screen coating method, spinner coating method, inkjet coating method, spray coating method, dip coating method, gravure coating method, curtain coating method, die coating Examples thereof include a coating method.
  • the drying temperature is preferably 50 ° C. to 130 ° C.
  • the drying time is preferably 30 seconds to 30 minutes.
  • the transfer film is preferably used to form a protective film for the conductor portion.
  • the conductor portion is made of a copper electrode, nickel, palladium, silver, titanium, molybdenum, and the like.
  • An alloy electrode with copper or a transparent electrode is more preferable.
  • the transfer film can be used as a protective film for the lead-out wiring in the frame area of the touch panel (touch sensor or force sensor) and as a protective film for the copper electrode in the sensing area.
  • Formation of the resin pattern using the transfer film includes the following steps: A laminating step of laminating the transfer film described above on a substrate; An exposure step for exposing the laminated photosensitive resin laminate; and a development step for developing the exposed transfer film; It can carry out by the manufacturing method of the resin pattern containing this. Furthermore, in order to use the resin pattern as a protective film for the conductor part, a process for forming a cured film pattern by subjecting the resin pattern to post-exposure treatment and / or heat treatment after the development step is included as a method for producing the resin pattern. Is preferred.
  • a base material in which copper wiring is formed on a copper clad laminate, a glass base material, a transparent resin base material with a transparent electrode (for example, ITO, Ag nanowire base material, etc.), or a metal electrode (for example, Cu , Al, Ag, Ni, Mo, and at least two kinds of alloys thereof, or the like can be used.
  • a touch panel substrate or a touch sensor substrate (for example, a force sensor) can be used.
  • a flexible copper-clad laminate, a touch panel electrode forming substrate, or a touch sensor electrode forming substrate is formed by forming a copper layer, a transparent electrode, or a metal layer as a raw material of a metal electrode on a flexible film. It is a material.
  • the film which consists of film raw materials such as a polyimide, polyester (PET, PEN), a cycloolefin polymer (COP), is mentioned, for example.
  • the thickness of the film is preferably 10 ⁇ m to 100 ⁇ m.
  • the alloy containing copper as a main component other than pure copper can be used.
  • the “main component” means that at least 50% by mass of the alloy is copper.
  • the alloy metal for example, an alloy of nickel, palladium, silver, titanium, molybdenum or the like and copper can be cited.
  • the thickness of the copper layer is preferably 50 nm to 2 ⁇ m. From the viewpoint of the uniformity of the copper layer, the thickness of the copper layer is more preferably 100 nm or more.
  • a photosensitive resin layer is formed on the copper layer of the substrate by performing a process of laminating a transfer film on the substrate as described above.
  • the transfer film has a protective layer
  • the protective layer is preferably peeled off, and then the transfer film is heat-pressed and laminated on the substrate surface with a laminator.
  • the transfer film may be laminated only on one side of the substrate surface, or may be laminated on both sides.
  • the heating temperature is generally about 40 ° C to 160 ° C.
  • the thermocompression bonding may be performed using a two-stage laminator provided with two rolls, or may be performed by repeatedly passing the transfer film and the substrate through the roll a plurality of times. .
  • the roll temperature is preferably 40 ° C. to 100 ° C., more preferably 40 ° C. to 80 ° C.
  • an exposure process is performed using an exposure machine. If necessary, the support film is peeled off from the transfer film, and the photosensitive resin layer is exposed with active light through a photomask.
  • the exposure amount is determined by the light source illuminance and the exposure time. The exposure amount may be measured using a light meter. Examples of the exposure machine include a scattered light exposure machine using an ultra-high pressure mercury lamp as a light source, a parallel light exposure machine with adjusted parallelism, and a proximity exposure machine that provides a gap between a mask and a workpiece.
  • an exposure machine a projection type exposure machine with a mask to image size ratio of 1: 1, a reduction projection exposure machine called a high illumination stepper (registered trademark), or a concave mirror called a mirror projection aligner (registered trademark) is used.
  • the used exposure machine can be mentioned.
  • Direct drawing exposure is a method in which exposure is performed by drawing directly on a substrate without using a photomask.
  • the light source for example, a solid laser having a wavelength of 350 nm to 410 nm, a semiconductor laser, or an ultrahigh pressure mercury lamp is used.
  • the drawing pattern is controlled by a computer.
  • the exposure amount in this case is determined by the light source illuminance and the moving speed of the substrate.
  • a developing process is performed using a developing device. After exposure, when there is a support film on the photosensitive resin layer, the support film is removed as necessary, and then the unexposed portion is developed and removed using a developer of an alkaline aqueous solution to obtain a resin pattern.
  • an aqueous solution (alkaline aqueous solution) of Na 2 CO 3 or K 2 CO 3 is preferably used.
  • the alkaline aqueous solution is appropriately selected according to the characteristics of the photosensitive resin layer, but a Na 2 CO 3 aqueous solution having a concentration of about 0.2% by mass to 2% by mass and about 20 ° C. to 40 ° C. is generally used.
  • the developer temperature is preferably less than 30 ° C.
  • a surface active agent, an antifoaming agent, a small amount of an organic solvent for promoting development, and the like may be mixed in the alkaline aqueous solution.
  • an amine-based alkaline aqueous solution such as a tetramethylammonium hydroxide (TMAH) aqueous solution can also be used.
  • TMAH tetramethylammonium hydroxide
  • an aqueous solution of Na 2 CO 3 of 1% by mass and 25 ° C. to 30 ° C. is particularly preferable.
  • Examples of the developing method include known methods such as alkaline water spraying, showering, rocking immersion, brushing, and scraping.
  • the base of the alkaline aqueous solution remaining in the resin pattern is treated with an acid treatment (neutralization treatment) using known methods such as spraying, rocking immersion, brushing, and scraping using an organic acid, an inorganic acid or an aqueous acid solution thereof. )can do. Furthermore, after the acid treatment (neutralization treatment), a step of washing with water can be performed.
  • a post-exposure step and / or a heating step may be further performed.
  • the exposure amount in the post exposure treatment is preferably 200mJ / cm 2 ⁇ 1,000mJ / cm 2, it is preferable to carry out the treatment at 40 ° C. ⁇ 200 ° C.
  • the heating step from the viewpoint of the manufacturing process, heat treatment time Is preferably 60 minutes or less.
  • a heating furnace of an appropriate method such as hot air, infrared rays, far infrared rays, or the like can be used.
  • an atmosphere of the heat treatment an N 2 atmosphere or an N 2 / O 2 atmosphere can be given. .
  • the transfer film has good tack, low-temperature laminating properties, low-temperature developability, moisture permeability of the cured film, and adhesion to the conductor base material, and the conductor parts such as wiring and electrodes
  • a photosensitive resin composition and a transfer film suitable for protection can be provided.
  • Such a transfer film is suitable as a solder resist for a protective film such as a wiring for a touch panel, a touch sensor or a force sensor, an electrode, or a printed wiring board.
  • the touch panel display device By forming the cured film of the transfer film according to the present embodiment on the touch panel substrate, the touch panel display device having the cured film of the transfer film, and the cured film of the transfer film and the touch sensor and / or the force sensor are included.
  • An apparatus can be provided.
  • the base material used for a touch panel, a touch sensor, or a force sensor for example, a glass plate, a plastic plate, a plastic film, a ceramic plate etc., is mentioned.
  • electrodes for touch panel such as ITO, Cu, Al, Ag, Ni, Mo and an alloy containing at least two of them, or metal wiring, which is a target for forming a protective film, are provided.
  • An insulating layer may be provided between the electrodes.
  • the touch panel substrate having the touch panel electrode can be obtained, for example, by the following procedure. After a metal film is formed on a touch panel substrate such as polyester or COP film by sputtering in the order of ITO and Cu, an etching photosensitive film is pasted on the metal film to form a desired resist pattern, which is unnecessary Cu is removed with an etching solution such as an iron chloride aqueous solution, and the resist pattern is further removed and removed.
  • a metal film is formed on a touch panel substrate such as polyester or COP film by sputtering in the order of ITO and Cu
  • an etching photosensitive film is pasted on the metal film to form a desired resist pattern, which is unnecessary Cu is removed with an etching solution such as an iron chloride aqueous solution, and the resist pattern is further removed and removed.
  • the method for forming a cured film as a protective film on a touch panel substrate is a first step of laminating the transfer film according to the present embodiment on the touch panel substrate, and a predetermined portion of the protective film is irradiated with actinic rays.
  • a touch panel display device having a cured film of the transfer film, or a cured film of the transfer film and a touch sensor and / or a force sensor is provided.
  • An apparatus can be suitably provided.
  • the copolymer composition, weight average molecular weight, acid value, and hydroxyl value of the resulting acrylic copolymer are shown in Table 1.
  • the measurement of the weight average molecular weight of an acrylic copolymer, an acid value, and a hydroxyl value was performed by the method described in the detail of said ⁇ (A) alkali-soluble resin>.
  • Table 2 shows the weight average molecular weight, acid value, and hydroxyl value of the compound containing the carboxyl group and the ethylenically unsaturated group.
  • the measurement of the weight average molecular weight of the compound containing a carboxyl group and an ethylenically unsaturated group, an acid value, and a hydroxyl value was performed by the method described in the detail of said ⁇ (A) alkali-soluble resin>.
  • the refractive index measurement of the compound containing a carboxyl group and an ethylenically unsaturated group was performed by the following method.
  • ⁇ Refractive index evaluation method> Using the 532 nm laser light source with the refractive index measuring device (Prism Coupler Model 2010 / M, manufactured by Metricon), the sample produced by the above method was used at any four locations in the plane direction of the sample, and any four in the vertical direction. The refractive index of the place was measured and the average value was computed. The refractive index measurement results are shown in Table 2. Next, a method for producing an evaluation transfer film of Examples and Comparative Examples will be described, and further, an evaluation method for the obtained transfer film and an evaluation result thereof will be shown.
  • the photosensitive resin composition preparation liquid was uniformly applied to the surface of a 16 ⁇ m-thick polyethylene terephthalate film (FB40, manufactured by Toray Industries, Inc.) as a support using a blade coater, and 10% in a dryer at 95 ° C. It was dried for a minute to form a uniform photosensitive resin layer on the support.
  • the thickness of the photosensitive resin layer was 8 ⁇ m and 40 ⁇ m.
  • a transfer film for evaluation was obtained by laminating a 33 ⁇ m thick polyethylene film (manufactured by Tamapoly Co., Ltd., GF-858) as a protective film on the surface of the photosensitive resin layer.
  • Tables 1 to 3 show the names of the material components in the photosensitive resin composition preparations represented by abbreviations in Tables 4 to 6.
  • GPC measurement of photosensitive resin composition The protective film of the transfer film obtained above was peeled off, 0.30 g of the photosensitive resin layer was weighed from the transfer film, and this was dissolved in 20 g of THF. GPC was measured using gel permeation chromatography (GPC) manufactured by JASCO Corporation under the following conditions to obtain a GPC elution curve.
  • GPC gel permeation chromatography
  • the differential molecular weight distribution curve of Example 5 is shown in FIG. Tables 4 to 6 show R 20k / 5k values and S ⁇ 50k values of Examples 1 to 22 and Comparative Examples 1 to 10.
  • the suspended solution was subjected to solid-liquid separation with a high-speed centrifuge at 5000 rpm for 10 minutes, and the supernatant was removed by decantation.
  • Measurement of acid value A2 1.0 g of the insoluble component obtained above was precisely weighed and dissolved in 9.0 g of THF.
  • the refractive index was measured using a prism coupler (laser refractive index measurement model 2010, laser light wavelength: 532 nm) manufactured by Metricon, with the insoluble component layer in contact with the prism.
  • the acid value A1 and the refractive index n1 are also measured by the acid value A2 and the refractive index. The same method as that for measuring n2 was used.
  • hydroxyl value of photosensitive resin composition The hydroxyl value of the photosensitive resin composition layer constituting the transfer film was measured as follows. First, 1 g of the photosensitive resin composition which is a measurement target of the hydroxyl value was collected from the transfer film and precisely weighed. 10 mL of a 10% by mass acetic anhydride pyridine solution was added to the precisely weighed photosensitive resin composition to dissolve it uniformly and heated at 100 ° C. for 1 hour. After heating, 10 mL of water and 10 mL of pyridine are added and heated at 100 ° C. for 10 minutes.
  • the tack property of the transfer film was evaluated as follows. First, the prepared transfer film is allowed to stand for 24 hours in an environment of 23 ° C. and 50% RH, and then the protective film is peeled off at a speed of 10 cm / second, so that the photosensitive resin composition is attached to the surface of the protective film. Was confirmed visually. Next, absorbent cotton was rubbed on the surface of the photosensitive resin composition layer after peeling the protective film, and the surface of the photosensitive resin composition layer was visually observed.
  • B The photosensitive resin composition does not adhere to the surface of the peeled protective film, but the lint of absorbent cotton sticks to the surface of the photosensitive resin composition layer.
  • C The photosensitive resin composition adheres to the surface of the peeled protective film.
  • the laminating property of the transfer film was evaluated as follows. While removing the protective film of the transfer film, a hot roll laminator (VA-400III, manufactured by Taisei Laminator Co., Ltd.) is formed on the copper surface (size: 5 cm ⁇ 10 cm) of the substrate on which the resin, ITO and sputtered copper are laminated in this order. Was laminated under the condition of a roll temperature of 80 ° C. The air pressure was set to 0.4 MPa, and the laminating speed was set to 1.5 m / min. Evaluation was carried out as A when the transfer film was adhered to the copper surface of the substrate and as B when it was not adhered at 80 ° C.
  • VA-400III manufactured by Taisei Laminator Co., Ltd.
  • sample preparation method The sample after the evaluation of the laminate property was used as it was.
  • a sample laminated at a roll temperature of 100 ° C. was prepared.
  • the laminated sample was allowed to stand for 15 minutes, and then a PET mask and a stuber 21-step tablet on the support film (optical density 0.00 was the first step, and the optical density was 0.15 for each step.
  • Incremental step tablets were placed side by side, the optimum exposure amount of each composition was determined from the PET mask and step tablet side, and exposure was performed with a parallel light exposure machine (HMW-801, manufactured by Oak Manufacturing Co., Ltd.).
  • the PET mask As the PET mask, a mask having a pattern in which an unexposed portion becomes a circular hole was used. Next, after leaving still for 15 minutes or more, the support is peeled off, and using a developing device manufactured by Fuji Kiko Co., Ltd., a 1% by mass Na of 28 ° C. to 30 ° C. at a developing spray pressure of 0.12 MPa with a full cone type nozzle. A 2 CO 3 aqueous solution was sprayed for 45 seconds and developed to dissolve and remove the unexposed portions of the photosensitive resin layer.
  • the water washing step is carried out at the same time as the development step with a flat type nozzle at a water washing spray pressure of 0.12 MPa, and the water washed sample is dried by air blow to prepare a sample for evaluation of developability.
  • the optimum exposure amount is defined as an exposure amount such that the number of steps remaining in the film when the exposure is performed through the stuber 21-step tablet becomes 7 to 8 steps.
  • Moisture permeability test ⁇ sample preparation method> While peeling off the protective film of the transfer film having a thickness of the photosensitive resin layer of 40 ⁇ m, Lamination was performed on 4 filter papers (manufactured by Advantech) using a hot roll laminator (manufactured by Taisei Laminator Co., Ltd., VA-400III). The roll temperature was set to 80 ° C. (100 ° C. when the above-described evaluation of the laminate property was “x”), the air pressure was set to 0.4 MPa, and the lamination speed was set to 1.0 m / min. After leaving still for 15 minutes, the optimal exposure amount of each composition was exposed to the whole surface with the scattered light exposure machine from the support film side of the protective film.
  • the support film After leaving still for 30 minutes, the support film is peeled off, exposed with an exposure amount of 350 mJ / cm 2 from the photosensitive layer side with a scattered light exposure machine, and then processed at 150 ° C. for 30 minutes in a hot air circulating oven. A sample was prepared. The optimum exposure amount has the same definition as in the sample preparation method for developing property evaluation.
  • B moisture permeability 201-250 g / (m 2 ⁇ day)
  • C Moisture permeability of 251 to 300 g / (m 2 ⁇ day)
  • Adhesion evaluation (cross cut test) ⁇ Sample preparation method> While peeling off the protective film of the transfer film having a photosensitive resin layer thickness of 8 ⁇ m, a hot roll laminator (Daisei Laminator (3cm ⁇ 3cm)) is formed on the alloy surface (size: 3 cm ⁇ 3 cm) of the substrate on which the resin and sputtered copper nickel alloy are laminated in this order. Laminate using VA-400III) manufactured by KK The roll temperature was 80 ° C. (the level of the above-mentioned laminating evaluation is 100 ° C.), the air pressure was 0.4 MPa, and the laminating speed was 1.0 m / min.
  • the optimal exposure amount of each composition was exposed to the whole surface with the scattered light exposure machine from the support film side of the protective film.
  • the optimum exposure amount has the same definition as in the sample preparation method for developing property evaluation.
  • the support film was peeled off, and using a developing device manufactured by Fuji Kiko Co., Ltd., a 1% by mass Na 2 CO at 30 ° C. with a developing spray pressure of 0.12 MPa using a full cone type nozzle. Three aqueous solutions were sprayed for 45 seconds and developed, and the unexposed portion of the photosensitive resin layer was dissolved and removed.
  • the water washing step was performed at the same time as the development step with a water spray pressure of 0.12 MPa with a flat type nozzle, and the washed sample was dried by air blow.
  • the developed sample is exposed with a light exposure of 350 mJ / cm 2 from the photosensitive resin layer side with a scattered light exposure machine, and then processed at 150 ° C. for 30 minutes in a hot air circulating oven for evaluation of adhesion. A sample was made.
  • ⁇ Evaluation method> The sample after the above treatment was subjected to a 100 mass cross-cut test with reference to JIS standard K5400.
  • Example 1 to 22 satisfy the requirements specified in the present invention, so that tackiness as a transfer film, low-temperature laminating property and low-temperature developability, and moisture permeability as a cured film are achieved. It is shown that the adhesiveness with the conductor base material is excellent. Further, Example 5 and Example 6 are the difference between the component (B-1) and the component (B-2). By adjusting the hydroxyl value of the composition to 15 mgKOH / g or less, the cured film It turns out that it is excellent in moisture permeability.
  • Comparative Examples 1 to 10 shown in Table 5 do not satisfy any of the requirements stipulated in the present invention. Therefore, tackiness as a transfer film, low temperature laminating or low temperature developability, and as a cured film It has been shown that either the moisture permeability or the adhesion to the conductor base material is inferior.
  • Comparative Example 1 and Comparative Example 9 are photosensitive resin compositions having an A / B mass ratio increased to 6.38. The low-temperature laminating property and low-temperature developability of the transfer film and the moisture permeability of the cured product were each Example 1. The result was inferior to 2.
  • Comparative Examples 2 and 3 are photosensitive resin compositions in which the A / B mass ratio was lowered to 0 to 0.12, but the tackiness and low-temperature developability of the transfer film, and the close contact with the conductor substrate as a cured film The result was inferior.
  • Comparative Example 4 contains (A′-1), which does not satisfy the molecular weight definition of the component (A) defined in the present invention, but the low-temperature developability is inferior to Example 10. became.
  • the component (B) was not blended in the photosensitive resin composition of Comparative Example 5, the results were inferior in low-temperature laminating properties and low-temperature developability as a transfer film.
  • Comparative Example 6 the component (A) was not added and only the component (B-3) was increased.
  • Example 17 Compared with Example 17 or Example 18, the tackiness as a transfer film, the low temperature developability, and It became a result inferior to adhesiveness with the conductor base material as a cured film.
  • the component (A) was not added, and instead the weight average molecular weight and acid value satisfied the definition of the component (A), and the skeleton of any one of the general formulas (1) to (3)
  • the component (B′-1) which is a modified epoxy acrylate acid not included in the structure, was added, but the tackiness and low-temperature developability as a transfer film were poor. From this, it was found that the epoxy acrylate modified product is not compatible with the component (A) of the present invention.
  • Comparative Example 8 does not satisfy the requirements of the weight average molecular weight and refractive index of the component (B) of the present invention, and does not contain any skeleton of the general formulas (1) to (3) in the structure (B′-2 ) Component was added, but the low temperature developability as a transfer film and the moisture permeability of the cured film were inferior.
  • the component (A′-3) that does not satisfy the acid value of the component (A) of the present invention was added, but the results were poor in low-temperature developability and adhesion as a transfer film. . Further, since the component (A′-3) has a high hydroxyl value, the moisture permeability was inferior.
  • the A / B mass ratio which is a requirement defined in the present invention, is in the range of 0.18 to 6.0, as tackiness as a transfer film, low-temperature laminating property, low-temperature developability, and curing. It was found to be important for satisfying the moisture permeability as a film and the adhesion to the conductor base material.
  • the present inventors believe that the low-temperature developability as a transfer film is a surprising result in that both the A / B mass ratio is significantly deteriorated when the A / B mass ratio is less than 0.18 and more than 6.0. Think.
  • Examples 1 to 22 and Comparative Examples 1, 4, 5, and 7 to 9 are excellent in adhesion to the conductor base material.
  • S ⁇ 50k in the differential molecular weight distribution curve of GPC is in the range of 0.2 to 9.0%;
  • S ⁇ 50k was 0.2%, but the adhesion with the conductor base material was slightly inferior.
  • S ⁇ 50k was 0%, but the adhesion to the conductor substrate was inferior.
  • both the rust prevention property and the low-temperature developability are good, and it is suitable for the protection of conductor parts such as wiring and electrodes, and the touch panel, touch sensor, or force. It can be widely used as a protective film for wiring, electrodes and the like for sensor applications and solder resist applications for printed wiring boards.

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Abstract

The present invention provides: a photosensitive resin composition that is suitable for protection of a conductor part such as an electrode and that allows a transfer film to have satisfactory tack property, developability at low temperature, lamination property at low temperature, moisture permeability when in the form of a cured film, and adhesion to a conductor base material; a transfer film; and a production method therefor. The transfer film for forming a protective film for a conductor part comprises a support film and a photosensitive resin composition layer. The photosensitive resin composition layer includes (A) an alkali-soluble resin (excluding acid-modified epoxy (meth)acrylate compounds), (B) a compound containing a carboxyl group and an ethylenically unsaturated group, (C) a photopolymerizable compound, and (D) a photopolymerizable initiator. The alkali-soluble resin (A) has a weight-average molecular weight of 11,000-29,000 and an acid value not less than 100 mgKOH/g. The compound (B) has a weight-average molecular weight of 1,000-9,500, an acid value not less than 60 mgKOH/g, and a refractive index not less than 1.570. The ratio of the mass of the resin (A) to the mass of the compound (B) is 0.18-6.0.

Description

転写フィルム、転写フィルムを用いた樹脂パターン製造方法、及び硬化膜パターンの製造方法Transfer film, resin pattern manufacturing method using transfer film, and cured film pattern manufacturing method
 本発明は、感光性樹脂組成物、転写フィルム、転写フィルムを用いた樹脂パターン製造方法、及び硬化膜パターンの製造方法に関する。より詳しくは、本発明は、液晶表示装置、有機EL表示装置、タッチパネル表示装置、集積回路素子、固体撮像素子、半導体素子等の電子部品の平坦化膜、保護膜及び層間絶縁膜の形成、又はリジッドプリント配線板、フレキシブルプリント配線板のソルダーレジスト、若しくは層間絶縁膜に好適な感光性樹脂組成物、転写フィルム及びそれを用いた樹脂パターンの製造方法に関する。 The present invention relates to a photosensitive resin composition, a transfer film, a resin pattern manufacturing method using the transfer film, and a cured film pattern manufacturing method. More specifically, the present invention relates to a liquid crystal display device, an organic EL display device, a touch panel display device, an integrated circuit element, a solid-state imaging device, a planarization film of an electronic component such as a semiconductor element, formation of a protective film and an interlayer insulating film, or The present invention relates to a photosensitive resin composition suitable for a rigid printed wiring board, a solder resist of a flexible printed wiring board, or an interlayer insulating film, a transfer film, and a resin pattern manufacturing method using the same.
 近年、電子機器の高性能化、多様化及び小型軽量化が進むに伴い、液晶等の表示素子の全面に透明タッチパネル(タッチセンサ)を装着した機器が増えてきた。透明タッチパネルを通して表示素子に表示された文字、記号、絵柄等の視認及び選択を行い、透明タッチパネルの操作によって機器の各機能の切り替えを行うことも増えている。タッチパネルは、パソコン、テレビ等の大型電子機器だけでなく、カーナビゲーション、携帯電話、電子辞書等の小型電子機器及びOA・FA機器等の表示機器にも使用されており、タッチパネルには透明導電電極材から成る電極が設けられている。透明導電電極材としては、ITO(Indium-Tin-Oxide)、酸化インジウム及び酸化スズが知られており、これらの材料は、高い可視光透過率を有することから液晶表示素子用基板等の電極材として主に使用されている。 In recent years, as electronic devices have become more sophisticated, diversified, and smaller and lighter, devices with a transparent touch panel (touch sensor) mounted on the entire surface of display elements such as liquid crystals have increased. Increasingly, it is possible to visually recognize and select characters, symbols, patterns, and the like displayed on a display element through a transparent touch panel, and to switch each function of the device by operating the transparent touch panel. Touch panels are used not only for large electronic devices such as personal computers and televisions, but also for small electronic devices such as car navigation systems, mobile phones, and electronic dictionaries, and display devices such as OA / FA devices. An electrode made of a material is provided. As the transparent conductive electrode material, ITO (Indium-Tin-Oxide), indium oxide, and tin oxide are known, and these materials have high visible light transmittance, so that electrode materials for substrates for liquid crystal display elements, etc. It is mainly used as.
 既存のタッチパネルの方式としては、抵抗膜方式、光学方式、圧力方式、静電容量方式、電磁波誘導方式、画像認識方式、振動検出方式、超音波方式等が挙げられ、各種の方式が実用化されている。近年、静電容量方式タッチパネルの利用が最も進んできている。静電容量方式タッチパネルでは、導電体である指先がタッチ入力面に接触すると、指先と導電膜との間で静電容量結合が起こり、コンデンサを形成する。このため、静電容量方式のタッチパネルは、指先の接触位置における電荷の変化を捉えることによって、接触位置の座標を検出する。特に、投影型静電容量方式のタッチパネルは、指先の多点検出が可能なため、複雑な指示を行うことができるという良好な操作性を備えるので、携帯電話、携帯型音楽プレーヤ等の小型表示装置を有する機器における表示面上の入力装置として利用が進んでいる。一般に、投影型静電容量方式のタッチパネルでは、X軸とY軸による2次元座標を表現するために、複数のX電極と、複数のX電極に直交する複数のY電極とが、2層構造を形成しており、かつ、電極材としてはITOが用いられる。 Existing touch panel methods include resistive film method, optical method, pressure method, capacitance method, electromagnetic wave induction method, image recognition method, vibration detection method, ultrasonic method, etc. ing. In recent years, the use of capacitive touch panels has been most advanced. In a capacitive touch panel, when a fingertip, which is a conductor, contacts the touch input surface, capacitive coupling occurs between the fingertip and the conductive film, thereby forming a capacitor. For this reason, the capacitive touch panel detects the coordinates of the contact position by capturing a change in charge at the contact position of the fingertip. In particular, the projected capacitive touch panel can detect multiple points on the fingertip, and thus has a good operability to give complicated instructions. Therefore, it can be used for small displays such as mobile phones and portable music players. The use as an input device on a display surface in a device having the device is advancing. In general, in a projected capacitive touch panel, a plurality of X electrodes and a plurality of Y electrodes orthogonal to the plurality of X electrodes have a two-layer structure in order to express two-dimensional coordinates by the X axis and the Y axis. ITO is used as the electrode material.
 タッチパネルの額縁領域はタッチ位置を検出できない領域であるから、その額縁領域の面積を狭くすることが製品価値を向上させるための重要な要素である。額縁領域には、タッチ位置の検出信号を伝えるために、金属配線が必要となるが、額縁面積の狭小化を図るためには、金属配線の幅を狭くする必要がある。ITOの導電性は充分に高くないので、一般的には金属配線には銅が使用される。 Since the frame area of the touch panel is an area where the touch position cannot be detected, reducing the area of the frame area is an important factor for improving the product value. In the frame area, metal wiring is required to transmit a touch position detection signal, but in order to reduce the frame area, it is necessary to reduce the width of the metal wiring. Since the conductivity of ITO is not sufficiently high, copper is generally used for metal wiring.
 しかしながら、上述のようなタッチパネルでは、指先に接触される際に、水分、塩分等の腐食成分がセンシング領域から内部に侵入することがある。タッチパネルの内部に腐食成分が侵入すると、金属配線が腐食し、電極と駆動用回路間の電気抵抗の増加、又は断線の恐れがあり、これらを防ぐために金属配線上に防錆効果のある保護膜が必要である。一般に、保護膜の透湿度が低いほど、金属配線の防錆効果が高まる傾向がある。 However, in the touch panel as described above, when contacting with the fingertip, corrosive components such as moisture and salt may enter the sensing region from the inside. If a corrosive component enters the inside of the touch panel, the metal wiring will corrode, which may increase the electrical resistance between the electrode and the drive circuit, or cause a disconnection. To prevent these, a protective film with an antirust effect on the metal wiring is necessary. Generally, there exists a tendency for the rust prevention effect of metal wiring to increase, so that the moisture permeability of a protective film is low.
 また、検出信号を伝えるための金属配線は、端子部分で他の部材へと接続するため、導通を確保する必要があり、端子部分は保護膜を除去しなければならない。そのため保護膜には良好な現像性が求められ、円孔等の各種パターンでの良好な抜け性が必要とされる。現像液として、炭酸ナトリウム水溶液のような希アルカリ水溶液が最も多く用いられており、かつ現像液濃度の長期安定性を保つためには30℃未満の低温での現像が所望されている。 Also, since the metal wiring for transmitting the detection signal is connected to other members at the terminal portion, it is necessary to ensure conduction, and the protective film must be removed from the terminal portion. For this reason, the protective film is required to have good developability, and it is required to have good detachability in various patterns such as circular holes. As the developer, a dilute alkaline aqueous solution such as an aqueous sodium carbonate solution is most often used, and development at a low temperature of less than 30 ° C. is desired in order to maintain the long-term stability of the developer concentration.
 一方、上述のタッチパネル分野に限らず、近年、高速生産性及び高収率の観点で各種基板又はデバイスをロールtoロール方式で製造する要求が高まっている。この要求に応えるためには、保護膜を形成するための感光性樹脂組成物は、液状レジストとしてではなく、転写フィルム性状で提供することが望ましい。 On the other hand, not only in the touch panel field described above, in recent years, there is an increasing demand for manufacturing various substrates or devices by a roll-to-roll method from the viewpoint of high-speed productivity and high yield. In order to meet this requirement, it is desirable that the photosensitive resin composition for forming the protective film is provided as a transfer film, not as a liquid resist.
 ロールtoロール方式で転写フィルムを基材に貼り合わせる工程では真空ロールラミネーターが通常使用される。しかしながら、転写フィルム貼り付け後にロールの熱に起因して感光性樹脂組成物層に温度が掛かり、かつラジカル重合を抑制する酸素が環境中に存在しない状態が長時間続く状況下に置かれるために光重合開始剤が開裂し、暗反応が進行して現像性を著しく低下させてしまう要因となる。そのため、真空ロールラミネートのロール温度は、低温、具体的には100℃未満であることが求められる。 A vacuum roll laminator is usually used in the process of attaching the transfer film to the substrate by the roll-to-roll method. However, the temperature is applied to the photosensitive resin composition layer due to the heat of the roll after the transfer film is attached, and oxygen is not present in the environment for suppressing radical polymerization. The photopolymerization initiator is cleaved, and the dark reaction proceeds to cause a significant decrease in developability. Therefore, the roll temperature of the vacuum roll laminate is required to be low, specifically, less than 100 ° C.
 また、最近の旺盛なフレキシブルディスプレイ基板の需要増を受けて、該基板に設けられた配線板表面又はパターン回路を保護するための保護膜として、上記保護膜以外に、感光性ソルダーレジスト、感光性ドライフィルムレジスト等、その用途に応じて、種々のフィルム状感光性材料も用いられるようになっている。 In addition to the recent increase in demand for flexible display substrates, as a protective film for protecting the wiring board surface or pattern circuit provided on the substrate, in addition to the protective film, a photosensitive solder resist, a photosensitive film Various film-like photosensitive materials such as dry film resists are also used depending on the application.
 特許文献1においては、2種類のエポキシアクリレート酸変性物を組み合わせた組成物が感光性カバーレイフィルムとして用いられているが、低温現像性、低温ラミネート性、又は透湿度に関する記載はなされていない。
 特許文献2、3においては、重量平均分子量が30,000以上のアクリル系共重合体又は重量平均分子量が10,000のカルボキシル基含有ポリウレタンと、エポキシアクリレート酸変性物とを含む組成物が、感光性ドライフィルムソルダーレジストとして用いられている。いずれの文献にも低温現像性、低温ラミネート性又は基材との密着性に関する記載はなされておらず、これらの性能を全て満足するものではないと推察される。
 特許文献4においては、重量平均分子量が12,000のアクリル系共重合体と、クレゾールノボラック系エポキシアクリレート酸変性物とを含む組成物が感光性ドライフィルムソルダーレジストとして用いられているが、低温現像性、低温ラミネート性又は基材との密着性の記載はない。また、特許文献4に記載のソルダーレジストは、一定レベルの耐湿性は付与できているものの、直近の耐湿性の要求レベルはさらに高まっており、これを満足するものではない。
In patent document 1, although the composition which combined two types of epoxy acrylate acid modified products is used as a photosensitive coverlay film, the description regarding low temperature developability, low temperature laminating property, or moisture permeability is not made | formed.
In Patent Documents 2 and 3, a composition containing an acrylic copolymer having a weight average molecular weight of 30,000 or more or a carboxyl group-containing polyurethane having a weight average molecular weight of 10,000 and an epoxy acrylate acid modified product is photosensitive. Used as a conductive dry film solder resist. None of the documents describes low-temperature developability, low-temperature laminating properties, or adhesion to a substrate, and it is assumed that these performances are not all satisfied.
In Patent Document 4, a composition containing an acrylic copolymer having a weight average molecular weight of 12,000 and a modified cresol novolac epoxy acrylate is used as a photosensitive dry film solder resist. There is no description of properties, low-temperature laminating properties or adhesion to a substrate. Moreover, although the solder resist of patent document 4 has provided the moisture resistance of a fixed level, the request | requirement level of the latest moisture resistance has increased further, and is not satisfied with this.
特開2013-228723号公報JP 2013-228723 A 特開2009-251286号公報JP 2009-251286 A 特開2012-215804号公報JP 2012-215804 A 特開2006-243564号公報JP 2006-243564 A
 特許文献1~4に記載の技術は、上記で説明されたとおり、未だ改善の余地がある。したがって、本発明が解決しようとする課題は、転写フィルムのタック性、低温現像性、低温ラミネート性、及び硬化膜としての透湿性、導体基材との密着性が良好で、電極等の導体部の保護に好適な感光性樹脂組成物、転写フィルム及びその製造方法を提供することである。 The technologies described in Patent Documents 1 to 4 still have room for improvement, as explained above. Therefore, the problem to be solved by the present invention is that the transfer film has a tack property, a low temperature developability, a low temperature laminate property, a moisture permeability as a cured film, and a good adhesion to a conductor substrate, and a conductor portion such as an electrode. It is providing the photosensitive resin composition suitable for protection of a film, a transfer film, and its manufacturing method.
 上記の課題は、次の技術的手段により解決される。
[1]
 支持フィルムと感光性樹脂組成物層を含む導体部保護膜形成用転写フィルムであって、該感光性樹脂組成物層が、以下の成分:
 (A)アルカリ可溶性樹脂(但し、酸変性エポキシ(メタ)アクリレート化合物を除く);
 (B)カルボキシル基及びエチレン性不飽和基を含有する化合物;
 (C)光重合性化合物;及び
 (D)光重合性開始剤;
を含有し、
 該(A)アルカリ可溶性樹脂の重量平均分子量が11,000以上29,000以下で、かつ酸価が100mgKOH/g以上であり、
 該(B)カルボキシル基及びエチレン性不飽和基を含有する化合物の重量平均分子量が1,000以上9,500以下で、酸価が60mgKOH/g以上で、かつ屈折率が1.570以上であり、
 該(B)カルボキシル基及びエチレン性不飽和基を含有する化合物に対する該(A)アルカリ可溶性樹脂の質量比(A)/(B)が0.18~6.0であることを特徴とする導体部保護膜形成用転写フィルム。
[2]
 前記(A)アルカリ可溶性樹脂の酸価が200mgKOH/g以下である、項目1に記載の転写フィルム。
[3]
 前記(B)カルボキシル基及びエチレン性不飽和基を含有する化合物の酸価が200mgKOH/g以下であり、かつ屈折率が1.650以下である、項目1または2に記載の転写フィルム。
[4]
 前記感光性樹脂組成物層の水酸基価が15.0mgKOH/g以下である、項目1~3のいずれか一項に記載の転写フィルム。
[5]
 前記感光性樹脂組成物層の水酸基価が0.01mgKOH/g以上である、項目4に記載の転写フィルム。
[6]
 前記感光性樹脂組成物層の屈折率が1.550以上である、項目1~5のいずれか一項に記載の転写フィルム。
[7]
 前記感光性樹脂組成物層の屈折率が1.630以下である、項目6に記載の転写フィルム。
[8]
 前記(A)アルカリ可溶性樹脂が、(メタ)アクリル酸由来の構造を12質量%以上30質量%以下、及びスチレン又はその誘導体由来の構造を30質量%以上80質量%以下で含む、項目1~7のいずれか一項に記載の転写フィルム。
[9]
 前記(B)カルボキシル基及びエチレン性不飽和基を含有する化合物が、酸変性エポキシ(メタ)アクリレート化合物である、項目1~8のいずれか一項に記載の転写フィルム。
[10]
 タッチパネル用保護膜又はフォースセンサ用保護膜のいずれかに使用される、項目1~9のいずれか一項に記載の転写フィルム。
[11]
 支持フィルムと感光性樹脂組成物層を含む導体部保護膜形成用転写フィルムであって、該感光性樹脂組成物層が下記(I)及び(II):
 (I)テトラヒドロフランに溶解した成分をゲルパーミエーションクロマトグラフィー(GPC)で測定したGPC溶出曲線から得られる微分分子量分布曲線において、
  (i)分子量M=20000と分子量M=5000のdw/d(logM)値の比R20k/5kが0.20~1.50の範囲内であり、かつ
  (ii)前記微分分子量分布曲線において、分子量M≧2000の領域の面積を100%としたときに分子量M≧50000の領域の面積の比率S≧50kが1.0~9.0%である;及び
 (II)23℃において、テトラヒドロフランに可溶で、かつテトラヒドロフラン/シクロヘキサン(質量比=1/2)混合溶媒に不溶な成分の
  (i)酸価A2が95mgKOH/g以上であり、かつ
  (ii)屈折率n2が1.560以上である;
を満たす導体部保護膜形成用転写フィルム。
[12]
 前記項目11に記載の導体保護膜形成用転写フィルムであって、さらに下記(III):
(III)23℃において、テトラヒドロフランに可溶で、かつテトラヒドロフラン/シクロヘキサン(質量比=1/1.3)混合溶媒に不溶な成分の
  (i)酸価A1が100mgKOH/g以上であり、かつ
  (ii)屈折率n1が前記n2よりも0.005以上小さい
を満たす項目11に記載の導体保護膜形成用転写フィルム。
[13]
 前記酸価A1が200mgKOH/g以下である、項目12に記載の導体保護膜形成用転写フィルム。
[14]
 前記微分分子量分布曲線における分子量M≧50000の領域の成分が、芳香環を含む、項目11~13のいずれか一項に記載の転写フィルム。
[15]
 タッチパネル用保護膜又はフォースセンサ用保護膜のいずれかに使用される、項目11~14のいずれか一項に記載の転写フィルム。
[16]
 支持フィルムと感光性樹脂組成物層を含む導体部保護膜形成用転写フィルムであって、該感光性樹脂組成物層が下記(II)及び(III):
(II)23℃において、テトラヒドロフランに可溶で、かつテトラヒドロフラン/シクロヘキサン(質量比=1/2)混合溶媒に不溶な成分の
  (i)酸価A2が95mgKOH/g以上であり、かつ
  (ii)屈折率n2が1.560以上である;
(III)23℃において、テトラヒドロフランに可溶で、かつテトラヒドロフラン/シクロヘキサン(質量比=1/1.3)混合溶媒に不溶な成分の
  (i)酸価A1が100mgKOH/g以上であり、かつ
  (ii)屈折率n1が前記n2よりも0.005以上小さい
を満たす導体保護膜形成用転写フィルム。
[17]
 前記酸価A1が200mgKOH/g以下である、項目16に記載の導体保護膜形成用転写フィルム。
[18]
 タッチパネル用保護膜又はフォースセンサ用保護膜のいずれかに使用される、項目16又は17に記載の転写フィルム。
[19]
 支持フィルムと感光性樹脂組成物層を含む導体部保護膜形成用転写フィルムであって、該感光性樹脂組成物層が、以下の成分:
 (A)アルカリ可溶性樹脂(但し、酸変性エポキシ(メタ)アクリレート化合物を除く);
 (B)カルボキシル基及びエチレン性不飽和基を含有する化合物;
 (C)光重合性化合物;及び
 (D)光重合性開始剤;
を含有し、
 該(A)アルカリ可溶性樹脂の重量平均分子量が11,000以上29,000以下で、かつ酸価が100mgKOH/g以上であり、
 該(B)カルボキシル基及びエチレン性不飽和基を含有する化合物の重量平均分子量が1,000以上9,500以下で、酸価が60mgKOH/g以上で、かつ下記一般式(1)~(3):
Figure JPOXMLDOC01-appb-C000004
Figure JPOXMLDOC01-appb-C000005
Figure JPOXMLDOC01-appb-C000006
のいずれかに記載の構造を少なくとも含み、
 該(B)カルボキシル基及びエチレン性不飽和基を含有する化合物に対する該(A)アルカリ可溶性樹脂の質量比(A)/(B)が0.18~6.0であることを特徴とする導体部保護膜形成用転写フィルム。
[20]
 前記(A)アルカリ可溶性樹脂の酸価が200mgKOH/g以下である、項目19に記載の転写フィルム。
[21]
 前記(B)カルボキシル基及びエチレン性不飽和基を含有する化合物の酸価が200mgKOH/g以下である、項目19又は20に記載の転写フィルム。
[22]
 前記感光性樹脂組成物層の水酸基価が15.0mgKOH/g以下である、項目19に記載の転写フィルム。
[23]
 前記感光性樹脂組成物層の水酸基価が0.01mgKOH/g以上である、項目22に記載の転写フィルム。
[24]
 前記感光性樹脂組成物層の屈折率が1.550以上である、項目19~23のいずれか一項に記載の転写フィルム。
[25]
 前記感光性樹脂組成物層の屈折率が1.630以下である、項目24に記載の転写フィルム。
[26]
 前記(A)アルカリ可溶性樹脂が、(メタ)アクリル酸由来の構造を12質量%以上30質量%以下、及びスチレン又はその誘導体由来の構造を30質量%以上80質量%以下で含む、項目19~25のいずれか一項に記載の転写フィルム。
[27]
 前記(B)カルボキシル基及びエチレン性不飽和基を含有する化合物が、酸変性エポキシ(メタ)アクリレート化合物である、項目19~26のいずれか一項に記載の転写フィルム。
[28]
 タッチパネル用保護膜又はフォースセンサ用保護膜のいずれかに使用される、項目19~27のいずれか一項に記載の転写フィルム。
[29]
 基材上に、項目1~28のいずれか一項に記載の転写フィルムをラミネートし、露光し、そして現像することによりパターンを作製することを特徴とする、パターン製造方法。
[30]
 項目29に記載のパターン製造方法で得られたパターンを後露光処理、及び/又は加熱処理することを特徴とする硬化膜パターン製造方法。
[31]
 項目30に記載の硬化膜パターン製造方法により得られた硬化膜パターンを用いることを特徴とするタッチパネル表示装置又はタッチセンサを有する装置の製造方法。
The above problem is solved by the following technical means.
[1]
A transfer film for forming a conductor protective film comprising a support film and a photosensitive resin composition layer, wherein the photosensitive resin composition layer comprises the following components:
(A) Alkali-soluble resin (excluding acid-modified epoxy (meth) acrylate compounds);
(B) a compound containing a carboxyl group and an ethylenically unsaturated group;
(C) a photopolymerizable compound; and (D) a photopolymerizable initiator;
Containing
The (A) alkali-soluble resin has a weight average molecular weight of 11,000 or more and 29,000 or less, and an acid value of 100 mgKOH / g or more,
The compound (B) containing a carboxyl group and an ethylenically unsaturated group has a weight average molecular weight of 1,000 to 9,500, an acid value of 60 mgKOH / g or more, and a refractive index of 1.570 or more. ,
A conductor characterized in that the mass ratio (A) / (B) of the (A) alkali-soluble resin to the compound containing (B) a carboxyl group and an ethylenically unsaturated group is 0.18 to 6.0. Transfer film for forming a protective film.
[2]
Item 2. The transfer film according to Item 1, wherein the acid value of the alkali-soluble resin (A) is 200 mgKOH / g or less.
[3]
Item 3. The transfer film according to Item 1 or 2, wherein the acid value of the compound (B) containing a carboxyl group and an ethylenically unsaturated group is 200 mgKOH / g or less and the refractive index is 1.650 or less.
[4]
Item 4. The transfer film according to any one of Items 1 to 3, wherein the photosensitive resin composition layer has a hydroxyl value of 15.0 mgKOH / g or less.
[5]
Item 5. The transfer film according to Item 4, wherein the photosensitive resin composition layer has a hydroxyl value of 0.01 mgKOH / g or more.
[6]
Item 6. The transfer film according to any one of Items 1 to 5, wherein the refractive index of the photosensitive resin composition layer is 1.550 or more.
[7]
Item 7. The transfer film according to Item 6, wherein the refractive index of the photosensitive resin composition layer is 1.630 or less.
[8]
The (A) alkali-soluble resin contains a structure derived from (meth) acrylic acid in an amount of 12% by mass to 30% by mass and a structure derived from styrene or a derivative thereof in an amount of 30% by mass to 80% by mass. 8. The transfer film according to any one of 7 above.
[9]
Item 9. The transfer film according to any one of Items 1 to 8, wherein the compound (B) containing a carboxyl group and an ethylenically unsaturated group is an acid-modified epoxy (meth) acrylate compound.
[10]
Item 10. The transfer film according to any one of Items 1 to 9, which is used for either a protective film for a touch panel or a protective film for a force sensor.
[11]
A conductor part protective film-forming transfer film comprising a support film and a photosensitive resin composition layer, wherein the photosensitive resin composition layer comprises the following (I) and (II):
(I) In a differential molecular weight distribution curve obtained from a GPC elution curve obtained by measuring a component dissolved in tetrahydrofuran by gel permeation chromatography (GPC),
(I) the ratio R 20k / 5k of the dw / d (logM) value between the molecular weight M = 20000 and the molecular weight M = 5000 is in the range of 0.20-1.50, and (ii) in the differential molecular weight distribution curve The area ratio S ≧ 50k of the region having the molecular weight M ≧ 50000 is 1.0 to 9.0% when the area of the region having the molecular weight M ≧ 2000 is 100%; and (II) tetrahydrofuran at 23 ° C. (I) Acid value A2 is 95 mgKOH / g or more, and (ii) Refractive index n2 is 1.560 or more, which is soluble in water and insoluble in tetrahydrofuran / cyclohexane (mass ratio = 1/2) mixed solvent Is
A transfer film for forming a conductor protective film that satisfies the requirements.
[12]
The transfer film for forming a conductor protective film according to item 11, further comprising the following (III):
(III) A component that is soluble in tetrahydrofuran and insoluble in a tetrahydrofuran / cyclohexane (mass ratio = 1 / 1.3) mixed solvent at 23 ° C. (i) has an acid value A1 of 100 mgKOH / g or more; ii) The transfer film for forming a conductor protective film according to Item 11, wherein the refractive index n1 satisfies 0.005 or more smaller than n2.
[13]
Item 13. The conductor protective film-forming transfer film according to Item 12, wherein the acid value A1 is 200 mgKOH / g or less.
[14]
Item 14. The transfer film according to any one of Items 11 to 13, wherein a component in a region of molecular weight M ≧ 50000 in the differential molecular weight distribution curve includes an aromatic ring.
[15]
Item 15. The transfer film according to any one of Items 11 to 14, which is used for either a protective film for a touch panel or a protective film for a force sensor.
[16]
A transfer film for forming a conductor protective film comprising a support film and a photosensitive resin composition layer, wherein the photosensitive resin composition layer comprises the following (II) and (III):
(II) a component that is soluble in tetrahydrofuran and insoluble in a tetrahydrofuran / cyclohexane (mass ratio = 1/2) mixed solvent at 23 ° C. (i) has an acid value A2 of 95 mgKOH / g or more, and (ii) The refractive index n2 is 1.560 or more;
(III) A component that is soluble in tetrahydrofuran and insoluble in a tetrahydrofuran / cyclohexane (mass ratio = 1 / 1.3) mixed solvent at 23 ° C. (i) has an acid value A1 of 100 mgKOH / g or more; ii) A transfer film for forming a conductor protective film that satisfies a refractive index n1 of 0.005 or more smaller than n2.
[17]
Item 17. The transfer film for forming a conductor protective film according to Item 16, wherein the acid value A1 is 200 mgKOH / g or less.
[18]
Item 18. The transfer film according to Item 16 or 17, which is used for either a touch panel protective film or a force sensor protective film.
[19]
A transfer film for forming a conductor protective film comprising a support film and a photosensitive resin composition layer, wherein the photosensitive resin composition layer comprises the following components:
(A) Alkali-soluble resin (excluding acid-modified epoxy (meth) acrylate compounds);
(B) a compound containing a carboxyl group and an ethylenically unsaturated group;
(C) a photopolymerizable compound; and (D) a photopolymerizable initiator;
Containing
The (A) alkali-soluble resin has a weight average molecular weight of 11,000 or more and 29,000 or less, and an acid value of 100 mgKOH / g or more,
The compound (B) containing a carboxyl group and an ethylenically unsaturated group has a weight average molecular weight of 1,000 to 9,500, an acid value of 60 mgKOH / g or more, and the following general formulas (1) to (3): ):
Figure JPOXMLDOC01-appb-C000004
Figure JPOXMLDOC01-appb-C000005
Figure JPOXMLDOC01-appb-C000006
Including at least the structure according to any one of
A conductor characterized in that the mass ratio (A) / (B) of the (A) alkali-soluble resin to the compound containing (B) a carboxyl group and an ethylenically unsaturated group is 0.18 to 6.0. Transfer film for forming a protective film.
[20]
Item 20. The transfer film according to Item 19, wherein the acid value of the (A) alkali-soluble resin is 200 mgKOH / g or less.
[21]
Item 21. The transfer film according to Item 19 or 20, wherein the acid value of the compound containing (B) a carboxyl group and an ethylenically unsaturated group is 200 mgKOH / g or less.
[22]
Item 20. The transfer film according to Item 19, wherein the photosensitive resin composition layer has a hydroxyl value of 15.0 mgKOH / g or less.
[23]
Item 23. The transfer film according to Item 22, wherein the photosensitive resin composition layer has a hydroxyl value of 0.01 mgKOH / g or more.
[24]
24. The transfer film according to any one of items 19 to 23, wherein a refractive index of the photosensitive resin composition layer is 1.550 or more.
[25]
Item 25. The transfer film according to Item 24, wherein the refractive index of the photosensitive resin composition layer is 1.630 or less.
[26]
Items (19) to (19), wherein the (A) alkali-soluble resin contains a structure derived from (meth) acrylic acid in an amount of 12% by mass to 30% by mass and a structure derived from styrene or a derivative thereof in an amount of 30% by mass to 80% by mass. The transfer film according to any one of 25.
[27]
Item 27. The transfer film according to any one of Items 19 to 26, wherein the compound (B) containing a carboxyl group and an ethylenically unsaturated group is an acid-modified epoxy (meth) acrylate compound.
[28]
Item 28. The transfer film according to any one of Items 19 to 27, which is used for either a protective film for a touch panel or a protective film for a force sensor.
[29]
29. A pattern production method comprising producing a pattern by laminating, exposing and developing the transfer film according to any one of items 1 to 28 on a substrate.
[30]
30. A cured film pattern manufacturing method, wherein a pattern obtained by the pattern manufacturing method according to item 29 is subjected to post-exposure processing and / or heat treatment.
[31]
A method for manufacturing a device having a touch panel display device or a touch sensor, wherein the cured film pattern obtained by the method for manufacturing a cured film pattern according to Item 30 is used.
 本発明によれば、転写フィルムのタック性、低温現像性、低温ラミネート性、及び硬化膜としての透湿性、導体基材との密着性が全て良好な感光性樹脂組成物及び転写フィルムを提供することができる。 According to the present invention, there are provided a photosensitive resin composition and a transfer film in which the transfer film has good tack properties, low-temperature developability, low-temperature laminating properties, moisture permeability as a cured film, and good adhesion to a conductor substrate. be able to.
図1は、実施例5で得られた転写フィルムに含まれる感光性樹脂層のGPC溶出曲線から得られる微分分子量分布曲線である。FIG. 1 is a differential molecular weight distribution curve obtained from the GPC elution curve of the photosensitive resin layer contained in the transfer film obtained in Example 5.
 以下、本発明を実施するための形態(以下、「実施の形態」と略記する。)について詳細に説明する。尚、本発明は、以下の実施の形態に限定されるものではなく、その要旨の範囲内で種々変形して実施することができる。 Hereinafter, modes for carrying out the present invention (hereinafter abbreviated as “embodiments”) will be described in detail. In addition, this invention is not limited to the following embodiment, It can implement by changing variously within the range of the summary.
<(A)アルカリ可溶性樹脂>
 本実施の形態に係る(A)アルカリ可溶性樹脂は、カルボキシル基を含有するが酸変性エポキシ(メタ)アクリレート化合物を含まない高分子体であれば制限はなく、例えば、(メタ)アクリル酸、(メタ)アクリル酸エステル、(メタ)アクリロニトリル、(メタ)アクリルアミド等のアクリル系共重合体(A1)、ポリイミド前駆体(A2)、カルボキシル基含有ポリイミド(A3)、カルボキシル基含有ウレタン樹脂(A4)などが挙げられる。
<(A) Alkali-soluble resin>
The (A) alkali-soluble resin according to the present embodiment is not limited as long as it contains a carboxyl group but does not contain an acid-modified epoxy (meth) acrylate compound. For example, (A) (meth) acrylic acid, ( Acrylic copolymers (A1) such as (meth) acrylic acid ester, (meth) acrylonitrile, (meth) acrylamide, polyimide precursor (A2), carboxyl group-containing polyimide (A3), carboxyl group-containing urethane resin (A4), etc. Is mentioned.
 (A)アルカリ可溶性樹脂の酸価(mgKOH/g)は、100以上であり、100~200であることが好ましい。酸価は、透湿度低減及び導体の防錆性向上の観点から、200以下であることが好ましく、低温現像性向上の観点から100以上であり、導体の防錆性と低温現像性のバランスの観点から、110~180であることがより好ましく、120~160であることが更に好ましい。 (A) The acid value (mgKOH / g) of the alkali-soluble resin is 100 or more, preferably 100 to 200. The acid value is preferably 200 or less from the viewpoint of reducing moisture permeability and improving the rust prevention property of the conductor, and is 100 or more from the viewpoint of improving the low temperature developability, and the balance between the rust prevention property and the low temperature developability of the conductor. From the viewpoint, 110 to 180 is more preferable, and 120 to 160 is still more preferable.
 酸価の測定は、平沼産業(株)製の平沼自動滴定装置(COM-555)を使用し、0.1mol/Lの水酸化カリウムを用いて電位差滴定法により行われる。
 (A)アルカリ可溶性樹脂は主鎖末端及び/又は側鎖にエチレン性不飽和基を有していてもよい。
The acid value is measured by a potentiometric titration method using a Hiranuma automatic titrator (COM-555) manufactured by Hiranuma Sangyo Co., Ltd., using 0.1 mol / L potassium hydroxide.
(A) The alkali-soluble resin may have an ethylenically unsaturated group at the main chain terminal and / or side chain.
 (A)アルカリ可溶性樹脂の重量平均分子量は、塗布性、塗膜強度、転写フィルムのタック性、及び現像性の観点から、11,000以上29,000以下である。アルカリ可溶性樹脂の重量平均分子量は、現像凝集物の性状、転写フィルムとして使用した場合のタック性、エッジフューズ性、カットチップ性等の未露光膜の性状の観点、及び転写フィルムを下地の導体付基材上に製膜し、硬化させた後の基材との密着性の観点から11,000以上であり、低温現像性の観点から29,000以下である。ここで、エッジフューズ性とは、転写フィルムとしてロール状に巻き取った場合にロールの端面から感光性樹脂組成物層がはみ出す現象である。カットチップ性とは、未露光膜をカッターで切断した場合にチップが飛ぶ現象のことである。飛散したチップが転写フィルムの上面等に付着すると、後の露光工程等でマスクに転写して不良の原因となる。(A)アルカリ可溶性樹脂の重量平均分子量は、より好ましくは、13,000以上27,000以下であり、更に好ましくは15,000以上26,000以下である。本実施の形態に係る重量平均分子量の測定は、以下の条件に設定された日本分光(株)製ゲルパーミエ-ションクロマトグラフィー(GPC)を用いて行う。得られた重量平均分子量はポリスチレン換算値となる。
ポンプ:Gulliver、PU-1580型
カラム:昭和電工(株)製Shodex(登録商標)(KF-807、KF-806M、KF-806M、KF-802.5)4本直列
検出器:RI
カラム温度:40℃
流速:1.0mL/min
注入量:0.02mL
移動層溶媒:テトラヒドロフラン
検量線:ポリスチレン標準サンプルを用いて規定された検量線{ポリスチレン標準サンプル(昭和電工(株)製Shodex STANDARD SM-105)による検量線使用}
(A) The weight average molecular weight of alkali-soluble resin is 11,000 or more and 29,000 or less from a viewpoint of applicability | paintability, coating-film strength, the tackiness of a transfer film, and developability. The weight-average molecular weight of the alkali-soluble resin is determined based on the properties of the development aggregate, the tack properties when used as a transfer film, the properties of the unexposed film such as edge fuse properties, cut chip properties, etc. It is 11,000 or more from the viewpoint of adhesion to the substrate after film formation and curing on the substrate, and 29,000 or less from the viewpoint of low-temperature developability. Here, the edge fuse property is a phenomenon in which the photosensitive resin composition layer protrudes from the end face of the roll when the transfer film is wound into a roll shape. The cut chip property is a phenomenon in which a chip flies when an unexposed film is cut with a cutter. If the scattered chips adhere to the upper surface of the transfer film or the like, it is transferred to a mask in the subsequent exposure process or the like, causing a defect. (A) The weight average molecular weight of the alkali-soluble resin is more preferably from 13,000 to 27,000, still more preferably from 15,000 to 26,000. The measurement of the weight average molecular weight according to the present embodiment is performed using gel permeation chromatography (GPC) manufactured by JASCO Corporation set under the following conditions. The obtained weight average molecular weight is a polystyrene equivalent value.
Pump: Gulliver, PU-1580 type Column: Shodex (registered trademark) (KF-807, KF-806M, KF-806M, KF-802.5) manufactured by Showa Denko KK Four detectors: RI
Column temperature: 40 ° C
Flow rate: 1.0 mL / min
Injection volume: 0.02 mL
Moving bed solvent: Tetrahydrofuran calibration curve: Calibration curve defined using polystyrene standard sample {Use of calibration curve based on polystyrene standard sample (Shodex STANDARD SM-105 manufactured by Showa Denko KK)}
 (A)アルカリ可溶性樹脂の水酸基価(mgKOH/g)は40以下であることが好ましく、30以下であることがさらに好ましい。水酸基価が40以下であることで、感光性樹脂組成物を露光及び熱キュアした後の硬化物の透湿度を下げることができるため、導体の防錆性が向上する。 (A) The hydroxyl value (mgKOH / g) of the alkali-soluble resin is preferably 40 or less, and more preferably 30 or less. When the hydroxyl value is 40 or less, the moisture permeability of the cured product after the photosensitive resin composition is exposed and thermally cured can be lowered, so that the rust prevention property of the conductor is improved.
 (A)アルカリ可溶性樹脂の水酸基価は、次のようにして測定することができる。
 まず、水酸基価の測定対象である(A)アルカリ可溶性樹脂の溶液をアルミの皿上に入れ、溶液中の溶媒の沸点よりも10℃高い温度で4時間加熱し、溶媒を完全に除去する。こうして得られた(A)アルカリ可溶性樹脂の固形分を1g精秤し、これに10質量%の無水酢酸ピリジン溶液を10mL加えて均一に溶解し、100℃で1時間加熱する。加熱後、水10mLとピリジン10mLを加えて100℃で10分間加熱する。その後、自動滴定機(平沼産業(株)製「COM-555」)を用いて、0.1mol/Lの水酸化カリウムのエタノール溶液により中和滴定することにより測定する。
 なお、水酸基価は次式により算出できる。
水酸基価=(A-B)×f×28.05/試料(g)+酸価
{式中、Aは空試験に用いた0.1mol/L水酸化カリウムエタノール溶液の量(mL)を示し、Bは滴定に用いた0.1mol/L水酸化カリウムエタノール溶液の量(mL)を示し、fはファクターを示す。}
(A) The hydroxyl value of alkali-soluble resin can be measured as follows.
First, the (A) alkali-soluble resin solution to be measured for hydroxyl value is placed on an aluminum dish and heated at a temperature 10 ° C. higher than the boiling point of the solvent in the solution for 4 hours to completely remove the solvent. 1 g of the solid content of the alkali-soluble resin (A) thus obtained is precisely weighed, and 10 mL of 10% by mass acetic anhydride pyridine solution is added and dissolved uniformly, followed by heating at 100 ° C. for 1 hour. After heating, 10 mL of water and 10 mL of pyridine are added and heated at 100 ° C. for 10 minutes. Then, it is measured by neutralization titration with an ethanol solution of 0.1 mol / L potassium hydroxide using an automatic titrator (“COM-555” manufactured by Hiranuma Sangyo Co., Ltd.).
The hydroxyl value can be calculated by the following formula.
Hydroxyl value = (AB) × f × 28.05 / sample (g) + acid value {wherein A represents the amount (mL) of 0.1 mol / L potassium hydroxide ethanol solution used in the blank test. , B indicates the amount (mL) of 0.1 mol / L potassium hydroxide ethanol solution used for titration, and f indicates a factor. }
(A1)アクリル系共重合体
 本実施の形態に係る(A1)アクリル系共重合体は、例えば、(メタ)アクリル酸、(メタ)アクリル酸エステル、(メタ)アクリロニトリル、(メタ)アクリルアミド、スチレン及びその誘導体等の共重合体を示す。
(A1) Acrylic copolymer The (A1) acrylic copolymer according to the present embodiment includes, for example, (meth) acrylic acid, (meth) acrylic acid ester, (meth) acrylonitrile, (meth) acrylamide, and styrene. And copolymers such as derivatives thereof.
 共重合体の例としては、既に説明した構成単位に加えて、それらの構成単位と共重合可能な他のモノマーを構成単位として含有していてもよい。他のモノマーとしては、例えば、ヒドロキシアルキル(メタ)アクリレート、フマル酸、ケイ皮酸、クロトン酸、イタコン酸、無水マレイン酸、(メタ)アクリル酸テトラヒドロフルフリルエステル、(メタ)アクリル酸ジメチルアミノエチルエステル、(メタ)アクリル酸ジエチルアミノエチルエステル、(メタ)アクリル酸グリシジルエステル、(メタ)アクリル酸ベンジルエステル、2,2,2-トリフルオロエチル(メタ)アクリレート、2,2,3,3-テトラフルオロプロピル(メタ)アクリレート、スチレン及びその誘導体等が挙げられる。スチレン誘導体としては、4-メチルスチレン、4-ヒドロキシスチレン、4-メトキシスチレン、4-クロロスチレン、4-(クロロメチル)スチレン、4-ビニル安息香酸が挙げられる。
 これらの共重合体の中でも、透湿度の低減及び導体の防錆性向上の観点から、(メタ)アクリル酸に由来する構成単位と(メタ)アクリル酸芳香族エステル又はスチレン及びその誘導体に由来する構成単位とを含有する共重合体がより好ましい。
As an example of the copolymer, in addition to the structural units already described, other monomers copolymerizable with those structural units may be contained as the structural units. Other monomers include, for example, hydroxyalkyl (meth) acrylate, fumaric acid, cinnamic acid, crotonic acid, itaconic acid, maleic anhydride, (meth) acrylic acid tetrahydrofurfuryl ester, dimethylaminoethyl (meth) acrylate Ester, (meth) acrylic acid diethylaminoethyl ester, (meth) acrylic acid glycidyl ester, (meth) acrylic acid benzyl ester, 2,2,2-trifluoroethyl (meth) acrylate, 2,2,3,3-tetra Examples thereof include fluoropropyl (meth) acrylate, styrene and derivatives thereof. Examples of the styrene derivative include 4-methylstyrene, 4-hydroxystyrene, 4-methoxystyrene, 4-chlorostyrene, 4- (chloromethyl) styrene, and 4-vinylbenzoic acid.
Among these copolymers, structural units derived from (meth) acrylic acid and (meth) acrylic acid aromatic ester or styrene and derivatives thereof from the viewpoint of reducing moisture permeability and improving the rust prevention property of the conductor. A copolymer containing a structural unit is more preferable.
 芳香族基を有するユニットを共重合することにより、アクリル系共重合体の疎水性が高くなり、防錆性が向上する。また、アクリル系共重合体が芳香族基を有することで、感光性樹脂組成物の硬化後の膜密度が高くなり、導体の防錆性が向上すると考えられる。低温現像性と透湿度低減を両立できる点で(A1)アクリル系共重合体として、(メタ)アクリル酸由来の構造を12質量%以上30質量%以下、及びスチレン又はその誘導体由来の構造を30質量%以上80質量%以下で含むものがより好ましい。
 (A1)アクリル系共重合体は前記の単量体を特定の重量比で組み合わせて配合し、ラジカル重合によって合成される。この際の光重合開始剤としてはアゾ系重合開始剤を用いることが好ましい。アゾ系開始剤の市販品としては、例えばV-601(富士フイルム和光純薬(株)製)等が挙げられる。
By copolymerizing the unit having an aromatic group, the hydrophobicity of the acrylic copolymer is increased, and the rust prevention property is improved. Moreover, it is thought that the film density after hardening of the photosensitive resin composition becomes high, and the rust prevention property of a conductor improves because an acrylic copolymer has an aromatic group. The structure derived from (meth) acrylic acid is 12% by mass or more and 30% by mass or less, and the structure derived from styrene or its derivative is 30 as (A1) acrylic copolymer in that both low temperature developability and moisture permeability reduction can be achieved. More preferably, the content is from 80% by weight to 80% by weight.
(A1) The acrylic copolymer is synthesized by radical polymerization by combining the above monomers in a specific weight ratio. In this case, an azo polymerization initiator is preferably used as the photopolymerization initiator. Examples of commercially available azo initiators include V-601 (manufactured by FUJIFILM Wako Pure Chemical Industries, Ltd.).
(A2)ポリイミド前駆体
 本実施の形態に係る(A2)ポリイミド前駆体とは、ポリアミド酸のみを意味するものではなく、ポリアミド酸の一部がイミド化したものも含む。
(A2) Polyimide Precursor The (A2) polyimide precursor according to the present embodiment does not mean only polyamic acid but also includes imidized part of the polyamic acid.
 ポリイミド前駆体は、例えば、有機溶媒中でテトラカルボン酸二無水物とジアミンとをモル比で0.8:1~1.2:1で混合して反応させることによって得ることができる。使用するテトラカルボン酸二無水物に制限はなく、従来公知のテトラカルボン酸二無水物を用いることができる。テトラカルボン酸二無水物としては、芳香族テトラカルボン酸、脂肪族テトラカルボン酸二無水物などを適用することができる。また、使用するジアミンに制限はなく、従来公知のジアミンを用いることができる。 The polyimide precursor can be obtained, for example, by reacting a mixture of tetracarboxylic dianhydride and diamine in an organic solvent at a molar ratio of 0.8: 1 to 1.2: 1. There is no restriction | limiting in the tetracarboxylic dianhydride to be used, A conventionally well-known tetracarboxylic dianhydride can be used. As tetracarboxylic dianhydride, aromatic tetracarboxylic acid, aliphatic tetracarboxylic dianhydride, etc. can be applied. Moreover, there is no restriction | limiting in the diamine to be used, A conventionally well-known diamine can be used.
 テトラカルボン酸二無水物としては、ビフェニル-3,3’,4,4’-テトラカルボン酸二無水物、ベンゾフェノン-3,3’,4,4’-テトラカルボン酸二無水物、オキシジフタル酸二無水物、ジフェニルスルホン-3,3’,4,4’-テトラカルボン酸二無水物、エチレングリコールビス(トリメリット酸モノエステル酸無水物)、p-フェニレンビス(トリメリット酸モノエステル酸無水物)、p-ビフェニレンビス(トリメリット酸モノエステル酸無水物)、m-フェニレンビス(トメリット酸モノエステル酸無水物)、o-フェニレンビス(トリメリット酸モノエステル酸無水物)、ペンタンジオールビス(トリメリット酸モノエステル酸無水物)、デカンジオールビス(トリメリット酸モノエステル酸無水物)、無水ピロメリット酸、ビス(3,4-ジカルボキシフェニル)エーテル二無水物、4,4’-(2,2-ヘキサフルオロイソプロピリデン)ジフタル酸二無水物、メタ-ターフェニル-3,3’,4,4’-テトラカルボン酸二無水物、1,2,4,5-シクロヘキサンテトラカルボン酸二無水物、ビシクロ[2,2,2]オクト-7-エン-2,3,5,6-テトラカルボン酸二無水物、シクロブタン-1,2,3,4-テトラカルボン酸二無水物、1-カルボキシメチル-2,3,5-シクロペンタトリカルボン酸-2,6:3,5-二無水物、4-(2,5-ジオキソテトラヒドロフラン-3-イル)-1,2,3,4-テトラヒドロナフタレン-1,2-ジカルボン酸無水物、及び、5-(2,5-ジオキソテトラヒドロフリル)-3-メチル-3-シクロヘキセン-1,2-ジカルボン酸無水物、などが挙げられる。上述したテトラカルボン酸二無水物は単独で用いてもよく、2種以上を混合して用いてもよい。 Examples of tetracarboxylic dianhydrides include biphenyl-3,3 ′, 4,4′-tetracarboxylic dianhydride, benzophenone-3,3 ′, 4,4′-tetracarboxylic dianhydride, oxydiphthalic acid Anhydride, diphenylsulfone-3,3 ′, 4,4′-tetracarboxylic dianhydride, ethylene glycol bis (trimellitic acid monoester acid anhydride), p-phenylenebis (trimellitic acid monoester acid anhydride) ), P-biphenylenebis (trimellitic acid monoester acid anhydride), m-phenylenebis (tomellitic acid monoester acid anhydride), o-phenylenebis (trimellitic acid monoester acid anhydride), pentanediol bis (Trimellitic acid monoester acid anhydride), decanediol bis (trimellitic acid monoester acid anhydride), Merit acid, bis (3,4-dicarboxyphenyl) ether dianhydride, 4,4 ′-(2,2-hexafluoroisopropylidene) diphthalic dianhydride, meta-terphenyl-3,3 ′, 4 , 4'-tetracarboxylic dianhydride, 1,2,4,5-cyclohexanetetracarboxylic dianhydride, bicyclo [2,2,2] oct-7-ene-2,3,5,6-tetra Carboxylic dianhydride, cyclobutane-1,2,3,4-tetracarboxylic dianhydride, 1-carboxymethyl-2,3,5-cyclopentatricarboxylic acid-2,6: 3,5-dianhydride 4- (2,5-dioxotetrahydrofuran-3-yl) -1,2,3,4-tetrahydronaphthalene-1,2-dicarboxylic acid anhydride and 5- (2,5-dioxotetrahydrofuryl) ) -3-Me -3-cyclohexene-1,2-dicarboxylic anhydride, and the like. The tetracarboxylic dianhydrides described above may be used alone or in combination of two or more.
 ジアミンとしては、1,3-ビス(4-アミノフェノキシ)アルカン、1,4-ビス(4-アミノフェノキシ)アルカン、1,5-ビス(4-アミノフェノキシ)アルカン、1,4-ジアミノベンゼン、1,3-ジアミノベンゼン、2,4-ジアミノトルエン、4,4’-ジアミノジフェニルメタン、4,4’-ジアミノジフェニルエーテル、3,4’-ジアミノジフェニルエーテル、3,3’-ジメチル-4,4’-ジアミノビフェニル、2,2’-ジメチル-4,4’-ジアミノビフェニル、2,2’-ビス(トリフルオロメチル)-4,4’-ジアミノビフェニル、3,7-ジアミノ-ジメチルジベンゾチオフェン-5,5-ジオキシド、4,4’-ジアミノベンゾフェノン、3,3’-ジアミノベンゾフェノン、4,4’-ビス(4-アミノフェニル)スルフィド、4,4’-ジアミノベンズアニリド、1,3-ビス(4-アミノフェノキシ)-2,2-ジメチルプロパン、1,2-ビス[2-(4-アミノフェノキシ)エトキシ]エタン、9,9-ビス(4-アミノフェニル)フルオレン、5-アミノ-1-(4-アミノメチル)-1,3,3-トリメチルインダン、1,4-ビス(4-アミノフェノキシ)ベンゼン、1,3-ビス(4-アミノフェノキシ)ベンゼン、1,3-ビス(3-アミノフェノキシ)ベンゼン、4,4’-ビス(4-アミノフェノキシ)ビフェニル、4、4’-ビス(3-アミノフェノキシ)ビフェニル、2,2-ビス(4-アミノフェノキシフェニル)プロパン、トリメチレン-ビス(4-アミノベンゾエート)、4-アミノフェニル-4-アミノベンゾエート、2-メチル-4-アミノフェニル-4-アミノベンゾエート、ビス[4-(4-アミノフェノキシ)フェニル]スルホン、ビス[4-(3-アミノフェノキシ)フェニル]スルホン、2,2-ビス[4-(4-アミノフェノキシ)フェニル]ヘキサフルオロプロパン、1-アミノ-3-アミノメチル-3,5,5-トリメチルシクロヘキサン、3,3’-ジカルボキシ-4,4’-ジアミノジフェニルメタン、3,5-ジアミノ安息香酸、3,3’-ジヒドロキシ-4,4’-ジアミノビフェニル、及び、1,3-ビス(4-アミノフェノキシベンゼン)などが挙げられる。また、ポリイミド前駆体に適度な柔軟性、耐折性を付与する目的で、シロキサン骨格を有するジアミン及び/又はポリアルキレンオキシド骨格を有するジアミンを組み合わせて使用してもよい。 Examples of the diamine include 1,3-bis (4-aminophenoxy) alkane, 1,4-bis (4-aminophenoxy) alkane, 1,5-bis (4-aminophenoxy) alkane, 1,4-diaminobenzene, 1,3-diaminobenzene, 2,4-diaminotoluene, 4,4'-diaminodiphenylmethane, 4,4'-diaminodiphenyl ether, 3,4'-diaminodiphenyl ether, 3,3'-dimethyl-4,4'- Diaminobiphenyl, 2,2′-dimethyl-4,4′-diaminobiphenyl, 2,2′-bis (trifluoromethyl) -4,4′-diaminobiphenyl, 3,7-diamino-dimethyldibenzothiophene-5 5-dioxide, 4,4′-diaminobenzophenone, 3,3′-diaminobenzophenone, 4,4′-bis ( -Aminophenyl) sulfide, 4,4'-diaminobenzanilide, 1,3-bis (4-aminophenoxy) -2,2-dimethylpropane, 1,2-bis [2- (4-aminophenoxy) ethoxy] Ethane, 9,9-bis (4-aminophenyl) fluorene, 5-amino-1- (4-aminomethyl) -1,3,3-trimethylindane, 1,4-bis (4-aminophenoxy) benzene, 1,3-bis (4-aminophenoxy) benzene, 1,3-bis (3-aminophenoxy) benzene, 4,4'-bis (4-aminophenoxy) biphenyl, 4,4'-bis (3-amino Phenoxy) biphenyl, 2,2-bis (4-aminophenoxyphenyl) propane, trimethylene-bis (4-aminobenzoate), 4-aminophenyl-4 Aminobenzoate, 2-methyl-4-aminophenyl-4-aminobenzoate, bis [4- (4-aminophenoxy) phenyl] sulfone, bis [4- (3-aminophenoxy) phenyl] sulfone, 2,2-bis [4- (4-aminophenoxy) phenyl] hexafluoropropane, 1-amino-3-aminomethyl-3,5,5-trimethylcyclohexane, 3,3′-dicarboxy-4,4′-diaminodiphenylmethane, 3 , 5-diaminobenzoic acid, 3,3′-dihydroxy-4,4′-diaminobiphenyl, 1,3-bis (4-aminophenoxybenzene) and the like. Further, for the purpose of imparting appropriate flexibility and folding resistance to the polyimide precursor, a diamine having a siloxane skeleton and / or a diamine having a polyalkylene oxide skeleton may be used in combination.
 ポリイミド前駆体の主鎖末端は、性能に影響を与えない構造であれば、特に制限はなく、ポリイミド前駆体を製造する際に用いる酸二無水物、又は、ジアミンに由来する末端の構造でもよく、その他の酸無水物、又は、アミン化合物などにより末端を封止した構造でもよい。 The main chain terminal of the polyimide precursor is not particularly limited as long as it does not affect the performance, and may be an acid dianhydride or a terminal structure derived from a diamine used for producing the polyimide precursor. The terminal may be sealed with other acid anhydrides or amine compounds.
 ポリイミド構造及びポリアミド酸構造をそれぞれ繰り返し単位として有するポリイミド前駆体は、酸二無水物とジアミンを非等モル量で反応させて1段階目のポリイミド部分を合成する工程(工程1)、続いて2段階目のポリアミド酸部分を合成する工程(工程2)により作製することができる。ポリイミド前駆体の製造方法として、工程1は必ずしも含まなくともよい。以下、それぞれの工程について説明する。 A polyimide precursor having a polyimide structure and a polyamic acid structure as repeating units, respectively, is a step of reacting acid dianhydride and diamine in a non-equal molar amount to synthesize a first-stage polyimide portion (step 1), followed by 2 It can be produced by a step of synthesizing the polyamic acid portion at the stage (step 2). As a method for producing a polyimide precursor, step 1 is not necessarily included. Hereinafter, each process will be described.
(工程1)
 1段階目のポリイミド部分を合成する工程について説明する。1段階目のポリイミド部分を合成する工程としては、特に限定されず公知の方法を適用することができる。より具体的には、以下の方法によりポリイミド部分を合成できる。まず、ジアミンを重合溶媒に溶解及び/又は分散し、これに酸二無水物粉末を添加する。そして、水と共沸する溶媒を加え、メカニカルスターラーを用い、副生する水を共沸除去しながら、0.5時間~96時間、より好ましくは0.5時間~30時間加熱撹拌する。
(Process 1)
The process of synthesizing the first stage polyimide portion will be described. The step of synthesizing the first-stage polyimide portion is not particularly limited, and a known method can be applied. More specifically, the polyimide portion can be synthesized by the following method. First, diamine is dissolved and / or dispersed in a polymerization solvent, and acid dianhydride powder is added thereto. Then, a solvent that is azeotroped with water is added, and the mixture is heated and stirred for 0.5 to 96 hours, more preferably for 0.5 to 30 hours while removing by-product water azeotropically using a mechanical stirrer.
 ポリイミド部分は、公知のイミド化触媒を添加することによっても、無触媒によっても、ポリイミド部分を合成することができる。イミド化触媒としては、特に制限されないが、無水酢酸のような酸無水物、γ-バレロラクトン、γ-ブチロラクトン、γ-テトロン酸、γ-フタリド、γ-クマリン、及び、γ-フタリド酸のようなラクトン化合物、並びに、ピリジン、キノリン、N-メチルモルホリン、及び、トリエチルアミンのような三級アミンなどが挙げられる。また、必要に応じて1種、又は2種以上のこれらの混合物を用いてもよい。これらの中でも、反応性の高さ及び次反応への影響を低減する観点から、γ-バレロラクトンとピリジンとの混合系及び無触媒が特に好ましい。 The polyimide part can be synthesized by adding a known imidization catalyst or without a catalyst. The imidation catalyst is not particularly limited, but may be an acid anhydride such as acetic anhydride, γ-valerolactone, γ-butyrolactone, γ-tetronic acid, γ-phthalide, γ-coumarin, and γ-phthalido acid. Lactone compounds, and tertiary amines such as pyridine, quinoline, N-methylmorpholine, and triethylamine. Moreover, you may use 1 type, or 2 or more types of these mixtures as needed. Among these, a mixed system of γ-valerolactone and pyridine and non-catalyst are particularly preferable from the viewpoint of high reactivity and reducing the influence on the next reaction.
 ポリイミド部分の合成の際に使用される反応溶媒としては、ジメチルエーテル、ジエチルエーテル、メチルエチルエーテル、テトラヒドロフラン、ジオキサン、エチレングリコールジメチルエーテル、ジエチレングリコールジメチルエーテル、及び、トリエチレングリコールジメチルエーテルのような炭素数2以上炭素数9以下のエーテル化合物;アセトン、及び、メチルエチルケトンのような炭素数2以上炭素数6以下のケトン化合物;ノルマルペンタン、シクロペンタン、ノルマルヘキサン、シクロヘキサン、メチルシクロヘキサン、及び、デカリンのような炭素数5以上炭素数10以下の飽和炭化水素化合物;ベンゼン、トルエン、キシレン、メシチレン、及び、テトラリンのような炭素数6以上炭素数10以下の芳香族炭化水素化合物;酢酸メチル、酢酸エチル、γ-ブチロラクトン、及び、安息香酸メチルのような炭素数3以上炭素数12以下のエステル化合物;クロロホルム、塩化メチレン、及び、1,2-ジクロロエタンのような炭素数1以上炭素数10以下の含ハロゲン化合物;アセトニトリル、N,N-ジメチルホルムアミド、N,N-ジメチルアセトアミド、及び、N-メチル-2-ピロリドンのような炭素数2以上炭素数10以下の含窒素化合物;ジメチルスルホキシドのような含硫黄化合物が挙げられる。これらは必要に応じて単独で用いてもよく、2種以上の混合溶媒として用いてもよい。特に好ましい溶媒としては、炭素数2以上炭素数9以下のエーテル化合物、炭素数3以上炭素数12以下のエステル化合物、炭素数6以上炭素数10以下の芳香族炭化水素化合物、及び、炭素数2以上炭素数10以下の含窒素化合物が挙げられる。これらは工業的な生産性、及び、次反応への影響などを考慮して任意に選択可能である。 The reaction solvent used in the synthesis of the polyimide part includes 2 or more carbon atoms such as dimethyl ether, diethyl ether, methyl ethyl ether, tetrahydrofuran, dioxane, ethylene glycol dimethyl ether, diethylene glycol dimethyl ether, and triethylene glycol dimethyl ether. 9 or less ether compounds; Cone compounds having 2 to 6 carbon atoms such as acetone and methyl ethyl ketone; 5 or more carbon atoms such as normal pentane, cyclopentane, normal hexane, cyclohexane, methylcyclohexane, and decalin Saturated hydrocarbon compounds having 10 or less carbon atoms; aromatic hydrocarbons having 6 to 10 carbon atoms such as benzene, toluene, xylene, mesitylene, and tetralin Products: ester compounds having 3 to 12 carbon atoms such as methyl acetate, ethyl acetate, γ-butyrolactone, and methyl benzoate; 1 carbon atoms such as chloroform, methylene chloride, and 1,2-dichloroethane Halogen-containing compounds having 10 or less carbon atoms; nitrogen-containing compounds having 2 to 10 carbon atoms such as acetonitrile, N, N-dimethylformamide, N, N-dimethylacetamide, and N-methyl-2-pyrrolidone A sulfur-containing compound such as dimethyl sulfoxide. These may be used alone as necessary, or may be used as a mixed solvent of two or more. Particularly preferable solvents include ether compounds having 2 to 9 carbon atoms, ester compounds having 3 to 12 carbon atoms, aromatic hydrocarbon compounds having 6 to 10 carbon atoms, and 2 carbon atoms. Examples thereof include nitrogen-containing compounds having 10 or less carbon atoms. These can be arbitrarily selected in consideration of industrial productivity and influence on the next reaction.
 ポリイミド部分の合成においては、反応温度は100℃以上250℃以下であることが好ましい。 In the synthesis of the polyimide part, the reaction temperature is preferably 100 ° C. or higher and 250 ° C. or lower.
(工程2)
 次に、2段階目のポリアミド酸部分を合成する工程について説明する。2段階目のポリアミド酸部分の合成は、工程1で得られたポリイミド部分を出発原料として用い、ジアミン及び/又は酸二無水物を追添して重合させることで実施できる。2段階目のポリアミド酸部分の合成の際の重合温度としては、0℃以上80℃以下が好ましい。反応に要する時間は、目的又は反応条件によって異なるが、通常は30分から30時間までの範囲である。
(Process 2)
Next, the process for synthesizing the second stage polyamic acid moiety will be described. The synthesis of the polyamic acid moiety at the second stage can be carried out by using the polyimide moiety obtained in Step 1 as a starting material and adding diamine and / or acid dianhydride for polymerization. The polymerization temperature in the synthesis of the second stage polyamic acid moiety is preferably 0 ° C. or higher and 80 ° C. or lower. The time required for the reaction varies depending on the purpose or reaction conditions, but is usually in the range of 30 minutes to 30 hours.
 工程1を行わずに工程2を行う場合においては、まず、ジアミンを重合溶媒に溶解及び/又は分散し、これに酸二無水物粉末を添加する。重合溶媒としては、工程1で例示したものと同様である。重合温度は0℃以上80℃以下が好ましい。反応に要する時間は通常30分から30時間までである。 When performing step 2 without performing step 1, first, diamine is dissolved and / or dispersed in a polymerization solvent, and acid dianhydride powder is added thereto. The polymerization solvent is the same as that exemplified in Step 1. The polymerization temperature is preferably 0 ° C. or higher and 80 ° C. or lower. The time required for the reaction is usually from 30 minutes to 30 hours.
(A3)カルボキシル基含有ポリイミド
 カルボキシル基含有ポリイミドは有機溶媒中でテトラカルボン酸二無水物とジアミンとをモル比で0.8:1~1.2:1で混合して反応させることによって合成され、イミド化した後にもカルボキシル基を骨格中に含むことを特徴とするが、部分的にポリアミド酸構造が残っていてもよい。
(A3) Carboxyl group-containing polyimide A carboxyl group-containing polyimide is synthesized by mixing tetracarboxylic dianhydride and diamine in an organic solvent at a molar ratio of 0.8: 1 to 1.2: 1 and reacting them. The skeleton is characterized by containing a carboxyl group even after imidization, but the polyamic acid structure may partially remain.
 カルボキシル基含有ポリイミドは、通常カルボキシル基含有ジアミンを用いて合成される。有機溶媒への溶解性の観点又は入手性の観点から、カルボキシル基含有ジアミンとしては、3,5-ジアミノ安息香酸、3,3’-ジカルボキシ-4,4’-ジアミノジフェニルメタンなどを用いることができる。これらのジアミンは、単独で用いてもよく、2種以上を混合して用いてもよい。 The carboxyl group-containing polyimide is usually synthesized using a carboxyl group-containing diamine. From the viewpoint of solubility in organic solvents or availability, 3,5-diaminobenzoic acid, 3,3′-dicarboxy-4,4′-diaminodiphenylmethane, or the like may be used as the carboxyl group-containing diamine. it can. These diamines may be used alone or in combination of two or more.
 テトラカルボン酸二無水物、カルボキシル基含有ジアミンと組み合わせて使用するジアミン、合成に用いる溶媒、及びイミド化触媒の例としては、(A2)ポリイミド前駆体で前述した例と同様である。 Examples of the tetracarboxylic dianhydride, the diamine used in combination with the carboxyl group-containing diamine, the solvent used for the synthesis, and the imidization catalyst are the same as those described above for the (A2) polyimide precursor.
(A4)カルボキシル基含有ポリウレタン
 本実施の形態に係るカルボキシル基含有ポリウレタンは、ジイソシアネート化合物及びカルボキシル基含有ジオール化合物及びその他のジオール化合物を非プロトン性溶媒中、それぞれの反応性に応じた活性の公知な触媒を添加し、加熱することにより合成される。使用するジイソシアネート及びジオール化合物のモル比は、0.8:1~1.2:1が好ましく、ポリマー末端にイソシアネート基が残存した場合、アルコール類又はアミン類等で処理することにより、最絡的にイソシアネート基が残存しない形態で合成される。
(A4) Carboxyl group-containing polyurethane The carboxyl group-containing polyurethane according to the present embodiment is a known disulfide compound, a carboxyl group-containing diol compound, and other diol compounds in an aprotic solvent having an activity corresponding to the respective reactivity. It is synthesized by adding a catalyst and heating. The molar ratio of the diisocyanate and diol compound to be used is preferably 0.8: 1 to 1.2: 1. When an isocyanate group remains at the end of the polymer, the molar ratio can be determined by treating with an alcohol or an amine. Is synthesized in a form in which no isocyanate group remains.
 ジイソシアネート化合物としては、2,4-トリレンジイソシアネート、2,4-トリレンジイソシアネートの二量体、2,6-トリレンジイソシアネート、p-キシリレンジイソシアネート、m-キシリレンジイソシアネート、4,4’-ジフェニルメタンジイソシアネート、1,5-ナフチレンジイソシアネート、3,3’-ジメチルヒフェニル-4,4’-ジイソシアネート等の如き芳香族ジイソシアネート化合物:ヘキサメチレンジイソシアネート、トリメチルヘキサメチレンジイソシアネート、リジンジイソシアネート、ダイマー酸ジイソシアネート等の如き脂肪族ジイソシアネート化合物;イソホロンジイソシアネート、4,4’-メチレンビス(シクロヘキシルイソシアネート)、メチルシクロヘキサン-2,4-(又は2,6)ジイソシアネート、1,3-(イソシアネートメチル)シクロヘキサン等の如き脂環族ジイソシアネート化合物;1,3-ブチレングリコール1モルとトリレンジイソシアネート2モルとの付加体等の如きジオールとジイソシアネートとの反応物であるジイソシアネート化合物等が挙げられる。 Diisocyanate compounds include 2,4-tolylene diisocyanate, dimer of 2,4-tolylene diisocyanate, 2,6-tolylene diisocyanate, p-xylylene diisocyanate, m-xylylene diisocyanate, 4,4'- Aromatic diisocyanate compounds such as diphenylmethane diisocyanate, 1,5-naphthylene diisocyanate, 3,3′-dimethylhyphenyl-4,4′-diisocyanate: hexamethylene diisocyanate, trimethylhexamethylene diisocyanate, lysine diisocyanate, dimer acid diisocyanate, etc. Aliphatic diisocyanate compounds such as: isophorone diisocyanate, 4,4′-methylenebis (cyclohexyl isocyanate), methylcyclohexane-2,4- (or 2 6) Alicyclic diisocyanate compounds such as diisocyanate and 1,3- (isocyanatomethyl) cyclohexane; reaction product of diol and diisocyanate such as an adduct of 1 mol of 1,3-butylene glycol and 2 mol of tolylene diisocyanate The diisocyanate compound etc. which are are mentioned.
 カルボキシル基含有ジオールとしては、3,5-ジヒドロキシ安息香酸、2,2-ビス(ヒドロキシメチル)プロピオン酸、2,2-ビス(2-ヒドロキシエチル)プロピオン酸、2,2-ビス(3-ヒドロキシプロピル)プロピオン酸、ビス(ヒドロキシメチル)酢酸、ビス(4-ヒドロキジフェニル)酢酸、4,4-ビス(4-ヒドロキジフェニル)ペンタン酸、酒石酸、N,N-ジヒドロキシエチルグリシン、N,N-ビス(2-ヒドロキシエチル)-3-カルボキシ-プロピオンアミド等が挙げられる。 Examples of carboxyl group-containing diols include 3,5-dihydroxybenzoic acid, 2,2-bis (hydroxymethyl) propionic acid, 2,2-bis (2-hydroxyethyl) propionic acid, and 2,2-bis (3-hydroxy Propyl) propionic acid, bis (hydroxymethyl) acetic acid, bis (4-hydroxydiphenyl) acetic acid, 4,4-bis (4-hydroxydiphenyl) pentanoic acid, tartaric acid, N, N-dihydroxyethylglycine, N, N-bis (2-hydroxyethyl) -3-carboxy-propionamide and the like.
 カルボキシル基含有ジオール化合物と組み合わせて使用するその他のジオール化合物としては、ポリテトラメチレンジオール、ポリブタジエンジオール、水添ポリブタジエンジオール、ポリカーボネートジオール、ポリエステルジオール、ポリカプロラクトンジオールなどの高分子量ジオール;又はエチレングリコール、1,2-プロピレングリコール、1,3-プロピレングリコール、1,3-ブチレングリコール、2,3-ブチレングリコール、1,4-ブタンジオール、2,2’-ジメチル-1,3-プロパンジオール、ジエチレングリコール、トリエチレングリコール、1,5-ペンダメチレングリコール、ジプロピレングリコール、ネオペンチルグリコール、1,6-ヘキサメチレングリコール、シクロヘキサン-1,4-ジオール、シクロヘキサン-1,4-ジオール、シクロヘキサン-1,4-ジメタノール、2-ブテン-1,4-ジオール、2,2,4-トリメチル-1,3-ペンタンジオール、キシリレングリコール、1,4-ビス-β-ヒドロキシエトキシシクロヘキサン、トリジクロデカンジメタノール、水添ビスフェノールA、水添ビスフェノールF、ビスフェノールA、ビスフェノールS、ヒドロキノンジヒドロキシエチルエーテル、p-キシリレングリコール、ジヒドロキシエチルスルホン、ビス(2-ヒドロキシエチル)-2,4-トリレンジカルバメート、2,4-トリレン-ビス(2-ヒドロキシエチルカルバミド)、ビス(2-ヒドロキシエチル)-m-キシリレンジカルバメート、ビス(2-ヒドロキシエチル)イソフタレート、1,4-ビス(β-ヒドロキシエトキシ)ベンゼン、ビス(β-ヒドロキシエチル)テレフタレートなどの低分子量ジオールなどが挙げられる。 Other diol compounds used in combination with a carboxyl group-containing diol compound include high molecular weight diols such as polytetramethylene diol, polybutadiene diol, hydrogenated polybutadiene diol, polycarbonate diol, polyester diol, and polycaprolactone diol; or ethylene glycol, 1 , 2-propylene glycol, 1,3-propylene glycol, 1,3-butylene glycol, 2,3-butylene glycol, 1,4-butanediol, 2,2′-dimethyl-1,3-propanediol, diethylene glycol, Triethylene glycol, 1,5-pentamethylene glycol, dipropylene glycol, neopentyl glycol, 1,6-hexamethylene glycol, cyclohexane-1,4-dio , Cyclohexane-1,4-diol, cyclohexane-1,4-dimethanol, 2-butene-1,4-diol, 2,2,4-trimethyl-1,3-pentanediol, xylylene glycol, 1, 4-bis-β-hydroxyethoxycyclohexane, tridichlorodecane dimethanol, hydrogenated bisphenol A, hydrogenated bisphenol F, bisphenol A, bisphenol S, hydroquinone dihydroxyethyl ether, p-xylylene glycol, dihydroxyethyl sulfone, bis (2 -Hydroxyethyl) -2,4-tolylenedicarbamate, 2,4-tolylene-bis (2-hydroxyethylcarbamide), bis (2-hydroxyethyl) -m-xylylenedicarbamate, bis (2-hydroxyethyl) iso Phthalate, 1,4- And low molecular weight diols such as bis (β-hydroxyethoxy) benzene and bis (β-hydroxyethyl) terephthalate.
(B)カルボキシル基及びエチレン性不飽和基を含有する化合物
 本実施の形態に係る(B)カルボキシル基及びエチレン性不飽和基を含有する化合物は、分子内に1つ以上のカルボキシル基と1つ以上のエチレン性不飽和基を含有する化合物であれば制限はないが、例えば、(B1)エポキシ(メタ)アクリレート酸変性物を好適に用いることができる。
(B) Compound containing carboxyl group and ethylenically unsaturated group (B) The compound containing carboxyl group and ethylenically unsaturated group according to the present embodiment has one or more carboxyl groups and one in the molecule. Although there will be no restriction | limiting if it is a compound containing the above ethylenically unsaturated group, For example, (B1) epoxy (meth) acrylate acid modified material can be used conveniently.
 (B)カルボキシル基及びエチレン性不飽和基を含有する化合物の酸価(mgKOH/g)は、60以上であり、60~200であることが好ましい。酸価は、感光性樹脂組成物の硬化膜の透湿度低減及び導体の防錆性向上の観点から、200以下であることが好ましく、感光性樹脂組成物層の低温現像性向上の観点から60以上であり、両性能のバランスの観点から、70~170であることがより好ましく、80~150であることが更に好ましい。酸価の測定は、(A)アルカリ可溶性樹脂について前述した方法と同様に行われる。 (B) The acid value (mgKOH / g) of the compound containing a carboxyl group and an ethylenically unsaturated group is 60 or more, preferably 60 to 200. The acid value is preferably 200 or less from the viewpoint of reducing the moisture permeability of the cured film of the photosensitive resin composition and improving the rust prevention property of the conductor, and from the viewpoint of improving the low temperature developability of the photosensitive resin composition layer. From the viewpoint of balance of both performances, 70 to 170 is more preferable, and 80 to 150 is still more preferable. The acid value is measured in the same manner as described above for the (A) alkali-soluble resin.
 (B)カルボキシル基及びエチレン性不飽和基を含有する化合物の重量平均分子量は、(A)アルカリ可溶性樹脂との相溶性、転写フィルムとして使用する場合のタック性、及び低温現像性の観点から、1,000以上9,500以下である。カルボキシル基及びエチレン性不飽和基を含有する化合物の重量平均分子量は、転写フィルムとした際のタック性、エッジフューズ性、カットチップ性等の未露光膜の性状の観点から1,000以上であり、感光性樹脂組成物層の低温現像性、低温ラミネート性の観点から9,500以下であり、好ましくは、2,000以上8,000以下である。 (B) The weight average molecular weight of the compound containing a carboxyl group and an ethylenically unsaturated group is (A) compatible with an alkali-soluble resin, tackiness when used as a transfer film, and low-temperature developability. 1,000 or more and 9,500 or less. The weight average molecular weight of the compound containing a carboxyl group and an ethylenically unsaturated group is 1,000 or more from the viewpoint of the properties of the unexposed film such as tackiness, edge fuse property and cut chip property when used as a transfer film. From the viewpoint of low temperature developability and low temperature laminating property of the photosensitive resin composition layer, it is 9,500 or less, preferably 2,000 or more and 8,000 or less.
 (B)カルボキシル基及びエチレン性不飽和基を含有する化合物の水酸基価(mgKOH/g)は30以下であることが好ましく、20以下であることがより好ましい。水酸基価が30以下であることで、感光性樹脂組成物の硬化物の透湿度を下げることができるため、導体の防錆性が向上する。水酸基価の測定は、(A)アルカリ可溶性樹脂について前述した方法と同様に行われる。 (B) The hydroxyl value (mgKOH / g) of the compound containing a carboxyl group and an ethylenically unsaturated group is preferably 30 or less, and more preferably 20 or less. When the hydroxyl value is 30 or less, the moisture permeability of the cured product of the photosensitive resin composition can be lowered, so that the rust prevention property of the conductor is improved. The measurement of the hydroxyl value is performed in the same manner as described above for the (A) alkali-soluble resin.
 また、本実施の形態に係る(B)カルボキシル基及びエチレン性不飽和基を含有する化合物は1)屈折率が1.570以上である、及び/又は2)下記一般式(1)~(3)で示される骨格のいずれかを少なくとも含むことを特徴とする。前記1)及び/又は2)を満たすことで、本実施の形態に係る感光性樹脂組成物から得られる硬化物の透湿度を下げることができるため、導体の防錆性が向上する。透湿度の観点で、(B)成分の屈折率は、1.570以上であることが好ましく、感光性樹脂組成物層の低温現像性の観点から、1.650以下が好ましい。
Figure JPOXMLDOC01-appb-C000007
Figure JPOXMLDOC01-appb-C000008
Figure JPOXMLDOC01-appb-C000009
In addition, the compound (B) containing a carboxyl group and an ethylenically unsaturated group according to the present embodiment is 1) a refractive index of 1.570 or more, and / or 2) the following general formulas (1) to (3) It includes at least one of the skeletons represented by By satisfying the above 1) and / or 2), the moisture permeability of the cured product obtained from the photosensitive resin composition according to the present embodiment can be lowered, so that the rust prevention property of the conductor is improved. From the viewpoint of moisture permeability, the refractive index of the component (B) is preferably 1.570 or more, and preferably 1.650 or less from the viewpoint of low-temperature developability of the photosensitive resin composition layer.
Figure JPOXMLDOC01-appb-C000007
Figure JPOXMLDOC01-appb-C000008
Figure JPOXMLDOC01-appb-C000009
 本実施の形態に係る(B)成分の屈折率は以下の方法で測定する。
 まず、(B)カルボキシル基及びエチレン性不飽和基を含有する化合物を溶解する1気圧での沸点が200℃以下の有機溶媒(例えば、エタノール、アセトン、メチルエチルケトン、1-メトキシ-2-プロパノール、プロピレングリコール-1-モノメチルエーテル-2-アセタートなど)に溶かした溶液を調製する。この際、固形分濃度は30~70質量%になるように調製する。得られた溶液を市販のポリエチレンテレフタラート(PET)フィルム(厚み16μm)上にバーコーターで塗布し、100℃の熱風式オーブンにて10分間乾燥させ、(B)カルボキシル基及びエチレン性不飽和基を含有する化合物から成る層の厚み5μmの積層体を得る。屈折率測定は、Metricon社製、Prism CouplerModel2010/M、レーザー光波長:532nm)を使用し、プリズムに(B)カルボキシル基及びエチレン性不飽和基を含有する化合物から成る層が接した状態で行われる。
The refractive index of the component (B) according to the present embodiment is measured by the following method.
First, (B) an organic solvent having a boiling point of 200 ° C. or less at 1 atm that dissolves a compound containing a carboxyl group and an ethylenically unsaturated group (for example, ethanol, acetone, methyl ethyl ketone, 1-methoxy-2-propanol, propylene) Glycol-1-monomethyl ether-2-acetate) is prepared. At this time, the solid content concentration is adjusted to 30 to 70% by mass. The obtained solution was coated on a commercially available polyethylene terephthalate (PET) film (thickness 16 μm) with a bar coater, dried in a hot air oven at 100 ° C. for 10 minutes, and (B) carboxyl group and ethylenically unsaturated group. A layered product having a thickness of 5 μm is obtained. Refractive index measurement is performed using a prism made by Metricon, Prism Coupler Model 2010 / M, laser beam wavelength: 532 nm, and in a state where a layer made of a compound containing (B) a carboxyl group and an ethylenically unsaturated group is in contact with the prism. Is called.
(B1)エポキシ(メタ)アクリレート酸変性物
 本実施の形態に係る(B1)エポキシ(メタ)アクリレート酸変性物とは、以下の2つの条件を満たす化合物と定義され、酸変性エポキシ(メタ)アクリレート化合物とも呼ばれる。
  i)分子内に2個以上のエポキシ基を含む化合物を出発物質として合成することができる。
  ii)分子内に1個以上のカルボキシル基と1個以上の(メタ)アクリロイル基を含む。
(B1) Epoxy (meth) acrylate acid-modified product (B1) Epoxy (meth) acrylate acid-modified product according to the present embodiment is defined as a compound that satisfies the following two conditions, and is an acid-modified epoxy (meth) acrylate Also called a compound.
i) A compound containing two or more epoxy groups in the molecule can be synthesized as a starting material.
ii) It contains one or more carboxyl groups and one or more (meth) acryloyl groups in the molecule.
<分子内に2個以上のエポキシ基を含む化合物>
 (B1)エポキシ(メタ)アクリレート酸変性物の屈折率を1.570以上に調整するために、分子内に2個以上のエポキシ基を含む化合物としては、骨格中に一般式(1)~(3)のいずれかを少なくとも含まれているエポキシ化合物などが入手性の観点で好ましく、市販品では、一般式(1)を含有するものとして、NC-3000シリーズ(日本化薬社製)、BPAE(新日鐵化学社製)、一般式(2)を含有するものとして、HP-4700、4770、5000、6000(DIC社製)、NC-7000、7300(日本化薬社製)ESN-175(新日鉄化学社製)、一般式(3)を含有するものとしては、OGSOL PG-100、OGSOL EG-200(大阪ガスケミカル)などのエポキシ化合物が挙げられる。
<Compound containing two or more epoxy groups in the molecule>
(B1) In order to adjust the refractive index of the modified epoxy (meth) acrylate acid to 1.570 or more, compounds containing two or more epoxy groups in the molecule include those represented by the general formulas (1) to ( Epoxy compounds containing at least any of 3) are preferred from the viewpoint of availability, and commercially available products that contain the general formula (1) include NC-3000 series (manufactured by Nippon Kayaku Co., Ltd.), BPAE (Manufactured by Nippon Steel Chemical Co., Ltd.), HP-4700, 4770, 5000, 6000 (manufactured by DIC), NC-7000, 7300 (manufactured by Nippon Kayaku Co., Ltd.) ESN-175 as containing general formula (2) Epoxy compounds such as OGSOL PG-100 and OGSOL EG-200 (Osaka Gas Chemical Co., Ltd.) may be mentioned as those containing General Formula (3) (manufactured by Nippon Steel Chemical Co., Ltd.).
 分子内に2個以上のエポキシ基を含む化合物を出発物質とした(B1)エポキシ(メタ)アクリレート酸変性物の合成方法を以下に2つ示すが、本実施の形態に係る(B1)エポキシ(メタ)アクリレート酸変性物の化学構造及び製法はこれに限定されない。 Two methods for synthesizing (B1) modified epoxy (meth) acrylate acid starting from a compound containing two or more epoxy groups in the molecule are shown below. (B1) Epoxy (B1) according to this embodiment ( The chemical structure and production method of the modified meth) acrylate are not limited thereto.
<合成法(1)>
 第1の反応として、分子内に2個以上のエポキシ基を含む化合物のエポキシ基に(メタ)アクリロイル基を有するモノカルボン酸のカルボキシル基を反応させる。(メタ)アクリロイル基を有するモノカルボン酸は、例えばアクリル酸、メタクリル酸である。この反応に関しては公知の反応条件が適用できる。反応によりエポキシ基が開裂し、水酸基が生成される。
<Synthesis method (1)>
As a first reaction, a carboxyl group of a monocarboxylic acid having a (meth) acryloyl group is reacted with an epoxy group of a compound containing two or more epoxy groups in the molecule. The monocarboxylic acid having a (meth) acryloyl group is, for example, acrylic acid or methacrylic acid. Known reaction conditions can be applied to this reaction. The epoxy group is cleaved by the reaction to generate a hydroxyl group.
 第2の反応としては、第1の反応で生成した化合物の水酸基とジカルボン酸無水物の反応である。ジカルボン酸無水物としては、飽和ジカルボン酸無水物および不飽和ジカルボン酸無水物のいずれをも使用することができる。このようなジカルボン無水物としては、例えば、無水コハク酸、無水マレイン酸、無水フタル酸、テトラヒドロ無水フタル酸、ヘキサヒドロ無水フタル酸、メチルテトラヒドロ無水フタル酸、メチルヘキサヒドロ無水フタル酸、エンドメチレンテトラヒドロ無水フタル酸、メチルブテニルテトラヒドロ無水フタル酸などを挙げることができる。これらの中で、無水コハク酸、無水フタル酸、テトラヒドロ無水フタル酸及びメチルテトラヒドロ無水フタル酸が特に好ましい。これらのジカルボン酸無水物は、1種を単独で使用することができ、2種以上を混合して使用することもできる。
 水酸基と無水物基との第2の反応に関しても、公知の反応条件が使用できる。反応により、無水物基が解裂し、エステル基とカルボキシル基が生成される。
The second reaction is a reaction between the hydroxyl group of the compound produced in the first reaction and a dicarboxylic acid anhydride. As the dicarboxylic acid anhydride, either a saturated dicarboxylic acid anhydride or an unsaturated dicarboxylic acid anhydride can be used. Such dicarboxylic anhydrides include, for example, succinic anhydride, maleic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, methyltetrahydrophthalic anhydride, methylhexahydrophthalic anhydride, endomethylenetetrahydroanhydride. Examples thereof include phthalic acid and methylbutenyl tetrahydrophthalic anhydride. Of these, succinic anhydride, phthalic anhydride, tetrahydrophthalic anhydride and methyltetrahydrophthalic anhydride are particularly preferred. These dicarboxylic acid anhydrides can be used individually by 1 type, and 2 or more types can also be mixed and used for them.
Known reaction conditions can also be used for the second reaction between the hydroxyl group and the anhydride group. By the reaction, the anhydride group is cleaved to produce an ester group and a carboxyl group.
 第1の反応で生成した水酸基100モル部に対し、第2の反応におけるジカルボン酸二無水物の酸無水物基は通常60~100モル部、好ましくは75モル部以上100モル部以下の割合になるように反応させる。
 また、第1及び第2の反応を経て合成されたエポキシ(メタ)アクリレート酸変性物は、さらに分子内に1個のエポキシ基と1個以上のラジカル重合性不飽和基を有する化合物と反応させてエチレン性不飽和基の含量を高めることも可能である(第3の反応)。分子内に1個のエポキシ基と1個以上のラジカル重合性不飽和基を有する化合物としては、例えばグリシジルアクリレート、グリシジルメタクリレート、アリルグリシジルエーテルなどが挙げられる。
The amount of the acid anhydride group of the dicarboxylic dianhydride in the second reaction is usually 60 to 100 parts by mole, preferably 75 parts by mole or more and 100 parts by mole or less with respect to 100 parts by mole of the hydroxyl group produced in the first reaction. React as follows.
Moreover, the epoxy (meth) acrylate modified product synthesized through the first and second reactions is further reacted with a compound having one epoxy group and one or more radically polymerizable unsaturated groups in the molecule. It is also possible to increase the content of ethylenically unsaturated groups (third reaction). Examples of the compound having one epoxy group and one or more radically polymerizable unsaturated groups in the molecule include glycidyl acrylate, glycidyl methacrylate, and allyl glycidyl ether.
<合成法(2)>
 第1の反応としては、前述の合成法(1)と同様に、分子内に2個以上のエポキシ基を含む化合物のエポキシ基に(メタ)アクリロイル基を有するモノカルボン酸のカルボキシル基を反応させる。(メタ)アクリロイル基を有するモノカルボン酸は、例えばアクリル酸、メタクリル酸である。この反応に関しては公知の反応条件が適用できる。反応によりエポキシ基が開裂し、水酸基が生成される。
<Synthesis method (2)>
As the first reaction, as in the above synthesis method (1), the carboxyl group of a monocarboxylic acid having a (meth) acryloyl group is reacted with the epoxy group of a compound containing two or more epoxy groups in the molecule. . The monocarboxylic acid having a (meth) acryloyl group is, for example, acrylic acid or methacrylic acid. Known reaction conditions can be applied to this reaction. The epoxy group is cleaved by the reaction to generate a hydroxyl group.
 第2の反応としては、第1の反応で生成した化合物の水酸基とテトラカルボン酸無水物の反応である。テトラカルボン酸無水物としては、ビフェニル-3,3’,4,4’-テトラカルボン酸二無水物、ベンゾフェノン-3,3’,4,4’-テトラカルボン酸二無水物、オキシジフタル酸二無水物、ジフェニルスルホン-3,3’,4,4’-テトラカルボン酸二無水物、エチレングリコールビス(トリメリット酸モノエステル酸無水物)、p-フェニレンビス(トリメリット酸モノエステル酸無水物)、p-ビフェニレンビス(トリメリット酸モノエステル酸無水物)、m-フェニレンビス(トメリット酸モノエステル酸無水物)、o-フェニレンビス(トリメリット酸モノエステル酸無水物)、ペンタンジオールビス(トリメリット酸モノエステル酸無水物)、デカンジオールビス(トリメリット酸モノエステル酸無水物)、無水ピロメリット酸、ビス(3,4-ジカルボキシフェニル)エーテル二無水物、4,4’-(2,2-ヘキサフルオロイソプロピリデン)ジフタル酸二無水物、メタ-ターフェニル-3,3’,4,4’-テトラカルボン酸二無水物、1,2,4,5-シクロヘキサンテトラカルボン酸二無水物、ビシクロ[2,2,2]オクト-7-エン-2,3,5,6-テトラカルボン酸二無水物、シクロブタン-1,2,3,4-テトラカルボン酸二無水物、1-カルボキシメチル-2,3,5-シクロペンタトリカルボン酸-2,6:3,5-二無水物、4-(2,5-ジオキソテトラヒドロフラン-3-イル)-1,2,3,4-テトラヒドロナフタレン-1,2-ジカルボン酸無水物、及び、5-(2,5-ジオキソテトラヒドロフリル)-3-メチル-3-シクロヘキセン-1,2-ジカルボン酸無水物、などが挙げられる。これらのテトラカルボン酸二無水物は単独で用いてもよく、2種以上を混合して用いてもよい。 The second reaction is a reaction between the hydroxyl group of the compound produced in the first reaction and a tetracarboxylic anhydride. Examples of tetracarboxylic acid anhydrides include biphenyl-3,3 ′, 4,4′-tetracarboxylic dianhydride, benzophenone-3,3 ′, 4,4′-tetracarboxylic dianhydride, oxydiphthalic acid dianhydride , Diphenylsulfone-3,3 ′, 4,4′-tetracarboxylic dianhydride, ethylene glycol bis (trimellitic acid monoester anhydride), p-phenylenebis (trimellitic acid monoester acid anhydride) , P-biphenylenebis (trimellitic acid monoester acid anhydride), m-phenylenebis (tomellitic acid monoester acid anhydride), o-phenylenebis (trimellitic acid monoester acid anhydride), pentanediol bis ( Trimellitic acid monoester anhydride), decanediol bis (trimellitic acid monoester anhydride), pyrome anhydride Oxalic acid, bis (3,4-dicarboxyphenyl) ether dianhydride, 4,4 ′-(2,2-hexafluoroisopropylidene) diphthalic dianhydride, meta-terphenyl-3,3 ′, 4,4′-tetracarboxylic dianhydride, 1,2,4,5-cyclohexanetetracarboxylic dianhydride, bicyclo [2,2,2] oct-7-ene-2,3,5,6- Tetracarboxylic dianhydride, cyclobutane-1,2,3,4-tetracarboxylic dianhydride, 1-carboxymethyl-2,3,5-cyclopentatricarboxylic acid-2,6: 3,5-dianhydride , 4- (2,5-dioxotetrahydrofuran-3-yl) -1,2,3,4-tetrahydronaphthalene-1,2-dicarboxylic anhydride, and 5- (2,5-dioxotetrahydro Furyl) -3-methyl 3-cyclohexene-1,2-dicarboxylic anhydride, and the like. These tetracarboxylic dianhydrides may be used alone or in combination of two or more.
 第3の反応としては、第2の反応で生成した化合物の残存水酸基とジカルボン酸無水物の反応である。ジカルボン酸無水物としては、飽和ジカルボン酸無水物および不飽和ジカルボン酸無水物のいずれをも使用することができる。このようなジカルボン無水物としては、例えば、無水コハク酸、無水マレイン酸、無水フタル酸、テトラヒドロ無水フタル酸、ヘキサヒドロ無水フタル酸、メチルテトラヒドロ無水フタル酸、メチルヘキサヒドロ無水フタル酸、エンドメチレンテトラヒドロ無水フタル酸、メチルブテニルテトラヒドロ無水フタル酸などを挙げることができる。これらの中で、無水コハク酸、無水フタル酸、テトラヒドロ無水フタル酸及びメチルテトラヒドロ無水フタル酸が特に好ましい。これらのジカルボン酸無水物は、1種を単独で使用することができ、2種以上を混合して使用することもできる。
 水酸基とジカルボン酸無水物基との第3の反応は、公知の反応条件が使用できる。反応により、無水物基が解裂し、エステル基とカルボキシル基が生成され、エポキシ(メタ)アクリレート酸変性物を得ることができる。
The third reaction is a reaction between the residual hydroxyl group of the compound produced in the second reaction and a dicarboxylic acid anhydride. As the dicarboxylic acid anhydride, either a saturated dicarboxylic acid anhydride or an unsaturated dicarboxylic acid anhydride can be used. Such dicarboxylic anhydrides include, for example, succinic anhydride, maleic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, methyltetrahydrophthalic anhydride, methylhexahydrophthalic anhydride, endomethylenetetrahydroanhydride. Examples thereof include phthalic acid and methylbutenyl tetrahydrophthalic anhydride. Of these, succinic anhydride, phthalic anhydride, tetrahydrophthalic anhydride and methyltetrahydrophthalic anhydride are particularly preferred. These dicarboxylic acid anhydrides can be used individually by 1 type, and 2 or more types can also be mixed and used for them.
Known reaction conditions can be used for the third reaction between the hydroxyl group and the dicarboxylic anhydride group. By the reaction, the anhydride group is cleaved to produce an ester group and a carboxyl group, and an epoxy (meth) acrylate acid modified product can be obtained.
 第1の反応で生成した水酸基100モル部に対し、第2の反応におけるテトラカルボン酸二無水物と第3の反応におけるジカルボン酸無水物における酸無水物基の合計量が、通常60~100モル部、好ましくは75モル部以上100モル部以下の割合になるように反応させる。なお、前記の第2の反応及び第3の反応は同時に実施することもできる。具体的な合成方法としては特開平06-001938号公報に記載の方法を用いることができる。 The total amount of acid anhydride groups in the tetracarboxylic dianhydride in the second reaction and the dicarboxylic anhydride in the third reaction is usually 60 to 100 moles per 100 moles of the hydroxyl group produced in the first reaction. Part, preferably 75 parts by mole or more and 100 parts by mole or less. The second reaction and the third reaction can also be performed simultaneously. As a specific synthesis method, the method described in JP-A-06-001938 can be used.
 また、第1~第3の反応を経て合成されたエポキシ(メタ)アクリレート酸変性物は、さらに分子内に1個のエポキシ基と1個以上のラジカル重合性不飽和基を有する化合物と反応させてエチレン性不飽和基の含量を高めることも可能である(第4の反応)。分子内に1個のエポキシ基と1個以上のラジカル重合性不飽和基を有する化合物としては、例えばグリシジルアクリレート、グリシジルメタクリレート、アリルグリシジルエーテルなどが挙げられる。 In addition, the modified epoxy (meth) acrylate acid synthesized through the first to third reactions is further reacted with a compound having one epoxy group and one or more radically polymerizable unsaturated groups in the molecule. It is also possible to increase the content of ethylenically unsaturated groups (fourth reaction). Examples of the compound having one epoxy group and one or more radically polymerizable unsaturated groups in the molecule include glycidyl acrylate, glycidyl methacrylate, and allyl glycidyl ether.
 本実施の形態に係るエポキシ(メタ)アクリレート酸変性物は合成法(1)、合成法(2)などにより得ることができるが、市販品を用いることもできる。一般式(1)を含有するエポキシ(メタ)アクリレート酸変性物の市販品としては、ZCR-1569H、ZCR-1601H、ZCR-1797H、ZCR-1798H(日本化薬社製)などが挙げられ、一般式(3)を含有するエポキシ(メタ)アクリレート酸変性物の市販品としては、FCA-954、FCA-293、FCA-506(ナガセケムテックス社製)又はTR-B201、TR-B202(常州強力電子材料社製)などが挙げられる。 The epoxy (meth) acrylate modified product according to this embodiment can be obtained by the synthesis method (1), the synthesis method (2), or the like, but a commercially available product can also be used. Commercially available epoxy (meth) acrylate modified products containing the general formula (1) include ZCR-1569H, ZCR-1601H, ZCR-1797H, ZCR-1798H (manufactured by Nippon Kayaku Co., Ltd.), etc. Commercially available epoxy (meth) acrylate modified products containing formula (3) include FCA-954, FCA-293, FCA-506 (manufactured by Nagase ChemteX) or TR-B201, TR-B202 (Strong Changzhou) Electronic material company) etc. are mentioned.
 本実施の形態に係る(A)アルカリ可溶性樹脂と(B)カルボキシル基及びエチレン性不飽和基を含有する化合物の質量比A/B((A)アルカリ可溶性樹脂の質量÷(B)カルボキシル基及びエチレン性不飽和基を含有する化合物の質量)は、0.18~6.0である。A/Bが0.18以上であることで、転写フィルムのタック性が良好になり、導体基材との密着性が向上する。A/Bが6.0以下であることで、低温ラミネート性と硬化膜の透湿度が低減する。驚くべきことに低温現像性に関しては、A/Bが0.18未満である場合及び6.0を超える場合はいずれも悪化する。各種の性能のバランスの観点では、A/Bのより好ましい範囲は0.40~1.0である。 Mass ratio A / B of (A) alkali-soluble resin and compound containing (B) carboxyl group and ethylenically unsaturated group according to the present embodiment ((A) mass of alkali-soluble resin / (B) carboxyl group and The mass of the compound containing an ethylenically unsaturated group is 0.18 to 6.0. When A / B is 0.18 or more, the tackiness of the transfer film is improved, and the adhesion to the conductor base material is improved. When A / B is 6.0 or less, the low temperature laminating property and the moisture permeability of the cured film are reduced. Surprisingly, the low temperature developability deteriorates when A / B is less than 0.18 and more than 6.0. From the viewpoint of balance of various performances, a more preferable range of A / B is 0.40 to 1.0.
<(C)光重合性化合物>
 本実施の形態に係る光重合性化合物は、エチレン性不飽和二重結合を有する化合物、例えば、その構造中にエチレン性不飽和基を有することによって重合性を有する化合物である。エチレン性不飽和二重結合を有する化合物は、(c1)分子中に重合性基を3つ以上有する化合物を含むことが好ましく、かつ/又は(c2)分子中に重合性基を1つ有する化合物を含むことがより好ましい。また、エチレン性不飽和二重結合を有する化合物は、上記以外の化合物を組み合わせて使用することが出来る。
<(C) Photopolymerizable compound>
The photopolymerizable compound according to the present embodiment is a compound having an ethylenically unsaturated double bond, for example, a compound having polymerizability by having an ethylenically unsaturated group in the structure thereof. The compound having an ethylenically unsaturated double bond preferably includes (c1) a compound having three or more polymerizable groups in the molecule and / or (c2) a compound having one polymerizable group in the molecule. It is more preferable to contain. Moreover, the compound which has an ethylenically unsaturated double bond can be used in combination with compounds other than the above.
 (C)成分が(c1)分子中に重合性基を3つ以上有する化合物を含むことで、保護膜の架橋密度が上がり、水分等が透過し難くなり、硬化膜の透湿性を低減することができる。(c1)分子中に重合性基を3つ以上有する化合物としては、中心骨格として分子内にアルキレンオキシド基を付加させることができる基を3モル以上有し、この基にエチレンオキシド基、プロピレンオキシド基又はブチレンオキシド基等のアルキレンオキシド基を付加させて得られたアルコールを(メタ)アクリレートに変換することで得られる。また、中心骨格をアルキレンオキシド基で変性せず、中心骨格に直接(メタ)アクリル酸を反応させてもよい。中心骨格になることができる化合物としては、例えば、グリセリン、トリメチロールプロパン、ペンタエリスリトール、ジグリセリン、ジトリメチロールプロパン、ジペンタエリスリトール、イソシアヌレート環等が挙げられる。硬化膜の透湿度低減の観点から、ジペンタエリスリトールヘキサ(メタ)アクリレート、ペンタエリスリトールテトラ(メタ)アクリレート、トリメチロールプロパントリ(メタ)アクリレート、又はジトリメチロールプロパントリ(メタ)アクリレートを含むことがより好ましい。また、感光性樹脂組成物は、(c1)分子中に重合性基を3つ以上有する化合物として、分子量が430以下である化合物を含むことがさらに好ましい。(c1)成分の分子量が430以下であることで、感光性樹脂組成物層の低温現像性が向上する。分子量が430以下である化合物としては、中心骨格として例えば、グリセリン、トリメチロールプロパン、ペンタエリスリトール等を備える化合物が挙げられる。感光性樹脂組成物層の低温現像性と硬化膜の透湿度低減の両立という観点から、(C)成分は、ペンタエリスリトールテトラ(メタ)アクリレート、又はトリメチロールプロパントリ(メタ)アクリレートを含むことが好ましい。 (C) Component (c1) contains a compound having three or more polymerizable groups in the molecule, thereby increasing the crosslink density of the protective film, making it difficult for moisture to permeate, and reducing the moisture permeability of the cured film. Can do. (C1) The compound having three or more polymerizable groups in the molecule has at least 3 moles of a group capable of adding an alkylene oxide group in the molecule as a central skeleton, and this group has an ethylene oxide group and a propylene oxide group. Alternatively, it can be obtained by converting an alcohol obtained by adding an alkylene oxide group such as a butylene oxide group into (meth) acrylate. Alternatively, (meth) acrylic acid may be reacted directly with the central skeleton without modifying the central skeleton with an alkylene oxide group. Examples of the compound that can be a central skeleton include glycerin, trimethylolpropane, pentaerythritol, diglycerin, ditrimethylolpropane, dipentaerythritol, and isocyanurate rings. From the viewpoint of reducing the moisture permeability of the cured film, it may contain dipentaerythritol hexa (meth) acrylate, pentaerythritol tetra (meth) acrylate, trimethylolpropane tri (meth) acrylate, or ditrimethylolpropane tri (meth) acrylate. preferable. The photosensitive resin composition further preferably includes (c1) a compound having a molecular weight of 430 or less as the compound having three or more polymerizable groups in the molecule. When the molecular weight of the component (c1) is 430 or less, the low temperature developability of the photosensitive resin composition layer is improved. Examples of the compound having a molecular weight of 430 or less include compounds having glycerin, trimethylolpropane, pentaerythritol and the like as a central skeleton. From the viewpoint of achieving both low-temperature developability of the photosensitive resin composition layer and reduced moisture permeability of the cured film, the component (C) may contain pentaerythritol tetra (meth) acrylate or trimethylolpropane tri (meth) acrylate. preferable.
 (c1)化合物なしで、又は(c1)化合物に加えて、(c2)分子中に重合性基を1つ有する化合物を含むことで、(C)エチレン性不飽和二重結合を有する化合物全体の反応率の向上が見られ、硬化膜の透湿性の低減が期待できる。また、感光性樹脂組成物層の低温現像性の向上も見られる場合がある。(c2)分子中に重合性基を1つ有する化合物としては、ポリアルキレンオキシドの片末端に(メタ)アクリル酸を付加した化合物、片末端に(メタ)アクリル酸を付加し、かつ他方の末端をアルキルエーテル又はアリルエーテル化した化合物、等が挙げられる。例えば、m-フェノキシベンジルアクリレート、o-フェニルフェノキシエチルアクリレート、4-メタクリロイルオキシベンゾフェノン、EO変性パラクミルフェノールアクリレート、ノニルフェノキシエチルアクリレート、4-ノニルフェニルヘプタエチレングリコールジプロピレングリコールアクリレート、2-ヒドロキシ-3-フェノキシプロピルアクリレート、フェノキシヘキサエチレングリコールアクリレート、4-ノルマルオクチルフェノキシペンタプロピレングリコールアクリレート、1,6-ヘキサンジオール(メタ)アクリレートが挙げられる。導体の防錆性、及び硬化膜の透湿性の観点から、m-フェノキシベンジルアクリレート、o-フェニルフェノキシエチルアクリレート、4-メタクリロイルオキシベンゾフェノン、EO変性パラクミルフェノールアクリレート、ノニルフェノキシエチルアクリレートを含むことがより好ましい。 (C1) Without compound or in addition to (c1) compound, (c2) By including a compound having one polymerizable group in the molecule, (C) the entire compound having an ethylenically unsaturated double bond The reaction rate is improved, and the moisture permeability of the cured film can be expected to be reduced. Moreover, the improvement of the low temperature developability of the photosensitive resin composition layer may be seen. (C2) As a compound having one polymerizable group in the molecule, a compound obtained by adding (meth) acrylic acid to one end of polyalkylene oxide, (meth) acrylic acid added to one end, and the other end And the like, and the like. For example, m-phenoxybenzyl acrylate, o-phenylphenoxyethyl acrylate, 4-methacryloyloxybenzophenone, EO-modified paracumylphenol acrylate, nonylphenoxyethyl acrylate, 4-nonylphenylheptaethylene glycol dipropylene glycol acrylate, 2-hydroxy-3 -Phenoxypropyl acrylate, phenoxyhexaethylene glycol acrylate, 4-normal octylphenoxypentapropylene glycol acrylate, 1,6-hexanediol (meth) acrylate. M-phenoxybenzyl acrylate, o-phenylphenoxyethyl acrylate, 4-methacryloyloxybenzophenone, EO-modified paracumylphenol acrylate, nonylphenoxyethyl acrylate, from the viewpoint of rust prevention of the conductor and moisture permeability of the cured film More preferred.
 また、その他の(C)エチレン性不飽和二重結合を有する化合物(c3)としては、例えば、ポリアルキレンオキシド鎖の両末端に(メタ)アクリロイル基を有する化合物、又はポリエチレンオキシド鎖とポリプロピレンオキシド鎖とがランダム若しくはブロックで結合したアルキレンオキシド鎖の両末端に(メタ)アクリロイル基を有する化合物、ビスフェノールAをアルキレンオキシド変性し、かつ両末端に(メタ)アクリロイル基を有している化合物等も挙げられる。 Further, as other compound (c3) having an ethylenically unsaturated double bond (C), for example, a compound having a (meth) acryloyl group at both ends of a polyalkylene oxide chain, or a polyethylene oxide chain and a polypropylene oxide chain And a compound having a (meth) acryloyl group at both ends of an alkylene oxide chain bonded to each other in a random or block manner, a compound having bisphenol A modified with an alkylene oxide and having a (meth) acryloyl group at both ends It is done.
 その他にも、(C)エチレン性不飽和二重結合を有する化合物(c3)としては、ジイソシアネート化合物と、一分子中にヒドロキシル基及び(メタ)アクリル基を有する化合物との反応生成物であるウレタン化合物等が挙げられる。
 (C)エチレン性不飽和二重結合を有する化合物の市販品としては、ペンタエリスリトールテトラアクリレートとしてA-TMMT(新中村化学工業(株)製)、m-フェノキシベンジルアクリレートとしてPOB-A(共栄社化学(株)製)、2-(o-フェニルフェノキシ)エチルアクリレートとしてHRD-01(日蝕ファインケミカル(株)製)、ポリブチレングリコールジメタクリレートとしてFA-PTG-9M、FA-PTG-28M(日立化成(株)製)等が挙げられる。
In addition, (C) The compound (c3) having an ethylenically unsaturated double bond is a urethane which is a reaction product of a diisocyanate compound and a compound having a hydroxyl group and a (meth) acryl group in one molecule. Compounds and the like.
(C) Commercially available compounds having an ethylenically unsaturated double bond include A-TMMT (made by Shin-Nakamura Chemical Co., Ltd.) as pentaerythritol tetraacrylate, and POB-A (Kyoeisha Chemical Co., Ltd.) as m-phenoxybenzyl acrylate. ), 2- (o-phenylphenoxy) ethyl acrylate as HRD-01 (manufactured by Solar Eclipse Fine Chemical Co., Ltd.), and polybutylene glycol dimethacrylate as FA-PTG-9M and FA-PTG-28M (Hitachi Chemical Co., Ltd.) Etc.).
 (C)エチレン性不飽和二重結合を有する化合物の感光樹脂組成物中の含有量は、解像性、硬化膜の導体密着性及び透湿度低減の観点から、感光性樹脂組成物の質量を基準として、20質量%~60質量%であることが好ましく、30質量%~50質量%であることがより好ましい。 (C) The content of the compound having an ethylenically unsaturated double bond in the photosensitive resin composition is the mass of the photosensitive resin composition from the viewpoints of resolution, conductor adhesion of the cured film, and moisture permeability reduction. The reference is preferably 20% by mass to 60% by mass, and more preferably 30% by mass to 50% by mass.
<(D)光重合開始剤>
 本実施の形態に係る(D)光重合開始剤は、活性光線によりラジカルを発生し、エチレン性不飽和基含有化合物などを重合することができる化合物である。本実施の形態に係る光重合開始剤は、活性光線によりラジカルを発生し、エチレン性不飽和基含有化合物等を重合することができる化合物である。(D)光重合開始剤としては、例えば、ベンゾフェノン、N,N,N’,N’-テトラメチル-4,4’-ジアミノベンゾフェノン(ミヒラーケトン)、N,N,N’,N’-テトラエチル-4,4’-ジアミノベンゾフェノン、4-メトキシ-4’-ジメチルアミノベンゾフェノン、2-ベンジル-2-ジメチルアミノ-1-(4-モルホリノフェニル)-ブタノン-1、2-メチル-1-[4-(メチルチオ)フェニル]-2-モルホリノ-プロパノン-1、アクリル化ベンゾフェノン、4-ベンゾイル-4’-メチルジフェニルサルファイド等の芳香族ケトン;ベンゾインメチルエーテル、ベンゾインエチルエーテル、ベンゾインフェニルエーテル等のベンゾインエーテル化合物;ベンゾイン、メチルベンゾイン、エチルベンゾイン等のベンゾイン化合物;1,2-オクタンジオン,1-[4-(フェニルチオ)-,2-(O-ベンゾイルオキシム)]、エタノン,1-[9-エチル-6-(2-メチルベンゾイル)-9H-カルバゾール-3-イル]-,1-(O-アセチルオキシム)、1-[4-(フェニルチオ)フェニル]-3-シクロペンチルプロパン-1,2-ジオン-2-(o-ベンゾイルオキシム)、1,2-プロパンジオン,3-シクロヘキシル-1-[9-エチル-6-(2-フラニルカルボニル)-9H-カルバゾール-3-イル]-,2-(O-アセチルオキシム)等のオキシムエステル化合物;ベンジルジメチルケタール等のベンジル誘導体;9-フェニルアクリジン、1,7-ビス(9,9’-アクリジニル)ヘプタン等のアクリジン誘導体;N-フェニルグリシン等のN-フェニルグリシン誘導体;クマリン化合物;オキサゾール化合物;2,4,6-トリメチルベンゾイル-ジフェニル-ホスフィンオキサイド等のホスフィンオキサイド化合物が挙げられる。光重合開始剤は、単独で、又は2種以上混合して用いることもできる。
<(D) Photopolymerization initiator>
The photopolymerization initiator (D) according to the present embodiment is a compound capable of generating radicals with active light and polymerizing an ethylenically unsaturated group-containing compound. The photopolymerization initiator according to the present embodiment is a compound capable of generating radicals with active light and polymerizing an ethylenically unsaturated group-containing compound or the like. (D) As the photopolymerization initiator, for example, benzophenone, N, N, N ′, N′-tetramethyl-4,4′-diaminobenzophenone (Michler ketone), N, N, N ′, N′-tetraethyl- 4,4′-diaminobenzophenone, 4-methoxy-4′-dimethylaminobenzophenone, 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butanone-1,2-methyl-1- [4- Aromatic ketones such as (methylthio) phenyl] -2-morpholino-propanone-1, acrylated benzophenone, 4-benzoyl-4′-methyldiphenyl sulfide; benzoin ether compounds such as benzoin methyl ether, benzoin ethyl ether and benzoin phenyl ether Benzoins such as benzoin, methylbenzoin and ethylbenzoin Compound: 1,2-octanedione, 1- [4- (phenylthio)-, 2- (O-benzoyloxime)], ethanone, 1- [9-ethyl-6- (2-methylbenzoyl) -9H-carbazole -3-yl]-, 1- (O-acetyloxime), 1- [4- (phenylthio) phenyl] -3-cyclopentylpropane-1,2-dione-2- (o-benzoyloxime), 1,2 Oxime ester compounds such as propanedione, 3-cyclohexyl-1- [9-ethyl-6- (2-furanylcarbonyl) -9H-carbazol-3-yl]-, 2- (O-acetyloxime); Benzyl derivatives such as dimethyl ketal; acridine derivatives such as 9-phenylacridine and 1,7-bis (9,9′-acridinyl) heptane; N- phenylglycine derivatives such as Shin; coumarin compounds; oxazole compounds; 2,4,6 - diphenyl - phosphine oxide compounds such as phosphine oxide. A photoinitiator can also be used individually or in mixture of 2 or more types.
 これらの中でも、導体の防錆性向上、硬化膜の透湿性低減、及び耐薬品性向上の観点から、オキシムエステル化合物が好ましく、これらの中でも365nmのモル吸光係数が高い化合物がより好ましい。波長365nmにて高い吸光係数を有するオキシム開始剤を用いることで、i線露光によって高感度な保護膜を得ることが出来る。その中でも、防錆性の観点から、オキシムエステル化合物が好ましく、これらの中でも365nmのモル吸光係数が高い化合物がより好ましい。波長365nmに高い吸光係数を有するオキシム開始剤を用いることで、i線露光によって高感度な保護膜を得ることが出来る。これにより、高い表面硬化性が得られ、前述したような現像工程でのナトリウムイオンの侵入を抑制でき、その結果として導体の高い防錆性が得られると推察される。 Among these, oxime ester compounds are preferable from the viewpoints of improving the rust prevention property of the conductor, reducing the moisture permeability of the cured film, and improving the chemical resistance, and among these, compounds having a high molar extinction coefficient of 365 nm are more preferable. By using an oxime initiator having a high absorption coefficient at a wavelength of 365 nm, a highly sensitive protective film can be obtained by i-line exposure. Among these, from the viewpoint of rust prevention, an oxime ester compound is preferable, and among these, a compound having a high molar extinction coefficient of 365 nm is more preferable. By using an oxime initiator having a high extinction coefficient at a wavelength of 365 nm, a highly sensitive protective film can be obtained by i-line exposure. Thereby, high surface curability is obtained, it is speculated that the penetration of sodium ions in the development process as described above can be suppressed, and as a result, high rust prevention property of the conductor can be obtained.
 具体的なオキシムエステル化合物としては、1,2-オクタンジオン,1-[(4-フェニルチオ)フェニル-,2-(O-ベンゾイルオキシム)](BASFジャパン(株)製、Irgacure Oxe01、製品名)、エタノン,1-[9-エチル-6-(2-メチルベンゾイル)-9H-カルバゾール-3-イル]-,1-(O-アセチルオキシム)(BASFジャパン(株)製、Irgacure Oxe02)、1-[4-(フェニルチオ)フェニル]-3-シクロペンチルプロパン-1,2-ジオン-2-(O-ベンゾイルオキシム)(常州強力電子新材料社製TR-PBG-305、製品名)、及び1,2-プロパンジオン,3-シクロヘキシル-1-[9-エチル-6-(2-フラニルカルボニル)-9H-カルバゾール-3-イル]-,2-(O-アセチルオキシム)(常州強力電子新材料社製TR-PBG-326、製品名)、(7-ニトロ-9,9-ジプロピル-9H-フルオレン-2-イル)(オルトトリル)メタノン O-アセチルオキシム(ダイトーケミックス(株)製DFI-020)、1,8-オクタンジオン,1,8-ビス[9-(2-エチルヘキシル)-6-ニトロ-9H-カルバゾール-3-イル]-,1,8-ビス(O-アセチルオキシム)、3-シクロヘキシル-1-(6-(2-(ベンゾイルオキシイミノ)オクタノイル)-9-エチル-9H-カルバゾール-3-イル)-プロパン-1,2-ジオン-2-(O-ベンゾイルオキシム)(常州強力電子新材料社製TR-PBG-371、製品名)、3-シクロヘキシル-1-(6-(2-(ベンゾイルオキシイミノ)ヘキサノイル)-9-エチル-9H-カルバゾール-3-イル)-プロパン-1,2-ジオン-2-(O-ベンゾイルオキシム)(常州強力電子新材料社製TR-PBG-391、製品名)等を挙げることができる。 As specific oxime ester compounds, 1,2-octanedione, 1-[(4-phenylthio) phenyl-, 2- (O-benzoyloxime)] (manufactured by BASF Japan Ltd., Irgacure Oxe01, product name) Ethanone, 1- [9-ethyl-6- (2-methylbenzoyl) -9H-carbazol-3-yl]-, 1- (O-acetyloxime) (manufactured by BASF Japan Ltd., Irgacure Oxe02), 1 -[4- (phenylthio) phenyl] -3-cyclopentylpropane-1,2-dione-2- (O-benzoyloxime) (TR-PBG-305, product name) from Changzhou Power Electronics New Materials Co., Ltd., and 1, 2-propanedione, 3-cyclohexyl-1- [9-ethyl-6- (2-furanylcarbonyl) -9H-carbazol -3-yl]-, 2- (O-acetyloxime) (TR-PBG-326, product name, Changzhou Power Electronics New Materials Co., Ltd.), (7-nitro-9,9-dipropyl-9H-fluorene-2- Yl) (ortho-tolyl) methanone O-acetyloxime (DFI-020 manufactured by Daitokemix Co., Ltd.), 1,8-octanedione, 1,8-bis [9- (2-ethylhexyl) -6-nitro-9H-carbazole- 3-yl]-, 1,8-bis (O-acetyloxime), 3-cyclohexyl-1- (6- (2- (benzoyloxyimino) octanoyl) -9-ethyl-9H-carbazol-3-yl) -Propane-1,2-dione-2- (O-benzoyloxime) (TR-PBG-371, product name of Changzhou Power Electronics New Materials Co., Ltd.), 3-cyclohexyl-1- ( -(2- (Benzoyloxyimino) hexanoyl) -9-ethyl-9H-carbazol-3-yl) -propane-1,2-dione-2- (O-benzoyloxime) (TR made by Changzhou Power Electronics New Materials Co., Ltd.) -PBG-391, product name).
 (D)光重合開始剤の、感光性樹脂組成物中の含有量は、感光性樹脂組成物の質量を基準として、0.1質量%~10質量%であり、感度と解像性の観点から、0.3質量%~5質量%であることがより好ましい。光重合開始剤の含有量が0.1質量%~10質量%の範囲内であれば、光感度が充分となるとともに、活性光線を照射する際に組成物の表面での吸収が増大して内部の光硬化が不充分となること、可視光透過率が低下すること等の不具合を抑制することができる。 (D) The content of the photopolymerization initiator in the photosensitive resin composition is 0.1% by mass to 10% by mass based on the mass of the photosensitive resin composition, and is a viewpoint of sensitivity and resolution. Therefore, the content is more preferably 0.3% by mass to 5% by mass. If the content of the photopolymerization initiator is in the range of 0.1% by mass to 10% by mass, the photosensitivity will be sufficient, and the absorption on the surface of the composition will increase when irradiated with actinic rays. Problems such as insufficient internal photocuring and a decrease in visible light transmittance can be suppressed.
<(E)熱架橋剤>
 感光性樹脂組成物には、より高い防錆性能を発現させるという観点から、(E)熱架橋剤を更に配合することが好ましい。(E)熱架橋剤とは、熱により(A)アルカリ可溶性樹脂、(B)カルボキシル基及びエチレン性不飽和基を含有する化合物又は未反応の(B)エチレン性不飽和二重結合を有する化合物、並びに同時に添加する(E)熱架橋剤と付加反応、又は縮合重合反応を起こす化合物を意味する。付加反応又は縮合重合反応を起こす温度としては、100℃~150℃が好ましい。付加反応又は縮合反応は、現像によりパターン形成をした後の加熱処理の際に生じる。
<(E) Thermal crosslinking agent>
It is preferable to further blend (E) a thermal crosslinking agent in the photosensitive resin composition from the viewpoint of developing higher rust prevention performance. (E) Thermal crosslinking agent is a compound containing (A) an alkali-soluble resin, (B) a carboxyl group and an ethylenically unsaturated group or an unreacted (B) ethylenically unsaturated double bond by heat. As well as (E) a thermal cross-linking agent added at the same time, it means a compound causing an addition reaction or a condensation polymerization reaction. The temperature at which the addition reaction or condensation polymerization reaction occurs is preferably 100 ° C to 150 ° C. The addition reaction or condensation reaction occurs during heat treatment after pattern formation by development.
 具体的な熱架橋剤としては、ブロックイソシアネート化合物、ジオール化合物、エポキシ化合物、及び国際公開第2016/047691号の段落[0054]以降に記載の熱架橋剤が挙げられるが、これらに限定されない。 Specific examples of the thermal crosslinking agent include, but are not limited to, a blocked isocyanate compound, a diol compound, an epoxy compound, and a thermal crosslinking agent described in paragraph [0054] of International Publication No. 2016/047691.
 ブロックイソシアネート化合物とは、分子内に2個以上のイソシアネ-ト基を有するイソシアネ-ト化合物にブロック剤を反応させることにより得られる化合物である。 The blocked isocyanate compound is a compound obtained by reacting a blocking agent with an isocyanate compound having two or more isocyanate groups in the molecule.
 イソシアネ-ト化合物としては、例えば、1,6-ヘキサンジイソシアネ-ト、4,4’-ジフェニルメタンジイソシアネ-ト、2,4-トリレンジイソシアネ-ト、2,6-トリレンジイソシアネ-ト、キシリレンジイソシアネ-ト、4,4’-ジシクロヘキシルメタンジイソシアネート、4,4’-水酸化ジイソシアネ-ト、イソホロンジイソシアネ-ト、1,5-ナフタレンジイソシアネ-ト、4,4-ジフェニルジイソシアネ-ト、1,3―ビス(イソシアネートメチル)シクロヘキサン、1,4-フェニレンジイソシアネ-ト、2,6-フェニレンジイソシアネ-ト、1,3,6-ヘキサメチレントリイソシアネ-ト、及び、ヘキサメチレンジイソシアネートが挙げられる。 Examples of the isocyanate compound include 1,6-hexane diisocyanate, 4,4′-diphenylmethane diisocyanate, 2,4-tolylene diisocyanate, and 2,6-tolylene diisocyanate. Nate, xylylene diisocyanate, 4,4'-dicyclohexylmethane diisocyanate, 4,4'-hydroxy diisocyanate, isophorone diisocyanate, 1,5-naphthalene diisocyanate, 4 , 4-diphenyl diisocyanate, 1,3-bis (isocyanate methyl) cyclohexane, 1,4-phenylene diisocyanate, 2,6-phenylene diisocyanate, 1,3,6-hexa Examples include methylene triisocyanate and hexamethylene diisocyanate.
 ブロック剤としては、例えば、アルコ-ル類、フェノ-ル類、ε-カプロラクタム、オキシム類、活性メチレン類、メルカプタン類、アミン類、イミド類、酸アミド類、イミダゾ-ル類、尿素類、カルバミン酸塩類、イミン類、及び亜硫酸塩類が挙げられる。 Examples of the blocking agent include alcohols, phenols, ε-caprolactam, oximes, active methylenes, mercaptans, amines, imides, acid amides, imidazoles, ureas, and carbamine. Examples include acid salts, imines, and sulfites.
 ブロックイソシアネート化合物の具体例としては、ヘキサメチレンジイソシアネート系ブロックイソシアネート(例えば、旭化成(株)製デュラネートSBN-70D、SBB-70P、SBF-70E、TPA-B80E、17B-60P、MF-B60B、E402-B80B、MF-K60B、及びWM44-L70G、三井化学(株)製タケネートB-882N、Baxenden社製7960、7961、7982、7991、及び7992など)、トリレンジイソシアネート系ブロックイソシアネート(例えば、三井化学(株)製タケネートB-830など)、4,4’-ジフェニルメタンジイソシアネ-ト系ブロックイソシアネート(例えば、三井化学(株)製タケネートB-815N、大榮産業(株)製ブロネートPMD-OA01、及びPMD-MA01など)、1,3―ビス(イソシアネートメチル)シクロヘキサン系ブロックイソシアネート(例えば、三井化学(株)製タケネートB-846N、東ソー(株)製コロネートBI-301、2507、及び2554など)、イソホロンジイソシアネート系ブロックイソシアネート(例えば、Baxenden社製7950、7951、及び7990など)が挙げられる。これらのブロックイソシアネート化合物は、単独で用いてもよく、2種類以上を組み合わせて用いてもよい。 Specific examples of the blocked isocyanate compound include hexamethylene diisocyanate block isocyanate (for example, Duranate SBN-70D, SBB-70P, SBF-70E, TPA-B80E, 17B-60P, MF-B60B, E402- manufactured by Asahi Kasei Corporation). B80B, MF-K60B, and WM44-L70G, Takenate B-882N manufactured by Mitsui Chemicals, Inc., 7960, 7961, 7982, 7991, and 7992 manufactured by Baxenden), tolylene diisocyanate type block isocyanate (for example, Mitsui Takenate B-830, etc.), 4,4′-diphenylmethane diisocyanate block isocyanate (for example, Takenate B-815N, Mitsui Chemicals, Inc., Bronate PMD, manufactured by Otsuchi Sangyo Co., Ltd.) OA01 and PMD-MA01), 1,3-bis (isocyanatemethyl) cyclohexane block isocyanate (for example, Takenate B-846N manufactured by Mitsui Chemicals, Inc., Coronate BI-301, 2507, and 2554 manufactured by Tosoh Corporation) Etc.), and isophorone diisocyanate-based blocked isocyanates (for example, 7950, 7951, and 7990 manufactured by Baxenden). These blocked isocyanate compounds may be used alone or in combination of two or more.
 ジオール化合物とは、分子鎖一本に対して2つの水酸基を含むものを指す。骨格中には、脂肪族、芳香族、脂環基等の炭化水素基を含むものが挙げられる。
 ジオール化合物の具体例としては、ポリテトラメチレンジオール(例えば、三菱ケミカル(株)製P4TMG650、PTMG850、PTMG1000、PTMG1300、PTMG1500、PTMG1800、PTMG2000、及びPTMG3000など)、ポリブタジエンジオール(例えば、日本曹達(株)製G-1000、G-2000、及びG-3000など)、水添ポリブタジエンジオール(例えば、日本曹達(株)製GI-1000、GI-2000、及びGO-3000など)、ポリカーボネートジオール(例えば、旭化成(株)製デュラノールT5651、デュラノールT5652、デュラノールT4671、デュラノールG4672、デュラノールG3452、及びデュラノールG3450J、並びにクラレ(株)製クラレポリオールC-590、クラレポリオールC-1090、クラレポリオールC-2090、及びクラレポリオールC-3090など)、ポリカプロラクトンジオール(例えば、ダイセル(株)製プラクセル205PL、プラクセル210、プラクセル220、及びプラクセル220PLなど)、ポリエステルジオール(例えば、クラレ(株)製クラレポリオールP-530、クラレポリオールP-2030、及びクラレポリオールP-2050、並びに豊国製油(株)製HS2N-220Sなど)、ビスフェノール類(例えば、三菱ケミカル(株)製ビスフェノールAなど)、及び水添ビスフェノール類(例えば、新日本理化(株)製リカビノールHBなど)が挙げられる。これらのジオール化合物は、単独で用いてもよく、2種類以上を組み合わせて用いてもよい。
A diol compound refers to a compound containing two hydroxyl groups per molecular chain. Examples of the skeleton include those containing hydrocarbon groups such as aliphatic, aromatic and alicyclic groups.
Specific examples of the diol compound include polytetramethylene diol (for example, P4TMG650, PTMG850, PTMG1000, PTMG1300, PTMG1500, PTMG1800, PTMG2000, and PTMG3000 manufactured by Mitsubishi Chemical Corporation), polybutadiene diol (for example, Nippon Soda Co., Ltd.) Manufactured by G-1000, G-2000, and G-3000), hydrogenated polybutadiene diol (for example, GI-1000, GI-2000, and GO-3000 manufactured by Nippon Soda Co., Ltd.), polycarbonate diol (for example, Asahi Kasei) DURANOL T5651, DURANOL T5652, DURANOL T4671, DURANOL G4672, DURANOL G3452 and DURANOL G3450J manufactured by Kuraray Co., Ltd. Kuraray polyol C-590, Kuraray polyol C-1090, Kuraray polyol C-2090, Kuraray polyol C-3090, etc., polycaprolactone diol (for example, Plaxel 205PL, Plaxel 210, Plaxel 220, and Plaxel 220PL manufactured by Daicel Corporation) Etc.), polyester diols (for example, Kuraray Polyol P-530, Kuraray Polyol P-2030, and Kuraray Polyol P-2050 manufactured by Kuraray Co., Ltd., and HS2N-220S manufactured by Toyokuni Oil Co., Ltd.), bisphenols (for example, And bisphenol A manufactured by Mitsubishi Chemical Corporation) and hydrogenated bisphenols (for example, Rikabinol HB manufactured by Shin Nippon Rika Co., Ltd.). These diol compounds may be used alone or in combination of two or more.
 (E)熱架橋剤は、転写フィルムの保存安定性及び硬化膜の透湿性低減の観点からブロックイソシアネート化合物が好ましく、更に、感光性樹脂組成物層の低温現像性の観点からジオール化合物と併用することがより好ましい。 (E) The thermal crosslinking agent is preferably a blocked isocyanate compound from the viewpoint of storage stability of the transfer film and reduced moisture permeability of the cured film, and is further used in combination with a diol compound from the viewpoint of low-temperature developability of the photosensitive resin composition layer. It is more preferable.
 (E)熱架橋剤の感光性樹脂組成物中の含有量は、感光性樹脂組成物の質量を基準として、0.2質量%~40質量%であり、現像性と低透水性の観点から、1質量%~30質量%であることがより好ましく、2質量%~20質量%であることが更に好ましい。 (E) The content of the thermal crosslinking agent in the photosensitive resin composition is 0.2% by mass to 40% by mass based on the mass of the photosensitive resin composition, and from the viewpoint of developability and low water permeability. The content is more preferably 1% by mass to 30% by mass, and further preferably 2% by mass to 20% by mass.
 ブロックイソシアネート化合物は、現像によりパターン形成をした後の加熱処理において(A)アルカリ可溶性樹脂又は(B)カルボキシル基及びエチレン性不飽和基を含有する化合物のカルボキシル基若しくは水酸基、又は併用したジオール化合物の水酸基と反応するため、硬化膜の透湿度が低くなり、基材、電極等を保護するための防錆性が良好となる。更に、ブロックイソシアネート化合物は、(A)アルカリ可溶性樹脂及び/又は(B)カルボキシル基及びエチレン性不飽和基を含有する化合物と架橋することで硬化膜の架橋密度が上がり、水の拡散性が低下するため硬化膜の透湿度が低くなり、導体の防錆性が向上すると考えられる。また、ブロックイソシアネートは、イソシアネート基がブロック剤により封止されているため、室温での(A)アルカリ可溶性樹脂又はジオール化合物との反応が抑制され、感光性樹脂組成物及び転写フィルムの安定性が保たれる。 The block isocyanate compound is a carboxyl group or hydroxyl group of a compound containing (A) an alkali-soluble resin or (B) a carboxyl group and an ethylenically unsaturated group, or a combined diol compound in a heat treatment after pattern formation by development. Since it reacts with the hydroxyl group, the moisture permeability of the cured film is lowered, and the rust prevention property for protecting the substrate, the electrode and the like is improved. Further, the blocked isocyanate compound is crosslinked with (A) an alkali-soluble resin and / or (B) a compound containing a carboxyl group and an ethylenically unsaturated group, thereby increasing the crosslinking density of the cured film and reducing the water diffusibility. Therefore, it is considered that the moisture permeability of the cured film is lowered and the rust prevention property of the conductor is improved. Moreover, since the isocyanate group is sealed with the blocking agent in the blocked isocyanate, the reaction with the (A) alkali-soluble resin or diol compound at room temperature is suppressed, and the stability of the photosensitive resin composition and the transfer film is improved. Kept.
 ジオール化合物は、親水性の水酸基を有するため現像性が良好となる。また、現像によりパターン形成をした後の加熱処理において、ジオール化合物の水酸基はブロックイソシアネート化合物と反応するため、優れた導体の防錆性が保たれる。ジオール化合物の分子量は、現像性の観点から300~3,000のものが好ましく、分子量が500~2,000のものがより好ましい。一方で、熱硬化後に未反応の水酸基が残存していると硬化膜の透湿度が悪化し、導体の防錆性能を損なう要因となる場合がある。従って、ジオール化合物は、感光性樹脂組成物としての水酸基価が20mgKOH/g以下になるように添加することが好ましく、15.0mgKOH/g以下になるように添加することがより好ましい。感光性樹脂組成物の水酸基価が20以下であることで、感光性樹脂組成物の硬化物の透湿度を下げることができるため、導体の防錆性が向上する。また、感光性樹脂組成物層の水酸基価は、0.01mgKOH/g以上であることが好ましい。 Since the diol compound has a hydrophilic hydroxyl group, the developability is good. In addition, in the heat treatment after pattern formation by development, the hydroxyl group of the diol compound reacts with the blocked isocyanate compound, so that excellent rust resistance of the conductor is maintained. The molecular weight of the diol compound is preferably from 300 to 3,000, more preferably from 500 to 2,000, from the viewpoint of developability. On the other hand, if unreacted hydroxyl groups remain after thermal curing, the moisture permeability of the cured film is deteriorated, which may be a factor that impairs the rust prevention performance of the conductor. Therefore, the diol compound is preferably added so that the hydroxyl value of the photosensitive resin composition is 20 mgKOH / g or less, and more preferably 15.0 mgKOH / g or less. Since the moisture permeability of the hardened | cured material of the photosensitive resin composition can be reduced because the hydroxyl value of the photosensitive resin composition is 20 or less, the rust prevention property of a conductor improves. Moreover, it is preferable that the hydroxyl value of the photosensitive resin composition layer is 0.01 mgKOH / g or more.
<(F)ロジンエステル化合物>
 感光性樹脂組成物には、より低透水性を発現させるという観点から、(F)ロジンエステル化合物を更に配合することが好ましい。本実施の形態に係る(F)ロジンエステル化合物とは、松脂の不揮発性分である炭素数20の三環式ジテルペノイドであるロジン酸、ロジン酸の二量体、ロジン酸の水素添加物、及びロジン酸の不均化物から成る群から選ばれる化合物(以下、総称として「ロジン酸誘導体」と呼ぶ)とヒドロキシル化合物、フェノール化合物、グリシジル化合物のいずれかを反応させたことによりエステル結合を有する化合物、ロジン酸誘導体をグリシジル化し、カルボキシル化合物、フェノール化合物のいずれかを反応させたことによりエステル結合を有する化合物である。
<(F) Rosin ester compound>
In the photosensitive resin composition, it is preferable to further blend (F) a rosin ester compound from the viewpoint of expressing lower water permeability. The (F) rosin ester compound according to the present embodiment is a rosin acid that is a non-volatile component of rosin, a rosin acid that is a tricyclic diterpenoid having 20 carbon atoms, a dimer of rosin acid, a hydrogenated product of rosin acid, and A compound having an ester bond by reacting a compound selected from the group consisting of disproportionates of rosin acid (hereinafter collectively referred to as “rosin acid derivative”) with any of a hydroxyl compound, a phenol compound, and a glycidyl compound, It is a compound having an ester bond by glycidylating a rosin acid derivative and reacting either a carboxyl compound or a phenol compound.
 (F)ロジンエステル化合物の具体例としては、例えば、荒川化学(株)社の製品としては、エステルガムシリーズ、パインクリスタルシリーズ、スーパーエステルシリーズ、ペンセルシリーズ、ビームセット101等、ハリマ化成(株)社の製品としては、ハリエスターシリーズ、ネオトールシリーズ、ハリタックシリーズが挙げられる。 (F) Specific examples of rosin ester compounds include, for example, Arakawa Chemical Co., Ltd. products such as the ester gum series, pine crystal series, super ester series, pencel series, beam set 101, etc. ) The company's products include the Harrier Star Series, Neotor Series, and Harituck Series.
 (F)ロジンエステル化合物は脂環式構造とエステル構造を有することで、疎水性が高くなる化合物であるが、感光性樹脂組成物中の(A)アルカリ可溶性樹脂、(B)カルボキシル基及びエチレン性不飽和基を含有する化合物、(C)光重合性化合物、及び(D)光重合開始剤との相溶性が良いため、組成物としての現像性を阻害することがなく、そのため、転写フィルムの低温現像性、硬化膜の透湿度、導体の防錆性の各性能バランスに優れる。 (F) The rosin ester compound has a cycloaliphatic structure and an ester structure, so that the hydrophobicity is increased, but (A) an alkali-soluble resin, (B) a carboxyl group and ethylene in the photosensitive resin composition. Since the compatibility with the compound containing a polymerizable unsaturated group, (C) the photopolymerizable compound, and (D) the photopolymerization initiator is good, the developability as a composition is not hindered. It has excellent performance balance of low temperature developability, moisture permeability of cured film, and rust prevention of conductor.
 導体の防錆性の観点から、(F)ロジンエステル化合物は酸価が20mgKOH/g以下であることがより好ましく、上記、荒川化学(株)社製品、ハリマ化成(株)社の製品では、例えば、パインクリスタルKE-100、エステルガム105、スーパーエステルA-115、スーパーエステルA-125、ペンセルA、ペンセルC、ペンセルD-125、ペンセルD-135、ペンセルD-160、ビームセット101、ハリエスターS、ネオトール125HK、ハリタックF105、ハリタックFK125、ハリタックPCJ等が挙げられる。 From the viewpoint of the rust prevention property of the conductor, the acid value of the (F) rosin ester compound is more preferably 20 mgKOH / g or less. In the above-mentioned products of Arakawa Chemical Co., Ltd. and Harima Kasei Co., Ltd., For example, Pine Crystal KE-100, Ester Gum 105, Super Ester A-115, Super Ester A-125, Pencel A, Pencel C, Pencel D-125, Pencel D-135, Pencel D-160, Beam Set 101, Harrier Star S, Neotol 125HK, Haritac F105, Haritac FK125, Haritac PCJ, and the like.
 さらに硬化膜の透湿度低減の観点から、(F)ロジンエステル化合物は軟化点が100℃以上であることがより好ましく、これらの条件に該当する具体的な化合物としては、例えば、エステルガム105、スーパーエステルA-115、スーパーエステルA-125、ペンセルA、ペンセルC、ペンセルD-125、ペンセルD-135、ペンセルD-160、ネオトール125HK等が挙げられ、軟化点が110℃以上であることが特に好ましく、これらの条件に該当する具体的な化合物としては、スーパーエステルA-115、スーパーエステルA-125、ペンセルA、ペンセルC、ペンセルD-125、ペンセルD-135、ペンセルD-160、ネオトール125HKが挙げられる。(F)ロジンエステル化合物は、単独、又は2種以上混合して用いることもできる。 Further, from the viewpoint of reducing moisture permeability of the cured film, the rosin ester compound (F) preferably has a softening point of 100 ° C. or higher. Specific examples of compounds satisfying these conditions include, for example, ester gum 105, Superester A-115, Superester A-125, Pencel A, Pencel C, Pencel D-125, Pencel D-135, Pencel D-160, Neotol 125HK, etc., with a softening point of 110 ° C. or higher Particularly preferred specific compounds satisfying these conditions are Superester A-115, Superester A-125, Pencel A, Pencel C, Pencel D-125, Pencel D-135, Pencel D-160, Neotol 125HK is mentioned. (F) The rosin ester compound may be used alone or in combination of two or more.
 (F)ロジンエステル化合物の感光性樹脂組成物中の含有量は、感光性樹脂組成物の全固形分100質量%に対し、1質量%~20質量%であり、透湿度と現像性の観点から、5質量%~20質量%であることがより好ましく、基材への密着性の観点から、5質量%~15質量%であることが更に好ましい。(F)ロジンエステル化合物の含有量が1質量%~20質量%の範囲内であれば、転写フィルムの低温現像性と硬化膜の透湿度の性能バランスが良好である。 (F) The content of the rosin ester compound in the photosensitive resin composition is 1% by mass to 20% by mass with respect to 100% by mass of the total solid content of the photosensitive resin composition. From 5% by mass to 20% by mass, more preferably from 5% by mass to 15% by mass from the viewpoint of adhesion to the substrate. (F) When the content of the rosin ester compound is in the range of 1% by mass to 20% by mass, the performance balance between the low temperature developability of the transfer film and the moisture permeability of the cured film is good.
<(G)防錆剤>
 本実施の形態に係る防錆剤とは、防錆効果を有する化合物をいい、例えば、金属表面に被膜を形成して金属の腐食又は錆を防止する物質等である。
<(G) Rust preventive>
The rust preventive agent according to the present embodiment refers to a compound having a rust preventive effect, such as a substance that forms a film on a metal surface to prevent corrosion or rust of the metal.
 防錆剤としては、本実施の形態に係る感光性樹脂組成物への相溶性及び感度の観点から、N、S、O等を含む複素環化合物が好ましく、例えば、テトラゾール及びその誘導体、トリアゾール及びその誘導体、イミダゾール及びその誘導体、インダゾール及びその誘導体、ピラゾール及びその誘導体、イミダゾリン及びその誘導体、オキサゾール及びその誘導体、イソオキサゾール及びその誘導体、オキサジアゾール及びその誘導体、チアゾール及びその誘導体、イソチアゾール及びその誘導体、チアジアゾール及びその誘導体、チオフェン及びその誘導体等が挙げられる。ここで記載した誘導体には、母体となる構造に置換基を導入した化合物が含まれる。例えば、テトラゾール誘導体であれば、テトラゾールに置換基を導入した化合物が含まれる。置換基としては、特に制限はないが、例えば、炭化水素基(飽和でも不飽和でもよく、直鎖型でも分岐型でもよく、構造中に環状構造を含んでもよい)、又はヒドロキシル基、カルボニル基、カルボキシル基、アミノ基、アミド基、ニトロ基、シアノ基、チオール基及びハロゲン(フッ素、塩素、臭素、ヨウ素など)基等のヘテロ原子を有する官能基を一つ以上含む置換基が挙げられる。 As the rust preventive agent, from the viewpoint of compatibility with the photosensitive resin composition according to the present embodiment and sensitivity, heterocyclic compounds containing N, S, O and the like are preferable. For example, tetrazole and its derivatives, triazole and Derivatives thereof, imidazole and derivatives thereof, indazole and derivatives thereof, pyrazole and derivatives thereof, imidazoline and derivatives thereof, oxazole and derivatives thereof, isoxazole and derivatives thereof, oxadiazole and derivatives thereof, thiazole and derivatives thereof, isothiazole and derivatives thereof Derivatives, thiadiazole and derivatives thereof, thiophene and derivatives thereof, and the like. The derivatives described here include compounds in which a substituent is introduced into the base structure. For example, if it is a tetrazole derivative, the compound which introduce | transduced the substituent into tetrazole is contained. The substituent is not particularly limited. For example, the substituent may be a hydrocarbon group (saturated or unsaturated, may be linear or branched, and may include a cyclic structure in its structure), or a hydroxyl group or a carbonyl group. , Carboxyl groups, amino groups, amide groups, nitro groups, cyano groups, thiol groups, and substituents containing one or more functional groups having heteroatoms such as halogen (fluorine, chlorine, bromine, iodine, etc.) groups.
 さらに、防錆性の観点から、複素環化合物としては、CとN及び/又はSとで構成される複素環を有し、かつ同一複素環中、N原子数が3以下であるか、S原子数が3以下であるか、又はN原子とS原子の合計数が3以下である化合物が好ましい。より好ましい複素環化合物は、トリアゾール及びその誘導体、イミダゾール及びその誘導体、イミダゾリン及びその誘導体、チアゾール及びその誘導体、イソチアゾール及びその誘導体、チアジアゾール及びその誘導体、並びにチオフェン及びその誘導体等である。防錆性及び現像性の観点から、該化合物として、ベンゾトリアゾール及びその誘導体、並びにイミダゾール及びその誘導体がさらに好ましい。 Furthermore, from the viewpoint of rust prevention, the heterocyclic compound has a heterocyclic ring composed of C and N and / or S, and the number of N atoms in the same heterocyclic ring is 3 or less, or S A compound having 3 or less atoms or a total number of N and S atoms of 3 or less is preferred. More preferred heterocyclic compounds are triazole and its derivatives, imidazole and its derivatives, imidazoline and its derivatives, thiazole and its derivatives, isothiazole and its derivatives, thiadiazole and its derivatives, thiophene and its derivatives, and the like. From the viewpoint of rust prevention and developability, the compound is more preferably benzotriazole and its derivatives, and imidazole and its derivatives.
 CとN及び/又はSとで構成される複素環を有し、かつ、同一複素環中、N原子数が3以下であるか、S原子数が3以下であるか、又はN原子とS原子の合計数が3以下である化合物の具体例を以下に示す:
 トリアゾール、例えば、1,2,3-トリアゾール、1,2,4-トリアゾール等;
 トリアゾール誘導体、例えば、3-メルカプトトリアゾール、3-アミノ-5-メルカプトトリアゾール、ベンゾトリアゾール、1H-ベンゾトリアゾール-1-アセトニトリル、1-[N,N-ビス(2-エチルヘキシル)アミノメチル]ベンゾトリアゾール、1-(2-ジ-n-ブチルアミノメチル)-5-カルボキシベンゾトリアゾール、1-(2-ジ-n-ブチルアミノメチル)-6-カルボキシベンゾトリアゾール、1H-ベンゾトリアゾール-1-メタノール、5-メチル-1H-ベンゾトリアゾール、5-カルボキシベンゾトリアゾール、1-ヒドロキシベンゾトリアゾール、5-クロロベンゾトリアゾール、5-ニトロベンゾトリアゾール等;
It has a heterocyclic ring composed of C and N and / or S, and in the same heterocyclic ring, the number of N atoms is 3 or less, the number of S atoms is 3 or less, or the N atom and S Specific examples of compounds having a total number of atoms of 3 or less are shown below:
Triazoles such as 1,2,3-triazole, 1,2,4-triazole, etc .;
Triazole derivatives such as 3-mercaptotriazole, 3-amino-5-mercaptotriazole, benzotriazole, 1H-benzotriazole-1-acetonitrile, 1- [N, N-bis (2-ethylhexyl) aminomethyl] benzotriazole, 1- (2-di-n-butylaminomethyl) -5-carboxybenzotriazole, 1- (2-di-n-butylaminomethyl) -6-carboxybenzotriazole, 1H-benzotriazole-1-methanol, 5 -Methyl-1H-benzotriazole, 5-carboxybenzotriazole, 1-hydroxybenzotriazole, 5-chlorobenzotriazole, 5-nitrobenzotriazole and the like;
 イミダゾール;イミダゾール誘導体、例えば、ウンデシルイミダゾール、ベンゾイミダゾール、5-カルボキシベンゾイミダゾール、6-ブロモベンゾイミダゾール、5-クロロベンゾイミダゾール、2-ヒドロキシベンゾイミダゾール、2-(1-ヒドロキシメチル)ベンゾイミダゾール、2-メチルベンゾイミダゾール、5-ニトロベンゾイミダゾール、2-フェニルベンゾイミダゾール、2-アミノベンゾイミダゾール、5-アミノベンゾイミダゾール、5-アミノ-2-メルカプトベンゾイミダゾール等;
 イミダゾリン;イミダゾリン誘導体、例えば、2-ウンデシルイミダゾリン、2-プロピル-2-イミダゾリン、2-フェニルイミダゾリン等;
 チアゾール;チアゾール誘導体、例えば、2-アミノ-4-メチルチアゾール、5-(2-ヒドロキシエチル)-4-メチルチアゾール、ベンゾチアゾール、2-メルカプトベンゾチアゾール、2-アミノベンゾチアゾール、2-アミノ-6-メチルベンゾチアゾール、(2-ベンゾチアゾリルチオ)酢酸、3-(2-ベンゾチアゾリルチオ)プロピオン酸等;
Imidazole; Imidazole derivatives such as undecyl imidazole, benzimidazole, 5-carboxybenzimidazole, 6-bromobenzimidazole, 5-chlorobenzimidazole, 2-hydroxybenzimidazole, 2- (1-hydroxymethyl) benzimidazole, 2 -Methylbenzimidazole, 5-nitrobenzimidazole, 2-phenylbenzimidazole, 2-aminobenzimidazole, 5-aminobenzimidazole, 5-amino-2-mercaptobenzimidazole, etc .;
An imidazoline; an imidazoline derivative such as 2-undecylimidazoline, 2-propyl-2-imidazoline, 2-phenylimidazoline;
Thiazole; thiazole derivatives such as 2-amino-4-methylthiazole, 5- (2-hydroxyethyl) -4-methylthiazole, benzothiazole, 2-mercaptobenzothiazole, 2-aminobenzothiazole, 2-amino-6 -Methylbenzothiazole, (2-benzothiazolylthio) acetic acid, 3- (2-benzothiazolylthio) propionic acid, etc .;
 イソチアゾール;イソチアゾール誘導体、例えば、3-クロロ-1,2-ベンゾイソチアゾール等;
 チアジアゾール、例えば、1,2,3-チアジアゾール、1,2,5-チアジアゾール、1,3,4-チアジアゾール等;チアジアゾール誘導体、例えば、4-アミノ-2,1,3-ベンゾチアジアゾール、2-アミノ-5-メルカプト-1,3,4-チアジアゾール、2-アミノ-5-メチル-1,3,4-チアジアゾール、2-アミノ-1,3,4-チアジアゾール、5-アミノ-1,2,3-チアジアゾール、2-メルカプト-5-メチル-1,3,4-チアジアゾール等;
 チオフェン;チオフェン誘導体、例えば、2-チオフェンカルボン酸、3-アミノ-2-チオフェンカルボン酸メチル、3-メチルベンゾチオフェン等。
Isothiazole; isothiazole derivatives such as 3-chloro-1,2-benzisothiazole;
Thiadiazoles such as 1,2,3-thiadiazole, 1,2,5-thiadiazole, 1,3,4-thiadiazole and the like; thiadiazole derivatives such as 4-amino-2,1,3-benzothiadiazole, 2-amino -5-mercapto-1,3,4-thiadiazole, 2-amino-5-methyl-1,3,4-thiadiazole, 2-amino-1,3,4-thiadiazole, 5-amino-1,2,3 -Thiadiazole, 2-mercapto-5-methyl-1,3,4-thiadiazole, etc .;
Thiophene; thiophene derivatives such as 2-thiophenecarboxylic acid, methyl 3-amino-2-thiophenecarboxylate, 3-methylbenzothiophene and the like.
 上記防錆剤の中でも、導体の防錆性及び転写フィルムの低温現像性の観点から、ベンゾトリアゾール、5-カルボキシベンゾトリアゾール、1-ヒドロキシベンゾトリアゾール、及び5-クロロベンゾトリアゾールが特に好ましい。
 一方で、(G)成分として導体の防錆性と硬化膜の基材との密着性の観点から、テトラゾール及びその誘導体、トリアゾール及びその誘導体、インダゾール及びその誘導体並びにチアジアゾール及びその誘導体が好ましい。
Among the rust inhibitors, benzotriazole, 5-carboxybenzotriazole, 1-hydroxybenzotriazole, and 5-chlorobenzotriazole are particularly preferable from the viewpoints of rust prevention of the conductor and low-temperature developability of the transfer film.
On the other hand, as the component (G), tetrazole and its derivatives, triazole and its derivatives, indazole and its derivatives, and thiadiazole and its derivatives are preferable from the viewpoint of the rust prevention property of the conductor and the adhesion between the cured film and the base material.
 テトラゾールの具体例としては、1H-テトラゾールが挙げられる。テトラゾール誘導体の具体例としては、5-アミノ-1H-テトラゾール、5-メチル-1H-テトラゾール、1-メチル-5-エチル-1H-テトラゾール、1-メチル-5-メルカプト-1H-テトラゾール、1-フェニル-5-メルカプト-1H-テトラゾール、1-(ジメチルアミノエチル)-5-メルカプト-1H-テトラゾール及び5-フェニル-1H-テトラゾール等が挙げられる。 Specific examples of tetrazole include 1H-tetrazole. Specific examples of tetrazole derivatives include 5-amino-1H-tetrazole, 5-methyl-1H-tetrazole, 1-methyl-5-ethyl-1H-tetrazole, 1-methyl-5-mercapto-1H-tetrazole, 1- Examples include phenyl-5-mercapto-1H-tetrazole, 1- (dimethylaminoethyl) -5-mercapto-1H-tetrazole, and 5-phenyl-1H-tetrazole.
 インダゾールの具体例としては、1H-インダゾールが挙げられる。インダゾール誘導体としては、5-アミノインダゾール、6-アミノインダゾール、1-ベンジル-3-ヒドロキシ-1H-インダゾール、5-ブロモインダゾール、6-ブロモインダゾール、6-ヒドロキシインダゾール、3-カルボキシインダゾール及び5-ニトロインダゾール等が挙げられる。 A specific example of indazole is 1H-indazole. Examples of indazole derivatives include 5-aminoindazole, 6-aminoindazole, 1-benzyl-3-hydroxy-1H-indazole, 5-bromoindazole, 6-bromoindazole, 6-hydroxyindazole, 3-carboxyindazole and 5-nitroindazole. And indazole.
 トリアゾール及びその誘導体並びにチアジアゾール及びその誘導体の具体例は、上記で既に説明したとおりである。
 それらの中でも、導体の防錆性と硬化膜の基材との密着性の観点から、5-アミノ-1H-テトラゾール、5-カルボキシベンゾトリアゾール、5-アミノインダゾール及び5-アミノ-1,2,3-チアジアゾールが特に好ましい。
 本実施の形態では、上記で説明された防錆剤の1種を単独で使用してもよく、2種以上を併用してもよい。
Specific examples of triazole and its derivatives and thiadiazole and its derivatives are as already described above.
Among them, from the viewpoint of the rust prevention property of the conductor and the adhesion to the substrate of the cured film, 5-amino-1H-tetrazole, 5-carboxybenzotriazole, 5-aminoindazole and 5-amino-1,2, 3-thiadiazole is particularly preferred.
In this Embodiment, 1 type of the antirust agent demonstrated above may be used independently, and 2 or more types may be used together.
 感光性樹脂組成物中の防錆剤の含有量は、導体の防錆性又は転写フィルムの低温現像性の観点から、感光性樹脂組成物の質量を基準として、好ましくは0.05質量%~10質量%、より好ましくは0.1質量%~5質量%、さらに好ましくは0.2質量%~3質量%である。 The content of the rust inhibitor in the photosensitive resin composition is preferably 0.05% by mass or more based on the mass of the photosensitive resin composition from the viewpoint of rust prevention of the conductor or low temperature developability of the transfer film. It is 10% by mass, more preferably 0.1% by mass to 5% by mass, and still more preferably 0.2% by mass to 3% by mass.
<その他の成分>
 本実施の形態において、成分(A)~(G)に加えて、その他の成分(H)として、カルボキシル基とエチレン性不飽和基を有するオリゴマー、ニトロソフェニルヒドロキシルアミンが3モル付加したアルミニウム塩等の重合禁止剤、酸化防止剤、密着助剤、レベリング剤、充填剤、消泡剤、及び難燃剤等も感光性樹脂組成物に含有させることが出来、これらは単独で又は2種類以上を組み合わせて使用できる。
<Other ingredients>
In this embodiment, in addition to components (A) to (G), as other component (H), an oligomer having a carboxyl group and an ethylenically unsaturated group, an aluminum salt to which 3 mol of nitrosophenylhydroxylamine has been added, etc. Polymerization inhibitors, antioxidants, adhesion aids, leveling agents, fillers, antifoaming agents, flame retardants, etc. can also be included in the photosensitive resin composition, and these can be used alone or in combination of two or more. Can be used.
<感光性樹脂組成物及びその層>
 本実施の形態における感光性樹脂組成物は、ゲルパーミエーションクロマトグラフィー(GPC)を測定し、GPC溶出曲線から得られる微分分子量分布曲線において、
  (i)分子量M=20000と分子量M=5000のdw/d(logM)値の比;R20k/5kが0.20~1.50の範囲内であり、かつ
  (ii)前記微分分子量分布曲線において、分子量Mが2000以上の領域の面積を100%としたときに分子量Mが50000以上の領域の面積の比率;S≧50kが1.0~9.0%であることを特徴とする。
 ここで、GPC測定は(A)アルカリ可溶性樹脂について前述した方法と同様に行われる。測定により得られたGPC溶出曲線から微分分子量分布曲線を求める方法については、株式会社東ソー分析センター発刊の技術レポートNo.T1001(2013.10.1)、「GPC法(SEC法)入門講座」に記載のとおりである。
<Photosensitive resin composition and its layer>
The photosensitive resin composition in the present embodiment measures gel permeation chromatography (GPC), and in a differential molecular weight distribution curve obtained from a GPC elution curve,
(I) the ratio of dw / d (logM) values of molecular weight M = 20000 and molecular weight M = 5000; R 20k / 5k is in the range of 0.20 to 1.50, and (ii) the differential molecular weight distribution curve The ratio of the area of the region having the molecular weight M of 50000 or more when the area of the region having the molecular weight M of 2000 or more is 100%; S ≧ 50k is 1.0 to 9.0%.
Here, the GPC measurement is performed in the same manner as described above for the (A) alkali-soluble resin. Regarding the method for obtaining the differential molecular weight distribution curve from the GPC elution curve obtained by the measurement, technical report No. T1001 (2013.10.1), “GPC method (SEC method) introductory course”.
 微分分子量分布曲線において、R20k/5kが0.20以上であることでタック性に優れた感光性樹脂組成物を提供でき、R20k/5kが1.50以下であることで、低温ラミネート性に優れた感光性樹脂組成物を提供できる。転写フィルムのタック性と低温ラミネート性の観点で、R20k/5kの好ましい範囲は、0.30~1.20である。 In the differential molecular weight distribution curve, it is possible to provide a photosensitive resin composition having excellent tackiness when R 20k / 5k is 0.20 or more, and low temperature laminating property when R 20k / 5k is 1.50 or less. It is possible to provide a photosensitive resin composition having excellent resistance. From the viewpoint of tackiness and low-temperature laminating property of the transfer film, a preferable range of R 20k / 5k is 0.30 to 1.20.
 微分分子量分布曲線におけるS≧50kが1.0%以上であることで導体基材との密着性に優れた感光性樹脂組成物を提供できる。また、S≧50kが1.0~9.0%の範囲内の時に、低温現像性が優れた感光性樹脂組成物を提供できる。さらに、S≧50kは、低温現像性の観点で2.5~6.7%の範囲内であることが好ましい。 The photosensitive resin composition excellent in adhesiveness with a conductor base material can be provided because S > = 50k in a differential molecular weight distribution curve is 1.0% or more. In addition, when S ≧ 50k is in the range of 1.0 to 9.0%, a photosensitive resin composition having excellent low-temperature developability can be provided. Further, S ≧ 50k is preferably in the range of 2.5 to 6.7% from the viewpoint of low-temperature developability.
 疎水性、膜密度及び防錆性の観点から、微分分子量分布曲線における分子量M≧50000の領域に属する成分が、芳香環を含むことが好ましい。分子量M≧50000であり、かつ芳香環を含む成分は、例えば、上記で説明された(A1)~(A4)成分などに由来することができる。 From the viewpoint of hydrophobicity, film density and rust prevention, it is preferable that the component belonging to the region of molecular weight M ≧ 50000 in the differential molecular weight distribution curve contains an aromatic ring. The component having a molecular weight M ≧ 50000 and containing an aromatic ring can be derived from, for example, the components (A1) to (A4) described above.
 本実施の形態における感光性樹脂組成物を構成する有機成分は、総じてテトラヒドロフラン(THF)には可溶であるが、分子量(M)が2000以上の高分子量成分の多くは、室温でテトラヒドロフラン(THF)/シクロヘキサン(Cy)混合溶媒(質量比=1/2)に不溶である。他方、本実施の形態における感光性樹脂組成物の高分子量成分には酸性官能基を含み、屈折率n2が1.560以上であることを特徴とする。すなわち、本実施の形態における感光性樹脂組成物は、23℃において、THFに可溶で、かつTHF/Cy(質量比=1/2)混合溶媒に不溶な成分の(i)酸価A2(mgKOH/g)が95以上であり、かつ(ii)屈折率n2が1.560以上であることを特徴とする。
 感光性樹脂組成物層の屈折率が1.550以上であることが好ましい。また、感光性樹脂組成物層の屈折率が1.630以下であることが好ましい。
The organic components constituting the photosensitive resin composition in the present embodiment are generally soluble in tetrahydrofuran (THF), but most of the high molecular weight components having a molecular weight (M) of 2000 or more are tetrahydrofuran (THF) at room temperature. ) / Cyclohexane (Cy) mixed solvent (mass ratio = 1/2). On the other hand, the high molecular weight component of the photosensitive resin composition in the present embodiment includes an acidic functional group and has a refractive index n2 of 1.560 or more. That is, the photosensitive resin composition in the present embodiment is a component (i) acid value A2 (23) that is soluble in THF and insoluble in a THF / Cy (mass ratio = 1/2) mixed solvent at 23 ° C. mgKOH / g) is 95 or more, and (ii) the refractive index n2 is 1.560 or more.
The refractive index of the photosensitive resin composition layer is preferably 1.550 or more. Moreover, it is preferable that the refractive index of the photosensitive resin composition layer is 1.630 or less.
 感光性樹脂組成物又はその層から、THFに可溶で、かつTHF/Cy混合溶媒(質量比=1/2)に不溶な成分を得る方法について説明する。
 まず、100mLの三角フラスコ中にサンプルとして感光性樹脂組成物又はその層を10.0g精秤し、これに30.0gのテトラヒドロフラン(THF)を添加してから容器を密閉して、23℃で1時間に亘ってスターラーで攪拌する。不溶分をろ過で取り除いた後、このTHF溶液に60.0gのシクロヘキサン(Cy)を10分間掛けて滴下し、23℃で1時間攪拌する。懸濁した溶液を遠心分離器により固液分離し、50gのシクロヘキサンで不溶分を3回洗浄し、40℃で6時間真空乾燥を行うことでTHF/Cy混合溶媒(質量比=1/2)に不溶な成分が得られる。
A method for obtaining a component that is soluble in THF and insoluble in a THF / Cy mixed solvent (mass ratio = 1/2) from the photosensitive resin composition or a layer thereof will be described.
First, 10.0 g of the photosensitive resin composition or its layer was precisely weighed as a sample in a 100 mL Erlenmeyer flask, 30.0 g of tetrahydrofuran (THF) was added thereto, the container was sealed, Stir with a stirrer for 1 hour. After removing insolubles by filtration, 60.0 g of cyclohexane (Cy) is added dropwise to the THF solution over 10 minutes, and the mixture is stirred at 23 ° C. for 1 hour. The suspended solution is solid-liquid separated with a centrifuge, the insoluble matter is washed 3 times with 50 g of cyclohexane, and vacuum-dried at 40 ° C. for 6 hours to obtain a THF / Cy mixed solvent (mass ratio = 1/2). Insoluble components are obtained.
 THFに可溶で、かつTHF/Cy混合溶媒(質量比=1/2)に不溶な成分の酸価A2の測定方法については、以下に説明する。
 まず、THF/Cy混合溶媒(質量比=1/2)に前述した真空乾燥後の不溶成分1.0gを精秤した後、これにTHFを30g添加し、均一に溶解する。この溶液を用いて、(A)アルカリ可溶性樹脂について前述した方法と同様に酸価測定が行われる。本実施の形態における感光性樹脂組成物中の、THF/Cy混合溶媒(質量比=1/2)に不溶な成分の酸価A2(mgKOH/g)は低温現像性と密着性の観点で95以上であり、低温ラミネート性の観点で200以下であることが好ましく、105~180の範囲内であることがより好ましい。
A method for measuring the acid value A2 of a component that is soluble in THF and insoluble in a THF / Cy mixed solvent (mass ratio = 1/2) will be described below.
First, 1.0 g of the insoluble component after vacuum drying described above is precisely weighed in a THF / Cy mixed solvent (mass ratio = 1/2), and then 30 g of THF is added thereto and dissolved uniformly. Using this solution, the acid value is measured in the same manner as described above for (A) the alkali-soluble resin. The acid value A2 (mg KOH / g) of the component insoluble in the THF / Cy mixed solvent (mass ratio = 1/2) in the photosensitive resin composition in the present embodiment is 95 from the viewpoint of low-temperature developability and adhesion. From the viewpoint of low-temperature laminating properties, it is preferably 200 or less, and more preferably in the range of 105 to 180.
 THF/Cy混合溶媒(質量比=1/2)に不溶な成分の屈折率n2の測定方法を以下に示す。まず、THF/Cy混合溶媒(質量比=1/2)に不溶な成分を溶解する1気圧での沸点が200℃以下の有機溶媒(例えば、エタノール、アセトン、メチルエチルケトン、1-メトキシ-2-プロパノール、プロピレングリコール-1-モノメチルエーテル-2-アセタートなど)に溶かした溶液を調製する。この際、固形分濃度は10~70質量%になるように調製する。得られた溶液は、その溶液に対して耐性のある任意の基材に塗布されることができる。例えば、得られた溶液を市販のポリエチレンテレフタラート(PET)フィルム(厚み16μm)上にバーコーターで塗布し、100℃の熱風式オーブンにて10分間乾燥させ、THF/Cy混合溶媒(質量比=1/2)に不溶な成分から成る層の厚み2μmの積層体を得る。屈折率測定は、Metricon社製、Prism CouplerModel2010/M、レーザー光波長:532nm)を使用し、プリズムに(THF/Cy混合溶媒(質量比=1/2)に不溶な成分から成る層が接した状態で行われる。 本実施の形態における感光性樹脂組成物中の、THF/Cy混合溶媒(質量比=1/2)に不溶な成分の屈折率n2は、低透湿度の観点で1.560以上であり、低温現像性の観点で1.650以下であることが好ましく、1.570~1.600の範囲内であることがより好ましく、1.574~1.590の範囲内であることがさらに好ましい。 A method for measuring the refractive index n2 of a component insoluble in a THF / Cy mixed solvent (mass ratio = 1/2) is shown below. First, an organic solvent (for example, ethanol, acetone, methyl ethyl ketone, 1-methoxy-2-propanol) having a boiling point of 200 ° C. or less at 1 atm that dissolves insoluble components in a THF / Cy mixed solvent (mass ratio = 1/2). A solution dissolved in propylene glycol-1-monomethyl ether-2-acetate). At this time, the solid content concentration is adjusted to 10 to 70% by mass. The resulting solution can be applied to any substrate that is resistant to the solution. For example, the obtained solution was coated on a commercially available polyethylene terephthalate (PET) film (thickness 16 μm) with a bar coater, dried in a hot air oven at 100 ° C. for 10 minutes, and a THF / Cy mixed solvent (mass ratio = A layered product having a thickness of 2 μm consisting of insoluble components in 1/2) is obtained. For refractive index measurement, a prism made by Metricon, Prism Coupler Model 2010 / M, laser beam wavelength: 532 nm was used, and a layer made of a component insoluble in (THF / Cy mixed solvent (mass ratio = 1/2)) was in contact with the prism. The refractive index n2 of the component insoluble in the THF / Cy mixed solvent (mass ratio = 1/2) in the photosensitive resin composition in the present embodiment is 1.560 from the viewpoint of low moisture permeability. From the viewpoint of low-temperature developability, it is preferably 1.650 or less, more preferably in the range of 1.570 to 1.600, and in the range of 1.574 to 1.590. Is more preferable.
 また、本実施の形態における感光性樹脂組成物を構成する有機成分は、テトラヒドロフラン(THF)/シクロヘキサン(Cy)混合溶媒の質量比率を1/1.3とした時に、不溶な成分の分子量(M)が20000分子量(M)が5000以上の高分子量成分となる。この不溶成分に関しては、(i)酸価A1が100mgKOH/g以上であり、及び/又は(ii)屈折率n1が前記n2よりも0.005以上小さい、事が好ましい。また、酸価A1は、200mgKOH/g以下であることが好ましい。
 感光性樹脂組成物又はその層から、THFに可溶で、かつTHF/Cy混合溶媒(質量比=1/1.3)に不溶な成分を得る方法について説明する。
 まず、100mLの三角フラスコ中にサンプルとして感光性樹脂組成物又はその層を10.0g精秤し、これに39.1gのテトラヒドロフラン(THF)を添加してから容器を密閉して、23℃で1時間に亘ってスターラーで攪拌する。不溶分をろ過で取り除いた後、このTHF溶液に50.9gのシクロヘキサン(Cy)を10分間掛けて滴下し、23℃で1時間攪拌する。懸濁した溶液を遠心分離器により固液分離し、50gのシクロヘキサンで不溶分を3回洗浄し、40℃で6時間真空乾燥を行うことでTHF/Cy混合溶媒(質量比=1/1.3)に不溶な成分が得られる。
 THFに可溶で、かつTHF/Cy混合溶媒(質量比=1/1.3)に不溶な成分の酸価A1、及び屈折率n1の測定は、前述の酸価A2、及び屈折率n2の測定方法と同様の方法で行う事ができる。
Further, the organic component constituting the photosensitive resin composition in the present embodiment has a molecular weight (M) of an insoluble component when the mass ratio of tetrahydrofuran (THF) / cyclohexane (Cy) mixed solvent is 1 / 1.3. ) Is a high molecular weight component having a molecular weight (M) of 20,000 or more. With respect to this insoluble component, it is preferable that (i) the acid value A1 is 100 mgKOH / g or more and / or (ii) the refractive index n1 is 0.005 or less smaller than the n2. Moreover, it is preferable that acid value A1 is 200 mgKOH / g or less.
A method for obtaining a component soluble in THF and insoluble in a THF / Cy mixed solvent (mass ratio = 1 / 1.3) from the photosensitive resin composition or a layer thereof will be described.
First, 10.0 g of the photosensitive resin composition or its layer was precisely weighed as a sample in a 100 mL Erlenmeyer flask, 39.1 g of tetrahydrofuran (THF) was added thereto, the container was sealed, Stir with a stirrer for 1 hour. After removing insolubles by filtration, 50.9 g of cyclohexane (Cy) is added dropwise to the THF solution over 10 minutes, and the mixture is stirred at 23 ° C. for 1 hour. The suspended solution was subjected to solid-liquid separation with a centrifugal separator, the insoluble matter was washed three times with 50 g of cyclohexane, and vacuum-dried at 40 ° C. for 6 hours, whereby a THF / Cy mixed solvent (mass ratio = 1/1. A component insoluble in 3) is obtained.
The acid value A1 and the refractive index n1 of the component soluble in THF and insoluble in the THF / Cy mixed solvent (mass ratio = 1 / 1.3) were measured using the above-mentioned acid value A2 and refractive index n2. It can be performed by the same method as the measurement method.
 本実施の形態における感光性樹脂組成物において、低温現像性と低透湿度を両立するためには、下記(1)~(5):
 (1)GPCの微分分子量分布曲線におけるS≧50kが1.0~9.0%の範囲内であり、
 (2)THF/Cy混合溶媒(質量比=1/2)に不溶な成分の酸価A2(mgKOH/g)が95以上であり、
 (3)THF/Cy混合溶媒(質量比=1/2)に不溶な成分の屈折率n2が1.560以上であり、
 (4)THF/Cy混合溶媒(質量比=1/1.3)に不溶な成分の酸価A1が100mgKOH/g以上であり、
 (5)THF/Cy混合溶媒(質量比=1/1.3)に不溶な成分の屈折率n1が前記n2よりも0.005以上小さい、
 ことをいずれも満たすことが好ましい。
In the photosensitive resin composition in the present embodiment, in order to achieve both low temperature developability and low moisture permeability, the following (1) to (5):
(1) S ≧ 50k in the differential molecular weight distribution curve of GPC is in the range of 1.0 to 9.0%,
(2) The acid value A2 (mgKOH / g) of the component insoluble in the THF / Cy mixed solvent (mass ratio = 1/2) is 95 or more,
(3) The refractive index n2 of the component insoluble in the THF / Cy mixed solvent (mass ratio = 1/2) is 1.560 or more,
(4) The acid value A1 of the component insoluble in the THF / Cy mixed solvent (mass ratio = 1 / 1.3) is 100 mgKOH / g or more,
(5) The refractive index n1 of the component insoluble in the THF / Cy mixed solvent (mass ratio = 1 / 1.3) is 0.005 or more smaller than the n2.
It is preferable to satisfy all of these.
 本実施の形態における感光性樹脂組成物において、転写フィルムとしてのタック性と低温ラミネート性を両立するためには、下記(1)と(2):
  (1)GPCの微分分子量分布曲線におけるS≧50kが1.0~9.0%の範囲内であり、
  (2)GPCの微分分子量分布曲線において、分子量M=20000と分子量M=5000のdw/d(logM)値の比;R20k/5kが、0.20~1.50の範囲内であることをいずれも満たす。
In the photosensitive resin composition in the present embodiment, the following (1) and (2):
(1) S ≧ 50k in the differential molecular weight distribution curve of GPC is in the range of 1.0 to 9.0%,
(2) In the differential molecular weight distribution curve of GPC, the ratio of the dw / d (log M) value between the molecular weight M = 20000 and the molecular weight M = 5000; R 20k / 5k is in the range of 0.20 to 1.50. Both are satisfied.
 本実施の形態における感光性樹脂組成物において、導体基材との密着性に優れるためには、下記(1)と(2):
  (1)GPCの微分分子量分布曲線におけるS≧50kが0.2~9.0%の範囲内であり、
  (2)THF/Cy混合溶媒(質量比=1/2)に不溶な成分の酸価A2(mgKOH/g)が70以上であることをいずれも満たす。
In the photosensitive resin composition in the present embodiment, the following (1) and (2):
(1) S ≧ 50k in the differential molecular weight distribution curve of GPC is in the range of 0.2 to 9.0%,
(2) All satisfy | fill that acid value A2 (mgKOH / g) of the component insoluble in a THF / Cy mixed solvent (mass ratio = 1/2) is 70 or more.
 本実施の形態における感光性樹脂組成物の水酸基価(mgKOH/g)は20以下であることが好ましく、15.0以下であることがより好ましい。感光性樹脂組成物の水酸基価が20以下であることで、感光性樹脂組成物の硬化物の透湿度を下げることができるため、導体の防錆性が向上する。
 本実施の形態における感光性樹脂組成物の屈折率が1.550以上であることが好ましい。また、感光性樹脂組成物層の屈折率が1.630以下であることが好ましい。
The hydroxyl value (mgKOH / g) of the photosensitive resin composition in the present embodiment is preferably 20 or less, and more preferably 15.0 or less. Since the moisture permeability of the hardened | cured material of the photosensitive resin composition can be reduced because the hydroxyl value of the photosensitive resin composition is 20 or less, the rust prevention property of a conductor improves.
The refractive index of the photosensitive resin composition in the present embodiment is preferably 1.550 or more. Moreover, it is preferable that the refractive index of the photosensitive resin composition layer is 1.630 or less.
<転写フィルム>
 本実施の形態に係る感光性樹脂層は、厚みが40μm以下であり、かつ、感光性樹脂層の波長365nmでの吸光度が、感光性樹脂層の厚み1μm当たり0.01~0.05であることが好ましい。感光性樹脂層の膜厚が厚過ぎると柔軟性が悪化するため、感光性樹脂層の厚みは40μm以下が好ましく、配線の凹凸に追従するという観点、及び防錆性を確保するという観点から、3μm以上が好ましい。
<Transfer film>
The photosensitive resin layer according to the present embodiment has a thickness of 40 μm or less, and the absorbance at a wavelength of 365 nm of the photosensitive resin layer is 0.01 to 0.05 per 1 μm of the thickness of the photosensitive resin layer. It is preferable. Since the flexibility deteriorates if the film thickness of the photosensitive resin layer is too thick, the thickness of the photosensitive resin layer is preferably 40 μm or less, from the viewpoint of following the unevenness of the wiring, and from the viewpoint of ensuring rust prevention, 3 μm or more is preferable.
 転写フィルムは、感光性樹脂組成物より成る感光性樹脂層と、支持フィルムとを含む。具体的には、支持フィルム上に、上述の感光性樹脂組成物より成る層が積層されている。転写フィルムは、必要により、感光性樹脂層の支持フィルム側とは反対側の表面に保護フィルムを有してもよい。 The transfer film includes a photosensitive resin layer made of a photosensitive resin composition and a support film. Specifically, a layer made of the above-described photosensitive resin composition is laminated on the support film. If necessary, the transfer film may have a protective film on the surface of the photosensitive resin layer opposite to the support film side.
 本実施の形態に用いられる支持フィルムとしては、露光光源から放射される光を透過する透明なものが望ましい。このような支持フィルムとしては、例えば、ポリエチレンテレフタレートフィルム、ポリビニルアルコールフィルム、ポリ塩化ビニルフィルム、塩化ビニル共重合体フィルム、ポリ塩化ビニリデンフィルム、塩化ビニリデン共重合体フィルム、ポリメタクリル酸メチル共重合体フィルム、ポリスチレンフィルム、ポリアクリロニトリルフィルム、スチレン共重合体フィルム、ポリアミドフィルム、セルロース及びその誘導体から成るフィルム等が挙げられる。これらのフィルムは、必要に応じて、延伸されたものも使用可能である。支持フィルムのヘーズは、5以下であることが好ましい。支持フィルムの厚みは、小さいほど解像性及び経済性の面で有利であるが、強度を維持するために10μm~30μmであることが好ましい。 The support film used in this embodiment is preferably a transparent film that transmits light emitted from the exposure light source. Examples of such support films include polyethylene terephthalate film, polyvinyl alcohol film, polyvinyl chloride film, vinyl chloride copolymer film, polyvinylidene chloride film, vinylidene chloride copolymer film, and polymethyl methacrylate copolymer film. , Polystyrene film, polyacrylonitrile film, styrene copolymer film, polyamide film, film made of cellulose and derivatives thereof, and the like. These films can be stretched if necessary. The haze of the support film is preferably 5 or less. The smaller the thickness of the support film, the more advantageous in terms of resolution and economy. However, in order to maintain the strength, the thickness is preferably 10 μm to 30 μm.
 転写フィルムのために用いられる保護フィルムの重要な特性は、感光性樹脂層との密着力が、支持フィルムよりも保護フィルムの方が充分小さく、容易に剥離できることである。保護層としては、例えば、ポリエチレンフィルム、ポリプロピレンフィルム等が好ましく使用できる。 An important characteristic of the protective film used for the transfer film is that the protective film is sufficiently smaller in adhesion to the photosensitive resin layer than the support film and can be easily peeled off. As a protective layer, a polyethylene film, a polypropylene film, etc. can be used preferably, for example.
 転写フィルムの作製方法は、支持体(例えば、支持フィルム)上に塗布液を塗布して、乾燥する工程を含み、更に必要に応じて感光性樹脂層上に保護フィルムをラミネートする工程を含む。塗布液は、上記で説明された感光性樹脂組成物を溶媒に均一に溶解することにより得られることができる。 The production method of the transfer film includes a step of applying a coating liquid on a support (for example, a support film) and drying, and further includes a step of laminating a protective film on the photosensitive resin layer as necessary. The coating liquid can be obtained by uniformly dissolving the photosensitive resin composition described above in a solvent.
 感光性樹脂組成物を溶解する溶剤としては、例えば、メチルエチルケトン(MEK)に代表されるケトン類;メタノール、エタノール又はイソプロパノールに代表されるアルコール類等が挙げられる。
 溶剤は、支持体上に塗布する感光性樹脂組成物の溶液の粘度が、25℃で10mPa・s~800mPa・sとなるように、感光性樹脂組成物に添加することが好ましい。
Examples of the solvent that dissolves the photosensitive resin composition include ketones typified by methyl ethyl ketone (MEK); alcohols typified by methanol, ethanol, or isopropanol.
The solvent is preferably added to the photosensitive resin composition so that the viscosity of the solution of the photosensitive resin composition applied onto the support is 10 mPa · s to 800 mPa · s at 25 ° C.
 塗布方法としては、例えば、ドクターブレードコーティング法、マイヤーバーコーティング法、ロールコーティング法、スクリーンコーティング法、スピナーコーティング法、インクジェットコーティング法、スプレーコーティング法、ディップコーティング法、グラビアコーティング法、カーテンコーティング法、ダイコーティング法等が挙げられる。塗布液の乾燥条件に特に制限はないが、乾燥温度は、50℃~130℃であることが好ましく、乾燥時間は、30秒~30分であることが好ましい。 Application methods include, for example, doctor blade coating method, Meyer bar coating method, roll coating method, screen coating method, spinner coating method, inkjet coating method, spray coating method, dip coating method, gravure coating method, curtain coating method, die coating Examples thereof include a coating method. There are no particular restrictions on the drying conditions of the coating solution, but the drying temperature is preferably 50 ° C. to 130 ° C., and the drying time is preferably 30 seconds to 30 minutes.
 本実施の形態では、転写フィルムは、導体部の保護膜を形成するために使用されることが好ましく、その場合には、導体部は、銅電極、ニッケル、パラジウム、銀、チタン、モリブデン等と銅との合金電極又は透明電極であることがより好ましい。より詳細には、転写フィルムは、タッチパネル(タッチセンサ又はフォースセンサ)の額縁領域における引き出し配線のための保護膜、センシング領域における銅電極のための保護膜として、使用されることができる。 In the present embodiment, the transfer film is preferably used to form a protective film for the conductor portion. In this case, the conductor portion is made of a copper electrode, nickel, palladium, silver, titanium, molybdenum, and the like. An alloy electrode with copper or a transparent electrode is more preferable. More specifically, the transfer film can be used as a protective film for the lead-out wiring in the frame area of the touch panel (touch sensor or force sensor) and as a protective film for the copper electrode in the sensing area.
[樹脂パターン、硬化膜パターン及びそれらの製造方法]
 転写フィルムを用いた樹脂パターンの形成は、以下の工程:
  基材上に、上記で説明された転写フィルムをラミネートするラミネート工程;
  該ラミネートされた感光性樹脂積積層体に露光する露光工程;及び
  該露光された転写フィルムを現像する現像工程;
を含む樹脂パターンの製造方法によって行うことができる。更に、樹脂パターンを導体部の保護膜として用いるために、現像工程後に、樹脂パターンを後露光処理及び/又は加熱処理に供して、硬化膜パターンを形成する工程を樹脂パターンの製造方法として含むことが好ましい。
[Resin pattern, cured film pattern and method for producing them]
Formation of the resin pattern using the transfer film includes the following steps:
A laminating step of laminating the transfer film described above on a substrate;
An exposure step for exposing the laminated photosensitive resin laminate; and a development step for developing the exposed transfer film;
It can carry out by the manufacturing method of the resin pattern containing this. Furthermore, in order to use the resin pattern as a protective film for the conductor part, a process for forming a cured film pattern by subjecting the resin pattern to post-exposure treatment and / or heat treatment after the development step is included as a method for producing the resin pattern. Is preferred.
 以下、具体的な方法の一例を示す。基材としては、銅張積層板に銅配線が形成された基材、ガラス基材、透明樹脂基材に透明電極(例えば、ITO、Agナノワイヤー基材等)、又は金属電極(例えば、Cu、Al、Ag、Ni、Mo及びこれらの少なくとも2種の合金等)が形成されたタッチパネル基材又はタッチセンサ基材(例えばフォースセンサ等)等を使用することができる。フレキシブル銅張積層板、タッチパネル電極形成用基材、又はタッチセンサ電極形成用基材は、フレキシブルなフィルム上に、銅層若しくは透明電極、又は金属電極の原料となる金属層が形成されて成る基材である。 Hereafter, an example of a specific method is shown. As the base material, a base material in which copper wiring is formed on a copper clad laminate, a glass base material, a transparent resin base material with a transparent electrode (for example, ITO, Ag nanowire base material, etc.), or a metal electrode (for example, Cu , Al, Ag, Ni, Mo, and at least two kinds of alloys thereof, or the like can be used. A touch panel substrate or a touch sensor substrate (for example, a force sensor) can be used. A flexible copper-clad laminate, a touch panel electrode forming substrate, or a touch sensor electrode forming substrate is formed by forming a copper layer, a transparent electrode, or a metal layer as a raw material of a metal electrode on a flexible film. It is a material.
 上記フィルムとしては、例えば、ポリイミド、ポリエステル(PET、PEN)、シクロオレフィンポリマー(COP)等のフィルム原料から成るフィルムが挙げられる。上記フィルムの厚みは、10μm~100μmであることが好ましい。また、上記の銅としては、純銅の他に、銅を主成分として含有する合金を使用することができる。ここで「主成分」とは、合金の少なくとも50質量%が銅であることをいう。合金金属としては、例えばニッケル、パラジウム、銀、チタン、モリブデン等と銅との合金を挙げることができる。
 銅層の厚みは50nm~2μmであることが好ましい。銅層の均一性の観点から、銅層の厚みは100nm以上であることがより好ましい。
As said film, the film which consists of film raw materials, such as a polyimide, polyester (PET, PEN), a cycloolefin polymer (COP), is mentioned, for example. The thickness of the film is preferably 10 μm to 100 μm. Moreover, as said copper, the alloy containing copper as a main component other than pure copper can be used. Here, the “main component” means that at least 50% by mass of the alloy is copper. As the alloy metal, for example, an alloy of nickel, palladium, silver, titanium, molybdenum or the like and copper can be cited.
The thickness of the copper layer is preferably 50 nm to 2 μm. From the viewpoint of the uniformity of the copper layer, the thickness of the copper layer is more preferably 100 nm or more.
 上記のような基材に対して転写フィルムをラミネートする工程を行うことにより、基材の銅層上に感光性樹脂層を形成する。転写フィルムが保護層を有する場合には、好ましくは該保護層を剥離した後、ラミネーターで転写フィルムを基材表面に加熱圧着して積層する。この場合、転写フィルムを基材表面の片面だけに積層してもよいし、両面に積層してもよい。加熱温度は、一般に約40℃~160℃である。加熱圧着は、二連のロールを備えた二段式ラミネーターを使用して行われてもよいし、転写フィルムと基材とを複数回に亘って繰り返してロールに通すことにより行われてもよい。また、真空ロールラミネーターを用いると、基材上の配線等による凹凸への保護膜の追従性が良好であり、転写フィルムと基材の間にエアーが混入する欠点を防ぐことが出来る。一方で、真空ロールラミネーターを用いた場合、ラジカル重合を抑制する酸素濃度が著しく低いため、光重合開始剤が開裂し、暗反応が進行し易くなる。従って、ロールの温度は、40℃~100℃が好ましく、40℃~80℃がより好ましい。 A photosensitive resin layer is formed on the copper layer of the substrate by performing a process of laminating a transfer film on the substrate as described above. When the transfer film has a protective layer, the protective layer is preferably peeled off, and then the transfer film is heat-pressed and laminated on the substrate surface with a laminator. In this case, the transfer film may be laminated only on one side of the substrate surface, or may be laminated on both sides. The heating temperature is generally about 40 ° C to 160 ° C. The thermocompression bonding may be performed using a two-stage laminator provided with two rolls, or may be performed by repeatedly passing the transfer film and the substrate through the roll a plurality of times. . In addition, when a vacuum roll laminator is used, the followability of the protective film to unevenness due to wiring on the substrate is good, and the disadvantage that air is mixed between the transfer film and the substrate can be prevented. On the other hand, when a vacuum roll laminator is used, since the oxygen concentration that suppresses radical polymerization is extremely low, the photopolymerization initiator is cleaved and the dark reaction easily proceeds. Accordingly, the roll temperature is preferably 40 ° C. to 100 ° C., more preferably 40 ° C. to 80 ° C.
 次に、露光機を用いて露光工程を行う。必要ならば転写フィルムから支持フィルムを剥離し、フォトマスクを通して活性光により感光性樹脂層を露光する。露光量は、光源照度及び露光時間により決定される。露光量は、光量計を用いて測定してもよい。露光機としては、超高圧水銀灯を光源とした散乱光露光機、平行度を調整した平行光露光機、マスクとワークの間にギャップを設けるプロキシミティ露光機等を挙げることができる。更に、露光機としては、マスクと画像のサイズ比が1:1の投影型露光機、高照度のステッパー(登録商標)といわれる縮小投影露光機、又はミラープロジェクションアライナ(登録商標)と呼ばれる凹面鏡を利用した露光機を挙げることができる。 Next, an exposure process is performed using an exposure machine. If necessary, the support film is peeled off from the transfer film, and the photosensitive resin layer is exposed with active light through a photomask. The exposure amount is determined by the light source illuminance and the exposure time. The exposure amount may be measured using a light meter. Examples of the exposure machine include a scattered light exposure machine using an ultra-high pressure mercury lamp as a light source, a parallel light exposure machine with adjusted parallelism, and a proximity exposure machine that provides a gap between a mask and a workpiece. Further, as an exposure machine, a projection type exposure machine with a mask to image size ratio of 1: 1, a reduction projection exposure machine called a high illumination stepper (registered trademark), or a concave mirror called a mirror projection aligner (registered trademark) is used. The used exposure machine can be mentioned.
 また、露光工程においては、直接描画露光方法を用いてもよい。直接描画露光とは、フォトマスクを使用せず、基板上に直接描画して露光する方式である。光源としては、例えば、波長350nm~410nmの固体レーザー、半導体レーザー又は超高圧水銀灯が用いられる。描画パターンはコンピューターによって制御される。この場合の露光量は、光源照度と基板の移動速度によって決定される。 In the exposure process, a direct drawing exposure method may be used. Direct drawing exposure is a method in which exposure is performed by drawing directly on a substrate without using a photomask. As the light source, for example, a solid laser having a wavelength of 350 nm to 410 nm, a semiconductor laser, or an ultrahigh pressure mercury lamp is used. The drawing pattern is controlled by a computer. The exposure amount in this case is determined by the light source illuminance and the moving speed of the substrate.
 次に、現像装置を用いて現像工程を行う。露光後、感光性樹脂層上に支持フィルムがある場合には、必要に応じて支持フィルムを除き、続いてアルカリ水溶液の現像液を用いて未露光部を現像除去して、樹脂パターンを得る。アルカリ水溶液としては、NaCO又はKCOの水溶液(アルカリ水溶液)を用いることが好ましい。アルカリ水溶液は、感光性樹脂層の特性に合わせて適宜選択されるが、約0.2質量%~2質量%の濃度、約20℃~40℃のNaCO水溶液が一般的である。現像液の温度が高い場合、臭気対策としての排気等による陰圧環境下では水分が揮発し易くなり、経時で現像液が濃縮され、安定生産性が損なわれる傾向がある。そのため、現像液温度は30℃未満であることが好ましい。また、アルカリ水溶液中には、表面活性剤、消泡剤、現像を促進させるための少量の有機溶剤等を混入させてもよい。基材への影響を考慮して、テトラメチルアンモニウムヒドロキシド(TMAH)水溶液等のアミン系アルカリ水溶液を用いることもできる。現像速度に応じて、水溶液中のアルカリ化合物の濃度を適宜選択することができる。現像液の臭気が少なく、取扱い性に優れ、かつ、管理及び後処理が簡便であるという観点から、特に1質量%、25℃~30℃のNaCO水溶液が好ましい。現像方法としては、アルカリ水スプレー、シャワー、揺動浸漬、ブラッシング、スクラッピング等の既知の方法が挙げられる。 Next, a developing process is performed using a developing device. After exposure, when there is a support film on the photosensitive resin layer, the support film is removed as necessary, and then the unexposed portion is developed and removed using a developer of an alkaline aqueous solution to obtain a resin pattern. As the alkaline aqueous solution, an aqueous solution (alkaline aqueous solution) of Na 2 CO 3 or K 2 CO 3 is preferably used. The alkaline aqueous solution is appropriately selected according to the characteristics of the photosensitive resin layer, but a Na 2 CO 3 aqueous solution having a concentration of about 0.2% by mass to 2% by mass and about 20 ° C. to 40 ° C. is generally used. When the temperature of the developer is high, moisture tends to volatilize in a negative pressure environment such as exhaust as an odor countermeasure, and the developer tends to be concentrated over time, and stable productivity tends to be impaired. Therefore, the developer temperature is preferably less than 30 ° C. Further, a surface active agent, an antifoaming agent, a small amount of an organic solvent for promoting development, and the like may be mixed in the alkaline aqueous solution. In consideration of the influence on the substrate, an amine-based alkaline aqueous solution such as a tetramethylammonium hydroxide (TMAH) aqueous solution can also be used. Depending on the developing speed, the concentration of the alkali compound in the aqueous solution can be appropriately selected. From the viewpoints of low odor of the developer, excellent handleability, and easy management and post-treatment, an aqueous solution of Na 2 CO 3 of 1% by mass and 25 ° C. to 30 ° C. is particularly preferable. Examples of the developing method include known methods such as alkaline water spraying, showering, rocking immersion, brushing, and scraping.
 現像後、樹脂パターンに残存したアルカリ水溶液の塩基を、有機酸、無機酸又はこれらの酸水溶液を用いて、スプレー、揺動浸漬、ブラッシング、スクラッピング等の既知の方法により酸処理(中和処理)することができる。更に、酸処理(中和処理)の後、水洗する工程を行うこともできる。 After development, the base of the alkaline aqueous solution remaining in the resin pattern is treated with an acid treatment (neutralization treatment) using known methods such as spraying, rocking immersion, brushing, and scraping using an organic acid, an inorganic acid or an aqueous acid solution thereof. )can do. Furthermore, after the acid treatment (neutralization treatment), a step of washing with water can be performed.
 上記の各工程を経て樹脂パターンを得ることができるが、更に後露光工程及び/又は加熱工程を実施してもよい。後露光工程及び/又は加熱工程を実施することにより、更に防錆性が向上する。後露光処理での露光量としては、200mJ/cm~1,000mJ/cmが好ましく、加熱工程では40℃~200℃での処理を行うことが好ましく、製造プロセスの観点から、加熱処理時間は60分以下が好ましい。加熱処理の方式としては、熱風、赤外線、遠赤外線等の適宜の方式の加熱炉を用いることができ、加熱処理の雰囲気としては、N雰囲気下、又はN/O雰囲気下が挙げられる。 Although a resin pattern can be obtained through each of the above steps, a post-exposure step and / or a heating step may be further performed. By performing the post-exposure step and / or the heating step, the rust prevention property is further improved. The exposure amount in the post exposure treatment is preferably 200mJ / cm 2 ~ 1,000mJ / cm 2, it is preferable to carry out the treatment at 40 ° C. ~ 200 ° C. The heating step, from the viewpoint of the manufacturing process, heat treatment time Is preferably 60 minutes or less. As a heat treatment method, a heating furnace of an appropriate method such as hot air, infrared rays, far infrared rays, or the like can be used. As an atmosphere of the heat treatment, an N 2 atmosphere or an N 2 / O 2 atmosphere can be given. .
 本実施の形態によれば、転写フィルムのタック性、低温ラミネート性、低温現像性及び硬化膜の透湿度及び導体基材との密着性がいずれも良好であり、配線、電極等の導体部の保護に好適な感光性樹脂組成物及び転写フィルムを提供し得る。このような転写フィルムは、例えば、タッチパネル、タッチセンサ又はフォースセンサ用途の配線、電極等の保護膜又はプリント配線板のソルダーレジストとして好適である。 According to this embodiment, the transfer film has good tack, low-temperature laminating properties, low-temperature developability, moisture permeability of the cured film, and adhesion to the conductor base material, and the conductor parts such as wiring and electrodes A photosensitive resin composition and a transfer film suitable for protection can be provided. Such a transfer film is suitable as a solder resist for a protective film such as a wiring for a touch panel, a touch sensor or a force sensor, an electrode, or a printed wiring board.
[タッチパネル表示装置、タッチセンサ又はフォースセンサを有する装置]
 本実施の形態に係る転写フィルムの硬化膜をタッチパネル用基材に形成することで、転写フィルムの硬化膜を有するタッチパネル表示装置、及び転写フィルムの硬化膜とタッチセンサ及び/又はフォースセンサとを有する装置を提供することができる。
 タッチパネル用基材としては、一般に、タッチパネル、タッチセンサ又はフォースセンサのために用いられる基材、例えば、ガラス板、プラスチック板、プラスチックフィルム、セラミック板等が挙げられる。この基材上には、保護膜を形成する対象となるITO、Cu、Al、Ag、Ni、Mo及びこれらの少なくとも2種を含む合金等のタッチパネル用電極又は金属配線が設けられ、基材と電極との間に絶縁層が設けられていてもよい。
[Device with touch panel display, touch sensor or force sensor]
By forming the cured film of the transfer film according to the present embodiment on the touch panel substrate, the touch panel display device having the cured film of the transfer film, and the cured film of the transfer film and the touch sensor and / or the force sensor are included. An apparatus can be provided.
Generally as a base material for touch panels, the base material used for a touch panel, a touch sensor, or a force sensor, for example, a glass plate, a plastic plate, a plastic film, a ceramic plate etc., is mentioned. On this base material, electrodes for touch panel such as ITO, Cu, Al, Ag, Ni, Mo and an alloy containing at least two of them, or metal wiring, which is a target for forming a protective film, are provided. An insulating layer may be provided between the electrodes.
 タッチパネル用電極を有するタッチパネル用基材は、例えば、以下の手順で得ることができる。ポリエステル、COPフィルム等のタッチパネル用基材上に、ITO、Cuの順にスパッタ法により金属膜を形成した後、金属膜上にエッチング用感光性フィルムを貼り付け、所望のレジストパターンを形成し、不要なCuを塩化鉄水溶液等のエッチング液で除去し、更にレジストパターンを剥離・除去する。 The touch panel substrate having the touch panel electrode can be obtained, for example, by the following procedure. After a metal film is formed on a touch panel substrate such as polyester or COP film by sputtering in the order of ITO and Cu, an etching photosensitive film is pasted on the metal film to form a desired resist pattern, which is unnecessary Cu is removed with an etching solution such as an iron chloride aqueous solution, and the resist pattern is further removed and removed.
 タッチパネル用基材上に保護膜としての硬化膜を形成する方法は、本実施の形態に係る転写フィルムをタッチパネル用基材上にラミネートする第1工程、保護膜の所定部分を活性光線の照射により硬化させる第2工程、保護膜の所定部分以外(保護膜の活性光線が照射されていない部分)を除去して、パターニングされた保護膜の硬化物を形成する第3工程、及びパターニングされた保護膜を露光及び/又は熱処理する第4工程を、この順に含むことが好ましい。 The method for forming a cured film as a protective film on a touch panel substrate is a first step of laminating the transfer film according to the present embodiment on the touch panel substrate, and a predetermined portion of the protective film is irradiated with actinic rays. A second step of curing, a third step of forming a cured product of the patterned protective film by removing a portion other than a predetermined portion of the protective film (a portion of the protective film not irradiated with active light), and a patterned protection It is preferable to include the 4th process which exposes and / or heat-processes a film | membrane in this order.
 上述のように転写フィルムの硬化膜パターンを有するタッチパネル用基材を作製することによって、転写フィルムの硬化膜を有するタッチパネル表示装置、又は転写フィルムの硬化膜とタッチセンサ及び/又はフォースセンサとを有する装置を好適に提供することができる。 By producing a touch panel substrate having a cured film pattern of a transfer film as described above, a touch panel display device having a cured film of the transfer film, or a cured film of the transfer film and a touch sensor and / or a force sensor is provided. An apparatus can be suitably provided.
 以下に、本発明を実施例に基づいて具体的に説明するが、本発明はこれらに限定されるものではない。 Hereinafter, the present invention will be specifically described based on examples, but the present invention is not limited thereto.
 最初に、(A)アルカリ可溶性樹脂の作製について説明する。
<アクリル系共重合体(A-1)の作製>
 撹拌機、還流冷却器、不活性ガス導入口及び温度計を備えたフラスコに、メチルエチルケトンを100質量%仕込み、窒素ガス雰囲気下で75℃に昇温した。メタクリル酸(MAA)20質量%、メタクリル酸メチル(MMA)25質量%、スチレン(St)55質量%、及びアゾ系重合開始剤を、2時間掛けて均一に滴下した。滴下後、75℃で10時間反応系の撹拌を続け、反応終了後に、メチルエチルケトンを用いて、得られた樹脂溶液を希釈し、固形分酸価が130mgKOH/g、重量平均分子量が約25,000であるアクリル系共重合体溶液(固形分43質量%)(A-1)を得た。
First, (A) Preparation of alkali-soluble resin will be described.
<Preparation of acrylic copolymer (A-1)>
A flask equipped with a stirrer, a reflux condenser, an inert gas inlet and a thermometer was charged with 100% by mass of methyl ethyl ketone and heated to 75 ° C. in a nitrogen gas atmosphere. Methacrylic acid (MAA) 20% by mass, methyl methacrylate (MMA) 25% by mass, styrene (St) 55% by mass, and an azo polymerization initiator were uniformly added dropwise over 2 hours. After the dropwise addition, the reaction system was continuously stirred at 75 ° C. for 10 hours. After completion of the reaction, the obtained resin solution was diluted with methyl ethyl ketone, the solid content acid value was 130 mgKOH / g, and the weight average molecular weight was about 25,000. An acrylic copolymer solution (solid content: 43% by mass) (A-1) was obtained.
<アクリル系共重合体(A-2)の作製>
 上記アクリル系共重合体(A-1)と同様の方法で、メタクリル酸20質量%、メタクリル酸メチル25質量%、スチレン(St)55質量%を用いて、固形分酸価が130mgKOH/g、重量平均分子量が約13,000であるアクリル系共重合体溶液(固形分41質量%)(A-2)を得た。
<Preparation of acrylic copolymer (A-2)>
In the same manner as the acrylic copolymer (A-1), 20% by mass of methacrylic acid, 25% by mass of methyl methacrylate and 55% by mass of styrene (St) were used, and the solid content acid value was 130 mgKOH / g, An acrylic copolymer solution (solid content 41% by mass) (A-2) having a weight average molecular weight of about 13,000 was obtained.
<アクリル系共重合体(A-3)の作製>
 上記アクリル系共重合体(A-1)と同様の方法で、メタクリル酸22.5質量%、スチレン60質量%、メタクリル酸メチル12.5質量%、アクリル酸ブチル(BA)5質量%を用いて、固形分酸価が147mgKOH/g、重量平均分子量が約22,500であるアクリル系共重合体溶液(固形分50質量%)(A-3)を得た。
<Preparation of acrylic copolymer (A-3)>
In the same manner as the acrylic copolymer (A-1), 22.5% by mass of methacrylic acid, 60% by mass of styrene, 12.5% by mass of methyl methacrylate, and 5% by mass of butyl acrylate (BA) were used. As a result, an acrylic copolymer solution (solid content 50 mass%) (A-3) having a solid content acid value of 147 mgKOH / g and a weight average molecular weight of about 22,500 was obtained.
<アクリル系共重合体(A’-1)の作製>
 上記アクリル系共重合体(A-1)と同様の方法で、メタクリル酸20質量%、メタクリル酸メチル25質量%、スチレン55質量%を用いて、固形分酸価が130mgKOH/g、重量平均分子量が約35,000であるアクリル系共重合体溶液(固形分50質量%)(A’-1)を得た。
<Preparation of acrylic copolymer (A'-1)>
Using the same method as the above acrylic copolymer (A-1), using 20% by mass of methacrylic acid, 25% by mass of methyl methacrylate and 55% by mass of styrene, the solid content acid value is 130 mgKOH / g, and the weight average molecular weight. An acrylic copolymer solution (solid content 50% by mass) (A′-1) having an A of about 35,000 was obtained.
<アクリル系共重合体溶液(A’-2)の作製>
 上記アクリル系共重合体(A-1)と同様の方法で、メタクリル酸29質量%、メタクリル酸メチル19質量%、スチレン52質量%を用いて、固形分酸価が189mgKOH/g、重量平均分子量が約50,000であるアクリル系共重合体溶液(固形分49質量%)(A’-2)を得た。
<Preparation of acrylic copolymer solution (A'-2)>
Using the same method as the acrylic copolymer (A-1), using 29% by mass of methacrylic acid, 19% by mass of methyl methacrylate, and 52% by mass of styrene, the solid content acid value was 189 mgKOH / g, and the weight average molecular weight An acrylic copolymer solution (solid content: 49 mass%) (A′-2) having an A of about 50,000 was obtained.
<アクリル系共重合体溶液(A’-3)の作製>
 上記アクリル系共重合体(A-1)と同様の方法で、メタクリル酸15質量%、メタクリル酸ベンジル(BzMA)75質量%、アクリル酸ヒドロキシエチル(HEA)10質量%を用いて、固形分酸価が98mgKOH/g、固形分水酸基価が65mgKOH/g、重量平均分子量が約20,000であるアクリル系共重合体溶液(固形分50質量%)(A’-3)を得た。
<Preparation of acrylic copolymer solution (A'-3)>
In the same manner as for the acrylic copolymer (A-1), solid acid was obtained using 15% by mass of methacrylic acid, 75% by mass of benzyl methacrylate (BzMA), and 10% by mass of hydroxyethyl acrylate (HEA). An acrylic copolymer solution (solid content 50 mass%) (A′-3) having a value of 98 mg KOH / g, a solid content hydroxyl value of 65 mg KOH / g, and a weight average molecular weight of about 20,000 was obtained.
 得られたアクリル共重合体の共重合組成、重量平均分子量、酸価、及び水酸基価について表1に示す。なお、アクリル系共重合体の重量平均分子量、酸価、及び水酸基価の測定は、上記の<(A)アルカリ可溶性樹脂>の詳細に記載されている方法で行った。 The copolymer composition, weight average molecular weight, acid value, and hydroxyl value of the resulting acrylic copolymer are shown in Table 1. In addition, the measurement of the weight average molecular weight of an acrylic copolymer, an acid value, and a hydroxyl value was performed by the method described in the detail of said <(A) alkali-soluble resin>.
<(B)成分について>
 (B)カルボキシル基及びエチレン性不飽和基を含有する化合物として、市販されている下記の溶液を使用した。
 B-1 ビフェニル骨格を有するエポキシアクリレートの酸変性物
 B-2 ビフェニル骨格を有するエポキシアクリレートの酸変性物
 B-3 フルオレニル骨格を有するエポキシアクリレートの酸変性物
 B-4 ビフェニル骨格を有するエポキシアクリレートの酸変性物
 B’-1 ビスフェノールF骨格を有するエポキシアクリレートの酸変性物
 B’-2 ウレタン骨格を有し、カルボキシル基とエチレン性不飽和基を含有する化合物
<About (B) component>
(B) As the compound containing a carboxyl group and an ethylenically unsaturated group, the following commercially available solution was used.
B-1 Acid-modified product of epoxy acrylate having biphenyl skeleton B-2 Acid-modified product of epoxy acrylate having biphenyl skeleton B-3 Acid-modified product of epoxy acrylate having fluorenyl skeleton B-4 Acid of epoxy acrylate having biphenyl skeleton Modified product B'-1 Acid modified product of epoxy acrylate having bisphenol F skeleton B'-2 Compound having urethane skeleton and containing carboxyl group and ethylenically unsaturated group
 上記のカルボキシル基及びエチレン性不飽和基を含有する化合物の重量平均分子量、酸価、及び水酸基価については表2に示す。なお、カルボキシル基及びエチレン性不飽和基を含有する化合物の重量平均分子量、酸価、水酸基価の測定は上記の<(A)アルカリ可溶性樹脂>の詳細に記載されている方法で行った。
 (B)カルボキシル基及びエチレン性不飽和基を含有する化合物の屈折率測定は下記の方法で行った。
<屈折率測定サンプル作製法>
 上記の(B)カルボキシル基及びエチレン性不飽和基を含有する化合物の溶液を支持体である16μm厚のポリエチレンテレフタレートフィルム(東レ(株)製、FB40)の表面に、ブレードコーターを用いて均一に塗布し、100℃の乾燥機中で10分間乾燥して、支持体上に5μm厚の均一な樹脂層を形成して、これを5cm×5cmにカットした。
<屈折率評価方法>
 上記方法で作製したサンプルを屈折率測定装置(Metricon社製、Prism CouplerModel2010/M)を用いて532nmのレーザー光源を用いて、サンプルの平面方向において、任意の4ヶ所、垂直方向において、任意の4ヶ所の屈折率を測定し、その平均値を算出した。屈折率測定結果を表2に示す。
 次に、実施例及び比較例の評価用転写フィルムの作製方法を説明し、更に、得られた転写フィルムについての評価方法およびその評価結果を示す。
Table 2 shows the weight average molecular weight, acid value, and hydroxyl value of the compound containing the carboxyl group and the ethylenically unsaturated group. In addition, the measurement of the weight average molecular weight of the compound containing a carboxyl group and an ethylenically unsaturated group, an acid value, and a hydroxyl value was performed by the method described in the detail of said <(A) alkali-soluble resin>.
(B) The refractive index measurement of the compound containing a carboxyl group and an ethylenically unsaturated group was performed by the following method.
<Refractive index measurement sample preparation method>
(B) A solution of a compound containing a carboxyl group and an ethylenically unsaturated group is uniformly applied to the surface of a 16 μm-thick polyethylene terephthalate film (FB40, manufactured by Toray Industries, Inc.) using a blade coater. It was applied and dried in a dryer at 100 ° C. for 10 minutes to form a uniform resin layer having a thickness of 5 μm on the support, which was cut into 5 cm × 5 cm.
<Refractive index evaluation method>
Using the 532 nm laser light source with the refractive index measuring device (Prism Coupler Model 2010 / M, manufactured by Metricon), the sample produced by the above method was used at any four locations in the plane direction of the sample, and any four in the vertical direction. The refractive index of the place was measured and the average value was computed. The refractive index measurement results are shown in Table 2.
Next, a method for producing an evaluation transfer film of Examples and Comparative Examples will be described, and further, an evaluation method for the obtained transfer film and an evaluation result thereof will be shown.
1.評価用転写フィルムの作製
 実施例及び比較例における評価用転写フィルムは、次のようにして作製した。
<転写フィルムの作製>
 下記表4~表6に示す組成に従って、各成分をそれぞれ250mlのプラスチックボトルに量り取り、固形分濃度が53質量%となるようにメチルエチルケトンを投入し、攪拌機を用いて5時間に亘って溶解・混合を行って、感光性樹脂組成物を得た。その後、感光性樹脂組成物を3μmのフィルターに通し、感光性樹脂組成物調合液(実施例1~22、及び比較例1~10)を調製した。
 感光性樹脂組成物調合液を、支持体である16μm厚のポリエチレンテレフタレートフィルム(東レ(株)製、FB40)の表面に、ブレードコーターを用いて均一に塗布し、95℃の乾燥機中で10分間乾燥して、支持体上に均一な感光性樹脂層を形成した。感光性樹脂層の厚みは8μm及び40μmとした。次いで、感光性樹脂層の表面上に、保護フィルムとして33μm厚のポリエチレンフィルム(タマポリ(株)製、GF-858)を貼り合わせることにより、評価用転写フィルムを得た。また、以下の評価結果を表4及び表5に示す。なお、表4~表6における略語で表した感光性樹脂組成物調合液中の材料成分の名称等は表1~3に示す。
1. Preparation of Evaluation Transfer Film Evaluation transfer films in Examples and Comparative Examples were prepared as follows.
<Production of transfer film>
In accordance with the composition shown in Tables 4 to 6 below, each component was weighed into a 250 ml plastic bottle, charged with methyl ethyl ketone so that the solid content concentration became 53% by mass, dissolved and stirred for 5 hours using a stirrer. Mixing was performed to obtain a photosensitive resin composition. Thereafter, the photosensitive resin composition was passed through a 3 μm filter to prepare photosensitive resin composition preparation solutions (Examples 1 to 22 and Comparative Examples 1 to 10).
The photosensitive resin composition preparation liquid was uniformly applied to the surface of a 16 μm-thick polyethylene terephthalate film (FB40, manufactured by Toray Industries, Inc.) as a support using a blade coater, and 10% in a dryer at 95 ° C. It was dried for a minute to form a uniform photosensitive resin layer on the support. The thickness of the photosensitive resin layer was 8 μm and 40 μm. Next, a transfer film for evaluation was obtained by laminating a 33 μm thick polyethylene film (manufactured by Tamapoly Co., Ltd., GF-858) as a protective film on the surface of the photosensitive resin layer. The following evaluation results are shown in Tables 4 and 5. Tables 1 to 3 show the names of the material components in the photosensitive resin composition preparations represented by abbreviations in Tables 4 to 6.
2.感光性樹脂組成物のGPC測定
 上記で得られた転写フィルムの保護フィルムを剥がし、感光性樹脂層を転写フィルムから0.30g秤取し、これをTHF20gに溶解させた。
 GPCの測定は日本分光(株)製ゲルパーミエ-ションクロマトグラフィー(GPC)を用いて下記の条件にて行い、GPC溶出曲線を求めた。
ポンプ:Gulliver、PU-1580型
カラム:昭和電工(株)製Shodex(登録商標)(KF-807、KF-806M、KF-806M、KF-802.5)4本直列
検出器:RI
カラム温度:40℃
流速:1.0mL/min
注入量:0.02mL
移動層溶媒:テトラヒドロフラン
検量線:ポリスチレン標準サンプルを用いて規定された検量線{ポリスチレン標準サンプル(昭和電工(株)製Shodex STANDARD SM-105)による検量線使用}
2. GPC measurement of photosensitive resin composition The protective film of the transfer film obtained above was peeled off, 0.30 g of the photosensitive resin layer was weighed from the transfer film, and this was dissolved in 20 g of THF.
GPC was measured using gel permeation chromatography (GPC) manufactured by JASCO Corporation under the following conditions to obtain a GPC elution curve.
Pump: Gulliver, PU-1580 type Column: Shodex (registered trademark) (KF-807, KF-806M, KF-806M, KF-802.5) manufactured by Showa Denko KK Four detectors: RI
Column temperature: 40 ° C
Flow rate: 1.0 mL / min
Injection volume: 0.02 mL
Moving bed solvent: Tetrahydrofuran calibration curve: Calibration curve defined using polystyrene standard sample {Use of calibration curve based on polystyrene standard sample (Shodex STANDARD SM-105 manufactured by Showa Denko KK)}
 GPC溶出曲線から前述の方法で微分分子量分布曲線を導き、(i)分子量M=20000と分子量M=5000のdw/d(logM)値の比;R20k/5kと、(ii)分子量M=2000以上の領域の面積を100%としたときに分子量M≧50000の領域の面積の比率;S≧50kとを算出した。実施例5の微分分子量分布曲線を図1に示す。実施例1~22と比較例1~10のR20k/5k値、及びS≧50k値を表4~表6に示す。 A differential molecular weight distribution curve is derived from the GPC elution curve by the above-described method, and (i) the ratio of the molecular weight M = 20000 to the molecular weight M = 5000 dw / d (logM) value; R 20k / 5k , and (ii) the molecular weight M = The ratio of the area of the region having a molecular weight M ≧ 50000 when the area of the region of 2000 or more is 100%; S ≧ 50k was calculated. The differential molecular weight distribution curve of Example 5 is shown in FIG. Tables 4 to 6 show R 20k / 5k values and S ≧ 50k values of Examples 1 to 22 and Comparative Examples 1 to 10.
3.感光性樹脂組成物中のTHF/Cy(質量比=1/2)不溶成分の物性測定
 上記で得られた転写フィルムの保護フィルムを剥がし、100mLの三角フラスコ中に感光性樹脂層を10.0g秤取し、これに30.0gのテトラヒドロフラン(THF)を添加してから容器を密閉して、23℃で1時間に亘ってスターラーで攪拌した。不溶分をろ過で取り除いた後、このTHF溶液に60.0gのシクロヘキサン(Cy)を10分間掛けて滴下し、23℃で1時間攪拌した。懸濁した溶液を高速遠心分離器により5000rpmで10分間、固液分離し、上澄み液をデカンテーションにより取り除いた。50gのCyで不溶分を3回洗浄し、40℃で6時間真空乾燥を行うことでTHF/Cy混合溶媒(質量比=1/2)に不溶な成分を得た。
 (1)酸価A2測定
 上記で得られた不溶成分を1.0g精秤し、これを9.0gのTHFに溶解させた。その後、自動滴定機(平沼産業(株)製「COM-555」)を用いて、0.1mol/Lの水酸化カリウムのエタノール溶液により中和滴定することにより酸価測定を行った。
 (2)屈折率n2測定
 上記で得られた不溶成分1.0gを9.0gのメチルエチルケトン/プロピレングリコール-1-モノメチルエーテル-2-アセタート(質量比2/1)混合溶媒に溶解させた。この溶液を16μm厚のポリエチレンテレフタレートフィルム(東レ(株)製、FB40)上にバーコーターで塗布し、100℃のオーブンにて10分間乾燥させ、厚み2μmの不溶成分層を得た。屈折率測定は、Metricon社製Prism Coupler(レーザー屈折率測定モデル2010、レーザー光波長:532nm)を使用し、プリズムに不溶成分層が接した状態で行った。
 なお、感光性樹脂組成物中のTHF/Cy(質量比=1/1.3)不溶成分の物性測定として、酸価A1、及び屈折率n1の測定も、前述の酸価A2、及び屈折率n2の測定方法と同様の方法で行った。
3. Physical property measurement of THF / Cy (mass ratio = 1/2) insoluble component in photosensitive resin composition The protective film of the transfer film obtained above is peeled off, and 10.0 g of the photosensitive resin layer is placed in a 100 mL Erlenmeyer flask. The sample was weighed, 30.0 g of tetrahydrofuran (THF) was added thereto, the container was sealed, and the mixture was stirred with a stirrer at 23 ° C. for 1 hour. After removing insolubles by filtration, 60.0 g of cyclohexane (Cy) was added dropwise to the THF solution over 10 minutes, and the mixture was stirred at 23 ° C. for 1 hour. The suspended solution was subjected to solid-liquid separation with a high-speed centrifuge at 5000 rpm for 10 minutes, and the supernatant was removed by decantation. The insoluble component was washed 3 times with 50 g of Cy, and vacuum-dried at 40 ° C. for 6 hours to obtain a component insoluble in the THF / Cy mixed solvent (mass ratio = 1/2).
(1) Measurement of acid value A2 1.0 g of the insoluble component obtained above was precisely weighed and dissolved in 9.0 g of THF. Then, the acid value was measured by neutralization titration with an ethanol solution of 0.1 mol / L potassium hydroxide using an automatic titrator (“COM-555” manufactured by Hiranuma Sangyo Co., Ltd.).
(2) Refractive Index n2 Measurement 1.0 g of the insoluble component obtained above was dissolved in 9.0 g of a mixed solvent of methyl ethyl ketone / propylene glycol-1-monomethyl ether-2-acetate (mass ratio 2/1). This solution was applied on a 16 μm-thick polyethylene terephthalate film (manufactured by Toray Industries, Inc., FB40) with a bar coater and dried in an oven at 100 ° C. for 10 minutes to obtain an insoluble component layer having a thickness of 2 μm. The refractive index was measured using a prism coupler (laser refractive index measurement model 2010, laser light wavelength: 532 nm) manufactured by Metricon, with the insoluble component layer in contact with the prism.
In addition, as the measurement of the physical properties of the THF / Cy (mass ratio = 1 / 1.3) insoluble component in the photosensitive resin composition, the acid value A1 and the refractive index n1 are also measured by the acid value A2 and the refractive index. The same method as that for measuring n2 was used.
4.感光性樹脂組成物の水酸基価測定
 転写フィルムを構成する感光性樹脂組成物層の水酸基価は、次のようにして測定した。
 まず、水酸基価の測定対象である感光性樹脂組成物1gを転写フィルムから採取して精秤した。精秤した感光性樹脂組成物に、10質量%の無水酢酸ピリジン溶液を10mL加えてこれを均一に溶解し、100℃で1時間加熱した。加熱後、水10mLとピリジン10mLを加えて100℃で10分間加熱する。その後、自動滴定機(平沼産業(株)製「COM-1700」)を用いて、0.5mol/Lの水酸化カリウムのエタノール溶液により中和滴定することにより測定した。
 水酸基価は次式により算出した。
水酸基価=(A-B)×f×28.05/試料(g)+酸価
{式中、Aは空試験に用いた0.5mol/L水酸化カリウムエタノール溶液の量(mL)を示し、Bは滴定に用いた0.5mol/L水酸化カリウムエタノール溶液の量(mL)を示し、fはファクターを示す。}
 実施例、比較例における感光性樹脂組成物層の水酸基価測定結果を表4~表6に示した。
4). Measurement of hydroxyl value of photosensitive resin composition The hydroxyl value of the photosensitive resin composition layer constituting the transfer film was measured as follows.
First, 1 g of the photosensitive resin composition which is a measurement target of the hydroxyl value was collected from the transfer film and precisely weighed. 10 mL of a 10% by mass acetic anhydride pyridine solution was added to the precisely weighed photosensitive resin composition to dissolve it uniformly and heated at 100 ° C. for 1 hour. After heating, 10 mL of water and 10 mL of pyridine are added and heated at 100 ° C. for 10 minutes. Thereafter, the measurement was performed by neutralization titration with an ethanol solution of 0.5 mol / L potassium hydroxide using an automatic titrator (“COM-1700” manufactured by Hiranuma Sangyo Co., Ltd.).
The hydroxyl value was calculated by the following formula.
Hydroxyl value = (A−B) × f × 28.05 / sample (g) + acid value {where A represents the amount (mL) of 0.5 mol / L potassium hydroxide ethanol solution used in the blank test. , B represents the amount (mL) of 0.5 mol / L potassium hydroxide ethanol solution used for titration, and f represents a factor. }
Tables 4 to 6 show the hydroxyl value measurement results of the photosensitive resin composition layers in Examples and Comparative Examples.
5.タック性評価
 転写フィルムのタック性は以下のようにして評価した。
 まず、作製した転写フィルムを23℃50%RHの環境下で24h静置した後、保護フィルムを10cm/秒のスピードで剥離し、保護フィルムの表面に感光性樹脂組成物が付着しているかどうかを目視で確認した。次に保護フィルム剥離後の感光性樹脂組成物層の表面に脱脂綿をこすりつけ、感光性樹脂組成物層の表面を目視で観察した。
<評価方法>
A・・・・剥離した保護フィルム表面に感光性樹脂組成物の付着はなく、感光性樹脂組成物層の表面に脱脂綿も貼りつかない。
B・・・・剥離した保護フィルム表面に感光性樹脂組成物の付着はないが、感光性樹脂組成物層の表面に脱脂綿の糸くずが貼り付く。
C・・・剥離した保護フィルム表面に感光性樹脂組成物の付着がある。
5. Evaluation of tack property The tack property of the transfer film was evaluated as follows.
First, the prepared transfer film is allowed to stand for 24 hours in an environment of 23 ° C. and 50% RH, and then the protective film is peeled off at a speed of 10 cm / second, so that the photosensitive resin composition is attached to the surface of the protective film. Was confirmed visually. Next, absorbent cotton was rubbed on the surface of the photosensitive resin composition layer after peeling the protective film, and the surface of the photosensitive resin composition layer was visually observed.
<Evaluation method>
A: The photosensitive resin composition does not adhere to the surface of the peeled protective film, and the absorbent cotton does not stick to the surface of the photosensitive resin composition layer.
B: The photosensitive resin composition does not adhere to the surface of the peeled protective film, but the lint of absorbent cotton sticks to the surface of the photosensitive resin composition layer.
C: The photosensitive resin composition adheres to the surface of the peeled protective film.
6.ラミネート性評価
 転写フィルムのラミネート性は以下のようにして評価した。
 転写フィルムの保護フィルムを剥がしながら、樹脂、ITO及びスパッタ銅がこの順に積層された基板の銅表面(サイズ:5cm×10cm)上に、ホットロールラミネーター(大成ラミネーター(株)製、VA-400III)を用いてロール温度80℃の条件にてラミネートした。エアー圧力は0.4MPaとし、ラミネート速度は1.5m/分として設定した。基板の銅表面に転写フィルムが接着した場合はA、80℃の条件では接着しなかった場合はBとして、評価を行った。
6). Evaluation of Laminating Property The laminating property of the transfer film was evaluated as follows.
While removing the protective film of the transfer film, a hot roll laminator (VA-400III, manufactured by Taisei Laminator Co., Ltd.) is formed on the copper surface (size: 5 cm × 10 cm) of the substrate on which the resin, ITO and sputtered copper are laminated in this order. Was laminated under the condition of a roll temperature of 80 ° C. The air pressure was set to 0.4 MPa, and the laminating speed was set to 1.5 m / min. Evaluation was carried out as A when the transfer film was adhered to the copper surface of the substrate and as B when it was not adhered at 80 ° C.
7.現像性
<サンプル作製法>
 前述したラミネート性評価後のサンプルをそのまま使用した。なお、80℃で転写フィルムが基材に接着しなかった水準に関しては、100℃のロール温度でラミネートしたサンプルを準備した。
 ラミネートが完了したサンプルを15分間静置後、支持フィルムの上にPETマスクとストゥーファー21段ステップタブレット(光学密度0.00を1段目とし、1段毎に光学密度が0.15ずつ増加するステップタブレット)を並べて置き、PETマスク及びステップタブレット側から各組成の最適露光量を決定し、平行光露光機((株)オーク製作所社製、HMW―801)により露光した。PETマスクとしては、未露光部分が円孔となるパターンを有するものを使用した。次いで15分以上静置した後、支持体を剥がし、(株)フジ機工製現像装置を用い、フルコーンタイプのノズルにて現像スプレー圧0.12MPaで、28℃~30℃の1質量%NaCO水溶液を45秒間スプレーして現像し、感光性樹脂層の未露光部分を溶解除去した。その際、水洗工程は、フラットタイプのノズルにて水洗スプレー圧0.12MPaで、現像工程と同時間に亘って行い、水洗されたサンプルをエアーブローにより乾燥させて、現像性評価用のサンプルを作製した。上記最適露光量とは、ストゥーファー21段ステップタブレットを介して露光した場合に残膜する段数が7~8段となるような露光量と定義する。
<評価方法>
 作製した保護膜付き基板の感光層を除去した部分の基材表面状態を顕微鏡で観察し、以下のように判定した。
A:28℃の現像条件において基材の銅上に現像残渣なし。
B:28℃の現像条件においては、基材の銅上に現像残渣があるが、30℃の現像条件においては基材の銅上に現像残渣なし。
C:30℃の現像条件においても現像残渣が発生する。
 現像性評価においては、Bランクまでがタッチパネル製造プロセスにおいて、実用上良好な結果であると考えられる。
7). Developability <Sample preparation method>
The sample after the evaluation of the laminate property was used as it was. For the level at which the transfer film did not adhere to the substrate at 80 ° C., a sample laminated at a roll temperature of 100 ° C. was prepared.
The laminated sample was allowed to stand for 15 minutes, and then a PET mask and a stuber 21-step tablet on the support film (optical density 0.00 was the first step, and the optical density was 0.15 for each step. Incremental step tablets) were placed side by side, the optimum exposure amount of each composition was determined from the PET mask and step tablet side, and exposure was performed with a parallel light exposure machine (HMW-801, manufactured by Oak Manufacturing Co., Ltd.). As the PET mask, a mask having a pattern in which an unexposed portion becomes a circular hole was used. Next, after leaving still for 15 minutes or more, the support is peeled off, and using a developing device manufactured by Fuji Kiko Co., Ltd., a 1% by mass Na of 28 ° C. to 30 ° C. at a developing spray pressure of 0.12 MPa with a full cone type nozzle. A 2 CO 3 aqueous solution was sprayed for 45 seconds and developed to dissolve and remove the unexposed portions of the photosensitive resin layer. At that time, the water washing step is carried out at the same time as the development step with a flat type nozzle at a water washing spray pressure of 0.12 MPa, and the water washed sample is dried by air blow to prepare a sample for evaluation of developability. Produced. The optimum exposure amount is defined as an exposure amount such that the number of steps remaining in the film when the exposure is performed through the stuber 21-step tablet becomes 7 to 8 steps.
<Evaluation method>
The base material surface state of the part where the photosensitive layer of the produced protective film-coated substrate was removed was observed with a microscope, and determined as follows.
A: No development residue on the copper of the base material under development conditions of 28 ° C.
B: Although there is a development residue on the base copper under the development conditions of 28 ° C., there is no development residue on the base copper under the development conditions of 30 ° C.
C: Development residue is generated even under development conditions of 30 ° C.
In developability evaluation, it is considered that the results up to rank B are practically good results in the touch panel manufacturing process.
8.透湿度試験
<サンプル作製法>
 感光性樹脂層の厚みが40μmの転写フィルムの保護フィルムを剥がしながら、No.4ろ紙(アドバンテック製)にホットロールラミネーター(大成ラミネーター(株)製、VA-400III)を用いてラミネートした。ロール温度は80℃(前述のラミネート性評価が×の水準の場合には100℃)、エアー圧力は0.4MPaとし、ラミネート速度は1.0m/分として設定した。15分静置後、保護膜の支持フィルム側から散乱光露光機によって各組成の最適露光量を全面露光した。30分静置後、支持フィルムを剥離し、散乱光露光機にて感光層側から350mJ/cmの露光量で露光し、続いて、熱風循環式オーブンにて150℃で30分間処理して、サンプルを作製した。上記最適露光量は現像性評価用サンプル作製方法と同様の定義である。
<評価方法>
 透湿度の測定は、JIS Z0208のカップ法に準じて行い、透湿条件は温度65℃/湿度90%で実施した。
 A・・・透湿度150~200g/(m・day)
 B・・・透湿度201~250g/(m・day)
 C・・・透湿度251~300g/(m・day)
8). Moisture permeability test <sample preparation method>
While peeling off the protective film of the transfer film having a thickness of the photosensitive resin layer of 40 μm, Lamination was performed on 4 filter papers (manufactured by Advantech) using a hot roll laminator (manufactured by Taisei Laminator Co., Ltd., VA-400III). The roll temperature was set to 80 ° C. (100 ° C. when the above-described evaluation of the laminate property was “x”), the air pressure was set to 0.4 MPa, and the lamination speed was set to 1.0 m / min. After leaving still for 15 minutes, the optimal exposure amount of each composition was exposed to the whole surface with the scattered light exposure machine from the support film side of the protective film. After leaving still for 30 minutes, the support film is peeled off, exposed with an exposure amount of 350 mJ / cm 2 from the photosensitive layer side with a scattered light exposure machine, and then processed at 150 ° C. for 30 minutes in a hot air circulating oven. A sample was prepared. The optimum exposure amount has the same definition as in the sample preparation method for developing property evaluation.
<Evaluation method>
The measurement of moisture permeability was performed according to the cup method of JIS Z0208, and the moisture permeability conditions were a temperature of 65 ° C./a humidity of 90%.
A: Moisture permeability of 150 to 200 g / (m 2 · day)
B ... moisture permeability 201-250 g / (m 2 · day)
C: Moisture permeability of 251 to 300 g / (m 2 · day)
9.密着性評価(クロスカット試験)
<サンプル作製法>
 感光性樹脂層の厚みが8μmの転写フィルムの保護フィルムを剥がしながら、樹脂、スパッタ銅ニッケル合金がこの順に積層された基板の合金表面(サイズ:3cm×3cm)上にホットロールラミネーター(大成ラミネーター(株)製、VA-400III)を用いてラミネートした。ロール温度は80℃(前述のラミネート性評価が×の水準は100℃)、エアー圧力は0.4MPaとし、ラミネート速度は1.0m/分とした。15分静置後、保護膜の支持フィルム側から散乱光露光機によって各組成の最適露光量を全面露光した。上記最適露光量は現像性評価用サンプル作製方法と同様の定義である。
 その後、30分静置した後、支持フィルムを剥離し、(株)フジ機工製現像装置を用い、フルコーンタイプのノズルにて現像スプレー圧0.12MPaで、30℃の1質量%NaCO水溶液を45秒間スプレーして現像し、感光性樹脂層の未露光部分を溶解除去した。その際、水洗工程は、フラットタイプのノズルにて水洗スプレー圧0.12MPaで、現像工程と同時間に亘って行い、水洗されたサンプルをエアーブローにより乾燥させた。
 現像後のサンプルを散乱光露光機にて感光性樹脂層側から350mJ/cmの露光量で露光し、続いて、熱風循環式オーブンにて150℃で30分間処理して、密着性評価用サンプルを作製した。
<評価方法>
 上記処理後のサンプルを、JIS規格 K5400を参考に、100マスのクロスカット試験を実施した。試験面にカッターナイフを用いて、1×1mm四方の碁盤目の切り傷を入れ、碁盤目部分にメンディングテープ#810(スリーエム(株)製)を強く圧着させ、テープの端をほぼ0°の角度で緩やかに引き剥がした後、碁盤目の状態を観察し、以下の評点に従ってクロスカット密着性を評価した。
A:全面積中、剥がれは5%未満である。
B:全面積中、5~35%の剥がれがある。
C:全面積中、35%以上の剥がれがある。
 クロスカット試験においては、Aランクが実用上、導体の保護膜として良好な結果であると考えられる。
9. Adhesion evaluation (cross cut test)
<Sample preparation method>
While peeling off the protective film of the transfer film having a photosensitive resin layer thickness of 8 μm, a hot roll laminator (Daisei Laminator (3cm × 3cm)) is formed on the alloy surface (size: 3 cm × 3 cm) of the substrate on which the resin and sputtered copper nickel alloy are laminated in this order. Laminate using VA-400III) manufactured by KK The roll temperature was 80 ° C. (the level of the above-mentioned laminating evaluation is 100 ° C.), the air pressure was 0.4 MPa, and the laminating speed was 1.0 m / min. After leaving still for 15 minutes, the optimal exposure amount of each composition was exposed to the whole surface with the scattered light exposure machine from the support film side of the protective film. The optimum exposure amount has the same definition as in the sample preparation method for developing property evaluation.
Then, after leaving still for 30 minutes, the support film was peeled off, and using a developing device manufactured by Fuji Kiko Co., Ltd., a 1% by mass Na 2 CO at 30 ° C. with a developing spray pressure of 0.12 MPa using a full cone type nozzle. Three aqueous solutions were sprayed for 45 seconds and developed, and the unexposed portion of the photosensitive resin layer was dissolved and removed. At that time, the water washing step was performed at the same time as the development step with a water spray pressure of 0.12 MPa with a flat type nozzle, and the washed sample was dried by air blow.
The developed sample is exposed with a light exposure of 350 mJ / cm 2 from the photosensitive resin layer side with a scattered light exposure machine, and then processed at 150 ° C. for 30 minutes in a hot air circulating oven for evaluation of adhesion. A sample was made.
<Evaluation method>
The sample after the above treatment was subjected to a 100 mass cross-cut test with reference to JIS standard K5400. Using a cutter knife on the test surface, make a 1 x 1 mm square cut on the grid, and firmly press Mending Tape # 810 (manufactured by 3M Co., Ltd.) on the grid, so that the end of the tape is approximately 0 °. After gently peeling off at an angle, the cross-cut state was observed, and cross-cut adhesion was evaluated according to the following score.
A: Peeling is less than 5% in the entire area.
B: There is peeling of 5 to 35% in the entire area.
C: There is peeling of 35% or more in the entire area.
In the cross-cut test, Rank A is considered to be a good result as a protective film for conductors in practice.
Figure JPOXMLDOC01-appb-T000010
Figure JPOXMLDOC01-appb-T000010
Figure JPOXMLDOC01-appb-T000011
Figure JPOXMLDOC01-appb-T000011
Figure JPOXMLDOC01-appb-T000012
Figure JPOXMLDOC01-appb-T000012
Figure JPOXMLDOC01-appb-T000013
Figure JPOXMLDOC01-appb-T000013
Figure JPOXMLDOC01-appb-T000014
Figure JPOXMLDOC01-appb-T000014
Figure JPOXMLDOC01-appb-T000015
Figure JPOXMLDOC01-appb-T000015
 表4及び表5に示した結果から、実施例1~22は本発明で規定された要件を満たすことで、転写フィルムとしてのタック性、低温ラミネート性及び低温現像性、硬化膜としての透湿度、導体基材との密着性に優れていることが示されている。また、実施例5と実施例6は(B-1)成分と(B-2)成分の違いであるが、組成物の水酸基価が15mgKOH/g以下となるように調整することで、硬化膜の透湿度に優れることが分かる。 From the results shown in Tables 4 and 5, Examples 1 to 22 satisfy the requirements specified in the present invention, so that tackiness as a transfer film, low-temperature laminating property and low-temperature developability, and moisture permeability as a cured film are achieved. It is shown that the adhesiveness with the conductor base material is excellent. Further, Example 5 and Example 6 are the difference between the component (B-1) and the component (B-2). By adjusting the hydroxyl value of the composition to 15 mgKOH / g or less, the cured film It turns out that it is excellent in moisture permeability.
 一方、表5に示した比較例1~10においては、本発明で規定される要件の何れかを満たしていないため、転写フィルムとしてのタック性、低温ラミネート性又は低温現像性、硬化膜としての透湿度、導体基材との密着性のいずれかが劣ることが示されている。比較例1及び比較例9はA/B質量比を6.38まで高めた感光性樹脂組成物であるが、転写フィルムの低温ラミネート性及び低温現像性と硬化物の透湿度がそれぞれ実施例1、2に比べて劣る結果となった。比較例2、3は、A/B質量比を0~0.12まで低くした感光性樹脂組成物であるが、転写フィルムのタック性及び低温現像性、硬化膜としての導体基材との密着性に劣る結果となった。比較例4は本発明で規定された(A)成分の分子量の規定を満たしていない、(A’-1)を配合しているが、実施例10と比較して低温現像性が劣る結果となった。比較例5の感光性樹脂組成物には(B)成分を配合していないが、転写フィルムとしての低温ラミネート性、低温現像性に劣る結果となった。比較例6では(A)成分を添加せず、(B-3)成分のみを増やしているが、実施例17又は実施例18と比較して、転写フィルムとしてのタック性、低温現像性、及び硬化膜としての導体基材との密着性に劣る結果となった。比較例7は(A)成分を添加しておらず、替わりに重量平均分子量と酸価が(A)成分の規定を満たしており、一般式(1)~(3)のいずれかの骨格を構造中に含まないエポキシアクリレート酸変性物である(B’-1)成分を添加しているが、転写フィルムとしてのタック性及び低温現像性が劣る結果となった。このことから本発明の(A)成分にエポキシアクリレート酸変性物は適合しないことが分かった。比較例8は本発明の(B)成分の重量平均分子量と屈折率の規定を満たさないほか、一般式(1)~(3)のいずれかの骨格を構造中に含まない(B’-2)成分を添加しているが、転写フィルムとしての低温現像性、及び硬化膜の透湿度が劣る結果となった。比較例10は本発明の(A)成分の酸価の規定を満たさない(A’-3)成分を添加しているが、転写フィルムとしての低温現像性、及び密着性が劣る結果となった。また、(A’-3)成分は水酸基価が高いため、透湿度も劣る結果となった。 On the other hand, Comparative Examples 1 to 10 shown in Table 5 do not satisfy any of the requirements stipulated in the present invention. Therefore, tackiness as a transfer film, low temperature laminating or low temperature developability, and as a cured film It has been shown that either the moisture permeability or the adhesion to the conductor base material is inferior. Comparative Example 1 and Comparative Example 9 are photosensitive resin compositions having an A / B mass ratio increased to 6.38. The low-temperature laminating property and low-temperature developability of the transfer film and the moisture permeability of the cured product were each Example 1. The result was inferior to 2. Comparative Examples 2 and 3 are photosensitive resin compositions in which the A / B mass ratio was lowered to 0 to 0.12, but the tackiness and low-temperature developability of the transfer film, and the close contact with the conductor substrate as a cured film The result was inferior. Comparative Example 4 contains (A′-1), which does not satisfy the molecular weight definition of the component (A) defined in the present invention, but the low-temperature developability is inferior to Example 10. became. Although the component (B) was not blended in the photosensitive resin composition of Comparative Example 5, the results were inferior in low-temperature laminating properties and low-temperature developability as a transfer film. In Comparative Example 6, the component (A) was not added and only the component (B-3) was increased. However, compared with Example 17 or Example 18, the tackiness as a transfer film, the low temperature developability, and It became a result inferior to adhesiveness with the conductor base material as a cured film. In Comparative Example 7, the component (A) was not added, and instead the weight average molecular weight and acid value satisfied the definition of the component (A), and the skeleton of any one of the general formulas (1) to (3) The component (B′-1), which is a modified epoxy acrylate acid not included in the structure, was added, but the tackiness and low-temperature developability as a transfer film were poor. From this, it was found that the epoxy acrylate modified product is not compatible with the component (A) of the present invention. Comparative Example 8 does not satisfy the requirements of the weight average molecular weight and refractive index of the component (B) of the present invention, and does not contain any skeleton of the general formulas (1) to (3) in the structure (B′-2 ) Component was added, but the low temperature developability as a transfer film and the moisture permeability of the cured film were inferior. In Comparative Example 10, the component (A′-3) that does not satisfy the acid value of the component (A) of the present invention was added, but the results were poor in low-temperature developability and adhesion as a transfer film. . Further, since the component (A′-3) has a high hydroxyl value, the moisture permeability was inferior.
 以上の結果から本発明で規定された要件であるA/Bの質量比が0.18~6.0の範囲内であることが転写フィルムとしてのタック性、低温ラミネート性及び低温現像性、硬化膜としての透湿度、導体基材との密着性を満足するためには重要であることが分かった。とりわけ転写フィルムとしての低温現像性が、A/B質量比が0.18未満及び6.0を超えた場合はいずれも顕著に悪化する点に関しては、驚くべき結果であると本発明者らは考える。 From the above results, the A / B mass ratio, which is a requirement defined in the present invention, is in the range of 0.18 to 6.0, as tackiness as a transfer film, low-temperature laminating property, low-temperature developability, and curing. It was found to be important for satisfying the moisture permeability as a film and the adhesion to the conductor base material. In particular, the present inventors believe that the low-temperature developability as a transfer film is a surprising result in that both the A / B mass ratio is significantly deteriorated when the A / B mass ratio is less than 0.18 and more than 6.0. Think.
 実施例1~22は、低温現像性と低透湿度を両立するために下記条件:
  (1)GPCの微分分子量分布曲線におけるS≧50kが1.0~9.0%の範囲内である;
  (2)THF/Cy(質量比=1/2)に不溶な成分の酸価A2(mgKOH/g)が95以上である;
  (3)THF/Cy(質量比=1/2)に不溶な成分の屈折率n2が1.560以上である;
  (4)THF/Cy混合溶媒(質量比=1/1.3)に不溶な成分の酸価A1が100mgKOH/g以上である;
  (5)THF/Cy混合溶媒(質量比=1/1.3)に不溶な成分の屈折率n1が前記n2よりも0.005以上小さい;のいずれも満たしており、低温現像性と低透湿度がいずれも良好であった。一方、比較例1~10は上記(1)~(5)の全てを満たしていないため、低温現像性と低透湿度の少なくとも一方が劣る結果となった。
In Examples 1 to 22, in order to achieve both low-temperature developability and low moisture permeability, the following conditions:
(1) S ≧ 50k in the differential molecular weight distribution curve of GPC is in the range of 1.0 to 9.0%;
(2) The acid value A2 (mg KOH / g) of the component insoluble in THF / Cy (mass ratio = 1/2) is 95 or more;
(3) The refractive index n2 of the component insoluble in THF / Cy (mass ratio = 1/2) is 1.560 or more;
(4) The acid value A1 of the component insoluble in the THF / Cy mixed solvent (mass ratio = 1 / 1.3) is 100 mgKOH / g or more;
(5) The refractive index n1 of the component insoluble in the THF / Cy mixed solvent (mass ratio = 1 / 1.3) is 0.005 or less smaller than the above n2; Humidity was good. On the other hand, since Comparative Examples 1 to 10 did not satisfy all of the above (1) to (5), at least one of low temperature developability and low moisture permeability was inferior.
 実施例1~22及び比較例8,10は、転写フィルムとしてのタック性と低温ラミネート性を両立するために下記条件:
  (1)GPCの微分分子量分布曲線におけるS≧50kが1.0~9.0%の範囲内である;
  (2)GPCの微分分子量分布曲線において、分子量M=20000と分子量M=5000のdw/d(logM)値の比;R20k/5kが0.20~1.50の範囲内である;
をいずれも満たしており、転写フィルムとしてのタック性と低温ラミネート性がいずれも良好であった。一方、比較例1~7及び比較例9は上記(1)及び(2)の全てを満たしていないため、転写フィルムとしてのタック性と低温ラミネート性のいずれか一方が劣る結果となった。
Examples 1 to 22 and Comparative Examples 8 and 10 have the following conditions in order to achieve both tackiness as a transfer film and low-temperature laminating properties:
(1) S ≧ 50k in the differential molecular weight distribution curve of GPC is in the range of 1.0 to 9.0%;
(2) In the differential molecular weight distribution curve of GPC, the ratio of the dw / d (log M) values of the molecular weight M = 20000 and the molecular weight M = 5000; R 20k / 5k is in the range of 0.20 to 1.50;
Both the tackiness and the low-temperature laminating property as a transfer film were satisfactory. On the other hand, Comparative Examples 1 to 7 and Comparative Example 9 did not satisfy all of the above (1) and (2), and therefore either the tack property as a transfer film or the low temperature laminate property was inferior.
 実施例1~22、比較例1,4,5,7~9は、導体基材との密着性に優れるために、下記条件:
  (1)GPCの微分分子量分布曲線におけるS≧50kが0.2~9.0%の範囲内である;
  (2)THF/Cy混合溶媒(質量比=1/2)に不溶な成分の酸価A2(mgKOH/g)が70以上である;
をいずれも満たしているため、導体基材との密着性は良好であった。比較例2はS≧50kが0.2%であるが、導体基材との密着性が若干劣る結果となった。比較例3及び6はS≧50kが0%であるが、導体基材との密着性が劣る結果となった。比較例10はTHF/Cy混合溶媒(質量比=1/2)に不溶な成分の酸価A2(mgKOH/g)が69であるが、導体基材との密着性が劣る結果となった。
Examples 1 to 22 and Comparative Examples 1, 4, 5, and 7 to 9 are excellent in adhesion to the conductor base material.
(1) S ≧ 50k in the differential molecular weight distribution curve of GPC is in the range of 0.2 to 9.0%;
(2) The acid value A2 (mgKOH / g) of the component insoluble in the THF / Cy mixed solvent (mass ratio = 1/2) is 70 or more;
Therefore, the adhesion to the conductor base material was good. In Comparative Example 2, S ≧ 50k was 0.2%, but the adhesion with the conductor base material was slightly inferior. In Comparative Examples 3 and 6, S ≧ 50k was 0%, but the adhesion to the conductor substrate was inferior. In Comparative Example 10, the acid value A2 (mg KOH / g) of the component insoluble in the THF / Cy mixed solvent (mass ratio = 1/2) was 69, but the adhesion to the conductor substrate was inferior.
 以上、本発明の実施の形態について説明してきたが、本発明はこれに限定されるものではなく、発明の趣旨を逸脱しない範囲で適宜変更可能である。 The embodiment of the present invention has been described above, but the present invention is not limited to this, and can be appropriately changed without departing from the gist of the invention.
 本発明による感光性樹脂組成物及び転写フィルムを用いることで、防錆性と低温現像性がともに良好である、配線、電極等の導体部の保護に好適なものとなり、タッチパネル、タッチセンサ又はフォースセンサ用途及びプリント配線板のソルダーレジスト用途などの配線、電極等の保護膜として広く利用することができる。 By using the photosensitive resin composition and the transfer film according to the present invention, both the rust prevention property and the low-temperature developability are good, and it is suitable for the protection of conductor parts such as wiring and electrodes, and the touch panel, touch sensor, or force. It can be widely used as a protective film for wiring, electrodes and the like for sensor applications and solder resist applications for printed wiring boards.

Claims (31)

  1.  支持フィルムと感光性樹脂組成物層を含む導体部保護膜形成用転写フィルムであって、該感光性樹脂組成物層が、以下の成分:
     (A)アルカリ可溶性樹脂(但し、酸変性エポキシ(メタ)アクリレート化合物を除く);
     (B)カルボキシル基及びエチレン性不飽和基を含有する化合物;
     (C)光重合性化合物;及び
     (D)光重合性開始剤;
    を含有し、
     該(A)アルカリ可溶性樹脂の重量平均分子量が11,000以上29,000以下で、かつ酸価が100mgKOH/g以上であり、
     該(B)カルボキシル基及びエチレン性不飽和基を含有する化合物の重量平均分子量が1,000以上9,500以下で、酸価が60mgKOH/g以上で、かつ屈折率が1.570以上であり、
     該(B)カルボキシル基及びエチレン性不飽和基を含有する化合物に対する該(A)アルカリ可溶性樹脂の質量比(A)/(B)が0.18~6.0であることを特徴とする導体部保護膜形成用転写フィルム。
    A transfer film for forming a conductor protective film comprising a support film and a photosensitive resin composition layer, wherein the photosensitive resin composition layer comprises the following components:
    (A) Alkali-soluble resin (excluding acid-modified epoxy (meth) acrylate compounds);
    (B) a compound containing a carboxyl group and an ethylenically unsaturated group;
    (C) a photopolymerizable compound; and (D) a photopolymerizable initiator;
    Containing
    The (A) alkali-soluble resin has a weight average molecular weight of 11,000 or more and 29,000 or less, and an acid value of 100 mgKOH / g or more,
    The compound (B) containing a carboxyl group and an ethylenically unsaturated group has a weight average molecular weight of 1,000 to 9,500, an acid value of 60 mgKOH / g or more, and a refractive index of 1.570 or more. ,
    A conductor characterized in that the mass ratio (A) / (B) of the (A) alkali-soluble resin to the compound containing (B) a carboxyl group and an ethylenically unsaturated group is 0.18 to 6.0. Transfer film for forming a protective film.
  2.  前記(A)アルカリ可溶性樹脂の酸価が200mgKOH/g以下である、請求項1に記載の転写フィルム。 The transfer film according to claim 1, wherein the acid value of the (A) alkali-soluble resin is 200 mgKOH / g or less.
  3.  前記(B)カルボキシル基及びエチレン性不飽和基を含有する化合物の酸価が200mgKOH/g以下であり、かつ屈折率が1.650以下である、請求項1または2に記載の転写フィルム。 The transfer film according to claim 1 or 2, wherein the acid value of the compound (B) containing a carboxyl group and an ethylenically unsaturated group is 200 mgKOH / g or less and a refractive index is 1.650 or less.
  4.  前記感光性樹脂組成物層の水酸基価が15.0mgKOH/g以下である、請求項1~3のいずれか一項に記載の転写フィルム。 The transfer film according to any one of claims 1 to 3, wherein the photosensitive resin composition layer has a hydroxyl value of 15.0 mgKOH / g or less.
  5.  前記感光性樹脂組成物層の水酸基価が0.01mgKOH/g以上である、請求項4に記載の転写フィルム。 The transfer film according to claim 4, wherein the photosensitive resin composition layer has a hydroxyl value of 0.01 mg KOH / g or more.
  6.  前記感光性樹脂組成物層の屈折率が1.550以上である、請求項1~5のいずれか一項に記載の転写フィルム。 The transfer film according to any one of Claims 1 to 5, wherein the refractive index of the photosensitive resin composition layer is 1.550 or more.
  7.  前記感光性樹脂組成物層の屈折率が1.630以下である、請求項6に記載の転写フィルム。 The transfer film according to claim 6, wherein the refractive index of the photosensitive resin composition layer is 1.630 or less.
  8.  前記(A)アルカリ可溶性樹脂が、(メタ)アクリル酸由来の構造を12質量%以上30質量%以下、及びスチレン又はその誘導体由来の構造を30質量%以上80質量%以下で含む、請求項1~7のいずれか一項に記載の転写フィルム。 The (A) alkali-soluble resin contains a structure derived from (meth) acrylic acid in an amount of 12% by mass to 30% by mass and a structure derived from styrene or a derivative thereof in an amount of 30% by mass to 80% by mass. 8. The transfer film according to any one of 1 to 7.
  9.  前記(B)カルボキシル基及びエチレン性不飽和基を含有する化合物が、酸変性エポキシ(メタ)アクリレート化合物である、請求項1~8のいずれか一項に記載の転写フィルム。 The transfer film according to any one of claims 1 to 8, wherein the compound (B) containing a carboxyl group and an ethylenically unsaturated group is an acid-modified epoxy (meth) acrylate compound.
  10.  タッチパネル用保護膜又はフォースセンサ用保護膜のいずれかに使用される、請求項1~9のいずれか一項に記載の転写フィルム。 The transfer film according to any one of claims 1 to 9, which is used for either a protective film for a touch panel or a protective film for a force sensor.
  11.  支持フィルムと感光性樹脂組成物層を含む導体部保護膜形成用転写フィルムであって、該感光性樹脂組成物層が下記(I)及び(II):
     (I)テトラヒドロフランに溶解した成分をゲルパーミエーションクロマトグラフィー(GPC)で測定したGPC溶出曲線から得られる微分分子量分布曲線において、
      (i)分子量M=20000と分子量M=5000のdw/d(logM)値の比R20k/5kが0.20~1.50の範囲内であり、かつ
      (ii)前記微分分子量分布曲線において、分子量M≧2000の領域の面積を100%としたときに分子量M≧50000の領域の面積の比率S≧50kが1.0~9.0%である;及び
     (II)23℃において、テトラヒドロフランに可溶で、かつテトラヒドロフラン/シクロヘキサン(質量比=1/2)混合溶媒に不溶な成分の
      (i)酸価A2が95mgKOH/g以上であり、かつ
      (ii)屈折率n2が1.560以上である;
    を満たす導体部保護膜形成用転写フィルム。
    A conductor part protective film-forming transfer film comprising a support film and a photosensitive resin composition layer, wherein the photosensitive resin composition layer comprises the following (I) and (II):
    (I) In a differential molecular weight distribution curve obtained from a GPC elution curve obtained by measuring a component dissolved in tetrahydrofuran by gel permeation chromatography (GPC),
    (I) the ratio R 20k / 5k of the dw / d (logM) value between the molecular weight M = 20000 and the molecular weight M = 5000 is in the range of 0.20-1.50, and (ii) in the differential molecular weight distribution curve The area ratio S ≧ 50k of the region having the molecular weight M ≧ 50000 is 1.0 to 9.0% when the area of the region having the molecular weight M ≧ 2000 is 100%; and (II) tetrahydrofuran at 23 ° C. (I) Acid value A2 is 95 mgKOH / g or more, and (ii) Refractive index n2 is 1.560 or more, which is soluble in water and insoluble in tetrahydrofuran / cyclohexane (mass ratio = 1/2) mixed solvent Is
    A transfer film for forming a conductor protective film that satisfies the requirements.
  12.  前記請求項11に記載の導体保護膜形成用転写フィルムであって、さらに下記(III):
    (III)23℃において、テトラヒドロフランに可溶で、かつテトラヒドロフラン/シクロヘキサン(質量比=1/1.3)混合溶媒に不溶な成分の
      (i)酸価A1が100mgKOH/g以上であり、かつ
      (ii)屈折率n1が前記n2よりも0.005以上小さい
    を満たす請求項11に記載の導体保護膜形成用転写フィルム。
    The transfer film for forming a conductor protective film according to claim 11, further comprising the following (III):
    (III) A component that is soluble in tetrahydrofuran and insoluble in a tetrahydrofuran / cyclohexane (mass ratio = 1 / 1.3) mixed solvent at 23 ° C. (i) has an acid value A1 of 100 mgKOH / g or more; ii) The transfer film for forming a conductor protective film according to claim 11, wherein the refractive index n1 satisfies 0.005 or more smaller than the n2.
  13.  前記酸価A1が200mgKOH/g以下である、請求項12に記載の導体保護膜形成用転写フィルム。 The transfer film for forming a conductor protective film according to claim 12, wherein the acid value A1 is 200 mgKOH / g or less.
  14.  前記微分分子量分布曲線における分子量M≧50000の領域の成分が、芳香環を含む、請求項11~13のいずれか一項に記載の転写フィルム。 The transfer film according to any one of claims 11 to 13, wherein the component in the region of molecular weight M≥50000 in the differential molecular weight distribution curve includes an aromatic ring.
  15.  タッチパネル用保護膜又はフォースセンサ用保護膜のいずれかに使用される、請求項11~14のいずれか一項に記載の転写フィルム。 The transfer film according to any one of claims 11 to 14, which is used for either a protective film for a touch panel or a protective film for a force sensor.
  16.  支持フィルムと感光性樹脂組成物層を含む導体部保護膜形成用転写フィルムであって、該感光性樹脂組成物層が下記(II)及び(III):
    (II)23℃において、テトラヒドロフランに可溶で、かつテトラヒドロフラン/シクロヘキサン(質量比=1/2)混合溶媒に不溶な成分の
      (i)酸価A2が95mgKOH/g以上であり、かつ
      (ii)屈折率n2が1.560以上である;
    (III)23℃において、テトラヒドロフランに可溶で、かつテトラヒドロフラン/シクロヘキサン(質量比=1/1.3)混合溶媒に不溶な成分の
      (i)酸価A1が100mgKOH/g以上であり、かつ
      (ii)屈折率n1が前記n2よりも0.005以上小さい
    を満たす導体保護膜形成用転写フィルム。
    A transfer film for forming a conductor protective film comprising a support film and a photosensitive resin composition layer, wherein the photosensitive resin composition layer comprises the following (II) and (III):
    (II) a component that is soluble in tetrahydrofuran and insoluble in a tetrahydrofuran / cyclohexane (mass ratio = 1/2) mixed solvent at 23 ° C. (i) has an acid value A2 of 95 mgKOH / g or more, and (ii) The refractive index n2 is 1.560 or more;
    (III) A component that is soluble in tetrahydrofuran and insoluble in a tetrahydrofuran / cyclohexane (mass ratio = 1 / 1.3) mixed solvent at 23 ° C. (i) has an acid value A1 of 100 mgKOH / g or more; ii) A transfer film for forming a conductor protective film that satisfies a refractive index n1 of 0.005 or more smaller than n2.
  17.  前記酸価A1が200mgKOH/g以下である、請求項16に記載の導体保護膜形成用転写フィルム。 The transfer film for forming a conductor protective film according to claim 16, wherein the acid value A1 is 200 mgKOH / g or less.
  18.  タッチパネル用保護膜又はフォースセンサ用保護膜のいずれかに使用される、請求項16又は17に記載の転写フィルム。 The transfer film according to claim 16 or 17, which is used for either a protective film for a touch panel or a protective film for a force sensor.
  19.  支持フィルムと感光性樹脂組成物層を含む導体部保護膜形成用転写フィルムであって、該感光性樹脂組成物層が、以下の成分:
     (A)アルカリ可溶性樹脂(但し、酸変性エポキシ(メタ)アクリレート化合物を除く);
     (B)カルボキシル基及びエチレン性不飽和基を含有する化合物;
     (C)光重合性化合物;及び
     (D)光重合性開始剤;
    を含有し、
     該(A)アルカリ可溶性樹脂の重量平均分子量が11,000以上29,000以下で、かつ酸価が100mgKOH/g以上であり、
     該(B)カルボキシル基及びエチレン性不飽和基を含有する化合物の重量平均分子量が1,000以上9,500以下で、酸価が60mgKOH/g以上で、かつ下記一般式(1)~(3):
    Figure JPOXMLDOC01-appb-C000001
    Figure JPOXMLDOC01-appb-C000002
    Figure JPOXMLDOC01-appb-C000003
    のいずれかに記載の構造を少なくとも含み、
     該(B)カルボキシル基及びエチレン性不飽和基を含有する化合物に対する該(A)アルカリ可溶性樹脂の質量比(A)/(B)が0.18~6.0であることを特徴とする導体部保護膜形成用転写フィルム。
    A transfer film for forming a conductor protective film comprising a support film and a photosensitive resin composition layer, wherein the photosensitive resin composition layer comprises the following components:
    (A) Alkali-soluble resin (excluding acid-modified epoxy (meth) acrylate compounds);
    (B) a compound containing a carboxyl group and an ethylenically unsaturated group;
    (C) a photopolymerizable compound; and (D) a photopolymerizable initiator;
    Containing
    The (A) alkali-soluble resin has a weight average molecular weight of 11,000 or more and 29,000 or less, and an acid value of 100 mgKOH / g or more,
    The compound (B) containing a carboxyl group and an ethylenically unsaturated group has a weight average molecular weight of 1,000 to 9,500, an acid value of 60 mgKOH / g or more, and the following general formulas (1) to (3): ):
    Figure JPOXMLDOC01-appb-C000001
    Figure JPOXMLDOC01-appb-C000002
    Figure JPOXMLDOC01-appb-C000003
    Including at least the structure according to any one of
    A conductor characterized in that the mass ratio (A) / (B) of the (A) alkali-soluble resin to the compound containing (B) a carboxyl group and an ethylenically unsaturated group is 0.18 to 6.0. Transfer film for forming a protective film.
  20.  前記(A)アルカリ可溶性樹脂の酸価が200mgKOH/g以下である、請求項19に記載の転写フィルム。 The transfer film according to claim 19, wherein the acid value of the (A) alkali-soluble resin is 200 mgKOH / g or less.
  21.  前記(B)カルボキシル基及びエチレン性不飽和基を含有する化合物の酸価が200mgKOH/g以下である、請求項19又は20に記載の転写フィルム。 The transfer film according to claim 19 or 20, wherein an acid value of the compound (B) containing a carboxyl group and an ethylenically unsaturated group is 200 mgKOH / g or less.
  22.  前記感光性樹脂組成物層の水酸基価が15.0mgKOH/g以下である、請求項19に記載の転写フィルム。 The transfer film according to claim 19, wherein the photosensitive resin composition layer has a hydroxyl value of 15.0 mg KOH / g or less.
  23.  前記感光性樹脂組成物層の水酸基価が0.01mgKOH/g以上である、請求項22に記載の転写フィルム。 The transfer film according to claim 22, wherein the photosensitive resin composition layer has a hydroxyl value of 0.01 mgKOH / g or more.
  24.  前記感光性樹脂組成物層の屈折率が1.550以上である、請求項19~23のいずれか一項に記載の転写フィルム。 The transfer film according to any one of claims 19 to 23, wherein a refractive index of the photosensitive resin composition layer is 1.550 or more.
  25.  前記感光性樹脂組成物層の屈折率が1.630以下である、請求項24に記載の転写フィルム。 The transfer film according to claim 24, wherein the refractive index of the photosensitive resin composition layer is 1.630 or less.
  26.  前記(A)アルカリ可溶性樹脂が、(メタ)アクリル酸由来の構造を12質量%以上30質量%以下、及びスチレン又はその誘導体由来の構造を30質量%以上80質量%以下で含む、請求項19~25のいずれか一項に記載の転写フィルム。 The (A) alkali-soluble resin contains a structure derived from (meth) acrylic acid in an amount of 12% by mass to 30% by mass and a structure derived from styrene or a derivative thereof in an amount of 30% by mass to 80% by mass. The transfer film according to any one of 1 to 25.
  27.  前記(B)カルボキシル基及びエチレン性不飽和基を含有する化合物が、酸変性エポキシ(メタ)アクリレート化合物である、請求項19~26のいずれか一項に記載の転写フィルム。 The transfer film according to any one of claims 19 to 26, wherein the compound (B) containing a carboxyl group and an ethylenically unsaturated group is an acid-modified epoxy (meth) acrylate compound.
  28.  タッチパネル用保護膜又はフォースセンサ用保護膜のいずれかに使用される、請求項19~27のいずれか一項に記載の転写フィルム。 The transfer film according to any one of claims 19 to 27, which is used as either a protective film for a touch panel or a protective film for a force sensor.
  29.  基材上に、請求項1~28のいずれか一項に記載の転写フィルムをラミネートし、露光し、そして現像することによりパターンを作製することを特徴とする、パターン製造方法。 A pattern production method, wherein a pattern is produced by laminating, exposing and developing the transfer film according to any one of claims 1 to 28 on a substrate.
  30.  請求項29に記載のパターン製造方法で得られたパターンを後露光処理、及び/又は加熱処理することを特徴とする硬化膜パターン製造方法。 A method for producing a cured film pattern, comprising subjecting a pattern obtained by the pattern production method according to claim 29 to post-exposure treatment and / or heat treatment.
  31.  請求項30に記載の硬化膜パターン製造方法により得られた硬化膜パターンを用いることを特徴とするタッチパネル表示装置又はタッチセンサを有する装置の製造方法。 A method for manufacturing a device having a touch panel display device or a touch sensor, wherein the cured film pattern obtained by the method for manufacturing a cured film pattern according to claim 30 is used.
PCT/JP2019/007370 2018-02-26 2019-02-26 Transfer film, resin pattern forming method using transfer film, and cured film pattern forming method WO2019164016A1 (en)

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