WO2017128297A1

WO2017128297A1 - Piezoelectric ceramic air pump and construction method thereof

Info

Publication number: WO2017128297A1
Application number: PCT/CN2016/072799
Authority: WO
Inventors: 魏天生
Original assignee: 深圳市兴日生实业有限公司
Priority date: 2016-01-29
Filing date: 2016-01-29
Publication date: 2017-08-03
Also published as: EP3306090A1; EP3306090A4; US20180209412A1; EP3306090B1

Abstract

A piezoelectric electric ceramic air pump, comprising a pump body, a piezoelectric ceramic crystal diaphragm, and an air inlet and outlet valve; the piezoelectric ceramic crystal diaphragm is common central axially mounted on the pump body to construct a working pump chamber; the pump body is generally tubular, the diameter being much greater than the axial length, an air inlet and outlet used for connecting the working pump chamber and an external air path being arranged at one position of the peripheral wall; an air inlet and outlet component presses closed the air inlet and outlet valves on the air inlet and outlet, an air inlet and outlet hole, the air inlet and outlet valve, and the air inlet and outlet are connected to form an air inlet and outlet channel connected to the external air path; the air inlet and outlet on the pump body side wall streamline the air inlet and outlet path between the working pump chamber and an external fluid, shortening the length of the flow of the fluid through the pipes, reducing pipe resistance, decreasing deadspace volume, and improving fluid pumping efficiency; the number of piezoelectric ceramic crystal diaphragms may be flexibly configured as one or two according to the flow size requirements of the practical application; and the plurality of components used together in the piezoelectric ceramic pump reduce the cost of manufacturing air pumps of different powers.

Description

Piezoelectric ceramic air pump and construction method thereof

Technical field

BACKGROUND OF THE INVENTION 1. Field of the Invention This invention relates to a variable displacement elastic fluid pump, and more particularly to an air pump for AC electric power to drive piezoelectric ceramic sheet vibration.

Background technique

The prior art piezoelectric ceramic air pump utilizes the tensile bending deformation of the piezoelectric ceramic sheet to cause a change in the volume of the pump chamber, and squeezes the fluid in the chamber to suck and discharge the fluid. During the working process, the piezoceramic air pump continuously opens and closes the intake valve and the outlet valve to achieve continuous negative pressure suction and pressure discharge.

The gas path design of the prior art piezoelectric ceramic air pump usually requires an air suction chamber and an exhaust chamber as a buffer space for inhaling and exhausting, and usually has independent inlet and outlet gas pipes and components, and the loop structure of the gas flowing through is complicated. The internal airflow resistance is too large, which reduces the operating efficiency of the air pump, and the air pump flow is small.

Summary of the invention

The technical problem to be solved by the invention is to avoid the insufficiency of the gas circuit design of the prior art piezoelectric ceramic gas pump, the low resistance, the low operating efficiency of the gas pump, and the small flow rate, and propose a high-performance, small volume pressure. The design of the electric ceramic gas pump includes a pump body, a piezoelectric ceramic crystal film, and inlet and outlet valves; the piezoelectric ceramic crystal film is mounted on the pump body at a central axis, The piezoelectric ceramic air pump constructs a working pump chamber; the pump body is substantially tubular, but the diameter is much larger than the axial length, and at one of its surrounding walls, there is a connection for connecting the working pump chamber and the external air passage, An air outlet; the inlet and outlet valves are installed at the inlet and outlet ports.

The piezoelectric ceramic crystal film is only used for one piece; the piezoelectric ceramic crystal film is fixed and fixed on the pump body by the lower pump cover, and is sealed and enclosed to form a working pump cavity.

The piezoelectric ceramic crystal film is provided with two pieces, including upper and lower piezoelectric ceramic crystal films; the upper and lower piezoelectric ceramic crystal films are respectively fixed on the pump body by the upper and lower pump covers. The upper and lower piezoelectric ceramic crystal diaphragms are disposed opposite to each other with the outer surface of the metal substrate facing the central axis, and are sealed with the pump body to form a common working pump chamber.

The inlet and outlet ports are adjacent or not adjacent to the surrounding wall disposed on one side of the pump body, or the inlet and outlet ports are oppositely disposed on the surrounding walls of the diameter line of the pump body.

The piezoelectric ceramic air pump further includes an inlet and outlet member for the inlet and outlet valves (minutes) Do not press on the inlet and outlet ports, so that the inlet and outlet holes on the inlet and outlet parts are connected to the inlet and outlet valves, and the inlet and outlet ports are connected to form an inlet and outlet passage connected with the external air passage; The inlet and outlet valves are independently formed, or are formed into an integrated valve piece having a positioning hole for fitting and positioning on the surrounding wall of the pump body.

The piezoelectric ceramic crystal film is sealed with the pump body by a first sealing ring respectively located on one side thereof to form a working pump chamber; the lower pump cover is locked and fixed to the pump body by the second sealing ring.

The pump body is provided with a spacer for supporting and isolating and paralleling the upper and lower piezoelectric ceramic crystal diaphragms, and the spacer is provided with an opening adjacent to the inlet and outlet valves, so that the working pump chamber is The upper and lower piezoelectric ceramic crystal films are shared; the upper and lower piezoelectric ceramic crystal films are respectively pressed onto the spacer by means of the third and fourth sealing rings, and are sealed and enclosed by the opening through the opening. The working pump chamber is transversely shaped like a letter U.

The inner wall of the pump is coaxially disposed with an annular boss that supports the upper and lower piezoelectric ceramic crystal films and protrudes inward, and the upper and lower piezoelectric ceramic crystal films are respectively sealed by the third and fourth seals. The ring press fits on the annular boss to seal with the pump body to form an oblate working pump chamber; the upper and lower pump covers are respectively press-fitted and fixed to the pump body by the fifth and sixth sealing rings.

The end portion of the air outlet on the pump body has a toroidal arc shape, and the air outlet valve is closed when the air outlet valve is closed, and the air outlet valve is closed; the end of the air inlet and outlet of the air inlet and outlet member The toroidal arc is also closed to make the intake valve close when the intake valve is closed and is in line contact with the end of the intake hole.

The piezoelectric ceramic crystal film further includes an insulating layer and a silver plating layer disposed on the metal substrate, the piezoelectric ceramic layer is disposed between the insulating layer and the silver plating layer, and the electrodes of the piezoelectric ceramic crystal film are respectively separated from the metal base The sheet and the silver plating layer are taken out.

The design of the present invention to solve the prior art problem may also be a construction method of a piezoelectric ceramic air pump based on a main body structure including a pump body, a piezoelectric ceramic crystal film, and inlet and outlet valves; the piezoelectric ceramic crystal The diaphragm is mounted centrally in the pump body to construct a working pump chamber for the piezoelectric ceramic air pump; the method includes the following step A: placing the inlet and outlet ports for connecting the working pump chamber and the external air passage adjacent to each other On the side wall of the pump body, the inlet and outlet valves are installed at the inlet and outlet ports.

The method for constructing a piezoelectric ceramic air pump further includes the step B: the piezoelectric ceramic crystal film is loaded with two pieces, including upper and lower piezoelectric ceramic crystal films; the upper and lower piezoelectric ceramics; The crystal diaphragms are disposed opposite to each other on the outer surface of the metal substrate, and are sealed with the pump body to form a common working pump chamber.

The method for constructing a piezoelectric ceramic air pump further includes the step C: the pump body is provided with a spacer for supporting and isolating and paralleling the upper and lower piezoelectric ceramic crystal films, the spacer being adjacent to the Openings are provided at the inlet and outlet valves, resulting in a reduction in the dead space of the shared working pump chamber and improved pumping efficiency.

The method for constructing a piezoelectric ceramic air pump further includes the step D: when the upper and lower piezoelectric ceramic crystal films are applied with an alternating excitation voltage, the two upper and lower piezoelectric ceramic crystal films are at each power source. Axial motion with simultaneous compression or opposite expansion in a half cycle period.

The method for constructing the piezoelectric ceramic air pump further includes the step E: pressing the inlet and outlet valves (combined on the inlet and outlet ports respectively, so that the inlet and outlet holes on the inlet and outlet parts are in the same direction and in the outlet; The valve and the inlet and outlet ports are connected to form an inlet and outlet passage connected with the external air passage; the inlet and outlet valves are formed as an integral valve piece, and a positioning hole is arranged thereon for fitting and positioning on the surrounding wall of the pump body .

Compared with the prior art, the beneficial effects of the present invention are as follows: 1. An air inlet and outlet port for connecting the working pump chamber and the external air passage is disposed on the surrounding wall of the pump body, and the inlet and outlet air valves are disposed thereon to make the working pump chamber The inlet and outlet gas path with the external fluid is reduced to the extreme, shortening the length of the fluid flowing through the pipeline, reducing the resistance of the fluid pipeline, reducing the dead space of the system, and improving the efficiency of fluid pumping; The number of electric ceramic crystal diaphragms can be configured as one or two pieces according to the flow rate required for practical applications. The two types of piezoelectric ceramic crystal diaphragms can share a plurality of components, which reduces the cost of producing air pumps of different flow rates.

DRAWINGS

1 is a schematic plan view of a preferred embodiment of a piezoelectric ceramic air pump according to a first embodiment of the present invention, in which the upper pump cover 21 is partially removed, and the removed portion exhibits a partial cross section;

Figure 2 is a schematic exploded perspective view of the exploded state of the preferred embodiment 1;

Figure 3 is a schematic perspective view showing the exploded state of the preferred embodiment after the upper and lower pump covers 21 and 23 are removed;

Figure 4 is a front elevational view of the D-D section of Figure 1 of the preferred embodiment;

Figure 5 is a front elevational view of the D-D section of Figure 1 of the preferred embodiment 3;

Figure 6 is a front elevational view of the E-E section of Figure 4 or Figure 5;

Figure 7 is an enlarged schematic view of a portion A in Figure 1, or a portion J in Figure 13;

Figure 8 is a schematic view of Figure 7 in an intake state, in which the direction of the arrow is the direction of intake;

Figure 9 is a schematic view of Figure 7 in an outgassing state, in which the direction of the arrow is the direction of the outlet;

Figure 10 is a front elevational perspective view of the integrated valve plate 60 of the present invention;

Figure 11 is a front elevational front view of the two independently formed intake valve 61 and outlet valve 63 of the present invention;

Figure 12 is a schematic exploded view showing the exploded state of the upper and lower pump covers 21 and 23 after the second embodiment is removed;

Figure 13 is a top plan view of the orthographic projection of Figure 3, in which the upper piezoelectric ceramic crystal film 51 is partially removed, and the removed portion shows a partial cross section;

Figure 14 is a schematic elevational view of the preferred embodiment 2 taken along line H-H of Figure 13;

Figure 15 is an enlarged front elevational view of the preferred embodiment 2 after the upper and lower pump covers 21 and 23 are removed from the D-D section of Figure 1, which also shows the circuit connection of two piezoelectric ceramic crystal films;

Figure 16 is an enlarged front elevational view showing the cross section of the piezoelectric ceramic crystal film 50 of the present invention.

Detailed ways

Embodiments of the present invention will be further described in detail below with reference to the accompanying drawings.

In the piezoelectric ceramic air pump and the construction method thereof according to the preferred embodiment 1 of FIG. 1 to FIG. 4, the piezoelectric ceramic crystal film 50 is provided with two sheets, an upper piezoelectric ceramic crystal film 51 and a lower piezoelectric ceramic crystal film. The sheet 53 is respectively fixed on the pump body 10 and the inside of the lower part by the upper pump cover 21 and the lower pump cover 23; the upper and lower piezoelectric ceramic crystal diaphragms are arranged opposite to each other with the outer surface of the metal substrate 91. The pump body 10 is sealed and enclosed to form a common working pump chamber 15.

In the piezoelectric ceramic air pump and the construction method thereof according to the preferred embodiment 1 shown in FIGS. 3 and 4, the pump body 10 is provided with a parallel and parallel piezoelectric ceramic crystal film for supporting and isolating. The spacer 14 is provided with an opening 16 adjacent to the inlet and outlet valves, so that the working pump chamber 15 is shared by the upper and lower piezoelectric ceramic crystal films; upper and lower piezoelectric ceramic crystals The diaphragms are respectively pressed onto the spacers 14 by means of a third sealing ring 55 and a fourth sealing ring 57. The opening 16 is sealed with the pump body 10 to form a working pump chamber 15 having a transversely cross-shaped letter U. . The spacer (14) is provided with an opening (16) adjacent to the inlet and outlet valves, so that the shared working pump chamber (15) has a dead space reduced, and the pumping efficiency is improved.

In the piezoelectric ceramic air pump according to the preferred embodiment 2 shown in FIGS. 12 to 14 and the method of constructing the same, the inner wall of the pump body 10 is coaxially disposed to support the upper and lower piezoelectric ceramic crystals. a ring-shaped boss 12 projecting inwardly and inwardly, and the upper and lower piezoelectric ceramic crystal films are respectively pressed onto the annular boss 12 by a third sealing ring 55 and a fourth sealing ring 57 and a pump The body 10 is sealed to form an oblate working pump chamber 15.

In the first and second preferred embodiments, the upper pump cover 21 and the lower pump cover 23 are press-fitted to the pump body 10 by means of the fifth seal ring 25 and the sixth seal ring 27, respectively.

In the preferred embodiment 3 of the piezoelectric ceramic air pump shown in FIGS. 1 and 5, the piezoelectric ceramic crystal film 50 is only used in one piece; the piezoelectric ceramic crystal film 50 is locked and fixed to the pump body by the lower pump cover 23. At 10, it is sealed and enclosed to form a working pump chamber 15. The piezoelectric ceramic crystal film 50 is sealed and enclosed by the first sealing ring 59 on one side thereof to form the working pump chamber 15; the lower pump cover 23 is locked and fixed by the second sealing ring 29 On the pump body 10.

In some embodiments shown in FIGS. 1 to 9, the air inlet 17 and the air outlet 18 are adjacent to a wall disposed on one side of the pump body 10; the inlet and outlet member 70 respectively sets the intake valve 61 and the outlet valve 63 Pressing on the inlet and outlet ports, so that the air inlet hole 71 and the air outlet hole 73 of the inlet and outlet member 70 are respectively connected to the inlet and outlet valves, and the inlet and outlet ports are connected to form an air inlet coupled with the external air passage. Channel 81 and outlet passage 83. Of course, the inlet and outlet ports may also be oppositely disposed on the surrounding walls of the diameter line of the pump body 10.

As shown in FIG. 7, the intake passage 81 has an intake valve movable space 82 on the side of the switch of the intake valve 61; the outlet passage 83 has an outlet valve movable space 84 on the side of the outlet of the outlet valve 63.

FIG. 8 is a schematic view showing the intake state of the piezoelectric ceramic air pump. The direction of the arrow in the figure is the direction of the intake air; when the air is injected, that is, when the vibration of the piezoelectric ceramic diaphragm 50 is deformed outward, the volume of the working pump chamber 15 is increased. A negative pressure is formed in the working pump chamber 15, the intake valve 61 is opened by the negative pressure, the outlet valve 63 is suctioned by the negative pressure, and the external fluid sequentially flows through the intake valve 61 and the intake port 71 into the working pump chamber 15.

FIG. 9 is a schematic view showing the state of the gas output of the piezoelectric ceramic air pump. The direction of the arrow in the figure is the direction of the air outlet; when the air is injected, that is, when the piezoelectric ceramic diaphragm 50 is deformed into the working pump chamber 15, the working pump chamber 15 is The volume is reduced, a positive pressure is formed in the working pump chamber 15, the intake valve 61 is closed by the positive pressure, the outlet valve 63 is opened by the positive pressure, and the fluid in the working pump chamber 15 sequentially flows through the outlet hole 73 and the outlet valve 63.

In some embodiments as shown in FIG. 10, the intake valve 61 and the outlet valve 63 are combined into an integral valve plate 60; in some embodiments as shown in FIG. 11, the intake valve 61 and the outlet valve 63 are independent, It is also possible to share the intake valve 61 and the outlet valve 63, that is, the intake valve 61 and the outlet valve 63 are the same member. As shown in FIGS. 10 and 11, the intake valve 61, the outlet valve 63 or the integrated valve plate 60 have positioning holes 66 for fitting and positioning on the surrounding wall of the pump body 10, so that the intake valve 61 and the pump body 10 are provided. The air inlet 17 on the side wall is accurately aligned so that the air outlet valve 63 can be accurately aligned with the air outlet 18 on the side wall of the pump body 10.

In some embodiments of the piezoelectric ceramic air pump and the construction method thereof as shown in FIGS. 15 and 16, the piezoelectric ceramic crystal film 50 further includes an insulating layer 92 and a silver plating layer 94 disposed on the metal substrate 91, and a piezoelectric layer. The ceramic layer 93 is disposed between the insulating layer and the silver plating layer, and the electrodes of the piezoelectric ceramic crystal film are taken out from the metal substrate 91 and the silver plating layer 94, respectively. In the construction method of the piezoelectric ceramic air pump, when the upper and lower piezoelectric ceramic crystal films are applied with an alternating excitation voltage, the two upper and lower piezoelectric ceramic crystal films are in a half cycle period of each power supply. At the same time, it is axially moved in opposite or opposite expansion. The manner in which the above-mentioned piezoelectric ceramic crystal film is disposed and the manner in which the alternating excitation voltage is applied cause the extrusion efficiency of the fluid in the cavity of the diaphragm to be squeezed into the working pump chamber to be much improved.

The piezoelectric ceramic gas pump of the prior art has a small flow rate and a flow rate of 0.3 to 0.5 L/min. The piezoelectric ceramic air pump adopting the technical scheme of the invention has a reasonable gas path layout and improves the operating efficiency of the air pump, and is highly efficient. Micro-small air pump. The preferred design example of the present invention and the prior art electroceramic air pump are subjected to comparative tests under the same conditions, and the results are as shown in Table 1 below: the preferred embodiment of the present invention designs a sample, although the number of piezoelectric ceramic diaphragms is Two, but the actual power consumption is less than twice that of the unimorph ceramic diaphragm, and the output flow rate is greater than twice the flow rate of the unimorph ceramic diaphragm pump. It can be seen that the technical solution of the present invention is superior to the existing one. Technology, flow output capabilities and energy efficiency are also superior to the prior art.

The above is only the embodiment of the present invention, and thus does not limit the scope of the patent of the present invention, and the equivalent structure or equivalent process transformation made by using the description of the invention and the contents of the drawings, or directly or indirectly applied to other related technical fields. The same is included in the scope of patent protection of the present invention.

Table 1

Claims

A piezoelectric ceramic air pump comprising a pump body (10), a piezoelectric ceramic crystal diaphragm (50) and inlet and outlet valves (61, 63); the piezoelectric ceramic crystal diaphragm (50) is mounted coaxially Constructing a working pump chamber (15) for the piezoelectric ceramic air pump on the pump body (10);

The pump body (10) is substantially tubular, but the diameter is much larger than the axial length. At one of its surrounding walls, there are inlet and outlet ports for connecting the working pump chamber (15) and the external air passage (17). , 18);

The inlet and outlet valves (61, 63) are installed at the inlet and outlet ports (17, 18).
The piezoelectric ceramic air pump according to claim 1, wherein

The piezoelectric ceramic crystal film (50) is only used for one piece; the piezoelectric ceramic crystal film (50) is snap-fitted to the pump body (10) by means of a lower pump cover (23), and is sealed and enclosed. Working pump chamber (15).
The piezoelectric ceramic air pump according to claim 1, wherein

The piezoelectric ceramic crystal film (50) is provided with two pieces, including upper and lower piezoelectric ceramic crystal films (51, 53); the upper and lower piezoelectric ceramic crystal films (51, 53) are respectively supported by The lower pump cover (21, 23) is snap-fitted to the pump body (10) and to the inside of the lower part;

The upper and lower piezoelectric ceramic crystal diaphragms (51, 53) are disposed opposite to each other with the outer surface of the metal substrate (91) facing the central axis, and are sealed with the pump body (10) to form a common working pump chamber (15). ).
The piezoelectric ceramic air pump according to claim 1, wherein

The inlet and outlet ports (17, 18) are adjacent or not adjacent to the surrounding wall disposed on one side of the pump body (10), or the inlet and outlet ports (17, 18) are oppositely disposed on the pump body (10) The diameter line is on both sides of the wall.
The piezoelectric ceramic air pump according to claim 1, wherein

An inlet and outlet valve (70) is also included for pressing the inlet and outlet valves (61, 63) on the inlet and outlet ports (17, 18), thereby making the inlet and outlet members (70) The inlet and outlet holes (71, 73) are connected to the inlet and outlet valves (61, 63) and the inlet and outlet ports (17, 18) to form an inlet and outlet passage (81, 83) coupled to the external air passage; The inlet and outlet valves (61, 63) are each independently formed, or are formed into an integral valve piece (60) having a positioning hole (66) for fitting and positioning on the surrounding wall of the pump body (10).
The piezoelectric ceramic air pump according to claim 2, wherein

The piezoelectric ceramic crystal film (50) is separated by a first sealing ring (59) on one side thereof Sealing the pump body (10) to form a working pump chamber (15); the lower pump cover (23) is snap-fitted to the pump body (10) by means of a second sealing ring (29).
The piezoelectric ceramic air pump according to claim 3, wherein

The pump body (10) is provided with a spacer (14) for supporting and isolating and paralleling the upper and lower piezoelectric ceramic crystal diaphragms (51, 53), and the spacer (14) is adjacent to the inlet and outlet. An opening (16) is disposed at the gas valve (61, 63) such that the working pump chamber (15) is shared by the upper and lower piezoelectric ceramic crystal diaphragms (51, 53);

The upper and lower piezoelectric ceramic crystal films (51, 53) are respectively pressed onto the spacer (14) via the third and fourth sealing rings (55, 57), through the opening (16) and the pump body (10) The sealing enclosure constitutes a working pump chamber (15) having a transverse cross-section like the letter U.
The piezoelectric ceramic air pump according to claim 3, wherein

The inner wall of the pump body (10) is coaxially disposed with an annular boss (12) supporting the upper and lower piezoelectric ceramic crystal diaphragms (51, 53) and protruding inward, the upper and lower piezoelectric ceramics The crystal diaphragms (51, 53) are respectively pressed onto the annular boss (12) by means of the third and fourth sealing rings (55, 57) to seal and enclose the pump body (10) to form an oblate working pump chamber. (15);

The upper and lower pump covers (21, 23) are press-fitted and fixed to the pump body (10) by means of fifth and sixth sealing rings (25, 27), respectively.
The piezoelectric ceramic air pump according to claim 5, wherein

The end of the air outlet (18) on the pump body (10) is a toroidal arc shape, and when the air outlet valve (63) is closed, the air outlet is in line contact with the end of the air outlet (18) to realize the air valve closing; The end portion of the air inlet hole (71) of the inlet and outlet member (70) is also an annular arc shape, so that the intake valve (61) is closed when it is in line contact with the end of the air inlet hole (71). The intake valve is closed.
The piezoelectric ceramic air pump according to claim 1, wherein

The piezoelectric ceramic crystal film (50) further includes an insulating layer (92) and a silver plating layer (94) disposed on the metal substrate (91), the piezoelectric ceramic layer (93) being disposed on the insulating layer and silver plating Between the layers, the electrodes of the piezoelectric ceramic crystal film are taken out from the metal substrate (91) and the silver plating layer (94), respectively.
A piezoelectric ceramic air pump construction method based on a main body structure including a pump body (10), a piezoelectric ceramic crystal film (50), and inlet and outlet valves (61, 63); the piezoelectric ceramic crystal film ( 50) A central axis is mounted in the pump body (10) to construct a working pump chamber (15) for the piezoelectric ceramic air pump; the method comprises the following steps A:

The inlet and outlet ports (17, 18) for connecting the working pump chamber (15) and the external air passage are adjacent to each other. The inlet and outlet valves (61, 63) are mounted on the periphery of the pump body (10), and the inlet and outlet valves (61, 63) are installed at the inlet and outlet ports (17, 18).
A method of constructing a piezoelectric ceramic air pump according to claim 11, further comprising the step B:

The piezoelectric ceramic crystal film (50) is provided with two sheets, including upper and lower piezoelectric ceramic crystal films (51, 53); and the upper and lower piezoelectric ceramic crystal films (51, 53) are made of metal The outer surfaces of the substrate (91) are disposed coaxially with respect to the central axis, and are sealed with the pump body (10) to form a common working pump chamber (15).
A method of constructing a piezoelectric ceramic air pump according to claim 12, further comprising the steps of:

C. The pump body (10) is provided with a spacer (14) for supporting and isolating and paralleling the upper and lower piezoelectric ceramic crystal films (51, 53), and the spacer (14) is adjacent thereto. An opening (16) is provided at the inlet and outlet valves (61, 63), so that the dead volume of the shared working pump chamber (15) is reduced, and the pumping efficiency is improved.
A method of constructing a piezoelectric ceramic air pump according to claim 12 or 13, further comprising the step D:

When the upper and lower piezoelectric ceramic crystal films (51, 53) are applied with an alternating excitation voltage, the two upper and lower piezoelectric ceramic crystal films (51, 53) face each other at the same time in each power supply half cycle period. Axial motion in compression or opposite expansion.
A method of constructing a piezoelectric ceramic air pump according to claim 11, further comprising the step E:

The inlet and outlet valves (61, 63) are respectively pressed onto the inlet and outlet ports (17, 18), so that the inlet and outlet holes (71, 73) on the inlet and outlet members (70) are merged, The outlet valve (61, 63) and the inlet and outlet ports (17, 18) penetrate to form an inlet and outlet passage (81, 83) coupled to the external air passage; the inlet and outlet valves (61, 63) are integrated The valve plate (60) has a positioning hole (66) for fitting and positioning on the surrounding wall of the pump body (10).