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WO2017110564A1 - Vibration device and camera - Google Patents

Vibration device and camera Download PDF

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Publication number
WO2017110564A1
WO2017110564A1 PCT/JP2016/086934 JP2016086934W WO2017110564A1 WO 2017110564 A1 WO2017110564 A1 WO 2017110564A1 JP 2016086934 W JP2016086934 W JP 2016086934W WO 2017110564 A1 WO2017110564 A1 WO 2017110564A1
Authority
WO
WIPO (PCT)
Prior art keywords
vibration
vibration element
support
main surface
vibration device
Prior art date
Application number
PCT/JP2016/086934
Other languages
French (fr)
Japanese (ja)
Inventor
西山　健次
藤本　克己
雅信 野村
伸介 池内
Original Assignee
株式会社村田製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社村田製作所 filed Critical 株式会社村田製作所
Priority to CN201680072811.XA priority Critical patent/CN108370407B/en
Priority to DE112016005987.6T priority patent/DE112016005987B4/en
Priority to JP2017557887A priority patent/JP6579200B2/en
Publication of WO2017110564A1 publication Critical patent/WO2017110564A1/en
Priority to US15/933,501 priority patent/US10268039B2/en

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0006—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means to keep optical surfaces clean, e.g. by preventing or removing dirt, stains, contamination, condensation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B3/00—Methods or apparatus specially adapted for transmitting mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B17/00—Details of cameras or camera bodies; Accessories therefor
    • G03B17/02—Bodies
    • G03B17/08—Waterproof bodies or housings
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B17/00—Details of cameras or camera bodies; Accessories therefor
    • G03B17/56—Accessories
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/50—Constructional details
    • H04N23/52—Elements optimising image sensor operation, e.g. for electromagnetic interference [EMI] protection or temperature control by heat transfer or cooling elements
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/50—Constructional details
    • H04N23/55—Optical parts specially adapted for electronic image sensors; Mounting thereof
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/80—Camera processing pipelines; Components thereof
    • H04N23/81—Camera processing pipelines; Components thereof for suppressing or minimising disturbance in the image signal generation
    • H04N23/811—Camera processing pipelines; Components thereof for suppressing or minimising disturbance in the image signal generation by dust removal, e.g. from surfaces of the image sensor or processing of the image signal output by the electronic image sensor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B2205/00—Adjustment of optical system relative to image or object surface other than for focusing
    • G03B2205/0053—Driving means for the movement of one or more optical element
    • G03B2205/0061—Driving means for the movement of one or more optical element using piezoelectric actuators

Definitions

  • the present invention relates to a vibration device and a camera using a piezoelectric vibrator.
  • a dome-shaped lens cover is disposed in front of the camera body.
  • a cylindrical portion is connected to the lens cover.
  • a piezoelectric vibrator is fixed to the inner surface of the cylindrical portion. The cylindrical portion and the lens cover are vibrated by the piezoelectric vibrator. Thereby, water droplets adhering to the lens cover are removed.
  • solutions other than water such as ethanol, aqueous solutions in which salts or anti-freezing agents (calcium chloride) are dissolved, droplets containing impurities that are not soluble in water, such as muddy water, or colloidal solutions such as coffee Etc. were required to be removed.
  • An object of the present invention is to provide a vibration device and a camera that can enhance the reliability of the camera body and can sufficiently remove water droplets and the like attached to the lens cover.
  • a vibration device includes a support body having a through hole that has one main surface and the other main surface, and passes through the one main surface and the other main surface, and the support body.
  • the support may include the first vibration element and the second vibration element in a vibration node of the first vibration element and the second vibration element. Support.
  • the support may include the first vibration element and the second vibration element at outer peripheral edges of the first vibration element and the second vibration element. Support.
  • the first vibration element includes a first piezoelectric vibrator provided in the first vibration body, and the second vibration element.
  • the piezoelectric vibrator is a second piezoelectric vibrator, and the first and second piezoelectric vibrators vibrate in opposite phases.
  • a buckled tuning fork vibrator is configured by the first and second vibrating elements and the support.
  • the support has a cylindrical shape.
  • the first vibration element has a plurality of vibration regions, and adjacent vibration regions in the plurality of vibration regions are configured to vibrate in opposite phases. Yes.
  • the portion of the first vibration element from which water droplets and the like are removed can be changed as appropriate.
  • the first vibration body has a plate shape.
  • the first vibration body has a dome shape.
  • the second vibrating body has a light transmitting property and has a plate shape.
  • the second vibrating body includes an opening and an extension extending from the opening to the side opposite to the first vibration element. Have.
  • a case member connected to the support is further provided, and a storage space is provided by the first vibration element, the support, and the case member. Is formed.
  • the camera body can be stored in the storage space.
  • a vibration device configured according to the present invention, a lens module housed in the housing space, and an image sensor housed in the housing space are provided. ing.
  • the vibration device is configured in accordance with the present invention, and includes a lens module including a lens and an image sensor, and the first and first of the vibration device are provided. At least one of the two vibration elements includes the lens.
  • a vibration device and a camera that can improve the reliability of the camera body and can sufficiently remove water droplets and the like attached to the lens cover.
  • FIG. 1 is a front sectional view of a camera according to the first embodiment of the present invention.
  • FIG. 2 is an exploded perspective view of the vibration device according to the first embodiment of the present invention.
  • 3 (a) and 3 (b) are a perspective view of the first piezoelectric vibrator used in the first embodiment of the present invention and a cross section taken along line XX in FIG. 3 (a).
  • FIG. FIG. 4 is a schematic cross-sectional view showing the vibration state of the first and second vibrating elements according to the first embodiment of the present invention.
  • FIG. 5 is a front sectional view of a vibration device according to the second embodiment of the present invention.
  • FIG. 6 is a front cross-sectional view of a vibration device according to a third embodiment of the present invention.
  • FIG. 7A to 7D are schematic diagrams for explaining vibration modes in the first vibration element and the second vibration element.
  • FIG. 8 is a plan view of a first vibration element according to the fourth embodiment of the present invention.
  • FIG. 9 is a schematic plan view of the piezoelectric layer of the first piezoelectric vibrator in the modification of the fourth embodiment of the present invention.
  • FIG. 10 is a front sectional view of the vibration device in the camera according to the fifth embodiment of the present invention.
  • FIG. 11 is a front cross-sectional view of the vibration device in the camera according to the first modification of the first embodiment of the present invention.
  • FIG. 12 is a front cross-sectional view of the vibration device in the camera according to the second modification of the first embodiment of the present invention.
  • FIG. 1 is a front sectional view of a camera according to a first embodiment of the present invention.
  • FIG. 2 is an exploded perspective view of the vibration device according to the first embodiment.
  • the camera 10 has a vibration device 1.
  • a camera body 12 is housed in the vibration device 1.
  • the camera 10 has a height direction corresponding to the upper side and the lower side in FIG.
  • the upper and lower parts in this specification are the upper and lower parts in the height direction.
  • the camera body 12 has a body member 13. The lower end of the main body member 13 is fixed to the base plate 3. An imaging unit 14 is fixed to the upper end of the main body member 13. A circuit 15 including an image sensor is built in the imaging unit 14. The lens module 16 is fixed so as to face the imaging unit 14. The lens module 16 has an outer wall portion 16a. A plurality of lenses 17 are provided inside the outer wall portion 16a.
  • the structure of the camera body 12 is not particularly limited as long as the object to be imaged located in front of the lens 17 can be imaged.
  • the vibration device 1 includes a case member 2 and a buckling tuning fork type vibrator 9.
  • the buckling tuning fork vibrator 9 is composed of first and second vibration elements 5A and 5B and a support 4.
  • the case member 2 is cylindrical. However, the case member 2 may have other shapes such as a rectangular tube shape.
  • the case member 2 is made of metal or synthetic resin, for example.
  • the lower end of the case member 2 is fixed to the base plate 3.
  • the case member 2 and the base plate 3 may be integrally formed.
  • the support 4 is connected to the upper end of the case member 2.
  • the support 4 has an annular planar shape, and has a first main surface 4d as one main surface and a second main surface 4e as the other main surface.
  • the support 4 passes through the first main surface 4d and the second main surface 4e so as to open, and has a through hole located at the center of the first and second main surfaces 4d and 4e.
  • An extension 4a extends above the through hole in the first main surface 4d.
  • An extension 4b extends below the through hole in the second main surface 4e.
  • the support 4 supports outer peripheral edges of first and second vibration elements 5A and 5B described later.
  • the support 4 is made of, for example, a metal, a synthetic resin, or a ceramic material.
  • a disk-shaped first vibration element 5A is connected to the upper end of the extension 4a of the support 4.
  • the first vibration element 5A includes a disk-shaped first vibration body 5A1.
  • the first vibrating body 5A1 has translucency.
  • An annular first piezoelectric vibrator 5A2 is provided on the opposite side of the first vibrating body 5A1 from the support 4 side. By applying an AC voltage to the first piezoelectric vibrator 5A2, the first piezoelectric vibrator 5A2 is excited. Thereby, the first vibrating body 5A1 vibrates.
  • the first vibrating body 5A1 is made of a translucent material such as glass or synthetic resin.
  • the second vibration element 5B is connected to the lower end of the extension 4b of the support 4.
  • the second vibration element 5B is provided so as to face the first vibration element 5A.
  • the second vibration element 5B includes a second vibration body 5B1.
  • the second vibrating body 5B1 has an annular planar shape and has an opening.
  • the second vibrating body 5B1 has an extension 5B1b that extends from the opening to the side opposite to the first vibrating element 5A.
  • An annular second piezoelectric vibrator 5B2 is provided on the opposite side of the second vibrating body 5B1 from the first vibrating element 5A side.
  • the second piezoelectric vibrator 5B2 is provided so as to surround the extension part 5B1b. By applying an AC voltage to the second piezoelectric vibrator 5B2, the second piezoelectric vibrator 5B2 is excited. Thereby, the second vibrating body 5B1 vibrates.
  • the second vibrating body 5B1 has translucency.
  • the second vibrating body 5B1 is made of a translucent material such as glass or synthetic resin. Note that the second vibrating body 5B1 may not have translucency.
  • the planar shapes of the first and second vibrating elements 5A and 5B and the support 4 may be shapes other than a circle, for example, a rectangle or the like.
  • the support 4 may have a cylindrical shape such as a cylindrical shape or a rectangular tube shape.
  • the support 4 is disposed between the first and second vibration elements 5A and 5B, and connects the first and second vibration elements 5A and 5B. Thereby, a buckling tuning fork vibrator 9 is formed. Although details will be described later, the support 4 is located at the vibration node of the buckling tuning fork vibrator 9. That is, the support 4 supports the first and second vibrating elements 5A and 5B at the vibration node of the first and second vibrating elements 5A and 5B.
  • a storage space A is formed by the case member 2, the support body 4, and the first vibration element 5 ⁇ / b> A.
  • the storage space A is closed by the base plate 3 and is a sealed space.
  • the camera body 12 having the lens module 16 and the image sensor is stored.
  • the first vibration element 5A is positioned in front of the lens 17 positioned in the forefront of the camera body 12.
  • the first vibration element 5 ⁇ / b> A is a lens cover in the camera 10.
  • the camera body 12 images the outside of the first vibrating body 5A1 having translucency.
  • the first vibration element 5A is vibrated as described above, and water droplets and the like attached to the first vibration element 5A are removed by atomization or movement. Thereby, the field of view of the camera body 12 can be improved.
  • a feature of the camera 10 of the present embodiment is that the support 4 supports the first and second vibrating elements 5A and 5B at the vibration node of the first and second vibrating elements 5A and 5B. is there.
  • a portion where the support 4 is connected to the case member 2 is defined as a connecting portion 4c.
  • the connecting portion 4c hardly vibrates. Therefore, even if the amplitude of the vibration for removing water droplets or the like is increased, the sealing property of the storage space A can be effectively improved. Therefore, the reliability of the camera body 12 can be increased. Furthermore, even if the support body 4 is connected to the case member 2, the vibrations of the first and second vibration elements 5A and 5B are hardly inhibited. Therefore, water droplets and the like attached to the first vibration element 5A can be sufficiently removed.
  • the buckling tuning fork type vibration is a mode in which when two vibration elements (first and second vibration elements 5A and 5B) having substantially the same natural resonance frequency are coupled, they resonate with each other and vibrate antisymmetrically. It is a vibration that appears.
  • the natural resonance frequencies of the first and second vibrating elements 5A and 5B are the same.
  • the natural resonance frequencies of the first and second vibrating elements 5A and 5B can be matched by adjusting the thicknesses and dimensions of the first and second vibrating elements 5A and 5B.
  • the vibration modes of the first and second vibrating elements 5A and 5B are antisymmetric to each other.
  • the first piezoelectric vibrator 5A2 has a piezoelectric layer 8 as shown in FIGS. 3 (a) and 3 (b).
  • the piezoelectric layer 8 has a polarization axis direction.
  • the polarization axis direction is a direction parallel to the thickness direction of the piezoelectric layer 8.
  • the piezoelectric layer 8 is made of an appropriate piezoelectric ceramic such as Pb (Zr, Ti) O 3 or (K, Na) NbO 3 .
  • the piezoelectric layer 8 may be made of a piezoelectric single crystal such as LiTaO 3 or LiNbO 3 .
  • An electrode 7 a is formed on the entire upper surface of the piezoelectric layer 8.
  • An electrode 7 b is formed on the entire lower surface of the piezoelectric layer 8.
  • the electrodes 7a and 7b are made of a laminated body in which, for example, a NiCr layer, a NiCu layer, and an Ag layer are laminated in this order from the piezoelectric layer 8 side.
  • the material for the electrodes 7a and 7b is not particularly limited.
  • the electrodes 7a and 7b may be composed of a single metal layer.
  • the second piezoelectric vibrator 5B2 has substantially the same configuration as the first piezoelectric vibrator 5A2.
  • the polarization axis directions of the first and second piezoelectric vibrators 5A2 and 5B2 are the same direction.
  • the first and second piezoelectric vibrators 5A2 and 5B2 are excited in opposite phases.
  • the first and second piezoelectric vibrators 5A2 and 5B2 are configured to vibrate in opposite phases.
  • the polarization axis directions of the first and second piezoelectric vibrators 5A2 and 5B2 may be opposite to each other.
  • the first and second piezoelectric vibrators 5A2 and 5B2 are excited in opposite phases by applying an AC voltage having the same phase to the first and second piezoelectric vibrators 5A2 and 5B2.
  • FIG. 4 is a schematic cross-sectional view showing the vibration state of the first and second vibration elements in the first embodiment.
  • the alternate long and short dash line schematically shows the vibration of the first and second vibrating elements.
  • FIG. 4 shows an example of vibration in the (0, 0) mode described later.
  • the first and second vibrating elements 5A and 5B are configured to be excited in opposite phases at the same natural resonance frequency. Thereby, a portion where the support 4 is disposed can be used as a vibration node. In this way, the buckling tuning fork type vibrator 9 is configured.
  • the natural resonance frequencies of the first and second vibrating elements 5A and 5B do not have to be completely the same.
  • the natural resonance frequencies of the first and second vibrating elements 5A and 5B are substantially the same to such an extent that the first and second vibrating elements 5A and 5B vibrate so that the portion where the support 4 is disposed becomes a node. If it is.
  • the camera body 12 is located inside the opening of the second vibration element 5B.
  • the lens 17 positioned at the forefront of the camera body 12 is positioned between the first and second vibrating elements 5A and 5B in the height direction.
  • the first and second vibrating elements 5A and 5B only the first vibrating element 5A is positioned in front of the camera body 12. Thereby, the field of view of the camera body 12 can be improved. In addition, the height of the camera 10 can be reduced.
  • the first and second piezoelectric vibrators 5A2 and 5B2 have the first and second vibration elements 5A and 5B rather than the vibration nodes of the first and second vibration elements 5A and 5B. It is preferable that it is arrange
  • the first and second vibrating elements 5A and 5B can be connected to the support 4 at portions close to the outer peripheral edge. Thereby, in the entire area of the first vibration element 5A, the area of the portion that vibrates in order to remove water droplets and the like in the field of view of the camera 10 can be increased. Therefore, water drops etc. can be removed efficiently.
  • the vibration node of the first vibration element 5A is located on the outer peripheral edge of the first vibration element 5A, and the support 4 is connected to the outer peripheral edge. Thereby, in a plan view, vibration does not propagate outside the portion of the first vibration element 5A to which the support 4 is connected. Accordingly, the first vibrating element 5A can be vibrated more efficiently, and water droplets and the like can be removed more efficiently.
  • the vibration nodes of the first and second vibrating elements 5A and 5B are located on the outer peripheral edges of the first and second vibrating elements 5A and 5B, and the first and second vibrating elements 5A. , 5B is preferably connected to the outer peripheral edge.
  • the camera 10 can be reduced in size.
  • the case member 2 and the second vibration element 5B are preferably provided via a gap. Thereby, the vibration of the second vibration element 5B is not easily inhibited.
  • FIG. 5 is a front sectional view of the vibration device according to the second embodiment.
  • the vibration device 21 is different from the vibration device 1 in the first embodiment in that the second vibration body 25B1 has a disk shape. Except for the above, the vibration device 21 has the same configuration as that of the vibration device 1 of the first embodiment.
  • the reliability of the camera body can be improved, and water droplets and the like attached to the first vibration element 5A can be sufficiently removed.
  • the first and second vibrating bodies 5A1 and 25B1 are disk-shaped and do not have a complicated shape. Therefore, the natural resonance frequencies of the first and second vibrating elements 5A and 25B can be easily made the same.
  • the first and second vibration elements 5A and 25B have the same shape. Therefore, productivity can be improved.
  • FIG. 6 is a front sectional view of the vibration device according to the third embodiment.
  • the vibration device 31 is different from the vibration device 1 in the first embodiment in that the first vibration body 35A1 has a dome shape and the support body 34 does not have an extension part extending vertically.
  • the arrangement of the first and second piezoelectric vibrators 35A2 and 35B2 is also different from that of the first embodiment. Except for the above, the vibration device 31 has the same configuration as that of the vibration device 1 of the first embodiment.
  • the first and second vibrating bodies 35A1 and 5B1 are formed so that the natural resonance frequencies of the first and second vibrating elements 35A and 5B are the same.
  • the first piezoelectric vibrator 35A2 is provided on the support 34 side of the first vibration element 35A.
  • the second piezoelectric vibrator 35B2 is also provided on the support 34 side of the second vibration element 5B. Part of the first and second piezoelectric vibrators 35A2 and 35B2 is joined to the support 34. Specifically, the outer peripheral edges of the first and second piezoelectric vibrators 35A2 and 35B2 are supported by the support 34, but the inner peripheral edges are not supported by the support 34.
  • the polarization axis directions of the first and second piezoelectric vibrators 35A2 and 35B2 are opposite to each other.
  • the support 34 is made of an appropriate metal.
  • the support 34 functions as an external electrode that electrically connects the first and second piezoelectric vibrators 35A2 and 35B2 to the outside. Therefore, in the vibration device 31, an in-phase AC voltage is applied to the first and second piezoelectric vibrators 35A2 and 35B2. Since the polarization axis directions of the first and second piezoelectric vibrators 35A2 and 35B2 are opposite to each other, the first and second piezoelectric vibrators 35A2 and 35B2 vibrate in opposite phases.
  • the first and second vibration elements 35A and 5B vibrate so that the portion where the support 34 is disposed becomes a vibration node. Therefore, the sealing property in the vibration device 31 can be enhanced, and the reliability of the camera body can be enhanced. Furthermore, water droplets and the like attached to the first vibration element 35A can be sufficiently removed.
  • the support 34 is made of an insulator, and electrodes may be provided on the first main surface and the second main surface of the support 34.
  • the electrode on the first main surface of the support 34 is connected to the electrode of the first piezoelectric vibrator 35A2, and the electrode on the second main surface of the support 34 is connected to the electrode of the second piezoelectric vibrator 35B2. It may be connected.
  • the polarization axis directions of the first and second piezoelectric vibrators 35A2 and 35B2 may be the same or opposite to each other.
  • FIGS. 7A to 7D are schematic diagrams for explaining vibration modes in the first vibration element and the second vibration element.
  • the upper part shows the vibration when the first vibration element is viewed in plan
  • the lower part shows the vibration when the second vibration element is viewed in plan. The same applies to FIGS. 7B to 7D.
  • the hatched area and the white area are displaced in opposite phases. Therefore, the first vibration element and the second vibration element are displaced in opposite phases.
  • the boundary between the outermost periphery and the white area and the hatched area is a node of vibration. For example, in the vibration shown in FIG. 7B, the outer periphery of a white circle and the outer periphery of a circle with hatching are hatched nodes.
  • the mechanical resonance mode of the circular member can be expressed as an (m, n) mode.
  • m is the number of knot lines existing in the radial direction
  • n is the number of knot lines existing in the circulation direction.
  • m and n are integers.
  • the vibration mode shown in FIG. 7A is the (0,0) mode
  • FIG. 7B is the (1,0) mode
  • FIG. 7C is the (0,1) mode
  • FIG. 7D shows the (1, 1) mode.
  • higher-order vibration modes in which m is 2 or more and n is 2 or more can be used.
  • the first vibration element and the second vibration element are configured to vibrate in the vibration mode as described above.
  • FIG. 8 is a plan view of the first vibration element according to the fourth embodiment.
  • the vibration device according to the fourth embodiment differs from the first embodiment in that a plurality of electrodes 47a are provided on the upper surface of the piezoelectric layer 8 of the first piezoelectric vibrator 45A2.
  • the first embodiment differs from the first embodiment in that a plurality of electrodes are provided on the lower surface of the piezoelectric layer 8 of the first piezoelectric vibrator 45A2 and on the upper and lower surfaces of the piezoelectric layer of the second piezoelectric vibrator. .
  • the vibration device of the fourth embodiment has the same configuration as the vibration device 1 of the first embodiment.
  • the first vibrating element 45A has two regions adjacent to each other via the center line S1.
  • electrodes 47 a are provided in one region and the other region via the center line S ⁇ b> 1.
  • a plurality of electrodes are provided on the lower surface of the piezoelectric layer 8.
  • the polarization axis direction of the piezoelectric layer 8 of the present embodiment is the same in any region.
  • the (0, 1) mode, the (1, 1) mode, etc. are excited in the first vibration element 45A.
  • the first vibration element 45A is configured such that adjacent vibration regions in a plurality of vibration regions vibrate in opposite phases.
  • the (0, 1) mode or the (1, 1) mode is used, a water droplet or the like is moved from the vibration node toward the vibration antinode and then removed by atomization. 7 (c) and 7 (d), the central portion (center line S1 in FIG. 8) of the first vibration element 45A becomes a node of vibration, so that water droplets or the like are placed on the outer periphery of the first vibration element 45A. Move towards. For this reason, the visual field of the center part of a camera main body can be made clearer.
  • the second vibration element in the present embodiment is also configured to have the same natural resonance frequency as that of the first vibration element 45A. Accordingly, the portion where the support is disposed can be used as a vibration node of the first vibration element 45A and the second vibration element.
  • the vibration modes of the first vibration element 45A and the second vibration element can be changed as appropriate by changing the vibration frequency. Thereby, the portion of the first vibration element 45A that atomizes water droplets or the like can be changed as appropriate.
  • the sealing performance of the vibration device can be improved, and the reliability of the camera body can be improved. Furthermore, water droplets and the like attached to the first vibration element 45A can be sufficiently removed.
  • the polarization directions of adjacent regions are opposite to each other. It is good. For example, you may polarize like the piezoelectric material layer 68 of the 1st piezoelectric vibrator in the modification of 4th Embodiment shown in FIG. More specifically, the piezoelectric layer 68 has two regions adjacent to each other via a center line S1 extending in the radial direction passing through the center of the piezoelectric layer 68.
  • the region on one side and the region on the other side via the center line S1 may be polarized in opposite directions in the thickness direction, as indicated by the symbols + and ⁇ .
  • electrodes may be provided on the entire surface of both surfaces of the piezoelectric layer 68. By applying an AC voltage from both electrodes, (0, 1) mode, (1, 1) mode, etc. can be excited.
  • n in the vibration mode can be made higher by increasing the number of adjacent regions.
  • an AC voltage having the same phase may be applied to adjacent regions.
  • n in the vibration mode can be made higher by increasing the number of electrodes provided in the circumferential direction of the piezoelectric layer.
  • AC voltages having opposite phases may be applied to adjacent electrodes.
  • the vibration frequency may be increased.
  • a solution other than water such as ethanol, an aqueous solution in which a salt or an antifreezing agent (calcium chloride) is dissolved, a droplet containing impurities that are not soluble in water such as muddy water, or a colloid such as coffee. Even a solution or the like (hereinafter referred to as a droplet) can be similarly removed.
  • a solution or the like hereinafter referred to as a droplet
  • the liquid droplets are atomized while the contents are dissolved, and the liquid droplets attached to the outer surface of the first vibration element are removed. be able to.
  • the action at this time is different from evaporation, and it is possible to remove the entire droplet without depositing dissolved matter / impurities in the droplet.
  • the vibration device in the first and second examples is the vibration device 1 of the first embodiment shown in FIG.
  • the dimensions of the first piezoelectric vibrator 5A2, the second piezoelectric vibrator 5B2, the first vibrating body 5A1, the second vibrating body 5B1, and the support body 4 used in the first embodiment are as follows.
  • first piezoelectric vibrator 5A2 and second piezoelectric vibrator 5B2 inner diameter 12.0 mm, outer diameter 18.0 mm, thickness 0.5 mm.
  • Dimensions of first vibrating body 5A1 outer diameter 18.0 mm, thickness 0.7 mm.
  • Dimensions of second vibrating body 5B1 outer diameter 18.0 mm, thickness 0.7 mm, opening diameter 14.0 mm.
  • Dimensions of extension 5B1b of second vibrating body 5B1 outer diameter 16.0 mm, inner diameter 14.0 mm, thickness 2.29 mm.
  • Dimensions of support 4 inner diameter 16.0 mm, outer diameter 22.0 mm, thickness 0.1 mm.
  • saline an aqueous solution in which 14 g of NaCl was dissolved in 1 L of water
  • the atomization operation was continuously performed. Specifically, 15 ml of saline was added dropwise in one hour. Even in this case, the aqueous solution could be removed without precipitation of NaCl contained in the saline.
  • the solution adhering to the outer surface of the first vibration element 45A is removed without depositing the contents on the first vibration element 5A in the same manner even in a colloid solution such as coffee or a solution other than water such as ethanol. We were able to.
  • the first vibration is generated by atomizing the water droplets together with impurities that do not dissolve in water by installing this apparatus in an appropriate direction (downward). Water droplets adhering to the outer surface of the element 5A could be removed.
  • impurities may remain in the first vibration element 5A, but the region where the impurities remain is the center of the first vibration element 45A. It did not become a department. Further, the residue dropped due to its own weight and vibration generated in the first vibration element 5A. Thus, even if temporary impurities remain, there is little risk of obscuring the field of view of the camera body 12.
  • the results of the second example are shown below.
  • the dimensions of the piezoelectric vibrators 5A2, 5B2, the first vibrating body 5A1, the second vibrating body 5B1, and the support 4 used in the second embodiment are the same as those used in the first embodiment. .
  • This device is placed in a direction inclined 45 ° below the horizontal direction, and droplets in which 10 g of general soil is dispersed in 90 ml of water are dropped on the first vibrating element 5A little by little and continuously atomized.
  • the impurities having a small particle diameter were atomized together with water and could be removed from the outer surface of the first vibration element 5A.
  • impurities having a large particle size sometimes remain in the first vibration element 5A, but the region where the impurities remain is not the central portion of the first vibration element 5A. Further, the remaining impurities dropped due to their own weight and vibration, and were removed from the outer surface of the first vibration element 5A.
  • FIG. 10 is a cross-sectional view of the vibration device in the camera according to the fifth embodiment.
  • the camera of the present embodiment is different from the first embodiment in that the vibration device 51 is a lens module of the camera body.
  • the camera according to the present embodiment includes an imaging unit including an imaging element, as in the first embodiment.
  • the first vibration element 55A includes a first vibration body 55A1 and a first piezoelectric vibrator 5A2 provided on the first vibration body 55A1.
  • the first vibrating body 55A1 includes a lens 57.
  • the lens 57 is a lens disposed at the forefront of the camera.
  • the second vibration element 5B has the same configuration as the second vibration element 5B in the first embodiment.
  • the second vibration element 5 ⁇ / b> B is connected to the support body 4.
  • the first vibration element 55 ⁇ / b> A is also connected to the support 4.
  • the support 4 supports the first and second vibrating elements 55A and 5B at the vibration node of the first and second vibrating elements 55A and 5B.
  • the camera according to the present embodiment includes a housing unit in which the imaging unit is accommodated.
  • the support 4 is connected to the camera casing.
  • a hollow space is formed by the housing portion, the support body 4, and the first vibration element 55A.
  • the imaging unit is disposed in the hollow space.
  • the airtightness of the hollow space of the camera can be improved, and the reliability of the camera can be improved. Furthermore, water droplets and the like attached to the outer surface of the lens 57 can be sufficiently removed.
  • FIG. 11 shows a first modification of the first embodiment of the present invention.
  • the first piezoelectric vibrator 5A2 may be provided below the first vibrating body 5A1.
  • the second piezoelectric vibrator 5B2 may also be provided above the second vibrating body 5B1.
  • the first piezoelectric vibrator 5A2 and the second piezoelectric vibrator 5B2 are provided in the storage space A. Therefore, it is possible to prevent the first piezoelectric vibrator 5A2 and the second piezoelectric vibrator 5B2 from contacting the water droplets. Therefore, the reliability of the vibration device can be further increased.
  • FIG. 12 shows a second modification of the first embodiment of the present invention.
  • the vibration device of the second modification differs from the first modification in that it does not have the first piezoelectric vibrator.
  • the first and second vibrating elements 5A and 5B are excited in opposite phases at substantially the same natural resonance frequency.
  • the first vibration element 85A and the second vibration element 75B in the second modification can be sufficiently vibrated. Therefore, similarly to the first embodiment, the reliability of the camera body can be improved, and water droplets and the like attached to the first vibration element 85A can be sufficiently removed.
  • vibration device 25B ... second vibration element 25B1 ... second vibration body 31 ... vibration device 34 ... support Body 35A ... first vibration element 35A1 ... first vibration body 35A2, 35B2 ... first and second piezoelectric vibrators 45A ... first vibration element 45A2 ... first piezoelectric vibrator 47a ... electrode 51 ... vibration device 55A ... first vibration element 55A1 First vibrator 57 ... lens 68 ... piezoelectric layer 75A, 75B ... first and second vibration element 85A ... first vibration element

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Abstract

Provided is a vibration device by which the reliability of a camera body can be increased and which can sufficiently remove water droplets, etc. adhering to a lens cover. A vibration device 1 is provided with: a support body 4 having a first main surface 4d (one main surface) and a second main surface 4e (the other main surface) and having a through-hole extending through the support body 4 so as to open to the first main surface 4d and the second main surface 4e; a first vibration element 5A disposed on the first main surface 4d side of the support body 4; and a second vibration element 5B disposed on the second main surface 4e side of the support body 4. The first vibration element 5A has a first vibration body 5A1 having at least translucency. The second vibration element 5B has a second vibration body 5B1 and a second piezoelectric vibrator 5B2 (piezoelectric vibrator) which is provided to the second vibration body 5B1.

Description

振動装置及びカメラVibration device and camera
　本発明は、圧電振動子を用いた振動装置及びカメラに関する。 The present invention relates to a vibration device and a camera using a piezoelectric vibrator.
　従来、カメラにおいて、雨滴等の水滴を除去するための機構が種々提案されている。下記の特許文献１に記載の雨滴除去機能付きカメラでは、カメラ本体の前方にドーム型のレンズカバーが配置されている。レンズカバーには、円筒部が連結されている。この円筒部の内側面に圧電振動子が固定されている。圧電振動子により円筒部及びレンズカバーを振動させる。それによってレンズカバーに付着した水滴を除去する。 Conventionally, various mechanisms for removing water droplets such as raindrops have been proposed in cameras. In a camera with a raindrop removal function described in Patent Document 1 below, a dome-shaped lens cover is disposed in front of the camera body. A cylindrical portion is connected to the lens cover. A piezoelectric vibrator is fixed to the inner surface of the cylindrical portion. The cylindrical portion and the lens cover are vibrated by the piezoelectric vibrator. Thereby, water droplets adhering to the lens cover are removed.
特開２０１２－１３８７６８号公報JP 2012-138768 A
　特許文献１の雨滴除去機能付きカメラでは、カメラ本体の信頼性を高めるためには、レンズカバーと円筒部との連結部において十分に密閉性を高める必要があった。上記連結部は振動しているため、上記連結部の幅を広くすることより、接合力を高めることが多かった。しかしながら、この場合には、水滴を除去するための振動が阻害されやすかった。そのため、カメラ本体の信頼性を高めようとすると、レンズカバーに付着した水滴を十分に除去できないおそれがあった。加えて、水滴だけではなく、エタノール等の水以外の溶液、塩や凍結防止剤（塩化カルシウム）等が溶解した水溶液、泥水等の水に溶解しない不純物を含む液滴、またはコーヒー等のコロイド溶液等を除去することが求められていた。 In the camera with the raindrop removal function of Patent Document 1, in order to increase the reliability of the camera body, it is necessary to sufficiently improve the sealing performance at the connecting portion between the lens cover and the cylindrical portion. Since the connecting portion vibrates, the joining force is often increased by increasing the width of the connecting portion. However, in this case, the vibration for removing the water droplets was easily inhibited. Therefore, when trying to improve the reliability of the camera body, there is a possibility that water droplets attached to the lens cover cannot be sufficiently removed. In addition to water droplets, solutions other than water, such as ethanol, aqueous solutions in which salts or anti-freezing agents (calcium chloride) are dissolved, droplets containing impurities that are not soluble in water, such as muddy water, or colloidal solutions such as coffee Etc. were required to be removed.
　本発明の目的は、カメラ本体の信頼性を高めることができ、かつレンズカバーに付着した水滴等を十分に除去することができる、振動装置及びカメラを提供することにある。 An object of the present invention is to provide a vibration device and a camera that can enhance the reliability of the camera body and can sufficiently remove water droplets and the like attached to the lens cover.
　本発明に係る振動装置は、一方主面及び他方主面を有し、かつ前記一方主面及び前記他方主面において開口するように貫通している、貫通孔を有する支持体と、前記支持体の前記一方主面側に配置されている第１の振動素子と、前記支持体の前記他方主面側に配置されている第２の振動素子とを備え、前記第１の振動素子は、少なくとも透光性を有する第１の振動体を有し、前記第２の振動素子は、第２の振動体と、前記第２の振動体に設けられている圧電振動子を有する。 A vibration device according to the present invention includes a support body having a through hole that has one main surface and the other main surface, and passes through the one main surface and the other main surface, and the support body. A first vibration element disposed on the one main surface side and a second vibration element disposed on the other main surface side of the support, wherein the first vibration element includes at least A first vibrating body having translucency is included, and the second vibrating element includes a second vibrating body and a piezoelectric vibrator provided in the second vibrating body.
　本発明に係る振動装置のある特定の局面では、前記支持体は、前記第１の振動素子及び前記第２の振動素子の振動の節において、前記第１の振動素子及び前記第２の振動素子を支持している。 In a specific aspect of the vibration device according to the aspect of the invention, the support may include the first vibration element and the second vibration element in a vibration node of the first vibration element and the second vibration element. Support.
　本発明に係る振動装置の他の特定の局面では、前記支持体は、前記第１の振動素子及び前記第２の振動素子の外周縁において、前記第１の振動素子及び前記第２の振動素子を支持している。 In another specific aspect of the vibration device according to the aspect of the invention, the support may include the first vibration element and the second vibration element at outer peripheral edges of the first vibration element and the second vibration element. Support.
　本発明に係る振動装置のさらに他の特定の局面では、前記第１の振動素子が、前記第１の振動体に設けられている第１の圧電振動子を有し、前記第２の振動素子の前記圧電振動子が第２の圧電振動子であり、前記第１，第２の圧電振動子が互いに逆位相で振動するように構成されている。この場合には、第１，第２の振動素子及び支持体により、座屈音叉型振動子が構成されている。それによって、カメラ本体の信頼性をより一層高めることができ、かつレンズカバーに付着した水滴等をより一層除去することができる。 In still another specific aspect of the vibration device according to the invention, the first vibration element includes a first piezoelectric vibrator provided in the first vibration body, and the second vibration element. The piezoelectric vibrator is a second piezoelectric vibrator, and the first and second piezoelectric vibrators vibrate in opposite phases. In this case, a buckled tuning fork vibrator is configured by the first and second vibrating elements and the support. Thereby, the reliability of the camera body can be further improved, and water droplets and the like attached to the lens cover can be further removed.
　本発明に係る振動装置の他の特定の局面では、前記支持体が筒状の形状を有する。 In another specific aspect of the vibration device according to the present invention, the support has a cylindrical shape.
　本発明に係る振動装置の別の特定の局面では、前記第１の振動素子が複数の振動領域を有し、該複数の振動領域において隣り合う振動領域が逆位相で振動するように構成されている。この場合には、第１の振動素子において水滴等を除去する部分を適宜変更することができる。 In another specific aspect of the vibration device according to the present invention, the first vibration element has a plurality of vibration regions, and adjacent vibration regions in the plurality of vibration regions are configured to vibrate in opposite phases. Yes. In this case, the portion of the first vibration element from which water droplets and the like are removed can be changed as appropriate.
　本発明に係る振動装置のさらに別の特定の局面では、前記第１の振動体が板状の形状を有する。 In still another specific aspect of the vibration device according to the present invention, the first vibration body has a plate shape.
　本発明に係る振動装置のさらに別の特定の局面では、前記第１の振動体がドーム状の形状を有する。 In yet another specific aspect of the vibration device according to the present invention, the first vibration body has a dome shape.
　本発明に係る振動装置のさらに別の特定の局面では、前記第２の振動体が透光性を有し、かつ板状の形状を有する。 In yet another specific aspect of the vibration device according to the present invention, the second vibrating body has a light transmitting property and has a plate shape.
　本発明に係る振動装置のさらに別の特定の局面では、前記第２の振動体が、開口部と、該開口部から前記第１の振動素子側とは反対側に延びている延長部とを有する。 In still another specific aspect of the vibration device according to the invention, the second vibrating body includes an opening and an extension extending from the opening to the side opposite to the first vibration element. Have.
　本発明に係る振動装置のさらに別の特定の局面では、前記支持体に接続されている、ケース部材がさらに備えられており、前記第１の振動素子、前記支持体及び前記ケース部材により収納空間が形成されている。この場合には、収納空間にカメラ本体を収納することができる。 In still another specific aspect of the vibration device according to the present invention, a case member connected to the support is further provided, and a storage space is provided by the first vibration element, the support, and the case member. Is formed. In this case, the camera body can be stored in the storage space.
　本発明に係るカメラのある広い局面では、本発明に従って構成されている振動装置と、前記収納空間内に収納されているレンズモジュールと、前記収納空間内に収納されている撮像素子とが備えられている。 In a wide aspect of the camera according to the present invention, a vibration device configured according to the present invention, a lens module housed in the housing space, and an image sensor housed in the housing space are provided. ing.
　本発明に係るカメラの他の広い局面では、本発明に従って構成されている振動装置であり、かつレンズを含むレンズモジュールと、撮像素子とが備えられており、前記振動装置の前記第１，第２の振動素子の内の少なくとも一方が、前記レンズを含む。 In another broad aspect of the camera according to the present invention, the vibration device is configured in accordance with the present invention, and includes a lens module including a lens and an image sensor, and the first and first of the vibration device are provided. At least one of the two vibration elements includes the lens.
　本発明によれば、カメラ本体の信頼性を高めることができ、かつレンズカバーに付着した水滴等を十分に除去することができる、振動装置及びカメラを提供することができる。 According to the present invention, it is possible to provide a vibration device and a camera that can improve the reliability of the camera body and can sufficiently remove water droplets and the like attached to the lens cover.
図１は、本発明の第１の実施形態に係るカメラの正面断面図である。FIG. 1 is a front sectional view of a camera according to the first embodiment of the present invention. 図２は、本発明の第１の実施形態における振動装置の分解斜視図である。FIG. 2 is an exploded perspective view of the vibration device according to the first embodiment of the present invention. 図３（ａ）及び図３（ｂ）は、本発明の第１の実施形態で用いられている第１の圧電振動子の斜視図及び図３（ａ）中のＸ－Ｘ線に沿う断面図である。3 (a) and 3 (b) are a perspective view of the first piezoelectric vibrator used in the first embodiment of the present invention and a cross section taken along line XX in FIG. 3 (a). FIG. 図４は、本発明の第１の実施形態における第１，第２の振動素子の振動状態を示す模式的断面図である。FIG. 4 is a schematic cross-sectional view showing the vibration state of the first and second vibrating elements according to the first embodiment of the present invention. 図５は、本発明の第２の実施形態に係る振動装置の正面断面図である。FIG. 5 is a front sectional view of a vibration device according to the second embodiment of the present invention. 図６は、本発明の第３の実施形態に係る振動装置の正面断面図である。FIG. 6 is a front cross-sectional view of a vibration device according to a third embodiment of the present invention. 図７（ａ）～図７（ｄ）は、第１の振動素子及び第２の振動素子における振動モードを説明するための模式図である。FIGS. 7A to 7D are schematic diagrams for explaining vibration modes in the first vibration element and the second vibration element. 図８は、本発明の第４の実施形態における第１の振動素子の平面図である。FIG. 8 is a plan view of a first vibration element according to the fourth embodiment of the present invention. 図９は、本発明の第４の実施形態の変形例における第１の圧電振動子の圧電体層の模式的平面図である。FIG. 9 is a schematic plan view of the piezoelectric layer of the first piezoelectric vibrator in the modification of the fourth embodiment of the present invention. 図１０は、本発明の第５の実施形態に係るカメラにおける振動装置の正面断面図である。FIG. 10 is a front sectional view of the vibration device in the camera according to the fifth embodiment of the present invention. 図１１は、本発明の第１の実施形態の第１の変形例に係るカメラにおける振動装置の正面断面図である。FIG. 11 is a front cross-sectional view of the vibration device in the camera according to the first modification of the first embodiment of the present invention. 図１２は、本発明の第１の実施形態の第２の変形例に係るカメラにおける振動装置の正面断面図である。FIG. 12 is a front cross-sectional view of the vibration device in the camera according to the second modification of the first embodiment of the present invention.
　以下、図面を参照しつつ、本発明の具体的な実施形態を説明することにより、本発明を明らかにする。 Hereinafter, the present invention will be clarified by describing specific embodiments of the present invention with reference to the drawings.
　なお、本明細書に記載の各実施形態は、例示的なものであり、異なる実施形態間において、構成の部分的な置換または組み合わせが可能であることを指摘しておく。 It should be pointed out that each embodiment described in this specification is an example, and a partial replacement or combination of configurations is possible between different embodiments.
　図１は、本発明の第１の実施形態に係るカメラの正面断面図である。図２は、第１の実施形態における振動装置の分解斜視図である。 FIG. 1 is a front sectional view of a camera according to a first embodiment of the present invention. FIG. 2 is an exploded perspective view of the vibration device according to the first embodiment.
　図１に示すように、カメラ１０は、振動装置１を有する。振動装置１内には、カメラ本体１２が収納されている。カメラ１０は、図１の上方及び下方に対応する高さ方向を有する。本明細書における上方及び下方は、上記高さ方向における上方及び下方である。 As shown in FIG. 1, the camera 10 has a vibration device 1. A camera body 12 is housed in the vibration device 1. The camera 10 has a height direction corresponding to the upper side and the lower side in FIG. The upper and lower parts in this specification are the upper and lower parts in the height direction.
　カメラ本体１２は、本体部材１３を有する。本体部材１３の下端は、ベースプレート３に固定されている。本体部材１３の上端に撮像部１４が固定されている。撮像部１４内には、撮像素子を含む回路１５が内蔵されている。撮像部１４に対向するように、レンズモジュール１６が固定されている。レンズモジュール１６は、外壁部１６ａを有する。外壁部１６ａの内部に複数のレンズ１７が設けられている。 The camera body 12 has a body member 13. The lower end of the main body member 13 is fixed to the base plate 3. An imaging unit 14 is fixed to the upper end of the main body member 13. A circuit 15 including an image sensor is built in the imaging unit 14. The lens module 16 is fixed so as to face the imaging unit 14. The lens module 16 has an outer wall portion 16a. A plurality of lenses 17 are provided inside the outer wall portion 16a.
　上記カメラ本体１２の構造は、レンズ１７の前方に位置している被撮像物を撮像し得る限り特に限定されるものではない。 The structure of the camera body 12 is not particularly limited as long as the object to be imaged located in front of the lens 17 can be imaged.
　他方、振動装置１は、ケース部材２と、座屈音叉型振動子９とを有する。座屈音叉型振動子９は、第１，第２の振動素子５Ａ，５Ｂ及び支持体４により構成されている。 On the other hand, the vibration device 1 includes a case member 2 and a buckling tuning fork type vibrator 9. The buckling tuning fork vibrator 9 is composed of first and second vibration elements 5A and 5B and a support 4.
　図１及び図２に示すように、本実施形態では、ケース部材２は円筒状である。もっとも、ケース部材２は、角筒状等の他の形状であってもよい。ケース部材２は、例えば、金属や合成樹脂からなる。 As shown in FIGS. 1 and 2, in this embodiment, the case member 2 is cylindrical. However, the case member 2 may have other shapes such as a rectangular tube shape. The case member 2 is made of metal or synthetic resin, for example.
　ケース部材２の下端がベースプレート３に固定されている。なお、ケース部材２及びベースプレート３は、一体で形成されていてもよい。 The lower end of the case member 2 is fixed to the base plate 3. The case member 2 and the base plate 3 may be integrally formed.
　ケース部材２の上端に、支持体４が連結されている。支持体４は円環状の平面形状を有し、一方主面としての第１の主面４ｄと他方主面としての第２の主面４ｅとを有する。支持体４は、第１の主面４ｄ及び第２の主面４ｅにおいて開口するように貫通しており、かつ第１，第２の主面４ｄ，４ｅの中央に位置する貫通孔を有する。第１の主面４ｄにおける上記貫通孔の上方には、延長部４ａが延びている。第２の主面４ｅにおける上記貫通孔の下方には、延長部４ｂが延びている。支持体４は、後述する第１，第２の振動素子５Ａ，５Ｂの外周縁を支持している。支持体４は、例えば、金属や合成樹脂、あるいはセラミック材料等からなる。 The support 4 is connected to the upper end of the case member 2. The support 4 has an annular planar shape, and has a first main surface 4d as one main surface and a second main surface 4e as the other main surface. The support 4 passes through the first main surface 4d and the second main surface 4e so as to open, and has a through hole located at the center of the first and second main surfaces 4d and 4e. An extension 4a extends above the through hole in the first main surface 4d. An extension 4b extends below the through hole in the second main surface 4e. The support 4 supports outer peripheral edges of first and second vibration elements 5A and 5B described later. The support 4 is made of, for example, a metal, a synthetic resin, or a ceramic material.
　支持体４の延長部４ａの上端に、円板状の第１の振動素子５Ａが連結されている。第１の振動素子５Ａは、円板状の第１の振動体５Ａ１を有する。第１の振動体５Ａ１は透光性を有する。第１の振動体５Ａ１の支持体４側とは反対側に、円環状の第１の圧電振動子５Ａ２が設けられている。第１の圧電振動子５Ａ２に交流電圧を印加することにより、第１の圧電振動子５Ａ２が励振される。それによって、第１の振動体５Ａ１が振動する。第１の振動体５Ａ１は、透光性材料、例えばガラスや合成樹脂等からなる。 A disk-shaped first vibration element 5A is connected to the upper end of the extension 4a of the support 4. The first vibration element 5A includes a disk-shaped first vibration body 5A1. The first vibrating body 5A1 has translucency. An annular first piezoelectric vibrator 5A2 is provided on the opposite side of the first vibrating body 5A1 from the support 4 side. By applying an AC voltage to the first piezoelectric vibrator 5A2, the first piezoelectric vibrator 5A2 is excited. Thereby, the first vibrating body 5A1 vibrates. The first vibrating body 5A1 is made of a translucent material such as glass or synthetic resin.
　支持体４の延長部４ｂの下端に第２の振動素子５Ｂが連結されている。第２の振動素子５Ｂは、第１の振動素子５Ａに対向するように設けられている。第２の振動素子５Ｂは、第２の振動体５Ｂ１を有する。第２の振動体５Ｂ１は、円環状の平面形状を有し、開口部を有する。第２の振動体５Ｂ１は、開口部から第１の振動素子５Ａ側とは反対側に延びている、延長部５Ｂ１ｂを有する。第２の振動体５Ｂ１の第１の振動素子５Ａ側とは反対側に、円環状の第２の圧電振動子５Ｂ２が設けられている。第２の圧電振動子５Ｂ２は、延長部５Ｂ１ｂを囲むように設けられている。第２の圧電振動子５Ｂ２に交流電圧を印加することにより、第２の圧電振動子５Ｂ２が励振される。それによって、第２の振動体５Ｂ１が振動する。 The second vibration element 5B is connected to the lower end of the extension 4b of the support 4. The second vibration element 5B is provided so as to face the first vibration element 5A. The second vibration element 5B includes a second vibration body 5B1. The second vibrating body 5B1 has an annular planar shape and has an opening. The second vibrating body 5B1 has an extension 5B1b that extends from the opening to the side opposite to the first vibrating element 5A. An annular second piezoelectric vibrator 5B2 is provided on the opposite side of the second vibrating body 5B1 from the first vibrating element 5A side. The second piezoelectric vibrator 5B2 is provided so as to surround the extension part 5B1b. By applying an AC voltage to the second piezoelectric vibrator 5B2, the second piezoelectric vibrator 5B2 is excited. Thereby, the second vibrating body 5B1 vibrates.
　本実施形態では、第２の振動体５Ｂ１は透光性を有する。第２の振動体５Ｂ１は、透光性材料、例えばガラスや合成樹脂等からなる。なお、第２の振動体５Ｂ１は、透光性を有しなくともよい。第１，第２の振動素子５Ａ，５Ｂ及び支持体４の平面形状は、円形以外の形状であってもよく、例えば、矩形等であってもよい。支持体４は、円筒状や角筒状等の、筒状の形状であってもよい。 In the present embodiment, the second vibrating body 5B1 has translucency. The second vibrating body 5B1 is made of a translucent material such as glass or synthetic resin. Note that the second vibrating body 5B1 may not have translucency. The planar shapes of the first and second vibrating elements 5A and 5B and the support 4 may be shapes other than a circle, for example, a rectangle or the like. The support 4 may have a cylindrical shape such as a cylindrical shape or a rectangular tube shape.
　支持体４は、第１，第２の振動素子５Ａ，５Ｂの間に配置されており、第１，第２の振動素子５Ａ，５Ｂを連結している。それによって、座屈音叉型振動子９が形成されている。詳細は後述するが、この座屈音叉型振動子９の振動の節に、支持体４が位置している。すなわち、支持体４は、第１，第２の振動素子５Ａ，５Ｂの振動の節において、第１，第２の振動素子５Ａ，５Ｂを支持している。 The support 4 is disposed between the first and second vibration elements 5A and 5B, and connects the first and second vibration elements 5A and 5B. Thereby, a buckling tuning fork vibrator 9 is formed. Although details will be described later, the support 4 is located at the vibration node of the buckling tuning fork vibrator 9. That is, the support 4 supports the first and second vibrating elements 5A and 5B at the vibration node of the first and second vibrating elements 5A and 5B.
　図１に示すように、振動装置１においては、ケース部材２、支持体４及び第１の振動素子５Ａにより、収納空間Ａが形成されている。収納空間Ａは、ベースプレート３により閉成され、密閉された空間となっている。収納空間Ａ内に、レンズモジュール１６及び撮像素子を有するカメラ本体１２が収納されている。 As shown in FIG. 1, in the vibration device 1, a storage space A is formed by the case member 2, the support body 4, and the first vibration element 5 </ b> A. The storage space A is closed by the base plate 3 and is a sealed space. In the storage space A, the camera body 12 having the lens module 16 and the image sensor is stored.
　カメラ本体１２の最前方に位置しているレンズ１７の前方には、第１の振動素子５Ａが位置している。第１の振動素子５Ａは、カメラ１０におけるレンズカバーである。カメラ本体１２は、透光性を有する第１の振動体５Ａ１の外側を撮像する。第１の振動素子５Ａを上述のように振動させ、第１の振動素子５Ａに付着した水滴等を霧化させたり、移動させたりすることにより除去する。それによって、カメラ本体１２の視界を改善することができる。 The first vibration element 5A is positioned in front of the lens 17 positioned in the forefront of the camera body 12. The first vibration element 5 </ b> A is a lens cover in the camera 10. The camera body 12 images the outside of the first vibrating body 5A1 having translucency. The first vibration element 5A is vibrated as described above, and water droplets and the like attached to the first vibration element 5A are removed by atomization or movement. Thereby, the field of view of the camera body 12 can be improved.
　本実施形態のカメラ１０の特徴は、支持体４が、第１，第２の振動素子５Ａ，５Ｂの振動の節において、第１，第２の振動素子５Ａ，５Ｂを支持していることにある。 A feature of the camera 10 of the present embodiment is that the support 4 supports the first and second vibrating elements 5A and 5B at the vibration node of the first and second vibrating elements 5A and 5B. is there.
　ここで、支持体４がケース部材２に連結されている部分を連結部４ｃとする。このとき、支持体４は上記振動の節に位置しているため、連結部４ｃはほぼ振動しない。よって、水滴等を除去するための振動の振幅を大きくしても、収納空間Ａの密閉性を効果的に高めることができる。従って、カメラ本体１２の信頼性を高めることができる。さらに、支持体４がケース部材２に連結されていても、第１，第２の振動素子５Ａ，５Ｂの振動は阻害され難い。よって、第１の振動素子５Ａに付着した水滴等を十分に除去することができる。 Here, a portion where the support 4 is connected to the case member 2 is defined as a connecting portion 4c. At this time, since the support body 4 is located at the vibration node, the connecting portion 4c hardly vibrates. Therefore, even if the amplitude of the vibration for removing water droplets or the like is increased, the sealing property of the storage space A can be effectively improved. Therefore, the reliability of the camera body 12 can be increased. Furthermore, even if the support body 4 is connected to the case member 2, the vibrations of the first and second vibration elements 5A and 5B are hardly inhibited. Therefore, water droplets and the like attached to the first vibration element 5A can be sufficiently removed.
　以下において、第１，第２の振動素子５Ａ，５Ｂ及び支持体４により構成されている上記座屈音叉型振動子９の詳細を説明する。 Hereinafter, details of the buckled tuning fork vibrator 9 constituted by the first and second vibrating elements 5A and 5B and the support 4 will be described.
　座屈音叉型振動とは、略同一の固有共振周波数をもつ２つの振動素子（第１，第２の振動素子５Ａ，５Ｂ）を結合した際に、互いに共鳴し合い、反対称に振動するモードが出現する振動のことである。 The buckling tuning fork type vibration is a mode in which when two vibration elements (first and second vibration elements 5A and 5B) having substantially the same natural resonance frequency are coupled, they resonate with each other and vibrate antisymmetrically. It is a vibration that appears.
　本実施形態では、第１，第２の振動素子５Ａ，５Ｂの固有共振周波数は同一である。なお、第１，第２の振動素子５Ａ，５Ｂの厚みや寸法等を調整することにより、第１，第２の振動素子５Ａ，５Ｂの固有共振周波数を一致させることができる。第１，第２の振動素子５Ａ，５Ｂの振動モードは互いに反対称である。 In this embodiment, the natural resonance frequencies of the first and second vibrating elements 5A and 5B are the same. The natural resonance frequencies of the first and second vibrating elements 5A and 5B can be matched by adjusting the thicknesses and dimensions of the first and second vibrating elements 5A and 5B. The vibration modes of the first and second vibrating elements 5A and 5B are antisymmetric to each other.
　ここで、第１の圧電振動子５Ａ２は、図３（ａ）及び図３（ｂ）に示すように、圧電体層８を有する。圧電体層８は、分極軸方向を有する。該分極軸方向は、圧電体層８の厚み方向に平行な方向である。圧電体層８は、Ｐｂ（Ｚｒ，Ｔｉ）Ｏ３や（Ｋ，Ｎａ）ＮｂＯ３等の適宜の圧電セラミックスからなる。あるいは、圧電体層８は、ＬｉＴａＯ３やＬｉＮｂＯ３等の圧電単結晶からなっていてもよい。 Here, the first piezoelectric vibrator 5A2 has a piezoelectric layer 8 as shown in FIGS. 3 (a) and 3 (b). The piezoelectric layer 8 has a polarization axis direction. The polarization axis direction is a direction parallel to the thickness direction of the piezoelectric layer 8. The piezoelectric layer 8 is made of an appropriate piezoelectric ceramic such as Pb (Zr, Ti) O 3 or (K, Na) NbO 3 . Alternatively, the piezoelectric layer 8 may be made of a piezoelectric single crystal such as LiTaO 3 or LiNbO 3 .
　圧電体層８の上面の全面に電極７ａが形成されている。圧電体層８の下面の全面に電極７ｂが形成されている。電極７ａ，７ｂは、例えば圧電体層８側から、ＮｉＣｒ層、ＮｉＣｕ層、Ａｇ層が順番に積層された積層体からなる。なお、電極７ａ，７ｂの材料は特に限定されない。電極７ａ，７ｂは、単層の金属層からなっていてもよい。 An electrode 7 a is formed on the entire upper surface of the piezoelectric layer 8. An electrode 7 b is formed on the entire lower surface of the piezoelectric layer 8. The electrodes 7a and 7b are made of a laminated body in which, for example, a NiCr layer, a NiCu layer, and an Ag layer are laminated in this order from the piezoelectric layer 8 side. The material for the electrodes 7a and 7b is not particularly limited. The electrodes 7a and 7b may be composed of a single metal layer.
　図１に戻り、第２の圧電振動子５Ｂ２は、第１の圧電振動子５Ａ２と略同様の構成を有する。本実施形態では、第１，第２の圧電振動子５Ａ２，５Ｂ２の分極軸方向は同じ方向である。第１，第２の圧電振動子５Ａ２，５Ｂ２に互いに逆位相の交流電圧を印加することにより、第１，第２の圧電振動子５Ａ２，５Ｂ２が互いに逆位相で励振される。このように、第１，第２の圧電振動子５Ａ２，５Ｂ２は、逆位相で振動するように構成されている。 Returning to FIG. 1, the second piezoelectric vibrator 5B2 has substantially the same configuration as the first piezoelectric vibrator 5A2. In the present embodiment, the polarization axis directions of the first and second piezoelectric vibrators 5A2 and 5B2 are the same direction. By applying alternating voltages having opposite phases to the first and second piezoelectric vibrators 5A2 and 5B2, the first and second piezoelectric vibrators 5A2 and 5B2 are excited in opposite phases. Thus, the first and second piezoelectric vibrators 5A2 and 5B2 are configured to vibrate in opposite phases.
　なお、第１，第２の圧電振動子５Ａ２，５Ｂ２の分極軸方向が、互いに逆方向であってもよい。この場合には、第１，第２の圧電振動子５Ａ２，５Ｂ２に同位相の交流電圧を印加することにより、第１，第２の圧電振動子５Ａ２，５Ｂ２は互いに逆位相で励振される。 The polarization axis directions of the first and second piezoelectric vibrators 5A2 and 5B2 may be opposite to each other. In this case, the first and second piezoelectric vibrators 5A2 and 5B2 are excited in opposite phases by applying an AC voltage having the same phase to the first and second piezoelectric vibrators 5A2 and 5B2.
　図４は、第１の実施形態における第１，第２の振動素子の振動状態を示す模式的断面図である。一点鎖線は、第１，第２の振動素子の振動を模式的に示す。なお、図４においては、後述する（０，０）モードで振動している例を示す。 FIG. 4 is a schematic cross-sectional view showing the vibration state of the first and second vibration elements in the first embodiment. The alternate long and short dash line schematically shows the vibration of the first and second vibrating elements. FIG. 4 shows an example of vibration in the (0, 0) mode described later.
　図４に示すように、第１，第２の振動素子５Ａ，５Ｂが同一の固有共振周波数で逆位相に励振されるように構成されている。それによって、支持体４が配置されている部分を振動の節とすることができる。このように、上記座屈音叉型振動子９が構成されている。 As shown in FIG. 4, the first and second vibrating elements 5A and 5B are configured to be excited in opposite phases at the same natural resonance frequency. Thereby, a portion where the support 4 is disposed can be used as a vibration node. In this way, the buckling tuning fork type vibrator 9 is configured.
　なお、第１，第２の振動素子５Ａ，５Ｂの固有共振周波数は完全に同一である必要はない。支持体４が配置されている部分が節となるように第１，第２の振動素子５Ａ，５Ｂが振動する程度に、第１，第２の振動素子５Ａ，５Ｂの固有共振周波数がほぼ同一であればよい。 Note that the natural resonance frequencies of the first and second vibrating elements 5A and 5B do not have to be completely the same. The natural resonance frequencies of the first and second vibrating elements 5A and 5B are substantially the same to such an extent that the first and second vibrating elements 5A and 5B vibrate so that the portion where the support 4 is disposed becomes a node. If it is.
　図１に示すように、本実施形態では、カメラ本体１２は、第２の振動素子５Ｂの開口部の内側に位置している。カメラ本体１２の最前方に位置しているレンズ１７は、高さ方向において、第１，第２の振動素子５Ａ，５Ｂの間に位置している。第１，第２の振動素子５Ａ，５Ｂの内では、第１の振動素子５Ａのみがカメラ本体１２の前方に位置している。それによって、カメラ本体１２の視界を良好とすることができる。加えて、カメラ１０の低背化を図ることができる。 As shown in FIG. 1, in this embodiment, the camera body 12 is located inside the opening of the second vibration element 5B. The lens 17 positioned at the forefront of the camera body 12 is positioned between the first and second vibrating elements 5A and 5B in the height direction. Of the first and second vibrating elements 5A and 5B, only the first vibrating element 5A is positioned in front of the camera body 12. Thereby, the field of view of the camera body 12 can be improved. In addition, the height of the camera 10 can be reduced.
　第１，第２の圧電振動子５Ａ２，５Ｂ２は、本実施形態のように、第１，第２の振動素子５Ａ，５Ｂの振動の節よりも、第１，第２の振動素子５Ａ，５Ｂの中央側に配置されていることが好ましい。この場合には、第１，第２の振動素子５Ａ，５Ｂの外周縁に近い部分において、支持体４に連結することができる。それによって、第１の振動素子５Ａの全体の面積における、カメラ１０の視野内の水滴等を除去するために振動する部分の面積を大きくすることができる。よって、水滴等を効率的に除去することができる。 As in the present embodiment, the first and second piezoelectric vibrators 5A2 and 5B2 have the first and second vibration elements 5A and 5B rather than the vibration nodes of the first and second vibration elements 5A and 5B. It is preferable that it is arrange | positioned at the center side. In this case, the first and second vibrating elements 5A and 5B can be connected to the support 4 at portions close to the outer peripheral edge. Thereby, in the entire area of the first vibration element 5A, the area of the portion that vibrates in order to remove water droplets and the like in the field of view of the camera 10 can be increased. Therefore, water drops etc. can be removed efficiently.
　より好ましくは、第１の振動素子５Ａの振動の節が、第１の振動素子５Ａの外周縁に位置しており、該外周縁に支持体４が連結されていることが望ましい。それによって、平面視において、第１の振動素子５Ａにおける、支持体４が連結されている部分の外側に振動が伝搬することはない。従って、第１の振動素子５Ａをより一層効率的に振動させることができ、水滴等をより一層効率的に除去することができる。 More preferably, the vibration node of the first vibration element 5A is located on the outer peripheral edge of the first vibration element 5A, and the support 4 is connected to the outer peripheral edge. Thereby, in a plan view, vibration does not propagate outside the portion of the first vibration element 5A to which the support 4 is connected. Accordingly, the first vibrating element 5A can be vibrated more efficiently, and water droplets and the like can be removed more efficiently.
　さらに好ましくは、第１，第２の振動素子５Ａ，５Ｂの振動の節が、第１，第２の振動素子５Ａ，５Ｂの外周縁に位置しており、第１，第２の振動素子５Ａ，５Ｂの外周縁に支持体４が連結されていることが望ましい。それによって、上記効果に加えて、カメラ１０の小型化を進めることができる。 More preferably, the vibration nodes of the first and second vibrating elements 5A and 5B are located on the outer peripheral edges of the first and second vibrating elements 5A and 5B, and the first and second vibrating elements 5A. , 5B is preferably connected to the outer peripheral edge. Thereby, in addition to the above effects, the camera 10 can be reduced in size.
　本実施形態のように、ケース部材２と第２の振動素子５Ｂとは、ギャップを介して設けられていることが好ましい。それによって、第２の振動素子５Ｂの振動が阻害され難い。 As in the present embodiment, the case member 2 and the second vibration element 5B are preferably provided via a gap. Thereby, the vibration of the second vibration element 5B is not easily inhibited.
　図５は、第２の実施形態に係る振動装置の正面断面図である。 FIG. 5 is a front sectional view of the vibration device according to the second embodiment.
　振動装置２１は、第２の振動体２５Ｂ１が円板状である点において、第１の実施形態における振動装置１と異なる。上記以外の点においては、振動装置２１は、第１の実施形態の振動装置１と同様の構成を有する。 The vibration device 21 is different from the vibration device 1 in the first embodiment in that the second vibration body 25B1 has a disk shape. Except for the above, the vibration device 21 has the same configuration as that of the vibration device 1 of the first embodiment.
　本実施形態においても、第１の実施形態と同様に、カメラ本体の信頼性を高めることができ、かつ第１の振動素子５Ａに付着した水滴等を十分に除去することができる。 Also in the present embodiment, as in the first embodiment, the reliability of the camera body can be improved, and water droplets and the like attached to the first vibration element 5A can be sufficiently removed.
　第１，第２の振動体５Ａ１，２５Ｂ１は円板状であり、複雑な形状を有しない。よって、第１，第２の振動素子５Ａ，２５Ｂの固有共振周波数を容易に同一とすることができる。 The first and second vibrating bodies 5A1 and 25B1 are disk-shaped and do not have a complicated shape. Therefore, the natural resonance frequencies of the first and second vibrating elements 5A and 25B can be easily made the same.
　振動装置２１においては、第１，第２の振動素子５Ａ，２５Ｂは同一の形状である。従って、生産性を高めることができる。 In the vibration device 21, the first and second vibration elements 5A and 25B have the same shape. Therefore, productivity can be improved.
　図６は、第３の実施形態に係る振動装置の正面断面図である。 FIG. 6 is a front sectional view of the vibration device according to the third embodiment.
　振動装置３１は、第１の振動体３５Ａ１がドーム状の形状である点及び支持体３４が上下に延びる延長部を有しない点で、第１の実施形態における振動装置１と異なる。また、第１，第２の圧電振動子３５Ａ２，３５Ｂ２の配置も第１の実施形態とは異なる。上記以外の点においては、振動装置３１は、第１の実施形態の振動装置１と同様の構成を有する。 The vibration device 31 is different from the vibration device 1 in the first embodiment in that the first vibration body 35A1 has a dome shape and the support body 34 does not have an extension part extending vertically. The arrangement of the first and second piezoelectric vibrators 35A2 and 35B2 is also different from that of the first embodiment. Except for the above, the vibration device 31 has the same configuration as that of the vibration device 1 of the first embodiment.
　第１，第２の振動素子３５Ａ，５Ｂの固有共振周波数が同一になるように，第１，第２の振動体３５Ａ１，５Ｂ１が形成されている。第１の圧電振動子３５Ａ２は、第１の振動素子３５Ａの支持体３４側に設けられている。第２の圧電振動子３５Ｂ２も、第２の振動素子５Ｂの支持体３４側に設けられている。第１，第２の圧電振動子３５Ａ２，３５Ｂ２は、その一部が支持体３４に接合されている。具体的には、第１，第２の圧電振動子３５Ａ２，３５Ｂ２の外周縁は支持体３４に支持されているが、内周縁は支持体３４に支持されていない。本実施形態では、第１，第２の圧電振動子３５Ａ２，３５Ｂ２の分極軸方向は互いに逆方向である。 The first and second vibrating bodies 35A1 and 5B1 are formed so that the natural resonance frequencies of the first and second vibrating elements 35A and 5B are the same. The first piezoelectric vibrator 35A2 is provided on the support 34 side of the first vibration element 35A. The second piezoelectric vibrator 35B2 is also provided on the support 34 side of the second vibration element 5B. Part of the first and second piezoelectric vibrators 35A2 and 35B2 is joined to the support 34. Specifically, the outer peripheral edges of the first and second piezoelectric vibrators 35A2 and 35B2 are supported by the support 34, but the inner peripheral edges are not supported by the support 34. In the present embodiment, the polarization axis directions of the first and second piezoelectric vibrators 35A2 and 35B2 are opposite to each other.
　支持体３４は適宜の金属からなる。支持体３４は、第１，第２の圧電振動子３５Ａ２，３５Ｂ２を外部に電気的に接続している外部電極として機能している。よって、振動装置３１においては、第１，第２の圧電振動子３５Ａ２，３５Ｂ２に同位相の交流電圧が印加される。第１，第２の圧電振動子３５Ａ２，３５Ｂ２の分極軸方向は互いに逆方向であるため、第１，第２の圧電振動子３５Ａ２，３５Ｂ２は、互いに逆位相で振動する。 The support 34 is made of an appropriate metal. The support 34 functions as an external electrode that electrically connects the first and second piezoelectric vibrators 35A2 and 35B2 to the outside. Therefore, in the vibration device 31, an in-phase AC voltage is applied to the first and second piezoelectric vibrators 35A2 and 35B2. Since the polarization axis directions of the first and second piezoelectric vibrators 35A2 and 35B2 are opposite to each other, the first and second piezoelectric vibrators 35A2 and 35B2 vibrate in opposite phases.
　本実施形態においても、支持体３４が配置されている部分が振動の節となるように、第１，第２の振動素子３５Ａ，５Ｂが振動する。よって、振動装置３１における密閉性を高めることができ、カメラ本体の信頼性を高めることができる。さらに、第１の振動素子３５Ａに付着した水滴等を十分に除去することができる。 Also in the present embodiment, the first and second vibration elements 35A and 5B vibrate so that the portion where the support 34 is disposed becomes a vibration node. Therefore, the sealing property in the vibration device 31 can be enhanced, and the reliability of the camera body can be enhanced. Furthermore, water droplets and the like attached to the first vibration element 35A can be sufficiently removed.
　なお、支持体３４が絶縁体からなっており、支持体３４の第１の主面及び第２の主面に電極が設けられていてもよい。支持体３４の第１の主面における電極が第１の圧電振動子３５Ａ２の電極に接続されており、かつ支持体３４の第２の主面における電極が第２の圧電振動子３５Ｂ２の電極に接続されていてもよい。この場合には、第１，第２の圧電振動子３５Ａ２，３５Ｂ２の分極軸方向は同じ方向であってもよく、あるいは互いに逆方向であってもよい。 The support 34 is made of an insulator, and electrodes may be provided on the first main surface and the second main surface of the support 34. The electrode on the first main surface of the support 34 is connected to the electrode of the first piezoelectric vibrator 35A2, and the electrode on the second main surface of the support 34 is connected to the electrode of the second piezoelectric vibrator 35B2. It may be connected. In this case, the polarization axis directions of the first and second piezoelectric vibrators 35A2 and 35B2 may be the same or opposite to each other.
　第１～第３の実施形態では、第１の振動素子の振動領域が１個である例を示した。以下において、第１の振動素子が複数の振動領域を有する例を説明する。 In the first to third embodiments, the example in which the vibration region of the first vibration element is one has been described. Hereinafter, an example in which the first vibration element has a plurality of vibration regions will be described.
　ここで、第１の振動素子における振動モードを、下記の図７（ａ）～図７（ｄ）を参照して説明する。 Here, the vibration mode in the first vibration element will be described with reference to FIGS. 7 (a) to 7 (d) below.
　図７（ａ）～図７（ｄ）は、第１の振動素子及び第２の振動素子における振動モードを説明するための模式図である。図７（ａ）においては、上方が第１の振動素子を平面視した場合の振動を示し、下方が第２の振動素子を平面視した場合の振動を示している。図７（ｂ）～図７（ｄ）においても同様である。 FIGS. 7A to 7D are schematic diagrams for explaining vibration modes in the first vibration element and the second vibration element. In FIG. 7A, the upper part shows the vibration when the first vibration element is viewed in plan, and the lower part shows the vibration when the second vibration element is viewed in plan. The same applies to FIGS. 7B to 7D.
　図７（ａ）～図７（ｄ）において、斜線のハッチングを付した領域と、白抜きの領域とは、逆相で変位している。従って、第１の振動素子と第２の振動素子とは、逆相で変位している。図７（ａ）～（ｄ）では、最外周と、白抜きの領域と斜線のハッチングを付した領域の境界が、振動の節となる。例えば、図７（ｂ）に示す振動では、白抜きの円の外周と、斜線のハッチングを付した円の外周が、振動の節となる。 7A to 7D, the hatched area and the white area are displaced in opposite phases. Therefore, the first vibration element and the second vibration element are displaced in opposite phases. 7A to 7D, the boundary between the outermost periphery and the white area and the hatched area is a node of vibration. For example, in the vibration shown in FIG. 7B, the outer periphery of a white circle and the outer periphery of a circle with hatching are hatched nodes.
　図７（ａ）～図７（ｄ）に模式的に示すように、円形状部材の機械共振モードは、（ｍ，ｎ）モードとして表すことができる。ここで、ｍは、径方向に存在する節のラインの数であり、ｎは、周回方向に存在する節のラインの数である。ｍ，ｎは整数である。従って、図７（ａ）に示す振動モードは（０，０）モードであり、図７（ｂ）は（１，０）モードであり、図７（ｃ）は（０，１）モードであり、図７（ｄ）は（１，１）モードである。さらに、ｍが２以上、ｎが２以上の高次の振動モードも使用し得る。 As schematically shown in FIGS. 7A to 7D, the mechanical resonance mode of the circular member can be expressed as an (m, n) mode. Here, m is the number of knot lines existing in the radial direction, and n is the number of knot lines existing in the circulation direction. m and n are integers. Accordingly, the vibration mode shown in FIG. 7A is the (0,0) mode, FIG. 7B is the (1,0) mode, and FIG. 7C is the (0,1) mode. FIG. 7D shows the (1, 1) mode. Furthermore, higher-order vibration modes in which m is 2 or more and n is 2 or more can be used.
　下記に示す第４の実施形態では、第１の振動素子及び第２の振動素子が上記のような振動モードで振動することが可能なように構成されている。 In the fourth embodiment described below, the first vibration element and the second vibration element are configured to vibrate in the vibration mode as described above.
　図８は、第４の実施形態における第１の振動素子の平面図である。 FIG. 8 is a plan view of the first vibration element according to the fourth embodiment.
　第４の実施形態に係る振動装置では、第１の圧電振動子４５Ａ２における圧電体層８の上面に、電極４７ａが複数設けられている点で、第１の実施形態と異なる。なお、第１の圧電振動子４５Ａ２の圧電体層８の下面並びに第２の圧電振動子における圧電体層の上面及び下面に電極がそれぞれ複数設けられている点でも、第１の実施形態と異なる。上記以外の点においては、第４の実施形態の振動装置は、第１の実施形態の振動装置１と同様の構成を有する。 The vibration device according to the fourth embodiment differs from the first embodiment in that a plurality of electrodes 47a are provided on the upper surface of the piezoelectric layer 8 of the first piezoelectric vibrator 45A2. The first embodiment differs from the first embodiment in that a plurality of electrodes are provided on the lower surface of the piezoelectric layer 8 of the first piezoelectric vibrator 45A2 and on the upper and lower surfaces of the piezoelectric layer of the second piezoelectric vibrator. . Except for the above, the vibration device of the fourth embodiment has the same configuration as the vibration device 1 of the first embodiment.
　より具体的には、図８に示すように、第１の振動素子４５Ａは、中心線Ｓ１を介して隣り合う２個の領域を有する。圧電体層８の上面において、中心線Ｓ１を介して一方側の領域及び他方側の領域に電極４７ａがそれぞれ設けられている。同様に、圧電体層８の下面にも、複数の電極が設けられている。ここで、本実施形態の圧電体層８の分極軸方向は、どの領域においても同じ方向である。このとき、中心線Ｓ１を介して隣り合う領域に逆位相の交流電圧を印加すると、該隣り合う領域は互いに逆位相で振動する。 More specifically, as shown in FIG. 8, the first vibrating element 45A has two regions adjacent to each other via the center line S1. On the upper surface of the piezoelectric layer 8, electrodes 47 a are provided in one region and the other region via the center line S <b> 1. Similarly, a plurality of electrodes are provided on the lower surface of the piezoelectric layer 8. Here, the polarization axis direction of the piezoelectric layer 8 of the present embodiment is the same in any region. At this time, when an AC voltage having an opposite phase is applied to an adjacent region via the center line S1, the adjacent regions vibrate in opposite phases.
　本実施形態では、第１の振動素子４５Ａにおいては、（０，１）モードや（１，１）モード等が励振される。このように、第１の振動素子４５Ａは、複数の振動領域において隣り合う振動領域が逆相で振動するように構成されている。（０，１）モードや（１，１）モードを使用した場合には、水滴等を振動の節から振動の腹に向かって移動させた後、霧化させることにより除去する。図７（ｃ），図７（ｄ）より第１の振動素子４５Ａの中央部（図８の中心線Ｓ１）が振動の節となるので、水滴等は第１の振動素子４５Ａの外周部に向かって移動する。このため、カメラ本体の中央部の視野をよりクリアにすることができる。 In the present embodiment, the (0, 1) mode, the (1, 1) mode, etc. are excited in the first vibration element 45A. As described above, the first vibration element 45A is configured such that adjacent vibration regions in a plurality of vibration regions vibrate in opposite phases. When the (0, 1) mode or the (1, 1) mode is used, a water droplet or the like is moved from the vibration node toward the vibration antinode and then removed by atomization. 7 (c) and 7 (d), the central portion (center line S1 in FIG. 8) of the first vibration element 45A becomes a node of vibration, so that water droplets or the like are placed on the outer periphery of the first vibration element 45A. Move towards. For this reason, the visual field of the center part of a camera main body can be made clearer.
　本実施形態における第２の振動素子も、第１の振動素子４５Ａと同一の固有共振周波数となるように構成されている。それによって、上記支持体が配置されている部分を、第１の振動素子４５Ａ及び第２の振動素子の振動の節とすることができる。 The second vibration element in the present embodiment is also configured to have the same natural resonance frequency as that of the first vibration element 45A. Accordingly, the portion where the support is disposed can be used as a vibration node of the first vibration element 45A and the second vibration element.
　第１の振動素子４５Ａ及び第２の振動素子の振動モードは、振動の周波数を変更することにより、適宜変更することができる。それによって、第１の振動素子４５Ａにおいて水滴等を霧化する部分を適宜変更することができる。 The vibration modes of the first vibration element 45A and the second vibration element can be changed as appropriate by changing the vibration frequency. Thereby, the portion of the first vibration element 45A that atomizes water droplets or the like can be changed as appropriate.
　本実施形態においても、振動装置における密閉性を高めることができ、カメラ本体の信頼性を高めることができる。さらに、第１の振動素子４５Ａに付着した水滴等を十分に除去することができる。 Also in this embodiment, the sealing performance of the vibration device can be improved, and the reliability of the camera body can be improved. Furthermore, water droplets and the like attached to the first vibration element 45A can be sufficiently removed.
　なお、上記のように、（ｍ，ｎ）モードの振動を第１の振動素子４５Ａにおいて励振させるには、円環状の第１の圧電振動子４５Ａ２において、隣り合う領域の分極方向を互いに逆方向としてもよい。例えば、図９に示す第４の実施形態の変形例における第１の圧電振動子の圧電体層６８のように分極してもよい。より具体的には、圧電体層６８は、圧電体層６８の中心を通る径方向に延びる中心線Ｓ１を介して隣り合う、２個の領域を有する。中心線Ｓ１を介した一方側の領域と他方側の領域とを、＋及び－の記号で示すように、厚み方向において互いに逆方向に分極してもよい。この場合には、圧電体層６８の両面の全面に電極を設けてもよい。両面の電極から交流電圧を印加することにより、（０，１）モードや（１，１）モード等を励振させることができる。 As described above, in order to excite vibration in the (m, n) mode in the first vibrating element 45A, in the first piezoelectric vibrator 45A2 having an annular shape, the polarization directions of adjacent regions are opposite to each other. It is good. For example, you may polarize like the piezoelectric material layer 68 of the 1st piezoelectric vibrator in the modification of 4th Embodiment shown in FIG. More specifically, the piezoelectric layer 68 has two regions adjacent to each other via a center line S1 extending in the radial direction passing through the center of the piezoelectric layer 68. The region on one side and the region on the other side via the center line S1 may be polarized in opposite directions in the thickness direction, as indicated by the symbols + and −. In this case, electrodes may be provided on the entire surface of both surfaces of the piezoelectric layer 68. By applying an AC voltage from both electrodes, (0, 1) mode, (1, 1) mode, etc. can be excited.
　また、上記変形例のように分極軸方向が互いに逆方向であり、かつ隣り合う領域の個数を多くすることにより、振動モードにおけるｎを高次にすることもできる。この場合には、隣り合う領域に同位相の交流電圧を印加すればよい。 Also, as in the above modification, the polarization axis directions are opposite to each other, and n in the vibration mode can be made higher by increasing the number of adjacent regions. In this case, an AC voltage having the same phase may be applied to adjacent regions.
　あるいは、圧電体層の周回方向において、設ける電極の個数を多くすることにより、振動モードにおけるｎを高次にすることもできる。この場合には、隣り合う電極に互いに逆位相の交流電圧を印加すればよい。 Alternatively, n in the vibration mode can be made higher by increasing the number of electrodes provided in the circumferential direction of the piezoelectric layer. In this case, AC voltages having opposite phases may be applied to adjacent electrodes.
　他方、ｍを高次にする場合には、例えば、振動の周波数を高くすればよい。 On the other hand, when m is increased, for example, the vibration frequency may be increased.
　また、カメラに付着するものが、エタノール等の水以外の溶液、塩や凍結防止剤（塩化カルシウム）等が溶解した水溶液、泥水等の水に溶解しない不純物を含む液滴、またはコーヒー等のコロイド溶液等（以下、液滴）であっても同様に除去することができる。具体的には、第１の振動素子を適切に振動させることにより、内容物を溶解させたまま液滴を霧化させ、第１の振動素子の外表面に付着していた液滴を除去することができる。このときの作用は、蒸発とは異なるものであり、液滴中の溶解物／不純物を析出させることなく、液滴ごと除去することが可能である。 Also, what attaches to the camera is a solution other than water such as ethanol, an aqueous solution in which a salt or an antifreezing agent (calcium chloride) is dissolved, a droplet containing impurities that are not soluble in water such as muddy water, or a colloid such as coffee. Even a solution or the like (hereinafter referred to as a droplet) can be similarly removed. Specifically, by appropriately vibrating the first vibration element, the liquid droplets are atomized while the contents are dissolved, and the liquid droplets attached to the outer surface of the first vibration element are removed. be able to. The action at this time is different from evaporation, and it is possible to remove the entire droplet without depositing dissolved matter / impurities in the droplet.
　以下に示す第１の実施例及び第２の実施例により、液滴の除去の効果をより詳細に示す。なお、第１の実施例及び第２の実施例における振動装置は、図１に示す第１の実施形態の振動装置１である。第１の実施例で用いた第１の圧電振動子５Ａ２、第２の圧電振動子５Ｂ２、第１の振動体５Ａ１、第２の振動体５Ｂ１及び支持体４の寸法は以下の通りである。 The effects of removing droplets will be described in more detail by the following first and second embodiments. Note that the vibration device in the first and second examples is the vibration device 1 of the first embodiment shown in FIG. The dimensions of the first piezoelectric vibrator 5A2, the second piezoelectric vibrator 5B2, the first vibrating body 5A1, the second vibrating body 5B1, and the support body 4 used in the first embodiment are as follows.
　第１の圧電振動子５Ａ２及び第２の圧電振動子５Ｂ２の寸法：内径１２．０ｍｍ、外径１８．０ｍｍ、厚み０．５ｍｍ。第１の振動体５Ａ１の寸法：外径１８．０ｍｍ、厚み０．７ｍｍ。第２の振動体５Ｂ１の寸法：外径１８．０ｍｍ、厚み０．７ｍｍ、開口径１４．０ｍｍ。第２の振動体５Ｂ１の延長部５Ｂ１ｂの寸法：外径１６．０ｍｍ、内径１４．０ｍｍ、厚み２．２９ｍｍ。支持体４の寸法：内径１６．０ｍｍ、外径２２．０ｍｍ、厚み０．１ｍｍ。 Dimensions of first piezoelectric vibrator 5A2 and second piezoelectric vibrator 5B2: inner diameter 12.0 mm, outer diameter 18.0 mm, thickness 0.5 mm. Dimensions of first vibrating body 5A1: outer diameter 18.0 mm, thickness 0.7 mm. Dimensions of second vibrating body 5B1: outer diameter 18.0 mm, thickness 0.7 mm, opening diameter 14.0 mm. Dimensions of extension 5B1b of second vibrating body 5B1: outer diameter 16.0 mm, inner diameter 14.0 mm, thickness 2.29 mm. Dimensions of support 4: inner diameter 16.0 mm, outer diameter 22.0 mm, thickness 0.1 mm.
　第１の実施例では、約０．４％の食塩水（ＮａＣｌ１４ｇを水１Ｌに溶解した水溶液）を少量ずつ第１の振動素子５Ａに滴下し、連続的に霧化動作させた。具体的には、１時間に食塩水１５ｍｌを滴下させた。この場合においても、食塩水に含まれるＮａＣｌが析出することなく、水溶液を除去することができた。 In the first example, about 0.4% saline (an aqueous solution in which 14 g of NaCl was dissolved in 1 L of water) was dropped little by little on the first vibrating element 5A, and the atomization operation was continuously performed. Specifically, 15 ml of saline was added dropwise in one hour. Even in this case, the aqueous solution could be removed without precipitation of NaCl contained in the saline.
　さらに、コーヒー等のコロイド溶液やエタノール等の水以外の溶液でも同様に内容物を第１の振動素子５Ａに析出させることなく、第１の振動素子４５Ａの外表面に付着していた溶液を除去することができた。 Further, the solution adhering to the outer surface of the first vibration element 45A is removed without depositing the contents on the first vibration element 5A in the same manner even in a colloid solution such as coffee or a solution other than water such as ethanol. We were able to.
　さらには泥等の水に溶解しない不純物を含む液滴の場合においても、本装置を適切な方向（下向き）に設置させることにより、水に溶解しない不純物ごと水滴を霧化させ、第１の振動素子５Ａの外表面に付着していた水滴を除去することができた。なお、不純物の量が多い場合や不純物の粒径が大きい場合には、第１の振動素子５Ａに不純物が残留する場合があったが、不純物が残留する領域は第１の振動素子４５Ａの中央部とはならなかった。また、自重と第１の振動素子５Ａに発生している振動により残留物は落下した。このように、一時不純物が残留したとしても、カメラ本体１２の視野を不明瞭にするおそれは小さい。 Furthermore, even in the case of liquid droplets containing impurities that do not dissolve in water such as mud, the first vibration is generated by atomizing the water droplets together with impurities that do not dissolve in water by installing this apparatus in an appropriate direction (downward). Water droplets adhering to the outer surface of the element 5A could be removed. When the amount of impurities is large or the particle size of the impurities is large, impurities may remain in the first vibration element 5A, but the region where the impurities remain is the center of the first vibration element 45A. It did not become a department. Further, the residue dropped due to its own weight and vibration generated in the first vibration element 5A. Thus, even if temporary impurities remain, there is little risk of obscuring the field of view of the camera body 12.
　以下に第２の実施例の結果を示す。第２の実施例で用いた圧電振動子５Ａ２、５Ｂ２、第１の振動体５Ａ１、第２の振動体５Ｂ１及び支持体４の寸法は、それぞれ第１の実施例で用いたものと同じである。 The results of the second example are shown below. The dimensions of the piezoelectric vibrators 5A2, 5B2, the first vibrating body 5A1, the second vibrating body 5B1, and the support 4 used in the second embodiment are the same as those used in the first embodiment. .
　本装置を水平方向から４５°下に傾けた方向に配置し、９０ｍｌの水に一般的な土を１０ｇ分散させた液滴を少量ずつ第１の振動素子５Ａに滴下し、連続的に霧化動作させた場合（この場合、１時間に１５ｍｌを滴下）においては、粒径の小さな不純物は水と一緒に霧化され、第１の振動素子５Ａの外表面から除去することができた。また、粒径の大きな不純物は第１の振動素子５Ａに残留する場合があったが、不純物が残留する領域は第１の振動素子５Ａの中央部とならなかった。また、自重及び振動により、残留した不純物は落下し、第１の振動素子５Ａの外表面から除去された。 This device is placed in a direction inclined 45 ° below the horizontal direction, and droplets in which 10 g of general soil is dispersed in 90 ml of water are dropped on the first vibrating element 5A little by little and continuously atomized. When operated (in this case, 15 ml was dropped in 1 hour), the impurities having a small particle diameter were atomized together with water and could be removed from the outer surface of the first vibration element 5A. In addition, impurities having a large particle size sometimes remain in the first vibration element 5A, but the region where the impurities remain is not the central portion of the first vibration element 5A. Further, the remaining impurities dropped due to their own weight and vibration, and were removed from the outer surface of the first vibration element 5A.
　図１０は、第５の実施形態に係るカメラにおける振動装置の断面図である。 FIG. 10 is a cross-sectional view of the vibration device in the camera according to the fifth embodiment.
　本実施形態のカメラは、振動装置５１がカメラ本体のレンズモジュールである点において、第１の実施形態と異なる。なお、本実施形態のカメラは、第１の実施形態と同様に、撮像素子を含む撮像部を有する。 The camera of the present embodiment is different from the first embodiment in that the vibration device 51 is a lens module of the camera body. Note that the camera according to the present embodiment includes an imaging unit including an imaging element, as in the first embodiment.
　第１の振動素子５５Ａは、第１の振動体５５Ａ１と、第１の振動体５５Ａ１上に設けられている第１の圧電振動子５Ａ２とを有する。第１の振動体５５Ａ１は、レンズ５７を含む。レンズ５７は、カメラの最前方に配置されているレンズである。 The first vibration element 55A includes a first vibration body 55A1 and a first piezoelectric vibrator 5A2 provided on the first vibration body 55A1. The first vibrating body 55A1 includes a lens 57. The lens 57 is a lens disposed at the forefront of the camera.
　他方、第２の振動素子５Ｂは、第１の実施形態における第２の振動素子５Ｂと同様の構成を有する。第２の振動素子５Ｂは、支持体４に連結されている。第１の振動素子５５Ａも、支持体４に連結されている。本実施形態においても、支持体４は、第１，第２の振動素子５５Ａ，５Ｂの振動の節において、第１，第２の振動素子５５Ａ，５Ｂを支持している。なお、図示していないが、本実施形態のカメラは、上記撮像部が収納されている筐体部を有する。支持体４はカメラの筐体部に連結されている。筐体部、支持体４及び第１の振動素子５５Ａにより、中空空間が形成されている。該中空空間内に、上記撮像部が配置されている。 On the other hand, the second vibration element 5B has the same configuration as the second vibration element 5B in the first embodiment. The second vibration element 5 </ b> B is connected to the support body 4. The first vibration element 55 </ b> A is also connected to the support 4. Also in the present embodiment, the support 4 supports the first and second vibrating elements 55A and 5B at the vibration node of the first and second vibrating elements 55A and 5B. Although not shown, the camera according to the present embodiment includes a housing unit in which the imaging unit is accommodated. The support 4 is connected to the camera casing. A hollow space is formed by the housing portion, the support body 4, and the first vibration element 55A. The imaging unit is disposed in the hollow space.
　本実施形態では、カメラの上記中空空間の密閉性を高めることができ、カメラの信頼性を高めることができる。さらに、レンズ５７の外表面に付着した水滴等を十分に除去することができる。 In this embodiment, the airtightness of the hollow space of the camera can be improved, and the reliability of the camera can be improved. Furthermore, water droplets and the like attached to the outer surface of the lens 57 can be sufficiently removed.
　図１１に本発明の第１の実施形態の第１の変形例を示す。第１の振動素子７５Ａのように、第１の圧電振動子５Ａ２は、第１の振動体５Ａ１の下方に設けられていてもよい。同様に、第２の振動素子７５Ｂのように、第２の圧電振動子５Ｂ２も、第２の振動体５Ｂ１の上方に設けられていてもよい。この場合には、第１の圧電振動子５Ａ２及び第２の圧電振動子５Ｂ２は、収納空間Ａ内に設けられている。よって、第１の圧電振動子５Ａ２及び第２の圧電振動子５Ｂ２の水滴等への接触を防ぐことができる。従って、振動装置の信頼性をより高めることができる。 FIG. 11 shows a first modification of the first embodiment of the present invention. Like the first vibrating element 75A, the first piezoelectric vibrator 5A2 may be provided below the first vibrating body 5A1. Similarly, like the second vibrating element 75B, the second piezoelectric vibrator 5B2 may also be provided above the second vibrating body 5B1. In this case, the first piezoelectric vibrator 5A2 and the second piezoelectric vibrator 5B2 are provided in the storage space A. Therefore, it is possible to prevent the first piezoelectric vibrator 5A2 and the second piezoelectric vibrator 5B2 from contacting the water droplets. Therefore, the reliability of the vibration device can be further increased.
　図１２に本発明の第１の実施形態の第２の変形例を示す。第２の変形例の振動装置は、第１の圧電振動子を有しない点で第１の変形例と異なる。第２の変形例においては、第１，第２の振動素子５Ａ，５Ｂがほぼ同一の固有共振周波数で逆位相に励振されることが好ましい。この場合には、第２の変形例における第１の振動素子８５Ａ及び第２の振動素子７５Ｂを十分に振動させることができる。よって、第１の実施形態と同様に、カメラ本体の信頼性を高めることができ、かつ第１の振動素子８５Ａに付着した水滴等を十分に除去することができる。 FIG. 12 shows a second modification of the first embodiment of the present invention. The vibration device of the second modification differs from the first modification in that it does not have the first piezoelectric vibrator. In the second modification, it is preferable that the first and second vibrating elements 5A and 5B are excited in opposite phases at substantially the same natural resonance frequency. In this case, the first vibration element 85A and the second vibration element 75B in the second modification can be sufficiently vibrated. Therefore, similarly to the first embodiment, the reliability of the camera body can be improved, and water droplets and the like attached to the first vibration element 85A can be sufficiently removed.
１…振動装置
２…ケース部材
３…ベースプレート
４…支持体
４ａ，４ｂ…延長部
４ｃ…連結部
４ｄ，４ｅ…第１，第２の主面
５Ａ，５Ｂ…第１，第２の振動素子
５Ａ１，５Ｂ１…第１，第２の振動体
５Ｂ１ｂ…延長部
５Ａ２，５Ｂ２…第１，第２の圧電振動子
７ａ，７ｂ…電極
８…圧電体層
９…座屈音叉型振動子
１０…カメラ
１２…カメラ本体
１３…本体部材
１４…撮像部
１５…回路
１６…レンズモジュール
１６ａ…外壁部
１７…レンズ
２１…振動装置
２５Ｂ…第２の振動素子
２５Ｂ１…第２の振動体
３１…振動装置
３４…支持体
３５Ａ…第１の振動素子
３５Ａ１…第１の振動体
３５Ａ２，３５Ｂ２…第１，第２の圧電振動子
４５Ａ…第１の振動素子
４５Ａ２…第１の圧電振動子
４７ａ…電極
５１…振動装置
５５Ａ…第１の振動素子
５５Ａ１…第１の振動体
５７…レンズ
６８…圧電体層
７５Ａ，７５Ｂ…第１，第２の振動素子
８５Ａ…第１の振動素子

  DESCRIPTION OF SYMBOLS 1 ... Vibration apparatus 2 ... Case member 3 ... Base plate 4 ... Support body 4a, 4b ... Extension part 4c ... Connection part 4d, 4e ... 1st, 2nd main surface 5A, 5B ... 1st, 2nd vibration element 5A1 , 5B1 ... first and second vibrating bodies 5B1b ... extensions 5A2, 5B2 ... first and second piezoelectric vibrators 7a, 7b ... electrodes 8 ... piezoelectric layer 9 ... buckling tuning fork type vibrator 10 ... camera 12 ... camera body 13 ... body member 14 ... imaging unit 15 ... circuit 16 ... lens module 16a ... outer wall 17 ... lens 21 ... vibration device 25B ... second vibration element 25B1 ... second vibration body 31 ... vibration device 34 ... support Body 35A ... first vibration element 35A1 ... first vibration body 35A2, 35B2 ... first and second piezoelectric vibrators 45A ... first vibration element 45A2 ... first piezoelectric vibrator 47a ... electrode 51 ... vibration device 55A ... first vibration element 55A1 First vibrator 57 ... lens 68 ... piezoelectric layer 75A, 75B ... first and second vibration element 85A ... first vibration element

Claims (13)

  1. 　一方主面及び他方主面を有し、かつ前記一方主面及び前記他方主面において開口するように貫通している、貫通孔を有する支持体と、
    　前記支持体の前記一方主面側に配置されている第１の振動素子と、
    　前記支持体の前記他方主面側に配置されている第２の振動素子と、
    を備え、
    　前記第１の振動素子は、少なくとも透光性を有する第１の振動体を有し、
    　前記第２の振動素子は、第２の振動体と、前記第２の振動体に設けられている圧電振動子を有する、振動装置。     A support body having a through-hole, having one main surface and the other main surface, and penetrating so as to open in the one main surface and the other main surface;
    A first vibration element disposed on the one main surface side of the support;
    A second vibration element disposed on the other main surface side of the support;
    With
    The first vibrating element includes a first vibrating body having at least translucency,
    The second vibration element includes a second vibrating body and a piezoelectric vibrator provided on the second vibrating body.
  2. 　前記支持体は、前記第１の振動素子及び前記第２の振動素子の振動の節において、前記第１の振動素子及び前記第２の振動素子を支持している、請求項１に記載の振動装置。 2. The vibration according to claim 1, wherein the support supports the first vibration element and the second vibration element at a vibration node of the first vibration element and the second vibration element. 3. apparatus.
  3. 　前記支持体は、前記第１の振動素子及び前記第２の振動素子の外周縁において、前記第１の振動素子及び前記第２の振動素子を支持している、請求項１または２に記載の振動装置。 The said support body is supporting the said 1st vibration element and the said 2nd vibration element in the outer periphery of the said 1st vibration element and the said 2nd vibration element. Vibration device.
  4. 　前記第１の振動素子が、前記第１の振動体に設けられている第１の圧電振動子を有し、前記第２の振動素子の前記圧電振動子が第２の圧電振動子であり、
    　前記第１，第２の圧電振動子が互いに逆位相で振動するように構成されている、請求項１～３のいずれか１項に記載の振動装置。     The first vibration element includes a first piezoelectric vibrator provided in the first vibration body, and the piezoelectric vibrator of the second vibration element is a second piezoelectric vibrator;
    The vibration device according to any one of claims 1 to 3, wherein the first and second piezoelectric vibrators are configured to vibrate in mutually opposite phases.
  5. 　前記支持体が筒状の形状を有する、請求項１～４のいずれか１項に記載の振動装置。 The vibration device according to any one of claims 1 to 4, wherein the support has a cylindrical shape.
  6. 　前記第１の振動素子が複数の振動領域を有し、該複数の振動領域において隣り合う振動領域が逆位相で振動するように構成されている、請求項１～５のいずれか１項に記載の振動装置。 6. The structure according to claim 1, wherein the first vibration element has a plurality of vibration regions, and adjacent vibration regions in the plurality of vibration regions vibrate in opposite phases. Vibration device.
  7. 　前記第１の振動体が板状の形状を有する、請求項１～６のいずれか１項に記載の振動装置。 The vibration device according to any one of claims 1 to 6, wherein the first vibrating body has a plate shape.
  8. 　前記第１の振動体がドーム状の形状を有する、請求項１～６のいずれか１項に記載の振動装置。 The vibration device according to any one of claims 1 to 6, wherein the first vibrating body has a dome shape.
  9. 　前記第２の振動体が透光性を有し、かつ板状の形状を有する、請求項１～８のいずれか１項に記載の振動装置。 The vibration device according to any one of claims 1 to 8, wherein the second vibrating body has translucency and has a plate shape.
  10. 　前記第２の振動体が、開口部と、該開口部から前記第１の振動素子側とは反対側に延びている延長部と、を有する、請求項１～８のいずれか１項に記載の振動装置。 The first vibrating body according to any one of claims 1 to 8, wherein the second vibrating body includes an opening and an extension that extends from the opening to a side opposite to the first vibrating element side. Vibration device.
  11. 　前記支持体に接続されている、ケース部材をさらに備え、
    　前記第１の振動素子、前記支持体及び前記ケース部材により収納空間が形成されている、請求項１～１０のいずれか１項に記載の振動装置。     A case member connected to the support;
    The vibration device according to any one of claims 1 to 10, wherein a storage space is formed by the first vibration element, the support, and the case member.
  12. 　請求項１１に記載の振動装置と、
    　前記収納空間内に収納されているレンズモジュールと、
    　前記収納空間内に収納されている撮像素子と、
    を備える、カメラ。     A vibration device according to claim 11;
    A lens module stored in the storage space;
    An image sensor housed in the housing space;
    With a camera.
  13. 　請求項１～６のいずれか１項に記載の振動装置であり、かつレンズを含むレンズモジュールと、
    　撮像素子と、
    を備え、
    　前記振動装置の前記第１，第２の振動素子の内の少なくとも一方が、前記レンズを含む、カメラ。

          A lens module which is the vibration device according to any one of claims 1 to 6 and includes a lens;
    An image sensor;
    With
    The camera, wherein at least one of the first and second vibration elements of the vibration device includes the lens.

PCT/JP2016/086934 2015-12-25 2016-12-12 Vibration device and camera WO2017110564A1 (en)

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