WO2016208524A1 - ネガ型硬化性着色組成物、硬化膜、カラーフィルタ、パターン形成方法及び装置 - Google Patents
ネガ型硬化性着色組成物、硬化膜、カラーフィルタ、パターン形成方法及び装置 Download PDFInfo
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- WO2016208524A1 WO2016208524A1 PCT/JP2016/068208 JP2016068208W WO2016208524A1 WO 2016208524 A1 WO2016208524 A1 WO 2016208524A1 JP 2016068208 W JP2016068208 W JP 2016068208W WO 2016208524 A1 WO2016208524 A1 WO 2016208524A1
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- coloring composition
- compound
- dye
- negative curable
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/105—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/40—Treatment after imagewise removal, e.g. baking
Definitions
- the present invention relates to a negative curable coloring composition, a cured film, a color filter, a pattern forming method and an apparatus.
- Color filters are used as key devices for displays and optical elements.
- the color filter usually has a coloring pattern of three primary colors of red, green, and blue, and plays a role of separating transmitted light into the three primary colors.
- Patent Documents 1 to 3 describe that a color filter is produced using a negative curable coloring composition containing a xanthene dye.
- a color filter forms a negative curable coloring composition layer on a substrate using a negative curable coloring composition, and performs exposure and development to form a pixel (coloring pattern). This operation is repeated for a desired hue to manufacture a color filter. For this reason, negative curable coloring compositions for color filters are required to be capable of forming a cured film that is unlikely to be mixed with other colors. In recent years, further improvements in the above performance have been demanded. ing.
- an object of the present invention is to provide a negative curable coloring composition, a cured film, a color filter, a pattern forming method, and an apparatus capable of forming a cured film that hardly causes color mixing with other colors.
- the present inventors have further included an acid generator in a negative curable coloring composition containing a colorant, a photoradical polymerizable compound, and a photoradical polymerization initiator.
- the present inventors have found that a cured film that hardly mixes with other colors can be obtained, and have completed the present invention.
- the present invention provides the following. ⁇ 1> A negative curable coloring composition comprising a colorant, an acid generator, a photoradical polymerizable compound, and a photoradical polymerization initiator. ⁇ 2> The negative curable coloring composition according to ⁇ 1>, wherein the acid generator includes a thermal acid generator.
- ⁇ 3> The negative curable coloring composition according to ⁇ 1> or ⁇ 2>, wherein the acid generator is a compound that generates an acid having a pKa of 4 or less.
- the acid generator is a compound that generates an acid having a pKa of 4 or less.
- ⁇ 5> The negative curing according to any one of ⁇ 1> to ⁇ 4>, wherein the content of the acid generator is 1 to 20% by mass with respect to the total solid content of the negative curable coloring composition Coloring composition.
- ⁇ 6> The mass ratio of the acid generator and the photoradical polymerizable compound is any of ⁇ 1> to ⁇ 5>, wherein the acid generator: the photoradical polymerizable compound is 1: 1 to 1: 5.
- Negative curable coloring composition. ⁇ 7> The negative curable coloring composition according to any one of ⁇ 1> to ⁇ 6>, wherein the colorant includes a dye having a cation and an anion.
- ⁇ 8> The negative curable coloring composition according to ⁇ 7>, wherein the cation and the anion are bonded via a covalent bond.
- ⁇ 9> The negative curable coloring composition according to ⁇ 7> or ⁇ 8>, wherein the cation is a cation having a xanthene structure.
- ⁇ 13> A cured film using the negative curable coloring composition according to any one of ⁇ 1> to ⁇ 12>.
- ⁇ 14> A color filter having a cured film in ⁇ 13>.
- ⁇ 15> A step of forming a negative curable coloring composition layer on a support using the negative curable coloring composition according to any one of ⁇ 1> to ⁇ 12>, and a negative curable coloring composition
- a pattern forming method including a step of exposing an object in a pattern and a step of developing and removing an unexposed portion to form a colored pattern.
- the negative curable coloring composition includes a radical photopolymerizable compound, a radical photopolymerization initiator, and a thermal acid generator, The pattern forming method according to ⁇ 15>, further comprising a step of heating the colored pattern after the step of forming the colored pattern.
- the negative curable coloring composition includes a photo radical polymerizable compound, a photo radical polymerization initiator, and a photo acid generator, The pattern forming method according to ⁇ 15> or ⁇ 16>, further including a step of exposing the colored pattern after the step of forming the colored pattern.
- a negative curable coloring composition a cured film, a color filter, a pattern forming method, and an apparatus capable of forming a cured film that hardly causes color mixing with other colors.
- the notation that does not indicate substitution and non-substitution includes not only those having no substituent but also those having a substituent.
- the “alkyl group” includes not only an alkyl group having no substituent (unsubstituted alkyl group) but also an alkyl group having a substituent (substituted alkyl group).
- light means actinic rays or radiation.
- Actinic light or “radiation” means, for example, an emission line spectrum of a mercury lamp, far ultraviolet rays represented by excimer laser, extreme ultraviolet rays (EUV light), X-rays, electron beams, and the like.
- exposure means not only exposure using far-ultraviolet rays such as mercury lamps and excimer lasers, X-rays and EUV light, but also particle beams such as electron beams and ion beams, unless otherwise specified.
- the drawing used is also included in the exposure.
- a numerical range expressed using “to” means a range including numerical values described before and after “to” as a lower limit value and an upper limit value.
- the total solid content refers to the total mass of components excluding the solvent from the total composition of the colored composition.
- “(meth) acrylate” represents both and / or acrylate and methacrylate
- “(meth) acryl” represents both and / or acryl and methacryl, ")
- Allyl represents both and / or allyl and methallyl
- “(meth) acryloyl” represents both and / or acryloyl and methacryloyl.
- the term “process” is not limited to an independent process, and is included in the term if the intended action of the process is achieved even when it cannot be clearly distinguished from other processes. .
- a weight average molecular weight and a number average molecular weight are defined as a polystyrene conversion value in a gel permeation chromatograph (GPC) measurement.
- the negative curable coloring composition of the present invention includes a colorant, an acid generator, a photoradical polymerizable compound, and a photoradical polymerization initiator.
- a cured film that hardly causes color mixing with other colors can be formed.
- the mechanism for obtaining such an effect is presumed to be as follows. In the case of a conventional negative curable coloring composition, when a cured film is produced through exposure and development, an active site of the colorant may be exposed by development.
- the negative-type curable coloring composition of another color When a negative-type curable coloring composition of another color is applied to the cured film in which the active site of the colorant is exposed, the negative-type curable coloring composition of another color may be adsorbed and color mixing may occur. Since the negative curable coloring composition of the present invention contains an acid generator, the acid component generated by the acid generator is adsorbed on the surface of the colorant even if the active site on the surface of the colorant is exposed during development. It is considered possible. For this reason, it is considered that according to the present invention, it is possible to form a cured film in which color mixing with other colors hardly occurs.
- spectral fluctuation before and after development can be suppressed, and a cured film having excellent spectral characteristics can be obtained.
- a colorant containing a dye having a cation and an anion is used, the spectral fluctuation before and after development can be effectively suppressed and a more remarkable effect compared to the case where no acid generator is contained. Is obtained.
- each component of the negative curable coloring composition of the present invention will be described.
- a negative curable coloring composition is also described as a coloring composition.
- the coloring composition of the present invention contains a colorant.
- the colorant may be either a low molecular compound or a dye multimer, but a dye multimer is preferred because it can more effectively suppress color mixing with other colors.
- the molecular weight of the low molecular weight colorant is preferably less than 2000, and more preferably 200 to 1500.
- the colorant may be a pigment or a dye.
- pigments and dyes can be used in combination.
- the pigment include conventionally known various inorganic pigments or organic pigments. Further, considering that it is preferable to have a high transmittance, whether it is an inorganic pigment or an organic pigment, it is preferable to use a pigment having an average particle size as small as possible, and considering the handling properties, the average particle size of the pigment is 0.01 to 0.1 ⁇ m is preferable, and 0.01 to 0.05 ⁇ m is more preferable.
- inorganic pigments include metal compounds represented by metal oxides, metal complex salts, and the like.
- black pigments such as carbon black and titanium black, iron, cobalt, aluminum, cadmium, lead, copper
- metal oxides such as titanium, magnesium, chromium, zinc and antimony, and composite oxides of the above metals.
- Examples of the dye include, for example, JP-A No. 64-90403, JP-A No. 64-91102, JP-A No. 1-94301, JP-A No. 6-11614, No. 2592207, and US Pat. No. 4,808,501.
- dye currently disclosed by 194828 gazette etc. can be used.
- pyrazole azo compounds When classified as chemical structure, pyrazole azo compounds, pyromethene compounds, anilinoazo compounds, triphenylmethane compounds, anthraquinone compounds, benzylidene compounds, oxonol compounds, pyrazolotriazole azo compounds, pyridone azo compounds, cyanine compounds, phenothiazine compounds, pyrrolopyrazole azomethine compounds, etc. Can be used.
- a dye multimer may be used as the dye. Examples of the dye multimer include compounds described in JP2011-213925A and JP2013-041097A.
- azo dyes described in paragraphs 0084 to 0134 of JP2013-41097A and paragraphs 0029 to 0136 of JP2011-162760A can also be used.
- the colorant is preferably a dye having a cation and an anion.
- a dye having a cation and an anion When a dye having a cation and an anion is used, the effect of the present invention can be obtained more remarkably.
- the anion may be present outside the cation molecule, but is preferably bound to the cation via a covalent bond.
- numerator of a cation means the case where a cation and an anion do not couple
- the anion outside the cation molecule is also referred to as a counter anion.
- the dye having a cation and an anion examples include xanthene dyes, triarylmethane dyes, polymethine dyes (oxonol dyes, merocyanine dyes, arylidene dyes, styryl dyes, cyanine dyes, squarylium dyes, croconium dyes, etc.), and xanthene dyes. And triarylmethane dyes are preferred, and xanthene dyes are more preferred.
- the xanthene dye is a dye having a cation having a xanthene skeleton and an anion.
- examples of the xanthene dye include a structure represented by the following formula (J).
- R 81 , R 82 , R 83 and R 84 each independently represents a hydrogen atom or a monovalent substituent
- R 85 each independently represents a monovalent substituent
- m Represents an integer of 0 to 5.
- X ⁇ represents a counter anion. When X ⁇ is not present, at least one of R 81 to R 85 contains an anion.
- the xanthene dye is a dye multimer
- it is preferably bonded to another part of the dye multimer via any one of R 81 to R 85 in formula (J), more preferably through R 85 is bonded to the other parts of the dye polymer.
- Examples of the substituent that can be taken by R 81 to R 85 in the formula (J) include a substituent group A described later and a group containing an anion described later.
- (Substituent group A) Alkyl group (preferably 1 to 30 carbon atoms), alkenyl group (preferably 2 to 30 carbon atoms), alkynyl group (preferably 2 to 30 carbon atoms), aryl group (preferably 6 to 30 carbon atoms), amino group (Preferably 0 to 30 carbon atoms), alkoxy group (preferably 1 to 30 carbon atoms), aryloxy group (preferably 6 to 30 carbon atoms), aromatic heterocyclic oxy group (preferably 1 to 30 carbon atoms)
- An acyl group preferably 2 to 30 carbon atoms), an alkoxycarbonyl group (preferably 2 to 30 carbon atoms), an aryloxycarbonyl group (preferably 7 to 30 carbon atoms), an acyloxy group (preferably 2 to 30 carbon atoms).
- An acylamino group (preferably having 2 to 30 carbon atoms), an alkoxycarbonylamino group (preferably having 2 to 30 carbon atoms), an aryloxycarbonylamino group Preferably 7 to 30 carbon atoms, a sulfonylamino group (preferably 0 to 30 carbon atoms), a sulfamoyl group (preferably 0 to 30 carbon atoms), a carbamoyl group (preferably 1 to 30 carbon atoms), an alkylthio group (preferably Is an arylthio group (preferably 6 to 30 carbon atoms), an aromatic heterocyclic thio group (preferably 1 to 30 carbon atoms), a sulfonyl group (preferably 0 to 30 carbon atoms), a sulfinyl group (Preferably having 0 to 30 carbon atoms), ureido group (preferably having 1 to 30 carbon atoms), phosphoric acid amide group (preferably having 0 to 30 carbon atoms), ure
- substituent groups When these groups are further substitutable groups, they may further have a substituent.
- substituents include the group described in the above-described substituent group A, and a group containing an anion described later.
- substituent group A the description of paragraph numbers 0042 to 0053 of JP-A-2014-237809 can be referred to, and the contents thereof are incorporated in the present specification.
- R 81 and R 82 , R 83 and R 84 , and R 85 in the case where m is 2 or more are each independently bonded to each other to form a 5-membered, 6-membered or 7-membered saturated ring. Or a 5-membered, 6-membered or 7-membered unsaturated ring.
- ring to be formed for example, pyrrole ring, furan ring, thiophene ring, pyrazole ring, imidazole ring, triazole ring, oxazole ring, thiazole ring, pyrrolidine ring, piperidine ring, cyclopentene ring, cyclohexene ring, benzene ring, pyridine ring, A pyrazine ring and a pyridazine ring are mentioned, Preferably a benzene ring and a pyridine ring are mentioned.
- the ring formed is a further substitutable group, it may be substituted with the substituents described for R 81 to R 85 , and when it is substituted with two or more substituents, These substituents may be the same or different.
- R 82 and R 84 are each independently preferably a hydrogen atom or an alkyl group, and more preferably a hydrogen atom.
- R 81 and R 83 are each independently preferably an alkyl group or an aryl group, more preferably an aryl group.
- R 85 is preferably a halogen atom, an alkyl group, a sulfo group, a sulfonamide group, a carboxy group or an amide group, more preferably a sulfo group, a sulfonamide group, a carboxy group or an amide group.
- X ⁇ represents an anion
- the description in the case where the counter anion described later is a different molecule can be referred to.
- examples of the anion include —SO 3 ⁇ , —COO ⁇ , —PO 4 ⁇ , bis (sulfonyl) imide anion, tris (sulfonyl) methide anion and tetraarylborate anion.
- a bis (sulfonyl) imide anion, a tris (sulfonyl) methide anion, and a tetraarylborate anion are more preferable, and a bis (sulfonyl) imide anion and a tris (sulfonyl) methide anion are still more preferable.
- a structure in which at least one of R 81 to R 85 is substituted with the general formula (P) can be mentioned.
- General formula (P) In general formula (P), L represents a single bond or a divalent linking group, and X 1 represents an anion.
- L represents a single bond or a divalent linking group.
- the divalent linking group preferably represents —NR 10 —, —O—, —SO 2 —, an alkylene group containing a fluorine atom, an arylene group containing a fluorine atom, or a combination thereof.
- a group consisting of a combination of —NR 10 —, —SO 2 and an alkylene group containing a fluorine atom a group consisting of a combination of —O— and an arylene group containing a fluorine atom, or —NR 10 — and —SO A group consisting of a combination of 2 and an alkylene group containing a fluorine atom is preferred.
- R 10 represents a hydrogen atom or an alkyl group having 1 to 5 carbon atoms, preferably a hydrogen atom.
- the number of carbon atoms of the alkylene group containing a fluorine atom is preferably 1 to 10, more preferably 1 to 6, and still more preferably 1 to 3.
- These alkylene groups are more preferably perfluoroalkylene groups.
- Specific examples of the alkylene group containing a fluorine atom include a difluoromethylene group, a tetrafluoroethylene group, and a hexafluoropropylene group.
- the number of carbon atoms of the arylene group containing a fluorine atom is preferably 6 to 20, more preferably 6 to 14, and still more preferably 6 to 10.
- Specific examples of the arylene group containing a fluorine atom include a tetrafluorophenylene group, a hexafluoro-1-naphthylene group, and a hexafluoro-2-naphthylene group.
- X 1 represents an anion and is selected from —SO 3 ⁇ , —COO ⁇ , —PO 4 ⁇ , a bis (sulfonyl) imide anion, a tris (sulfonyl) methide anion and a tetraarylborate anion.
- Species are preferred, one kind selected from bis (sulfonyl) imide anion, tris (sulfonyl) methide anion and tetraarylborate anion is more preferred, and bis (sulfonyl) imide anion or tris (sulfonyl) methide anion is still more preferred.
- L 1 represents a single bond or a divalent linking group, and is preferably a single bond.
- the divalent linking group represented by L 1 include an alkylene group having 1 to 6 carbon atoms, an arylene group having 6 to 12 carbon atoms, —O—, —S—, or a group composed of a combination thereof.
- L 2 represents —SO 2 — or —CO—.
- G represents a carbon atom or a nitrogen atom.
- n1 represents 2 when G is a carbon atom, and represents 1 when G is a nitrogen atom.
- R 6 represents an alkyl group containing a fluorine atom or an aryl group containing a fluorine atom. When n1 is 2, two R 6 may be the same or different.
- the number of carbon atoms of the alkyl group containing a fluorine atom represented by R 6 is preferably 1 to 10, more preferably 1 to 6, and still more preferably 1 to 3.
- the number of carbon atoms of the aryl group containing a fluorine atom represented by R 6 is preferably 6 to 20, more preferably 6 to 14, and still more preferably 6 to 10.
- the cation having a xanthene structure preferably has a skeleton structure represented by the following general formula (1).
- a xanthene dye having the following skeleton structure is used, color mixing with other colors and spectral fluctuation after development can be further suppressed.
- Ar 1 and Ar 2 each independently represents an aryl group.
- the cation is delocalized as follows.
- the counter anion is not particularly limited, but is preferably a non-nucleophilic anion from the viewpoint of heat resistance.
- the non-nucleophilic anion known non-nucleophilic anions described in JP-A-2007-310315, paragraph No. 0075 and the like are preferable.
- the non-nucleophilic property means a property that does not nucleophilic attack the dye by heating.
- sulfonate anion carboxylate anion, sulfonylimide anion, bis (sulfonyl) imide anion, tris (sulfonyl) methide anion, carboxylate anion, tetraarylborate anion, -CON - CO -, - CON - SO 2 -, BF 4 -, PF 6 -, SbF 6 -, B - (CN) is preferably at least one selected from 3 OCH 3.
- the counter anion is more preferably a non-nucleophilic anion having a structure represented by the following (AN-1) to (AN-5).
- X 1 and X 2 each independently represent a fluorine atom or an alkyl group having 1 to 10 carbon atoms having a fluorine atom.
- X 1 and X 2 may be bonded to each other to form a ring.
- X 1 and X 2 each independently represent a fluorine atom or an alkyl group having 1 to 10 carbon atoms having a fluorine atom, preferably a fluorine atom or an alkyl group having 1 to 10 carbon atoms having a fluorine atom, More preferred is a perfluoroalkyl group of ⁇ 10, more preferred is a perfluoroalkyl group having 1 to 4 carbon atoms, and a trifluoromethyl group is particularly preferred.
- X 3 , X 4 and X 5 each independently represent a fluorine atom or an alkyl group having 1 to 10 carbon atoms.
- X 3 , X 4 and X 5 each independently have the same meaning as X 1 and X 2 , and the preferred range is also the same.
- X 6 represents an alkyl group having a fluorine atom having 1 to 10 carbon atoms.
- X 6 is preferably a perfluoroalkyl group having 1 to 10 carbon atoms, and more preferably a perfluoroalkyl group having 1 to 4 carbon atoms.
- X 7 represents an alkylene group having 1 to 10 carbon atoms.
- X 7 is preferably a perfluoroalkylene group having 1 to 10 carbon atoms, and more preferably a perfluoroalkylene group having 1 to 4 carbon atoms.
- Ar 1 , Ar 2 , Ar 3 and Ar 4 each independently represents an aryl group.
- Ar 1 , Ar 2 , Ar 3 and Ar 4 are each independently preferably an aryl group having 6 to 20 carbon atoms, more preferably an aryl group having 6 to 14 carbon atoms, and further an aryl group having 6 to 10 carbon atoms preferable.
- the aryl group represented by Ar 1 , Ar 2 , Ar 3 and Ar 4 may have a substituent.
- a halogen atom, an alkyl group, an aryl group, an alkoxy group, a carbonyl group, a carbonyloxy group, a carbamoyl group, a sulfo group, a sulfonamide group, a nitro group and the like can be mentioned, and a halogen atom and an alkyl group are preferable, A fluorine atom and an alkyl group are more preferable, and a fluorine atom and a perfluoroalkyl group having 1 to 4 carbon atoms are more preferable.
- Ar 1 , Ar 2 , Ar 3 and Ar 4 are each independently more preferably a halogen atom and / or a phenyl group having an alkyl group having a halogen atom, and a phenyl group having a fluorine atom and / or an alkyl group having a fluorine atom. More preferred are groups.
- the non-nucleophilic counter anion is also B (CN) n1 (OR a ) 4-n1 (R a represents an alkyl group having 1 to 10 carbon atoms or an aryl group having 6 to 10 carbon atoms, and n1 is 1 Represents an integer of 4).
- Ra as the alkyl group having 1 to 10 carbon atoms is preferably an alkyl group having 1 to 6 carbon atoms, more preferably an alkyl group having 1 to 4 carbon atoms.
- R a as the aryl group having 6 to 10 carbon atoms is preferably a phenyl group or a naphthyl group.
- n1 is preferably 1 to 3, and more preferably 1 to 2.
- the non-nucleophilic counter anion is PF 6 R P (6-n2) ⁇
- R P represents a fluorinated alkyl group having 1 to 10 carbon atoms
- n2 represents an integer of 1 to 6
- R P is preferably an alkyl group having 1 to 6 carbon atoms, more preferably an alkyl group having 1 to 4 carbon atoms, and further preferably a perfluoroalkyl group having 1 to 3 carbon atoms.
- n2 is preferably an integer of 1 to 4, and more preferably 1 or 2.
- the mass per molecule of the non-nucleophilic counter anion is preferably 100 to 1,000, and more preferably 200 to 500. Specific examples of the non-nucleophilic counter anion are shown below, but the present invention is not limited thereto.
- the dye multimer preferably has two or more dye structures, more preferably three or more in one molecule.
- the upper limit is not particularly limited, but can be 100 or less.
- the dye structures in one molecule may be the same dye structure or different dye structures.
- different dye structures include not only dye structures having different dye skeletons but also dye structures having the same dye skeleton and different types of substituents bonded to the dye skeleton.
- the dye multimer of the present invention preferably has a structure in which two or more dye structures are bonded to a divalent or higher linking group.
- the dye multimer of the present invention preferably contains at least one selected from a repeating unit having a dye structure in the side chain and a repeating unit having a dye structure in the main chain. Further, the dye multimer of the present invention comprises at least one repeating unit represented by the following general formula (A), general formula (B) and general formula (C), or the general formula described later. It is preferably represented by (D). That is, the dye multimer of the present invention is represented by a dye multimer (also referred to as dye multimer (A)) having a repeating unit represented by the general formula (A) described later, and a general formula (B) described later.
- Dye multimers having repeating units also referred to as dye multimers (B)
- dye multimers having repeating units represented by the general formula (C) described later also referred to as dye multimers (C)
- general A dye multimer represented by the formula (D) also referred to as a dye multimer (D)
- the dye multimer (A), the dye multimer (C), and the dye multimer (D) are more preferable, and the dye multimer (A) and the dye multimer (D) are particularly preferable.
- the dye multimer (A) includes a repeating unit represented by the following formula (A).
- the ratio of the repeating unit represented by the following general formula (A) is preferably 10 to 100% by mass of the total repeating units constituting the dye multimer.
- the lower limit is more preferably 20% by mass or more, further preferably 30% by mass or more, and particularly preferably 50% by mass or more.
- the upper limit is more preferably 95% by mass or less.
- X 1 represents a main chain of a repeating unit
- L 1 represents a single bond or a divalent linking group.
- DyeI represents a dye structure.
- X 1 represents the main chain of the repeating unit and usually represents a linking group formed by a polymerization reaction, for example, a compound having a (meth) acryl group, a styrene group, a vinyl group, or an ether group.
- the derived main chain is preferred.
- X 1 is not particularly limited as long as it is a linking group formed from a known polymerizable monomer.
- Linking groups represented by the following (XX-1) to (XX-30) are exemplified, and linking groups represented by the following (XX-1) to (XX-24) are preferred, and (XX-1), ( XX-2), (XX-10) to (XX-17), (XX-18), (XX-19) and (XX-24), more preferably selected from (XX-1), (XX More preferably selected from (XX-2), (XX-10) to (XX-17) and (XX-24), selected from (XX-1), (XX-2) and (XX-11) It is particularly preferred that In the formula, it is linked to L 1 at the site indicated by *. Me represents a methyl group.
- R in (XX-18) and (XX-19) represents a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a phenyl group.
- L 1 represents a single bond or a divalent linking group.
- the divalent linking group include an alkylene group having 1 to 30 carbon atoms, an arylene group having 6 to 30 carbon atoms, a heterocyclic linking group, —CH ⁇ CH—, —O—, —S—, —C ( ⁇ O ) —, —CO 2 —, —NR—, —CONR—, —O 2 C—, —SO—, —SO 2 — and a linking group formed by linking two or more of these, the formula (L-1 ) Is represented.
- R represents a hydrogen atom, an alkyl group, an aryl group, or a heterocyclic group each independently.
- the alkylene group and alkyl group preferably have 1 to 30 carbon atoms.
- the upper limit is more preferably 25 or less, and still more preferably 20 or less.
- the lower limit is more preferably 2 or more, and still more preferably 3 or more.
- the alkylene group may be linear, branched or cyclic.
- the number of carbon atoms in the arylene group and aryl group is preferably 6-20, and more preferably 6-12.
- the heterocyclic linking group and the heterocyclic group are preferably a 5-membered ring or a 6-membered ring.
- the hetero atom contained in the heterocyclic linking group and the heterocyclic group is preferably an oxygen atom, a nitrogen atom or a sulfur atom.
- the number of heteroatoms contained in the heterocyclic linking group and the heterocyclic group is preferably 1 to 3. In the formula, it is linked to X 1 of formula (A) at the site indicated by * 1, and is linked to DyeI of formula (A) at the site indicated by * 2.
- L 11 represents a single bond or a divalent linking group.
- the divalent linking group include an alkylene group having 1 to 6 carbon atoms, an arylene group having 6 to 18 carbon atoms, —O—, —CO—, —S—, —SO 2 —, —NR A R B — or Examples include groups composed of these combinations.
- the alkylene group may be linear, branched or cyclic.
- the arylene group may be monocyclic or polycyclic.
- R A and R B each independently represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms, and R A and R B are bonded to each other to form a ring. Also good.
- L 12 represents —SO 2 — or —CO—.
- L 13 represents a divalent linking group. Examples of the divalent linking group include the groups described for L 11 , an arylene group having 6 to 18 carbon atoms (preferably a phenylene group), —O—, —CO—, —S—, —NR A R B -Or a group consisting of a combination thereof is preferred, and a group consisting of a combination of a phenylene group, -O- and -CO- is more preferred.
- G represents a carbon atom or a nitrogen atom.
- n2 represents 1 when G is a carbon atom, and represents 0 when G is a nitrogen atom.
- R 7A represents an alkylene group containing a fluorine atom or an arylene group containing a fluorine atom.
- the alkylene group preferably has 1 to 10 carbon atoms, more preferably 1 to 6 carbon atoms, and still more preferably 1 to 3 carbon atoms.
- the carbon number of the arylene group is preferably 6 to 20, more preferably 6 to 14, and further preferably 6 to 10.
- R 7B represents an alkyl group containing a fluorine atom or an aryl group containing a fluorine atom.
- the alkyl group preferably has 1 to 10 carbon atoms, more preferably 1 to 6 carbon atoms, and still more preferably 1 to 3 carbon atoms.
- the aryl group preferably has 6 to 20 carbon atoms, more preferably 6 to 14 carbon atoms, and still more preferably 6 to 10 carbon atoms.
- DyeI represents a dye structure.
- the dye structure include a dye structure derived from a dye compound selected from a xanthene dye, a triarylmethane dye, a polymethine dye, a dipyrromethene dye, an azo dye, a diketopyrrolopyrrole dye, a phthalocyanine dye, and a naphthalocyanine dye.
- a dye structure derived from a dye compound selected from a dye and a triarylmethane dye is preferred, and a dye structure derived from a xanthene dye is more preferred.
- a part of the dye compound is preferably linked to L 1 or X 1 .
- DyeI preferably has a structure in which one or more arbitrary hydrogen atoms of the dye compound are removed.
- the dye multimer containing the repeating unit represented by the general formula (A) is obtained by (1) a method of synthesizing a monomer having a dye skeleton by addition polymerization, (2) an isocyanate group, an acid anhydride group, an epoxy group, It can be synthesized by a method of reacting a polymer having a reactive functional group with a dye having a functional group (hydroxy group, primary or secondary amino group, carboxy group, etc.) capable of reacting with a highly reactive group.
- Known addition polymerizations (radical polymerization, anionic polymerization, and cationic polymerization) can be applied to the addition polymerization.
- the dye multimer having the repeating unit represented by the general formula (A) is a radical polymer obtained by radical polymerization using a dye monomer having an ethylenically unsaturated bond from the viewpoint of heat resistance. It is preferable.
- the dye multimer in the present invention may contain other repeating units in addition to the repeating unit represented by the general formula (A).
- Other repeating units may contain a functional group such as a curable group or an acid group. It does not have to contain a functional group.
- the dye multimer preferably has at least one selected from a repeating unit having an acid group and a repeating unit having a curable group.
- Examples of the curable group include a radical polymerizable group, a cyclic ether group (epoxy group, oxetanyl group), an oxazoline group, and a methylol group.
- Examples of the radically polymerizable group include groups containing an ethylenically unsaturated bond such as a vinyl group, a (meth) allyl group, and a (meth) acryloyl group.
- the curable group is preferably a radical polymerizable group.
- the ratio of the repeating unit having a curable group is preferably 0 to 50% by mass with respect to all repeating units constituting the dye multimer.
- the lower limit is more preferably 1% by mass or more, and still more preferably 3% by mass or more.
- the upper limit is more preferably 35% by mass or less, and still more preferably 30% by mass or less.
- Examples of the acid group include a carboxy group, a sulfonic acid group, and a phosphoric acid group. Only one type of acid group may be included, or two or more types of acid groups may be included.
- the ratio of the repeating unit having an acid group is preferably 0 to 50% by mass of all repeating units constituting the dye multimer.
- the lower limit is more preferably 1% by mass or more, and still more preferably 3% by mass or more.
- the upper limit is more preferably 35% by mass or less, and still more preferably 30% by mass or less.
- Other functional groups include groups consisting of repeating 2 to 20 unsubstituted alkyleneoxy chains, development promoting groups such as lactones, acid anhydrides, amides, cyano groups, long chain and cyclic alkyl groups, aralkyl groups, aryls Groups, polyalkylene oxide groups, hydroxy groups, maleimide groups, amino group and other hydrophilicity adjusting groups, and the like, which can be introduced as appropriate.
- the number of repeating alkyleneoxy chains is preferably 2 to 10, more preferably 2 to 15, and even more preferably 2 to 10.
- One alkyleneoxy chain is represented by — (CH 2 ) n O—, where n is an integer, n is preferably 1 to 10, more preferably 1 to 5, and even more preferably 2 or 3.
- the dye multimer (B) includes a repeating unit represented by the following formula (B).
- the ratio of the repeating unit represented by the following general formula (B) is preferably 10 to 100% by mass of the total repeating units constituting the dye multimer.
- the lower limit is more preferably 20% by mass or more, further preferably 30% by mass or more, and particularly preferably 50% by mass or more.
- the upper limit is more preferably 95% by mass or less.
- X 2 represents a linking group formed by polymerization
- L 2 represents a single bond or a divalent linking group
- Dye II represents a group capable of ionic bonding or coordination bonding with Y 2.
- Y 2 represents a group capable of ionic bonding or coordination bonding with Dye II .
- L 2 represents a single bond or a divalent linking group.
- the divalent linking group include an alkylene group having 1 to 30 carbon atoms, an arylene group having 6 to 30 carbon atoms, a heterocyclic linking group, —CH ⁇ CH—, —O—, —S—, —C ( ⁇ O )-, -COO-, -NR-, -CONR-, -OCO-, -SO-, -SO 2 -and a linking group formed by linking two or more of these.
- R represents a hydrogen atom, an alkyl group, an aryl group, or a heterocyclic group each independently. For more information about the divalent linking group are the same as L 1 in formula (A).
- Y 2 may be a group capable of ionic bonding or coordination bonding with Dye II, and may be either an anionic group or a cationic group.
- the anionic group is not particularly limited, and examples thereof include —SO 3 ⁇ , —COO ⁇ , —PO 4 ⁇ , bis (sulfonyl) imide anion, tris (sulfonyl) methide anion, and tetraarylborate anion. Further, a group represented by the general formula (Z-1), a group represented by the general formula (Z-2), and a group represented by the following general formula (Z-3) are also preferable.
- Y 12 represents an anion composed of a boron atom, a carbon atom, a nitrogen atom, or a phosphorus atom.
- n is 3
- a 2 represents a halogen atom, a cyano group, an alkyl group containing at least one of a fluorine atom and a cyano group, or at least one of a fluorine atom and a cyano group.
- An aryl group is preferred.
- a 2 is an aryl group containing at least one of a halogen atom, a cyano group, a fluorine atom and a cyano group, an alkyl group containing at least one of a fluorine atom and a cyano group
- An alkylsulfonyl group which may contain at least one of a group, a fluorine atom and a cyano group, or an arylsulfonyl group which may contain at least one of a fluorine atom and a cyano group is preferable.
- Two A 2 may be bonded to each other to form a ring.
- a 2 is an alkyl group containing at least one of a fluorine atom and a cyano group, an aryl group containing at least one of a fluorine atom and a cyano group, a fluorine atom and a cyano group
- An alkylsulfonyl group which may contain at least one group or an arylsulfonyl group which may contain at least one of a fluorine atom and a cyano group is preferable.
- a 2 is an alkyl group containing at least one of a fluorine atom and a cyano group, an aryl group containing at least one of a fluorine atom and a cyano group, a fluorine atom And an alkylsulfonyl group which may contain at least one of cyano groups, or an arylsulfonyl group which may contain at least one of a fluorine atom and a cyano group is preferable.
- n is 2 or more, the plurality of A 2 may be the same or different.
- the proportion of fluorine atoms is preferably 5 to 80% contained in Y 2 with respect to the total number of atoms constituting the Y 2, 10 to 70% is more preferable.
- R 1 to R 4 are each independently preferably a cyano group or a fluorinated alkyl group.
- Examples of the cationic group include substituted or unsubstituted onium cations (for example, ammonium, pyridinium, imidazolium, phosphonium and the like), and ammonium cations are particularly preferable.
- An ammonium cation includes —N (R) 3 + .
- R each independently represents a hydrogen atom or an alkyl group, and at least one of R represents an alkyl group.
- the alkyl group preferably has 1 to 10 carbon atoms, and more preferably 1 to 5 carbon atoms.
- the alkyl group may be linear, branched or cyclic, but is preferably linear.
- DyeII may be a dye structure having a group capable of ionic bonding or coordination bonding with Y 2, and the dye skeleton is not particularly limited. Examples thereof include the dye structure described in the above DyeI.
- repeating unit represented by the general formula (B) include the structures described in paragraph numbers 0162 to 0166 in JP-A-2014-199436.
- the dye multimer (B) may contain other repeating units described in the dye multimer (A) in addition to the repeating unit represented by the general formula (B). Moreover, the repeating unit represented by general formula (A) mentioned above and the repeating unit represented by general formula (C) mentioned later may further be included.
- the dye multimer (C) preferably contains a repeating unit represented by the following general formula (C).
- the ratio of the repeating unit represented by the following general formula (C) is preferably 10 to 100% by mass of the total repeating units constituting the dye multimer.
- the lower limit is more preferably 20% by mass or more, further preferably 30% by mass or more, and particularly preferably 50% by mass or more.
- the upper limit is more preferably 95% by mass or less.
- L 3 represents a single bond or a divalent linking group.
- DyeIII represents a dye structure. m represents 0 or 1;
- L 3 represents a single bond or a divalent linking group.
- the divalent linking group represented by L 3 include an alkylene group having 1 to 30 carbon atoms, an arylene group having 6 to 30 carbon atoms, a heterocyclic linking group, —CH ⁇ CH—, —O—, and —S—.
- R represents a hydrogen atom, an alkyl group, an aryl group, or a heterocyclic group each independently.
- m represents 0 or 1, but is preferably 1.
- the alkyl group and alkylene group preferably have 1 to 30 carbon atoms.
- the upper limit is more preferably 25 or less, and still more preferably 20 or less.
- the lower limit is more preferably 2 or more, and still more preferably 3 or more.
- the alkyl group and alkylene group may be linear, branched or cyclic.
- the number of carbon atoms in the aryl group and arylene group is preferably 6-20, and more preferably 6-12.
- the heterocyclic linking group and the heterocyclic group are preferably a 5-membered ring or a 6-membered ring.
- the hetero atom contained in the heterocyclic linking group and the heterocyclic group is preferably an oxygen atom, a nitrogen atom or a sulfur atom.
- the number of heteroatoms contained in the heterocyclic linking group and the heterocyclic group is preferably 1 to 3.
- the alkylene group, arylene group, heterocyclic linking group, alkyl group, aryl group, and heterocyclic group may be unsubstituted or may have a substituent.
- the substituent include a curable group and an acid group.
- the curable group include a radical polymerizable group such as a group containing an ethylenically unsaturated bond, a cyclic ether group (epoxy group, oxetanyl group), an oxazoline group, and a methylol group.
- Examples of the group containing an ethylenically unsaturated bond include a vinyl group, a (meth) allyl group, and a (meth) acryloyl group.
- Examples of the acid group include a carboxy group, a sulfonic acid group, and a phosphoric acid group.
- You may have a hydrophilic group, such as an oxide group, a hydroxy group, a maleimide group, an amino group, etc. as a substituent.
- DyeIII represents a dye structure.
- the kind of the dye compound derived from the dye structure represented by DyeIII is not particularly limited, and examples thereof include the same dye compounds as those described for DyeI in formula (A).
- the dye structure represented by DyeIII is preferably a structure in which one or more arbitrary hydrogen atoms of the dye compound are removed.
- the dye multimer (C) may contain other repeating units described in the dye multimer (A) in addition to the repeating unit represented by the general formula (C). Moreover, the repeating unit represented by general formula (A) mentioned above and the repeating unit represented by general formula (B) mentioned later may further be included.
- the dye multimer (C) can be synthesized by sequential polymerization.
- Sequential polymerization means polyaddition (for example, reaction of diisocyanate compound and diol, reaction of diepoxy compound and dicarboxylic acid, reaction of tetracarboxylic dianhydride and diol, etc.) and polycondensation (for example, dicarboxylic acid).
- a diol, a reaction of a dicarboxylic acid and a diamine, and the like are particularly preferable because the reaction conditions can be moderated and the dye skeleton is not decomposed.
- Known reaction conditions can be applied to the sequential polymerization.
- the dye multimer (D) is preferably represented by the general formula (D).
- L 4 represents a (n + k) -valent linking group.
- n represents an integer of 2 to 20, and k represents an integer of 0 to 20.
- DyeIV represents a dye structure, and P represents a substituent. When n is 2 or more, the plurality of DyeIVs may be different from each other, and when k is 2 or more, the plurality of P may be different from each other.
- n + k represents an integer of 2 to 20.
- n is preferably 2 to 15, more preferably 2 to 14, still more preferably 2 to 8, particularly preferably 2 to 7, and still more preferably 2 to 6.
- the total of n and k is preferably 2 to 20, more preferably 2 to 15, more preferably 2 to 14, still more preferably 2 to 8, particularly preferably 2 to 7, and still more preferably 2 to 6.
- n and k in one pigment multimer are integers, respectively, in the present invention, a plurality of pigment multimers having different n and k in the general formula (D) may be included. Therefore, the average value of n and k in the coloring composition of the present invention may not be an integer.
- (N + k) -valent linking groups include 1 to 100 carbon atoms, 0 to 10 nitrogen atoms, 0 to 50 oxygen atoms, 1 to 200 hydrogen atoms, and Groups consisting of 0 to 20 sulfur atoms are included.
- Specific examples of the (n + k) -valent linking group include a group composed of a combination of two or more of the following structural units or the following structural units (which may form a ring structure). .
- P represents a substituent.
- the substituent include an acid group and a curable group.
- the curable group include a radical polymerizable group such as a group containing an ethylenically unsaturated bond, a cyclic ether group (epoxy group, oxetanyl group), an oxazoline group, and a methylol group.
- the group containing an ethylenically unsaturated bond include a vinyl group, a (meth) allyl group, and a (meth) acryloyl group.
- the acid group include a carboxy group, a sulfonic acid group, and a phosphoric acid group.
- the substituent represented by P may be a monovalent polymer chain having a repeating unit.
- the monovalent polymer chain having a repeating unit is preferably a monovalent polymer chain having a repeating unit derived from a vinyl compound.
- the k Ps may be the same or different.
- P has 2 to 20 repeating units derived from a vinyl compound (preferably 2 to 15, more preferably 2 to 10).
- the average number of repeating units derived from k P vinyl compounds is 2 to 20 (preferably 2 to 15, more preferably 2 to 10).
- the number of repeating units of P when k is 1 and the average number of repeating units of P when k is 2 or more are expressed as It can be determined by resonance (NMR).
- examples of the repeating unit constituting P include other repeating units described in the dye multimer (A). It is preferable that another repeating unit has 1 or more types chosen from the repeating unit which has the acid group mentioned above, and the repeating unit which has a sclerosing
- the repeating unit having an acid group is contained, the developability can be improved.
- a repeating unit having a curable group is included, color mixing with other colors and spectral fluctuation after development can be further suppressed.
- the proportion of the repeating unit containing an acid group is preferably 10 to 80 mol%, more preferably 10 to 65 mol%, based on all the repeating units of P.
- the ratio of the repeating unit having a curable group is preferably 10 to 80 mol%, more preferably 10 to 65 mol%, based on all the repeating units of P. .
- DyeIV represents a dye structure.
- the type of the dye structure represented by DyeIV is not particularly limited, and examples thereof include the same dye structure as that described for DyeI in Formula (A).
- the dye structure represented by DyeIV is a structure in which one or more arbitrary hydrogen atoms of the dye compound are removed, and a part of the dye compound is bonded to L 4. Also good.
- dye structure The structure which remove
- the polymer chain is not particularly defined as long as it contains a dye structure, but is one kind selected from (meth) acrylic resins, styrene resins, and (meth) acrylic / styrene resins. Is preferred.
- the repeating unit of the polymer chain is not particularly defined, and examples thereof include the repeating unit represented by the general formula (A) described above and the repeating unit represented by the general formula (C) described above.
- the total number of repeating units having a dye structure in all repeating units constituting the polymer chain is preferably 5 to 60 mol%, more preferably 10 to 50 mol%, and further preferably 20 to 40 mol%. preferable.
- the polymer chain may contain other repeating units described in the dye multimer (A) in addition to the repeating unit having a dye structure.
- another repeating unit it is preferable to have at least one selected from a repeating unit having an acid group and a repeating unit having a curable group.
- the ratio of the repeating unit having a curable group is preferably, for example, 5 to 50 mol with respect to 100 mol of all repeating units of the polymer chain, and 10 to 40 mol. Is more preferable.
- the ratio of the repeating unit having an acid group is preferably, for example, 5 to 50 mol, more preferably 10 to 40 mol, relative to 100 mol of all repeating units of the polymer chain. preferable.
- the dye multimer represented by the general formula (D) can be synthesized by the following method or the like.
- Polymer reaction method. (2) A method of Michael addition reaction between a compound having a carbon-carbon double bond introduced at the terminal and a thiol compound having a dye structure.
- a method in which a compound in which a carbon-carbon double bond is introduced at a terminal and a thiol compound having a dye structure are reacted in the presence of a radical generator.
- the dye multimer (D) preferably has a structure represented by the following general formula (D-1). (D 1 -L 42) n -L 4 - (L 41 -P 1) k ⁇ (D-1)
- L 4 represents an (n + k) -valent linking group.
- n represents an integer of 2 to 20, and k represents an integer of 0 to 20.
- D 1 represents a dye structure, and P 1 represents a substituent.
- n + k represents an integer of 2 to 20.
- L 4 , n and k are the same as L 4, n and k in the general formula (D), and preferred ranges are also the same.
- L 41 and L 42 each independently represent a single bond or a divalent linking group. When a plurality of L 41 and L 42 are present, they may be the same or different.
- Divalent linking groups include 1 to 100 carbon atoms, 0 to 10 nitrogen atoms, 0 to 50 oxygen atoms, 1 to 200 hydrogen atoms, and 0 To 20 sulfur atoms are included, which may be unsubstituted or further substituted.
- divalent linking group examples include a group constituted by combining two or more of the following structural units or the following structural units.
- L 41 and L 42 are preferably a group containing —S—, more preferably —S—.
- P 1 represents a substituent.
- the substituent include an acid group and a curable group.
- the curable group include a radical polymerizable group such as a group containing an ethylenically unsaturated bond, a cyclic ether group (epoxy group, oxetanyl group), an oxazoline group, and a methylol group.
- the group containing an ethylenically unsaturated bond include a vinyl group, a (meth) allyl group, and a (meth) acryloyl group.
- the acid group include a carboxy group, a sulfonic acid group, and a phosphoric acid group.
- the substituent represented by P 1 may be a monovalent polymer chain having a repeating unit.
- the monovalent polymer chain having a repeating unit is preferably a monovalent polymer chain having a repeating unit derived from a vinyl compound.
- k P 1 s may be the same or different.
- P 1 is a monovalent polymer chain having a repeating unit and k is 1, P 1 has 2 to 20 repeating units derived from a vinyl compound (preferably 2 to 15, more preferably 2 Monovalent polymer chains having ⁇ 10) are preferred.
- the average number of repeating units derived from k P 1 vinyl compounds is 2 to 20 ( The number is preferably 2 to 15, more preferably 2 to 10.
- examples of the repeating unit constituting P 1 include the other repeating units described in the dye multimer (A) described above. It is preferable that another repeating unit has 1 or more types chosen from the repeating unit which has the acid group mentioned above, and the repeating unit which has a sclerosing
- the ratio of the repeating unit containing an acid group is preferably 10 to 80 mol%, more preferably 10 to 65 mol%, based on all repeating units of P 1.
- the ratio of the repeating unit having a curable group is preferably 10 to 80 mol%, more preferably 10 to 65 mol%, based on all the repeating units of P. preferable.
- D 1 represents a dye structure.
- the dye structure represented by D 1 may be a structure in which one or more arbitrary hydrogen atoms of the dye compound are removed, and a part of the dye compound may be bonded to L 42 , It may be a polymer chain containing a repeating unit having a dye structure in the side chain.
- the polymer chain is not particularly defined as long as it contains a dye structure, but is one kind selected from (meth) acrylic resins, styrene resins, and (meth) acrylic / styrene resins. Is preferred.
- the repeating unit of the polymer chain is not particularly defined, and examples thereof include the repeating unit represented by the general formula (A) described above and the repeating unit represented by the general formula (C) described above.
- the total number of repeating units having a dye structure in all repeating units constituting the polymer chain is preferably 5 to 60 mol%, more preferably 10 to 50 mol%, and further preferably 20 to 40 mol%. preferable.
- the polymer chain may contain other repeating units described in the dye multimer (A) in addition to the repeating unit having a dye structure.
- the dye multimer (D) preferably has a structure represented by the following general formula (D-2).
- L 4 represents an (n + k) -valent linking group.
- n represents an integer of 2 to 20, and k represents an integer of 0 to 20.
- D 2 represents a dye structure, and P 2 represents a substituent.
- B 1 and B 2 are each independently a single bond, —O—, —S—, —CO—, —NR—, —O 2 C—, —CO 2 —, —NROC—, or —CONR—. Represents.
- R represents a hydrogen atom, an alkyl group or an aryl group.
- C 1 and C 2 each independently represents a single bond or a divalent linking group.
- S represents a sulfur atom.
- n 2 or more, the plurality of D 2 may be different from each other, and when k is 2 or more, the plurality of P 2 may be different from each other.
- n + k represents an integer of 2 to 20.
- L 4 , n and k are the same as L 4, n and k in the general formula (D), and preferred ranges are also the same.
- B 1 and B 2 are each independently a single bond, —O—, —S—, —CO—, —NR—, —O 2 C—, —CO 2 —, —NROC— or —CONR— is represented, and a single bond, —O—, —CO—, —O 2 C—, —CO 2 —, —NROC— or —CONR— is preferable.
- R represents a hydrogen atom, an alkyl group or an aryl group.
- the alkyl group represented by R preferably has 1 to 30 carbon atoms, and more preferably 1 to 10 carbon atoms.
- the alkyl group may be linear, branched or cyclic.
- the number of carbon atoms of the aryl group represented by R is preferably 6-30, and more preferably 6-12.
- R is preferably a hydrogen atom or an alkyl group, more preferably a hydrogen atom.
- C 1 and C 2 each independently represents a single bond or a divalent linking group.
- the divalent linking group is preferably an alkylene group, an arylene group, or an oxyalkylene group, and more preferably an alkylene group or an oxyalkylene group.
- the alkylene group and oxyalkylene group preferably have 1 to 30 carbon atoms, and more preferably 1 to 10 carbon atoms.
- the alkyl group and oxyalkylene group may be linear, branched or cyclic.
- the number of carbon atoms in the arylene group is preferably 6 to 30, and more preferably 6 to 12.
- P 2 represents a substituent.
- the substituent include an acid group and a curable group.
- the curable group include a radical polymerizable group such as a group containing an ethylenically unsaturated bond, a cyclic ether group (epoxy group, oxetanyl group), an oxazoline group, and a methylol group.
- the group containing an ethylenically unsaturated bond include a vinyl group, a (meth) allyl group, and a (meth) acryloyl group.
- the acid group include a carboxy group, a sulfonic acid group, and a phosphoric acid group.
- the substituent represented by P 1 may be a monovalent polymer chain having a repeating unit.
- the monovalent polymer chain having a repeating unit is preferably a monovalent polymer chain having a repeating unit derived from a vinyl compound.
- k P 1 s may be the same or different.
- P 1 is a monovalent polymer chain having a repeating unit and k is 1, P 1 has 2 to 20 repeating units derived from a vinyl compound (preferably 2 to 15, more preferably 2 Monovalent polymer chains having ⁇ 10) are preferred.
- P 1 is a monovalent polymer chain having a repeating unit and k is 2 or more
- the average number of repeating units derived from k P 1 vinyl compounds is 2 to 20 ( The number is preferably 2 to 15, more preferably 2 to 10.
- examples of the repeating unit constituting P 1 include the other repeating units described in the dye multimer (A) described above. It is preferable that another repeating unit has 1 or more types chosen from the repeating unit which has the acid group mentioned above, and the repeating unit which has a sclerosing
- the ratio of the repeating unit containing an acid group is preferably 10 to 80 mol%, more preferably 10 to 65 mol%, based on all repeating units of P 1. .
- the ratio of the repeating unit having a curable group is preferably 10 to 80 mol%, more preferably 10 to 65 mol%, based on all the repeating units of P. preferable.
- D 2 represents a dye structure.
- the dye structure represented by D 2 is a structure in which one or more arbitrary hydrogen atoms of the dye compound are removed, and a part of the dye compound is bonded to —S— in (D-2). It may be a polymer chain containing a repeating unit having a dye structure in the main chain or side chain.
- the polymer chain is not particularly defined as long as it contains a dye structure, but is one kind selected from (meth) acrylic resins, styrene resins, and (meth) acrylic / styrene resins. Is preferred.
- the repeating unit of the polymer chain is not particularly defined, and examples thereof include the repeating unit represented by the general formula (A) described above and the repeating unit represented by the general formula (C) described above.
- the total number of repeating units having a dye structure in all repeating units constituting the polymer chain is preferably 5 to 60 mol%, more preferably 10 to 50 mol%, and further preferably 20 to 40 mol%. preferable.
- the polymer chain may contain other repeating units described in the dye multimer (A) in addition to the repeating unit having a dye structure.
- the dye multimer represented by the general formula (D-2) is not particularly limited, but has a polyfunctional thiol compound having 3 to 10 thiol groups in one molecule, a dye skeleton and a radical polymerizable group. It can be produced by a method of radical polymerization of a compound (radically polymerizable dye compound).
- the radical polymerization of the polyfunctional thiol compound and the radical polymerizable dye compound is performed by, for example, dissolving the polyfunctional thiol compound and the radical polymerizable dye compound in an appropriate solvent, adding a radical generator to the solution, The addition can be carried out at a temperature of about 50 ° C. to 100 ° C. (thiol-ene reaction method).
- the weight average molecular weight (Mw) of the dye multimer is preferably 2000 to 40000.
- the lower limit is more preferably 3000 or more, and further preferably 4000 or more.
- the upper limit is more preferably 35,000 or less and even more preferably 30000 or less. By satisfy
- the weight average molecular weight of the dye multimer is preferably 2000 to 40000.
- the lower limit is more preferably 3000 or more, and further preferably 4000 or more.
- the upper limit is more preferably 35,000 or less and even more preferably 30000 or less.
- dye multimer is a polystyrene conversion value in a gel permeation chromatography (GPC) measurement, and specifically, it measured by the method as described in the Example mentioned later. Value.
- the acid value of the dye multimer is preferably 10 mgKOH / g or more, more preferably 20 mgKOH / g or more, further preferably 27 mgKOH / g or more, and particularly preferably 30 mgKOH / g or more.
- the upper limit of the acid value is preferably 300 mgKOH / g or less, more preferably 200 mgKOH / g or less, further preferably 180 mgKOH / g or less, still more preferably 130 mgKOH / g or less, and still more preferably 120 mgKOH / g or less.
- the ratio [(Mw) / (Mn)] of the weight average molecular weight (Mw) to the number average molecular weight (Mn) of the dye multimer is preferably 1.0 to 3.0, preferably 1.0 to 2. 5 is more preferable, and 1.0 to 2.0 is particularly preferable.
- the content of the colorant with respect to the total solid content in the colored composition is preferably 10 to 60% by mass.
- the lower limit is more preferably 20% by mass or more, and further preferably 30% by mass or more.
- the upper limit is more preferably 55% by mass or less. If content of a colorant is the range mentioned above, content of components other than a colorant can be raised and developability can be improved more.
- the content of the dye having a cation and an anion is preferably 1 to 70% by mass with respect to the total amount of the coloring agent.
- the upper limit is more preferably 60% by mass or less, further preferably 50% by mass or less, and further preferably 45% by mass or less.
- the lower limit is more preferably 5% by mass or more, further preferably 10% by mass or more, and further preferably 15% by mass or more.
- the content of the dye multimer is preferably 1 to 75% by mass with respect to the total amount of the colorant.
- the upper limit is more preferably 70% by mass or less, still more preferably 65% by mass or less, and still more preferably 60% by mass or less.
- the lower limit is more preferably 5% by mass or more, further preferably 10% by mass or more, and further preferably 15% by mass or more.
- the coloring composition of the present invention contains an acid generator.
- the acid generator include a photoacid generator and a thermal acid generator, both of which can be preferably used.
- a photo-acid generator and a thermal acid generator can also be used together.
- the acid generator only a photoacid generator may be used substantially, or only a thermal acid generator may be used.
- the content of the photoacid generator in the total mass of the acid generator is preferably 99% by mass or more. 99.9 mass% or more is more preferable, and 100 mass% (it consists only of photo-acid generators) is still more preferable.
- the case where substantially only the thermal acid generator is used as the acid generator means that the content of the thermal acid generator in the total mass of the acid generator is preferably 99% by mass or more. 99.9 mass% or more is more preferable, and 100 mass% (it consists only of thermal acid generators) is still more preferable.
- an acid generator means the compound which generate
- the thermal acid generator means a compound that generates an acid by thermal decomposition.
- a photo-acid generator means the compound which generate
- the acid generator is preferably a compound that generates an acid with a pKa of 4 or less, more preferably a compound that generates an acid with a pKa of 3 or less, and most preferably a compound that generates an acid with 2 or less.
- pKa basically refers to pKa in water at 25 ° C. Those that cannot be measured in water refer to those measured after changing to a solvent suitable for measurement.
- the pKa described in the chemical handbook can be referred to.
- the acid having a pKa of 3 or less is preferably sulfonic acid or phosphonic acid, and more preferably sulfonic acid.
- the molecular weight of the acid generator is preferably 200 to 1000.
- the lower limit is preferably 230 or more.
- the upper limit is preferably 800 or less.
- the content of the acid generator is preferably 0.1 to 20% by mass with respect to the total solid components of the colored composition.
- the lower limit is more preferably 1% by mass or more, and further preferably 2% by mass or more.
- the upper limit is more preferably 10% by mass or less, and still more preferably 8% by mass or less.
- the thermal acid generator is preferably a compound having a thermal decomposition temperature in the range of 130 ° C. to 250 ° C., more preferably in the range of 150 ° C. to 220 ° C.
- the thermal acid generator include compounds that generate a low nucleophilic acid such as sulfonic acid, carboxylic acid, and disulfonylimide by heating.
- the acid generated from the thermal acid generator is preferably an acid having a pKa of 4 or less, more preferably an acid having a pKa of 3 or less, and still more preferably an acid having a pKa of 2 or less.
- a sulfonic acid, an alkyl carboxylic acid substituted with an electron withdrawing group, an aryl carboxylic acid, disulfonylimide, or the like is preferable.
- the electron withdrawing group include a halogen atom such as a fluorine atom, a haloalkyl group such as a trifluoromethyl group, a nitro group, and a cyano group.
- the thermal acid generator is preferably a sulfonic acid ester that does not substantially generate an acid upon irradiation with actinic rays or radiation and generates an acid by heat. It is determined that there is no change in the spectrum by measuring infrared absorption (IR) spectrum and nuclear magnetic resonance (NMR) spectrum before and after the exposure of the compound that the acid is not substantially generated by irradiation with actinic ray or radiation. can do.
- the molecular weight of the sulfonic acid ester is preferably 230 to 1,000, more preferably 230 to 800.
- As the sulfonic acid ester a commercially available one may be used, or one synthesized by a known method may be used.
- the sulfonic acid ester can be synthesized, for example, by reacting a sulfonyl chloride or a sulfonic acid anhydride with a corresponding polyhydric alcohol under basic conditions.
- thermal acid generator examples include halogen-containing compounds, diazomethane compounds, sulfone compounds, sulfonic acid ester compounds, carboxylic acid ester compounds, phosphoric acid ester compounds, sulfonimide compounds, and sulfonebenzotriazole compounds. Of these, sulfonic acid ester compounds and sulfonimide compounds are preferred.
- the sulfonate compound examples include tetraethylene glycol bis (paratoluenesulfonate), butyl paratoluenesulfonate, and the like.
- sulfonimide compound examples include N- (trifluoromethylsulfonyloxy) succinimide (trade name “SI-105”, Midori Chemical Co., Ltd.), N- (camphorsulfonyloxy) succinimide (trade name “SI-106”, Midori Chemical).
- N- (4-methylphenylsulfonyloxy) succinimide (trade name “SI-101”, Midori Chemical Co., Ltd.), N- (2-trifluoromethylphenylsulfonyloxy) succinimide, N- (4-fluorophenyl) Sulfonyloxy) succinimide, N- (trifluoromethylsulfonyloxy) phthalimide, N- (camphorsulfonyloxy) phthalimide, N- (2-trifluoromethylphenylsulfonyloxy) phthalimide, N- (2-fluorophenylsulfonyloxy) Phthalimide, N- (trifluoromethylsulfonyloxy) diphenylmaleimide (trade name “PI-105”, Midori Chemical), N- (camphorsulfonyloxy) diphenylmaleimide, 4-methylphenylsulfonyloxydiphenylmaleimi
- Hept-5-ene-2,3-dicarboxylimide (trade name “NDI-100”, Midori Chemical Co., Ltd.), N- (4-methylphenylsulfonyloxy) bicyclo [2.2.1] hept-5 -En-2 3-dicarboxylimide (trade name “NDI-101”, Midori Chemical Co., Ltd.), N- (trifluoromethanesulfonyloxy) bicyclo [2.2.1] hept-5-ene-2,3-dicarboxylimide (product) Name “NDI-105”, Midori Chemical Co., Ltd.), N- (Nonafluorobutanesulfonyloxy) bicyclo [2.2.1] hept-5-ene-2,3-dicarboxylimide (trade name “NDI-109”) Midori Chemical Co., Ltd.), N- (camphorsulfonyloxy) bicyclo [2.2.1] hept-5-ene-2,3-dicarboxylimide (trade name “NDI
- thermal acid generators examples include the following compounds.
- iPr is an isopropyl group.
- the content of the thermal acid generator is preferably 0.1 to 20% by mass with respect to the total solid components of the colored composition.
- the lower limit is more preferably 1% by mass or more, and further preferably 2% by mass or more.
- the upper limit is more preferably 10% by mass or less, and still more preferably 8% by mass or less.
- the photoacid generator is preferably a compound that reacts with an actinic ray having a wavelength of 250 nm or more, preferably 250 to 350 nm and generates an acid, but is not limited to its chemical structure.
- the maximum absorption wavelength of the photoacid generator is preferably in the range of 260 to 320 nm, and more preferably in the range of 270 to 300 nm.
- the photoacid generator is preferably a compound that generates an acid having a pKa of 4 or less, more preferably a compound that generates an acid having a pKa of 3 or less, and most preferably a compound that generates an acid having 2 or less.
- photoacid generators examples include onium salt compounds, trichloromethyl-s-triazines, sulfonium salts, iodonium salts, quaternary ammonium salts, diazomethane compounds, imide sulfonate compounds, and oxime sulfonate compounds. .
- onium salt compounds, imide sulfonate compounds, and oxime sulfonate compounds are preferable, and onium salt compounds and oxime sulfonate compounds are particularly preferable.
- a photo-acid generator can be used individually by 1 type or in combination of 2 or more types.
- trichloromethyl-s-triazines diaryliodonium salts, triarylsulfonium salts, quaternary ammonium salts, and diazomethane compounds
- examples of trichloromethyl-s-triazines, diaryliodonium salts, triarylsulfonium salts, quaternary ammonium salts, and diazomethane compounds include compounds described in paragraphs 0083 to 0088 of JP2011-212494A; Examples of the compounds described in JP-A-2011-105645, paragraphs 0013 to 0049, and the contents thereof are incorporated in the present specification.
- Specific examples of the imidosulfonate compound include compounds described in paragraph numbers 0065 to 0075 of WO2011 / 087011, and the contents thereof are incorporated herein.
- Preferred examples of the onium salt include diaryl iodonium salts and triarylsulfonium salts.
- Examples of the diaryliodonium salts include diphenyliodonium trifluoroacetate, diphenyliodonium trifluoromethanesulfonate, 4-methoxyphenylphenyliodonium trifluoromethanesulfonate, 4-methoxyphenylphenyliodonium trifluoroacetate, phenyl, 4- (2′-hydroxy- 1'-tetradecaoxy) phenyliodonium trifluoromethanesulfonate, 4- (2'-hydroxy-1'-tetradecoxy) phenyliodonium hexafluoroantimonate, phenyl, 4- (2'-hydroxy-1'-tetra Decaoxy) phenyliodonium-p-toluenesulfonate is preferred.
- Triarylsulfonium salts include triphenylsulfonium trifluoromethanesulfonate, triphenylsulfonium trifluoroacetate, 4-methoxyphenyldiphenylsulfonium trifluoromethanesulfonate, 4-methoxyphenyldiphenylsulfonium trifluoroacetate, 4-phenylthiophenyldiphenylsulfonium.
- Preferred examples include trifluoromethanesulfonate or 4-phenylthiophenyldiphenylsulfonium trifluoroacetate.
- Preferred examples of the oxime sulfonate compound that is, a compound having an oxime sulfonate structure include compounds having an oxime sulfonate structure represented by the following general formula (B1-1).
- R 21 represents an alkyl group or an aryl group. Wavy lines represent bonds with other groups.
- the alkyl group and aryl group represented by R 21 may be substituted.
- the alkyl group in R 21 may be linear, branched or cyclic. Acceptable substituents are described below.
- As the alkyl group for R 21 a linear or branched alkyl group having 1 to 10 carbon atoms is preferable.
- the alkyl group of R 21 is a halogen atom, an aryl group having 6 to 11 carbon atoms, an alkoxy group having 1 to 10 carbon atoms, or a cyclic alkyl group (such as 7,7-dimethyl-2-oxonorbornyl group).
- aryl group for R 21 an aryl group having 6 to 11 carbon atoms is preferable, and a phenyl group or a naphthyl group is more preferable.
- the aryl group of R 21 may be substituted with a lower alkyl group, an alkoxy group, or a halogen atom.
- the compound containing an oxime sulfonate structure represented by the general formula (B1-1) is preferably an oxime sulfonate compound described in paragraph Nos. 0108 to 0133 of JP-A-2014-238438.
- a naphthalene imide compound is preferable, and the description of International Publication WO11 / 087011 can be referred to, and the contents thereof are incorporated in the present specification.
- the present invention in particular, trifluoromethylsulfonyloxybicyclo [2.2.1] hept-5-ene-dicarboximide, succinimide trifluoromethyl sulfonate, phthalimido trifluoromethyl sulfonate, N-hydroxynaphthalimide methane sulfonate, N- Preferred is hydroxy-5-norbornene-2,3-dicarboximidopropane sulfonate.
- a commercial product may be used as the photoacid generator.
- Examples of commercially available products include DS-101, MBZ-201, PI-105, MBZ-101, and TAZ-101 sold by Midori Chemical.
- compounds represented by the following general formulas (ZI), (ZII), and (ZIII) can also be used as the photoacid generator.
- R 201 , R 202 and R 203 each independently represents an organic group.
- the organic group as R 201 , R 202 and R 203 preferably has 1 to 30 carbon atoms, and more preferably 1 to 20 carbon atoms.
- Two members out of R 201 to R 203 may combine to form a ring structure, and the ring may contain an oxygen atom, a sulfur atom, an ester bond, an amide bond, or a carbonyl group.
- Examples of the group formed by combining two of R 201 to R 203 include an alkylene group (eg, butylene group, pentylene group).
- Z ⁇ represents a non-nucleophilic anion (an anion having an extremely low ability to cause a nucleophilic reaction).
- Examples of the organic group for R 201 , R 202 and R 203 include an aryl group, an alkyl group, and a cycloalkyl group. Of R 201 , R 202 and R 203 , at least one is preferably an aryl group, more preferably all three are aryl groups.
- the aryl group may be a heteroaryl group such as an indole residue or a pyrrole residue in addition to a phenyl group or a naphthyl group.
- Preferred examples of the alkyl group and cycloalkyl group represented by R 201 to R 203 include a linear or branched alkyl group having 1 to 10 carbon atoms and a cyclic alkyl group having 3 to 10 carbon atoms. These groups may further have a substituent. Examples of the substituent include nitro groups, halogen atoms such as fluorine atoms, carboxy groups, hydroxyl groups, amino groups, cyano groups, alkoxy groups (preferably having 1 to 15 carbon atoms), and cyclic alkyl groups (preferably having 3 to 3 carbon atoms).
- an aryl group preferably 6 to 14 carbon atoms
- an alkoxycarbonyl group preferably 2 to 7 carbon atoms
- an acyl group preferably 2 to 12 carbon atoms
- an alkoxycarbonyloxy group preferably 2 carbon atoms
- To 7 but is not limited thereto.
- Non-nucleophilic anions include, for example, sulfonate anions (aliphatic sulfonate anions, aromatic sulfonate anions, camphor sulfonate anions, etc.), carboxylate anions (aliphatic carboxylate anions, aromatic carboxylate anions, aralkyls). Carboxylate anion, etc.), sulfonylimide anion, bis (alkylsulfonyl) imide anion, tris (alkylsulfonyl) methide anion and the like.
- the aliphatic moiety in the aliphatic sulfonate anion and the aliphatic carboxylate anion may be any of a linear, branched or cyclic alkyl group, preferably a linear or branched group having 1 to 30 carbon atoms. And a cyclic alkyl group having 3 to 30 carbon atoms.
- the aromatic group in the aromatic sulfonate anion and aromatic carboxylate anion is preferably an aryl group having 6 to 14 carbon atoms, such as a phenyl group, a tolyl group, and a naphthyl group.
- the above-described linear, branched or cyclic alkyl group and aryl group may have a substituent.
- substituents include a nitro group, a halogen atom such as a fluorine atom, a carboxy group, a hydroxyl group, an amino group, a cyano group, an alkoxy group (preferably having a carbon number of 1 to 15), and a cyclic alkyl group (preferably having a carbon number).
- aryl group preferably 6 to 14 carbon atoms
- alkoxycarbonyl group preferably 2 to 7 carbon atoms
- acyl group preferably 2 to 12 carbon atoms
- alkoxycarbonyloxy group preferably carbon atoms 2-7)
- an alkylthio group preferably 1-15 carbon atoms
- an alkylsulfonyl group preferably 1-15 carbon atoms
- an alkyliminosulfonyl group preferably 2-15 carbon atoms
- an aryloxysulfonyl group Preferably 6-20 carbon atoms, alkylaryloxysulfonyl group (preferably 7-20 carbon atoms), alkyloxyal Aryloxy group (preferably having 5-20 carbon atoms) and the like.
- the aralkyl group in the aralkyl carboxylate anion is preferably an aralkyl group having 7 to 12 carbon atoms such as benzyl group, phenethyl group, naphthylmethyl group, naphthylethyl group, naphthylbutyl group and the like.
- Examples of the sulfonylimide anion include saccharin anion.
- the alkyl group in the bis (alkylsulfonyl) imide anion and tris (alkylsulfonyl) methide anion is preferably an alkyl group having 1 to 5 carbon atoms.
- substituents for these alkyl groups include halogen atoms, alkyl groups substituted with halogen atoms, alkoxy groups, alkylthio groups, alkyloxysulfonyl groups, aryloxysulfonyl groups, cycloalkylaryloxysulfonyl groups, and the like.
- a fluorine atom or an alkyl group substituted with a fluorine atom is preferred.
- the alkyl groups in the bis (alkylsulfonyl) imide anion may be bonded to each other to form a ring structure.
- the non-nucleophilic anion is an aliphatic sulfonate anion, in particular, the aliphatic moiety is a linear or branched alkyl group having 1 to 30 carbon atoms, and this alkyl group is all substituted with fluorine atoms. What is done is preferable.
- R 204 to R 207 each independently represents an aryl group, a linear, branched or cyclic alkyl group.
- the aryl group, linear, branched or cyclic alkyl group for R 204 to R 207 has the same meaning as R 201 to R 203 in compound (ZI), and the preferred range is also the same.
- the aryl group, linear, branched or cyclic alkyl group represented by R 204 to R 207 may have a substituent. This substituent has the same meaning as R 201 to R 203 in compound (ZI), and the preferred range is also the same.
- Z ⁇ represents a non-nucleophilic anion and has the same meaning as Z ⁇ in formula (ZI), and the preferred range is also the same.
- photoacid generator examples include compounds described in paragraph numbers 0149 to 0151, paragraph numbers 0170 to 0171 and paragraph numbers 0243 to 0247 of JP 2012-208447A, for example. These can be illustrated and their contents are incorporated herein.
- the content of the photoacid generator is preferably 0.1 to 20% by mass with respect to the total solid components of the colored composition.
- the lower limit is more preferably 1% by mass or more, and further preferably 2% by mass or more.
- the upper limit is more preferably 10% by mass or less, and still more preferably 8% by mass or less.
- the colored composition of the present invention contains a radical photopolymerizable compound (hereinafter also referred to as a polymerizable compound).
- a radical photopolymerizable compound hereinafter also referred to as a polymerizable compound.
- the photoradical polymerizable compound a known compound that can be cross-linked by a radical can be used.
- the compound which has radically polymerizable groups such as group which has an ethylenically unsaturated bond
- examples of the group having an ethylenically unsaturated bond include a vinyl group, a (meth) allyl group, and a (meth) acryloyl group.
- the polymerizable compound may be in a chemical form such as a monomer, a prepolymer, that is, a dimer, a trimer and an oligomer, or a mixture thereof and a multimer thereof. Monomers are preferred.
- the molecular weight of the polymerizable compound is preferably 100 to 3000.
- the upper limit is preferably 2000 or less, and more preferably 1500 or less.
- the lower limit is preferably 150 or more, and more preferably 250 or more.
- the polymerizable compound is preferably a 3 to 15 functional (meth) acrylate compound, more preferably a 3 to 6 functional (meth) acrylate compound. Specific examples of these compounds are described in paragraph Nos.
- Polymerizable compounds are dipentaerythritol triacrylate (KAYARAD D-330 as a commercial product; manufactured by Nippon Kayaku Co., Ltd.), dipentaerythritol tetraacrylate (KAYARAD D-320 as a commercial product; manufactured by Nippon Kayaku Co., Ltd.) Dipentaerythritol penta (meth) acrylate (as a commercial product, KAYARAD D-310; manufactured by Nippon Kayaku Co., Ltd.), dipentaerythritol hexa (meth) acrylate (as a commercially available product, KAYARAD DPHA; manufactured by Nippon Kayaku Co., Ltd., A) -DPH-12E (manufactured by Shin-Nakamura Chemical Co., Ltd.), and structures in which these (meth) acryloyl groups are bonded via ethylene glycol and propylene glycol residues (for example, SR454, commercially available
- the polymerizable compound may have an acid group such as a carboxy group, a sulfonic acid group, or a phosphoric acid group.
- an acid group such as a carboxy group, a sulfonic acid group, or a phosphoric acid group.
- Examples of commercially available products include M-305, M-510, and M-520 as polybasic acid-modified acrylic oligomers manufactured by Toagosei Co., Ltd.
- the preferred acid value of the polymerizable compound having an acid group is 0.1 to 40 mgKOH / g, particularly preferably 5 to 30 mgKOH / g. If the acid value of the polymerizable compound is 0.1 mgKOH / g or more, the development and dissolution characteristics are good, and if it is 40 mgKOH / g or less, it is advantageous in production and handling. Furthermore, the photopolymerizability is good and the curability is excellent.
- the polymerizable compound is also preferably a compound having a caprolactone structure.
- examples of the polymerizable compound having a caprolactone structure are commercially available from Nippon Kayaku Co., Ltd. as the KAYARAD DPCA series, and examples thereof include DPCA-20, DPCA-30, DPCA-60, DPCA-120 and the like.
- a polymerizable compound having an alkyleneoxy group can also be used.
- the polymerizable compound having an alkyleneoxy group is preferably a polymerizable compound having an ethyleneoxy group and / or a propyleneoxy group, more preferably a polymerizable compound having an ethyleneoxy group, and 3 to 4 having 4 to 20 ethyleneoxy groups.
- a hexafunctional (meth) acrylate compound is more preferable.
- Examples of commercially available polymerizable compounds having an alkyleneoxy group include SR-494, which is a tetrafunctional acrylate having four ethyleneoxy groups manufactured by Sartomer, and six pentyleneoxy groups manufactured by Nippon Kayaku Co., Ltd. DPCA-60, which is a hexafunctional acrylate, and TPA-330, which is a trifunctional acrylate having three isobutyleneoxy groups.
- Examples of the polymerizable compound include urethane acrylates described in JP-B-48-41708, JP-A-51-37193, JP-B-2-32293, JP-B-2-16765, Urethane compounds having an ethylene oxide skeleton described in JP-B-58-49860, JP-B-56-17654, JP-B-62-39417, and JP-B-62-39418 are also suitable. Further, addition polymerizable compounds having an amino structure or a sulfide structure in the molecule described in JP-A-63-277653, JP-A-63-260909, and JP-A-1-105238 are used. Thus, a colored composition having an extremely excellent photosensitive speed can be obtained.
- urethane oligomers UAS-10, UAB-140 (manufactured by Sanyo Kokusaku Pulp Co., Ltd.), UA-7200 (manufactured by Shin-Nakamura Chemical Co., Ltd.), DPHA-40H (manufactured by Nippon Kayaku Co., Ltd.), UA-306H, UA -306T, UA-306I, AH-600, T-600, AI-600 (manufactured by Kyoeisha Chemical Co., Ltd.) and the like.
- the colored composition of the present invention can also contain a cationically polymerizable compound as a curable compound.
- a cationically polymerizable compound examples include compounds having a cyclic ether group such as an epoxy group and an oxetanyl group.
- the cationic polymerizable compound may be a low molecular weight compound (for example, a molecular weight of less than 2000, or even a molecular weight of less than 1000), or a macromolecule (for example, a molecular weight of 1000 or more, and in the case of a polymer, the weight average molecular weight is 1000). Any of the above).
- the weight average molecular weight of the cationic polymerizable compound is preferably from 200 to 100,000, more preferably from 500 to 50,000.
- the upper limit of the weight average molecular weight is preferably 3000 or less, more preferably 2000 or less, and still more preferably 1500 or less.
- the cationically polymerizable compounds are described in paragraph numbers 0034 to 0036 of JP2013-011869A, paragraph numbers 0147 to 0156 of JP2014043556A, and paragraphs 0085 to 0092 of JP2014089408A.
- Compounds can also be used. These contents are incorporated herein. Examples of commercially available products include “EHPE3150, manufactured by Daicel Corporation”, “EPICLON N660, manufactured by DIC Corporation”, “Denacol EX-614B, manufactured by Nagase ChemteX”, “jER1031S, manufactured by Mitsubishi Chemical Corporation”, and the like. Can be mentioned.
- the content of the cationic polymerizable compound is preferably 0.1 to 40% by mass with respect to the total solid content of the colored composition.
- the lower limit is more preferably 0.5% by mass or more, and further preferably 1% by mass or more.
- the upper limit is more preferably 30% by mass or less, and still more preferably 20% by mass or less.
- One cationic polymerizable compound may be used alone, or two or more cationic polymerizable compounds may be used in combination. When using 2 or more types together, it is preferable that a total amount becomes the said range.
- the coloring composition of this invention can also be made into the aspect which does not contain a cationically polymerizable compound substantially.
- a cationically polymerizable compound substantially for example, 0.05% by mass or less is preferable, 0.01% by mass or less is more preferable, and the cationic polymerizable compound is substantially not contained with respect to the total solid content of the colored composition.
- the coloring composition of the present invention may contain a polyfunctional thiol compound having two or more mercapto groups in the molecule for the purpose of promoting the reaction of the polymerizable compound.
- the polyfunctional thiol compound is preferably a secondary alkanethiol, and particularly preferably a compound having a structure represented by the following general formula (T1).
- T1 In the formula (T1), n represents an integer of 2 to 4, and L represents a divalent to tetravalent linking group.
- the linking group L is preferably an aliphatic group having 2 to 12 carbon atoms, particularly preferably n is 2 and L is an alkylene group having 2 to 12 carbon atoms.
- Specific examples of the polyfunctional thiol compound include compounds represented by the following structural formulas (T2) to (T4), and a compound represented by the formula (T2) is particularly preferable.
- One or more polyfunctional thiol compounds can be used in combination.
- the content of the polyfunctional thiol compound is preferably 0.3 to 8.9% by mass, and more preferably 0.8 to 6.4% by mass with respect to the total solid content of the coloring composition.
- the polyfunctional thiol compound may be added for the purpose of improving stability, odor, resolution, developability, adhesion and the like.
- the coloring composition of the present invention contains a radical photopolymerization initiator.
- the radical photopolymerization initiator is also referred to as a photopolymerization initiator.
- the photopolymerization initiator is not particularly limited as long as it has the ability to initiate polymerization of a radical photopolymerizable compound, and can be appropriately selected from known photopolymerization initiators. For example, those having photosensitivity to visible light from the ultraviolet region are preferable. Further, it may be an activator that generates some active radicals by generating some action with the photoexcited sensitizer.
- the photopolymerization initiator preferably contains at least one compound having a molar extinction coefficient of at least about 50 within a range of about 300 nm to 800 nm (more preferably 330 nm to 500 nm).
- the photopolymerization initiator examples include halogenated hydrocarbon derivatives (for example, those having a triazine skeleton, those having an oxadiazole skeleton), acylphosphine compounds such as acylphosphine oxide, hexaarylbiimidazoles, oxime derivatives, etc. Oxime compounds, organic peroxides, thio compounds, ketone compounds, aromatic onium salts, ketoxime ethers, aminoacetophenone compounds, hydroxyacetophenones, and the like.
- halogenated hydrocarbon compound having a triazine skeleton examples include those described in Wakabayashi et al., Bull. Chem. Soc.
- trihalomethyltriazine compounds trihalomethyltriazine compounds, benzyldimethylketal compounds, ⁇ -hydroxyketone compounds, ⁇ -aminoketone compounds, acylphosphine compounds, phosphine oxide compounds, metallocene compounds, oxime compounds, triallylimidazole dimers, oniums
- compounds selected from the group consisting of compounds, benzothiazole compounds, benzophenone compounds, acetophenone compounds and derivatives thereof, cyclopentadiene-benzene-iron complexes and salts thereof, halomethyloxadiazole compounds, and 3-aryl substituted coumarin compounds are preferred.
- trihalomethyltriazine compound More preferred are trihalomethyltriazine compound, ⁇ -aminoketone compound, acylphosphine compound, phosphine oxide compound, oxime compound, triallylimidazole dimer, onium compound, benzophenone compound, acetophenone compound, trihalomethyltriazine compound, ⁇ -aminoketone
- the film of the present invention when used in a solid-state imaging device, it is necessary to form a fine pattern with a sharp shape. is there. From such a viewpoint, it is particularly preferable to use an oxime compound as the photopolymerization initiator.
- an oxime compound as the photopolymerization initiator.
- stepper exposure is used for curing exposure, but this exposure machine may be damaged by halogen, and the amount of photopolymerization initiator added must be kept low. Therefore, in view of these points, it is particularly preferable to use an oxime compound as a photopolymerization initiator for forming a fine pattern such as a solid-state imaging device. Further, the use of an oxime compound can improve the color transfer.
- paragraph numbers 0265 to 0268 of JP 2013-29760 A can be referred to, and the contents thereof are incorporated in the present specification.
- hydroxyacetophenone compounds As the photopolymerization initiator, hydroxyacetophenone compounds, aminoacetophenone compounds, and acylphosphine compounds can also be suitably used. More specifically, for example, an aminoacetophenone initiator described in JP-A-10-291969 and an acylphosphine initiator described in Japanese Patent No. 4225898 can also be used.
- hydroxyacetophenone-based initiator IRGACURE-184, DAROCUR-1173, IRGACURE-500, IRGACURE-2959, IRGACURE-127 (trade names: all manufactured by BASF) can be used.
- aminoacetophenone-based initiator commercially available products IRGACURE-907, IRGACURE-369, and IRGACURE-379EG (trade names: all manufactured by BASF) can be used.
- aminoacetophenone-based initiator a compound described in JP-A-2009-191179 in which an absorption wavelength is matched with a long-wave light source such as 365 nm or 405 nm can also be used.
- acylphosphine initiator commercially available products such as IRGACURE-819 and DAROCUR-TPO (trade names: both manufactured by BASF) can be used.
- More preferred examples of the photopolymerization initiator include oxime compounds.
- Specific examples of the oxime compound include compounds described in JP-A No. 2001-233842, compounds described in JP-A No. 2000-80068, and compounds described in JP-A No. 2006-342166.
- J.H. C. S. Perkin II (1979) pp. 1653-1660
- oxime compounds other than those described above compounds described in JP-A-2009-519904 in which an oxime is linked to the carbazole N-position, compounds described in US Pat. No. 7,626,957 in which a hetero substituent is introduced into the benzophenone moiety, A compound described in Japanese Patent Application Laid-Open No. 2010-15025 and US Patent Publication No. 2009-292039 in which a nitro group is introduced into the dye moiety, a ketoxime compound described in International Publication WO2009 / 131189, a triazine skeleton and an oxime skeleton in the same molecule The compound described in US Pat. No.
- the compound described in JP2009-221114A having an absorption maximum at 405 nm and good sensitivity to a g-ray light source and JP2014-137466A Described in paragraph numbers 0076-0079
- Such compounds may be used.
- paragraph numbers 0274 to 0275 of JP2013-29760A can be referred to, and the contents thereof are incorporated in the present specification.
- the oxime compound is preferably a compound represented by the following formula (OX-1).
- the oxime N—O bond may be an (E) oxime compound, a (Z) oxime compound, or a mixture of (E) and (Z) isomers. .
- R and B each independently represent a monovalent substituent
- A represents a divalent organic group
- Ar represents an aryl group.
- the monovalent substituent represented by R is preferably a monovalent nonmetallic atomic group.
- the monovalent nonmetallic atomic group include an alkyl group, an aryl group, an acyl group, an alkoxycarbonyl group, an aryloxycarbonyl group, a heterocyclic group, an alkylthiocarbonyl group, and an arylthiocarbonyl group.
- these groups may have one or more substituents.
- the substituent mentioned above may be further substituted by another substituent.
- the substituent examples include a halogen atom, an aryloxy group, an alkoxycarbonyl group or an aryloxycarbonyl group, an acyloxy group, an acyl group, an alkyl group, and an aryl group.
- the monovalent substituent represented by B is preferably an aryl group, a heterocyclic group, an arylcarbonyl group, or a heterocyclic carbonyl group. These groups may have one or more substituents. Examples of the substituent include the above-described substituents.
- the divalent organic group represented by A is preferably an alkylene group having 1 to 12 carbon atoms, a cycloalkylene group, or an alkynylene group. These groups may have one or more substituents. Examples of the substituent include the above-described substituents.
- an oxime compound having a fluorine atom (fluorine-containing oxime ester photopolymerization initiator) can also be used as a photopolymerization initiator.
- fluorine-containing oxime ester photopolymerization initiator fluorine-containing oxime ester photopolymerization initiator
- Specific examples of the oxime compound having a fluorine atom include compounds described in JP 2010-262028 A, compounds 24 and 36 to 40 described in JP-A-2014-500852, and compounds described in JP-A 2013-164471 ( C-3). This content is incorporated herein.
- the fluorine-containing oxime ester photopolymerization initiator is preferably a compound represented by the following formula (1).
- Ar 1 and Ar 2 each independently represent an aromatic hydrocarbon ring which may have a substituent
- R 1 represents an aryl group having a group containing a fluorine atom
- R 2 and R 3 each independently represents an alkyl group or an aryl group.
- Ar 1 and Ar 2 each independently represents an aromatic hydrocarbon ring which may have a substituent.
- the aromatic hydrocarbon ring may be a single ring or a condensed ring.
- the number of carbon atoms constituting the ring of the aromatic hydrocarbon ring is preferably 6 to 20, more preferably 6 to 15, and particularly preferably 6 to 10.
- the aromatic hydrocarbon ring is preferably a benzene ring or a naphthalene ring. Of these, at least one of Ar 1 and Ar 2 is preferably a benzene ring, and Ar 1 is more preferably a benzene ring.
- Ar 1 is preferably a benzene ring or a naphthalene ring, and more preferably a naphthalene ring.
- Ar 1 is preferably an unsubstituted aromatic hydrocarbon ring.
- Ar 2 may be an unsubstituted aromatic hydrocarbon ring or an aromatic hydrocarbon ring having a substituent.
- —COR X1 is preferable.
- R X1 is preferably an alkyl group, an aryl group or a heterocyclic group, more preferably an aryl group.
- the aryl group may have a substituent or may be unsubstituted. Examples of the substituent include an alkyl group having 1 to 10 carbon atoms.
- R 1 represents an aryl group having a group containing a fluorine atom.
- the aryl group preferably has 6 to 20 carbon atoms, more preferably 6 to 15 carbon atoms, and still more preferably 6 to 10 carbon atoms.
- the aryl group may be a single ring or a condensed ring.
- the group containing a fluorine atom is preferably an alkyl group having a fluorine atom (fluorine-containing alkyl group) and / or a group containing an alkyl group having a fluorine atom (fluorine-containing group).
- the fluorine-containing group is -OR X11 , -SR X11 , -COR X11 , -COOR X11 , -OCOR X11 , -NR X11 R X12 , -NHCOR X11 , -CONR X11 R X12 , -NHCONR X11 R X12 , -NHCOOR X11 , -SO 2 R X11, at least one group selected from -SO 2 oR X11 and -NHSO 2 R X11 preferably, -OR X11 is more preferred.
- R X11 represents a fluorine-containing alkyl group
- R X12 represents a hydrogen atom, an alkyl group, a fluorine-containing alkyl group, an aryl group, or a heterocyclic group.
- the group containing a fluorine atom is preferably a fluorine-containing alkyl group and / or —OR X11 .
- the fluorine-containing alkyl group preferably has 1 to 20 carbon atoms, more preferably 1 to 15 carbon atoms, still more preferably 1 to 10 carbon atoms, and particularly preferably 1 to 4 carbon atoms.
- the fluorine-containing alkyl group may be linear, branched or cyclic, but is preferably linear or branched.
- the fluorine-containing alkyl group preferably has a fluorine atom substitution rate of 40 to 100%, more preferably 50 to 100%, and still more preferably 60 to 100%.
- the alkyl group, aryl group and heterocyclic group represented by R X12 may have a substituent or may be unsubstituted.
- R 2 represents an alkyl group or an aryl group, and an alkyl group is preferable.
- the alkyl group and the aryl group may be unsubstituted or may have a substituent. Examples of the substituent include the substituents exemplified in Substituent group A.
- the alkyl group preferably has 1 to 20 carbon atoms, more preferably 1 to 15 carbon atoms, still more preferably 1 to 10 carbon atoms, and particularly preferably 1 to 4 carbon atoms.
- the alkyl group may be linear, branched or cyclic, but is preferably linear or branched.
- the aryl group preferably has 6 to 20 carbon atoms, more preferably 6 to 15 carbon atoms, and still more preferably 6 to 10 carbon atoms.
- the aryl group may be a single ring or a condensed ring.
- R 3 represents an alkyl group or an aryl group, and an alkyl group is preferable.
- the alkyl group and the aryl group may be unsubstituted or may have a substituent. Examples of the substituent include the substituents exemplified in Substituent group A.
- the alkyl group preferably has 1 to 20 carbon atoms, more preferably 1 to 15 carbon atoms, and still more preferably 1 to 10 carbon atoms.
- the alkyl group may be linear, branched or cyclic, but is preferably linear or branched.
- the aryl group preferably has 6 to 20 carbon atoms, more preferably 6 to 15 carbon atoms, and still more preferably 6 to 10 carbon atoms.
- the aryl group may be a single ring or a condensed ring.
- the oxime compound preferably has a maximum absorption wavelength in the wavelength region of 350 nm to 500 nm, more preferably has an absorption wavelength in the wavelength region of 360 nm to 480 nm, and particularly preferably has a high absorbance at 365 nm and 405 nm.
- the oxime compound preferably has a molar extinction coefficient at 365 nm or 405 nm of 1,000 to 300,000, more preferably 2,000 to 300,000, more preferably 5,000 to 200, from the viewpoint of sensitivity. Is particularly preferred.
- the molar extinction coefficient of the compound can be measured using a known method.
- the content of the photopolymerization initiator is preferably 0.1 to 50% by mass, more preferably 0.5 to 30% by mass, and further preferably 1 to 20% by mass with respect to the total solid content of the coloring composition. is there. Within this range, better sensitivity and pattern formability can be obtained.
- the coloring composition of the present invention may contain only one type of photopolymerization initiator, or may contain two or more types. When 2 or more types are included, the total amount is preferably within the above range.
- the colored composition of the present invention preferably contains a resin.
- the resin is blended, for example, for the purpose of dispersing a pigment or the like in the composition and the purpose of a binder.
- a resin used mainly for dispersing pigments is also called a dispersant.
- the weight average molecular weight (Mw) of the resin is preferably 2000 to 100,000.
- the lower limit is preferably 3,000 or more, and more preferably 5,000 or more.
- the number average molecular weight (Mn) of the resin is preferably 1000 to 20,000.
- the resin content is preferably 5 to 90% by mass, more preferably 10 to 80% by mass, based on the total solid content of the colored composition.
- the coloring composition may contain only 1 type of resin, and may contain 2 or more types of resin. When 2 or more types are included, the total amount is preferably within the above range.
- the coloring composition of this invention contains a pigment
- a dispersing agent examples include polymer dispersants [for example, polyamidoamine and its salt, polycarboxylic acid and its salt, high molecular weight unsaturated acid ester, modified polyurethane, modified polyester, modified poly (meth) acrylate, (meth) acrylic type Copolymer, naphthalenesulfonic acid formalin condensate], polyoxyethylene alkyl phosphate ester, polyoxyethylene alkylamine, alkanolamine and the like.
- the polymer dispersant can be further classified into a linear polymer, a terminal-modified polymer, a graft polymer, and a block polymer from the structure thereof.
- Examples of the terminal-modified polymer include a polymer having a phosphate group at the end described in JP-A-3-112992 and JP-T-2003-533455, and JP-A-2002-273191. Examples thereof include a polymer having a sulfonic acid group at the terminal and a polymer having a partial skeleton of organic dye or a heterocyclic ring described in JP-A-9-77994. In addition, polymers having two or more pigment surface anchor sites (acid groups, basic groups, organic dye partial skeletons, heterocycles, etc.) introduced at the polymer ends described in JP-A-2007-277514 are also available. It is preferable because of excellent dispersion stability. For example, the following resins are mentioned.
- the wavy line of L 1 represents a bond with a nitrogen atom.
- Examples of the graft polymer include a polyester-based dispersant. Specifically, reaction products of poly (lower alkyleneimine) and polyester described in JP-A-54-37082, JP-A-8-507960, JP-A-2009-258668, etc.
- Macromonomer AA-6 manufactured by Toagosei Co., Ltd. (polymethacrylic group having a methacryloyl group at its end group) Acid-6), AS-6 (polystyrene whose terminal group is a methacryloyl group), AN-6S (a copolymer of styrene and acrylonitrile whose terminal group is a methacryloyl group), AB-6 (polyester whose terminal group is a methacryloyl group) Butyl acrylate), PLACEL FM5 manufactured by Daicel Corporation (2-hydroxyethyl methacrylate with 5 molar equivalents of ⁇ -caprolactone), FA10L (2-hydroxyethyl acrylate with 10 molar equivalents of ⁇ -caprolactone), And a polyester-based macro described in JP-A-2-27
- block polymers As the block polymer, block polymers described in JP-A Nos. 2003-49110 and 2009-52010 are preferable.
- the pigment dispersant is also available as a commercial product. Specific examples thereof include “DA-7301” manufactured by Enomoto Kasei Co., Ltd., “Disperbyk-101 (polyamidoamine phosphate)” manufactured by BYK Chemie, and 107 (carbon carboxylate).
- Acid ester 110 (copolymer containing an acid group), 130 (polyamide), 161, 162, 163, 164, 165, 166, 170 (polymer copolymer), “BYK-P104, P105 (high Molecular weight unsaturated polycarboxylic acid) ”,“ EFKA 4047, 4050-4165 (polyurethane type), EFKA 4330-4340 (block copolymer) ”, 4400-4402 (modified polyacrylate), 5010 (polyesteramide), 5765 (polyester amide) manufactured by EFKA High molecular weight polycarboxylate), 6220 (fatty acid polyester) ), 6745 (phthalocyanine derivative), 6750 (azo pigment derivative), “Ajisper PB821, PB822, PB880, PB881” manufactured by Ajinomoto Fine Techno Co., Ltd., “Floren TG-710 (urethane oligomer)” manufactured by Kyoeisha Chemical Co., Ltd., “Poly
- the content of the dispersant is preferably 1 to 80 parts by mass, more preferably 5 to 70 parts by mass with respect to 100 parts by mass of the pigment. More preferably, it is part by mass.
- the coloring composition of this invention can contain alkali-soluble resin as resin. By containing an alkali-soluble resin, developability and pattern formability are improved.
- the alkali-soluble resin can also be used as a dispersant or a binder.
- the molecular weight of the alkali-soluble resin is not particularly defined, but the weight average molecular weight (Mw) is preferably 2000 to 100,000.
- the lower limit is preferably 3,000 or more, and more preferably 5,000 or more.
- the number average molecular weight (Mn) is preferably 1000 to 20,000.
- the alkali-soluble resin may be a linear organic polymer, and has at least one alkali-soluble polymer in a molecule (preferably a molecule having an acrylic copolymer or a styrene copolymer as a main chain). It can be suitably selected from alkali-soluble resins having groups to promote.
- the alkali-soluble resin is preferably a polyhydroxystyrene resin, a polysiloxane resin, an acrylic resin, an acrylamide resin, or an acrylic / acrylamide copolymer resin from the viewpoint of heat resistance.
- Acrylic resins, acrylamide resins, and acrylic / acrylamide copolymer resins are preferred.
- Examples of the group that promotes alkali solubility include a carboxy group, a phosphoric acid group, a sulfonic acid group, a phenolic hydroxy group, and the like. What can be developed is preferable, and (meth) acrylic acid is particularly preferable. These acid groups may be used alone or in combination of two or more.
- a known radical polymerization method can be applied.
- Polymerization conditions such as temperature, pressure, type and amount of radical initiator, type of solvent, etc. when producing an alkali-soluble resin by radical polymerization can be easily set by those skilled in the art, and experimental conditions are determined. It can also be done.
- alkali-soluble resin a polymer having a carboxylic acid in the side chain is preferable, and a methacrylic acid copolymer, an acrylic acid copolymer, an itaconic acid copolymer, a crotonic acid copolymer, a maleic acid copolymer, and a partial esterification.
- alkali-soluble phenol resins such as maleic acid copolymers and novolak resins, acidic cellulose derivatives having a carboxy group in the side chain, and alkali-soluble resins obtained by adding an acid anhydride to a polymer having a hydroxy group.
- a copolymer of (meth) acrylic acid and another monomer copolymerizable therewith is suitable as the alkali-soluble resin.
- examples of other monomers copolymerizable with (meth) acrylic acid include alkyl (meth) acrylates, aryl (meth) acrylates, and vinyl compounds.
- alkyl (meth) acrylate and aryl (meth) acrylate methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, butyl (meth) acrylate, isobutyl (meth) acrylate, pentyl (meth) acrylate,
- vinyl compounds such as hexyl (meth) acrylate, octyl (meth) acrylate, phenyl (meth) acrylate, benzyl (meth) acrylate, tolyl (meth) acrylate, naphthyl (meth) acrylate, cyclohexyl (meth) acrylate, styrene, ⁇ -methylstyrene, vinyltoluene, glycidyl methacrylate, acrylonitrile, vinyl acetate, N-vinylpyrrolidone, tetrahydrofurfury
- N-substituted maleimide monomers for example, N-phenylmaleimide, N-cyclohexylmaleimide, etc.
- JP-A-10-300922 can also be used.
- only 1 type may be sufficient as the other monomer copolymerizable with these (meth) acrylic acids, and 2 or more types may be sufficient as it.
- an alkali-soluble resin having a polymerizable group may be used.
- the polymerizable group include a (meth) allyl group and a (meth) acryloyl group.
- the alkali-soluble resin having a polymerizable group an alkali-soluble resin containing a polymerizable group in a side chain is useful.
- the alkali-soluble resin containing a polymerizable group include Dianal NR series (manufactured by Mitsubishi Rayon Co., Ltd.), Photomer 6173 (COOH-containing polyurethane acrylic oligomer.
- Diamond Shamrock Co., Ltd. shows a variety of materials including Diamond Shamrock Co., Ltd., Viscoat R-264, KS resist 106 (Both manufactured by Osaka Organic Chemical Industry Co., Ltd.), Cyclomer P series (for example, ACA230AA), Plaxel CF200 series (all manufactured by Daicel Corporation), Ebecryl 3800 (manufactured by Daicel UCB Co., Ltd.), Acryl RD-F8 (Manufactured by Nippon Shokubai Co., Ltd.).
- Cyclomer P series for example, ACA230AA
- Plaxel CF200 series all manufactured by Daicel Corporation
- Ebecryl 3800 manufactured by Daicel UCB Co., Ltd.
- Acryl RD-F8 Manufactured by Nippon Shokubai Co., Ltd.
- Alkali-soluble resins include benzyl (meth) acrylate / (meth) acrylic acid copolymer, benzyl (meth) acrylate / (meth) acrylic acid / 2-hydroxyethyl (meth) acrylate copolymer, benzyl (meth) acrylate / Multi-component copolymers composed of (meth) acrylic acid / other monomers can be preferably used.
- the alkali-soluble resin is a compound represented by the following general formula (ED1) and / or a compound represented by the general formula (1) of JP 2010-168539 A (hereinafter, these compounds are referred to as “ether dimers”). It is also preferable to include a polymer (a) obtained by polymerizing a monomer component including
- the hydrocarbon group having 1 to 25 carbon atoms which may have a substituent represented by R 1 and R 2 is not particularly limited, and examples thereof include methyl, ethyl, n Linear or branched alkyl groups such as -propyl, isopropyl, n-butyl, isobutyl, tert-butyl, tert-amyl, stearyl, lauryl, 2-ethylhexyl; aryl groups such as phenyl; cyclohexyl, tert-butylcyclohexyl Alicyclic groups such as dicyclopentadienyl, tricyclodecanyl, isobornyl, adamantyl and 2-methyl-2-adamantyl; alkyl groups substituted with alkoxy such as 1-methoxyethyl and 1-ethoxyethyl; benzyl An alkyl group substituted with an aryl group such as
- ether dimer for example, paragraph 0317 of JP2013-29760A can be referred to, and the contents thereof are incorporated in the present specification. Only one type of ether dimer may be used, or two or more types may be used.
- the alkali-soluble resin may contain a structural unit derived from a compound represented by the following formula (X).
- R 1 represents a hydrogen atom or a methyl group
- R 2 represents an alkylene group having 1 to 10 carbon atoms
- R 3 represents a hydrogen atom or 1 to 20 carbon atoms that may contain a benzene ring.
- n represents an integer of 1 to 15.
- the alkylene group of R 2 preferably has 2 to 3 carbon atoms.
- the alkyl group of R 3 has 1 to 20 carbon atoms, more preferably 1 to 10, and the alkyl group of R 3 may contain a benzene ring.
- Examples of the alkyl group containing a benzene ring represented by R 3 include a benzyl group and a 2-phenyl (iso) propyl group.
- the alkali-soluble resin can be referred to the description in paragraph Nos. 0558 to 0571 in JP 2012-208494 A (corresponding to paragraph numbers 0685 to 0700 in US 2012/0235099). Incorporated in the description. Further, the copolymer (B) described in paragraph Nos. 0029 to 0063 of JP 2012-32767 A and the alkali-soluble resin used in Examples, paragraphs 0088 to 0098 of JP 2012-208474 A The binder resin described in the description and the binder resin used in the examples, the binder resin described in paragraphs 0022 to 0032 of JP2012-137531A and the binder resin used in the examples, JP2013-024934A The binder resin described in paragraph Nos.
- the acid value of the alkali-soluble resin is preferably 30 to 500 mgKOH / g.
- the lower limit is more preferably 50 mgKOH / g or more, and still more preferably 70 mgKOH / g or more.
- the upper limit is more preferably 400 mgKOH / g or less, further preferably 200 mgKOH / g or less, particularly preferably 150 mgKOH / g or less, and still more preferably 120 mgKOH / g or less.
- the content of the alkali-soluble resin is preferably 1 to 15% by mass, more preferably 2 to 12% by mass, with respect to the total solid content of the coloring composition. 10 mass% is still more preferable.
- the colored composition of the present invention may contain only one kind of alkali-soluble resin, or may contain two or more kinds. When 2 or more types are included, the total amount is preferably within the above range.
- the coloring composition of the present invention can contain a pigment derivative.
- the pigment derivative include a compound having a structure in which a part of the pigment is substituted with an acidic group, a basic group, or a phthalimidomethyl group.
- the pigment derivative preferably contains a pigment derivative having an acidic group or a basic group from the viewpoint of dispersibility and dispersion stability.
- organic pigments for constituting the pigment derivative pyrrolopyrrole pigment, diketopyrrolopyrrole pigment, azo pigment, phthalocyanine pigment, anthraquinone pigment, quinacridone pigment, dioxazine pigment, perinone pigment, perylene pigment, thioindigo pigment, isoindoline pigment, Examples thereof include isoindolinone pigments, quinophthalone pigments, selenium pigments, and metal complex pigments.
- a sulfonic acid, carboxylic acid, and its quaternary ammonium salt are preferable, a carboxylic acid group and a sulfonic acid group are more preferable, and a sulfonic acid group is especially preferable.
- the basic group possessed by the pigment derivative is preferably an amino group, particularly preferably a tertiary amino group.
- a pyrrolopyrrole pigment derivative, a quinoline pigment derivative, a benzimidazolone pigment derivative, or an isoindoline pigment derivative is preferable, and a pyrrolopyrrole pigment derivative is particularly preferable.
- the content of the pigment derivative is preferably 1 to 50% by mass, more preferably 3 to 30% by mass, based on the total mass of the pigment. Only one pigment derivative may be used, or two or more pigment derivatives may be used in combination.
- the coloring composition of the present invention can contain an organic solvent.
- the organic solvent is basically not particularly limited as long as it satisfies the solubility of each component and the coating property of the coloring composition, but is preferably selected in consideration of the coating property and safety of the coloring composition.
- Examples of the organic solvent include the following.
- Examples of esters include ethyl acetate, n-butyl acetate, isobutyl acetate, cyclohexyl acetate, amyl formate, isoamyl acetate, isobutyl acetate, butyl propionate, isopropyl butyrate, ethyl butyrate, butyl butyrate, methyl lactate, ethyl lactate, oxy Alkyl acetate (for example, methyl oxyacetate, ethyl oxyacetate, butyl oxyacetate (for example, methyl methoxyacetate, ethyl methoxyacetate, butyl methoxyacetate, methyl ethoxyacetate, ethyl ethoxyacetate)), 3-alkyloxypropionic acid alkyl ester (For example, methyl 3-alkyloxypropionate, ethyl 3-alkyloxyprop
- 2-alkyloxypropionic acid alkyl esters eg, methyl 2-alkyloxypropionate, ethyl 2-alkyloxypropionate, propyl 2-alkyloxypropionate, etc.
- An organic solvent may be used individually by 1 type, and may be used in combination of 2 or more type.
- It is a mixed solution composed of two or more selected from methyl, 2-heptanone, cyclohexanone, ethyl carbitol acetate, butyl carbitol acetate, propylene glycol methyl ether, and propylene glycol methyl ether acetate.
- the organic solvent preferably has a peroxide content of 0.8 mmol / L or less, and more preferably contains substantially no peroxide.
- the amount of the organic solvent contained in the coloring composition is preferably 10 to 90% by mass, more preferably 20 to 80% by mass, and 25 to 75% by mass with respect to the total amount of the coloring composition. More preferably it is.
- the colored composition of the present invention may contain a polymerization inhibitor in order to prevent unnecessary thermal polymerization of the photoradically polymerizable compound during the production or storage of the colored composition.
- Polymerization inhibitors include hydroquinone, paramethoxyphenol, di-tert-butyl-paracresol, pyrogallol, tert-butylcatechol, benzoquinone, 4,4′-thiobis (3-methyl-6-tert-butylphenol), 2, 2'-methylenebis (4-methyl-6-t-butylphenol), N-nitrosophenylhydroxyamine primary cerium salt and the like. Of these, paramethoxyphenol is preferred.
- the addition amount of the polymerization inhibitor is preferably 0.01 to 5% by mass relative to the mass of the colored composition.
- the coloring composition of the present invention can contain a substrate adhesion agent.
- a substrate adhesion agent it is preferable to use a silane coupling agent, a titanate coupling agent, or an aluminum coupling agent.
- silane coupling agents include ⁇ -methacryloxypropyltrimethoxysilane, ⁇ -methacryloxypropyltriethoxysilane, ⁇ -acryloxypropyltrimethoxysilane, ⁇ -acryloxypropyltriethoxysilane, and ⁇ -mercaptopropyl.
- ⁇ -methacryloxypropyltrimethoxysilane is preferable as the substrate adhesive.
- the content of the substrate adhesion agent is preferably 0.1 to 30% by mass, more preferably 0.5 to 20% by mass, and particularly preferably 1 to 10% by mass with respect to the total solid content of the coloring composition.
- the colored composition of the present invention may contain various surfactants from the viewpoint of further improving coatability.
- various surfactants such as a fluorine-based surfactant, a nonionic surfactant, a cationic surfactant, an anionic surfactant, and a silicone-based surfactant can be used.
- the liquid properties (particularly fluidity) when prepared as a coating liquid are further improved, and the uniformity of coating thickness and liquid-saving properties are further improved. can do. That is, when a film is formed using a coating liquid to which a coloring composition containing a fluorosurfactant is applied, the interfacial tension between the surface to be coated and the coating liquid is reduced, and the wettability to the surface to be coated is reduced. Is improved, and the coating property to the coated surface is improved. For this reason, it is possible to more suitably form a film having a uniform thickness with small thickness unevenness.
- the fluorine content in the fluorosurfactant is preferably 3 to 40% by mass, more preferably 5 to 30% by mass, and particularly preferably 7 to 25% by mass.
- a fluorine-based surfactant having a fluorine content within this range is effective in terms of uniformity of coating film thickness and liquid-saving properties, and has good solubility in the composition.
- fluorosurfactant examples include Megafac F171, F172, F173, F176, F176, F177, F141, F142, F143, F144, R30, F437, F475, F479, F482, F554, F780, RS-72-K (above DIC Corporation), Florard FC430, FC431, FC171 (above, Sumitomo 3M Limited), Surflon S-382, SC -101, SC-103, SC-104, SC-105, SC1068, SC-381, SC-383, S393, K393, KH-40 (above, manufactured by Asahi Glass Co., Ltd.), PF636, PF656, PF6320, PF6520, PF7002 (made by OMNOVA) etc.
- a block polymer can also be used as the fluorosurfactant, and specific examples thereof include compounds described in JP-A-2011-89090.
- the fluorine-based surfactant has a repeating unit derived from a (meth) acrylate compound having a fluorine atom and 2 or more (preferably 5 or more) alkyleneoxy groups (preferably ethyleneoxy group or propyleneoxy group) (meth).
- a fluorine-containing polymer compound containing a repeating unit derived from an acrylate compound can also be preferably used, and the following compounds are also exemplified as the fluorine-based surfactant used in the present invention.
- the weight average molecular weight of the above compound is preferably 3,000 to 50,000, for example, 14,000.
- the fluoropolymer which has an ethylenically unsaturated group in a side chain can also be used as a fluorine-type surfactant.
- Specific examples include compounds described in JP-A 2010-164965, paragraphs 0050 to 0090 and 0289 to 0295, such as MegaFac RS-101, RS-102, and RS-718K manufactured by DIC.
- nonionic surfactants include glycerol, trimethylolpropane, trimethylolethane, and ethoxylates and propoxylates thereof (for example, glycerol propoxylate, glycerin ethoxylate, etc.), polyoxyethylene lauryl ether, polyoxyethylene Stearyl ether, polyoxyethylene oleyl ether, polyoxyethylene octylphenyl ether, polyoxyethylene nonylphenyl ether, polyethylene glycol dilaurate, polyethylene glycol distearate, sorbitan fatty acid ester (Pluronic L10, L31, L61, L62 manufactured by BASF, 10R5, 17R2, 25R2, Tetronic 304, 701, 704, 901, 904, 150R1), Rusupasu 20000 (manufactured by Nippon Lubrizol Corporation), and the like. Also, NCW-101, NCW-1001, NCW-1002 manufactured by Wako Pure Chemical Industries, Ltd
- cationic surfactant examples include phthalocyanine derivatives (trade name: EFKA-745, manufactured by Morishita Sangyo Co., Ltd.), organosiloxane polymer KP341 (manufactured by Shin-Etsu Chemical Co., Ltd.), (meth) acrylic acid ( Co) polymer polyflow no. 75, no. 90, no. 95 (manufactured by Kyoeisha Chemical Co., Ltd.), W001 (manufactured by Yusho Co., Ltd.) and the like.
- phthalocyanine derivatives trade name: EFKA-745, manufactured by Morishita Sangyo Co., Ltd.
- organosiloxane polymer KP341 manufactured by Shin-Etsu Chemical Co., Ltd.
- (meth) acrylic acid ( Co) polymer polyflow no. 75, no. 90, no. 95 manufactured by Kyoeisha Chemical Co., Ltd.
- W001 manufactured by Yusho Co., Ltd.
- anionic surfactants include W004, W005, W017 (manufactured by Yusho Co., Ltd.) and the like.
- silicone-based surfactants include Torre Silicone DC3PA, Torre Silicone SH7PA, Torre Silicone DC11PA, Torresilicone SH21PA, Torree Silicone SH28PA, Torree Silicone SH29PA, Torree Silicone SH30PA, Torree Silicone SH8400 (above, Toray Dow Corning Co., Ltd.) )), TSF-4440, TSF-4300, TSF-4445, TSF-4460, TSF-4442 (above, manufactured by Momentive Performance Materials), KP341, KF6001, KF6002 (above, manufactured by Shin-Etsu Silicone Co., Ltd.) , BYK307, BYK323, BYK330 (above, manufactured by BYK Chemie) and the like.
- the addition amount of the surfactant is preferably 0.001 to 2.0% by mass and more preferably 0.005 to 1.0% by mass with respect to the total mass of the coloring composition.
- the coloring composition of the present invention includes a thermal polymerization initiator such as an azo compound or a peroxide compound, a thermal polymerization component, an ultraviolet absorber such as alkoxybenzophenone, a plasticizer such as dioctyl phthalate, and a low molecular weight organic carboxylic acid.
- a thermal polymerization initiator such as an azo compound or a peroxide compound
- an ultraviolet absorber such as alkoxybenzophenone
- a plasticizer such as dioctyl phthalate
- a low molecular weight organic carboxylic acid Various additives such as a developability improver, other fillers, antioxidants and anti-aggregation agents can be contained.
- a thermosetting agent can be added to increase the degree of curing of the film by post-heating after development. Examples of the thermosetting agent include thermal polymerization initiators such as azo compounds and peroxides, novolac resins, resole resins, epoxy compounds, and styren
- the composition may contain metal elements, but from the standpoint of suppressing defects, the content of Group 2 elements (calcium, magnesium, etc.) in the colored composition is 50 ppm or less. And is preferably controlled to 0.01 to 10 ppm.
- the total amount of the inorganic metal salt in the coloring composition is preferably 100 ppm or less, and more preferably controlled to 0.5 to 50 ppm.
- the coloring composition of the present invention can be prepared by mixing the aforementioned components.
- each component may be blended at once, or may be blended sequentially after each component is dissolved and dispersed in a solvent.
- the composition may be prepared by dissolving and dispersing all components in a solvent at the same time. If necessary, each component may be suitably used as two or more solutions / dispersions at the time of use (at the time of application). ) May be mixed to prepare a composition.
- the pigment is dispersed together with other components such as a resin, an organic solvent, and a pigment derivative to prepare a pigment dispersion. It is preferable to prepare it by mixing with other components of the product.
- any filter can be used without particular limitation as long as it has been conventionally used for filtration.
- fluorine resin such as polytetrafluoroethylene (PTFE), polyamide resin such as nylon (eg nylon-6, nylon-6,6), polyolefin resin such as polyethylene and polypropylene (PP) (high density and / or super
- a filter using a material such as a high molecular weight polyolefin resin.
- polypropylene including high density polypropylene
- nylon are preferable.
- the pore size of the filter is suitably about 0.01 to 7.0 ⁇ m, preferably about 0.01 to 3.0 ⁇ m, more preferably about 0.05 to 0.5 ⁇ m. By setting it as this range, it becomes possible to remove reliably the fine foreign material which inhibits preparation of a uniform and smooth composition in a post process. Further, it is also preferable to use a fiber-shaped filter medium, and examples of the filter medium include polypropylene fiber, nylon fiber, glass fiber, and the like. , TPR005, etc.) and SHPX type series (SHPX003 etc.) filter cartridges can be used.
- the filtering by the first filter may be performed only once or may be performed twice or more.
- the pore diameter here can refer to the nominal value of the filter manufacturer.
- select from various filters provided by Nippon Pole Co., Ltd. DFA4201NXEY, etc.
- Advantech Toyo Co., Ltd. Japan Integris Co., Ltd. (former Nihon Microlith Co., Ltd.) can do.
- the second filter a filter formed of the same material as the first filter described above can be used.
- the filtering with the first filter may be performed only with the dispersion liquid, and after the other components are mixed, the filtering with the second filter may be performed.
- the cured film of the present invention is formed by curing the above-described colored composition of the present invention.
- the film of the present invention is preferably used as a color filter.
- the color filter of the present invention has the cured film of the present invention.
- the pattern forming method of the present invention includes a step of forming a colored composition layer on a support using a colored composition, a step of exposing the colored composition layer in a pattern, and coloring by developing and removing unexposed portions. Forming a pattern.
- a pattern forming method is used for manufacturing a color filter. That is, the present invention also discloses a method for producing a color filter including the pattern forming method of the present invention.
- the colored composition layer is formed by applying the colored composition of the present invention on the support.
- the support examples include a substrate made of a material such as silicon, alkali-free glass, soda glass, Pyrex (registered trademark) glass, or quartz glass.
- a charge coupled device (CCD), a complementary metal oxide semiconductor device (CMOS), a transparent conductive film, or the like may be formed on these substrates.
- CMOS complementary metal oxide semiconductor device
- a black matrix for isolating each pixel is formed.
- the support may be provided with an undercoat layer for improving adhesion to the upper layer, preventing diffusion of substances, or flattening the substrate surface.
- various coating methods such as slit coating, ink jet method, spin coating, spin coating, roll coating, and screen printing can be applied.
- the colored composition layer applied on the support is preferably dried (prebaked).
- the prebake temperature is preferably 150 ° C. or lower, more preferably 120 ° C. or lower, still more preferably 100 ° C. or lower, and particularly preferably 90 ° C. or lower.
- the lower limit can be, for example, 50 ° C. or higher.
- the pre-baking is performed at a temperature lower than the thermal decomposition temperature of the thermal acid generator (preferably a temperature 30 to 100 ° C. lower than the thermal decomposition temperature of the thermal acid generator). It is preferable to carry out with. According to this, generation
- the prebake time is preferably 10 seconds to 300 seconds, more preferably 40 to 250 seconds, and even more preferably 80 to 220 seconds. Heating can be performed with a hot plate, oven, or the like.
- the thickness of the colored layer after drying (after pre-baking) is preferably 0.55 to 10 ⁇ m.
- the upper limit is more preferably 7 ⁇ m or less, and further preferably 5 ⁇ m or less.
- the lower limit is more preferably 0.60 ⁇ m or more, still more preferably 0.70 ⁇ m or more, and particularly preferably 0.80 ⁇ m or more.
- Exposure process the colored composition layer is exposed in a pattern (exposure process).
- pattern exposure can be performed by exposing the coloring composition layer through a mask having a predetermined mask pattern using an exposure apparatus such as a stepper. Thereby, an exposed part can be hardened.
- Radiation (light) that can be used for exposure is preferably ultraviolet rays such as g-line and i-line, and i-line is more preferable.
- the absolute value of the difference between the wavelength of light used for exposure and the maximum absorption wavelength of the photoacid generator is preferably 30 to 200 nm, more preferably 50 to 150 nm. preferable.
- Irradiation dose is preferably 30 ⁇ 1500mJ / cm 2, more preferably 50 ⁇ 1000mJ / cm 2, particularly preferably 80 ⁇ 500mJ / cm 2.
- the development removal of the unexposed portion can be performed using a developer.
- the development method may be any of a dip method, a shower method, a spray method, a paddle method, etc., and a swing method, a spin method, an ultrasonic method, or the like may be combined with these.
- the surface to be developed can be previously moistened with water or the like to prevent uneven development.
- an organic alkali developer that does not damage the underlying solid-state imaging device or circuit is desirable.
- the temperature of the developer is preferably 20 to 30 ° C., for example.
- the development time is preferably 20 to 180 seconds.
- the process of shaking off the developer every 60 seconds and supplying a new developer may be repeated several times.
- alkaline agent used in the developer examples include ammonia water, ethylamine, diethylamine, dimethylethanolamine, tetramethylammonium hydroxide, tetraethylammonium hydroxide, tetrapropylammonium hydroxide, tetrabutylammonium hydroxide, benzyltrimethylammonium hydroxide.
- organic alkaline compounds such as choline, pyrrole, piperidine and 1,8-diazabicyclo [5.4.0] -7-undecene.
- the inorganic alkali for example, sodium hydroxide, potassium hydroxide, sodium carbonate, sodium hydrogen carbonate, sodium silicate, sodium metasilicate and the like are preferable.
- a surfactant may be used for the developer. Examples of the surfactant include the surfactant described in the above-described coloring composition, and a nonionic surfactant is preferable.
- the surfactant content is preferably 0.001 to 2.0% by mass, more preferably 0.01 to 1.0%, based on the total mass of the developer. % By mass.
- the developing solution which consists of such alkaline aqueous solution, generally it is preferable to wash
- post-bake after the development step, after drying, heat treatment (post-bake) or post-exposure treatment may be performed.
- Post bake and post exposure may be used in combination.
- a thermal acid generator is used as the acid generator in the colored composition of the present invention, it is preferable to perform a heat treatment (post-bake) on the colored pattern after development.
- a photo-acid generator as a thermal acid generator, it is preferable to perform a post-exposure process with respect to the coloring pattern after image development.
- the heating temperature in the post-baking is, for example, preferably 100 to 280 ° C, more preferably 200 to 250 ° C.
- a thermal acid generator when used as the acid generator, it can be carried out at a temperature equal to or higher than the thermal decomposition temperature of the acid generator. More preferably, the temperature is 30 ° C. or more higher than the thermal decomposition temperature of the acid generator, and more preferably 50 ° C. or higher than the thermal decomposition temperature of the acid generator.
- the upper limit is preferably, for example, a thermal decomposition temperature + 80 ° C. or less.
- the post-baking treatment can be carried out continuously or batchwise using a heating means such as a hot plate, a convection oven (hot air circulation dryer) or a high-frequency heater so that the film after development is in the above condition. it can.
- a heating means such as a hot plate, a convection oven (hot air circulation dryer) or a high-frequency heater so that the film after development is in the above condition. it can.
- a thermal acid generator is used as the acid generator, an acid is generated in the colored layer after development by post-baking to obtain a color filter free from color mixing.
- the light used for the post-exposure can be performed by g-line, h-line, i-line, excimer laser such as KrF or ArF, electron beam, X-ray or the like. It can also be carried out at a low temperature of about 20 to 50 ° C. with an existing high-pressure mercury lamp.
- the irradiation time is 10 seconds to 180 seconds, preferably 30 seconds to 60 seconds.
- a photoacid generator is used as the acid generator, it is preferable to select light having a wavelength close to the maximum absorption wavelength.
- the absolute value of the difference between the wavelength of light used for post-exposure and the maximum absorption wavelength of the photoacid generator is preferably 30 nm or less, and more preferably 20 nm or less.
- the absolute value of the difference between the wavelength of the light used in the exposure before the development process and the wavelength of the light used in the exposure (post-exposure) after the development process is preferably 50 to 200 nm, more preferably 100 to 150 nm. preferable.
- the exposure amount in the post exposure is preferably 10 ⁇ 100000mJ / cm 2, more preferably 50 ⁇ 50000mJ / cm 2, particularly preferably 100 ⁇ 10000mJ / cm 2.
- exposure is performed with light having a wavelength of 350 nm to 380 nm or less (preferably, light having a wavelength of 355 to 370 nm, particularly preferably i-line).
- the exposure is preferably performed with 350 nm light (preferably light with a wavelength of 254 nm).
- the colored composition layer can be appropriately cured at the first exposure by exposing the colored composition layer in two stages before and after the development process, An acid is generated in the colored layer by exposure after development, and a color filter having no color mixture can be obtained.
- the pattern forming method of the present invention is effective for cleaning clogging of nozzles and piping parts of the discharge unit of the coating apparatus, contamination due to adhesion, sedimentation, and drying of the composition in the coating machine. It is preferable to use a solvent relating to the coloring composition as the cleaning liquid. Also, JP-A-7-128867, JP-A-7-146562, JP-A-8-278737, JP-A-2000-273370, JP-A-2006-85140, JP-A-2006-291191, The cleaning liquids described in JP2007-2101A, JP2007-2102A, JP2007-281523A, and the like can be suitably used.
- alkylene glycol monoalkyl ether carboxylate and alkylene glycol monoalkyl ether are preferred. These solvents may be used alone or in combination of two or more. When mixing 2 or more types, it is preferable to mix the solvent which has a hydroxyl group, and the solvent which does not have a hydroxyl group.
- the mass ratio of the solvent having a hydroxy group and the solvent having no hydroxy group is from 1/99 to 99/1, preferably from 10/90 to 90/10, more preferably from 20/80 to 80/20.
- PGMEA propylene glycol monomethyl ether acetate
- PGME propylene glycol monomethyl ether
- the ratio is particularly preferably 60/40.
- the above-described surfactant relating to the colored composition of the present invention may be added to the cleaning liquid.
- the color filter of the present invention can be suitably used for a solid-state imaging device such as a charge coupled device (CCD) or a complementary metal oxide semiconductor device (CMOS). Suitable for CMOS and the like.
- CMOS complementary metal oxide semiconductor
- the color filter of the present invention can be used, for example, as a color filter disposed between a light receiving portion of each pixel constituting a CCD or CMOS and a microlens for condensing light.
- the color filter of the present invention can be preferably used for an organic electroluminescence (organic EL) element.
- organic EL element a white organic EL element is preferable.
- the white organic EL element preferably has a tandem structure.
- JP 2003-45676 A supervised by Akiyoshi Mikami, “Frontier of Organic EL Technology Development-High Brightness, High Precision, Long Life, Know-how Collection”, Technical Information Association, 326-328 pages, 2008, etc.
- Examples of the tandem structure of the organic EL element include a structure in which an organic EL layer is provided between a lower electrode having light reflectivity and an upper electrode having light transmittance on one surface of a substrate.
- the lower electrode is preferably made of a material having a sufficient reflectance in the visible light wavelength region.
- the organic EL layer preferably includes a plurality of light emitting layers and has a stacked structure (tandem structure) in which the plurality of light emitting layers are stacked.
- the organic EL layer may include a red light emitting layer, a green light emitting layer, and a blue light emitting layer in the plurality of light emitting layers. And it is preferable that they have a some light emission auxiliary layer for light-emitting a light emitting layer together with a some light emitting layer.
- the organic EL layer can have, for example, a stacked structure in which light emitting layers and light emitting auxiliary layers are alternately stacked.
- an organic EL element having an organic EL layer having such a structure can emit white light.
- the spectrum of white light emitted from the organic EL element preferably has a strong maximum emission peak in the blue region (430 nm to 485 nm), the green region (530 nm to 580 nm), and the yellow region (580 nm to 620 nm).
- those having a maximum emission peak in the red region (650 nm to 700 nm) are more preferable.
- the film thickness of the colored pattern (colored pixel) in the color filter of the present invention is preferably 2.0 ⁇ m or less, more preferably 1.0 ⁇ m or less, and even more preferably 0.7 ⁇ m or less.
- the lower limit can be, for example, 0.1 ⁇ m or more, and can also be 0.2 ⁇ m or more.
- the size (pattern width) of the colored pattern (colored pixel) is preferably 2.5 ⁇ m or less, more preferably 2.0 ⁇ m or less, and particularly preferably 1.7 ⁇ m or less.
- the lower limit can be, for example, 0.1 ⁇ m or more, and can also be 0.2 ⁇ m or more.
- the solid-state imaging device of the present invention includes the above-described color filter of the present invention.
- the configuration of the solid-state imaging device of the present invention is not particularly limited as long as it is a configuration that includes the color filter of the present invention and functions as a solid-state imaging device.
- the support has a transfer electrode made of a plurality of photodiodes and polysilicon constituting a light receiving area of a solid-state imaging device (CCD image sensor, CMOS image sensor, etc.), and the photodiode and the transfer electrode are placed on the transfer electrodes.
- the solid-state image sensor color filter of the present invention is included.
- a light collecting means for example, a micro lens, etc., the same applies hereinafter
- the color filter of the present invention can be used in an image display device such as a liquid crystal display device or an organic electroluminescence display device.
- display devices For the definition of display devices and details of each display device, refer to, for example, “Electronic Display Device (Akio Sasaki, Kogyo Kenkyukai, 1990)”, “Display Device (Junsho Ibuki, Industrial Books Co., Ltd.) Issued in the first year).
- the liquid crystal display device is described, for example, in “Next-generation liquid crystal display technology (edited by Tatsuo Uchida, Industrial Research Co., Ltd., published in 1994)”.
- the liquid crystal display device to which the present invention can be applied is not particularly limited, and can be applied to, for example, various types of liquid crystal display devices described in the “next generation liquid crystal display technology”.
- the color filter of the present invention may be used in a color TFT (Thin Film Transistor) type liquid crystal display device.
- the color TFT liquid crystal display device is described in, for example, “Color TFT liquid crystal display (issued in 1996 by Kyoritsu Publishing Co., Ltd.)”.
- the present invention relates to a liquid crystal display device with a wide viewing angle, such as a horizontal electric field driving method such as IPS (In Plane Switching), a pixel division method such as MVA (Multi-domain Vertical Alignment), a STN (Super-Twist Nematic).
- IPS In Plane Switching
- MVA Multi-domain Vertical Alignment
- STN Super-Twist Nematic
- the color filter in the present invention can be used for a bright and high-definition COA (Color-filter On Array) system.
- the liquid crystal display device provided with the color filter of the present invention includes various members such as an electrode substrate, a polarizing film, a retardation film, a backlight, a spacer, and a viewing angle compensation film.
- the color filter of the present invention can be applied to a liquid crystal display device composed of these known members.
- these components for example, “'94 Liquid Crystal Display Peripheral Materials / Chemicals Market (Kentaro Shima CMC 1994)”, “2003 Liquid Crystal Related Markets Current Status and Future Prospects (Volume 2)” Fuji Chimera Research Institute, Ltd., published in 2003) ”.
- backlighting SID meeting Digest 1380 (2005) (A. Konno et.al), Monthly Display December 2005, pages 18-24 (Yasuhiro Shima), pages 25-30 (Takaaki Yagi), etc. Are listed.
- the color filter according to the present invention When the color filter according to the present invention is used in a liquid crystal display device, a high contrast can be realized when combined with a conventionally known three-wavelength tube of a cold cathode tube. Accordingly, it is possible to provide a liquid crystal display device with high luminance and high color purity and good color reproducibility.
- Pigment Blue 15 6 10 parts by mass as a pigment, 16.7 parts by mass of Resin A (the following structure), and 73.3 parts by mass of propylene glycol monomethyl ether acetate (PGMEA) as a solvent were mixed with a bead mill.
- the pigment dispersion A was prepared by mixing and dispersing for 15 hours.
- Pigment dispersion B A pigment dispersion B was prepared by mixing and dispersing a mixed solution composed of 10 parts by weight of Pigment Violet 23, 16.7 parts of Resin A, and 73.3 parts by weight of PGMEA as a solvent with a bead mill for 15 hours.
- Photoacid generator A DS-101 (sulfonic acid ester compound), manufactured by Midori Chemical
- photoacid generator B MBZ-201 (sulfonic acid ester compound), Midori Chemical A compound that generates an acid having a pKa of 4 or less
- a photoacid generator C PI-105 (sulfonic acid ester compound); a compound that generates an acid having a pKa of 4 or less
- a photoacid generator D PAI-101 (sulfonic acid ester compound), manufactured by Midori Kagaku, a compound that generates an acid with a pKa of 4 or less
- photoacid generator E TAZ-101 (triazine compound), manufactured by Midori Chemical, an acid with a pKa of 4 or less
- Compound / photoacid generator F TAZ-109 (triazine compound), manufactured by Midori Chemical Co., a compound that generates an acid having a pKa of 4 or less, photoacid
- Thermal acid generator D SI-105 (sulfonimide compound), manufactured by Midori Chemical Co., a compound that generates an acid having a pKa of 4 or less.
- Thermal acid generator E NDI-101 (sulfonimide compound), manufactured by Midori Chemical Co., Ltd. A compound that generates an acid having a pKa of 4 or less
- the negative curable coloring composition is applied onto a glass wafer with an undercoat layer using a spin coater so that the dry film thickness is 0.6 ⁇ m, and is heated (prebaked for 120 seconds using a 100 ° C. hot plate. ) To form a colored film on the glass wafer.
- an i-line stepper exposure apparatus manufactured by Canon Inc., FPA-3000i5 +
- a mask pattern in which square pixels of 1 ⁇ m are arranged, and light having a wavelength of 365 nm (i Line), and was exposed at an exposure amount of 200 mJ / cm 2 .
- the glass wafer on which the exposed coating film was formed was subjected to paddle development for 60 seconds at 23 ° C. using a tetramethylammonium hydroxide (TMAH) 0.3% aqueous solution. Thereafter, rinsing was performed with a spin shower, followed by washing with pure water, followed by heat treatment (post-baking) for 300 seconds using a 200 ° C. hot plate to obtain a cured film (color filter).
- TMAH tetramethylammonium hydroxide
- the maximum transmittance T0 in the wavelength range of 400 to 700 nm was measured using MCPD-3000 (manufactured by Otsuka Electronics Co., Ltd.).
- the following red coloring composition for color mixture evaluation is spin-coated so that the film thickness after drying becomes 0.6 ⁇ m, and heat treatment (prebaking) is performed at 100 ° C. for 120 seconds. It was.
- shower development was performed at 23 ° C. for 60 seconds using a 0.3% by mass aqueous solution of tetramethylammonium hydroxide (TMAH) without performing exposure with an i-line stepper exposure apparatus.
- TMAH tetramethylammonium hydroxide
- the maximum transmittance T1 in the wavelength range of 400 to 700 nm was measured using MCPD-3000 (manufactured by Otsuka Electronics Co., Ltd.).
- -Evaluation criteria- 5 Maximum transmittance change is less than 1%. 4: The maximum transmittance change is 1% or more and less than 3%.
- the maximum transmittance change is 3% or more and less than 5%.
- 2 The maximum transmittance change is 5% or more and less than 10%.
- 1 The maximum transmittance change is 10% or more.
- Red pigment-containing composition for color mixing evaluation.
- Pigment derivative A structure shown below Dispersant A: Structure shown below
- the transmittance at a wavelength of 500 nm is less than 40%, and the transmittance at a wavelength of 450 nm is 80% or more and less than 82.5%.
- 2 The transmittance at a wavelength of 500 nm is less than 40%, and the transmittance at a wavelength of 450 nm is 77.5% or more and less than 80%.
- 1 The transmittance at a wavelength of 500 nm is less than 40%, and the transmittance at a wavelength of 450 nm is less than 77.5%.
- the transmittance at a wavelength of 500 nm exceeds 40%.
- the example was able to form a cured film in which color mixing was suppressed. Further, the film surface after the color mixing test was good. Furthermore, Examples 1-1 to 1-5 using xanthene dyes also had good spectral characteristics. On the other hand, color mixing was easy to occur in the comparative example. Furthermore, the film surface after the color mixing test was inferior to the examples.
- the negative curable coloring composition is applied onto a glass wafer with an undercoat layer using a spin coater so that the dry film thickness is 0.6 ⁇ m, and is heated (prebaked for 120 seconds using a 100 ° C. hot plate. ) To form a colored film on the glass wafer.
- light (i) having a wavelength of 365 nm is applied to the colored film using an i-line stepper exposure apparatus (FPA-3000i5 + manufactured by Canon Inc.) through a mask pattern in which square pixels of 1 ⁇ m are arranged. Line), and was exposed at an exposure amount of 200 mJ / cm 2 .
- the glass wafer on which the exposed coating film was formed was subjected to paddle development at 23 ° C. for 60 seconds using a 0.3% aqueous solution of tetramethylammonium hydroxide (TMAH).
- TMAH tetramethylammonium hydroxide
- rinsing was performed with a spin shower, and further washed with pure water.
- the cured coating film was exposed to an exposure dose of 5000 mJ / cm 2 using a UV irradiation device (UMA-802-HC552FFAL manufactured by Ushio Electric Co., Ltd.) after the development.
- UMI-802-HC552FFAL manufactured by Ushio Electric Co., Ltd.
- the example was able to form a cured film in which color mixing was suppressed. Further, the film surface after the color mixing test was good. On the other hand, color mixing was easy to occur in the comparative example. Furthermore, the film surface after the color mixing test was inferior to the examples.
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Abstract
Description
このため、カラーフィルタ用のネガ型硬化性着色組成物においては、他色との混色が生じにくい硬化膜を形成可能なものが求められており、近年においては、上記性能のさらなる向上が求められている。
<1> 着色剤と、酸発生剤と、光ラジカル重合性化合物と、光ラジカル重合開始剤とを含む、ネガ型硬化性着色組成物。
<2> 酸発生剤は、熱酸発生剤を含む、<1>に記載のネガ型硬化性着色組成物。
<3> 酸発生剤は、pKaが4以下の酸を発生する化合物である、<1>又は<2>に記載のネガ型硬化性着色組成物。
<4> 酸発生剤の分子量が200~1000である、<1>~<3>のいずれかに記載のネガ型硬化性着色組成物。
<5> 酸発生剤の含有量が、ネガ型硬化性着色組成物の全固形分に対して、1~20質量%である、<1>~<4>のいずれかに記載のネガ型硬化性着色組成物。
<6> 酸発生剤と光ラジカル重合性化合物との質量比が、酸発生剤:光ラジカル重合性化合物=1:1~1:5である、<1>~<5>のいずれかに記載のネガ型硬化性着色組成物。
<7> 着色剤は、カチオンとアニオンとを有する色素を含む、<1>~<6>のいずれかに記載のネガ型硬化性着色組成物。
<8> カチオンと、アニオンとが、共有結合を介して結合している、<7>に記載のネガ型硬化性着色組成物。
<9> カチオンは、キサンテン構造を有するカチオンである、<7>又は<8>に記載のネガ型硬化性着色組成物。
<10> キサンテン構造を有するカチオンは、下記一般式(1)で表される骨格構造を有する、<9>に記載のネガ型硬化性着色組成物;
<11> アニオンが、ビス(スルホニル)イミドアニオン、トリス(スルホニル)メチドアニオン及びテトラアリールボレートアニオンから選択される少なくとも一種である、<7>~<10>のいずれかに記載のネガ型硬化性着色組成物。
<12> 着色剤は、色素多量体を含む、<1>~<11>のいずれかに記載のネガ型硬化性着色組成物。
<13> <1>~<12>のいずれかに記載のネガ型硬化性着色組成物を用いてなる硬化膜。
<14> <13>に硬化膜を有するカラーフィルタ。
<15> <1>~<12>のいずれかに記載のネガ型硬化性着色組成物を用いて支持体上にネガ型硬化性着色組成物層を形成する工程と、ネガ型硬化性着色組成物をパターン状に露光する工程と、未露光部を現像除去して着色パターンを形成する工程と、を含むパターン形成方法。
<16> ネガ型硬化性着色組成物が、光ラジカル重合性化合物と、光ラジカル重合開始剤と、熱酸発生剤とを含み、
着色パターンを形成する工程の後、着色パターンを加熱する工程を更に有する、<15>に記載のパターン形成方法。
<17> ネガ型硬化性着色組成物が、光ラジカル重合性化合物と、光ラジカル重合開始剤と、光酸発生剤とを含み、
着色パターンを形成する工程の後、着色パターンを露光する工程を更に有する、<15>又は<16>に記載のパターン形成方法。
<18> <14>に記載のカラーフィルタを有する装置であって、装置が、固体撮像素子又は画像表示装置である、装置。
本明細書における基(原子団)の表記において、置換及び無置換を記していない表記は、置換基を有さないものと共に置換基を有するものをも包含するものである。例えば、「アルキル基」とは、置換基を有さないアルキル基(無置換アルキル基)のみならず、置換基を有するアルキル基(置換アルキル基)をも包含するものである。
本明細書において光とは、活性光線又は放射線を意味する。また、「活性光線」又は「放射線」とは、例えば、水銀灯の輝線スペクトル、エキシマレーザに代表される遠紫外線、極端紫外線(EUV光)、X線、電子線等を意味する。
本明細書において「露光」とは、特に断らない限り、水銀灯、エキシマレーザに代表される遠紫外線、X線、EUV光などを用いた露光のみならず、電子線、イオンビーム等の粒子線を用いた描画も露光に含める。
本明細書において「~」を用いて表される数値範囲は、「~」の前後に記載される数値を下限値及び上限値として含む範囲を意味する。
本明細書において、全固形分とは、着色組成物の全組成から溶剤を除いた成分の総質量をいう。
本明細書において、「(メタ)アクリレート」は、アクリレート及びメタクリレートの双方、又は、いずれかを表し、「(メタ)アクリル」は、アクリル及びメタクリルの双方、又は、いずれかを表し、「(メタ)アリル」は、アリル及びメタリルの双方、又は、いずれかを表し、「(メタ)アクリロイル」は、アクリロイル及びメタクリロイルの双方、又は、いずれかを表す。
本明細書において「工程」との語は、独立した工程だけではなく、他の工程と明確に区別できない場合であってもその工程の所期の作用が達成されれば、本用語に含まれる。
本明細書において、重量平均分子量及び数平均分子量は、ゲルパーミエーションクロマトグラフ(GPC)測定でのポリスチレン換算値として定義される。
本発明のネガ型硬化性着色組成物は、着色剤と、酸発生剤と、光ラジカル重合性化合物と、光ラジカル重合開始剤とを含む。
本発明のネガ型硬化性着色組成物は、上記構成とすることにより、他色との混色が生じにくい硬化膜を形成できる。このような効果が得られるメカニズムは、以下によると推測する。
従来のネガ型硬化性着色組成物の場合、露光及び現像を経て硬化膜を製造した際、現像によって着色剤の活性部位が露出することがある。着色剤の活性部位が露出した硬化膜上に、他色のネガ型硬化性着色組成物を適用すると、他色のネガ型硬化性着色組成物が吸着して、混色が生じることがあったが、本発明のネガ型硬化性着色組成物は、酸発生剤を含むので、現像時に着色剤の表面の活性部位が露出しても、酸発生剤によって発生した酸成分が着色剤の表面に吸着できると考えられる。このため、本発明によれば、他色との混色が生じにくい硬化膜を形成することが可能になったと考えられる。
また、他色との混色が生じにくいことから、現像前後の分光変動を抑制することもでき、分光特性に優れた硬化膜を得ることができる。特に、着色剤として、カチオンとアニオンとを有する色素を含むものを用いた場合においては、酸発生剤を含有しない場合に比べて、現像前後の分光変動を効果的に抑制でき、より顕著な効果が得られる。
以下、本発明のネガ型硬化性着色組成物の各成分について説明する。また、以下において、ネガ型硬化性着色組成物を、着色組成物とも記載する。
本発明の着色組成物は、着色剤を含有する。着色剤は、低分子化合物、色素多量体のいずれであってもよいが、他色との混色をより効果的に抑制できるという理由から色素多量体が好ましい。低分子化合物の着色剤の分子量は、2000未満が好ましく、200~1500がより好ましい。
顔料としては、従来公知の種々の無機顔料又は有機顔料を挙げることができる。また、無機顔料であれ有機顔料であれ、高透過率であることが好ましいことを考慮すると、平均粒子径がなるべく小さい顔料の使用が好ましく、ハンドリング性をも考慮すると、上記顔料の平均粒子径は、0.01~0.1μmが好ましく、0.01~0.05μmがより好ましい。
カラーインデックス(C.I.)ピグメントイエロー1,2,3,4,5,6,10,11,12,13,14,15,16,17,18,20,24,31,32,34,35,35:1,36,36:1,37,37:1,40,42,43,53,55,60,61,62,63,65,73,74,77,81,83,86,93,94,95,97,98,100,101,104,106,108,109,110,113,114,115,116,117,118,119,120,123,125,126,127,128,129,137,138,139,147,148,150,151,152,153,154,155,156,161,162,164,166,167,168,169,170,171,172,173,174,175,176,177,179,180,181,182,185,187,188,193,194,199,213,214等、
C.I.ピグメントオレンジ 2,5,13,16,17:1,31,34,36,38,43,46,48,49,51,52,55,59,60,61,62,64,71,73等、
C.I.ピグメントレッド 1,2,3,4,5,6,7,9,10,14,17,22,23,31,38,41,48:1,48:2,48:3,48:4,49,49:1,49:2,52:1,52:2,53:1,57:1,60:1,63:1,66,67,81:1,81:2,81:3,83,88,90,105,112,119,122,123,144,146,149,150,155,166,168,169,170,171,172,175,176,177,178,179,184,185,187,188,190,200,202,206,207,208,209,210,216,220,224,226,242,246,254,255,264,270,272,279
C.I.ピグメントグリーン 7,10,36,37,58,59
C.I.ピグメントバイオレット 1,19,23,27,32,37,42
C.I.ピグメントブルー 1,2,15,15:1,15:2,15:3,15:4,15:6,16,22,60,64,66,79,80
C.I.ピグメントブラック 1
これら有機顔料は、単独若しくは色純度を上げるため種々組合せて用いることができる。
カチオンとアニオンとを有する色素において、アニオンは、カチオンの分子外に有していてもよいが、カチオンと共有結合を介して結合していることが好ましい。なお、アニオンが、カチオンの分子外に有するとは、カチオンとアニオンが共有結合を介して結合せず、別化合物として存在している場合をいう。以下、カチオンの分子外のアニオンを対アニオンともいう。
本発明において、キサンテン色素としては、下記式(J)で表される構造が例示される。
(置換基A群)
アルキル基(好ましくは炭素数1~30)、アルケニル基(好ましくは炭素数2~30)、アルキニル基(好ましくは炭素数2~30)、アリール基(好ましくは炭素数6~30)、アミノ基(好ましくは炭素数0~30)、アルコキシ基(好ましくは炭素数1~30)、アリールオキシ基(好ましくは炭素数6~30)、芳香族ヘテロ環オキシ基(好ましくは炭素数1~30)、アシル基(好ましくは炭素数2~30)、アルコキシカルボニル基(好ましくは炭素数2~30)、アリールオキシカルボニル基(好ましくは炭素数7~30)、アシルオキシ基(好ましくは炭素数2~30)、アシルアミノ基(好ましくは炭素数2~30)、アルコキシカルボニルアミノ基(好ましくは炭素数2~30)、アリールオキシカルボニルアミノ基(好ましくは炭素数7~30)、スルホニルアミノ基(好ましくは炭素数0~30)、スルファモイル基(好ましくは炭素数0~30)、カルバモイル基(好ましくは炭素数1~30)、アルキルチオ基(好ましくは炭素数1~30)、アリールチオ基(好ましくは炭素数6~30)、芳香族ヘテロ環チオ基(好ましくは炭素数1~30)、スルホニル基(好ましくは炭素数0~30)、スルフィニル基(好ましくは炭素数0~30)、ウレイド基(好ましくは炭素数1~30)、リン酸アミド基(好ましくは炭素数0~30)、ヒドロキシ基、メルカプト基、ハロゲン原子、シアノ基、スルホ基、カルボキシ基、ニトロ基、ヒドロキサム酸基、スルフィノ基、ヒドラジノ基、イミノ基、ヘテロアリール基(好ましくは炭素数1~30)。
これらの基は、さらに置換可能な基である場合、さらに置換基を有してもよい。置換基としては、上述した置換基A群で説明した基、及び、後述するアニオンを含む基などが挙げられる。
上記置換基群Aの詳細については、特開2014-237809号公報の段落番号0042~0053の記載を参酌でき、この内容は本明細書に組み込まれることとする。
形成される環が、さらに置換可能な基である場合には、R81~R85で説明した置換基で置換されていてもよく、2個以上の置換基で置換されている場合には、それらの置換基は同一であっても異なっていてもよい。
R81~R85の少なくとも1つがアニオンを含む場合、アニオンとしては、-SO3 -、-COO-、-PO4 -、ビス(スルホニル)イミドアニオン、トリス(スルホニル)メチドアニオン及びテトラアリールボレートアニオンが好ましく、ビス(スルホニル)イミドアニオン、トリス(スルホニル)メチドアニオン及びテトラアリールボレートアニオンがより好ましく、ビス(スルホニル)イミドアニオン及びトリス(スルホニル)メチドアニオンが更に好ましい。
具体的には、R81~R85の少なくとも1つが、一般式(P)で置換された構造が挙げられる。
一般式(P)
-NR10-において、R10は、水素原子又は炭素数1~5のアルキル基を表し、水素原子が好ましい。
フッ素原子を含むアルキレン基の炭素数は、1~10が好ましく、1~6がより好ましく、1~3がさらに好ましい。これらのアルキレン基は、ペルフルオロアルキレン基がより好ましい。フッ素原子を含むアルキレン基の具体例としては、ジフルオロメチレン基、テトラフルオロエチレン基、ヘキサフルオロプロピレン基などが挙げられる。
フッ素原子を含むアリーレン基の炭素数は、6~20が好ましく、6~14がより好ましく、6~10がさらに好ましい。フッ素原子を含むアリーレン基の具体例としては、テトラフルオロフェニレン基、ヘキサフルオロ-1-ナフチレン基、ヘキサフルオロ-2-ナフチレン基などが挙げられる。
一般式(P-1)
L2は、-SO2-又は-CO-を表す。
Gは、炭素原子又は窒素原子を表す。
n1は、Gが炭素原子の場合2を表し、Gが窒素原子の場合1を表す。
R6は、フッ素原子を含むアルキル基又はフッ素原子を含むアリール基を表す。n1が2の場合、2つのR6はそれぞれ同一でも異なっていても良い。
R6が表すフッ素原子を含むアルキル基の炭素数は、1~10が好ましく、1~6がより好ましく、1~3がさらに好ましい。
R6が表すフッ素原子を含むアリール基の炭素数は、6~20が好ましく、6~14がより好ましく、6~10がさらに好ましい。
本発明において、着色剤が、カチオンと対アニオンとで構成される場合、対アニオンとしては特に制限は無いが、耐熱性の観点で非求核性のアニオンであることが好ましい。非求核性のアニオンとしては、特開2007-310315号公報の段落番号0075等に記載の公知の非求核性アニオンが好ましい。ここで、非求核性とは、加熱により色素を求核攻撃しない性質を意味する。
対アニオンとしては、スルホン酸アニオン、カルボン酸アニオン、スルホニルイミドアニオン、ビス(スルホニル)イミドアニオン、トリス(スルホニル)メチドアニオン、カルボン酸アニオン、テトラアリールボレートアニオン、-CON-CO-、-CON-SO2-、BF4 -、PF6 -、SbF6 -、B-(CN)3OCH3から選ばれる少なくとも一種であることが好ましい。より好ましくは、ビス(スルホニル)イミドアニオン、トリス(スルホニル)メチドアニオン及びテトラアリールボレートアニオンから選ばれる少なくとも一種であり、さらに好ましくは、ビス(スルホニル)イミドアニオン及びトリス(スルホニル)メチドアニオンから選ばれる少なくとも一種である。
対アニオンは、下記(AN-1)~(AN-5)で表される構造を有する非求核性アニオンであることがより好ましい。
X1及びX2は、それぞれ独立に、フッ素原子又はフッ素原子を有する炭素数1~10のアルキル基を表し、フッ素原子又はフッ素原子を有する炭素数1~10のアルキル基が好ましく、炭素数1~10のペルフルオロアルキル基であることがより好ましく、炭素数1~4のペルフルオロアルキル基であることがさらに好ましく、トリフルオロメチル基が特に好ましい。
X3、X4及びX5は、それぞれ独立に、X1及びX2と同義であり、好ましい範囲も同義である。
X6は、炭素数1~10のペルフルオロアルキル基であることが好ましく、炭素数1~4のペルフルオロアルキル基であることがさらに好ましい。
X7は、炭素数1~10のペルフルオロアルキレン基であることが好ましく、炭素数1~4のペルフルオロアルキレン基であることがさらに好ましい。
Ar1、Ar2、Ar3及びAr4は、それぞれ独立に、炭素数6~20のアリール基が好ましく、炭素数6~14のアリール基がより好ましく、炭素数6~10のアリール基がさらに好ましい。
Ar1、Ar2、Ar3及びAr4が表わすアリール基は、置換基を有しても良い。置換基を有する場合、ハロゲン原子、アルキル基、アリール基、アルコキシ基、カルボニル基、カルボニルオキシ基、カルバモイル基、スルホ基、スルホンアミド基、ニトロ基等が挙げられ、ハロゲン原子及びアルキル基が好ましく、フッ素原子、アルキル基がより好ましく、フッ素原子、炭素数1~4のペルフルオロアルキル基がさらに好ましい。
Ar1、Ar2、Ar3及びAr4は、それぞれ独立に、ハロゲン原子及び/又はハロゲン原子を有するアルキル基を有するフェニル基がより好ましく、フッ素原子及び/又はフッ素原子を有するアルキル基を有するフェニル基がさらに好ましい。
n1は、1~3が好ましく、1~2がより好ましい。
n2は、1~4の整数が好ましく、1又は2がより好ましい。
以下に、非求核性の対アニオンの具体例を示すが本発明はこれに限定されるものではない。
次に、色素多量体の好ましい実施形態を説明する。色素多量体は、一分子中に、色素構造を2以上有することが好ましく、3以上有することがより好ましい。上限は、特に限定はないが、100以下とすることもできる。一分子中に有する色素構造は、同一の色素構造であってもよく、異なる色素構造であってもよい。なお、本発明において、異なる色素構造とは、色素骨格が異なる色素構造のみならず、色素骨格が同一であって、かつ、色素骨格に結合している置換基の種類が異なる色素構造を含むこととする。
本発明の色素多量体は、2価以上の連結基に、色素構造が2以上結合してなる構造を有することが好ましい。
また、本発明の色素多量体は、側鎖に色素構造を有する繰り返し単位、及び、主鎖に色素構造を有する繰り返し単位から選ばれる少なくとも1つを含んでなることが好ましい。
また、本発明の色素多量体は、後述する一般式(A)、一般式(B)及び一般式(C)で表される繰り返し単位の少なくとも一つを含んでなるか、又は後述する一般式(D)で表されることが好ましい。すなわち、本発明の色素多量体は、後述する一般式(A)で表される繰り返し単位を有する色素多量体(色素多量体(A)ともいう)、後述する一般式(B)で表される繰り返し単位を有する色素多量体(色素多量体(B)ともいう)、後述する一般式(C)で表される繰り返し単位を有する色素多量体(色素多量体(C)ともいう)、及び、一般式(D)で表される色素多量体(色素多量体(D)ともいう)が好ましい。色素多量体(A)、色素多量体(C)及び色素多量体(D)がより好ましく、色素多量体(A)及び色素多量体(D)が特に好ましい。
色素多量体(A)は、下記式一般式(A)で表される繰り返し単位を含む。色素多量体(A)は、下記一般式(A)で表される繰り返し単位の割合が、色素多量体を構成する全繰り返し単位の10~100質量%であることが好ましい。下限は、20質量%以上がより好ましく、30質量%以上が更に好ましく、50質量%以上が特に好ましい。上限は、95質量%以下がより好ましい。
式中、*で示された部位でL1と連結していることを表す。Meはメチル基を表す。また、(XX-18)及び(XX-19)中のRは、水素原子、炭素数1~5のアルキル基又はフェニル基を表す。
アリーレン基及びアリール基の炭素数は、6~20が好ましく、6~12がより好ましい。
ヘテロ環連結基及びヘテロ環基は、5員環又は6員環が好ましい。ヘテロ環連結基及びヘテロ環基が有するヘテロ原子は、酸素原子、窒素原子及び硫黄原子が好ましい。ヘテロ環連結基及びヘテロ環基が有するヘテロ原子の数は、1~3個が好ましい。
L12は、-SO2-又は-CO-を表す。
L13は、2価の連結基を表す。2価の連結基としては、L11で説明した基が挙げられ、炭素数6~18のアリーレン基(好ましくはフェニレン基)、-O-、-CO-、-S-、-NRARB-又はこれらの組み合わせからなる基が好ましく、フェニレン基と-O-と-CO-との組み合わせからなる基がより好ましい。
Gは、炭素原子又は窒素原子を表す。
n2は、Gが炭素原子の場合1を表し、Gが窒素原子の場合0を表す。
R7Aは、フッ素原子を含むアルキレン基又はフッ素原子を含むアリーレン基を表す。アルキレン基の炭素数は、1~10が好ましく、1~6がより好ましく、1~3がさらに好ましい。アリーレン基の炭素数は、6~20が好ましく、6~14がより好ましく、6~10がさらに好ましい。
R7Bは、フッ素原子を含むアルキル基又はフッ素原子を含むアリール基を表す。アルキル基の炭素数は、1~10が好ましく、1~6がより好ましく、1~3がさらに好ましい。アリール基の炭素数は、6~20が好ましく、6~14がより好ましく、6~10がさらに好ましい。
DyeIは、色素化合物の一部が、L1又はX1と連結していることが好ましい。
DyeIは、色素化合物が有する任意の水素原子を1個以上取り除いた構造が好ましい。
付加重合には公知の付加重合(ラジカル重合、アニオン重合、カチオン重合)が適用できるが、このうち、特にラジカル重合により合成することが反応条件を穏和化でき、色素骨格を分解させないため好ましい。ラジカル重合には、公知の反応条件を適用することができる。
一般式(A)で表される繰り返し単位を有する色素多量体は、耐熱性の観点から、エチレン性不飽和結合を有する色素単量体を用いてラジカル重合して得られたラジカル重合体であることが好ましい。
本発明における色素多量体は、一般式(A)で表される繰り返し単位の他に、他の繰り返し単位を含んでいてもよい。他の繰り返し単位は、硬化性基、酸基等の官能基を含んでいてもよい。官能基を含んでいなくてもよい。色素多量体は、酸基を有する繰り返し単位及び硬化性基を有する繰り返し単位から選ばれる1種以上を有することが好ましい。
硬化性基を有する繰り返し単位の割合は、色素多量体を構成する全繰り返し単位の0~50質量%であることが好ましい。下限は、1質量%以上がより好ましく、3質量%以上が更に好ましい。上限は、35質量%以下がより好ましく、30質量%以下が更に好ましい。
酸基を有する繰り返し単位の割合は、色素多量体を構成する全繰り返し単位の0~50質量%であることが好ましい。下限は、1質量%以上がより好ましく、3質量%以上が更に好ましい。上限は、35質量%以下がより好ましく、30質量%以下が更に好ましい。
2~20個の無置換のアルキレンオキシ鎖の繰り返しからなる基において、アルキレンオキシ鎖の繰り返しの数は、2~10個が好ましく、2~15個がより好ましく、2~10個がさらに好ましい。1つのアルキレンオキシ鎖は、-(CH2)nO-で表され、nは整数であるが、nは1~10が好ましく、1~5がより好ましく、2又は3がさらに好ましい。
色素多量体(B)は、下記式一般式(B)で表される繰り返し単位を含む。色素多量体(B)は、下記一般式(B)で表される繰り返し単位の割合が、色素多量体を構成する全繰り返し単位の10~100質量%であることが好ましい。下限は、20質量%以上がより好ましく、30質量%以上が更に好ましく、50質量%以上が特に好ましい。上限は、95質量%以下がより好ましい。
L2は、単結合又は2価の連結基を表す。2価の連結基としては、炭素数1~30のアルキレン基、炭素数6~30のアリーレン基、ヘテロ環連結基、-CH=CH-、-O-、-S-、-C(=O)-、-COO-、-NR-、-CONR-、-OCO-、-SO-、-SO2-及びこれらを2個以上連結して形成される連結基が挙げられる。ここで、Rは、それぞれ独立に、水素原子、アルキル基、アリール基、又はヘテロ環基を表す。2価の連結基の詳細については、一般式(A)のL1と同じである。
*-Y11-A1
一般式(Z-1)中、*は、一般式(B)中のL2との結合部位を表し、Y11はフッ素化アルキレン基を表し、A1はSO3 -を表す。
Y11が表すフッ素化アルキレン基の炭素数は、1~20が好ましく、1~10がより好ましく、1~6がさらに好ましい。また、ペルフルオロアルキレン基であることがより好ましい。
*-Y12-(A2)n
一般式(Z-2)中、*は、一般式(B)中のL2との結合部位を表す。
Y12は、ホウ素原子、炭素原子、窒素原子、又はリン原子からなるアニオンを表す。
Y12がホウ素原子の場合、nは3であり、A2は、ハロゲン原子、シアノ基、フッ素原子及びシアノ基の少なくとも1つを含むアルキル基、又は、フッ素原子及びシアノ基の少なくとも1つを含むアリール基が好ましい。
Y12が炭素原子の場合、nは2であり、A2は、ハロゲン原子、シアノ基、フッ素原子及びシアノ基の少なくとも1つを含むアルキル基、フッ素原子及びシアノ基の少なくとも1つを含むアリール基、フッ素原子及びシアノ基の少なくとも1つを含んでいてもよいアルキルスルホニル基、又は、フッ素原子及びシアノ基の少なくとも1つを含んでいてもよいアリールスルホニル基が好ましい。2つのA2は互いに結合して環を形成していてもよい。
Y12が窒素原子の場合、nは1であり、A2は、フッ素原子及びシアノ基の少なくとも1つを含むアルキル基、フッ素原子及びシアノ基の少なくとも1つを含むアリール基、フッ素原子及びシアノ基の少なくとも1つを含んでいてもよいアルキルスルホニル基、又は、フッ素原子及びシアノ基の少なくとも1つを含んでいてもよいアリールスルホニル基が好ましい。
Y12がリン原子の場合、nは1又は3であり、A2は、フッ素原子及びシアノ基の少なくとも1つを含むアルキル基、フッ素原子及びシアノ基の少なくとも1つを含むアリール基、フッ素原子及びシアノ基の少なくとも1つを含んでいてもよいアルキルスルホニル基、又は、フッ素原子及びシアノ基の少なくとも1つを含んでいてもよいアリールスルホニル基が好ましい。
nが2以上の場合、複数のA2は、同一であってもよく、異なっていてもよい。
色素多量体(C)は、下記一般式(C)で表される繰り返し単位を含むことが好ましい。色素多量体(C)は、下記一般式(C)で表される繰り返し単位の割合が、色素多量体を構成する全繰り返し単位の10~100質量%であることが好ましい。下限は、20質量%以上がより好ましく、30質量%以上が更に好ましく、50質量%以上が特に好ましい。上限は、95質量%以下がより好ましい。
mは0又は1を表すが、1であることが好ましい。
アリール基及びアリーレン基の炭素数は、6~20が好ましく、6~12がより好ましい。
ヘテロ環連結基及びヘテロ環基は、5員環又は6員環が好ましい。ヘテロ環連結基及びヘテロ環基が有するヘテロ原子は、酸素原子、窒素原子及び硫黄原子が好ましい。ヘテロ環連結基及びヘテロ環基が有するヘテロ原子の数は、1~3個が好ましい。
アルキレン基、アリーレン基、ヘテロ環連結基、アルキル基、アリール基、及びヘテロ環基は、無置換であってもよく、置換基を有してもよい。置換基としては、硬化性基、酸基が挙げられる。硬化性基としては、エチレン性不飽和結合を含む基等のラジカル重合性基、環状エーテル基(エポキシ基、オキセタニル基)、オキサゾリン基、メチロール基等が挙げられる。エチレン性不飽和結合を含む基としては、ビニル基、(メタ)アリル基、(メタ)アクリロイル基等が挙げられる。酸基としては、カルボキシ基、スルホン酸基、リン酸基が例示される。また、2~20個の無置換のアルキレンオキシ鎖の繰り返しからなる基、ラクトン、酸無水物、アミド、シアノ基等の現像促進基、長鎖及び環状アルキル基、アラルキル基、アリール基、ポリアルキレンオキシド基、ヒドロキシ基、マレイミド基、アミノ基等の親疏水性調整基等を置換基として有してもよい。
色素多量体(D)は、一般式(D)で表されることが好ましい。
nとkとの合計は、2~20が好ましく、2~15がより好ましく、2~14が更に好ましく、2~8がさらにより好ましく、2~7が特に好ましく、2~6が一層好ましい。
なお、1つの色素多量体における、n及びkは、それぞれ整数であるが、本発明においては、一般式(D)におけるn、kが異なる色素多量体を複数含んでいてもよい。従って、本発明の着色組成物中の、n及びkの平均値は整数にならない場合がある。
(n+k)価の連結基は、具体的な例として、下記の構造単位又は以下の構造単位が2以上組み合わさって構成される基(環構造を形成していてもよい)を挙げることができる。
また、Pが表す置換基は、繰り返し単位を有する1価のポリマー鎖であってもよい。繰り返し単位を有する1価のポリマー鎖は、ビニル化合物由来の繰り返し単位を有する1価のポリマー鎖が好ましい。kが2以上の場合、k個のPは、同一であっても、異なっていてもよい。
Pが繰り返し単位を有する1価のポリマー鎖であり、かつ、kが1の場合、Pはビニル化合物由来の繰り返し単位を2~20個(好ましくは、2~15個、更に好ましくは2~10個)有する1価のポリマー鎖が好ましい。また、Pが繰り返し単位を有する1価のポリマー鎖であり、かつ、kが2以上の場合、k個のPのビニル化合物由来の繰り返し単位の個数の平均値は、2~20個(好ましくは、2~15個、更に好ましくは2~10個)であることが好ましい。
Pが繰り返し単位を有する1価のポリマー鎖の場合、kが1の場合におけるPの繰り返し単位の数、kが2以上の場合におけるk個のPの繰り返し単位の個数の平均値は、核磁気共鳴(NMR)により求めることができる。
Pが、酸基を含む繰り返し単位を含む場合、酸基を含む繰り返し単位の割合は、Pの全繰り返し単位に対して、10~80モル%が好ましく、10~65モル%がより好ましい。
Pが、硬化性基を有する繰り返し単位を含む場合、硬化性基を有する繰り返し単位の割合は、Pの全繰り返し単位に対して、10~80モル%が好ましく、10~65モル%がより好ましい。
一般式(D)において、DyeIVが表す色素構造は、色素化合物が有する任意の水素原子を1個以上取り除いた構造であって、色素化合物の一部がL4に結合してなるものであってもよい。また、主鎖又は側鎖に色素構造(色素化合物が有する任意の水素原子を1個以上取り除いた構造)を有する繰り返し単位を含むポリマー鎖であってもよい。上記ポリマー鎖は、色素構造を含んでいれば特に定めるものではないが、(メタ)アクリル系樹脂、スチレン系樹脂、及び、(メタ)アクリル/スチレン系樹脂から選ばれる1種であるであることが好ましい。ポリマー鎖の繰り返し単位としては、特に定めるものではないが、上述した一般式(A)で表される繰り返し単位、上述した一般式(C)で表される繰り返し単位などが挙げられる。また、ポリマー鎖を構成する全繰り返し単位中における、色素構造を有する繰り返し単位の合計は、5~60モル%であることが好ましく、10~50モル%がより好ましく、20~40モル%がさらに好ましい。
上記ポリマー鎖は、色素構造を有する繰り返し単位の他に、色素多量体(A)で説明した他の繰り返し単位などを含んでいてもよい。他の繰り返し単位として、酸基を有する繰り返し単位及び硬化性基を有する繰り返し単位から選ばれる1種以上を有することが好ましい。
上記ポリマー鎖が硬化性基を有する繰り返し単位を含む場合、硬化性基を有する繰り返し単位の割合は、ポリマー鎖の全繰り返し単位100モルに対し、例えば、5~50モルが好ましく、10~40モルがより好ましい。
上記ポリマー鎖が酸基を有する繰り返し単位を含む場合、酸基を有する繰り返し単位の割合は、ポリマー鎖の全繰り返し単位100モルに対し、例えば、5~50モルが好ましく、10~40モルがより好ましい。
(1)カルボキシ基、ヒドロキシ基、アミノ基等から選択される官能基を末端に導入した化合物と、色素構造を有する酸ハライド、色素構造を有するアルキルハライド、あるいは色素構造を有するイソシアネート等と、を高分子反応させる方法。
(2)末端に炭素-炭素二重結合を導入した化合物と、色素構造を有するチオール化合物と、をマイケル付加反応させる方法。
(3)末端に炭素-炭素二重結合を導入した化合物と、色素構造を有するチオール化合物と、をラジカル発生剤存在下で反応させる方法。
(4)末端に複数のチオール基を導入した多官能チオール化合物と、炭素-炭素二重結合及び色素構造とを有する化合物と、をラジカル発生剤存在下で反応させる方法。
(5)色素構造を有するチオール化合物の存在下で、ビニル化合物をラジカル重合する方法。
(D1-L42)n-L4-(L41-P1)k ・・・(D-1)
一般式(D-1)中、L4は(n+k)価の連結基を表す。nは2~20の整数を表し、kは0~20の整数を表す。D1は、色素構造を表し、P1は、置換基を表す。nが2以上の場合、複数のD1は互いに異なっていても良く、kが2以上の場合、複数のP1は互いに異なっていても良い。n+kは、2~20の整数を表す。
2価の連結基としては、1から100個までの炭素原子、0個から10個までの窒素原子、0個から50個までの酸素原子、1個から200個までの水素原子、及び0個から20個までの硫黄原子から成り立つ基が含まれ、無置換でも置換基を更に有していてもよい。
置換基としては、酸基、硬化性基等が挙げられる。硬化性基としては、エチレン性不飽和結合を含む基等のラジカル重合性基、環状エーテル基(エポキシ基、オキセタニル基)、オキサゾリン基、メチロール基等が挙げられる。エチレン性不飽和結合を含む基としては、ビニル基、(メタ)アリル基、(メタ)アクリロイル基等が挙げられる。酸基としては、カルボキシ基、スルホン酸基、リン酸基等が挙げられる。
また、P1が表す置換基は、繰り返し単位を有する1価のポリマー鎖であってもよい。繰り返し単位を有する1価のポリマー鎖は、ビニル化合物由来の繰り返し単位を有する1価のポリマー鎖が好ましい。kが2以上の場合、k個のP1は、同一であっても、異なっていてもよい。
P1が繰り返し単位を有する1価のポリマー鎖であり、かつ、kが1の場合、P1はビニル化合物由来の繰り返し単位を2~20個(好ましくは、2~15個、更に好ましくは2~10個)有する1価のポリマー鎖が好ましい。また、P1が繰り返し単位を有する1価のポリマー鎖であり、かつ、kが2以上の場合、k個のP1のビニル化合物由来の繰り返し単位の個数の平均値は、2~20個(好ましくは、2~15個、更に好ましくは2~10個)であることが好ましい。
P1が、酸基を含む繰り返し単位を含む場合、酸基を含む繰り返し単位の割合は、P1の全繰り返し単位に対して、10~80モル%が好ましく、10~65モル%がより好ましい。
P1が、硬化性基を有する繰り返し単位を含む場合、硬化性基を有する繰り返し単位の割合は、Pの全繰り返し単位に対して、10~80モル%が好ましく、10~65モル%がより好ましい。
上記ポリマー鎖は、色素構造を有する繰り返し単位の他に、色素多量体(A)で説明した他の繰り返し単位などを含んでいてもよい。他の繰り返し単位として、酸基を有する繰り返し単位及び硬化性基を有する繰り返し単位から選ばれる1種以上を有することが好ましい。
(D2-S-C1-B1)n-L4-(B2-C2-S-P2)k ・・・(D-2)
一般式(D-2)中、L4は(n+k)価の連結基を表す。nは2~20の整数を表し、kは0~20の整数を表す。D2は、色素構造を表し、P2は、置換基を表す。B1及びB2は、それぞれ独立に、単結合、-O-、-S-、-CO-、-NR-、-O2C-、-CO2-、-NROC-、又は、-CONR-を表す。Rは、水素原子、アルキル基又はアリール基を表す。C1及びC2は、それぞれ独立に、単結合又は2価の連結基を表す。Sは、硫黄原子を表す。nが2以上の場合、複数のD2は互いに異なっていても良く、kが2以上の場合、複数のP2は互いに異なっていても良い。n+kは、2~20の整数を表す。
Rは、水素原子、アルキル基又はアリール基を表す。
Rが表すアルキル基の炭素数は、1~30が好ましく、1~10がより好ましい。アルキル基は、直鎖、分岐、環状のいずれであってもよい。
Rが表すアリール基の炭素数は、6~30が好ましく、6~12がより好ましい。
Rは水素原子又はアルキル基が好ましく、水素原子がより好ましい。
2価の連結基としては、アルキレン基、アリーレン基、オキシアルキレン基が好ましく、アルキレン基又はオキシアルキレン基がより好ましい。
アルキレン基、オキシアルキレン基の炭素数は、1~30が好ましく、1~10がより好ましい。アルキル基、オキシアルキレン基は、直鎖、分岐、環状のいずれであってもよい。
アリーレン基の炭素数は、6~30が好ましく、6~12がより好ましい。
P1が繰り返し単位を有する1価のポリマー鎖であり、かつ、kが1の場合、P1はビニル化合物由来の繰り返し単位を2~20個(好ましくは、2~15個、更に好ましくは2~10個)有する1価のポリマー鎖が好ましい。また、P1が繰り返し単位を有する1価のポリマー鎖であり、かつ、kが2以上の場合、k個のP1のビニル化合物由来の繰り返し単位の個数の平均値は、2~20個(好ましくは、2~15個、更に好ましくは2~10個)であることが好ましい。
P1が繰り返し単位を有する1価のポリマー鎖を表す場合、P1を構成する繰り返し単位としては、上述した色素多量体(A)で説明した他の繰り返し単位が挙げられる。他の繰り返し単位は、上述した酸基を有する繰り返し単位及び硬化性基を有する繰り返し単位から選ばれる1種以上を有することが好ましい。
P1が、酸基を含む繰り返し単位を含む場合、酸基を含む繰り返し単位の割合は、P1の全繰り返し単位に対して、10~80モル%が好ましく、10~65モル%がより好ましい。
P1が、硬化性基を有する繰り返し単位を含む場合、硬化性基を有する繰り返し単位の割合は、Pの全繰り返し単位に対して、10~80モル%が好ましく、10~65モル%がより好ましい。
上記ポリマー鎖は、色素構造を有する繰り返し単位の他に、色素多量体(A)で説明した他の繰り返し単位などを含んでいてもよい。他の繰り返し単位として、酸基を有する繰り返し単位及び硬化性基を有する繰り返し単位から選ばれる1種以上を有することが好ましい。
多官能チオール化合物と、ラジカル重合性色素化合物とのラジカル重合は、例えば、多官能チオール化合物と、ラジカル重合性色素化合物とを適当な溶媒中に溶解し、ここにラジカル発生剤を添加して、約50℃~100℃で、付加させる方法(チオール-エン反応法)を利用して行うことができる。
色素多量体の重量平均分子量(Mw)は、2000~40000が好ましい。下限は、3000以上がより好ましく、4000以上がさらに好ましい。上限は、35000以下がより好ましく、30000以下がさらに好ましい。上記範囲を満たすことにより、耐溶剤性及び色移り性がより良好となる。
また、色素多量体が、色素構造としてキサンテン色素構造を含む場合、色素多量体の重量平均分子量は、2000~40000が好ましい。下限は、3000以上がより好ましく、4000以上がさらに好ましい。上限は、35000以下がより好ましく、30000以下がさらに好ましい。
なお、本発明において、色素多量体の重量平均分子量(Mw)は、ゲルパーミエーションクロマトグラフィ(GPC)測定でのポリスチレン換算値であり、具体的には、後述する実施例に記載の方法で測定した値である。
本発明の着色組成物は、酸発生剤を含有する。酸発生剤は、光酸発生剤及び熱酸発生剤が挙げられ、何れも好ましく用いることができる。また、光酸発生剤と熱酸発生剤とを併用することもできる。また、酸発生剤は、実質的に光酸発生剤のみを用いてもよく、実質的に熱酸発生剤のみを用いてもよい。熱酸発生剤と光酸発生剤とを併用する場合は、熱酸発生剤と光酸発生剤との質量比は、熱酸発生剤:光酸発生剤=95:5~25:75が好ましく、90:10~40:60がより好ましい。
なお、本発明において、酸発生剤として、実質的に光酸発生剤のみを用いる場合とは、酸発生剤の全質量中における光酸発生剤の含有量が99質量%以上であることが好ましく、99.9質量%以上がより好ましく、100質量%(光酸発生剤のみからなる)が更に好ましい。また、本発明において、酸発生剤として、実質的に熱酸発生剤のみを用いる場合とは、酸発生剤の全質量中における熱酸発生剤の含有量が99質量%以上であることが好ましく、99.9質量%以上がより好ましく、100質量%(熱酸発生剤のみからなる)が更に好ましい。
なお、本発明において、酸発生剤とは、熱や光などのエネルギーを加えることで酸を発生する化合物を意味する。また、熱酸発生剤とは、熱分解により酸を発生する化合物を意味する。また、光酸発生剤とは、光照射により酸を発生する化合物を意味する。
また、酸発生剤とラジカル重合性化合物との質量比は、酸発生剤:光ラジカル重合性化合物=1:1~1:10が好ましく、1:1~1:7.5がより好ましく、1:1~1:5がさらに好ましい。
酸発生剤は、1種のみであってもよく、2種以上を併用してもよい。2種以上を併用する場合は、合計が上記含有量であることが好ましい。
本発明において、熱酸発生剤は、好ましくは熱分解温度が130℃~250℃の範囲、より好ましくは150℃~220℃の範囲の化合物が挙げられる。
熱酸発生剤としては、例えば、加熱によりスルホン酸、カルボン酸、ジスルホニルイミドなどの低求核性の酸を発生する化合物が挙げられる。熱酸発生剤から発生する酸としては、pKaが4以下の酸が好ましく、pKaが3以下の酸がより好ましく、pKaが2以下の酸が更に好ましい。例えば、スルホン酸や電子求引基で置換されたアルキルカルボン酸、アリールカルボン酸、ジスルホニルイミドなどが好ましい。電子求引基としてはフッ素原子などのハロゲン原子、トリフルオロメチル基等のハロアルキル基、ニトロ基、シアノ基を挙げることができる。
スルホン酸エステルの分子量は、230~1,000が好ましく、230~800がより好ましい。
スルホン酸エステルは、市販のものを用いてもよいし、公知の方法で合成したものを用いてもよい。スルホン酸エステルは、例えば、塩基性条件下、スルホニルクロリド又はスルホン酸無水物を対応する多価アルコールと反応させることにより合成することができる。
スルホン酸エステル化合物としては、例えば、テトラエチレングリコールビス(パラトルエンスルホナート)、パラトルエンスルホン酸ブチルなどが挙げられる。
また、熱酸発生剤とラジカル重合性化合物との質量比は、熱酸発生剤:光ラジカル重合性化合物=1:1~1:10が好ましく、1:1~1:7.5がより好ましく、1:1~1:5がさらに好ましい。
熱酸発生剤は、1種のみであってもよく、2種以上を併用してもよい。2種以上を併用する場合は、合計が上記含有量であることが好ましい。
本発明において、光酸発生剤は、波長250nm以上、好ましくは波長250~350nmの活性光線に感応し、酸を発生する化合物が好ましいが、その化学構造に制限されるものではない。また、光酸発生剤の極大吸収波長は、260~320nmの範囲に有することが好ましく、270~300nmの範囲に有することがより好ましい。
イミドスルホネート化合物の具体例としてはWO2011/087011号公報の段落番号0065~0075に記載の化合物が例示でき、これらの内容は本明細書に組み込まれる。
R21のアルキル基としては、炭素数1~10の、直鎖又は分岐のアルキル基が好ましい。R21のアルキル基は、ハロゲン原子、炭素数6~11のアリール基、炭素数1~10のアルコキシ基、又は、環状のアルキル基(7,7-ジメチル-2-オキソノルボルニル基などの有橋式脂環基を含む、好ましくはビシクロアルキル基等)で置換されてもよい。
R21のアリール基としては、炭素数6~11のアリール基が好ましく、フェニル基又はナフチル基がより好ましい。R21のアリール基は、低級アルキル基、アルコキシ基あるいはハロゲン原子で置換されてもよい。
R201、R202及びR203としての有機基の炭素数は、1~30が好ましく、1~20がより好ましい。
R201~R203のうち2つが結合して環構造を形成してもよく、環内に酸素原子、硫黄原子、エステル結合、アミド結合、カルボニル基を含んでいてもよい。R201~R203の内の2つが結合して形成する基としては、アルキレン基(例えば、ブチレン基、ペンチレン基)を挙げることができる。
Z-は、非求核性アニオン(求核反応を起こす能力が著しく低いアニオン)を表す。
R201、R202及びR203のうち、少なくとも1つがアリール基であることが好ましく、三つ全てがアリール基であることがより好ましい。アリール基としては、フェニル基、ナフチル基などの他に、インドール残基、ピロール残基などのヘテロアリール基であってもよい。
R201~R203のアルキル基及びシクロアルキル基としては、好ましくは、炭素数1~10の直鎖状又は分岐状のアルキル基、炭素数3~10の環状のアルキル基を挙げることができる。
これらの基はさらに置換基を有していてもよい。その置換基としては、ニトロ基、フッ素原子などのハロゲン原子、カルボキシ基、水酸基、アミノ基、シアノ基、アルコキシ基(好ましくは炭素数1~15)、環状のアルキル基(好ましくは炭素数3~15)、アリール基(好ましくは炭素数6~14)、アルコキシカルボニル基(好ましくは炭素数2~7)、アシル基(好ましくは炭素数2~12)、アルコキシカルボニルオキシ基(好ましくは炭素数2~7)等が挙げられるが、これらに限定されるものではない。
脂肪族スルホン酸アニオン及び脂肪族カルボン酸アニオンにおける脂肪族部位は、直鎖状、分岐状又は環状のアルキル基のいずれであってもよく、好ましくは炭素数1~30の直鎖状又は分岐状のアルキル基及び炭素数3~30の環状のアルキル基が挙げられる。
芳香族スルホン酸アニオン及び芳香族カルボン酸アニオンにおける芳香族基としては、好ましくは炭素数6~14のアリール基、例えば、フェニル基、トリル基、ナフチル基等を挙げることができる。
スルホニルイミドアニオンとしては、例えば、サッカリンアニオンを挙げることができる。
ビス(アルキルスルホニル)イミドアニオン、トリス(アルキルスルホニル)メチドアニオンにおけるアルキル基は、炭素数1~5のアルキル基が好ましい。これらのアルキル基の置換基としてはハロゲン原子、ハロゲン原子で置換されたアルキル基、アルコキシ基、アルキルチオ基、アルキルオキシスルホニル基、アリールオキシスルホニル基、シクロアルキルアリールオキシスルホニル基等を挙げることができ、フッ素原子又はフッ素原子で置換されたアルキル基が好ましい。
また、ビス(アルキルスルホニル)イミドアニオンにおけるアルキル基は、互いに結合して環構造を形成してもよい。
R204~R207のアリール基、直鎖状、分岐状又は環状のアルキル基は、置換基を有していてもよい。この置換基は、化合物(ZI)におけるR201~R203と同義であり、好ましい範囲も同様である。
Z-は、非求核性アニオンを表し、一般式(ZI)におけるZ-と同義であり、好ましい範囲も同様である。
また、光酸発生剤とラジカル重合性化合物との質量比は、光酸発生剤:光ラジカル重合性化合物=1:1~1:10が好ましく、1:1~1:7.5がより好ましく、1:1~1:5がさらに好ましい。
また、光酸発生剤と、光ラジカル重合開始剤との質量比は、光酸発生剤:光ラジカル重合開始剤=1:1~1:10が好ましく、1:1~1:7.5がより好ましく、1:1~1:5がさらに好ましい。
光酸発生剤は、1種のみであってもよく、2種以上を併用してもよい。2種以上を併用する場合は、合計が上記含有量であることが好ましい。
本発明の着色組成物は、光ラジカル重合性化合物(以下、重合性化合物ともいう)を含有する。光ラジカル重合性化合物としては、ラジカルにより架橋可能な公知の化合物を用いることができる。例えば、エチレン性不飽和結合を有する基等のラジカル重合性基を有する化合物が挙げられる。エチレン性不飽和結合を有する基としては、ビニル基、(メタ)アリル基、(メタ)アクリロイル基などが挙げられる。
重合性化合物の分子量は、100~3000が好ましい。上限は、2000以下が好ましく、1500以下が更に好ましい。下限は、150以上が好ましく、250以上が更に好ましい。
重合性化合物は、3~15官能の(メタ)アクリレート化合物であることが好ましく、3~6官能の(メタ)アクリレート化合物であることがより好ましい。
これらの具体的な化合物としては、特開2009-288705号公報の段落番号0095~0108、特開2013-29760号公報の段落番号0227、特開2008-292970号公報の段落番号0254~0257に記載の化合物を参酌でき、この内容は本明細書に組み込まれる。
カプロラクトン構造を有する重合性化合物は、例えば、日本化薬(株)からKAYARAD DPCAシリーズとして市販されており、DPCA-20、DPCA-30、DPCA-60、DPCA-120等が挙げられる。
アルキレンオキシ基を有する重合性化合物の市販品としては、例えばサートマー社製のエチレンオキシ基を4個有する4官能アクリレートであるSR-494、日本化薬株式会社製のペンチレンオキシ基を6個有する6官能アクリレートであるDPCA-60、イソブチレンオキシ基を3個有する3官能アクリレートであるTPA-330などが挙げられる。
市販品としては、ウレタンオリゴマーUAS-10、UAB-140(山陽国策パルプ社製)、UA-7200(新中村化学工業社製)、DPHA-40H(日本化薬社製)、UA-306H、UA-306T、UA-306I、AH-600、T-600、AI-600(共栄社化学(株)製)などが挙げられる。
本発明の着色組成物は、硬化性化合物として、カチオン重合性化合物を含有することもできる。カチオン重合性化合物は、エポキシ基、オキセタニル基などの環状エーテル基を有する化合物が挙げられる。
また、本発明の着色組成物は、カチオン重合性化合物を実質的に含まない態様とすることもできる。カチオン重合性化合物を実質的に含まないとは、例えば、着色組成物の全固形分に対し、0.05質量%以下が好ましく、0.01質量%以下が更に好ましく、含有しないこともできる。
本発明の着色組成物は、重合性化合物の反応を促進させることなどを目的として、分子内に2個以上のメルカプト基を有する多官能チオール化合物を含んでいてもよい。多官能チオール化合物は、2級のアルカンチオール類であることが好ましく、特に下記一般式(T1)で表される構造を有する化合物であることが好ましい。
一般式(T1)
本発明の着色組成物は、光ラジカル重合開始剤を含有する。以下、光ラジカル重合開始剤を、光重合開始剤ともいう。
光重合開始剤としては、光ラジカル重合性化合物の重合を開始する能力を有する限り、特に制限はなく、公知の光重合開始剤の中から適宜選択することができる。例えば、紫外線領域から可視の光線に対して感光性を有するものが好ましい。また、光励起された増感剤と何らかの作用を生じ、活性ラジカルを生成する活性剤であってもよい。
また、光重合開始剤は、約300nm~800nm(330nm~500nmがより好ましい。)の範囲内に少なくとも約50のモル吸光係数を有する化合物を、少なくとも1種含有していることが好ましい。
光重合開始剤の具体例としては、例えば、特開2013-29760号公報の段落番号0265~0268を参酌することができ、この内容は本明細書に組み込まれる。
ヒドロキシアセトフェノン系開始剤としては、IRGACURE-184、DAROCUR-1173、IRGACURE-500、IRGACURE-2959,IRGACURE-127(商品名:いずれもBASF社製)を用いることができる。
アミノアセトフェノン系開始剤としては、市販品であるIRGACURE-907、IRGACURE-369、及び、IRGACURE-379EG(商品名:いずれもBASF社製)を用いることができる。アミノアセトフェノン系開始剤は、365nm又は405nm等の長波光源に吸収波長がマッチングされた特開2009-191179号公報に記載の化合物も用いることができる。
アシルホスフィン系開始剤としては、市販品であるIRGACURE-819やDAROCUR-TPO(商品名:いずれもBASF社製)を用いることができる。
オキシム化合物の具体例としては、特開2001-233842号公報記載の化合物、特開2000-80068号公報記載の化合物、特開2006-342166号公報記載の化合物を用いることができる。
本発明において、好適に用いることのできるオキシム化合物としては、例えば、3-ベンゾイルオキシイミノブタン-2-オン、3-アセトキシイミノブタン-2-オン、3-プロピオニルオキシイミノブタン-2-オン、2-アセトキシイミノペンタン-3-オン、2-アセトキシイミノ-1-フェニルプロパン-1-オン、2-ベンゾイルオキシイミノ-1-フェニルプロパン-1-オン、3-(4-トルエンスルホニルオキシ)イミノブタン-2-オン、及び2-エトキシカルボニルオキシイミノ-1-フェニルプロパン-1-オンなどが挙げられる。
また、J.C.S.Perkin II(1979年)pp.1653-1660、J.C.S.Perkin II(1979年)pp.156-162、Journal of Photopolymer Science and Technology(1995年)pp.202-232、特開2000-66385号公報記載の化合物、特開2000-80068号公報、特表2004-534797号公報、特開2006-342166号公報の各公報に記載の化合物等も挙げられる。
市販品ではIRGACURE OXE01(BASF社製)、IRGACURE OXE02(BASF社製)も好適に用いられる。また、TR-PBG-304(常州強力電子新材料有限公司製)、アデカアークルズNCI-831及びアデカアークルズNCI-930(ADEKA社製)も用いることができる。
好ましくは、例えば、特開2013-29760号公報の段落番号0274~0275を参酌することができ、この内容は本明細書に組み込まれる。
具体的には、オキシム化合物としては、下記式(OX-1)で表される化合物が好ましい。なお、オキシムのN-O結合が(E)体のオキシム化合物であっても、(Z)体のオキシム化合物であっても、(E)体と(Z)体との混合物であってもよい。
一般式(OX-1)中、Rで表される一価の置換基としては、一価の非金属原子団であることが好ましい。
一価の非金属原子団としては、アルキル基、アリール基、アシル基、アルコキシカルボニル基、アリールオキシカルボニル基、複素環基、アルキルチオカルボニル基、アリールチオカルボニル基等が挙げられる。また、これらの基は、1以上の置換基を有していてもよい。また、前述した置換基は、さらに他の置換基で置換されていてもよい。
置換基としてはハロゲン原子、アリールオキシ基、アルコキシカルボニル基又はアリールオキシカルボニル基、アシルオキシ基、アシル基、アルキル基、アリール基等が挙げられる。
一般式(OX-1)中、Bで表される一価の置換基としては、アリール基、複素環基、アリールカルボニル基、又は、複素環カルボニル基が好ましい。これらの基は1以上の置換基を有していてもよい。置換基としては、前述した置換基が例示できる。
一般式(OX-1)中、Aで表される二価の有機基としては、炭素数1~12のアルキレン基、シクロアルキレン基、アルキニレン基が好ましい。これらの基は1以上の置換基を有していてもよい。置換基としては、前述した置換基が例示できる。
芳香族炭化水素環は、単環でもよく、縮合環であってもよい。芳香族炭化水素環の環を構成する炭素原子数は、6~20が好ましく、6~15がより好ましく、6~10が特に好ましい。芳香族炭化水素環は、ベンゼン環及びナフタレン環が好ましい。なかでも、Ar1及びAr2の少なくとも一方がベンゼン環であることが好ましく、Ar1がベンゼン環であることがより好ましい。Ar1は、ベンゼン環又はナフタレン環が好ましく、ナフタレン環がより好ましい。
Ar1は、無置換の芳香族炭化水素環であることが好ましい。Ar2は、無置換の芳香族炭化水素環であってもよく、置換基を有する芳香族炭化水素環であってもよい。置換基としては、-CORX1が好ましい。RX1は、アルキル基、アリール基又はヘテロ環基が好ましく、アリール基がより好ましい。アリール基は置換基を有していてもよく、無置換であってもよい。置換基としては、炭素数1~10のアルキル基などが挙げられる。
アリール基の炭素数は、6~20が好ましく、6~15がより好ましく、6~10が更に好ましい。アリール基は、単環であってもよく、縮合環であってもよい。
フッ素原子を含む基は、フッ素原子を有するアルキル基(含フッ素アルキル基)、及び/又は、フッ素原子を有するアルキル基を含む基(含フッ素基)が好ましい。
含フッ素基は、-ORX11、-SRX11、-CORX11、-COORX11、-OCORX11、-NRX11RX12、-NHCORX11、-CONRX11RX12、-NHCONRX11RX12、-NHCOORX11、-SO2RX11、-SO2ORX11及び-NHSO2RX11から選ばれる少なくとも1種の基が好ましく、-ORX11がより好ましい。RX11は、含フッ素アルキル基を表し、RX12は、水素原子、アルキル基、含フッ素アルキル基、アリール基又はヘテロ環基を表す。
フッ素原子を含む基は、含フッ素アルキル基、及び/又は、-ORX11が好ましい。
含フッ素アルキル基は、フッ素原子の置換率が、40~100%であることが好ましく、50~100%であることがより好ましく、60~100%であることがさらに好ましい。
アルキル基の炭素数は、1~20が好ましく、1~15がより好ましく、1~10が更に好ましく、1~4が特に好ましい。アルキル基は、直鎖、分岐、環状のいずれでもよいが、直鎖又は分岐が好ましい。
アリール基の炭素数は、6~20が好ましく、6~15がより好ましく、6~10が更に好ましい。アリール基は、単環であってもよく、縮合環であってもよい。
アルキル基の炭素数は、1~20が好ましく、1~15がより好ましく、1~10が更に好ましい。アルキル基は、直鎖、分岐、環状のいずれでもよいが、直鎖又は分岐が好ましい。
アリール基の炭素数は、6~20が好ましく、6~15がより好ましく、6~10が更に好ましい。アリール基は、単環であってもよく、縮合環であってもよい。
オキシム化合物は、365nm又は405nmにおけるモル吸光係数が、感度の観点から、1,000~300,000であることが好ましく、2,000~300,000であることがより好ましく、5,000~200,000であることが特に好ましい。
化合物のモル吸光係数は、公知の方法を用いて測定することができるが、例えば、紫外可視分光光度計(Varian社製Cary-5 spectrophotometer)にて、酢酸エチル溶媒を用い、0.01g/Lの濃度で測定することが好ましい。
本発明に用いられる光重合開始剤は、必要に応じて2種以上を組み合わせて使用してもよい。
本発明の着色組成物は、樹脂を含むことが好ましい。樹脂は、例えば、顔料などを組成物中で分散させる用途、バインダーの用途で配合される。なお、主に顔料などを分散させるために用いられる樹脂を分散剤ともいう。ただし、樹脂のこのような用途は一例であって、このような用途以外を目的で使用することもできる。
樹脂の重量平均分子量(Mw)は、2000~100,000が好ましい。下限は、3,000以上が好ましく、5,000以上がより好ましい。
また、樹脂の数平均分子量(Mn)は、1000~20,000が好ましい。
本発明の着色組成物は、顔料を含む場合、分散剤を含有することが好ましい。
分散剤としては、高分子分散剤〔例えば、ポリアミドアミンとその塩、ポリカルボン酸とその塩、高分子量不飽和酸エステル、変性ポリウレタン、変性ポリエステル、変性ポリ(メタ)アクリレート、(メタ)アクリル系共重合体、ナフタレンスルホン酸ホルマリン縮合物〕、ポリオキシエチレンアルキルリン酸エステル、ポリオキシエチレンアルキルアミン、アルカノールアミン等が挙げられる。
高分子分散剤は、その構造から更に直鎖状高分子、末端変性型高分子、グラフト型高分子、ブロック型高分子に分類することができる。
例えば、以下の樹脂が挙げられる。L1の波線は、窒素原子との結合部を表す。
本発明の着色組成物は、樹脂としてアルカリ可溶性樹脂を含有することができる。アルカリ可溶性樹脂を含有することにより、現像性及びパターン形成性が向上する。なお、アルカリ可溶性樹脂は、分散剤やバインダーとして用いることもできる。
アルカリ可溶性樹脂としては、線状有機高分子重合体であってもよく、分子(好ましくは、アクリル系共重合体、スチレン系共重合体を主鎖とする分子)中に少なくとも1つのアルカリ可溶性を促進する基を有するアルカリ可溶性樹脂の中から適宜選択することができる。
アルカリ可溶性を促進する基(以下、酸基ともいう)としては、例えば、カルボキシ基、リン酸基、スルホン酸基、フェノール性ヒドロキシ基などが挙げられるが、有機溶剤に可溶で弱アルカリ水溶液により現像可能なものが好ましく、(メタ)アクリル酸が特に好ましいものとして挙げられる。これら酸基は、1種のみであってもよいし、2種以上であってもよい。
重合性基を含有するアルカリ可溶性樹脂としては、ダイヤナールNRシリーズ(三菱レイヨン株式会社製)、Photomer6173(COOH含有 polyurethane acrylic oligomer.Diamond Shamrock Co.,Ltd.製)、ビスコートR-264、KSレジスト106(いずれも大阪有機化学工業株式会社製)、サイクロマーPシリーズ(例えば、ACA230AA)、プラクセル CF200シリーズ(いずれも(株)ダイセル製)、Ebecryl3800(ダイセルユーシービー株式会社製)、アクリキュアーRD-F8(日本触媒社製)などが挙げられる。
また、市販品としては、例えばFF-426(藤倉化成社製)などを用いることもできる。
さらに、特開2012-32767号公報の段落番号0029~0063に記載の共重合体(B)及び実施例で用いられているアルカリ可溶性樹脂、特開2012-208474号公報の段落番号0088~0098に記載のバインダー樹脂及び実施例で用いられているバインダー樹脂、特開2012-137531号公報の段落番号0022~0032に記載のバインダー樹脂及び実施例で用いられているバインダー樹脂、特開2013-024934号公報の段落番号0132~0143に記載のバインダー樹脂及び実施例で用いられているバインダー樹脂、特開2011-242752号公報の段落番号0092~0098及び実施例で用いられているバインダー樹脂、特開2012-032770号公報の段落番号0030~0072に記載のバインダー樹脂を用いることもできる。これらの内容は本明細書に組み込まれる。
本発明の着色組成物は、顔料誘導体を含有することができる。顔料誘導体としては、顔料の一部分を、酸性基、塩基性基又はフタルイミドメチル基で置換した構造を有する化合物が挙げられる。顔料誘導体は、分散性及び分散安定性の観点から、酸性基又は塩基性基を有する顔料誘導体を含有することが好ましい。
顔料誘導体を構成するための有機顔料としては、ピロロピロール顔料、ジケトピロロピロール顔料、アゾ顔料、フタロシアニン顔料、アントラキノン顔料、キナクリドン顔料、ジオキサジン顔料、ペリノン顔料、ペリレン顔料、チオインジゴ顔料、イソインドリン顔料、イソインドリノン顔料、キノフタロン顔料、スレン顔料、金属錯体顔料等が挙げられる。
また、顔料誘導体が有する酸性基としては、スルホン酸、カルボン酸及びその4級アンモニウム塩が好ましく、カルボン酸基及びスルホン酸基がさらに好ましく、スルホン酸基が特に好ましい。顔料誘導体が有する塩基性基としては、アミノ基が好ましく、特に三級アミノ基が好ましい。
顔料誘導体としては、ピロロピロール顔料誘導体、キノリン顔料誘導体、ベンズイミダゾロン顔料誘導体、イソインドリン顔料誘導体が好ましく、ピロロピロール顔料誘導体が特に好ましい。
本発明の着色組成物は、有機溶剤を含有することができる。有機溶剤は、各成分の溶解性や着色組成物の塗布性を満足すれば基本的には特に制限はないが、着色組成物の塗布性、安全性を考慮して選ばれることが好ましい。
エステル類として、例えば、酢酸エチル、酢酸-n-ブチル、酢酸イソブチル、酢酸シクロヘキシル、ギ酸アミル、酢酸イソアミル、酢酸イソブチル、プロピオン酸ブチル、酪酸イソプロピル、酪酸エチル、酪酸ブチル、乳酸メチル、乳酸エチル、オキシ酢酸アルキル(例えば、オキシ酢酸メチル、オキシ酢酸エチル、オキシ酢酸ブチル(例えば、メトキシ酢酸メチル、メトキシ酢酸エチル、メトキシ酢酸ブチル、エトキシ酢酸メチル、エトキシ酢酸エチル等))、3-アルキルオキシプロピオン酸アルキルエステル類(例えば、3-アルキルオキシプロピオン酸メチル、3-アルキルオキシプロピオン酸エチル等(例えば、3-メトキシプロピオン酸メチル、3-メトキシプロピオン酸エチル、3-エトキシプロピオン酸メチル、3-エトキシプロピオン酸エチル等))、2-アルキルオキシプロピオン酸アルキルエステル類(例:2-アルキルオキシプロピオン酸メチル、2-アルキルオキシプロピオン酸エチル、2-アルキルオキシプロピオン酸プロピル等(例えば、2-メトキシプロピオン酸メチル、2-メトキシプロピオン酸エチル、2-メトキシプロピオン酸プロピル、2-エトキシプロピオン酸メチル、2-エトキシプロピオン酸エチル))、2-アルキルオキシ-2-メチルプロピオン酸メチル及び2-アルキルオキシ-2-メチルプロピオン酸エチル(例えば、2-メトキシ-2-メチルプロピオン酸メチル、2-エトキシ-2-メチルプロピオン酸エチル等)、ピルビン酸メチル、ピルビン酸エチル、ピルビン酸プロピル、アセト酢酸メチル、アセト酢酸エチル、2-オキソブタン酸メチル、2-オキソブタン酸エチル等、並びに、エーテル類として、例えば、ジエチレングリコールジメチルエーテル、テトラヒドロフラン、エチレングリコールモノメチルエーテル、エチレングリコールモノエチルエーテル、メチルセロソルブアセテート、エチルセロソルブアセテート、ジエチレングリコールモノメチルエーテル、ジエチレングリコールモノエチルエーテル、ジエチレングリコールモノブチルエーテル、プロピレングリコールモノメチルエーテル、プロピレングリコールモノメチルエーテルアセテート、プロピレングリコールモノエチルエーテルアセテート、プロピレングリコールモノプロピルエーテルアセテート等、並びに、ケトン類として、例えば、メチルエチルケトン、シクロヘキサノン、シクロペンタノン、2-ヘプタノン、3-ヘプタノン等、並びに、芳香族炭化水素類として、例えば、トルエン、キシレン等が好適に挙げられる。
有機溶剤を2種以上組みあわせて用いる場合、特に好ましくは、上記の3-エトキシプロピオン酸メチル、3-エトキシプロピオン酸エチル、エチルセロソルブアセテート、乳酸エチル、ジエチレングリコールジメチルエーテル、酢酸ブチル、3-メトキシプロピオン酸メチル、2-ヘプタノン、シクロヘキサノン、エチルカルビトールアセテート、ブチルカルビトールアセテート、プロピレングリコールメチルエーテル、及びプロピレングリコールメチルエーテルアセテートから選択される2種以上で構成される混合溶液である。
本発明において、有機溶剤は、過酸化物の含有率が0.8mmol/L以下であることが好ましく、過酸化物を実質的に含まないことがより好ましい。
本発明の着色組成物は、着色組成物の製造中又は保存中において、光ラジカル重合性化合物の不要な熱重合を阻止するために、重合禁止剤を含有させてもよい。
重合禁止剤としては、ハイドロキノン、パラメトキシフェノール、ジ-tert-ブチル-パラクレゾール、ピロガロール、tert-ブチルカテコール、ベンゾキノン、4,4’-チオビス(3-メチル-6-tert-ブチルフェノール)、2,2’-メチレンビス(4-メチル-6-t-ブチルフェノール)、N-ニトロソフェニルヒドロキシアミン第一セリウム塩等が挙げられる。中でも、パラメトキシフェノールが好ましい。
重合禁止剤の添加量は、着色組成物の質量に対して、0.01~5質量%が好ましい。
本発明の着色組成物は、基板密着剤を含有することができる。
基板密着剤としては、シラン系カップリング剤、チタネート系カップリング剤、アルミニウム系カップリング剤を用いることが好ましい。
シラン系カップリング剤としては、例えば、γ-メタクリロキシプロピルトリメトキシシラン、γ-メタクリロキシプロピルトリエトキシシラン、γ-アクリロキシプロピルトリメトキシシラン、γ-アクリロキシプロピルトリエトキシシラン、γ-メルカプトプロピルトリメトキシシラン、γ-アミノプロピルトリエトキシシラン、フェニルトリメトキシシラン等が挙げられる。中でも、基板密着剤としては、γ-メタクリロキシプロピルトリメトキシシランが好ましい。
本発明の着色組成物は、塗布性をより向上させる観点から、各種の界面活性剤を含有させてもよい。界面活性剤としては、フッ素系界面活性剤、ノニオン系界面活性剤、カチオン系界面活性剤、アニオン系界面活性剤、シリコーン系界面活性剤などの各種界面活性剤を使用できる。
即ち、フッ素系界面活性剤を含有する着色組成物を適用した塗布液を用いて膜形成する場合においては、被塗布面と塗布液との界面張力が低下して、被塗布面への濡れ性が改善され、被塗布面への塗布性が向上する。このため、厚みムラの小さい均一厚の膜形成をより好適に行うことができる。
フッ素系界面活性剤は、フッ素原子を有する(メタ)アクリレート化合物に由来する繰り返し単位と、アルキレンオキシ基(好ましくはエチレンオキシ基、プロピレンオキシ基)を2以上(好ましくは5以上)有する(メタ)アクリレート化合物に由来する繰り返し単位とを、含む含フッ素高分子化合物も好ましく用いることができ、下記化合物も本発明で用いられるフッ素系界面活性剤として例示される。
界面活性剤の添加量は、着色組成物の全質量に対して、0.001~2.0質量%が好ましく0.005~1.0質量%がより好ましい。
本発明の着色組成物は、アゾ系化合物や過酸化物系化合物などの熱重合開始剤、熱重合成分、アルコキシベンゾフェノン等の紫外線吸収剤、ジオクチルフタレートなどの可塑剤、低分子量有機カルボン酸などの現像性向上剤、その他充填剤、酸化防止剤、凝集防止剤などの各種添加物を含有することができる。
また、現像後に後加熱で膜の硬化度を上げるために熱硬化剤を添加することができる。熱硬化剤としては、アゾ化合物、過酸化物等の熱重合開始剤、ノボラック樹脂、レゾール樹脂、エポキシ化合物、スチレン化合物等があげられる。
本発明の着色組成物は、前述の成分を混合して調製できる。
着色組成物の調製に際しては、各成分を一括配合してもよいし、各成分を溶剤に溶解・分散した後に逐次配合してもよい。また、配合する際の投入順序や作業条件は特に制約を受けない。例えば、全成分を同時に溶剤に溶解・分散して組成物を調製してもよいし、必要に応じては、各成分を適宜2つ以上の溶液・分散液としておいて、使用時(塗布時)にこれらを混合して組成物として調製してもよい。
フィルタの孔径は、0.01~7.0μm程度が適しており、好ましくは0.01~3.0μm程度、さらに好ましくは0.05~0.5μm程度である。この範囲とすることにより、後工程において均一及び平滑な組成物の調製を阻害する、微細な異物を確実に除去することが可能となる。また、ファイバ状のろ材を用いることも好ましく、ろ材としては例えばポリプロピレンファイバ、ナイロンファイバ、グラスファイバ等が挙げられ、具体的にはロキテクノ社製のSBPタイプシリーズ(SBP008など)、TPRタイプシリーズ(TPR002、TPR005など)、SHPXタイプシリーズ(SHPX003など)のフィルタカートリッジを用いることができる。
また、上述した範囲内で異なる孔径の第1のフィルタを組み合わせてもよい。ここでの孔径は、フィルタメーカーの公称値を参照することができる。市販のフィルタとしては、例えば、日本ポール株式会社(DFA4201NXEYなど)、アドバンテック東洋株式会社、日本インテグリス株式会社(旧日本マイクロリス株式会社)又は株式会社キッツマイクロフィルタ等が提供する各種フィルタの中から選択することができる。
第2のフィルタは、上述した第1のフィルタと同様の材料等で形成されたものを使用することができる。
例えば、第1のフィルタでのフィルタリングは、分散液のみで行い、他の成分を混合した後で、第2のフィルタでのフィルタリングを行ってもよい。
次に、本発明の硬化膜及びカラーフィルタについて説明する。
本発明の硬化膜は、上述した本発明の着色組成物を硬化してなるものである。本発明の膜は、カラーフィルタとして好ましく用いられる。
また、本発明のカラーフィルタは、本発明の硬化膜を有するものである。
次に、本発明のパターン形成方法について説明する。
本発明のパターン形成方法は、着色組成物を用いて支持体上に着色組成物層を形成する工程と、着色組成物層をパターン状に露光する工程と、未露光部を現像除去して着色パターンを形成する工程とを含む。
このようなパターン形成方法は、カラーフィルタの製造に用いられる。すなわち、本発明では、本発明のパターン形成方法を含むカラーフィルタの製造方法についても開示する。以下これらの詳細を述べる。
着色組成物層を形成する工程では、支持体上に、本発明の着色組成物を適用して着色組成物層を形成する。
プリベーク温度は、150℃以下が好ましく、120℃以下がより好ましく、100℃以下が更に好ましく、90℃以下が特に好ましい。下限は、例えば、50℃以上とすることができる。
また、酸発生剤として熱酸発生剤を用いた場合、プリベークは、熱酸発生剤の熱分解温度未満の温度(好ましくは、熱酸発生剤の熱分解温度よりも30~100℃低い温度)で行うことが好ましい。これによれば、プリベーク時における、熱酸発生剤から酸の発生を抑制できる。
プリベーク時間は、10秒~300秒が好ましく、40~250秒がより好ましく、80~220秒がさらに好ましい。加熱は、ホットプレート、オーブン等で行うことができる。
次に、着色組成物層を、パターン状に露光する(露光工程)。例えば、着色組成物層に対し、ステッパー等の露光装置を用いて、所定のマスクパターンを有するマスクを介して露光することで、パターン露光することができる。これにより、露光部分を硬化することができる。
露光に際して用いることができる放射線(光)としては、g線、i線等の紫外線が好ましく、i線がより好ましい。
また、酸発生剤として光酸発生剤を用いた場合、露光に用いる光の波長と、光酸発生剤の極大吸収波長との差の絶対値は、30~200nmが好ましく、50~150nmがより好ましい。これによれば、露光時における、光酸発生剤から酸の発生を抑制できる。
照射量(露光量)は30~1500mJ/cm2が好ましく、50~1000mJ/cm2がより好ましく、80~500mJ/cm2が特に好ましい。
次に、未露光部を現像除去してパターンを形成する。未露光部の現像除去は、現像液を用いて行うことができる。これにより、露光工程における未露光部の着色組成物層が現像液に溶出し、光硬化した部分だけが残る。
現像方式は、デイップ方式、シャワー方式、スプレー方式、パドル方式などいずれでもよく、これらにスウィング方式、スピン方式、超音波方式などを組み合わせてもよい。
現像液に触れる前に、被現像面を予め水等で湿しておいて、現像むらを防ぐこともできる。
現像液としては、下地の固体撮像素子や回路などにダメージを起さない、有機アルカリ現像液が望ましい。
現像液の温度は、例えば、20~30℃が好ましい。現像時間は、20~180秒が好ましい。また、残渣除去性を向上するため、現像液を60秒ごとに振り切り、さらに新たに現像液を供給する工程を数回繰り返してもよい。
また、現像液には無機アルカリを用いてもよい。無機アルカリとしては、例えば、水酸化ナトリウム、水酸化カリウム、炭酸ナトリウム、炭酸水素ナトリウム、ケイ酸ナトリウム、メタケイ酸ナトリウムなどが好ましい。
また、現像液には、界面活性剤を用いてもよい。界面活性剤の例としては、上述した着色組成物で説明した界面活性剤が挙げられ、ノニオン系界面活性剤が好ましい。現像液が界面活性剤を含有する場合、界面活性剤の含有量は、現像液の全質量に対して、0.001~2.0質量%が好ましく、より好ましくは0.01~1.0質量%である。
なお、このようなアルカリ性水溶液からなる現像液を使用した場合には、一般に現像後純水で洗浄(リンス)することが好ましい。
特に、本発明の着色組成物において、酸発生剤として熱酸発生剤を用いた場合は、現像後の着色パターンに対し、加熱処理(ポストベーク)を行うことが好ましい。
また、本発明の着色組成物において、熱酸発生剤として光酸発生剤を用いた場合は、現像後の着色パターンに対し、後露光処理を行うことが好ましい。
また、酸発生剤として熱酸発生剤を用いた場合は、酸発生剤の熱分解温度以上の温度で行うこともできる。より好ましくは、酸発生剤の熱分解温度よりも30℃以上高い温度であり、さらに好ましくは、酸発生剤の熱分解温度よりも50℃以上高い温度である。上限は、例えば、熱分解温度+80℃以下が好ましい。
ポストベーク処理は、現像後の膜を、上記条件になるようにホットプレートやコンベクションオーブン(熱風循環式乾燥機)、高周波加熱機等の加熱手段を用いて、連続式あるいはバッチ式で行うことができる。
酸発生剤として熱酸発生剤を用いた場合、ポストベークにより、現像後の着色層中に酸を発生させて、混色のないカラーフィルタを得ることができる。
また、酸発生剤として光酸発生剤を用いた場合は、光酸発生剤が極大吸収波長に近い波長の光を選択することが好ましい。例えば、後露光に用いる光の波長と、光酸発生剤の極大吸収波長との差の絶対値は、30nm以下が好ましく、20nm以下がより好ましい。
また、上述した現像工程前の露光で用いられる光の波長と、現像工程後の露光(後露光)で用いられる光の波長の差の絶対値は、50~200nmが好ましく、100~150nmがより好ましい。
また、後露光での露光量は、10~100000mJ/cm2が好ましく、50~50000mJ/cm2がより好ましく、100~10000mJ/cm2が特に好ましい。
具体的な一例をあげると、上記露光工程では、波長350nmを超え380nm以下の光(好ましくは、波長355~370nmの光、特に好ましくはi線)で露光を行い、後露光は、波長254~350nmの光(好ましくは波長254nmの光)で露光を行うことが好ましい。
酸発生剤として光酸発生剤を用いた場合、現像工程前及び現像工程後の2段階で着色組成物層を露光することにより、最初の露光で着色組成物を適度に硬化させることができ、現像後の露光で着色層中に酸を発生させ、混色のないカラーフィルタを得ることができる。
上記のうち、アルキレングリコールモノアルキルエーテルカルボキシレート及びアルキレングリコールモノアルキルエーテルが好ましい。
これら溶媒は、単独で用いても2種以上を混合して用いてもよい。2種以上を混合する場合、ヒドロキシ基を有する溶剤とヒドロキシ基を有しない溶剤とを混合することが好ましい。ヒドロキシ基を有する溶剤とヒドロキシ基を有しない溶剤との質量比は、1/99~99/1、好ましくは10/90~90/10、さらに好ましくは20/80~80/20である。プロピレングリコールモノメチルエーテルアセテート(PGMEA)とプロピレングリコールモノメチルエーテル(PGME)の混合溶剤で、その比率が60/40であることが特に好ましい。なお、汚染物に対する洗浄液の浸透性を向上させるために、洗浄液には上述した本発明の着色組成物に関する界面活性剤を添加してもよい。
また、着色パターン(着色画素)のサイズ(パターン幅)としては、2.5μm以下が好ましく、2.0μm以下がより好ましく、1.7μm以下が特に好ましい。下限は、例えば0.1μm以上とすることができ、0.2μm以上とすることもできる。
本発明の固体撮像素子は、上述した本発明のカラーフィルタを備える。本発明の固体撮像素子の構成としては、本発明のカラーフィルタを備え、固体撮像素子として機能する構成であれば特に限定はないが、例えば、以下のような構成が挙げられる。
さらに、デバイス保護膜上であってカラーフィルタの下(支持体に近い側)に集光手段(例えば、マイクロレンズ等。以下同じ)を有する構成や、カラーフィルタ上に集光手段を有する構成等であってもよい。
本発明のカラーフィルタは、液晶表示装置や有機エレクトロルミネッセンス表示装置などの、画像表示装置に用いることができる。
また、本発明におけるカラーフィルタは、明るく高精細なCOA(Color-filter On Array)方式にも供することが可能である。
これらの画像表示方式については、例えば、「EL、PDP、LCDディスプレイ-技術と市場の最新動向-(東レリサーチセンター調査研究部門 2001年発行)」の43ページなどに記載されている。
バックライトに関しては、SID meeting Digest 1380(2005)(A.Konno et.al)や、月刊ディスプレイ 2005年12月号の18~24ページ(島 康裕)、同25~30ページ(八木隆明)などに記載されている。
重量平均分子量は、以下の方法で測定した。
カラムの種類:東ソー製 TSKgel Super HZM-Hと、TOSOH TSKgel Super HZ4000と、TOSOH TSKgel Super HZ2000とを連結したカラム
展開溶媒:テトラヒドロフラン
カラム温度:40℃
流量(サンプル注入量):1.0μL(サンプル濃度:0.1質量%)
装置名:東ソー製 HLC-8220GPC
検出器:RI(屈折率)検出器
検量線ベース樹脂:ポリスチレン樹脂
以下の実施例及び比較例で使用した原料は以下の通りである。
顔料としてピグメントブルー15:6 10質量部と、樹脂A(下記構造)を16.7質量部と、溶剤としてプロピレングリコールモノメチルエーテルアセテート(PGMEA) 73.3質量部とからなる混合液を、ビーズミルにより15時間混合及び分散して、顔料分散液Aを調製した。
ピグメントバイオレット23 10質量部と、樹脂Aを16.7部と、溶剤としてPGMEA 73.3質量部とからなる混合液を、ビーズミルにより15時間混合及び分散して、顔料分散液Bを調製した。
・樹脂A:下記構造(L1の波線は、硫黄原子との結合部を表す。a=3.5、b=2.5、酸価=30mgKOH/g、Mw=2000、固形分30質量%PGMEA溶液)
・光酸発生剤A:DS-101(スルホン酸エステル化合物)、みどり化学製、pKaが4以下の酸を発生する化合物
・光酸発生剤B:MBZ-201(スルホン酸エステル化合物)、みどり化学製、pKaが4以下の酸を発生する化合物
・光酸発生剤C:PI-105(スルホン酸エステル化合物)、みどり化学製、pKaが4以下の酸を発生する化合物
・光酸発生剤D:PAI-101(スルホン酸エステル化合物)、みどり化学製、pKaが4以下の酸を発生する化合物
・光酸発生剤E:TAZ-101(トリアジン化合物)、みどり化学製、pKaが4以下の酸を発生する化合物
・光酸発生剤F:TAZ-109(トリアジン化合物)、みどり化学製、pKaが4以下の酸を発生する化合物
・光酸発生剤G:TAZ-201(トリアジン化合物)、みどり化学製、pKaが4以下の酸を発生する化合物
・熱酸発生剤A:テトラエチレングリコールビス(パラトルエンスルホナート)、TCI製、分子量=502、pKaが4以下の酸を発生する化合物
熱酸発生剤B パラトルエンスルホン酸ブチル:TCI製、分子量=228、pKaが4以下の酸を発生する化合物
・熱酸発生剤C:下記化合物(分子量=443、pKaが4以下の酸を発生する化合物)
・熱酸発生剤E:NDI-101(スルホンイミド化合物)、みどり化学製、pKaが4以下の酸を発生する化合物
・ラジカル重合性化合物:KAYARAD DPHA (日本化薬(株)製、モノマー、分子量=562)
・硬化性化合物:jER1031S(三菱化学社製)
・光ラジカル重合開始剤:IRGACURE OXE-01(BASF社製)、極大吸収波長=325nm
・界面活性剤:下記混合物(Mw=14000)
<ネガ型硬化性着色組成物の調製>
表1に示す各成分を混合して、ネガ型硬化性着色組成物を得た。
ネガ型硬化性着色組成物を、下塗り層付ガラスウエハ上に、乾燥膜厚が0.6μmになるようにスピンコーターを用いて塗布し、100℃のホットプレートを用いて120秒間加熱処理(プリベーク)を行い、ガラスウエハ上に着色膜を形成した。
次いで、この着色膜に対して、1μmの正方ピクセルが配列されたマスクパターンを介してi線ステッパー露光装置(キャノン(株)製、FPA-3000i5+)を使用して、365nmの波長の光(i線)で、200mJ/cm2の露光量で露光した。
次いで、露光された塗布膜が形成されているガラスウェハを、水酸化テトラメチルアンモニウム(TMAH)0.3%水溶液を用い、23℃で60秒間パドル現像を行った。
その後、スピンシャワーにてリンスを行い、さらに純水にて水洗し、200℃のホットプレートを用いて300秒間加熱処理(ポストベーク)を行い、硬化膜(カラーフィルタ)を得た。
得られた硬化膜の分光特性として、MCPD-3000(大塚電子(株)製)を使用して、400~700nmの波長範囲における最大透過率T0を測定した。
次に、各硬化膜上に、以下に示す混色評価用赤色着色組成物を、乾燥後の膜厚が0.6μmになるようにスピン塗布し、100℃で120秒間加熱処理(プリベーク)を行った。次いで、i線ステッパー露光装置での露光を行わずに、水酸化テトラメチルアンモニウム(TMAH)0.3質量%水溶液を用い、23℃で60秒間シャワー現像を行った。その後、純水を用いたスピンシャワーにてリンスを行い、混色評価用赤色着色組成物を現像除去した。
混色評価用赤色着色組成物を現像除去後の硬化膜の分光特性として、MCPD-3000(大塚電子(株)製)を使用して、400~700nmの波長範囲における最大透過率T1を測定した。
最大透過率変化(ΔT=T0-T1)を算出し、以下の基準に基づいて判定した。ΔTが小さいほど混色が少なく、より望ましい。
-評価基準-
5:最大透過率変化が1%未満である。
4:最大透過率変化が1%以上3%未満である。
3:最大透過率変化が3%以上5%未満である。
2:最大透過率変化が5%以上10%未満である。
1:最大透過率変化が10%以上である。
<混色評価用赤色着色組成物>
C.I.ピグメントレッド254 9.9質量部、C.I.ピグメントイエロー139 4.4質量部、顔料誘導体A 1.4質量部、分散剤Aを30質量%含有するPGMEA溶液 15.6質量部、PGMEA 41.5質量部とからなる混合液を、ビーズミルにより15時間混合・分散して、Red顔料分散液を調製した。
上記Red顔料分散液 37.7質量部、上記アルカリ可溶性樹脂1 5.6部、上記ラジカル重合性化合物1 7質量部、上記光ラジカル重合開始剤1 3.92質量部、上記界面活性剤1 0.28質量部、PGMEA 51.47質量部を均一に混合し、混色評価用Red顔料含有組成物を調製した。
・顔料誘導体A:以下に示す構造
混色試験後の硬化膜の表面(測定範囲:5cm×5cm)を、光学顕微鏡(倍率:100倍)を用い、観察した。
-評価基準-
5:表面に異常は見られない(表面が滑らか)。
4:表面にごく小さな点状の凹凸物が数個見られる。
3:表面に小さな点状の凹凸物が数十個見られる。
2:表面に凹凸物が多く付着している。
1:面内一面に凹凸物が付着している。
得られた硬化膜の透過光を、分光光度計MCPD-3000(大塚電子(株)製)で測定した。
-評価基準-
5:波長500nmの透過率が40%未満で、波長450nmの透過率が85%以上である。
4:波長500nmの透過率が40%未満で、波長450nmの透過率が82.5%以上85%未満である。
3:波長500nmの透過率が40%未満で、波長450nmの透過率が80%以上82.5%未満である。
2:波長500nmの透過率が40%未満で、波長450nmの透過率が77.5%以上80%未満である。
1:波長500nmの透過率が40%未満で、波長450nmの透過率が77.5%未満である。又は、波長500nmの透過率が40%を超える。
一方、比較例は、混色が生じ易かった。更には、混色試験後の膜面が実施例に比べて劣っていた。
<ネガ型硬化性着色組成物の調製>
表2、3に示す各成分を混合して、ネガ型硬化性着色組成物を得た。
ネガ型硬化性着色組成物を、下塗り層付ガラスウエハ上に、乾燥膜厚が0.6μmになるようにスピンコーターを用いて塗布し、100℃のホットプレートを用いて120秒間加熱処理(プリベーク)を行い、ガラスウエハ上に着色膜を形成した。
次いで、この着色膜に対して、1μmの正方ピクセルが配列されたマスクパターンを介してi線ステッパー露光装置(キャノン(株)製のFPA-3000i5+)を使用して、365nmの波長の光(i線)で、200mJ/cm2の露光量で露光した。
次いで、露光された塗布膜が形成されているガラスウェハを、水酸化テトラメチルアンモニウム(TMAH) 0.3%水溶液を用い、23℃で60秒間パドル現像を行った。
次いで、スピンシャワーにてリンスを行い、さらに純水にて水洗した。
次いで、現像後の塗布膜に対して、UV照射装置(ウシオ電機(株)製のUMA-802-HC552FFAL)を使用して、5000mJ/cm2の露光量で露光した後硬化膜(カラーフィルタ)を得た。
一方、比較例は、混色が生じ易かった。更には、混色試験後の膜面が実施例に比べて劣っていた。
Claims (18)
- 着色剤と、酸発生剤と、光ラジカル重合性化合物と、光ラジカル重合開始剤とを含む、ネガ型硬化性着色組成物。
- 前記酸発生剤は、熱酸発生剤を含む、請求項1に記載のネガ型硬化性着色組成物。
- 前記酸発生剤は、pKaが4以下の酸を発生する化合物である、請求項1又は2に記載のネガ型硬化性着色組成物。
- 前記酸発生剤の分子量が200~1000である、請求項1~3のいずれか1項に記載のネガ型硬化性着色組成物。
- 前記酸発生剤の含有量が、前記ネガ型硬化性着色組成物の全固形分に対して、1~20質量%である、請求項1~4のいずれか1項に記載のネガ型硬化性着色組成物。
- 前記酸発生剤と前記光ラジカル重合性化合物との質量比が、酸発生剤:光ラジカル重合性化合物=1:1~1:5である、請求項1~5のいずれか1項に記載のネガ型硬化性着色組成物。
- 前記着色剤は、カチオンとアニオンとを有する色素を含む、請求項1~6のいずれか1項に記載のネガ型硬化性着色組成物。
- 前記カチオンと、前記アニオンとが、共有結合を介して結合している、請求項7に記載のネガ型硬化性着色組成物。
- 前記カチオンは、キサンテン構造を有するカチオンである、請求項7又は8に記載のネガ型硬化性着色組成物。
- 前記アニオンが、ビス(スルホニル)イミドアニオン、トリス(スルホニル)メチドアニオン及びテトラアリールボレートアニオンから選択される少なくとも一種である、請求項7~10のいずれか1項に記載のネガ型硬化性着色組成物。
- 前記着色剤は、色素多量体を含む、請求項1~11のいずれか1項に記載のネガ型硬化性着色組成物。
- 請求項1~12のいずれか1項に記載のネガ型硬化性着色組成物を用いてなる硬化膜。
- 請求項13に硬化膜を有するカラーフィルタ。
- 請求項1~12のいずれか1項に記載のネガ型硬化性着色組成物を用いて支持体上にネガ型硬化性着色組成物層を形成する工程と、
前記ネガ型硬化性着色組成物をパターン状に露光する工程と、
未露光部を現像除去して着色パターンを形成する工程と、
を含むパターン形成方法。 - 前記ネガ型硬化性着色組成物が、光ラジカル重合性化合物と、光ラジカル重合開始剤と、熱酸発生剤とを含み、
前記着色パターンを形成する工程の後、前記着色パターンを加熱する工程を更に有する、請求項15に記載のパターン形成方法。 - 前記ネガ型硬化性着色組成物が、光ラジカル重合性化合物と、光ラジカル重合開始剤と、光酸発生剤とを含み、
前記着色パターンを形成する工程の後、前記着色パターンを露光する工程を更に有する、請求項15又は16に記載のパターン形成方法。 - 請求項14に記載のカラーフィルタを有する装置であって、前記装置が、固体撮像素子又は画像表示装置である、装置。
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