WO2016092916A1

WO2016092916A1 - Probe pin and electronic device with same

Info

Publication number: WO2016092916A1
Application number: PCT/JP2015/074644
Authority: WO
Inventors: 宏真寺西; 貴浩酒井
Original assignee: オムロン株式会社
Priority date: 2014-12-12
Filing date: 2015-08-31
Publication date: 2016-06-16
Also published as: TWI586966B; TW201625959A; JP6515516B2; JP2016114402A; CN106796249A

Abstract

A probe pin (30) is provided with: at least one coiled spring (60) extending and contracting along the centerline; a first contact point (46) disposed on a first straight line (A3) parallel to the centerline of the coiled spring (60); and a second contact point (54) disposed on a second straight line (A1) coinciding with the centerline of the coiled spring (60). The first and second contact points (46, 54) are supported so as to be capable of being reciprocated by the force of the coiled spring (60) and are conducted directly to each other.

Description

Probe pin and electronic device including the same

The present invention relates to a probe pin and an electronic device provided with the probe pin.

In a semiconductor device or LSI (Large Scale Integration) or the like, an energization test is performed using an electronic device equipped with a probe pin in the manufacturing process to check whether or not it functions normally. In general, an electronic device used in this energization test uses a so-called linear probe pin in which contacts at both ends reciprocate along the same straight line.

By the way, the above-described energization test is performed by electrically connecting an inspection object such as a semiconductor device and the inspection device with a probe pin. However, with the diversification of inspection apparatuses and inspection objects, it is difficult to connect the inspection object and the inspection apparatus in a straight line, and cases in which it is difficult to cope with the linear probe pins have increased. As one method for solving such a problem, a so-called offset type probe pin is proposed in which the contacts at both ends reciprocate along different straight lines.

As the offset type probe pin, for example, there is one described in Patent Document 1. The probe pin includes a contact portion that comes into contact with the external terminal, a bellows-shaped elastic portion that is continuous with the contact portion, a connection portion that is continuous with the elastic portion, and a connection terminal that is provided in the connection portion. Then, the connection terminal is offset, that is, shifted so that the contact portion and the connection terminal do not reciprocate on the same straight line.

JP 2004-138405 A

However, the above-described probe pin has a problem that if the size of the probe pin is reduced, the interval between the elastic portions is narrow, and if an attempt is made to obtain a sufficient stroke, the elastic portion becomes longer.

In view of the above-described problems, an object of the present invention is to provide a probe pin suitable for downsizing and an electronic device including the probe pin.

In order to solve the above-described problem, a probe pin according to the present invention includes at least one coil spring that expands and contracts along a center line, a first contact disposed on a first straight line parallel to the center line, and the center. A second contact disposed on a second straight line that coincides with the line, and the first and second contacts are supported so as to be reciprocally movable through the spring force of the coil spring and directly to each other. Conducted.

According to the probe pin of the present invention, at least one coil spring that expands and contracts along the center line, a first contact disposed on a first straight line parallel to the center line, and a second straight line that matches the center line The first and second contacts are supported so as to be reciprocally movable through the spring force of the coil spring and are directly connected to each other. Thereby, the probe pin suitable for size reduction can be obtained.

As an embodiment of the present invention, one coil spring, a first insertion portion provided along one end of the coil spring and inserted into one end of the coil spring, and a first contact portion having the first contact point, An intermediate portion connected so as to intersect the first insertion portion and the first contact portion, and one end of the coil spring provided in the center line direction provided between the first insertion portion and the intermediate portion. A first plunger having a supporting portion that comes into contact; a second insertion portion that is inserted along the second straight line into the other end of the coil spring; a second contact portion having the second contact; It is good also as a structure provided with a 2nd plunger which has a support part which is provided between a 2nd insertion part and the said 2nd contact part, and contacts the other end of the centerline direction of the said coil spring.

According to the present embodiment, the first plunger has an intermediate portion connected so as to intersect the first insertion portion and the first contact portion. Thereby, the probe pin suitable for size reduction can be obtained.

As an embodiment of the present invention, the first insertion part, the first contact part, and the intermediate part may be configured to intersect at an angle greater than 0 degrees and 45 degrees or less.

According to this embodiment, when the probe pin is housed in the housing of the inspection unit as compared with the probe pin in which the first insertion portion, the first contact portion, and the intermediate portion intersect at an angle larger than 45 degrees. In addition, it is possible to reduce the distance that can be arranged without interfering with other adjacent probe pins. Further, when the first plunger is pressed into the housing in the state of being housed in the housing of the inspection unit, the load applied to the first plunger can be reduced, and a probe pin having the designed operation characteristics can be obtained.

As an embodiment of the present invention, the intermediate portion may have a curved shape.

According to the present embodiment, the intermediate portion can be configured in a curved shape. For this reason, the freedom degree of design of a probe pin can be expanded.

As an embodiment of the present invention, there are provided first and second coil springs that expand and contract along two parallel center lines, and the center line of the first coil spring is the first straight line, and the second coil The center line of the spring may be the second straight line.

According to the present embodiment, since two coil springs are provided, a higher spring load can be obtained compared to a probe pin having one coil spring.

As an embodiment of the present invention, a first insertion portion provided along the first straight line and inserted into one end of the first coil spring, and a first contact disposed on the first straight line is provided. A first plunger having a first contact portion and a support portion provided between the first insertion portion and the first contact portion and in contact with one end of the first coil spring in the center line direction; and the second straight line A second insertion portion provided along one end of the second coil spring, a second contact portion having the second contact disposed on the second straight line, the second insertion portion, and the second insertion portion. A second plunger provided between the second contact portion and a support portion in contact with one end in the center line direction of the second coil spring; and the first coil spring provided along the first straight line. A third insertion portion to be inserted at the end, and the second insertion portion provided along the second straight line. A third plunger having a fourth insertion portion inserted into the other end of the two-coil spring and an intermediate portion coupled to intersect the third insertion portion and the fourth insertion portion. It is good.

According to this embodiment, the third insertion portion provided along the first straight line and inserted into the other end of the first coil spring, and the third insertion portion provided along the second straight line and inserted into the other end of the second coil spring. A third plunger having a fourth insertion portion, and an intermediate portion coupled to the third insertion portion and the fourth insertion portion so as to obliquely intersect with each other. Thereby, the probe pin suitable for size reduction can be obtained.

As an embodiment of the present invention, the third insertion portion, the fourth insertion portion, and the intermediate portion may be configured to intersect at an angle greater than 0 degree and 45 degrees or less.

According to this embodiment, when the probe pin is housed in the housing of the inspection unit as compared with the probe pin in which the third insertion portion, the fourth contact portion, and the intermediate portion intersect at an angle greater than 45 degrees. In addition, it is possible to reduce the distance that can be arranged without interfering with other adjacent probe pins. Further, when the first and second plungers are pressed into the housing in the state of being accommodated in the housing of the inspection unit, a load applied to the third plunger can be reduced, and a probe pin having designed operating characteristics can be obtained. Can do.

As an embodiment of the present invention, the plunger may have a higher rigidity than the coil spring.

According to the present embodiment, it is possible to obtain a probe pin having operation characteristics as designed.

As an embodiment of the present invention, the plunger may be formed by electroforming.

According to this embodiment, a probe pin suitable for downsizing can be easily obtained.

Further, the electronic device according to the present invention includes the probe pin and a housing that can store the probe pin, and the first and second plungers are urged to the housing by the coil spring.

According to the electronic device of the present invention, an electronic device provided with a probe pin suitable for miniaturization can be obtained.

It is a perspective view of an example of the inspection unit provided with the probe pin of a 1st embodiment of the present invention. It is a perspective view which shows the state which removed a part of test | inspection unit shown in FIG. FIG. 3 is a sectional view taken along line III-III in FIG. It is a perspective view of the probe pin of a 1st embodiment of the present invention. FIG. 5 is a V arrow view of the probe pin shown in FIG. 4. It is VI arrow directional view of the probe pin shown in FIG. FIG. 5 is an exploded perspective view of the probe pin shown in FIG. 4. It is a perspective view of an example of the inspection unit provided with the probe pin of a 2nd embodiment of the present invention. It is a perspective view which shows the state which removed a part of test | inspection unit shown in FIG. It is a perspective view of the probe pin of 2nd Embodiment of this invention. It is a XI arrow line view of the probe pin shown in FIG. It is a XII arrow directional view of the probe pin shown in FIG. It is a disassembled perspective view of the probe pin shown in FIG. It is a perspective view of an example of the inspection unit provided with the probe pin of a 3rd embodiment of the present invention. It is a perspective view which shows the state which removed a part of test | inspection unit shown in FIG. It is a perspective view of the probe pin of 3rd Embodiment of this invention. It is a XVII arrow directional view of the probe pin shown in FIG. It is a XVIII arrow directional view of the probe pin shown in FIG. FIG. 17 is an exploded perspective view of the probe pin shown in FIG. 16. It is a perspective view of an example of the inspection unit provided with the probe pin of a 4th embodiment of the present invention. It is a perspective view which shows the state which removed a part of test | inspection unit shown in FIG. FIG. 21 is a cross-sectional view taken along line XXII-XXII shown in FIG. It is a perspective view of the probe pin of 4th Embodiment of this invention. It is a XXIV arrow directional view of the probe pin shown in FIG. It is a XXV arrow directional view of the probe pin shown in FIG. It is a disassembled perspective view of the probe pin shown in FIG. It is a perspective view of an example of the inspection unit provided with the probe pin of a 5th embodiment of the present invention. It is a perspective view which shows the state which removed a part of test | inspection unit shown in FIG. It is a perspective view of the probe pin of 5th Embodiment of this invention. FIG. 30 is a view taken along arrow XXX of the probe pin shown in FIG. 29. It is a XXXI arrow directional view of the probe pin shown in FIG. FIG. 30 is an exploded perspective view of the probe pin shown in FIG. 29.

Hereinafter, an embodiment of an inspection unit having a probe pin of the present invention will be described with reference to the accompanying drawings. In the following explanation, in describing the configuration shown in the drawings, terms indicating directions such as “up”, “down”, “left”, “right”, and other terms including them are used. However, the purpose of using these terms is to facilitate understanding of the embodiments through the drawings. Therefore, these terms do not necessarily indicate the direction in which the embodiments of the present invention are actually used, and the technical scope of the invention described in the claims is limitedly interpreted by these terms. Should not be done.

(First embodiment)
FIG. 1 is a perspective view of an example of an inspection unit including a probe pin according to the first embodiment of the present invention, and FIG. 2 is a perspective view showing a state where a part of the inspection unit shown in FIG. 1 is removed. FIG. 3 is a cross-sectional view taken along line III-III in FIG.

As shown in FIGS. 1 to 3, an inspection unit 1 as an example of an electronic device includes a housing and a probe pin 30 according to the first embodiment housed in the housing. The housing includes a housing body 10 and a housing cover 20 that covers the housing body 10, and the probe pins 30 are accommodated in the housing body 10.

As shown in FIG. 2, the housing body 10 has a planar shape in which four corners of a square are chamfered when viewed from above. A concave portion 11 is provided at substantially the center of the upper surface of the housing body 10.

A plurality of storage portions 12 for storing the probe pins 30 are provided on the bottom surface of the recess 11. The storage portion 12 has a circular shape in a plan view as viewed from the upper surface of the housing body 10, and is disposed away from each other along the X and Y directions shown in FIG. Further, contact openings 13 for projecting one end of the probe pin 30 are provided on the bottom surface of the storage portion 12, respectively. The contact opening 13 has a smaller diameter than the storage portion 12 in a top view. The X direction is a direction parallel to one side of the housing body 10 in a top view, and the Y direction is a direction orthogonal to the X direction.

As shown in FIG. 1, the housing cover 20 has the same planar shape as the housing body 10 in a top view. As shown in FIG. 3, the housing cover 20 is provided with a recess 21 at the approximate center of its bottom surface.

The recess 21 has an opening having the same shape as that of the recess 11 of the housing body 10, and is disposed so as to coincide with the recess 11 of the housing body 10 with the housing cover 20 attached to the housing body 10. Further, a plurality of contact openings 22 for projecting the other end of the probe pin 30 are provided on the bottom surface of the recess 21. The contact opening 22 is spaced apart from each other along the X and Y directions shown in FIG. 2, similarly to the storage portion 12 of the recess 11 of the housing body 10. Further, as shown in FIG. 3, the contact opening 22 has a straight line passing through the center of the contact opening 22 and orthogonal to the upper surface of the housing cover 20 in a state where the housing cover 20 is attached to the housing body 10. Are arranged so as to be parallel to a straight line passing through the center of the contact opening 13 provided on the bottom surface of the housing 10 and orthogonal to the bottom surface of the housing body 10 and having a distance L1.

FIG. 4 is a perspective view of the probe pin 30 of the first embodiment. 5 is a V arrow view of the probe pin of FIG. 4, and FIG. 6 is a VI arrow view of the probe pin of FIG. FIG. 7 is an exploded perspective view of the probe pin of FIG.

The probe pin 30 of the first embodiment includes a first plunger 40, a second plunger 50, and a coil spring 60, as shown in FIGS. The first and

second plungers

40 and 50 each have conductivity, and are formed by, for example, an electroforming method.

As shown in FIG. 7, the first plunger 40 has a sandwiched portion 41, an intermediate portion 42 that continues to the sandwiched portion 41, and a contact portion 43 that continues to the intermediate portion, and is substantially the same. The thickness H1 is formed. The sandwiched portion 41 is an example of a first insertion portion, and the contact portion 43 is an example of a first contact portion.

The sandwiched portion 41 has a rectangular flat plate shape, and a rectangular guide groove 44 is provided on the wide surface thereof. The guide groove 44 extends from the distal end (lower end in FIG. 7) of the sandwiched portion 41 toward the proximal end (upper end in FIG. 7) that is continuous with the intermediate portion 42. As shown in FIG. 7, the guide groove 44 has a width W <b> 7 that is larger than the thickness H <b> 2 of the second plunger 50.

The intermediate part 42 extends in a direction of 45 degrees with respect to the longitudinal direction of the sandwiched part 41. That is, as shown in FIG. 5, the center line A1 of the sandwiched portion 41 and the center line A2 of the intermediate portion 42 form an angle of θ1 = 45 degrees. A coil spring support portion 45, which is an example of a support portion that contacts one end of the coil spring 60 (upper end in FIG. 7), is provided on the sandwiched portion 41 side of the intermediate portion 42. The coil spring support portion 45 has a width W2 that is larger than the width W1 of the sandwiched portion 41. A housing support portion 47 is provided on the contact portion 43 side of the intermediate portion 42. As shown in FIG. 3, the housing support portion 47 protrudes from both sides of the contact portion 43 in the width W3 direction, and has a width W6 larger than the diameter of the contact opening 22 of the housing cover 20. The center line A1 of the sandwiched portion 41 coincides with the center line C1 of the coil spring 60.

The contact portion 43 has a substantially rectangular flat plate shape, and a contact 46 having an inverted V shape as an example of the first contact is provided at the tip thereof. The contact portion 43 extends parallel to the longitudinal direction of the sandwiched portion 41 and extends in a direction of 45 degrees with respect to the longitudinal direction of the intermediate portion 42. That is, as shown in FIG. 5, the center line A1 of the sandwiched portion 41 and the center line A3 of the contact portion 43 are parallel, and the center line A2 of the intermediate portion 42 and the center line A3 of the contact portion 43 are , Θ2 = 45 degrees, and the intermediate portion 42 is connected to the sandwiched portion 41 and the contact portion 43 so as to obliquely intersect. Note that the width W3 of the contact portion 43 shown in FIG. 7 has substantially the same dimensions as the width W1 of the sandwiched portion 41.

As shown in FIG. 7, the second plunger 50 includes a contact portion 51 and first and second

elastic pieces

52 and 53 provided at the base end (upper end in FIG. 7) of the contact portion 51. , Substantially the same thickness H2. The contact part 51 is an example of a second contact part, and the first and second

elastic pieces

52 and 53 are examples of a second insertion part.

The contact portion 51 has a substantially rectangular flat plate shape, and a contact 54 having a V shape as an example of the second contact is provided at the tip (lower end in FIG. 7). Further, at the base end of the contact portion 51, a coil spring support portion 55, which is an example of a support portion that contacts the other end of the coil spring 60 (lower end in FIG. 7), protrudes on both sides in the width W 4 direction of the contact portion 51. Has been.

The contact portion 51 of the contact portion 51 is arranged on the center line A1 of the sandwiched portion 41 of the first plunger 40. That is, as shown in FIG. 5, the contact 46 of the first plunger 40 as the first contact is disposed on the center line A3 of the contact portion 43 that is a first straight line parallel to the center line C1 of the coil spring 60. A contact 54 of the second plunger 50 as a second contact is disposed on the center line A1 of the contact portion 51 that is a second straight line that coincides with the center line C1 of the coil spring 60.

The first and second

elastic pieces

52 and 53 extend in parallel with each other at an interval from the base end (upper end in FIG. 7) of the contact portion 51 along the longitudinal direction of the contact portion 51. Further, the first and second

elastic pieces

52 and 53 are respectively disposed at both ends of the base end of the contact portion 51 in the width W4 direction so as to have an interval larger than the thickness H1 of the first plunger 40. That is, in the width W4 direction of the contact portion 51, the first and second

elastic pieces

52 and 53 have a distance between the outward surfaces substantially equal to the width W4 of the contact portion 51, and the distance between the inward surfaces is the first plunger 40. It is provided to be larger than the thickness H1. Further, the first and second

elastic pieces

52 and 53 have different lengths, and the first elastic piece 52 is shorter than the second elastic piece 53.

A guide projection 56 projects from the tip of the first elastic piece 52 toward the second elastic piece 53. Further, a contact projection 57 is provided at the tip of the second elastic piece 53 so as to protrude toward the first elastic piece 52. The contact protrusion 57 is arranged so as to always contact the sandwiched portion 41 of the first plunger 40 with the guide protrusion 56 of the first elastic piece 52 fitted in the guide groove 44 of the first plunger 40. ing.

The coil spring 60 is made of, for example, carbon steel or stainless steel. As shown in FIGS. 5 and 6, the width W <b> 1 (shown in FIG. 7) of the sandwiched portion 41 of the first plunger 40 and the second plunger 50. The inner diameter is slightly larger than the width W4 (shown in FIG. 7). The coil spring 60 has a width W2 (shown in FIG. 7) of the coil spring support portion 45 of the first plunger 40 and a width W5 of the portion where the coil spring support portion 55 of the second plunger 50 is provided (see FIG. 7). 7) and substantially the same outer diameter.

Note that the coil spring 60 is in a compressed state in the state shown in FIG. 3, that is, in the initial state in which the first plunger 40 and the second plunger 50 are combined with each other and stored in the housing of the inspection unit 1. The spring length is adjusted.

Next, the assembly process of the inspection unit 1 including the probe pin 30 of the first embodiment will be described.

First, the probe pin 30 is assembled. First, the first plunger 40 is inserted into the coil spring 60 from one end side of the coil spring 60 from the sandwiched portion 41 side, while the second plunger 50 is inserted into the coil spring 60 from the other end side of the coil spring 60. Are inserted from the first and second

elastic pieces

52 and 53 side. At this time, the first and

second plungers

40 and 50 are inserted so that the wide surface of the first plunger 40 and the wide surface of the second plunger 50 are orthogonal to each other, as shown in FIG.

When the first and

second plungers

40 and 50 are inserted into the coil spring 60, the sandwiched portion 41 of the first plunger 40 is interposed between the first and second

elastic pieces

52 and 53 of the second plunger 50. The inserted portion 41 is sandwiched between the first elastic piece 52 and the second elastic piece 53. When the first and

second plungers

40 and 50 are further inserted into the coil spring 60, the guide protrusion 56 of the second plunger 50 is fitted into the guide groove 44 of the first plunger 40, and the first The

second plungers

40 and 50 are connected. Thereby, the assembly of the probe pin 30 is completed. In the assembled probe pin 30, the contact protrusion 57 of the second elastic piece 53 of the second plunger 50 and the proximal end side of the clamped portion 41 of the first plunger 40 (upper side of the guide groove 44 in FIG. 7). Always in contact.

When the assembly of the probe pin 30 is completed, the probe pin 30 is inserted into the housing portion 12 of the housing body 10 from the second plunger 50 side. Thereafter, the process of assembling the probe pin 30 and the process of inserting the assembled probe pin 30 into the housing part 12 of the housing body 10 are repeated, and when the probe pin 30 is inserted into all the housing parts 12 of the housing body 10. The housing cover 20 is attached to the housing body 10, and the assembly process of the inspection unit 1 is completed.

Subsequently, the operation of the probe pin 30 housed in the inspection unit 1 will be described.

In the probe pin 30 in the initial state, as shown in FIG. 3, the contact 46 of the first plunger 40 protrudes from the contact opening 22 of the housing cover 20, and the contact 54 of the second plunger 50 extends from the contact opening 13 of the housing body 10. It is housed in the housing of the inspection unit 1 in a state protruding from the housing. In this initial state, the first plunger 40 receives the restoring force of the coil spring 60 at the coil spring support 45 and is pressed against the housing cover 20 via the housing support 47. Further, the second plunger 50 receives the restoring force of the coil spring 60 at the coil spring support portion 55 and is pressed against the housing body 10 via the coil spring support portion 55.

The center line A3 of the contact portion 43 of the first plunger 40 coincides with a straight line that passes through the center of the contact opening 22 of the housing cover 20 and is orthogonal to the upper surface of the housing cover 20. A center line A <b> 1 of the portion 41 (the contact portion 51 of the second plunger 50) coincides with a straight line that passes through the center of the housing portion 12 of the housing body 10 and is orthogonal to the bottom surface of the housing body 10.

When the

contacts

46 and 54 of the first and

second plungers

40 and 50 are pressed and the first and

second plungers

40 and 50 are pushed into the housing of the inspection unit 1, the guide protrusions of the first elastic piece 52 56 starts sliding movement along the guide groove 44 of the first plunger 40. At this time, the contact 46 of the first plunger 40 moves along the center line A3 of the contact portion 43, and the contact 54 of the second plunger 50 moves along the center line A1 of the contact portion 51. Further, the force applied to the first and

second plungers

40 and 50 is transmitted to the coil spring 60 via the coil spring support portion 45 of the first plunger 40 and the coil spring support portion 55 of the second plunger 50. , Compressed.

When the first and

second plungers

40 and 50 are further pushed into the housing of the inspection unit 1, the guide groove 44 of the first plunger 40 and the guide protrusion 56 of the second plunger 50 come into contact with each other, or the first plunger The contact 46 of the 40 and the contact 54 of the second plunger 50 are pushed into the housing, and the sliding movement of the first and

second plungers

40 and 50 is stopped. Thereafter, when the force applied to the

contacts

46 and 54 of the first and

second plungers

40 and 50 is released, the first plunger 40 moves toward the housing cover 20 by the restoring force of the coil spring 60. Are biased toward the housing body 10 to return to the initial state shown in FIG. As described above, the contact 46 of the first plunger 40 and the contact 54 of the second plunger 50 are supported so as to be able to reciprocate via the spring force of the coil spring 60.

In the probe pin 30 of the first embodiment, the first and

second plungers

40 and 50 each have higher rigidity than the coil spring 60, and the amount of movement of the first and

second plungers

40 and 50 is determined by the coil spring. 60 absorbs. For this reason, even if the contact 46 of the first plunger 40 and the contact 54 of the second plunger 50 are not on the same straight line, the force applied to each

contact

46, 54 can be transmitted to the coil spring 60 as it is.

In addition, it is preferable that the angles θ1 and θ2 formed by the center line A1 of the sandwiched portion 41, the center line A3 of the contact portion 43, and the center line A2 of the intermediate portion 42 are larger than 0 degree and not larger than 45 degrees. When the angles θ1 and θ2 formed by the center line A1 of the sandwiched portion 41, the center line A3 of the contact portion 43, and the center line A2 of the intermediate portion 42 exceed 45 degrees, the first plunger is pressed into the housing. Sometimes, the load (bending moment) applied to the first plunger 40 increases. For this reason, the connecting portion between the sandwiched portion 41 and the intermediate portion 42 is deformed, and the first plunger and the surface of the concave portion of the housing body come into contact with each other, so that a load necessary for designing the probe pin cannot be obtained. Becomes higher.

In the first plunger 40 of the probe pin 30 of the first embodiment, the center line A1 of the sandwiched portion 41 and the center line A3 of the contact portion 43 are parallel, and the center line A1 of the sandwiched portion 41 and The center line A3 of the contact portion 43 and the center line A2 of the intermediate portion 42 form an angle of 45 degrees. For this reason, when the 1st plunger 40 is pressed toward the inside of a housing, the load concerning the 1st plunger 40 can be reduced and the contact with the surface of the recessed part 11 of the 1st plunger 40 and the housing main body 10 can be avoided. Thereby, the probe pin 30 which has the operation characteristic as designed can be obtained. Further, for example, the probe pin 30 is connected to the inspection unit as compared with the case where the center line A1 of the sandwiched portion 41, the center line A3 of the contact portion 43, and the center line A2 of the intermediate portion 42 form an angle of 90 degrees. When the housing is housed in one housing, it is possible to reduce the interval that can be arranged without interfering with other adjacent probe pins 30.

Further, in the probe pin 30 in a state where the guide protrusion 56 of the second plunger 50 is fitted into the guide groove 44 of the first plunger 40 and assembled, the contact protrusion 57 of the second elastic piece 53 of the second plunger 50 is The first plunger 40 is always in contact with the base end side (the upper side of the guide groove 44 in FIG. 7) of the sandwiched portion 41. For this reason, high contact stability can be obtained between the first and

second plungers

40 and 50.

Further, the movement of the first and

second plungers

40 and 50 is performed by the sliding movement of the guide projection 56 of the second plunger 50 along the guide groove 44. For this reason, the contact position where the to-be-clamped part 41 of the 1st plunger 40 and the contact protrusion 57 of the 2nd plunger 50 contact can be detected correctly.

In the probe pin 30 of the first embodiment, the

contacts

46 and 54 of the first and

second plungers

40 and 50 are returned to the initial state shown in FIG. For this reason, even if the probe pin 30 is downsized, it becomes easy to obtain a spring load necessary for designing the probe pin 30. Furthermore, since the conduction path between the first and

second plungers

40 and 50 can be shortened, the resistance during conduction can be reduced as compared with the probe pin having the bellows-shaped elastic portion.

(Second Embodiment)
8 to 13 are diagrams showing an example of the inspection unit 201 including the probe pin 230 of the second embodiment and the probe pin 230 of the second embodiment. In the second embodiment, the same parts as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted. Differences from the first embodiment will be described. The inspection unit 201 is an example of an electronic device.

In the probe pin 230 of the second embodiment, as shown in FIGS. 10 to 13, the intermediate portion 242 of the first plunger 140 extends in a direction of 90 degrees with respect to the longitudinal direction of the sandwiched portion 41, and The contact portion 43 is different from the probe pin 30 of the first embodiment in that the contact portion 43 extends in a direction of 90 degrees with respect to the longitudinal direction of the intermediate portion 142. That is, in the probe pin 230, the center line A1 of the sandwiched portion 41 and the center line A7 of the intermediate portion 242 make an angle of θ1 = 90 degrees, and the center line A7 of the intermediate portion 242 and the center line A3 of the contact portion 43 Are configured to form an angle of θ2 = 90 degrees.

Thus, since the 1st plunger 240 has the intermediate part 242 which becomes (theta) 1 = 90 degree | times and (theta) 2 = 90 degree | times, the 1st plunger is suppressed, suppressing the length L3 of the probe pin 230 shown in FIG. The distance L4 between the contact 46 of 240 and the contact 54 of the second plunger 50 can be increased.

In the probe pin 230 of the second embodiment, the first plunger 140 has conductivity, and is formed by, for example, an electroforming method.

In the probe pin 230 of the second embodiment, the intermediate portion 242 contacts the housing cover 20 in the initial state where the probe pin 230 is housed in the housing of the inspection unit 201. That is, the first plunger 240 receives the restoring force of the coil spring 60 and is pressed against the housing cover 20 via the intermediate portion 242. For this reason, the structure equivalent to the housing support part 47 of the probe pin 30 of 1st Embodiment is not provided.

(Third embodiment)
14 to 19 are diagrams showing an example of the inspection unit 301 including the probe pin 330 of the third embodiment and the probe pin 330 of the third embodiment. In the third embodiment, the same parts as those in the first embodiment are denoted by the same reference numerals, and the description thereof will be omitted. Differences from the first embodiment will be described. The inspection unit 301 is an example of an electronic device.

In the probe pin 330 of the third embodiment, as shown in FIGS. 16 to 19, the intermediate portion 342 of the first plunger 340 has a corrugated planar shape (that is, a curved shape) in the XVII view of FIG. This is different from the first embodiment.

The intermediate portion 342 includes a first bending portion 347 that is continuous with the sandwiched portion 41 and a second bending portion 348 that is continuous with the first bending portion 347 and is continuous with the contact portion 43. In the Z direction shown in FIG. 17, the first and

second bending portions

347 and 348 are arranged such that the vertex P1 of the first bending portion 347 and the vertex P2 of the second bending portion 348 are the coil spring support portion 45 of the intermediate portion 342 and the housing. It is comprised so that it may be located between the support parts 47.

As described above, since the apexes P1 and P2 of the first and second

curved portions

347 and 348 are disposed between the housing support portion 47 and the coil spring support portion 45, the contact 46 of the first plunger 340 is pressed. Even when the intermediate portion 342 is elastically deformed when the first plunger 340 is pushed into the housing of the inspection unit 301, the surface of the concave portion 11 of the housing body 10 or the concave portion 21 of the housing cover 20 and the intermediate portion 342 are provided. Can be avoided.

In the probe pin 330 of the third embodiment, the first plunger 340 has conductivity, and is formed by, for example, an electroforming method.

(Fourth embodiment)
20 to 26 are diagrams illustrating an example of the inspection unit 401 including the probe pin 430 of the fourth embodiment and the probe pin 430 of the fourth embodiment. In the fourth embodiment, the same parts as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted. Differences from the first embodiment will be described. The inspection unit 401 is an example of an electronic device.

As shown in FIGS. 20 to 22, the inspection unit 401 includes a housing body 10, a housing cover 420 that covers the housing body 10, and a probe pin 430 of the fourth embodiment housed in the housing body 10. Yes. The housing body 10 and the housing cover 420 constitute a housing.

As shown in FIG. 20, the housing cover 420 has the same planar shape as the housing body 10 in a top view. As shown in FIG. 22, the housing cover 420 has a plurality of storage portions 423 for storing the probe pins 430 at the approximate center of the bottom surface thereof. The storage portion 423 has a circular shape in a plan view when the housing cover 420 is viewed from the bottom surface direction, and is disposed away from each other along the X and Y directions shown in FIG. In addition, contact openings 22 are provided on the bottom surface of the storage portion 423, respectively. The contact opening 22 has a smaller diameter than the storage portion 423. As shown in FIG. 22, the contact opening 22 has a straight line passing through the center of the contact opening 22 and orthogonal to the upper surface of the housing cover 420 in a state where the housing cover 420 is attached to the housing body 10. Are arranged so as to be parallel to a straight line passing through the center of the contact opening 13 provided on the bottom surface of the housing 10 and orthogonal to the bottom surface of the housing body 10 and having a distance L2.

As shown in FIGS. 23 to 26, the probe pin 430 of the fourth embodiment includes a first plunger 70, a second plunger 80, a third plunger 90, and first and second coil springs 61 and 62. I have. The first to

third plungers

70, 80, 90 each have conductivity, and are formed by, for example, an electroforming method.

As shown in FIG. 26, the first and

second plungers

70 and 80 have a contact portion 51 and first and second

elastic pieces

52 and 53, and are the same as the second plunger 50 of the first embodiment. It has a shape and configuration. The contact portion 51, the contact 54, and the first and second

elastic pieces

52, 53 of the first plunger 70 are examples of the first contact portion, the first contact, and the first insertion portion, respectively. The contact portion 51, the contact point 54, and the first and second

elastic pieces

52, 53 are examples of the second contact portion, the second contact point, and the second insertion portion, respectively. Further, the center line A4 of the contact portion 51 of the first plunger 70 coincides with the center line C4 of the first coil spring 61, and the center line A6 of the contact portion 51 of the second plunger 80 is the second coil spring 62. This coincides with the center line C6.

As shown in FIG. 26, the third plunger 90 includes a first sandwiched portion 91, an intermediate portion 92 that is continuous with the first sandwiched portion 91, and a second sandwiched portion 93 that is continuous with the intermediate portion 92. is doing. The first and second sandwiched

portions

91 and 93 have the same shape and configuration as the sandwiched portion 41 of the first plunger 40 of the first embodiment, and extend parallel to each other. That is, the center line A4 of the first sandwiched portion 91 and the center line A6 of the second sandwiched portion 93 are parallel. The first sandwiched portion 91 is an example of a third insertion portion, and the second sandwiched portion 93 is an example of a fourth insertion portion.

The intermediate part 92 is connected to the first and second sandwiched

parts

91 and 93 so as to obliquely intersect. That is, as shown in FIG. 24, the center lines A4 and A6 of the first and second sandwiched

portions

91 and 93 and the center line A5 of the intermediate portion 92 form an angle of θ = 45 degrees. In addition, coil spring support portions 45 are provided at both ends of the intermediate portion 92, respectively.

Next, an assembly process of the inspection unit 401 including the probe pin 430 according to the fourth embodiment will be described.

First, the first plunger 70 is inserted from one end side of the first coil spring 61 into the inside thereof from the first and second

elastic pieces

52 and 53 side, and the first coil spring 61 is inserted into the inside thereof from the other end side thereof. The first sandwiched portion 91 of the three plunger 90 is inserted. Further, the second plunger 80 is inserted into the inside from the one end side of the second coil spring 62 from the first and second

elastic pieces

52 and 53 side, and the second plunger spring 62 is inserted into the inside from the other end side of the second coil spring 62. The second sandwiched portion 93 of the three plunger 90 is inserted. At this time, as shown in FIG. 25, the first and

second plungers

70 and 80 and the third plunger 90 are such that the wide surface of the first and

second plungers

70 and 80 and the wide surface of the third plunger 90 are orthogonal to each other. To be inserted.

When the first to

third plungers

70, 80, 90 are inserted into the first and second coil springs 61, 62, respectively, between the first and second

elastic pieces

52, 53 of the first plunger 70. The first sandwiched portion 91 of the third plunger 90 is inserted, and the first sandwiched portion 91 is sandwiched between the first and second

elastic pieces

52 and 53 of the first plunger 70. Further, the second sandwiched portion 93 of the third plunger 90 is inserted between the first and second

elastic pieces

52, 53 of the second plunger 80, and the second sandwiched portion 93 is the first and second sandwiched portions of the second plunger 80. It is clamped by the second

elastic pieces

52 and 53. When the first to

third plungers

70, 80, 90 are further inserted into the first and second coil springs 61, 62, the guide protrusion 56 of the first elastic piece 52 of the first plunger 70 is The guide protrusion 56 of the first elastic piece 52 of the second plunger 80 is fitted into the guide groove 44 of the first sandwiched portion 91 of the third plunger 90, and the guide groove 56 of the second sandwiched portion 93 of the third plunger 90. 44, the probe pin 430 is assembled.

When the probe pin 430 is assembled, the probe pin 430 is inserted into the housing portion 12 of the housing body 10. Then, the process of assembling the probe pins 430 and inserting the assembled probe pins 430 into the housing portions 12 of the housing body 10 is repeated, and when the probe pins 430 are inserted into all the housing portions 12 of the housing body 10, the housing cover 420. Is attached to the housing body 10, and the assembly process of the inspection unit 401 is completed.

Next, the operation of the probe pin 430 that is housed in the inspection unit 401 will be described.

As shown in FIG. 22, in the probe pin 430 in the initial state housed in the inspection unit 401, the contact 54 of the first plunger 70 protrudes from the contact opening 22 of the housing cover 420, and the contact 54 of the second plunger 80 is the housing. It is housed in the housing of the inspection unit 401 in a state of protruding from the contact opening 13 of the main body 10. In this initial state, the first plunger 70 receives the restoring force of the first coil spring 61 at the coil spring support portion 55 and is pressed against the housing cover 420 via the coil spring support portion 55. Further, the second plunger 80 receives the restoring force of the second coil spring 62 at the coil spring support portion 55 and is pressed against the housing body 10 via the coil spring support portion 55.

The center line A4 of the first plunger 70 coincides with a straight line passing through the center of the housing portion 423 of the housing cover 420 and orthogonal to the upper surface of the housing cover 420, and the center line A6 of the second plunger 80 is the housing body. 10 coincides with a straight line that passes through the center of the storage portion 12 and is orthogonal to the bottom surface of the housing body 10.

When the contact 54 of the first and

second plungers

70, 80 is pressed and the first and

second plungers

70, 80 are pushed into the housing of the inspection unit 401, the first of the first and

second plungers

70, 80 The guide protrusion 56 of the first elastic piece 52 starts to slide along the guide groove 44 of the third plunger 90. At this time, the contact 54 of the first plunger 70 moves along the center line A4 of the first plunger 70, and the contact 54 of the second plunger 50 moves along the center line A6 of the second plunger 80. The force applied to the first and

second plungers

70 and 80 is transmitted to the first and second coil springs 61 and 62 via the coil spring support portions 55 of the first and

second plungers

70 and 80. Compressed.

When the first and

second plungers

70 and 80 are further pushed into the housing of the inspection unit 401, the guide protrusion 56 of the first plunger 70 and the guide groove 44 of the first sandwiched portion 91 of the third plunger 90 come into contact with each other. Then, the guide projection 56 of the second plunger 80 and the guide groove 44 of the second sandwiched portion 93 of the third plunger 90 come into contact, or the contact 46 of the first plunger 40 and the contact 54 of the second plunger 50 are the housing. By being pushed in, the movement of the first and

second plungers

70 and 80 stops. Thereafter, when the force applied to the contact 54 of the first and

second plungers

70 and 80 is released, the first plunger 70 moves toward the housing cover 420 by the restoring force of the first and second coil springs 61 and 62. The second plunger 80 is biased toward the housing body 10 to return to the initial state shown in FIG. As described above, the contact 54 of the first and

second plungers

70 and 80 is supported so as to be able to reciprocate via the spring force of the coil springs 61 and 62.

Since the probe pin 430 of the fourth embodiment has the two

coil springs

61 and 62, a higher spring load can be obtained as compared with the probe pin having one coil spring.

In the probe pin 430 of the fourth embodiment, the first to

third plungers

70, 80, 90 have higher rigidity than the coil springs 61, 62, respectively, and the first to

third plungers

70, 80 are provided. , 90 are absorbed by the coil springs 61, 62. For this reason, even if the contacts 54 of the first and

second plungers

70 and 80 are not on the same straight line, the force applied to each contact 54 can be transmitted to the coil springs 61 and 62 as they are.

(Fifth embodiment)
27 to 32 are diagrams showing an example of the inspection unit 501 provided with the probe pin 530 of the fifth embodiment and the probe pin 530 of the fifth embodiment. In the fifth embodiment, the same parts as those in the first and fourth embodiments are denoted by the same reference numerals, and the description thereof is omitted. Differences from the fourth embodiment will be described. The inspection unit 501 is an example of an electronic device.

29 to 32, the probe pin 530 of the fifth embodiment has an intermediate portion 192 of the third plunger 190 of 90 degrees with respect to the longitudinal direction of the first and second sandwiched

portions

91 and 93. It differs from the fourth embodiment in that it extends in the direction. That is, the center lines A4 and A6 of the first and second sandwiched

portions

91 and 93 and the center line A8 of the intermediate portion 192 form an angle of θ = 90 degrees.

Thus, since the third plunger 190 has the intermediate portion 192 where θ = 90 degrees, the length 54 of the probe pin 530 shown in FIG. The distance L4 between the second plunger 80 and the contact 54 can be increased.

In the probe pin 530 of the fifth embodiment, the third plunger 190 has conductivity, and is formed, for example, by electroforming.

(Other embodiments)
In the first to fifth embodiments, the guide protrusion 56 of the first elastic piece 52 can be fitted into the guide groove 44, and the slide movement of each plunger can be performed in the guide groove 44 when fitted to the guide groove 44. The shape, size, etc. can be selected as appropriate.

In the first to fifth embodiments, the shape or size of the contact protrusion 57 of the second elastic piece 53 can be appropriately selected according to the design. By changing the shape or the like of the contact protrusion 57, it is possible to adjust the urging force of each second elastic piece 53 against each sandwiched portion.

In the first to fifth embodiments, the length difference L2 between the first elastic piece 52 and the second elastic piece 53 is formed to have substantially the same dimension as the length L1 of the guide groove 44. However, the present invention is not limited to this. Absent. The difference in length between the first elastic piece and the second elastic piece may be longer than the length of the guide groove, and can be changed as appropriate.

In the first to fifth embodiments, the thickness of each plunger is the same, but this is not restrictive. You may change the thickness of each plunger suitably. Further, the thickness can be made different depending on the portion of each plunger.

The plungers of the first to fifth embodiments can be subjected to surface treatment such as plating and coating according to the design.

The plungers of the first to fifth embodiments are formed by electroforming, but are not limited thereto. Any method that can form the plungers of the first to fifth embodiments can be arbitrarily selected.

In the first to fifth embodiments, the

contacts

46 and 54 are provided at the centers of the

contact portions

43 and 51, but the present invention is not limited to this. The

contact portions

43 and 51 can be provided at arbitrary positions on one end.

In the first to third embodiments, the clamped portion 41 is provided in the first plunger 40, and the first and second

elastic pieces

52, 53 are provided in the second plunger 50. In the fourth and fifth embodiments, The first and

second plungers

70 and 80 are provided with the first and second

elastic pieces

52 and 53, and the third plunger 90 is provided with the first and second sandwiched

portions

91 and 93. However, the present invention is not limited thereto. For example, in the first to third embodiments, the first plunger may be provided with the first and second elastic pieces, and the second plunger may be provided with the sandwiched portion. In the fourth and fifth embodiments, the first plunger The second plunger may be provided with a sandwiched portion, and the third plunger 90 may be provided with the first and second elastic pieces.

If possible, in the first to third embodiments, the second plunger 50 may be provided with the intermediate portion 42 and the contact portion 43. In the fourth and fifth embodiments, the first and second plungers may be provided. The intermediate part 42 and the contact part 43 may be provided at 70, 80.

In the probe pin of the present invention, the sandwiched portion 41 and the first and second

elastic pieces

52 and 53 are used in combination as the insertion portion, but the present invention is not limited to this. Any insertion part can be adopted as long as it is slidable and conductive when inserted from both ends of the coil spring.

Of course, the components described in the first to fifth embodiments and modifications may be combined as appropriate, and may be selected, replaced, or deleted as appropriate.

The probe pin according to the present invention can be applied to an electronic device such as an IC test socket.

1,201,301,401,501 Inspection unit (electronic device)
DESCRIPTION OF SYMBOLS 10 Housing main body 11 Concave part 12 Storage part 13 Contact opening part 20,420 Housing cover 21 Concave part 22 Contact opening part 423 Storage part 30,230,330,430,530 Probe pin 40,140,240 First plunger 41 Clamping part ( (First insertion part)
42 Middle part 43 Contact part (1st contact part)
44 Guide groove 45 Coil spring support (support)
46 contacts (first contact)
47 housing support part 50 second plunger 51 contact part (second contact part, in claim 8, the first contact part)
52 1st elastic piece (2nd insertion part, In Claim 8, 1st insertion part and 2nd insertion part)
53 2nd elastic piece (2nd insertion part, In Claim 8, 1st insertion part and 2nd insertion part)
54 contacts (second contact, in claim 8, the first contact and the second contact)
55 Coil spring support (support)
56 Guide projection 57 Contact projection 60 Coil spring 61 Coil spring 62 Coil spring 70 First plunger 80

Second plunger

90, 190 Third plunger 91 First sandwiched portion (third insertion portion)
92, 192 Intermediate portion 93 Second sandwiched portion (fourth insertion portion)
A1 Center line (second straight line) of the sandwiched portion 41
A2 Center line A3 of the intermediate part 42 Center line of the contact part 43 (first straight line)
A4 Contact portion 51, center line A5 of first sandwiched portion 91 A5 center line A6 of center portion A6 Contact portion 51, center line of second sandwiched portion 93 A7 centerline of intermediate portion 242 A8 centerline C1 of intermediate portion 192 Center line C4 of the coil spring 60 Center line of the coil spring 61 (first straight line)
C6 Center line of coil spring 62 (second straight line)

Claims

At least one coil spring extending and contracting along the center line;
A first contact disposed on a first straight line parallel to the center line;
A second contact disposed on a second straight line that coincides with the center line;
With
A probe pin in which the first and second contacts are supported so as to be reciprocally movable via a spring force of the coil spring and are directly conducted to each other.
One coil spring;
A first insertion portion provided along the second straight line and inserted into one end of the coil spring, a first contact portion having the first contact, and intersecting the first insertion portion and the first contact portion. A first plunger having an intermediate portion connected so as to perform, and a support portion provided between the first insertion portion and the intermediate portion and in contact with one end in the center line direction of the coil spring;
A second insertion portion that is inserted into the other end of the coil spring and provided along the second straight line; a second contact portion having the second contact; and the second insertion portion and the second contact portion. A second plunger having a support portion provided between the coil spring and the other end in the center line direction of the coil spring;
The probe pin according to claim 1, comprising:
The probe pin according to claim 2, wherein the first insertion portion, the first contact portion, and the intermediate portion intersect at an angle of greater than 0 degrees and 45 degrees or less.
The probe pin according to claim 2, wherein the intermediate portion has a curved shape.
The probe pin according to any one of claims 2 to 4, wherein the first and second plungers each have higher rigidity than the coil spring.
The probe pin according to any one of claims 2 to 5, wherein the first and second plungers are formed by an electroforming method.
Comprising first and second coil springs extending and contracting along two parallel centerlines;
The probe pin according to claim 1, wherein a center line of the first coil spring is the first straight line, and a center line of the second coil spring is the second straight line.
A first insertion portion provided along the first straight line and inserted into one end of the first coil spring; a first contact portion having the first contact disposed on the first straight line; and the first A first plunger having a support portion which is provided between an insertion portion and the first contact portion and which comes into contact with one end of the first coil spring in the center line direction;
A second insertion portion provided along the second straight line and inserted into one end of the second coil spring; a second contact portion having the second contact disposed on the second straight line; and the second A second plunger having a support portion which is provided between the insertion portion and the second contact portion and contacts one end of the second coil spring in the center line direction;
A third insertion portion provided along the first straight line and inserted into the other end of the first coil spring; and a fourth insertion portion provided along the second straight line and inserted into the other end of the second coil spring. A third plunger having an insertion part, and an intermediate part connected to intersect the third insertion part and the fourth insertion part,
The probe pin according to claim 7, comprising:
9. The probe pin according to claim 8, wherein the third insertion portion, the fourth insertion portion, and the intermediate portion intersect at an angle that is greater than 0 degree and equal to or less than 45 degrees.
The probe pin according to any one of claims 7 to 9, wherein the first, second, and third plungers each have higher rigidity than the coil spring.
The probe pin according to any one of claims 7 to 10, wherein the first, second, and third plungers are formed by an electroforming method.
12. A probe pin according to claim 1, and a housing that houses the probe pin, wherein the first and second plungers are urged toward the housing by the coil spring. Electronic devices.