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WO2015194463A1 - Inkjet head, inkjet printing apparatus, and inkjet head manufacturing method - Google Patents

Inkjet head, inkjet printing apparatus, and inkjet head manufacturing method Download PDF

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Publication number
WO2015194463A1
WO2015194463A1 PCT/JP2015/066963 JP2015066963W WO2015194463A1 WO 2015194463 A1 WO2015194463 A1 WO 2015194463A1 JP 2015066963 W JP2015066963 W JP 2015066963W WO 2015194463 A1 WO2015194463 A1 WO 2015194463A1
Authority
WO
WIPO (PCT)
Prior art keywords
wiring
wiring board
substrate
connection
inkjet head
Prior art date
Application number
PCT/JP2015/066963
Other languages
French (fr)
Japanese (ja)
Inventor
裕一 町田
Original Assignee
コニカミノルタ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by コニカミノルタ株式会社 filed Critical コニカミノルタ株式会社
Priority to JP2016529301A priority Critical patent/JP6421820B2/en
Publication of WO2015194463A1 publication Critical patent/WO2015194463A1/en

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles

Definitions

  • the present invention relates to an inkjet head, an inkjet recording apparatus, and a method for manufacturing an inkjet head.
  • an ink jet recording apparatus that forms an image on a recording medium by discharging ink from a plurality of fine nozzles provided in an ink jet head is known.
  • ink jet recording devices in order to meet the demand for higher accuracy of images formed by inkjet recording devices and higher printing speeds, only recording media can be transported using a line head in which a plurality of inkjet heads are arranged in a staggered pattern.
  • Patent Document 1 a method is known in which the nozzle interval is reduced in the ink jet head and the nozzles are two-dimensionally arranged with high density.
  • connection terminal when pressure is applied to the connection terminal, for example, when an anisotropic conductive film (ACF) is electrically connected by thermocompression bonding between the wiring board and the flexible printed board, the wiring board and the flexible printed board are It becomes difficult to stably connect the substrate.
  • ACF anisotropic conductive film
  • the present invention has been made in view of such problems, and an object of the present invention is to perform wiring without enlarging the wiring substrate of the ink jet head even when the nozzles are arranged at high density in the ink jet head.
  • An object is to provide an ink jet head, an ink jet recording apparatus, and a method for manufacturing the ink jet head that can be stably connected when the interval is widened and the wiring board and the connection board are connected by pressure.
  • the inkjet head provided, Provided on both sides of the wiring board, having a connection part for connecting the connection board by pressure, The connection portion is provided at a position where the front surface and the back surface of the wiring board overlap each other.
  • the invention according to claim 2 is the ink jet head according to claim 1,
  • the connection board is connected to the connection portion via an anisotropic conductive film.
  • the invention according to claim 3 is the inkjet head according to claim 1 or 2,
  • the connection portion is provided at an end portion of the wiring board.
  • the invention according to claim 4 is the inkjet head according to claim 3,
  • the connection part is provided at both ends of the wiring board.
  • the invention according to claim 5 is the inkjet head according to claim 4,
  • the plurality of nozzles are divided and arranged in a plurality of nozzle formation areas, For each nozzle formation area, the wiring is connected to the connection portion at the end portion closer to the nozzle formation area among the connection portions provided at both ends of the wiring board.
  • connection part when the pattern of the connection part provided on the front surface and the back surface of the wiring substrate is viewed in plan, it is the same pattern and overlaps.
  • the invention according to claim 7 is the inkjet head according to any one of claims 1 to 6,
  • the connection board is a flexible printed board.
  • connection portion has a row of connection terminals arranged in a predetermined direction
  • connection terminal on the back surface is provided at a position overlapping the connection terminal on the front surface in the predetermined direction
  • the nozzle corresponding to the connection terminal on the back surface is arranged at a position not overlapping with the nozzle corresponding to the connection terminal on the front surface in the predetermined direction.
  • the invention according to claim 9 is the inkjet head according to any one of claims 1 to 8,
  • the wiring board includes a through hole for wiring for passing the wiring through the opposite side of the wiring board.
  • the invention according to claim 10 is the inkjet head according to any one of claims 1 to 9,
  • the wiring board includes an ink channel through hole for supplying ink to the nozzle.
  • the invention according to claim 11 is the inkjet head according to any one of claims 1 to 10, A nozzle substrate on which the plurality of nozzles are formed; A pressure chamber substrate in which a plurality of pressure chambers respectively communicating with the plurality of nozzles are formed; A diaphragm constituting a wall surface of the plurality of pressure chambers; A common ink chamber for storing ink to be supplied to the plurality of pressure chambers; A spacer substrate provided between the wiring board and the diaphragm; With The nozzle surface of the nozzle substrate is parallel to the wiring substrate,
  • the pressure generating means is a piezoelectric element, The piezoelectric element is disposed at a position corresponding to the plurality of pressure chambers, and displaces the diaphragm to cause a pressure change in the pressure chambers, thereby ejecting ink from the nozzles.
  • the invention according to claim 12 is the inkjet recording apparatus, An ink jet head according to any one of claims 1 to 11 is provided.
  • a thirteenth aspect of the present invention is the ink jet head manufacturing method according to any one of the first to eleventh aspects,
  • the connection board is connected to the connection part on one side with respect to the wiring board.
  • the wiring interval can be widened without increasing the wiring board.
  • the wiring board can be made smaller by providing the connecting portions at positions overlapping with both surfaces of the wiring board and connecting the wiring board and the connection board. Further, when the connection board is connected to the wiring board by pressure, the pressure applied by the overlapping of the connection portions can be made uniform, and the wiring board and the connection board can be stably connected.
  • FIG. 1 is a perspective view illustrating a schematic configuration of an ink jet recording apparatus. It is a perspective view of an inkjet head. It is sectional drawing of the principal part of an inkjet head. It is sectional drawing of an ink discharge part provided with the penetration electrode in a laminated substrate. It is sectional drawing of the ink discharge part which is not provided with the penetration electrode in a laminated substrate. It is a schematic diagram explaining the positional relationship in the Z direction of the structure of a laminated substrate. It is a bottom view of a nozzle substrate. It is sectional drawing of the principal part of the inkjet head which shows the positional relationship of a nozzle formation area. It is a top view of the wiring board edge part which shows arrangement
  • the ink jet recording apparatus 100 includes a platen 101 that supports a recording medium K.
  • a transport roller 102 for transporting the recording medium K is provided before and after the platen 101.
  • the transport roller 102 is driven, the recording medium K is transported from the rear to the front while being supported by the platen 2. Is done.
  • long line heads 103, 104, 105, 106 extending in a direction orthogonal to the transport direction are provided in parallel from the upstream side to the downstream side in the transport direction.
  • the line heads 103, 104, 105, and 106 are provided with at least one inkjet head 1 to be described later.
  • cyan (C), magenta (M), yellow (Y), and black (K) are discharged toward the recording medium K.
  • a plane provided with a plurality of nozzles 11 is defined as an XY plane, and directions along the plane and orthogonal to each other are defined as an X direction and a Y direction, respectively.
  • the direction orthogonal to the XY plane is taken as the Z direction.
  • the inkjet head 1 is provided with a laminated substrate 2 in which a plurality of nozzles 11 for discharging ink are arranged in the X direction and the Y direction.
  • the multilayer substrate 2 is formed by laminating a plurality of substrates in the Z direction so that the nozzle substrate 10 located at the bottom of the multilayer substrate 2 and the wiring substrate 50 located at the top are parallel to each other. Has been placed.
  • a common ink chamber 3 that supplies ink to the plurality of nozzles 11 is disposed on the upper surface of the multilayer substrate 2, and the multilayer substrate 2 and the common ink chamber 3 are supported by a holding plate 90.
  • ink is supplied from the common ink chamber 3 to the ink discharge portions 7 and 8 provided on the laminated substrate 2, and the piezoelectric element 42 as the pressure generating means provided in the ink discharge portions 7 and 8 is displaced, whereby the ink Is pressurized, and ink droplets are ejected from the nozzle 11.
  • a wiring board 50 for supplying power to the piezoelectric element 42 is provided on the uppermost part of the multilayer substrate 2, and a first electrode via a through electrode 55 is provided on the upper surface of the wiring board 50 corresponding to each nozzle 11.
  • a second wiring 58 is provided on the lower surface of the wiring 57 or the wiring substrate 50.
  • the first wiring 57 and the second wiring 58 are connected to the flexible printed circuit board 4 as a connection board at connection terminals 501 (see FIG. 9) as connection parts provided at both ends of the wiring board 50. Electricity is supplied from the drive unit 5 connected to the flexible printed circuit board 4 to the piezoelectric element 42 through the flexible printed circuit board 4 and the first wiring 57 or the second wiring 58.
  • the flexible printed circuit board 4 connected to the lower surface of the wiring board 50 is routed to the upper surface of the holding board 90 from the through hole of the holding board 90 opened near the end of the wiring board 50 in the X direction.
  • the ink discharge portions 7 and 8 include two ink discharge portions, an ink discharge portion 7 having a through electrode 55 on the wiring substrate 50 and an ink discharge portion 8 having no through electrode 55 on the wiring substrate 50. It has a form.
  • the ink discharge unit 7 will be described in detail first, and only the differences between the ink discharge unit 8 and the ink discharge unit 8 will be described later.
  • FIG. 6 illustrates a pressure chamber 311 and an inlet 512, which will be described later, indicated by solid lines.
  • the ink discharge unit 7 has a six-layer structure including a nozzle substrate 10, a bonding substrate 20, a pressure chamber substrate 30, a spacer substrate 40, a wiring substrate 50, and an adhesive layer 60 in order from the lower side in the Z direction. Has been.
  • the nozzle substrate 10 is a silicon substrate and is located in the lowermost layer of the ink discharge unit 7.
  • a plurality of nozzles 11 are formed on the nozzle substrate 10, and the lower surface of the nozzle substrate 10 is a nozzle surface.
  • the bonding substrate 20 is a glass substrate, and is laminated and bonded to the upper surface of the nozzle substrate 10.
  • the bonding substrate 20 is formed with a through hole 201 that communicates with the nozzle 11 of the nozzle substrate 10 and penetrates in the Z direction, which is the stacking direction.
  • the pressure chamber substrate 30 includes a pressure chamber layer 31 and a diaphragm 32.
  • the pressure chamber layer 31 is a silicon substrate and is laminated and bonded to the upper surface of the bonding substrate 20.
  • a pressure chamber 311 that applies ejection pressure to the ink ejected from the nozzle 11 is formed so as to penetrate the pressure chamber layer 31 in the Z direction.
  • the pressure chamber 311 is provided above the through hole 201 and the nozzle 11 and communicates with the through hole 201 and the nozzle 11.
  • a communication hole 312 communicating with the pressure chamber 311 is formed in the pressure chamber layer 31 so as to extend in the horizontal direction while penetrating the pressure chamber layer 31 in the Z direction (see FIG. 6).
  • the diaphragm 32 is laminated and bonded to the upper surface of the pressure chamber layer 31 so as to cover the opening of the pressure chamber 311. That is, the diaphragm 32 constitutes the upper wall portion of the pressure chamber 311. An oxide film is formed on the surface of the diaphragm 32.
  • the diaphragm 32 is formed with a through hole 321 that communicates with the communication hole 312 and penetrates in the Z direction.
  • the spacer substrate 40 is a substrate made of 42 alloy and is a partition layer that is laminated on the upper surface of the diaphragm 32 and forms a space 41 between the diaphragm 32 and the wiring substrate 50.
  • the space 41 is formed above the pressure chamber 311 so as to penetrate the spacer substrate 40 in the Z direction, and accommodates the piezoelectric element 42 therein.
  • the piezoelectric element 42 is formed in substantially the same plan view shape as the pressure chamber 311 and is provided at a position facing the pressure chamber 311 with the diaphragm 32 interposed therebetween (see FIG. 6).
  • the piezoelectric element 42 is an actuator made of PZT (lead zirconium titanate) for deforming the diaphragm 32.
  • the piezoelectric element 42 is provided with two electrodes 421 and 422 on the upper surface and the lower surface, and the electrode 422 on the lower surface side is connected to the diaphragm 32.
  • a through hole 401 that communicates with the through hole 321 of the diaphragm 32 and penetrates in the Z direction is formed in the spacer substrate 40 independently of the space 41.
  • the wiring board 50 includes an interposer 51 that is a silicon substrate.
  • the lower surface of the interposer 51 is covered with two layers of insulating layers 52 and 53 of silicon oxide, and the upper surface is also covered with an insulating layer 54 of silicon oxide.
  • the insulating layer 53 positioned below the insulating layers 52 and 53 is laminated on the upper surface of the spacer substrate 40 and bonded thereto.
  • a through hole 511 that penetrates in the Z direction is formed in the interposer 51, and the through electrode 55 is inserted into the through hole 511.
  • One end of a third copper wiring 56 extending in the horizontal direction is connected to the lower end of the through electrode 55, and the other end of the third wiring 56 is provided on the electrode 421 on the upper surface of the piezoelectric element 42.
  • the stud bump 423 is connected via the solder 561 exposed in the space 41.
  • a first wiring 57 is connected to the upper end of the through electrode 55.
  • the first wiring 57 extends in the horizontal direction and is connected to the flexible printed board 4 (see FIG. 3).
  • the third wiring 56 is sandwiched and protected by two insulating layers 52 and 53 on the lower surface of the interposer 51.
  • the third wiring 56 is made of copper, the material can be appropriately changed as long as it is a conductor. For example, aluminum may be used.
  • the interposer 51 is formed with an inlet 512 that communicates with the through hole 401 of the spacer substrate 40 and penetrates in the Z direction.
  • the inlet 512 is formed to have a smaller cross-sectional area than any of the communication hole 312 communicating with the inlet 512, the through holes 321 and 401, and the through hole 601 of the adhesive layer 60 described later. Note that each portion of the insulating layers 52 to 54 covering the vicinity of the inlet 512 is formed to have an opening diameter larger than that of the inlet 512.
  • the adhesive layer 60 is laminated and bonded to the upper surface of the insulating layer 54 of the interposer 51 while covering the first wiring 57 disposed on the upper surface of the wiring substrate 50.
  • the adhesive layer 60 is a photosensitive resin layer that adheres the upper common ink chamber 3 to the ink discharge portion 7 and is a protective layer that protects the first wiring 57.
  • the adhesive layer 60 has a through hole 601 that communicates with the inlet 512 and penetrates in the Z direction.
  • the communication hole 312, the through holes 321, 401, and 601 and the inlet 512 constitute an individual flow path 70 that communicates the common ink chamber 3 and the pressure chamber 311.
  • the configuration of the ink discharge unit 8 will be described with reference to FIG. Since only the configuration of the wiring substrate 50 is different from the ink ejection unit 7, only the wiring substrate 50 will be described, and the other components are denoted by the same reference numerals, and the description thereof is omitted.
  • the wiring board 50 includes an interposer 51 that is a silicon substrate.
  • the lower surface of the interposer 51 is covered with two layers of insulating layers 52 and 53 of silicon oxide, and the upper surface is also covered with an insulating layer 54 of silicon oxide.
  • the insulating layer 53 positioned below the insulating layers 52 and 53 is laminated on the upper surface of the spacer substrate 40 and bonded thereto.
  • a third wiring 56 extends horizontally on the lower surface of the interposer 51 and is sandwiched and protected by two insulating layers 52 and 53 on the lower surface of the interposer 51.
  • a stud bump 423 provided on the electrode 421 on the upper surface of the piezoelectric element 42 is connected to one end of the third wiring 56 via solder 561 exposed in the space 41.
  • a second wiring is connected to the other end of the third wiring 56, and the second wiring 58 extends in the horizontal direction and is connected to the flexible printed circuit board 4 (see FIG. 3).
  • the ink in the common ink chamber 3 is supplied to the pressure chamber 311 through the individual flow path 70.
  • a voltage is applied between the electrodes 421 and 422 through the third wiring 56 by the first wiring 57 or the second wiring 58 connected to the flexible printed circuit board 4 in accordance with a driving signal from the driving unit 5.
  • 422 is deformed together with the vibration plate 32, the ink in the pressure chamber 311 is pushed out and ejected from the nozzle 11.
  • the nozzle 11 forms four parallelogram-shaped nozzle formation areas N1 to N4 on the nozzle substrate 10, and a matrix along the direction of each side of the parallelogram in each nozzle formation area. Are arranged side by side. Note that two sides of the parallelogram are parallel to the Y direction, this direction is the first direction, and the remaining two sides are non-parallel to the Y direction and are somewhat inclined with respect to the X direction. This direction will be described below as the second direction.
  • the nozzle formation areas N1 to N4 are long parallelograms along the Y direction, have the same direction and size, and the same number of nozzles 11 are provided in each area.
  • the nozzle formation areas N1 to N4 are formed on the nozzle substrate 10 in the order of N1, N4, N2, and N3 in this order from the upstream side in the X direction, and N1, N1 toward the downstream side in the Y direction.
  • N2, N3 and N4 are arranged slightly shifted in order. All the nozzles 11 provided on the nozzle substrate 10 are arranged so as to be slightly shifted with respect to the first direction (Y direction).
  • the nozzle formation areas N1 to N4 in the inkjet head 1 are arranged so as to be N1, N4, N2, and N3 from the upstream side in the X direction. Further, each of the nozzle formation areas N1 to N4 is wired at the end of the wiring board 50 closer to each nozzle formation area. Specifically, N1 and N4 are upstream in the X direction, and N2 and N3. Are wired downstream in the X direction, connected to the flexible printed circuit board 4, and finally connected to the drive unit 5.
  • the nozzle formation areas N1 and N3 are nozzle formation areas provided on both end sides of the nozzle substrate 10, and are wired from the second wiring 58 on the lower surface of the wiring substrate 50, where N1 is the right side and N3 is the right side. Wired on the left side and connected.
  • the nozzle formation areas N2 and N4 are nozzle formation areas provided on the central portion side of the nozzle substrate 10, and are wired from the first wiring 57 on the upper surface of the wiring substrate 50 through the through electrode 55, and N4 is on the right side.
  • N2 are wired and connected on the left side.
  • FIG. 8 shows a diagram in which only one upper portion is penetrated in the nozzle formation areas N2 and N4.
  • the through electrodes 55 are provided one by one, and are wired through the wiring board 50 one by one corresponding to each nozzle 11.
  • connection terminals 501 The arrangement of the connection terminals 501 at both ends of the wiring board 50 will be described.
  • the wiring board 50 is connected to the flexible printed board 4 by the connection terminal 501 and is connected to the driving unit 5.
  • the connection terminals 501 are provided along the Y direction in the direction in which the connection terminals 501,... ing.
  • connection terminals 501,... are provided on the lower surface of the right end portion of the wiring board 50, and the connection terminals 501,. On the other hand, they are provided in the same pattern and in an overlapping position when viewed in plan.
  • connection terminals 501,... Is connected to the first wiring 57 or the second wiring 58, and is connected to the piezoelectric element 42 in the nozzle formation area N4.
  • connection terminals 501,... Provided on the upper surface on the upstream side in the X direction of the wiring board 50 are connected to the piezoelectric elements 42 in the nozzle formation area N4 through the first wiring 57, respectively.
  • connection terminals 501,... Provided on the lower surface on the upstream side in the X direction of the wiring substrate 50 are connected to the piezoelectric elements 42 in the nozzle formation area N1 through the second wiring 58, respectively.
  • connection terminal 501 provided on the upper surface of the wiring substrate 50 on the upstream side in the X direction
  • connection terminals 501 on the lower surface provided at the overlapping positions are connected to the piezoelectric elements 42 corresponding to the nozzles 11 slightly shifted in the Y direction.
  • the piezoelectric elements 42 and 42 are wired to connection terminals 501 and 501 arranged at positions overlapping in the Y direction on the upper surface and the lower surface of the wiring substrate 50 by the first wiring 57 and the second wiring 58.
  • the upstream side in the X direction of the wiring board 50 has been described, but the downstream side in the X direction has the same configuration.
  • the terminals 501,... Provided on the upper surface of the wiring board 50 are connected to the piezoelectric elements 42 in the nozzle formation area N2 through the first wiring 57, respectively.
  • Terminals 501,... Provided on the lower surface of the substrate 50 are connected to the piezoelectric elements 42 in the nozzle formation area N3 through the second wiring 58, respectively.
  • connection terminals 501,... At both ends of the wiring board 50 is the same as the number of piezoelectric elements 42 in the nozzle formation area per unit. Specifically, for example, as described in the example of FIG. 7, when m ⁇ n nozzles 11 are provided in each nozzle formation area, the number of connection terminals 501,. .
  • connection terminals 501 are provided on both surfaces of the wiring board 50 and on the upper and lower surfaces of the wiring board 50, and on the surface of the flexible printed circuit board 4.
  • the connection terminal 401 provided is connected by thermocompression bonding with an anisotropic conductive film (ACF).
  • ACF anisotropic conductive film
  • connection terminals 501 of the wiring board 50 are provided so as to have the same interval, and the arrangement pattern of the connection terminals 501 of the wiring board 50 and the connection terminals 401 of the flexible printed circuit board 4 are provided.
  • the arrangement pattern is the same.
  • connection method of wiring board and flexible printed circuit board A method for connecting the wiring board 50 and the flexible printed board 4 will be described with reference to FIG. First, the anisotropic conductive film 80 is arrange
  • thermocompression bonding is performed by applying pressure from the upper side of the upper flexible printed board 4 and the lower side of the flexible printed board 4 on the lower side of the wiring board 50.
  • the connection terminal 501 on the upper surface is connected to the connection terminal 401 on the lower surface of the flexible printed circuit board 4 (FIG. 11C).
  • the flexible printed circuit board 4 is connected to both surfaces of the wiring board 50 through such a series of steps.
  • the wiring interval can be increased without increasing the wiring board 50.
  • the wiring board 50 can be made smaller by providing the connection terminals 501 at positions overlapping the both surfaces of the wiring board 50 to connect the wiring board 50 and the flexible printed board 4.
  • connection terminals 501,... are provided on the front and back surfaces of the wiring board 50 at positions overlapping when viewed in plan, and the connection is made when the flexible printed board 4 is pressed and connected to the wiring board 50.
  • the pressure applied by overlapping the positions of the terminals 501 can be made uniform, and the wiring board 50 and the flexible printed board 4 can be stably connected.
  • the nozzle 11 is divided and arranged in nozzle formation areas N1 to N4.
  • the connection terminals 501 provided at both ends of the wiring board 50 are close to the respective nozzle formation areas. Since the wiring is connected to the connection terminal 501 at the other end, both surfaces of the wiring board 50 can be used efficiently, and the wiring can be simplified and the wiring interval can be widened.
  • the wiring board 50 can be bent and the wiring can be drawn out in a direction perpendicular to the wiring board 50.
  • the arrangement of the nozzles 11 is divided into four parallelogram-shaped nozzle formation areas on the nozzle substrate 10, the shape and number of the nozzle formation areas can be changed as appropriate. For example, eight nozzle formation areas may be provided so that two are connected to both ends and both surfaces of the wiring board 50. Further, the arrangement of the nozzles 11 can be appropriately changed. For example, the nozzles 11 may be arranged so that the first direction and the second direction are orthogonal to each other.
  • connection terminals 501 provided on the wiring board 50 as the number of nozzles 11 provided in each nozzle area is provided.
  • the number of connection terminals 501 provided on the wiring board 50 is larger, the number of connection terminals 501 The number can be changed as appropriate.
  • the number of connection terminals 501 increases, the interval between the connection terminals 501 becomes narrow, and as described above, it becomes difficult to connect stably. Therefore, the number of connection terminals 501 and the corresponding number on the nozzle substrate 10 are reduced. It is desirable that the number of nozzles 11 is not greatly different.
  • first wiring 57 and the second wiring 58 are not particularly limited to the wiring method as long as each piezoelectric element 42 can be connected to each connection terminal 501, and can be appropriately designed.
  • the wiring substrate 50 is provided with the individual flow path 70 as the ink flow path, it is necessary to perform wiring so as to avoid the individual flow path 70.
  • connection board 4 is used as the connection board to the drive unit 5
  • a rigid board may be used. If a rigid board is used, the connection board can be thermocompression bonded more stably.
  • the piezoelectric element 42 is used as the pressure generating means, there is no particular limitation as long as it has a mechanism capable of ejecting ink.
  • thermal electroactive conversion element
  • anisotropic conductive film is used when connecting the wiring board 50 and the flexible printed circuit board 4, but the method can be appropriately changed as long as the connection can be made by applying pressure.
  • a conductive adhesive may be used.
  • thermocompression bonding is performed twice on the lower surface and the upper surface of the wiring substrate 50, but both surfaces can be simultaneously performed.
  • both of them are thermocompression bonded at the same time, positioning of the flexible printed circuit board 4 becomes difficult, and if the position is shifted, connection failure occurs. Therefore, in order to connect more stably, it is desirable to connect one side at a time. .
  • the present invention can be used in an ink jet head, an ink jet recording apparatus, and a method of manufacturing an ink jet head.
  • connection board Flexible printed circuit board (connection board) DESCRIPTION OF SYMBOLS 10 Nozzle board

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  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

Provided is an inkjet head with which the wiring spacing can be widened without enlarging the inkjet head circuit board and which is capable of stable connections when connecting the circuit board with a connection substrate using pressurization. An inkjet head, which is provided with multiple nozzles for discharging ink, multiple piezoelectric elements that serve as driving sources for discharging the ink from the nozzles, and a circuit board (50) with wiring for supplying electricity to the multiple piezoelectric elements, is characterized: in having connection terminals (501), which are provided on both surfaces of the circuit board (50) for connecting connection substrates (4) using pressurization; and in the connection terminals (501) being provided at positions that overlie each other on the front surface and back surface of the circuit board (50).

Description

インクジェットヘッド、インクジェット記録装置及びインクジェットヘッドの製造方法Ink jet head, ink jet recording apparatus, and method of manufacturing ink jet head
 本発明は、インクジェットヘッド、インクジェット記録装置及びインクジェットヘッドの製造方法に関する。 The present invention relates to an inkjet head, an inkjet recording apparatus, and a method for manufacturing an inkjet head.
 従来、インクジェットヘッドに設けられている複数の微細なノズルからインクを吐出して記録媒体に画像を形成するインクジェット記録装置が知られている。
 近年、インクジェット記録装置により画像形成される画像の高精度化、印刷速度の高速度化の要望に応えるため、複数のインクジェットヘッドを千鳥格子状に配置したラインヘッドを用いて記録媒体の搬送のみで描画を行う1パス描画方式が提案されている。
2. Description of the Related Art Conventionally, an ink jet recording apparatus that forms an image on a recording medium by discharging ink from a plurality of fine nozzles provided in an ink jet head is known.
In recent years, in order to meet the demand for higher accuracy of images formed by inkjet recording devices and higher printing speeds, only recording media can be transported using a line head in which a plurality of inkjet heads are arranged in a staggered pattern. There has been proposed a one-pass drawing method in which drawing is performed with the.
 このようなラインヘッドに用いるインクジェットヘッドの形態としては、例えば、インクジェットヘッドに、ノズル間隔を小さくして、ノズルを二次元に高密度に配置する方法が知られている(特許文献1)。 As a form of the ink jet head used for such a line head, for example, a method is known in which the nozzle interval is reduced in the ink jet head and the nozzles are two-dimensionally arranged with high density (Patent Document 1).
再公表特許WO2011/068006号公報Republished patent WO2011 / 068006
 しかしながら、インクジェットヘッドに高密度にノズルを配置すれば、配線数も増えるため、配線間隔が狭くなり、配線の信頼性が低下するという問題が生じる。また、配線が高密度になると、インクジェットヘッドの配線基板と、駆動部への接続基板としてのフレキシブルプリント基板と、を接続する接続端子の数も増える。そのため、ノズルを高密度に配置する場合、接続端子のピッチが狭くなり、更には、接続端子の位置決めが難しくなるという問題も生じる。また、配線基板とフレキシブルプリント基板との間に、例えば、異方導電性フィルム(ACF)を熱圧着によって電気的接続を行う場合のように、接続端子に圧力が加わると、配線基板とフレキシブルプリント基板とを安定して接続することが難しくなる。 However, if nozzles are arranged at a high density in the ink jet head, the number of wirings increases, resulting in a problem that the wiring interval is narrowed and the wiring reliability is lowered. In addition, as the wiring density increases, the number of connection terminals that connect the wiring board of the inkjet head and the flexible printed circuit board as the connection board to the drive unit also increases. For this reason, when the nozzles are arranged at a high density, there arises a problem that the pitch of the connection terminals becomes narrow, and further, the positioning of the connection terminals becomes difficult. In addition, when pressure is applied to the connection terminal, for example, when an anisotropic conductive film (ACF) is electrically connected by thermocompression bonding between the wiring board and the flexible printed board, the wiring board and the flexible printed board are It becomes difficult to stably connect the substrate.
 本発明は、このような問題に鑑みてなされたものであり、本発明の課題は、インクジェットヘッドにノズルを高密度に配置した場合であっても、インクジェットヘッドの配線基板を大きくすることなく配線間隔を広げ、且つ配線基板と接続基板とを加圧により接続する際に安定して接続することができるインクジェットヘッド、インクジェット記録装置及びインクジェットヘッドの製造方法を提供することである。 The present invention has been made in view of such problems, and an object of the present invention is to perform wiring without enlarging the wiring substrate of the ink jet head even when the nozzles are arranged at high density in the ink jet head. An object is to provide an ink jet head, an ink jet recording apparatus, and a method for manufacturing the ink jet head that can be stably connected when the interval is widened and the wiring board and the connection board are connected by pressure.
 上記課題の解決のために、請求項1に記載の発明は、
 インクを吐出する複数のノズルと、前記ノズルからインクを吐出するための駆動源となる複数の圧力発生手段と、前記複数の圧力発生手段に対して給電するための配線を有する配線基板と、を備えるインクジェットヘッドにおいて、
 前記配線基板の両面に設けられ、接続基板を加圧により接続する接続部を有し、
 前記接続部は、前記配線基板の表面と裏面とで重なる位置に設けられていることを特徴とする。
In order to solve the above problems, the invention described in claim 1
A plurality of nozzles for discharging ink, a plurality of pressure generating means serving as drive sources for discharging ink from the nozzles, and a wiring board having wiring for supplying power to the plurality of pressure generating means, In the inkjet head provided,
Provided on both sides of the wiring board, having a connection part for connecting the connection board by pressure,
The connection portion is provided at a position where the front surface and the back surface of the wiring board overlap each other.
 請求項2に記載の発明は、請求項1に記載のインクジェットヘッドにおいて、
 前記接続基板は、異方導電性フィルムを介して前記接続部に接続されていることを特徴とする。
The invention according to claim 2 is the ink jet head according to claim 1,
The connection board is connected to the connection portion via an anisotropic conductive film.
 請求項3に記載の発明は、請求項1又は2に記載のインクジェットヘッドにおいて、
 前記接続部は、前記配線基板の端部に設けられていることを特徴とする。
The invention according to claim 3 is the inkjet head according to claim 1 or 2,
The connection portion is provided at an end portion of the wiring board.
 請求項4に記載の発明は、請求項3に記載のインクジェットヘッドにおいて、
 前記接続部は、前記配線基板の両端部に設けられていることを特徴とする。
The invention according to claim 4 is the inkjet head according to claim 3,
The connection part is provided at both ends of the wiring board.
 請求項5に記載の発明は、請求項4に記載のインクジェットヘッドにおいて、
 前記複数のノズルは、複数のノズル形成エリアに分割されて配置され、
 前記ノズル形成エリア毎に、前記配線基板の両端部に設けられた前記接続部のうち、それぞれの前記ノズル形成エリアから近い方の端部の前記接続部に前記配線が接続されていることを特徴とする。
The invention according to claim 5 is the inkjet head according to claim 4,
The plurality of nozzles are divided and arranged in a plurality of nozzle formation areas,
For each nozzle formation area, the wiring is connected to the connection portion at the end portion closer to the nozzle formation area among the connection portions provided at both ends of the wiring board. And
 請求項6に記載の発明は、請求項1~5の何れか一項に記載のインクジェットヘッドにおいて、
 前記接続部において、前記配線基板の表面と裏面に設けられた接続部のパターンが平面視した際に同一のパターン、且つ重なる位置となっていることを特徴とする。
The invention described in claim 6 is the inkjet head according to any one of claims 1 to 5,
In the connection part, when the pattern of the connection part provided on the front surface and the back surface of the wiring substrate is viewed in plan, it is the same pattern and overlaps.
 請求項7に記載の発明は、請求項1~6の何れか一項に記載のインクジェットヘッドにおいて、
 前記接続基板は、フレキシブルプリント基板であることを特徴とする。
The invention according to claim 7 is the inkjet head according to any one of claims 1 to 6,
The connection board is a flexible printed board.
 請求項8に記載の発明は、請求項1~7の何れか一項に記載のインクジェットヘッドにおいて、
 前記接続部は、所定の方向に配列された接続端子の列を有し、
 前記表面の接続端子と前記所定の方向において重なる位置に前記裏面の接続端子が設けられており、
 前記表面の接続端子に対応するノズルと前記所定の方向において重ならない位置に前記裏面の接続端子に対応するノズルが配置されていることを特徴とする。
The invention according to claim 8 is the inkjet head according to any one of claims 1 to 7,
The connection portion has a row of connection terminals arranged in a predetermined direction,
The connection terminal on the back surface is provided at a position overlapping the connection terminal on the front surface in the predetermined direction,
The nozzle corresponding to the connection terminal on the back surface is arranged at a position not overlapping with the nozzle corresponding to the connection terminal on the front surface in the predetermined direction.
 請求項9に記載の発明は、請求項1~8の何れか一項に記載のインクジェットヘッドにおいて、
 前記配線基板は、前記配線を前記配線基板の反対側に通すための配線用貫通孔を備えることを特徴とする。
The invention according to claim 9 is the inkjet head according to any one of claims 1 to 8,
The wiring board includes a through hole for wiring for passing the wiring through the opposite side of the wiring board.
 請求項10に記載の発明は、請求項1~9の何れか一項に記載のインクジェットヘッドにおいて、
 前記配線基板は、インクをノズルに供給するためのインク流路用貫通孔を備えることを特徴とする。
The invention according to claim 10 is the inkjet head according to any one of claims 1 to 9,
The wiring board includes an ink channel through hole for supplying ink to the nozzle.
 請求項11に記載の発明は、請求項1~10の何れか一項に記載のインクジェットヘッドにおいて、
 前記複数のノズルが形成されたノズル基板と、
 前記複数のノズルにそれぞれ連通する複数の圧力室が形成された圧力室基板と、
 前記複数の圧力室の壁面を構成する振動板と、
 前記複数の圧力室へ供給するインクを貯留する共通インク室と、
 前記配線基板と前記振動板の間に設けられたスペーサー基板と、
 を備え、
 前記ノズル基板のノズル面は前記配線基板と平行であり、
 前記圧力発生手段は、圧電素子であり、
 前記圧電素子は、前記複数の圧力室に対応する位置に配置され、前記振動板を変位させて、前記圧力室の内部における圧力変化を生じさせることにより、前記ノズルからインクを吐出させることを特徴とする。
The invention according to claim 11 is the inkjet head according to any one of claims 1 to 10,
A nozzle substrate on which the plurality of nozzles are formed;
A pressure chamber substrate in which a plurality of pressure chambers respectively communicating with the plurality of nozzles are formed;
A diaphragm constituting a wall surface of the plurality of pressure chambers;
A common ink chamber for storing ink to be supplied to the plurality of pressure chambers;
A spacer substrate provided between the wiring board and the diaphragm;
With
The nozzle surface of the nozzle substrate is parallel to the wiring substrate,
The pressure generating means is a piezoelectric element,
The piezoelectric element is disposed at a position corresponding to the plurality of pressure chambers, and displaces the diaphragm to cause a pressure change in the pressure chambers, thereby ejecting ink from the nozzles. And
 請求項12に記載の発明は、インクジェット記録装置において、
 請求項1~11の何れか一項に記載のインクジェットヘッドを備えることを特徴とする。
The invention according to claim 12 is the inkjet recording apparatus,
An ink jet head according to any one of claims 1 to 11 is provided.
 請求項13に記載の発明は、請求項1~11の何れか一項に記載のインクジェットヘッドの製造方法において、
 前記接続基板を前記配線基板に対して片面ずつ前記接続部に接続することを特徴とする。
A thirteenth aspect of the present invention is the ink jet head manufacturing method according to any one of the first to eleventh aspects,
The connection board is connected to the connection part on one side with respect to the wiring board.
 本発明によれば、インクジェットヘッドにノズルを高密度に配置した場合であっても、配線基板の両面を使用することにより、配線基板を大きくすることなく配線間隔を広げることができる。更に、配線基板の両面にそれぞれ重なる位置に接続部を設けて配線基板と接続基板を接続することにより、配線基板をより小さくすることができる。また、配線基板に接続基板を加圧により接続する際、接続部が重なることで加える圧力を均一にさせることができることとなって、配線基板と接続基板とを安定して接続することができる。 According to the present invention, even when the nozzles are arranged at a high density in the inkjet head, by using both sides of the wiring board, the wiring interval can be widened without increasing the wiring board. Furthermore, the wiring board can be made smaller by providing the connecting portions at positions overlapping with both surfaces of the wiring board and connecting the wiring board and the connection board. Further, when the connection board is connected to the wiring board by pressure, the pressure applied by the overlapping of the connection portions can be made uniform, and the wiring board and the connection board can be stably connected.
インクジェット記録装置の概略構成を示す斜視図である。1 is a perspective view illustrating a schematic configuration of an ink jet recording apparatus. インクジェットヘッドの斜視図である。It is a perspective view of an inkjet head. インクジェットヘッドの要部の断面図である。It is sectional drawing of the principal part of an inkjet head. 積層基板における貫通電極を備えるインク吐出部の断面図である。It is sectional drawing of an ink discharge part provided with the penetration electrode in a laminated substrate. 積層基板における貫通電極を備えないインク吐出部の断面図である。It is sectional drawing of the ink discharge part which is not provided with the penetration electrode in a laminated substrate. 積層基板の構成のZ方向における位置関係を説明する模式図である。It is a schematic diagram explaining the positional relationship in the Z direction of the structure of a laminated substrate. ノズル基板の底面図である。It is a bottom view of a nozzle substrate. ノズル形成エリアの位置関係を示すインクジェットヘッドの要部の断面図である。It is sectional drawing of the principal part of the inkjet head which shows the positional relationship of a nozzle formation area. 配線基板の接続端子の配置を示す、配線基板端部の平面図である。It is a top view of the wiring board edge part which shows arrangement | positioning of the connection terminal of a wiring board. 配線基板の接続端子の配置を示す、配線基板端部の底面図である。It is a bottom view of a wiring board end part showing arrangement of a connection terminal of a wiring board. 配線基板とフレキシブルプリント基板の接続について説明するための図であり、配線基板の端部付近の断面図である。It is a figure for demonstrating the connection of a wiring board and a flexible printed circuit board, and is sectional drawing of the edge part vicinity of a wiring board. 配線基板とフレキシブルプリント基板との接続方法において、異方導電性フィルムを配置した時点を説明する図である。It is a figure explaining the time of arrange | positioning an anisotropic conductive film in the connection method of a wiring board and a flexible printed circuit board. 配線基板とフレキシブルプリント基板との接続方法において、配線基板の下面を加圧した時点を説明する図である。It is a figure explaining the time of pressing the lower surface of a wiring board in the connection method of a wiring board and a flexible printed circuit board. 配線基板とフレキシブルプリント基板との接続方法において、配線基板の上面を加圧した時点を説明する図である。It is a figure explaining the time of pressing the upper surface of a wiring board in the connection method of a wiring board and a flexible printed circuit board.
[インクジェット記録装置の概略]
 インクジェット記録装置100は、図1に示す通り、記録媒体Kを支持するプラテン101を有している。プラテン101の前後には、記録媒体Kを搬送するための搬送ローラー102が設けられており、搬送ローラー102が駆動されると、記録媒体Kがプラテン2に支持された状態で後方から前方に搬送される。
[Outline of inkjet recording apparatus]
As shown in FIG. 1, the ink jet recording apparatus 100 includes a platen 101 that supports a recording medium K. A transport roller 102 for transporting the recording medium K is provided before and after the platen 101. When the transport roller 102 is driven, the recording medium K is transported from the rear to the front while being supported by the platen 2. Is done.
 プラテン101の上方には、搬送方向の上流側から下流側にかけて、搬送方向に直交する方向に延在する長尺なラインヘッド103,104,105,106が並列して設けられている。そして、ラインヘッド103,104,105,106の内部には、後述するインクジェットヘッド1を少なくとも一つ設けており、例えば、シアン(C),マゼンタ(M),イエロー(Y),黒(K)のインクを記録媒体Kに向けて吐出する。 Above the platen 101, long line heads 103, 104, 105, 106 extending in a direction orthogonal to the transport direction are provided in parallel from the upstream side to the downstream side in the transport direction. The line heads 103, 104, 105, and 106 are provided with at least one inkjet head 1 to be described later. For example, cyan (C), magenta (M), yellow (Y), and black (K). Are discharged toward the recording medium K.
[インクジェットヘッドの構成]
 インクジェットヘッド1の構成について、図2及び図3に基づいて説明する。なお、以下の説明において、複数のノズル11が設けられた平面をX-Y平面とし、当該平面に沿う方向であって、互いに直交する方向をそれぞれX方向、Y方向とする。また、X-Y平面に直交する方向をZ方向とする。
 インクジェットヘッド1には、インクを吐出する複数のノズル11がX方向及びY方向に配列された積層基板2が設けられている。積層基板2はZ方向に複数の基板が多層状に積層されて形成されており、積層基板2の最下部に位置するノズル基板10と最上部に位置する配線基板50とは平行になるように配置されている。積層基板2の上面には、複数のノズル11にインクを供給する共通インク室3が配設されており、保持板90によって積層基板2と共通インク室3が支持されている。そして、共通インク室3から積層基板2に設けられたインク吐出部7,8にインクが供給され、インク吐出部7,8に備えられた圧力発生手段としての圧電素子42が変位することでインクが加圧され、ノズル11からインク滴が吐出される。
 また、積層基板2の最上部には、圧電素子42に給電するための配線基板50が設けられており、各ノズル11に対応して、配線基板50の上面に貫通電極55を介した第一配線57又は配線基板50の下面に第二配線58が設けられている。第一配線57及び第二配線58は、配線基板50の両端部に設けられた接続部としての接続端子501(図9参照)において、接続基板としてのフレキシブルプリント基板4と接続している。そして、フレキシブルプリント基板4に接続された駆動部5から、フレキシブルプリント基板4と、第一配線57又は第二配線58とを通じて、圧電素子42に電気が供給されている。ここで、配線基板50の下面に接続されたフレキシブルプリント基板4は、配線基板50のX方向端部付近にあけられた保持板90の貫通孔から保持板90の上面に引き回されている。
[Configuration of inkjet head]
The configuration of the inkjet head 1 will be described with reference to FIGS. 2 and 3. In the following description, a plane provided with a plurality of nozzles 11 is defined as an XY plane, and directions along the plane and orthogonal to each other are defined as an X direction and a Y direction, respectively. The direction orthogonal to the XY plane is taken as the Z direction.
The inkjet head 1 is provided with a laminated substrate 2 in which a plurality of nozzles 11 for discharging ink are arranged in the X direction and the Y direction. The multilayer substrate 2 is formed by laminating a plurality of substrates in the Z direction so that the nozzle substrate 10 located at the bottom of the multilayer substrate 2 and the wiring substrate 50 located at the top are parallel to each other. Has been placed. A common ink chamber 3 that supplies ink to the plurality of nozzles 11 is disposed on the upper surface of the multilayer substrate 2, and the multilayer substrate 2 and the common ink chamber 3 are supported by a holding plate 90. Then, ink is supplied from the common ink chamber 3 to the ink discharge portions 7 and 8 provided on the laminated substrate 2, and the piezoelectric element 42 as the pressure generating means provided in the ink discharge portions 7 and 8 is displaced, whereby the ink Is pressurized, and ink droplets are ejected from the nozzle 11.
In addition, a wiring board 50 for supplying power to the piezoelectric element 42 is provided on the uppermost part of the multilayer substrate 2, and a first electrode via a through electrode 55 is provided on the upper surface of the wiring board 50 corresponding to each nozzle 11. A second wiring 58 is provided on the lower surface of the wiring 57 or the wiring substrate 50. The first wiring 57 and the second wiring 58 are connected to the flexible printed circuit board 4 as a connection board at connection terminals 501 (see FIG. 9) as connection parts provided at both ends of the wiring board 50. Electricity is supplied from the drive unit 5 connected to the flexible printed circuit board 4 to the piezoelectric element 42 through the flexible printed circuit board 4 and the first wiring 57 or the second wiring 58. Here, the flexible printed circuit board 4 connected to the lower surface of the wiring board 50 is routed to the upper surface of the holding board 90 from the through hole of the holding board 90 opened near the end of the wiring board 50 in the X direction.
[インク吐出部の構成]
 インク吐出部7,8は、図4及び図5に示す通り、配線基板50に貫通電極55を備えるインク吐出部7と、配線基板50に貫通電極55を備えていないインク吐出部8の二つの形態を有している。
 なお、以下の説明では、まずインク吐出部7について詳細に説明し、インク吐出部8については、インク吐出部8との相違点のみを後述する。
 また、インク吐出部7のZ方向における位置関係を説明する都合上、図6には、後述の圧力室311やインレット512等を実線で示して説明する。
[Configuration of ink ejection unit]
As shown in FIGS. 4 and 5, the ink discharge portions 7 and 8 include two ink discharge portions, an ink discharge portion 7 having a through electrode 55 on the wiring substrate 50 and an ink discharge portion 8 having no through electrode 55 on the wiring substrate 50. It has a form.
In the following description, the ink discharge unit 7 will be described in detail first, and only the differences between the ink discharge unit 8 and the ink discharge unit 8 will be described later.
For the convenience of describing the positional relationship in the Z direction of the ink discharge unit 7, FIG. 6 illustrates a pressure chamber 311 and an inlet 512, which will be described later, indicated by solid lines.
 インク吐出部7は、図4に示す通り、Z方向の下側から順にノズル基板10,接着用基板20,圧力室基板30,スペーサー基板40,配線基板50及び接着層60の6層構造で構成されている。 As shown in FIG. 4, the ink discharge unit 7 has a six-layer structure including a nozzle substrate 10, a bonding substrate 20, a pressure chamber substrate 30, a spacer substrate 40, a wiring substrate 50, and an adhesive layer 60 in order from the lower side in the Z direction. Has been.
 ノズル基板10は、シリコン製の基板であり、インク吐出部7の最下層に位置している。このノズル基板10には、複数のノズル11が形成され、ノズル基板10の下面がノズル面になっている。 The nozzle substrate 10 is a silicon substrate and is located in the lowermost layer of the ink discharge unit 7. A plurality of nozzles 11 are formed on the nozzle substrate 10, and the lower surface of the nozzle substrate 10 is a nozzle surface.
 接着用基板20は、ガラス製の基板であり、ノズル基板10の上面に積層され、接合されている。接着用基板20には、ノズル基板10のノズル11と連通して積層方向であるZ方向に貫通する貫通孔201が形成されている。 The bonding substrate 20 is a glass substrate, and is laminated and bonded to the upper surface of the nozzle substrate 10. The bonding substrate 20 is formed with a through hole 201 that communicates with the nozzle 11 of the nozzle substrate 10 and penetrates in the Z direction, which is the stacking direction.
 圧力室基板30は、圧力室層31と振動板32とから構成されている。
 圧力室層31は、シリコン製の基板であり、接着用基板20の上面に積層され、接合されている。圧力室層31には、ノズル11から吐出されるインクに吐出圧力を付与する圧力室311が、当該圧力室層31をZ方向に貫通するように形成されている。圧力室311は、貫通孔201及びノズル11の上方に設けられ、これら貫通孔201及びノズル11と連通している。また、圧力室層31には、圧力室311と連通する連通孔312が、当該圧力室層31をZ方向に貫通しつつ水平方向に延在するように形成されている(図6参照)。
 振動板32は、圧力室311の開口を覆うように圧力室層31の上面に積層され、接合されている。すなわち、振動板32は、圧力室311の上壁部を構成している。振動板32の表面には、酸化膜が形成されている。また、振動板32には、連通孔312と連通してZ方向に貫通する貫通孔321が形成されている。
The pressure chamber substrate 30 includes a pressure chamber layer 31 and a diaphragm 32.
The pressure chamber layer 31 is a silicon substrate and is laminated and bonded to the upper surface of the bonding substrate 20. In the pressure chamber layer 31, a pressure chamber 311 that applies ejection pressure to the ink ejected from the nozzle 11 is formed so as to penetrate the pressure chamber layer 31 in the Z direction. The pressure chamber 311 is provided above the through hole 201 and the nozzle 11 and communicates with the through hole 201 and the nozzle 11. In addition, a communication hole 312 communicating with the pressure chamber 311 is formed in the pressure chamber layer 31 so as to extend in the horizontal direction while penetrating the pressure chamber layer 31 in the Z direction (see FIG. 6).
The diaphragm 32 is laminated and bonded to the upper surface of the pressure chamber layer 31 so as to cover the opening of the pressure chamber 311. That is, the diaphragm 32 constitutes the upper wall portion of the pressure chamber 311. An oxide film is formed on the surface of the diaphragm 32. The diaphragm 32 is formed with a through hole 321 that communicates with the communication hole 312 and penetrates in the Z direction.
 スペーサー基板40は、42アロイにより構成された基板であり、振動板32の上面に積層され、振動板32と配線基板50との間に空間41を形成する隔壁層となっている。空間41は、スペーサー基板40をZ方向に貫通するように圧力室311の上方に形成され、内部に圧電素子42を収容している。
 圧電素子42は、圧力室311と略同一の平面視形状に形成され、振動板32を挟んで圧力室311と対向する位置に設けられている(図6参照)。この圧電素子42は、振動板32を変形させるためのPZT(lead zirconium titanate)からなるアクチュエーター
である。また、圧電素子42には、上面及び下面に2つの電極421,422が設けられており、このうち下面側の電極422が振動板32に接続されている。
 また、スペーサー基板40には、振動板32の貫通孔321と連通してZ方向に貫通する貫通孔401が、空間41とは独立して形成されている。
The spacer substrate 40 is a substrate made of 42 alloy and is a partition layer that is laminated on the upper surface of the diaphragm 32 and forms a space 41 between the diaphragm 32 and the wiring substrate 50. The space 41 is formed above the pressure chamber 311 so as to penetrate the spacer substrate 40 in the Z direction, and accommodates the piezoelectric element 42 therein.
The piezoelectric element 42 is formed in substantially the same plan view shape as the pressure chamber 311 and is provided at a position facing the pressure chamber 311 with the diaphragm 32 interposed therebetween (see FIG. 6). The piezoelectric element 42 is an actuator made of PZT (lead zirconium titanate) for deforming the diaphragm 32. The piezoelectric element 42 is provided with two electrodes 421 and 422 on the upper surface and the lower surface, and the electrode 422 on the lower surface side is connected to the diaphragm 32.
In addition, a through hole 401 that communicates with the through hole 321 of the diaphragm 32 and penetrates in the Z direction is formed in the spacer substrate 40 independently of the space 41.
 配線基板50は、シリコン製の基板であるインターポーザ51を備えている。インターポーザ51の下面には、2層の酸化ケイ素の絶縁層52,53が被覆され、上面には、同じく酸化ケイ素の絶縁層54が被覆されている。そして、絶縁層52,53のうち下方に位置する絶縁層53が、スペーサー基板40の上面に積層され、接合されている。
 インターポーザ51には、Z方向に貫通するスルーホール511が形成されており、このスルーホール511には、貫通電極55が挿通されている。貫通電極55の下端には、水平方向に延在する銅製の第三配線56の一端が接続されており、この第三配線56の他端には、圧電素子42上面の電極421に設けられたスタッドバンプ423が、空間41内に露出した半田561を介して接続されている。貫通電極55の上端には、第一配線57が接続されており、第一配線57は水平方向に延在し、フレキシブルプリント基板4に接続されている(図3参照)。また、第三配線56は、インターポーザ51下面の2層の絶縁層52,53によって挟まれて保護されている。
 なお、第三配線56は銅製であるとしたが、導体であれば素材は適宜変更可能であり、例えば、アルミニウムを使用することとしても良い。
 また、インターポーザ51には、スペーサー基板40の貫通孔401と連通してZ方向に貫通するインレット512が形成されている。このインレット512は、当該インレット512と連通する連通孔312、貫通孔321,401、及び後述する接着層60の貫通孔601の何れよりも小さい断面積に形成されている。なお、絶縁層52~54のうちインレット512近傍を被覆する各部分は、インレット512よりも大きい開口径に形成されている。
The wiring board 50 includes an interposer 51 that is a silicon substrate. The lower surface of the interposer 51 is covered with two layers of insulating layers 52 and 53 of silicon oxide, and the upper surface is also covered with an insulating layer 54 of silicon oxide. The insulating layer 53 positioned below the insulating layers 52 and 53 is laminated on the upper surface of the spacer substrate 40 and bonded thereto.
A through hole 511 that penetrates in the Z direction is formed in the interposer 51, and the through electrode 55 is inserted into the through hole 511. One end of a third copper wiring 56 extending in the horizontal direction is connected to the lower end of the through electrode 55, and the other end of the third wiring 56 is provided on the electrode 421 on the upper surface of the piezoelectric element 42. The stud bump 423 is connected via the solder 561 exposed in the space 41. A first wiring 57 is connected to the upper end of the through electrode 55. The first wiring 57 extends in the horizontal direction and is connected to the flexible printed board 4 (see FIG. 3). The third wiring 56 is sandwiched and protected by two insulating layers 52 and 53 on the lower surface of the interposer 51.
Although the third wiring 56 is made of copper, the material can be appropriately changed as long as it is a conductor. For example, aluminum may be used.
The interposer 51 is formed with an inlet 512 that communicates with the through hole 401 of the spacer substrate 40 and penetrates in the Z direction. The inlet 512 is formed to have a smaller cross-sectional area than any of the communication hole 312 communicating with the inlet 512, the through holes 321 and 401, and the through hole 601 of the adhesive layer 60 described later. Note that each portion of the insulating layers 52 to 54 covering the vicinity of the inlet 512 is formed to have an opening diameter larger than that of the inlet 512.
 接着層60は、配線基板50の上面に配設された第一配線57を覆いつつ、インターポーザ51の絶縁層54の上面に積層され、接合されている。この接着層60は、上方の共通インク室3をインク吐出部7と接着する感光性樹脂層であるとともに、第一配線57を保護する保護層となっている。
 また、接着層60には、インレット512と連通してZ方向に貫通する貫通孔601が形成されている。
The adhesive layer 60 is laminated and bonded to the upper surface of the insulating layer 54 of the interposer 51 while covering the first wiring 57 disposed on the upper surface of the wiring substrate 50. The adhesive layer 60 is a photosensitive resin layer that adheres the upper common ink chamber 3 to the ink discharge portion 7 and is a protective layer that protects the first wiring 57.
The adhesive layer 60 has a through hole 601 that communicates with the inlet 512 and penetrates in the Z direction.
 ここで、連通孔312、貫通孔321,401,601及びインレット512は、共通インク室3と圧力室311とを連通する個別流路70を構成している。 Here, the communication hole 312, the through holes 321, 401, and 601 and the inlet 512 constitute an individual flow path 70 that communicates the common ink chamber 3 and the pressure chamber 311.
 次に、インク吐出部8の構成について、図5を用いて説明する。なお、インク吐出部7とは、配線基板50の構成のみ異なるため、配線基板50についてのみ説明することとし、他の構成については同一の符号を付し、その説明を省略する。 Next, the configuration of the ink discharge unit 8 will be described with reference to FIG. Since only the configuration of the wiring substrate 50 is different from the ink ejection unit 7, only the wiring substrate 50 will be described, and the other components are denoted by the same reference numerals, and the description thereof is omitted.
 配線基板50は、シリコン製の基板であるインターポーザ51を備えている。インターポーザ51の下面には、2層の酸化ケイ素の絶縁層52,53が被覆され、上面には、同じく酸化ケイ素の絶縁層54が被覆されている。そして、絶縁層52,53のうち下方に位置する絶縁層53が、スペーサー基板40の上面に積層され、接合されている。
 インターポーザ51の下面には、第三配線56が水平方向に延在しており、インターポーザ51下面の2層の絶縁層52,53によって挟まれて保護されている。第三配線56の一端には、圧電素子42上面の電極421に設けられたスタッドバンプ423が、空間41内に露出した半田561を介して接続されている。また、第三配線56の他端には、第二配線が接続されており、第二配線58は水平方向に延在し、フレキシブルプリント基板4に接続されている(図3参照)。
The wiring board 50 includes an interposer 51 that is a silicon substrate. The lower surface of the interposer 51 is covered with two layers of insulating layers 52 and 53 of silicon oxide, and the upper surface is also covered with an insulating layer 54 of silicon oxide. The insulating layer 53 positioned below the insulating layers 52 and 53 is laminated on the upper surface of the spacer substrate 40 and bonded thereto.
A third wiring 56 extends horizontally on the lower surface of the interposer 51 and is sandwiched and protected by two insulating layers 52 and 53 on the lower surface of the interposer 51. A stud bump 423 provided on the electrode 421 on the upper surface of the piezoelectric element 42 is connected to one end of the third wiring 56 via solder 561 exposed in the space 41. A second wiring is connected to the other end of the third wiring 56, and the second wiring 58 extends in the horizontal direction and is connected to the flexible printed circuit board 4 (see FIG. 3).
 以上の構成を具備するインク吐出部7,8は、共通インク室3内のインクが個別流路70を通じて圧力室311に供給される。そして、駆動部5からの駆動信号に応じて、フレキシブルプリント基板4に接続された第一配線57又は第二配線58によって、第三配線56を通じて電極421,422間に電圧が印加され、電極421,422に挟まれた圧電素子42が振動板32とともに変形し、圧力室311内のインクが押し出されてノズル11から吐出される。 In the ink ejection units 7 and 8 having the above-described configuration, the ink in the common ink chamber 3 is supplied to the pressure chamber 311 through the individual flow path 70. A voltage is applied between the electrodes 421 and 422 through the third wiring 56 by the first wiring 57 or the second wiring 58 connected to the flexible printed circuit board 4 in accordance with a driving signal from the driving unit 5. , 422 is deformed together with the vibration plate 32, the ink in the pressure chamber 311 is pushed out and ejected from the nozzle 11.
[ノズルの配置]
 ノズル11は、図7に示すように、ノズル基板10上に平行四辺形状の四つのノズル形成エリアN1~N4を形成し、各ノズル形成エリア内に平行四辺形の各辺の方向に沿ってマトリクス状に並んで配置されている。なお、平行四辺形のうち二辺はY方向に平行であり、この方向を第一の方向とし、残りの二辺はY方向に非平行であってX方向に対して幾分傾斜しており、この方向を第二の方向として以下説明する。
[Nozzle arrangement]
As shown in FIG. 7, the nozzle 11 forms four parallelogram-shaped nozzle formation areas N1 to N4 on the nozzle substrate 10, and a matrix along the direction of each side of the parallelogram in each nozzle formation area. Are arranged side by side. Note that two sides of the parallelogram are parallel to the Y direction, this direction is the first direction, and the remaining two sides are non-parallel to the Y direction and are somewhat inclined with respect to the X direction. This direction will be described below as the second direction.
 ノズル形成エリアN1~N4は、Y方向に沿って長尺な平行四辺形であり、向きとサイズが同一であり、各エリア内にそれぞれ同数のノズル11が設けられている。また、ノズル形成エリアN1~N4は、ノズル基板10上において、X方向の上流側から順にN1,N4,N2,N3の順番で並んで形成されており、Y方向の下流側に向かってN1,N2,N3,N4の順にわずかずつずれて配置されている。そして、ノズル基板10上に設けられた全てのノズル11が第一の方向(Y方向)に対して、わずかずつずれるように配置されている。 The nozzle formation areas N1 to N4 are long parallelograms along the Y direction, have the same direction and size, and the same number of nozzles 11 are provided in each area. The nozzle formation areas N1 to N4 are formed on the nozzle substrate 10 in the order of N1, N4, N2, and N3 in this order from the upstream side in the X direction, and N1, N1 toward the downstream side in the Y direction. N2, N3 and N4 are arranged slightly shifted in order. All the nozzles 11 provided on the nozzle substrate 10 are arranged so as to be slightly shifted with respect to the first direction (Y direction).
 ノズル11の数は、第一の方向にn個(例えば、n=32)、第二の方向にm個(例えば、m=8)設けられており、ノズル形成エリアN1~N4内において、第一の方向と第二の方向に沿って所定の順番で配列されている。 The number of nozzles 11 is n (for example, n = 32) in the first direction and m (for example, m = 8) in the second direction, and the nozzles 11 are arranged in the nozzle formation areas N1 to N4. They are arranged in a predetermined order along the one direction and the second direction.
[ノズル形成エリアの配線]
 インクジェットヘッド1におけるノズル形成エリアN1~N4の配置は、図8に示す通り、X方向の上流側からN1、N4、N2、N3となるように配置されている。また、各ノズル形成エリアN1~N4は、それぞれのノズル形成エリアから近い方の配線基板50の端部に配線されており、具体的には、N1とN4はX方向の上流側、N2とN3はX方向の下流側に配線されてフレキシブルプリント基板4に接続され、最終的に駆動部5に接続される。
[Wiring of nozzle formation area]
As shown in FIG. 8, the nozzle formation areas N1 to N4 in the inkjet head 1 are arranged so as to be N1, N4, N2, and N3 from the upstream side in the X direction. Further, each of the nozzle formation areas N1 to N4 is wired at the end of the wiring board 50 closer to each nozzle formation area. Specifically, N1 and N4 are upstream in the X direction, and N2 and N3. Are wired downstream in the X direction, connected to the flexible printed circuit board 4, and finally connected to the drive unit 5.
 更に詳しく説明すると、ノズル形成エリアN1,N3は、ノズル基板10の両端部側に設けられたノズル形成エリアであり、配線基板50の下面の第二配線58から配線され、N1は右側、N3は左側に配線されて接続される。また、ノズル形成エリアN2,N4は、ノズル基板10の中央部側に設けられたノズル形成エリアであり、貫通電極55を介して配線基板50の上面の第一配線57から配線され、N4は右側、N2は左側に配線されて接続される。
 なお、説明の都合上、図8では、ノズル形成エリアN2、N4において、上部の一箇所のみ貫通している図を示しているが、実際には、各ノズル11に対応して、それぞれ一つずつ貫通電極55を備え、各ノズル11に対応して一つずつ配線基板50を貫通して配線されている。
More specifically, the nozzle formation areas N1 and N3 are nozzle formation areas provided on both end sides of the nozzle substrate 10, and are wired from the second wiring 58 on the lower surface of the wiring substrate 50, where N1 is the right side and N3 is the right side. Wired on the left side and connected. The nozzle formation areas N2 and N4 are nozzle formation areas provided on the central portion side of the nozzle substrate 10, and are wired from the first wiring 57 on the upper surface of the wiring substrate 50 through the through electrode 55, and N4 is on the right side. , N2 are wired and connected on the left side.
For convenience of explanation, FIG. 8 shows a diagram in which only one upper portion is penetrated in the nozzle formation areas N2 and N4. The through electrodes 55 are provided one by one, and are wired through the wiring board 50 one by one corresponding to each nozzle 11.
[接続端子の配置]
 配線基板50の両端部における接続端子501の配置について説明する。配線基板50は、接続端子501によって、フレキシブルプリント基板4に接続し、駆動部5に接続される。
 接続端子501は、配線基板50のX方向上流側の端部の上面において、図9Aに示すように、接続端子501,・・・がX方向に平行となる向きにY方向に沿って設けられている。また、配線基板50の右端部の下面に対しても同様に、図9Bに示すように、接続端子501,・・・が設けられており、上面に設けられた接続端子501,・・・に対して平面視した際に同一のパターン、且つ重なる位置に設けられている。
[Placement of connection terminals]
The arrangement of the connection terminals 501 at both ends of the wiring board 50 will be described. The wiring board 50 is connected to the flexible printed board 4 by the connection terminal 501 and is connected to the driving unit 5.
As shown in FIG. 9A, the connection terminals 501 are provided along the Y direction in the direction in which the connection terminals 501,... ing. Similarly, as shown in FIG. 9B, connection terminals 501,... Are provided on the lower surface of the right end portion of the wiring board 50, and the connection terminals 501,. On the other hand, they are provided in the same pattern and in an overlapping position when viewed in plan.
 各接続端子501,・・・は、第一配線57又は第二配線58の配線に各々接続され、ノズル形成エリアN4内の圧電素子42に対して各々接続されている。具体的には、配線基板50のX方向上流側の上面に設けられた接続端子501,・・・は、第一配線57を通じて、ノズル形成エリアN4の圧電素子42に各々接続されている。また、配線基板50のX方向上流側の下面に設けられた接続端子501,・・・は、第二配線58を通じて、ノズル形成エリアN1の圧電素子42に各々接続されている。
 ここで、ノズル基板10上に設けられたノズル11はY方向に対してそれぞれわずかずつずれて配置されているため、配線基板50のX方向上流側の上面に設けられた一の接続端子501と、これと重なる位置に設けられた下面の接続端子501は、それぞれY方向にわずかにずれたノズル11に対応する圧電素子42に接続されている。そして、それぞれの圧電素子42,42から第一配線57、第二配線58によって、配線基板50の上面及び下面におけるY方向に重なる位置に配置された接続端子501,501に配線されている。
 また、上記では、配線基板50におけるX方向の上流側について説明したが、X方向の下流側も同様の構成となっている。具体的には、X方向の下流側において、配線基板50の上面に設けられた端子501,・・・は、第一配線57を通じてノズル形成エリアN2の圧電素子42に各々接続され、また、配線基板50の下面に設けられた端子501,・・・は第二配線58を通じてノズル形成エリアN3の圧電素子42に各々接続される。
Each of the connection terminals 501,... Is connected to the first wiring 57 or the second wiring 58, and is connected to the piezoelectric element 42 in the nozzle formation area N4. Specifically, the connection terminals 501,... Provided on the upper surface on the upstream side in the X direction of the wiring board 50 are connected to the piezoelectric elements 42 in the nozzle formation area N4 through the first wiring 57, respectively. Further, the connection terminals 501,... Provided on the lower surface on the upstream side in the X direction of the wiring substrate 50 are connected to the piezoelectric elements 42 in the nozzle formation area N1 through the second wiring 58, respectively.
Here, since the nozzles 11 provided on the nozzle substrate 10 are slightly shifted from each other with respect to the Y direction, one connection terminal 501 provided on the upper surface of the wiring substrate 50 on the upstream side in the X direction The connection terminals 501 on the lower surface provided at the overlapping positions are connected to the piezoelectric elements 42 corresponding to the nozzles 11 slightly shifted in the Y direction. The piezoelectric elements 42 and 42 are wired to connection terminals 501 and 501 arranged at positions overlapping in the Y direction on the upper surface and the lower surface of the wiring substrate 50 by the first wiring 57 and the second wiring 58.
In the above description, the upstream side in the X direction of the wiring board 50 has been described, but the downstream side in the X direction has the same configuration. Specifically, on the downstream side in the X direction, the terminals 501,... Provided on the upper surface of the wiring board 50 are connected to the piezoelectric elements 42 in the nozzle formation area N2 through the first wiring 57, respectively. Terminals 501,... Provided on the lower surface of the substrate 50 are connected to the piezoelectric elements 42 in the nozzle formation area N3 through the second wiring 58, respectively.
 また、配線基板50の両端部の各接続端子501,・・・の数は、単位当たりのノズル形成エリアの圧電素子42の数と同数設けられている。具体的には、例えば、図7の例で述べた通り、ノズル11を各ノズル形成エリアにm×n個設けた場合には、接続端子501,・・・の数はm×n個となる。 The number of connection terminals 501,... At both ends of the wiring board 50 is the same as the number of piezoelectric elements 42 in the nozzle formation area per unit. Specifically, for example, as described in the example of FIG. 7, when m × n nozzles 11 are provided in each nozzle formation area, the number of connection terminals 501,. .
 配線基板50とフレキシブルプリント基板4は、図10に示す通り、配線基板50との両面に設けられた各接続端子501と、配線基板50の上面及び下面に設けられ、フレキシブルプリント基板4の表面に設けられた接続端子401と、を異方導電性フィルム(ACF)によって熱圧着することによって接続されている。 As shown in FIG. 10, the wiring board 50 and the flexible printed circuit board 4 are provided on the connection terminals 501 provided on both surfaces of the wiring board 50 and on the upper and lower surfaces of the wiring board 50, and on the surface of the flexible printed circuit board 4. The connection terminal 401 provided is connected by thermocompression bonding with an anisotropic conductive film (ACF).
 なお、上記の通り、配線基板50の接続端子501は、それぞれが同間隔となるように設けられており、また、配線基板50の接続端子501の配置パターンと、フレキシブルプリント基板4の接続端子401の配置パターンは同一である。 As described above, the connection terminals 501 of the wiring board 50 are provided so as to have the same interval, and the arrangement pattern of the connection terminals 501 of the wiring board 50 and the connection terminals 401 of the flexible printed circuit board 4 are provided. The arrangement pattern is the same.
[配線基板とフレキシブルプリント基板の接続方法]
 配線基板50とフレキシブルプリント基板4の接続方法について、図11に基づいて説明する。最初に、配線基板50の接続端子501とフレキシブルプリント基板4の接続端子401との間に異方導電性フィルム80を配置する(図11A)。次に、配線基板50の下面側において、配線基板50の上側からとフレキシブルプリント基板4の下側からとでそれぞれ加圧して熱圧着を行い、配線基板50の下面の接続端子501と、フレキシブルプリント基板4の上面の接続端子401とを接続する(図11B)。次に、配線基板50の上面において、上側のフレキシブルプリント基板4の上側からと配線基板50の下側のフレキシブルプリント基板4の下側からとでそれぞれ加圧して熱圧着を行い、配線基板50の上面の接続端子501と、フレキシブルプリント基板4の下面の接続端子401とを接続する(図11C)。このような一連の工程によって、配線基板50の両面にフレキシブルプリント基板4を接続する。
[Connection method of wiring board and flexible printed circuit board]
A method for connecting the wiring board 50 and the flexible printed board 4 will be described with reference to FIG. First, the anisotropic conductive film 80 is arrange | positioned between the connection terminal 501 of the wiring board 50, and the connection terminal 401 of the flexible printed circuit board 4 (FIG. 11A). Next, on the lower surface side of the wiring substrate 50, pressure is applied from the upper side of the wiring substrate 50 and from the lower side of the flexible printed circuit board 4 to perform thermocompression bonding, and the connection terminals 501 on the lower surface of the wiring substrate 50 are connected to the flexible printed circuit board. The connection terminal 401 on the upper surface of the substrate 4 is connected (FIG. 11B). Next, on the upper surface of the wiring board 50, thermocompression bonding is performed by applying pressure from the upper side of the upper flexible printed board 4 and the lower side of the flexible printed board 4 on the lower side of the wiring board 50. The connection terminal 501 on the upper surface is connected to the connection terminal 401 on the lower surface of the flexible printed circuit board 4 (FIG. 11C). The flexible printed circuit board 4 is connected to both surfaces of the wiring board 50 through such a series of steps.
[本実施形態における技術的効果]
 以上、説明した通り、インクジェットヘッド1にノズル11を高密度に配置した場合であっても、配線基板50の両面を使用することにより、配線基板50を大きくすることなく配線間隔を広げることができる。更に、配線基板50の両面にそれぞれ重なる位置に接続端子501を設けて配線基板50とフレキシブルプリント基板4を接続することにより、配線基板50をより小さくすることができる。
[Technical effects in this embodiment]
As described above, even when the nozzles 11 are arranged at a high density in the inkjet head 1, by using both surfaces of the wiring board 50, the wiring interval can be increased without increasing the wiring board 50. . Further, the wiring board 50 can be made smaller by providing the connection terminals 501 at positions overlapping the both surfaces of the wiring board 50 to connect the wiring board 50 and the flexible printed board 4.
 また、配線基板50の表面と裏面には、平面視した際に重なる位置に接続端子501,・・・が設けられており、配線基板50にフレキシブルプリント基板4を加圧して接続する際、接続端子501の位置が重なることで加える圧力を均一にさせることができ、配線基板50とフレキシブルプリント基板4とを安定して接続することができる。 Further, the connection terminals 501,... Are provided on the front and back surfaces of the wiring board 50 at positions overlapping when viewed in plan, and the connection is made when the flexible printed board 4 is pressed and connected to the wiring board 50. The pressure applied by overlapping the positions of the terminals 501 can be made uniform, and the wiring board 50 and the flexible printed board 4 can be stably connected.
 また、ノズル11を、ノズル形成エリアN1~N4に分割して配置しており、ノズル形成エリア毎に、配線基板50の両端部に設けられた接続端子501のうち、それぞれのノズル形成エリアから近い方の端部の接続端子501に配線が接続されているため、配線基板50の両面を効率的に使用することができ、配線をより単純化して配線間隔を広げることが可能である。 Further, the nozzle 11 is divided and arranged in nozzle formation areas N1 to N4. For each nozzle formation area, the connection terminals 501 provided at both ends of the wiring board 50 are close to the respective nozzle formation areas. Since the wiring is connected to the connection terminal 501 at the other end, both surfaces of the wiring board 50 can be used efficiently, and the wiring can be simplified and the wiring interval can be widened.
 また、接続基板にフレキシブルプリント基板4を使用しているため、配線基板50を折り曲げて、配線基板50に対して垂直方向にも配線を引き出すことができる。 Further, since the flexible printed board 4 is used as the connection board, the wiring board 50 can be bent and the wiring can be drawn out in a direction perpendicular to the wiring board 50.
[その他]
 なお、ノズル11の配置を、ノズル基板10上に対して、平行四辺形状の四つのノズル形成エリアに分割して配置することとしたが、ノズル形成エリアの形状や数は適宜変更可能であり、例えば、8つのノズル形成エリアを設けて、配線基板50の両端かつ両面に、それぞれ2つずつ繋げるように構成しても良い。
 また、ノズル11の配置に関しても適宜変更可能であり、例えば、第一の方向と第二の方向とが直交するように配置させても良い。
[Others]
Although the arrangement of the nozzles 11 is divided into four parallelogram-shaped nozzle formation areas on the nozzle substrate 10, the shape and number of the nozzle formation areas can be changed as appropriate. For example, eight nozzle formation areas may be provided so that two are connected to both ends and both surfaces of the wiring board 50.
Further, the arrangement of the nozzles 11 can be appropriately changed. For example, the nozzles 11 may be arranged so that the first direction and the second direction are orthogonal to each other.
 また、配線基板50に設ける接続端子501の数と各ノズルエリアに設けるノズル11の数を同数設けることとしたが、配線基板50に設ける接続端子501の数の方が多ければ、接続端子501の数は適宜変更可能である。ここで接続端子501の数を多くすることにより、不良な接続端子501があった場合の予備として使用することができる。但し、接続端子501の数が増えれば、接続端子501間の間隔が狭くなり、上記の通り、安定して接続することが難しくなるため、接続端子501の数と、対応するノズル基板10上のノズル11の数を大きく相違させないことが望ましい。 In addition, the same number of connection terminals 501 provided on the wiring board 50 as the number of nozzles 11 provided in each nozzle area is provided. However, if the number of connection terminals 501 provided on the wiring board 50 is larger, the number of connection terminals 501 The number can be changed as appropriate. Here, by increasing the number of connection terminals 501, it can be used as a backup when there is a defective connection terminal 501. However, if the number of the connection terminals 501 increases, the interval between the connection terminals 501 becomes narrow, and as described above, it becomes difficult to connect stably. Therefore, the number of connection terminals 501 and the corresponding number on the nozzle substrate 10 are reduced. It is desirable that the number of nozzles 11 is not greatly different.
 また、第一配線57、第二配線58は、各圧電素子42を各接続端子501に接続できるように構成されていれば、配線方法に特に限られることはなく、適宜設計可能である。但し、配線基板50には、インク流路としての個別流路70が設けられているため、個別流路70を避けるようにして配線する必要がある。 Further, the first wiring 57 and the second wiring 58 are not particularly limited to the wiring method as long as each piezoelectric element 42 can be connected to each connection terminal 501, and can be appropriately designed. However, since the wiring substrate 50 is provided with the individual flow path 70 as the ink flow path, it is necessary to perform wiring so as to avoid the individual flow path 70.
 また、駆動部5への接続基板としてフレキシブルプリント基板4を使用することとしたが、リジット基板を使用しても良い。リジット基板を使用すれば、より安定して接続基板を熱圧着することができる。 In addition, although the flexible printed circuit board 4 is used as the connection board to the drive unit 5, a rigid board may be used. If a rigid board is used, the connection board can be thermocompression bonded more stably.
 また、圧力発生手段として圧電素子42を使用することとしたが、インクを吐出できる機構を備えていれば特に限られることはなく、例えば、サーマル(電気熱変換素子)を使用することとしても良い。 Further, although the piezoelectric element 42 is used as the pressure generating means, there is no particular limitation as long as it has a mechanism capable of ejecting ink. For example, thermal (electrothermal conversion element) may be used. .
 また、配線基板50とフレキシブルプリント基板4を接続する際に、異方導電性フィルムを使用することとしたが、圧力を加えて接続することができれば、方法は適宜変更可能であり、例えば、異方導電性接着剤を使用しても良い。 In addition, the anisotropic conductive film is used when connecting the wiring board 50 and the flexible printed circuit board 4, but the method can be appropriately changed as long as the connection can be made by applying pressure. Alternatively, a conductive adhesive may be used.
 また、配線基板50とフレキシブルプリント基板4の接続方法において、配線基板50の下面と上面の2回に分けて熱圧着しているが、両面を同時に行うことも可能である。但し、両方同時に熱圧着する場合、フレキシブルプリント基板4の位置決めが難しくなり、もし位置がずれた場合には接続不良が生じるため、より安定して接続させるためには、片面ずつ接続させることが望ましい。 Further, in the method of connecting the wiring board 50 and the flexible printed board 4, the thermocompression bonding is performed twice on the lower surface and the upper surface of the wiring substrate 50, but both surfaces can be simultaneously performed. However, when both of them are thermocompression bonded at the same time, positioning of the flexible printed circuit board 4 becomes difficult, and if the position is shifted, connection failure occurs. Therefore, in order to connect more stably, it is desirable to connect one side at a time. .
 更に、本発明の範囲は上記に限られることなく、本発明の趣旨を逸脱しない範囲において種々の改良並びに設計の変更を行っても良い。 Furthermore, the scope of the present invention is not limited to the above, and various improvements and design changes may be made without departing from the spirit of the present invention.
 本発明は、インクジェットヘッド、インクジェット記録装置及びインクジェットヘッドの製造方法に利用することができる。 The present invention can be used in an ink jet head, an ink jet recording apparatus, and a method of manufacturing an ink jet head.
1   インクジェットヘッド
3   共通インク室
4   フレキシブルプリント基板(接続基板)
10  ノズル基板
11  ノズル
30  圧力室基板
32  振動板
40  スペーサー基板
42  圧電素子(圧力発生手段)
50  配線基板
80  異方導電性フィルム
100 インクジェット記録装置
501 接続端子(接続部)
511 スルーホール(配線用貫通孔)
601 貫通孔(インク流路用貫通孔)
N1~N4 ノズル形成エリア
1 Inkjet head 3 Common ink chamber 4 Flexible printed circuit board (connection board)
DESCRIPTION OF SYMBOLS 10 Nozzle board | substrate 11 Nozzle 30 Pressure chamber board | substrate 32 Diaphragm 40 Spacer board | substrate 42 Piezoelectric element (pressure generation means)
50 Wiring board 80 Anisotropic conductive film 100 Inkjet recording apparatus 501 Connection terminal (connection part)
511 Through hole (through hole for wiring)
601 Through hole (through hole for ink flow path)
N1 to N4 nozzle formation area

Claims (13)

  1.  インクを吐出する複数のノズルと、前記ノズルからインクを吐出するための駆動源となる複数の圧力発生手段と、前記複数の圧力発生手段に対して給電するための配線を有する配線基板と、を備えるインクジェットヘッドにおいて、
     前記配線基板の両面に設けられ、接続基板を加圧により接続する接続部を有し、
     前記接続部は、前記配線基板の表面と裏面とで重なる位置に設けられていることを特徴とするインクジェットヘッド。
    A plurality of nozzles for discharging ink, a plurality of pressure generating means serving as drive sources for discharging ink from the nozzles, and a wiring board having wiring for supplying power to the plurality of pressure generating means, In the inkjet head provided,
    Provided on both sides of the wiring board, having a connection part for connecting the connection board by pressure,
    The inkjet head according to claim 1, wherein the connection portion is provided at a position where the front surface and the back surface of the wiring board overlap each other.
  2.  前記接続基板は、異方導電性フィルムを介して前記接続部に接続されていることを特徴とする請求項1に記載のインクジェットヘッド。 2. The inkjet head according to claim 1, wherein the connection substrate is connected to the connection portion via an anisotropic conductive film.
  3.  前記接続部は、前記配線基板の端部に設けられていることを特徴とする請求項1又は2に記載のインクジェットヘッド。 3. The ink jet head according to claim 1, wherein the connecting portion is provided at an end portion of the wiring board.
  4.  前記接続部は、前記配線基板の両端部に設けられていることを特徴とする請求項3に記載のインクジェットヘッド。 4. The ink jet head according to claim 3, wherein the connection portion is provided at both ends of the wiring board.
  5.  前記複数のノズルは、複数のノズル形成エリアに分割されて配置され、
     前記ノズル形成エリア毎に、前記配線基板の両端部に設けられた前記接続部のうち、それぞれの前記ノズル形成エリアから近い方の端部の前記接続部に前記配線が接続されていることを特徴とする請求項4に記載のインクジェットヘッド。
    The plurality of nozzles are divided and arranged in a plurality of nozzle formation areas,
    For each nozzle formation area, the wiring is connected to the connection portion at the end portion closer to the nozzle formation area among the connection portions provided at both ends of the wiring board. The inkjet head according to claim 4.
  6.  前記接続部において、前記配線基板の表面と裏面に設けられた接続部のパターンが平面視した際に同一のパターン、且つ重なる位置となっていることを特徴とする請求項1~5の何れか一項に記載のインクジェットヘッド。 6. The connection portion according to claim 1, wherein the connection portion patterns provided on the front surface and the back surface of the wiring board are in the same pattern and overlap when viewed in plan. The inkjet head according to one item.
  7.  前記接続基板は、フレキシブルプリント基板であることを特徴とする請求項1~6の何れか一項に記載のインクジェットヘッド。 The inkjet head according to any one of claims 1 to 6, wherein the connection substrate is a flexible printed circuit board.
  8.  前記接続部は、所定の方向に配列された接続端子の列を有し、
     前記表面の接続端子と前記所定の方向において重なる位置に前記裏面の接続端子が設けられており、
     前記表面の接続端子に対応するノズルと前記所定の方向において重ならない位置に前記裏面の接続端子に対応するノズルが配置されていることを特徴とする請求項1~7の何れか一項に記載のインクジェットヘッド。
    The connection portion has a row of connection terminals arranged in a predetermined direction,
    The connection terminal on the back surface is provided at a position overlapping the connection terminal on the front surface in the predetermined direction,
    The nozzle corresponding to the connection terminal on the back surface is arranged at a position not overlapping with the nozzle corresponding to the connection terminal on the front surface in the predetermined direction. Inkjet head.
  9.  前記配線基板は、前記配線を前記配線基板の反対側に通すための配線用貫通孔を備えることを特徴とする請求項1~8の何れか一項に記載のインクジェットヘッド。 The inkjet head according to any one of claims 1 to 8, wherein the wiring board includes a wiring through-hole for passing the wiring through the opposite side of the wiring board.
  10.  前記配線基板は、インクをノズルに供給するためのインク流路用貫通孔を備えることを特徴とする請求項1~9の何れか一項に記載のインクジェットヘッド。 The inkjet head according to any one of claims 1 to 9, wherein the wiring board includes an ink channel through hole for supplying ink to the nozzle.
  11.  前記複数のノズルが形成されたノズル基板と、
     前記複数のノズルにそれぞれ連通する複数の圧力室が形成された圧力室基板と、
     前記複数の圧力室の壁面を構成する振動板と、
     前記複数の圧力室へ供給するインクを貯留する共通インク室と、
     前記配線基板と前記振動板の間に設けられたスペーサー基板と、
     を備え、
     前記ノズル基板のノズル面は前記配線基板と平行であり、
     前記圧力発生手段は、圧電素子であり、
     前記圧電素子は、前記複数の圧力室に対応する位置に配置され、前記振動板を変位させて、前記圧力室の内部における圧力変化を生じさせることにより、前記ノズルからインクを吐出させることを特徴とする請求項1~10の何れか一項に記載のインクジェットヘッド。
    A nozzle substrate on which the plurality of nozzles are formed;
    A pressure chamber substrate in which a plurality of pressure chambers respectively communicating with the plurality of nozzles are formed;
    A diaphragm constituting a wall surface of the plurality of pressure chambers;
    A common ink chamber for storing ink to be supplied to the plurality of pressure chambers;
    A spacer substrate provided between the wiring board and the diaphragm;
    With
    The nozzle surface of the nozzle substrate is parallel to the wiring substrate,
    The pressure generating means is a piezoelectric element,
    The piezoelectric element is disposed at a position corresponding to the plurality of pressure chambers, and displaces the diaphragm to cause a pressure change in the pressure chambers, thereby ejecting ink from the nozzles. The inkjet head according to any one of claims 1 to 10.
  12.  請求項1~11の何れか一項に記載のインクジェットヘッドを備えることを特徴とするインクジェット記録装置。 An ink jet recording apparatus comprising the ink jet head according to any one of claims 1 to 11.
  13.  請求項1~11の何れか一項に記載のインクジェットヘッドの製造方法において、
     前記接続基板を前記配線基板に対して片面ずつ前記接続部に接続することを特徴とするインクジェットヘッドの製造方法。
    The method of manufacturing an ink jet head according to any one of claims 1 to 11,
    A method of manufacturing an ink jet head, wherein the connection substrate is connected to the connection portion one side at a time with respect to the wiring substrate.
PCT/JP2015/066963 2014-06-19 2015-06-12 Inkjet head, inkjet printing apparatus, and inkjet head manufacturing method WO2015194463A1 (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006082396A (en) * 2004-09-16 2006-03-30 Konica Minolta Holdings Inc Ink-jet head
JP2011115972A (en) * 2009-12-01 2011-06-16 Konica Minolta Holdings Inc Ink jet head

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006082396A (en) * 2004-09-16 2006-03-30 Konica Minolta Holdings Inc Ink-jet head
JP2011115972A (en) * 2009-12-01 2011-06-16 Konica Minolta Holdings Inc Ink jet head

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