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WO2015085577A1 - Système et procédé d'analyse d'échantillon de gaz en utilisant un spectromètre de masse des ions secondaires - Google Patents

Système et procédé d'analyse d'échantillon de gaz en utilisant un spectromètre de masse des ions secondaires Download PDF

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Publication number
WO2015085577A1
WO2015085577A1 PCT/CN2013/089380 CN2013089380W WO2015085577A1 WO 2015085577 A1 WO2015085577 A1 WO 2015085577A1 CN 2013089380 W CN2013089380 W CN 2013089380W WO 2015085577 A1 WO2015085577 A1 WO 2015085577A1
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WO
WIPO (PCT)
Prior art keywords
metal plate
hole
gas
mass spectrometer
sample
Prior art date
Application number
PCT/CN2013/089380
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English (en)
Chinese (zh)
Inventor
唐国强
赵洪
李献华
李秋立
刘宇
Original Assignee
中国科学院地质与地球物理研究所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 中国科学院地质与地球物理研究所 filed Critical 中国科学院地质与地球物理研究所
Priority to CN201380021677.7A priority Critical patent/CN105103265B/zh
Priority to PCT/CN2013/089380 priority patent/WO2015085577A1/fr
Publication of WO2015085577A1 publication Critical patent/WO2015085577A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised

Definitions

  • This invention relates to the field of analytical instrumentation, and more particularly to a system and method for analyzing a gas sample using a secondary ion mass spectrometer. Background technique
  • Secondary ion mass spectrometers are commonly used for in-situ analysis, surface analysis and in-depth analysis of solid samples, which are widely used in materials science, life sciences, geological sciences and other fields.
  • the analysis process of the secondary ion mass spectrometer is to place the solid sample in a vacuum, bombard the solid sample with a specific kind of primary ion, and the sample is sputtered with secondary ions under the bombardment of a certain energy of one ion, and the secondary ion represents Information on the composition of the sample.
  • the secondary ions are separated temporally or spatially using an electric or magnetic field to determine the type and amount of secondary ions in order to enable qualitative and quantitative analysis of solid samples. .
  • the principle of a secondary ion mass spectrometer which generally uses a magnetic field as a mass analyzer, is shown in Figure 1.
  • the primary ion source 1 produces a primary ion 2 .
  • the primary ion 2 is focused by the electric field generated by the ion optical lenses 3, 5, 6 onto the surface of sample 7 (sample 7 is located in the sample chamber), and sample 7 is bombarded.
  • the primary ion 2 and ion optical lenses 3, 5, 6 are located within the vacuum chamber 4.
  • the primary ion 2 bombards the sample 7, and a part of the sample 7 is ionized to generate secondary ions 9.
  • the secondary ions 9 pass through the ion optical lens 10, 11, 12 , an electrostatic field analyzer 13, an ion optical lens 15, a magnetic field analyzer 16, an ion optical lens 18, and reach the receiver 19.
  • Sample 7 and ion optical lenses 10, 11, 12 are located within vacuum chamber 8.
  • the ion optical lens 15 is located within the vacuum chamber 14.
  • the ion optical lens 18 is located within the vacuum chamber 17.
  • the electrostatic field analyzer 13 and the magnetic field analyzer 16 constitute a double focusing structure for achieving angular focusing and energy focusing while achieving mass separation of the secondary ions 9.
  • the intensity of the magnetic field analyzer 16 determines the type of ions received by the receiver 19. Depending on the signal strength received by the receiver 19, the sample 7 can be qualitatively and quantitatively analyzed.
  • the secondary ion mass spectrometer only analyzes the solid sample and does not analyze the gas sample, thus causing the secondary ion mass spectrometer to have certain requirements on the morphology of the sample (that is, the gas sample cannot be analyzed), and the use range has certain limitations. If it is possible to analyze a gas sample using a secondary ion mass spectrometer, it is bound to be able to extend two Application areas of secondary ion mass spectrometers. Summary of the invention
  • the present invention provides a system for analyzing a gas sample using a secondary ion mass spectrometer, comprising: an extraction electrode, a metal plate, and a gas introduction conduit; the extraction electrode and the metal plate are located at In the sample chamber of the secondary ion mass spectrometer, the bow [the outlet is provided with a first through hole for passing primary ions, a second through hole for passing secondary ions, and for introducing through the gas a third through hole of the conduit; the gas introduction conduit passes through the third through hole to guide the gas sample to a surface of the metal plate, and the gas sample forms the under the bombardment of the primary ions a secondary ion; an electric field is formed between the outlet of the bow I and the metal plate, so that the secondary ions fly away from the metal plate through the second through hole into the secondary ion mass spectrometer for mass analysis.
  • the bow [outer ground potential, the secondary ions are negative ions, and the metal plate is connected to a negative voltage such that the secondary ions are repulsed into the secondary ion mass spectrometry
  • the instrument performs quality analysis.
  • the gas sample is bowed [guided to a region of the surface of the metal sheet, the primary ion bombarding the region such that the gas sample in the vicinity of the region is ionized to generate the Secondary ions.
  • the bow [the exit electrode and the metal plate are kept at a certain distance, the sample chamber is in a vacuum state; and the electric field is a uniform electric field.
  • the distance is 5 mm (i.e., mm)
  • the surface of the metal plate is smooth and flat; and the metal plate does not contain an element contained in the gas sample.
  • the second through hole on the extraction pole is located at a center of the extraction pole to form a central hole, and the first through hole and the third through hole are symmetrically distributed in the second through hole. Both sides of the hole.
  • the thickness of the extraction pole is about 2 mm (ie, mm), and the material is a metal material including non-magnetic stainless steel; the first through hole, the second through hole, and the third through hole.
  • the hole has a diameter of about 2 mm (ie, mm); the material of the metal plate includes pure gold or indium or tungsten metal material.
  • the gas introduction conduit further comprises a valve for regulating a flow rate of the gas sample into the sample chamber; the gas introduction conduit is a thin tube made of a metal material, the metal Materials include non-magnetic stainless steel.
  • the gas introduction conduit is grounded, the gas introduction conduit introduces the gas sample from the sample chamber into the sample chamber, the end of the gas introduction conduit and the extraction Extremely flush, the gas introduction conduit has an inner diameter of about 0.5 mm (i.e., mm) and an outer diameter of about 1 mm (i.e., mm;).
  • the primary ion comprises a cesium ion or a gallium ion
  • the gas sample is a non-corrosive gas, including oxygen (ie, 02), nitrogen (ie, N2) or carbon dioxide ( That is, C02)
  • the secondary ion mass spectrometer comprises a magnetic mass spectrometer, a time-of-flight mass spectrometer or a quadrupole mass spectrometer; the secondary ions enter the electric field and/or magnetic field of the secondary ion mass spectrometer for mass analysis.
  • the present invention also provides a method for analyzing a gas sample using a secondary ion mass spectrometer comprising using a bow [exit, metal plate and gas introduction conduit; the extraction pole and the metal plate are located in the secondary ion mass spectrometer a sample chamber having a first through hole for passing primary ions, a second through hole for passing secondary ions, and a third through hole for passing through the gas introduction conduit, It is characterized by the following steps:
  • Step 1 passing the gas introduction conduit through the third through hole, and guiding the gas sample to a surface of the metal plate using the gas introduction conduit;
  • Step 2 using the primary ion pair to bombard the gas sample guided to the surface of the metal plate to form the secondary ion;
  • Step 3 an electric field is formed between the extraction pole and the metal plate, and the secondary ions are passed through the metal plate through the second through hole to enter the secondary ion mass spectrometer for mass analysis.
  • step 3 specifically includes: grounding the extraction pole to a ground potential, and connecting the metal plate to a negative voltage such that the secondary ions are repulsed into the secondary ion mass spectrometer for mass Analysis wherein the secondary ion is an anion.
  • the step 1 comprises: guiding the gas sample to a certain area of the surface of the metal plate; and the step 2 specifically comprises: bombarding the area with the primary ion to make the vicinity of the area The gas sample is ionized to generate the secondary ions.
  • the sample chamber is evacuated; in the step 3, the extraction pole and the metal plate are kept at a certain distance, and the electric field is a uniform electric field.
  • the distance is 5 mm (i.e., mm)
  • the surface of the metal plate is smooth and flat; and the metal plate does not contain an element contained in the gas sample.
  • the second through hole on the extraction pole is located at a center of the extraction pole to form a central hole, and the first through hole and the third through hole are symmetrically distributed in the second through hole. Both sides of the hole.
  • the thickness of the extraction pole is about 2 mm (ie, mm), and the material is a metal material including non-magnetic stainless steel; the first through hole, the second through hole, and the third through hole.
  • the hole has a diameter of about 2 mm (ie, mm); the material of the metal plate includes pure gold or indium or tungsten metal material.
  • the step 1 further comprises: using a valve included in the gas introduction conduit to adjust a flow rate of the gas sample into the sample chamber; the gas introduction conduit is made of a metal material. Tube, the metal material includes non-magnetic stainless steel.
  • the gas in the step 1 is introduced into a conduit ground potential, and the gas introduction conduit introduces the gas sample from the outside of the sample chamber into the sample chamber, the end of the gas introduction conduit and The extraction is extremely flush, and the gas introduction conduit has an inner diameter of about 0.5 mm (i.e., mm) and an outer diameter of about 1 mm (i.e., mm).
  • the primary ion comprises a cesium ion or a gallium ion
  • the gas sample is a non-corrosive gas, including oxygen (ie, 02), nitrogen (ie, N2) or carbon dioxide ( That is, C02)
  • the secondary ion mass spectrometer comprises a magnetic mass spectrometer, a time-of-flight mass spectrometer or a quadrupole mass spectrometer; the secondary ions in step 3 enter the electric field of the secondary ion mass spectrometer and/or Magnetic field for mass analysis.
  • the present invention has the following advantages over the prior art: Since the gas introduction guide is used to guide the gas sample to the surface of the metal plate for ionization, and through the bow [the electric field between the electrode and the metal plate will be The secondary ion beam I is introduced into the secondary ion mass spectrometer for mass analysis, so that the purpose of analyzing the gas sample using the secondary ion mass spectrometer can be realized, and the application field of the conventional secondary ion mass spectrometer is expanded; further, the present invention can use the mass The primary ion bombards the gas sample. Since the larger mass of primary ions (such as helium ions) is highly efficient in ionization of the gas sample, the sensitivity of the gas sample analysis can be improved, and the analysis effect is better.
  • the gas introduction guide is used to guide the gas sample to the surface of the metal plate for ionization, and through the bow [the electric field between the electrode and the metal plate will be The secondary ion beam I is introduced into the secondary ion mass spectrometer
  • FIG. 1 is a schematic structural view of a conventional secondary ion mass spectrometer
  • FIG. 2 is a schematic view showing the structure of a system for analyzing a gas sample using a secondary ion mass spectrometer of the present invention. detailed description
  • Embodiment 1 of the present invention provides a system for analyzing a gas sample using a secondary ion mass spectrometer, comprising: an extraction pole 22, a metal plate 23, and a gas introduction conduit 28; the extraction pole 22 and the The metal plate 23 is located in the sample chamber 32 of the secondary ion mass spectrometer, and the extraction electrode is provided with a first through hole 34 for passing the primary ions 24 (the path 21 along the primary ion 24) a second through hole 35 through the secondary ion 27 (the secondary ion 27 along the path 29 of the secondary ion), and a third through hole 36 for passing through the gas introduction conduit; the gas introduction conduit 28 Leading the gas sample to a surface of the metal plate after passing through the third through hole, the gas sample forming the secondary ions under bombardment of the primary ions; the extracting pole and the metal An electric field is formed between the plates to cause the secondary ions to fly away from the metal plate through the second through holes into the secondary ion mass spectrometer for mass
  • the gas introduction guide is used to guide the gas sample to the surface of the metal plate for ionization, and the secondary ion bow is introduced into the secondary ion mass spectrometer by the electric field between the electrode and the metal plate, it can be used for mass analysis.
  • the purpose of analyzing a gas sample by a secondary ion mass spectrometer extends the field of application of a conventional secondary ion mass spectrometer; in addition, the present invention is capable of bombarding a gas sample with a large mass of primary ions, Larger mass primary ions (such as helium ions) have high ionization efficiency for gas samples, so the sensitivity of gas sample analysis can be improved, and the analysis effect is better.
  • the extraction pole 22 is grounded at a potential 30, the secondary ion 27 is a negative ion, and the metal plate is connected to a negative voltage 31 such that the secondary ion is repulsed into the secondary ion mass spectrometer for mass analysis.
  • the gas sample 26 is bowed to a certain region 25 of the surface of the metal plate, and the primary ions 24 bombard the region to ionize the gas sample 26 near the region to generate the secondary ions 27.
  • the extraction pole 22 and the metal plate 23 are kept at a certain distance, and the sample chamber is in a vacuum state; the electric field is a uniform electric field.
  • the distance is about 5 mm, and the surface of the metal plate is smooth and flat; the metal plate does not contain elements contained in the gas sample.
  • the second through hole on the extraction pole 22 is located at a center of the extraction pole to form a central hole, and the first through hole and the third through hole are symmetrically distributed on both sides of the second through hole.
  • the lead-out pole 22 has a thickness of about 2 mm and is made of a metal material including non-magnetic stainless steel; the first through hole, the second through hole, and the third through hole have a diameter of about 2 mm; and the material of the metal plate includes pure Gold or indium or tungsten metal materials.
  • the gas introduction conduit 28 further includes a valve 33 for regulating the flow rate of the gas sample into the sample chamber; the gas introduction conduit is a thin tube made of a metal material including a non-magnetic stainless steel.
  • the gas introduction conduit 28 is grounded (here the gas is introduced into the conduit ground potential so that the gas introduction conduit and the extraction pole are connected to the same ground potential to ensure a uniform electric field between the metal plate and the extraction pole), the gas introduction A conduit introduces the gas sample from the sample chamber into the sample chamber.
  • the end of the gas introduction conduit is flush with the outlet pole (eg, the distance between the end of the gas introduction conduit and the metal plate 23 can be made) Consistent with the distance between the extraction pole 22 and the metal plate 23, so that the end of the gas bow I into the conduit is flush with the edge of the bow I, at this time the gas bow [the distance between the end of the inlet conduit and the metal plate is about 5 mm
  • the gas bow [the distance between the end of the inlet conduit and the metal plate is about 5 mm
  • Such a distance can prevent the gas from being randomly diffused into the vacuum due to the excessive distance, and is not easily bombarded into ions, and can also prevent the uniform electric field formed between the metal plate and the extraction electrode from being affected due to the too close distance),
  • This enables the gas introduction duct to be level with the metal plate, so that the gas easily reaches the metal plate, and the extraction pole 22 and the metal plate 2 are secured.
  • the gas introduction conduit has an inner diameter of about 0.5
  • the primary ion 24 includes helium ions or gallium ions;
  • the gas sample 26 is a non-corrosive gas, including oxygen, nitrogen or carbon dioxide;
  • the secondary ion mass spectrometer comprises a magnetic mass spectrometer, a time-of-flight mass spectrometer or A quadrupole mass spectrometer;
  • the secondary ions 27 enter the electric field and/or magnetic field of the secondary ion mass spectrometer for mass analysis.
  • the present invention places a flat metal plate in the sample chamber, and introduces the gas sample through the gas introduction conduit to the surface of the sample, and uses a single ion bombardment of the metal plate to ionize the gas molecules in the vicinity of the metal plate to form. Negative ions, because the metal plate is negatively charged, the negative ions are repulsed into the secondary ion mass spectrometer for mass analysis.
  • the system of the present invention mainly comprises: an extraction pole 22, a metal plate 23, a gas introduction guide 28, a sample chamber 32, and a valve 33.
  • the extraction pole 22, the metal plate 23 is located in the sample chamber 32.
  • the lead-out pole 22 is made of a metal material, and may be a non-magnetic stainless steel having a thickness of about 2 mm.
  • the distance between the lead 22 and the metal plate 23 is about 5 mm.
  • the grounding potential 22 of the extraction pole 22 is connected to the negative voltage of the metal plate 23, and an electric field is formed between the extraction pole 22 and the metal plate 23 so that the secondary ions 27 fly away from the surface of the metal plate 23 through the center hole of the extraction electrode 22.
  • the metal plate 23 may be made of pure gold or a metal material such as indium or tungsten.
  • the metal plate 23 does not contain elements contained in the gas sample 26 to be analyzed, so that the primary ions 24 do not ionize the elements in the metal plate 23, thereby affecting the analysis results.
  • the surface of the metal plate 23 is smooth and flat to ensure a uniform electric field between the extraction pole 22 and the metal plate 23.
  • the gas introduction duct 28 is a thin tube made of a metal material, and may be a non-magnetic stainless steel.
  • the gas is introduced into the conduit 28 to ground potential.
  • the gas introduction conduit 28 introduces the gas sample 26 from the outside of the sample chamber 32 into the surface of the metal plate 23 in the sample chamber 32.
  • the end of the gas introduction conduit 28 is flush with the extraction pole 22, and the gas introduction conduit 28 has an inner diameter of about 0.5 mm and an outer diameter of about 1 mm so as not to affect the uniformity of the electric field between the extraction pole 22 and the metal plate 23.
  • the sample chamber 32 is in a vacuum state.
  • Valve 33 regulates the flow of gas sample 26 into sample chamber 12.
  • the system of the present invention operates as follows: Primary ions 24 reach the surface of the metal plate 23 along the path 21, It is bombarded on the metal plate 23 with a certain amount of energy. Since the gas sample 26 is generally composed of a non-metal element, the primary ions 24 may be cerium ions or gallium ions or the like, which are liable to ionize non-metal elements.
  • the gas sample 26 to be analyzed is transported through a gas introduction conduit 28 to a surface area 25 of the metal sheet 23 (i.e., the bombardment area 25).
  • the flow rate of the gas sample 26 entering the sample chamber 32 can be controlled by adjusting the valve 33 outside the sample chamber 32.
  • the gas sample 26 can be any non-corrosive gas (oxygen, nitrogen or carbon dioxide, etc.).
  • the primary ions 24 bombard the gas sample 26 to ionize it, thereby converting into secondary ions 27. Due to the electric field between the extraction pole 22 and the metal plate 23, the secondary ions 27 fly away from the bombardment region 25 along the path 29 by the electric field, and enter the electric field or the magnetic field to achieve mass separation.
  • the secondary ion mass spectrometer may be a magnetic mass spectrometer or a time-of-flight mass spectrometer or a quadrupole mass spectrometer.
  • the system of the present invention is capable of qualitative and quantitative analysis of gas samples using a secondary ion mass spectrometer, expanding its field of application.
  • Embodiment 2 of the present invention provides a method for analyzing a gas sample using a secondary ion mass spectrometer, comprising: using an extraction pole, a metal plate, and a gas introduction conduit; the extraction electrode and the metal plate are located in the secondary ion mass spectrometer a sample chamber having a first through hole for passing primary ions, a second through hole for passing secondary ions, and a third through hole for passing through the gas introduction conduit, including The following steps:
  • Step 1 passing the gas introduction conduit through the third through hole, and guiding the gas sample to a surface of the metal plate using the gas introduction conduit;
  • Step 2 using the primary ion pair to bombard the gas sample guided to the surface of the metal plate to form the secondary ion;
  • Step 3 an electric field is formed between the extraction pole and the metal plate, and the secondary ions are passed through the metal plate through the second through hole to enter the secondary ion mass spectrometer for mass analysis.
  • Step 3 specifically includes: placing the extraction pole ground potential 30, connecting the metal plate to a negative voltage such that the secondary ions are repulsed into the secondary ion mass spectrometer for mass analysis, wherein the secondary ions are Negative ions.
  • Step 1 specifically includes: guiding the gas sample to a certain area of the surface of the metal plate;
  • the step 2 specifically includes bombarding the region with the primary ions such that the gas sample in the vicinity of the region is ionized to generate the secondary ions.
  • the sample chamber is further evacuated; in the step 3, the extraction pole and the metal plate are kept at a certain distance, and the electric field is a uniform electric field.
  • the distance is about 5 mm, and the surface of the metal plate is smooth and flat; the metal plate does not contain elements contained in the gas sample.
  • the second through hole on the extraction pole is located at a center of the extraction pole to form a central hole, and the first through hole and the third through hole are symmetrically distributed on both sides of the second through hole.
  • the lead electrode has a thickness of about 2 mm and is made of a metal material including non-magnetic stainless steel; the first through hole, the second through hole, and the third through hole have a diameter of about 2 mm; and the material of the metal plate includes pure Gold or indium or tungsten metal materials.
  • the step 1 further includes using a valve included in the gas introduction conduit to adjust a flow rate of the gas sample into the sample chamber;
  • the gas introduction conduit is a thin tube made of a metal material including a non-magnetic stainless steel.
  • the gas introduction conduit is connected to a potential in step 1, the gas introduction conduit introducing the gas sample from the sample chamber into the sample chamber, the end of the gas introduction conduit being flush with the extraction pole, the gas
  • the introduction catheter has an inner diameter of about 0.5 mm and an outer diameter of about 1 mm.
  • the primary ion comprises a cesium ion or a gallium ion
  • the gas sample is a non-corrosive gas, including oxygen, nitrogen or carbon dioxide
  • the secondary ion mass spectrometer comprises a magnetic mass spectrometer, a time-of-flight mass spectrometer Or a quadrupole mass spectrometer; the secondary ions in step 3 enter the electric field and/or magnetic field of the secondary ion mass spectrometer for mass analysis.
  • Embodiment 4 of the present invention includes the following steps:
  • Step 1 Place the metal plate in the sample chamber of the secondary ion mass spectrometer for general analysis of the position of the solid sample, evacuate the sample chamber, and add a negative voltage to the metal plate 31;
  • Step 2 introducing a gas sample into the sample chamber through a gas introduction conduit;
  • the gas introduction conduit may be made of a metal stainless steel material having an inner diameter of about 0.5 mm and an outer diameter of about 1 mm; and the outlet of the gas introduction conduit is about 5 mm from the surface of the metal plate; Introducing a conduit ground potential;
  • Step 3 Using a single ion bombardment of the metal plate, the gas sample near the metal plate (for example, gas) Ionized, causing it to become a negative ion (ie, a secondary ion);
  • Step 4 The negative ions (ie, secondary ions) are sent to the secondary ion mass spectrometer, and the electric field and the magnetic field of the secondary ion mass spectrometer are used for qualitative and quantitative analysis according to the quality.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)

Abstract

L'invention concerne un système et un procédé d'analyse d'un échantillon de gaz en utilisant un spectromètre de masse des ions secondaires. Le système comprend : une électrode d'extraction, une plaque métallique, et une conduite d'entrée de gaz, l'électrode d'extraction et la plaque métallique étant situées dans la chambre à échantillon du spectromètre de masse des ions secondaires. Un premier trou traversant à travers lequel passent les ions primaires, un deuxième trou traversant à travers lequel passent les ions secondaires, et un troisième trou traversant à travers lequel pénètre la conduite d'entrée de gaz, sont disposés sur l'électrode d'extraction. Après avoir pénétré à travers le troisième trou traversant, la conduite d'entrée de gaz amène l'échantillon de gaz à la surface de la plaque métallique, et l'échantillon de gaz est bombardé par les ions primaires afin de former les ions secondaires. Un champ électrique est formé entre l'électrode d'extraction et la plaque métallique, de façon à ce que les ions secondaires passent à travers le deuxième trou traversant pour s'écarter de la plaque métallique et entrer dans le spectromètre de masse des ions secondaires en vue d'une analyse de masse.
PCT/CN2013/089380 2013-12-13 2013-12-13 Système et procédé d'analyse d'échantillon de gaz en utilisant un spectromètre de masse des ions secondaires WO2015085577A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201380021677.7A CN105103265B (zh) 2013-12-13 2013-12-13 使用二次离子质谱仪分析气体样品的系统和方法
PCT/CN2013/089380 WO2015085577A1 (fr) 2013-12-13 2013-12-13 Système et procédé d'analyse d'échantillon de gaz en utilisant un spectromètre de masse des ions secondaires

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2013/089380 WO2015085577A1 (fr) 2013-12-13 2013-12-13 Système et procédé d'analyse d'échantillon de gaz en utilisant un spectromètre de masse des ions secondaires

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WO2015085577A1 true WO2015085577A1 (fr) 2015-06-18

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020113426A1 (fr) * 2018-12-04 2020-06-11 中国科学院地质与地球物理研究所 Procédé et système de mesure de gaz inerte à l'aide d'une sonde ionique
CN109632939B (zh) * 2018-12-04 2020-01-10 中国科学院地质与地球物理研究所 一种使用离子探针测量惰性气体的方法及其系统

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4766313A (en) * 1984-03-22 1988-08-23 Nippon Telegraph & Telephone Public Corporation Apparatus for quantitative secondary ion mass spectrometry
WO2001004611A2 (fr) * 1999-07-09 2001-01-18 Koninklijke Philips Electronics N.V. Procede et dispositif d'amelioration du rendement en ions secondaires
JP2008209312A (ja) * 2007-02-27 2008-09-11 Fujitsu Ltd 二次イオン質量分析装置及びその使用方法
WO2008086618A8 (fr) * 2007-01-19 2008-09-25 Mds Analytical Tech Bu Mds Inc Appareil et procede de refroidissement d'ions
CN102157328A (zh) * 2011-03-21 2011-08-17 复旦大学 具备离子选择和存储功能的二次离子质谱一次离子源

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5840761A (ja) * 1981-09-02 1983-03-09 Hitachi Ltd 二次イオン質量分析計
JP3537425B2 (ja) * 2002-03-29 2004-06-14 日本パステック株式会社 複合分析装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4766313A (en) * 1984-03-22 1988-08-23 Nippon Telegraph & Telephone Public Corporation Apparatus for quantitative secondary ion mass spectrometry
WO2001004611A2 (fr) * 1999-07-09 2001-01-18 Koninklijke Philips Electronics N.V. Procede et dispositif d'amelioration du rendement en ions secondaires
WO2008086618A8 (fr) * 2007-01-19 2008-09-25 Mds Analytical Tech Bu Mds Inc Appareil et procede de refroidissement d'ions
JP2008209312A (ja) * 2007-02-27 2008-09-11 Fujitsu Ltd 二次イオン質量分析装置及びその使用方法
CN102157328A (zh) * 2011-03-21 2011-08-17 复旦大学 具备离子选择和存储功能的二次离子质谱一次离子源

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CN105103265A (zh) 2015-11-25

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