WO2014174838A1 - ブロックポリイミドおよびブロックポリアミド酸イミド、ならびにその用途 - Google Patents
ブロックポリイミドおよびブロックポリアミド酸イミド、ならびにその用途 Download PDFInfo
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- WO2014174838A1 WO2014174838A1 PCT/JP2014/002284 JP2014002284W WO2014174838A1 WO 2014174838 A1 WO2014174838 A1 WO 2014174838A1 JP 2014002284 W JP2014002284 W JP 2014002284W WO 2014174838 A1 WO2014174838 A1 WO 2014174838A1
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- Prior art keywords
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- represented
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- polyamic acid
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- 0 CCC(C)(C(CC1)CCC1NC(*(C(NC(C)(CC)C(CC1)CCC1N)=O)(C(O)=O)C(O)=O)=O)N Chemical compound CCC(C)(C(CC1)CCC1NC(*(C(NC(C)(CC)C(CC1)CCC1N)=O)(C(O)=O)C(O)=O)=O)N 0.000 description 1
- VKIRRGRTJUUZHS-UHFFFAOYSA-N NC(CC1)CCC1N Chemical compound NC(CC1)CCC1N VKIRRGRTJUUZHS-UHFFFAOYSA-N 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
- C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
- C08G73/1042—Copolyimides derived from at least two different tetracarboxylic compounds or two different diamino compounds
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B15/08—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B15/08—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
- B32B15/088—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin comprising polyamides
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/28—Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
- B32B27/281—Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42 comprising polyimides
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
- C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
- C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
- C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
- C08G73/1075—Partially aromatic polyimides
- C08G73/1082—Partially aromatic polyimides wholly aromatic in the tetracarboxylic moiety
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
- C08J5/18—Manufacture of films or sheets
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L79/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen or carbon only, not provided for in groups C08L61/00 - C08L77/00
- C08L79/04—Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
- C08L79/08—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D179/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen, with or without oxygen, or carbon only, not provided for in groups C09D161/00 - C09D177/00
- C09D179/04—Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
- C09D179/08—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/037—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polyamides or polyimides
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/11—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having cover layers or intermediate layers, e.g. subbing layers
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
- G03F7/32—Liquid compositions therefor, e.g. developers
- G03F7/322—Aqueous alkaline compositions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
- H01B3/18—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances
- H01B3/30—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes
- H01B3/303—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups H01B3/38 or H01B3/302
- H01B3/306—Polyimides or polyesterimides
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0296—Conductive pattern lay-out details not covered by sub groups H05K1/02 - H05K1/0295
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0313—Organic insulating material
- H05K1/032—Organic insulating material consisting of one material
- H05K1/0346—Organic insulating material consisting of one material containing N
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0313—Organic insulating material
- H05K1/0353—Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0393—Flexible materials
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0017—Etching of the substrate by chemical or physical means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/20—Properties of the layers or laminate having particular electrical or magnetic properties, e.g. piezoelectric
- B32B2307/206—Insulating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/40—Properties of the layers or laminate having particular optical properties
- B32B2307/412—Transparent
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2457/00—Electrical equipment
- B32B2457/08—PCBs, i.e. printed circuit boards
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2457/00—Electrical equipment
- B32B2457/20—Displays, e.g. liquid crystal displays, plasma displays
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2551/00—Optical elements
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2379/00—Characterised by the use of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen, or carbon only, not provided for in groups C08J2361/00 - C08J2377/00
- C08J2379/04—Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
- C08J2379/08—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/01—Dielectrics
- H05K2201/0137—Materials
- H05K2201/0154—Polyimide
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
- H05K3/281—Applying non-metallic protective coatings by means of a preformed insulating foil
Definitions
- the present invention relates to a block polyimide and a block polyamic acid imide, and uses thereof.
- Polyimide generally has superior heat resistance, mechanical properties, and electrical properties compared to other general-purpose resins and engineering plastics. Therefore, they are widely used in various applications as molding materials, composite materials, electric / electronic materials, optical materials, and the like.
- circuit boards such as HDD suspension boards and semiconductor package boards usually have a board and a patterned polyimide resin layer.
- the substrate is a metal substrate or a substrate having a circuit pattern; if the difference in coefficient of thermal expansion (CTE) between the substrate and the polyimide resin layer is significantly different, the circuit substrate is likely to warp due to heat in the use environment. . Since such a circuit board cannot maintain accurate mounting, it is required to reduce the warp of the circuit board due to heat or the like.
- CTE coefficient of thermal expansion
- the patterned polyimide layer is usually obtained by exposing the photosensitive polyimide precursor composition layer through a photomask having a pattern; developing treatment (etching) with an alkaline solution. Therefore, the photosensitive polyimide precursor composition layer is required to have sufficient transparency to transmit exposure light (particularly i-line) and moderate solubility in an alkaline solution.
- a polyimide having a high transparency and a low coefficient of thermal expansion (CTE) As a polyimide having a high transparency and a low coefficient of thermal expansion (CTE), a polyimide containing cyclohexanediamine (CHDA) as a diamine component is known (see Patent Documents 1, 2, 3, and 4).
- Polyimide having cyclohexanediamine as a diamine component has a low coefficient of thermal expansion (CTE) (see, for example, Example 3 of Patent Document 1); since it has an alicyclic structure, it has higher transparency than an aromatic polyimide. sell.
- CTE coefficient of thermal expansion
- NBDA norbornenediamine
- a block copolymer of an amide acid oligomer containing a structure derived from cyclohexanediamine and an imide oligomer containing a structure derived from another diamine has high transparency and a low coefficient of thermal expansion (CTE).
- the layer containing the block polyamic acid imide described in Patent Document 5 has low solubility in an alkaline aqueous solution, and patterning with the alkaline aqueous solution could not be performed.
- the layer containing polyamic acid (which does not have an imide skeleton) is excessively dissolved, and thus has a problem that high-precision patterning cannot be performed.
- the present invention has been made in view of the above circumstances, and a block polyamic acid imide having an appropriate solubility in an alkaline aqueous solution, and a block polyimide obtained thereby having high transparency and a low coefficient of thermal expansion (CTE).
- the purpose is to provide.
- a block polyimide comprising a block composed of a repeating structural unit represented by the following formula (1A) and a block composed of a repeating structural unit represented by the following formula (1B).
- m represents the number of repeating structural units represented by the formula (1A)
- n represents the number of repeating structural units represented by the formula (1B)
- the formula (1A) contained in the block polyimide A value obtained by dividing the total number of repeating structural units represented by the number of blocks composed of the repeating structural units represented by the formula (1A) is an average value of m; in the formula (1B) included in the block polyimide
- R and R ′′ are each independently a tetravalent group having 4
- Is an aromatic group is a non-condensed polycyclic aliphatic group in which the cycloaliphatic groups are directly or interconnected by a bridging member, or is aromatic or interconnected by a bridging member
- R ′ is a divalent group having 4 to 51 carbon atoms
- a monocyclic aliphatic group excluding a 1,4-cyclohexylene group
- a condensed polycyclic aliphatic group or a cyclic aliphatic group
- the cyclohexane skeleton in the repeating structural unit represented by the formula (1A) comprises a trans isomer represented by the following formula (1A-1) and a cis isomer represented by the following formula (1A-2).
- the block polyimide according to [1] or [2], wherein a molar ratio or a mass ratio of the trans isomer to the cis isomer is trans isomer: cis isomer 10: 0 to 5: 5.
- Tg glass transition temperature obtained by TMA measurement of the film made of the block polyimide in a temperature range of 25 to 350 ° C.
- a block polyamic acid imide comprising a block composed of a repeating structural unit represented by the following formula (2A) and a block composed of a repeating structural unit represented by the following formula (2B).
- m represents the repeating number of the repeating structural unit represented by the formula (2A)
- n represents the repeating number of the repeating structural unit represented by the formula (2B)
- the formula The value obtained by dividing the total number of repeating structural units represented by 2A) by the number of blocks composed of the repeating structural units represented by formula (2A) is the average value of m; the formula contained in the block polyamic acid imide
- the average value of m: average value of n less than 10: more than 0 to more than 9: 1
- R and R ′′ are each independently a tetravalent group having 4
- Is an aromatic group is a non-condensed polycyclic aliphatic group in which the cycloaliphatic groups are directly or interconnected by a bridging member, or is aromatic or interconnected by a bridging member A non-fused polycyclic aromatic group;
- R ′ is a divalent group having 4 to 51 carbon atoms; and a monocyclic aliphatic group (excluding a 1,4-cyclohexylene group), a condensed polycyclic aliphatic group, or a cyclic aliphatic group A non-condensed polycyclic aliphatic group in which the group is connected to each other directly or by a bridging member)
- the block polyamic acid imide according to any one of [8] to [11], wherein the dissolution rate of is from 5 to 60 ⁇ m / min.
- the repeating structural unit represented by the formula (2A) which comprises reacting a polyimide that is soluble in the aprotic polar solvent with a polyimide that is soluble in the aprotic polar solvent.
- the cyclohexane skeleton is composed of a trans isomer represented by the following formula (2A-1) and a cis isomer represented by the following formula (2A-2), and the molar ratio or mass ratio of the trans isomer to the cis isomer is the trans isomer:
- the amine-terminated polyamic acid represented by the formula (2A ′) includes a step of reacting the acid anhydride-terminated polyimide represented by the formula (2A ′) with 1,4 represented by the formula (3): -Obtained from cyclohexanediamine and tetracarboxylic dianhydride represented by formula (4); its molar ratio (diamine represented by formula (3) / tetracarboxylic dianhydride represented by formula (4) Product) is more than 1 and 2 or less, and the acid anhydride-terminated polyimide represented by the formula (2B ′) is a diamine represented by the formula (5) and a tetracarboxylic acid represented by the formula (6).
- R is a tetravalent group having 4 to 27 carbon atoms; and is a monocyclic aliphatic group, a condensed polycyclic aliphatic group, a monocyclic aromatic group or a condensed polycyclic aromatic group,
- 1,4-cyclohexanediamine represented by the formula (3) is composed of a trans isomer represented by the following formula (3-1) and a cis isomer represented by the following formula (3-2).
- R ′ is a divalent group having 4 to 51 carbon atoms; and a monocyclic aliphatic group (excluding a 1,4-cyclohexylene group)
- R ′′ is a tetravalent group having 4 to 27 carbon atoms; and a monocyclic aliphatic group, a condensed polycyclic aliphatic group, or a monocyclic aromatic group.
- a group or a condensed polycyclic aromatic group, a cyclic aliphatic group is a non-condensed polycyclic aliphatic group linked directly or by a bridging member, or an aromatic group is directly or a bridging member are non-condensed polycyclic aromatic groups linked together by [15]
- a dry film comprising the block polyamic acid imide according to any one of [8] to [12].
- a material for an interlayer insulating film comprising the block polyamic acid imide according to any one of [8] to [12].
- a block polyamic acid imide varnish comprising the block polyamic acid imide according to any one of [8] to [12] and a solvent.
- a photosensitive resin composition comprising the block polyamic acid imide according to any one of [8] to [12], a photopolymerizable compound, and a photopolymerization initiator.
- a laminate comprising a metal substrate and the dry film according to [16].
- a circuit board comprising a substrate, a patterned layer containing the block polyimide according to any one of [1] to [7], and a patterned conductor layer.
- a step of obtaining a laminate including a substrate and a layer made of the photosensitive resin composition according to [19], and a patterned photomask formed on the layer made of the photosensitive resin composition of the laminate And a step of patterning the layer made of the photosensitive resin composition by exposing the layer made of the photosensitive resin composition through the photomask and then developing the layer with the aqueous alkaline solution, Heating the layer made of the photosensitive resin composition, and imidizing the block polyamic acid imide contained in the photosensitive resin composition.
- a polyimide film comprising the block polyimide according to any one of [1] to [7].
- An optical film comprising the polyimide film according to [24].
- a block polyamic acid imide having moderate solubility in an alkaline aqueous solution and a block polyimide having high transparency and low CTE obtained using the block polyamic acid imide.
- Block Polyimide The block polyimide of the present invention includes a block composed of a repeating structural unit represented by the formula (1A) and a block composed of a repeating structural unit represented by the formula (1B).
- the repeating structural unit represented by the formula (1A) is an imide block obtained by reacting 1,4-cyclohexanediamine and tetracarboxylic anhydride;
- the repeating structural unit represented by the formula (1B) is: It is an imide block obtained by reacting a diamine other than 1,4-cyclohexanediamine with a tetracarboxylic anhydride.
- M in the formula (1A) represents the number of repetitions of the “repeating structural unit represented by the formula (1A)” included in the “block composed of the repeating structural unit represented by the formula (1A)”; N in 1B) indicates the number of repetitions of the “repeating structural unit represented by the formula (1B)” included in the “block composed of the repeating structural unit represented by the formula (1B)”.
- the average value of m and the average value of n are each independently preferably 2 to 1000, and more preferably 5 to 500.
- the average value of m means “the total number of repeating structural units represented by the formula (1A)” included in the block polyimide of the present invention as “a block composed of repeating structural units represented by the formula (1A)”.
- Divided by the number of The average value of n means “the total number of repeating structural units represented by formula (1B)” included in the block polyimide of the present invention as “a block composed of repeating structural units represented by formula (1B)”. Divided by the number of
- the number of repeating structural units in each block can be measured, for example, by the following method. That is, an oligomer represented by the formula (2A ′) described later and a labeled sealing agent are reacted to obtain a first labeled oligomer. Similarly, an oligomer represented by the formula (2B ′) described later and a labeled sealing agent are reacted to obtain a second labeled oligomer. And the number of repeating terminal units in each block can also be determined by quantifying the number of labeled end groups of each oligomer by the 1 H-NMR measurement method or the like. The number of repeating structural units in each block can also be determined by measuring the absolute molecular weight of each oligomer using gel permeation chromatography (GPC) equipped with a multi-angle light scattering photometer (MALLS).
- GPC gel permeation chromatography
- MALLS multi-angle light scattering photometer
- the ratio of the average value of m to the average value of n constitutes the charge ratio of monomers (diamine and tetracarboxylic anhydride) constituting each oligomer (amide acid oligomer and imide oligomer) and the block polyamic acid imide. It can also obtain
- the number of repeating structural units represented by the formula (1A) is 2 Preferably, it is preferably 5 or more, more preferably 10 or more. From the viewpoint of not impairing the compatibility between the oligomer represented by the formula (2A ′) and the oligomer represented by the formula (2B ′), the number of repeating structural units represented by the formula (1A) is 50 or less. In this way, all of the “blocks composed of repeating structural units represented by the formula (1A)” included in the block polyimide of the present invention include a certain number or more of repeating structural units. Characteristics are easily obtained.
- the repeating number m of the repeating structural unit represented by the formula (1A) is a certain value or more, the thermal expansion coefficient of the block polyimide of the present invention tends to be small, and the visible light transmittance is likely to increase.
- the cost can be reduced by reducing the ratio of the number m of repeating structural units represented by the formula (1A).
- block polyimide of the present invention including “a block composed of a repeating structural unit represented by the formula (1A)” is compared with a random polyimide containing “a repeating structural unit represented by the formula (1A)”. It is easy to develop characteristics derived from cyclohexanediamine, particularly a low thermal expansion coefficient.
- the cyclohexane skeleton in the formula (1A) is a group derived from 1,4-cyclohexanediamine.
- the cyclohexane skeleton in the formula (1A) can have a trans isomer represented by the formula (1A-1) and a cis isomer represented by the formula (1A-2).
- the ratio of the trans isomer increases, the molecular weight generally tends to increase, so that it becomes easy to form a self-supporting film and to form a film.
- R in the formula (1A) is a group derived from tetracarboxylic dianhydride; a tetravalent group, preferably a tetravalent group having 4 to 27 carbon atoms. Furthermore, R is a monocyclic aliphatic group, a condensed polycyclic aliphatic group, a monocyclic aromatic group or a condensed polycyclic aromatic group; A non-condensed polycyclic aliphatic group linked to each other; or an aromatic group is a non-fused polycyclic aromatic group linked to each other directly or by a bridging member.
- the tetracarboxylic dianhydride for obtaining R in the formula (1A) can be, for example, an aromatic tetracarboxylic dianhydride or an alicyclic tetracarboxylic dianhydride.
- aromatic tetracarboxylic dianhydrides include pyromellitic dianhydride, 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride, 3,3 ′, 4,4′-benzophenone tetra Carboxylic dianhydride, bis (3,4-dicarboxyphenyl) ether dianhydride, bis (3,4-dicarboxyphenyl) sulfide dianhydride, bis (3,4-dicarboxyphenyl) sulfone dianhydride Bis (3,4-dicarboxyphenyl) methane dianhydride, 2,2-bis (3,4-dicarboxyphenyl) propane dianhydride, 2,2-bis (3,4-dicarboxyphenyl)- 1,1,1,3,3,3-hexafluoropropane dianhydride, 1,3-bis (3,4-dicarboxyphenoxy) benzene dianhydride, 1,4-bis (3,4-bis
- alicyclic tetracarboxylic dianhydrides include cyclobutane tetracarboxylic dianhydride, 1,2,3,4-cyclopentanetetracarboxylic dianhydride, 1,2,4,5-cyclohexanetetracarboxylic Acid dianhydride, bicyclo [2.2.1] heptane-2,3,5,6-tetracarboxylic dianhydride, bicyclo [2.2.2] oct-7-ene-2,3,5, 6-tetracarboxylic dianhydride, bicyclo [2.2.2] octane-2,3,5,6-tetracarboxylic dianhydride, 2,3,5-tricarboxycyclopentylacetic acid dianhydride, bicyclo [ 2.2.1] Heptane-2,3,5-tricarboxylic acid-6-acetic dianhydride, 1-methyl-3-ethylcyclohex-1-ene-3- (1,2), 5,6- Tetracarboxylic
- the tetracarboxylic dianhydride includes an aromatic ring such as a benzene ring, some or all of the hydrogen atoms on the aromatic ring are fluoro group, methyl group, methoxy group, trifluoromethyl group, and trifluoromethoxy group. It may be substituted with a group selected from groups and the like. Further, when the tetracarboxylic dianhydride contains an aromatic ring such as a benzene ring, the ethynyl group, benzocyclobuten-4′-yl group, vinyl group, allyl group, cyano group, isocyanate group depending on the purpose.
- a nitrilo group, an isopropenyl group, and the like may be present as a crosslinking point.
- a group that becomes a crosslinking point such as vinylene group, vinylidene group, and ethynylidene group may be incorporated in the main chain skeleton, preferably within a range that does not impair molding processability. .
- tetracarboxylic dianhydride may be hexacarboxylic dianhydride or octacarboxylic dianhydride. This is for introducing branching into the polyamide or polyimide.
- tetracarboxylic dianhydrides can be used alone or in combination of two or more.
- R ′ in the formula (1B) is a group derived from a diamine other than 1,4-cyclohexanediamine; a divalent group other than a 1,4-cyclohexylene group, preferably having 4 to 51 carbon atoms. These are divalent groups.
- R ′ represents a monocyclic aliphatic group (excluding a 1,4-cyclohexylene group), a condensed polycyclic aliphatic group, or a cyclic aliphatic group that is directly or via a bridging member.
- a non-condensed polycyclic aliphatic group linked to is preferable.
- the diamine other than 1,4-cyclohexanediamine for obtaining R ′ in the formula (1B) is preferably an alicyclic diamine in order to improve the transparency of the film containing the block polyimide.
- alicyclic diamines examples include cyclobutane diamine, di (aminomethyl) cyclohexane [trans-1,4-bis (aminomethyl) cyclohexane, bis (aminomethyl), including 1,3-bis (aminomethyl) cyclohexane, etc.
- Cyclohexane diaminobicycloheptane, diaminomethylbicycloheptane (including norbornanediamines such as norbornanediamine), diaminooxybicycloheptane, diaminomethyloxybicycloheptane (including oxanorbornanediamine), isophoronediamine, diaminotricyclodecane, diamino Methyltricyclodecane, bis (aminocyclohexyl) methane [or methylenebis (cyclohexylamine)], bis (aminocyclohexyl) isopropylidene, and the like are included.
- R ′′ in the formula (1B) is a group derived from tetracarboxylic dianhydride; a tetravalent group, preferably a tetravalent group having 4 to 27 carbon atoms.
- R ′′ can be defined in the same manner as R in formula (1A).
- the polyimide or imide oligomer composed of the repeating structural unit represented by the formula (1B) is preferably dissolved in an aprotic polar solvent.
- an aprotic amide solvent is effective; examples of the aprotic amide solvent include N, N-dimethylformamide, N, N-dimethylacetamide, N, N-diethyl.
- the dissolution means that the dissolution amount is 10 g / l or more, preferably 100 g / l or more.
- the block polyimide of the present invention comprises an imide oligomer composed of a repeating structural unit represented by the formula (2B) and an amic acid oligomer composed of a repeating structural unit represented by the formula (2A). , Reacting in an aprotic polar solvent to obtain a block polyamic acid imide; obtained by imidizing it.
- the imide oligomer composed of the repeating structural unit represented by the formula (2B) and the formula ( The amic acid oligomer composed of the repeating structural unit represented by 2A) is uniformly mixed, and a block polyamic acid imide can be easily obtained.
- the glass transition temperature (Tg) of the film made of the block polyimide of the present invention is preferably 260 ° C. or higher, and more preferably 280 ° C. or higher in order to obtain high heat resistance.
- the glass transition temperature of the film can be measured by the following procedure. That is, TMA measurement is performed on a test piece (5 mm ⁇ 22 mm) made of block polyimide using a measuring apparatus TMA-50 (manufactured by Shimadzu Corporation). The measurement conditions may be a temperature range of 25 to 350 ° C., a heating rate of 5 ° C./min, a load of 14 g / mm 2 , and a tensile mode. Then, the glass transition temperature (Tg) is determined from the inflection point of the obtained temperature-test piece elongation curve.
- the thermal linear expansion coefficient of the film made of the block polyimide of the present invention is preferably 30 ppm / K or less, and more preferably 20 ppm / K or less in order to reduce warpage of a circuit board described later.
- the thermal expansion coefficient of the film can be determined from the slope in the temperature range of 100 to 200 ° C. of the temperature-test piece elongation curve obtained by the TMA measurement described above.
- the total light transmittance measured according to JIS K 7105 of the film made of the block polyimide of the present invention is preferably 80% or more, and more preferably 82% or more.
- the total light transmittance described above is preferably the total light transmittance in a film made of a block polyimide having a thickness of 15 ⁇ m.
- the average value of the repeating number m of the repeating structural unit represented by the formula (1A) is adjusted to be higher. Therefore, the film made of the block polyimide of the present invention can have a low coefficient of thermal expansion (CTE).
- the diamine units constituting the formula (1A) and the formula (1B) are both cyclic aliphatic groups, the film can have high transparency.
- the block polyimide of the present invention may be used as a film.
- the film in the present invention includes a layer. That is, the polyimide film of the present invention includes the block polyimide of the present invention, and may further include other components such as a cured product of a photopolymerizable compound as necessary.
- Block polyamic acid imide The block polyamic acid imide of the present invention comprises a block composed of a repeating structural unit represented by the following formula (2A) and a block composed of a repeating structural unit represented by the following formula (2B). Including.
- the block polyamic acid imide of the present invention is also a precursor of the above-mentioned block polyimide. That is, the block composed of the repeating structural unit represented by the formula (2A) corresponds to the block composed of the repeating structural unit represented by the above formula (1A); represented by the formula (2B) The block composed of the repeating structural unit corresponds to the block composed of the repeating structural unit represented by the above formula (1B). Therefore, R and m in formula (2A) are defined in the same manner as R and m in formula (1A). Similarly, R ′, R ′′ and n in formula (2B) are defined in the same manner as R ′, R ′′ and n in formula (1B).
- the repeating number m of the repeating structural unit represented by the formula (2A) is 10
- the block polyamic acid imide is excessively dissolved in the alkaline aqueous solution at the time of development processing, so that it is difficult to perform highly accurate patterning.
- the number of repetitions m is 9 or less, the block polyamic acid imide is difficult to dissolve in the alkaline aqueous solution during the development process, and sufficient patterning cannot be performed.
- the block polyamic acid imide solution of the present invention (concentration: 0.5 g / dl) has a logarithmic viscosity at 35 ° C. of 0.1 to 3.0 dl / g. It is preferable. Since the application of the polyamic acid solution becomes easy, the usefulness as a varnish increases.
- the dissolution rate at 20 ° C. measured by immersing a dry film made of block polyamic acid imide having a thickness of 15 ⁇ m in a 2.38 mass% tetramethylammonium hydroxide aqueous solution is preferably 5 to 60 ⁇ m / min. More preferably, it is 10 to 50 ⁇ m / min.
- the dissolution rate of the film can be measured by the following method.
- a block polyamic acid imide varnish is applied on a substrate such as a glass plate or a silicon wafer.
- the base material having the obtained coating film is dried (prebaked) at 80 ° C. for 15 minutes under a nitrogen stream.
- the residual solvent amount of the coating film (dry film) after drying (prebaking) can be 10% by mass; the film thickness can be 15 ⁇ m.
- the substrate having the dry film is immersed in an aqueous tetramethylammonium hydroxide (TMAH) solution having a concentration of 2.38% adjusted to 20 ° C. while vibrating the substrate.
- TMAH aqueous tetramethylammonium hydroxide
- the vibration can be applied by ultrasonic, water flow or vibration motor; preferably a vibration motor.
- the vibration frequency is 1 Hz. 3
- the time until the dry film on the substrate dissolves and disappears is measured.
- a value obtained by dividing the initial film thickness of the film by the time until disappearance is referred to as “dissolution rate (unit: ⁇ m / min)”.
- the solubility of the film made of block polyamic acid imide in an alkaline aqueous solution can be adjusted by the ratio of the average value of m and the average value of n.
- the average value of m may be increased; the average value of n may be decreased.
- the film containing the block polyamic acid imide is It can have moderate solubility with respect to alkali water solubility. Therefore, the dry film containing the block polyamic acid imide of the present invention can perform development processing after exposure with high accuracy according to the pattern of the photomask.
- the diamine unit is composed of a cycloaliphatic group.
- the dry film containing this block polyamic acid imide has favorable transparency, and can transmit exposure light (especially i line
- the block polyamic acid imide of the present invention is used as a varnish or a dry film.
- the dry film in the present invention includes a layer.
- the varnish containing the block polyamic acid imide of the present invention may further contain a solvent.
- the concentration of the block polyamic acid imide in the varnish is not particularly limited. If the concentration is high, the solvent can be easily removed by drying. For example, the concentration may be 15 wt% or more. When the concentration is excessively high, it is difficult to apply the varnish, and for example, it may be 50 wt% or less.
- the solvent for the varnish is preferably an aprotic polar solvent.
- the residual solvent amount is preferably adjusted to a certain level or less.
- the amount of residual solvent in the dry film is preferably 3 to 20% by mass, more preferably 10% by mass or less in order to make the solubility in an alkaline aqueous solution in an appropriate range.
- the amount of residual solvent in the dry film is large, the dissolution rate in the alkaline aqueous solution tends to increase.
- the amount of residual solvent in the dry film can be measured by the following method. That is, an electric furnace type pyrolysis furnace (Shimadzu PYR-2A (thermal decomposition temperature: 320 ° C.)) and a gas chromatograph mass spectrometer (Shimadzu GC-8A (Column Uniport HP 80/100 KG-02)) And connect. And after putting a dry film into an electric furnace type
- the injector temperature and detector temperature of the gas chromatograph mass spectrometer can be 200 ° C .; the column temperature can be 170 ° C.
- the area of the corresponding peak of the obtained GC chart is calculated, and the amount of solvent is obtained by comparing with the previously prepared solvent calibration curve.
- the thickness of the dry film depends on the application, it is preferably 1 to 100 ⁇ m and more preferably 5 to 50 ⁇ m when used for an interlayer insulating layer of a circuit board.
- the dry film of the present invention can be obtained by applying the block polyamic acid imide varnish of the present invention on a carrier film and then drying (prebaking).
- the drying temperature can be about 80 to 150 ° C., for example.
- the carrier film when a dry film has photosensitivity, the carrier film may be required to have transparency that allows exposure through the carrier film and low moisture permeability. Therefore, the carrier film is preferably a film of polyethylene terephthalate, polyethylene, polypropylene or the like.
- the surface of the dry film of the present invention is preferably further protected with a cover film.
- the cover film is not particularly limited as long as it is a film having low moisture permeability.
- the varnish or dry film of the present invention may further contain the above-mentioned other components as necessary; it is a photosensitive resin composition further containing a photosensitizing component (such as a photopolymerizable compound and a photopolymerization initiator). It is preferable.
- a photosensitizing component such as a photopolymerizable compound and a photopolymerization initiator. It is preferable.
- the photosensitive resin composition comprises (a) the block polyamic acid imide of the present invention, (b) a photopolymerizable compound, and (c1) a photopolymerization initiator or (c2) a photopolymerization accelerator. If necessary, it may further contain (d) an epoxy compound and (e) a curing agent.
- the (b) photopolymerizable compound contained in the photosensitive resin composition is a compound having two or more photopolymerizable unsaturated double bonds.
- the compound having two or more photopolymerizable unsaturated double bonds include (meth) acrylates, (meth) acrylic acid, styrene, ⁇ -alkylstyrene, diallyl phthalates, etc. (Meth) acrylates.
- Examples of (meth) acrylates include ethyl (meth) acrylate, butyl (meth) acrylate, 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, oligoester (meth) monoacrylate, ethylene glycol Di (meth) acrylate, polyethylene glycol diacrylate, neopentyl glycol (meth) acrylate, tetramethylolmethane di (meth) acrylate, trimethylolpropane di (meth) acrylate, ditrimethylolpropane tetra (meth) acrylate, pentaerythritol tri ( (Meth) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, 2-hydroxy-1- (meth) acrylo C-3- (meth) acrylate, epoxy acrylate (
- the content of the photopolymerizable compound may be 3 to 400 parts by mass, preferably 10 to 100 parts by mass with respect to 100 parts by mass of the block polyamic acid imide.
- Examples of the (c1) photopolymerization initiator contained in the photosensitive resin composition include benzophenone, methylbenzophenone, o-benzoylbenzoic acid, benzoylethyl ether, 2,2-diethoxyacetophenone, 2,4-diethylthioxanthone, and the like. Sulfonium salt compounds; oxime ester compounds and the like.
- Examples of the (c2) photopolymerization accelerator include isoamyl p-dimethylbenzoate, 4,4-bis (diethylamino) benzophenone, dimethylethanolamine and the like.
- the total content of (c1) photopolymerization initiator and (c2) photopolymerization accelerator can be about 0.05 to 10% by mass with respect to the photopolymerizable compound.
- the photosensitive resin composition may further contain (d) an epoxy compound or (e) a curing agent as necessary in order to increase the film strength and heat resistance of the cured product.
- epoxy compound examples include triglycidyl isocyanurate, hydroquinone diglycidyl ether, bisphenol diglycidyl ether, cresol novolac type epoxy resin and phenol novolac type epoxy resin.
- the curing agent may be a latent thermosetting agent, a thermosetting agent that is solid at room temperature, a thermosetting accelerator, or the like.
- a latent thermosetting agent for example, “New Epoxy Resin” (published by Shosodo, May 1985), pages 164 to 263 and pages 356 to 405, “Crosslinking Agent Handbook” (Taisei (October, 1981) Of the materials described on pages 606 to 655, one or more types are selected from those having good storage stability.
- latent thermosetting agents include boron trifluoride-amine complex, dicyandiamide (DICY) and its derivatives; organic acid hydrazide, diaminomaleonitrile (DAMN) and its derivatives; melamine and its derivatives; amine imide (AI), Polyamine salts and the like are included.
- thermosetting agents that are solid at room temperature include metaphenylenediamine (MP-DA), diaminodiphenylmethane (DDM), diaminodiphenylsulfone (DDS), aromatic amines such as “Hardener HT972” manufactured by Ciba Geigy; Aromatic acids such as phthalic acid, trimellitic anhydride, ethylene glycol bis (anhydrotrimellitate), glycerol tris (anhydrotrimellitate), 3,3 ′, 4,4′-benzophenonetetracarboxylic anhydride Anhydrides; cyclic aliphatic acid anhydrides such as maleic anhydride, succinic anhydride, and tetrahydrophthalic anhydride are included.
- MP-DA metaphenylenediamine
- DDM diaminodiphenylmethane
- DDS diaminodiphenylsulfone
- Aromatic acids such as phthalic acid, trimellitic anhydride
- thermosetting accelerators include metal salts of acetylacetone such as acetylacetonate Zn and acetylacetonate Cr; enamines, tin octylates, quaternary phosphonium salts, triphenylphosphine, 1,8-diazabicyclo (5,4 , 0) Undecene-7 and its 2-ethylhexanoate and phenol salt; imidazole, imidazolium salt, triethanolamine borate and the like.
- the photosensitive resin composition may further contain (f) an organic solvent and water, and (g) other additives as necessary.
- other additives include dyes and pigments and ion scavengers to make it easy to confirm the applicability of the composition; fluidity adjustment, reduction of curing shrinkage, viscosity adjustment, and development.
- Organic / inorganic fillers for the purpose; polymerization inhibitors for preventing dark reactions and improving storage stability; other antifoaming agents; thermal polymerization initiators and the like.
- dyes include phthalocyanine green, phthalocyanine blue, carbon black, quinacridone red, diazo yellow, titanium oxide and the like.
- ion scavengers include inorganic or organic ion exchangers; specifically, inorganic ion exchangers Exe (manufactured by Toagosei Co., Ltd.) and ion exchange resin “Diaion” (Mitsubishi Chemical) Etc.).
- organic / inorganic fillers examples include resins such as epoxy resins, melamine resins, urea resins, acrylic resins, polyimide resins, Teflon (registered trademark) resins, polyethylene resins, polyester resins, and polyamide resins, which are insoluble in the solvent used.
- Inorganic fillers are included. You may use the said filler 1 type or in mixture of 2 or more types.
- the filler is preferably fine particles having an average particle size of 10 ⁇ m or less, more preferably 5 ⁇ m or less.
- the polymerization inhibitor include hydroquinone and phenothiazine.
- antifoaming agents include silicone compounds and hydrocarbon compounds.
- the block polyamic acid imide of the present invention comprises a polyamic acid (amidic acid oligomer) composed of a repeating structural unit represented by the formula (2A) and the formula (2B). It can be obtained by reacting with a polyimide (imide oligomer) composed of repeating structural units represented.
- the reaction is preferably performed in a solvent, and more preferably performed in an aprotic polar solvent.
- the block polyamic acid imide of the present invention uses an amic acid oligomer composed of a repeating structural unit represented by the formula (2A) as a raw material, and the amidic acid oligomer is represented by the following formula (2A ′). Further, it is preferably an amine-terminated amic acid oligomer.
- R and m in formula (2A ′) are defined in the same manner as R and m in formula (2A).
- the logarithmic viscosity at 35 ° C. of the amic acid oligomer solution (concentration 0.5 g / dl) when N-methyl-2-pyrrolidone is used as a solvent is preferably 0.1 to 3.0 dl / g. More preferably, it is 0.3 to 3.0 dl / g.
- the block polyamic acid imide of this invention uses the imide oligomer comprised by the repeating structural unit represented by Formula (2B) as a raw material, as the said imide oligomer is represented by following formula (2B ').
- the acid anhydride terminal imide oligomer is preferred.
- R ′, R ′′ and n in the formula (2B ′) are defined in the same manner as R ′, R ′′ and n in the formula (2B).
- the imide oligomer solution (concentration 0.5 g / dl) preferably has a logarithmic viscosity at 35 ° C. of 0.01 to 3.0 dl / g, More preferably, it is 0.02 to 2.0 dl / g.
- the gel is formed in the heating imidization reaction. Easy to convert. The cause of gelation is not clear, but it is presumed that an excessive amine moiety or an acid anhydride structure forms an excessive bond other than an imide bond and a crosslinked structure is formed.
- the amic acid oligomer represented by the formula (2A ′) is obtained by a polyaddition reaction of 1,4-cyclohexanediamine represented by the formula (3) and a tetracarboxylic dianhydride represented by the formula (4).
- the molar ratio of the diamine of the formula (3) to be subjected to the polyaddition reaction and the tetracarboxylic dianhydride of the formula (4) Is preferably 0.5 or more and less than 1.0, more preferably 0.7 or more and less than 1. This is to obtain an amine-terminated amic acid oligomer whose molecular weight is appropriately controlled.
- the 1,4-cyclohexanediamine represented by the formula (3) is composed of a trans isomer represented by the formula (3-1) and a cis isomer represented by the formula (3-2).
- trans isomer: cis isomer 10: 0 to 5: 5 is preferable.
- R in Formula (4) is a tetravalent group defined in the same manner as R in Formula (1A).
- the imide oligomer represented by the formula (2B ′) is obtained by a dehydration condensation reaction and an imidation reaction between the diamine represented by the formula (5) and the tetracarboxylic dianhydride represented by the formula (6).
- the molar ratio of the diamine of formula (5) to be subjected to dehydration condensation reaction and the tetracarboxylic dianhydride of formula (6) is 0.5 or more and preferably less than 1.0, more preferably 0.7 or more and less than 1. This is to obtain an acid anhydride-terminated imide oligomer having a molecular weight appropriately controlled.
- the polyaddition reaction or dehydration condensation reaction between diamine and tetracarboxylic dianhydride is preferably performed in a reaction solvent.
- the reaction solvent may be an aprotic polar solvent or a water-soluble alcohol solvent, but is preferably an aprotic polar solvent.
- aprotic polar solvents include N-methylpyrrolidone, N, N-dimethylformamide, N, N-dimethylacetamide, 1,3-dimethyl-2-imidazolidinone, dimethyl sulfoxide, hexamethylphosphoramide, etc.
- Ether compounds such as 2-methoxyethanol, 2-ethoxyethanol, 2- (methoxymethoxy) ethoxyethanol, 2-isopropoxyethanol, 2-butoxyethanol, tetrahydrofurfuryl alcohol, diethylene glycol, diethylene glycol monomethyl ether, diethylene glycol mono Ethyl ether, diethylene glycol monobutyl ether, triethylene glycol, triethylene glycol monoethyl ether, tetraethylene glycol, 1-methoxy-2-propanol, 1-ethoxy- 2-propanol, dipropylene glycol, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, tripropylene glycol monomethyl ether, polyethylene glycol, polypropylene glycol, tetrahydrofuran, dioxane, 1,2-dimethoxyethane, diethylene glycol dimethyl ether, diethylene glycol diethyl ether Etc.
- water-soluble alcohol solvents include methanol, ethanol, 1-propanol, 2-propanol, tert-butyl alcohol, ethylene glycol, 1,2-propanediol, 1,3-propanediol, and 1,3-butanediol. 1,4-butanediol, 2,3-butanediol, 1,5-pentanediol, 2-butene-1,4-diol, 2-methyl-2,4-pentanediol, 1,2,6-hexane Triol, diacetone alcohol and the like are included.
- these solvents can be used alone or in admixture of two or more.
- preferable examples of the solvent include N, N-dimethylacetamide, N-methylpyrrolidone, 1,3-dimethyl-2-imidazolidinone, or a combination thereof.
- An amic acid oligomer composed of the formula (2A) (preferably represented by the formula (2A ′)) and an imide oligomer composed of the formula (2B) (preferably represented by the formula (2B ′)) Mix in an aprotic polar solvent to obtain a block polyamic acid imide.
- the aprotic polar solvent is not particularly limited as long as it dissolves the imide oligomer constituted by the formula (2B), and may be, for example, N-methyl-2-pyrrolidone.
- the mixing method includes, for example, mixing with a three-one motor, a homomixer, a planetary mixer, a homogenizer, a high-viscosity material stirring and defoaming mixer, and the kneading may be performed while heating in the range of 10 to 150 ° C.
- the obtained block polyamic acid imide may be converted to block polyimide by imidization.
- the imidization means is not particularly limited, but may be performed thermally or chemically.
- For imidation for example, there are the following methods, but there is no particular limitation.
- a varnish may be used as a coating to imidize it.
- the block polyamic acid imide of the present invention can be preferably used as a material for an interlayer insulating film as a varnish or a dry film; in particular, as a material for an interlayer insulating film of a circuit board.
- the circuit board includes a substrate, a layer containing the patterned block polyimide of the present invention, and a patterned conductor layer.
- the patterned layer containing the block polyimide of the present invention is obtained from a varnish or dry film containing the block polyamic acid imide of the present invention; it becomes an interlayer insulating layer or a cover insulating layer of a circuit board.
- the circuit board may be an HDD suspension board, a multilayer printed wiring board, a semiconductor package board, or the like.
- the substrate can be a metal substrate or an inner layer circuit board.
- the material of the metal substrate can be copper, copper alloy, stainless steel, or the like.
- the inner layer circuit board may be a resin board (a glass epoxy board, a polyimide board, a polyester board, etc.) having a circuit pattern.
- the thickness of the layer containing the patterned block polyimide of the present invention is preferably 1 to 100 ⁇ m, more preferably about 5 to 50 ⁇ m, although it depends on the application.
- the material of the conductor layer composed of the wiring circuit pattern can be copper, copper alloy, indium tin oxide (ITO), graphene, organic conductor, or the like.
- the conductor layer can be formed by, for example, electroless plating.
- Such a circuit board can be produced using a varnish or a dry film containing the block polyamic acid imide of the present invention. Especially, since a manufacturing process can be simplified, it is preferable to produce using the varnish or dry film (the above-mentioned photosensitive resin composition) containing the block polyamic acid imide of this invention which has photosensitivity.
- the circuit board is obtained by: 1) obtaining a laminate comprising a substrate and a layer comprising the above-mentioned photosensitive resin composition containing the block polyamic acid imide of the present invention; 2) on the layer comprising the photosensitive resin composition. Step of disposing a photomask having a pattern; 3) After exposing the layer made of the photosensitive resin composition through the photomask, the layer made of the photosensitive resin composition is patterned by developing with an alkaline aqueous solution. Steps; and 4) A layer comprising a patterned photosensitive resin composition may be heated to imidize a block polyamic acid imide contained in the resin composition.
- step 1) a laminate including a substrate and a layer made of a photosensitive resin composition containing the block polyamic acid imide of the present invention is obtained.
- an interlayer insulating layer of a suspension board for HDD a metal board such as a stainless steel foil may be prepared.
- an inner layer circuit substrate may be prepared.
- the laminate may be obtained by applying a block polyamic acid imide varnish on a substrate and then drying; it may be obtained by vacuum laminating the substrate and a dry film containing the block polyamic acid imide.
- the vacuum lamination can be performed, for example, while heating the substrate at 80 to 120 ° C.
- a photomask having a pattern is disposed on the layer made of the photosensitive resin composition of the laminate.
- the minimum width (line spacing) of the photomask pattern may be 10 ⁇ m or less, preferably 1 ⁇ m or less, more preferably 0.5 ⁇ m or less.
- step 3 the layer made of the photosensitive resin composition is exposed to light through a photomask and then developed with an alkaline aqueous solution to pattern the layer made of the photosensitive resin composition.
- the exposure light is an electron beam, X-ray, ultraviolet light (including i-ray), visible light (including g-ray), etc., and preferably ultraviolet light or visible light.
- the light source can be a high pressure mercury lamp, an ultra high pressure mercury lamp, a low pressure mercury lamp, a halogen lamp, or the like.
- the exposure amount can be about 100 to 5000 mJ / cm 2 .
- the alkaline aqueous solution used for the development treatment may be an aqueous solution of tetramethylammonium hydroxide (TMAH), an aqueous sodium carbonate solution, or the like.
- TMAH tetramethylammonium hydroxide
- the alkali concentration can be in the range of 1 to 10% by weight.
- step 4 the layer made of the patterned photosensitive resin composition is heated to imidize the block polyamic acid imide contained in the resin composition, thereby obtaining a layer containing the patterned block polyimide.
- the imidization is preferably performed by heating at about 300 to 400 ° C. for several hours under reduced pressure or in an inert gas atmosphere.
- the layer made of the photosensitive resin composition containing the block polyamic acid imide of the present invention has good transparency. Thereby, exposure light such as i-line (365 nm) and g-line (436 nm) can be transmitted satisfactorily. Furthermore, the layer which consists of a photosensitive resin composition containing the block polyamic acid imide of this invention has moderate solubility with respect to alkali water solubility. Therefore, the layer made of the photosensitive resin composition of the present invention can be patterned with high accuracy according to the pattern of the photomask by development processing.
- the resulting layer containing the patterned inventive block polyimide has a low coefficient of thermal expansion (low CTE). Therefore, warpage due to heat or the like of the obtained circuit board can be reduced.
- a layer containing a block polyimide patterned by the following method may be obtained. That is, after the patterned photoresist is formed on the layer containing the block polyamic acid imide of the present invention; the portion of the layer containing the block polyamic acid imide that is not covered with the photoresist is etched away with an alkaline aqueous solution and patterned. Removing the photomask; heating the resulting layer containing the block polyamic acid imide to imidize it to obtain a patterned block polyimide layer.
- the film (polyimide film) containing the block polyimide of the present invention can have high transparency and low thermal expansion coefficient (dimensional stability) while being low in cost. Therefore, the polyimide film of the present invention can also be used as an optical film.
- optical films include optical film such as polarizing plate protective film, retardation film, antireflection film, electromagnetic wave shielding film, transparent conductive film; flexible display substrate, flat panel display substrate, inorganic / organic EL display Transparent substrates for panels for image display devices, such as substrates for touch panels, substrates for touch panels, and substrates for electronic paper.
- optical film such as polarizing plate protective film, retardation film, antireflection film, electromagnetic wave shielding film, transparent conductive film
- flexible display substrate flat panel display substrate, inorganic / organic EL display Transparent substrates for panels for image display devices, such as substrates for touch panels, substrates for touch panels, and substrates for electronic paper.
- a polyimide film used as a transparent substrate for a panel for an image display device has a functional layer such as a smooth layer, a hard coat layer, a gas barrier layer, a transparent conductive layer, and other optical films as necessary. Also good.
- the glass transition temperature, thermal expansion coefficient and total light transmittance of the film are preferably in the same ranges as described above. That is, the glass transition temperature of the film is preferably 260 ° C. or higher; the thermal expansion coefficient is preferably 30 ppm / K or lower; and the total light transmittance is preferably 80% or higher.
- Synthesis of raw material oligomer 1 Synthesis of amic acid oligomer (oligomer represented by formula (2A)) (Synthesis Example 1)
- Synthesis Example 1 Synthesis of amic acid oligomer (oligomer represented by formula (2A))
- Synthesis Example 1 Synthesis of amic acid oligomer (oligomer represented by formula (2A))
- CHDA 1,4-diaminocyclohexane
- NMP N-methyl-2-pyrrolidone
- Synthesis Example 4 The same procedure as in Synthesis Example 1 except that CHDA / BPDA was charged to CHDA / BPDA (weight: 22.8 g / 54.1 g, molar ratio 1.00 / 0.92) and NMP was charged to 351 g. An amic acid oligomer was synthesized.
- the reaction was carried out by bathing in an oil bath for 5 minutes.
- the solution was initially heterogeneous, but gradually changed to a light yellow homogeneous solution as the reaction proceeded.
- a cooling tube and a Dean-Stark type concentrator were attached to this separable flask, xylene (25.0 g) was added to the above solution, and dehydration thermal imidization was performed while stirring at 180 ° C. for 4 hours. Thereafter, xylene was distilled off to obtain an imide oligomer solution.
- the intrinsic logarithmic viscosities of the amic acid oligomer solutions obtained in Synthesis Examples 1 to 4 and the imide oligomer solutions obtained in Synthesis Examples 5 to 8 were measured by the following method.
- E-type viscosity The obtained block polyamic acid imide varnish was adjusted to a concentration of 16 wt%, and then the E type viscosity at 25 ° C. was measured using an E type viscometer (manufactured by Tokyo Keiki Co., Ltd., TVE-22 type).
- the solvent residual amount of the dry film obtained by peeling from the slide glass was measured by the following method. That is, an electric furnace type pyrolysis furnace (Shimadzu PYR-2A (pyrolysis temperature 320 ° C.)) and a gas chromatograph / mass spectrometer (Shimadzu GC-8A (Column Uniport HP 80/100 KG-02)) Connected. The obtained dry film was charged in an electric furnace type pyrolysis furnace and immediately heated at 320 ° C. to generate a volatile component; the volatile component was analyzed with a gas chromatograph mass spectrometer.
- the injector temperature and detector temperature of the gas chromatograph mass spectrometer were 200 ° C .; the column temperature was 170 ° C.
- the area of the corresponding peak of the obtained GC chart was calculated, and the amount of solvent was obtained by comparing with the previously prepared solvent calibration curve.
- TMAH tetramethylammonium hydroxide
- Glass transition temperature Tg The test piece of the obtained polyimide film was measured using a measuring device TMA-50 (manufactured by Shimadzu Corporation) in a temperature range of 25 to 350 ° C., a temperature rising rate of 5 ° C./min, a load of 14 g / mm 2 , and a tensile mode. TMA measurement was performed under the conditions. The glass transition temperature (Tg) was determined from the inflection point of the obtained temperature-test piece elongation curve.
- Total light transmittance The total light transmittance of the obtained polyimide film was measured by a method according to JIS K 7105 with a light source D65 using a Nippon Denshoku Haze Meter NDH2000.
- Example 2 The amic acid oligomer solution obtained in Synthesis Example 2 (concentration 18 wt%, 200 g) and the imide oligomer solution obtained in Synthesis Example 8 (concentration 25 wt%, 7.34 g) were reacted to form a block polyamic acid imide.
- a block polyamic acid imide varnish was obtained in the same manner as in Example 1, except that the average value of n was 9.5: 0.5.
- the E-type viscosity of the obtained varnish, the solubility of the dry film, and the physical properties of the polyimide film were measured in the same manner as in Example 1. However, the prebaking conditions in the measurement of solubility were the conditions shown in Table 2.
- the E-type viscosity of the obtained varnish, the solubility of the dry film, and the physical properties of the polyimide film were measured in the same manner as in Example 1. However, the prebaking conditions in the measurement of solubility were the conditions shown in Table 2.
- Example 6 The amidic acid oligomer solution (concentration 18 wt%, 155 g) obtained in Synthesis Example 4 and the imide oligomer solution (concentration 25 wt%, 11.6 g) obtained in Synthesis Example 7 were averaged for m of the block polyamic acid imide. Value: A block polyamic acid imide varnish was obtained in the same manner as in Example 1 except that the reaction was carried out so that the average value of n was 9.1: 0.9.
- the E-type viscosity of the obtained varnish, the solubility of the dry film, and the physical properties of the polyimide film were measured in the same manner as in Example 1. However, the prebaking conditions in the measurement of solubility were the conditions shown in Table 2.
- the E-type viscosity of the obtained varnish, the solubility of the dry film, and the physical properties of the polyimide film were measured in the same manner as in Example 1. However, the prebaking conditions in the measurement of solubility were the conditions shown in Table 2. In the measurement of solubility, the dry film peeled off during the measurement, and no dissolution behavior was observed.
- the E-type viscosity of the obtained varnish, the solubility of the dry film, and the physical properties of the polyimide film were measured in the same manner as in Example 1. However, the prebaking conditions in the measurement of solubility were the conditions shown in Table 2. In the measurement of solubility, the dry film peeled off during the measurement, and no dissolution behavior was observed.
- the E-type viscosity of the obtained varnish, the solubility of the dry film, and the physical properties of the polyimide film were measured in the same manner as in Example 1. However, the prebaking conditions in the measurement of solubility were the conditions shown in Table 2. In the measurement of solubility, the dry film peeled off during the measurement, and no dissolution behavior was observed.
- the E-type viscosity of the obtained varnish, the solubility of the dry film, and the physical properties of the polyimide film were measured in the same manner as in Example 1.
- the prebaking conditions in the measurement of solubility were the conditions shown in Table 2.
- the dissolution rate of the dry film was 70.2 ⁇ m / min, which was found to be too soluble in the 2.38% TMAH aqueous solution.
- the E-type viscosity of the obtained polyamic acid solution, the solubility of the dry film, and the physical properties of the polyimide film were measured in the same manner as in Example 1.
- the prebaking conditions in the measurement of solubility were the conditions shown in Table 2.
- the dissolution rate of the dry film was 73.2 ⁇ m / min, which was found to be too soluble in the 2.38% TMAH aqueous solution.
- the E-type viscosity of the obtained polyamic acid solution, the solubility of the dry film, and the physical properties of the polyimide film were measured in the same manner as in Example 1.
- the prebaking conditions used for the measurement of solubility were the conditions shown in Table 2.
- the dissolution rate of the dry film was 79.8 ⁇ m / min, which was found to be too soluble in the 2.38% TMAH aqueous solution.
- the E-type viscosity of the obtained polyamic acid solution, the solubility of the dry film, and the physical properties of the polyimide film were measured in the same manner as in Example 1. However, the prebaking conditions in the measurement of solubility were the conditions shown in Table 2. In the measurement of solubility, the dry film peeled off during the measurement, and no dissolution behavior was observed.
- the block polyamidoimide which has moderate solubility with respect to aqueous alkali solution, and the block polyimide obtained using it with high transparency and a low thermal expansion coefficient (low CTE) can be provided. .
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Abstract
Description
mは、式(1A)で表される繰返し構造単位の繰返し数を示し、nは、式(1B)で表される繰返し構造単位の繰返し数を示し、かつ
ブロックポリイミドに含まれる式(1A)で表される繰り返し構造単位の総数を、式(1A)で表される繰り返し構造単位で構成されるブロックの数で割った値をmの平均値とし;ブロックポリイミドに含まれる式(1B)で表される繰り返し構造単位の総数を、式(1B)で表される繰り返し構造単位で構成されるブロックの数で割った値をnの平均値としたとき、mの平均値:nの平均値=10未満:0超~9超:1未満であり、
RおよびR”はそれぞれ独立して、炭素数4~27の4価の基であり;かつ単環式脂肪族基、縮合多環式脂肪族基、単環式芳香族基もしくは縮合多環式芳香族基であるか、環式脂肪族基が直接もしくは架橋員により相互に連結された非縮合多環式脂肪族基であるか、または芳香族基が直接もしくは架橋員により相互に連結された非縮合多環式芳香族基であり、
R’は、炭素数4~51の2価の基であり;かつ単環式脂肪族基(但し、1,4-シクロヘキシレン基を除く)、縮合多環式脂肪族基、または環式脂肪族基が直接もしくは架橋員により相互に連結された非縮合多環式脂肪族基である)
[2] 前記mの平均値とnの平均値は、それぞれ独立して、2~1000である、[1]に記載のブロックポリイミド。
[3] 前記式(1A)で表される繰返し構造単位におけるシクロヘキサン骨格が、下記式(1A-1)で表されるトランス体および下記式(1A-2)で表されるシス体からなり、前記トランス体と前記シス体のモル比または質量比は、トランス体:シス体=10:0~5:5である、[1]または[2]に記載のブロックポリイミド。
[5] 前記ブロックポリイミドからなるフィルムを、25~350℃の温度範囲で、昇温速度5℃/分、荷重14g/mm2、引張りモードの条件でTMA測定して得られるガラス転移温度(Tg)が260℃以上である、[1]~[4]のいずれかに記載のブロックポリイミド。
[6] 前記ブロックポリイミドからなるフィルムを、25~350℃の温度範囲で、昇温速度5℃/分、荷重14g/mm2、引張りモードの条件でTMA測定して得られる熱膨張係数が30ppm/K以下である、[1]~[5]のいずれかに記載のブロックポリイミド。
[7] 前記ブロックポリイミドからなるフィルムの、JIS K 7105に準じて測定される全光線透過率が80%以上である、[1]~[6]のいずれかに記載のブロックポリイミド。
mは、式(2A)で表される繰返し構造単位の繰返し数を示し、nは、式(2B)で表される繰返し構造単位の繰返し数を示し、かつ
ブロックポリアミド酸イミドに含まれる式(2A)で表される繰り返し構造単位の総数を、式(2A)で表される繰り返し構造単位で構成されるブロックの数で割った値をmの平均値とし;ブロックポリアミド酸イミドに含まれる式(2B)で表される繰り返し構造単位の総数を、式(2B)で表される繰り返し構造単位で構成されるブロックの数で割った値をnの平均値としたとき、mの平均値:nの平均値=10未満:0超~9超:1未満であり、
RおよびR”は、それぞれ独立して炭素数4~27の4価の基であり;かつ単環式脂肪族基、縮合多環式脂肪族基、単環式芳香族基もしくは縮合多環式芳香族基であるか、環式脂肪族基が直接もしくは架橋員により相互に連結された非縮合多環式脂肪族基であるか、または芳香族基が直接もしくは架橋員により相互に連結された非縮合多環式芳香族基であり;
R’は、炭素数4~51の2価の基であり;かつ単環式脂肪族基(但し、1,4-シクロヘキシレン基を除く)、縮合多環式脂肪族基、または環式脂肪族基が直接もしくは架橋員により相互に連結された非縮合多環式脂肪族基である)
[9] 前記mの平均値とnの平均値は、それぞれ独立して2~1000である、[8]に記載のブロックポリアミド酸イミド。
[10] 前記式(2B)で表される繰返し構造単位からなるポリイミドが、非プロトン性極性溶媒に溶解可能である、[8]または[9]に記載のブロックポリアミド酸イミド。
[11] N-メチル-2-ピロリドン溶媒中、または、N,N-ジメチルアセトアミド溶媒中、濃度0.5g/dl、35℃で測定した対数粘度の値が0.1~3.0dl/gである、[8]~[10]のいずれかに記載のブロックポリアミド酸イミド。
[12] 前記ブロックポリアミド酸イミドからなる、残存溶剤量が10質量%であり、厚み15μmのドライフィルムを、2.38質量%のテトラメチルアンモニウムヒドロキシド水溶液に浸漬して測定される20℃での溶解速度が、5~60μm/分の範囲である、[8]~[11]のいずれかに記載のブロックポリアミド酸イミド。
Rは、炭素数4~27の4価の基であり;かつ単環式脂肪族基、縮合多環式脂肪族基、単環式芳香族基もしくは縮合多環式芳香族基であるか、環式脂肪族基が直接もしくは架橋員により相互に連結された非縮合多環式脂肪族基であるか、または芳香族基が直接もしくは架橋員により相互に連結された非縮合多環式芳香族基であり、式(3)で表される1,4-シクロヘキサンジアミンは、下記式(3-1)で表されるトランス体、および下記式(3-2)で表されるシス体からなり;トランス体とシス体のモル比または質量比は、トランス体:シス体=10:0~5:5である)
式(2B’)または式(6)において、R”は、炭素数4~27の4価の基であり;かつ単環式脂肪族基、縮合多環式脂肪族基、単環式芳香族基もしくは縮合多環式芳香族基であるか、環式脂肪族基が直接もしくは架橋員により相互に連結された非縮合多環式脂肪族基であるか、または芳香族基が直接もしくは架橋員により相互に連結された非縮合多環式芳香族基である)
[15] [13]または[14]で得られたブロックポリアミド酸イミドを、熱的または化学的にイミド化するステップを含む、[1]~[7]のいずれかに記載のブロックポリイミドの製造方法。
[17] [8]~[12]のいずれかに記載のブロックポリアミド酸イミドを含む、層間絶縁膜用材料。
[18] [8]~[12]のいずれかに記載のブロックポリアミド酸イミドと、溶媒とを含む、ブロックポリアミド酸イミドワニス。
[19] [8]~[12]のいずれかに記載のブロックポリアミド酸イミドと、光重合性化合物と、光重合開始剤とを含む、感光性樹脂組成物。
[20] 金属基板と、[16]に記載のドライフィルムとを含む、積層体。
[21] 基板と、パターニングされた[1]~[7]のいずれかに記載のブロックポリイミドを含む層と、パターニングされた導体層とを含む、回路基板。
[22] 前記回路基板は、サスペンション基板または半導体パッケージ基板である、[21]に記載の回路基板。
[23] 基板と[19]に記載の感光性樹脂組成物からなる層とを含む積層体を得る工程と、前記積層体の感光性樹脂組成物からなる層上に、パターニングされたフォトマスクを配置する工程と、前記感光性樹脂組成物からなる層を、前記フォトマスクを介して露光した後、アルカリ水溶液で現像処理して、前記感光性樹脂組成物からなる層をパターニングする工程と、パターニングされた前記感光性樹脂組成物からなる層を加熱して、前記感光性樹脂組成物に含まれるブロックポリアミド酸イミドをイミド化する工程とを含む、回路基板の製造方法。
[25] [24]に記載のポリイミドフィルムを含む、光学フィルム。
1)ブロックポリアミド酸イミドのワニスをガラス板やシリコンウェハなどの基材上に塗布する。得られた塗膜を有する基材を、窒素気流下、80℃で15分間乾燥(プリベイク)する。乾燥(プリベイク)後の塗膜(ドライフィルム)の残存溶剤量は10質量%とし;膜厚は15μmとしうる。
2)次いで、ドライフィルムを有する基材を、20℃に調整された濃度2.38%のテトラメチルアンモニウムヒドロキシド(TMAH)水溶液に、上記基材を振動させながら浸漬する。振動は、超音波、水流または振動モータ;好ましくは振動モータで付与しうる。振動周波数は、1Hzとする。
3)そして、基材上のドライフィルムが溶解して消失するまでの時間を計測する。フィルムの初期膜厚を、消失するまでの時間で除したものを「溶解速度(単位:μm/分)」とする。
感光性樹脂組成物は、(a)本発明のブロックポリアミド酸イミドと、(b)光重合性化合物と、(c1)光重合開始剤または(c2)光重合促進剤とを含み;必要に応じて(d)エポキシ化合物および(e)硬化剤などをさらに含みうる。
本発明のブロックポリアミド酸イミドは、前記式(2A)で表される繰返し構造単位で構成されるポリアミド酸(アミド酸オリゴマー)と、前記式(2B)で表される繰返し構造単位で構成されるポリイミド(イミドオリゴマー)とを反応させて得ることができる。当該反応は、溶媒中で行うことが好ましく、非プロトン性の極性溶媒中で行うことがより好ましい。
(1)溶媒中のブロックポリアミド酸イミドを、100~400℃に加熱して、イミド化する方法(熱イミド化)
(2)溶媒中のブロックポリアミド酸イミドを、無水酢酸などのイミド化剤を用いて化学的にイミド化する方法(化学イミド化)
(3)溶媒中のブロックポリアミド酸イミドを、触媒存在下または不存在下、共沸脱水用溶媒の存在下においてイミド化する方法(共沸脱水閉環法)
本発明のブロックポリアミド酸イミドは、ワニスまたはドライフィルムとして層間絶縁膜用材料;特に回路基板の層間絶縁膜用材料として好ましく用いることができる。
1)アミド酸オリゴマー(式(2A)で表されるオリゴマー)の合成
(合成例1)
温度計、攪拌機、窒素導入管を備えた500mLの5口セパラブルフラスコに、1,4-ジアミノシクロヘキサン(CHDA(トランス比>99%)、22.6g、0.198モル)と、有機溶剤としてN-メチル-2-ピロリドン(NMP、371g)とを加えて溶解させて攪拌した。これに、3,3’,4,4’-ビフェニルテトラカルボン酸二無水物(BPDA、58.8g、0.200モル)を粉状のまま投入し、得られた溶液を90℃に保持したオイルバス中に1時間浴して反応させた。溶液は、当初は不均一であったが、反応の進行に従って無色に近い透明な溶液に変化し、粘性のあるアミド酸オリゴマー溶液を得た。
CHDAとBPDAの仕込み量をCHDA/BPDA(重量:22.8g/57.7g、モル比1.00/0.98)とし、NMPの仕込み量を367gとした以外は合成例1と同様にしてアミド酸オリゴマーを合成した。
CHDAとBPDAの仕込み量をCHDA/BPDA(重量:22.8g/57.1g、モル比1.00/0.97)とし、NMPの仕込み量を364gとした以外は合成例1と同様にしてアミド酸オリゴマーを合成した。
CHDAとBPDAの仕込み量をCHDA/BPDA(重量:22.8g/54.1g、モル比1.00/0.92)とし、NMPの仕込み量を351gとした以外は合成例1と同様にしてアミド酸オリゴマーを合成した。
(合成例5)
温度計、攪拌機、窒素導入管を備えた300mLの5口セパラブルフラスコに、ノルボルナンジアミン(NBDA、11.9g、0.077モル)と、有機溶媒として1,3―ジメチル-2-イミダゾリジノン(DMI、124g)とを加えて溶解させて攪拌した。これに、3,3’,4,4’-ビフェニルテトラカルボン酸二無水物(BPDA、29.42g、0.100モル)を粉状のまま投入し、得られた溶液を120℃に保持したオイルバス中に5分間浴して反応させた。溶液は、当初は不均一であったが、反応の進行に従って徐々に淡黄色均一溶液に変化した。このセパラブルフラスコに、冷却管とディーンスターク型濃縮器を取り付けて、キシレン(25.0g)を上記溶液に追加して、180℃、4時間で攪拌しながら脱水熱イミド化を行った。その後、キシレンを留去し、イミドオリゴマー溶液を得た。
NBDAとBPDAの仕込み量をNBDA/BPDA(重量:11.3g/29.4g、モル比0.73/1.00)とし、DMIの仕込み量を122gとした以外は合成例5と同様にしてイミドオリゴマー溶液を得た。
NBDAとBPDAの仕込み量をNBDA/BPDA(重量:11.1g/29.4g、モル比0.72/1.00)とし、DMIの仕込み量を122gとした以外は合成例5と同様にしてイミドオリゴマー溶液を得た。
NBDAとBPDAの仕込み量をNBDA/BPDA(重量:9.56g/29.4g、モル比0.62/1.00)とし、DMIの仕込み量を117gとした以外は合成例5と同様にしてイミドオリゴマー溶液を得た。
得られたアミド酸オリゴマー溶液およびイミドオリゴマー溶液を、固形分濃度が0.5g/dLとなるようにN-メチル-2-ピロリドン(NMP)に溶解させて溶液を作製し、その固有対数粘度(dL/g)をウベローデ粘度計を用いて35℃にて測定した。
(実施例1)
1)ブロックポリアミド酸イミドの合成および評価
ブロックポリアミド酸イミドの合成
合成例2で得られたアミド酸オリゴマー溶液(濃度18wt%、200g)と、合成例5で得られたイミドオリゴマー溶液(濃度25wt%、3.02g)とを混合した後、高粘度材料撹拌脱泡ミキサ(または混練・混和泡取り装置)(株式会社ジャパンユニックス社製、製品名:UM-118)を用いて10分間さらに攪拌し、反応させて、ブロックポリアミド酸イミドのワニスを得た。得られたブロックポリアミド酸イミドのmの平均値とnの平均値との比は、mの平均値:nの平均値=9.8:0.2であった。
得られたブロックポリアミド酸イミドのワニスを、濃度16wt%に調整した後、E型粘度計(東京計器社製、TVE-22型)を用いて、25℃におけるE型粘度を測定した。
得られたブロックポリアミド酸イミドのワニスをスライドガラス上に垂らし、スピンコーター(エイブル社製)を用いてスピンコートした。スピンコートは、回転数×時間を、1500rpm×15秒/1600rpm×5秒に設定して行った。得られた塗膜を有するスライドガラスを、窒素気流下、80℃に調整したオーブンに入れて所定時間15分乾燥(プリベイク)させた。ブリベイク後の塗膜(ドライフィルム)の膜厚は、17μmであった。
スライドガラスから剥離して得られたドライフィルムの溶剤残存量を、以下の方法で測定した。即ち、電気炉型熱分解炉(島津製作所製PYR-2A(熱分解温度 320℃))と、ガスクロマト質量分析装置(島津製作所製GC-8A(カラムUniport HP 80/100 KG-02))とを接続した。そして、得られたドライフィルムを電気炉型熱分解炉で、投入後、即時320℃加熱して揮発成分を生成させ;当該揮発成分を、ガスクロマト質量分析装置にて分析した。ガスクロマト質量分析装置のインジェクタ温度およびディテクタ温度は200℃とし;カラム温度は170℃とした。得られたGCチャートの該当ピークの面積を算出し、予め準備しておいた溶剤の検量線と照合して溶剤量を求めた。
上記ドライフィルムを有するスライドガラスを、20℃に調整された濃度2.38%のテトラメチルアンモニウムヒドロキシド(TMAH)水溶液に、上記スライドガラスを振動させながら浸漬し、スライドガラス上のドライフィルムが溶解して消失するまでの時間を計測した。振動条件は、振動モータを用いて1Hzとした。そして、ドライフィルムの初期膜厚を、消失するまでの時間で除したものを「溶解速度(単位:μm/分)」とした。溶解速度(単位:μm/分)は、同様の測定を3回繰り返したときの平均値として算出した。
得られたブロックポリアミド酸イミドのワニスを、ドクターブレードにてガラス基板上に流延した。このガラス基板を、オーブンにて窒素気流中、2時間かけて50℃から270℃まで昇温し、次いで270℃で2時間保持して、流延膜をイミド化させた。得られた流延膜をガラス基板から剥離して、ポリイミドフィルムを得た。
得られたポリイミドフィルムの試験片を、測定装置TMA-50(島津製作所製)を用いて、25~350℃の温度範囲で、昇温速度5℃/分、荷重14g/mm2、引張りモードの条件でTMA測定した。得られた温度-試験片伸び曲線の変曲点からガラス転移温度(Tg)を求めた。
前述のTMA測定で得られた温度-試験片伸び曲線の、100~200℃の範囲における傾きから熱線膨張率を求めた。
得られたポリイミドフィルムの全光線透過率を、日本電色工業製ヘーズメーターNDH2000を用いて、光源D65にてJIS K 7105に準じた方法で測定した。
合成例2で得られたアミド酸オリゴマー溶液(濃度18wt%、200g)と、合成例8で得られたイミドオリゴマー溶液(濃度25wt%、7.34g)とを反応させて、ブロックポリアミド酸イミドのmの平均値:nの平均値=9.5:0.5となるようにした以外は実施例1と同様にしてブロックポリアミド酸イミドのワニスを得た。
合成例4で得られたアミド酸オリゴマー溶液(濃度18wt%、160g)と、合成例7で得られたイミドオリゴマー溶液(濃度25wt%、6.39g)とを、ブロックポリアミド酸イミドのmの平均値:nの平均値=9.5:0.5となるように反応させた以外は実施例1と同様にブロックポリアミド酸イミドのワニスを得た。
合成例4で得られたアミド酸オリゴマー溶液(濃度18wt%、155g)と、合成例7で得られたイミドオリゴマー溶液(濃度25wt%、11.6g)とを、ブロックポリアミド酸イミドのmの平均値:nの平均値=9.1:0.9となるように反応させた以外は実施例1と同様にブロックポリアミド酸イミドのワニスを得た。
合成例3で得られたアミド酸オリゴマー溶液(濃度18wt%、200g)と、合成例6で得られたイミドオリゴマー溶液(濃度25wt%、16.3g)とを、ブロックポリアミド酸イミドのmの平均値:nの平均値=9.0:1.0となるように反応させた以外は実施例1と同様にブロックポリアミド酸イミドのワニスを得た。
合成例4で得られたアミド酸オリゴマー溶液(濃度18wt%、200g)と、合成例7で得られたイミドオリゴマー溶液(濃度25wt%、37.9g)とを、ブロックポリアミド酸イミドのmの平均値:nの平均値=8.0:2.0となるように反応させた以外は実施例1と同様にブロックポリアミド酸イミドのワニスを得た。
合成例4で得られたアミド酸オリゴマー溶液(濃度18wt%、170g)と、合成例7で得られたイミドオリゴマー溶液(濃度25wt%、36.4g)とを、ブロックポリアミド酸イミドのmの平均値:nの平均値=7.8:2.2となるように反応させた以外は実施例1と同様にブロックポリアミド酸イミドのワニスを得た。
合成例1と同様の反応装置を用いて、1,4-ジアミノシクロヘキサン(CHDA、19.0g、0.166モル)と、ノルボルナンジアミン(NBDA、5.24g、0.0340モル)と、有機溶剤としてN-メチル-2-ピロリドン(NMP、378g)とを加えて溶解させ、攪拌した。これに、3,3’,4,4’-ビフェニルテトラカルボン酸二無水物(BPDA、58.8g、0.200モル)を粉状のまま投入し、得られた溶液を90℃に保持したオイルバス中に1時間浴して反応させた。溶液は、当初は不均一であったが、反応の進行に従って無色に近い透明な溶液に変化し、粘性のあるポリアミド酸溶液を得た。
合成例1で得られたアミド酸オリゴマー溶液を準備した。そして、この溶液のE型粘度、ドライフィルムの溶解性、ポリイミドフィルムの物性を実施例1と同様にして測定した。ただし、溶解性の測定におけるプリベイク条件は、表2に示される条件とした。ドライフィルムの溶解速度は66.0μm/分であり、2.38%TMAH水溶液に溶けすぎることがわかった。
合成例4で得られたアミド酸オリゴマー溶液を準備した。そして、この溶液のE型粘度、ドライフィルムの溶解性を実施例1と同様にして測定した。ただし、溶解性の測定におけるプリベイク条件は、表2に示される条件とした。ドライフィルムの溶解速度は88.8μm/分であり、2.38%TMAH水溶液に溶けすぎることがわかった。また、ポリイミドフィルムを実施例1と同様にして作製しようとしたが、脆く、フィルム形状を保持できなかった。
合成例1と同様の反応装置を用いて、ノルボルナンジアミン(NBDA、30.9g、0.200モル)と、有機溶剤としてN,N-ジメチルアセトアミド(DMAc、209g)とを加えて溶解させ、攪拌した。これに、3,3’,4,4’-ビフェニルテトラカルボン酸二無水物(BPDA、58.8g、0.200モル)を粉状のまま投入し、得られた溶液を90℃に保持したオイルバス中に1時間浴して反応させた。溶液は、当初は不均一であったが、反応の進行に従って透明な溶液に変化し、粘性のあるポリアミド酸溶液を得た。
合成例1と同様の反応装置を用いて、1,4-ビス(アミノメチルシクロヘキサン)(14BAC、14.25g、0.100モル)と、有機溶剤としてN,N-ジメチルアセトアミド(DMAc、229g)とを加えて溶解させ、攪拌した。これに、3,3’,4,4’-ビフェニルテトラカルボン酸二無水物(BPDA、29.4g、0.100モル)を粉状のまま投入し、得られた溶液を90℃に保持したオイルバス中に1時間浴して反応させた。溶液は、当初は不均一であったが、速やかに反応が進行して透明な溶液に変化し、粘性のあるポリアミド酸溶液を得た。
合成例1と同様の反応装置を用いて、2,2’-ビス(トリフルオロメチル)-4,4’-ジアミノビフェニル(TFMB、25.6g、0.0800モル)と、有機溶剤としてN-メチル-2-ピロリドン(NMP、279g)とを加えて溶解させ、攪拌した。これに、3,3’,4,4’-ビフェニルテトラカルボン酸二無水物(BPDA、23.5g、0.0800モル)を粉状のまま投入し、得られた溶液を90℃に保持したオイルバス中に1時間浴して反応させた。溶液は当初不均一であったが、反応の進行に従って透明な溶液に変化し、粘性のあるポリアミド酸溶液を得た。
Claims (26)
- 下記式(1A)で表される繰返し構造単位で構成されるブロックと、下記式(1B)で表される繰返し構造単位で構成されるブロックとを含む、ブロックポリイミド。
mは、式(1A)で表される繰返し構造単位の繰返し数を示し、nは、式(1B)で表される繰返し構造単位の繰返し数を示し、かつ
ブロックポリイミドに含まれる式(1A)で表される繰り返し構造単位の総数を、式(1A)で表される繰り返し構造単位で構成されるブロックの数で割った値をmの平均値とし;ブロックポリイミドに含まれる式(1B)で表される繰り返し構造単位の総数を、式(1B)で表される繰り返し構造単位で構成されるブロックの数で割った値をnの平均値としたとき、mの平均値:nの平均値=10未満:0超~9超:1未満であり、
RおよびR”はそれぞれ独立して、炭素数4~27の4価の基であり;かつ単環式脂肪族基、縮合多環式脂肪族基、単環式芳香族基もしくは縮合多環式芳香族基であるか、環式脂肪族基が直接もしくは架橋員により相互に連結された非縮合多環式脂肪族基であるか、または芳香族基が直接もしくは架橋員により相互に連結された非縮合多環式芳香族基であり、
R’は、炭素数4~51の2価の基であり;かつ単環式脂肪族基(但し、1,4-シクロヘキシレン基を除く)、縮合多環式脂肪族基、または環式脂肪族基が直接もしくは架橋員により相互に連結された非縮合多環式脂肪族基である) - 前記mの平均値とnの平均値は、それぞれ独立して、2~1000である、請求項1に記載のブロックポリイミド。
- p-クロロフェノール/フェノール=9/1(重量)の混合溶媒中、濃度0.5g/dl、35℃で測定した対数粘度の値が、0.1~3.0dl/gである、請求項1に記載のブロックポリイミド。
- 前記ブロックポリイミドからなるフィルムを、25~350℃の温度範囲で、昇温速度5℃/分、荷重14g/mm2、引張りモードの条件でTMA測定して得られるガラス転移温度(Tg)が260℃以上である、請求項1に記載のブロックポリイミド。
- 前記ブロックポリイミドからなるフィルムを、25~350℃の温度範囲で、昇温速度5℃/分、荷重14g/mm2、引張りモードの条件でTMA測定して得られる熱膨張係数が30ppm/K以下である、請求項1に記載のブロックポリイミド。
- 前記ブロックポリイミドからなるフィルムの、JIS K 7105に準じて測定される全光線透過率が80%以上である、請求項1に記載のブロックポリイミド。
- 下記式(2A)で表される繰返し構造単位で構成されるブロックと、下記式(2B)で表される繰返し構造単位で構成されるブロックとを含む、ブロックポリアミド酸イミド。
mは、式(2A)で表される繰返し構造単位の繰返し数を示し、nは、式(2B)で表される繰返し構造単位の繰返し数を示し、かつ
ブロックポリアミド酸イミドに含まれる式(2A)で表される繰り返し構造単位の総数を、式(2A)で表される繰り返し構造単位で構成されるブロックの数で割った値をmの平均値とし;ブロックポリアミド酸イミドに含まれる式(2B)で表される繰り返し構造単位の総数を、式(2B)で表される繰り返し構造単位で構成されるブロックの数で割った値をnの平均値としたとき、mの平均値:nの平均値=10未満:0超~9超:1未満であり、
RおよびR”は、それぞれ独立して炭素数4~27の4価の基であり;かつ単環式脂肪族基、縮合多環式脂肪族基、単環式芳香族基もしくは縮合多環式芳香族基であるか、環式脂肪族基が直接もしくは架橋員により相互に連結された非縮合多環式脂肪族基であるか、または芳香族基が直接もしくは架橋員により相互に連結された非縮合多環式芳香族基であり;
R’は、炭素数4~51の2価の基であり;かつ単環式脂肪族基(但し、1,4-シクロヘキシレン基を除く)、縮合多環式脂肪族基、または環式脂肪族基が直接もしくは架橋員により相互に連結された非縮合多環式脂肪族基である) - 前記mの平均値とnの平均値は、それぞれ独立して2~1000である、請求項8に記載のブロックポリアミド酸イミド。
- 前記式(2B)で表される繰返し構造単位からなるポリイミドが、非プロトン性極性溶媒に溶解可能である、請求項8に記載のブロックポリアミド酸イミド。
- N-メチル-2-ピロリドン溶媒中、または、N,N-ジメチルアセトアミド溶媒中、濃度0.5g/dl、35℃で測定した対数粘度の値が0.1~3.0dl/gである、請求項8に記載のブロックポリアミド酸イミド。
- 前記ブロックポリアミド酸イミドからなる、残存溶剤量が10質量%であり、厚み15μmのドライフィルムを、2.38質量%のテトラメチルアンモニウムヒドロキシド水溶液に浸漬して測定される20℃での溶解速度が、5~60μm/分の範囲である、請求項8に記載のブロックポリアミド酸イミド。
- 請求項8に記載のブロックポリアミド酸イミドの製造方法であって、
下記式(2A’)で表されるアミン末端ポリアミド酸と、下記式(2B’)で表される酸無水物末端ポリイミドとを、非プロトン性極性溶媒中で反応させるステップを含み、
式(2A’)で表されるアミン末端ポリアミド酸は、式(3)で表される1,4-シクロヘキサンジアミンと、式(4)で表されるテトラカルボン酸二無水物から得られ;そのモル比(式(3)で表されるジアミン/式(4)で表されるテトラカルボン酸二無水物)が、1を超えて2以下であり、
式(2B’)で表される酸無水物末端ポリイミドは、式(5)で表されるジアミンと、式(6)で表されるテトラカルボン酸二無水物から得られ;そのモル比(式(5)で表されるジアミン/式(6)で表されるテトラカルボン酸二無水物)が、0.5以上であって1未満である、
ブロックポリアミド酸イミドの製造方法。
Rは、炭素数4~27の4価の基であり;かつ単環式脂肪族基、縮合多環式脂肪族基、単環式芳香族基もしくは縮合多環式芳香族基であるか、環式脂肪族基が直接もしくは架橋員により相互に連結された非縮合多環式脂肪族基であるか、または芳香族基が直接もしくは架橋員により相互に連結された非縮合多環式芳香族基であり、
式(3)で表される1,4-シクロヘキサンジアミンは、下記式(3-1)で表されるトランス体、および下記式(3-2)で表されるシス体からなり;トランス体とシス体のモル比または質量比は、トランス体:シス体=10:0~5:5である)
式(2B’)または式(6)において、R”は、炭素数4~27の4価の基であり;かつ単環式脂肪族基、縮合多環式脂肪族基、単環式芳香族基もしくは縮合多環式芳香族基であるか、環式脂肪族基が直接もしくは架橋員により相互に連結された非縮合多環式脂肪族基であるか、または芳香族基が直接もしくは架橋員により相互に連結された非縮合多環式芳香族基である) - 請求項13で得られたブロックポリアミド酸イミドを、熱的または化学的にイミド化するステップを含む、請求項1に記載のブロックポリイミドの製造方法。
- 請求項14で得られたブロックポリアミド酸イミドを、熱的または化学的にイミド化するステップを含む、請求項1に記載のブロックポリイミドの製造方法。
- 請求項8に記載のブロックポリアミド酸イミドを含む、ドライフィルム。
- 請求項8に記載のブロックポリアミド酸イミドを含む、層間絶縁膜用材料。
- 請求項8に記載のブロックポリアミド酸イミドと、溶媒とを含む、ブロックポリアミド酸イミドワニス。
- 請求項8に記載のブロックポリアミド酸イミドと、光重合性化合物と、光重合開始剤とを含む、感光性樹脂組成物。
- 金属基板と、請求項17に記載のドライフィルムとを含む、積層体。
- 基板と、パターニングされた請求項1に記載のブロックポリイミドを含む層と、パターニングされた導体層とを含む、回路基板。
- 前記回路基板は、サスペンション基板または半導体パッケージ基板である、請求項22に記載の回路基板。
- 基板と請求項20に記載の感光性樹脂組成物からなる層とを含む積層体を得る工程と、
前記積層体の感光性樹脂組成物からなる層上に、パターニングされたフォトマスクを配置する工程と、
前記感光性樹脂組成物からなる層を、前記フォトマスクを介して露光した後、アルカリ水溶液で現像処理して、前記感光性樹脂組成物からなる層をパターニングする工程と、
パターニングされた前記感光性樹脂組成物からなる層を加熱して、前記感光性樹脂組成物に含まれるブロックポリアミド酸イミドをイミド化する工程と、を含む、回路基板の製造方法。 - 請求項1に記載のブロックポリイミドを含む、ポリイミドフィルム。
- 請求項25に記載のポリイミドフィルムを含む、光学フィルム。
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017073441A (ja) * | 2015-10-06 | 2017-04-13 | 日立化成株式会社 | 感光性封止樹脂組成物、それを用いた半導体装置の製造方法及び半導体装置 |
WO2018016561A1 (ja) * | 2016-07-22 | 2018-01-25 | 三井化学株式会社 | 医療用フィルム及びその製造方法、医療用コーティング組成物、医療用具及びその製造方法 |
TWI693468B (zh) * | 2015-03-06 | 2020-05-11 | 日商東麗股份有限公司 | 感光性樹脂組成物及電子零件 |
JP7075532B1 (ja) | 2021-09-28 | 2022-05-25 | 東洋インキScホールディングス株式会社 | 絶縁粘着テープ |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017125966A1 (ja) * | 2016-01-19 | 2017-07-27 | 互応化学工業株式会社 | 感光性樹脂組成物、ドライフィルム、及びプリント配線板 |
KR101994976B1 (ko) * | 2016-10-24 | 2019-07-01 | 주식회사 엘지화학 | 폴리이미드계 블록 공중합체 및 이를 포함하는 폴리이미드계 필름 |
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CN117343547B (zh) * | 2023-12-04 | 2024-02-27 | 宁波长阳科技股份有限公司 | 一种Ag@聚吡咯/聚乙二醇-聚酰亚胺复合材料及制备方法、压力传感器 |
Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62236732A (ja) * | 1986-04-08 | 1987-10-16 | 住友ベークライト株式会社 | 可撓性印刷回路用基板の製造方法 |
JPH09176315A (ja) * | 1995-12-22 | 1997-07-08 | Japan Synthetic Rubber Co Ltd | ポリイミド系ブロック共重合体 |
JP2002161136A (ja) * | 2000-09-14 | 2002-06-04 | Sony Chem Corp | ポリイミド前駆体、その製造方法及び感光性樹脂組成物 |
JP2002167433A (ja) * | 2000-11-30 | 2002-06-11 | Central Glass Co Ltd | ポリイミドおよびその製造方法 |
JP2006070096A (ja) * | 2004-08-31 | 2006-03-16 | New Japan Chem Co Ltd | イミド基含有ジアミン、該イミド基含有ポリイミド前駆体、該前駆体を含有してなるポジ型感光性樹脂組成物、ポジ型パターンの製造方法及び電子部品 |
JP2008169237A (ja) * | 2007-01-09 | 2008-07-24 | Toyobo Co Ltd | 白色ポリイミドフィルム |
JP2008168439A (ja) * | 2007-01-09 | 2008-07-24 | Toyobo Co Ltd | 金属白色ポリイミド積層体とその製造方法 |
JP2010018802A (ja) * | 2008-07-09 | 2010-01-28 | Lg Chem Ltd | ポリイミド−ポリアミド酸共重合体、その製造方法、それを含む感光性組成物およびこれにより提供される保護膜 |
WO2010113412A1 (ja) * | 2009-03-31 | 2010-10-07 | 三井化学株式会社 | 低熱膨張性ブロックポリイミドおよびその前駆体ならびにその用途 |
WO2010126133A1 (ja) * | 2009-04-30 | 2010-11-04 | 株式会社ピーアイ技術研究所 | 感光性変性ポリイミド樹脂組成物及びその用途 |
JP2011111596A (ja) * | 2009-11-30 | 2011-06-09 | Kaneka Corp | ポリイミドフィルムの製造方法及びポリイミドフィルム |
JP2012255985A (ja) * | 2011-06-10 | 2012-12-27 | Mitsui Chemicals Inc | 液晶配向剤、液晶配向膜および該液晶配向膜を有する液晶表示素子 |
JP2013052604A (ja) * | 2011-09-05 | 2013-03-21 | Mitsui Chemicals Inc | 耐熱両面金属積層板、これを用いた耐熱透明フィルム、及び耐熱透明回路基板 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3257325B2 (ja) * | 1995-01-31 | 2002-02-18 | ジェイエスアール株式会社 | ポリイミド系共重合体の製造方法、薄膜形成剤、並びに液晶配向膜の製造方法 |
JP4961726B2 (ja) | 2005-11-24 | 2012-06-27 | 新日本理化株式会社 | ポリイミド前駆体及びポリイミド、並びにポリイミド系プラスチック基板及びその製造方法。 |
JP2007231224A (ja) | 2006-03-03 | 2007-09-13 | Sumitomo Chemical Co Ltd | ディスプレー用ポリイミドフィルム。 |
JP2008081718A (ja) | 2006-09-01 | 2008-04-10 | Kaneka Corp | ポリイミド樹脂粒子の製造方法 |
JP2012235985A (ja) * | 2011-05-13 | 2012-12-06 | Ipi:Kk | 防球ネットフェンスの張設方法および防球ネットフェンス |
-
2014
- 2014-04-23 WO PCT/JP2014/002284 patent/WO2014174838A1/ja active Application Filing
- 2014-04-23 JP JP2015513568A patent/JP6404814B2/ja not_active Expired - Fee Related
- 2014-04-23 KR KR1020157030531A patent/KR101752079B1/ko active IP Right Grant
- 2014-04-23 CN CN201480022641.5A patent/CN105143310B/zh not_active Expired - Fee Related
- 2014-04-23 US US14/786,703 patent/US20160075830A1/en not_active Abandoned
- 2014-04-24 TW TW103114836A patent/TWI602881B/zh not_active IP Right Cessation
-
2017
- 2017-05-08 US US15/589,114 patent/US10351673B2/en active Active
Patent Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62236732A (ja) * | 1986-04-08 | 1987-10-16 | 住友ベークライト株式会社 | 可撓性印刷回路用基板の製造方法 |
JPH09176315A (ja) * | 1995-12-22 | 1997-07-08 | Japan Synthetic Rubber Co Ltd | ポリイミド系ブロック共重合体 |
JP2002161136A (ja) * | 2000-09-14 | 2002-06-04 | Sony Chem Corp | ポリイミド前駆体、その製造方法及び感光性樹脂組成物 |
JP2002167433A (ja) * | 2000-11-30 | 2002-06-11 | Central Glass Co Ltd | ポリイミドおよびその製造方法 |
JP2006070096A (ja) * | 2004-08-31 | 2006-03-16 | New Japan Chem Co Ltd | イミド基含有ジアミン、該イミド基含有ポリイミド前駆体、該前駆体を含有してなるポジ型感光性樹脂組成物、ポジ型パターンの製造方法及び電子部品 |
JP2008169237A (ja) * | 2007-01-09 | 2008-07-24 | Toyobo Co Ltd | 白色ポリイミドフィルム |
JP2008168439A (ja) * | 2007-01-09 | 2008-07-24 | Toyobo Co Ltd | 金属白色ポリイミド積層体とその製造方法 |
JP2010018802A (ja) * | 2008-07-09 | 2010-01-28 | Lg Chem Ltd | ポリイミド−ポリアミド酸共重合体、その製造方法、それを含む感光性組成物およびこれにより提供される保護膜 |
WO2010113412A1 (ja) * | 2009-03-31 | 2010-10-07 | 三井化学株式会社 | 低熱膨張性ブロックポリイミドおよびその前駆体ならびにその用途 |
WO2010126133A1 (ja) * | 2009-04-30 | 2010-11-04 | 株式会社ピーアイ技術研究所 | 感光性変性ポリイミド樹脂組成物及びその用途 |
JP2011111596A (ja) * | 2009-11-30 | 2011-06-09 | Kaneka Corp | ポリイミドフィルムの製造方法及びポリイミドフィルム |
JP2012255985A (ja) * | 2011-06-10 | 2012-12-27 | Mitsui Chemicals Inc | 液晶配向剤、液晶配向膜および該液晶配向膜を有する液晶表示素子 |
JP2013052604A (ja) * | 2011-09-05 | 2013-03-21 | Mitsui Chemicals Inc | 耐熱両面金属積層板、これを用いた耐熱透明フィルム、及び耐熱透明回路基板 |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI693468B (zh) * | 2015-03-06 | 2020-05-11 | 日商東麗股份有限公司 | 感光性樹脂組成物及電子零件 |
JP2017073441A (ja) * | 2015-10-06 | 2017-04-13 | 日立化成株式会社 | 感光性封止樹脂組成物、それを用いた半導体装置の製造方法及び半導体装置 |
WO2018016561A1 (ja) * | 2016-07-22 | 2018-01-25 | 三井化学株式会社 | 医療用フィルム及びその製造方法、医療用コーティング組成物、医療用具及びその製造方法 |
KR20190022674A (ko) * | 2016-07-22 | 2019-03-06 | 미쓰이 가가쿠 가부시키가이샤 | 의료용 필름 및 그의 제조 방법, 의료용 코팅 조성물, 의료 용구 및 그의 제조 방법 |
JPWO2018016561A1 (ja) * | 2016-07-22 | 2019-03-14 | 三井化学株式会社 | 医療用フィルム及びその製造方法、医療用コーティング組成物、医療用具及びその製造方法 |
KR102249571B1 (ko) | 2016-07-22 | 2021-05-07 | 미쓰이 가가쿠 가부시키가이샤 | 의료용 필름 및 그의 제조 방법, 의료용 코팅 조성물, 의료 용구 및 그의 제조 방법 |
US11198280B2 (en) | 2016-07-22 | 2021-12-14 | Mitsui Chemicals, Inc. | Medical film and method for producing same, medical coating composition, medical device and method for producing same |
JP7075532B1 (ja) | 2021-09-28 | 2022-05-25 | 東洋インキScホールディングス株式会社 | 絶縁粘着テープ |
WO2023053560A1 (ja) * | 2021-09-28 | 2023-04-06 | 東洋インキScホールディングス株式会社 | 絶縁粘着テープ |
JP2023048781A (ja) * | 2021-09-28 | 2023-04-07 | 東洋インキScホールディングス株式会社 | 絶縁粘着テープ |
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JPWO2014174838A1 (ja) | 2017-02-23 |
US20160075830A1 (en) | 2016-03-17 |
US20170240705A1 (en) | 2017-08-24 |
CN105143310B (zh) | 2020-09-18 |
CN105143310A (zh) | 2015-12-09 |
KR101752079B1 (ko) | 2017-06-28 |
JP6404814B2 (ja) | 2018-10-17 |
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