WO2014000651A1 - Optical assembly, manufacturing method therefor, and photovoltaic device - Google Patents
Optical assembly, manufacturing method therefor, and photovoltaic device Download PDFInfo
- Publication number
- WO2014000651A1 WO2014000651A1 PCT/CN2013/078043 CN2013078043W WO2014000651A1 WO 2014000651 A1 WO2014000651 A1 WO 2014000651A1 CN 2013078043 W CN2013078043 W CN 2013078043W WO 2014000651 A1 WO2014000651 A1 WO 2014000651A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- layer
- substrate
- manufacturing
- light
- electrical
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 112
- 230000003287 optical effect Effects 0.000 title claims abstract description 111
- 239000000758 substrate Substances 0.000 claims abstract description 237
- 239000000463 material Substances 0.000 claims abstract description 189
- 239000004005 microsphere Substances 0.000 claims abstract description 157
- 239000010408 film Substances 0.000 claims description 243
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 164
- 239000000243 solution Substances 0.000 claims description 78
- 238000000576 coating method Methods 0.000 claims description 77
- 239000011248 coating agent Substances 0.000 claims description 72
- -1 polypropylene ammonium chloride Polymers 0.000 claims description 64
- 230000003667 anti-reflective effect Effects 0.000 claims description 63
- 238000000034 method Methods 0.000 claims description 54
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 43
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 42
- 239000002245 particle Substances 0.000 claims description 42
- 239000011521 glass Substances 0.000 claims description 37
- 238000010438 heat treatment Methods 0.000 claims description 30
- 230000008569 process Effects 0.000 claims description 29
- 239000000377 silicon dioxide Substances 0.000 claims description 29
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 21
- 239000003792 electrolyte Substances 0.000 claims description 20
- 239000011259 mixed solution Substances 0.000 claims description 19
- 239000004408 titanium dioxide Substances 0.000 claims description 18
- 238000004528 spin coating Methods 0.000 claims description 17
- 238000002360 preparation method Methods 0.000 claims description 15
- 238000003756 stirring Methods 0.000 claims description 14
- DBMJMQXJHONAFJ-UHFFFAOYSA-M Sodium laurylsulphate Chemical compound [Na+].CCCCCCCCCCCCOS([O-])(=O)=O DBMJMQXJHONAFJ-UHFFFAOYSA-M 0.000 claims description 13
- 235000019333 sodium laurylsulphate Nutrition 0.000 claims description 13
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 12
- 239000004094 surface-active agent Substances 0.000 claims description 12
- RSKGMYDENCAJEN-UHFFFAOYSA-N hexadecyl(trimethoxy)silane Chemical compound CCCCCCCCCCCCCCCC[Si](OC)(OC)OC RSKGMYDENCAJEN-UHFFFAOYSA-N 0.000 claims description 11
- 229920001467 poly(styrenesulfonates) Polymers 0.000 claims description 11
- 229940006186 sodium polystyrene sulfonate Drugs 0.000 claims description 11
- 238000005507 spraying Methods 0.000 claims description 11
- 239000000725 suspension Substances 0.000 claims description 11
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 10
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims description 9
- 229920003023 plastic Polymers 0.000 claims description 9
- 239000004033 plastic Substances 0.000 claims description 9
- 239000011734 sodium Substances 0.000 claims description 9
- 229910052708 sodium Inorganic materials 0.000 claims description 9
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 238000004381 surface treatment Methods 0.000 claims description 8
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonium chloride Substances [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 claims description 7
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 7
- 239000008367 deionised water Substances 0.000 claims description 7
- 229910021641 deionized water Inorganic materials 0.000 claims description 7
- ARYZCSRUUPFYMY-UHFFFAOYSA-N methoxysilane Chemical compound CO[SiH3] ARYZCSRUUPFYMY-UHFFFAOYSA-N 0.000 claims description 7
- 229910017604 nitric acid Inorganic materials 0.000 claims description 7
- 239000000126 substance Substances 0.000 claims description 7
- 150000001343 alkyl silanes Chemical class 0.000 claims description 6
- 229910052731 fluorine Inorganic materials 0.000 claims description 6
- 239000011737 fluorine Substances 0.000 claims description 6
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 claims description 6
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 claims description 5
- 235000011114 ammonium hydroxide Nutrition 0.000 claims description 5
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 5
- 239000002244 precipitate Substances 0.000 claims description 5
- 235000012239 silicon dioxide Nutrition 0.000 claims description 5
- 238000009736 wetting Methods 0.000 claims description 5
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 5
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 claims description 4
- 238000007598 dipping method Methods 0.000 claims description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 3
- 235000019270 ammonium chloride Nutrition 0.000 claims description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 claims description 2
- 239000002253 acid Substances 0.000 claims description 2
- RZHBMYQXKIDANM-UHFFFAOYSA-N dioctyl butanedioate;sodium Chemical compound [Na].CCCCCCCCOC(=O)CCC(=O)OCCCCCCCC RZHBMYQXKIDANM-UHFFFAOYSA-N 0.000 claims description 2
- GVGUFUZHNYFZLC-UHFFFAOYSA-N dodecyl benzenesulfonate;sodium Chemical compound [Na].CCCCCCCCCCCCOS(=O)(=O)C1=CC=CC=C1 GVGUFUZHNYFZLC-UHFFFAOYSA-N 0.000 claims description 2
- 229940080264 sodium dodecylbenzenesulfonate Drugs 0.000 claims description 2
- OABYVIYXWMZFFJ-ZUHYDKSRSA-M sodium glycocholate Chemical compound [Na+].C([C@H]1C[C@H]2O)[C@H](O)CC[C@]1(C)[C@@H]1[C@@H]2[C@@H]2CC[C@H]([C@@H](CCC(=O)NCC([O-])=O)C)[C@@]2(C)[C@@H](O)C1 OABYVIYXWMZFFJ-ZUHYDKSRSA-M 0.000 claims description 2
- MNCGMVDMOKPCSQ-UHFFFAOYSA-M sodium;2-phenylethenesulfonate Chemical compound [Na+].[O-]S(=O)(=O)C=CC1=CC=CC=C1 MNCGMVDMOKPCSQ-UHFFFAOYSA-M 0.000 claims description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims 4
- 239000004793 Polystyrene Substances 0.000 claims 4
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims 4
- 229920002223 polystyrene Polymers 0.000 claims 4
- 229910000077 silane Inorganic materials 0.000 claims 4
- 238000001035 drying Methods 0.000 claims 2
- 230000008595 infiltration Effects 0.000 claims 2
- 238000001764 infiltration Methods 0.000 claims 2
- RCNMYLIPBZPWMD-UHFFFAOYSA-M [Br-].C(CCCCCCCCCCCCC)C=1C(=[N+](C=CC=1)C)C Chemical compound [Br-].C(CCCCCCCCCCCCC)C=1C(=[N+](C=CC=1)C)C RCNMYLIPBZPWMD-UHFFFAOYSA-M 0.000 claims 1
- 238000010306 acid treatment Methods 0.000 claims 1
- GQOKIYDTHHZSCJ-UHFFFAOYSA-M dimethyl-bis(prop-2-enyl)azanium;chloride Chemical compound [Cl-].C=CC[N+](C)(C)CC=C GQOKIYDTHHZSCJ-UHFFFAOYSA-M 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 31
- 239000010410 layer Substances 0.000 description 259
- 238000002834 transmittance Methods 0.000 description 21
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 18
- 238000004140 cleaning Methods 0.000 description 10
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 9
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 9
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 9
- 229910003437 indium oxide Inorganic materials 0.000 description 9
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 9
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 9
- 239000011787 zinc oxide Substances 0.000 description 9
- 239000008151 electrolyte solution Substances 0.000 description 8
- 230000008859 change Effects 0.000 description 7
- 210000000887 face Anatomy 0.000 description 7
- 238000007788 roughening Methods 0.000 description 7
- 239000002356 single layer Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 5
- 238000009826 distribution Methods 0.000 description 5
- 230000002209 hydrophobic effect Effects 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 238000001179 sorption measurement Methods 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 238000003618 dip coating Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 229940083575 sodium dodecyl sulfate Drugs 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229920000265 Polyparaphenylene Polymers 0.000 description 3
- 239000012670 alkaline solution Substances 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 230000000652 homosexual effect Effects 0.000 description 3
- 230000007062 hydrolysis Effects 0.000 description 3
- 238000006460 hydrolysis reaction Methods 0.000 description 3
- 238000007654 immersion Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- 239000003921 oil Substances 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- 230000003595 spectral effect Effects 0.000 description 3
- 206010001497 Agitation Diseases 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 2
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 2
- 239000005083 Zinc sulfide Substances 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 239000003929 acidic solution Substances 0.000 description 2
- 238000013019 agitation Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000002801 charged material Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- SWXVUIWOUIDPGS-UHFFFAOYSA-N diacetone alcohol Natural products CC(=O)CC(C)(C)O SWXVUIWOUIDPGS-UHFFFAOYSA-N 0.000 description 2
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- 238000004945 emulsification Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- XPBBUZJBQWWFFJ-UHFFFAOYSA-N fluorosilane Chemical compound [SiH3]F XPBBUZJBQWWFFJ-UHFFFAOYSA-N 0.000 description 2
- 229910001195 gallium oxide Inorganic materials 0.000 description 2
- 229910000449 hafnium oxide Inorganic materials 0.000 description 2
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
- QRXWMOHMRWLFEY-UHFFFAOYSA-N isoniazide Chemical compound NNC(=O)C1=CC=NC=C1 QRXWMOHMRWLFEY-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 2
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 2
- 238000010979 pH adjustment Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 239000005871 repellent Substances 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 230000003075 superhydrophobic effect Effects 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- 229910001887 tin oxide Inorganic materials 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- 229910052984 zinc sulfide Inorganic materials 0.000 description 2
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 2
- KNKRKFALVUDBJE-UHFFFAOYSA-N 1,2-dichloropropane Chemical compound CC(Cl)CCl KNKRKFALVUDBJE-UHFFFAOYSA-N 0.000 description 1
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 1
- IXZOOPDAPLKWQV-UHFFFAOYSA-N CCCCCCCCCO[SiH3] Chemical compound CCCCCCCCCO[SiH3] IXZOOPDAPLKWQV-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical group COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 1
- 229920005372 Plexiglas® Polymers 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 239000013543 active substance Substances 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 210000004087 cornea Anatomy 0.000 description 1
- FWLDHHJLVGRRHD-UHFFFAOYSA-N decyl prop-2-enoate Chemical compound CCCCCCCCCCOC(=O)C=C FWLDHHJLVGRRHD-UHFFFAOYSA-N 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 230000000423 heterosexual effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- MRNHPUHPBOKKQT-UHFFFAOYSA-N indium;tin;hydrate Chemical compound O.[In].[Sn] MRNHPUHPBOKKQT-UHFFFAOYSA-N 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000693 micelle Substances 0.000 description 1
- 229910021424 microcrystalline silicon Inorganic materials 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 239000011664 nicotinic acid Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000020477 pH reduction Effects 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000002940 repellent Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- SCPYDCQAZCOKTP-UHFFFAOYSA-N silanol Chemical compound [SiH3]O SCPYDCQAZCOKTP-UHFFFAOYSA-N 0.000 description 1
- 150000004819 silanols Chemical class 0.000 description 1
- 125000003808 silyl group Chemical group [H][Si]([H])([H])[*] 0.000 description 1
- USFNELLLQLCMSH-UHFFFAOYSA-N sodium;dodecan-1-olate Chemical compound [Na+].CCCCCCCCCCCC[O-] USFNELLLQLCMSH-UHFFFAOYSA-N 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- WITALSMTQYEVDP-UHFFFAOYSA-N trihexadecylazanium;chloride Chemical compound [Cl-].CCCCCCCCCCCCCCCC[NH+](CCCCCCCCCCCCCCCC)CCCCCCCCCCCCCCCC WITALSMTQYEVDP-UHFFFAOYSA-N 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
- 238000007704 wet chemistry method Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
- H01L31/0392—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D183/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers
- C09D183/04—Polysiloxanes
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D5/00—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
- C09D5/16—Antifouling paints; Underwater paints
- C09D5/1681—Antifouling coatings characterised by surface structure, e.g. for roughness effect giving superhydrophobic coatings or Lotus effect
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/02168—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells the coatings being antireflective or having enhancing optical properties for the solar cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Definitions
- the present application claims priority to Chinese Patent Application, the entire disclosure of which is hereby incorporated by reference in its entirety in the the the the the the the the the TECHNICAL FIELD
- the present invention relates to the field of optical materials, and more particularly to an optical component, a method of manufacturing the same, and a photovoltaic device.
- BACKGROUND OF THE INVENTION When light is transmitted, a part of the interface of different media usually changes its direction of propagation and returns to the original medium. This is called the reflection of light. In general, the greater the difference in refractive index between different media, the stronger the reflection of light at the interface.
- a single-layer porous membrane is disclosed in Chinese Patent Publication No. CN100375908C
- a structured antireflective film comprising an antireflection film comprising silica microspheres and at least one binder compound, the antireflection film having a silica microsphere content of 30% by weight or more, 2 nm Or smaller arithmetic mean surface roughness and 10% (atomic percent) or higher surface silicon atom content.
- the anti-reflection film provided by the Chinese patent can improve the mechanical strength and abrasion resistance of the anti-reflection film, but the anti-reflection film has the disadvantages of adapting to a narrow spectral range and a small incident angle.
- the compound eye of the moth can be regarded as an array structure in which hexagonal nanostructure protrusions are arranged in an orderly manner.
- This array is considered to be a homogenous transparent layer on the surface of the cornea, and each nanostructured protrusion is equivalent to an anti-reflection unit.
- Such a structure makes the compound eye of the moth low in reflection, making it look abnormally black. Therefore, even if the moth is flying at night, it is not easy to be detected.
- This effect is known as the moth eye effect.
- the anti-reflection film based on the moth-eye effect has a wider spectral range and a larger incident angle, so this technique has become a research hotspot by those skilled in the art.
- FIG. 1 an equivalent schematic diagram of a moth-eye structure model is shown.
- the structural change of the micro-protrusion causes the material to be refracted.
- the slight change in the rate will increase the tendency of the refractive index nl, n2, ⁇ 3, ⁇ 4 from the air to the moth-eye structure 1 to increase sequentially, thereby reducing the reflection of light.
- FIG. 2 an equivalent schematic diagram of another moth eye structure model is shown.
- the size of the microprotrusions in Fig. 1 is further reduced, the density of the microprojections is further increased, and the structure is generally closer to the continuously varying slope of the moth eye structure 2.
- This causes the refractive index of the moth-eye structure 2 to continuously change from n1 to ⁇ 4 in the depth direction, thereby further reducing the reflection phenomenon caused by the sharp change in the refractive index.
- the anti-reflection film formed by the silica microspheres arranged in the moth-eye structure is one of the optical materials simulating the moth-eye structure.
- Fig. 3 there is shown a transmittance curve of an antireflection film formed by silica microspheres arranged in a moth eye structure in the prior art.
- the abscissa is the wavelength
- the ordinate is the light transmittance
- the curve 22 in FIG. 3 is the light transmittance of the glass not coated with the anti-reflection film
- the curve 21 is the light transmission of the glass coated with the anti-reflection film.
- the anti-reflection film is formed of silica spheroids arranged in a moth-eye structure.
- the wavelength is greater than 600 nm
- the light transmittance corresponding to the curve 22 is greater than the light transmittance corresponding to the curve 21, but when the wavelength is less than 600 nm, the light transmittance corresponding to the curve 22 is lower than the light corresponding to the curve 21.
- Transmittance That is to say, the antireflection film formed by the existing silica microspheres does not exhibit a good antireflection effect at a wavelength of ', at 600 nm.
- a method of fabricating an optical component comprising: providing a light-transmitting material microsphere; and surface-treating the light-transmitting material microsphere to carry a isotropic charge on the surface of the light-transmitting material microsphere Providing a substrate; dispersing the isotropically charged light-transmitting material microspheres on the substrate to form an anti-reflection film.
- a basic idea is to make the surface of the light-transmitting material microspheres carry the same-sex charge, and the light-transmitting material microspheres maintain a certain distance between them due to homosexual repulsion.
- the anti-reflection film formed lastly, there is a certain gap between the micro-spheres of the light-transmitting material, and no mutual adhesion occurs, so that the reflection of the adhered light-transmitting material microspheres to a specific wavelength can be avoided, thereby enabling the said
- the anti-reflection film has a good anti-reflection effect over a wide wavelength range.
- a method of manufacturing an optical component further comprising: providing a substrate; forming an anti-reflection film including at least one anti-reflection layer on the substrate; wherein the step of forming an anti-reflection layer
- the method includes: forming a charged layer; dispersing and dispersing the light-transmitting material microspheres different in electrical properties from the charged layer on the charged layer.
- the method further includes: forming a preliminary layer on the surface of the substrate, the side of the preliminary layer contacting the substrate having a different surface from the substrate An electrical charge, and a side of the preliminary layer in contact with the anti-reflection film has a charge that is electrically different from a contact surface of the anti-reflection film.
- a basic idea is that the faces of the preliminary layer and the substrate are respectively charged with different electrical charges; the faces of the preliminary layer and the anti-reflective film are respectively charged with different electrical charges; The principle that the preliminary layer and the substrate, the preliminary layer and the anti-reflection film have a large suction force, thereby improving the bonding force between the substrate and the anti-reflection film, thereby improving the mechanical mechanism of the optical component. strength.
- after forming the antireflection film further comprising forming a low surface energy coating on the surface of the antireflection film.
- a basic idea is to form a low surface energy coating on the surface of the anti-reflective film to achieve super-hydrophobic self-cleaning effect, and the low surface energy coating can further increase the transmittance of the anti-reflective film, and finally improve the anti-reflection effect.
- the material of the low surface energy coating comprises a methoxy silane.
- the low surface energy coating is made of nonyloxysilane, which does not include fluorine, so that the low surface energy coating does not corrode the substrate even after prolonged use, and finally the optical component can be ensured. Normal use.
- the low surface energy coating is relatively inexpensive, thereby reducing production costs.
- an optical assembly formed by the method of fabricating the optical component is provided.
- a basic idea is that the surface of the light-transmitting material microspheres carries the same-spot charge, and the light-transmitting material microspheres maintain a certain spacing due to homosexual repulsion, and there is no mutual adhesion phenomenon, thereby avoiding the adhesion of the light-transmitting material microspheres.
- the reflection of a specific wavelength in turn, enables the anti-reflection film to have a good anti-reflection effect over a wide wavelength range.
- the present invention also provides a photovoltaic device, comprising: the optical component, the substrate in the optical component is a transparent substrate; a solar cell, the transparent substrate is not provided with an anti-reflection film One side.
- a basic idea is that an anti-reflection film with good anti-reflection effect is provided in the photovoltaic device, which can project more light to the solar cell and improve the light utilization efficiency of the photovoltaic device.
- Figure 2 is an equivalent schematic diagram of another moth eye structure model
- 3 is a light transmittance curve of an antireflection film formed by arranging silica microspheres according to a moth eye structure in the prior art
- Figure 4 is a schematic view of silica microspheres in an antireflection film
- FIG. 5 is a schematic flow chart of an embodiment of a method for manufacturing an optical component of the present invention
- FIG. 6 to FIG. 9 are schematic views showing an embodiment of a method for manufacturing the optical component shown in FIG. 5; Schematic diagram of the flow of the embodiment;
- FIG. 11 to 14 are schematic views of an embodiment of a method of manufacturing the optical component shown in Fig. 10;
- 15 to 16 are views showing another embodiment of the manufacturing method of the optical component shown in Fig. 10;
- Figure 17 is a schematic flow chart showing still another embodiment of the manufacturing method of the optical module of the present invention.
- FIG. 18 to 20 are schematic views of an embodiment of a method of manufacturing the optical component shown in Fig. 17;
- Figure 21 is a schematic flow chart showing still another embodiment of the manufacturing method of the optical module of the present invention.
- Figure 22 is a flow chart showing the step S35 of Figure 21:
- Figure 23 is a schematic view of an embodiment of an optical component of the present invention
- Figure 24 is a partial enlarged view of a preliminary layer in the optical assembly shown in Figure 23;
- Figure 25 is a schematic view showing another embodiment of the optical component of the present invention.
- Figure 26 is a graph showing the relationship between wavelength and transmittance of the optical module of the present invention.
- the inventors conducted a shape analysis of a prior art anti-reflection film, specifically, an anti-reflection film by a scanning electron microscope (SEM).
- the antireflection film shown in FIG. 4 the antireflection film includes a plurality of silica microspheres arranged in a moth eye structure, wherein the silica microspheres 11 located on the substrate 10 are several or even a dozen Stick together.
- the inventors have found through analysis that these adhered silica microspheres 11 reflect light of a specific wavelength, thereby affecting the antireflection effect of the antireflection film at a specific wavelength.
- the present invention provides a method of fabricating an optical component.
- a flow diagram of an embodiment of a method of fabricating an optical component of the present invention is shown.
- the manufacturing method generally includes the following steps: Step S1, providing light transmission a material microsphere; step S2, surface-treating the light-transmitting material microspheres, so that the surface of the light-transmitting material microspheres carries a homogenous charge; step S3, providing a substrate; and step S4, causing the light-transmitting with the same-sense charge
- the material microspheres are dispersedly arranged on the substrate to form an antireflection film.
- step SI is performed to provide a light-transmitting material microsphere.
- the light-transmitting material microspheres are provided by preparing the light-transmitting material microspheres.
- the light-transmitting material microspheres may also be provided by purchasing the light-transmitting material microspheres.
- the silica microspheres are taken as an example.
- the light transmissive material may be other oxides.
- the method for preparing silica microspheres in this embodiment generally comprises the following steps: First, the orthosilicate is diluted with ethanol.
- the diluted tetraethyl orthosilicate was immersed in a mixed solution of ethanol and water. Specifically, a mixed solution of ethanol and water is placed in the container 100, and then the diluted orthosilicate is placed in the mixed solution in the container 100. Wherein the volume ratio of ethanol to water in the mixed solution is in the range of 8.5:1 to 9.5:1, the formed silica microspheres 101 can be made uniform in size and have a good anti-reflection effect. Subsequently, ammonia water is added to the mixed solution, and the ammonia water is used as a catalyst to set the pH of the mixed solution in the range of 7.8 to 8.2 to increase the reaction rate.
- the pH of the mixed solution is in the range of 7.8 to 8.2, and the formed silica microspheres 101 can be made uniform in size and have a good anti-reflection effect.
- the pH of the mixed solution is 8.
- the mixed solution in the vessel 100 is continuously vigorously stirred to form a precipitate which is the silica microspheres 101. It should be noted that if the stirring time is too short, the solution is not complete enough, and if the stirring time is too long, the time of the whole process is easily increased.
- the time of continuous agitation is in the range of 1.5 to 2.5 hours.
- the method further comprises: washing the silica microspheres 101 with water to remove residual solution on the silica microspheres 101.
- the preparation of the silicon dioxide microspheres 101 is thus completed.
- the method for preparing the silica microspheres further includes an emulsion method, a chemical vapor deposition method, etc., and the method for preparing the silica microspheres is not limited. As shown in FIG.
- step S2 is performed to surface-treat the light-transmitting material microspheres so that the surface of the light-transmitting material microspheres carries a homogenous charge; in this embodiment, by including the light-transmitting material micro A charged surfactant is placed in the solution of the ball such that the surface of the light-transmitting material microspheres carries a homogenous charge.
- the light-transmitting material sphere is silica spheroid 101, and the surface of the silica microsphere 101 can carry a negative charge by sodium dodecylsulfate (SDS).
- the silica microspheres 101 are placed in ethanol to form a suspension; sodium dodecylate is added to the suspension, and the suspension is stirred to make a surfactant and two
- the silica microspheres 101 are thoroughly mixed to form a negative charge on the surface of the silica microspheres 101.
- the silica microspheres 101 repel each other, so that the probability of adhesion of the silica microspheres 101 to each other can be reduced when the antireflection film is formed. Further, it is possible to avoid reflection of the adhered silica sphere 101 to a specific wavelength to improve the range of application of the antireflection film. As shown in Fig.
- the silica microspheres 101 are surface-treated to carry the same-charge, the silica microspheres 101 are maintained at a certain interval therebetween.
- the sodium dodecyl sulfate can cause the silica microspheres 101 to carry a negative charge because sodium lauryl sulfate is a long-chain structure, and one end thereof is easily associated with silica microspheres.
- the 101 surface is combined and the other end carries a negative charge.
- sodium dodecyl sulfate is sufficiently combined with the silica microspheres 101, the negatively charged end of sodium lauryl sulfate causes the silica microspheres 101 to carry a negative charge.
- the concentration of sodium lauryl sulfate is too low, the silica crucible 101 may not be negatively charged. If the concentration is too high, the micelles are easily formed in the suspension. Sodium lauryl sulfate is not coated on the surface of the silica microspheres 101, but is freed in the suspension. Therefore, preferably, the concentration of sodium lauryl sulfate is Within the range of 0.5 to 10 moles per liter. It should be noted that, in this embodiment, the surfactant is described by taking sodium lauryl sulfate as an example, but the invention is not limited thereto, and may be other surfaces which can make the silica microspheres carry a negative charge.
- the active agent for example: sodium dioctylsuccinate, sodium dodecylbenzenesulfonate or sodium glycocholate, and the like.
- This embodiment is exemplified by carrying a negative charge on the surface of the silica microsphere 101.
- the present invention is not limited thereto.
- the surface of the silica microsphere 101 may also carry a positive charge.
- a surfactant which is easily combined with the surface of the silica microsphere 101 and which carries a positive charge at the other end can form a positively charged, positively charged silica on the surface of the silica microsphere 101.
- the microspheres 101 maintain a certain spacing due to homosexual repulsion.
- a surfactant capable of imparting a positive charge to the surface of the silica microsphere 101 includes tetradecyl-dimercaptopyridine ammonium bromide, trihexadecyl ammonium chloride or dinonyl diallyl chloride. Ammonium and so on.
- the method of carrying the isotropic charge on the surface of the silica microsphere 101 is exemplified by the method of the surfactant, but the invention is not limited thereto, and in other embodiments, Other means (for example, a surface treatment using an electrolyte) allows the silica microspheres 101 to carry a charge, for example: when the electrolyte polypropylene ammonium chloride is added to the suspension, the surface of the silica microspheres 101 can be positively charged; Alternatively, the surface of the silica microspheres 101 may be negatively charged by adding an electrolyte sodium styrene sulfonate to the suspension.
- a surface treatment using an electrolyte allows the silica microspheres 101 to carry a charge, for example: when the electrolyte polypropylene ammonium chloride is added to the suspension, the surface of the silica microspheres 101 can be positively charged; Alternatively, the surface of the silica microspheres 101 may be negatively charged by adding an electroly
- the silica microspheres 101 are further washed by water to remove substances remaining on the silica microspheres 101.
- Step S3 is performed to provide a substrate.
- the substrate can be glass, metal or glass.
- the substrate is further cleaned.
- the substrate may be subjected to ultrasonic shock cleaning by acetone, isopropyl alcohol, and deionized water in this order.
- impurities such as grease on the substrate can be removed by acetone or isopropyl alcohol, and acetone and isopropyl alcohol remaining on the substrate are washed by deionized water.
- step S4 is performed to disperse the isotropic charge-transmitting light-transmitting material microspheres on the substrate 102 to form the anti-reflection film 103.
- the light-transmitting material microspheres in the anti-reflection film 103 constitute one micro-protrusion on the substrate 102, and the micro-protrusions are equivalent to a moth-eye structure, and the anti-reflection effect of the anti-reflection film 103 can be improved.
- the light-transmitting material microspheres are dispersedly arranged on the substrate 102 without substantially blocking each other, and do not reflect light of a specific wavelength, thereby increasing the wavelength range to which the anti-reflection film 103 is applied.
- the isotropically charged light-transmitting material microspheres are formed into a coating solution; the coating solution is coated on the substrate 102 to form an anti-reflection film.
- an anti-reflection film may be formed on the substrate 102 by a process such as spin coating, spray coating, dipping or pulling a coating film or the like. The present invention does not limit the process of forming the anti-reflection film 103.
- the step of heat-treating the anti-reflection film 103 is further included.
- the stability of the anti-reflection film 103 can be improved by heat treatment.
- the light-transmitting material microspheres are silica microspheres 101
- the step of forming the anti-reflection film 103 comprises: first dispersing the isotropically charged silica microspheres 101 in ethanol to form a coating film solution; Thereafter, a film comprising the silica microspheres 101 is coated on the substrate 102 by spin coating; finally, the film is continuously heated to evaporate the ethanol in the film to form a dispersed arrangement of the dioxide on the substrate 102.
- the silicon microspheres 101 thereby completing the preparation of the anti-reflection film 103.
- the heating temperature is 300. ⁇ 500 °C range.
- the higher the heating temperature the shorter the heating duration, if the heating temperature is lower, The longer the heating lasts, the more the heating temperature is between 300 and 500 ° C, and the heating duration is in the range of 2 to 12 hours.
- the surface of the silica microspheres 101 carries a negative charge, and the silica microspheres 101 repel each other to maintain a certain distance.
- the anti-reflection film 103 there is a certain gap between the silica microspheres 101, and there is no phenomenon in which the silica microspheres 101 adhere to each other, so that the adhered silica microspheres 101 can be avoided.
- the reflection of a specific wavelength further enables the anti-reflection film 103 to have a good anti-reflection effect over a wide wavelength range, improving the performance of the anti-reflection film 103. It should be noted that if the concentration of the silica microspheres 101 in the coating solution is too low, the spacing of the silica microspheres 101 in the antireflection film 103 is likely to be excessively large, which may affect the antireflection of the antireflection film 103.
- the concentration of the coating solution formed by the silica microspheres 101 is too high, the negative charges on the surface of the silica microspheres 101 in the antireflection film 103 are insufficient to separate them from each other, thereby facilitating the silica
- the microspheres 101 are closely arranged to affect the wavelength range to which the anti-reflection film 103 is applied. Therefore, preferably, the weight percentage of the silica spheroids 101 in the coating solution is in the range of 0.1 to 5%.
- the spin coating process also has an effect on the anti-reflection effect of the reflective film 103: if the rotational speed in the spin coating process is too low, the silica microspheres 101 are easily closely arranged; if the rotational speed in the spin coating process is too high The spacing of the silica microspheres 101 is likely to be too large, thereby affecting the effect of the suppression.
- the spin-on process rotates at 500 - 3000 rpm.
- the silica microspheres 101 on the substrate 102 can be located in the same layer, that is, the antireflection film 103 is a single layer microsphere structure.
- the silica microspheres 101 constitute microprojections on the substrate 102, which is equivalent to a moth eye structure, and has a good anti-reflection effect.
- the microspheres of the silica material are taken as an example, but the invention is not limited thereto, and other light-transmitting material microspheres such as titanium dioxide (Ti0 2 ) may be used.
- the metal oxide microspheres may be prepared first, similarly to the silica material; the metal may be oxidized by a surfactant such as sodium lauryl sulfate or an electrolyte such as polypropylene ammonium chloride.
- a surfactant such as sodium lauryl sulfate or an electrolyte such as polypropylene ammonium chloride.
- the surface of the microspheres carries a homogenous charge; the metal oxide microspheres carrying the same charge are then dispersed on the substrate to form an antireflection film.
- the antireflection film can be applied to a wide wavelength range because it does not have blocking metal oxide microspheres.
- the light-transmitting material microspheres are in direct contact with the substrate, but the invention is not limited thereto. In other embodiments, the light-transmitting material microspheres may not be combined with the substrate. Direct contact is provided as long as the light-transmitting material microspheres are dispersed in a layer above the substrate.
- the present invention also provides a method of fabricating another optical component, the manufacturing method comprising: providing a substrate; forming at least one anti-reflective film on the substrate, the anti-reflective film comprising a charged layer and on the charged layer Dispersing the light-transmitting material particles which are different from the charged layer.
- FIG. 10 there is shown a schematic flow chart of another embodiment of the optical component manufacturing method of the present invention, which generally includes the following steps:
- Step S11 providing a substrate
- Step S12 forming a charged layer; a light material microsphere
- step S14 steps S12 to S13 are repeated.
- a layer of charged layer, a layer of light-transmitting material microspheres, another layer of charged material, and another layer of light-transmitting material microspheres are sequentially formed on the substrate.
- the layer by layer forms an anti-reflection film on the substrate for reducing the reflection of light.
- the light-transmitting material microspheres having different electrical properties from the charged layer are dispersedly disposed on the charged layer, so that the light-transmitting material microspheres and the charged layer are attracted to each other for stacking, which can be improved.
- the firmness of the formed antireflective film In the process of stacking each layer of the light-transmitting material microspheres, the process parameters such as the particle size of the light-transmitting material microspheres, the distribution of the materials, the distribution of the same layer of particles, and the like, and the total number of layers of the light-transmitting material microspheres can be controlled.
- the anti-reflection film is formed by a layer by layer, so that the manufacturing process has better controllability, and the structure of the anti-reflection film formed by the embodiment has controllability.
- step S14 may not be performed, so that only one anti-reflection film is formed on the substrate, and the present invention does not limit the number of anti-reflection films in the optical component.
- FIG. 10 A schematic view of an embodiment of the optical component manufacturing method shown in Fig. 10 is shown with reference to Figs.
- step S11 is performed to provide the substrate 200.
- the material of the substrate 200 is glass, but the invention is not limited thereto. In other embodiments, the material of the substrate 200 may also be plastic. The invention does not limit the material of the substrate 200. .
- step S12 is performed to form a charging layer 202 on the substrate 200.
- the charged layer 202 is formed of an electrolyte or charged particles.
- the charged layer 202 may be formed on the substrate 200 by an impregnated coating process.
- the electrolyte solution 203 is provided such that the substrate 200 is vertically immersed into the electrolyte solution 203 and immersed for a while, after which the substrate 200 is taken out from the electrolyte solution 203, and an electrolyte solution 203 is formed on both surfaces of the substrate 200.
- the charged layer 202 is formed.
- the charged layer 202 with a positive charge is taken as an example.
- the electrolyte solution 203 is a polypropylene ammonium chloride which can form a positive charge.
- the glass was immersed in polypropylene ammonium chloride for 10 to 20 minutes, after which the glass was taken out to form a positively charged charged layer 202 on both surfaces of the glass.
- the step of adjusting the pH of the electrolyte solution 203 is further included.
- the charge amount of the electrolyte solution 203 can be increased to make the subsequently formed charged layer 202 more Goodly absorb light-transmitting materials Microspheres.
- an acidic solution such as hydrochloric acid or an alkaline solution such as sodium hydroxide is added to the polypropylene ammonium chloride so that the pH of the polyacrylic ammonium chloride is in the range of 7 to 8 to increase the aggregation.
- the amount of positive charge in propylene chloride is added to the polypropylene ammonium chloride so that the pH of the polyacrylic ammonium chloride is in the range of 7 to 8 to increase the aggregation.
- step S13 is performed to disperse the light-transmitting material microspheres 204 electrically different from the charging layer 202 on the charging layer 202.
- the light transmissive material microspheres 204 are negatively charged silica particles. Before the light transmissive material microspheres 204 are disposed on the charged layer 202, the following steps are further included:
- the PH value of the light transmissive material microspheres 204 is adjusted by an acidic or alkaline solution to increase the amount of electricity.
- the step of providing the light-transmitting material microspheres may be to prepare silica particles or to purchase silica particles.
- the method for preparing the silica particles includes an emulsion method, a chemical vapor deposition method, and the like, and the method for producing the silica particles is not limited in the present invention.
- the particle diameter of the silica particles is in the range of 5 to 10 nm.
- the nanometer-sized silica particles make the subsequently formed antireflection film have a porosity of d, and at the same time, the uniformity of the pore distribution can be improved.
- the method further comprises: washing the silica particles by water to remove a residual solution of the silica particles.
- the step of adjusting the PH value of the light transmissive material microspheres 204 is also included. Adjusting the PH value of the light-transmitting material microspheres 204 can increase the charge amount of the light-transmitting material microspheres 204, so that the light-transmitting material microspheres 204 can better adsorb the subsequently formed charged layer 202, thereby improving the film quality.
- the silica particles are in an alkaline environment, the negative charge of the surface of the silica particle is larger.
- an alkaline solution such as sodium hydroxide or ammonia water may be added to the colloidal solution containing the silica particles so that the pH of the silica particles is in the range of 8.5 to 9.5. To increase the amount of negative charge on the surface of the silica particles.
- the step of dispersing the light-transmitting material microspheres 204 on the charging layer 202 includes dispersing the light-transmitting material microspheres 204 on the charging layer 202 by a dip coating process.
- the charged layer 202 and the light transmissive material microspheres 204 constitute an antireflection layer 201.
- the charged layer 202 is formed of polypropylene ammonium chloride
- the light-transmitting material microspheres 204 are silica particles.
- the specific process steps of forming the anti-reflective layer 201 include: immersing the substrate 200 to a positively charged The polypropylene ammonium chloride solution is continued for 10-20 minutes to form a charged layer 202; and the substrate coated with polypropylene ammonium chloride is immersed in deionized water for 1 to 5 minutes to remove the residual solution after the beaker A colloidal solution containing silica particles is placed therein, and the substrate 200 coated with polypropylene ammonium chloride is vertically immersed in the beaker and immersed for 10-20 minutes, after which the substrate 200 is taken out from the beaker at the substrate.
- Silica particles are adhered to the charged layer 202 of the two surfaces 200 to form an antireflection layer 201.
- the substrate coated with polypropylene ammonium chloride is immersed in deionized water for a period of 1 to 5 minutes to remove the residual solution on the charged layer 202, thereby allowing the charged layer 202 to better absorb the light-transmitting material microspheres. 204.
- the polypropylene ammonium chloride since the polypropylene ammonium chloride has a positive charge and the silica particles have a negative charge, the polypropylene ammonium chloride can adhere to the silica particles relatively tightly, thereby improving The film quality of the antireflective film on the optical component.
- the immersion time is too short, the reaction is not complete enough, and if the immersion time is too long, the material of the light-transmitting material microsphere 204 is accommodated. Choose the right immersion time.
- step S14 is performed, and steps S12 and S13 are repeated to form a plurality of anti-reflection layers 201 composed of a charged layer 202 and light-transmitting material microspheres 204 on the substrate 200.
- the previously formed light transmissive material microspheres 204 eg, negatively charged dioxide
- a charged layer 202 for example, a positively charged polypropylene ammonium chloride
- the newly coated charged layer 202 can be adsorbed due to the difference in electrical properties of the charged layer 202 and the light transmissive material microspheres 204.
- the light transmissive material microspheres 204 On the light transmissive material microspheres 204. In this way, the charged layer 202 and the light-transmitting material microspheres 204 are attracted to each other, and the multilayer anti-reflection layer 201 having good adhesion can be formed, thereby forming an optical component having better mechanical strength.
- the multilayer anti-reflective layer 201 constitutes an anti-reflection film 205 on the substrate 200.
- the substrate 200 is glass, its refractive index is 1.5 and the refractive index of air is 1. Therefore, in order to achieve index matching, the refractive index of the anti-reflection film 205 is preferably in the range of 1.2 to 1.24.
- the refractive index of the silica particles is 1.5, and the refractive index of the voids between the silica particles is 1.
- the refractive index is in the range of 1.2 to 1.24.
- the embodiment further includes heat-treating the optical component to increase the robustness of the anti-reflection film 205 on the substrate 200.
- the heating temperature is in the range of 300 to 500 °C. During heating, the higher the heating temperature, the shorter the heating duration. If the heating temperature is lower, the longer the heating lasts, the heating is continued for 30 ⁇ 130 minutes corresponding to the heating temperature at 300 ⁇ 500 °C. In the range.
- the present embodiment forms the anti-reflection film 205 by means of a layer by layer.
- parameters such as the material of the light-transmitting material microspheres, the particle diameter, the distribution of the same-layer light-transmitting material microspheres, and the like may be controlled so that the refractive index of the anti-reflection film 205 is located.
- the manufacturing process of the present embodiment has controllability, and the formed anti-reflection film 205 can have a good anti-reflection effect.
- the charged layer 202 is formed on the substrate by the dip coating process, and the light transmitting material microspheres 204 are disposed on the charged layer to form the antireflection layer 201.
- the invention is not limited thereto, and in other embodiments, it can also be spin-coated,
- the anti-reflection layer 201 is formed by a process of spraying, pulling, or the like. Among them, the spraying process can shorten the process time and improve the manufacturing efficiency.
- each layer of the electrification layer 202 or each layer of the light-transmitting material microspheres 204 has a small thickness (substantially equal to that of the light-transmitting material microspheres). diameter).
- the thickness of the anti-reflection film can be precisely controlled by increasing the number of layers of the light-transmitting material microspheres 204.
- the negatively charged silica particles are exemplified, but the material of the light-transmitting material microspheres is not limited in the present invention.
- the light transmissive material may be an oxide of titanium dioxide (Ti0 2 ), aluminum oxide (Al 2 2 3 3 ), zirconium oxide (ZrO 2 ), or the like.
- the above embodiment has been described with a positively charged electrolyte and a negatively charged light-transmitting material microsphere, but the invention is not limited thereto.
- the titanium dioxide particles are usually positively charged, and a negatively charged electrolyte can be used to form a charged layer to form an antireflection film with the titanium dioxide particles.
- the titanium oxide particles may be negatively charged by a surface treatment such as pH adjustment or a surfactant, so that the negatively charged titanium oxide particles may also be combined with the positively charged polypropylene ammonium chloride to form an antireflection film.
- the charged layer and the light-transmitting material microspheres may have different charge electrical properties.
- FIG. 15 through 16 a schematic view of another embodiment of the optical component manufacturing method of Figure 10 is shown.
- the same points of the embodiment as those of the embodiment shown in FIG. 11 to FIG. 14 are not described again, and the difference lies in:
- step S12 is performed to form a charging layer 302 on the substrate 300.
- the charging layer 302 is formed of charged particles.
- the charged layer 302 is formed of positively charged titanium dioxide particles 303 (the titanium dioxide particles 303 are generally positively charged).
- the titanium oxide particles 303 may be formed on the substrate 300 by a dip coating process. For example, a colloidal solution bottom 300 containing titanium dioxide particles 303 is placed in a beaker and vertically immersed in the beaker for 15 to 20 minutes, after which the substrate 300 is taken out of the beaker, and titanium dioxide is adhered to both surfaces of the substrate 300. Particle 303.
- the titanium dioxide particles 303 have a positive charge and are used for adsorption subsequent forms. A negatively charged light-transmitting material microsphere.
- step S13 and step S14 are performed to disperse the silicon dioxide particles 304 on the substrate on which the charged layer 302 is formed by means of a layer by layer, and then form titanium dioxide on the silicon oxide particles 304.
- the charged layer 302 formed by the particles 303 is further dispersed on the charged layer 302.
- the charged layer 302 and the silicon dioxide particles 304 formed by the titanium dioxide particles 303 constitute an anti-reflection film 301, and a plurality of layers.
- the anti-reflection film 301 constitutes an anti-reflection film 305 on the substrate 300.
- This embodiment differs from the embodiment shown in Figs. 11 to 14 in that the positively charged electrolyte is replaced by the positively charged titanium oxide particles 303. Since the refractive index of the titanium dioxide particles 303 is 1.8 and the refractive index of the silica particles 304 is 1.5, the porosity of the titanium dioxide particles 303 and the silicon oxide particles 304 can be adjusted so that the finally formed anti-reflection film 305 satisfies the refractive index matching. condition.
- the present invention also provides a method of manufacturing an optical component, which further comprises: forming a preliminary surface on the surface of the substrate before the step of forming the anti-reflection film after providing the substrate a layer having a surface in contact with the substrate with a charge different from the surface of the substrate, and a side of the preliminary layer in contact with the anti-reflection film with the anti-reflection film
- the contact surface has different electrical charges.
- the faces of the preliminary layer contacting the substrate respectively have different electrical charges; the faces of the preliminary layer in contact with the anti-reflection film respectively have different electrical charges; based on the principle of heterogeneous charge attraction, The preliminary layer and the substrate, the preliminary layer and the anti-reflective film have a large suction force, thereby improving the bonding force between the substrate and the anti-reflection film, thereby improving the mechanical strength of the optical component.
- FIG. 17 there is shown a flow chart showing still another embodiment of the manufacturing method of the optical module of the present invention, which generally includes the following steps:
- Step S21 providing a substrate
- Step S22 forming a preliminary layer on the surface of the substrate, such that the side of the preliminary layer in contact with the substrate has a charge different from the surface of the substrate;
- Step S23 forming an anti-reflection film on the surface of the preliminary layer, and a side of the anti-reflection film contacting the preliminary layer has a charge different from that of the surface of the preliminary layer.
- FIG. 18 to 20 are schematic views of an embodiment of a method of manufacturing the optical component shown in Fig. 17.
- step S21 is performed to provide the substrate 400.
- the material of the substrate 400 may be glass or plastic. However, the present invention does not limit the material of the substrate 400.
- step S22 is performed to form a preliminary layer 403 on the substrate 400 such that the side of the preliminary layer 403 in contact with the substrate 400 has a charge different from the surface of the substrate 400.
- the preliminary layer 403 may be formed on the substrate 400 by a spin coating, spraying, dipping or pulling coating process.
- the preliminary layer 403 can be a single layer of electrical layer.
- the preliminary layer 403 may also be composed of a plurality of electrical layers. Specifically, a layer is layered on the substrate 400 in layers to form a preliminary layer 403 of the multilayer structure.
- the step of forming the preliminary layer 403 includes: alternately stacking the first electrical layer 4031 and the second electrical layer 4032 on the substrate 400, and the first electrical layer 4031 and the second electrical layer 4032 are electrically charged. Different sex. Due to the attraction of the opposite sex, the first electrical layer 4031 and the second electrical layer 4032 can be closely attached together, and the wear resistance of the preliminary layer 403 can be improved.
- the material of the first electrical layer 4031 and the second electrical layer 4032 may be an electrolyte such as a negatively charged sodium polystyrene sulfonate or a positively charged polypropylene ammonium chloride.
- the material of the substrate 400 is glass.
- the surface of the glass is negatively charged.
- the surface of the preliminary layer 403 that is in contact with the glass is positively charged.
- the first electrical layer 4031 is provided by a strip.
- a positively charged polypropylene ammonium chloride, the second electrical layer 4032 is composed of a negatively charged sodium polystyrene sulfonate, and the step of forming the preliminary layer 403 comprises: providing a concentration of 0.05 to 0.15 moles per liter, PH a polypropylene ammonium chloride solution having a value of 3 to 5, and a polypropylene chloride having a pH of 3 to 5 having a positive charge; Providing a sodium polystyrene sulfonate solution having a concentration of 0.05 to 0.15 mol/L and a pH of 3 to 5, and a polyphenylene sulfonate having a pH of 3 to 5 has a negative charge;
- the positively charged polypropylene ammonium chloride is first coated on the glass by a lift coating process, followed by coating the negatively charged sodium polystyrene sulfonate, and then coating the positively charged polypropylene to chlorinate. Ammonium...
- the polypropylene ammonium chloride, the sodium polystyrene sulfonate is alternately coated in this manner to form a preliminary layer 403.
- a five-layer electrical layer is formed on the substrate 400 by five times of pulling coating process, and the first electrical layer 4031 and polyphenylene are formed of polypropylene ammonium chloride sequentially on the glass.
- a second electrical layer 4032 composed of sodium sulfosyl sulfate, a first electrical layer 4031 composed of polypropylene ammonium chloride, a second electrical layer 4032 composed of sodium polystyrene sulfonate, and a polyammonium chloride
- the first electrical layer 4031 is formed on the substrate 400 by five times of pulling coating process, and the first electrical layer 4031 and polyphenylene are formed of polypropylene ammonium chloride sequentially on the glass.
- a second electrical layer 4032 composed of sodium sulfosyl sulfate
- a first electrical layer 4031 composed of polypropylene ammonium chloride
- a second electrical layer 4032 composed of sodium polystyrene sulfonate
- the positively charged polypropylene ammonium chloride on the surface of the negatively charged glass can be adsorbed on the glass, and at the same time, the surface of the preliminary layer 403 is formed of polypropylene ammonium chloride.
- the first electrical layer 4031 is such that the surface of the preliminary layer 403 is positively charged.
- step S23 is performed to form an anti-reflection film 405 on the preliminary layer 403, and the contact surface of the anti-reflection film 405 and the preliminary layer 403 are electrically charged differently, so the anti-reflection The film 405 can be adsorbed on the substrate 200 by the preliminary layer 403, thereby improving the mechanical strength of the anti-reflection film 405.
- This embodiment can form the anti-reflection by a layer layer method according to the steps of forming an anti-reflection film with the embodiment shown in FIG. 11 to FIG. 14 or the embodiment shown in FIG. 15 to FIG. Film 405.
- the step of forming the anti-reflection film 405 includes: forming a light-transmitting material microsphere 402 on the surface of the preliminary layer 403; thereafter, forming a charging layer 404 on the light-transmitting material microsphere 402; and then, transmitting light on the charging layer 404
- the material microspheres 402, and then a layer of charged layer 404 are formed, which are alternately stacked until the thickness of the finally formed anti-reflective film 405 meets the design requirements.
- the light transmissive material microspheres 402 are negatively charged silica microspheres.
- the present invention is not limited thereto.
- the light transmissive material microspheres 402 may also be a positive charge.
- the light transmissive material is a positively charged material. Titanium oxide microspheres.
- the charged layer 404 has a charge different from that of the light-transmitting material microspheres 402 for attracting the respective layers of the light-transmitting material microspheres 402 to each other.
- the material of the charging layer 404 is an electrolyte or charged particles.
- the material of the charging layer 404 is positively charged polypropylene ammonium chloride.
- the charged layer 404 can also be a positively charged titanium dioxide charged particle.
- negatively charged silica microspheres and positively charged polypropylene ammonium chloride are alternately stacked on the preliminary layer 403 by a lift coating process to form an antireflection film on the preliminary layer 403. 405.
- the step S23 may be performed by a method similar to the method of forming an anti-reflection film in the embodiment shown in Fig. 5.
- the light-transmitting material microspheres are provided; the light-transmitting material microspheres are surface-treated such that the surface of the light-transmitting material microspheres carries a homogenous charge; Charged light-transmitting material microspheres are dispersedly arranged on the preparation to form an anti-reflection film.
- the present invention also provides a method of manufacturing an optical component.
- a schematic flow chart of still another embodiment of the method of fabricating the optical component of the present invention includes:
- Step S31 providing a substrate
- Step S32 performing cleaning processing on the substrate
- Step S33 roughening the cleaned substrate
- Step S34 forming an anti-reflection film on the surface of the substrate, the anti-reflection film having a moth-eye structure;
- Step S35 forming a low surface energy coating on the surface of the anti-reflection film.
- step S31 is performed to provide a substrate.
- the substrate may be any transparent substrate, which may be made of glass, metal or ceramic. Or plastic, etc.
- This embodiment does not limit the specific shape, size and thickness of the substrate.
- step S32 is performed to perform a cleaning process.
- the substrate may be ultrasonically cleaned by a mixed solution of acetone, isopropanone and deionized water.
- acetone acetone
- isopropanone acetone
- deionized water acetone, isopropanone and deionized water
- the substrate may be cleaned by other means, which does not limit the scope of protection of the present invention.
- step S33 roughening processing is performed.
- This embodiment can be carried out using a solution of hydrofluoric acid (HF) or nitric acid (HNO 3 ).
- HF hydrofluoric acid
- HNO 3 nitric acid
- the substrate can be directly immersed in a hydrofluoric acid or nitric acid solution in this example.
- the weight percentage of the hydrofluoric acid or nitric acid may range from 5 wt% to 20 wt%; the time of the roughening treatment may range from 30 minutes to 120 minutes; and the temperature range of the roughening treatment may range from 20 ° C to 80 ° C .
- the wettability of the substrate can be increased, and the firmness and uniformity of the subsequently formed film layer on the surface of the substrate can be increased.
- the substrate may be washed with deionized water to remove the acid remaining on the surface of the substrate.
- step S34 an anti-reflection film of a moth-eye structure is formed.
- the material of the anti-reflection film may be zinc oxide, silicon, silicon oxide, titanium oxide, silicon nitride, hafnium oxide, zirconium oxide, aluminum oxide, indium oxide, tin oxide, gallium oxide, tin-doped indium oxide, fluoride blending. Any combination of one or more of tin indium oxide, fluorine-doped indium oxide, fluorine-doped indium oxide, aluminum-doped zinc oxide, gallium-doped zinc oxide, zinc sulfide, zinc stanozide, and magnesium fluoride.
- the anti-reflection film may specifically be chemical vapor deposition, spin coating, spraying, wet chemistry Formed by at least one of a method, a sol-gel gel, a chemical liquid deposition, a photolithography, a templating method, a physical vapor deposition, an evaporation or a sputtering method.
- the optical component manufacturing method shown in FIG. 6 to FIG. 9 may be employed, and the light-transmitting material microspheres are subjected to surface treatment by surface treatment of the light-transmitting material microspheres, and the light-transmitting material microspheres carrying the same-charged charge are then carried. Dispersion is arranged on the substrate to form an antireflection film having a moth eye structure.
- the anti-reflection film may be formed by a layer by layer according to the embodiment shown in Figs. 11 to 14 or the embodiment shown in Figs. 15 to 16 .
- the specific process refer to the related steps of the foregoing embodiment, and details are not described herein again.
- step S35 is performed to form a low surface energy coating on the surface of the anti-reflection film.
- the material of the low surface energy coating may be a methoxy silane, an alkyl silane, a fluorosilane or a graft siloxane chain compound.
- the low surface energy coating may also be formed by chemical vapor deposition, spin coating, spraying, wet chemical method, chemical sol gel, chemical liquid deposition, photolithography, templating, physical vapor deposition, evaporation or sputtering. At least one of the methods is formed.
- the low surface energy coating material is HDTMS, and when HDTMS is used to form a low surface energy coating, the following advantages are obtained:
- HDTMS does not include fluorine. Even if it is in contact with a glass, metal or plastic substrate for a long time, it will not corrode the substrate.
- HDTMS will produce three reactive groups after hydrolysis, and the reactive group can chemically react with the substrate, so that the adhesion between HDTMS and the substrate is very good, thereby improving the service life;
- HDTMS is inexpensive, which can reduce the production cost of the substrate. Also, HDTMS is changed from CH 3 _ 0_ Si before hydrolysis to HO Si after hydrolysis, so that HDTMS can have three silanols;
- silyl groups There are also up to three silyl groups.
- the silanol reacts as a reactive group with the hydroxyl groups on the substrate, so the binding of HDTMS to the substrate is very H3.
- the carbon chain in the low surface energy material is too short, the surface energy is too high, and the hydrophobic effect is not obtained; when the carbon chain is too long, the link is broken and the stability is poor.
- HDTMS is selected as the low surface energy material, and the HDTMS has a moderate carbon chain length, thereby achieving a hydrophobic effect and a relatively good stability.
- the step of forming a low surface energy coating on the surface of the anti-reflective film may include: Step S41, providing cetyltrimethoxysilane;
- Step S42 adding ethanol to the cetyltrimethoxysilane to form a solution; in step S43, the solution is acidified;
- Step S44 stirring the acidified solution
- Step S45 the solution is formed on the surface of the anti-reflection film by means of wetting, spin coating or spraying.
- HDTMS having a chemical formula of CH 3 (CH 2 ) 15 Si(OCH 3 ) 3 is provided.
- the inventors have found that HDTMS is easily soluble in ethanol, so that ethanol is added to HDTMS, whereby a solution containing HDTMS can be obtained.
- the HDTMS can be placed in an ethanol solution or the ethanol solution can be poured into the HDTMS.
- the mass percentage of cetyltrimethoxysilane in the solution may range from 3% to 5%.
- the solution is subjected to an acidification treatment to hydrolyze HDTMS, and a reactive group hydroxyl group is produced.
- At least one of acetic acid, hydrochloric acid or nitric acid is added to the solution until the pH of the solution is between 4.5 and 5.5, such as a pH of 4.5, 5.0 or 5.5.
- the acidified solution is subjected to agitation treatment to hydrolyze the HDTMS to be uniform and uniform.
- the acidified solution is placed in a stirring apparatus, and the solution is stirred for 60 minutes or more.
- the surface of the membrane acts as a low surface energy coating.
- the solution may be formed on the surface of the anti-reflection film by any one of wetting, spin coating or spraying.
- the substrate When the solution is formed on the surface of the anti-reflection film by means of wetting, the substrate is placed in the solution, and in order to ensure sufficient reaction, the standing time may be 30 minutes to 60 minutes, such as: 30 minutes, 40 minutes, 50 minutes or 60 minutes.
- This operation can be carried out directly at room temperature, without the need for additional equipment, to operate the cartridge, and to ensure a uniform distribution of the low surface coating on the surface of the antireflective film.
- the time required is relatively short, the efficiency is relatively high, and the uniformity of the distribution of the low surface energy coating on the surface of the antireflection film can be ensured.
- a low surface energy coating is formed on the surface of the antireflection film.
- the thickness of the low surface energy coating layer is on the order of 10 nm to 500 nm, such as 10 nm, 50 nm, 100 nm, 250 nm or 500 nm.
- the low surface energy coating may be dried and subjected to a curing treatment.
- the curing treatment can be performed. Specifically, the curing treatment may take a time ranging from 30 minutes to 60 minutes, such as: 30 minutes, 40 minutes, 50 minutes, or 60 minutes; the temperature may range from 100 ° C to 150 ° C, such as: 100 ° C, 110 ° C, 120 ° C, 130 ° C, 140 ° C or 150 ° C.
- the fixation of the low surface energy coating on the surface of the antireflection film can be increased, and the peeling of the low surface energy coating can be prevented.
- the cleaning treatment, the roughening treatment or the curing treatment is performed for the tubeizing step.
- the corresponding steps can be omitted.
- the anti-reflection effect of the full spectrum and the large incident angle can be achieved; and a low surface energy coating can be formed on the surface of the anti-reflection film to achieve super
- the hydrophobic self-cleaning effect, and the low surface energy coating can further increase the transmittance of the anti-reflection film, and finally improve the anti-reflection effect.
- HDTMS is used as a low surface energy coating
- the low surface energy coating does not corrode the substrate even after prolonged use, which ultimately ensures the normal use of the hydrophobic substrate; and because the price of HDTMS is relatively low, thereby reducing Production costs.
- an embodiment of the optical component includes: a substrate 102; the substrate is glass, metal or plastic.
- the anti-reflection film 103 covers the substrate 102, and the light-transmitting material microspheres of the anti-reflection film 103 have a gap therebetween, which can prevent the adhesion of the light-transmitting material microspheres on the plane of the substrate 102.
- the light-transmitting material microspheres in the anti-reflection film 103 are on the same layer on the substrate 102, that is, the anti-reflection film 103 is a single-layer microsphere structure, and the anti-reflection film 103 is wide.
- the optical component may also be an optical component formed by the manufacturing method of the optical component shown in FIGS. 11 to 14, and the manufacturing method of the optical component shown in FIGS. 15 to 16, respectively.
- the present invention also provides a schematic and partial enlarged view of another embodiment of the optical component. It is to be noted that in order to make the drawings clearer and cleaner, only a part of the optical components are illustrated in the drawings to illustrate the positional relationship of the films in the optical components, and the number of films in the drawings should not be construed as limiting the invention.
- the optical component includes: a substrate 500, a preliminary layer 503 on the substrate 500 and in contact with the substrate 500, and an anti-reflection film 505 on the preliminary layer 503 and in contact with the preliminary layer 503, wherein
- the substrate 500 is for providing a medium in which light is incident.
- the Substrate 500 can be a different material.
- the substrate 500 in a photovoltaic device, the substrate 500 is made of glass; in the backlight of the liquid crystal display, the material of the substrate 500 may also be plastic.
- the present invention does not limit the material of the substrate 500.
- the material of the substrate 500 is exemplified by a glass having a negatively charged surface.
- the preliminary layer 503 is located between the substrate 500 and the anti-reflection film 505, and the contact faces of the preliminary layer 503 and the substrate 500 respectively have electrically different charges; the preliminary layer 503 and the anti-reflection film The contact faces of the 505 are respectively charged with different electrical charges, and the bonding force between the substrate 500 and the anti-reflective film 505 is improved based on the principle of heterosexual charge attraction.
- the preliminary layer 503 is formed before the anti-reflection film 505 is formed, it is referred to as a "preparation" layer.
- the preliminary layer 503 may be a single-layer electrical layer.
- the surface of the substrate 500 is negatively charged, and the surface of the anti-reflective film 505 in contact with the preliminary layer 503 is negatively charged.
- the preliminary layer 503 is a single layer of a positively charged film that can attract the substrate 500 and the anti-reflective film 505.
- the preliminary layer 503 includes a plurality of electrical layers. Specifically, the preliminary layer 503 is formed by alternately stacking a first electrical layer 5031 and a second electrical layer 5032.
- the first electrical layer 5031 and the second electrical layer 5032 respectively have different electrical charges, so that the first electrical layer 5031 and the second electrical layer 5032 can be closely combined based on the principle of opposite charge attraction. Together, the firmness and mechanical strength of the preliminary layer 503 are improved.
- the first electrical layer 5031 and the second electrical layer 5032 may be composed of an electrolyte.
- It may be an electrolyte of a negatively charged sodium polystyrene sulfonate or a positively charged polypropylene ammonium chloride.
- the electrical properties of the electric charges carried by the first electrical layer 5031 and the second electrical layer 5032 and the number of layers of the electrical layer in the preliminary layer 503 may be set to make the contact layer of the preliminary layer 503 and the substrate. There are different charges, respectively, while the contact faces of the preliminary layer 503 and the anti-reflection film 505 are respectively charged with different charges.
- the substrate 500 is exemplified by a glass, usually the glass has a negative charge, and the first electrical layer 5031 is a positively charged polypropylene ammonium chloride, and the second electrical layer 5032 is a negatively charged sodium polyphthalate.
- Five layers of electrical layers are sequentially stacked on the substrate 500: positively charged polypropylene ammonium chloride, negatively charged sodium polyphthalate, positively charged polypropylene ammonium chloride, negatively charged polyphenylene Sodium vinyl sulfonate, positively charged polypropylene ammonium chloride.
- the preliminary layer 503 is in contact with the substrate 500 as a positively charged polypropylene ammonium chloride. Unlike the electrical charge of the substrate 500, the preliminary layer 503 may be adsorbed on the substrate 500.
- the surface of the preliminary layer 503 is a positively charged polypropylene ammonium chloride, and has a different charge on the contact surface with the subsequent anti-reflection film 505 for adsorbing the anti-reflection film 505.
- a negatively charged sodium polyphthalate may be formed on the substrate 500.
- an electric layer may be added or reduced such that the surface of the preliminary layer 503 that is in contact with the anti-reflection film 505 is a negatively charged polyphenylene.
- the number of the electrical layers in the preliminary layer 503 is preferably less than or equal to 8. In order to ensure that the preliminary layer 503 has a sufficiently large adsorption force and at a low cost, preferably, the number of the electrical layers in the preliminary layer 503 is in the range of 3 to 6 layers.
- An anti-reflection film 505 on the preliminary layer 503 serves to reduce reflection of light when light is incident on the substrate 500.
- the anti-reflection film 505 has a different charge on the surface in contact with the preliminary layer 503. Therefore, the anti-reflection film 505 is firmly fixed to the preliminary layer 503 based on the opposite phase attraction, and is firmly fixed to the anti-reflection film 505. On the substrate 500, the mechanical strength of the optical component is increased.
- the anti-reflection film 505 is formed by a layer by layer in the embodiment, and includes a multi-layer anti-reflection layer 502.
- a charged layer 504 electrically different from the anti-reflective layer 502 is further disposed between the anti-reflective layers 502, and the charged layer 504 can tightly bond the anti-reflective layers 502 of each layer.
- the anti-reflective layer 502 includes a plurality of silica microspheres dispersedly disposed in the same layer. The refractive index between the silica microspheres is 1 and the refractive index of the silica is 1.5.
- the refractive index of the anti-reflective layer 502 can satisfy the relationship of refractive index matching, thereby reducing the reaction.
- the silica microspheres have a particle size in the range of 5 to 10 nm. Nano-sized silica microspheres can improve the uniformity of voids in the anti-reflective film 505.
- the surface of the preliminary layer 503 is positively charged, and the silica microspheres are generally negatively charged and can be firmly adsorbed on the preliminary layer 503.
- the silica microspheres in this embodiment have a negative charge.
- the silica microspheres may be surface-treated (for example, : Surface conditioning by pH adjustment or by surfactant to render the silica microspheres positively charged.
- the charged layer 504 may be composed of an electrolyte or charged particles.
- the charged layer 504 is a positively charged polypropylene ammonium chloride.
- the positively charged polypropylene ammonium chloride can adsorb negatively charged silica microspheres to increase the mechanical strength of the antireflective film 505.
- the charged layer 504 may also be a positively charged charged particle, for example: the charged layer 504 is a positively charged silicon dioxide charged particle.
- a preliminary layer is provided between the substrate 500 and the anti-reflection film 505.
- the bonding force between the anti-reflection film 505 and the substrate 500 is improved.
- the anti-reflection film 505 may be provided with an anti-reflection layer 502 having a sufficient number of layers, thereby increasing the thickness of the anti-reflection film 505, so that the anti-reflection film 505 satisfies the thickness matching. Relationship. Taking the anti-reflection film 505 as an example of the formation of the silica microspheres and the polypropylene ammonium chloride stack, after the preliminary layer 503 is disposed, at least 10 layers of silica microspheres may be disposed in the anti-reflection film 505, thereby making the anti-reflection film 505 The reflective film 505 obtains a sufficiently large film thickness.
- FIG. 23 and FIG. 24 illustrate an embodiment of the optical component, located in the The anti-reflection film 505 on the preliminary layer 503 is formed by a layer by layer, and includes at least one anti-reflection layer.
- the anti-reflection film located on the preliminary layer may also be a surface treatment of the light-transmitting material microspheres so that the light-transmitting material microspheres have the same electric charge and then carry The isotropically charged light-transmitting material microspheres are dispersed in an anti-reflection film formed on the substrate.
- FIG. 25 there is shown a schematic view of still another embodiment of the optical component of the present invention, comprising: a substrate 600;
- An anti-reflection film 601 located on a surface of the substrate 600, the anti-reflection film 601 having a moth-eye structure;
- the substrate 600 may be any transparent substrate and may be made of glass, metal, ceramic or plastic.
- This embodiment does not limit the specific shape, size and thickness of the substrate 600.
- the thickness of the anti-reflection film 601 may range from 100 nm to 2000 nm, such as:
- the anti-reflection film 601 may be made of zinc oxide, silicon, silicon oxide, titanium oxide, silicon nitride, hafnium oxide, zirconium oxide, aluminum oxide, indium oxide, tin oxide, gallium oxide, tin-doped indium oxide, or fluorinated. Any combination of one or more of tin-doped indium oxide, fluorine-doped indium oxide, indium fluoride-doped indium oxide, aluminum-doped zinc oxide, gallium-doped zinc oxide, zinc sulfide, zinc stanozide, and magnesium fluoride.
- the anti-reflection film 601 may be an anti-reflection film formed in the above embodiment of the optical module manufacturing method.
- the surface of the light-transmitting material microsphere is subjected to surface treatment so that the light-transmitting material microspheres are charged with the same polarity, and then the light-transmitting material microspheres carrying the same-charge charge are dispersed and arranged on the substrate, thereby forming an anti-reflection film (as shown in the figure).
- an antireflection film comprising at least one antireflection layer formed by a layer by layer (an antireflection film as shown in Fig. 14 or Fig. 16).
- the anti-reflection film 601 Since the anti-reflection film 601 has a moth-eye structure, it can have a gradient refractive index, thereby avoiding reflection of light, and finally achieving a full spectrum and a large incident angle.
- the low surface energy coating 602 may have a thickness ranging from 10 nm to 500 nm, such as: 10 nm, 50 nm, 100 nm, 250 nm or 500 nm.
- the material of the low surface energy coating 602 may be a methoxy silane, an alkyl silane, a fluorosilane or a graft siloxane chain compound.
- the low surface energy coating 602 is made of HDTMS, and since the HDTMS has the dual effects of water and oil repellency, the optical components produced can be guaranteed to simultaneously resist water and oil.
- HDTMS is inexpensive, which can reduce the production cost of optical components.
- the substrate is a glass substrate
- the antireflective film is zinc oxide
- the low surface energy coating is HDTMS.
- the first case corresponds to a glass substrate, i.e., the solid line curve in Fig. 26 shows the relationship between the wavelength of light absorbed by the glass substrate and the transmittance of light on the surface of the glass substrate.
- an anti-reflection film of ZnO material is formed on the surface of the glass substrate (hereinafter referred to as an anti-reflection substrate), that is, a deep dotted line curve in FIG. 26 shows the wavelength of light absorbed by the anti-reflection substrate and the light on the substrate. The relationship between the transmittance of the surface.
- an antireflection film made of ZnO and a low surface energy coating of HDTMS (hereinafter referred to as an optical component) are formed in sequence on the surface of the glass substrate, that is, the relationship between the transmittances in Fig. 26.
- the total change trend of the three curves is the same, and the transmittance of the optical component> the transmittance corresponding to the anti-reflection substrate> the transmittance corresponding to the glass substrate, which fully proves that the transmittance is low.
- the surface energy coating can increase the transmittance, that is, enhance the antireflection effect of the antireflection film.
- the low surface energy coating contributes to the improvement of the anti-reflection effect without limiting the materials of the substrate, the anti-reflection film and the low surface energy coating.
- the present invention also provides a photovoltaic device for converting light energy into electrical energy, comprising: an optical component formed by the manufacturing method, a substrate in the optical component is a transparent substrate; a solar cell, located in the transparent The side of the substrate away from the light.
- the transparent substrate is plexiglass or plastic (for example, decyl acrylate, PMMA).
- the optical component is the same as the optical component in the above embodiment, and details are not described herein again.
- the solar cell is an amorphous silicon solar cell or a microcrystalline silicon solar cell.
- the anti-reflection film with good anti-reflection effect is disposed in the photovoltaic device of the invention, which can project more light to the solar cell and improve the light utilization efficiency of the photovoltaic device.
- the optical components can be applied to other products.
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Wood Science & Technology (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Sustainable Development (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Materials Engineering (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Sustainable Energy (AREA)
- Surface Treatment Of Optical Elements (AREA)
Abstract
Provide are an optical assembly, a manufacturing method therefor and a photovoltaic device. The manufacturing method for an optical assembly comprises: providing microspheres of a light-permeable material (101); surface treating the microspheres of the light-permeable material (101) to enable the surfaces of the light-permeable material (101) to carry charges of the same polarity; providing a substrate (102); and dispersedly arranging the microspheres of the light-permeable material (101) carrying charges of the same polarity on the substrate (102), to form an anti-reflection film (103). Alternatively, the manufacturing method comprises: providing a substrate (200); forming on the substrate (200) an anti-reflection film comprising at least one anti-reflection layer (201); the step of forming the anti-reflection layer (201) comprising: forming a charged layer (202); and dispersedly arranging on the charged layer (202) microspheres of a light-permeable material (204) which have the electrical property different from that of the charged layer (202). Correspondingly, also provided is an optical assembly formed using the manufacturing method. Correspondingly, also provided is a photovoltaic device comprising the optical assembly and a solar energy battery located at the side of the transparent substrate where no anti-reflection film is provided. The present invention can increase the applicable wavelength range of the anti-reflection film, and improve the anti-reflection effect of the anti-reflection film.
Description
光学组件及其制造方法、 光伏器件 本申请要求 2012 年 6 月 29 日提交中国专利局、 申请号为 201210226286.6、 发明名称为 "光学组件及其制造方法、 光伏器件" 的中国专利申请的优先权, 其全部内容通过引用结合在本申请中。 本申请要求 2012 年 6 月 29 日提交中国专利局、 申请号为 The present invention claims the priority of a Chinese patent application filed on June 29, 2012, the Chinese Patent Application No. 201210226286.6, entitled "Optical Components and Their Manufacturing Methods, Photovoltaic Devices", The entire contents of this application are incorporated herein by reference. This application is submitted to the Chinese Patent Office on June 29, 2012, and the application number is
201210226524.3、 发明名称为 "光学组件及其制造方法、 光伏器件" 的中国专利申请的优先权, 其全部内容通过引用结合在本申请中。 本申请要求 2012 年 6 月 29 日提交中国专利局、 申请号为 201210226597.2、 发明名称为 "光学组件及其制造方法、 光伏器件" 的中国专利申请的优先权, 其全部内容通过引用结合在本申请中。 本申请要求 2012 年 6 月 29 日提交中国专利局、 申请号为 201210226783.6、 发明名称为 "超疏水减反基板及其制作方法"的中 国专利申请的优先权, 其全部内容通过引用结合在本申请中。 本申请要求 2012 年 6 月 29 日提交中国专利局、 申请号为 201210225678.0、 发明名称为 "疏水基板及其制作方法"的中国专利 申请的优先权, 其全部内容通过引用结合在本申请中。 技术领域 本发明涉及光学材料领域, 尤其涉及一种光学组件及其制造方 法、 光伏器件。 背景技术 光在传播时,在不同介质的分界面上通常会有一部分改变传播方 向而返回原来介质中。 这被称为光的反射。 通常, 不同介质之间折射 率的差异越大, 光在该分界面处的反射将越强。 201210226524.3, the entire disclosure of which is hereby incorporated by reference in its entirety in its entirety in its entirety in the the the the the the the the the The present application claims priority to Chinese Patent Application No. 201210226597.2, entitled "Optical Components and Their Manufacturing Methods, Photovoltaic Devices", filed on June 29, 2012, the entire contents of in. The present application claims priority to Chinese Patent Application No. 201210226783.6, entitled "Superhydrophobic Reducing Substrate and Method of Making the Same", filed on June 29, 2012, the entire contents of which is incorporated herein by reference. in. The present application claims priority to Chinese Patent Application, the entire disclosure of which is hereby incorporated by reference in its entirety in the the the the the the the the the the TECHNICAL FIELD The present invention relates to the field of optical materials, and more particularly to an optical component, a method of manufacturing the same, and a photovoltaic device. BACKGROUND OF THE INVENTION When light is transmitted, a part of the interface of different media usually changes its direction of propagation and returns to the original medium. This is called the reflection of light. In general, the greater the difference in refractive index between different media, the stronger the reflection of light at the interface.
在光伏器件、显示器等领域中, 如何减小光的反射一直是研究的 热点。 在公告号 CN100375908C的中国专利中公开了一种单层多孔膜
结构的抗反射膜,包含二氧化硅微球和至少一种粘合剂化合物的抗反 射膜, 所述抗反射膜具有 30% (重量百分比)或更高的二氧化硅微球 含量, 2纳米或更小的算术平均表面粗糙度和 10% (原子百分比)或 更高的表面硅原子含量。所述中国专利提供的抗反射膜可提高抗反射 膜的机械强度和抗磨性, 但所述的抗反射膜具有适应光谱范围较窄, 入射角度较小的缺点。 In the field of photovoltaic devices, displays, etc., how to reduce the reflection of light has been a research hotspot. A single-layer porous membrane is disclosed in Chinese Patent Publication No. CN100375908C A structured antireflective film comprising an antireflection film comprising silica microspheres and at least one binder compound, the antireflection film having a silica microsphere content of 30% by weight or more, 2 nm Or smaller arithmetic mean surface roughness and 10% (atomic percent) or higher surface silicon atom content. The anti-reflection film provided by the Chinese patent can improve the mechanical strength and abrasion resistance of the anti-reflection film, but the anti-reflection film has the disadvantages of adapting to a narrow spectral range and a small incident angle.
飞蛾的复眼可以被看作是由六角形纳米结构突起有序排列而成 的阵列结构。 这个阵列被认为是角膜表面的同质透明层, 每一个纳米 结构突起相当于一个减反射单元。这样的结构使得飞蛾的复眼具有低 反光性, 使其看起来异常黑。 因此, 即使飞蛾在夜间飞行也不易被察 觉。 这样的效应被称为蛾眼效应。 与传统单层多孔膜结构相比, 基于 蛾眼效应的抗反膜所适应的光谱范围更宽, 入射角度更大, 因此该技 术成为本领域技术人员研究的热点。 The compound eye of the moth can be regarded as an array structure in which hexagonal nanostructure protrusions are arranged in an orderly manner. This array is considered to be a homogenous transparent layer on the surface of the cornea, and each nanostructured protrusion is equivalent to an anti-reflection unit. Such a structure makes the compound eye of the moth low in reflection, making it look abnormally black. Therefore, even if the moth is flying at night, it is not easy to be detected. This effect is known as the moth eye effect. Compared with the conventional single-layer porous membrane structure, the anti-reflection film based on the moth-eye effect has a wider spectral range and a larger incident angle, so this technique has become a research hotspot by those skilled in the art.
下面结合蛾眼结构的不同光学模型,对蛾眼结构抗反射作用的原 理进行说明。 The principle of anti-reflection of moth-eye structures is described below in combination with different optical models of moth-eye structures.
参考图 1 , 示出了一种蛾眼结构模型的等效示意图。 根据绕射理 论, 当蛾眼结构 1的表面具有微突起的结构变化时(即蛾眼结构 1中的 小台阶高度差接近或小于光波长时), 这种微突起的结构变化将引起 材料折射率的微变化, 会形成自空气至蛾眼结构 1折射率 nl、 n2、 η3、 η4依次增大的趋势, 从而减少光的反射。 Referring to Figure 1, an equivalent schematic diagram of a moth-eye structure model is shown. According to the diffraction theory, when the surface of the moth-eye structure 1 has a structural change of micro-protrusions (that is, when the small step height difference in the moth-eye structure 1 is close to or smaller than the wavelength of light), the structural change of the micro-protrusion causes the material to be refracted. The slight change in the rate will increase the tendency of the refractive index nl, n2, η3, η4 from the air to the moth-eye structure 1 to increase sequentially, thereby reducing the reflection of light.
参考图 2, 示出了另一种蛾眼结构模型的等效示意图。 当参考图 1 中的微突起尺寸进一步减小, 微突起密度进一步增多, 其结构从总体 上看就越来越接近于蛾眼结构 2的连续变化斜面。 这将引起于蛾眼结 构 2的折射率沿深度方向从 nl至 η4呈连续变化, 从而进一步减小折射 率急剧变化所造成的反射现象。 Referring to Figure 2, an equivalent schematic diagram of another moth eye structure model is shown. When the size of the microprotrusions in Fig. 1 is further reduced, the density of the microprojections is further increased, and the structure is generally closer to the continuously varying slope of the moth eye structure 2. This causes the refractive index of the moth-eye structure 2 to continuously change from n1 to η4 in the depth direction, thereby further reducing the reflection phenomenon caused by the sharp change in the refractive index.
基于所述蛾眼效应, 现有技术中发展了各种仿生光学材料, 以起 到减少光反射的作用。 其中, 按蛾眼结构排布的二氧化硅微球所形成 的抗反射膜是模拟蛾眼结构的光学材料之一。
参考图 3 , 示出了现有技术按蛾眼结构排布的二氧化硅微球形成 的抗反射膜的透光率曲线。其中,横坐标为波长,纵坐标为光透光率, 图 3中曲线 22为未涂覆抗反射膜的玻璃的光透光率, 曲线 21为涂覆了 抗反射膜的玻璃的光透光率,所述抗反射膜由按蛾眼结构排布的二氧 化硅敖球形成。 在波长大于 600nm时, 所述曲线 22所对应的光透光率 大于曲线 21对应的光透光率, 但是在波长小于 600nm时, 曲线 22所对 应的光透光率低于曲线 21对应的光透过率。 也就是说, 现有的二氧化 硅微球形成的抗反射膜在波长 '〗、于 600nm时没有起到良好的抗反射 效果。 Based on the moth-eye effect, various bionic optical materials have been developed in the prior art to reduce the effect of light reflection. Among them, the anti-reflection film formed by the silica microspheres arranged in the moth-eye structure is one of the optical materials simulating the moth-eye structure. Referring to Fig. 3, there is shown a transmittance curve of an antireflection film formed by silica microspheres arranged in a moth eye structure in the prior art. Wherein, the abscissa is the wavelength, the ordinate is the light transmittance, the curve 22 in FIG. 3 is the light transmittance of the glass not coated with the anti-reflection film, and the curve 21 is the light transmission of the glass coated with the anti-reflection film. The anti-reflection film is formed of silica spheroids arranged in a moth-eye structure. When the wavelength is greater than 600 nm, the light transmittance corresponding to the curve 22 is greater than the light transmittance corresponding to the curve 21, but when the wavelength is less than 600 nm, the light transmittance corresponding to the curve 22 is lower than the light corresponding to the curve 21. Transmittance. That is to say, the antireflection film formed by the existing silica microspheres does not exhibit a good antireflection effect at a wavelength of ', at 600 nm.
发明内容 因此, 需要一种光学组件及其制造方法、 光伏器件, 以提高抗反 射膜适用的波长范围。 SUMMARY OF THE INVENTION Accordingly, there is a need for an optical component, a method of fabricating the same, and a photovoltaic device to increase the wavelength range to which the antireflective film is applied.
根据本发明的一个方面,提供了一种光学组件的制造方法,包括: 提供透光材料微球; 对所述透光材料微球进行表面处理, 使所述透光 材料微球表面携带同性电荷; 提供基底; 使所述携带同性电荷的透光 材料微球分散排布在所述基底上, 以形成抗反射膜。 According to an aspect of the invention, a method of fabricating an optical component, comprising: providing a light-transmitting material microsphere; and surface-treating the light-transmitting material microsphere to carry a isotropic charge on the surface of the light-transmitting material microsphere Providing a substrate; dispersing the isotropically charged light-transmitting material microspheres on the substrate to form an anti-reflection film.
一个基本思想是, 使透光材料微球表面携带同性电荷, 各透光材 料微球之间由于同性排斥而保持一定的间距。 这样, 在最后形成的抗 反射膜中, 透光材料微球之间具有一定空隙, 不会出现相互粘连的现 象, 从而可以避免粘连的透光材料微球对特定波长的反射, 进而使所 述抗反射膜在较宽波长范围内能起到良好的抗反射效果。 A basic idea is to make the surface of the light-transmitting material microspheres carry the same-sex charge, and the light-transmitting material microspheres maintain a certain distance between them due to homosexual repulsion. In this way, in the anti-reflection film formed lastly, there is a certain gap between the micro-spheres of the light-transmitting material, and no mutual adhesion occurs, so that the reflection of the adhered light-transmitting material microspheres to a specific wavelength can be avoided, thereby enabling the said The anti-reflection film has a good anti-reflection effect over a wide wavelength range.
根据本发明的另一个方面, 还提供了一种光学组件的制造方法, 包括: 提供基底; 在所述基底上形成包括至少一层抗反射层的抗反射 膜; 其中, 形成抗反射层的步骤包括: 形成带电层; 在所述带电层上 分散排布与所述带电层电性不同的透光材料微球。 According to another aspect of the present invention, a method of manufacturing an optical component, further comprising: providing a substrate; forming an anti-reflection film including at least one anti-reflection layer on the substrate; wherein the step of forming an anti-reflection layer The method includes: forming a charged layer; dispersing and dispersing the light-transmitting material microspheres different in electrical properties from the charged layer on the charged layer.
一个基本思想是,在带电层上分散排布与所述带电层电性不同的 透光材料颗粒, 因此所述透光材料颗粒与所述带电层相互吸引, 可以 提高所形成的抗反射膜的牢固性。
根据本发明的另一个方面, 提供基底之后, 形成抗反射膜的步骤 之前, 还包括: 在基底表面上形成预备层, 使所述预备层与基底相接 触的一面带有与所述基底表面不同电性的电荷,且使所述预备层与所 述抗反射膜相接触的一面带有与所述抗反射膜的接触面不同电性的 电荷。 A basic idea is to disperse and distribute light-transmitting material particles different in electrical conductivity from the charged layer on the charged layer, so that the light-transmitting material particles and the charged layer attract each other, and the formed anti-reflective film can be improved. Firmness. According to another aspect of the present invention, after the step of forming the anti-reflective film after the substrate is provided, the method further includes: forming a preliminary layer on the surface of the substrate, the side of the preliminary layer contacting the substrate having a different surface from the substrate An electrical charge, and a side of the preliminary layer in contact with the anti-reflection film has a charge that is electrically different from a contact surface of the anti-reflection film.
一个基本思想是,预备层与基底的相接触的面分别带有不同电性 的电荷;所述预备层与抗反射膜的相接触的面分别带有不同电性的电 荷; 基于异性电荷相吸的原理, 所述预备层与基底、 所述预备层与抗 反射膜之间均有较大的吸力,从而提高了所述基底和抗反射膜之间的 结合力, 进而提高了光学组件的机械强度。 根据本发明的另一个方面, 在形成抗反射膜之后, 还包括在所述 抗反射膜表面形成低表面能涂层。 一个基本思想是, 在抗反射膜表面形成低表面能涂层, 可以实现 超疏水自清洁的效果,且低表面能涂层能够进一步增加抗反射膜的透 过率, 最终提高了减反效果。 根据本发明的另一个方面,所述低表面能涂层的材质包括曱氧基 硅烷。 一个基本思想是, 所述低表面能涂层的材质为曱氧基硅烷, 不包 括氟元素,从而即使长时间使用,所述低表面能涂层也不会腐蚀基底, 最终可以保证光学组件的正常使用。 此外, 所述低表面能涂层的价格 比较便宜, 从而降低了生产成本。 根据本发明的另一个方面,提供了一种所述光学组件的制造方法 形成的光学组件。 一个基本思想是, 透光材料微球表面携带同性电荷, 透光材料微 球之间由于同性排斥而保持一定的间距, 不会出现相互粘连的现象, 从而可以避免粘连的透光材料微球对特定波长的反射,进而使所述抗 反射膜在较宽波长范围内能起到良好的抗反射效果。
根据本发明的另一个方面, 本发明还提供一种光伏器件, 包括: 所述的光学组件, 所述光学组件中的基底为透明基底; 太阳能电池, 位于所述透明基底未设置抗反射膜的一侧。 一个基本思想是, 光伏器件中设置有减反效果良好的抗反射膜, 可以使较多的光投射至太阳能电池, 提高了光伏器件的光利用率。 附图说明 图 1是一种蛾眼结构模型的等效示意图; A basic idea is that the faces of the preliminary layer and the substrate are respectively charged with different electrical charges; the faces of the preliminary layer and the anti-reflective film are respectively charged with different electrical charges; The principle that the preliminary layer and the substrate, the preliminary layer and the anti-reflection film have a large suction force, thereby improving the bonding force between the substrate and the anti-reflection film, thereby improving the mechanical mechanism of the optical component. strength. According to another aspect of the present invention, after forming the antireflection film, further comprising forming a low surface energy coating on the surface of the antireflection film. A basic idea is to form a low surface energy coating on the surface of the anti-reflective film to achieve super-hydrophobic self-cleaning effect, and the low surface energy coating can further increase the transmittance of the anti-reflective film, and finally improve the anti-reflection effect. According to another aspect of the invention, the material of the low surface energy coating comprises a methoxy silane. A basic idea is that the low surface energy coating is made of nonyloxysilane, which does not include fluorine, so that the low surface energy coating does not corrode the substrate even after prolonged use, and finally the optical component can be ensured. Normal use. In addition, the low surface energy coating is relatively inexpensive, thereby reducing production costs. According to another aspect of the present invention, an optical assembly formed by the method of fabricating the optical component is provided. A basic idea is that the surface of the light-transmitting material microspheres carries the same-spot charge, and the light-transmitting material microspheres maintain a certain spacing due to homosexual repulsion, and there is no mutual adhesion phenomenon, thereby avoiding the adhesion of the light-transmitting material microspheres. The reflection of a specific wavelength, in turn, enables the anti-reflection film to have a good anti-reflection effect over a wide wavelength range. According to another aspect of the present invention, the present invention also provides a photovoltaic device, comprising: the optical component, the substrate in the optical component is a transparent substrate; a solar cell, the transparent substrate is not provided with an anti-reflection film One side. A basic idea is that an anti-reflection film with good anti-reflection effect is provided in the photovoltaic device, which can project more light to the solar cell and improve the light utilization efficiency of the photovoltaic device. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an equivalent schematic view of a moth eye structure model;
图 2是另一种蛾眼结构模型的等效示意图; Figure 2 is an equivalent schematic diagram of another moth eye structure model;
图 3 是现有技术按蛾眼结构排布二氧化硅微球而形成的抗反射 膜的透光率曲线; 3 is a light transmittance curve of an antireflection film formed by arranging silica microspheres according to a moth eye structure in the prior art;
图 4是抗反射膜中二氧化硅微球的示意图; Figure 4 is a schematic view of silica microspheres in an antireflection film;
图 5是本发明光学组件的制造方法一实施方式的流程示意图; 图 6至图 9是图 5所示光学组件的制造方法一实施例的示意图; 图 10 是本发明光学组件的制造方法另一实施方式的流程示意 图; 5 is a schematic flow chart of an embodiment of a method for manufacturing an optical component of the present invention; FIG. 6 to FIG. 9 are schematic views showing an embodiment of a method for manufacturing the optical component shown in FIG. 5; Schematic diagram of the flow of the embodiment;
图 11至图 14是图 10所示光学组件的制造方法一实施例的示意 图; 11 to 14 are schematic views of an embodiment of a method of manufacturing the optical component shown in Fig. 10;
图 15至图 16是图 10所示光学组件的制造方法另一实施例的示 意图; 15 to 16 are views showing another embodiment of the manufacturing method of the optical component shown in Fig. 10;
图 17 是本发明光学组件的制造方法再一实施方式的流程示意 图; Figure 17 is a schematic flow chart showing still another embodiment of the manufacturing method of the optical module of the present invention;
图 18至图 20是图 17所示光学组件的制造方法一实施例的示意 图; 18 to 20 are schematic views of an embodiment of a method of manufacturing the optical component shown in Fig. 17;
图 21 是本发明光学组件的制造方法又一实施方式的流程示意 图; Figure 21 is a schematic flow chart showing still another embodiment of the manufacturing method of the optical module of the present invention;
图 22是图 21中步骤 S35—实施例的流程示意图: Figure 22 is a flow chart showing the step S35 of Figure 21:
图 23是本发明光学组件一实施例的示意图;
图 24是图 23所示光学组件中预备层的局部放大图; Figure 23 is a schematic view of an embodiment of an optical component of the present invention; Figure 24 is a partial enlarged view of a preliminary layer in the optical assembly shown in Figure 23;
图 25是本发明光学组件另一实施例的示意图; Figure 25 is a schematic view showing another embodiment of the optical component of the present invention;
图 26是本发明光学组件的波长与透过率之间的关系图。 Figure 26 is a graph showing the relationship between wavelength and transmittance of the optical module of the present invention.
具体实施方式 为了解决现有技术的问题,发明人对现有技术抗反射膜进行了形 貌分析,具体地,通过扫描电子显敖镜( Scanning Electron Microscope, SEM )对抗反射膜进行了分析。 如图 4所示的抗反射膜中,所述抗反射膜包括多个按蛾眼结构排 布的二氧化硅微球, 其中, 位于基底 10上的二氧化硅微球 11几个甚 至十几个地粘连在一起。发明人经分析发现, 这些粘连在一起的二氧 化硅微球 11会使特定波长的光发生反射, 从而影响了抗反射膜在特 定波长的抗反射效果。 相应地, 本发明提供一种光学组件的制造方法, 参考图 5, 示出 了本发明光学组件的制造方法一实施方式的流程示意图,所述制造方 法大致包括以下步骤: 步骤 S1 , 提供透光材料微球; 步骤 S2 , 对所述透光材料微球进行表面处理, 使所述透光材料 微球表面携带同性电荷; 步骤 S3 , 提供基底; 步骤 S4, 使所述携带同性电荷的透光材料微球分散排布在基底 上, 以形成抗反射膜。 BEST MODE FOR CARRYING OUT THE INVENTION In order to solve the problems of the prior art, the inventors conducted a shape analysis of a prior art anti-reflection film, specifically, an anti-reflection film by a scanning electron microscope (SEM). In the antireflection film shown in FIG. 4, the antireflection film includes a plurality of silica microspheres arranged in a moth eye structure, wherein the silica microspheres 11 located on the substrate 10 are several or even a dozen Stick together. The inventors have found through analysis that these adhered silica microspheres 11 reflect light of a specific wavelength, thereby affecting the antireflection effect of the antireflection film at a specific wavelength. Accordingly, the present invention provides a method of fabricating an optical component. Referring to FIG. 5, a flow diagram of an embodiment of a method of fabricating an optical component of the present invention is shown. The manufacturing method generally includes the following steps: Step S1, providing light transmission a material microsphere; step S2, surface-treating the light-transmitting material microspheres, so that the surface of the light-transmitting material microspheres carries a homogenous charge; step S3, providing a substrate; and step S4, causing the light-transmitting with the same-sense charge The material microspheres are dispersedly arranged on the substrate to form an antireflection film.
方案做进一步说明。 参考图 6至图 9, 示出了图 5所示光学组件制造方法一实施例的 示意图。
如图 6所示, 执行步骤 SI , 提供透光材料微球。 本实施例中, 通过制备透光材料微球的方式提供所述透光材料微球,在其他实施例 中, 还可以通过购买透光材料微球的方式提供所述透光材料微球。 本实施例, 以二氧化硅微球为例进行说明, 在其他实施例中, 所 述透光材料还可以是其他氧化物。本实施例制备二氧化硅微球的方法 大致包括以下步骤: 首先, 通过乙醇稀释正硅酸乙酯。 之后, 将稀释后的正硅酸乙酯浸入至乙醇和水的混合溶液中。 具体地, 在容器 100中放置乙醇和水的混合溶液中, 然后将稀释 后的正硅酸乙酯放入容器 100内的混合溶液中。其中所述混合溶液中 乙醇和水的体积比位于 8.5: 1~9.5: 1的范围内,可以使形成的二氧化硅 微球 101尺寸均匀, 且具有较好的减反效果。 随后, 在混合溶液中添加氨水, 所述氨水作为催化剂可使混合溶 液的 PH值位于 7.8~8.2的范围内, 以提高反应速率。 此外, 混合溶 液的 PH值位于 7.8~8.2的范围内还可以使形成的二氧化硅微球 101 尺寸均匀, 且具有较好的减反效果。 优选地, 使混合溶液的 PH值为 8。 最后,持续强力搅拌容器 100内的所述混合溶液,以形成沉淀物, 所述沉淀物为二氧化硅微球 101。 需要说明的是, 搅拌时间过短溶液 造成反应不够完全, 搅拌时间过长则容易增大整个工艺的时间。 优选 地, 持续搅拌的时间位于 1.5~2.5个小时的范围内。 在搅拌完成之后, 对所述混合溶液进行过滤, 将混合溶液中的沉 淀物滤出, 即将所述二氧化硅微球 101滤出。 此外, 为了进行后续步骤, 还包括: 通过水对所述二氧化硅微球 101进行清洗, 以去除二氧化硅微球 101上的残余溶液。 至此完成二 氧化娃微球 101的制备。
需要说明的是, 制备二氧化硅微球的方法还包括乳液法、化学气 相沉积法等, 本发明对二氧化硅微球的制备方法不做限制。 如图 7所示, 执行步骤 S2, 对所述透光材料微球进行表面处理, 使所述透光材料微球表面携带同性电荷; 本实施例中, 通过在包含有 所述透光材料微球的溶液中放置带电的表面活性剂,以使透光材料微 球表面携带同性电荷。 具体地, 所述透光材料 球为二氧化硅敖球 101 , 可以通过十二 烷基石危酸钠 ( Sodium Dodecyl Sulfate, SDS )使二氧化硅微球 101表 面携带负电荷。 具体地, 将所述二氧化硅微球 101放置于乙醇中, 形 成悬浮液; 在所述悬浮液中添加十二烷基 酸钠, 并对所述悬浮液进 行搅拌, 使表面活性剂与二氧化硅微球 101充分混合, 以在所述二氧 化硅微球 101表面形成负电荷。 本实施例中, 由于二氧化硅微球 101表面携带负电荷, 二氧化硅 微球 101之间会相互排斥,从而可以在形成抗反射膜时减小二氧化硅 敖球 101相互粘连的几率,进而可以避免粘连的二氧化硅 £球 101对 特定波长的反射, 以提高抗反射膜的适用范围。 如图 7中所示, 对二氧化硅微球 101进行表面处理, 使其携带同 性电荷之后, 二氧化硅微球 101之间均保持一定的间距。 本实施例中,所述十二烷基硫酸钠能使二氧化硅微球 101携带负 电荷的原因是, 十二烷基硫酸钠为一种长链结构, 其一端易与二氧化 硅微球 101表面相结合, 另一端携带负电荷。 在十二烷基硫酸钠与二 氧化硅微球 101充分结合后,十二烷基硫酸钠携带负电荷的一端会使 二氧化硅微球 101携带负电荷。 需要说明的是,如果十二烷基硫酸钠的浓度过低则无法起到使二 氧化硅敖球 101带负电的作用,如果浓度过高则容易在悬浮液中独立 形成胶束, 即所述十二烷基硫酸钠没有包覆在二氧化硅微球 101 表 面, 而是游离在悬浮液中。 因此, 优选地, 十二烷基硫酸钠的浓度在
0.5~10摩尔 /升的范围内。 需要说明的是, 本实施例中, 表面活性剂以十二烷基硫酸钠为例 进行说明, 但是本发明对此不做限制, 还可以是其他可以使二氧化硅 微球携带负电荷的表面活性剂, 例如: 二辛基琥珀酸磺酸钠、 十二烷 基苯磺酸钠或甘胆酸钠等等。 本实施例以使二氧化硅微球 101表面携带负电荷为例,但是本发 明对此不做限制, 在其他实施例中, 还可以使二氧化硅微球 101表面 携带正电荷。 如图 8所示, 采用一端易与二氧化硅微球 101表面相结 合, 另一端携带正电荷的表面活性剂, 可以使二氧化硅微球 101表面 形成正电荷,带正电荷的二氧化硅微球 101由于同性排斥的原因而保 持一定的间距。 具体地, 可以使二氧化硅微球 101表面携带正电荷的 表面活性剂包括十四烷基 -二曱基吡啶溴化铵、三十六基氯化铵或二 曱基二烯丙基氯化铵等等。 需要说明的是, 本实施例中, 使二氧化硅微球 101表面携带同性 电荷的方法以表面活性剂的方式为例, 但是本发明对此不做限制, 在 其他实施例中, 还可以通过其他方式(例如采用电解质进行表面处理 的方式)使二氧化硅微球 101携带电荷, 例如: 在悬浮液中加入电解 质聚丙烯氯化铵时, 可以使二氧化硅微球 101表面带正电荷; 或者, 在悬浮液中加入电解质苯乙烯磺酸钠,可以使二氧化硅微球 101表面 带负电荷。 本实施例在完成对所述二氧化硅微球 101 进行表面处理的步骤 之后, 还包括通过水对所述二氧化硅微球 101进行清洗, 以去除二氧 化硅微球 101上残留的物质。 执行步骤 S3 , 提供基底。 所述基底可以是玻璃、 金属或玻璃。 较佳地,在提供基底之后,还包括对所述基底进行清洗。具体地, 可以依次通过丙酮、异丙醇和去离子水对所述基底进行超声波震荡清 洗。
其中, 通过丙酮、 异丙醇可以去除基底上的油脂等杂质, 通过去 离子水清洗基底上残留的丙酮和异丙醇。采用超声波震荡清洗的方式 可以达到良好的清洗效果。 如图 9所示, 执行步骤 S4, 使所述携带同性电荷的透光材料微 球分散排布在基底 102上, 以形成抗反射膜 103。 所述抗反射膜 103中透光材料微球构成位于基底 102上的一个个 微突起, 所述微突起等效为蛾眼结构, 可以提高抗反射膜 103的减反 效果。 此外, 所述透光材料微球分散排布在基底 102上, 相互之间基 本没有粘连, 不会使特定波长的光发生反射, 进而提高抗反射膜 103 适用的波长范围。 具体地, 使所述携带同性电荷的透光材料微球形成涂膜溶液; 将 涂膜溶液涂覆在基底 102上, 形成抗反射膜。 例如, 可以通过旋涂、 喷涂、 浸渍或提拉涂膜等的工艺在基底 102上形成抗反射膜。 本发明 对形成抗反射膜 103的工艺不做限制。 需要说明的是, 优选地, 本实施例在将涂膜溶液涂覆在基底 102 上形成抗反射膜 103之后,还包括对所述抗反射膜 103进行加热处理 的步骤。 通过加热处理可以提高抗反射膜 103的稳定性。 本实施例中, 所述透光材料微球为二氧化硅微球 101 , 形成抗反 射膜 103的步骤包括:先使携带同性电荷二氧化硅微球 101分散于乙 醇中, 形成涂膜溶液; 之后, 通过旋涂方式在基底 102上涂覆包含所 述二氧化硅微球 101的薄膜; 最后, 对所述薄膜持续加热使薄膜中的 乙醇蒸发, 在基底 102上形成分散排布的二氧化硅微球 101 , 从而完 成抗反射膜 103的制备。 其中, 在加热过程中, 如果加热温度过低, 薄膜结合力以及强度 得不到提高, 而加热温度过高容易使二氧化硅微球 101以及基底 100 软化变形, 因此优选地, 加热温度位于 300 ~ 500 °C的范围内。 加热 过程中, 加热温度越高, 加热持续的时间越短, 如果加热温度越低,
则加热持续的时间越长, 对应于加热温度位于 300 ~ 500°C的情况, 加热持续的时间位于 2~12个小时的范围内。 本实施例中,二氧化硅微球 101表面携带负电荷, 二氧化硅微球 101之间相互排斥保持一定的间距。这样,在最后形成的抗反射膜 103 中,二氧化硅微球 101之间具有一定的空隙, 没有出现二氧化硅微球 101相互粘连的现象, 从而可以避免粘连的二氧化硅微球 101对特定 波长的反射,进而使所述抗反射膜 103在较宽波长范围内都能起到良 好的抗反射效果, 提高了抗反射膜 103的性能。 需要说明的是, 如果涂膜溶液中二氧化硅微球 101的浓度过低, 容易造成抗反射膜 103中的二氧化硅微球 101的间距过大,这会影响 抗反射膜 103的减反效果;如果二氧化硅微球 101形成的涂膜溶液的 浓度过高,那么抗反射膜 103中的二氧化硅微球 101表面的负电荷不 足以使其相互隔开, 从而容易使二氧化硅微球 101紧密排列, 而影响 抗反射膜 103适用的波长范围。 因此, 优选地, 所述涂膜溶液中二氧 化硅敖球 101的重量百分比位于 0.1~5 %的范围内。 还需要说明的是,旋涂工艺对抗反射膜 103的减反效果也有一定 影响:如果旋涂工艺中的转速过低,二氧化硅微球 101容易紧密排列; 如果旋涂工艺中的转速过高, 二氧化硅微球 101的间距容易过大, 从 而影响减反效果。 通常, 旋涂工艺中转速为每分钟 500 - 3000转。 优选地, 通过选择合适的涂膜溶液并结合合适的旋涂工艺参数The program will be further explained. Referring to Figures 6 through 9, a schematic diagram of an embodiment of the optical component manufacturing method of Figure 5 is shown. As shown in FIG. 6, step SI is performed to provide a light-transmitting material microsphere. In this embodiment, the light-transmitting material microspheres are provided by preparing the light-transmitting material microspheres. In other embodiments, the light-transmitting material microspheres may also be provided by purchasing the light-transmitting material microspheres. In this embodiment, the silica microspheres are taken as an example. In other embodiments, the light transmissive material may be other oxides. The method for preparing silica microspheres in this embodiment generally comprises the following steps: First, the orthosilicate is diluted with ethanol. Thereafter, the diluted tetraethyl orthosilicate was immersed in a mixed solution of ethanol and water. Specifically, a mixed solution of ethanol and water is placed in the container 100, and then the diluted orthosilicate is placed in the mixed solution in the container 100. Wherein the volume ratio of ethanol to water in the mixed solution is in the range of 8.5:1 to 9.5:1, the formed silica microspheres 101 can be made uniform in size and have a good anti-reflection effect. Subsequently, ammonia water is added to the mixed solution, and the ammonia water is used as a catalyst to set the pH of the mixed solution in the range of 7.8 to 8.2 to increase the reaction rate. In addition, the pH of the mixed solution is in the range of 7.8 to 8.2, and the formed silica microspheres 101 can be made uniform in size and have a good anti-reflection effect. Preferably, the pH of the mixed solution is 8. Finally, the mixed solution in the vessel 100 is continuously vigorously stirred to form a precipitate which is the silica microspheres 101. It should be noted that if the stirring time is too short, the solution is not complete enough, and if the stirring time is too long, the time of the whole process is easily increased. Preferably, the time of continuous agitation is in the range of 1.5 to 2.5 hours. After the completion of the stirring, the mixed solution was filtered, and the precipitate in the mixed solution was filtered off, that is, the silica microspheres 101 were filtered off. Further, in order to carry out the subsequent steps, the method further comprises: washing the silica microspheres 101 with water to remove residual solution on the silica microspheres 101. The preparation of the silicon dioxide microspheres 101 is thus completed. It should be noted that the method for preparing the silica microspheres further includes an emulsion method, a chemical vapor deposition method, etc., and the method for preparing the silica microspheres is not limited. As shown in FIG. 7, step S2 is performed to surface-treat the light-transmitting material microspheres so that the surface of the light-transmitting material microspheres carries a homogenous charge; in this embodiment, by including the light-transmitting material micro A charged surfactant is placed in the solution of the ball such that the surface of the light-transmitting material microspheres carries a homogenous charge. Specifically, the light-transmitting material sphere is silica spheroid 101, and the surface of the silica microsphere 101 can carry a negative charge by sodium dodecylsulfate (SDS). Specifically, the silica microspheres 101 are placed in ethanol to form a suspension; sodium dodecylate is added to the suspension, and the suspension is stirred to make a surfactant and two The silica microspheres 101 are thoroughly mixed to form a negative charge on the surface of the silica microspheres 101. In the present embodiment, since the surface of the silica microsphere 101 carries a negative electric charge, the silica microspheres 101 repel each other, so that the probability of adhesion of the silica microspheres 101 to each other can be reduced when the antireflection film is formed. Further, it is possible to avoid reflection of the adhered silica sphere 101 to a specific wavelength to improve the range of application of the antireflection film. As shown in Fig. 7, after the silica microspheres 101 are surface-treated to carry the same-charge, the silica microspheres 101 are maintained at a certain interval therebetween. In the present embodiment, the sodium dodecyl sulfate can cause the silica microspheres 101 to carry a negative charge because sodium lauryl sulfate is a long-chain structure, and one end thereof is easily associated with silica microspheres. The 101 surface is combined and the other end carries a negative charge. After sodium dodecyl sulfate is sufficiently combined with the silica microspheres 101, the negatively charged end of sodium lauryl sulfate causes the silica microspheres 101 to carry a negative charge. It should be noted that if the concentration of sodium lauryl sulfate is too low, the silica crucible 101 may not be negatively charged. If the concentration is too high, the micelles are easily formed in the suspension. Sodium lauryl sulfate is not coated on the surface of the silica microspheres 101, but is freed in the suspension. Therefore, preferably, the concentration of sodium lauryl sulfate is Within the range of 0.5 to 10 moles per liter. It should be noted that, in this embodiment, the surfactant is described by taking sodium lauryl sulfate as an example, but the invention is not limited thereto, and may be other surfaces which can make the silica microspheres carry a negative charge. The active agent, for example: sodium dioctylsuccinate, sodium dodecylbenzenesulfonate or sodium glycocholate, and the like. This embodiment is exemplified by carrying a negative charge on the surface of the silica microsphere 101. However, the present invention is not limited thereto. In other embodiments, the surface of the silica microsphere 101 may also carry a positive charge. As shown in Fig. 8, a surfactant which is easily combined with the surface of the silica microsphere 101 and which carries a positive charge at the other end can form a positively charged, positively charged silica on the surface of the silica microsphere 101. The microspheres 101 maintain a certain spacing due to homosexual repulsion. Specifically, a surfactant capable of imparting a positive charge to the surface of the silica microsphere 101 includes tetradecyl-dimercaptopyridine ammonium bromide, trihexadecyl ammonium chloride or dinonyl diallyl chloride. Ammonium and so on. It should be noted that, in this embodiment, the method of carrying the isotropic charge on the surface of the silica microsphere 101 is exemplified by the method of the surfactant, but the invention is not limited thereto, and in other embodiments, Other means (for example, a surface treatment using an electrolyte) allows the silica microspheres 101 to carry a charge, for example: when the electrolyte polypropylene ammonium chloride is added to the suspension, the surface of the silica microspheres 101 can be positively charged; Alternatively, the surface of the silica microspheres 101 may be negatively charged by adding an electrolyte sodium styrene sulfonate to the suspension. In the present embodiment, after the step of surface-treating the silica microspheres 101 is completed, the silica microspheres 101 are further washed by water to remove substances remaining on the silica microspheres 101. Step S3 is performed to provide a substrate. The substrate can be glass, metal or glass. Preferably, after the substrate is provided, the substrate is further cleaned. Specifically, the substrate may be subjected to ultrasonic shock cleaning by acetone, isopropyl alcohol, and deionized water in this order. Among them, impurities such as grease on the substrate can be removed by acetone or isopropyl alcohol, and acetone and isopropyl alcohol remaining on the substrate are washed by deionized water. Ultrasonic vibration cleaning can achieve good cleaning results. As shown in FIG. 9, step S4 is performed to disperse the isotropic charge-transmitting light-transmitting material microspheres on the substrate 102 to form the anti-reflection film 103. The light-transmitting material microspheres in the anti-reflection film 103 constitute one micro-protrusion on the substrate 102, and the micro-protrusions are equivalent to a moth-eye structure, and the anti-reflection effect of the anti-reflection film 103 can be improved. Further, the light-transmitting material microspheres are dispersedly arranged on the substrate 102 without substantially blocking each other, and do not reflect light of a specific wavelength, thereby increasing the wavelength range to which the anti-reflection film 103 is applied. Specifically, the isotropically charged light-transmitting material microspheres are formed into a coating solution; the coating solution is coated on the substrate 102 to form an anti-reflection film. For example, an anti-reflection film may be formed on the substrate 102 by a process such as spin coating, spray coating, dipping or pulling a coating film or the like. The present invention does not limit the process of forming the anti-reflection film 103. It is to be noted that, in the present embodiment, after the coating film solution is coated on the substrate 102 to form the anti-reflection film 103, the step of heat-treating the anti-reflection film 103 is further included. The stability of the anti-reflection film 103 can be improved by heat treatment. In this embodiment, the light-transmitting material microspheres are silica microspheres 101, and the step of forming the anti-reflection film 103 comprises: first dispersing the isotropically charged silica microspheres 101 in ethanol to form a coating film solution; Thereafter, a film comprising the silica microspheres 101 is coated on the substrate 102 by spin coating; finally, the film is continuously heated to evaporate the ethanol in the film to form a dispersed arrangement of the dioxide on the substrate 102. The silicon microspheres 101, thereby completing the preparation of the anti-reflection film 103. Wherein, in the heating process, if the heating temperature is too low, the film bonding force and strength are not improved, and if the heating temperature is too high, the silica microspheres 101 and the substrate 100 are softened and deformed, so preferably, the heating temperature is 300. ~ 500 °C range. During heating, the higher the heating temperature, the shorter the heating duration, if the heating temperature is lower, The longer the heating lasts, the more the heating temperature is between 300 and 500 ° C, and the heating duration is in the range of 2 to 12 hours. In this embodiment, the surface of the silica microspheres 101 carries a negative charge, and the silica microspheres 101 repel each other to maintain a certain distance. Thus, in the finally formed anti-reflection film 103, there is a certain gap between the silica microspheres 101, and there is no phenomenon in which the silica microspheres 101 adhere to each other, so that the adhered silica microspheres 101 can be avoided. The reflection of a specific wavelength further enables the anti-reflection film 103 to have a good anti-reflection effect over a wide wavelength range, improving the performance of the anti-reflection film 103. It should be noted that if the concentration of the silica microspheres 101 in the coating solution is too low, the spacing of the silica microspheres 101 in the antireflection film 103 is likely to be excessively large, which may affect the antireflection of the antireflection film 103. Effect; if the concentration of the coating solution formed by the silica microspheres 101 is too high, the negative charges on the surface of the silica microspheres 101 in the antireflection film 103 are insufficient to separate them from each other, thereby facilitating the silica The microspheres 101 are closely arranged to affect the wavelength range to which the anti-reflection film 103 is applied. Therefore, preferably, the weight percentage of the silica spheroids 101 in the coating solution is in the range of 0.1 to 5%. It should also be noted that the spin coating process also has an effect on the anti-reflection effect of the reflective film 103: if the rotational speed in the spin coating process is too low, the silica microspheres 101 are easily closely arranged; if the rotational speed in the spin coating process is too high The spacing of the silica microspheres 101 is likely to be too large, thereby affecting the effect of the suppression. Typically, the spin-on process rotates at 500 - 3000 rpm. Preferably, by selecting a suitable coating solution in combination with suitable spin coating process parameters
(例如结合考虑涂膜溶液的浓度和旋涂工艺中的旋转速度), 可以使 位于基底 102上的二氧化硅微球 101位于同一层,即抗反射膜 103为 单层微球结构, 这样的二氧化硅微球 101构成基底 102上的微突起, 等效为蛾眼结构, 具有良好的减反效果。 需要说明的是, 在上述实施例中, 以二氧化硅材料的微球为例进 行说明, 但是本发明并不限制于此, 还可以是其他透光材料微球, 例 如二氧化钛(Ti02 )、 氧化铝 (A1203 )、 氧化锆(Zr02 )等金属氧化
物。 在实际应用中, 与二氧化硅材料类似地, 可以先制备所述金属氧 化物微球;通过十二烷基硫酸钠等的表面活性剂或聚丙烯氯化铵等的 电解质使所述金属氧化物微球表面携带同性电荷;之后使所述携带同 性电荷的金属氧化物微球分散排布在所述基底上, 以形成抗反射膜。 所述抗反射膜中因不具有粘连金属氧化物微球,而可以适用于较宽的 波长范围。 还需要说明的是, 上述实施例中, 所述透光材料微球与基底直接 接触, 但是本发明对此不做限制, 在其他实施例中, 所述透光材料微 球还可以与基底不直接接触,只要所述透光材料微球在基底上方的一 层中分散排布即可。 本发明还提供另一种光学组件的制造方法, 所述制造方法包括: 提供基底; 在所述基底上形成至少一层抗反射膜, 所述抗反射膜包括 带电层以及在所述带电层上分散排布的、与所述带电层电性不同的透 光材料颗粒。 (For example, considering the concentration of the coating solution and the rotation speed in the spin coating process), the silica microspheres 101 on the substrate 102 can be located in the same layer, that is, the antireflection film 103 is a single layer microsphere structure. The silica microspheres 101 constitute microprojections on the substrate 102, which is equivalent to a moth eye structure, and has a good anti-reflection effect. In the above embodiment, the microspheres of the silica material are taken as an example, but the invention is not limited thereto, and other light-transmitting material microspheres such as titanium dioxide (Ti0 2 ) may be used. Oxidation of metals such as alumina (A1 2 0 3 ) and zirconia (Zr0 2 ) Things. In practical applications, the metal oxide microspheres may be prepared first, similarly to the silica material; the metal may be oxidized by a surfactant such as sodium lauryl sulfate or an electrolyte such as polypropylene ammonium chloride. The surface of the microspheres carries a homogenous charge; the metal oxide microspheres carrying the same charge are then dispersed on the substrate to form an antireflection film. The antireflection film can be applied to a wide wavelength range because it does not have blocking metal oxide microspheres. It should be noted that, in the above embodiment, the light-transmitting material microspheres are in direct contact with the substrate, but the invention is not limited thereto. In other embodiments, the light-transmitting material microspheres may not be combined with the substrate. Direct contact is provided as long as the light-transmitting material microspheres are dispersed in a layer above the substrate. The present invention also provides a method of fabricating another optical component, the manufacturing method comprising: providing a substrate; forming at least one anti-reflective film on the substrate, the anti-reflective film comprising a charged layer and on the charged layer Dispersing the light-transmitting material particles which are different from the charged layer.
参考图 10, 示出了本发明光学组件制造方法另一实施方式的流 程示意图, 所述制造方法大致包括以下步骤: Referring to Fig. 10, there is shown a schematic flow chart of another embodiment of the optical component manufacturing method of the present invention, which generally includes the following steps:
步骤 S11 , 提供基底; Step S11, providing a substrate;
步骤 S12, 形成带电层; 光材料微球; Step S12, forming a charged layer; a light material microsphere;
步骤 S14, 重复步骤 S12~S13。 In step S14, steps S12 to S13 are repeated.
图 10所示的实施方式中, 在基底上通过依次形成一层带电层、 一层透光材料微球、再一层带电层、再一层透光材料微球……以这样 层层堆叠(layer by layer ) 的方式形成位于基底上的抗反射膜, 用于 减小光的反射。 In the embodiment shown in FIG. 10, a layer of charged layer, a layer of light-transmitting material microspheres, another layer of charged material, and another layer of light-transmitting material microspheres are sequentially formed on the substrate. The layer by layer ) forms an anti-reflection film on the substrate for reducing the reflection of light.
本实施方式中 ,在所述带电层上分散排布与所述带电层电性不同 的透光材料微球, 因此所述透光材料微球与所述带电层相互吸引、便 于堆叠, 可以提高所形成的抗反射膜的牢固性。
而在堆叠每一层透光材料微球的过程中,可以控制透光材料微球 的粒径、 材料、 同层颗粒的分布等工艺参数, 还可以控制透光材料微 球的总层数, 以使形成的抗反射膜具有更好的减反效果。 本实施方式 通过 layer by layer的方式形成抗反射膜,使其制造过程具有更好的可 控性, 本实施方式形成的抗反射膜的结构具有可控性。 In this embodiment, the light-transmitting material microspheres having different electrical properties from the charged layer are dispersedly disposed on the charged layer, so that the light-transmitting material microspheres and the charged layer are attracted to each other for stacking, which can be improved. The firmness of the formed antireflective film. In the process of stacking each layer of the light-transmitting material microspheres, the process parameters such as the particle size of the light-transmitting material microspheres, the distribution of the materials, the distribution of the same layer of particles, and the like, and the total number of layers of the light-transmitting material microspheres can be controlled. In order to make the formed anti-reflection film have a better anti-reflection effect. In the embodiment, the anti-reflection film is formed by a layer by layer, so that the manufacturing process has better controllability, and the structure of the anti-reflection film formed by the embodiment has controllability.
需要说明的是,在本发明其他实施方式中还可以不执行步骤 S14, 这样只在基底上形成一层抗反射膜,本发明对光学组件中抗反射膜的 数量不做限制。 It should be noted that, in other embodiments of the present invention, step S14 may not be performed, so that only one anti-reflection film is formed on the substrate, and the present invention does not limit the number of anti-reflection films in the optical component.
参考图 11至图 14示出了图 10所示光学组件制造方法一实施例 的示意图。 A schematic view of an embodiment of the optical component manufacturing method shown in Fig. 10 is shown with reference to Figs.
如图 11所示, 执行步骤 S11 , 提供基底 200。 本实施例中, 所述 基底 200的材料为玻璃,但是本发明对此不做限制,在其他实施例中, 所述基底 200的材料还可以是塑料,本发明对基底 200的材料不做限 制。 As shown in FIG. 11, step S11 is performed to provide the substrate 200. In this embodiment, the material of the substrate 200 is glass, but the invention is not limited thereto. In other embodiments, the material of the substrate 200 may also be plastic. The invention does not limit the material of the substrate 200. .
如图 12所示,执行步骤 S12,在所述基底 200上形成带电层 202。 本实施例中, 所述带电层 202由电解质或带电颗粒形成。 As shown in FIG. 12, step S12 is performed to form a charging layer 202 on the substrate 200. In this embodiment, the charged layer 202 is formed of an electrolyte or charged particles.
具体地,可以通过浸渍的涂膜工艺在所述基底 200上形成带电层 202。 例如, 提供电解质溶液 203 , 使基底 200垂直浸入至所述电解 质溶液 203并浸没一段时间, 之后将基底 200从所述电解质溶液 203 中取出,在基底 200的两个表面上形成一层电解质溶液 203所形成的 带电层 202。 Specifically, the charged layer 202 may be formed on the substrate 200 by an impregnated coating process. For example, the electrolyte solution 203 is provided such that the substrate 200 is vertically immersed into the electrolyte solution 203 and immersed for a while, after which the substrate 200 is taken out from the electrolyte solution 203, and an electrolyte solution 203 is formed on both surfaces of the substrate 200. The charged layer 202 is formed.
本实施例中, 以带有正电荷的带电层 202为例。 所述电解质溶液 203为可形成正电荷的聚丙烯氯化铵。将玻璃浸入至聚丙烯氯化铵中, 并持续 10~20分钟,之后将玻璃取出, 以在玻璃的两个表面上形成带 有正电荷的带电层 202。 In the present embodiment, the charged layer 202 with a positive charge is taken as an example. The electrolyte solution 203 is a polypropylene ammonium chloride which can form a positive charge. The glass was immersed in polypropylene ammonium chloride for 10 to 20 minutes, after which the glass was taken out to form a positively charged charged layer 202 on both surfaces of the glass.
较佳地, 在将基底 200浸入至电解质溶液 203之前, 还包括调节 所述电解质溶液 203PH值的步骤,通过调节 PH值, 可以增加电解质 溶液 203的带电量,以使后续形成的带电层 202更好地吸附透光材料
微球。 Preferably, before the substrate 200 is immersed in the electrolyte solution 203, the step of adjusting the pH of the electrolyte solution 203 is further included. By adjusting the pH value, the charge amount of the electrolyte solution 203 can be increased to make the subsequently formed charged layer 202 more Goodly absorb light-transmitting materials Microspheres.
本实施例中,通过向聚丙烯氯化铵中加入盐酸等的酸性溶液或氢 氧化钠等的碱性溶液,以使聚丙烯氯化铵的 PH值位于 7~8的范围内, 以增加聚丙烯氯化铵中正电荷的电量。 In the present embodiment, an acidic solution such as hydrochloric acid or an alkaline solution such as sodium hydroxide is added to the polypropylene ammonium chloride so that the pH of the polyacrylic ammonium chloride is in the range of 7 to 8 to increase the aggregation. The amount of positive charge in propylene chloride.
如图 13所示, 执行步骤 S13 , 在所述带电层 202上分散排布与 所述带电层 202电性不同的透光材料微球 204。 As shown in FIG. 13, step S13 is performed to disperse the light-transmitting material microspheres 204 electrically different from the charging layer 202 on the charging layer 202.
本实施例中, 所述透光材料微球 204 为带负电荷的二氧化硅颗 粒。 在带电层 202上分散设置所述透光材料微球 204之前, 还包括以 下步骤: In this embodiment, the light transmissive material microspheres 204 are negatively charged silica particles. Before the light transmissive material microspheres 204 are disposed on the charged layer 202, the following steps are further included:
提供透光材料微球 204; Providing a light transmissive material microsphere 204;
通过酸性或碱性溶液调节所述透光材料微球 204的 PH值, 以增 加电量。 The PH value of the light transmissive material microspheres 204 is adjusted by an acidic or alkaline solution to increase the amount of electricity.
本实施例中,所述提供透光材料微球的步骤可以是制备二氧化硅 颗粒或者购买二氧化硅颗粒。 其中, 制备二氧化硅颗粒的方法包括乳 液法、化学气相沉积法等, 本发明对二氧化硅颗粒的制备方法不做限 制。 In this embodiment, the step of providing the light-transmitting material microspheres may be to prepare silica particles or to purchase silica particles. Among them, the method for preparing the silica particles includes an emulsion method, a chemical vapor deposition method, and the like, and the method for producing the silica particles is not limited in the present invention.
优选地, 所述二氧化硅颗粒的粒径位于 5~10nm的范围内。 纳米 量级的二氧化硅颗粒使后续形成的抗反射膜具有较 d、的孔隙率,同时 还可以提高孔隙分布的均匀性。 Preferably, the particle diameter of the silica particles is in the range of 5 to 10 nm. The nanometer-sized silica particles make the subsequently formed antireflection film have a porosity of d, and at the same time, the uniformity of the pore distribution can be improved.
此外,在带电层 202上分散设置所述透光材料微球 204的步骤之 前, 还包括: 通过水对所述二氧化硅颗粒进行清洗, 以去除二氧化硅 颗粒的残余溶液。 Further, before the step of dispersing the light-transmitting material microspheres 204 on the charging layer 202, the method further comprises: washing the silica particles by water to remove a residual solution of the silica particles.
在提供透光材料微球 204之后, 还包括调节所述透光材料微球 204的 PH值的步骤。 调节所述透光材料微球 204的 PH值可以增加 透光材料微球 204的带电量,以使透光材料微球 204更好地吸附后续 形成的带电层 202, 提高薄膜质量。 After the light transmissive material microspheres 204 are provided, the step of adjusting the PH value of the light transmissive material microspheres 204 is also included. Adjusting the PH value of the light-transmitting material microspheres 204 can increase the charge amount of the light-transmitting material microspheres 204, so that the light-transmitting material microspheres 204 can better adsorb the subsequently formed charged layer 202, thereby improving the film quality.
以透光材料敖球 204为二氧化硅颗粒为例,如果二氧化硅颗粒处 于碱性环境中, 二氧化硅颗粒表面带的负电荷电量越大。 具体地, 在
提供二氧化硅颗粒之后,可通过向包含有二氧化硅颗粒的胶状溶液中 加入氢氧化钠或氨水等的碱性溶液, 以使二氧化硅颗粒的 PH值位于 8.5-9.5的范围内, 以增加二氧化硅颗粒表面负电荷的电量。 Taking the light-transmitting material spheroid 204 as the silica particle as an example, if the silica particles are in an alkaline environment, the negative charge of the surface of the silica particle is larger. Specifically, in After the silica particles are provided, an alkaline solution such as sodium hydroxide or ammonia water may be added to the colloidal solution containing the silica particles so that the pH of the silica particles is in the range of 8.5 to 9.5. To increase the amount of negative charge on the surface of the silica particles.
本实施例中,在带电层 202上分散设置所述透光材料微球 204的 步骤包括:通过浸渍涂膜工艺在带电层 202上分散设置所述透光材料 微球 204。 所述带电层 202和所述透光材料微球 204组成抗反射层 201。 In this embodiment, the step of dispersing the light-transmitting material microspheres 204 on the charging layer 202 includes dispersing the light-transmitting material microspheres 204 on the charging layer 202 by a dip coating process. The charged layer 202 and the light transmissive material microspheres 204 constitute an antireflection layer 201.
以带电层 202由聚丙烯氯化铵形成,透光材料微球 204为二氧化 硅颗粒为例, 具体地, 形成抗反射层 201的具体工艺步骤包括: 在将 基底 200浸没至带正电荷的聚丙烯氯化铵溶液中持续 10~20分钟,形 成带电层 202; 并将涂覆有聚丙烯氯化铵的基底浸入至去离子水中, 持续 1~5分钟, 以去除残留溶液之后, 在烧杯中放置包含有二氧化硅 颗粒的胶状溶液,使涂覆有聚丙烯氯化铵的基底 200垂直浸入至所述 烧杯中并浸没 10~20分钟, 之后将基底 200从烧杯中取出, 在基底 200两个表面的带电层 202上粘附二氧化硅颗粒, 从而形成一层抗反 射层 201。 其中, 将涂覆有聚丙烯氯化铵的基底浸入至去离子水中, 持续 1~5分钟的步骤可以去除带电层 202上的残留溶液,进而使带电 层 202更好地吸附透光材料微球 204。 For example, the charged layer 202 is formed of polypropylene ammonium chloride, and the light-transmitting material microspheres 204 are silica particles. Specifically, the specific process steps of forming the anti-reflective layer 201 include: immersing the substrate 200 to a positively charged The polypropylene ammonium chloride solution is continued for 10-20 minutes to form a charged layer 202; and the substrate coated with polypropylene ammonium chloride is immersed in deionized water for 1 to 5 minutes to remove the residual solution after the beaker A colloidal solution containing silica particles is placed therein, and the substrate 200 coated with polypropylene ammonium chloride is vertically immersed in the beaker and immersed for 10-20 minutes, after which the substrate 200 is taken out from the beaker at the substrate. Silica particles are adhered to the charged layer 202 of the two surfaces 200 to form an antireflection layer 201. Wherein, the substrate coated with polypropylene ammonium chloride is immersed in deionized water for a period of 1 to 5 minutes to remove the residual solution on the charged layer 202, thereby allowing the charged layer 202 to better absorb the light-transmitting material microspheres. 204.
本实施例中,由于聚丙烯氯化铵带有正电荷而二氧化硅颗粒带有 负电荷,所述聚丙烯氯化铵可以与所述二氧化硅颗粒较紧密的粘附在 一起, 提高了光学组件上抗反射膜的薄膜质量。 In this embodiment, since the polypropylene ammonium chloride has a positive charge and the silica particles have a negative charge, the polypropylene ammonium chloride can adhere to the silica particles relatively tightly, thereby improving The film quality of the antireflective film on the optical component.
需要说明的是, 浸渍涂膜工艺形成抗反射层 201的过程中, 如果 浸没的时间过短容易造成反应不够完全, 而如果浸没的时间过长, 容 所述透光材料微球 204的材料, 选择合适的浸没时间。 It should be noted that, in the process of forming the anti-reflection layer 201 by the dip coating process, if the immersion time is too short, the reaction is not complete enough, and if the immersion time is too long, the material of the light-transmitting material microsphere 204 is accommodated. Choose the right immersion time.
如图 14所示, 执行步骤 S14, 重复步骤执行 S12和 S13 , 在基底 200上形成多层由带电层 202和透光材料微球 204构成的抗反射层 201。 As shown in Fig. 14, step S14 is performed, and steps S12 and S13 are repeated to form a plurality of anti-reflection layers 201 composed of a charged layer 202 and light-transmitting material microspheres 204 on the substrate 200.
具体地, 在先前形成的透光材料微球 204 (例如负电荷的二氧化
硅颗粒 )上再涂覆一层带电层 202 (例如正电荷的聚丙烯氯化铵 )时, 由于带电层 202与透光材料微球 204的电性不同, 新涂覆的带电层 202可以吸附于所述透光材料微球 204上。 就这样, 带电层 202和透 光材料微球 204之间相互吸引,可以形成粘附性较好的多层抗反射层 201 , 进而形成机械强度较好的光学组件。 Specifically, the previously formed light transmissive material microspheres 204 (eg, negatively charged dioxide) When the silicon layer is coated with a charged layer 202 (for example, a positively charged polypropylene ammonium chloride), the newly coated charged layer 202 can be adsorbed due to the difference in electrical properties of the charged layer 202 and the light transmissive material microspheres 204. On the light transmissive material microspheres 204. In this way, the charged layer 202 and the light-transmitting material microspheres 204 are attracted to each other, and the multilayer anti-reflection layer 201 having good adhesion can be formed, thereby forming an optical component having better mechanical strength.
所述多层抗反射层 201组成位于基底 200上的抗反射膜 205。 本 实施例中, 由于基底 200为玻璃, 其折射率为 1.5 , 而空气的折射率 为 1。 因此为了实现折射率匹配, 所述抗反射膜 205的折射率最好位 于 1.2~1.24的范围内。 The multilayer anti-reflective layer 201 constitutes an anti-reflection film 205 on the substrate 200. In the present embodiment, since the substrate 200 is glass, its refractive index is 1.5 and the refractive index of air is 1. Therefore, in order to achieve index matching, the refractive index of the anti-reflection film 205 is preferably in the range of 1.2 to 1.24.
本实施例中所述二氧化硅颗粒的折射率为 1.5 , 二氧化硅颗粒之 间的空隙折射率为 1 , 通过调节所述抗反射膜 205的孔隙率, 可以使 所述抗反射膜 205的折射率位于 1.2~1.24的范围内。 In the embodiment, the refractive index of the silica particles is 1.5, and the refractive index of the voids between the silica particles is 1. By adjusting the porosity of the anti-reflection film 205, the anti-reflection film 205 can be made. The refractive index is in the range of 1.2 to 1.24.
较佳地, 在形成由多层抗反射层 201组成的抗反射膜 205之后, 本实施例还包括对所述光学组件进行加热处理,以增加基底 200上抗 反射膜 205的牢固性。 Preferably, after forming the anti-reflection film 205 composed of the multilayer anti-reflection layer 201, the embodiment further includes heat-treating the optical component to increase the robustness of the anti-reflection film 205 on the substrate 200.
具体地, 在加热过程中, 如果加热温度过低, 各抗反射层 201的 结合力以及强度得不到提高, 而加热温度过高容易使透光材料微球 204颗粒以及基底 200软化变形, 因此优选地, 加热温度位于 300 ~ 500°C的范围内。 加热过程中, 加热温度越高, 加热持续的时间越短, 如果加热温度越低, 则加热持续的时间越长, 对应于加热温度位于 300 ~ 500 °C的情况, 加热持续位于 30~130分钟的范围内。 Specifically, in the heating process, if the heating temperature is too low, the bonding strength and strength of each anti-reflective layer 201 are not improved, and if the heating temperature is too high, the particles of the transparent material microspheres 204 and the substrate 200 are softened and deformed. Preferably, the heating temperature is in the range of 300 to 500 °C. During heating, the higher the heating temperature, the shorter the heating duration. If the heating temperature is lower, the longer the heating lasts, the heating is continued for 30~130 minutes corresponding to the heating temperature at 300 ~ 500 °C. In the range.
本实施例通过 layer by layer的方式形成所述抗反射膜 205。 在堆 叠每一层透光材料微球 204 的过程中, 可以控制透光材料微球的材 料、 粒径、 同层透光材料微球的分布等参数, 以使抗反射膜 205的折 射率位于 1.2~1.24的范围内, 本实施例的制造过程具有可控性, 并且 可以使形成的抗反射膜 205具有良好的减反效果。 The present embodiment forms the anti-reflection film 205 by means of a layer by layer. In the process of stacking each layer of the light-transmitting material microspheres 204, parameters such as the material of the light-transmitting material microspheres, the particle diameter, the distribution of the same-layer light-transmitting material microspheres, and the like may be controlled so that the refractive index of the anti-reflection film 205 is located. In the range of 1.2 to 1.24, the manufacturing process of the present embodiment has controllability, and the formed anti-reflection film 205 can have a good anti-reflection effect.
需要说明的是, 在上述实施方式中, 通过浸渍涂膜工艺在基底上 形成带电层 202、 在带电层上设置透光材料微球 204, 以形成抗反射 层 201。但是本发明对此不做限制,在其他实施例中还可以通过旋涂、
喷涂、 提拉等的工艺形成所述抗反射层 201。 其中, 喷涂工艺可以缩 短工艺时间, 提高制造效率。 It should be noted that, in the above embodiment, the charged layer 202 is formed on the substrate by the dip coating process, and the light transmitting material microspheres 204 are disposed on the charged layer to form the antireflection layer 201. However, the invention is not limited thereto, and in other embodiments, it can also be spin-coated, The anti-reflection layer 201 is formed by a process of spraying, pulling, or the like. Among them, the spraying process can shorten the process time and improve the manufacturing efficiency.
需要说明的是, 本发明通过 layer by layer的方式形成抗反射膜 205 , 每一层带电层 202或每一层透光材料微球 204均具有较小的厚 度(基本等于透光材料微球的直径)。 通过增加透光材料微球 204的 层数可以精确控制抗反射膜的厚度。 It should be noted that the present invention forms the anti-reflection film 205 by means of a layer by layer, and each layer of the electrification layer 202 or each layer of the light-transmitting material microspheres 204 has a small thickness (substantially equal to that of the light-transmitting material microspheres). diameter). The thickness of the anti-reflection film can be precisely controlled by increasing the number of layers of the light-transmitting material microspheres 204.
需要说明的是, 在上述实施例中, 以带负电的二氧化硅颗粒为例 进行说明, 但是本发明对透光材料微球的材料不做限制。 在其他实施 例中, 所述透光材料可以是二氧化钛(Ti02 )、 氧化铝 (A1203 )、 氧 化锆(Zr02 )等的氧化物。 It should be noted that, in the above embodiment, the negatively charged silica particles are exemplified, but the material of the light-transmitting material microspheres is not limited in the present invention. In other embodiments, the light transmissive material may be an oxide of titanium dioxide (Ti0 2 ), aluminum oxide (Al 2 2 3 3 ), zirconium oxide (ZrO 2 ), or the like.
还需要说明的是,上述实施例以带正电的电解质和带负电的透光 材料微球进行说明,但是本发明对此不做限制。以二氧化钛颗粒为例, 二氧化钛颗粒通常带正电荷, 可以采用带负电荷的电解质形成带电 层, 与所述二氧化钛颗粒形成抗反射膜。 或者, 还可以采用 PH值调 整或者表面活性剂等的表面处理方法使二氧化钛颗粒带负电荷, 这 样,带负电的二氧化钛颗粒还可以与带正电的聚丙烯氯化铵相配合形 成抗反射膜。 本发明中, 只要所述带电层和所述透光材料微球所带的 电荷电性不同即可。 It is to be noted that the above embodiment has been described with a positively charged electrolyte and a negatively charged light-transmitting material microsphere, but the invention is not limited thereto. Taking titanium dioxide particles as an example, the titanium dioxide particles are usually positively charged, and a negatively charged electrolyte can be used to form a charged layer to form an antireflection film with the titanium dioxide particles. Alternatively, the titanium oxide particles may be negatively charged by a surface treatment such as pH adjustment or a surfactant, so that the negatively charged titanium oxide particles may also be combined with the positively charged polypropylene ammonium chloride to form an antireflection film. In the present invention, the charged layer and the light-transmitting material microspheres may have different charge electrical properties.
参考图 15至图 16, 示出了图 10所示光学组件制造方法另一实 施例的示意图。本实施例与图 11至图 14所示实施例的相同之处不再 赘述, 不同之处在于: Referring to Figures 15 through 16, a schematic view of another embodiment of the optical component manufacturing method of Figure 10 is shown. The same points of the embodiment as those of the embodiment shown in FIG. 11 to FIG. 14 are not described again, and the difference lies in:
如图 15所示, 执行步骤 S12, 在基底 300上形成带电层 302; 本 实施例中, 所述带电层 302由带电颗粒形成。 As shown in FIG. 15, step S12 is performed to form a charging layer 302 on the substrate 300. In the embodiment, the charging layer 302 is formed of charged particles.
具体地,所述带电层 302由带正电荷的二氧化钛颗粒 303形成(二 氧化钛颗粒 303通常带正电荷)。 可以通过浸渍涂膜工艺在基底 300 上形成所述二氧化钛颗粒 303。 例如, 在烧杯中放置包含有二氧化钛 颗粒 303的胶状溶液 底 300垂直浸入至所述烧杯中并持续 15~20 分钟, 之后将基底 300从烧杯中取出, 在基底 300两个表面上粘附二 氧化钛颗粒 303。 所述二氧化钛颗粒 303带正电荷, 用于吸附后续形
成的带负电的透光材料微球。 Specifically, the charged layer 302 is formed of positively charged titanium dioxide particles 303 (the titanium dioxide particles 303 are generally positively charged). The titanium oxide particles 303 may be formed on the substrate 300 by a dip coating process. For example, a colloidal solution bottom 300 containing titanium dioxide particles 303 is placed in a beaker and vertically immersed in the beaker for 15 to 20 minutes, after which the substrate 300 is taken out of the beaker, and titanium dioxide is adhered to both surfaces of the substrate 300. Particle 303. The titanium dioxide particles 303 have a positive charge and are used for adsorption subsequent forms. A negatively charged light-transmitting material microsphere.
如图 16所示, 执行步骤 S13和步骤 S14, 通过 layer by layer的 方式在形成有所述带电层 302的基底上分散排布二氧化硅颗粒 304, 再在二氧化硅颗粒 304上形成由二氧化钛颗粒 303形成的带电层 302 , 再在所述带电层 302上分散排布二氧化硅颗粒 304……所述二氧化钛 颗粒 303形成的带电层 302和二氧化硅颗粒 304构成抗反射膜 301 , 多层抗反射膜 301组成位于基底 300上的抗反射膜 305。 As shown in FIG. 16, step S13 and step S14 are performed to disperse the silicon dioxide particles 304 on the substrate on which the charged layer 302 is formed by means of a layer by layer, and then form titanium dioxide on the silicon oxide particles 304. The charged layer 302 formed by the particles 303 is further dispersed on the charged layer 302. The charged layer 302 and the silicon dioxide particles 304 formed by the titanium dioxide particles 303 constitute an anti-reflection film 301, and a plurality of layers. The anti-reflection film 301 constitutes an anti-reflection film 305 on the substrate 300.
本实施例与图 11至图 14所示实施例的不同之处在于: 以带正电 荷的二氧化钛颗粒 303 替换带正电荷的电解质。 由于二氧化钛颗粒 303的折射率为 1.8, 二氧化硅颗粒 304的折射率为 1.5 , 可以调节二 氧化钛颗粒 303、 二氧化硅颗粒 304的孔隙率, 以使最终形成的抗反 射膜 305满足折射率匹配的条件。 This embodiment differs from the embodiment shown in Figs. 11 to 14 in that the positively charged electrolyte is replaced by the positively charged titanium oxide particles 303. Since the refractive index of the titanium dioxide particles 303 is 1.8 and the refractive index of the silica particles 304 is 1.5, the porosity of the titanium dioxide particles 303 and the silicon oxide particles 304 can be adjusted so that the finally formed anti-reflection film 305 satisfies the refractive index matching. condition.
为了提高光学组件中抗反射膜的机械强度,本发明还提供一种光 学组件的制造方法, 所述制造方法在提供基底之后, 形成抗反射膜的 步骤之前, 还包括: 在基底表面上形成预备层, 使所述预备层与基底 相接触的一面带有与所述基底表面不同电性的电荷,且使所述预备层 与所述抗反射膜相接触的一面带有与所述抗反射膜的接触面不同电 性的电荷。 In order to improve the mechanical strength of the anti-reflection film in the optical component, the present invention also provides a method of manufacturing an optical component, which further comprises: forming a preliminary surface on the surface of the substrate before the step of forming the anti-reflection film after providing the substrate a layer having a surface in contact with the substrate with a charge different from the surface of the substrate, and a side of the preliminary layer in contact with the anti-reflection film with the anti-reflection film The contact surface has different electrical charges.
预备层与基底的相接触的面分别带有不同电性的电荷;所述预备 层与抗反射膜的相接触的面分别带有不同电性的电荷;基于异性电荷 相吸的原理, 所述预备层与基底、 所述预备层与抗反射膜之间均有较 大的吸力, 从而提高了所述基底和抗反射膜之间的结合力, 进而提高 了光学组件的机械强度。 The faces of the preliminary layer contacting the substrate respectively have different electrical charges; the faces of the preliminary layer in contact with the anti-reflection film respectively have different electrical charges; based on the principle of heterogeneous charge attraction, The preliminary layer and the substrate, the preliminary layer and the anti-reflective film have a large suction force, thereby improving the bonding force between the substrate and the anti-reflection film, thereby improving the mechanical strength of the optical component.
参考图 17, 示出了本发明光学组件的制造方法再一实施方式的 流程示意图, 所述制造方法大致包括以下步骤: Referring to Fig. 17, there is shown a flow chart showing still another embodiment of the manufacturing method of the optical module of the present invention, which generally includes the following steps:
步骤 S21 , 提供基底; Step S21, providing a substrate;
步骤 S22, 在基底表面上形成预备层, 使所述预备层与基底相接 触的一面带有与所述基底表面不同电性的电荷;
步骤 S23 , 在预备层表面上形成抗反射膜, 使所述抗反射膜与所 述预备层相接触的一面带有与所述预备层表面不同电性的电荷。 Step S22, forming a preliminary layer on the surface of the substrate, such that the side of the preliminary layer in contact with the substrate has a charge different from the surface of the substrate; Step S23, forming an anti-reflection film on the surface of the preliminary layer, and a side of the anti-reflection film contacting the preliminary layer has a charge different from that of the surface of the preliminary layer.
参考图 18至图 20是图 17所示光学组件的制造方法一实施例的 示意图。 18 to 20 are schematic views of an embodiment of a method of manufacturing the optical component shown in Fig. 17.
如图 18所示, 执行步骤 S21 , 提供基底 400。 所述基底 400的材 料可以是玻璃或塑料。 但是本发明对基底 400的材料不做限制。 As shown in FIG. 18, step S21 is performed to provide the substrate 400. The material of the substrate 400 may be glass or plastic. However, the present invention does not limit the material of the substrate 400.
如图 19所示, 执行步骤 S22, 在基底 400上形成预备层 403 , 使 所述预备层 403与基底 400相接触的一面带有与所述基底 400表面电 性不同的电荷。 As shown in FIG. 19, step S22 is performed to form a preliminary layer 403 on the substrate 400 such that the side of the preliminary layer 403 in contact with the substrate 400 has a charge different from the surface of the substrate 400.
实际应用中, 可以通过旋涂、 喷涂、 浸渍或提拉的涂膜工艺在基 底 400上形成所述预备层 403。 In a practical application, the preliminary layer 403 may be formed on the substrate 400 by a spin coating, spraying, dipping or pulling coating process.
所述预备层 403可以是单层的电性层。所述预备层 403还可以由 多层电性层构成, 具体地, 在基底 400上依次一层一层地堆叠(layer by layer ) 电性层, 以形成所述多层结构的预备层 403。 The preliminary layer 403 can be a single layer of electrical layer. The preliminary layer 403 may also be composed of a plurality of electrical layers. Specifically, a layer is layered on the substrate 400 in layers to form a preliminary layer 403 of the multilayer structure.
具体地, 形成预备层 403的步骤包括: 在基底 400上交替堆叠第 一电性层 4031、 第二电性层 4032, 所述第一电性层 4031和第二电性 层 4032所带电荷电性不同。 由于异性相吸, 所述第一电性层 4031和 第二电性层 4032可以紧密贴合在一起, 可以提高预备层 403的耐磨 性。 Specifically, the step of forming the preliminary layer 403 includes: alternately stacking the first electrical layer 4031 and the second electrical layer 4032 on the substrate 400, and the first electrical layer 4031 and the second electrical layer 4032 are electrically charged. Different sex. Due to the attraction of the opposite sex, the first electrical layer 4031 and the second electrical layer 4032 can be closely attached together, and the wear resistance of the preliminary layer 403 can be improved.
具体地,所述第一电性层 4031和第二电性层 4032的材料可以是 诸如带负电荷的聚苯乙烯磺酸钠、 带正电荷的聚丙烯氯化铵等电解 质。 Specifically, the material of the first electrical layer 4031 and the second electrical layer 4032 may be an electrolyte such as a negatively charged sodium polystyrene sulfonate or a positively charged polypropylene ammonium chloride.
本实施例以所述基底 400的材料是玻璃为例,通常玻璃表面带有 负电荷, 所述预备层 403与所述玻璃相接触的面带正电荷, 所述第一 电性层 4031由带正电荷的聚丙烯氯化铵构成, 所述第二电性层 4032 由带负电荷的聚苯乙烯磺酸钠构成, 形成预备层 403的步骤包括: 提供浓度为 0.05~0.15摩尔 /升, PH值为 3~5的聚丙烯氯化铵溶 液, PH值为 3~5的聚丙烯氯化铵带有正电荷;
提供浓度为 0.05~0.15摩尔 /升, PH值为 3~5的聚苯乙烯磺酸钠 溶液, PH值为 3~5的聚苯乙婦磺酸钠带有负电荷; In this embodiment, the material of the substrate 400 is glass. Generally, the surface of the glass is negatively charged. The surface of the preliminary layer 403 that is in contact with the glass is positively charged. The first electrical layer 4031 is provided by a strip. A positively charged polypropylene ammonium chloride, the second electrical layer 4032 is composed of a negatively charged sodium polystyrene sulfonate, and the step of forming the preliminary layer 403 comprises: providing a concentration of 0.05 to 0.15 moles per liter, PH a polypropylene ammonium chloride solution having a value of 3 to 5, and a polypropylene chloride having a pH of 3 to 5 having a positive charge; Providing a sodium polystyrene sulfonate solution having a concentration of 0.05 to 0.15 mol/L and a pH of 3 to 5, and a polyphenylene sulfonate having a pH of 3 to 5 has a negative charge;
通过提拉涂膜工艺在玻璃上先涂覆带正电荷的聚丙烯氯化铵、之 后再涂覆所述带负电荷的聚苯乙烯磺酸钠、再涂覆带正电荷的聚丙烯 氯化铵 ... ...这样交替涂覆所述聚丙烯氯化铵、 所述聚苯乙烯磺酸钠, 以形成预备层 403。 The positively charged polypropylene ammonium chloride is first coated on the glass by a lift coating process, followed by coating the negatively charged sodium polystyrene sulfonate, and then coating the positively charged polypropylene to chlorinate. Ammonium... The polypropylene ammonium chloride, the sodium polystyrene sulfonate is alternately coated in this manner to form a preliminary layer 403.
具体地, 本实施例中, 通过五次提拉涂膜工艺, 在基底 400上形 成五层电性层,为依次位于玻璃上的聚丙烯氯化铵构成的第一电性层 4031、 聚苯乙婦磺酸钠构成的第二电性层 4032、 聚丙烯氯化铵构成 的第一电性层 4031、 聚苯乙烯磺酸钠构成的第二电性层 4032、 聚丙 烯氯化铵构成的第一电性层 4031。 因此, 本实施例中, 位于带负电 荷的玻璃表面的为带正电荷的聚丙烯氯化铵, 可以吸附于所述玻璃 上, 同时, 最终位于预备层 403表面的为聚丙烯氯化铵形成的第一电 性层 4031 , 从而使所述预备层 403表面带有正电荷。 Specifically, in this embodiment, a five-layer electrical layer is formed on the substrate 400 by five times of pulling coating process, and the first electrical layer 4031 and polyphenylene are formed of polypropylene ammonium chloride sequentially on the glass. a second electrical layer 4032 composed of sodium sulfosyl sulfate, a first electrical layer 4031 composed of polypropylene ammonium chloride, a second electrical layer 4032 composed of sodium polystyrene sulfonate, and a polyammonium chloride The first electrical layer 4031. Therefore, in this embodiment, the positively charged polypropylene ammonium chloride on the surface of the negatively charged glass can be adsorbed on the glass, and at the same time, the surface of the preliminary layer 403 is formed of polypropylene ammonium chloride. The first electrical layer 4031 is such that the surface of the preliminary layer 403 is positively charged.
如图 20所示,执行步骤 S23 ,在预备层 403上形成抗反射膜 405 , 所述抗反射膜 405与所述预备层 403 的相接触面带有电性不同的电 荷,因此所述抗反射膜 405可以被所述预备层 403吸附于基底 200上, 从而提高抗反射膜 405的机械强度。 As shown in FIG. 20, step S23 is performed to form an anti-reflection film 405 on the preliminary layer 403, and the contact surface of the anti-reflection film 405 and the preliminary layer 403 are electrically charged differently, so the anti-reflection The film 405 can be adsorbed on the substrate 200 by the preliminary layer 403, thereby improving the mechanical strength of the anti-reflection film 405.
本实施例可以按照与本发明图 11至图 14所示实施例或图 15至 图 16所示实施例形成抗反射膜的步骤,通过层层堆叠( layer by layer ) 的方法形成所述抗反射膜 405。 This embodiment can form the anti-reflection by a layer layer method according to the steps of forming an anti-reflection film with the embodiment shown in FIG. 11 to FIG. 14 or the embodiment shown in FIG. 15 to FIG. Film 405.
具体地, 形成抗反射膜 405的步骤包括: 在预备层 403表面形成 透光材料微球 402; 之后, 在透光材料微球 402上形成带电层 404; 再之后, 在带电层 404上透光材料微球 402, 之后, 再形成一层带电 层 404... ...这样不断交替堆叠, 直至最终形成的抗反射膜 405的厚度 符合设计需求。 Specifically, the step of forming the anti-reflection film 405 includes: forming a light-transmitting material microsphere 402 on the surface of the preliminary layer 403; thereafter, forming a charging layer 404 on the light-transmitting material microsphere 402; and then, transmitting light on the charging layer 404 The material microspheres 402, and then a layer of charged layer 404 are formed, which are alternately stacked until the thickness of the finally formed anti-reflective film 405 meets the design requirements.
本实施例中, 所述透光材料微球 402 为带负电荷的二氧化硅微 球。 但是本发明对此不做限制, 在其他实施例中, 所述透光材料微球 402还可以为正电荷, 例如, 所述透光材料 £球 402是带正电荷的二
氧化钛微球。 In this embodiment, the light transmissive material microspheres 402 are negatively charged silica microspheres. However, the present invention is not limited thereto. In other embodiments, the light transmissive material microspheres 402 may also be a positive charge. For example, the light transmissive material is a positively charged material. Titanium oxide microspheres.
所述带电层 404带有与透光材料微球 402电性不同的电荷,用于 使各层透光材料微球 402相互吸引。 具体地, 所述带电层 404的材料 为电解质或带电颗粒。 本实施例中, 所述带电层 404的材料为带正电 荷聚丙烯氯化铵。 在其他实施例中, 所述带电层 404还可以是带正电 荷的二氧化钛带电颗粒。 The charged layer 404 has a charge different from that of the light-transmitting material microspheres 402 for attracting the respective layers of the light-transmitting material microspheres 402 to each other. Specifically, the material of the charging layer 404 is an electrolyte or charged particles. In this embodiment, the material of the charging layer 404 is positively charged polypropylene ammonium chloride. In other embodiments, the charged layer 404 can also be a positively charged titanium dioxide charged particle.
具体地, 通过提拉涂膜工艺, 在预备层 403上交替堆叠带负电荷 的二氧化硅微球、 带正电的聚丙烯氯化铵, 以形成位于所述预备层 403上的抗反射膜 405。 Specifically, negatively charged silica microspheres and positively charged polypropylene ammonium chloride are alternately stacked on the preliminary layer 403 by a lift coating process to form an antireflection film on the preliminary layer 403. 405.
需要说明的是,在其他实施例中还可以采用类似于图 5所示实施 方式中形成抗反射膜的方法执行所述步骤 S23。 It should be noted that, in other embodiments, the step S23 may be performed by a method similar to the method of forming an anti-reflection film in the embodiment shown in Fig. 5.
具体地, 在提供基底并形成与预备层之后, 提供透光材料微球; 对所述透光材料微球进行表面处理,使所述透光材料微球表面携带同 性电荷; 使所述携带同性电荷的透光材料微球分散排布在所述预备 上, 以形成抗反射膜。 Specifically, after the substrate is provided and formed with the preliminary layer, the light-transmitting material microspheres are provided; the light-transmitting material microspheres are surface-treated such that the surface of the light-transmitting material microspheres carries a homogenous charge; Charged light-transmitting material microspheres are dispersedly arranged on the preparation to form an anti-reflection film.
为了实现抗反射膜的自清洁,本发明还提供一种光学组件的制造 方法, 参考图 21 , 示意出了本发明光学组件的制造方法又一实施方 式的流程示意图。 包括: In order to achieve self-cleaning of the anti-reflection film, the present invention also provides a method of manufacturing an optical component. Referring to Figure 21, there is shown a schematic flow chart of still another embodiment of the method of fabricating the optical component of the present invention. Includes:
步骤 S31 , 提供基底; Step S31, providing a substrate;
步骤 S32, 对所述基底进行清洗处理; Step S32, performing cleaning processing on the substrate;
步骤 S33 , 对清洗后的基底进行粗糙化处理; Step S33, roughening the cleaned substrate;
步骤 S34, 在所述基底表面形成抗反射膜, 所述抗反射膜具有蛾 眼结构; Step S34, forming an anti-reflection film on the surface of the substrate, the anti-reflection film having a moth-eye structure;
步骤 S35 , 在所述抗反射膜表面形成低表面能涂层。 Step S35, forming a low surface energy coating on the surface of the anti-reflection film.
下面结合具体实施例对图 21所示实施方式的技术方案进行详细 说明。 The technical solution of the embodiment shown in Fig. 21 will be described in detail below with reference to specific embodiments.
首先执行步骤 S31 , 提供基底。 First, step S31 is performed to provide a substrate.
所述基底可以是任意透明基底, 其材质可以为玻璃、 金属、 陶瓷
或塑料等。 The substrate may be any transparent substrate, which may be made of glass, metal or ceramic. Or plastic, etc.
本实施例不限制基底的具体形状、 尺寸和厚度。 This embodiment does not limit the specific shape, size and thickness of the substrate.
接着执行步骤 S32 , 进行清洗处理。 Then, step S32 is performed to perform a cleaning process.
本实施例可以采用丙酮、异丙酮和去离子水的混合溶液对所述基 底进行超声波清洗, 其具体过程对于本领域的技术人员是熟知的, 在 此不再赘述。 In this embodiment, the substrate may be ultrasonically cleaned by a mixed solution of acetone, isopropanone and deionized water. The specific process is well known to those skilled in the art and will not be described herein.
需要说明的是, 在本发明的其他实施例中, 还可以采用其他方式 清洗基底, 其不限制本发明的保护范围。 It should be noted that, in other embodiments of the present invention, the substrate may be cleaned by other means, which does not limit the scope of protection of the present invention.
通过所述清洗处理, 可以去除基底表面的杂质, 确保得到干净的 基底, 不使所述杂质影响后续反应的进行。 By the cleaning treatment, impurities on the surface of the substrate can be removed, ensuring that a clean substrate is obtained without causing the impurities to affect the subsequent reaction.
接着步骤 S33 , 进行粗糙化处理。 Next, in step S33, roughening processing is performed.
本实施例可以采用氢氟酸(HF )或硝酸(HN03 )溶液实现。 所 述氢氟酸或硝酸溶液会与基底进行反应, 从而使得基底表面比较粗 糙。 This embodiment can be carried out using a solution of hydrofluoric acid (HF) or nitric acid (HNO 3 ). The hydrofluoric acid or nitric acid solution reacts with the substrate to make the surface of the substrate relatively rough.
本实例中可以将所述基底直接浸泡在氢氟酸或硝酸溶液中。 其 中, 所述氢氟酸或硝酸的重量百分比范围可以为 5wt%~20wt%; 粗糙 化处理的时间范围可以为 30分钟〜 120分钟; 粗糙化处理的温度范围 可以为 20°C~80°C。 The substrate can be directly immersed in a hydrofluoric acid or nitric acid solution in this example. Wherein, the weight percentage of the hydrofluoric acid or nitric acid may range from 5 wt% to 20 wt%; the time of the roughening treatment may range from 30 minutes to 120 minutes; and the temperature range of the roughening treatment may range from 20 ° C to 80 ° C .
通过所述粗糙化处理, 可以增加基底的可润湿性, 增加后续在基 底表面形成的膜层的牢固性和均匀性。 By the roughening treatment, the wettability of the substrate can be increased, and the firmness and uniformity of the subsequently formed film layer on the surface of the substrate can be increased.
此外,在进行粗糙化处理后,还可以采用去离子水清洗所述基底, 以去除所述基底表面残留的酸液。 Further, after the roughening treatment, the substrate may be washed with deionized water to remove the acid remaining on the surface of the substrate.
接着执行步骤 S34, 形成蛾眼结构的抗反射膜。 Next, in step S34, an anti-reflection film of a moth-eye structure is formed.
所述抗反射膜的材质可以为氧化锌、 硅、 氧化硅、 氧化钛、 氮化 硅、 氧化钽、 氧化锆、 氧化铝、 氧化铟、 氧化锡、 氧化镓、 掺锡氧化 铟、 氟化掺锡氧化铟、 掺氟氧化铟、 掺氟氧化铟、 掺铝氧化锌、 掺镓 氧化锌、 硫化锌、 石西化锌和氟化镁中的一种或多种的任意组合。 The material of the anti-reflection film may be zinc oxide, silicon, silicon oxide, titanium oxide, silicon nitride, hafnium oxide, zirconium oxide, aluminum oxide, indium oxide, tin oxide, gallium oxide, tin-doped indium oxide, fluoride blending. Any combination of one or more of tin indium oxide, fluorine-doped indium oxide, fluorine-doped indium oxide, aluminum-doped zinc oxide, gallium-doped zinc oxide, zinc sulfide, zinc stanozide, and magnesium fluoride.
所述抗反射膜具体可以采用化学气相沉积、 旋涂、 喷洒、 湿化学
方法、 化学溶胶凝胶、 化学液相沉积、 光刻蚀、 模板法、 物理气相沉 积、 蒸发或溅射方式中的至少一种方法形成。 The anti-reflection film may specifically be chemical vapor deposition, spin coating, spraying, wet chemistry Formed by at least one of a method, a sol-gel gel, a chemical liquid deposition, a photolithography, a templating method, a physical vapor deposition, an evaporation or a sputtering method.
具体地, 可以采用图 6至图 9所示的光学组件制造方法, 对通过 对透光材料微球进行表面处理使透光材料微球带同性电荷,之后将携 带同性电荷的透光材料微球分散排布在所述基底上,以形成具有蛾眼 结构的抗反射膜。 或者, 可以按照图 11至图 14所示实施例或图 15 至图 16所示实施例, 通过 layer by layer的方式形成抗反射膜。 具体 工艺方法可参考前述实施例相关步骤的内容, 在此不再赘述。 Specifically, the optical component manufacturing method shown in FIG. 6 to FIG. 9 may be employed, and the light-transmitting material microspheres are subjected to surface treatment by surface treatment of the light-transmitting material microspheres, and the light-transmitting material microspheres carrying the same-charged charge are then carried. Dispersion is arranged on the substrate to form an antireflection film having a moth eye structure. Alternatively, the anti-reflection film may be formed by a layer by layer according to the embodiment shown in Figs. 11 to 14 or the embodiment shown in Figs. 15 to 16 . For the specific process, refer to the related steps of the foregoing embodiment, and details are not described herein again.
接着执行步骤 S35, 在所述抗反射膜表面形成低表面能涂层。 所述低表面能涂层的材质可以为曱氧基硅烷、烷基硅烷、含氟硅 烷或接枝硅氧烷链化合物。 Next, step S35 is performed to form a low surface energy coating on the surface of the anti-reflection film. The material of the low surface energy coating may be a methoxy silane, an alkyl silane, a fluorosilane or a graft siloxane chain compound.
所述低表面能涂层也可以采用采用化学气相沉积、 旋涂、 喷洒、 湿化学方法、 化学溶胶凝胶、 化学液相沉积、 光刻蚀、 模板法、 物理 气相沉积、 蒸发或溅射方式中的至少一种方法形成。 The low surface energy coating may also be formed by chemical vapor deposition, spin coating, spraying, wet chemical method, chemical sol gel, chemical liquid deposition, photolithography, templating, physical vapor deposition, evaporation or sputtering. At least one of the methods is formed.
作为一个具体例子, 所述低表面能涂层的材质为 HDTMS, 当采 用 HDTMS构成低表面能涂层时, 具有以下优点: As a specific example, the low surface energy coating material is HDTMS, and when HDTMS is used to form a low surface energy coating, the following advantages are obtained:
A、 HDTMS 中不包括氟元素, 即使长时间与玻璃、 金属或塑料 材质的基底接触, 也不会腐蚀基底; A. HDTMS does not include fluorine. Even if it is in contact with a glass, metal or plastic substrate for a long time, it will not corrode the substrate.
B、 HDTMS 水解后会产生三个活性基团, 所述活性基团可以与 基底发生化学反应, 使得 HDTMS和基底的粘附性非常好, 从而提高 了使用寿命; B. HDTMS will produce three reactive groups after hydrolysis, and the reactive group can chemically react with the substrate, so that the adhesion between HDTMS and the substrate is very good, thereby improving the service life;
C、 由于 HDTMS同时具备拒水拒油的双重^果, 因此可以保证 制作得到的疏水基板既拒水又拒油; 3 C, since dual HDTMS along with the water and oil repellent ^ fruit, which can ensure both substrate was produced in the hydrophobic water- and oil-repellent; 3
D、 HDTMS的价格低廉, 从而可以降低疏 ^基板的生产成本。 具 ψ也, HDTMS 由水解前的 CH3_ 0_ Si——变为水解后的 HO Si——, 从而 HDTMS可以拥有三个硅羟; D, HDTMS is inexpensive, which can reduce the production cost of the substrate. Also, HDTMS is changed from CH 3 _ 0_ Si before hydrolysis to HO Si after hydrolysis, so that HDTMS can have three silanols;
最多也 有三个硅羟基), 该硅羟基作为活性奉团与基底上的羟基 发生反应, 因此 HDTMS与基底的结合力非常 H3
此外, 当低表面能材料中碳链过短时将导致表面能过高, 起不到 疏水效果; 碳链过长时则容易发生链路断裂, 稳定性较差。 本实施例 中选用 HDTMS作为低表面能材料, HDTMS的碳链长度适中, 从而 既可以起到疏水效果, 且稳定性也比较好。 There are also up to three silyl groups. The silanol reacts as a reactive group with the hydroxyl groups on the substrate, so the binding of HDTMS to the substrate is very H3. In addition, when the carbon chain in the low surface energy material is too short, the surface energy is too high, and the hydrophobic effect is not obtained; when the carbon chain is too long, the link is broken and the stability is poor. In this embodiment, HDTMS is selected as the low surface energy material, and the HDTMS has a moderate carbon chain length, thereby achieving a hydrophobic effect and a relatively good stability.
参考图 22, 示意出了图 21中步骤 S35—实施例的流程示意图。 具体地, 在所述抗反射膜表面形成低表面能涂层的步骤可以包括: 步骤 S41 , 提供十六烷基三曱氧基硅烷; Referring to Fig. 22, a schematic flow chart of the step S35 of Fig. 21 is illustrated. Specifically, the step of forming a low surface energy coating on the surface of the anti-reflective film may include: Step S41, providing cetyltrimethoxysilane;
步骤 S42 , 在十六烷基三曱氧基硅烷中添加乙醇形成溶液; 步骤 S43 , 对所述溶液进行酸化处理; Step S42, adding ethanol to the cetyltrimethoxysilane to form a solution; in step S43, the solution is acidified;
步骤 S44, 对酸化处理后的溶液进行搅拌处理; Step S44, stirring the acidified solution;
步骤 S45, 通过浸润、 旋涂或喷洒的方式将所述溶液形成在所述 抗反射膜表面。 Step S45, the solution is formed on the surface of the anti-reflection film by means of wetting, spin coating or spraying.
首先, 提供化学结构式为 CH3(CH2)15Si(OCH3)3的 HDTMS。 接着, 发明人研究发现 HDTMS易溶于乙醇, 因此在 HDTMS中 添加乙醇, 从而可以得到包含 HDTMS的溶液。 First, HDTMS having a chemical formula of CH 3 (CH 2 ) 15 Si(OCH 3 ) 3 is provided. Next, the inventors have found that HDTMS is easily soluble in ethanol, so that ethanol is added to HDTMS, whereby a solution containing HDTMS can be obtained.
本实施例既可以将 HDTMS置于乙醇溶液中,也可以将乙醇溶液 倒入 HDTMS中。 In this embodiment, the HDTMS can be placed in an ethanol solution or the ethanol solution can be poured into the HDTMS.
具体地,所述溶液中十六烷基三曱氧基硅烷的质量百分比范围可 以为 3% ~ 5%。 Specifically, the mass percentage of cetyltrimethoxysilane in the solution may range from 3% to 5%.
接着, 对所述溶液进行酸化处理, 以使 HDTMS进行水解, 且生 成活性基团羟基。 Next, the solution is subjected to an acidification treatment to hydrolyze HDTMS, and a reactive group hydroxyl group is produced.
具体地, 在所述溶液中添加乙酸、 盐酸或硝酸中的至少一种, 直 至使溶液的 PH值位于 4.5~5.5之间, 如: PH值为 4.5、 5.0或 5.5。 Specifically, at least one of acetic acid, hydrochloric acid or nitric acid is added to the solution until the pH of the solution is between 4.5 and 5.5, such as a pH of 4.5, 5.0 or 5.5.
接着, 对酸化处理后的溶液进行搅拌处理, 以使 HDTMS水解充 分且均匀。 Next, the acidified solution is subjected to agitation treatment to hydrolyze the HDTMS to be uniform and uniform.
具体地, 将酸化处理后的溶液放入搅拌装置中, 对该溶液进行 60分钟以上的搅拌。 Specifically, the acidified solution is placed in a stirring apparatus, and the solution is stirred for 60 minutes or more.
接着, 待上述溶液配制完成之后, 就可以将其形成在所述抗反射
膜表面, 以作为低表面能涂层。 Then, after the solution is prepared, it can be formed on the anti-reflection The surface of the membrane acts as a low surface energy coating.
具体地, 可以通过浸润、 旋涂或喷洒方式中的任一种, 将所述溶 液形成在所述抗反射膜表面。 Specifically, the solution may be formed on the surface of the anti-reflection film by any one of wetting, spin coating or spraying.
当采用浸润方式将所述溶液形成在所述抗反射膜表面时,将所述 基底放置在所述溶液中, 为了保证反应比较充分, 放置时间可以为 30分钟〜 60分钟, 如: 30分钟、 40分钟、 50分钟或 60分钟。 该操 作可以直接在常温下进行, 无需其他装置, 操作筒单, 且能保证低表 面能涂层在抗反射膜表面的分布很均匀。 When the solution is formed on the surface of the anti-reflection film by means of wetting, the substrate is placed in the solution, and in order to ensure sufficient reaction, the standing time may be 30 minutes to 60 minutes, such as: 30 minutes, 40 minutes, 50 minutes or 60 minutes. This operation can be carried out directly at room temperature, without the need for additional equipment, to operate the cartridge, and to ensure a uniform distribution of the low surface coating on the surface of the antireflective film.
当采用旋涂或喷洒方式将所述溶液形成在所述抗反射膜表面时, 所需时间比较短, 效率比较高, 同时也可以保证低表面能涂层在抗反 射膜表面分布的均匀性。 When the solution is formed on the surface of the antireflection film by spin coating or spraying, the time required is relatively short, the efficiency is relatively high, and the uniformity of the distribution of the low surface energy coating on the surface of the antireflection film can be ensured.
至此, 在抗反射膜表面形成了低表面能涂层。 所述低表面能涂层 的厚度是分子级别, 具体可以为 10nm~500nm, 如: 10nm、 50nm、 100nm、 250nm或 500nm。 Thus, a low surface energy coating is formed on the surface of the antireflection film. The thickness of the low surface energy coating layer is on the order of 10 nm to 500 nm, such as 10 nm, 50 nm, 100 nm, 250 nm or 500 nm.
进一步地, 在抗反射膜表面形成低表面能涂层之后, 还可以将所 述低表面能涂层晾干, 且进行固化处理。 Further, after forming a low surface energy coating on the surface of the antireflection film, the low surface energy coating may be dried and subjected to a curing treatment.
本实施例在形成所述低表面能涂层之后, 首先在室温将其晾干。 将所述低表面能涂层晾干之后, 就可以进行固化处理。 具体地, 所述固化处理的时间范围可以为 30分钟〜 60分钟, 如: 30分钟、 40 分钟、 50分钟或 60分钟; 温度范围可以为 100°C~150°C ,如: 100°C、 110°C、 120°C、 130°C、 140°C或 150°C。 In this embodiment, after forming the low surface energy coating, it is first dried at room temperature. After the low surface energy coating is dried, the curing treatment can be performed. Specifically, the curing treatment may take a time ranging from 30 minutes to 60 minutes, such as: 30 minutes, 40 minutes, 50 minutes, or 60 minutes; the temperature may range from 100 ° C to 150 ° C, such as: 100 ° C, 110 ° C, 120 ° C, 130 ° C, 140 ° C or 150 ° C.
通过所述固化处理,可以增加低表面能涂层在抗反射膜表面的固 着, 防止低表面能涂层的脱落。 By the curing treatment, the fixation of the low surface energy coating on the surface of the antireflection film can be increased, and the peeling of the low surface energy coating can be prevented.
需要说明的是, 在本发明的其他实施例中, 为了筒化步骤, 在保 证在基底表面能形成抗反射膜和低表面能涂层的前提下,所述清洗处 理、 粗糙化处理或固化处理所对应的步骤均可以省略。 It should be noted that, in other embodiments of the present invention, in order to ensure the formation of an anti-reflection film and a low surface energy coating on the surface of the substrate, the cleaning treatment, the roughening treatment or the curing treatment is performed for the tubeizing step. The corresponding steps can be omitted.
通过在基底表面形成蛾眼结构的抗反射膜, 可以实现全光谱、 大 入射角的减反效果; 在抗反射膜表面形成低表面能涂层, 可以实现超
疏水自清洁的效果,且低表面能涂层能够进一步增加抗反射膜的透过 率, 最终提高了减反效果。 By forming an anti-reflection film with a moth-eye structure on the surface of the substrate, the anti-reflection effect of the full spectrum and the large incident angle can be achieved; and a low surface energy coating can be formed on the surface of the anti-reflection film to achieve super The hydrophobic self-cleaning effect, and the low surface energy coating can further increase the transmittance of the anti-reflection film, and finally improve the anti-reflection effect.
此外, 由于采用 HDTMS作为低表面能涂层,从而即使长时间使 用, 所述低表面能涂层也不会腐蚀基底, 最终可以保证疏水基板的正 常使用; 又由于 HDTMS的价格比较便宜, 从而降低了生产成本。 In addition, since HDTMS is used as a low surface energy coating, the low surface energy coating does not corrode the substrate even after prolonged use, which ultimately ensures the normal use of the hydrophobic substrate; and because the price of HDTMS is relatively low, thereby reducing Production costs.
相应地, 本发明还提供一种由所述制造方法形成的光学组件。 请继续参考图 9, 所述光学组件一实施例包括: 基底 102; 所述基底为玻璃、 金属或塑料。 抗反射膜 103 , 覆盖于基底 102上, 所述抗反射膜中 103的透光 材料微球相互之间具有间隙,可以防止透光材料微球在基底 102所在 平面的粘连现象。 较佳地,所述抗反射膜 103中的透光材料微球在基底 102上位于 同一层, 也就是说, 所述抗反射膜 103为单层微球结构, 所述抗反射 膜 103在宽光谱范围内具有良好的减反效果。 请继续参考图 14和图 16, 所述光学组件还可以分别是图 11至 图 14所示光学组件的制造方法、 图 15至图 16所示光学组件的制造 方法所形成的光学组件。 为了提高光学组件的机械强度, 参考图 23和图 24, 本发明还提 供了光学组件另一实施例的示意图和局部放大图。 需要说明的是, 为 了使附图更加清楚、 筒洁, 附图中只示意了光学组件的一部分, 以示 意光学组件中薄膜的位置关系,图中薄膜的数量不应作为对本发明的 限制。 Accordingly, the present invention also provides an optical component formed by the manufacturing method. Referring to FIG. 9, an embodiment of the optical component includes: a substrate 102; the substrate is glass, metal or plastic. The anti-reflection film 103 covers the substrate 102, and the light-transmitting material microspheres of the anti-reflection film 103 have a gap therebetween, which can prevent the adhesion of the light-transmitting material microspheres on the plane of the substrate 102. Preferably, the light-transmitting material microspheres in the anti-reflection film 103 are on the same layer on the substrate 102, that is, the anti-reflection film 103 is a single-layer microsphere structure, and the anti-reflection film 103 is wide. Good anti-reflection effect in the spectral range. Referring to FIG. 14 and FIG. 16, the optical component may also be an optical component formed by the manufacturing method of the optical component shown in FIGS. 11 to 14, and the manufacturing method of the optical component shown in FIGS. 15 to 16, respectively. In order to increase the mechanical strength of the optical component, referring to Figures 23 and 24, the present invention also provides a schematic and partial enlarged view of another embodiment of the optical component. It is to be noted that in order to make the drawings clearer and cleaner, only a part of the optical components are illustrated in the drawings to illustrate the positional relationship of the films in the optical components, and the number of films in the drawings should not be construed as limiting the invention.
光学组件包括: 基底 500、 位于基底 500上且与所述基底 500相 接触的预备层 503、 位于所述预备层 503上且与所述预备层 503相接 触的抗反射膜 505 , 其中, The optical component includes: a substrate 500, a preliminary layer 503 on the substrate 500 and in contact with the substrate 500, and an anti-reflection film 505 on the preliminary layer 503 and in contact with the preliminary layer 503, wherein
基底 500, 用于提供光入射的介质。 在不同的光学产品中, 所述
基底 500可以为不同的材料。 例如, 在光伏器件中, 所述基底 500材 料为玻璃; 在液晶显示器的背光源中, 所述基底 500的材料还可以是 塑料。 本发明对基底 500的材料不做限制。 此处基底 500的材料以表 面带负电荷的玻璃为例进行说明。 The substrate 500 is for providing a medium in which light is incident. In different optical products, the Substrate 500 can be a different material. For example, in a photovoltaic device, the substrate 500 is made of glass; in the backlight of the liquid crystal display, the material of the substrate 500 may also be plastic. The present invention does not limit the material of the substrate 500. Here, the material of the substrate 500 is exemplified by a glass having a negatively charged surface.
预备层 503 ,位于基底 500和抗反射膜 505之间,所述预备层 503 与所述基底 500两者相接触面分别带有电性不同的电荷;所述预备层 503与所述抗反射膜 505两者相接触面分别带有电性不同的电荷, 基 于异性电荷相吸的原理提高基底 500和抗反射膜 505之间的结合力。 此处由于所述预备层 503在形成抗反射膜 505之前形成,因此称其为 "预备" 层。 The preliminary layer 503 is located between the substrate 500 and the anti-reflection film 505, and the contact faces of the preliminary layer 503 and the substrate 500 respectively have electrically different charges; the preliminary layer 503 and the anti-reflection film The contact faces of the 505 are respectively charged with different electrical charges, and the bonding force between the substrate 500 and the anti-reflective film 505 is improved based on the principle of heterosexual charge attraction. Here, since the preliminary layer 503 is formed before the anti-reflection film 505 is formed, it is referred to as a "preparation" layer.
所述预备层 503可以是单层电性层, 例如, 所述基底 500表面带 负电荷, 所述抗反射膜 505与预备层 503相接触的面带负电荷。相应 地, 所述预备层 503为一单层的携带正电荷的薄膜, 可以吸引所述基 底 500和所述抗反射膜 505。 The preliminary layer 503 may be a single-layer electrical layer. For example, the surface of the substrate 500 is negatively charged, and the surface of the anti-reflective film 505 in contact with the preliminary layer 503 is negatively charged. Accordingly, the preliminary layer 503 is a single layer of a positively charged film that can attract the substrate 500 and the anti-reflective film 505.
本实施例中, 如图 24所示, 所述预备层 503包括多层电性层, 具体地, 所述预备层 503由第一电性层 5031、 第二电性层 5032交替 堆叠形成, 所述第一电性层 5031、 第二电性层 5032分别带有不同电 性的电荷, 这样, 所述第一电性层 5031和第二电性层 5032基于异性 电荷相吸的原理可以紧密结合在一起,提高了预备层 503的牢固性和 机械强度。 In this embodiment, as shown in FIG. 24, the preliminary layer 503 includes a plurality of electrical layers. Specifically, the preliminary layer 503 is formed by alternately stacking a first electrical layer 5031 and a second electrical layer 5032. The first electrical layer 5031 and the second electrical layer 5032 respectively have different electrical charges, so that the first electrical layer 5031 and the second electrical layer 5032 can be closely combined based on the principle of opposite charge attraction. Together, the firmness and mechanical strength of the preliminary layer 503 are improved.
所述第一电性层 5031 和所述第二电性层 5032可以由电解质构 成。 例如: 可以是带负电荷的聚苯乙烯磺酸钠、 带正电荷的聚丙烯氯 化铵等的电解质。 The first electrical layer 5031 and the second electrical layer 5032 may be composed of an electrolyte. For example: It may be an electrolyte of a negatively charged sodium polystyrene sulfonate or a positively charged polypropylene ammonium chloride.
具体应用中, 可以通过设置第一电性层 5031和第二电性层 5032 所带的电荷的电性以及预备层 503中电性层的层数, 以使预备层 503 与基底的相接触面分别带有不同的电荷,同时使预备层 503与抗反射 膜 505的相接触面分别带有不同的电荷。 In a specific application, the electrical properties of the electric charges carried by the first electrical layer 5031 and the second electrical layer 5032 and the number of layers of the electrical layer in the preliminary layer 503 may be set to make the contact layer of the preliminary layer 503 and the substrate. There are different charges, respectively, while the contact faces of the preliminary layer 503 and the anti-reflection film 505 are respectively charged with different charges.
本实施例中, 以基底 500是玻璃为例, 通常玻璃带有负电荷, 所 述第一电性层 5031 为带正电荷的聚丙烯氯化铵, 所述第二电性层
5032为带负电荷的聚苯乙婦磺酸钠。 在基底 500上依次堆叠五层电 性层: 带正电荷的聚丙烯氯化铵、 带负电荷的聚苯乙婦磺酸钠、 带正 电荷的聚丙烯氯化铵、 带负电荷的聚苯乙烯磺酸钠、 带正电荷的聚丙 烯氯化铵。所述预备层 503与所述基底 500相接触的为带正电荷的聚 丙烯氯化铵, 与所述基底 500所带电荷的电性不同, 所述预备层 503 可以吸附于所述基底 500上; 同时, 所述预备层 503表面为带正电荷 的聚丙烯氯化铵, 与后续抗反射膜 505的相接触面带有不同的电荷, 用于吸附所述抗反射膜 505。 In this embodiment, the substrate 500 is exemplified by a glass, usually the glass has a negative charge, and the first electrical layer 5031 is a positively charged polypropylene ammonium chloride, and the second electrical layer 5032 is a negatively charged sodium polyphthalate. Five layers of electrical layers are sequentially stacked on the substrate 500: positively charged polypropylene ammonium chloride, negatively charged sodium polyphthalate, positively charged polypropylene ammonium chloride, negatively charged polyphenylene Sodium vinyl sulfonate, positively charged polypropylene ammonium chloride. The preliminary layer 503 is in contact with the substrate 500 as a positively charged polypropylene ammonium chloride. Unlike the electrical charge of the substrate 500, the preliminary layer 503 may be adsorbed on the substrate 500. At the same time, the surface of the preliminary layer 503 is a positively charged polypropylene ammonium chloride, and has a different charge on the contact surface with the subsequent anti-reflection film 505 for adsorbing the anti-reflection film 505.
在其他实施例中, 如果基底 500的表面带有正电荷, 可以先在基 底 500上形成带负电荷的聚苯乙婦磺酸钠。 此外, 如果抗反射膜 505 的相接触面带有正电荷, 可以增加或减少一层电性层, 以使最终位于 预备层 503表面与抗反射膜 505相接触的为带负电荷的聚苯乙婦磺酸 In other embodiments, if the surface of the substrate 500 is positively charged, a negatively charged sodium polyphthalate may be formed on the substrate 500. In addition, if the phase contact surface of the anti-reflection film 505 has a positive charge, an electric layer may be added or reduced such that the surface of the preliminary layer 503 that is in contact with the anti-reflection film 505 is a negatively charged polyphenylene. Sulfonic acid
#1。 #1.
需要说明的是, 预备层 503中电性层的数量越多, 越可以增加预 备层 503对所述抗反射膜 505的吸附力,但是当预备层 503中电性层 的数量超过 8层时, 这种吸附力的增加已不明显。 而预备层 503中电 性层数量过多会增加材料成本同时还会造成膜厚过大。 因此, 所述预 备层 503中电性层的数量最好小于或等于 8。为了保证所述预备层 503 具有足够大的吸附力同时又具有较低 成本, 优选地, 预备层 503 中 电性层的数量位于 3~6层的范围内。 It should be noted that the more the number of the electrical layers in the preliminary layer 503, the more the adsorption force of the preliminary layer 503 on the anti-reflection film 505 can be increased, but when the number of the electrical layers in the preliminary layer 503 exceeds 8 layers, This increase in adsorption is not apparent. The excessive number of electrical layers in the preliminary layer 503 increases the material cost and also causes the film thickness to be too large. Therefore, the number of electrical layers in the preparation layer 503 is preferably less than or equal to 8. In order to ensure that the preliminary layer 503 has a sufficiently large adsorption force and at a low cost, preferably, the number of the electrical layers in the preliminary layer 503 is in the range of 3 to 6 layers.
位于所述预备层 503上的抗反射膜 505 , 用于减少光入射至基底 500时光的反射。 An anti-reflection film 505 on the preliminary layer 503 serves to reduce reflection of light when light is incident on the substrate 500.
所述抗反射膜 505与所述预备层 503相接触面带有不同的电荷, 因此, 所述抗反射膜 505基于异性相吸而牢固地固定于所述预备层 503上,进而牢固地固定于基底 500上,提高了光学组件的机械强度。 The anti-reflection film 505 has a different charge on the surface in contact with the preliminary layer 503. Therefore, the anti-reflection film 505 is firmly fixed to the preliminary layer 503 based on the opposite phase attraction, and is firmly fixed to the anti-reflection film 505. On the substrate 500, the mechanical strength of the optical component is increased.
具体地,本实施例中所述抗反射膜 505通过 layer by layer的方式 形成, 包括多层抗反射层 502。 所述抗反射层 502之间还设置有与所 述抗反射层 502电性不同的带电层 504, 所述带电层 504可以使各层 抗反射层 502紧密结合在一起。
本实施例中,所述抗反射层 502包括分散设置于同一层的多个二 氧化硅微球。 二氧化硅微球之间的空隙折射率为 1 , 而二氧化硅的折 射率为 1.5 , 通过设置空隙率, 可以使抗反射层 502的折射率满足折 射率匹配的关系, 从而起到减反作用。 较佳地, 所述二氧化硅微球的 粒径位于 5~10nm的范围内。 纳米量级的二氧化硅微球可以提高抗反 射膜 505中空隙的均匀性。 Specifically, the anti-reflection film 505 is formed by a layer by layer in the embodiment, and includes a multi-layer anti-reflection layer 502. A charged layer 504 electrically different from the anti-reflective layer 502 is further disposed between the anti-reflective layers 502, and the charged layer 504 can tightly bond the anti-reflective layers 502 of each layer. In this embodiment, the anti-reflective layer 502 includes a plurality of silica microspheres dispersedly disposed in the same layer. The refractive index between the silica microspheres is 1 and the refractive index of the silica is 1.5. By setting the void ratio, the refractive index of the anti-reflective layer 502 can satisfy the relationship of refractive index matching, thereby reducing the reaction. . Preferably, the silica microspheres have a particle size in the range of 5 to 10 nm. Nano-sized silica microspheres can improve the uniformity of voids in the anti-reflective film 505.
所述预备层 503表面带有正电荷,而所述二氧化硅微球通常带有 负电, 可以牢固地吸附在所述预备层 503上。 The surface of the preliminary layer 503 is positively charged, and the silica microspheres are generally negatively charged and can be firmly adsorbed on the preliminary layer 503.
需要说明的是, 本实施例中二氧化硅微球带有负电荷, 在其他实 施例中, 在预备层 503表面带有负电荷时, 可以对所述二氧化硅微球 进行表面处理(例如: 经过 PH值调节或者通过表面活性剂进行表面 处理), 以使所述二氧化硅微球带正电荷。 It should be noted that the silica microspheres in this embodiment have a negative charge. In other embodiments, when the surface of the preliminary layer 503 is negatively charged, the silica microspheres may be surface-treated (for example, : Surface conditioning by pH adjustment or by surfactant to render the silica microspheres positively charged.
所述带电层 504可以由电解质或带电颗粒构成。 本实施例中, 所 述带电层 504为带正电荷的聚丙烯氯化铵。所述带正电荷的聚丙烯氯 化铵可以吸附带负电荷的二氧化硅微球,以提高抗反射膜 505的机械 强度。 The charged layer 504 may be composed of an electrolyte or charged particles. In this embodiment, the charged layer 504 is a positively charged polypropylene ammonium chloride. The positively charged polypropylene ammonium chloride can adsorb negatively charged silica microspheres to increase the mechanical strength of the antireflective film 505.
需要说明的是, 在其他实施例中, 所述带电层 504还可以为带正 电荷的带电颗粒, 例如: 所述带电层 504为带正电荷的二氧化硅带电 颗粒。 It should be noted that, in other embodiments, the charged layer 504 may also be a positively charged charged particle, for example: the charged layer 504 is a positively charged silicon dioxide charged particle.
本实施例中, 通过在基底 500和抗反射膜 505之间设置预备层 In this embodiment, a preliminary layer is provided between the substrate 500 and the anti-reflection film 505.
503, 提高了抗反射膜 505和基底 500之间的结合力。 503, the bonding force between the anti-reflection film 505 and the substrate 500 is improved.
此外, 由于设置了提供吸附力的预备层 503 , 所述抗反射膜 505 可以设置层数足够多的抗反射层 502 ,从而提高抗反射膜 505的厚度, 以便于使抗反射膜 505满足厚度匹配的关系。以抗反射膜 505由二氧 化硅微球和聚丙烯氯化铵堆叠形成为例, 在设置预备层 503之后, 所 述抗反射膜 505中至少可以设置 10层二氧化硅微球, 从而使抗反射 膜 505获得足够大的膜厚。 In addition, since the preliminary layer 503 for providing an adsorption force is provided, the anti-reflection film 505 may be provided with an anti-reflection layer 502 having a sufficient number of layers, thereby increasing the thickness of the anti-reflection film 505, so that the anti-reflection film 505 satisfies the thickness matching. Relationship. Taking the anti-reflection film 505 as an example of the formation of the silica microspheres and the polypropylene ammonium chloride stack, after the preliminary layer 503 is disposed, at least 10 layers of silica microspheres may be disposed in the anti-reflection film 505, thereby making the anti-reflection film 505 The reflective film 505 obtains a sufficiently large film thickness.
需要说明是, 图 23和图 24示意光学组件的实施例中, 位于所述
预备层 503上的所述抗反射膜 505是通过 layer by layer的方式形成 的, 包括至少一层抗反射层。 It should be noted that FIG. 23 and FIG. 24 illustrate an embodiment of the optical component, located in the The anti-reflection film 505 on the preliminary layer 503 is formed by a layer by layer, and includes at least one anti-reflection layer.
但是本发明对此不做限制, 在其他实施例中, 位于所述预备层上 的抗反射膜还可以是对透光材料微球进行表面处理使透光材料微球 带同性电荷,之后将携带同性电荷的透光材料微球分散排布在所述基 底上而形成的抗反射膜。 However, the present invention is not limited thereto. In other embodiments, the anti-reflection film located on the preliminary layer may also be a surface treatment of the light-transmitting material microspheres so that the light-transmitting material microspheres have the same electric charge and then carry The isotropically charged light-transmitting material microspheres are dispersed in an anti-reflection film formed on the substrate.
参考图 25 , 示出了本发明光学组件再一实施例的示意图, 包括: 基底 600; Referring to FIG. 25, there is shown a schematic view of still another embodiment of the optical component of the present invention, comprising: a substrate 600;
位于所述基底 600表面的抗反射膜 601 , 所述抗反射膜 601具有 蛾眼结构; An anti-reflection film 601 located on a surface of the substrate 600, the anti-reflection film 601 having a moth-eye structure;
位于所述抗反射膜 601表面的低表面能涂层 602。 A low surface energy coating 602 on the surface of the anti-reflective film 601.
所述基底 600可以是任意透明基底, 其材质可以为玻璃、 金属、 陶瓷或塑料等。 The substrate 600 may be any transparent substrate and may be made of glass, metal, ceramic or plastic.
本实施例不限制基底 600的具体形状、 尺寸和厚度。 This embodiment does not limit the specific shape, size and thickness of the substrate 600.
所述抗反射膜 601 的厚度范围可以为 100nm~2000nm , 如: The thickness of the anti-reflection film 601 may range from 100 nm to 2000 nm, such as:
100nm、 500nm、 lOOOnm或 2000nm等。 100 nm, 500 nm, 100 nm or 2000 nm.
所述抗反射膜 601的材质可以为氧化锌、 硅、 氧化硅、 氧化钛、 氮化硅、 氧化钽、 氧化锆、 氧化铝、 氧化铟、 氧化锡、 氧化镓、 掺锡 氧化铟、 氟化掺锡氧化铟、 掺氟氧化铟、 掺氟氧化铟、 掺铝氧化锌、 掺镓氧化锌、 硫化锌、 石西化锌和氟化镁中的一种或多种的任意组合。 The anti-reflection film 601 may be made of zinc oxide, silicon, silicon oxide, titanium oxide, silicon nitride, hafnium oxide, zirconium oxide, aluminum oxide, indium oxide, tin oxide, gallium oxide, tin-doped indium oxide, or fluorinated. Any combination of one or more of tin-doped indium oxide, fluorine-doped indium oxide, indium fluoride-doped indium oxide, aluminum-doped zinc oxide, gallium-doped zinc oxide, zinc sulfide, zinc stanozide, and magnesium fluoride.
可选地,所述抗反射膜 601可以是由上述光学组件制造方法实施 例中形成的抗反射膜。 例如, 对透光材料微球进行表面处理使透光材 料微球带同性电荷,之后将携带同性电荷的透光材料微球分散排布在 所述基底上, 从而形成的抗反射膜(如图 9所示的抗反射膜)。 或者 是通过 layer by layer的方式形成的包括至少一层抗反射层的抗反射 膜(如图 14或图 16所示的抗反射膜)。 Alternatively, the anti-reflection film 601 may be an anti-reflection film formed in the above embodiment of the optical module manufacturing method. For example, the surface of the light-transmitting material microsphere is subjected to surface treatment so that the light-transmitting material microspheres are charged with the same polarity, and then the light-transmitting material microspheres carrying the same-charge charge are dispersed and arranged on the substrate, thereby forming an anti-reflection film (as shown in the figure). Antireflective film shown in 9). Or an antireflection film comprising at least one antireflection layer formed by a layer by layer (an antireflection film as shown in Fig. 14 or Fig. 16).
由于抗反射膜 601 具有蛾眼结构, 因此可以使其具有梯度折射 率, 从而可以避免光的反射, 最终实现全光谱、 大入射角。
所述低表面能涂层 602 的厚度范围可以为 10nm~500nm, 如: 10nm、 50nm、 100nm、 250nm或 500nm。 Since the anti-reflection film 601 has a moth-eye structure, it can have a gradient refractive index, thereby avoiding reflection of light, and finally achieving a full spectrum and a large incident angle. The low surface energy coating 602 may have a thickness ranging from 10 nm to 500 nm, such as: 10 nm, 50 nm, 100 nm, 250 nm or 500 nm.
所述低表面能涂层 602的材质可以为曱氧基硅烷、 烷基硅烷、含 氟硅烷或接枝硅氧烷链化合物。 The material of the low surface energy coating 602 may be a methoxy silane, an alkyl silane, a fluorosilane or a graft siloxane chain compound.
优选地,所述低表面能涂层 602的材质为 HDTMS,由于 HDTMS 同时具备拒水拒油的双重效果,因此可以保证制作得到的光学组件同 时拒水拒油。 此外, HDTMS的价格低廉, 从而可以降低光学组件的 生产成本。 Preferably, the low surface energy coating 602 is made of HDTMS, and since the HDTMS has the dual effects of water and oil repellency, the optical components produced can be guaranteed to simultaneously resist water and oil. In addition, HDTMS is inexpensive, which can reduce the production cost of optical components.
在一个具体例子中, 所述基底为玻璃基底, 所述抗反射膜为氧化 锌, 所述低表面能涂层为 HDTMS。 In one specific example, the substrate is a glass substrate, the antireflective film is zinc oxide, and the low surface energy coating is HDTMS.
参考图 26所示, 其示出了三种不同情况下波长与透过率之间的 关系, 横坐标为波长, 单位为 nm; 纵坐标为透过率, 单位为%。 Referring to Figure 26, which shows the relationship between wavelength and transmittance in three different cases, the abscissa is the wavelength in nm; the ordinate is the transmittance in %.
第一种情况对应玻璃基底, 即图 26中实线曲线示出了玻璃基底 吸收的光波长与光在玻璃基底表面的透过率之间的关系。 The first case corresponds to a glass substrate, i.e., the solid line curve in Fig. 26 shows the relationship between the wavelength of light absorbed by the glass substrate and the transmittance of light on the surface of the glass substrate.
第二种情况对应玻璃基底表面形成有 ZnO材质的抗反射膜(以 下筒称为抗反射基板),即图 26中较深虚线曲线示出了抗反射基板吸 收的光波长与光在减反基板表面的透光率之间的关系。 In the second case, an anti-reflection film of ZnO material is formed on the surface of the glass substrate (hereinafter referred to as an anti-reflection substrate), that is, a deep dotted line curve in FIG. 26 shows the wavelength of light absorbed by the anti-reflection substrate and the light on the substrate. The relationship between the transmittance of the surface.
第三种情况对应玻璃基底表面依次形成有 ZnO材质的抗反射膜 和 HDTMS材质的低表面能涂层(以下筒称为光学组件 ), 即图 26中 透光率之间的关系。 In the third case, an antireflection film made of ZnO and a low surface energy coating of HDTMS (hereinafter referred to as an optical component) are formed in sequence on the surface of the glass substrate, that is, the relationship between the transmittances in Fig. 26.
通过分析上述三个曲线可见, 三个曲线总的变化趋势是相同的, 且光学组件对应的透过率>抗反射基板对应的透过率>玻璃基底对应 的透过率, 从而充分证明了低表面能涂层可以提高透过率, 即增强了 抗反射膜的减反效果。 By analyzing the above three curves, the total change trend of the three curves is the same, and the transmittance of the optical component> the transmittance corresponding to the anti-reflection substrate> the transmittance corresponding to the glass substrate, which fully proves that the transmittance is low. The surface energy coating can increase the transmittance, that is, enhance the antireflection effect of the antireflection film.
需要说明的是, 在本发明的其他实施例中, 在不限制基底、 抗反 射膜和低表面能涂层的材料的前提下,低表面能涂层都有助于提高减 反效果, 在此不再赘述。
相应地, 本发明还提供一种光伏器件, 用于将光能转换为电能, 包括: 所述制造方法形成的光学组件, 所述光学组件中的基底为透明 基底; 太阳能电池, 位于所述透明基底远离光的一侧。 其中, 所述透明基底为有机玻璃或者塑料(例如, 聚曱基丙烯酸 曱酯, PMMA )。 所述光学组件与上述实施例中的光学组件相同, 在 此不再赘述。 具体地,所述太阳能电池为非晶硅太阳能电池或微晶硅太阳能电 池。 本发明光伏器件中设置有减反效果良好的抗反射膜, 可以使较多 的光投射至太阳能电池, 提高了光伏器件的光利用率。 除了应用于光伏器件中, 所述光学组件还可以应用于其他产品It should be noted that in other embodiments of the present invention, the low surface energy coating contributes to the improvement of the anti-reflection effect without limiting the materials of the substrate, the anti-reflection film and the low surface energy coating. No longer. Correspondingly, the present invention also provides a photovoltaic device for converting light energy into electrical energy, comprising: an optical component formed by the manufacturing method, a substrate in the optical component is a transparent substrate; a solar cell, located in the transparent The side of the substrate away from the light. Wherein, the transparent substrate is plexiglass or plastic (for example, decyl acrylate, PMMA). The optical component is the same as the optical component in the above embodiment, and details are not described herein again. Specifically, the solar cell is an amorphous silicon solar cell or a microcrystalline silicon solar cell. The anti-reflection film with good anti-reflection effect is disposed in the photovoltaic device of the invention, which can project more light to the solar cell and improve the light utilization efficiency of the photovoltaic device. In addition to being used in photovoltaic devices, the optical components can be applied to other products.
(例如液晶显示器 ), 本领域技术人员可以根据上述实施例进行相应 的修改、 变形和替换。 本发明虽然已以较佳实施例公开如上,但其并不是用来限定本发 明, 任何本领域技术人员在不脱离本发明的精神和范围内, 都可以利 用上述揭示的方法和技术内容对本发明技术方案做出可能的变动和 修改, 因此, 凡是未脱离本发明技术方案的内容, 依据本发明的技术 实质对以上实施例所作的任何筒单修改、 等同变化及修饰, 均属于本 发明技术方案的保护范围。
(e.g., liquid crystal display), those skilled in the art can make corresponding modifications, variations and substitutions according to the above embodiments. The present invention has been disclosed in the above preferred embodiments, but it is not intended to limit the present invention, and the present invention can be utilized with the above disclosed methods and technical contents without departing from the spirit and scope of the invention. The technical solutions make possible changes and modifications. Therefore, any modification, equivalent change and modification of the above embodiments according to the technical essence of the present invention are all technical solutions of the present invention. The scope of protection.
Claims
1. 一种光学组件的制造方法, 其特征在于, 包括: 1. A method of manufacturing an optical component, characterized in that it includes:
提供透光材料微球; Provide light-transmitting material microspheres;
对所述透光材料微球进行表面处理, 使所述透光材料微球表面携 带同性电荷; Surface treatment is performed on the light-transmitting material microspheres so that the surface of the light-transmitting material microspheres carries a homogeneous charge;
提供基底; provide a base;
使所述携带同性电荷的透光材料微球分散排布在所述基底上, 以 形成抗反射膜。 The light-transmitting material microspheres carrying homogeneous charges are dispersed and arranged on the substrate to form an anti-reflective film.
2. 如权利要求 1 所述的制造方法, 其特征在于, 所述透光材料为二 氧化硅、 二氧化钛、 氧化铝或氧化锆。 2. The manufacturing method of claim 1, wherein the light-transmitting material is silicon dioxide, titanium dioxide, alumina or zirconium oxide.
3. 如权利要求 1 所述的制造方法, 其特征在于, 所述透光材料为二 氧化硅, 所述提供透光材料微球的步骤包括制备透光材料微球, 所述制备透光材料微球的步骤包括: 3. The manufacturing method of claim 1, wherein the light-transmitting material is silica, the step of providing light-transmitting material microspheres includes preparing light-transmitting material microspheres, and the preparing light-transmitting material The microsphere steps include:
通过乙醇稀释正硅酸乙酯; Dilute ethyl orthosilicate with ethanol;
将稀释后的正硅酸乙酯浸入至乙醇和水的混合溶液中; Immerse the diluted ethyl orthosilicate into a mixed solution of ethanol and water;
搅拌所述混合溶液形成沉淀物; Stir the mixed solution to form a precipitate;
将所述沉淀物滤出; Filter out the precipitate;
通过水清洗所述沉淀物, 所述沉淀物为二氧化硅敖球。 The precipitate, which is silica spheres, is washed with water.
4. 如权利要求 3 所述的制造方法, 其特征在于, 所述乙醇和水的混 合溶液中, 乙醇和水的体积比位于 8.5: 1~9.5: 1的范围内。 4. The manufacturing method according to claim 3, characterized in that, in the mixed solution of ethanol and water, the volume ratio of ethanol and water is in the range of 8.5: 1 to 9.5: 1.
5. 如权利要求 3 所述的制造方法, 其特征在于, 搅拌所述混合溶液 的步骤包括: 搅拌持续的时间为 1.5~2.5个小时。 5. The manufacturing method of claim 3, wherein the step of stirring the mixed solution includes: the duration of stirring is 1.5 to 2.5 hours.
6. 如权利要求 3 所述的制造方法, 其特征在于, 在将稀释后的正硅 酸乙酯浸入至乙醇和水的混合溶液中之后, 进行搅拌之前, 还包 括在混合溶液中添加氨水, 使所述混合溶液的 PH值位于 7.8~8.2 的范围内。 6. The manufacturing method according to claim 3, characterized in that, after immersing the diluted ethyl orthosilicate into the mixed solution of ethanol and water, and before stirring, it further includes adding ammonia water to the mixed solution, Make the pH value of the mixed solution lie in the range of 7.8~8.2.
7. 如权利要求 3 所述的制造方法, 其特征在于, 对所述透光材料微
球进行表面处理的步骤包括: 7. The manufacturing method according to claim 3, characterized in that: micronizing the light-transmitting material The steps for ball surface treatment include:
将所述二氧化硅微球分散于乙醇中, 形成悬浮液; Disperse the silica microspheres in ethanol to form a suspension;
在所述悬浮液中添加十二烷基 酸钠, 搅拌所述悬浮液, 以在所 述二氧化硅微球表面形成负电荷。 Add sodium lauryl acid to the suspension, and stir the suspension to form negative charges on the surface of the silica microspheres.
8. 如权利要求 7所述的制造方法, 其特征在于, 所述悬浮液中十二 烷基硫酸钠的浓度位于 0.5~10摩尔 /升的范围内。 8. The manufacturing method according to claim 7, wherein the concentration of sodium lauryl sulfate in the suspension is in the range of 0.5~10 mol/L.
9. 如权利要求 1 所述的制造方法, 其特征在于, 对所述透光材料微 球进行表面处理, 使所述透光材料微球表面携带同性电荷的步骤 包括: 在包含有所述透光材料微球的溶液中放置带电的表面活性 剂, 以使透光材料微球表面携带同性电荷。 9. The manufacturing method of claim 1, wherein the step of surface-treating the light-transmitting material microspheres to make the surface of the light-transmitting material microspheres carry a homogeneous charge includes: A charged surfactant is placed in the solution of the light material microspheres so that the surface of the light-transmitting material microspheres carries a homogeneous charge.
10.如权利要求 9所述的制造方法, 其特征在于, 在包含有所述透光 材料微球的溶液中放置的表面活性剂为十二烷基硫酸钠、 二辛基 琥珀酸磺酸钠、 十二烷基苯磺酸钠或甘胆酸钠, 以使透光材料微 球表面携带负电荷。 10. The manufacturing method according to claim 9, wherein the surfactant placed in the solution containing the light-transmitting material microspheres is sodium lauryl sulfate or sodium dioctyl succinate sulfonate. , sodium dodecylbenzene sulfonate or sodium glycocholate, so that the surface of the light-transmitting material microspheres carries negative charges.
11.如权利要求 9所述的制造方法, 其特征在于, 在包含有所述透光 材料微球的溶液中放置的表面活性剂为十四烷基 -二曱基吡啶溴 化铵、 三十六基氯化铵或二曱基二烯丙基氯化铵, 以使透光材料 微球表面携带正电荷。 11. The manufacturing method according to claim 9, wherein the surfactant placed in the solution containing the light-transmitting material microspheres is tetradecyl-dimethylpyridinium bromide, Hexalammonium chloride or dimethyldiallylammonium chloride, so that the surface of the light-transmitting material microspheres carries positive charges.
12.如权利要求 1 所述的制造方法, 其特征在于, 对所述透光材料微 球进行表面处理, 使所述透光材料微球表面携带同性电荷的步骤 包括: 在包含有所述透光材料微球的溶液中放置电解质, 以使透 光材料微球表面携带同性电荷。 12. The manufacturing method of claim 1, wherein the step of surface-treating the light-transmitting material microspheres to make the surface of the light-transmitting material microspheres carry a homogeneous charge includes: An electrolyte is placed in the solution of the light-transmitting material microspheres so that the surface of the light-transmitting material microspheres carries a homogeneous charge.
13.如权利要求 12所述的制造方法, 其特征在于, 所述电解质为聚丙 烯氯化铵或苯乙烯磺酸钠。 13. The manufacturing method according to claim 12, characterized in that the electrolyte is polypropylene ammonium chloride or sodium styrene sulfonate.
14.如权利要求 1 所述的制造方法, 其特征在于, 使所述携带同性电 荷的透光材料微球分散排布在基底上, 以形成抗反射膜的步骤包 括: 14. The manufacturing method of claim 1, wherein the step of dispersing the light-transmitting material microspheres carrying homogeneous charges on the substrate to form an anti-reflective film includes:
使所述携带同性电荷的透光材料微球形成涂膜溶液;
将涂膜溶液涂覆在基底上, 形成抗反射膜。 making the light-transmitting material microspheres carrying homogeneous charges form a coating solution; The coating solution is coated on the substrate to form an anti-reflective film.
15.如权利要求 1 所述的制造方法, 其特征在于, 在形成抗反射膜之 后, 还包括: 对所述抗反射膜进行加热处理。 15. The manufacturing method according to claim 1, characterized in that, after forming the anti-reflective film, it further includes: heating the anti-reflective film.
16.如权利要求 1 所述的制造方法, 其特征在于, 所述透光材料微球 为二氧化硅微球, 形成抗反射膜的步骤包括: 16. The manufacturing method of claim 1, wherein the light-transmitting material microspheres are silica microspheres, and the step of forming an anti-reflective film includes:
将二氧化硅微球放置于乙醇中, 形成涂膜溶液; Place the silica microspheres in ethanol to form a coating solution;
通过旋涂工艺在基底上涂覆包含二氧化硅微球的薄膜。 A thin film containing silica microspheres is coated on the substrate via a spin coating process.
17.如权利要求 16所述的制造方法, 其特征在于, 所述涂膜溶液中二 氧化硅微球的重量百分比位于 0.1~5 %的范围内。 17. The manufacturing method according to claim 16, characterized in that the weight percentage of silica microspheres in the coating solution is in the range of 0.1~5%.
18.如权利要求 16所述的制造方法, 其特征在于, 所述旋涂工艺中转 速为每分钟 500 ~ 3000转。 18. The manufacturing method according to claim 16, characterized in that the rotation speed in the spin coating process is 500 to 3000 revolutions per minute.
19.如权利要求 16所述的制造方法, 其特征在于, 形成抗反射膜的步 骤还包括:在 300 ~ 500 °C的加热温度下,对所述薄膜持续加热 2 ~ 12小时。 19. The manufacturing method of claim 16, wherein the step of forming an anti-reflective film further includes: continuously heating the film at a heating temperature of 300 to 500°C for 2 to 12 hours.
20.如权利要求 1 所述的制造方法, 其特征在于, 提供基底之后, 形 成抗反射膜的步骤之前, 还包括: 20. The manufacturing method of claim 1, wherein after providing the substrate and before the step of forming an anti-reflective film, it further includes:
在基底表面上形成预备层, 使所述预备层与所述基底相接触的一 面带有与所述基底表面不同电性的电荷,且使所述预备层与所述抗反 射膜相接触的一面带有与所述抗反射膜的接触面不同电性的电荷。 A preparation layer is formed on the surface of the substrate, so that the side of the preparation layer in contact with the substrate has a charge of a different electrical nature from that of the substrate surface, and the side of the preparation layer in contact with the anti-reflection film It carries charges with different electrical properties from the contact surface of the anti-reflection film.
21.如权利要求 20所述的制造方法, 其特征在于, 形成预备层的步骤 包括: 在基底上交替堆叠第一电性层、 第二电性层, 所述第一电 性层和第二电性层所带电荷的电性不同。 21. The manufacturing method of claim 20, wherein the step of forming the preliminary layer includes: alternately stacking first electrical layers and second electrical layers on the substrate, the first electrical layers and the second electrical layers The electrical properties of the charges carried by the electrical layers are different.
22.如权利要求 21所述的制造方法, 其特征在于, 所述第一电性层和 第二电性层的材料为电解质。 22. The manufacturing method of claim 21, wherein the material of the first electrical layer and the second electrical layer is an electrolyte.
23.如权利要求 21所述的制造方法, 其特征在于, 所述基底的材料为 带负电的玻璃, 所述第一电性层由带正电荷的聚丙烯氯化铵构成, 所述第二电性层由带负电荷的聚苯乙烯磺酸钠构成。 23. The manufacturing method according to claim 21, wherein the material of the substrate is negatively charged glass, the first electrical layer is composed of positively charged polypropylene ammonium chloride, and the second electrical layer is made of positively charged polypropylene ammonium chloride. The electrical layer is composed of negatively charged sodium polystyrene sulfonate.
24.如权利要求 23所述的制造方法, 其特征在于, 形成预备层的步骤
包括: 24. The manufacturing method according to claim 23, characterized in that the step of forming a preliminary layer include:
提供浓度为 0.05~0.15摩尔 /升, PH值为 3~5的聚丙烯氯化铵; 提供浓度为 0.05~0.15摩尔 /升, PH值为 3~5的聚苯乙烯磺酸钠; 通过浸渍涂膜工艺在基底上交替涂覆所述聚丙烯氯化铵、 聚苯乙 烯磺酸钠。 Provide polypropylene ammonium chloride with a concentration of 0.05~0.15 mol/L and a pH value of 3~5; Provide polystyrene sodium sulfonate with a concentration of 0.05~0.15 mol/L and a pH value of 3~5; By dipping The film process alternately coats the polypropylene ammonium chloride and polystyrene sodium sulfonate on the substrate.
25.如权利要求 1 所述的制造方法, 其特征在于, 在形成抗反射膜之 后, 还包括在所述抗反射膜表面形成低表面能涂层。 25. The manufacturing method according to claim 1, characterized in that, after forming the anti-reflective film, it further includes forming a low surface energy coating on the surface of the anti-reflective film.
26.如权利要求 25所述的制造方法, 其特征在于, 在所述抗反射膜表 面形成低表面能涂层的步骤包括: 26. The manufacturing method of claim 25, wherein the step of forming a low surface energy coating on the surface of the anti-reflective film includes:
提供十六烷基三曱氧基硅烷; Provides cetyltrimethoxysilane;
在十六烷基三曱氧基硅烷中添加乙醇形成溶液; Add ethanol to cetyltrimethoxysilane to form a solution;
对所述溶液进行酸化处理; Acidifying the solution;
对酸化处理后的溶液进行搅拌处理; Stir the acidified solution;
通过浸润、 旋涂或喷洒的方式将所述溶液形成在所述抗反射膜表 面。 The solution is formed on the surface of the anti-reflective film by wetting, spin coating or spraying.
27.如权利要求 26所述的制造方法, 其特征在于, 对所述溶液进行酸 化处理包括: 在所述溶液中添加乙酸、 盐酸或硝酸中的至少一种, 使所述溶液的 PH值位于 4.5~5.5范围。 27. The manufacturing method according to claim 26, wherein acidifying the solution includes: adding at least one of acetic acid, hydrochloric acid or nitric acid to the solution so that the pH value of the solution is between 4.5~5.5 range.
28.如权利要求 26所述的制造方法, 其特征在于, 所述搅拌处理的时 间大于或等于 60分钟。 28. The manufacturing method according to claim 26, wherein the stirring time is greater than or equal to 60 minutes.
29.如权利要求 26所述的制造方法, 其特征在于, 当采用浸润方式将 所述溶液形成在所述基底表面时, 将所述基底放置在所述溶液中, 放置时间为 30分钟〜 60分钟。 29. The manufacturing method of claim 26, wherein when the solution is formed on the surface of the substrate by infiltration, the substrate is placed in the solution for 30 minutes to 60 minutes. minute.
30.如权利要求 26所述的制造方法, 其特征在于, 所述溶液中十六烷 基三曱氧基硅烷的质量百分比为 3% - 5%。 30. The manufacturing method of claim 26, wherein the mass percentage of cetyltrimethoxysilane in the solution is 3% - 5%.
31.如权利要求 25所述的制造方法, 其特征在于, 在形成所述低表面 能涂层之后, 还包括: 将所述低表面能涂层晾干, 且进行固化处 理。
31. The manufacturing method according to claim 25, characterized in that, after forming the low surface energy coating, further comprising: drying the low surface energy coating and performing a curing process.
32.如权利要求 31所述的制造方法, 其特征在于, 所述固化处理的时 间范围为 30分钟〜 60分钟, 温度范围为 100 °C~150°C。 32. The manufacturing method according to claim 31, characterized in that the time range of the curing treatment is 30 minutes to 60 minutes, and the temperature range is 100°C~150°C.
33.如权利要求 25所述的制造方法, 其特征在于, 所述低表面能涂层 的材质为曱氧基硅烷、 烷基硅烷、 含氟硅烷或接枝硅氧烷链化合 物。 33. The manufacturing method of claim 25, wherein the low surface energy coating is made of methoxysilane, alkylsilane, fluorine-containing silane or grafted siloxane chain compound.
34.—种光学组件的制造方法, 其特征在于, 包括: 34. A method of manufacturing optical components, characterized by: including:
提供基底; provide a base;
在所述基底上形成包括至少一层抗反射层的抗反射膜; 其中, 形成抗反射层的步骤包括: An anti-reflective film including at least one anti-reflective layer is formed on the substrate; wherein the step of forming the anti-reflective layer includes:
形成带电层; 球。 Forming a charged layer; ball.
35.如权利要求 34所述的制造方法, 其特征在于, 所述带电层由电解 质或带电颗粒形成。 35. The manufacturing method of claim 34, wherein the charged layer is formed of electrolyte or charged particles.
36.如权利要求 34所述的制造方法, 其特征在于, 还包括: 在基底上 完成抗反射膜的制作之后, 对所述光学组件进行加热处理。 36. The manufacturing method of claim 34, further comprising: heating the optical component after completing the production of the anti-reflective film on the substrate.
37.如权利要求 36所述的制造方法, 其特征在于, 所述加热处理的步 骤中加热温度位于 300 ~ 500 °C的范围内, 加热持续的时间位于 30~130分钟的范围内。 37. The manufacturing method according to claim 36, wherein the heating temperature in the heat treatment step is in the range of 300~500°C, and the heating duration is in the range of 30~130 minutes.
38.如权利要求 34所述的制造方法, 其特征在于, 形成带电层的步骤 之前, 还包括: 38. The manufacturing method of claim 34, wherein before the step of forming the charged layer, it further includes:
提供包含有带电层材料的溶液; providing a solution containing a charged layer material;
调节所述溶液的 PH值, 以增加带电层的电量。 The pH value of the solution is adjusted to increase the charge of the charged layer.
39.如权利要求 34所述的制造方法, 其特征在于, 所述透光材料微球 为二氧化硅、 二氧化钛、 氧化铝或氧化锆颗粒。 39. The manufacturing method of claim 34, wherein the light-transmitting material microspheres are silica, titanium dioxide, alumina or zirconium oxide particles.
40.如权利要求 34所述的制造方法, 其特征在于, 在所述带电层上分 散排布与所述带电层电性不同的透光材料微球的步骤之前, 还包 括:
提供透光材料微球; 40. The manufacturing method according to claim 34, characterized in that, before the step of dispersing and arranging light-transmitting material microspheres with electrical properties different from those of the charged layer on the charged layer, it further includes: Provide light-transmitting material microspheres;
调节所述透光材料微球的 PH值, 以增加所述透光材料微球的电 量。 Adjust the pH value of the light-transmitting material microspheres to increase the charge of the light-transmitting material microspheres.
41.如权利要求 34所述的制造方法, 其特征在于, 所述透光材料微球 为带有负电荷的二氧化硅微球。 41. The manufacturing method of claim 34, wherein the light-transmitting material microspheres are negatively charged silica microspheres.
42.如权利要求 41所述的制造方法, 其特征在于, 在所述带电层上分 散排布与所述带电层电性不同的透光材料微球的步骤之前, 还包 括: 通过氢氧化钠或氨水溶液调节所述二氧化硅微球的 PH值,使 二氧化硅微球的 PH值位于 8.5~9.5的范围内。 42. The manufacturing method according to claim 41, characterized in that, before the step of dispersing and arranging light-transmitting material microspheres with electrical properties different from those of the charged layer on the charged layer, it further includes: passing sodium hydroxide through the Or an ammonia solution is used to adjust the pH value of the silica microspheres so that the pH value of the silica microspheres is in the range of 8.5 to 9.5.
43.如权利要求 41所述的制造方法, 其特征在于, 所述二氧化硅微球 的粒径位于 5~10nm的范围内。 43. The manufacturing method of claim 41, wherein the particle size of the silica microspheres is in the range of 5 to 10 nm.
44.如权利要求 34所述的制造方法, 其特征在于, 所述带电层为带正 电荷的聚丙烯氯化铵。 44. The manufacturing method of claim 34, wherein the charged layer is positively charged polypropylene ammonium chloride.
45.如权利要求 44所述的制造方法, 其特征在于, 形成带电层的步骤 之前, 还包括: 在聚丙烯氯化铵中加入盐酸或氢氧化钠, 使所述 聚丙烯氯化铵的 PH值位于 7~8的范围内。 45. The manufacturing method according to claim 44, characterized in that, before the step of forming the charged layer, it further includes: adding hydrochloric acid or sodium hydroxide to the polyacrylic ammonium chloride to adjust the pH of the polyacrylic ammonium chloride. The value is in the range of 7~8.
46.如权利要求 34所述的制造方法, 其特征在于, 46. The manufacturing method according to claim 34, characterized in that,
所述形成带电层的步骤包括: 将基底浸入至带正电荷的聚丙烯氯 化铵溶液中持续 10~20分钟; The step of forming the charged layer includes: immersing the substrate into a positively charged polypropylene ammonium chloride solution for 10 to 20 minutes;
之后,将涂覆有聚丙烯氯化铵的基底浸入至去离子水中,持续 1~5 分钟; 光材料微球的步骤包括:将涂覆有聚丙烯氯化铵的基底浸入至带负电 荷的二氧化硅颗粒溶液中持续 10~20分钟。 After that, the substrate coated with polypropylene ammonium chloride is immersed in deionized water for 1 to 5 minutes; the steps of optical material microspheres include: immersing the substrate coated with polypropylene ammonium chloride into negatively charged The silica particles remain in the solution for 10 to 20 minutes.
47.如权利要求 34所述的制造方法, 其特征在于, 所述带电层由带正 电荷的二氧化钛颗粒形成。 47. The manufacturing method of claim 34, wherein the charged layer is formed of positively charged titanium dioxide particles.
48.如权利要求 34所述的制造方法, 其特征在于, 提供基底之后, 形 成抗反射膜的步骤之前, 还包括:
在基底表面上形成预备层, 使所述预备层与基底相接触的一面带 有与所述基底表面不同电性的电荷,且使所述预备层与所述抗反射膜 相接触的一面带有与所述抗反射膜的接触面不同电性的电荷。 48. The manufacturing method of claim 34, wherein after providing the substrate and before the step of forming an anti-reflective film, the method further includes: A preparation layer is formed on the surface of the substrate, so that the side of the preparation layer in contact with the substrate has a charge of a different electrical nature from that of the substrate surface, and the side of the preparation layer in contact with the anti-reflection film has a charge The contact surface with the anti-reflective film has different electrical charges.
49.如权利要求 48所述的制造方法, 其特征在于, 形成预备层的步骤 包括: 在基底上交替堆叠第一电性层、 第二电性层, 所述第一电 性层和第二电性层所带电荷的电性不同。 49. The manufacturing method of claim 48, wherein the step of forming the preliminary layer includes: alternately stacking first electrical layers and second electrical layers on the substrate, the first electrical layers and the second electrical layers The electrical properties of the charges carried by the electrical layers are different.
50.如权利要求 49所述的制造方法, 其特征在于, 所述第一电性层和 第二电性层的材料为电解质。 50. The manufacturing method of claim 49, wherein the material of the first electrical layer and the second electrical layer is an electrolyte.
51.如权利要求 49所述的制造方法, 其特征在于, 所述基底的材料为 带负电的玻璃, 所述第一电性层由带正电荷的聚丙烯氯化铵构成, 所述第二电性层由带负电荷的聚苯乙烯磺酸钠构成。 51. The manufacturing method according to claim 49, wherein the material of the substrate is negatively charged glass, the first electrical layer is composed of positively charged polypropylene ammonium chloride, and the second electrical layer is made of positively charged polypropylene ammonium chloride. The electrical layer is composed of negatively charged sodium polystyrene sulfonate.
52.如权利要求 51所述的制造方法, 其特征在于, 形成预备层的步骤 包括: 52. The manufacturing method of claim 51, wherein the step of forming the preliminary layer includes:
提供浓度为 0.05~0.15摩尔 /升, PH值为 3~5的聚丙烯氯化铵; 提供浓度为 0.05~0.15摩尔 /升, PH值为 3~5的聚苯乙烯磺酸钠; 通过浸渍涂膜工艺在基底上交替涂覆所述聚丙烯氯化铵、 聚苯乙 烯磺酸钠。 Provide polypropylene ammonium chloride with a concentration of 0.05~0.15 mol/L and a pH value of 3~5; Provide polystyrene sodium sulfonate with a concentration of 0.05~0.15 mol/L and a pH value of 3~5; By dipping The film process alternately coats the polypropylene ammonium chloride and polystyrene sodium sulfonate on the substrate.
53.如权利要求 34所述的制造方法, 其特征在于, 在形成抗反射膜之 后, 还包括在所述抗反射膜表面形成低表面能涂层。 53. The manufacturing method of claim 34, wherein after forming the anti-reflective film, it further includes forming a low surface energy coating on the surface of the anti-reflective film.
54.如权利要求 53所述的制造方法, 其特征在于, 在所述抗反射膜表 面形成低表面能涂层的步骤包括: 54. The manufacturing method of claim 53, wherein the step of forming a low surface energy coating on the surface of the anti-reflective film includes:
提供十六烷基三曱氧基娃烷; Provides cetyltrimethoxysilane;
在十六烷基三曱氧基硅烷中添加乙醇形成溶液; Add ethanol to cetyltrimethoxysilane to form a solution;
对所述溶液进行酸化处理; Acidifying the solution;
对酸化处理后的溶液进行搅拌处理; Stir the acidified solution;
通过浸润、 旋涂或喷洒的方式将所述溶液形成在所述抗反射膜表 面。 The solution is formed on the surface of the anti-reflective film by wetting, spin coating or spraying.
55.如权利要求 54所述的制造方法, 其特征在于, 对所述溶液进行酸
化处理包括: 在所述溶液中添加乙酸、 盐酸或硝酸中的至少一种, 使所述溶液的 PH值位于 4.5~5.5范围。 55. The manufacturing method according to claim 54, wherein the solution is subjected to acid treatment. The chemical treatment includes: adding at least one of acetic acid, hydrochloric acid or nitric acid to the solution so that the pH value of the solution is in the range of 4.5 to 5.5.
56.如权利要求 54所述的制造方法, 其特征在于, 所述搅拌处理的时 间大于或等于 60分钟。 56. The manufacturing method according to claim 54, characterized in that the stirring time is greater than or equal to 60 minutes.
57.如权利要求 54所述的制造方法, 其特征在于, 当采用浸润方式将 所述溶液形成在所述基底表面时, 将所述基底放置在所述溶液中, 放置时间为 30分钟〜 60分钟。 57. The manufacturing method of claim 54, wherein when the solution is formed on the surface of the substrate by infiltration, the substrate is placed in the solution for 30 minutes to 60 minutes. minute.
58.如权利要求 54所述的制造方法, 其特征在于, 所述溶液中十六烷 基三曱氧基硅烷的质量百分比为 3% ~ 5%。 58. The manufacturing method of claim 54, wherein the mass percentage of cetyltrimethoxysilane in the solution is 3% to 5%.
59.如权利要求 53所述的制造方法, 其特征在于, 在形成所述低表面 能涂层之后, 还包括: 将所述低表面能涂层晾干, 且进行固化处 理。 59. The manufacturing method according to claim 53, characterized in that, after forming the low surface energy coating, it further includes: drying the low surface energy coating and performing a curing process.
60.如权利要求 59所述的制造方法, 其特征在于, 所述固化处理的时 间范围为 30分钟〜 60分钟, 温度范围为 100°C~150°C。 60. The manufacturing method according to claim 59, characterized in that the time range of the curing treatment is 30 minutes to 60 minutes, and the temperature range is 100°C~150°C.
61.如权利要求 54所述的制造方法, 其特征在于, 所述低表面能涂层 的材质为曱氧基硅烷、 烷基硅烷、 含氟硅烷或接枝硅氧烷链化合 物。 61. The manufacturing method of claim 54, wherein the low surface energy coating is made of methoxysilane, alkylsilane, fluorine-containing silane or grafted siloxane chain compound.
62.—种如权利要求 1~19中任一权利要求所述的制造方法所形成的光 学组件。 62. An optical component formed by the manufacturing method according to any one of claims 1 to 19.
63.如权利要求 62所述的光学组件, 其特征在于, 透光材料微球在基 底上位于同一层。 63. The optical component according to claim 62, wherein the light-transmitting material microspheres are located on the same layer on the substrate.
64.如权利要求 62所述的光学组件, 其特征在于, 透光材料微球之间 具有间隙。 64. The optical component according to claim 62, characterized in that there are gaps between the light-transmitting material microspheres.
65.如权利要求 62所述的光学组件,其特征在于,基底的材料为玻璃、 金属或塑料。 65. The optical component of claim 62, wherein the material of the substrate is glass, metal or plastic.
66.如权利要求 62所述的光学组件, 其特征在于, 还包括位于所述基 底和所述抗反射膜之间、 与所述基底和所述抗反射膜相接触的预 备层, 其中,
所述预备层与所述基底的接触面分别带有不同电性的电荷; 所述预备层与所述抗反射膜的接触面分别带有不同电性的电荷。 66. The optical component of claim 62, further comprising a preparation layer located between the substrate and the anti-reflective film and in contact with the substrate and the anti-reflective film, wherein, The contact surface between the preliminary layer and the substrate carries charges of different electrical properties respectively; and the contact surface of the preliminary layer and the anti-reflective film carries charges of different electrical properties respectively.
67.如权利要求 66所述的光学组件, 其特征在于, 所述预备层为单层 电性层。 67. The optical component according to claim 66, wherein the preliminary layer is a single electrical layer.
68.如权利要求 66所述的光学组件, 其特征在于, 所述预备层的材料 为电解质。 68. The optical component according to claim 66, wherein the material of the preliminary layer is an electrolyte.
69.如权利要求 66所述的光学组件, 其特征在于, 所述预备层包括多 层电性层。 69. The optical component of claim 66, wherein the preparation layer includes multiple electrical layers.
70.如权利要求 69所述的光学组件, 其特征在于, 所述多层电性层包 括带有不同电性电荷的第一电性层和第二电性层, 所述预备层由 第一电性层、 第二电性层交替堆叠构成。 70. The optical component according to claim 69, wherein the multi-layer electrical layer includes a first electrical layer and a second electrical layer with different electrical charges, and the preparation layer is composed of a first electrical layer The electrical layer and the second electrical layer are alternately stacked.
71.如权利要求 70所述的光学组件, 其特征在于, 所述基底为表面带 负电荷的玻璃, 所述第一电性层由带正电荷的聚丙烯氯化铵构成, 所述第二电性层由带负电荷的聚苯乙烯磺酸钠构成, 所述第一电 性层与所述基底相接触。 71. The optical component of claim 70, wherein the substrate is glass with a negatively charged surface, the first electrical layer is composed of positively charged polypropylene ammonium chloride, and the second The electrical layer is composed of negatively charged sodium polystyrene sulfonate, and the first electrical layer is in contact with the substrate.
72.如权利要求 69所述的光学组件, 其特征在于, 所述预备层中电性 层的数量位于 3~6层的范围内。 72. The optical component according to claim 69, wherein the number of electrical layers in the preliminary layer is in the range of 3 to 6 layers.
73.如权利要求 62所述的光学组件, 其特征在于, 还包括位于所述抗 反射膜表面的低表面能涂层。 73. The optical component of claim 62, further comprising a low surface energy coating located on the surface of the anti-reflective film.
74.如权利要求 73所述的光学组件, 其特征在于, 所述低表面能涂层 的材质为曱氧基硅烷、 烷基硅烷、 含氟硅烷或接枝硅氧烷链化合 物。 74. The optical component according to claim 73, wherein the low surface energy coating is made of methoxysilane, alkylsilane, fluorine-containing silane or grafted siloxane chain compound.
75.如权利要求 73所述的光学组件, 其特征在于, 所述低表面能涂层 的材质为十六烷基三曱氧基硅烷。 75. The optical component according to claim 73, wherein the low surface energy coating is made of cetyltrimethoxysilane.
76.如权利要求 73所述的光学组件, 其特征在于, 所述低表面能涂层 的厚度范围为 10nm~500nm。 76. The optical component according to claim 73, wherein the thickness of the low surface energy coating ranges from 10 nm to 500 nm.
77.—种如权利要求 34~47 中任一权利要求所述的制造方法所形成的 光学组件。
77. An optical component formed by the manufacturing method according to any one of claims 34 to 47.
78.如权利要求 77所述的光学组件, 其特征在于, 还包括位于所述基 底和所述抗反射膜之间、 与所述基底和所述抗反射膜相接触的预 备层, 其中, 78. The optical component according to claim 77, further comprising a preparation layer located between the substrate and the anti-reflective film and in contact with the substrate and the anti-reflective film, wherein,
所述预备层与所述基底的接触面分别带有不同电性的电荷; 所述预备层与所述抗反射膜的接触面分别带有不同电性的电荷。 The contact surface between the preliminary layer and the substrate carries charges of different electrical properties respectively; and the contact surface of the preliminary layer and the anti-reflective film carries charges of different electrical properties respectively.
79.如权利要求 78所述的光学组件, 其特征在于, 所述预备层为单层 电性层。 79. The optical component according to claim 78, wherein the preliminary layer is a single electrical layer.
80.如权利要求 78所述的光学组件, 其特征在于, 所述预备层的材料 为电解质。 80. The optical component according to claim 78, wherein the material of the preliminary layer is an electrolyte.
81.如权利要求 78所述的光学组件, 其特征在于, 所述预备层包括多 层电性层。 81. The optical component of claim 78, wherein the preliminary layer includes multiple electrical layers.
82.如权利要求 81所述的光学组件, 其特征在于, 所述多层电性层包 括带有不同电性电荷的第一电性层和第二电性层 , 所述预备层由 第一电性层、 第二电性层交替堆叠构成。 82. The optical component according to claim 81, wherein the multi-layer electrical layer includes a first electrical layer and a second electrical layer with different electrical charges, and the preliminary layer is composed of a first electrical layer and a second electrical layer. The electrical layer and the second electrical layer are alternately stacked.
83.如权利要求 82所述的光学组件, 其特征在于, 所述基底为表面带 负电荷的玻璃, 所述第一电性层由带正电荷的聚丙烯氯化铵构成, 所述第二电性层由带负电荷的聚苯乙烯磺酸钠构成, 所述第一电 性层与所述基底相接触。 83. The optical component according to claim 82, wherein the substrate is glass with a negatively charged surface, the first electrical layer is composed of positively charged polypropylene ammonium chloride, and the second The electrical layer is composed of negatively charged sodium polystyrene sulfonate, and the first electrical layer is in contact with the substrate.
84.如权利要求 81所述的光学组件, 其特征在于, 所述预备层中电性 层的数量位于 3~6层的范围内。 84. The optical component according to claim 81, wherein the number of electrical layers in the preliminary layer is in the range of 3 to 6 layers.
85.如权利要求 77所述的光学组件, 其特征在于, 还包括位于所述抗 反射膜表面的低表面能涂层。 85. The optical component of claim 77, further comprising a low surface energy coating located on the surface of the anti-reflective film.
86.如权利要求 85所述的光学组件, 其特征在于, 所述低表面能涂层 的材质为曱氧基硅烷、 烷基硅烷、 含氟硅烷或接枝硅氧烷链化合 物。 86. The optical component according to claim 85, wherein the low surface energy coating is made of methoxysilane, alkylsilane, fluorine-containing silane or grafted siloxane chain compound.
87.如权利要求 85所述的光学组件, 其特征在于, 所述低表面能涂层 的材质为十六烷基三曱氧基硅烷。 87. The optical component according to claim 85, wherein the low surface energy coating is made of cetyltrimethoxysilane.
88.如权利要求 85所述的光学组件, 其特征在于, 所述低表面能涂层
的厚度范围为 10nm~500nm。 88. The optical component of claim 85, wherein the low surface energy coating The thickness range is 10nm~500nm.
89.—种光伏器件, 其特征在于, 包括: 89. A photovoltaic device, characterized by: including:
如权利要求 62~72任一权利要求所述的光学组件, 所述光学组件 中的基底为透明基底; The optical component according to any one of claims 62 to 72, wherein the substrate in the optical component is a transparent substrate;
太阳能电池, 位于所述透明基底未设置抗反射膜的一侧。 The solar cell is located on the side of the transparent substrate that is not provided with an anti-reflective film.
90.—种光伏器件, 其特征在于, 包括: 90. A photovoltaic device, characterized by: including:
如权利要求 77~84任一权利要求所述的光学组件, 所述光学组件 中的基底为透明基底; The optical component according to any one of claims 77 to 84, wherein the substrate in the optical component is a transparent substrate;
太阳能电池, 位于所述透明基底未设置抗反射膜的一侧。
The solar cell is located on the side of the transparent substrate that is not provided with an anti-reflective film.
Applications Claiming Priority (10)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210225678.0A CN102774085B (en) | 2012-06-29 | 2012-06-29 | Hydrophobic substrate and preparation method thereof |
CN201210226783.6A CN102815052B (en) | 2012-06-29 | 2012-06-29 | Super-hydrophobic anti-reflection substrate and preparation method thereof |
CN201210226597.2A CN102854547B (en) | 2012-06-29 | 2012-06-29 | Optical component, manufacturing method of optical component and photovoltaic device |
CN2012102265243A CN102955180A (en) | 2012-06-29 | 2012-06-29 | Optical assembly and manufacturing method thereof as well as photovoltaic device |
CN2012102262866A CN102779900A (en) | 2012-06-29 | 2012-06-29 | Optical assembly and manufacturing method thereof and photovoltaic device |
CN201210226597.2 | 2012-06-29 | ||
CN201210226524.3 | 2012-06-29 | ||
CN201210226286.6 | 2012-06-29 | ||
CN201210225678.0 | 2012-06-29 | ||
CN201210226783.6 | 2012-06-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2014000651A1 true WO2014000651A1 (en) | 2014-01-03 |
Family
ID=49782252
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/CN2013/078043 WO2014000651A1 (en) | 2012-06-29 | 2013-06-26 | Optical assembly, manufacturing method therefor, and photovoltaic device |
Country Status (1)
Country | Link |
---|---|
WO (1) | WO2014000651A1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104150785A (en) * | 2014-07-29 | 2014-11-19 | 奇瑞汽车股份有限公司 | Preparation method of hydrophobic glass |
US9771269B2 (en) | 2014-01-27 | 2017-09-26 | So Spark Ltd. | Rapid high-pressure microwave thermal decomposition system, capsule and method for using same |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1809764A (en) * | 2003-06-18 | 2006-07-26 | 旭化成株式会社 | Antireflective film |
US20080171192A1 (en) * | 2007-01-17 | 2008-07-17 | Olar International, Llc. | Nanostructured antireflective optical coating |
EP2375452A1 (en) * | 2010-04-06 | 2011-10-12 | FOM Institute for Atomic and Moleculair Physics | Nanoparticle antireflection layer |
-
2013
- 2013-06-26 WO PCT/CN2013/078043 patent/WO2014000651A1/en active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1809764A (en) * | 2003-06-18 | 2006-07-26 | 旭化成株式会社 | Antireflective film |
US20080171192A1 (en) * | 2007-01-17 | 2008-07-17 | Olar International, Llc. | Nanostructured antireflective optical coating |
EP2375452A1 (en) * | 2010-04-06 | 2011-10-12 | FOM Institute for Atomic and Moleculair Physics | Nanoparticle antireflection layer |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9771269B2 (en) | 2014-01-27 | 2017-09-26 | So Spark Ltd. | Rapid high-pressure microwave thermal decomposition system, capsule and method for using same |
US10106422B2 (en) | 2014-01-27 | 2018-10-23 | So Spark Ltd. | Rapid high-pressure microwave thermal decomposition system, capsule and method for using same |
CN104150785A (en) * | 2014-07-29 | 2014-11-19 | 奇瑞汽车股份有限公司 | Preparation method of hydrophobic glass |
CN104150785B (en) * | 2014-07-29 | 2017-08-04 | 奇瑞汽车股份有限公司 | A kind of preparation method of Hydrophobic glass |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI476254B (en) | Low refractive index film and fabricating method thereof, anti-reflection film and fabricating method thereof, coating liquid film set, substrate with particle laminated film and fabricating method thereof, and optical part | |
Moghal et al. | High-performance, single-layer antireflective optical coatings comprising mesoporous silica nanoparticles | |
Buskens et al. | Antireflective coatings for glass and transparent polymers | |
Zhang et al. | Multifunctional antireflection coatings based on novel hollow silica–silica nanocomposites | |
Jin et al. | Rational design and construction of well-organized macro-mesoporous SiO2/TiO2 nanostructure toward robust high-performance self-cleaning antireflective thin films | |
Zhong et al. | All‐solution‐processed random Si nanopyramids for excellent light trapping in ultrathin solar cells | |
CN102998723B (en) | Antireflection optical assembly and manufacture method | |
Kauppinen et al. | Grass-like alumina with low refractive index for scalable, broadband, omnidirectional antireflection coatings on glass using atomic layer deposition | |
TW201234618A (en) | Process for particle doping of scattering superstrates | |
JP2013007831A (en) | Low-refractive index film, manufacturing method thereof, antireflection film, manufacturing method thereof, and coating liquid set for low-refractive index film | |
WO2017056405A1 (en) | Coated glass plate and method for manufacturing same | |
JP5509571B2 (en) | Substrate with fine particle laminated thin film, method for producing the same, and optical member using the same | |
JP5011653B2 (en) | Low refractive index thin film and manufacturing method thereof | |
JP6307830B2 (en) | Low refractive index film and manufacturing method thereof, antireflection film and manufacturing method thereof, and coating liquid set for low refractive index film | |
CN101770042A (en) | Low-reflection optical interface layer and preparation method thereof | |
WO2014000651A1 (en) | Optical assembly, manufacturing method therefor, and photovoltaic device | |
CN108373610B (en) | Micro-nano structure surface constructs the method for nano coating and its application in antireflective | |
US20140182670A1 (en) | Light trapping and antireflective coatings | |
JP5943754B2 (en) | Hollow particle manufacturing method, antireflection film manufacturing method, and optical element manufacturing method | |
WO2016143297A1 (en) | Glass plate provided with coating film and method for manufacturing same | |
JP2009175671A (en) | Antireflection film for microstructure and method for manufacturing the film | |
JP5286632B2 (en) | Porous membrane and method for producing the same | |
JP4747653B2 (en) | Low refractive index thin film and manufacturing method thereof | |
CN102854547B (en) | Optical component, manufacturing method of optical component and photovoltaic device | |
JP2017181693A (en) | Antireflection film |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 13809891 Country of ref document: EP Kind code of ref document: A1 |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 13809891 Country of ref document: EP Kind code of ref document: A1 |