WO2014060468A1

WO2014060468A1 - Multiple coating device for strip substrates and strip substrate vacuum coating apparatus

Info

Publication number: WO2014060468A1
Application number: PCT/EP2013/071613
Authority: WO
Inventors: Johannes STRÜMPFEL; Michael Hentschel; Falk Otto; Wolfgang Fukarek
Original assignee: Von Ardenne Gmbh
Priority date: 2012-10-16
Filing date: 2013-10-16
Publication date: 2014-04-24
Also published as: KR20140120298A; DE112013000168A5; JP5768194B2; CN103998647A; JP2015508127A; KR101500926B1; CN103998647B

Abstract

The invention relates to a multiple coating device for coating the surface of a strip substrate, comprising a cooling roller with a cylindrical surface for cooling and guiding the strip substrate around a partial circumference of the surface encompassing more than 180° and an arrangement of compartments distributed over a partial circumference of the surface encompassing more than 180° each with at least one treatment device arranged therein. The arrangement of compartments is distributed into two partial arrangements separated by a separating plane, the compartments of each partial arrangement being arranged stationary relative to one another and each partial arrangement enclosing a partial circumference of the surface of the cooling roller encompassing no more than 180°. The device is characterized in that both partial arrangements are displaceable away from the cooling roller in a direction perpendicular to the separating plane. The invention further relates to a strip substrate vacuum coating apparatus with such a multiple coating device.

Description

Multiple coating device for tape substrates and

Tape substrate-vacuum coating system

The invention relates to a multiple coating device, in particular a multi-magnetron sputter coating device, for surface coating of a

Tape substrate according to the preamble of patent claim 1 and a tape substrate vacuum coating system according to

Preamble of claim 11.

Known vacuum coating systems for coating strip-shaped material in process chambers comprise in a first evacuatable coiler chamber an unwinding device with an inserted unwinder of the strip material to be coated, which is arranged in a first roll mill, and in a second evacuatable

Reel chambers a winding device with a

removable take-up of the coated material disposed in a second roll mill. Between the reel chambers to be coated band-shaped material passes through at least one evacuated process chamber, wherein in each process chamber with a process roller chair

Guide means for the band-shaped material and a cooling roller is arranged, over the surface of which

at least one magnetron sputtering source is located.

In other known belt coating systems unwinding and winding are arranged within the process chamber, with the advantage that no separate reel chambers are needed, but with the disadvantage that an exchange of

Uncoiling is not possible without ventilation of the entire process chamber. Also, this type of equipment can be advantageously improved by the invention described herein. From DE 197 35 603 Cl a vacuum coating system for strip-shaped materials is known, which has two process chambers. In each process chamber there is a roller mill, in which deflection rollers, Bandzugmesswalzen and a cooling roller are mounted. Each roller mill is horizontally and vertically adjustable to allow an adjustment to each other and thus wrinkling of the band-shaped

Avoid materials. The process chambers as well as the

Coiler chambers are vacuum-separated from each other by band valves to deal with different gases and with

to be able to work at different pressures. Through the band valves to be coated band-shaped material is transported.

Unwind and take-up are located in reel chambers. The material to be coated is unrolled in the first reel chamber from the unwind, fed to the coating process and then wound up in the second coiler chamber.

Magnetron sputtering sources, but also other coating sources, such as, for example, thermal, can be used for coating the strip-shaped material

Evaporator can be used with steam distribution pipes or ion sources, which are arranged to be adjustable relative to the respective cooling roller, that their central longitudinal line to the central axis of their associated cooling roller is axially parallel adjustable. Depending on the used

Coating source can be provided that one or more coating sources are arranged in each case a compartment, which for the gas separation of the respective

Coating source is suitable with respect to the process chamber.

In addition to the named coating sources, other additionally required process technology can be arranged in the periphery of the cooling roller. With regard to the assembly of the process technology, two groups can be distinguished. So is known process technology, prior to closing the chamber wall of a process chamber in the process chamber

can be arranged. The other group of process technology can be arranged in the process chamber only after or with the closure of the chamber wall by these

Process technology can be brought into the process chamber through an opening in the chamber wall, this process technology being held on one side in the manner of a cantilever (cantilever) on the chamber wall itself. From DE 101 57 186 Cl a vacuum coating system of the type mentioned is known in which the roller mill for the unwinding at a first attachment point in the first coiler chamber, the process roll mill on a second and a third attachment point in the

Process chamber and the roller mill for winding on a fourth attachment point in the second coiler chamber is attached. In the operating condition of the system, the pressure difference between a reel chamber and the

Process chamber, maximum 50 Pa. It has been shown in practice that a pure

Axially parallel displacement of the array of usually several, along the periphery of the surface of the

Chill roller arranged with a small gap

Magnetronsputterquellen or / and Kompartments difficult to implement, without causing contact between the assembly and the cooling roller.

That's why in the past too

Multiple coating devices are used with a chill roll and an array of coating sources and compartments along the periphery of the chill roll that seek to circumvent this problem. For this purpose, these arrangements are divided into several, usually three sub-assemblies of compartments, each comprising a partial circumference of the cooling roller of not more than 180 ° and each other pivotally connected.

In a horizontally oriented axis chill roll, treatment means such as

Coating sources and the space around the

Compartments limiting the treatment facilities are arranged at the positions 2 o'clock, 4 o'clock, 6 o'clock, 8 o'clock and 10 o'clock, whereby the 6 o'clock position corresponds to the lowest point of the periphery of the cooling roller analogously to a dial.

The physically necessary distance of the compartments to the chill roll is only a few in the coating operation

Millimeters, for example 2 to 3 mm because of the necessary pressure separation.

For example, in the case of weekly maintenance of the multiple coating device (e.g., to change the sputtering environment, the targets, etc.), the

Treatment facilities and compartments from the

Process environment, i. from the chill roll.

The procedure here is, in addition to an elaborate

Construction, very cumbersome and time consuming. First, the one-sided on a chamber wall of

Process chamber stored treatment facilities such. Coating sources, regardless of the sub-assemblies of the compartments, are removed from the process chamber.

Subsequently, the partial arrangements of compartments arranged at the 2 o'clock and 10 o'clock positions can be swung outwards, and subsequently the entire

Arrangement of Kompartments by means of lifting table or similar means moved vertically down.

Only after this procedure is it possible to do the whole

Arrangement of compartments to move horizontally out of the process chamber.

An object of the invention is therefore, the Maintenance procedure of Mehrfachbeschichtungseinrich- ments of the type mentioned and the structural design of tape substrate vacuum coating equipment to simplify.

This task is solved by a

Multiple coating device with the features of

Claim 1 and by a tape substrate

Vacuum coating system with the features of claim 11. Advantageous embodiments and further developments are described in the dependent claims. Therefore, a multiple coating device for surface coating of a tape substrate is proposed, comprising a cooling roll with a cylindrical

Mantle surface for cooling the tape substrate by a more than 180 ° part circumference of the lateral surface and a more than 180 ° comprehensive

Partial circumference of the lateral surface distributed arrangement of

Compartments having at least one treatment device arranged therein, wherein the array of compartments is divided into two sub-arrangements of compartments separated by a dividing plane, the compartments each

Partial arrangement are arranged stationary relative to each other and each sub-assembly encloses a partial circumference of the lateral surface of the cooling roller of not more than 180 °, wherein both sub-assemblies in a direction perpendicular to the parting plane of the cooling roller are displaced away.

In other words, the arrangement of compartments in the proposed multiple coating device of at least two sub-assemblies that are not connected to each other and therefore are displaced so that their respective distance from the cooling roller can be increased by moving, at the same time the distance between the two sub-assemblies to each other is enlarged.

Treatment facilities as defined above Multiple coating equipment can be used both as pre-treatment equipment, such as

Etching devices, Substratemperiereinrichtungen or others, as well as coating facilities, such as

For example, magnetron sputtering sources, thermal

Evaporator may be formed with steam distribution pipes, ion sources or others. An arrangement of

Pre-treatment devices and coating devices in one and the same process chamber can here

be provided according to the invention.

In a chill roll with horizontally oriented axis, for example, treatment facilities and

Compartments be distributed over the circumference of the chill roll, but the 6 o'clock position remains free. At this

Place is the dividing plane between the two

Sub-assemblies, whereby it is possible to separate the arrangement of compartments at the 6 o'clock position into two sub-assemblies, which are each horizontally displaceable. In an advantageous embodiment, it is provided that the central axis of the cooling roller is arranged in the parting plane (center plane).

The maintenance procedure is now possible in a few steps.

After the ventilation of the process chamber, the treatment facilities are first removed axially parallel to the central axis of the cooling roller from the process chamber and then the sub-assemblies of compartments each of the

Cooling roller, for example, on each side by 20 mm, moved away. It is expedient that the treatment facilities are arranged stationary in the radial direction of the cooling roller. In this case, to optimize the coating process, a change in the distance of the treatment facilities for Chill roll out, ie a relative displacement of the treatment facilities to their respective compartment, be possible within limits. In this embodiment, the treatment facilities are independent of the sub-assemblies of the compartments movable and out of the process chamber

removable. This is beneficial for

Treatment devices, which are cantilevered (cantilever) on a chamber wall of the process chamber.

In an alternative embodiment can continue

provision is made for treatment devices to be arranged stationary relative to a section of the compartment surrounding these treatment devices, that is to say that the treatment devices are each arranged so as to be movable with the respective subassembly of compartments. The maintenance procedure is now possible in a few steps. After ventilation of the

Process chamber, the sub-assemblies of compartments are moved together with the respective treatment facilities each of the cooling roller, for example, on each side by 20 mm away.

In one embodiment, it is provided that the two

Subassemblies of Kompartments in the axial direction of the cooling roller are displaceable. This makes it possible that the sub-assemblies of compartments in a cooling roller with horizontally aligned axis through an opening of the

Process chamber, which is closed by a trained as a chamber lid chamber wall, are moved out of the process chamber, so that the compartments and

Treatment facilities for maintenance better

are accessible. In this case, the axial movement of the

Subassemblies of compartments at a constant height, i. without a lift table or the like, done horizontally outwards.

Become the sub-assemblies of compartments in this way removed from the process chamber, so can the

Subassemblies in this position outside the process chamber will be opened even further. In this position, access to all process - relevant parts of the

Multiple coating device easily carried out.

Alternatively it can be provided that the sub-assemblies of compartments can be removed from the process chamber individually and independently of each other for maintenance. This design has the advantage that the respective subassembly of compartments outside the process chamber, for example for changing targets, shields, etc., is completely accessible.

In one embodiment, it is provided that both

Subassemblies of compartments are synchronously displaceable. For this purpose, the sub-assemblies may be coupled to each other, for example, by a lever mechanism or the like so that both sub-assemblies of compartments are shifted by one and the same drive means, such as an electric motor or the like by the same amount. Preference is given to a pneumatic

Driving means. This is gentler and stops when an obstacle is in the way.

In an alternative embodiment it is provided that both partial arrangements of compartments independently

are displaced from each other. In this case, a separate drive means is required for each subassembly, or the subassemblies are manually shifted by the operator.

An increase in the number of treatment facilities can lead to an odd number (3, 5, 7, etc.) of treatment facilities along the periphery of the

Chill roller is arranged. It is advantageous if the 6 o'clock position is occupied by a treatment device is, so it is provided that at least one treatment device is arranged in the region of the parting plane. The at least one treatment device is arranged in a compartment. This arranged in the parting plane treatment device is in this case either independently of the compartments from the process chamber removed or arranged on one of the sub-assemblies of compartments, so that it can be moved together with this sub-assembly of compartments and removed from the process chamber. To achieve high gas separation values, like them

For example, for low-E (low emissivity) coatings are required, it can be provided that the

Treatment device in the region of the parting plane surrounding compartment is formed separable. The compartment located in the 6 o'clock position is therefore designed to be at least two parts, it being possible to provide that in each case a part of this compartment is arranged on one of the two partial arrangements of compartments.

The sealing of the two parts of this compartment

relative to the process chamber according to the invention

For example, be realized by narrow gaps, flexible metal lips or elastomer seals. Alternatively, both parts of this compartment can also be arranged against a part of the process chamber which is stationary with respect to the process chamber

Be movable process technology to form a sealing surface with this.

In an alternative embodiment can continue

be provided that the located in the 6 o'clock position compartment is formed as a unit and is arranged on only one of the two sub-assemblies.

In a further embodiment, it is provided that the two partial arrangements of compartments are symmetrical

are designed to each other. This allows the Multiple coating device are structurally particularly simple.

In a further embodiment, it is provided that the two sub-assemblies of compartments are arranged on a common supporting and guiding device, which

Movements of the sub-assemblies perpendicular to the parting plane and allows axially to the cooling roller. These support and

Guide means may for example be designed so that it allows a shift of both partial arrangements of compartments in a plane, similar to an x-y table.

Furthermore, a tape substrate vacuum coating system is proposed to solve the problem, the one from

Chamber walls formed process chamber and in the

Process chamber having a multi-coating device of the type described above.

In one embodiment, it is provided that at least one chamber wall in the region of the subassemblies of compartments has a vacuum-tight closable opening, through which the subassemblies can be moved out of the process chamber or into the process chamber. The opening may be closable by a door or a lid, the door or the lid having one or both

Subassemblies may be connected, so that opening the door or removing the lid causes a movement of the door

Subassemblies through the opening or openings of the

Chamber wall causes, whereby the sub-assemblies are moved out of the process chamber.

In a further embodiment it is provided that the sub-assemblies of compartments outside the process chamber to increase their distance further perpendicular to

Dividing plane are displaced. This makes it possible to keep the opening or openings in the chamber wall small. For this purpose, it may be provided that the sub-assemblies of compartments are arranged on one or on a common support and guide device. The

Subassemblies are moved only a few centimeters away from the chill roll and then moved out of the process chamber in the axial direction of the chill roll. Only then are the sub-assemblies of compartments again shifted perpendicular to the parting plane, so that their distance from one another increases to make them more accessible for maintenance purposes.

The invention is based on

Embodiments and associated drawings explained in more detail. Show

Fig. 1 is a side view of a

Multiple coating device with an even number of treatment devices in the closed state,

FIG. 2 shows the multiple coating device from FIG. 1 in the opened state, FIG.

Fig. 3 is a perspective view of the Mehrfachbe- layering device of Figs. 1 and 2 and

Fig. 4 is a side view of a

Multiple coating device with an odd number of treatment devices.

The illustrated in Figures 1 to 3

Multiple coating device for surface coating of a belt substrate (not shown here),

For example, a plastic film comprises a cooling roller 1 with a rotation axis 11 and a cylindrical

Mantle surface 12 for cooling the tape substrate by a more than 180 ° comprehensive part of the circumferential surface 12 around. For this purpose, the tape substrate in the process chamber of a tape substrate vacuum coating system from the top left Coming introduced into the gap 13 between the cooling roll 1 and the arrangement of treatment facilities 4. The tape substrate is passed through the gap 13 and thus over the periphery of the cooling roll 1. Over a more than 180 ° comprehensive extent of the

The lateral surface 12 of the cooling roller 1 around is an arrangement of four each designed as a sputtering magnetron treatment facilities 4, each with one on the

Jacket surface 12 directed coating direction distributed. The treatment devices 4 are each in one

Compartment 21 is arranged, wherein the

Treatment facilities 4 unilaterally in one

shown chamber wall of a process chamber are supported. The treatment devices 4 are arranged stationary relative to one another. The compartments 21 are movable relative to the treatment devices 4.

During the treatment devices 4, the belt substrate running through the gap 13 with coating material

Coating, the tape substrate is simultaneously cooled by the contact with the cooling roller 1. Finally, the coated tape substrate leaves the gap 13 at the top right between the chill roll 1 and the assembly of

Treatment facilities 4.

The arrangement of compartments 21 is in two separated by a dividing plane 3 sub-assemblies 2 of two

Split 21 compartments, which are symmetrical to each other. Alternatively, other arrangements of compartments 21 and treatment facilities 4 could be used, for example, six compartments 21 and treatment facilities 4, ie, three compartments 21 and treatment facilities 4 on each side, or other arrangements, may be practiced without departing from the spirit of the invention. The position of subassemblies 2 in the process can

be secured mechanically, for example by bolts. In this process position, the compartments have 21 to

Chill roll 1, for example, a distance of 3 mm. Depending on the required process pressure, the required distance may be different, for example 2 mm to 4 mm.

The compartments 21 of each sub-assembly 2 are arranged stationary relative to each other by each with a

Stand 22 are connected, the spatial structure of stringers 23, i. rod-shaped structural elements which run parallel to the axis of rotation 11 of the cooling roll 1, and ribs 24, i. planar structural elements which extend perpendicular to the axis of rotation 11 of the cooling roller 1, and also each having two base support 25 which extend parallel to the axis of rotation 11 of the cooling roller 1 as the stringers 23, wherein the base support 25 of both sub-assemblies 2 lie in the same horizontal plane.

Each of the two sub-assemblies 2 encloses a

Partial circumference of the lateral surface 12 of the cooling roll 1 of not more than 180 °. This is the condition for that

Subassemblies 2 in each case in a direction perpendicular to the parting plane 3 of the cooling roller 1 to move away to increase their distance from the cooling roller 1 and the distance that the sub-assemblies 2 have to each other.

These are the sub-assemblies 2 to two each

Base supports 25 stored during installation of the

Multiple coating device on a support and

Guide device can be arranged in the interior of a process chamber of a tape substrate vacuum coating system, which displacements of the sub-assemblies. 2

perpendicular to the parting plane 3, ie in the plane of the drawing of FIGS. 1 and 2, and axially to the cooling roll 1, ie parallel to the Rotary axis 11 of the cooling roller 1, allows. The illustrated in Figure 4

Multiple coating device for surface coating of a tape substrate 5, for example a plastic film, comprises a cooling roller 1 having a rotation axis 11 and a cylindrical surface 12 for cooling the tape substrate 5 by more than 180 °

Partial circumference of the lateral surface 12 around. This will be the

Tape substrate 5 in the process chamber of a tape substrate vacuum coating system coming from top left over

Guide rollers 6 in the gap 13 between the cooling roller 1 and the arrangement of each as sputtering magnetron

trained treatment facilities 4 introduced. The tape substrate 5 is inserted through the gap 13 between the

Chill roll 1 and the sputter plates 7 of the compartments 21 and thus passed over the periphery of the cooling roll 1.

Over a more than 180 ° comprehensive extent of the

Mantle surface 12 of the cooling roller 1 around is an arrangement of a total of five treatment devices 4, each with a directed onto the lateral surface 12 coating direction distributed. The treatment devices 4 in the 2 o'clock, 4 o'clock, 8 o'clock and the 10 o'clock position are designed as tube magnetrons. In contrast to the embodiment of

Figures 1 to 3, the number of treatment devices 4 in this embodiment, however, odd, so that the fifth treatment device 4 is arranged in the 6 o'clock position in the parting plane 3 and formed as Planarmagnetron. The arranged in the 6 o'clock position

However, according to the invention coating source 4 could also be designed as tube magnetron or other treatment device.

Two tubular magnetrons as well as one

Planar magnetrons are each in a compartment 21 arranged, wherein the treatment means 4 are held on one side to a chamber wall, not shown, of a process chamber. The treatment devices 4 are arranged stationary relative to one another. The compartments 21 are movable relative to the cooling roll 1 and to the treatment devices 4.

While the treatment devices 4 coat the belt substrate 5 passing through the gap 13 with coating material, the belt substrate 5 is simultaneously cooled by the contact with the cooling roller 1. Finally, the coated tape substrate 5 leaves the gap 13 at the top right between the cooling roll 1 and the arrangement of

Treatment facilities 4.

The arrangement of compartments 21 is in two separated by a dividing plane 3 sub-assemblies 2 of one each

Split compartment 21, which are symmetrical to each other. Another compartment 21, which is arranged in the 6 o'clock position, is divided into two parts, so that the two parts of this compartment 21 opposite the

Process chamber must be sealed. According to the

Embodiment is provided for this purpose that both parts of this compartment 21 are movable against a support which is provided for holding the Planarmagnetrons. According to the invention also seals are provided which have only a sealing surface, i. that the two parts form a common sealing surface, the

For example, by narrow gaps, flexible metal lips or elastomer seals can be realized.

The position of subassemblies 2 in the process can

Chill roll 1, for example, a distance of 3 mm. Depending on the required process pressure, the required distance may be different, for example 2 mm to 4 mm amount.

Each of the two sub-assemblies 2 encloses a

Subassemblies 2 in each case in a direction perpendicular to the parting plane 3 of the cooling roller 1 to move away to increase their distance from the cooling roller 1 and the distance that the sub-assemblies 2 have to each other. This direction perpendicular to the parting plane 3 is shown in Fig. 4 by a double arrow for each of

Subassemblies 2 shown.

Multiple coating device for tape substrates and

Tape substrate-vacuum coating system

LIST OF REFERENCE NUMBERS

1 chill roll

11 axis of rotation

12 lateral surface

13 gap

2 partial arrangement of compartments

21 compartment

22 frame

23 stringers

24 frame

25 basic beams

3 parting plane

4 treatment device

5 tape substrate

6 leadership role

7 sputter plate

Claims

Multi-coating device for tape substrates and tape substrate vacuum coating system Claims

1. multiple coating device for

Surface coating of a tape substrate (5), comprising a cooling roller (1) with a cylindrical outer surface (12) for the cooling guidance of the

Band substrate (5) around a more than 180 ° comprehensive part circumference of the lateral surface (12) around and a distributed over a more than 180 ° part of the circumference of the lateral surface (12) distributed arrangement of

Compartments (21) having at least one treatment device (4) arranged therein, the arrangement of compartments (21) being divided into two sub-arrangements (2) separated by a dividing plane (3).

divided, the compartments (21) each

Partial arrangement (2) fixed relative to each other

are arranged and each sub-assembly (2) encloses a partial circumference of the lateral surface (12) of the cooling roller (1) of not more than 180 °, characterized

in that both partial arrangements (2) are displaceable away from the cooling roller (1) in a direction perpendicular to the parting plane (3).

2. Multiple coating device according to claim 1, characterized in that the

Treatment facilities (4) in the radial direction of the cooling roller (1) are arranged stationary.

3. Multiple coating device according to claim 1, characterized in that treatment facilities

(4) fixed against a section of this Treatment facilities (4) surrounding compartments (21) are arranged.

Multiple coating device according to one of the preceding claims, characterized in that the two sub-assemblies (2) in the axial direction (11) of the cooling roller (1) are displaceable.

Multiple coating device according to one of the preceding claims, characterized in that both sub-assemblies (2) are synchronously displaceable.

Multiple coating device according to one of

Claims 1 to 4, characterized in that both sub-assemblies (2) independently

are displaceable.

Multiple coating device according to one of the preceding claims, characterized in that at least one treatment device (4) is arranged in the region of the parting plane (3).

Multiple coating device according to claim 7, characterized in that the

Treatment device (4) in the region of the parting plane (3) surrounding compartment (21) is formed separable.

Multiple coating device according to one of the preceding claims, characterized in that the two sub-assemblies (2) are designed symmetrically to one another.

Multiple coating device according to one of the preceding claims, characterized in that the two sub-assemblies (2) on a

common support and guide means are arranged, which displacements of the sub-assemblies (2) perpendicular to the parting plane (3) and axially (11) to the cooling roller (1) allows.

A tape substrate vacuum deposition apparatus comprising a process chamber formed from chamber walls and a process chamber

Multiple coating device according to one of claims 1 to 10.

Tape substrate vacuum coating system according to claim 11, characterized in that at least one chamber wall in the region of the sub-assemblies (2) has a vacuum-tight closable opening through which the sub-assemblies (2) from the process chamber or into the process chamber are movable.

Tape substrate vacuum coating apparatus according to claim 11 or 12, characterized in that the

Subassemblies (2) outside the process chamber to increase their distance further perpendicular to the parting plane (3) are displaceable.