WO2013084496A1 - 無線モジュール - Google Patents
無線モジュール Download PDFInfo
- Publication number
- WO2013084496A1 WO2013084496A1 PCT/JP2012/007826 JP2012007826W WO2013084496A1 WO 2013084496 A1 WO2013084496 A1 WO 2013084496A1 JP 2012007826 W JP2012007826 W JP 2012007826W WO 2013084496 A1 WO2013084496 A1 WO 2013084496A1
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- WIPO (PCT)
- Prior art keywords
- substrate
- wireless module
- antenna
- module
- connection member
- Prior art date
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- 239000000758 substrate Substances 0.000 claims abstract description 251
- 230000008054 signal transmission Effects 0.000 claims description 13
- 239000004065 semiconductor Substances 0.000 abstract description 26
- 239000010949 copper Substances 0.000 description 14
- 230000010287 polarization Effects 0.000 description 14
- 239000011347 resin Substances 0.000 description 12
- 229920005989 resin Polymers 0.000 description 12
- 230000004048 modification Effects 0.000 description 9
- 238000012986 modification Methods 0.000 description 9
- 230000002093 peripheral effect Effects 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 238000007789 sealing Methods 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910000679 solder Inorganic materials 0.000 description 4
- 238000004891 communication Methods 0.000 description 3
- 239000011889 copper foil Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- CNQCVBJFEGMYDW-UHFFFAOYSA-N lawrencium atom Chemical compound [Lr] CNQCVBJFEGMYDW-UHFFFAOYSA-N 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q21/00—Antenna arrays or systems
- H01Q21/06—Arrays of individually energised antenna units similarly polarised and spaced apart
- H01Q21/061—Two dimensional planar arrays
- H01Q21/065—Patch antenna array
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/18—Printed circuits structurally associated with non-printed electric components
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49811—Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
- H01L23/49816—Spherical bumps on the substrate for external connection, e.g. ball grid arrays [BGA]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49833—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers the chip support structure consisting of a plurality of insulating substrates
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/14—Structural association of two or more printed circuits
- H05K1/144—Stacked arrangements of planar printed circuit boards
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/16235—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a via metallisation of the item
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/16238—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a bonding area protruding from the surface of the item
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/13—Mountings, e.g. non-detachable insulating substrates characterised by the shape
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/1515—Shape
- H01L2924/15153—Shape the die mounting substrate comprising a recess for hosting the device
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1532—Connection portion the connection portion being formed on the die mounting surface of the substrate
- H01L2924/15321—Connection portion the connection portion being formed on the die mounting surface of the substrate being a ball array, e.g. BGA
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/35—Mechanical effects
- H01L2924/351—Thermal stress
- H01L2924/3511—Warping
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q1/00—Details of, or arrangements associated with, antennas
- H01Q1/12—Supports; Mounting means
- H01Q1/22—Supports; Mounting means by structural association with other equipment or articles
- H01Q1/2283—Supports; Mounting means by structural association with other equipment or articles mounted in or on the surface of a semiconductor substrate as a chip-type antenna or integrated with other components into an IC package
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q9/00—Electrically-short antennas having dimensions not more than twice the operating wavelength and consisting of conductive active radiating elements
- H01Q9/04—Resonant antennas
- H01Q9/0407—Substantially flat resonant element parallel to ground plane, e.g. patch antenna
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/18—Printed circuits structurally associated with non-printed electric components
- H05K1/182—Printed circuits structurally associated with non-printed electric components associated with components mounted in the printed circuit board, e.g. insert mounted components [IMC]
- H05K1/185—Components encapsulated in the insulating substrate of the printed circuit or incorporated in internal layers of a multilayer circuit
- H05K1/186—Components encapsulated in the insulating substrate of the printed circuit or incorporated in internal layers of a multilayer circuit manufactured by mounting on or connecting to patterned circuits before or during embedding
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/04—Assemblies of printed circuits
- H05K2201/042—Stacked spaced PCBs; Planar parts of folded flexible circuits having mounted components in between or spaced from each other
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10007—Types of components
- H05K2201/10098—Components for radio transmission, e.g. radio frequency identification [RFID] tag, printed or non-printed antennas
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10227—Other objects, e.g. metallic pieces
- H05K2201/10234—Metallic balls
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10613—Details of electrical connections of non-printed components, e.g. special leads
- H05K2201/10621—Components characterised by their electrical contacts
- H05K2201/10674—Flip chip
Definitions
- the present disclosure relates to a wireless module used for wireless communication and mounting an electronic component on a substrate.
- circuit module for wireless communication in which an electronic circuit is mounted (mounted) on a substrate, a substrate on which an active element (for example, IC (Integrated Circuit) is mounted) and a substrate on which a passive element (for example, a resistor, an inductor, or a capacitor) is mounted
- an active element for example, IC (Integrated Circuit) is mounted
- a passive element for example, a resistor, an inductor, or a capacitor
- Patent Document 1 discloses a semiconductor device as a wireless module using a substrate on which an antenna as a passive element is mounted and a substrate on which a semiconductor element as an active element is mounted.
- an antenna is mounted on one surface side of a silicon substrate, a semiconductor element as an active element is mounted on the other surface side of the silicon substrate, and the antenna and the semiconductor element are through vias penetrating the silicon substrate. It is electrically connected via A passive element is mounted on one surface side of a wiring substrate separately formed from the silicon substrate, and the wiring substrate and the silicon substrate are disposed between the one surface side of the wiring substrate and the other surface side of the silicon substrate It has become the structure electrically connected via the connection member.
- a first substrate on which an active element and a passive element are mounted and a second substrate on which an antenna is mounted are disposed opposite to each other, and two substrates are electrically connected by a connection member.
- a semiconductor element for example, an IC
- a chip capacitor as a passive element
- a chip resistor are mounted on a first substrate
- Cu copper
- the mounting surfaces (mounting surfaces) of the first substrate and the second substrate are made to face each other, and the solder of the connecting member is melted and electrically connected to the first substrate, and then the mold resin as a sealing material is used as a substrate Fill in the embedded layer where there are parts between and seal with resin. Thereby, the wireless module of the structure which laminated
- Patent Document 1 In the technique of Patent Document 1, it is difficult to uniformly adjust the thickness of the module in the assembled wireless module.
- the present disclosure has been made in view of the above circumstances, and an object thereof is to uniformly adjust the thickness of a module in a wireless module after assembly.
- the present disclosure is a wireless module, and includes a first substrate on which a mounting component of a wireless circuit is mounted, a second substrate disposed to be stacked on the first substrate, and a first substrate and a second substrate.
- a connecting member connected to at least one of the first and second substrates to form a mountable space between the first substrate and the second substrate, the plurality of connecting members being the first connecting member; It is disposed at a uniform position between the substrate and the second substrate.
- FIG. 3 A plan view showing an arrangement configuration of connection members in a wireless module according to a second embodiment Top view showing arrangement configuration of connecting members in wireless module of third embodiment AA cross section of the wireless module shown in FIG. 3 A plan view showing a configuration example of a periphery of a through via connected to a ground pattern in the first to third embodiments Side sectional view showing a configuration example of a wireless module in a fourth embodiment of the present invention Side sectional view showing a configuration example of a wireless module according to a fifth embodiment of the present invention
- a connecting member for connecting a plurality of substrates is electrically connected to a wiring pad provided on the substrate.
- the connection member and the wiring pad are arranged according to the layout of the element to be mounted on the substrate and the wiring pattern of the substrate.
- the connection members for example, the deflection of the substrate, the deviation of the filling amount of the sealing material between the substrates may occur during manufacture, and the thickness of the module may become uneven. If the thickness of the module is not uniform, for example, a torsional stress may be applied to the substrate, which may result in a mounting failure in which the connection of the contact of the element is incomplete.
- the directivity characteristic of the antenna may change.
- FIG. 1 is a view showing an example of the configuration of a conventional wireless module, in which (A) is a cross-sectional view, (B) is a plan view from above with the second substrate removed, and (C) is It is the top view seen from the top of the 2nd substrate.
- the wireless module includes a first substrate 101 to be a main substrate and a second substrate 102 to be a sub-substrate.
- the first substrate 101 is provided with a wiring pattern 104 on one surface side, and a semiconductor element 103 which is an active element is mounted as a mounting component of a wireless circuit.
- the wiring pad 107 is formed on one side of the second substrate 102, and the connection member 106 is mounted on the wiring pad 107.
- the connection member 106 is mounted on the wiring pad 107.
- the second substrate 102 has a pad-like antenna 108 formed on the other surface side, and is electrically connected to the wiring pad 107 on the one surface side by the through via 109.
- Cu core ball connection members 106 are arranged in a row near one side of the second substrate 102.
- the one surface side of the first substrate 101 and the one surface side of the second substrate 102 are disposed to face each other, and the connection member 106 is connected to the wiring pad 105 of the first substrate 101, whereby the second substrate 102 is firstly connected by the connection member 106.
- the substrate 101 is electrically connected.
- the sealing resin 110 is filled and sealed in the embedded layer in which the semiconductor element 103 between the first substrate 101 and the second substrate 102 is present.
- connection member 106 since the connection member 106 is disposed in a biased manner, for example, in the manufacture of the wireless module, the deflection of the second substrate 102 and the imbalance of the filling amount of the sealing resin 110 between the substrates occur. Thickness may become uneven.
- a step of forming and dividing a plurality of modules in parallel on a large substrate is adopted, and therefore there is a bias in the arrangement of connection members in the module There is a high possibility of deviation in the thickness of each module after division.
- the thickness of the module is not uniform, for example, a torsional stress may be applied to the first substrate 101 and the second substrate 102, and a mounting failure of the semiconductor element 103 may occur.
- the outer surface (the other surface side) of the second substrate 102 may be inclined to change the directivity of the antenna 108 of the wireless module.
- the following embodiment shows the example of composition of the wireless module which can adjust the thickness of the module after an assembly uniformly to the above-mentioned subject.
- a wireless module for example, some configuration examples of a wireless module which is used in a high frequency band of a millimeter wave band of 60 GHz and on which an antenna and a semiconductor element are mounted will be shown.
- FIG. 2 is a cross-sectional view showing the configuration of the wireless module according to the first embodiment of the present disclosure.
- the wireless module of the present embodiment has a first substrate 11 to be a main substrate and a second substrate 12 to be a sub-substrate.
- the first substrate 11 and the second substrate 12 are formed using, for example, a dielectric insulating material having a dielectric constant of about 3 to 4.
- the first substrate 11 is provided with a wiring pattern 13 made of, for example, copper foil on one surface side, and a semiconductor element (for example, an IC) 14 which is an active element is mounted as a mounting component of a wireless circuit. Further, the first substrate 11 is provided with a wiring pad 15 for electrically connecting the connection member 18.
- the second substrate 12 has a ground pattern 17 made of copper foil, for example, and a circular wiring pad 16 formed on one side, and a connection member 18 made of Cu core ball solder-plated on the wiring pad 16 is mounted. ing.
- the second substrate 12 has a pad-shaped antenna 20 made of copper foil, for example, formed on the other surface side, and is electrically connected to the wiring pad 16 on the one surface side by the through via 21.
- the antenna 20 is formed by one or more antenna elements.
- the wiring pad 16 may include a wiring pattern.
- connection members 18 are arranged at equal positions in the substrate plane direction (XY plane) of the first substrate 11 and the second substrate 12.
- the two connection members 18A and 18B are disposed symmetrically with respect to the central portion (substrate center line C1) of the substrate in the horizontal direction (X direction) in the drawing.
- connection member 18 serves as a signal transmission path (signal line) between the wireless circuit of the first substrate 11 and the antenna 20 of the second substrate 12.
- the connection members 18A and 18B on both sides are connected to both the first substrate 11 and the second substrate 12, respectively.
- connection member 18 is provided between the first substrate 11 and the second substrate 12 in order to form an interval at which mounting components including the semiconductor element 14 can be mounted. Then, in the embedded layer in which the semiconductor element 14 between the first substrate 11 and the second substrate 12 is present, for example, the sealing resin 22 of mold resin is filled and sealed.
- FIG. 3 is a plan view showing an arrangement configuration of connection members in the wireless module of the first embodiment.
- FIG. 3 is a plan view seen from above with the second substrate of the wireless module removed, that is, a view for explaining the arrangement of the connecting members 18 by the Cu core balls in the wireless module.
- connection members 18 are arranged in the shape of a line at six positions in the vicinity of the symmetrical position along the two opposing sides. That is, the connection member 18A on the left side in the drawing and the connection member 18B on the right side in the drawing are located symmetrically on the substrate. As a result, the arrangement of the connection members 18 is evenly balanced in the first substrate 11 and the second substrate 12.
- connection members 18 As described above, by arranging the connection members 18 symmetrically on the substrate, it is possible to suppress the torsional stress applied to the substrate, and to suppress the deflection of the substrate of the wireless module and the unevenness of the filling amount of the sealing resin 22 between the substrates. .
- the connecting member 18 also functions as a member that regulates the distance between the substrates. Therefore, the thickness of the module can be adjusted uniformly, and mounting defects due to warpage, deflection, and unevenness of the wireless module can be reduced. Moreover, the inclination of the antenna surface of a wireless module can be reduced, and the change in antenna characteristics before and after assembling can be suppressed.
- FIG. 4 is a cross-sectional view showing a configuration of a wireless module according to a modification of the first embodiment, in which (A) shows a first modification and (B) shows a second modification.
- both the connecting member 18A on the left side and the connecting member 18B on the right side in the drawing are connected to both the first substrate 11 and the second substrate 12, respectively.
- the first connection member 18A on the left side in the drawing is connected to both the first substrate 11 and the second substrate 12, and the second connection member on the right side in the other drawing 18B is connected to the upper second substrate 12 in the drawing and not connected to the lower first substrate 11 in the drawing.
- the connection member 18B may be connected to the first substrate 11. That is, the second connection member 18B is provided as a dummy Cu core ball to adjust the distance between the substrates for preventing the deflection of the substrates.
- the connecting member 18 is preferably connected to both substrates, but even if it is connected to one of the substrates, the effect of being able to uniformly adjust the thickness of the module as in the first embodiment is obtained.
- the third connecting member 18C on the right side in the figure is connected to the second substrate 12 on the upper side in the figure, and the first connecting member on the lower side in the figure It is not connected to the substrate 11.
- the third connecting member 18C has an outer dimension different from that of the first connecting member 18A on the left side in the drawing, and is smaller than the connecting member 18A.
- the third connection member 18C may be connected to the first substrate 11.
- connection member provided as a dummy Cu core ball is provided between the substrates for preventing the deflection of the substrate by providing the connection members at equal positions on the substrate even if the outer dimensions (dimensions in the module thickness direction (Z direction) differ).
- FIG. 5 is a plan view showing an arrangement configuration of connection members in the wireless module of the second embodiment.
- FIG. 5 is a plan view seen from above with the second substrate of the wireless module removed, that is, a view for explaining the arrangement of the connecting members 18A and 18B by Cu core balls in the wireless module. Further, the antenna 20 provided on the other surface side of the second substrate 12 is indicated by a broken line.
- the connecting members 18A and 18B made of Cu core balls are arranged in two rows at symmetrical positions with respect to the plane direction (XY plane) of the antenna 20 of the second substrate 12. That is, the central portion C2 (four antennas 20) of the array of the antenna 20 by the plurality of (four in the illustrated example) antenna elements of the connecting member 18A on the left side in the figure and the connecting member 18B on the right side in the figure 3) are located symmetrically in two rows with respect to the center).
- two sets of 2 ⁇ 2 antenna arrays are arranged, one for transmission and one for reception.
- connection members 18A and 18B are evenly balanced around the antenna in the planar direction of the substrate of the wireless module.
- the antenna 20 may be one antenna element.
- the thickness of the module can be uniformly adjusted as in the first embodiment.
- the thickness of the module can be uniformly adjusted centering on the antenna portion, the inclination of the antenna surface of the wireless module can be suppressed, and unintended changes in antenna characteristics can be reduced.
- FIG. 6 is a plan view showing an arrangement configuration of connection members in the wireless module of the third embodiment.
- FIG. 6 is a plan view seen from above with the second substrate of the wireless module removed, that is, a view for explaining the arrangement of the connecting members 18A and 18B with Cu core balls in the wireless module.
- connection members 18D and 18E with four Cu core balls are disposed at symmetrical positions with respect to the semiconductor element 14 as a mounting component mounted on the second substrate 12. That is, with the connecting member 18D on the left side in the figure and the connecting member 18E on the right side in the figure corresponding to the four corners or two opposing sides of the semiconductor element 14, the central portion of the semiconductor element ) Is symmetrical with respect to the center line C3) of
- connection members 18D and 18E are evenly balanced around the semiconductor element in the module in the planar direction of the wireless module substrate. Further, the other connection members 18 are arranged in a row on an extension connecting the two connection members 18D (vertical direction (Y direction in FIG. 6)).
- the thickness of the module can be uniformly adjusted as in the first embodiment.
- the thickness of the module can be uniformly adjusted in a portion centered on the semiconductor element. For this reason, the curvature in the part centering on a semiconductor element can be made smaller.
- the torsional stress applied to the electrode (solder bump portion in the case of IC) of the mounting component can be reduced and mounting defects can be reduced.
- connection member 18 using Cu core ball as the connection member 18, if it is not only this but a columnar shape, circular and a polygon may be sufficient.
- connection members 18 are arranged on one end side (left side) in the X direction and the other end side (right side) in the X direction of the first substrate 11 shown in FIG. 3.
- the connection members 18 are arranged in the order of ground, signal transmission, ground, ground, signal transmission, and ground in the Y direction.
- FIG. 7 is a cross-sectional view of the wireless module shown in FIG. 3, taken along line AA.
- the second substrate 12 is also shown, and among the six connection members 18, illustration of four connection members on the other end side in the Y direction is omitted.
- connection member 18P is a connection member for grounding.
- the connection member 18P is connected to the ground pattern 33 via the wiring pad 31 and the through via 32 on the first substrate 11 side.
- the connection member 18P is connected to the ground pattern 36 via the wiring pad 34 and the through via 35 on the second substrate 12 side.
- connection member 18Q is a connection member for signal transmission.
- the connection member 18Q is connected to the wiring pattern 39 via the wiring pad 37 and the through via 38 on the first substrate 11 side.
- the connection member 18Q is connected to the wiring pattern 42 through the wiring pad 40 and the through via 41 on the second substrate 12 side.
- the wiring pattern 42 is connected to the antenna 20.
- the connecting member 18P is disposed closer to one end side (left side) in the Y direction than the connecting member 18Q.
- FIG. 8 shows another configuration example of the periphery of the through vias 32 and 35 connected to the ground patterns 33 and 36.
- a substantially arc-shaped ground pattern 33 is provided on the first substrate 11 so as to surround the connection member 18Q for signal transmission.
- a ground pattern 36 having a substantially arc shape is provided on the second substrate 12 so as to surround the connection member 18Q for signal transmission.
- the plurality of ground connection members 18P are arranged so as to surround the signal transmission connection member 18Q. Further, although not shown in FIG. 8, the connection member 18 P for each ground is connected to each through via 32, 35 through the wiring pad 31, 34.
- the ground pattern 33 is formed in a substantially C shape so as to surround the wiring pattern 39.
- one or more through vias 32 are provided, and the ground vias 32 electrically connect the ground patterns 33 of the first substrate 11 and the connection members 18P for the respective grounds.
- the ground pattern 36 is formed in a substantially C shape so as to surround the wiring pattern 42.
- one or more through vias 35 are provided, and the ground vias 35 electrically connect the ground pattern 36 of the second substrate 12 and the connection members 18P for the respective grounds.
- the wiring pads 31 and 34 are an example of a first wiring pad.
- the through vias 32 and 35 are an example of a first via.
- the wiring pads 37 and 40 are an example of a second wiring pad.
- the through vias 38 and 41 are an example of a second via.
- the wiring pads 37 and 40 for signal transmission, the through vias 38 and 41, and the through vias 38 and 41 are formed by the ground wiring pads 31 and 34, the through vias 32 and 35, and the ground patterns 33 and 36.
- the signal can be measured by the high frequency probe by setting the ground pattern and the signal line at a specific interval, for example, 100 ⁇ m to 200 ⁇ m.
- an imaging device in which a semiconductor chip in which a high frequency circuit having a transmitter for generating a high frequency signal and a patch antenna are formed on one surface of a semiconductor substrate is mounted on a MMIC (Monolithic Microwave Integrated Circuits) substrate.
- MMIC Monitoring Microwave Integrated Circuits
- the patch antenna and the high frequency circuit often have different lengths (heights) in the substrate thickness direction.
- the tip of the tool (suction device) to be picked up interferes with the electronic component (for example, high frequency circuit including transmitter)
- FIG. 9 is a side sectional view showing a configuration example of a wireless module in a fourth embodiment of the present invention.
- a module substrate 210 is a multilayer substrate, and performs wiring of an IC and the like.
- the antenna unit 220 is, for example, a patch antenna formed by an antenna pattern of wiring.
- the wireless module 200 is mounted on the set substrate 300.
- the second surface 212 side of the module substrate 210 contacts the mounting surface of the set substrate 300.
- a frame substrate 260 is disposed on the second surface 212 of the module substrate 210 so that the set substrate 300 does not directly contact the electronic components mounted on the second surface 212.
- the frame substrate 260 has, for example, a rectangular shape, and is disposed at the peripheral end of the second surface 212 of the module substrate 210.
- the wireless module 200 has a cavity type structure by the module substrate 210 and the frame substrate 260.
- the module substrate 210 may be configured of a multilayer substrate.
- the electrodes 261 of the frame substrate 260 are soldered to the set substrate 300 and physically and electrically connected. As a result, the module substrate 210 and the frame substrate 260 and the set substrate 300 are conducted to enable signal transmission.
- the length d1 of the module substrate 210 and the frame substrate 260 in the substrate thickness direction (z direction in FIG. 9) is, for example, about 1 mm.
- the length d2 of the chip component 240 or the IC component 250 in the component thickness direction (z direction in FIG. 9) is, for example, about 0.2 to 0.3 mm. Even when the wireless module 200 including the frame substrate 260 is mounted on the set substrate 300, the electronic components mounted on the module substrate 210 do not contact the set substrate 300.
- the antenna unit 220 and the electronic component such as Tcxo 230 are integrally molded by a mold member (for example, a mold resin) to form a mold unit 270.
- the mold portion 270 surrounds the antenna portion 220 and the surrounding electronic components.
- the mold member is not particularly limited, but it goes without saying that the smaller the dielectric loss tangent (tan ⁇ ), the smaller the electrical loss in the mold portion 270.
- the wireless module 200 when the wireless module 200 is mounted on the set substrate 300, it is picked up by the pickup device from the first surface 211 side of the module substrate 210 and mounted on the set substrate 300. Therefore, the mold portion 270 is picked up, interference at the time of pickup due to the step between the antenna portion 220 provided on the first surface 211 and the electronic component can be prevented, and pickup of the wireless module 200 becomes easy.
- the circumferential end surface 213 (ceiling surface) of the mold portion 270 is preferably parallel to the module substrate 210 and flat. Thereby, the wireless module 200 can be picked up by adsorption more easily.
- the wireless module 200 of this embodiment is a wireless module picked up from the side of the first surface 211 as the antenna mounting surface on which the antenna unit 220 is provided, and the module substrate 210 on which the antenna unit 220 is mounted And, on the first surface 211 of the module substrate 210, there is provided a mold portion 270 in which an electronic component including the antenna portion 220 is molded. This improves the certainty of suction by the tool to be picked up. That is, even when the electronic component is mounted on the antenna mounting surface of the wireless module, the wireless module can be easily picked up from the antenna mounting surface side.
- FIG. 10 is a side sectional view showing a configuration example of a wireless module in the fifth embodiment of the present invention.
- the difference between the wireless module 200B shown in FIG. 10 and the wireless module 200 shown in FIG. 9 is that the wireless module 200B includes a waveguide 280.
- the waveguide unit 280 is provided on the peripheral end surface 213 (mold surface) of the mold unit 270 and assists the transmission and reception of radio waves by the antenna unit 220.
- the waveguide 280 is formed of, for example, a conductor pattern that functions as a waveguide.
- the mold resin forming the mold portion 270 does not take antenna characteristics into consideration, so it is an undesirable dielectric when viewed from the antenna portion 220.
- the wireless module 200B can adjust the antenna characteristics again and keep it in a good state.
- the following three patterns can be considered as the position where the waveguide 280 is provided on the mold 270.
- FIG. 11 is a top view showing a first example of the positional relationship between the antenna unit 220 and the waveguide 280 of the wireless module 200B.
- the waveguide 280 is provided at a position on the circumferential end surface 213 of the mold 270 facing the antenna 220. Accordingly, the loss of the power transmitted or received by the antenna unit 220 is minimized, and radio waves can be transmitted and received favorably. That is, the certainty of suction by the tool to be picked up is improved, and the antenna characteristic can be maintained in a good state.
- a waveguide 280 is provided on the circumferential end surface 213 of the mold 270 toward the outside of the mold 270.
- the antenna unit 220 has a 2 ⁇ 2 array configuration on the first surface 211 of the module substrate 210.
- the waveguide 280 has a 2 ⁇ 2 array configuration at the peripheral end surface 213 of the mold 270.
- the presence of the mold portion 270 increases the thickness (the length in the z direction in FIG. 10) of the dielectric layer having a dielectric constant higher than that of air, so that the waveguide 280 is larger than the antenna portion 220. desirable. That is, it is desirable that the region where the waveguide 280 is provided on the mold surface of the mold unit 270 is larger than the region where the antenna unit 220 is provided on the antenna mounting surface. Thereby, antenna characteristics can be adjusted more satisfactorily.
- FIG. 12 is a top view showing a second example of the positional relationship between the antenna unit 220 and the waveguide 280 of the wireless module 200B.
- the waveguide 280 is provided at a position separated by a predetermined distance d3 from the position on the circumferential end surface 213 of the mold 270 facing the antenna 220. That is, the position on the mold surface of the waveguide 280 and the position on the antenna mounting surface of the antenna unit 220 are offset (offset).
- the waveguide 280 when the waveguide 280 is on the left side of the antenna unit 220, radio waves are emitted in the left direction.
- the waveguide 280 when the waveguide 280 is on the right side of the antenna unit 220, radio waves are emitted to the right.
- the waveguide 280 is disposed so as to be shifted in the direction in which the radio wave is desired to be emitted.
- the antenna directivity is changed (beam tilt) by changing the pattern on the peripheral end surface 213 of the mold portion 270 without redesigning the module substrate 210. Can. Also, even after the antenna unit 220 is mounted on the module substrate 210, the antenna directivity can be flexibly changed.
- FIG. 13 is a top view showing a third example of the positional relationship between the antenna unit 220 and the waveguide 280 of the wireless module 200B.
- the waveguide 280 is a region where the antenna unit 220 is rotated by a predetermined rotation angle ⁇ from the region where the antenna unit 220 is provided on the antenna mounting surface, at the peripheral end surface 213 of the mold unit 270.
- the waveguide 280 has a circumferential end face in such a positional relationship that the direction of the rectangle indicating the region of the waveguide 280 and the direction of the rectangle indicating the region of the antenna unit 220 are rotated.
- the polarization plane (antenna polarization plane) of the radio wave radiated from the antenna unit 220 can be changed.
- the position of the waveguide 280 on the mold surface and the position of the antenna 220 on the antenna mounting surface (position on the xy plane) are substantially the same.
- the rotation angle ⁇ is an angle less than 90 degrees.
- the antenna polarization plane can be made a desired polarization plane according to the size of the rotation angle ⁇ .
- the antenna polarization plane can be changed from vertical polarization plane to horizontal polarization plane, from horizontal polarization plane to vertical polarization plane, or linear polarization can be circular polarization.
- Such a change of the antenna polarization plane can be realized by changing the pattern as the waveguide 280 on the peripheral end surface 213 of the mold 270 without redesigning the module substrate 210.
- the resonant frequency of the waveguide 280 and the resonant frequency of the antenna unit 220 may be designed to be different. Also by this, the antenna polarization plane can be changed.
- the excitation timing is slightly different.
- the antenna polarization plane can be changed.
- the first wireless module of the present disclosure is A first substrate on which mounting components of a wireless circuit are mounted; A second substrate arranged to be stacked on the first substrate; A connecting member which is connected to at least one of the first substrate and the second substrate, and which forms an interval at which the mounting component can be mounted between the first substrate and the second substrate; Equipped with The connection members are arranged at equal positions between the first substrate and the second substrate.
- the second wireless module of the present disclosure is a first wireless module,
- the plurality of connection members are disposed at symmetrical positions with respect to a central portion in the planar direction of the substrate between the first substrate and the second substrate.
- the third wireless module of the present disclosure is a first wireless module, An antenna with one or more antenna elements is disposed on the second substrate, The plurality of connection members are disposed at symmetrical positions with respect to the central portion in the plane direction of the antenna.
- the fourth wireless module of the present disclosure is a first wireless module,
- the plurality of connection members are disposed at symmetrical positions with respect to a central portion of the mounting component.
- the fifth wireless module of the present disclosure is any one of the first to fourth wireless modules, At least one of the plurality of connection members is connected to any one of the first substrate and the second substrate.
- the sixth wireless module of the present disclosure is any one of the first to fourth wireless modules, At least one of the plurality of connection members has an outer dimension different from that of the other connection members.
- a seventh wireless module of the present disclosure is any one of the first to sixth wireless modules,
- the connection member includes a connection member for ground, A first wiring pad formed on the first substrate or the second substrate connected to the ground connection member; A first via connecting the first wiring pad to the ground of the first substrate or the second substrate; Equipped with
- the eighth wireless module of the present disclosure is any one of the first to sixth wireless modules,
- the connection member includes a connection member for signal transmission, A second wiring pad formed on the first substrate or the second substrate connected to the connection member for signal transmission; A second via for connecting the second wiring pad and the wiring portion of the first substrate or the second substrate; Equipped with At least a portion of the periphery of the second via is surrounded by the plurality of first vias.
- the present disclosure has the effect of uniformly adjusting the thickness of the assembled wireless module, and is useful as, for example, a wireless module in which a semiconductor element is mounted as an electronic component on a substrate used for wireless communication in the millimeter wave band is there.
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Abstract
Description
従来の無線モジュールにおいて、複数の基板間を接続する接続部材は、基板に設けられた配線パッドに電気的に接続される。接続部材及び配線パッドは、基板上に実装する素子及び基板の配線パターンのレイアウトに応じて配置される。接続部材の配置によっては、製造の際に、例えば、基板のたわみ、基板間の封止材料の充填量の偏りが発生し、モジュールの厚さが不均一になる可能性がある。モジュールの厚さが不均一であると、例えば、基板にねじれ応力がかかり、素子の接点の接続が不完全となる実装不良が生じる可能性がある。また、無線モジュールのアンテナ面の傾きによっては、アンテナの指向特性が変化する可能性がある。
図1は、従来の無線モジュールの構成の一例を示す図であり、(A)は断面図、(B)は第2基板を除いた状態であって上から見た平面図、(C)は第2基板の上から見た平面図である。
図2は、本開示の第1の実施形態に係る無線モジュールの構成を示す断面図である。
第1の実施形態の変形例を示す。図4は、第1の実施形態の変形例に係る無線モジュールの構成を示す断面図であり、(A)は第1変形例、(B)は第2変形例を示している。なお、図2に示した第1の実施形態では、図中左側の接続部材18Aと右側の接続部材18Bの双方がそれぞれ第1基板11と第2基板12の両方に接続されている。
図5は、第2の実施形態の無線モジュールにおける接続部材の配置構成を示す平面図である。図5では、無線モジュールの第2基板を除いた状態であって上から見た平面図、すなわち無線モジュール内のCuコアボールによる接続部材18A、18Bの配置状態を説明するための図である。また、第2基板12の他面側に設けられるアンテナ20を破線によって示す。
図6は、第3の実施形態の無線モジュールにおける接続部材の配置構成を示す平面図である。図6では、無線モジュールの第2基板を除いた状態であって上から見た平面図、すなわち無線モジュール内のCuコアボールによる接続部材18A、18Bの配置状態を説明するための図である。
従来、半導体基板上に、高周波信号を発生させる発信器を持つ高周波回路とパッチアンテナとが一方の面に形成された半導体チップが、MMIC(Monolithic Microwave Integrated Circuits)基板に実装された撮像装置が知られている(参考特許文献:特開2004-205402号公報参照)。
図9は本発明の第4の実施形態における無線モジュールの構成例を示す側断面図である。
図9に示す無線モジュール200において、モジュール基板210は、多層基板であり、ICの配線等を行う。モジュール基板210の第1の面211(図9では上面)には、アンテナ部220やTcxo230(Temperature compensated crystal Oscillator:温度補償水晶発振器)等の電子部品が実装されている。したがって、第1の面211は、アンテナ部220が設けられるアンテナ実装面である。
図10は本発明の第5の実施形態における無線モジュールの構成例を示す側断面図である。
図10に示す無線モジュール200Bと図9に示した無線モジュール200との相違点は、無線モジュール200Bが導波部280を備える点である。
本開示の第1の無線モジュールは、
無線回路の実装部品を搭載する第1基板と、
前記第1基板に対して積層して配置する第2基板と、
前記第1基板と前記第2基板の少なくとも一方と接続され、前記第1基板と前記第2基板との間に前記実装部品を搭載可能な間隔を形成する接続部材と、
を備え、
前記接続部材は、複数の接続部材が前記第1基板及び前記第2基板間において均等な位置に配置される。
前記複数の接続部材は、前記第1基板及び前記第2基板間において、基板平面方向の中心部に対して対称の位置に配置される。
前記第2基板には一つまたは複数のアンテナ素子によるアンテナが配置され、
前記複数の接続部材は、前記アンテナの平面方向の中心部に対して対称の位置に配置される。
前記複数の接続部材は、前記実装部品の中心部に対して対称の位置に配置される。
前記複数の接続部材のうちの少なくとも一つは、前記第1基板と前記第2基板のいずれか一方に接続される。
前記複数の接続部材のうちの少なくとも一つは、他の接続部材と外形寸法が異なる。
前記接続部材は、グランド用の接続部材を含み、
前記グランド用の接続部材と接続される前記第1基板または前記第2基板に形成された第1の配線パッドと、
前記第1の配線パッドと前記第1基板又は前記第2基板のグランドとを接続する第1のビアと、
を備える。
前記接続部材は、信号伝送用の接続部材を含み、
前記信号伝送用の接続部材と接続される前記第1基板または前記第2基板に形成された第2の配線パッドと、
前記第2の配線パッドと前記第1基板又は前記第2基板の配線部とを接続する第2のビアと、
を備え、
前記第2のビアの周囲の少なくとも一部は、複数の前記第1のビアにより包囲される。
12 第2基板
13,39,42 配線パターン
14 半導体素子
15,16,31,34,37,40 配線パッド
17,33,36 グランドパターン
18、18A、18B、18C、18D、18E,18P,18Q 接続部材
20 アンテナ
21,32,35,38,41 貫通ビア
22 封止樹脂
200、200B 無線モジュール
210 モジュール基板
220 アンテナ部
230 Tcxo
240 チップ部品
250 IC部品
260 枠基板
261 電極
270 モールド部
280 導波部
300 セット基板
211 モジュール基板の第1の面(アンテナ実装面)
212 モジュール基板の第2の面
213 モールド部の周端面(モールド面)
Claims (8)
- 無線回路の実装部品を搭載する第1基板と、
前記第1基板に対して積層して配置する第2基板と、
前記第1基板と前記第2基板の少なくとも一方と接続され、前記第1基板と前記第2基板との間に前記実装部品を搭載可能な間隔を形成する接続部材と、
を備え、
前記接続部材は、複数の接続部材が前記第1基板及び前記第2基板間において均等な位置に配置される、無線モジュール。 - 請求項1に記載の無線モジュールであって、
前記複数の接続部材は、前記第1基板及び前記第2基板間において、基板平面方向の中心部に対して対称の位置に配置される、無線モジュール。 - 請求項1に記載の無線モジュールであって、
前記第2基板には一つまたは複数のアンテナ素子によるアンテナが配置され、
前記複数の接続部材は、前記アンテナの平面方向の中心部に対して対称の位置に配置される、無線モジュール。 - 請求項1に記載の無線モジュールであって、
前記複数の接続部材は、前記実装部品の中心部に対して対称の位置に配置される、無線モジュール。 - 請求項1~4のいずれか一項に記載の無線モジュールであって、
前記複数の接続部材のうちの少なくとも一つは、前記第1基板と前記第2基板のいずれか一方に接続される、無線モジュール。 - 請求項1~4のいずれか一項に記載の無線モジュールであって、
前記複数の接続部材のうちの少なくとも一つは、他の接続部材と外形寸法が異なる、無線モジュール。 - 請求項1~6のいずれか一項に記載の無線モジュールであって、
前記接続部材は、グランド用の接続部材を含み、
前記グランド用の接続部材と接続される前記第1基板または前記第2基板に形成された第1の配線パッドと、
前記第1の配線パッドと前記第1基板又は前記第2基板のグランドとを接続する第1のビアと、
を備える、無線モジュール。 - 請求項7に記載の無線モジュールであって、
前記接続部材は、信号伝送用の接続部材を含み、
前記信号伝送用の接続部材と接続される前記第1基板または前記第2基板に形成された第2の配線パッドと、
前記第2の配線パッドと前記第1基板又は前記第2基板の配線部とを接続する第2のビアと、
を備え、
前記第2のビアの周囲の少なくとも一部は、複数の前記第1のビアにより包囲される、無線モジュール。
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JP2017028245A (ja) * | 2015-07-27 | 2017-02-02 | 京セラ株式会社 | アンテナモジュール |
JPWO2016056387A1 (ja) * | 2014-10-07 | 2017-07-20 | 株式会社村田製作所 | 高周波通信モジュール及び高周波通信装置 |
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JP6474879B1 (ja) * | 2017-11-29 | 2019-02-27 | 株式会社フジクラ | 配線基板、及び、配線基板の製造方法 |
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Also Published As
Publication number | Publication date |
---|---|
TW201332411A (zh) | 2013-08-01 |
TWI593334B (zh) | 2017-07-21 |
JPWO2013084496A1 (ja) | 2015-04-27 |
US20140140031A1 (en) | 2014-05-22 |
JP5971566B2 (ja) | 2016-08-17 |
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