WO2013042810A1

WO2013042810A1 - Apparatus provided with multiple targets and multi-electron beam for generating x-rays

Info

Publication number: WO2013042810A1
Application number: PCT/KR2011/007003
Authority: WO
Inventors: 박래준; 강현충; 장창실
Original assignee: 주식회사 엑스엘
Priority date: 2011-09-22
Filing date: 2011-09-22
Publication date: 2013-03-28
Also published as: KR101151858B1

Abstract

The present invention provides an apparatus provided with multiple targets and a multi-electron beam for generating x-rays, which can simultaneously generate two or more characteristic x-rays, selectively generate a specific characteristic x-ray, or generate two or more specific characteristic x-rays in a sequence, thereby generating a variety of characteristic x-rays that are appropriate for a purpose, and which can generate a high-luminance characteristic x-ray for an extended period of time by increasing dissipation efficiency of heat that is generated at a rotary anode by means of a collision between an electron beam and the multiple targets. To this end, the present invention comprises: a case (100) provided with a vacuum chamber (120) therein so that the electron beam, which is emitted from a cathode filament (230), collides with and reflects off of the multiple target (330) of an anode; a cathode portion (200), which is provided on one side of the inside of the case (100) and is provided with a multi-filament cathode (230), which comprises a plurality of filaments (230a, 230b, 230c) for emitting the electron beam by being heated by a voltage that is applied; an anode portion (300) comprising the multiple targets (330), which include targets (330a, 330b, 330c) that comprise different elements and are separated away from each other in an axle direction along an outer circumference of a rotary anode cylindrical portion (310), so as to correspond to each of the plurality of filaments (230a, 230b, 230c); and a cooling portion (400) for dissipating heat, which is generated from the anode portion (300) when the electron beam collides, to the exterior of the case (100).

Description

X-ray generator with multiple targets and multiple electron beams

The present invention relates to an X-ray generator having multiple targets and multiple electron beams, and more particularly, to an X-ray generator having two or more X-ray generators or a plurality of X- Ray generating device having multiple targets and multiple electron beams capable of generating various characteristic X-rays suitable for use by increasing the heat radiation efficiency of heat generated when an electron beam collides with a multiple target and generating high-luminance characteristic X-rays for a long time .

Generally, X-ray is used for non-destructive inspection, structural and physical inspection of materials, image diagnosis and security search in various fields such as industry, science and medical care. Especially, when X-ray source for X-ray fluorescence (XRF) and X-ray diffraction (XRD), X-ray source for mammography and CT for computed tomography (CT) are used, it is necessary to generate high intensity X-rays for a long time.

In addition, two or more characteristic X-rays may have to be generated if necessary, and two or more characteristic X-rays must be continuously generated in the same operation. In this case, the electron beam emitted from the cathode Two or more targets for reflecting the X-rays are attached, and an X-ray generator capable of generating a high-intensity X-ray for a long time is required.

As a prior art related to the conventional X-ray generator, Korean Patent Registration No. 10-906148 discloses a micro-focus X-ray tube employing a carbon nanotube electron-emitting device and a transmission type target, However, in this case, as the heat generated when the electrons emitted from the cathode collide with the anode is accumulated in the target, there is a problem that the output of the X-ray is low because the X-ray can not be generated with high power.

In another prior art, U.S. Patent No. 4,007,375 discloses a plasma display apparatus comprising a cathode ray tube (CRT) bulb having a plurality of different targets on the inner surface of a screen, each cathode ray tube being controlled by a power source to selectively collide an electron beam with a target, . In this case, since the multiple targets are provided, it is possible to output the characteristic X-rays of different wavelengths, but it is disadvantageous in that the X-ray output of the X-rays is low because the X- There is a disadvantage of high egg production rate and absorption rate in the process of X-rays generated from the inner surface passing through the screen glass wall.

In another prior art, U.S. Patent No. 4,523,327 discloses a method of joining different types of target pieces on a circumferential surface of a circular copper shell parallel to a rotating shaft, rotating a cathode or a circular copper anode which emits an electron beam at a high speed, An X-ray source generating a plurality of X-rays including a plurality of X-ray characteristic lines by causing different characteristic X-rays to be simultaneously generated in different types of targets by colliding with the target is disclosed. However, Is not available.

In another prior art, U.S. Patent No. 4,870,671 discloses a method in which a different target material is placed on each of the quadrants in rod cylindrical end surfaces, and electron beam generating filaments corresponding to the respective targets are attached to the cathode portion, An X-ray source capable of generating an X-ray is disclosed. In this case, although it can be used as an X-ray source capable of selectively generating a monochromatic characteristic line, the X-ray generating focus on the target is not constant and the output is low.

SUMMARY OF THE INVENTION It is an object of the present invention to provide an X-ray generator having multiple targets and corresponding cathodic structures capable of simultaneously generating two or more characteristic X-rays.

It is another object of the present invention to provide an X-ray generator having multiple targets and corresponding cathodic structures, each of which can select two or more characteristic X-rays as needed and continuously generate them.

It is still another object of the present invention to provide a cathode ray tube which has a cooling function capable of smoothly dissipating heat generated when a cathode filament is heated and an electron beam emitted from a cathode filament colliding with an anode target, Ray generator.

It is still another object of the present invention to provide a cathode ray tube and a cathode ray tube which are capable of generating uniform x-rays with high output and high brightness by keeping the generation focus of the x- Ray generator.

In order to achieve the above-mentioned object, an X-ray generator having multiple targets and multiple electron beams according to an embodiment of the present invention is configured such that an electron beam emitted from a cathode filament 230 collides with multiple targets 330 of an anode, A case 100 having a vacuum chamber 120 therein so as to be reflected and emit X-rays; A cathode part 200 provided at one side of the inside of the case 100 and having multiple cathode filaments 230 composed of a plurality of

filaments

230a, 230b and 230c heated by an applied voltage to emit an electron beam; A plurality of

targets

310a, 330b, and 330c, which are spaced apart from each other in the axial direction around the outer circumferential surface of the rotating anode 310 corresponding to the plurality of

filaments

230a, 230b, and 230c, An anode portion 300 having multiple targets 330 configured; And a cooling unit 400 for dissipating heat generated from the anode part 300 to the outside of the case 100 when the electron beam collides with the cathode part 300. [

In this case, voltages are individually applied to the plurality of

filaments

230a, 230b, and 230c to simultaneously generate two or more characteristic X-rays from the plurality of

targets

330a, 330b, and 330c, Or two or more specific characteristic X-rays are successively generated.

The cathode unit 200 includes a plurality of focusing

channels

220a, 220b, and 220c to which the plurality of

filaments

230a, 230b, and 230c are respectively mounted and is fixed to one side of the case 100, 210). &Lt; / RTI >

In addition, an X-ray transmission window 110 through which X-rays reflected from the multiple targets 330 are transmitted is provided on one side of the case 100, and a reflection surface of the multiple target 330, And is inclined downward at a predetermined angle in a direction toward the X-ray transmission window 110 with respect to a plane perpendicular to the transmission window 110 surface.

The X-ray generator having multiple targets and multiple electron beams according to another embodiment of the present invention is configured such that the electron beam emitted from the cathode filament 230-1 collides with and reflects on the multiple targets 330 of the anode, A case 100 having a vacuum chamber 120; A cathode part 200-1 provided at one side of the inside of the case 100 and having a single anode filament 230-1 heated by an applied voltage to emit an electron beam; 330b, and 330c, which are spaced apart from each other in the axial direction around the circumference of the rotating anode unit 310 so as to collide with the electron beams emitted from the single cathode filament 230-1, An anode part (300) having multiple targets (330) composed of; A cooling unit 400 for dissipating heat generated in the anode part 300 to the outside of the case 100 when the electron beam collides with the outside of the case 100; And an electron beam emitted from the single cathode filament 230-1 and disposed between the single cathode filament 230-1 and the multiple target 330 to a specific target among the plurality of targets 330a, And a deflector 600 for controlling the movement path of the electron beam by forming a magnetic field to be collided.

In addition, in the embodiments of the present invention, a positive electrode rotation axis portion 320 passing through the case 100 is integrally connected to one side of the rotation positive electrode cylindrical portion 310, The anode rotation axis portion 320 is provided with a hollow portion 340 communicating with the outside of the case 100 to form a cooling water circulation flow path of the cooling portion 400.

The cooling unit 400 includes a cooling water inlet 411 formed at an end portion exposed to the outside of the case 100 and a cooling water inlet 411 formed in the hollow portion of the anode rotation axis portion 320, A first heat dissipating tube 410 extending to the first heat dissipating unit 340 and having a flow path converting part 410a extending to both sides at an extended end thereof; The outer circumference of the first heat dissipating tube 410 is coupled to the outer circumference of the first heat dissipating tube 410 and is in close contact with the inner circumferential surface of the anode rotating axis part 320, And a second heat dissipating pipe 420 having a cooling water outlet 421 at one end of the end exposed to the outside.

The cooling water flowing into the cooling water inlet 411 moves in the horizontal direction along the first horizontal flow passage 412 in the first heat radiation pipe 410 and then flows into the first The flow path is changed in the vertical direction through the vertical flow path 413 and is discharged to the hollow part 340 inside the rotary anode part 310. After recovering the heat transferred from the rotary anode part 310, The second heat transfer pipe 410 is connected to the second heat transfer pipe 420 through the second vertical flow path 414 between the flow path conversion unit 410a and the second heat radiation pipe 420, (415), and then discharged through the cooling water outlet (421).

The inner circumferential surface of the anode rotation axis portion 320 and the inner circumferential surface of the case 100 into which the anode rotation axis portion 320 is inserted and the inner circumferential surface of the anode rotation axis portion 320 and the outer circumferential surface of the second heat dissipation tube 420 And a vacuum hermetic slider 500 is interposed between the vacuum hermetic slider 500 and the vacuum hermetic slider 500.

According to the X-ray generator having multiple targets and multiple electron beams according to the present invention, it is possible to simultaneously generate two or more characteristic X-rays by providing a plurality of cathode filaments to which voltages are individually applied and a plurality of anode targets respectively corresponding thereto , A specific characteristic X-ray is selectively generated, or two or more specific characteristic X-rays are generated successively, thereby enabling output of various characteristic X-rays suitable for the purpose.

According to the present invention, the cathode is made of a fixed body, the anode is made of a rotating body, and a target is formed in the circumferential direction on the outer circumferential surface of the rotating anode cylinder, so that the electron beam emitted from the cathode disperses heat generated upon collision with the target Since the cooling part having the cooling water circulation flow path formed inside the rotary anode cylinder part and the anode rotation axis part is provided, heat generated inside the X-ray generator can be effectively dissipated, thereby preventing thermal damage to the target and generating high- There is an advantage that can be made.

According to the present invention, since the target is formed along the circumferential direction on the outer circumferential surface of the rotating anode cylinder, the electron beam emitted from the cathode collides with the target of the anode while the anode is composed of the rotating body, So that it is possible to output a uniform X-ray with high output and high brightness.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a cross-sectional view illustrating the configuration of an X-ray generator having multiple targets and multiple electron beams according to an embodiment of the present invention;

FIG. 2 is a side view showing a state in which multiple targets are arranged in an anode portion according to an embodiment of the present invention, FIG.

3 is a cross-sectional view illustrating the configuration of an X-ray generator having multiple targets and multiple electron beams according to another embodiment of the present invention.

** Explanation of symbols **

100:

Case

101, 102, 103:

110: X-ray transmission window 200, 200-1: cathode part

210, 210-1: Focus tube 220, 220-1: Focusing groove

230: multiple negative filament 230-1: single negative filament

300: anode part 310: rotating anode cylinder part

320: anode rotating shaft part 330: multiple target

340: hollow part 400: cooling part

410: first heat radiating pipe 410a:

411: cooling water inlet 412: first horizontal flow path

413: first vertical channel 414: second vertical channel

415: second horizontal flow passage 420: second heat radiating pipe

421: Cooling water outlet 500: Vacuum airtight slider

600: deflecting device

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a cross-sectional view illustrating a configuration of an X-ray generator having multiple targets and multiple electron beams according to an embodiment of the present invention. FIG. 2 is a cross- Side view.

The X-ray generating apparatus according to an embodiment of the present invention includes a case 100 having openings 101,102 and 103 in three directions and a vacuum chamber 120 inside the case 100 and a case 100 disposed inside the case 100 of the opening 101 A negative electrode portion 200 having a plurality of negative electrode filaments 230 heated by a voltage applied from the outside to emit an electron beam, a rotatably installed inside the case 100 and corresponding to the multiple negative electrode filaments 230 (300) having multiple targets (330) that emit X-rays by collision and reflection with the electron beam, heat generated in the anode part (300) when impacting the multiple targets (330) A cooling unit 400 for radiating heat to the outside of the vacuum chamber 100 and a vacuum airtight slide 500 for rotatably supporting the anode unit 300 and maintaining a vacuum state inside the vacuum chamber 120 .

The case 100 supports the cathode part 200 and the anode part 300 for generating X-rays and the electrons emitted from the cathode part 200 collide with the anode part 300 to emit radiation Thereby providing a vacuum chamber 120. The cathode part 200 is hermetically held in the opening part 101 formed in the upper part of the case 100 and the opening part 101 is provided with a plurality of

power sources

230a, 230b, and 230c constituting the multiple cathode filaments 230 of the cathode portion 200 from the

cathode filaments

230a, 230b, and 230c. The anode rotation axis portion 320 of the anode portion 300 is supported by the vacuum airtight slide 500 and is rotatably inserted into the opening portion 102 formed at one side of the case 100. An opening 103 formed in a lower portion of the case 100 serves as a vacuum exhaust port for forming a vacuum state inside the case 100. A vacuum pump (not shown) is connected to the outside of the opening 103 do.

An X-ray transmission window 110 made of a thin plate material through which the X-rays emitted from the anode part 300 is transmitted is installed on one side of the case 100. The X-ray transmission window 110 minimizes scattering And it is preferably made of beryllium material so as to provide low absorptive hypertransmission function.

The cathode unit 200 is composed of a plurality of

multiple cathode filaments

230a, 230b and 230c to which an external power source is individually applied, and the multiple cathode filaments 230 are connected to each other at the lower part of the focusing tube 210 220a, 220b, and 220c, which are spaced apart from each other. The focusing tube 210 is tightly fixed to the inside of the opening 101 while keeping the airtightness. The bottom surface of the focusing tube 210 is inclined downward at a predetermined angle in the direction toward the X-ray transmission window 110 with respect to a plane perpendicular to the X-ray transmission window 110, The multi-cathode filaments 230 are arranged so as to face at a predetermined inclination angle with respect to a vertical line. The multi-cathode filament 230 may be made of a tungsten material having excellent electrical characteristics, and the number of electrons emitted is changed in proportion to the magnitude of a voltage applied to each of the

filaments

230a, 230b and 230c.

The anode part 300 generates an electric field by an externally applied voltage and accelerates the electrons emitted from the cathode part 200 to impinge on the target to emit the X-ray. The

multi-cathode filament

230, 330a, 330b, and 330c corresponding to the plurality of

filaments

230a, 230b, and 230c constituting the rotating anode unit 310 are spaced axially around the outer circumferential surface of the rotating anode unit 310, And a positive electrode rotating shaft part 320 integrally formed on one side of the rotating anode cylinder part 310 and coupled to an external driving device and rotating.

Each of the

targets

330a, 330b and 330c constituting the multiple targets 330 may be composed of different elements (for example, W, Mo, Cu, Ta), and the

cathode filaments

230a, 230b, As shown in Fig. 2, each of the

targets

330a, 330b, and 330c is circumferentially connected to the outer circumferential surface of the rotating anode cylinder 310 and spaced apart from each other in the axial direction Structure.

The rotary anode cylinder 310 is formed in a conical shape having a reduced diameter at a predetermined inclination angle?, And the outer peripheral surface thereof is disposed at a position parallel to the bottom surface of the focusing tube 210. Therefore, the

targets

330a, 330b, and 330c are located at positions facing the lower side of the

cathode filaments

230a, 230b, and 230c, and the electron beams emitted from the

cathode filaments

230a, 230b, 330b and 330c and the electron positions of the elements constituting the

targets

330a, 330b and 330c are moved by collision with electrons, and the X-rays emitted by the energy difference are transmitted through the X-ray transmission window 110 ). In this case, since power is separately applied to the plurality of

cathode filaments

230a, 230b, and 230c, it is possible to control two or more characteristics from the plurality of

targets

330a, 330b, It is possible to generate X-rays at the same time, or to generate a characteristic X-ray selectively or two or more specific characteristic X-rays successively, respectively.

In addition, since the anode part 300 is made of a rotating body and the multiple targets 330 are formed in the circumferential direction in parallel with the rotating direction on the outer peripheral surface of the rotating anode part 310, Since the point of collision is constantly varied along the direction of rotation, it is possible to prevent the thermal damage of the multiple targets 330 by preventing the overheat by dispersing the heat generated by the collision of the electron beams.

In addition, in the present invention, the heat generated in heating the multi-cathode filament 230 and the electron beam emitted from the anode unit 300 generated when the multiple targets 330 collide with each other are dissipated, Is formed in the hollow cathode portion (310) and the hollow portion (340) provided inside the anode rotation axis portion (320).

The cooling unit 400 includes a cooling water inlet 411 formed at an end of the opening 102 formed at one side of the case 100 and exposed to the outside of the case 100. The cooling unit 400 includes the anode rotation axis portion 320 and the rotation anode rotation axis 310 A first heat dissipating tube 410 extending across the hollow portion 340 of the rotating anode 310 and having a flow path converting portion 410a extending upward and downward at both ends of the rotating anode tube 310, And a second heat dissipating pipe 420 which is supported through the outer end of the first heat dissipating pipe 410 and is spaced apart from the outer circumference of the first heat dissipating pipe 410 and closely attached to the inner circumferential surface of the anode rotating axis portion 320, The cooling water circulating flow path is formed.

The cooling water introduced into the cooling water inlet 411 moves horizontally along the first horizontal flow passage 412 inside the first heat radiation pipe 410 and then flows into the first vertical The flow path is changed in the vertical direction through the flow path 413 and is discharged to the hollow portion 340 inside the rotary anode cylinder portion 310. After recovering heat transferred from the rotary anode portion 310, Flows through the second vertical flow passage 414 between the flow path conversion portion 410a and the second heat radiation pipe 420 and flows into the second horizontal flow path 420 between the first heat radiation pipe 410 and the second heat radiation pipe 420 415 and then discharged through the cooling water outlet 421. [

The first cooling pipe 410 and the second cooling pipe 420 are provided in the hollow portion 340 to form a circulation flow path for the cooling water. As a result, when the multiple negative electrode filaments 230 are heated, And the heat generated when the electron beam collides with the multiple targets 330 can be recovered by direct heat exchange with the cooling water to dissipate heat to the outside, Overheating of the anode part 300 is prevented even when a long period of time is applied, so that the characteristic X-rays of high luminance can be continuously output.

The positive electrode part 300 is supported by the external driving device so that the positive electrode part 300 is smoothly rotated and the vacuum inside the vacuum chamber 120 is maintained when the positive electrode part 300 rotates. A vacuum hermetic slider 500 is provided between the outer circumferential surface and the inner circumferential surface of the case 100 in which the anode rotation axis portion 320 is inserted and between the inner circumferential surface of the anode rotation axis portion 320 and the outer circumferential surface of the second heat dissipation pipe 420 .

As described above, according to the structure of the present embodiment, the cathode part 200 having the multiple sound filaments 230 to which the power sources are separately applied, and the multi-targets 330 corresponding to the cathode part 200 and the rotary anode part 310 ), It is possible to generate characteristic X-rays of various combinations by using one X-ray generator, and the anode part 300 having the multiple targets 330 is constituted by a rotating body, And the cooling part 400 in which the collision point is changed along the rotation direction while the cooling water is circulated inside the anode part 300 is advantageous in that the cooling efficiency can be improved by direct heat transfer have.

In the present embodiment, for convenience of description, the case where the multiple cathode filaments 230 and the multiple nodes 300 are formed at three locations has been described. However, the number of the multiple cathode filaments 230 and the number of the multiple nodes can be different.

The X-ray generator according to another embodiment of the present invention has the same configuration as the above-described embodiment except that the cathode portion 200-1 is composed of a single anode filament 230-1, A focusing tube 210-1 in which a mounting groove 220-1 for mounting the cathode filament 230-1 is formed is provided inside the opening 101 and the single cathode filament 230-1 and the multiplex A magnetic field is provided between the target 330 and the electron beam emitted from the single cathode filament 230-1 to collide with a specific target among the plurality of

targets

330a, 330b and 330c to control the movement path of the electron beam And a deflecting device (600) for deflecting the light beam.

According to such a configuration, even when the negative filament 230-1 is constructed in a single structure, the magnetic field in the deflector 600 is changed so that the movement path of the electron beam is changed to an

arbitrary target

330a, 330b, and 330c, so that it is possible to output a desired characteristic X-ray through the voltage applied to the single cathode filament 230-1 and the magnetic field of the deflector 600 And the anode filament 230-1 is installed in a single structure, there is an advantage that the X-ray generator can be downsized.

Claims

A case 100 having a vacuum chamber 120 therein so that the electron beam emitted from the cathode filament 230 collides with and reflects on the multiple targets 330 of the anode to emit x-rays;

A cathode part 200 provided at one side of the inside of the case 100 and having multiple cathode filaments 230 formed by a plurality of filaments 230a, 230b, and 230c heated by an applied power source to emit an electron beam;

A plurality of targets 310a, 330b, and 330c, which are spaced apart from each other in the axial direction around the outer circumferential surface of the rotating anode 310 corresponding to the plurality of filaments 230a, 230b, and 230c, An anode portion 300 having multiple targets 330 configured; And

A cooling unit 400 for dissipating heat generated in the anode part 300 to the outside of the case 100 when the electron beam collides with the outside of the case 100;

And a plurality of electron beams.
The method according to claim 1,

Power sources are individually applied to the plurality of filaments 230a, 230b, and 230c to simultaneously generate two or more characteristic X-rays from the plurality of targets 330a, 330b, and 330c, Characterized in that two or more specific characteristic X-rays are generated successively in each case.
The method according to claim 1,

The cathode unit 200 includes a plurality of focusing channels 220a, 220b and 220c to which the plurality of filaments 230a, 230b and 230c are respectively mounted and is connected to a focusing tube 210 Further comprising a plurality of targets and a plurality of electron beams.
The method of claim 3,

An X-ray transmission window 110 through which X-rays reflected from the multiple targets 330 are transmitted is provided on one side of the case 100,

The reflection surface of the multi-target 330 in which the electron beam impinges is formed to be inclined downward at a predetermined angle in the direction toward the X-ray transmission window 110 with respect to a plane perpendicular to the X-ray transmission window 110 surface. An X-ray generator having multiple targets and multiple electron beams.
A case 100 having a vacuum chamber 120 therein so that the electron beam emitted from the cathode filament 230-1 impinges on and reflects the multiple targets 330 of the anode to emit X-rays;

A cathode part 200-1 provided at one side of the inside of the case 100 and having a single negative electrode filament 230-1 heated by an applied power source to emit an electron beam;

330b, and 330c, which are spaced apart from each other in the axial direction around the circumference of the rotating anode unit 310 so as to collide with the electron beams emitted from the single cathode filament 230-1, An anode part (300) having multiple targets (330) composed of;

A cooling unit 400 for dissipating heat generated in the anode part 300 to the outside of the case 100 when the electron beam collides with the outside of the case 100; And

An electron beam emitted from the single cathode filament 230-1 provided between the single cathode filament 230-1 and the multiple target 330 collides with a specific one of the plurality of targets 330a, And a deflection device (600) for controlling a movement path of the electron beam by forming a magnetic field so that the electron beam is directed to the target.
6. The method according to any one of claims 1 to 5,

The anode rotating shaft portion 320 passing through the case 100 is integrally connected to one side of the rotating anode cylinder portion 310,

A hollow portion 340 communicating with the outside of the case 100 is provided in the rotary anode cylinder portion 310 and the anode rotary axis portion 320 to form a cooling water circulation flow path of the cooling portion 400 Characterized in that it comprises multiple targets and multiple electron beams.
The method according to claim 6,

The cooling unit (400)

A cooling water inlet 411 is formed at an end exposed to the outside of the case 100 and extends to the hollow portion 340 inside the anode rotation axis portion 320 and the rotary anode cylinder 310, A first heat radiation pipe (410) having a flow path conversion portion (410a) extending from the end portion to both sides;

The outer circumference of the first heat dissipating tube 410 is coupled to the outer circumference of the first heat dissipating tube 410 and is in close contact with the inner circumferential surface of the anode rotating axis part 320, And a second heat discharging pipe (420) having a cooling water outlet (421) formed on one side of the end portion exposed to the outside of the second heat pipe (420).
8. The method of claim 7,

The cooling water introduced into the cooling water inlet 411 moves horizontally along the first horizontal flow passage 412 inside the first heat radiation pipe 410 and then flows into the first vertical The flow path is changed in the vertical direction through the flow path 413 and is discharged to the hollow portion 340 inside the rotary anode cylinder portion 310. After recovering heat transferred from the rotary anode portion 310, Flows through the second vertical flow passage 414 between the flow path conversion portion 410a and the second heat radiation pipe 420 and flows into the second horizontal flow path 420 between the first heat radiation pipe 410 and the second heat radiation pipe 420 415, and is discharged through the cooling water outlet (421). The X-ray generator according to claim 1,
8. The method of claim 7,

Between the outer circumferential surface of the anode rotating axis portion 320 and the inner circumferential surface of the case 100 into which the anode rotating axis portion 320 is inserted and between the inner circumferential surface of the anode rotating axis portion 320 and the outer circumferential surface of the second heat dissipating tube 420 And a vacuum airtight slider (500) is interposed between the multiple targets and the multiple electron beams.