WO2012153662A1 - Method for inspecting minute defect of translucent board-like body, and apparatus for inspecting minute defect of translucent board-like body - Google Patents

Abstract

The present invention is a method for inspecting a minute defect present in a translucent board-like body, while transferring the translucent board-like body along a transfer path. The method for inspecting a minute defect of a transparent board-like body has: a preliminary inspection step, wherein the position of the minute defect is specified by irradiating the translucent board-like body with light and picking up an image of the main surface of the translucent board-like body by means of a preliminary image pickup unit, said minute defect being present in the surface direction of the main surface of the translucent board-like body; and a detail inspection step, wherein, corresponding to the minute defect position obtained in the preliminary inspection step, a main image pickup unit is moved in the direction, which is along the surface of the translucent board-like body and intersects the transfer direction of the translucent board-like body, and the image of the minute defect is picked up, while moving the main image pickup unit in the transfer direction in the state wherein the main image pickup unit is aligned with the minute defect.

Description

Inspection method for minute defects of translucent plate and inspection apparatus for minute defects of translucent plate

The present invention relates to a method for inspecting minute defects of a plate-like body such as a light-transmitting glass plate and an inspection apparatus for minute defects of a light-transmitting plate-like body.

Today, glass plates are used in electronic devices such as flat panel displays, so there is a need for glass plates that are thin and have few defects such as bubbles, scratches, and foreign materials, or have no defects at all. Yes.
This type of glass substrate for flat panel displays is formed into a plate shape by pouring the melted raw material onto a float bath, and after slowly cooling the molded product, it is cut into a predetermined size and the surface is polished if necessary. It is manufactured by washing.
The glass substrate after cleaning is transported to a packing process by a transport device such as a conveyor, and optical inspection is performed for minute defects such as bubbles, scratches, and foreign matters on the way. For example, illumination is performed on a glass substrate, a weak change in brightness and darkness of the glass substrate is captured with an optical camera, and minute defects are identified by image processing.

As an example of a glass substrate inspection apparatus, a guide (moving means) movable along the glass substrate transport direction is provided on a transport path for transporting the glass substrate, and an illumination device and a light receiving means are provided on the moving means. An inspection apparatus having a configuration in which the moving direction of the moving means is set to be the same as the conveying direction of the glass substrate and a speed control device is provided in the moving means is known (see Patent Document 1).
In the inspection apparatus described in Patent Document 1, the moving speed of the moving means is set to be lower than the conveying speed of the glass substrate, and the moving speed of the moving means is set to be higher than the conveying speed of the glass substrate. It is possible to cope with both the case where the inspection is performed by setting and the case where the movement speed of the moving means is set to be the same as the conveyance speed of the glass substrate.

Japanese Unexamined Patent Publication No. 2009-80088

With a conventional inspection device that captures images while transporting a glass substrate, it is necessary to use a high-speed shutter to obtain a high-definition image without blurring. However, using a high-speed shutter results in insufficient exposure time. There is a problem that it is difficult to image a minute change of a minute defect. Therefore, it is necessary to reduce the conveyance speed of the glass substrate in the inspection process, or to stop the glass substrate during the conveyance and then take an image, but any of these means reduces the productivity of the glass substrate. There is. In addition, when illuminating a translucent plate such as plate glass, the reflected light is about 4 to 8% with respect to the incident light. Therefore, even if the intensity of the reflected light is increased, there is a limit and the exposure is insufficient. There is also a problem that tends to be.
When a plurality of minute defects are scattered on the glass substrate in the conventional inspection apparatus, it is extremely difficult to image the plurality of minute defects scattered in the middle of the transportation of the glass substrate. It was difficult to accurately inspect the glass substrate formed in the state where the dots are scattered.

Based on these backgrounds, the present inventor, in the method of inspecting the translucent plate-like body such as a large glass substrate in the middle of transport, when the translucent plate-like body is dotted with a plurality of minute defects Even so, it is an object of the present invention to provide a micro defect inspection method and a micro defect inspection apparatus capable of precisely inspecting the micro defect without reducing the transport speed of the translucent plate-like body.

The present invention relates to a method for inspecting a micro defect existing in a translucent plate-like body while conveying the translucent plate-like body along a conveyance path, and irradiating the translucent plate-like body with light. Preliminary inspection step of identifying the position of the minute defect existing in the surface direction of the main surface of the translucent plate by imaging the main surface of the translucent plate with a preliminary imaging unit; The main imaging unit is moved in a direction intersecting the transport direction of the translucent plate along the surface direction of the translucent plate in accordance with the position of the minute defect obtained in the preliminary inspection step. And a scrutiny inspection step of imaging the minute defect while moving in the transport direction in a state of being aligned with the minute defect.

In the inspection method for minute defects of the light-transmitting plate-like body of the present invention, in the detailed inspection step, the main imaging unit is moved and positioned in a direction intersecting the transport direction of the light-transmitting plate-like body, The micro defect can be imaged while moving the main imaging unit at the same speed as the translucent plate along the conveyance path in synchronization with the movement of the micro defect entering the field of view of the main imaging unit.
In the inspection method for minute defects of the light-transmitting plate-like body according to the present invention, in the scrutiny inspection step, a plurality of main imaging units are arranged along the conveyance path, and the position of the minute defect specified in the preliminary inspection step is determined. The main image pickup unit can be individually moved in correspondence with the above, and the minute defects can be individually imaged.
The inspection method for minute defects of the light-transmitting plate-like body according to the present invention is installed on the upstream side of the conveyance path among the plurality of main imaging units provided along the conveyance path in the detailed inspection step. The main imaging unit moves in response to the approach of a specific microdefect to capture the microdefect, but the main imaging unit on the upstream side of the transport path moves to image the microdefect. When the next minute defect approaches closer than the required time, the other main imaging unit installed on the downstream side of the transport path moves with respect to the approaching minute defect so that the minute defect can be imaged.

The inspection method for minute defects of the light-transmitting plate-like body of the present invention can perform both dark field inspection and bright field inspection in each of the preliminary inspection step and the close inspection step.
In the preliminary inspection step, the method for inspecting a micro defect of the light transmitting plate-like body of the present invention is present in the surface direction of the main surface of the light transmitting plate-like body using a line sensor camera as the preliminary imaging unit. The position of the minute defect can be specified, and the minute defect can be imaged using an area camera as the main imaging unit in the inspection step.
In the inspection method for minute defects of the light-transmitting plate-like body according to the present invention, in the detailed inspection step, the area camera is directed in a direction orthogonal to the transport direction of the light-transmitting plate-like body, and the area camera is The micro defects can be imaged by inclining the main surface of the translucent plate-like body with respect to the region moving along the transport path.

Further, the present invention provides an inspection apparatus for a micro defect of a light transmitting plate that inspects a micro defect existing in a light transmitting plate that is transported along a transport path. An illuminator that emits light, a preliminary inspection machine that includes a preliminary imaging unit that images the entire main surface of the translucent plate-like body, and an image of the translucent plate-like body that is captured by the preliminary imaging unit Management device for identifying position information of minute defects existing in the surface direction of the main surface of the translucent plate from information, illuminator for irradiating light to the translucent plate, and the translucent plate A main imaging unit that images the main surface of the light-transmitting body, the light-transmitting plate-shaped body of the light-transmitting plate-shaped body along the surface direction of the light-transmitting plate-shaped body in accordance with the positional information of the minute defect specified by the preliminary inspection machine A first transport unit that moves the main imaging unit in a direction intersecting the transport direction, and the transport direction of the translucent plate-shaped body; An inspection system for a microstructure defect of the light-transmitting plate body; and a review test machine having a second transport unit that moves the image pickup unit.

In the inspection apparatus for minute defects of the light-transmitting plate-like body of the present invention, the second transport unit is at a constant speed with the light-transmitting plate-like body in the same direction as the transport direction of the light-transmitting plate-like body. The main imaging unit can be moved.
The inspection device for minute defects of the light-transmitting plate-like body according to the present invention is such that the main image pickup unit including the main image pickup unit, the first transfer unit, and the second transfer unit includes the light-transmitting plate-like body. A plurality of installations can be made along the conveyance direction.
The inspection apparatus for minute defects of the light-transmitting plate-like body according to the present invention includes a plurality of main imaging units provided along the conveyance path, wherein the main imaging unit installed on the upstream side of the conveyance path is specified. The micro-defect is imaged by moving in response to the approach of the micro-defect, but the main imaging unit on the upstream side of the transport path moves and the next time is faster than the time required to image the micro-defect. When a minute defect approaches, the management device can be provided with a function of moving another main imaging unit installed on the downstream side of the conveyance path with respect to the approaching minute defect and imaging the minute defect. .

In the inspection apparatus for minute defects of the light-transmitting plate-like body of the present invention, the preliminary inspection machine can be provided with a preliminary imaging unit as a bright field inspection device and a preliminary imaging unit as a dark field inspection device.
In the inspection apparatus for minute defects of the light-transmitting plate-like body of the present invention, the preliminary imaging unit can be a line sensor camera and the main imaging unit can be an area camera.
The inspection device for minute defects of the light-transmitting plate-like body of the present invention is such that the area camera is directed in a direction intersecting with the transport direction of the light-transmitting plate-like body, and the main body of the light-transmitting plate-like body. The surface may be inclined with respect to the region in which the surface is moved along the conveyance path.

According to the present invention, the main imaging unit is moved in a direction crossing the transport direction of the translucent plate according to the position of the minute defect in the surface direction of the translucent plate specified by the image of the preliminary inspection machine. Alignment is performed, and the aligned main imaging unit captures images while moving in the transport direction of the translucent plate while capturing minute defects, ensuring sufficient exposure time without using a high shutter speed. As a result, high-definition imaging of minute defects can be performed, and minute defects can be inspected with high accuracy. If the main imaging unit that captures minute defects moves while moving at the same speed as the translucent plate in the transport direction of the translucent plate, high-definition imaging that does not cause blur in the main imaging unit This contributes to improving the inspection accuracy of minute defects.

FIG. 1 is a schematic diagram showing the overall configuration of the inspection apparatus according to the first embodiment of the present invention. 2 (a) and 2 (b) show an example of an optical system as a dark field inspection device of a preliminary inspection machine provided in the inspection apparatus, and FIG. 2 (a) shows a detection state of a back surface reflection image. FIG. 2B is an explanatory diagram illustrating an example of a detection state of a real image. 3 (a) and 3 (b) show an optical system of a close inspection machine provided in the inspection apparatus, and FIG. 3 (a) shows an example of a detection state of a dark field optical system. (B) is a figure which shows an example of the detection state of a bright field optical system. 4 (a) and 4 (b) show the positional relationship between the illuminator of the scrutinizing inspection machine provided in the inspection apparatus and the main imaging unit. FIG. 4 (a) is a front view and FIG. 4 (b). Is a plan view. FIG. 5 is a plan view showing an overall configuration of a close inspection machine provided in the inspection apparatus. 6 (a) and 6 (b) show an example of a linear motion unit that constitutes a transport unit provided in the inspection apparatus, and FIG. 6 (a) shows a linear motion unit that constitutes a first transport unit. FIG. 6B is a configuration diagram of a linear motion unit constituting the second transport unit. FIGS. 7 (a) to 7 (g) show an example of a state in which an inspection is performed while following a plurality of defects of a translucent plate using the inspection apparatus provided in the inspection apparatus. FIGS. 7 (a) to 7 (g) are diagrams showing a state in which the inspection device follows each of the scattered defects. FIG. 8 is a plan view showing a partial configuration of a close inspection machine provided in the inspection apparatus according to the second embodiment of the present invention. FIG. 9 is a configuration diagram showing another example of an optical system provided in the inspection apparatus according to the present invention.

"First embodiment"
Hereinafter, a first embodiment of an inspection apparatus according to the present invention will be described with reference to the accompanying drawings, but the present invention is not limited to the embodiment described below.

FIG. 1 shows an example of an inspection line provided with an inspection apparatus according to the present invention. The inspection apparatus 1 of the present embodiment has a plurality of rectangular translucent plates 2 such as plate glass that can be conveyed horizontally. It is provided along the conveyance path 3 composed of a roller conveyor. For example, the transport path 3 is a series of transported after the molten glass raw material is flowed into a float bath shape and formed into a sheet glass, the sheet glass is cut into a sheet glass of a predetermined size, and the surface is polished. It is provided as a part of the plate glass production line.
A cleaning device 5 is installed on the entrance side (left end portion side in FIG. 1) of the transport path 3 shown in FIG. 1, and the translucent plate-like body 2 such as plate glass transported from the previous cutting step in a horizontal state is After the front and back surfaces are cleaned by the cleaning device 5, they are horizontally transported to the transport path 3 in which the inspection device 1 is provided.

A preliminary inspection machine 6 and a close inspection machine 7 are installed after the cleaning device 5 along the transport path 3, and a management device 8 for controlling these inspection machines is electrically connected to the preliminary inspection machine 6 and the close inspection machine 7. Connected and provided.
The preliminary inspection machine 6 includes a dark field appearance inspection device 10 and a bright field appearance inspection device 11. The dark field visual inspection device 10 is a kind of dark field visual inspection device for inspecting in the dark field mainly the appearance of a flaw such as a hairline formed on the translucent plate-like body 2. The bright-field appearance inspector 11 is a bubble portion caused by bubbles formed inside the translucent plate-like body 2 and a crater portion caused by bubbles appearing on the front and back surfaces of the translucent plate-like body 2 It is a kind of bright-field inspector for inspecting mainly in the bright field.
The close inspection machine 7 includes a first inspection device 12 that is a type of dark field inspection device and a second inspection device 13 that is a type of bright field inspection device.

The dark field inspection device is a case where an imaging unit such as a camera captures the angle of illumination when light enters the translucent plate 2 from the illuminator and the reflected light from the translucent plate 2. Inspection that prescribes the positional relationship between the illuminator and the imaging unit so that the optical axis of the imaging unit is installed at an angle that deviates from the angle at which the specularly reflected light is obtained, and basically a dark field where no reflected light enters Indicates a vessel. Further, the bright field inspection device is a case where an imaging unit such as a camera captures the angle of illumination when light enters the translucent plate 2 from the illuminator and the reflected light from the translucent plate 2. In addition, the optical axis of the imaging unit is installed at an angle at which regular reflection light can be obtained, and the positional relationship between the illuminator and the imaging unit is defined so that the reflected light can be basically captured and captured as a bright field. The configuration tester is shown.

For example, as shown in FIG. 2A, in the configuration in which the translucent plate-like body 2 is horizontally transported in the direction of the arrow a1 along the transport path 3, the downstream side of the transport path 3 is located above the entrance side of the transport path 3. An illuminator 15 that irradiates illumination light obliquely downward toward the side is provided. In the example of this figure, a rod lens 15b is provided at the tip of a rod-shaped main body 15a, and a device that collects and irradiates illumination light obliquely from above to the measurement position on the surface of the translucent plate-like body 2. It is provided as.
A preliminary imaging unit (line sensor camera) 16 is provided on the downstream side along the conveyance path 3 and facing the previous illuminator 15, facing the upstream side of the conveyance path 3 and obliquely downward.

When the illumination light from the illuminator 15 is reflected by the surface of the translucent plate-like body 2, the line sensor camera 16 is shifted from the regular reflection direction R1 to the position where the optical axis is removed (in FIG. 2, it is shifted obliquely downward). In the configuration installed at (position), it is configured for dark field inspection equipment. In the configuration shown in FIG. 2, the dark field appearance inspection device 10 is configured to include the illuminator 15 and the line sensor camera 16. The line sensor camera 16 used in the present embodiment has a resolution capable of discriminating defects such as a scratch having a size of about 10 μm × 100 μm or more formed on the translucent plate-like body 2. Note that the resolution is an example, and it is a matter of course that a line sensor camera having a higher resolution may be used.
As an example of the dark field visual inspection device 10, when the incident angle of the illumination light of the illuminator 15 is 45 ° (elevation angle with respect to the horizontal: 45 °), the angle of the optical axis of the line sensor camera 16 is 30 °. (Elevation angle with respect to horizontal: 30 °).
Further, in the configuration in which the line sensor camera 16 is installed with the optical axis aligned with the regular reflection direction R1, it is provided as a bright field inspection device, and the optical axis is set in the regular reflection direction indicated by the two-dot chain line in FIG. The bright-field visual inspection device 11 is configured by including the line sensor camera 16 and the illuminator 15 that are aligned.

The illuminator 15 and the line sensor camera 16 are mounted on a frame (not shown) while maintaining individual elevation angles, and the frame moves in the width direction of the transport path 3 (a translucent plate that moves along the transport path 3). A plurality of them are installed in the width direction of the body 2. The plurality of line sensor cameras 16 share and cover a region having a predetermined width in the width direction of the translucent plate-like body 2 that is horizontally transported along the transport path 3. Since only one of these line sensor cameras 16 can cover the entire width of the translucent plate-like body 2, a plurality of translucent plates can be provided with high resolution by installing a plurality of units as described above. The entire width of the body 2 can be imaged. The plurality of line sensor cameras 16 are continuously operated while the translucent plate-like body 2 passes through to take an image, thereby dark field over the entire surface direction of the main surface (front surface) of the translucent plate-like body 2. Inspection or bright field inspection is possible.

As shown in FIG. 2A, the illumination light irradiated from the illuminator 15 onto the surface of the translucent plate-like body 2 is specularly reflected when the surface of the translucent plate-like body 2 is flat with no defects. Thus, no light is incident on the line sensor camera 16 as a dark field inspection device, and the dark field state is maintained. When the translucent plate-like body 2 has a defect such as a scratch or a foreign substance, the scattered light generated there enters the line sensor camera 16 as a dark field inspection device, and is thus detected as a bright spot. The defects detected by this method are all those that generate scattered light, and in addition to scratches, internal bubbles, cullet adhesion, and the like can be detected. In addition, as shown in FIG. 2A, when a scratch is present on the front surface side of the translucent plate-like body 2, the images are doubled and captured on the back side of the translucent plate-like body 2. In the case of existing scratches, a single image that is not doubled is obtained. When a double image is obtained, the depth of the defect can be estimated from the distance between the double images.

The dark field visual inspection device 10 is connected to the management device 8 through the data wiring 17, and the bright field visual inspection device 11 is connected to the management device 8 through the data wiring 18. Information on the inspection result of the entire surface of the translucent plate-like body 2 imaged and inspected individually by the bright-field appearance inspection device 11 can be sent to the management device 8.
The dark-field appearance inspection device 10 detects the presence of a bright spot in the case of a dark-field image, for example, by binarizing the image of the translucent plate-like body 2 to emphasize light and dark.
The bright field visual inspector 11 has a function of detecting the presence of dark spots in the case of a bright field image, recording their coordinate positions, and recording them in a storage unit.
The management device 8 includes a personal computer including a storage unit, a control unit, and an arithmetic unit, and receives inspection results sent from the dark field visual inspection device 10 and the bright field visual inspection device 11. And the management apparatus 8 is connected to the close inspection machine 7 via the control line 19, and controls the 1st inspection device 12 and the 2nd inspection device 13 so that it may mention later.

In the scrutiny inspection machine 7 provided on the downstream side of the conveyance path 3, the first inspection instrument 12, which is a kind of dark field inspection instrument, is arranged in the width direction of the conveyance path 3 as shown in FIG. And a first main imaging unit (first area camera) 21 provided on the other side in the width direction of the transport path 3. The second inspection device 13, which is a kind of bright field inspection device, includes an illuminator 22 provided on one side in the width direction of the conveyance path 3 and a second inspection device provided on the other side in the width direction of the conveyance path 3. A main imaging unit (second area camera) 23 is provided.
The illuminator 20 and the first area camera 21 are arranged so as to face each other along the width direction of the transport path 3, the illuminator 20 faces obliquely downward, and the light transmission moving along the transport path 3. When the illumination light is irradiated on the surface of the property plate-like body 2, the first area camera 21 is disposed obliquely downward on the side toward which the reflected light is directed.
The illuminator 22 and the second area camera 23 are arranged so as to face each other along the width direction of the transport path 3, the illuminator 22 faces obliquely downward, and the translucent light moving along the transport path 3. When the illumination light is irradiated on the surface of the property plate-like body 2, the second area camera 23 is disposed obliquely downward on the side toward which the reflected light is directed.

As shown in FIG. 3A, the first inspection device 12 that is a kind of dark field inspection device includes a ring-shaped light emitting portion 20 a and has a ring shape with respect to the surface of the translucent plate-like body 2. Irradiate light. Therefore, on the surface of the translucent plate-like body 2, a bright region S <b> 1 illuminated in a ring shape and a dark region S <b> 2 where the illumination light inside thereof does not hit.
The first area camera 21 is arranged so that the elevation angle of its optical axis 21b is the same as the elevation angle of the central axis 20b of the ring-shaped light emitting section 20a, and the first area camera 21 is the previous ring-shaped light emitting section 20a. Are arranged so that the dark area S2 formed on the surface of the translucent plate-like body 2 can be imaged as an imaging area. Since the first area camera 21 uses the dark region S2 as a field of view, it functions as a dark field inspection device.

As shown in FIG. 3 (b), the second inspection device 13, which is a kind of bright field inspection device, includes a planar light emitting portion 22 a and is planar with respect to the surface of the translucent plate-like body 2. Irradiate light. Therefore, a bright region S3 illuminated in a planar shape is formed on the surface of the translucent plate-like body 2.
The second area camera 23 is arranged so that the elevation angle of the optical axis 23b is the same as the elevation angle of the central axis 22b of the planar light emitting unit 22a, and the second area camera 23 is the previous planar light emitting unit 22a. Are arranged so that a bright area S3 formed on the surface of the translucent plate-like body 2 can be imaged as an imaging area. The second area camera 23 functions as a bright field inspector because the bright area S3 is the field of view.

FIG. 4 is a diagram for further explaining the positional relationship between the illuminator 20 provided with the ring-shaped light emitting portion 20 a provided in the first inspection device 12 and the first area camera 21. 4B, the illumination light is incident on the surface of the translucent plate 2 from the ring-shaped light emitting portion 20a obliquely from above, and the first area camera 21 is the translucent plate. When the surface of 2 is imaged, the state of the in-focus area is shown.
The first area camera 21 is arranged with its optical axis along the width direction of the transport path 3. That is, the first area camera 21 is installed obliquely downward in the width direction of the transport path 3 (direction intersecting the transport direction of the translucent plate-like body 2). Can be focused on a rectangular region 21A that is elongated in the transport direction of the translucent plate-like body 2, and an elongated rectangular region 21B that is not focused on both sides thereof (both sides in the width direction of the transport path 3). Is formed. In other words, a rectangular area 21B that is out of focus is formed in both the area closer to and far from the first area camera 21 than the rectangular area 21A in focus. In this way, by extending the rectangular region 21A of the first area camera 21 in the transport direction of the translucent plate-like body 2, the translucency transported along the transport path 3 as will be described later. There exists the characteristic which can catch the fault of the plate-shaped body 2 easily. This feature will be described in detail later.

The illuminator 20 and the first area camera 21 are accommodated inside the first frame member 24 shown in FIG. 3A while maintaining their inclination angles, and the illuminator 22 and the second area camera 23. Are accommodated in the second frame member 25 shown in FIG. 3B while maintaining their inclination angles. A window portion is formed at the bottom of these frame members 24 and 25, so that illumination light can be applied to the translucent plate-like body 2 and reflected light from the translucent plate-like body 2 can be imaged. ing.

As shown in detail in FIG. 5, the first inspector 12 of the present embodiment is a first frame member 24 that movably supports the first frame member 24 including the previous illuminator 20 and the first area camera 21. It is composed of four first main imaging units 30 (hereinafter referred to as main imaging units 30 in this specification) constituted by one conveyance unit 27 and second conveyance unit 28.
As shown in detail in FIG. 5, the second inspector 13 is a first transport unit that movably supports a second frame member 25 including the previous illuminator 22 and the second area camera 23. 27 and four second main image pickup units 31 (hereinafter referred to as main image pickup units 31 in the present specification). These area cameras 21 and 23 preferably have a high resolution of about 8 to 10 μm per pixel and can capture high-definition images.

The first transport unit 27 provided in the first inspector 12 is a linear motion unit 33 along the width direction of the transport path 3 with respect to the portal frame having a size extending over the entire length in the width direction of the transport path 3. Is configured to be attached. As an example, as shown in FIG. 6A, the linear motion unit 33 is provided with a screw screw portion 35 at the inner center of an elongated box-shaped frame member 34, and has a screw hole portion that engages with the screw screw portion 35. The provided slider member 36 is provided so as to be movable in the length direction of the frame member 34 in accordance with the rotation of the screw thread portion 35. A drive source such as a servo motor is built in one end side of the frame member 34, and the screw screw portion 35 can be driven to rotate in forward and reverse directions. The rotational speed and direction of the screw screw portion 35 by the servo motor can be adjusted. By adjusting, the moving direction (moving direction along the width direction of the conveyance path 3) and moving speed of the slider member 36 can be adjusted.

A second transport unit 28 is attached to the slider member 36. The second transport unit 28 has the same structure as the first transport unit 27, but includes a linear motion unit 33 </ b> A shorter than the linear motion unit 33. The structure of the linear motion unit 33A is the same as that of the linear motion unit 33, and includes a frame member 34A, a screw thread portion 35A, and a slider member 36A.
The linear motion unit 33A constituting the second transport unit 28 is attached to the slider member 36 so as to face the downstream side of the translucent plate-like body 2 in the transport direction and to be parallel to the transport direction. The second transport unit 28 is formed shorter than the first transport unit 27, and the first frame member 24 described above is provided on the slider member 36A of the second transport unit 28 as shown in FIG. The illuminator 20 and the first area camera 21 are attached obliquely downward.
In the current technology, the linear motion units 33 and 33A have a feed screw type servo motor and a device showing a moving speed of 1000 mm / second is commercially available. Therefore, the first area camera 21 is moved. The necessary and sufficient speed can be obtained.

With the above configuration, the illuminator 20 and the first area camera 21 are moved along the first conveyance unit 27 in the width direction of the conveyance path 3 from end to end (in other words, the horizontal direction conveyed along the conveyance path 3. The light-transmitting plate-like body 2 in a state can be moved linearly (from one side end to the other side end). Furthermore, the illuminator 20 and the first area camera 21 can be linearly moved along the second conveyance unit 28 in the conveyance direction of the translucent plate-like body 2 from the proximal end side to the distal end side.
The translucent plate-like body 2 to be inspected in the inspection apparatus 1 of the present embodiment is, for example, a G8 size glass plate known as display device glass, and is a plate glass of 2500 mm × 2200 mm and a thickness of about 0.7 mm. Therefore, the length of the first transport unit 27 is formed to a size that can cover the width of the plate glass to be inspected. Of course, the size of the translucent plate-like body 2 has various sizes for use as a display device, and there are various sizes in other application fields. In addition, the length of the first transport unit is determined.
The speed at which the translucent plate-like body 2 is transported along the transport path 3 may be arbitrary. For example, it is about 15 to 20 m / min for a plate glass for use in a display device, and the length of the second transport section 28 is The length can be set such that the first frame member 24 or the second frame member 25 can be moved by about 100 mm to 150 mm.
In the configuration shown in FIG. 5, the second transport unit 28 is located at the center in the length direction of the first transport unit 27, and the neutral position is the initial state. The second transport unit 28 moves from the neutral position in the width direction of the translucent plate-like body 2 and, as will be described later, when the first area camera 21 takes an image, returns to the neutral position and moves to the next. It is comprised so that it may wait for in preparation. In the initial state, the first area camera 21 of the second transport unit 28 is disposed at the end of the first transport unit 27 at the center of the first transport unit 27. This is desirable in that it can move faster because it requires less travel distance to the defect than if it is.

The main imaging unit 31 provided in the second inspection device 13 includes the first conveyance unit 27 and the second conveyance unit 28 in the same manner as the main imaging unit 30 described above. However, the main imaging unit 31 is different in that a frame member 25 including an illuminator 22 and a second area camera 23 is attached to the second transport unit 28.
In the structure of this embodiment, the illuminator 20 and the first area camera 21 provided in the first inspection device 12 are provided as a dark field inspection device, and the illuminator provided in the second inspection device 13. 22 and the second area camera 23 are provided as a bright field inspection device.

A position detection sensor for detecting the tip position of the translucent plate-like body 2 on the upstream side along the conveyance path 3 with respect to the installation position of the four main imaging units 30 constituting the first inspector 12. 38 is provided, and the tip position of the translucent plate-like body 2 is detected on the upstream side along the conveyance path 3 with respect to the installation positions of the four main imaging units 31 constituting the second inspection device 13. A position detection sensor 39 is provided.
The position detection sensor 38 is provided for grasping the tip position of the translucent plate 2 close to the first inspection device 12, and the position detection sensor 39 is transparent to the second inspection device 13. It is provided to grasp the tip position of the optical plate-like body 2.
When the position detection sensor 38 detects the approach of the translucent plate 2, the focal position of the first area camera 21 of the first main imaging unit 30 and the tip position of the translucent plate 2 Thus, as will be described later, the movement of the first area camera 21 can be started by operating the first main imaging unit 30.
In addition, as shown in FIG. 1, the 1st tester 12 is connected to the control apparatus 14 with a display apparatus via the connection line 12a, and the 2nd tester 13 is attached to the display apparatus via the connection line 13a. Connected to the control device 14, the image captured by the first area camera 21 of the first inspection device 12 and the image captured by the second area camera 23 of the second inspection device 13 are respectively displayed on the display device. It is configured so that it can be displayed.

In order to inspect the defects existing in the translucent plate-like body 2 by the inspection apparatus 1 of the present embodiment, the preliminary inspection machine 6 is applied to the translucent plate-like body 2 that has been transported horizontally along the transport path 3. First, a dark field inspection is performed in the full width direction of the translucent plate-like body 2 by the dark field appearance inspecting device 10 to detect the position of a scratch and the like. Bright field inspection is performed in the full width direction of the body 2 to detect the position of defects such as bubbles. The images picked up by the dark-field appearance inspector 10 and the bright-field appearance inspector 11 are sent to the management device 8, and the coordinate position of the defect along the surface of the translucent plate-like body 2 is specified in the management device 8. 8 is stored in the storage unit 8.
The management device 8 controls the operation of the first inspection device 12 and the second inspection device 13 of the close inspection machine 7 in accordance with the coordinate position of the defect of the translucent plate-like body 2.

As an example, as shown in FIG. 5, when the defect K exists at an arbitrary position of the translucent plate-like body 2, an image captured by either the dark-field appearance inspector 10 or the bright-field appearance inspector 11. Is determined by image processing by the management device 8 and its coordinate position (the X coordinate position in the direction from the front end to the rear end of the translucent plate-like body 2 and the width direction both ends of the translucent plate-like body 2) The coordinate position in the Y direction along the width direction from one of the ends is specified.
Based on the identified coordinate position information in the XY directions, the second transport unit 28 of the first main imaging unit 30 waiting at the initial position of the center of the first transport unit 27 is moved to the center of the transport path 3. The focal point position of the first area camera 21 is moved to the coordinate position in the Y direction by moving in the width direction from the neutral position of the unit, and alignment is performed at the position where the defect K is scheduled to pass.

Since the position detection sensor 38 provided on the upstream side of the first inspection device 12 detects the passage of the tip position of the translucent plate-like body 2, the defect K of the translucent plate-like body 2 is the first area. The first frame member 24 is caused to travel along the second transport unit 28 at the same speed as the transport speed of the translucent plate-like body 2 in accordance with the timing of passing the focal position of the camera 21. During this travel, the illumination light is irradiated around the defect K from the ring-shaped light emitting unit 20a, and the first area camera 21 captures an image in the dark field. Although the first area camera 21 has a high resolution, the first area camera 21 moves at a constant speed along with the defect K along the conveyance path 3 by a distance corresponding to the length of the second conveyance unit 28. Even without this, with the normal shutter speed, the portion of the defect K can be imaged at high resolution without blurring without causing underexposure. Further, the illumination light of the illuminator 20 does not need to be increased more than necessary, and the illumination light only needs to have brightness that can be imaged within the range of the normal shutter speed.

In addition, when the conveyance speed of the translucent plate-like body 2 is, for example, 18 m / min (300 mm / sec), it is assumed that the resolution of the inspection machine is 10 μm / pixel and image blurring is allowed for one pixel. If it is preferable that the camera is stopped, a time required to travel 10 μm is a necessary shutter time within 0.033 msec, and a very high shutter speed of 1/30000 seconds or less is required.
On the other hand, considering that the first area camera 21 follows, even if the shutter speed is 1/250, the speed difference that can allow blurring for one pixel is 0.15 m / min (= 2.5 mm / sec). ) Is 0.83%. When the shutter speed is 1/1000, a difference of 3.33% can be allowed at 0.6 m / min (= 10 mm / sec).
Therefore, as described above, even if an extremely high shutter speed of 1/30000 seconds or less is not used, it is possible to capture images at a general-purpose shutter speed, for example, 1/250 to 1/1000 seconds, by adopting this embodiment. I understand.
In addition, the aperture of the first area camera can be selected from about 4 to 8. If the aperture is increased, the depth of field will be deepened and the in-focus area will be expanded. However, increasing the aperture will compensate for the lack of illumination. In addition, it is necessary to reduce the shutter speed or increase the illumination intensity. When the shutter speed is slowed down, the allowable width of the above-described speed deviation is narrowed. In addition, adding illumination to increase illumination illuminance increases the weight of the device, which increases the inertial force during driving and increases the rigidity of the driving device, making the device heavy and balanced. It is preferable to configure so that it can be realized at the shutter speed.

Further, if the defect K passes through the region of the first inspection device 12 and the translucent plate-like body 2 approaches the region of the second inspection device 13, the position detection sensor 39 is replaced with the translucent plate-like body. 2 approach is detected. When the translucent plate-like body 2 passes through the observation position of the position detection sensor 39, the positional relationship between the first main imaging unit 31 and the translucent plate-like body 2 becomes clear, so the first second The conveyance unit 28 is moved in the same manner as the positioning operation performed in the first inspector 12, and the portion of the defect K is imaged in the bright field by the second area camera 23. Although the second area camera 23 has a high resolution, it moves at a constant speed along the conveyance path 3 along with the defect K by a distance corresponding to the length of the second conveyance unit 28, so that the shutter speed is high. Even if it is not, the defect K can be imaged with high resolution without blurring without making the illumination light stronger than necessary with the normal shutter speed.
By the above operation, the defect K portion can be imaged with high resolution and no blur by using both the dark field and bright field inspection methods, so that various defects K such as scratches, bubbles, and foreign matter can be detected with high definition. Can do.
The images captured by the first area camera 21 and the second area camera 23 are displayed on the image display device provided in the control device 14, respectively. The presence or absence of K can also be determined.

FIG. 5 illustrates an example of an inspection method in the case where the defect K exists only in one place on the translucent plate-like body 2, but a plurality of defects K are formed on the translucent plate-like body 2. An example of the inspection method will be described below with reference to FIG.
FIG. 7A shows the first inspector 12 including four main imaging units 30 provided with the first frame member 24 including the first area camera 21. As shown in FIG. 7A, a case will be described in which the translucent plate-like body 2 on which the defects K1 to K5 are formed approaches.
The existence of the defects K1 to K5 has already been inspected when the translucent plate-like body 2 passes through the preliminary inspection machine 6 in the previous stage, and is translucently transported horizontally along the transport path 3 at a constant speed. In the XY coordinates along the surface direction of the surface of the plate-like body 2, the management device 8 has already identified and grasped the individual coordinate position information of the defects K1 to K5. The coordinates of the defects K1 to K5 are specified in order according to the distance from the tip position of the translucent plate-like body 2.

As shown in FIG. 7A, when the translucent plate-like body 2 approaches the first main imaging unit 30 of the first inspection device 12, it is omitted in FIG. Since the position detection sensor 38 shown in FIG. 1 detects the tip position of the translucent plate-like body 2, the management device 8 that grasps the position of the defect K1 operates the first main imaging unit 30, and the first The second conveyance unit 28 is moved in the Y direction along the conveyance unit 27 to align the focal area of the first area camera 21 at the same coordinate position as the Y coordinate position of the defect K1.
Since the management device 8 grasps the X coordinate position of the defect K1, the first frame member along the second transport unit 28 when the defect K1 reaches the focal region of the first area camera 21. 24 is moved synchronously with the translucent plate-like body 2 at a constant speed, and the defect K1 can be imaged with high definition by the first area camera 21 as shown in FIG. 7B.

After the defect K1 is imaged, the defect K2 approaches the first main imaging unit 30, so the second conveyance unit 28 is moved in the Y direction along the first conveyance unit 27, and the Y coordinate of the defect K2 The focal area of the first area camera 21 is aligned with the same coordinates as shown in FIG. Since the management device 8 grasps the X coordinate position of the defect K2, the first frame member along the second transport unit 28 when the defect K2 reaches the focal region of the first area camera 21. 24 is synchronized with the translucent plate-like body 2 at a constant speed, and the first area camera 21 can image the defect K2 with high definition.

After photographing the defect K2, the defect K3 approaches the first main imaging unit 30. However, the defect K2 and the defect K3 are close to each other, and the tracking operation of the first main imaging unit 30 is not in time. If 8 determines, the management apparatus 8 operates the second main imaging unit 30.
The second main imaging unit 30 moves the second transport unit 28 in the Y direction along the first transport unit 27 to align the first area camera 21 with the same coordinate as the Y coordinate of the defect K3. I do.
Since the management device 8 grasps the X coordinate position of the defect K3, the first frame member 24 is moved along the second conveyance unit 28 when the defect K3 reaches the focal region of the first area camera 21. The defect K3 can be imaged with high definition by the first area camera 21 as shown in FIG.

After photographing the defect K3, the defect K4 approaches the second main imaging unit 30. However, the defect K3 and the defect K4 are close to each other, and the tracking operation of the second main imaging unit 30 is not in time. If 8 determines, the management apparatus 8 operates the third main imaging unit 30.
The third main imaging unit 30 moves the second transport unit 28 in the Y direction along the first transport unit 27 to align the first area camera 21 with the same coordinate as the Y coordinate of the defect K4. I do.
Since the management device 8 grasps the X coordinate position of the defect K4, the first frame member 24 is moved along the second transport unit 28 when the defect K4 reaches the focal area of the first area camera 21. The defect K4 can be imaged with high definition by the first area camera 21 as shown in FIG.

After photographing the defect K4, the defect K5 approaches the first main imaging unit 30. However, the defect K4 and the defect K5 are sufficiently separated from each other, and the management apparatus 8 is in time for the follow-up operation of the first main imaging unit 30. Is determined, the management device 8 operates the first main imaging unit 30.
The first main imaging unit 30 moves the second transport unit 28 in the Y direction along the first transport unit 27 to align the first area camera 21 with the same coordinate as the Y coordinate of the defect K5. I do.
Since the management device 8 grasps the X coordinate position of the defect K5, the first frame member 24 is moved along the second transport unit 28 when the defect K5 reaches the focal region of the first area camera 21. The defect K5 can be imaged with high definition by the first area camera 21 as shown in FIG.
After imaging the defect K5, the first area camera 21 returns to the initial position in the center of the first transport unit 27 to prepare for the next defect inspection.

As described above, the management device 8 is driven mainly by the first main imaging unit 30 and determines that the first main imaging unit 30 cannot follow from the XY coordinate positions of the defects K1 to K5. Only in this case, the second main imaging unit 30, the third main imaging unit 30, and the fourth main imaging unit 30 are sequentially operated to inspect defects.
According to the moving speed of the translucent plate-like body 2 conveyed along the conveyance path 3, the first to fourth main imaging units 30 are sequentially used to inspect the defects, so that the translucency is obtained. Even if a plurality of defects K1 to K5 are formed on the plate-like body 2, the inspection apparatus 1 of the present embodiment can perform high-definition imaging while following all the defects without any trouble. Therefore, there is an effect that the translucent plate-like body 2 having a plurality of defects K1 to K5 can be inspected with high accuracy. In addition, in the defects K1 to K5, even when a plurality of defects exist extremely close to the transport direction of the translucent plate-like body 2, the plurality of main imaging units 30 can be operated to increase the height without any trouble. There is an effect that can be inspected with accuracy.

In the inspection apparatus according to the present embodiment, since the first main imaging unit 30 is frequently operated, there is a possibility that the first main imaging unit 30 may fail preferentially during repeated use. In this case, if the first main imaging unit 30 fails and stops operating, no image is sent, so that the failure of the first main imaging unit 30 can be immediately grasped. The second main imaging unit 30 can be operated with the second main imaging unit 30 as a main body, with the second main imaging unit 30 regarded as the first main imaging unit 30.

"Second embodiment"
FIG. 8 shows a second embodiment of the inspection apparatus according to the present invention. In the structure of this embodiment, in the first inspection device 42 provided in the transport path 3, two first devices are arranged in the width direction. An embodiment is shown in which the first main imaging units 50 and 51 are provided, and the two main units are provided in four rows for a total of eight main imaging units.
In the first inspection device 42 shown in FIG. 8, the main imaging units 50 in the right front row in the transport direction have the same configuration as the previous main imaging unit 30, but the length of the first transport unit 27 </ b> A is long. The difference is that the length of the conveyance path 3 is about half the width direction.
In the first inspection device 42 shown in FIG. 8, the main imaging units 51 in the left column facing forward in the conveyance direction have a similar configuration to the previous main imaging unit 30, but the length of the first conveyance unit 27B is the same. It is formed in a length about half the width direction of the conveyance path 3 so that the second conveyance unit 28A extends to the opposite side to the conveyance direction of the translucent plate-like body 2 with respect to the first conveyance unit 27B. The difference is that it is attached to the first transport section 27B at a right angle. The first transport unit 27A, 27B and the second transport unit 28 are configured by linear motion units 33, 33A as shown in FIG. 6, which is the same as the structure of the previous embodiment.

In the structure of the embodiment shown in FIG. 8, the length of the first transport units 27A and 27B is set to about half of the transport path 3, and the second transport moves along the first transport units 27A and 27B. Since the moving distance of the portions 28 and 28A is shortened, if the moving speed of the second transporting portions 28 and 28A is equivalent to that of the structure of the first embodiment, these are the widths of the translucent plate-like body 2. It can be moved along the direction in a shorter time (half time) than the structure of the first embodiment described above based on FIG. For this reason, the followability of the 2nd conveyance parts 28 and 28A to the fault currently formed in translucent plate-like object 2 improves. Moreover, since followability improves, even if it is a case where it applies to a translucent plate-shaped body whose width | variety of the translucent plate-shaped body 2 is about twice as large, it is the same as the conveyance part of 1st embodiment. Since the same followability can be secured even at the moving speed, it is possible to cope with the inspection of the defect of the larger transparent plate-like body.

In the previous embodiment, an example in which four main imaging units 30 or main imaging units 31 are provided for the first inspector 12 and the second inspector 13 has been described. The number of installation may be arbitrary. When inspecting a translucent plate-like body with few defects at the time of manufacture, a small number of installations may be used, and in some cases, a configuration in which four or more main imaging units are provided for inspection may be used.
Although it is preferable that both the dark-field visual inspection device 10 and the bright-field visual inspection device 11 are provided in the preliminary inspection machine 6, only one of them may be provided. The inspection devices provided in the scrutinization inspection machine 7 are preferably both the first inspection device 12 and the second inspection device 13, but only one of them may be provided.

FIG. 9 shows another structural example for the area cameras 21 and 23 provided in the inspection apparatus according to the present invention. The area cameras 21 and 23 described above are in relation to the movement region of the translucent plate-like body 2. The first main imaging unit (area camera) 60 is arranged vertically downward above the surface of the moving area of the translucent plate-like body 2 while being arranged obliquely downward. An example of the structure is shown.
The area camera 60 is shown as an example of a configuration capable of imaging a defect as a bright-field inspection device or a dark-field inspection device even when arranged vertically downward. One or more sets of the set of the first area camera 21 and the illuminator 20 or the set of the second area camera 23 and the illuminator 22 that are provided by four each as in the above-described embodiment. It can be replaced with the structure of this embodiment.
A half mirror member 61 is provided above the translucent plate-like body 2, an area camera 60 is provided above the half mirror member 61 with the optical axis vertically downward, and illumination is performed on the side of the half mirror member 61. A vessel 62 is provided.

In the configuration of this example, the illumination light incident on the half mirror member 61 from the illuminator 62 is perpendicularly incident on the surface of the translucent plate-like body 2 and the upward reflected light from the translucent plate-like body 2 is reflected. By capturing with the area camera 60 via the half mirror member 61 and imaging the surface of the translucent plate 2 with the area camera 60, the bright field inspection or dark field inspection of the translucent plate 2 can be performed. When performing a bright field inspection using the area camera 60, the illumination field 62 to the field range of the area camera 60 is used. Irradiate illumination light with uniform brightness. When performing a dark field inspection, it is only necessary to irradiate the illumination light from the illuminator 62 and capture a dark area at the center of the ring illumination light as a field of view of the area camera 60 and take an image.

As shown in FIG. 9, by using the half mirror member 61, the translucent plate-like body 2 can be imaged by the area camera 60 whose optical axis is directed vertically downward with respect to the translucent plate-like body 2. If the area camera 60 shown in FIG. 9 is used, since the entire photographing area is focused at the focal position of the area camera 60, high-definition imaging with high resolution can be performed.
As in the structure of the previous embodiment, the direction of the area cameras 21 and 23 may be either diagonally downward or vertically downward as in the example of FIG. 9. In the present invention, the direction of the illumination light There are no restrictions on the orientation of the camera.

Although the present invention has been described in detail and with reference to specific embodiments, it will be apparent to those skilled in the art that various modifications and variations can be made without departing from the scope and spirit of the invention.
This application is based on Japanese Patent Application 2011-105362 filed on May 10, 2011, the contents of which are incorporated herein by reference.

The technology of the present invention can be widely applied to methods and apparatuses for inspecting glass for display devices, optical glass, medical glass, architectural glass, vehicle glass, and other general glass products.

DESCRIPTION OF SYMBOLS 1 ... Inspection apparatus, 3 ... Conveyance path, 6 ... Preliminary inspection machine, 7 ... Detailed inspection machine, 8 ... Management apparatus, 10 ... Dark field appearance inspection device, 11 ... Bright field appearance inspection device, 12 ... First inspection device DESCRIPTION OF SYMBOLS 13 ... 2nd test | inspection device 14 ... Control apparatus 15 ... Illuminator 16 ... Preliminary imaging part (line sensor camera), 17, 18 ... Data wiring, 20 ... Illuminator, 21 ... 1st main imaging part (First area camera), 21A, 21B ... rectangular region, 22 ... illuminator, 23 ... second main imaging unit (second area camera), 24 ... first frame member, 25 ... second Frame member, 27, 27A, 27B ... first transport unit, 28, 28A ... second transport unit, 30 ... first main imaging unit, 31 ... second main imaging unit, 33, 33A ... linear motion unit , 42 ... 1st inspection device, 50, 51 ... Main imaging unit, 60 ... 1st main imaging (Area camera), K, K1 ~ K5 ... small drawback.

Claims (14)

1. In a method for inspecting a micro defect existing in the translucent plate while conveying the translucent plate along the conveyance path,
   By irradiating light to the translucent plate-like body and imaging the main surface of the translucent plate-like body with a preliminary imaging unit, the surface existing in the surface direction of the main surface of the translucent plate-like body A pre-inspection step for locating the micro defects,
   The main imaging unit is moved in the direction intersecting the transport direction of the translucent plate along the surface direction of the translucent plate in accordance with the position of the minute defect obtained in the preliminary inspection step. And a scrutiny inspection step for imaging the minute defect while moving in the transport direction in a state aligned with the minute defect;
   A method for inspecting a minute defect of a translucent plate-like body having a surface.
2. In the scrutiny inspection step, the main imaging unit is moved and positioned in a direction intersecting the transport direction of the translucent plate-like body, and the main imaging unit is synchronized with the movement of a minute defect entering the field of view of the main imaging unit. The method for inspecting a micro defect of a light transmitting plate-like body according to claim 1, wherein the micro image is picked up while moving a main imaging unit at a constant speed with the light transmitting plate body along the transport path.
3. In the scrutiny inspection step, a plurality of main imaging units are arranged along the conveyance path, the main imaging unit is individually moved in correspondence with the position of the micro defect specified in the preliminary inspection step, and the micro defect is The method for inspecting a micro defect of a light-transmitting plate-like body according to claim 1 or 2, wherein each of said images is individually imaged.
4. In the scrutiny inspection step, among the main imaging units provided along the conveyance path, the main imaging unit installed on the upstream side of the conveyance path moves in response to the approach of a specific minute defect. In this case, when the main imaging unit on the upstream side of the transport path moves and the next micro defect approaches earlier than the time required to capture the micro defect, the transport path The inspection method of the micro defect of the translucent plate-shaped body of Claim 3 which images the micro defect by moving the other main imaging part installed downstream of the micro defect that is approaching .
5. The method for inspecting a micro defect of a light-transmitting plate according to any one of claims 1 to 4, wherein both a dark field inspection and a bright field inspection are performed in each of the preliminary inspection step and the close inspection step. .
6. In the preliminary inspection step, a position of a minute defect existing in the surface direction of the main surface of the translucent plate-like body is specified using a line sensor camera as the preliminary imaging unit, and in the detailed inspection step, the main imaging is performed. The method for inspecting a minute defect of a light-transmitting plate according to any one of claims 1 to 5, wherein the minute defect is imaged using an area camera as a part.
7. In the inspection step, the area camera is directed in a direction orthogonal to the transport direction of the translucent plate, and the main surface of the translucent plate moves along the transport path in the area camera. The method for inspecting a minute defect of a light transmitting plate-like body according to claim 6, wherein the minute defect is imaged while being inclined with respect to a region to be processed.
8. In the inspection device for the micro defects of the translucent plate that inspects the micro defects existing in the translucent plate transported along the transport path,
   An illuminator that irradiates light to the translucent plate-like body, and a preliminary inspection machine that includes a preliminary imaging unit that images the entire main surface of the translucent plate-like body;
   A management device that identifies position information of minute defects existing in the surface direction of the main surface of the translucent plate from the image information of the translucent plate captured by the preliminary imaging unit;
   An illuminator that irradiates light to the translucent plate-shaped body, a main imaging unit that images the main surface of the translucent plate-shaped body, and the positional information of the minute defects identified by the preliminary inspection machine A first transport unit that moves the main imaging unit in a direction that intersects the transport direction of the translucent plate-like body along the surface direction of the translucent plate-like body, and transport of the translucent plate-like body A scrutinizing machine comprising a second transport unit for moving the main imaging unit in the direction;
   Inspection device for minute defects of translucent plate-like body.
9. 9. The transparent device according to claim 8, wherein the second transport unit has an ability to move the main imaging unit at the same speed as the translucent plate in the same direction as the transport direction of the translucent plate. Inspection device for minute defects of optical plate.
10. The main imaging unit provided with the said main imaging part, said 1st conveyance part, and said 2nd conveyance part was multiply installed along the conveyance direction of the said translucent plate-shaped object. Inspection device for minute defects of translucent plate-like body.
11. Among the plurality of main imaging units provided along the conveyance path, the main imaging unit installed on the upstream side of the conveyance path moves corresponding to the approach of a specific micro defect, thereby removing the micro defect. When the main imaging unit on the upstream side of the conveyance path moves and the next minute defect approaches earlier than the time required to image the minute defect, it is installed on the downstream side of the conveyance path. 11. The inspection apparatus for a micro defect of a translucent plate-like body according to claim 10, wherein the management device is provided with a function of moving the other main imaging unit with respect to the micro defect that is approaching and imaging the micro defect. .
12. The microscopicity of the translucent plate-shaped body according to any one of claims 8 to 11, wherein the preliminary inspection machine includes a preliminary imaging unit as a bright field inspection device and a preliminary imaging unit as a dark field inspection device. Defect inspection device.
13. The inspection apparatus for minute defects of a light-transmitting plate-like body according to any one of claims 8 to 12, wherein the preliminary imaging unit is a line sensor camera and the main imaging unit is an area camera.
14. The area camera is directed in a direction crossing the transport direction of the translucent plate-like body, and is inclined with respect to a region in which the main surface of the translucent plate-like body is moved along the transport path. The inspection device for minute defects of a light-transmitting plate-like body according to any one of claims 8 to 13.

Images