WO2010067754A1 - Electrolytic electrode - Google Patents
Electrolytic electrode Download PDFInfo
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- WO2010067754A1 WO2010067754A1 PCT/JP2009/070340 JP2009070340W WO2010067754A1 WO 2010067754 A1 WO2010067754 A1 WO 2010067754A1 JP 2009070340 W JP2009070340 W JP 2009070340W WO 2010067754 A1 WO2010067754 A1 WO 2010067754A1
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/10—Electrodes, e.g. composition, counter electrode
- C25D17/12—Shape or form
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/06—Wires; Strips; Foils
- C25D7/0614—Strips or foils
- C25D7/0635—In radial cells
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/06—Wires; Strips; Foils
- C25D7/0614—Strips or foils
- C25D7/0642—Anodes
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D1/00—Electroforming
- C25D1/04—Wires; Strips; Foils
Definitions
- the present invention relates to an electrode for electrolysis, and more particularly to an electrode for electrolysis used for producing a metal foil such as an electrolytic copper foil by an electroplating method.
- Patent Document 1 discloses a configuration in which an anode plate is attached to a shell with a bolt and bent to form an arc, and the arc-shaped anode plate is disposed around a rotatable cylindrical cathode.
- a metal foil can be deposited on the surface of the cathode by arranging the electrodes at an interval and interposing an electrolytic solution.
- a contact ring is interposed between the anode plate and the shell, and the distance between the anode plate and the cathode can be adjusted by changing the thickness of the contact ring.
- Patent Document 2 As shown in FIG. 4, intermediate materials 52 and 53 are provided on the inner surface side (side facing a cathode not shown) of the first electrode base 51 formed in an arc shape.
- An arcuate second electrode base 54 is disposed, and the second electrode base 54 is fixed with bolts 55 from the inner surface side of the first electrode base 51.
- a large number of second electrode bases 54 are arranged on the inner peripheral surface of the first electrode base 51, and all the second electrode bases 54 pass through the first electrode bases 51 from the bus bars 56. Can be energized integrally.
- the configuration of Patent Document 2 when the thickness adjustment of the intermediate members 52 and 53 is performed, the replacement work of the intermediate members 52 and 53 can be performed only on the inner surface side of the first electrode base 51, and workability is improved. Improvements are being made.
- an object of the present invention is to provide an electrode for electrolysis that facilitates uniformization of the electrolysis current density.
- the object of the present invention is an electrode for electrolysis used as an anode arranged at a distance from a rotatable cathode, wherein the substrate has an arcuate cross section and a plurality of electrodes arranged on the inner surface side of the substrate.
- an electrode for electrolysis comprising an electrode plate and configured to be able to supply power to each electrode plate individually.
- an insulating elastic body is interposed between the substrate and the electrode plate.
- the electrode plate has an outwardly protruding boss inserted through the through-hole of the base, sandwiching the base via an insulating elastic body between the power supply and the outer surface of the power supply By screwing a bolt into the head of the boss from the side, it can be configured to be fixed to the base.
- an electrode for electrolysis that facilitates uniformization of the electrolysis current density.
- FIG. 1 is a cross-sectional view of an electrode for electrolysis according to an embodiment of the present invention, and shows a case where it is used as an anode of an electrolytic cell.
- the electrode 1 for electrolysis is formed in the circular arc shape of the cross section, and in this embodiment, the two electrodes 1 for electrolysis 1 and 1 are arrange
- a drum-like cathode 4 that can be driven to rotate is disposed at an interval so that the gap is substantially constant along the circumferential direction.
- An electrolytic solution L can be supplied to the electrolytic cell 2 via a liquid supply part 2a provided between two adjacent electrodes for electrolysis 1 and 1, and the supplied electrolytic solution L is indicated by an arrow.
- FIG. 2 is a cross-sectional view showing an enlarged main part of the electrode 1 for electrolysis
- FIG. 3 is a cross-sectional view showing this further enlarged.
- the electrode 1 for electrolysis has a plurality of electrode plates 12 each having an arcuate section on the inner surface side (side facing the cathode 4 in FIG. 1) of the substrate 10 having an arcuate section. Configured.
- a boss 12 a protruding outward is inserted into the through hole 10 a of the base 10, the base 10 is sandwiched between the electrode plate 12 and the power supply plate 16, and the outer surface side of the power supply plate 16 (
- the electrode plate 12 is fixed to the base body 10 by screwing bolts 18 into the heads of the bosses 12a from the side opposite to the cathode 4 in FIG.
- the substrate 10 can be composed of, for example, a titanium plate, and the electrode plate 12 can be an insoluble electrode in which, for example, the inner surface side of the titanium plate is coated with iridium oxide or the like.
- the electrode plates 12 are arranged and arranged so as to cover the entire inner surface of the substrate 10, and a gap S for insulation is secured between them.
- a current can be supplied to each electrode plate 12 in the direction of the arrow through a wiring 16a made of a single-core electric wire connected to the power supply plate 16, and each electrode plate 12 is configured to be able to supply power individually.
- the electrode 1 for electrolysis having the above-described structure, when there is a possibility that the distance between the electrodes 12 and the cathode 4 varies and the current density becomes uneven, the distance between the electrodes is reduced as in the conventional case. Rather than adjusting, the current value supplied to each electrode plate 12 can be adjusted individually. Specifically, the current density distribution of the cathode can be made uniform by increasing the power supply current value when the measured distance between the electrodes is small, and decreasing the power supply current value when the distance between the electrodes is large. The thickness of the deposited metal can be easily uniformed only by adjusting the current value.
- the feeding current value for each electrode plate 12 can be obtained by previously tabulating or formulating the feeding current value corresponding to the distance between the electrodes. Can be more easily determined.
- the electrode plate 12 is fixed to the base body 10 with the insulating elastic body 20 interposed between the base body 10 and the electrode plate 12, leakage of the electrolytic solution L stored in the electrolytic cell 2 As well as electrical insulation between the substrate 10 and the electrode plate 12 can be ensured.
- the elastic body 22 is also interposed between the base 10 and the power supply plate 16, stable power supply to the electrode plate 12 through the power supply plate 16 is possible, and current density is adjusted by adjusting the power supply current value. Can be reliably controlled.
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- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
- Electrolytic Production Of Metals (AREA)
- Battery Electrode And Active Subsutance (AREA)
Abstract
Provided is an electrolytic electrode used as an anode arranged at a distance from a rotatable cathode. The electrolytic electrode includes a base (10) having an arc-shaped cross section and a plurality of electrode plates (12) arranged on the inner surface of the base (10). The electrolytic electrode is configured so that power can be supplied separately to each of the electrode plates (12). With this configuration, the electrolytic electrode can easily obtain a uniform electrolytic current density.
Description
本発明は、電解用電極に関し、より詳しくは、電気めっき法により電解銅箔等の金属箔を製造するのに用いられる電解用電極に関する。
The present invention relates to an electrode for electrolysis, and more particularly to an electrode for electrolysis used for producing a metal foil such as an electrolytic copper foil by an electroplating method.
電気めっきによる金属箔の製造においては、近年、電解装置が大電流化及び大型化する傾向にあり、不溶性陽極として用いられる電解用電極としては、省スペース化が可能な曲面状のものが従来から知られている。例えば、特許文献1には、陽極板をボルトにより殻体に取り付けて撓ませることにより円弧状に形成した構成が開示されており、この円弧状の陽極板を回転自在な円筒型陰極の周囲に間隔を空けて配置し、電解液を介在させることで、陰極表面に金属箔を析出させることができる。また、陽極板と殻体との間には接触リングが介在されており、この接触リングの厚みを変えることで、陽極板と陰極との間隔を調整することができる。これにより、陽極板と陰極との間隔を全体にわたって一定に保持することができ、電流密度を均一にして、析出する金属薄膜の厚みの均一化が図られている。
In the production of metal foil by electroplating, in recent years, electrolysis devices have a tendency to increase in current and size, and as an electrode for electrolysis used as an insoluble anode, a curved surface that can save space is conventionally used. Are known. For example, Patent Document 1 discloses a configuration in which an anode plate is attached to a shell with a bolt and bent to form an arc, and the arc-shaped anode plate is disposed around a rotatable cylindrical cathode. A metal foil can be deposited on the surface of the cathode by arranging the electrodes at an interval and interposing an electrolytic solution. In addition, a contact ring is interposed between the anode plate and the shell, and the distance between the anode plate and the cathode can be adjusted by changing the thickness of the contact ring. Thereby, the space | interval of an anode plate and a cathode can be kept constant over the whole, the current density is made uniform, and the thickness of the metal thin film to precipitate is equalized.
しかし、特許文献1の構成においては、殻体への陽極板の取り付けは、殻体に対して陽極板と反対側からボルトを挿通することにより行われていたため、接触リングの厚みを変更するためには、殻体の外側でボルトの着脱作業を行うと共に、殻体の内側で陽極板の着脱作業が必要になることから、作業が繁雑になるという問題があった。
However, in the configuration of Patent Document 1, since the anode plate is attached to the shell body by inserting a bolt from the opposite side of the anode plate to the shell body, the thickness of the contact ring is changed. However, there is a problem that the bolts are attached and detached outside the shell and the anode plate is attached and detached inside the shell, which makes the work complicated.
このため、特許文献2には、図4に示すように、円弧状に形成された第1の電極基体51の内面側(不図示の陰極と対向する側)に、中間材52,53を介して円弧状の第2の電極基体54を配置し、第1の電極基体51の内面側からボルト55で第2の電極基体54を固定した構成が開示されている。図5に示すように、第2の電極基体54は、第1の電極基体51の内周面に多数配置され、ブスバー56から第1の電極基体51を介して全ての第2の電極基体54に一体的に通電することができる。特許文献2の構成によれば、中間材52,53の厚み調整を行う場合に、第1の電極基体51の内面側のみで中間材52,53の取り替え作業を行うことができ、作業性の向上が図られている。
For this reason, in Patent Document 2, as shown in FIG. 4, intermediate materials 52 and 53 are provided on the inner surface side (side facing a cathode not shown) of the first electrode base 51 formed in an arc shape. An arcuate second electrode base 54 is disposed, and the second electrode base 54 is fixed with bolts 55 from the inner surface side of the first electrode base 51. As shown in FIG. 5, a large number of second electrode bases 54 are arranged on the inner peripheral surface of the first electrode base 51, and all the second electrode bases 54 pass through the first electrode bases 51 from the bus bars 56. Can be energized integrally. According to the configuration of Patent Document 2, when the thickness adjustment of the intermediate members 52 and 53 is performed, the replacement work of the intermediate members 52 and 53 can be performed only on the inner surface side of the first electrode base 51, and workability is improved. Improvements are being made.
ところが、それぞれの第1の電極基体51について陰極との間隔調整を個別に行うことは、やはり作業面での問題が残り、この点において更に改良の余地があった。
However, individually adjusting the distance between the first electrode base 51 and the cathode remains a problem in terms of work, and there is room for further improvement in this respect.
そこで、本発明は、電解電流密度の均一化が容易な電解用電極の提供を目的とする。
Therefore, an object of the present invention is to provide an electrode for electrolysis that facilitates uniformization of the electrolysis current density.
本発明の前記目的は、回転可能な陰極に対して間隔をあけて配置される陽極として用いられる電解用電極であって、断面円弧状の基体と、該基体の内面側に配置された複数の電極板とを備え、前記各電極板に対して個別に給電可能に構成されている電解用電極により達成される。
The object of the present invention is an electrode for electrolysis used as an anode arranged at a distance from a rotatable cathode, wherein the substrate has an arcuate cross section and a plurality of electrodes arranged on the inner surface side of the substrate. This is achieved by an electrode for electrolysis comprising an electrode plate and configured to be able to supply power to each electrode plate individually.
この電解用電極において、前記基体と前記電極板との間には、絶縁性の弾性体が介在されていることが好ましい。
In this electrode for electrolysis, it is preferable that an insulating elastic body is interposed between the substrate and the electrode plate.
また、前記電極板は、外方に突出するボスが前記基体の貫通孔に挿通されており、給電板との間に絶縁性の弾性体を介して前記基体を挟持し、前記給電板の外面側からボルトを前記ボスの頭部に螺合することで、前記基体に固定されるように構成することができる。
The electrode plate has an outwardly protruding boss inserted through the through-hole of the base, sandwiching the base via an insulating elastic body between the power supply and the outer surface of the power supply By screwing a bolt into the head of the boss from the side, it can be configured to be fixed to the base.
本発明によれば、電解電流密度の均一化が容易な電解用電極を提供することができる。
According to the present invention, it is possible to provide an electrode for electrolysis that facilitates uniformization of the electrolysis current density.
以下、本発明の実施の形態について、添付図面を参照して説明する。図1は、本発明の一実施形態に係る電解用電極の断面図であり、電解槽の陽極として用いた場合を示している。
Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a cross-sectional view of an electrode for electrolysis according to an embodiment of the present invention, and shows a case where it is used as an anode of an electrolytic cell.
図1に示すように、電解用電極1は断面円弧状に形成されており、本実施形態においては、2つの電解用電極1,1が半円状に配置されて、電解槽2の槽壁を兼ねている。電解用電極1,1の内面側には、回転駆動可能なドラム状の陰極4が、周方向に沿って隙間が略一定となるように、間隔をあけて配置されている。電解槽2には、隣接する2つの電解用電極1,1間に設けられた給液部2aを介して電解液Lを供給することができ、供給された電解液Lは、矢示のように電解用電極1,1と陰極4との間を通過し、電解槽2の左右両側に設けられた排出溝2b,2bから外部に排出される。
As shown in FIG. 1, the electrode 1 for electrolysis is formed in the circular arc shape of the cross section, and in this embodiment, the two electrodes 1 for electrolysis 1 and 1 are arrange | positioned in semicircle shape, and the tank wall of the electrolysis tank 2 Doubles as On the inner surface side of the electrolysis electrodes 1, 1, a drum-like cathode 4 that can be driven to rotate is disposed at an interval so that the gap is substantially constant along the circumferential direction. An electrolytic solution L can be supplied to the electrolytic cell 2 via a liquid supply part 2a provided between two adjacent electrodes for electrolysis 1 and 1, and the supplied electrolytic solution L is indicated by an arrow. Are passed between the electrolysis electrodes 1, 1 and the cathode 4, and are discharged to the outside from the discharge grooves 2 b, 2 b provided on the left and right sides of the electrolytic cell 2.
図2は、電解用電極1の要部を拡大して示す断面図であり、図3は、これを更に拡大して示す断面図である。図2及び図3に示すように、電解用電極1は、断面円弧状の基体10の内面側(図1の陰極4に面する側)に、同じく断面円弧状の電極板12が複数配置されて構成されている。電極板12は、外方に突出するボス12aが基体10の貫通孔10aに挿通されており、電極板12と給電板16との間に基体10を挟持して、給電板16の外面側(図1の陰極4とは反対側)からボルト18をボス12aの頭部に螺合することで、電極板12が基体10に固定されている。基体10は、例えばチタン板から構成することができ、電極板12は、例えばチタン板の内面側を酸化イリジウムなどでコーティングした不溶性電極とすることができる。
FIG. 2 is a cross-sectional view showing an enlarged main part of the electrode 1 for electrolysis, and FIG. 3 is a cross-sectional view showing this further enlarged. As shown in FIGS. 2 and 3, the electrode 1 for electrolysis has a plurality of electrode plates 12 each having an arcuate section on the inner surface side (side facing the cathode 4 in FIG. 1) of the substrate 10 having an arcuate section. Configured. In the electrode plate 12, a boss 12 a protruding outward is inserted into the through hole 10 a of the base 10, the base 10 is sandwiched between the electrode plate 12 and the power supply plate 16, and the outer surface side of the power supply plate 16 ( The electrode plate 12 is fixed to the base body 10 by screwing bolts 18 into the heads of the bosses 12a from the side opposite to the cathode 4 in FIG. The substrate 10 can be composed of, for example, a titanium plate, and the electrode plate 12 can be an insoluble electrode in which, for example, the inner surface side of the titanium plate is coated with iridium oxide or the like.
電極板12と基体10との間、及び、基体10と給電板16との間には、リング状に形成されたゴム材などの絶縁性を有する弾性体20,22が介在されている。
Between the electrode plate 12 and the base 10 and between the base 10 and the power supply plate 16, there are interposed elastic bodies 20 and 22 having an insulating property such as a rubber material formed in a ring shape.
各電極板12は、基体10の内面全体を覆うように整列配置されており、それぞれの間には絶縁用の隙間Sが確保されている。各電極板12には、給電板16に接続された単芯電線からなる配線16aを介して、矢示方向に電流を供給することができ、個別に給電可能に構成されている。
The electrode plates 12 are arranged and arranged so as to cover the entire inner surface of the substrate 10, and a gap S for insulation is secured between them. A current can be supplied to each electrode plate 12 in the direction of the arrow through a wiring 16a made of a single-core electric wire connected to the power supply plate 16, and each electrode plate 12 is configured to be able to supply power individually.
上記の構成を有する電解用電極1によれば、各電極板12と陰極4との電極間距離にばらつきが生じて電流密度が不均一になるおそれがある場合、従来のように電極間距離を調整するのではなく、各電極板12に給電する電流値を個別に調整することができる。具体的には、測定した電極間距離が小さいときには給電電流値を大きくする一方、電極間距離が大きいときには給電電流値を小さくすることにより、陰極の電流密度分布を均一化することができ、給電電流値の調整のみで、析出金属の厚みを容易に均一化することができる。電極間距離と給電電流値とは、上記のように反比例の関係にあるため、電極間距離に対応する給電電流値を予めテーブル化または数式化しておくことで、電極板12毎の給電電流値をより容易に決定することができる。
According to the electrode 1 for electrolysis having the above-described structure, when there is a possibility that the distance between the electrodes 12 and the cathode 4 varies and the current density becomes uneven, the distance between the electrodes is reduced as in the conventional case. Rather than adjusting, the current value supplied to each electrode plate 12 can be adjusted individually. Specifically, the current density distribution of the cathode can be made uniform by increasing the power supply current value when the measured distance between the electrodes is small, and decreasing the power supply current value when the distance between the electrodes is large. The thickness of the deposited metal can be easily uniformed only by adjusting the current value. Since the distance between the electrodes and the feeding current value are in an inversely proportional relationship as described above, the feeding current value for each electrode plate 12 can be obtained by previously tabulating or formulating the feeding current value corresponding to the distance between the electrodes. Can be more easily determined.
また、基体10と電極板12との間に絶縁性の弾性体20が介在された状態で、電極板12が基体10に固定されているため、電解槽2に貯留された電解液Lの漏出を確実に防止できると共に、基体10と電極板12との間における電気的な絶縁を確保することができる。
Further, since the electrode plate 12 is fixed to the base body 10 with the insulating elastic body 20 interposed between the base body 10 and the electrode plate 12, leakage of the electrolytic solution L stored in the electrolytic cell 2 As well as electrical insulation between the substrate 10 and the electrode plate 12 can be ensured.
更に、基体10と給電板16との間にも弾性体22が介在されることにより、給電板16を介した電極板12への安定した給電が可能になり、給電電流値の調整により電流密度を確実に制御することができる。
Further, since the elastic body 22 is also interposed between the base 10 and the power supply plate 16, stable power supply to the electrode plate 12 through the power supply plate 16 is possible, and current density is adjusted by adjusting the power supply current value. Can be reliably controlled.
1 電解用電極
10 基体
10a 貫通孔
12 電極板
12a ボス
16 給電板
18 ボルト
20,22 弾性体 DESCRIPTION OF SYMBOLS 1 Electrode forelectrolysis 10 Base | substrate 10a Through-hole 12 Electrode plate 12a Boss 16 Feeding plate 18 Bolt 20, 22 Elastic body
10 基体
10a 貫通孔
12 電極板
12a ボス
16 給電板
18 ボルト
20,22 弾性体 DESCRIPTION OF SYMBOLS 1 Electrode for
Claims (3)
- 回転可能な陰極に対して間隔をあけて配置される陽極として用いられる電解用電極であって、
断面円弧状の基体と、該基体の内面側に配置された複数の電極板とを備え、前記各電極板に対して個別に給電可能に構成されている電解用電極。 An electrode for electrolysis used as an anode arranged at a distance from a rotatable cathode,
An electrode for electrolysis comprising a base having an arcuate cross section and a plurality of electrode plates disposed on the inner surface side of the base, and configured to be able to supply power to each of the electrode plates. - 前記基体と前記電極板との間には、絶縁性の弾性体が介在されている請求項1に記載の電解用電極。 The electrode for electrolysis according to claim 1, wherein an insulating elastic body is interposed between the substrate and the electrode plate.
- 前記電極板は、外方に突出するボスが前記基体の貫通孔に挿通されており、給電板との間に絶縁性の弾性体を介して前記基体を挟持し、前記給電板の外面側からボルトを前記ボスの頭部に螺合することで、前記基体に固定される請求項2に記載の電解用電極。 The electrode plate has an outwardly protruding boss inserted through the through hole of the base body, sandwiches the base body with an insulating elastic body between the electrode plate and the outer surface side of the power supply plate. The electrode for electrolysis of Claim 2 fixed to the said base | substrate by screwing a volt | bolt to the head of the said boss | hub.
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CN200980149105.0A CN102239281B (en) | 2008-12-08 | 2009-12-03 | Electrolytic electrode |
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JP2008311801A JP5414257B2 (en) | 2008-12-08 | 2008-12-08 | Electrode for electrolysis |
JP2008-311801 | 2008-12-08 |
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PCT/JP2009/070340 WO2010067754A1 (en) | 2008-12-08 | 2009-12-03 | Electrolytic electrode |
Country Status (4)
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JP (1) | JP5414257B2 (en) |
CN (1) | CN102239281B (en) |
TW (1) | TWI445844B (en) |
WO (1) | WO2010067754A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20190038325A (en) | 2017-09-29 | 2019-04-08 | 가부시키가이샤 오사카소다 | Electrode for plating and apparatus for manufacturing electrolytic metal foil |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
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CN103097589B (en) | 2011-08-30 | 2016-01-20 | 西工业株式会社 | Device is separated out in tinsel electrolysis |
CN107916441B (en) * | 2017-11-08 | 2019-08-09 | 铜陵市宏达家电有限责任公司 | A kind of tow sides non-bolt anode of Electrolytic copper foil generator |
KR102528177B1 (en) * | 2019-03-21 | 2023-05-02 | 에스케이넥실리스 주식회사 | Apparatus for Electrodeposition of Electrolytic Copper Foil and Apparatus for Manufacturing of Electrolytic Copper Foil |
CN113174616B (en) * | 2021-04-28 | 2022-02-25 | 广东嘉元科技股份有限公司 | Improved generation electrolytic copper foil production facility of current adjustable |
KR102699161B1 (en) * | 2023-12-11 | 2024-08-26 | (주)아이케이텍 | Titanium drum with prefabricated current supply module |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0436493A (en) * | 1990-05-31 | 1992-02-06 | Nikko Guurudo Foil Kk | Device for producing electrolytic copper foil |
JPH04221092A (en) * | 1990-12-19 | 1992-08-11 | Nikko Guurudo Foil Kk | Production of electrolytic copper foil and apparatus therefor |
JPH04346697A (en) * | 1991-03-21 | 1992-12-02 | Eltech Syst Corp | Electrolytic cell and anode |
JPH0610185A (en) * | 1992-06-24 | 1994-01-18 | Nippon Steel Corp | Electroplating device for metallic strip |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5326455A (en) * | 1990-12-19 | 1994-07-05 | Nikko Gould Foil Co., Ltd. | Method of producing electrolytic copper foil and apparatus for producing same |
JP4439081B2 (en) * | 2000-05-31 | 2010-03-24 | 日本電解株式会社 | Electrolytic copper foil manufacturing method and apparatus used therefor |
-
2008
- 2008-12-08 JP JP2008311801A patent/JP5414257B2/en not_active Expired - Fee Related
-
2009
- 2009-12-03 CN CN200980149105.0A patent/CN102239281B/en not_active Expired - Fee Related
- 2009-12-03 WO PCT/JP2009/070340 patent/WO2010067754A1/en active Application Filing
- 2009-12-04 TW TW98141514A patent/TWI445844B/en not_active IP Right Cessation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0436493A (en) * | 1990-05-31 | 1992-02-06 | Nikko Guurudo Foil Kk | Device for producing electrolytic copper foil |
JPH04221092A (en) * | 1990-12-19 | 1992-08-11 | Nikko Guurudo Foil Kk | Production of electrolytic copper foil and apparatus therefor |
JPH04346697A (en) * | 1991-03-21 | 1992-12-02 | Eltech Syst Corp | Electrolytic cell and anode |
JPH0610185A (en) * | 1992-06-24 | 1994-01-18 | Nippon Steel Corp | Electroplating device for metallic strip |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20190038325A (en) | 2017-09-29 | 2019-04-08 | 가부시키가이샤 오사카소다 | Electrode for plating and apparatus for manufacturing electrolytic metal foil |
Also Published As
Publication number | Publication date |
---|---|
CN102239281B (en) | 2014-08-20 |
TWI445844B (en) | 2014-07-21 |
TW201035381A (en) | 2010-10-01 |
JP2010132993A (en) | 2010-06-17 |
JP5414257B2 (en) | 2014-02-12 |
CN102239281A (en) | 2011-11-09 |
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