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WO2008149776A1 - 隔壁と画素が形成された基板を製造する方法 - Google Patents

隔壁と画素が形成された基板を製造する方法 Download PDF

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Publication number
WO2008149776A1
WO2008149776A1 PCT/JP2008/059931 JP2008059931W WO2008149776A1 WO 2008149776 A1 WO2008149776 A1 WO 2008149776A1 JP 2008059931 W JP2008059931 W JP 2008059931W WO 2008149776 A1 WO2008149776 A1 WO 2008149776A1
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WO
WIPO (PCT)
Prior art keywords
partition wall
substrate
pixel
dot
ink
Prior art date
Application number
PCT/JP2008/059931
Other languages
English (en)
French (fr)
Inventor
Kenji Ishizeki
Hideyuki Takahashi
Original Assignee
Asahi Glass Company, Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Company, Limited filed Critical Asahi Glass Company, Limited
Priority to EP08776993A priority Critical patent/EP2149803A1/en
Priority to CN200880018059A priority patent/CN101680983A/zh
Priority to JP2009517823A priority patent/JPWO2008149776A1/ja
Publication of WO2008149776A1 publication Critical patent/WO2008149776A1/ja
Priority to US12/627,727 priority patent/US20100075237A1/en

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/122—Pixel-defining structures or layers, e.g. banks
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0046—Photosensitive materials with perfluoro compounds, e.g. for dry lithography
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0382—Macromolecular compounds which are rendered insoluble or differentially wettable the macromolecular compound being present in a chemically amplified negative photoresist composition
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0388—Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/17—Passive-matrix OLED displays
    • H10K59/173—Passive-matrix OLED displays comprising banks or shadow masks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
    • H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/201—Filters in the form of arrays

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optics & Photonics (AREA)
  • Electroluminescent Light Sources (AREA)
  • Optical Filters (AREA)
  • Materials For Photolithography (AREA)

Abstract

　撥液性に優れた隔壁と、膜厚均一性に優れたインク層を有する画素とを得ることが可能な、隔壁と画素が形成された基板の製造方法を提供する。 　１分子内にフッ素原子含有基またはケイ素原子含有基を有する側鎖と、エチレン性二重結合を有する側鎖と、を有する重合体（Ａ）を含む感光性組成物を基板に塗布する工程［１１］、感光性組成物の塗膜を乾燥する工程［１２］、露光工程［１３］、現像工程［１４］、ポスト露光工程［１５］を経て、基板上に隔壁を形成し、隔壁で区分された領域であるドット内にインクを注入する工程［２１］、インクの塗膜を乾燥する工程［２２］を経て、ひとつのドット内のインク層の膜厚の最大値をｈ１、最小値をｈ２とするとき（ｈ１－ｈ２）／ｈ１＜０．３である膜を形成して画素を得ることを特徴とする隔壁と画素が形成された基板の製造方法。
PCT/JP2008/059931 2007-05-30 2008-05-29 隔壁と画素が形成された基板を製造する方法 WO2008149776A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP08776993A EP2149803A1 (en) 2007-05-30 2008-05-29 Method for producing substrate with partition wall and pixel formed thereon
CN200880018059A CN101680983A (zh) 2007-05-30 2008-05-29 形成有间隔壁和像素的基板的制造方法
JP2009517823A JPWO2008149776A1 (ja) 2007-05-30 2008-05-29 隔壁と画素が形成された基板を製造する方法
US12/627,727 US20100075237A1 (en) 2007-05-30 2009-11-30 Process for producing substrate having partition walls and pixels formed thereon

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007143638 2007-05-30
JP2007-143638 2007-05-30

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/627,727 Continuation US20100075237A1 (en) 2007-05-30 2009-11-30 Process for producing substrate having partition walls and pixels formed thereon

Publications (1)

Publication Number Publication Date
WO2008149776A1 true WO2008149776A1 (ja) 2008-12-11

Family

ID=40093592

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/059931 WO2008149776A1 (ja) 2007-05-30 2008-05-29 隔壁と画素が形成された基板を製造する方法

Country Status (7)

Country Link
US (1) US20100075237A1 (ja)
EP (1) EP2149803A1 (ja)
JP (1) JPWO2008149776A1 (ja)
KR (1) KR20100015328A (ja)
CN (1) CN101680983A (ja)
TW (1) TW200907570A (ja)
WO (1) WO2008149776A1 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009037234A (ja) * 2007-07-10 2009-02-19 Nippon Steel Chem Co Ltd カラーフィルター隔壁形成用感光性樹脂組成物及びこれを用いて形成した遮光性カラーフィルター隔壁並びにカラーフィルター
JP2010102328A (ja) * 2008-09-22 2010-05-06 Rohm & Haas Electronic Materials Korea Ltd アルカリ現像可能な感光性物質
WO2013065693A1 (ja) * 2011-11-01 2013-05-10 日立化成株式会社 感光性樹脂組成物、これを用いた感光性エレメント、硬化物、画像表示装置の隔壁の形成方法、画像表示装置の製造方法及び画像表示装置
JP5761457B2 (ja) * 2012-05-14 2015-08-12 日立化成株式会社 感光性樹脂組成物、感光性エレメント、画像表示装置の隔壁の形成方法、画像表示装置の製造方法及び画像表示装置
WO2016063943A1 (ja) * 2014-10-24 2016-04-28 旭硝子株式会社 隔壁用硬化性組成物、隔壁、隔壁の製造方法、隔壁の修復方法、修復された隔壁、および光学素子

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102199263B (zh) * 2011-04-12 2013-04-10 中科院广州化学有限公司 一种双疏性含氟可交联嵌段共聚物及其制备方法与应用
TWI574109B (zh) 2012-03-30 2017-03-11 富士軟片股份有限公司 黑色樹脂膜、靜電電容型輸入裝置及它們的製造方法、以及具備其的影像顯示裝置
CN104823108B (zh) * 2012-11-28 2020-02-21 Ａｇｃ株式会社 负型感光性树脂组合物、树脂固化膜、分隔壁和光学元件
CN110649185B (zh) * 2019-09-26 2022-08-09 合肥京东方卓印科技有限公司 显示基板及其喷墨打印方法、显示装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004177948A (ja) * 2002-11-11 2004-06-24 Toyo Ink Mfg Co Ltd 隔壁用組成物、それを用いた画素形成用基板および画素の形成方法
WO2004079454A1 (ja) 2003-03-07 2004-09-16 Asahi Glass Company Limited 感光性樹脂組成物及びその塗膜硬化物
JP2004361907A (ja) * 2003-04-07 2004-12-24 Dainippon Printing Co Ltd 機能性素子の製造方法
JP2005060515A (ja) 2003-08-12 2005-03-10 Toyo Ink Mfg Co Ltd 隔壁用組成物、それを用いた画素形成用基板および画素の形成方法
WO2007058355A1 (ja) * 2005-11-21 2007-05-24 Fujifilm Corporation 感光性転写材料、隔壁及びその形成方法、光学素子及びその製造方法、並びに表示装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101317132A (zh) * 2005-11-28 2008-12-03 旭硝子株式会社 间隔壁、滤色片、有机el的制造方法
EP1961775A4 (en) * 2005-12-15 2010-09-01 Asahi Glass Co Ltd FLUORINATED POLYMER, NEGATIVE PHOTOSENSITIVE COMPOSITION AND SEPARATION PARTITION

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004177948A (ja) * 2002-11-11 2004-06-24 Toyo Ink Mfg Co Ltd 隔壁用組成物、それを用いた画素形成用基板および画素の形成方法
WO2004079454A1 (ja) 2003-03-07 2004-09-16 Asahi Glass Company Limited 感光性樹脂組成物及びその塗膜硬化物
JP2004361907A (ja) * 2003-04-07 2004-12-24 Dainippon Printing Co Ltd 機能性素子の製造方法
JP2005060515A (ja) 2003-08-12 2005-03-10 Toyo Ink Mfg Co Ltd 隔壁用組成物、それを用いた画素形成用基板および画素の形成方法
WO2007058355A1 (ja) * 2005-11-21 2007-05-24 Fujifilm Corporation 感光性転写材料、隔壁及びその形成方法、光学素子及びその製造方法、並びに表示装置

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009037234A (ja) * 2007-07-10 2009-02-19 Nippon Steel Chem Co Ltd カラーフィルター隔壁形成用感光性樹脂組成物及びこれを用いて形成した遮光性カラーフィルター隔壁並びにカラーフィルター
JP2010102328A (ja) * 2008-09-22 2010-05-06 Rohm & Haas Electronic Materials Korea Ltd アルカリ現像可能な感光性物質
WO2013065693A1 (ja) * 2011-11-01 2013-05-10 日立化成株式会社 感光性樹脂組成物、これを用いた感光性エレメント、硬化物、画像表示装置の隔壁の形成方法、画像表示装置の製造方法及び画像表示装置
JPWO2013065693A1 (ja) * 2011-11-01 2015-04-02 日立化成株式会社 感光性樹脂組成物、これを用いた感光性エレメント、硬化物、画像表示装置の隔壁の形成方法、画像表示装置の製造方法及び画像表示装置
JP5761457B2 (ja) * 2012-05-14 2015-08-12 日立化成株式会社 感光性樹脂組成物、感光性エレメント、画像表示装置の隔壁の形成方法、画像表示装置の製造方法及び画像表示装置
WO2016063943A1 (ja) * 2014-10-24 2016-04-28 旭硝子株式会社 隔壁用硬化性組成物、隔壁、隔壁の製造方法、隔壁の修復方法、修復された隔壁、および光学素子
JPWO2016063943A1 (ja) * 2014-10-24 2017-08-03 旭硝子株式会社 隔壁用硬化性組成物、隔壁、隔壁の製造方法、隔壁の修復方法、修復された隔壁、および光学素子
CN107113937A (zh) * 2014-10-24 2017-08-29 旭硝子株式会社 分隔壁用固化性组合物、分隔壁、分隔壁的制造方法、分隔壁的修复方法、经修复的分隔壁、以及光学元件
JP2020182948A (ja) * 2014-10-24 2020-11-12 Ａｇｃ株式会社 隔壁の修復方法、修復された隔壁、および光学素子

Also Published As

Publication number Publication date
KR20100015328A (ko) 2010-02-12
CN101680983A (zh) 2010-03-24
EP2149803A1 (en) 2010-02-03
TW200907570A (en) 2009-02-16
JPWO2008149776A1 (ja) 2010-08-26
US20100075237A1 (en) 2010-03-25

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