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WO2008146409A1 - 反射型エンコーダ、そのスケール、及び、スケールの製造方法 - Google Patents

反射型エンコーダ、そのスケール、及び、スケールの製造方法 Download PDF

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Publication number
WO2008146409A1
WO2008146409A1 PCT/JP2007/061222 JP2007061222W WO2008146409A1 WO 2008146409 A1 WO2008146409 A1 WO 2008146409A1 JP 2007061222 W JP2007061222 W JP 2007061222W WO 2008146409 A1 WO2008146409 A1 WO 2008146409A1
Authority
WO
WIPO (PCT)
Prior art keywords
scale
patterns
light
dielectric materials
light source
Prior art date
Application number
PCT/JP2007/061222
Other languages
English (en)
French (fr)
Inventor
Toru Yaku
Atsushi Tominaga
Original Assignee
Mitutoyo Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corporation filed Critical Mitutoyo Corporation
Priority to US12/227,431 priority Critical patent/US8127993B2/en
Priority to EP07744609.4A priority patent/EP2051047B1/en
Priority to JP2008549697A priority patent/JP4828612B2/ja
Priority to CN2007800248626A priority patent/CN101484780B/zh
Priority to PCT/JP2007/061222 priority patent/WO2008146409A1/ja
Publication of WO2008146409A1 publication Critical patent/WO2008146409A1/ja

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34746—Linear encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34776—Absolute encoders with analogue or digital scales
    • G01D5/34792—Absolute encoders with analogue or digital scales with only digital scales or both digital and incremental scales

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)

Abstract

　光源と、該光源から光が照射される複数のパターンが形成されたスケールと、前記複数のパターンによりそれぞれ反射された光を、それぞれ受光する受光素子とを有し、単一のスケールから複数の受光信号を得るようにした反射型エンコーダにおいて、前記スケールの単一トラック上に、誘電体を用いて、厚みの異なる複数のパターンを形成すると共に、前記光源から、誘電体厚みの差に応じて明暗が異なる複数の波長の光を照射して、誘電体厚み毎の受光信号を得ることにより、複数のパターンを同一トラック上に重畳させてスケールを小型化する。
PCT/JP2007/061222 2007-06-01 2007-06-01 反射型エンコーダ、そのスケール、及び、スケールの製造方法 WO2008146409A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
US12/227,431 US8127993B2 (en) 2007-06-01 2007-06-01 Reflection type encoder, scale thereof and method for producing scale
EP07744609.4A EP2051047B1 (en) 2007-06-01 2007-06-01 Reflective encoder, scale thereof, and method for manufacturing scale
JP2008549697A JP4828612B2 (ja) 2007-06-01 2007-06-01 反射型エンコーダ、そのスケール、及び、スケールの製造方法
CN2007800248626A CN101484780B (zh) 2007-06-01 2007-06-01 反射型编码器、其标尺以及标尺的制造方法
PCT/JP2007/061222 WO2008146409A1 (ja) 2007-06-01 2007-06-01 反射型エンコーダ、そのスケール、及び、スケールの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/061222 WO2008146409A1 (ja) 2007-06-01 2007-06-01 反射型エンコーダ、そのスケール、及び、スケールの製造方法

Publications (1)

Publication Number Publication Date
WO2008146409A1 true WO2008146409A1 (ja) 2008-12-04

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PCT/JP2007/061222 WO2008146409A1 (ja) 2007-06-01 2007-06-01 反射型エンコーダ、そのスケール、及び、スケールの製造方法

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Country Link
US (1) US8127993B2 (ja)
EP (1) EP2051047B1 (ja)
JP (1) JP4828612B2 (ja)
CN (1) CN101484780B (ja)
WO (1) WO2008146409A1 (ja)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011137772A (ja) * 2009-12-29 2011-07-14 Rigaku Corp 測角器、測角器の製造方法及びｘ線分析装置
JP2012225681A (ja) * 2011-04-15 2012-11-15 Mori Seiki Co Ltd 光学式変位測定装置
JP2015137855A (ja) * 2014-01-20 2015-07-30 キヤノン株式会社 位置制御装置および方法
JP2016507051A (ja) * 2013-01-15 2016-03-07 レニショウ パブリック リミテッド カンパニーＲｅｎｉｓｈａｗ Ｐｕｂｌｉｃ Ｌｉｍｉｔｅｄ Ｃｏｍｐａｎｙ 測定スケール
JP2017167145A (ja) * 2016-03-16 2017-09-21 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングＤｒ． Ｊｏｈａｎｎｅｓ Ｈｅｉｄｅｎｈａｉｎ Ｇｅｓｅｌｌｓｃｈａｆｔ Ｍｉｔ Ｂｅｓｃｈｒａｎｋｔｅｒ Ｈａｆｔｕｎｇ 光学式の距離センサおよび光学式の距離センサを備える位置測定装置
JP2020169883A (ja) * 2019-04-03 2020-10-15 株式会社ミツトヨ 光電式エンコーダ
JP2020193929A (ja) * 2019-05-30 2020-12-03 株式会社ミツトヨ 光学式エンコーダ

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JP5379761B2 (ja) * 2010-08-06 2013-12-25 キヤノン株式会社 アブソリュートエンコーダ
JP5882619B2 (ja) * 2011-07-26 2016-03-09 キヤノン株式会社 スケール及びその製造方法並びにアブソリュートエンコーダ
CN104094087B (zh) * 2011-12-28 2016-07-20 株式会社尼康 编码器、编码器用标尺制造方法、编码器制造方法及驱动装置
EP2592392B1 (de) * 2012-03-09 2013-09-04 Hexagon Technology Center GmbH Optoelektronische Lagemessvorrichtung
EP2884239B1 (en) * 2013-12-13 2016-09-28 The Swatch Group Research and Development Ltd. Angular and axial position sensor arrangement
JP6366274B2 (ja) * 2014-01-07 2018-08-01 キヤノン株式会社 スケール、測定装置、画像形成装置、スケールの加工装置、および、スケールの加工方法
WO2015147756A1 (en) * 2014-03-27 2015-10-01 Heptagon Micro Optics Pte. Ltd. Optical encoder system
TWI512272B (zh) * 2014-10-17 2015-12-11 China Steel Corp Reflective coding system and its encoding method
DE102015201230A1 (de) * 2015-01-26 2016-07-28 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
JP5925365B1 (ja) * 2015-05-13 2016-05-25 株式会社メルテック 光学式エンコーダ用格子板および光学式エンコーダ用格子板の製造方法
JP6932983B2 (ja) * 2017-05-01 2021-09-08 セイコーエプソン株式会社 エンコーダースケール、エンコーダースケールの製造方法、エンコーダー、ロボットおよびプリンター
CN110686712A (zh) * 2019-11-22 2020-01-14 中国科学院长春光学精密机械与物理研究所 一种反射式图像光电编码器

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011137772A (ja) * 2009-12-29 2011-07-14 Rigaku Corp 測角器、測角器の製造方法及びｘ線分析装置
JP2012225681A (ja) * 2011-04-15 2012-11-15 Mori Seiki Co Ltd 光学式変位測定装置
JP2016507051A (ja) * 2013-01-15 2016-03-07 レニショウ パブリック リミテッド カンパニーＲｅｎｉｓｈａｗ Ｐｕｂｌｉｃ Ｌｉｍｉｔｅｄ Ｃｏｍｐａｎｙ 測定スケール
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JP2015137855A (ja) * 2014-01-20 2015-07-30 キヤノン株式会社 位置制御装置および方法
JP2017167145A (ja) * 2016-03-16 2017-09-21 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングＤｒ． Ｊｏｈａｎｎｅｓ Ｈｅｉｄｅｎｈａｉｎ Ｇｅｓｅｌｌｓｃｈａｆｔ Ｍｉｔ Ｂｅｓｃｈｒａｎｋｔｅｒ Ｈａｆｔｕｎｇ 光学式の距離センサおよび光学式の距離センサを備える位置測定装置
JP2020169883A (ja) * 2019-04-03 2020-10-15 株式会社ミツトヨ 光電式エンコーダ
JP7391527B2 (ja) 2019-04-03 2023-12-05 株式会社ミツトヨ 光電式エンコーダ
JP2020193929A (ja) * 2019-05-30 2020-12-03 株式会社ミツトヨ 光学式エンコーダ
JP7248504B2 (ja) 2019-05-30 2023-03-29 株式会社ミツトヨ 光学式エンコーダ

Also Published As

Publication number Publication date
CN101484780B (zh) 2011-07-06
EP2051047A4 (en) 2017-04-19
EP2051047B1 (en) 2019-12-25
EP2051047A1 (en) 2009-04-22
US8127993B2 (en) 2012-03-06
JPWO2008146409A1 (ja) 2010-08-19
US20090316155A1 (en) 2009-12-24
CN101484780A (zh) 2009-07-15
JP4828612B2 (ja) 2011-11-30

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