Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
  • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
  • H01L21/67742—Mechanical parts of transfer devices
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
  • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
  • B25J11/00—Manipulators not otherwise provided for
  • B25J11/0095—Manipulators transporting wafers
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
  • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
  • B25J9/00—Programme-controlled manipulators
  • B25J9/0084—Programme-controlled manipulators comprising a plurality of manipulators
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
  • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
  • B25J9/00—Programme-controlled manipulators
  • B25J9/0084—Programme-controlled manipulators comprising a plurality of manipulators
  • B25J9/0087—Dual arms
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
  • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
  • B25J9/00—Programme-controlled manipulators
  • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
  • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
  • B25J9/041—Cylindrical coordinate type
  • B25J9/042—Cylindrical coordinate type comprising an articulated arm
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
  • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
  • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
  • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
  • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
  • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance

Definitions

• the present invention relates to a robot having an arm for taking in and out a thin plate-like workpiece such as a glass substrate or a semiconductor wafer with a stock force, and more particularly to a double arm type robot having two arms.
• FIG. 7 shows a double-arm robot of Patent Document 1.
• the double arm type bot of Patent Document 1 has a mechanism in which two arms are connected to one support member to move up and down, so the vertical distance between the two arms is constant and the two arms move up and down. Are performed simultaneously. Therefore, there was a problem that the vertical distance between the two arms could not be changed and the vertical movement could not be performed independently of each other.
• Patent Document 2 (For example, Patent Document 2).
• the double arm type robot described in Patent Document 2 is shown in FIG. Since the vertical spacing of the two horizontal articulated arms 45A and 45B can be changed freely, the vertical spacing of the arms can be adjusted to the shelf pitch such as stock force, and the two arms can be operated simultaneously. It is possible to load and unload workpieces. As a result, the transfer efficiency can be improved by taking advantage of the double arm.
• the double arm type robot arm described in Patent Document 2 has two arms formed by alternately projecting the side portions of the two support members 44A and 44B that support the respective arms.
• the vertical distance between the two is not set below a predetermined minimum distance.
• Patent Document 1 Japanese Patent Laid-Open No. 2001-274218
• Patent Document 2 Japanese Patent Laid-Open No. 2005-150575
• the sides of the support members 44A and 44B protrude greatly, increasing the mass, and the drive mechanisms such as motors and power transmission mechanisms for moving the arms 45A and 45B and the support members 44A and 44B up and down are also enlarged. There was a problem.
• an arm, a support member, a column (41A, 4 Each IB) is provided with the purpose of detecting the work placed on the hand and cables for driving the drive source of each arm and support member and acquiring their positions.
• Built-in cable for the sensor is provided.
• the present invention has been made in view of such problems, each of which is provided with a double arm that can be independently moved up and down, and is controlled by controlling the distance between the upper and lower support members within an appropriate range.
• An object of the present invention is to provide a double-arm robot that can improve efficiency, reduce the column size, reduce the installation area and turning radius, and suppress adverse effects on the workpiece caused by the operation of the upper and lower support members.
• the present invention is configured as follows.
• the invention according to claim 1 includes a hand unit on which a transported article is placed, and is connected to the hand unit, has at least two rotary joints, and is extended and contracted so as to move the hand unit in one direction.
• Two moving articulated arms are arranged above and below, two supporting members for supporting the two articulated arms, a column to which the two supporting members are attached, and the two supporting members to the column.
• a double-arm type robot provided with a moving mechanism coupled to the column so as to be movable in the vertical direction along the vertical direction, and by moving one or both of the two support members up and down. The vertical distance between the two support members increases, and when the distance reaches a first predetermined value, the vertical movement of the support members is stopped.
• the vertical distance between the two support members is narrowed by moving one or both of the two support members up and down. When reaching a constant value, the vertical movement of the support member is stopped.
• the invention according to claim 3 wherein the two support members each have a protrusion portion disposed in the column toward the other support member, and the protrusion portion includes a limit switch, The limit switch is actuated by a protrusion of the other support member when the vertical distance between the two support members reaches the first predetermined value or the second predetermined value. It is.
• one or both of the two support members each include a distance sensor installed toward the other support member, and the distance sensor includes the two support members. The vertical distance between the members is measured.
• the invention according to claim 5 includes a hand unit for placing a transported object, and is connected to the hand unit, has at least two rotary joints, and expands and contracts to move the hand unit in one direction.
• Two moving articulated arms are arranged above and below, two supporting members for supporting the two articulated arms, a column to which the two supporting members are attached, and the two supporting members to the column.
• a double-arm robot provided with a moving mechanism coupled to the column so as to be movable in the vertical direction along each of the first and second multi-joint arms.
• the cable disposed inside the arm is arranged outside the first support member via the inside of the first support member that supports the first articulated arm of the two support members.
• the second support member after being installed And the cable disposed inside the second articulated arm is connected to the first supporting member force together with the accommodated cable via the inside of the second supporting member. It is housed inside the column, and the cable inside the column is disposed outside the double arm robot after being disposed at the lower end of the column.
• the cable disposed in the column is disposed to the lower end of the column via a cable anchoring portion provided in a substantially central portion in the height direction of the column. It is characterized by being
• the invention according to claim 9 is characterized in that the articulated arm is a horizontal articulated arm in which the rotary joint rotates about a vertical axis.
• the invention according to claim 10 is characterized in that the two articulated arms are respectively supported by the support member so as to face each other in the vertical direction.
• the interval between the two support members can be made to correspond to the pitch of the shelves such as various stocking forces, and the work transfer efficiency is improved.
• the support members are not brought into direct contact with each other, so that the vertical movement is stopped. Occurrence can be suppressed.
• the cable disposed between the two support members can flexibly cope with a change in the vertical distance between the two support members, and tension is applied. There is no.
• the configuration in the column can be simplified while the cable in the column is adapted to the vertical movement of the support member, and the column can be made compact.
• the minimum distance between the two arms in the vertical direction can be reduced, and it can cope with the stocking force of various pitches.
• the radius can be kept small.
• FIG. 1 is a perspective view of a double arm type robot according to the present invention.
• FIG. 2 Three views of the double arm robot of the present invention
• FIG. 3 is a side view showing an operation example of the present invention.
• FIG. 4 is a cross-sectional view for explaining the operation of the strobe mechanism when the distance between the support members is increased.
• FIG. 5 is a cross-sectional view for explaining the operation of the stocker mechanism when the distance between the support members is reduced. 6] Three-side view showing the state of cable wiring for the double-arm robot of the present invention
• FIG. 7 is a perspective view of a double arm type robot disclosed in Patent Document 1.
• FIG. 8 is a perspective view of a double arm type robot disclosed in Patent Document 2.
• FIG. 9 is a perspective view showing the operation of the support member of the double arm robot of Patent Document 2.
• FIG. 1 is a perspective view showing the overall structure of the double arm type robot of the present invention.
• the double-arm robot 1 of the present invention includes a horizontal articulated arm 2 that is rotatably connected by a shoulder joint part 3, an elbow joint part 4, and a hand joint part 5 and transmits a rotational force from a rotational drive source to perform a desired operation. 2 sets.
• the hand unit 8 mounted on the tip of the arm 2 for placing the workpiece moves linearly in the expansion / contraction direction (X-axis direction of the orthogonal coordinate system) shown in the figure by the arm 2, and loads the workpiece into the stocker or the like. ⁇ Perform unloading operation.
• 101 and 102 are support members of the arm, 101 is suspended from one arm, and 102 is configured to support the other arm.
• Each arm 2 is connected to the support member 101 or 102 by a shoulder joint 3 so that the two arms are arranged so as to face each other up and down!
• the double-arm robot 1 of the present invention is provided with a vertical movement mechanism 11 that individually moves the support members 101 and 102 up and down along the column 12 so that the upper and lower positions of the arm 2 can be adjusted.
• the vertical distance between the two hand portions 8 when the support members 101 and 102 are brought closest to each other can be reduced as much as possible. It is possible to cope with the pitch stock force.
• FIG. 2 is a three-sided view showing details of the operation of the double-arm robot of the present invention.
• Fig. 2 (a) is a top view, which corresponds to a view looking down from the Z-axis direction to the origin direction in the Cartesian coordinate system in Fig. 1.
• Fig. 2 (b) is a side view and corresponds to the view from the origin of the Cartesian coordinate system in Fig. 1 in the Y-axis direction.
• Fig. 2 (c) is a front view, which corresponds to the view from the origin of the Cartesian coordinate system in Fig. 1 in the X-axis direction.
• the hand portion 8 is omitted.
• FIG. 2 (a) shows the range of expansion and contraction of arm 2.
• the state in which the arm 2 is folded so that the upper arm 6 and the forearm 7 overlap each other is indicated by a solid line, and the maximum stroke of the expansion / contraction operation is indicated by a dotted line.
• the pedestal 13 is provided so as to be rotatable with respect to the base 14, and the arm 12 and the supporting member can be turned together with the column 12 so that the direction thereof can be changed.
• This turning function makes it possible to perform work transfer work for a plurality of stockers arranged around the double arm robot 1 and improve work efficiency per unit area.
• FIG. 2 (b) and FIG. 2 (c) show the raising / lowering operation range of the arm 2.
• arm 2 The state where the arm is positioned at the upper end of the lifting operation is indicated by a solid line, and the state where the arm 2 is positioned at the lower end of the lifting operation is indicated by a dotted line!
• the vertical movement mechanism 11 is arranged in the same direction as the extension direction of the hand part 8 with respect to the column 12, and the support members 101 and 102
• the shoulder joint 3 of the arm 2 is connected to the tip thereof. With such an arrangement, the column 12 does not get in the way when the arm 2 is extended and contracted.
• the shoulder joint 3 of the lower arm 22 is not aligned with the center axis of rotation of the shoulder joint 3 of the two arms 2.
• the shoulder joint 3 of the lower arm 22 is the shoulder joint 3 of the upper arm 21.
• the hand part 8 is offset in the extending direction.
• the support member 102 connected to the lower arm 22 is also offset in the extending direction of the hand portion 8 with respect to the support member 101! /, So when the support member 102 is moved downward by the vertical movement mechanism 11, A force to increase the lifting range that does not interfere with 13 is possible. Further, the vertical movement mechanism 11 is covered with a protective cover (not shown) having a shielding function, and suppresses particles generated inside the column 12 from being scattered outside.
• the support members 101 and 102 individually move up and down along the column 12, so that the vertical distance between the two arms can be adjusted according to the pitch of the stock force. Improve the transfer efficiency by simultaneously loading and unloading workpieces with the arm.
• each arm is not shown in the figure! /, And the workpiece is unloaded from the stock force A at the same time! Rotate the column 12 to raise the support members 101 and 102 while changing the direction of the column 12, and against the stocker B (not shown) at a height of 300 [mm] from the installation surface (the stock force A differs from the shelf pitch)
• the work can be performed.
• the vertical movement distance of the support member 101 is 2050 [mm]
• the movement distance of the support member 102 is 2000 [mm].
• the movement speeds of both are appropriately adjusted according to the difference, and the movement is started and stopped at the same time. And can be moved.
• the movement speeds of support members 101 and 102 may be the same, and the two support members may start moving simultaneously and stop simultaneously.
• the support members 101 and 102 are configured so that the distance between them does not fall outside a certain range. This makes it possible to simplify the movement control of the support members 101 and 102 as described above, while allowing the intervals to correspond to the pitches of various shelves, and applying the cable wiring described later to make the column a single arm type. It can be made compact as in the case of a robot or a double-arm robot that moves two arms up and down.
• FIG. 4 is a diagram schematically showing a cross section of a part of the support members 101 and 102 and the vertical movement mechanism 11 when viewed from the same direction as FIG. 2 (b). A part of the vertical movement mechanism 11 is stored in the column 12.
• the two support members 101 and 102 are configured such that the distance between the two support members 101 and 102 does not exceed a certain level by the force S that moves up and down individually along the column 12 and the stopper mechanisms 31 and 32.
• the stagger mechanism 31 is L-shaped and moves up and down in the column 12 integrally with the support member 101.
• the stagger mechanism 32 is T-shaped and moves in the column 12 integrally with the support member 102. Move up and down.
• the support member 102 stops in a state where it is suspended from the support member 101 by this mechanism, so the support member 102 is lowered. It can prevent the arm 22 and the pedestal 13 from falling.
• stopper mechanisms 31 and 32 are housed inside the column 12, it is possible to suppress the adverse effect on the workpiece, in which the particles generated when the stopper comes into contact are not directly scattered on the workpiece.
• the impact applied to the support member during the contact of the strobe mechanism 31, 32 can be mitigated. Can be suppressed.
• FIG. 5 is a view schematically showing a cross section of a part of the support members 101 and 102 and the vertical movement mechanism 11 when viewed from the same direction as FIG.
• the stopper mechanisms 33 and 34 in FIG. 4 are arranged in front of the stopper mechanisms 31 and 32 shown in FIG.
• a simple mechanical mechanism is used as a mechanism for limiting the distance between the support members 101 and 102 within a certain range.
• a switch may be provided in one or both of the stopper mechanisms in FIGS. 4 and 5, and the switch may be pushed when the other stopper mechanism comes into contact. If the switch ON / OFF is detected by a robot controller (not shown) and the drive mechanism for moving the support members 101 and 102 up and down is stopped, the distance between the support members 101 and 102 is kept within a certain range. Can be limited.
• a distance sensor is provided on one or both of the support members 101 and 102 toward the other support member.
• the robot controller detects the distance between the support members 101 and 102, and if necessary, the support member 101 , 102 may be stopped to move the drive mechanism up and down.
• the distance sensor is used, the contact between the support members 101 and 102 can be avoided, which is effective in suppressing the occurrence of displacement of the particle or workpiece.
• these methods may be used in combination.
• the length of the external cable 17 connecting the support members 101 and 102 is determined based on a predetermined maximum distance between the support members. Specifically, when the distance between the support members 101 and 102 is long enough so that no tension is applied, and when the distance between the support members 101 and 102 is minimized, there is a margin. The length is set so that it does not have a large surplus. Furthermore, it is arranged so as to draw a substantially U-shape so that it can respond smoothly to changes in the distance between the support members 101 and 102! External cable 17 will be described later.
• FIG. 6 is a three-sided view showing the internal cable wiring of the double arm robot 1.
• FIG. Fig. 2 is a top view similar to Fig. 2 (a), showing the cable wiring in arm 2.
• Fig. 6 (b) is a side view similar to Fig. 2 (b), and shows the cable wiring in the support members 101 and 102 and in the column 12! /.
• FIG. 6 (c) is a front view similar to FIG. 2 (c), showing cable wiring in the arm 2, part of the column 12, and in the pedestal 13. In FIG. 5, the hand portion 8 is omitted.
• a drive mechanism for extending and retracting the upper arm 21 and a sensor cable for detecting the position of the workpiece placed on the hand portion 8 are housed.
• a drive mechanism for extending and retracting the lower arm 22 and an internal cable 18 for a sensor for detecting the position of the workpiece placed on the hand portion 8 are housed.
• the cables in the support member 101 are collectively arranged as the external cable 17 so as to be exposed to the outside of the support member 101, and then stored in the support member 102, and are passed through the support member 102.
• the external cable 17 is arranged so as to be exposed on the back side of the connecting portion between the support members 101 and 102 and the arm 2. ing.
• the internal cable 18 in the column 12 is arranged in a form that is anchored to the center of the column 12 by the bracket 19 and the S-shape is laid sideways.
• the inner cable 18 is moored at the center, so that the tension is not applied to the inner cable 18 when the support members 101 and 102 are moved up and down.
• the internal cable 18 can be made to follow the vertical movement of the support members 101 and 102 by a simple configuration, and the column can be made compact.
• the internal cable 18 passes from the lower end of the column 12 through the inside of the pedestal 13 and then goes out of the double-arm robot 1.
• the cable that goes out is connected to a robot controller (not shown).
• the cable in the support member 101 is stored in the support member 102 and the force in the support member 102 is stored in the column 12 so that the cables in the column 12 are combined into one column 12. It can be made compact and lightweight, and has the effect of reducing the installation area of the double-arm robot.

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• Engineering & Computer Science (AREA)
• Robotics (AREA)
• Mechanical Engineering (AREA)
• Physics & Mathematics (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• General Physics & Mathematics (AREA)
• Manufacturing & Machinery (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Power Engineering (AREA)
• Manipulator (AREA)

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Applications Claiming Priority (2)

Publications (1)

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Cited By (6)

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Citations (3)

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• 2007
  • 2007-08-03 CN CN2007800306388A patent/CN101506963B/zh active Active
  • 2007-08-03 JP JP2007553408A patent/JP4221733B2/ja active Active
  • 2007-08-03 KR KR1020087025875A patent/KR101073275B1/ko active IP Right Grant
  • 2007-08-03 WO PCT/JP2007/065244 patent/WO2008023560A1/ja active Application Filing
  • 2007-08-15 TW TW96130176A patent/TW200829398A/zh unknown

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