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WO2007132602A1 - Optical encoder and motor with encoder - Google Patents

Optical encoder and motor with encoder Download PDF

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Publication number
WO2007132602A1
WO2007132602A1 PCT/JP2007/057676 JP2007057676W WO2007132602A1 WO 2007132602 A1 WO2007132602 A1 WO 2007132602A1 JP 2007057676 W JP2007057676 W JP 2007057676W WO 2007132602 A1 WO2007132602 A1 WO 2007132602A1
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WO
WIPO (PCT)
Prior art keywords
receiving element
light receiving
light
encoder
element array
Prior art date
Application number
PCT/JP2007/057676
Other languages
French (fr)
Japanese (ja)
Inventor
Yasushi Yoshida
Yuji Arinaga
Original Assignee
Kabushiki Kaisha Yaskawa Denki
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kabushiki Kaisha Yaskawa Denki filed Critical Kabushiki Kaisha Yaskawa Denki
Publication of WO2007132602A1 publication Critical patent/WO2007132602A1/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
    • H02K11/21—Devices for sensing speed or position, or actuated thereby
    • H02K11/22—Optical devices

Definitions

  • the light source 1 can be an LED or a semiconductor laser.
  • an optical component such as a collimator lens or a cylindrical lens may be added to the light emitting portion.
  • the light receiving element array is arranged within a directivity angle that can obtain sufficient light intensity using not only parallel light but also diffused light. It is possible.
  • the light emitted from the light source 1 passes through the rotating disk 2 and is reflected by the reflecting portion 5 of the rotating disk 2.
  • the light reflected by the reflector 5 passes through the code pattern 4 formed on the surface of the rotating disk 2 and enters the light receiving element array 3.
  • the light receiving element array 3 converts the received light quantity into an electrical signal. Electrical signal output from light receiving element array 3 Is converted into a position signal by a signal processing circuit (not shown).

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)

Abstract

A small optical encoder producing a detection signal of good S/N. A transmission type code pattern (4) is formed on the surface of a rotary disc (2), and a reflective portion (5) is formed on the back of the rotary disc (2). Light emitted from a light source (1) passes through the rotary disc (2) before being reflected on the reflective portion (5) of the rotary disc (2). The light reflected on the reflective portion (5) passes through a scale (4) on the surface of the rotary disc (2) and impinges on a light receiving element array (3). The light receiving element array (3) converts the amount of received light into an electric signal. An electric signal outputted from the light receiving element array (3) is converted into a position signal by a signal processing circuit (not shown).

Description

明 細 書  Specification
光学式エンコーダ及びエンコーダ付モータ  Optical encoder and motor with encoder
技術分野  Technical field
[0001] 本発明は、産業用機器の位置検出用センサとして使用される光学式エンコーダに 関する。  The present invention relates to an optical encoder used as a position detection sensor for industrial equipment.
背景技術  Background art
[0002] 従来、移動スケールに対して移動スケールの同一面側に光源と受光素子アレイを 配置した反射型エンコーダが開示されている (例えば、特許文献 1参照)。  Conventionally, a reflective encoder in which a light source and a light receiving element array are arranged on the same surface side of a moving scale with respect to the moving scale has been disclosed (for example, see Patent Document 1).
反射型エンコーダは、移動スケールの同一面側に光源と受光素子アレイを配置す るため、光源と受光素子アレイを、移動スケールを挟んで一列に配置する透過型ェ ンコーダに比べて薄型化に適するという利点があった。  The reflective encoder has a light source and a light receiving element array on the same side of the moving scale, so it is suitable for thinning compared to a transmission type encoder in which the light source and the light receiving element array are arranged in a row across the moving scale. There was an advantage.
[0003] 図 3は、従来の反射型ロータリエンコーダの側断面図である。 FIG. 3 is a side sectional view of a conventional reflective rotary encoder.
図において、 1は光源、 2は移動スケールである回転ディスク、 3は受光素子アレイ、 4は回転ディスク 2の光源 1及び受光素子アレイ 3と対向した側の表面に形成された 符号パターン、 6は回転軸、 7はプリント基板、 8は半導体センサ基板である。  In the figure, 1 is a light source, 2 is a rotating disk which is a moving scale, 3 is a light receiving element array, 4 is a code pattern formed on the surface of the rotating disk 2 facing the light source 1 and light receiving element array 3, and 6 is A rotating shaft, 7 is a printed circuit board, and 8 is a semiconductor sensor substrate.
光源 1と受光素子アレイ 3は図示しないモータフレームに取り付けられ、回転ディス ク 2はモータフレーム（図示せず）に対して相対変位する回転軸 6に取り付けられてい る。  The light source 1 and the light receiving element array 3 are attached to a motor frame (not shown), and the rotary disk 2 is attached to a rotary shaft 6 that is displaced relative to a motor frame (not shown).
[0004] 光源 1には通常 LEDが用いられる。  [0004] The light source 1 is usually an LED.
受光素子アレイ 3は、フォトダイオードやフォトトランジスタ等の光電変換素子力もな り、符号パターン 4のピッチに応じて区分された複数の受光素子が配置されたもので ある。  The light receiving element array 3 also has a photoelectric conversion element force such as a photodiode or a phototransistor, and a plurality of light receiving elements that are divided according to the pitch of the code pattern 4 are arranged.
符号パターン 4は、インクリメンタル信号用の等ピッチ繰り返しパターン、またはアブ ソリュート信号用の M系列パターンであり、移動スケール表面に反射率の高い金属 薄膜が形成されている。  Code pattern 4 is an equal-pitch repeat pattern for incremental signals or an M-sequence pattern for absolute signals, and a metal thin film with high reflectivity is formed on the surface of the moving scale.
[0005] 次に、動作について説明する。 [0005] Next, the operation will be described.
図 3において、光源 1から出射した光は、回転ディスク 2の表面に形成された符号パ ターン 4で反射して受光素子アレイ 3に入射する。受光素子アレイ 3は符号パターン 4 で変調された光信号を電気信号に変換する。受光素子アレイ 3から出力された電気 信号は、図示しない信号処理回路により位置信号に変換される。 In FIG. 3, the light emitted from the light source 1 is a code pattern formed on the surface of the rotating disk 2. Reflected at turn 4 and incident on light receiving element array 3. The light receiving element array 3 converts the optical signal modulated by the code pattern 4 into an electric signal. The electric signal output from the light receiving element array 3 is converted into a position signal by a signal processing circuit (not shown).
特許文献 1 :特開 2005— 121593号公報  Patent Document 1: Japanese Patent Laid-Open No. 2005-121593
発明の開示  Disclosure of the invention
発明が解決しょうとする課題  Problems to be solved by the invention
[0006] し力しながら、従来の反射型エンコーダは、回転ディスクと受光素子間のギャップを 小さくしょうとすると、光線の入射角が大きくなり、ギャップ変動が生じると符号パター ンの像が受光アレイの位置からずれやすぐ検出信号の変動が生じてしまうので、ギ ヤップを小さくすることが困難であった。 [0006] However, when the conventional reflective encoder attempts to reduce the gap between the rotating disk and the light receiving element, the incident angle of the light beam increases, and when the gap fluctuates, the image of the code pattern is received by the light receiving array. It was difficult to reduce the gap because the detection signal was shifted from the position and the detection signal fluctuated immediately.
このように従来の反射型エンコーダは回転ディスクの表面と受光素子アレイ間のギ ヤップを小さくすることができず、従って、受光素子アレイ上に生じる符号パターンの 像のコントラストが低ぐ得られる信号の SZNが悪いという問題や、装置を薄型化で きないという問題があった。  As described above, the conventional reflective encoder cannot reduce the gap between the surface of the rotating disk and the light receiving element array, and therefore, the signal of the signal that can obtain the low contrast of the image of the code pattern generated on the light receiving element array. There were problems that SZN was bad and that the device could not be thinned.
本発明はこのような問題に鑑みてなされたものであり、小型で、 SZNの良い検出信 号が得られる光学式エンコーダ装置を提供することを目的とする。  The present invention has been made in view of such problems, and an object of the present invention is to provide an optical encoder device that is small and can obtain a detection signal with good SZN.
課題を解決するための手段  Means for solving the problem
[0007] 上記問題を解決するため、本発明は、次のように構成したものである。 [0007] In order to solve the above problems, the present invention is configured as follows.
請求項 1に記載の発明は、相対変位する一方の部材に固定された光源及び受光 素子アレイと、他方の部材に固定された移動スケールを備え、前記 2つの部材の相 対的変位を検出する光学式エンコーダにお 、て、前記移動スケールは光透過性の 素材で形成され、前記移動スケールの表面に符号パターンが形成され、前記移動ス ケールの裏面に反射部が形成されて 、ることを特徴として！/、る。  The invention according to claim 1 includes a light source and a light receiving element array fixed to one member that is relatively displaced, and a moving scale fixed to the other member, and detects a relative displacement between the two members. In the optical encoder, the moving scale is made of a light-transmitting material, a code pattern is formed on the surface of the moving scale, and a reflecting portion is formed on the back surface of the moving scale. as a feature! /
また請求項 2に記載の発明は、相対変位する一方の部材に固定された光源、固定 スリット及び受光素子と、他方の部材に固定された移動スケールを備え、前記 2つの 部材の相対的変位を検出する光学式エンコーダにお 、て、前記移動スケールは光 透過性の素材で形成され、前記移動スケールの表面に符号パターンが形成され、前 記移動スケールの裏面に反射部が形成されて 、ることを特徴として 、る。 また請求項 3に記載の発明は、エンコーダ付モータが請求項 1又は請求項 2に記載 の光学式エンコーダを備えたことを特徴として 、る。 The invention according to claim 2 further includes a light source, a fixed slit, and a light receiving element fixed to one member that is relatively displaced, and a moving scale fixed to the other member, and the relative displacement of the two members is determined. In the optical encoder to be detected, the moving scale is formed of a light-transmitting material, a code pattern is formed on the surface of the moving scale, and a reflective portion is formed on the back surface of the moving scale. It is characterized by that. The invention according to claim 3 is characterized in that the motor with an encoder includes the optical encoder according to claim 1 or claim 2.
発明の効果  The invention's effect
[0008] 請求項 1または請求項 2に記載の発明によると、移動スケールの表面に符号パター ンを形成し、移動スケールの裏面に反射部を形成したので、受光素子アレイ又は受 光素子への入射角を大きくすることなぐ移動スケールと受光素子アレイ又は受光素 子間のギャップを小さくできる。従って、小型で、 SZNの良い光学式エンコーダ装置 が得られる。  [0008] According to the invention described in claim 1 or claim 2, since the code pattern is formed on the front surface of the moving scale and the reflecting portion is formed on the back surface of the moving scale, the light receiving element array or the light receiving element is provided. The gap between the moving scale and the light receiving element array or light receiving element can be reduced without increasing the incident angle. Therefore, a compact optical encoder device with good SZN can be obtained.
請求項 3に記載の発明によると、エンコーダ付モータが請求項 1又は請求項 2に記 載の光学式エンコーダを備えているので、小型のエンコーダ付モータが実現できる。 図面の簡単な説明  According to the invention described in claim 3, since the motor with an encoder includes the optical encoder according to claim 1 or 2, a small motor with an encoder can be realized. Brief Description of Drawings
[0009] [図 1]本発明の第 1実施例を示す反射型ロータリエンコーダの側断面図 FIG. 1 is a side sectional view of a reflective rotary encoder showing a first embodiment of the invention.
[図 2]本発明の第 2実施例を示す反射型ロータリエンコーダの側断面図  FIG. 2 is a sectional side view of a reflective rotary encoder showing a second embodiment of the present invention.
[図 3]従来の反射型ロータリエンコーダの側断面図  [Figure 3] Cross-sectional side view of a conventional reflective rotary encoder
符号の説明  Explanation of symbols
[0010] 1 光源 [0010] 1 light source
2 回転ディスク  2 Rotating disc
3 受光素子アレイ  3 Photodetector array
31 固定スリット  31 Fixed slit
32 受光素子  32 Photo detector
4 符号パターン  4 Code pattern
5 反射部  5 Reflector
6 回転軸  6 Rotating axis
7 プリント基板  7 Printed circuit board
8 半導体センサ基板  8 Semiconductor sensor board
発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION
[0011] 以下、本発明の実施の形態について図を参照して説明する。 実施例 1 Hereinafter, embodiments of the present invention will be described with reference to the drawings. Example 1
[0012] 図 1は、本発明の第 1実施例を示す反射型ロータリエンコーダの側断面図である。  FIG. 1 is a side sectional view of a reflective rotary encoder showing a first embodiment of the present invention.
図において、 1は光源、 2は移動スケールである回転ディスク、 3は受光素子アレイ である。  In the figure, 1 is a light source, 2 is a rotating disk which is a moving scale, and 3 is a light receiving element array.
光源 1には LEDや半導体レーザを用いることができる。指向性を高めるためにコリメ ータレンズゃシリドリカルレンズ等の光学部品を出射部に加えても良い。また、後述の ように受光素子アレイへの光線の入射角が大きくならな 、ので、平行光だけでなく拡 散光を用いても充分な光強度が得られる指向角内に受光素子アレイを配置すること が可能である。  The light source 1 can be an LED or a semiconductor laser. In order to enhance directivity, an optical component such as a collimator lens or a cylindrical lens may be added to the light emitting portion. In addition, since the incident angle of the light beam to the light receiving element array does not increase as will be described later, the light receiving element array is arranged within a directivity angle that can obtain sufficient light intensity using not only parallel light but also diffused light. It is possible.
受光素子アレイ 3は、フォトダイオードやフォトトランジスタ等の光電変換素子力もな り、符号パターン 4のピッチに応じて区分された複数の受光素子が配置されたもので ある。  The light receiving element array 3 also has a photoelectric conversion element force such as a photodiode or a phototransistor, and a plurality of light receiving elements that are divided according to the pitch of the code pattern 4 are arranged.
符号パターン 4は、回転ディスク 2の表面に形成されており、インクリメンタル信号用 の等ピッチ繰り返しパターン、アブソリュート信号用の M系列パターン等の回転位置 情報を検出するためのパターンが形成されている。符号パターン 4は、透過型パター ンとして使用するため、光を反射する必要はなぐ光の透過を遮断できる金属、また は榭脂薄膜を形成すればょ ヽ。  The code pattern 4 is formed on the surface of the rotating disk 2, and a pattern for detecting rotational position information such as an equal-pitch repeated pattern for an incremental signal and an M-sequence pattern for an absolute signal is formed. Since the code pattern 4 is used as a transmissive pattern, it is not necessary to reflect light. It is only necessary to form a metal or a resin thin film that can block the transmission of light.
5は反射部で、反射部 5は回転ディスク 2の裏面に形成されており、アルミやクロム 等の金属薄膜を蒸着することにより容易に形成できる。  Reference numeral 5 denotes a reflecting portion, and the reflecting portion 5 is formed on the back surface of the rotating disk 2 and can be easily formed by vapor-depositing a metal thin film such as aluminum or chromium.
6は回転軸、 7は信号処理回路が搭載されたプリント基板、 8は半導体センサ基板 で光源及び受光素子アレイが設けられて 、る。  6 is a rotating shaft, 7 is a printed circuit board on which a signal processing circuit is mounted, 8 is a semiconductor sensor substrate, and a light source and light receiving element array are provided.
本発明が従来技術と異なる部分は、回転ディスク 2の裏面に反射部を備えた部分 である。  The part where the present invention is different from the prior art is a part provided with a reflection part on the back surface of the rotating disk 2.
[0013] 次に、動作について説明する。  Next, the operation will be described.
図 1において、光源 1から出射した光は、ー且回転ディスク 2の中を通過して回転デ イスク 2の反射部 5で反射する。反射部 5で反射した光は回転ディスク 2の表面に形成 された符号パターン 4を透過して受光素子アレイ 3に入射する。受光素子アレイ 3で は受光した光量を電気信号に変換する。受光素子アレイ 3から出力された電気信号 は、図示しない信号処理回路により位置信号に変換される。 In FIG. 1, the light emitted from the light source 1 passes through the rotating disk 2 and is reflected by the reflecting portion 5 of the rotating disk 2. The light reflected by the reflector 5 passes through the code pattern 4 formed on the surface of the rotating disk 2 and enters the light receiving element array 3. The light receiving element array 3 converts the received light quantity into an electrical signal. Electrical signal output from light receiving element array 3 Is converted into a position signal by a signal processing circuit (not shown).
[0014] このように、本実施例では回転ディスクの中を通過する光路が形成されるので、受 光素子アレイへの入射角を大きくすること無ぐ回転ディスクと光源および受光素子ァ レイ間のギャップを小さくすることができる。したがって、エンコーダ装置の薄型化が 行える。  As described above, in this embodiment, an optical path passing through the rotating disk is formed, so that the angle between the rotating disk and the light source and the light receiving element array is not increased. The gap can be reduced. Therefore, the encoder device can be thinned.
また、回転ディスクと受光素子アレイ間のギャップを小さくできるので、回折の影響を 受けにくぐ受光素子アレイ上に生じる符号パターンの像のコントラストが高い。従つ て、得られる信号の SZNが高 ヽと!、う利点がある。  In addition, since the gap between the rotating disk and the light receiving element array can be reduced, the contrast of the image of the code pattern generated on the light receiving element array that is hardly affected by diffraction is high. Therefore, there is an advantage that the SZN of the obtained signal is high!
実施例 2  Example 2
[0015] 図 2は、本発明の第 2実施例を示す反射型ロータリエンコーダの側断面図である。  FIG. 2 is a side sectional view of a reflective rotary encoder showing a second embodiment of the present invention.
図において、 31は、符号パターン 4のピッチに応じて区分されたスリットが形成され ている固定スリットで、図示しない固定部材によってプリント基板 7に固定されている。 また、 32は受光素子で、受光素子 32は、フォトダイオードやフォトトランジスタ等の光 電変換素子からなる。  In the figure, 31 is a fixed slit in which slits divided according to the pitch of the code pattern 4 are formed, and is fixed to the printed circuit board 7 by a fixing member (not shown). Reference numeral 32 denotes a light receiving element, and the light receiving element 32 includes a photoelectric conversion element such as a photodiode or a phototransistor.
本実施例が第 1実施例と異なる点は、受光素子アレイ 3の代わりに、固定スリット 31 と受光素子 32を備えた点である。  This embodiment differs from the first embodiment in that a fixed slit 31 and a light receiving element 32 are provided instead of the light receiving element array 3.
[0016] 次に、動作について説明する。  Next, the operation will be described.
光源 1から出射した光は、ー且回転ディスク 2の中を通過して回転ディスク 2の反射 部 5で反射する。反射部 5で反射した光は回転ディスク 2表面のスケール 4と固定スリ ット 31を透過して、受光素子 32に入射する。受光素子 32では受光した光量を電気 信号に変換する。図示しない電気回路により位置信号が検出される。受光素子 32か ら出力された電気信号は、信号処理回路（図示せず）により位置信号に変換される。  The light emitted from the light source 1 passes through the rotating disk 2 and is reflected by the reflecting portion 5 of the rotating disk 2. The light reflected by the reflecting section 5 passes through the scale 4 and the fixed slit 31 on the surface of the rotating disk 2 and enters the light receiving element 32. The light receiving element 32 converts the received light quantity into an electrical signal. A position signal is detected by an electric circuit (not shown). The electrical signal output from the light receiving element 32 is converted into a position signal by a signal processing circuit (not shown).
[0017] このように、本実施例では第 1実施例と同様に回転ディスクの中を通過する光路が 形成されるので、受光素子への入射角を大きくすること無ぐ回転ディスクと光源およ び固定スリット間のギャップを小さくすることができる。したがって、エンコーダ装置の 薄型化が行える。  As described above, in this embodiment, an optical path passing through the rotating disk is formed as in the first embodiment. Therefore, the rotating disk, the light source, and the light source without increasing the incident angle to the light receiving element are formed. And the gap between the fixed slits can be reduced. Therefore, the encoder device can be thinned.
また、回転ディスクと固定スリット間のギャップを小さくできるので、回折の影響を受 けにくく、固定スリット上に生じる符号パターンの像のコントラストが高い。従って、得ら れる信号の SZNが高 、と!/、う利点がある。 Further, since the gap between the rotating disk and the fixed slit can be reduced, it is not easily affected by diffraction, and the contrast of the code pattern image generated on the fixed slit is high. Therefore, got The signal SZN is high!
[0018] なお、本発明は、インクリメンタルエンコーダの他に、 M系列パターンを用いたアブ ソリュートエンコーダ、ピッチ数の異なる複数のトラックを組み合わせてトラック間の位 相差から絶対位置を検出するバーニア方式のアブソリュートエンコーダ、グレーコー ド方式のアブソリュートエンコーダ等のアブソリュートエンコーダにも適用できる。 また、回転ディスク上に複数列のトラックが形成されている場合、特定のトラックに対 して、回転ディスクの裏面に形成した反射部からの反射光を利用する本発明の光学 系を適用しても良い。例えば、回転ディスク上にアブソリュート信号用のトラックとイン タリメンタル信号用トラックが形成されている場合、アブソリユート信号用のトラックに対 して本発明の光学系を適用し、インクリメンタル信号用トラックに対してインクリメンタ ル信号用トラックからの反射光を検出する従来の光学系を適用しても良い。 [0018] It should be noted that the present invention includes an absolute encoder using an M-sequence pattern in addition to an incremental encoder, and a vernier absolute that detects a absolute position from a phase difference between tracks by combining a plurality of tracks having different pitch numbers. It can also be applied to absolute encoders such as encoders and gray code type absolute encoders. In addition, when multiple rows of tracks are formed on the rotating disk, the optical system of the present invention that uses the reflected light from the reflecting portion formed on the back surface of the rotating disk is applied to a specific track. Also good. For example, when an absolute signal track and an incremental signal track are formed on a rotating disk, the optical system of the present invention is applied to the absolute signal track, and the incremental signal track is applied to the incremental signal track. A conventional optical system that detects reflected light from the incremental signal track may be applied.
産業上の利用可能性  Industrial applicability
[0019] 上記のように本発明は、産業用機器の位置検出用センサとして使用される光学式 インクリメンタルエンコーダ及び光学式アブソリュートエンコーダに適用できる。実施 例では、回転型のエンコーダのみ記述したが、リニアタイプのエンコーダにも同様に 適用できる。 [0019] As described above, the present invention can be applied to an optical incremental encoder and an optical absolute encoder used as a position detection sensor for industrial equipment. In the embodiment, only the rotary encoder is described, but the present invention can be similarly applied to a linear encoder.

Claims

請求の範囲 The scope of the claims
[1] 相対変位する一方の部材に固定された光源及び受光素子アレイと、他方の部材に 固定された移動スケールを備え、前記 2つの部材の相対的変位を検出する光学式ェ ンコーダにおいて、  [1] An optical encoder that includes a light source and light receiving element array fixed to one member that is relatively displaced, and a moving scale fixed to the other member, and detects the relative displacement of the two members.
前記移動スケールは光透過性の素材で形成され、前記移動スケールの表面に符 号パターンが形成され、前記移動スケールの裏面に反射部が形成されて 、ることを 特徴とする光学式エンコーダ。  The optical encoder is characterized in that the moving scale is made of a light-transmitting material, a code pattern is formed on the surface of the moving scale, and a reflecting portion is formed on the back surface of the moving scale.
[2] 相対変位する一方の部材に固定された光源、固定スリット及び受光素子と、他方の 部材に固定された移動スケールを備え、前記 2つの部材の相対的変位を検出する光 学式エンコーダにお 、て、 [2] An optical encoder that includes a light source, a fixed slit, and a light receiving element fixed to one member that is relatively displaced, and a moving scale that is fixed to the other member, and detects the relative displacement of the two members. Oh,
前記移動スケールは光透過性の素材で形成され、前記移動スケールの表面に符 号パターンが形成され、前記移動スケールの裏面に反射部が形成されて 、ることを 特徴とする光学式エンコーダ。  The optical encoder is characterized in that the moving scale is made of a light-transmitting material, a code pattern is formed on the surface of the moving scale, and a reflecting portion is formed on the back surface of the moving scale.
[3] エンコーダを搭載したエンコーダ付モータにおいて、請求項 1又は請求項 2に記載 の光学式エンコーダを備えたことを特徴とするエンコーダ付モータ。 [3] An encoder-equipped motor equipped with the encoder, comprising the optical encoder according to claim 1 or 2.
PCT/JP2007/057676 2006-05-12 2007-04-05 Optical encoder and motor with encoder WO2007132602A1 (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58198190A (en) * 1982-05-12 1983-11-18 Matsushita Electric Ind Co Ltd Linear motor
JPS62156823U (en) * 1986-03-28 1987-10-05
JPS6363918A (en) * 1986-09-04 1988-03-22 Fujitsu Ltd Optical type position detecting system
JPH06249676A (en) * 1993-02-23 1994-09-09 Sony Corp Absolute position detecting device
JPH08210814A (en) * 1994-10-12 1996-08-20 Canon Inc Optical displacement measuring instrument

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58198190A (en) * 1982-05-12 1983-11-18 Matsushita Electric Ind Co Ltd Linear motor
JPS62156823U (en) * 1986-03-28 1987-10-05
JPS6363918A (en) * 1986-09-04 1988-03-22 Fujitsu Ltd Optical type position detecting system
JPH06249676A (en) * 1993-02-23 1994-09-09 Sony Corp Absolute position detecting device
JPH08210814A (en) * 1994-10-12 1996-08-20 Canon Inc Optical displacement measuring instrument

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