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WO2006026540A3 - Injection locked high power laser system - Google Patents

Injection locked high power laser system Download PDF

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Publication number
WO2006026540A3
WO2006026540A3 PCT/US2005/030636 US2005030636W WO2006026540A3 WO 2006026540 A3 WO2006026540 A3 WO 2006026540A3 US 2005030636 W US2005030636 W US 2005030636W WO 2006026540 A3 WO2006026540 A3 WO 2006026540A3
Authority
WO
WIPO (PCT)
Prior art keywords
high power
laser system
laser
power laser
injection locked
Prior art date
Application number
PCT/US2005/030636
Other languages
French (fr)
Other versions
WO2006026540A2 (en
Inventor
Luis A Zenteno
Dmitri V Kuksenkov
Venkatapuram S Sudarshanam
Donnell T Walton
Ji Wang
Original Assignee
Corning Inc
Luis A Zenteno
Dmitri V Kuksenkov
Venkatapuram S Sudarshanam
Donnell T Walton
Ji Wang
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc, Luis A Zenteno, Dmitri V Kuksenkov, Venkatapuram S Sudarshanam, Donnell T Walton, Ji Wang filed Critical Corning Inc
Priority to JP2007530220A priority Critical patent/JP2008511182A/en
Priority to EP05792993A priority patent/EP1782512A2/en
Publication of WO2006026540A2 publication Critical patent/WO2006026540A2/en
Publication of WO2006026540A3 publication Critical patent/WO2006026540A3/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/10084Frequency control by seeding
    • H01S3/10092Coherent seed, e.g. injection locking
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06Construction or shape of active medium
    • H01S3/063Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067Fibre lasers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08Construction or shape of optical resonators or components thereof
    • H01S3/08018Mode suppression
    • H01S3/08022Longitudinal modes
    • H01S3/08031Single-mode emission
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H01S3/108Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
    • H01S3/1086Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering using scattering effects, e.g. Raman or Brillouin effect
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H01S3/108Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
    • H01S3/109Frequency multiplication, e.g. harmonic generation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/139Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

Disclosure is a high power laser system involves the active locking of a high power primary slave laser oscillator to a low power master laser to produce a high power output at least 1 W. The slave laser oscillator contains a laser cavity with rare earth doped fiber. The laser system further consists of second cavity with first, second, third, and/or fifth harmonic generators.
PCT/US2005/030636 2004-08-26 2005-08-25 Injection locked high power laser system WO2006026540A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2007530220A JP2008511182A (en) 2004-08-26 2005-08-25 Injection-locked high power laser system
EP05792993A EP1782512A2 (en) 2004-08-26 2005-08-25 Injection locked high power laser system

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US60530904P 2004-08-26 2004-08-26
US60/605,309 2004-08-26

Publications (2)

Publication Number Publication Date
WO2006026540A2 WO2006026540A2 (en) 2006-03-09
WO2006026540A3 true WO2006026540A3 (en) 2007-01-04

Family

ID=36000657

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/030636 WO2006026540A2 (en) 2004-08-26 2005-08-25 Injection locked high power laser system

Country Status (4)

Country Link
EP (1) EP1782512A2 (en)
JP (1) JP2008511182A (en)
TW (1) TWI271905B (en)
WO (1) WO2006026540A2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5919740B2 (en) 2011-11-10 2016-05-18 富士電機株式会社 Light source device and wavelength conversion method
GB2499471B (en) 2012-06-01 2014-09-10 M Squared Lasers Ltd Method and apparatus for locking and scanning the output frequency from a laser cavity
GB2499472B (en) * 2012-06-01 2016-02-24 M Squared Lasers Ltd Method and apparatus for locking and scanning the output frequency from a laser cavity
US9509112B2 (en) 2013-06-11 2016-11-29 Kla-Tencor Corporation CW DUV laser with improved stability
WO2017064789A1 (en) * 2015-10-15 2017-04-20 国立大学法人 東京大学 Solid-state laser system and excimer laser system
US10175555B2 (en) 2017-01-03 2019-01-08 KLA—Tencor Corporation 183 nm CW laser and inspection system

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5323404A (en) * 1993-11-02 1994-06-21 At&T Bell Laboratories Optical fiber laser or amplifier including high reflectivity gratings
US5912910A (en) * 1996-05-17 1999-06-15 Sdl, Inc. High power pumped mid-IR wavelength systems using nonlinear frequency mixing (NFM) devices
US6359913B1 (en) * 1999-08-13 2002-03-19 Trw Inc. Stabilization of injection locking of CW lasers
US20030197917A1 (en) * 2002-04-17 2003-10-23 Hrl Laboratories, Llc Low-noise, switchable RF-lightwave synthesizer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5323404A (en) * 1993-11-02 1994-06-21 At&T Bell Laboratories Optical fiber laser or amplifier including high reflectivity gratings
US5912910A (en) * 1996-05-17 1999-06-15 Sdl, Inc. High power pumped mid-IR wavelength systems using nonlinear frequency mixing (NFM) devices
US6359913B1 (en) * 1999-08-13 2002-03-19 Trw Inc. Stabilization of injection locking of CW lasers
US20030197917A1 (en) * 2002-04-17 2003-10-23 Hrl Laboratories, Llc Low-noise, switchable RF-lightwave synthesizer

Also Published As

Publication number Publication date
TWI271905B (en) 2007-01-21
TW200625739A (en) 2006-07-16
WO2006026540A2 (en) 2006-03-09
EP1782512A2 (en) 2007-05-09
JP2008511182A (en) 2008-04-10

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