WO2006026540A3 - Injection locked high power laser system - Google Patents
Injection locked high power laser system Download PDFInfo
- Publication number
- WO2006026540A3 WO2006026540A3 PCT/US2005/030636 US2005030636W WO2006026540A3 WO 2006026540 A3 WO2006026540 A3 WO 2006026540A3 US 2005030636 W US2005030636 W US 2005030636W WO 2006026540 A3 WO2006026540 A3 WO 2006026540A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- high power
- laser system
- laser
- power laser
- injection locked
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/10084—Frequency control by seeding
- H01S3/10092—Coherent seed, e.g. injection locking
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
- H01S3/067—Fibre lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/08018—Mode suppression
- H01S3/08022—Longitudinal modes
- H01S3/08031—Single-mode emission
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
- H01S3/108—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
- H01S3/1086—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering using scattering effects, e.g. Raman or Brillouin effect
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
- H01S3/108—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
- H01S3/109—Frequency multiplication, e.g. harmonic generation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
- H01S3/139—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007530220A JP2008511182A (en) | 2004-08-26 | 2005-08-25 | Injection-locked high power laser system |
EP05792993A EP1782512A2 (en) | 2004-08-26 | 2005-08-25 | Injection locked high power laser system |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US60530904P | 2004-08-26 | 2004-08-26 | |
US60/605,309 | 2004-08-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2006026540A2 WO2006026540A2 (en) | 2006-03-09 |
WO2006026540A3 true WO2006026540A3 (en) | 2007-01-04 |
Family
ID=36000657
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2005/030636 WO2006026540A2 (en) | 2004-08-26 | 2005-08-25 | Injection locked high power laser system |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1782512A2 (en) |
JP (1) | JP2008511182A (en) |
TW (1) | TWI271905B (en) |
WO (1) | WO2006026540A2 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5919740B2 (en) | 2011-11-10 | 2016-05-18 | 富士電機株式会社 | Light source device and wavelength conversion method |
GB2499471B (en) | 2012-06-01 | 2014-09-10 | M Squared Lasers Ltd | Method and apparatus for locking and scanning the output frequency from a laser cavity |
GB2499472B (en) * | 2012-06-01 | 2016-02-24 | M Squared Lasers Ltd | Method and apparatus for locking and scanning the output frequency from a laser cavity |
US9509112B2 (en) | 2013-06-11 | 2016-11-29 | Kla-Tencor Corporation | CW DUV laser with improved stability |
WO2017064789A1 (en) * | 2015-10-15 | 2017-04-20 | 国立大学法人 東京大学 | Solid-state laser system and excimer laser system |
US10175555B2 (en) | 2017-01-03 | 2019-01-08 | KLA—Tencor Corporation | 183 nm CW laser and inspection system |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5323404A (en) * | 1993-11-02 | 1994-06-21 | At&T Bell Laboratories | Optical fiber laser or amplifier including high reflectivity gratings |
US5912910A (en) * | 1996-05-17 | 1999-06-15 | Sdl, Inc. | High power pumped mid-IR wavelength systems using nonlinear frequency mixing (NFM) devices |
US6359913B1 (en) * | 1999-08-13 | 2002-03-19 | Trw Inc. | Stabilization of injection locking of CW lasers |
US20030197917A1 (en) * | 2002-04-17 | 2003-10-23 | Hrl Laboratories, Llc | Low-noise, switchable RF-lightwave synthesizer |
-
2005
- 2005-08-25 EP EP05792993A patent/EP1782512A2/en not_active Withdrawn
- 2005-08-25 WO PCT/US2005/030636 patent/WO2006026540A2/en active Application Filing
- 2005-08-25 JP JP2007530220A patent/JP2008511182A/en not_active Withdrawn
- 2005-08-26 TW TW94129438A patent/TWI271905B/en not_active IP Right Cessation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5323404A (en) * | 1993-11-02 | 1994-06-21 | At&T Bell Laboratories | Optical fiber laser or amplifier including high reflectivity gratings |
US5912910A (en) * | 1996-05-17 | 1999-06-15 | Sdl, Inc. | High power pumped mid-IR wavelength systems using nonlinear frequency mixing (NFM) devices |
US6359913B1 (en) * | 1999-08-13 | 2002-03-19 | Trw Inc. | Stabilization of injection locking of CW lasers |
US20030197917A1 (en) * | 2002-04-17 | 2003-10-23 | Hrl Laboratories, Llc | Low-noise, switchable RF-lightwave synthesizer |
Also Published As
Publication number | Publication date |
---|---|
TWI271905B (en) | 2007-01-21 |
TW200625739A (en) | 2006-07-16 |
WO2006026540A2 (en) | 2006-03-09 |
EP1782512A2 (en) | 2007-05-09 |
JP2008511182A (en) | 2008-04-10 |
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