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WO2006010451A3 - Vakuumbeschichtungsanlage und verfahren zur vakuumbeschichtung - Google Patents

Vakuumbeschichtungsanlage und verfahren zur vakuumbeschichtung Download PDF

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Publication number
WO2006010451A3
WO2006010451A3 PCT/EP2005/007418 EP2005007418W WO2006010451A3 WO 2006010451 A3 WO2006010451 A3 WO 2006010451A3 EP 2005007418 W EP2005007418 W EP 2005007418W WO 2006010451 A3 WO2006010451 A3 WO 2006010451A3
Authority
WO
WIPO (PCT)
Prior art keywords
coating
vacuum
vacuum chamber
installation
coating installation
Prior art date
Application number
PCT/EP2005/007418
Other languages
English (en)
French (fr)
Other versions
WO2006010451A2 (de
Inventor
Marten Walther
Tobias Kaelber
Stefan Bauer
Hartmut Bauch
Joern Gerban
Original Assignee
Schott Ag
Marten Walther
Tobias Kaelber
Stefan Bauer
Hartmut Bauch
Joern Gerban
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schott Ag, Marten Walther, Tobias Kaelber, Stefan Bauer, Hartmut Bauch, Joern Gerban filed Critical Schott Ag
Priority to US11/572,255 priority Critical patent/US20080210550A1/en
Priority to EP05773105A priority patent/EP1771600A2/de
Priority to JP2007522952A priority patent/JP5224810B2/ja
Publication of WO2006010451A2 publication Critical patent/WO2006010451A2/de
Publication of WO2006010451A3 publication Critical patent/WO2006010451A3/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/515—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using pulsed discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

Die Erfindung sieht eine Vorrichtung zur Vakuumbeschichtung von Substraten vor, welche eine Vakuumkammer, eine Einrichtung zur Halterung wenigstens eines Substrats, zumindest einem ersten Beschichtungsbereich der Vakuumkammer mit wenigstens einer Einrichtung zur plasmaimpuls-induzierten chemischen Dampfphasenabscheidung (PICVD) und zumindest einem zweiten Beschichtungsbereich der Vakuumkammer mit wenigstens einer Einrichtung zur Sputterbeschichtung, sowie eine Transporteinrichtung zum Transport des Substrats in die Beschichtungsbereiche umfasst.
PCT/EP2005/007418 2004-07-26 2005-07-08 Vakuumbeschichtungsanlage und verfahren zur vakuumbeschichtung WO2006010451A2 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US11/572,255 US20080210550A1 (en) 2004-07-26 2005-07-08 Vacuum Coating System and Method for Vacuum Coating
EP05773105A EP1771600A2 (de) 2004-07-26 2005-07-08 Vakuumbeschichtungsanlage und verfahren zur vakuumbeschichtung
JP2007522952A JP5224810B2 (ja) 2004-07-26 2005-07-08 真空コーティング設備及び方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004036170A DE102004036170B4 (de) 2004-07-26 2004-07-26 Vakuumbeschichtungsanlage und Verfahren zur Vakuumbeschichtung und deren Verwendung
DE102004036170.3 2004-07-26

Publications (2)

Publication Number Publication Date
WO2006010451A2 WO2006010451A2 (de) 2006-02-02
WO2006010451A3 true WO2006010451A3 (de) 2006-04-20

Family

ID=35148995

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2005/007418 WO2006010451A2 (de) 2004-07-26 2005-07-08 Vakuumbeschichtungsanlage und verfahren zur vakuumbeschichtung

Country Status (5)

Country Link
US (1) US20080210550A1 (de)
EP (1) EP1771600A2 (de)
JP (1) JP5224810B2 (de)
DE (1) DE102004036170B4 (de)
WO (1) WO2006010451A2 (de)

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US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
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US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
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US11116695B2 (en) 2011-11-11 2021-09-14 Sio2 Medical Products, Inc. Blood sample collection tube
EP2914762B1 (de) 2012-11-01 2020-05-13 SiO2 Medical Products, Inc. Verfahren zur inspektion einer beschichtung
US9903782B2 (en) 2012-11-16 2018-02-27 Sio2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
US10201660B2 (en) 2012-11-30 2019-02-12 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition on medical syringes, cartridges, and the like
WO2014134577A1 (en) 2013-03-01 2014-09-04 Sio2 Medical Products, Inc. Plasma or cvd pre-treatment for lubricated pharmaceutical package, coating process and apparatus
JP6453841B2 (ja) 2013-03-11 2019-01-16 エスアイオーツー・メディカル・プロダクツ・インコーポレイテッド 被覆包装
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
US9863042B2 (en) 2013-03-15 2018-01-09 Sio2 Medical Products, Inc. PECVD lubricity vessel coating, coating process and apparatus providing different power levels in two phases
EP3122917B1 (de) 2014-03-28 2020-05-06 SiO2 Medical Products, Inc. Antistatische beschichtungen für kunststoffbehälter
KR20170057350A (ko) 2014-09-19 2017-05-24 도판 인사츠 가부시키가이샤 성막 장치 및 성막 방법
JP6672595B2 (ja) 2015-03-17 2020-03-25 凸版印刷株式会社 成膜装置
JP2018523538A (ja) 2015-08-18 2018-08-23 エスアイオーツー・メディカル・プロダクツ・インコーポレイテッド 低酸素透過速度を有する薬剤包装及び他の包装
US11383213B2 (en) 2016-03-15 2022-07-12 Honda Motor Co., Ltd. System and method of producing a composite product
US11171324B2 (en) 2016-03-15 2021-11-09 Honda Motor Co., Ltd. System and method of producing a composite product
KR102284028B1 (ko) * 2016-09-13 2021-07-29 어플라이드 머티어리얼스, 인코포레이티드 단일 산화물 금속 증착 챔버
US11081684B2 (en) 2017-05-24 2021-08-03 Honda Motor Co., Ltd. Production of carbon nanotube modified battery electrode powders via single step dispersion
US20190036102A1 (en) 2017-07-31 2019-01-31 Honda Motor Co., Ltd. Continuous production of binder and collector-less self-standing electrodes for li-ion batteries by using carbon nanotubes as an additive
US10658651B2 (en) 2017-07-31 2020-05-19 Honda Motor Co., Ltd. Self standing electrodes and methods for making thereof
US11201318B2 (en) 2017-09-15 2021-12-14 Honda Motor Co., Ltd. Method for battery tab attachment to a self-standing electrode
US11121358B2 (en) 2017-09-15 2021-09-14 Honda Motor Co., Ltd. Method for embedding a battery tab attachment in a self-standing electrode without current collector or binder
DE102018101090A1 (de) * 2018-01-18 2019-07-18 Osram Opto Semiconductors Gmbh Anzeigeelement, Anzeigevorrichtung und Verfahren zur Herstellung einer Kontaktstruktur bei einer Vielzahl von Anzeigeelementen
DE102019132526A1 (de) 2019-01-15 2020-07-16 Fhr Anlagenbau Gmbh Beschichtungsmaschine
US11535517B2 (en) 2019-01-24 2022-12-27 Honda Motor Co., Ltd. Method of making self-standing electrodes supported by carbon nanostructured filaments
US11325833B2 (en) 2019-03-04 2022-05-10 Honda Motor Co., Ltd. Composite yarn and method of making a carbon nanotube composite yarn
US11352258B2 (en) 2019-03-04 2022-06-07 Honda Motor Co., Ltd. Multifunctional conductive wire and method of making
US11539042B2 (en) 2019-07-19 2022-12-27 Honda Motor Co., Ltd. Flexible packaging with embedded electrode and method of making
CN111370265B (zh) * 2020-04-10 2022-02-01 常州天利智能控制股份有限公司 一种接触器结构

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EP0533044A1 (de) * 1991-09-20 1993-03-24 Balzers Aktiengesellschaft Verfahren zur Schutzbeschichtung von Substraten sowie Beschichtungsanlage
DE4335224A1 (de) * 1993-10-15 1995-04-20 Leybold Ag Vorrichtung für die Herstellung optischer Schichten
US6186090B1 (en) * 1999-03-04 2001-02-13 Energy Conversion Devices, Inc. Apparatus for the simultaneous deposition by physical vapor deposition and chemical vapor deposition and method therefor
EP1245298A1 (de) * 2001-03-29 2002-10-02 Schott Glas Verfahren zum Herstellen eines beschichteten Kunststoffkörpers

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DE4335224A1 (de) * 1993-10-15 1995-04-20 Leybold Ag Vorrichtung für die Herstellung optischer Schichten
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Also Published As

Publication number Publication date
EP1771600A2 (de) 2007-04-11
JP2008507629A (ja) 2008-03-13
JP5224810B2 (ja) 2013-07-03
DE102004036170A1 (de) 2006-03-23
DE102004036170B4 (de) 2007-10-11
WO2006010451A2 (de) 2006-02-02
US20080210550A1 (en) 2008-09-04

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