WO2006077695A1 - 送液装置及び送液方法 - Google Patents
送液装置及び送液方法 Download PDFInfo
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- WO2006077695A1 WO2006077695A1 PCT/JP2005/022164 JP2005022164W WO2006077695A1 WO 2006077695 A1 WO2006077695 A1 WO 2006077695A1 JP 2005022164 W JP2005022164 W JP 2005022164W WO 2006077695 A1 WO2006077695 A1 WO 2006077695A1
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- tank
- flow path
- liquid
- rotating substrate
- rotation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
- G01N35/00029—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor provided with flat sample substrates, e.g. slides
- G01N35/00069—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor provided with flat sample substrates, e.g. slides whereby the sample substrate is of the bio-disk type, i.e. having the format of an optical disk
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/50273—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means or forces applied to move the fluids
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502738—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by integrated valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0017—Capillary or surface tension valves, e.g. using electro-wetting or electro-capillarity effects
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
- F16K99/0057—Operating means specially adapted for microvalves actuated by fluids the fluid being the circulating fluid itself, e.g. check valves
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0803—Disc shape
- B01L2300/0806—Standardised forms, e.g. compact disc [CD] format
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
- B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
- B01L2400/0409—Moving fluids with specific forces or mechanical means specific forces centrifugal forces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
- B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
- B01L2400/0409—Moving fluids with specific forces or mechanical means specific forces centrifugal forces
- B01L2400/0412—Moving fluids with specific forces or mechanical means specific forces centrifugal forces using additionally coriolis forces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/06—Valves, specific forms thereof
- B01L2400/0688—Valves, specific forms thereof surface tension valves, capillary stop, capillary break
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0073—Fabrication methods specifically adapted for microvalves
- F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0073—Fabrication methods specifically adapted for microvalves
- F16K2099/008—Multi-layer fabrications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0082—Microvalves adapted for a particular use
- F16K2099/0084—Chemistry or biology, e.g. "lab-on-a-chip" technology
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T436/00—Chemistry: analytical and immunological testing
- Y10T436/11—Automated chemical analysis
- Y10T436/111666—Utilizing a centrifuge or compartmented rotor
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T436/00—Chemistry: analytical and immunological testing
- Y10T436/25—Chemistry: analytical and immunological testing including sample preparation
- Y10T436/2575—Volumetric liquid transfer
Definitions
- the present invention relates to a liquid feeding device and a liquid feeding method.
- the present invention relates to a liquid feeding method and a liquid feeding apparatus for controlling and feeding a small amount of liquid flow in a micro channel.
- a pump In a macro system, a pump is generally used as a liquid feeding means. However, in a micro-channel that handles a very small amount of fluid, the invalid volume (dead volume) generated in the tube connected to the pump cannot be ignored.
- Patent Document 1 discloses a capillary valve type microchannel liquid feeding method. In this liquid feeding method, the flow is blocked by the capillary force generated in the micro flow path, and the balance of the force is broken by the centrifugal force generated by rotating the rotating substrate, so that one micro tank The mosquito also feeds liquid to other micro tanks.
- the centrifugal force generated with rotation is used as a drive source.
- the tank is also limited to the radially outward direction (centrifugal direction) with respect to the rotation axis of the rotating substrate, and the liquid feed is basically limited to only one direction in the centrifugal direction.
- This driving principle For this reason, the micro-channel liquid feeding method disclosed in Patent Document 1 has limitations in the arrangement of the flow channel structure and the liquid feeding behavior with a small degree of freedom in the design of the rotating substrate, and has many functions for liquid feeding. If you hold it !, you can't!
- Patent Document 1 Japanese Patent Publication No. 2001-503854
- the present invention realizes liquid feeding behavior control with a high degree of freedom not limited to one direction, has a high degree of design freedom, and can provide various functions to liquid feeding and liquid feeding
- the problem is to provide a method.
- a first aspect of the present invention is formed on a rotating substrate (2) rotatable at least in a first rotating direction (Rl, R2) about a rotation center line (S), and the rotating substrate, A first tank (6A) that is spatially closed except for the inlet (11) and a second tank (7A) that is formed on the rotating substrate and is spatially closed except for the air port (12). ), A first flow path end (13) formed on the rotating substrate and connected to the first tank, and a second flow path end (14) connected to the second tank.
- the first tank and the second tank communicate with each other, and the first flow path end extends from the first tank along the first rotation direction of the rotating substrate, and
- the first channel end has a first channel (8A) that holds the liquid (9) in the first tank by capillary force (Fc), exceeds the capillary force, and is in the first rotation.
- the rotation direction is defined as a direction that is orthogonal to a virtual line orthogonal to the rotation center line and is on the same plane as the virtual line of parentheses.
- the tangential direction orthogonal to the radial direction of the rotating shaft is the rotating direction.
- the first rotation direction may be either clockwise or counterclockwise with respect to the rotation center line in plan view.
- Injection Loca The injected liquid in the first tank is held at the first end of the first flow path by capillary force.
- the rotary substrate is rotated by the rotation drive unit, so that it is held at the first end.
- An inertial force acts on the held liquid in the first rotational direction.
- this inertial force exceeds the capillary force, the liquid in the first tank flows into the first flow path and is sent to the second tank.
- the air in the second tank is discharged to the outside through the air port.
- the first channel needs to be a fine channel.
- the width of the first flow path is preferably set to 20 / z m or more and 2000 ⁇ m or less, for example.
- the inlet is a flow path that connects, for example, the inside of the first tank formed on the rotating substrate and the outside of the rotating substrate.
- the area of the inlet opening must be sufficiently smaller than the area of the first tank.
- a part of the first tank may be made of a material that allows air to pass through but does not allow liquid to pass therethrough, and may function as an injection port.
- the air port is a flow path that connects, for example, the inside of the second tank formed in the rotating substrate and the outside of the rotating substrate.
- a part or the whole of the second tank may be made of a material that allows air to permeate but does not allow liquid to permeate.
- the inertial force that is not centrifugal force exceeds the capillary force that holds the liquid at the first end, the liquid is fed to the first tank through the first channel to the second tank. Is done. Therefore, it is not necessary to arrange the first end, which is the boundary between the first tank and the first flow path, outside the first tank or at a position far from the rotational center line force. In this respect, the first and second tanks have a high degree of design freedom regarding the arrangement of the first flow path.
- liquid can be fed only in one direction, that is, in a centrifugal direction in which the liquid is supplied away from a tank on the supply side.
- the first rotation direction that is, the direction in which the first flow path end extends is set to one of the two directions of the clockwise direction and the counterclockwise direction.
- liquid can be fed in either of these two directions.
- the liquid feeding device of the first invention can realize liquid feeding behavior control with a high degree of freedom that is not limited to one direction.
- the liquid flowing through the first flow path toward the first tank force toward the second tank has a flow path wall force as a component that reduces its speed. Receive resistance.
- the flow resistance of the fine flow path is smaller than the applied inertial force, The liquid can be fed in either direction.
- the second tank can be arranged closer to the rotation center line than the first tank, and liquid can be fed from the first tank in the centripetal direction. As a result, more complicated liquid feeding can be easily realized, and the degree of freedom in designing the flow path is increased, so that the liquid feeding device can be easily designed.
- the rotation driving unit suddenly brakes the rotating substrate once rotated in the first rotation direction, that is, the direction in which the first flow path end extends in the first tank force, An inertial force is generated in the liquid at the end of the first flow path. That is, the rotation drive unit rotates the rotating substrate in the first rotation direction, stops the rotating substrate with a speed characteristic (42) having a first acceleration (a2), and The inertial force exceeding the capillary force is generated in the liquid at the end of the first flow path by the acceleration (a2).
- the inertial force in the first rotational direction acts on the liquid held at the first flow path end.
- the inertial force in the first rotation direction that is proportional to the first acceleration when stopping the rotation of the rotating substrate acts on the liquid at the end of the first flow path.
- this inertial force exceeds the capillary force that holds the liquid at the first flow path end, the liquid held at the first flow path end flows into the first flow path, and the first flow path Through the end of the second flow path and into the second tank.
- the angle formed by the first flow path end with the first rotation direction is set to 45 ° or more and + 45 ° or less. Good. Therefore, it is preferable in terms of productivity and the like with a high degree of freedom in design for the direction of the first flow path end.
- the rotation drive unit causes the first flow path to rotate rapidly in the second rotational direction, that is, in the direction opposite to the direction in which the first flow path end extends in the first tank force.
- An inertial force is generated, that is, the rotational drive unit has a second acceleration (bl) in a second rotational direction (Rl, R2) opposite to the first rotational direction (43)
- the rotating substrate is rotated, and an inertial force exceeding the capillary force is generated in the liquid at the end of the first flow path by the second acceleration.
- the second rotation direction is counterclockwise with respect to the rotation center line. Conversely, if the first rotation direction is counterclockwise with respect to the rotation center line in plan view, the second rotation direction is clockwise with respect to the rotation center line.
- the angle formed by the first flow path end with the second rotation direction may be set to 135 ° or more and 235 ° or less. . Therefore, it is preferable in terms of productivity, etc., in which the degree of freedom in design with respect to the direction of the first flow path end is high.
- the second tank may be disposed closer to the rotation center line than the first tank.
- the second flow path end of the first flow path extends along a direction orthogonal to the first rotation direction and is connected to the second tank. . V, when the liquid that has flowed into the second tank is directed to the first tank from the end of the second flow path by the inertial force generated during the sudden braking or sudden rotation of the rotating substrate described above. It is possible to prevent reverse flow in the flow path.
- the first channel end of the first channel has hydrophobicity.
- To have hydrophobicity means that the end of the first channel of the first channel has a hydrophobic material force or has been subjected to a treatment for imparting water repellency. Since the first flow path end has hydrophobicity, the liquid stored in the first tank can be reliably held at the first flow path end. Specifically, as described above, if the channel width of the first channel is sufficiently narrow and the end of the first channel has hydrophobicity, the liquid will be in the first channel due to surface tension. It does not get wet and is held at the end of the first channel.
- the entire first channel has hydrophobicity! /, Or may be! /.
- the liquid can be held over the entire length of the first flow path as long as the liquid can be held more reliably at the end of the first flow path.
- the longer the length of the first flow path the stronger the liquid is held in the first tank. Therefore, when the entire first flow path is hydrophobic, in order to send a certain amount of liquid to the second tank as well as the first tank force, the aforementioned rapid rotation or rapid rotation of the rotating substrate is repeated. There is a need. By controlling the number of repetitions of this rapid braking or rapid rotation, a more accurately determined amount of liquid can be sent to the first tank as well as the second tank.
- the time required to feed a predetermined amount of liquid to the first tank force and the second tank can be controlled.
- This control of the time required for liquid feeding is suitable for liquid feeding when another mixing is performed after a predetermined reaction time after mixing! / Speak.
- the entire rotating substrate may have hydrophobicity. If the entire rotating substrate is made hydrophobic, for example, the entire rotating substrate that is connected to only a specific part such as the end of the first flow path is made of a hydrophobic material, or the entire rotating substrate is made hydrophobic. Therefore, the productivity of the rotating board can be improved.
- the second channel end of the first channel has hydrophilicity U.
- Having hydrophilicity means that the second flow path end of the first flow path is made of a hydrophilic material or has been subjected to a treatment for imparting hydrophilicity. If the end of the second flow path has hydrophilicity, the liquid flowing into the first flow path due to the inertial force generated by the sudden braking or the rapid rotation of the rotating substrate described above is ensured by the wetting effect and the capillary phenomenon. The second channel end force flows into the second tank. Therefore, a desired liquid feeding behavior can be realized more reliably.
- the whole of the first channel except the first channel end may have hydrophilicity. First If the whole of the first channel except the first channel end portion is hydrophilic, the liquid flows into the second tank more reliably by the wetting effect and the capillary phenomenon.
- the liquid stored in the first tank is securely held at the end of the first flow path by the non-wetting effect, and once the first flow is caused by the inertial force generated by sudden braking or sudden rotation of the rotating substrate.
- the first tank and the second tank have hydrophilicity.
- the first flow path end of the first flow path has hydrophobicity, and
- the whole of the first channel except the first channel end has hydrophilicity.
- a plurality of flow path portions (5) including at least the first tank, the second tank, and the first flow path are formed on the circuit board.
- the liquid in the first tank of each flow path part can be obtained by executing the aforementioned rapid braking or sudden rotation of the rotating substrate once. At the same time, it can be sent to the second tank. Therefore, a large number of samples can be processed in a short time by increasing the number of simultaneous parallel processes.
- forming a large number of flow path parts on one rotating substrate contributes to reducing the processing cost of one specimen from the viewpoint of the manufacturing cost of the rotating substrate.
- the liquid feeding device is formed on the rotating substrate and is spatially closed except for the air port, and is formed on the rotating substrate and connected to the first tank.
- the third flow path end extends from the first tank in a second rotation direction opposite to the first rotation direction of the rotating substrate, and the third flow path end is a front end.
- a second flow path (8B) for holding the liquid in the first tank by a capillary force, and the rotation driving unit exceeds the capillary force and faces the second rotation direction.
- the rotary substrate may be rotatable around the rotation center line so that an inertial force acts on the liquid at the end of the third flow path.
- the first flow path end where the first flow path connects to the first tank extends in the first rotation direction
- the second flow path connects to the first tank.
- the end faces the second direction of rotation opposite to the first direction of rotation.
- the first and third flow path ends connected to the first tank extend in opposite directions. Therefore, the direction in which the rotation drive unit rotates the rotating substrate ( (Clockwise or counterclockwise) the first tank force can be sent to the second tank via the first flow path, or the first tank force can be sent to the third tank via the second flow path.
- the first tank force liquid can be fed by selecting one of the second tank and the third tank depending on the direction in which the rotation driving unit rotates the rotating substrate.
- the liquid can be continuously fed to the first tank force, the second tank, and the third tank by switching the direction in which the rotation driving unit rotates the rotating substrate. Therefore, a complex reaction can be realized with one channel group.
- the liquid feeding device is formed on the rotating substrate and is spatially closed except for an air port (7C), formed on the rotating substrate, and the second tank.
- the fifth flow path end extends from the second tank in the first rotation direction of the rotating substrate or in a second rotation direction opposite to the first rotation direction, and
- the flow path end of 5 further includes a third flow path (8D) for holding the liquid in the second tank by a capillary force, and the rotational drive unit exceeds the capillary force and the fifth flow path.
- the rotary substrate may be capable of being driven to rotate about the rotation center line so that an inertial force in a direction in which the flow path end portion extends in the second tank force acts on the liquid.
- Liquid feeding in multiple stages can be realized. More specifically, the first tank force is supplied to the second tank via the first flow path, and the liquid stored in the second device is subsequently transferred to the second tank via the third flow path. Can be sent to 4 tanks. Therefore, a more complicated reaction function can be realized. For example, extraction, mixing, reaction, and detection can be sequentially performed in one channel group.
- the rotation drive unit includes a motor (31) that rotates the rotating substrate, and a speed characteristic application unit (34) that gives a speed characteristic to the motor.
- a DC motor for example, a DC motor, a DC brushless motor, an AC motor, or a stepping motor can be used.
- a stepping motor When a stepping motor is employed, the above-described rotation and rapid braking can be easily realized by simply applying an external drive signal.
- the rotation drive unit includes a rotation speed detector (35) for detecting a rotation speed of the rotating substrate during rotation, and the speed based on the rotation speed detected by the rotation speed detector.
- a rotation speed correction unit (36) for correcting a speed characteristic applied to the motor by the characteristic application unit; May be provided. Since the rotating substrate can be driven to rotate while feeding back the actual rotational speed and correcting the speed characteristics, the liquid supply amount is stabilized and the repeatability of the liquid supply amount is also improved.
- a rotating substrate used in the above-described liquid delivery device. That is, in the second aspect of the present invention, the rotating substrate (2) for the liquid-feeding device that is rotatable at least in the first rotation direction (R1, R2) around the rotation center line (S).
- a first tank that is rotatable in at least a first rotation direction (Rl, R2) around a rotation center line (S) and is spatially closed ( 6A), a second tank (7A) that is spatially closed, a first flow path end (13) that is connected to the first tank, and a second tank that is connected to the second tank.
- the first tank and the second tank communicate with each other, and the first flow path end extends from the first tank to the first of the rotating substrate.
- a rotating substrate having a flow path (8A) that extends in the rotation direction of 1 and that has a flow path (8A) for holding the liquid (9) in the first tank by capillary force at the end of the first flow path is prepared; Rotating the rotating substrate around the rotation center line so that an inertial force that exceeds a capillary force and that is directed to the first rotation direction acts on the liquid at the end of the first flow path.
- the rotational base is rotated with a speed characteristic having a first acceleration in the first rotational direction, and a speed having a second acceleration having an absolute value larger than the first acceleration. Due to the characteristics, the rotation of the rotating substrate in the first rotation direction is stopped, and thereby the inertial force directed to the first rotation direction exceeding the capillary force is applied to the first flow path end. Generate in liquid.
- the magnitude of the first acceleration is 600 rpm / sec
- the magnitude of the second acceleration is lOOO rpm / sec or more and 60000 rpm / sec or less.
- the liquid at the end of the first flow path has a centrifugal property. Centrifugal force acts in the direction of, that is, the rotational center line force. The direction in which this centrifugal force acts is different from the direction in which the first tank force and the first flow path end extend, so that the liquid does not flow into the first flow path but flows into the first tank by capillary force. Retained.
- the rotation of the rotating substrate in the first rotation direction is stopped with a speed characteristic having a second acceleration having an absolute value larger than the first acceleration, the first flow path is stored in the first tank. The liquid held at the end will continue to move in the first direction of rotation due to the law of inertia.
- the rotating substrate is rotated with a speed characteristic having a third acceleration in a second rotating direction opposite to the first rotating direction, thereby exceeding the capillary force.
- An inertial force directed to the rotation direction of 1 is generated in the liquid at the end of the first flow path, and the rotation substrate has an acceleration characteristic having a fourth acceleration having an absolute value smaller than the third acceleration.
- the rotation in the second rotation direction is stopped.
- the magnitude of the third acceleration is 600 rpm / sec
- the magnitude of the fourth acceleration is lOOO rpm / sec or more and 60000 rpm / sec.
- the liquid is injected into the first tank that is in communication with the first tank and the outside of the rotating substrate.
- liquid-feeding device and liquid-feeding method of the present invention not the centrifugal or centripetal force but the rotating substrate.
- Liquid feeding is realized by the fact that the inertial force generated by sudden braking or sudden rotation exceeds the capillary force that holds the liquid. Therefore, liquid feeding behavior control with a high degree of freedom that is not limited to one direction can be realized, the degree of design freedom is high, and the liquid feeding can have various functions.
- FIG. 1 is a schematic configuration diagram showing a liquid delivery device according to a first embodiment of the present invention.
- FIG. 2 is a partially enlarged plan view of the rotary substrate according to the first embodiment of the present invention.
- FIG. 3A is a partial cross-sectional view taken along line III-III in FIG.
- FIG. 3B is a partial cross-sectional view taken along the line ⁇ - ⁇ in FIG.
- FIG. 4 is an exploded perspective view of the rotating substrate according to the first embodiment of the present invention.
- FIG. 6 is a diagram showing a velocity waveform and a rotation direction of the first example of the operation of the liquid delivery device according to the first embodiment of the present invention.
- FIG. 7A is a schematic plan view for explaining the force acting on the solution at the end of the flow path before the rotation of the rotating substrate is started.
- FIG. 7B is a schematic plan view for explaining the force acting on the solution at the end of the channel during the start of rotation of the rotating substrate.
- FIG. 7C is a schematic plan view for explaining the force acting on the solution at the end of the flow path when the rotating substrate suddenly stops.
- FIG. 7D is a schematic plan view for explaining the force acting on the solution at the end of the flow channel during liquid feeding.
- FIG. 9 is a diagram showing a velocity waveform and a rotation direction of a second example of the operation of the liquid delivery device according to the first embodiment of the present invention.
- FIG. 10 is a diagram showing a velocity waveform and a rotation direction in a third example of the operation of the liquid delivery device according to the first embodiment of the present invention.
- FIG. 11 is a flowchart for explaining a fourth example of the operation of the liquid delivery device according to the first embodiment of the present invention. Mouth 1 ⁇ Chiya 1 ⁇ ⁇ .
- FIG. 12 is a diagram showing a velocity waveform and a rotation direction in a fourth example of the operation of the liquid delivery device according to the first embodiment of the present invention.
- FIG. 13 is a diagram showing a velocity waveform and a rotation direction of a fifth example of the operation of the liquid delivery device according to the first embodiment of the present invention.
- FIG. 15 is a diagram showing a velocity waveform and a rotation direction in a sixth example of the operation of the liquid delivery device according to the first embodiment of the present invention.
- FIG. 16 is an exploded perspective view showing a first alternative of the rotating substrate.
- FIG. 17 is an exploded perspective view showing a second alternative of the rotating substrate.
- FIG. 18 is an exploded perspective view showing a third alternative of the rotating substrate.
- the second embodiment off port 1 ⁇ Teya 1 ⁇ Bok for explaining a first example of the operation of the liquid supply apparatus according to the present invention.
- FIG. 20 is a diagram showing a velocity waveform and a rotation direction in the first example of the operation of the liquid delivery device according to the second embodiment of the present invention.
- ⁇ 21A A schematic plan view for explaining the force acting on the solution at the end of the flow path before the rotation of the rotating substrate is started.
- ⁇ 21B A schematic plan view for explaining the force acting on the solution at the end of the flow path when the rotating substrate suddenly rotates.
- FIG. 22 A schematic plan view for explaining the force acting on the solution at the end of the flow path during liquid feeding. ⁇ 22] Openings 1 to -1 for explaining a second example of the operation of the liquid delivery device according to the second embodiment of the present invention.
- ⁇ 23 Diagram showing speed waveform and rotation direction of second example of operation of liquid feeding device according to second embodiment of the present invention.
- FIG. 24 is a diagram showing a velocity waveform and a rotation direction in a third example of the operation of the liquid delivery device according to the second embodiment of the present invention.
- a flow chart for explaining a fourth example of the operation of the liquid delivery device according to the second embodiment of the present invention Mouth 1 ⁇ Chiya 1 ⁇ ⁇ .
- FIG. 26 is a diagram showing a velocity waveform and a rotation direction in a fourth example of the operation of the liquid delivery device according to the second embodiment of the present invention.
- FIG. 27 is a diagram showing a velocity waveform and a rotation direction in a fifth example of the operation of the liquid delivery device according to the second embodiment of the present invention.
- FIG. 29 is a diagram showing a velocity waveform and a rotation direction of a sixth example of the operation of the liquid delivery device according to the second embodiment of the present invention.
- ⁇ 30 A partially enlarged plan view showing a rotating substrate of a liquid delivery device according to a modification of the first and second embodiments.
- 32 A partial enlarged plan view showing a rotating substrate of a liquid delivery device according to a first modification of the third embodiment of the present invention.
- ⁇ 33 A partial enlarged plan view showing a rotating substrate of a liquid delivery device according to a second modification of the third embodiment of the present invention.
- ⁇ 35 Partially enlarged plan view showing a rotating substrate of a liquid delivery device according to a fourth embodiment of the present invention.
- ⁇ 36 A flow chart for explaining the operation of the liquid delivery device according to the fourth embodiment of the present invention.
- FIG. 37 is a diagram showing a velocity waveform and a rotation direction of the operation of the liquid delivery device according to the fourth embodiment of the present invention.
- FIG. 40 Partially enlarged plan view showing the rotating substrate of the liquid delivery device according to the sixth embodiment of the present invention.
- FIG. 41 is a partially enlarged plan view showing a rotating substrate of a liquid delivery device according to a seventh embodiment of the present invention.
- FIG. 42 is a partially enlarged plan view showing a rotating substrate of a liquid delivery device according to a modification of the eighth embodiment of the present invention.
- FIG. 43 is a partially enlarged plan view showing the rotating substrate of the liquid delivery device according to the ninth embodiment of the present invention.
- FIG. 44 is a partially enlarged plan view showing the rotating substrate of the liquid delivery device according to the ninth embodiment of the present invention.
- FIG. 45 is a partially enlarged plan view showing the rotating substrate of the liquid delivery device according to the tenth embodiment of the present invention.
- FIG. 46 is a schematic configuration diagram showing a liquid delivery device according to an eleventh embodiment of the present invention.
- FIG. 47 is a partially enlarged sectional view taken along line XLVII—XLVII in FIG. 46.
- FIG. 48 is a partially enlarged plan view of a rotating substrate according to an eleventh embodiment of the present invention.
- FIG. 1 to 4 show a liquid delivery device 1 according to the first embodiment of the present invention.
- the liquid feeding device 1 includes a rotating substrate 2, a rotating shaft 3 to which the rotating substrate 2 is fixed, and a rotation driving unit 4 that rotationally drives the rotating shaft 3.
- the rotary shaft 3 is arranged in such a posture that its axis (rotation center axis) S extends in the vertical direction, and the rotary substrate 2 is fixed to the upper end side thereof.
- the rotating substrate 2 is circular in plan view, and the center of the rotating substrate 2 is coincident with the axis S of the rotating shaft 3.
- the lower end side of the rotating shaft 3 is connected to a motor 31 described later.
- the outer shape of the rotating substrate 2 can be arbitrarily set so that the flow path part 5 can be accommodated.
- the diameter of the rotating substrate 2 is For example, it is set to about 10 mm or more and 150 mm or less.
- the thickness of the rotating substrate 2 is set to 0.2 mm or more and 20 mm or less.
- the rotation direction of the rotary shaft 3 is defined as a direction orthogonal to the radial direction r of the rotary shaft 3 as indicated by arrows Rl and R2 in FIG.
- the rotation direction is defined as a direction that is orthogonal to a virtual line orthogonal to the axis S of the rotation axis 3 and is on the same plane as the virtual line of parentheses.
- the rotating substrate 2 can rotate in two directions, ie, clockwise R1 and counterclockwise R2 in plan view.
- the flow path part 5 includes a supply tank (first tank) 6A, a tank to be supplied (second tank) 7A, and a flow path (first flow). Road) Equipped with 8A.
- the supply tank 6A is a tank in which a solution or liquid 9 (see, for example, FIG. 7A) to be supplied is stored.
- the supply tank 6A is formed inside the rotary substrate 2 and is spatially closed.
- the rotary substrate 2 is formed with an inlet 11 having a circular cross section that allows the upper wall force of the supply tank 6A to also penetrate the upper surface of the rotary substrate 2 so that the inside of the supply tank 6A communicates with the outside of the rotary substrate 2.
- the inlet 11 is used for injecting the liquid 9 into the supply tank 6A.
- the tank 7A to be supplied is a tank to which the liquid 9 is fed from the supply tank 6A.
- the tank 7A to be supplied is formed inside the rotating substrate 2 and is spatially closed.
- the rotary substrate 2 is formed with an air port 12 having a circular cross section that penetrates the upper surface of the rotating substrate 2 from the upper wall of the supplied tank 7A and communicates the inside of the supplied tank 7A with the outside of the rotating substrate 2. .
- the air port 12 has a function of discharging the air in the supplied tank 7A to the outside of the rotating substrate 2 when the liquid 9 flows into the supplied tank 7A.
- the flow path 8A is a flow path that fluidly connects the supply tank 6A and the supply tank 7A.
- Channel 8 A is formed inside the rotating substrate 2 and is spatially closed. Further, both ends of the flow path 8A, that is, the inlet end (first flow path end) 13 and the outlet end (second flow path end) 14 are connected to the supply tank 6A and the supply tank 7A, respectively. Connected.
- the supply tank 6A has a substantially rectangular shape in plan view, and the inlet end 13 of the flow path 8A is open on the left side wall.
- the inlet 11 is provided at a position closer to the rotary shaft 3 than the inlet end 13. Specifically, the inlet 11 is provided in the upper right corner of the supply tank 6A in FIG.
- the area of the injection port 11 in plan view is set to be sufficiently smaller than the area of the supply tank 6A in plan view.
- the injection port 11 may be left open when the liquid 9 is injected into the supply tank 6A and the rotating substrate 2 is rotated.
- the inlet 11 is provided at a position farther from the rotary shaft 3 than the inlet end 13 or if the area of the inlet 11 is relatively large relative to the area of the supply tank 6A, the rotating substrate In order to prevent the liquid 9 in the supply tank 6A from leaking or splashing from the inlet 11 during the rotation of 2, the inlet 11 needs to be sealed before the rotating substrate 2 is rotated.
- the size and volume of the supply tank 6A need to be determined according to the volume of the sample (liquid 9).
- the volume is preferably 0.1 ⁇ L or more and 100 ⁇ L or less.
- the tank 7 to be supplied will be described in detail.
- the tank 7 to be supplied has a substantially rectangular shape in plan view.
- the tank 7 to be supplied is arranged in the radial direction!: Along with the tank 6, and is further away from the rotation shaft 3 than the tank 6.
- the outlet end 14 of the channel 8 is open on the side wall on the side of the rotary shaft 3 of the tank 7 to be supplied in plan view.
- the area in the plan view of the air port 12 is such that the liquid 9 does not leak or scatter from the air port 12 due to the outward centrifugal force in the radial direction r acting during the rotation of the rotating substrate 2. It is set to be sufficiently smaller than the area in plan view of the supply tank 7A.
- the size and volume of the tank 7A to be supplied need to be determined according to the amount of the sample (liquid 9), but preferably the volume is 0.1 ⁇ L or more and 100 ⁇ L or less.
- the flow path 8mm will be described in detail.
- the flow path 8 ⁇ needs to be a fine channel.
- the volume of the flow path 8A is preferably equal to or smaller than that of the supply tank 6A and the supply tank 7A.
- the width of the flow path 8A is preferably narrower than the width of the supply tank 6A and the supply tank 7A.
- the width of the flow path 8A is preferably about 20 ⁇ m to 2000 ⁇ m, more preferably about 10 m to 100 m.
- the depth of the flow path 8A is preferably shallower than the supply tank 6A and the supply tank 7A.
- the depth of the channel 8A is preferably about 10 ⁇ m to 100 ⁇ m.
- the flow path 8A meanders and has an S shape in plan view.
- the inlet end 13 of the flow path 8A connected to the supply tank 6A has a function as a valve that releasably holds the liquid 9 stored in the supply tank 6A.
- the inlet end 13 extends in the clockwise direction R1 of the two rotation directions of the rotating substrate 2 in the supply tank 6A. By setting the inlet end 13 in this direction, the liquid 9 in the supply tank 6A can be caused to flow into the flow path 8A by the inertial force acting on the liquid 9 when the rotary substrate 2 rotates.
- the outlet end 14 of the flow path 8A connected to the supplied tank 7A is directed toward the supplied tank 7A in the radial direction of the rotating shaft 3 !: that is, the rotating direction of the rotating substrate 2 (clockwise R1 and It extends in a direction perpendicular to the counterclockwise direction R2).
- the flow path wall of the inlet end 13 of the flow path 8A is made of a hydrophobic material or is subjected to a treatment for imparting hydrophobicity. Since the inlet end 13 is hydrophobic, the liquid stored in the supply tank 6A can be reliably held at the inlet end 13 by capillary force.
- the remaining part of the flow path part 5, that is, the wall surface of the supply tank 6A, the wall surface of the supplied tank 7A, and the entire wall surface (including the outlet end part 14) excluding the inlet end 13 of the flow path 8A is hydrophilic. It is made of a functional material or has been treated to impart hydrophilicity. Due to the hydrophilicity of these portions, the liquid flowing into the supply tank 6A force flow path 8A surely flows into the supply tank 7A due to the wetting effect and capillary action.
- hydrophobic material examples include single crystal silicon, amorphous silicon, silicon carbide, silicon carbide, silicon nitride, and other semiconductor materials, alumina, sapphire, forstera.
- Inorganic insulating materials selected from the group consisting of carbonite, carbide, oxide and nitride, polyethylene, ethylene, polypropylene, polyisobutylene, polyethylene terephthalate (PET), unsaturated polyester, fluorine-containing resin, poly Polyvinyl chloride, Polysalt vinylidene, Polyacetate butyl, Polybulal alcohol, Polybutylacetal, Acrylic resin, Polyacrylo-tril, Polystyrene, Acetal resin, Polycarbonate (PC), Polyamide, Phenolic resin, Urea
- organic materials selected from the group such as fat, epoxy resin, melamine resin, styrene 'acrylonitrile copolymer, acrylo-tolyl butadiene styrene copolymer,
- hydrophilic material examples include metal materials such as glass, quartz glass, aluminum, copper, and stainless steel. However, the metal material has a pure surface from which organic substances adhering to the surface have been removed in advance.
- materials that can impart hydrophilicity include surfactants typified by TritonX, and polymer compounds having hydrophilic groups such as hydroxyl groups, sulfonic acid groups, and carboxyl groups. Preferably, a surfactant is used.
- the rotating substrate 2 has a four-layer structure in which an upper surface substrate 21, a flow path substrate 22, a tank substrate 23, and a lower surface substrate 24 are joined in a laminated state.
- the top substrate 21 is provided with an injection port 11 and an air port 12 so as to penetrate in the plate thickness direction.
- the flow path substrate 22 has a shape corresponding to the supply tank 6A, the supplied tank 7A, and the flow path 8A, and is provided with a groove hole 26 penetrating in the plate thickness direction.
- the tank substrate 23 is provided with a groove hole 27 having a shape corresponding to the supply tank 6A and the supply tank 7A and penetrating in the plate thickness direction.
- the bottom substrate 24 constitutes the bottom surface of the supply tank 6A and the supply tank 7A, and is not provided with a groove. Since the multi-layer rotating substrate 2 can be manufactured by bonding the substrates, the productivity is excellent.
- the depth of the flow path 8A is determined by the thickness of the flow path substrate 22, and the depths of the supply tank 6A and the supplied tank 7A are determined by the combined thickness of the flow path substrate 22 and the tank substrate 23. Therefore, a structure in which the depth of the flow path 8A is shallower than the depth of the supply tank 6A and the supplied tank 7A can be easily manufactured, and the depth of the flow path 8A and the depth of the supply tank 6A and the supplied tank 7A Can be set independently of each other.
- channel 8 When the depth of A is about 100 m, the sheet-like flow path substrate 22 obtained by cutting the shapes of the flow path 8A, the supply tank 6A, and the supply tank 7A can be used. Furthermore, since the lower substrate 24 that is the bottom of the supply tank 6A and the supplied tank 7A is separate from the other substrates, it is easy to carry a reaction reagent or the like on the lower substrate 24 before bonding. For example, a reaction reagent can be supported on the bottom of the supply tank 7A for the purpose of reacting with the liquid sent from the supply tank 6A.
- the rotation driving unit 4 will be described with reference to FIG.
- the rotation drive unit 4 includes a motor 31 that is mechanically coupled to the rotation shaft 3 and rotates the rotation shaft 3 and the rotating substrate 2 fixed to the rotation shaft 3, and a drive circuit 32 for the motor 31. Further, the rotation drive unit 4 has a control signal output unit 33 that outputs a control signal and a desired speed characteristic as shown in FIG. 6 based on the control signal input from the control signal output unit 33, for example. A speed characteristic applying unit 34 for supplying to the drive circuit 32 is provided.
- the control signal output unit 33 may be an external computer different from the liquid delivery device 1.
- the motor 31 may be a DC motor, a DC brushless motor, an AC motor, a stepping motor, or the like.
- the stepping motor is suitable because it can easily realize rapid rotation and rapid braking of the rotating substrate 2 only by applying an external drive signal. Further, the DC motor does not particularly require the drive circuit 32. When a DC brushless motor is used as the motor 31, faster and quicker braking can be realized if the drive circuit 32 has a function of applying a reverse rotation voltage.
- the rotation drive unit 4 includes a rotation speed detector 35 that detects the rotation speed of the rotating substrate 2 that is rotating, and a rotation speed control unit 36 that corrects the speed characteristic application unit 34.
- Rotational speed The actual rotation speed of the rotating substrate 2 detected by the detector 36 is sent to the rotation speed control unit 36. If there is a discrepancy between the detected actual rotational speed and the speed characteristic to be given to the motor 31 by the speed characteristic applying part 34, the rotational speed control part 36 corrects the speed characteristic given by the speed characteristic applying part 34. In this way, the rotational speed of the actual rotating substrate 2 is fed back to drive the rotating substrate 2 while correcting the speed characteristics, thereby realizing stable liquid feeding and improving the repeatability of liquid feeding. Can do.
- the liquid 9 is injected from the inlet 11 of the rotating substrate 2 and filled into the supply tank 6A (step A).
- step A the liquid 9 has a surface tension. It is held at the inlet end 13 by the capillary force Fc caused by the above, and the inside of the flow path 8A is not wetted by the liquid 9.
- the flow path wall surface of the inlet end 13 is hydrophobic, it does not get wet with the liquid 9, and the contact angle ⁇ c between the liquid 9 and the flow path wall becomes an obtuse angle, so that the liquid 9 is held in the supply layer 6A.
- Force Fc is generated. Specifically, a surface tension Tl to Tn is generated at the interface between the channel wall surface and the liquid 9, and the resultant capillary force Fc is counterclockwise R2, that is, in the direction of the counter force from the inlet end 13 to the inside of the supply tank 6A. Occurs.
- the size of the capillary force Fc is expressed by the following equation (1).
- T represents the surface tension of water
- 0 c represents the contact angle of the liquid 9 with respect to the channel wall surface
- c represents the perimeter of the channel.
- the capillary force Fc that is a non-wetting phenomenon that holds the liquid 9 in the supply tank 6A at the inlet end 13 is caused by the hydrophobicity of the inlet end 13 as described above. Further, in order to hold the liquid 9 at the inlet end 13 by the capillary force Fc, the flow path 8A needs to be a fine flow path. In the present embodiment, as described above, the width of the flow path 8A is set to about 20 ⁇ m or more and 2000 ⁇ m or less, and the depth of the supply tank 6A is set shallower than the supply tank 6A and the supply tank 7A. The Therefore, the liquid 9 can be reliably held at the inlet end 13 by the capillary force Fc.
- step A ′ if necessary to prevent the liquid 9 from scattering when the rotating substrate 2 rotates, the inlet 11 is sealed (step A ′).
- the closer to the rotation shaft 3 and the injection port 11 at the position the less likely the liquid is scattered with the rotation. Further, the smaller the opening area of the inlet 11 is, the smaller the scattering is as compared with the supply tank 6A.
- step A ′ it becomes difficult to fill the supply tank 6A with the liquid 9. Therefore, by performing step A ′, it is possible to achieve both the reliable injection of the liquid 9 into the supply tank 6A and the prevention of the scattering of the liquid 9 when the rotating substrate 2 rotates.
- the rotary substrate 2 is rotationally driven with the speed characteristic 41 having a constant acceleration al in the clockwise direction R1 (the direction in which the inlet end 13 extends from the supply tank 6A) (step B).
- the rotation speed and direction of the rotating substrate 2 in process B are shown from time 0 to time tl (solid line) in FIG.
- the direction of acceleration al is clockwise R1.
- the rotating substrate 2 starts rotating.
- the rotational speed of the rotating substrate 2 increases with the acceleration al, and reaches the rotational speed RV1 at time tl. As shown in FIG.
- step C the rotating substrate 2 rotating with the speed characteristic 41 is suddenly braked with the speed characteristic 42 having a constant acceleration a2 (step C).
- the rotation speed and rotation direction of the rotating substrate 2 in process C are shown from time tl to time t2 (solid line) in FIG.
- time tl the rotation speed of the rotating substrate 2 starts to decrease from the rotation speed RV1.
- the rotation speed of the rotating board 2 decelerates with acceleration (deceleration when the clockwise direction R1 is positive) a2, and the rotating board 2 stops rotating in the clockwise direction R1 at time t2.
- the velocity waveforms in steps B and C have a single triangular waveform.
- the direction of acceleration al in process A is clockwise R1, while the direction of acceleration a2 in process B is counterclockwise R2.
- the acceleration a2 of the process B is opposite to the acceleration al of the process A.
- the absolute value of the acceleration a2 of the process C is sufficiently larger than the absolute value of the acceleration al of the process B.
- the inertia force Fi acts on the liquid 9.
- the liquid 9 stored in the supply tank 6A and held in the inlet end 13 is determined by the law of inertia. Try to keep moving in the clockwise direction R1.
- the inertial force Fi in the clockwise direction R1 acts on the liquid 9 held at the inlet end 13.
- the magnitude of the inertia force Fi is proportional to the absolute value of the acceleration a2 when the rotation of the rotating substrate 2 is suddenly braked in the process C.
- the relationship of the following formula (2) exists between the inertial force Fi and the acceleration a2.
- m represents the mass of the liquid 9 held at the inlet end 13.
- the minus sign on the right side indicates that the direction of inertial force Fi is opposite to the direction of acceleration a2.
- the inlet end 13 extends in the clockwise direction R1 from the supply tank 6A, and the capillary force Fc acts in the counterclockwise direction R2. Therefore, the inertia force Fi cancels the capillary force Fc and acts in the direction in which the liquid 9 at the inlet end 13 wets the flow path 8A.
- the inertial force Fi exceeds the capillary force Fc that holds the liquid 9 at the inlet end 13, that is, exceeds the pressure exerted on the cross-sectional area of the inlet end 13, the liquid 9 that is held at the inlet end 13 is It flows into channel 8A.
- the absolute value of the acceleration a2 of the process C is large. If this is the case, it is necessary that the rotational speed of the rotating substrate 2 is rapidly reduced in process C.
- the process B is executed for the purpose of rotating the rotating substrate 2 in a stopped state at a certain rotational speed RV1, it is not always necessary to rapidly accelerate the rotating substrate 2 in the process B.
- the acceleration a2 of the process C is set sufficiently larger than the acceleration al of the process B.
- the acceleration al is set to 600 rpmZsec or less, and the acceleration a2 is set in the range of lOOOrpmZsec or more and 60000 rpmZsec or less.
- the duration of process A (from time 0 to time tl in Fig. 6) is determined by the final speed of rotation RV1 and acceleration al.
- the duration of the stroke B (from time tl to time t2 in FIG. 6) is determined by the rotational speed RV1 and acceleration a2 at the start of deceleration.
- Process B acceleration al to lOOrpmZsec Set and accelerate for 30 seconds (from time 0 to time tl).
- the entire flow path 8 ⁇ excluding the inlet end 13, the supply tub 6 ⁇ , and the supplied tub 7 ⁇ have hydrophilicity, so that the liquid 9 at the inlet end 13 is once held by the inertial force Fi.
- the liquid 9 in the supply tank 6A flows to the supply tank 7A through the flow path 8A due to the wettability effect or capillary action.
- the air in the flow path 8A and the supply tank 7A is discharged to the outside of the rotating substrate 2 through the air port 12. Since the liquid 9 reaches every corner of the flow path 8A and the supplied tank 7A by capillary action, the liquid 9 can be poured into the supplied tank 7A reliably and quantitatively.
- the direction of the inlet end 13 is the clockwise direction R1.
- the inlet end 13 has the inertial force Fi. It must extend along the clockwise direction R1, which is the direction of action.
- the direction of the inlet end 13 may be set so that the angle formed with the clockwise direction R1 is ⁇ 45 ° or more and + 45 ° or less. In this way, the degree of freedom in design with respect to the direction of the inlet end 13 is high, which is preferable in terms of productivity.
- the volume of the liquid 9 flowing from the supply tank 6A to the supply tank 7A can be defined by the position of the inlet end 13 with respect to the supply tank 6A. For example, when the inlet end 13 is connected to the outermost circumferential position in the radial direction r of the supply tank 6A, almost all of the liquid 9 in the supply tank 6A is sent to the supply tank 7A via the flow path 8A. To be liquidated.
- the liquid delivery device 1 of the embodiment has various advantages as listed below.
- the inertial force Fi that is not centrifugal force exceeds the capillary force Fc that holds the liquid 9 at the inlet end 13, so that the supply tank 6A is supplied to the supply tank 7A via the flow path 8A. Liquid 9 is delivered. Therefore, it is not necessary to dispose the inlet end 13 which is the boundary between the supply tank 6A and the flow path 8A outside the supply tank 6A or at a position farthest from the rotating shaft 3. In this respect, the degree of freedom in designing the arrangement of the supply tank 6A, the supplied tank 7A, and the flow path 8A is high.
- liquid can be fed only in one direction, that is, in a centrifugal direction away from the liquid supply side tank with respect to the rotation center line.
- the direction in which the inlet end 13 extends is set in the clockwise direction R1 that is the direction of the inertia force Fi.
- the direction in which the inlet end 13 extends can be set to the counterclockwise direction R2 only by changing the sequence for rotationally driving the rotary substrate 2.
- the liquid feeding device 1 of the present embodiment can realize liquid feeding behavior control with a high degree of freedom that is not limited to one direction.
- the inertial force Fi exceeds the capillary force Fc
- the liquid flowing through the flow path 8A by force toward the supply tank 6A also flows into the supply tank 7A as a component that reduces the speed of the flow path wall surface. Force is also subject to flow path resistance.
- the liquid 9 can be fed from the supply tank 6A in the direction of deviation.
- the tank 7A to be supplied is arranged closer to the rotary shaft 3 than the supply tank 6A, and liquid is fed from the supply tank 6A in the centripetal direction. Is also possible. As a result, more complicated liquid feeding can be easily realized, and the degree of freedom in designing the flow path is increased, so that the liquid feeding device can be easily designed.
- the sequence for rotationally driving the rotary substrate 2 is not limited to that shown in Figs. 5 and 6, and there are, for example, the following alternatives.
- FIG. 10 shows a velocity waveform and a rotation direction of the second alternative of the rotation drive sequence.
- this second alternative as conceptually indicated by the broken line ⁇ 1 in FIG. 5, the process B for rotating the rotating substrate 2 in the clockwise direction R1 and the process C for suddenly braking the rotating substrate 2 are repeated. Therefore, the velocity waveform of the rotating substrate 2 exhibits a sawtooth wave shape that is a continuous triangular wave shape force.
- the volume of the liquid 9 stored in the supply tank 6A is larger than the total volume of the flow path 8A, the second If the rotary substrate 2 is rotationally driven in this alternative sequence, the liquid 9 can be intermittently continuously fed from the supply tank 6A to the supply tank 7A. Therefore, the second alternative sequence is effective when a relatively large volume of liquid 9 is fed from the supply tank 6A to the supply tank 7A.
- FIGS. 11 and 12 show a third alternative of the rotation drive sequence.
- This third alternative consists of a process B for rotating the rotating board 2 in the clockwise direction R1 (time 0 to time tl in FIG. 12) and a process C for sudden braking of the rotating board 2 (from time tl to time t2 in FIG. 12).
- step E (interval t2 to time t3 in FIG. 12) is executed to maintain the rotating substrate 2 in a state where the rotation is stopped for a certain time.
- the rotating substrate 2 may be rotated at a constant low speed for a certain time every time the processes B and C are completed.
- FIG. 13 shows the velocity waveform and rotation direction of the fourth alternative of the rotation drive sequence.
- process B, process D, and process C are repeated in this order, as conceptually indicated by the broken line ⁇ 2 in FIG.
- step B, step D, step C, and step E are repeated in this order.
- the rotation of the rotating substrate 2 in the process B and the process C is an equal acceleration motion.
- the rotational acceleration of the rotating substrate 2 may fluctuate in these processes.
- the outer shape of the rotating substrate 2 is not limited to a disk shape, and may be a cube, a rectangular parallelepiped, a polygon such as a pentagon, a star, or the like.
- the shapes of the supply tank 6A and the supply tank 7A are not limited to a substantially rectangular shape, and can be arbitrarily set to a cylinder or the like.
- the cross-sectional shapes of the inlet 11 and the air port 12 are not limited to a circle, and may be other shapes such as an ellipse or a polygon.
- the inlet 11 is not limited to penetrating from the upper wall of the supply tank 6A to the upper surface of the rotating substrate 2, and may be arranged at any place.
- Air port 12 is supplied tank It is not limited to the flow path communicating with the rotating substrate 2 in 7A, and it may be configured by attaching a material that transmits air but does not transmit liquid to a part of the wall surface constituting the supply tank 7A or flow path 8A. Good. In this case, since it is not necessary to consider the leakage of the liquid 9 when the rotating substrate 2 is rotated, the air port 12 can have a relatively large area.
- a first alternative rotating substrate 2 shown in FIG. 16 has a three-layer structure including an upper surface substrate 21, a flow path substrate 22, and a tank substrate 23.
- the top substrate 21 is provided with an inlet 11 and an air inlet 12.
- the flow path substrate 22 is provided with a slot 26 having a shape corresponding to the supply tank 6A, the supplied tank 7A, and the flow path 8A.
- the tank substrate 23 is provided with bottomed depressions 28 corresponding to the supply tank 6A and the supplied tank 7A.
- a second alternative rotating substrate 2 shown in FIG. 17 includes an upper surface substrate 21 provided with an inlet 11 and an air port 12, a flow path substrate 22 provided with a groove hole 26 penetrating in the plate thickness direction, and a supply. It has a three-layer structure consisting of the bottom substrate 24 that is the bottom of the tank 6A and the supply tank 7A.
- a third alternative rotating substrate 2 shown in FIG. 18 includes an upper substrate 29 provided with an inlet 11 and an air port 12, a lower substrate provided with a supply tank 6A, a supplied tank 7A, and a flow path 8A. It has a 30-layer structure.
- FIG. 1 An example of a manufacturing method of the third alternative rotating substrate 2 using photolithography is shown below.
- a photoresist is applied to the lower substrate 30, a flow path 8A is formed by lithography, a supply tank 6A and a supplied tank 7A are formed, an inlet 11 and air are formed on the upper substrate 29.
- the process of forming the opening 12 and the process power of sealing the upper part of the flow path part 5 of the lower substrate 30 with the upper substrate 19 are also provided.
- the process of forming the flow path 8A will be described in order.
- a negative thick film photoresist is applied to a glass substrate that has been cleaned.
- a resist suitable for the size of the flow path is selected.
- K MPR1030 (Yuyaku Microchem) and the like are excellent in the degree of thick film formation and aspect ratio.
- a spin coater such as a spin coater is used.
- spin coating K MPR1030 with a spin coater perform 10 seconds at 500 rpm pre-rotation and 30 seconds at main rotation lOOOOrpm.
- the film thickness can be changed by changing the rotation speed of the main rotation. For example, 57 ⁇ m at the main rotation lOOOrpm, 48 ⁇ m at 1070rpm, etc. Is possible.
- pre-beta for 20 minutes at 95 ° C to expose the mask with the flow path and tank drawn. The exposure intensity and the exposure time are corrected appropriately according to the film thickness.
- the exposure intensity is preferably about 1700mjZcm2.
- PEB Post Exposure Bake
- the flow path and tank pattern are formed by photolithography.
- the tank portion of the lower substrate 30 is formed by cutting or sandblasting.
- the upper substrate 29 with the inlet 11 and the air port 12 opened is attached to the lower substrate 30.
- the entire flow path 8A may have hydrophobicity.
- the liquid 9 can be held over the entire length of the flow path 8A as long as the liquid 9 can be held more reliably at the inlet end 13.
- the longer the length of the flow path 8A the stronger the liquid 9 can be held in the supply tank 6A. Therefore, in the case where the entire first flow path is hydrophobic, a certain amount of the liquid 9 is sent to the supply tank 7A from the supply tank 6A as shown in FIG. 10, FIG. 12, FIG. 13, and FIG. Thus, it is necessary to repeat the process for generating the inertial force.
- a more precisely defined amount of the liquid 9 can be sent from the supply tank 6A to the supply tank 7A. Further, by adjusting the time for repeating the step of generating the inertial force, it is possible to control the time required to feed a predetermined amount of the liquid 9 from the supply tank 6A to the supply tank 7A. This control of the time required for liquid feeding is suitable for liquid feeding when another mixing is performed after a predetermined reaction time after mixing.
- the entire flow path part 5 may be hydrophobic.
- Productivity can be improved because the entire flow path part 5 is made of a hydrophobic material or a treatment for imparting hydrophobicity to the entire flow path part 5 is performed.
- the entire rotating substrate 2 may be hydrophobic.
- Productivity can be further improved because the entire rotating substrate 2 can be made of a hydrophobic material or can be treated to impart hydrophobicity to the entire rotating substrate 2.
- the structure of the liquid delivery device 1 according to the second embodiment of the present invention is the same as that of the first embodiment described with reference to FIGS. Accordingly, reference is made to these drawings in the following description.
- the liquid feeding device 1 of the second embodiment is different from the first embodiment in the process or sequence of rotating the rotating substrate 2 executed by the rotation driving unit 4.
- the rotation drive unit 4 rotates the rotating substrate 2 in the clockwise direction R1, which is the direction in which the inlet end 13 extends (step B), and then suddenly brakes this rotation. By doing so, an inertial force Fi is generated to release the liquid 9 held by the inlet end 13 mm.
- the rotation drive unit 4 causes the rotating substrate 2 to suddenly rotate (rapid acceleration) in the counterclockwise direction R2 opposite to the direction in which the inlet end 13 extends, and the inertia generated at that time is generated. Release the retention of liquid 9 by inlet end 13 with force Fi.
- a liquid feeding method using the liquid feeding apparatus 1 of the second embodiment will be described.
- the liquid 9 is injected from the injection port 11 of the rotating substrate 2 and filled in the supply tank 6A (step A), and the injection port 11 is sealed if necessary.
- the capillary force Fc in the counterclockwise direction R2 opposite to the direction in which the inlet end 13 extends (clockwise R1) is applied to the liquid 9 at the inlet end 13.
- the liquid 9 in the supply tank 6A is held at the inlet end 13 by this capillary force Fc.
- Step F the rotating substrate 2 in a stopped state is suddenly rotationally driven with a speed characteristic 43 having a constant acceleration bl in the counterclockwise direction R2 (opposite to the direction in which the inlet end 13 extends from the supply tank 6A).
- Step F From time 0 to time tl (solid line) in FIG. 20, the rotational speed and direction of the rotating substrate 2 in process F are shown.
- the direction of acceleration bl is counterclockwise R2.
- the rotating substrate 2 starts rotating.
- the rotational speed of the rotating substrate 2 increases with the acceleration bl, and reaches the rotational speed RV2 at time tl.
- the counterclockwise rotation R2 causes an inertial force Fi to act on the liquid 9 at the inlet end 13.
- the liquid 9 stored in the supply tank 6A and held at the inlet end 13 should remain stopped by the law of inertia.
- the inertial force Fi in the clockwise direction R1 acts on the liquid 9 held at the inlet end 13.
- the magnitude of the inertia force Fi is proportional to the absolute value of the acceleration bl when rotating the rotation of the rotating substrate 2 in the process F.
- This inertia force Fi cancels the capillary force Fc and acts in the direction in which the liquid 9 at the inlet end 13 wets the flow path 8A.
- the force Fi exceeds the capillary force Fc, the liquid 9 held at the inlet end 13 flows into the flow path 8A.
- step G the rotating substrate 2 is braked with a speed characteristic 44 having a constant acceleration b2 (step G).
- the rotational speed and direction of the rotating substrate 2 in process G are shown.
- the rotation speed of the rotating substrate 2 starts to decrease from the rotation speed RV2.
- the rotation speed of the rotating board 2 is reduced by acceleration (deceleration when the counterclockwise direction R2 is set to a positive direction) b2, and the rotation of the rotating board 2 in the counterclockwise direction R2 stops at time t2.
- the direction of acceleration bl in process F is counterclockwise R2, while the direction of acceleration b2 in process G is clockwise R1. In other words, the acceleration b2 of the process G is opposite to the acceleration bl of the process F.
- the absolute value of the acceleration bl of the process F is large.
- the rotating substrate 2 needs to be rapidly rotated in the process F.
- the process G is executed simply for the purpose of stopping the rotation of the rotating substrate 2, a rapid deceleration is not necessarily required.
- the acceleration bl of the process F is set to be sufficiently larger than the acceleration b2 of the process G.
- acceleration bl is set in the range of lOOOrpmZsec or more and 60000rpmZsec or less, and acceleration b2 is set to 600rpmZsec or less.
- the duration of process F (time 0 to time tl in Fig. 20) is determined by the rotational speed RV2 and acceleration bl that are reached from the stop state.
- the duration of process G (from time tl to time t2 in FIG. 20) is determined by the rotational speed RV2 and acceleration b2 at the start of deceleration.
- the supply tank 6A force can be realized quickly by simply rotating the rotating substrate 2 in the process G. Subsequent reaction time is short! / Speak.
- FIG. 22 and FIG. 23 show a first alternative of the rotation drive sequence in the second embodiment.
- Step H from time tl to time t2 in FIG. 23 for rotating the rotating substrate 2 at a constant rotational speed RV2 for a certain period of time is executed.
- FIG. 24 shows a speed waveform and a rotation direction of the second alternative of the rotation drive sequence.
- this second alternative as shown conceptually by the broken line ⁇ 3 in FIG. 19, the process F for rapidly rotating the rotating board 2 in the counterclockwise direction R2 and the process G for braking the rotating board 2 are repeated. Since intermittent continuous liquid feeding is possible, it is effective when a relatively large volume of liquid 9 is fed from the supply tank 6A to the supply tank 7A.
- FIG. 25 and FIG. 26 show a third alternative of the rotation drive sequence.
- This third alternative consists of a process F (time t1 to time t2 in FIG. 26) for rotating the rotating substrate 2 in the counterclockwise direction R2 and a process G (time t2 to time t3 in FIG. 26) for braking the rotating board 2. ), And every time step F and step G are completed, an interpal step I (from time t3 to time t4 in FIG. 12) is executed that keeps the rotating substrate 2 stopped for a certain period of time. . By providing the interval step I, intermittent continuous liquid feeding can be performed while the reaction of the liquid 9 in the supply tank 7A is performed.
- FIG. 27 shows a velocity waveform and a rotation direction of the fourth alternative of the rotation drive sequence.
- process F, process H, and process G are repeated in this order, as conceptually shown by the broken line ⁇ 4 in FIG.
- Step F, Step H, Step G, and Step I are repeated in this order.
- FIG. 30 shows a liquid delivery device 1 according to a modification of the first and second embodiments.
- the inlet end 13 of the flow path 8A extends in the clockwise direction R1 from the supply tank 6A.
- the inlet end 13 of the flow path 8A extends in the counterclockwise direction R2 from the supply tank 6A.
- the liquid feeding device 1 of this modification is used to release the holding of the liquid 9 at the inlet end 13 by the inertia force Fi generated by the sudden braking (step C). 9, 10, 12, 13, and 15!
- the direction of rotation of the rotating substrate 2 in step ⁇ and step C (step D, if executed) Must be set counterclockwise R2.
- the inertia force Fi generated by the rapid rotation (process F) is released to release the holding of the liquid 9 at the inlet end 13 as shown in FIGS. 20, 23, 24, 26, and 26.
- the rotation direction of the rotating substrate 2 in the process F and the process G (process H if executed) must be set to the clockwise direction R1. .
- the direction of the inlet end 13 and the direction of rotation of the rotary substrate 2 have the following general relationship.
- the inertia force Fi is generated by rapid rotation (process F)
- the tank 7A to be supplied is arranged inside the rotary substrate 2, that is, at a position closer to the rotary shaft 3 than the supply tank 6A.
- the inlet end 13 of the flow path 8A extends from the supply tank 6A in the clockwise direction R1. Whether the rotating substrate 2 rotating in the clock direction R1 is braked suddenly as in the first embodiment (step C in FIGS. 6 and 8), or the rotating substrate 2 is rotated in the counterclockwise direction R2 as in the second embodiment. When suddenly rotated (step F in Figs. 20 and 22), an inertial force Fi in the clockwise direction R1 is generated.
- FIG. 32 shows a first modification of the third embodiment.
- the inlet end 13 extends in the counterclockwise direction R2 from the supply tank 6A. Therefore, suddenly brake the rotating substrate 2 rotating in the counterclockwise direction R2.
- the rotating substrate 2 is suddenly rotated in the clockwise direction Rl (step C in FIGS. 6 and 8) (step F in FIGS. 20 and 22)
- the inertia force Fi in the counterclockwise direction R2 is generated.
- the holding of the liquid is released by the inlet end 13 by this inertial force Fi, the liquid 9 flows through the flow path 8A toward the rotating shaft 3 and flows into the supply tank 7A.
- the flow path 8A extends inward in the radial direction r when meandering.
- the supply tank 6A and the supplied tank 7A are arranged side by side in a direction orthogonal to the radial direction r.
- the flow path part 5 includes an additional supply tank (third tank) 7B in addition to the supply tank 6A and the supply tank 7A. Similar to the supplied tank 7A, the supplied tank 7B is formed in a spatially closed state on the rotating substrate 2 except for the air port 12.
- the flow path part 5 includes a flow path (second flow path) 8B for connecting the supply tank 6A and the supply tank 7B in addition to the flow path 8A for communicating the supply tank 6A and the supply tank 7A. Similar to the flow path 8A, the flow path 8B is formed on the rotating substrate 2 in a spatially closed state.
- Both the supplied tank 7A and the supplied tank 7B are arranged outside the supply tank 6A in the radial direction!:.
- the tank 7A to be supplied is arranged on the R1 side in the clockwise direction (left side in FIG. 35) than the tank 6A. Therefore, the inlet end 13 of the flow path 8A extends in the clockwise direction R1 from the supply tank 6A.
- the tank 7B to be supplied is arranged on the counterclockwise direction R2 side (right side in FIG. 35) than the tank 6A. Accordingly, the inlet end (fourth channel end) 13 of the channel 8B extends from the supply tank 6A in the counterclockwise direction R2.
- the outlet end 14 of the channel 8A extends outward in the radial direction r to prevent backflow.
- the outlet end portion (fifth flow passage end portion) 14 of the flow path 8B also extends outward in the radial direction r.
- Each of the inlet end portions 13 of the flow channel 8A and the flow channel 8B has hydrophobicity.
- the parts other than the inlet end 13 of the flow path 8A and the flow path 8B, the supply tank 6A, the supplied tank 7A, and the supplied tank 7B have hydrophilicity.
- Fig. 36 and Fig. 37 show examples of continuous switching of the liquid feeding direction.
- the rotating substrate 2 is rotationally driven in the clockwise direction R1 with a speed characteristic 41 having a constant acceleration al (step B in FIG. 37). Time 0 to time tl). Subsequently, the rotating substrate 2 rotating with the speed characteristic 41 is suddenly braked with the speed characteristic 42 having a constant acceleration a2 (step C, time tl to time t2 in FIG. 37).
- the inertial force Fi in the clockwise direction R1 acts on the liquid 9 at the inlet end 13 of the flow path 8A, and the liquid 9 in the supply tank 6A flows into the supply tank 7A through the flow path 8A.
- the rotation direction of the rotating substrate 2 is reversed from the clockwise direction R1 to the counterclockwise direction R2, and the process B (time t2 to time t3 in FIG. 37) and the process C (time t3 to time t4 in FIG. 37) are executed. To do.
- the inertia force Fi in the counterclockwise direction R2 acts on the liquid 9 at the inlet end 13 of the flow path 8B, and the liquid 9 in the supply tank 6A flows. It flows into the tank 7B through the path 8B.
- the supply tank 6A and the supply tank 7A and the supply tank 7B arranged on the left and right sides thereof are arranged in a direction perpendicular to the radial direction r of the rotary shaft 3. They are arranged side by side.
- the flow path part 5 includes an additional supply tank (third tank) 7B in addition to the supply tank 6A and the supply tank 7A.
- the tank 7B to be supplied is formed in a spatially closed state except for the air port 12 on the rotating substrate 2.
- the flow path part 5 includes a flow path (second flow path) 8B for connecting the supply tank 6A and the supply tank 7B in addition to the flow path 8A for communicating the supply tank 6A and the supply tank 7A. Similar to the flow path 8A, the flow path 8B is formed on the rotating substrate 2 in a spatially closed state.
- Both the supplied tank 7A and the supplied tank 7B are arranged outside the supply tank 6A in the radial direction!:. Both the tank 7A and the tank 7B to be supplied are arranged on the R1 side in the clockwise direction (left side in FIG. 39) from the tank 6A. Therefore, the inlet end 13 of the flow path 8A extends in the clockwise direction R1 from the supply tank 6A. Similarly, the inlet end (fourth channel end) 13 of the channel 8B also extends in the clockwise direction R1 from the supply tank 6A. The inlet end 13 of the channel 8A is closer to the center of rotation than the inlet end 13 of the channel 8B.
- the cross-sectional area of the inlet end 13 of the flow path 8A is larger than the cross-sectional area of the inlet end 13 of the flow path 8B. Therefore, the pressure per unit area generated by the capillary force Fca applied to the inlet end 13 of the flow path 8A is always higher than the pressure per unit area generated by the capillary force Feb applied to the inlet end 13 of the flow path 8B. Get smaller.
- the outlet end 14 of the channel 8A extends outward in the radial direction r to prevent backflow.
- the outlet end portion (fifth flow passage end portion) 14 of the flow path 8B also extends outward in the radial direction r.
- Each of the inlet end portions 13 of the flow channel 8A and the flow channel 8B has hydrophobicity. Portions other than the inlet end portion 13 of the flow path 8A and the flow path 8B, the supply tank 6A, the supplied tank 7A, and the supplied tank 7B have hydrophilicity.
- the capillary force Fca applied to the inlet end 13 of the flow path 8A which is always greater than the capillary force Feb, is always exceeded, so the flow path liquid 9 passes through the flow path 8A. It flows from the supply tank 6A to the supplied tank 7A, and at the same time, flows from the supply tank 6A to the supplied tank 7B through the flow path 8B. Moreover, when the water level of the amount of solution in the supply tank 6A is between the inlet end 13 of the flow path 8A and the inlet end 13 of the flow path 8B, the liquid 9 passes through the flow path 8A and is supplied to the supply tank 6A.
- Liquid 9 can be sent selectively to
- the liquid delivery device 1 according to the sixth embodiment of the present invention shown in FIG. 40 includes two supply tanks, that is, supply tanks 6A and 6B.
- the supply tanks 6A and 6B are arranged side by side in a direction orthogonal to the radial direction r.
- the supplied tank 7A In the supplied tank 7A, the supplied tank 7A is arranged at a position farther from the rotating shaft 3 than the supplied tanks 6A and 6B.
- the inlet end 13 of the flow path 8A that connects the supply tank 6A and the supply tank 7A extends in the clockwise direction R1.
- the supply tank 6B communicates with the supply tank 7A through a spatially closed flow path 8C formed in the rotating substrate 2.
- the inlet end 13 of the channel 8C extends in the counterclockwise direction R2.
- Both the inlet ends 13 of the flow path 8A and the flow path 8C are hydrophobic. Further, the outlet end portions 14 of the flow channel 8A and the flow channel 8C both extend outward in the radial direction r. Further, the portions other than the inlet end 13 of the flow path 8A and the flow path 8C, the supply tanks 6A and 6B, and the supply tank 7A have hydrophilicity.
- a supply tank (fourth tank) 7C is further connected to a supply tank 7A communicated with the supply tank 6A through a flow path 8A.
- Supply tank 6A and supply tanks 7A and 7C are arranged side by side in the radial direction r. Specifically, the supplied tank 7A is arranged outside the supply tank 6A, and the supplied tank 7C is arranged outside the supplied tank 7A.
- the inlet end 13 of the flow path 8A that connects the supply tank 6A and the supply tank 7A extends in the clockwise direction R1. Further, the outlet end 14 of the channel 8A extends outward in the radial direction r.
- the inlet end (fifth flow path end) 13 of the flow path (third flow path) 8D connecting the supplied tank 7A and the supplied tank 7C also extends in the clockwise direction R1. Further, the outlet end (sixth flow path end) 14 of the flow path 8D extends outward in the radial direction r.
- the inlet ends 13 of the flow paths 8A and 8D are both hydrophobic. Further, the portions other than the inlet end 13 of the flow paths 8A and 8D, the supply tank 6A, and the supplied tanks 7A and 7C have hydrophilicity.
- each liquid feeding can be provided with a function.
- the solution can have more complicated reaction functions such as extraction, mixing, reaction, and detection.
- a supply tank 7D may be further provided on the downstream side of the supply tank 7C, and the number of stages of multistage liquid feeding may be four or more.
- the inlet end 13 of the flow path 8A extends in the clock direction R1, whereas the inlet end 13 of the flow path 8D is supplied.
- the tank 7A has the same structure as the seventh embodiment (see FIG. 41) except that the force of the tank 7A also extends in the counterclockwise direction R2.
- the flow path 8A and the inlet end 13 of the flow path 8D extend in opposite directions.
- the liquid to be supplied is supplied when liquid is supplied from the supplied tank 7A to the supplied tank 7C. It is possible to more reliably prevent the liquid 9 from flowing backward from the tank 7A to the supply tank 6A.
- the liquid delivery device 1 of the ninth embodiment of the present invention shown in FIG. 44 has a configuration in which two further supplied tanks 7D and 7E are provided on the downstream side of the supplied tank 7B of the fourth embodiment (see FIG. 35). Yes.
- the to-be-supplied tank 7B and the to-be-supplied tank 7D are connected by the flow path 8E, and the to-be-supplied tank 7D and the to-be-supplied tank 7E are connected by the flow path 8F.
- Both the inlet ends 13 of the flow paths 8E and 8F extend in the counterclockwise direction R2. Yes.
- the inertia in the counterclockwise direction R2 is obtained. Force Fi is generated. Due to the inertia force Fi in the counterclockwise direction R2, the liquid 9 can be sent in multiple stages from the supply tank 6A to the supply tank 7E through the supply tanks 7B and 7D. According to the arrangement of the tank of the ninth embodiment, for example, the liquid 9 in the supply tank 6A is subjected to various treatments in the supplied tanks 7B, 7D, and 7E, and the remaining liquid 9 is discarded to the supplied tank 7A. Control is possible.
- the liquid delivery device 1 of the tenth embodiment of the present invention shown in FIG. 45 includes, in addition to the supplied tank 7C, the supplied tank 7A of the sixth embodiment (FIG. 41), two more tanks, that is, the supplied tank 7F. , 7G is connected.
- the flow path 8G for connecting the supplied tank 7A and the supplied tank 7F and the flow path 8H for connecting the supplied tank 7A and the supplied tank 7G both have an inlet end 13 extending in the clockwise direction R1. ing. Further, the outlet ends 14 of the flow paths 8G and 8H both extend outward in the radial direction r. Three or more tanks may be connected to one tank like the supplied 7C, 7F, 7G in the present embodiment.
- the liquid delivery device 1 of the eleventh embodiment of the present invention shown in FIGS. 46 to 48 is different from the first embodiment in the structure of the rotating substrate 2.
- the rotating substrate 2 includes a rotating substrate body 51 and a chip body 52 that can be attached to and detached from the rotating substrate body 51.
- the flow path part 5 is not formed in the rotating substrate body 51, and the flow path part 5 is formed in each chip body 52.
- rotation A plurality of receiving holes 53 for receiving the chip bodies 52 are formed on the upper surface side of the substrate body 51.
- the receiving holes 53 are arranged radially with respect to the rotating shaft 3.
- a recess 53 a is formed on the outer wall surface of the accommodation hole 53.
- the chip body 52 By disposing a part of the chip body 52 in the recess 53 a, the chip body 52 is held in the accommodation hole 53. In particular, when the rotating substrate 2 rotates, the chip body 52 is biased toward the recess 53a by centrifugal force, so that the chip body 52 is securely held by the rotating substrate body 51 without dropping from the receiving hole 53. .
- the liquid-feeding device and liquid-feeding method of the present invention are useful as a drive source for a device that analyzes biological components such as proteins contained in biological samples, particularly blood.
- the blood sample is subjected to blood cell plasma separation in the previous stage, and the protein contained in the plasma is used as the sample to be measured.
- the centrifugal force using centrifugal force is also preferably used for the separation.
- the liquid feeding method using a rotating substrate can be easily combined with blood cell plasma separation using centrifugal force.
- functions such as reaction, purification, and detection can be imparted by carrying reagents or the like in each tank or performing physical operations such as heating on each tank.
- liquid feeding method of the present invention it is possible to perform liquid feeding regardless of the conventional centrifugal direction, so that the flow path tank can be easily integrated with the blood cell plasma separation.
- blood cell plasma separation is performed by utilizing the difference in density between blood cells and plasma due to centrifugal force, so that high density blood cells always settle in the centrifugal direction.
- the conventional liquid feeding method when the separated plasma is sent to another tank, the blood cell component that has settled in the centrifugal direction is prevented from going! Since the end can be set in the direction of rotation regardless of the centrifugal outside, easily separated plasma components can be fed.
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Abstract
Description
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US7749449B2 (en) * | 2006-07-11 | 2010-07-06 | Panasonic Corporation | Liquid delivery apparatus and liquid delivery method |
JP2008064753A (ja) * | 2006-09-05 | 2008-03-21 | Samsung Electronics Co Ltd | 遠心力基盤の蛋白質検出用の微細流動装置及びそれを備える微細流動システム |
JP2009145111A (ja) * | 2007-12-12 | 2009-07-02 | Seiko Epson Corp | 生体物質検出装置、反応用チップ、および生体物質検出方法 |
JP2009180707A (ja) * | 2008-02-01 | 2009-08-13 | Nippon Telegr & Teleph Corp <Ntt> | フローセル |
WO2011013331A1 (ja) * | 2009-07-27 | 2011-02-03 | ベックマン コールター, インコーポレイテッド | マイクロ流体チップ |
JP2014510922A (ja) * | 2011-03-28 | 2014-05-01 | バイオサーフィット、 ソシエダッド アノニマ | 液体のスイッチング、ドーシングおよびポンピング |
JP2011141299A (ja) * | 2011-04-25 | 2011-07-21 | Nippon Telegr & Teleph Corp <Ntt> | フローセル |
JP2013088211A (ja) * | 2011-10-16 | 2013-05-13 | Japan Advanced Institute Of Science & Technology Hokuriku | 微細流路のバルブ構造、これを備えるマイクロデバイス、マイクロセンサ及びマイクロリアクター及び微細流路の送液制御方法 |
JP2013195370A (ja) * | 2012-03-22 | 2013-09-30 | Saitama Univ | 液体分割方法及び液体分割用キット |
WO2016052601A1 (ja) * | 2014-09-30 | 2016-04-07 | ブラザー工業株式会社 | 検査装置、検査プログラム、検査方法 |
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US10786812B2 (en) | 2016-05-09 | 2020-09-29 | Sumitomo Rubber Industries, Ltd. | Medical analysis device and cell analysis method |
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JP2021004899A (ja) * | 2016-06-21 | 2021-01-14 | ユニスト(ウルサン ナショナル インスティテュート オブ サイエンス アンド テクノロジー) | 微細流体装置 |
US11484883B2 (en) | 2016-06-21 | 2022-11-01 | Unist (Ulsan National Institute Of Science And Technology) | Microfluidic device |
JP2019144133A (ja) * | 2018-02-21 | 2019-08-29 | 国立研究開発法人産業技術総合研究所 | アッセイ装置 |
JP7016152B2 (ja) | 2018-02-21 | 2022-02-04 | 国立研究開発法人産業技術総合研究所 | アッセイ装置 |
Also Published As
Publication number | Publication date |
---|---|
US7497996B2 (en) | 2009-03-03 |
JPWO2006077695A1 (ja) | 2008-06-19 |
US20070003437A1 (en) | 2007-01-04 |
JP3910208B2 (ja) | 2007-04-25 |
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