WO2002103813A1 - Element emetteur de lumiere a semi-conducteur au nitrure, et dispositif emetteur de lumiere utilisant cet element - Google Patents
Element emetteur de lumiere a semi-conducteur au nitrure, et dispositif emetteur de lumiere utilisant cet element Download PDFInfo
- Publication number
- WO2002103813A1 WO2002103813A1 PCT/JP2002/005998 JP0205998W WO02103813A1 WO 2002103813 A1 WO2002103813 A1 WO 2002103813A1 JP 0205998 W JP0205998 W JP 0205998W WO 02103813 A1 WO02103813 A1 WO 02103813A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- layer
- light emitting
- nitride semiconductor
- conductive
- emitting element
- Prior art date
Links
- 150000004767 nitrides Chemical class 0.000 title abstract 5
- 239000004065 semiconductor Substances 0.000 title abstract 5
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/14—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure
- H01L33/145—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure with a current-blocking structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
- H01L2224/0601—Structure
- H01L2224/0603—Bonding areas having different sizes, e.g. different heights or widths
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48257—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a die pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/49105—Connecting at different heights
- H01L2224/49107—Connecting at different heights on the semiconductor or solid-state body
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Led Devices (AREA)
- Semiconductor Lasers (AREA)
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003506019A JP3956941B2 (ja) | 2001-06-15 | 2002-06-17 | 窒化物半導体発光素子及びそれを用いた発光装置 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2001/005097 WO2002103811A1 (fr) | 2001-06-15 | 2001-06-15 | Appareil semi-conducteur d'emission de lumiere |
JPPCT/JP01/05097 | 2001-06-15 | ||
JP2001300928 | 2001-09-28 | ||
JP2001-300928 | 2001-09-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2002103813A1 true WO2002103813A1 (fr) | 2002-12-27 |
Family
ID=26345092
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2002/005998 WO2002103813A1 (fr) | 2001-06-15 | 2002-06-17 | Element emetteur de lumiere a semi-conducteur au nitrure, et dispositif emetteur de lumiere utilisant cet element |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP3956941B2 (fr) |
WO (1) | WO2002103813A1 (fr) |
Cited By (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005018008A1 (fr) * | 2003-08-19 | 2005-02-24 | Nichia Corporation | Dispositif a semi-conducteurs |
JP2005228924A (ja) * | 2004-02-13 | 2005-08-25 | Toshiba Corp | 半導体発光素子 |
WO2005106979A1 (fr) * | 2004-04-28 | 2005-11-10 | Mitsubishi Cable Industries, Ltd. | Élément luminescent semi-conducteur à nitrure |
JPWO2004082034A1 (ja) * | 2003-03-14 | 2006-06-15 | 住友電気工業株式会社 | 半導体装置 |
US7148514B2 (en) | 2003-12-23 | 2006-12-12 | Samsung Electro-Mechanics Co., Ltd. | Nitride semiconductor light emitting diode and fabrication method thereof |
JP2007036078A (ja) * | 2005-07-29 | 2007-02-08 | Showa Denko Kk | pn接合型発光ダイオード |
US7227879B2 (en) | 2003-06-27 | 2007-06-05 | Nichia Corporation | Nitride semiconductor laser device having current blocking layer and method of manufacturing the same |
WO2007117035A1 (fr) * | 2006-04-12 | 2007-10-18 | Rohm Co., Ltd. | Element electroluminescent de nitrure semi-conducteur et son procede de fabrication |
JP2008047854A (ja) * | 2006-07-19 | 2008-02-28 | Mitsubishi Cable Ind Ltd | 窒化物半導体発光ダイオード素子 |
JP2009038355A (ja) * | 2007-07-10 | 2009-02-19 | Toyoda Gosei Co Ltd | 発光装置 |
JP2009038377A (ja) * | 2007-07-31 | 2009-02-19 | Epivalley Co Ltd | Iii族窒化物半導体発光素子 |
GB2454655A (en) * | 2007-11-09 | 2009-05-20 | Sharp Kk | Nitride structures with AlInN current confinement layers |
US7635875B2 (en) | 2001-07-24 | 2009-12-22 | Nichia Corporation | Semiconductor light emitting device |
JP2010050318A (ja) * | 2008-08-22 | 2010-03-04 | Stanley Electric Co Ltd | 半導体発光装置の製造方法及び半導体発光装置 |
JP2011233927A (ja) * | 2011-08-02 | 2011-11-17 | Oki Data Corp | 半導体装置、led装置、ledヘッド、及び画像形成装置 |
WO2012133425A1 (fr) * | 2011-03-29 | 2012-10-04 | 日本ゼオン株式会社 | Élément d'émission de lumière et appareil d'éclairage |
JP2012209107A (ja) * | 2011-03-29 | 2012-10-25 | Nippon Zeon Co Ltd | 面発光素子及び照明器具 |
JP2012212508A (ja) * | 2011-03-30 | 2012-11-01 | Nippon Zeon Co Ltd | 発光素子及び照明器具 |
US8338853B2 (en) | 2005-08-25 | 2012-12-25 | Toyota Jidosha Kabushiki Kaisha | Substrate for forming light-emitting layer, light emitter and light-emitting substance |
JP2014197704A (ja) * | 2006-12-11 | 2014-10-16 | ザ リージェンツ オブ ザ ユニバーシティ オブ カリフォルニア | 発光デバイスおよび発光デバイスの作製方法 |
EP2942823A1 (fr) * | 2009-12-09 | 2015-11-11 | LG Innotek Co., Ltd. | Dispositif électroluminescent, procédé de fabrication du dispositif électroluminescent, paquet électroluminescent et système d'éclairage |
US9978903B2 (en) | 2015-11-26 | 2018-05-22 | Nichia Corporation | Light-emitting element and method for producing the same |
JP2018519662A (ja) * | 2015-06-18 | 2018-07-19 | オスラム オプト セミコンダクターズ ゲゼルシャフト ミット ベシュレンクテル ハフツングOsram Opto Semiconductors GmbH | 窒化物半導体部品の製造方法および窒化物半導体部品 |
JP2018186213A (ja) * | 2017-04-27 | 2018-11-22 | スタンレー電気株式会社 | 垂直共振器型発光素子 |
US10347808B2 (en) | 2015-08-31 | 2019-07-09 | Nichia Corporation | Light emitting device and method of manufacturing the light emitting device |
JP2021114490A (ja) * | 2020-01-16 | 2021-08-05 | 国立大学法人島根大学 | 光電変換素子 |
CN113684539A (zh) * | 2016-12-27 | 2021-11-23 | 住友化学株式会社 | Iii族氮化物层叠体的制造方法、检查方法、以及iii族氮化物层叠体 |
Citations (12)
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US3513103A (en) * | 1967-12-12 | 1970-05-19 | Sylvania Electric Prod | Fluorescent phosphor |
JPH0832116A (ja) * | 1994-07-19 | 1996-02-02 | Toyoda Gosei Co Ltd | 発光素子 |
JPH09312442A (ja) * | 1996-05-23 | 1997-12-02 | Rohm Co Ltd | 半導体発光素子およびその製法 |
WO1997048138A2 (fr) * | 1996-06-11 | 1997-12-18 | Philips Electronics N.V. | Dispositifs emettant de la lumiere visible, y compris des diodes emettant de la lumiere ultraviolette et des elements fluorescents excitables par les ultraviolets et emettant de la lumiere visible et procede de production de tels dispositifs |
JPH10135519A (ja) * | 1996-09-09 | 1998-05-22 | Toshiba Corp | 半導体発光素子およびその製造方法 |
JPH11126947A (ja) * | 1997-10-24 | 1999-05-11 | Sony Corp | 半導体素子および半導体発光素子 |
JPH11266034A (ja) * | 1998-03-18 | 1999-09-28 | Nichia Chem Ind Ltd | 窒化物半導体基板および窒化物半導体素子 |
JPH11274560A (ja) * | 1998-03-23 | 1999-10-08 | Sanyo Electric Co Ltd | 半導体素子およびその製造方法 |
JP2000106455A (ja) * | 1998-07-31 | 2000-04-11 | Sharp Corp | 窒化物半導体構造とその製法および発光素子 |
JP2000174340A (ja) * | 1998-12-04 | 2000-06-23 | Mitsubishi Cable Ind Ltd | GaN系半導体発光素子 |
JP2000174339A (ja) * | 1998-12-04 | 2000-06-23 | Mitsubishi Cable Ind Ltd | GaN系半導体発光素子およびGaN系半導体受光素子 |
JP2000200946A (ja) * | 1998-10-26 | 2000-07-18 | Matsushita Electronics Industry Corp | 半導体装置およびその製造方法 |
-
2002
- 2002-06-17 JP JP2003506019A patent/JP3956941B2/ja not_active Expired - Fee Related
- 2002-06-17 WO PCT/JP2002/005998 patent/WO2002103813A1/fr active Application Filing
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
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US3513103A (en) * | 1967-12-12 | 1970-05-19 | Sylvania Electric Prod | Fluorescent phosphor |
JPH0832116A (ja) * | 1994-07-19 | 1996-02-02 | Toyoda Gosei Co Ltd | 発光素子 |
JPH09312442A (ja) * | 1996-05-23 | 1997-12-02 | Rohm Co Ltd | 半導体発光素子およびその製法 |
WO1997048138A2 (fr) * | 1996-06-11 | 1997-12-18 | Philips Electronics N.V. | Dispositifs emettant de la lumiere visible, y compris des diodes emettant de la lumiere ultraviolette et des elements fluorescents excitables par les ultraviolets et emettant de la lumiere visible et procede de production de tels dispositifs |
JPH10135519A (ja) * | 1996-09-09 | 1998-05-22 | Toshiba Corp | 半導体発光素子およびその製造方法 |
JPH11126947A (ja) * | 1997-10-24 | 1999-05-11 | Sony Corp | 半導体素子および半導体発光素子 |
JPH11266034A (ja) * | 1998-03-18 | 1999-09-28 | Nichia Chem Ind Ltd | 窒化物半導体基板および窒化物半導体素子 |
JPH11274560A (ja) * | 1998-03-23 | 1999-10-08 | Sanyo Electric Co Ltd | 半導体素子およびその製造方法 |
JP2000106455A (ja) * | 1998-07-31 | 2000-04-11 | Sharp Corp | 窒化物半導体構造とその製法および発光素子 |
JP2000200946A (ja) * | 1998-10-26 | 2000-07-18 | Matsushita Electronics Industry Corp | 半導体装置およびその製造方法 |
JP2000174340A (ja) * | 1998-12-04 | 2000-06-23 | Mitsubishi Cable Ind Ltd | GaN系半導体発光素子 |
JP2000174339A (ja) * | 1998-12-04 | 2000-06-23 | Mitsubishi Cable Ind Ltd | GaN系半導体発光素子およびGaN系半導体受光素子 |
Cited By (49)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9368681B2 (en) | 2001-07-24 | 2016-06-14 | Nichia Corporation | Semiconductor light emitting device |
US9865773B2 (en) | 2001-07-24 | 2018-01-09 | Nichia Corporation | Semiconductor light emitting device |
US10396242B2 (en) | 2001-07-24 | 2019-08-27 | Nichia Corporation | Semiconductor light emitting device |
US7635875B2 (en) | 2001-07-24 | 2009-12-22 | Nichia Corporation | Semiconductor light emitting device |
US10593833B2 (en) | 2001-07-24 | 2020-03-17 | Nichia Corporation | Semiconductor light emitting device |
US7420223B2 (en) | 2003-03-14 | 2008-09-02 | Sumitomo Electric Industries, Ltd. | Semiconductor device |
JPWO2004082034A1 (ja) * | 2003-03-14 | 2006-06-15 | 住友電気工業株式会社 | 半導体装置 |
US7335925B2 (en) | 2003-03-14 | 2008-02-26 | Sumitomo Electric Industries, Ltd. | Semiconductor device |
US7504671B2 (en) | 2003-03-14 | 2009-03-17 | Sumitomo Electric Industries, Ltd. | Semiconductor device |
US7817692B2 (en) | 2003-06-27 | 2010-10-19 | Nichia Corporation | Nitride semiconductor laser device having current blocking layer and method of manufacturing the same |
US7227879B2 (en) | 2003-06-27 | 2007-06-05 | Nichia Corporation | Nitride semiconductor laser device having current blocking layer and method of manufacturing the same |
WO2005018008A1 (fr) * | 2003-08-19 | 2005-02-24 | Nichia Corporation | Dispositif a semi-conducteurs |
EP3166152A1 (fr) * | 2003-08-19 | 2017-05-10 | Nichia Corporation | Diode électroluminescente semi-conductrice et son procédé de fabrication |
EP3699963A1 (fr) * | 2003-08-19 | 2020-08-26 | Nichia Corporation | Diode électroluminescente semi-conductrice et procédé de fabrication de son substrat |
US7148514B2 (en) | 2003-12-23 | 2006-12-12 | Samsung Electro-Mechanics Co., Ltd. | Nitride semiconductor light emitting diode and fabrication method thereof |
JP2005228924A (ja) * | 2004-02-13 | 2005-08-25 | Toshiba Corp | 半導体発光素子 |
JPWO2005106979A1 (ja) * | 2004-04-28 | 2008-03-21 | 三菱電線工業株式会社 | 窒化物半導体発光素子 |
JP5082444B2 (ja) * | 2004-04-28 | 2012-11-28 | 三菱化学株式会社 | 窒化物半導体発光素子 |
WO2005106979A1 (fr) * | 2004-04-28 | 2005-11-10 | Mitsubishi Cable Industries, Ltd. | Élément luminescent semi-conducteur à nitrure |
JP2007036078A (ja) * | 2005-07-29 | 2007-02-08 | Showa Denko Kk | pn接合型発光ダイオード |
US8338853B2 (en) | 2005-08-25 | 2012-12-25 | Toyota Jidosha Kabushiki Kaisha | Substrate for forming light-emitting layer, light emitter and light-emitting substance |
US7786502B2 (en) | 2006-04-12 | 2010-08-31 | Rohm Co., Ltd. | Nitride semiconductor light-emitting device and method of manufacturing the same |
WO2007117035A1 (fr) * | 2006-04-12 | 2007-10-18 | Rohm Co., Ltd. | Element electroluminescent de nitrure semi-conducteur et son procede de fabrication |
JP2008047854A (ja) * | 2006-07-19 | 2008-02-28 | Mitsubishi Cable Ind Ltd | 窒化物半導体発光ダイオード素子 |
JP2014197704A (ja) * | 2006-12-11 | 2014-10-16 | ザ リージェンツ オブ ザ ユニバーシティ オブ カリフォルニア | 発光デバイスおよび発光デバイスの作製方法 |
JP2009038355A (ja) * | 2007-07-10 | 2009-02-19 | Toyoda Gosei Co Ltd | 発光装置 |
JP2009038377A (ja) * | 2007-07-31 | 2009-02-19 | Epivalley Co Ltd | Iii族窒化物半導体発光素子 |
GB2454655A (en) * | 2007-11-09 | 2009-05-20 | Sharp Kk | Nitride structures with AlInN current confinement layers |
JP2010050318A (ja) * | 2008-08-22 | 2010-03-04 | Stanley Electric Co Ltd | 半導体発光装置の製造方法及び半導体発光装置 |
EP2333852B1 (fr) * | 2009-12-09 | 2019-03-27 | LG Innotek Co., Ltd. | Dispositif électroluminescent et paquet électroluminescent |
US11335838B2 (en) | 2009-12-09 | 2022-05-17 | Suzhou Lekin Semiconductor Co., Ltd. | Light emitting apparatus |
EP2942823A1 (fr) * | 2009-12-09 | 2015-11-11 | LG Innotek Co., Ltd. | Dispositif électroluminescent, procédé de fabrication du dispositif électroluminescent, paquet électroluminescent et système d'éclairage |
US9281448B2 (en) | 2009-12-09 | 2016-03-08 | Lg Innotek Co., Ltd. | Light emitting apparatus |
US9899581B2 (en) | 2009-12-09 | 2018-02-20 | Lg Innotek Co., Ltd. | Light emitting apparatus |
US9911908B2 (en) | 2009-12-09 | 2018-03-06 | Lg Innotek Co., Ltd. | Light emitting apparatus |
WO2012133425A1 (fr) * | 2011-03-29 | 2012-10-04 | 日本ゼオン株式会社 | Élément d'émission de lumière et appareil d'éclairage |
US9112182B2 (en) | 2011-03-29 | 2015-08-18 | Zeon Corporation | Light-emitting element and illuminating apparatus |
JP2012209107A (ja) * | 2011-03-29 | 2012-10-25 | Nippon Zeon Co Ltd | 面発光素子及び照明器具 |
JP2012212508A (ja) * | 2011-03-30 | 2012-11-01 | Nippon Zeon Co Ltd | 発光素子及び照明器具 |
JP2011233927A (ja) * | 2011-08-02 | 2011-11-17 | Oki Data Corp | 半導体装置、led装置、ledヘッド、及び画像形成装置 |
JP2018519662A (ja) * | 2015-06-18 | 2018-07-19 | オスラム オプト セミコンダクターズ ゲゼルシャフト ミット ベシュレンクテル ハフツングOsram Opto Semiconductors GmbH | 窒化物半導体部品の製造方法および窒化物半導体部品 |
US10475959B2 (en) | 2015-06-18 | 2019-11-12 | Osram Opto Semiconductors Gmbh | Method for producing a nitride semiconductor component, and a nitride semiconductor component |
US10347808B2 (en) | 2015-08-31 | 2019-07-09 | Nichia Corporation | Light emitting device and method of manufacturing the light emitting device |
US9978903B2 (en) | 2015-11-26 | 2018-05-22 | Nichia Corporation | Light-emitting element and method for producing the same |
US10134944B2 (en) | 2015-11-26 | 2018-11-20 | Nichia Corporation | Light-emitting element and method for producing the same |
CN113684539A (zh) * | 2016-12-27 | 2021-11-23 | 住友化学株式会社 | Iii族氮化物层叠体的制造方法、检查方法、以及iii族氮化物层叠体 |
JP2018186213A (ja) * | 2017-04-27 | 2018-11-22 | スタンレー電気株式会社 | 垂直共振器型発光素子 |
JP2021114490A (ja) * | 2020-01-16 | 2021-08-05 | 国立大学法人島根大学 | 光電変換素子 |
JP7470361B2 (ja) | 2020-01-16 | 2024-04-18 | 株式会社S-Nanotech Co-Creation | 光電変換素子 |
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JPWO2002103813A1 (ja) | 2004-10-21 |
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