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WO2002076641A3 - Cleaning apparatus and cleaning method - Google Patents

Cleaning apparatus and cleaning method Download PDF

Info

Publication number
WO2002076641A3
WO2002076641A3 PCT/EP2002/002458 EP0202458W WO02076641A3 WO 2002076641 A3 WO2002076641 A3 WO 2002076641A3 EP 0202458 W EP0202458 W EP 0202458W WO 02076641 A3 WO02076641 A3 WO 02076641A3
Authority
WO
WIPO (PCT)
Prior art keywords
conduit
compartment
recovery
feed
cleaning
Prior art date
Application number
PCT/EP2002/002458
Other languages
French (fr)
Other versions
WO2002076641A2 (en
Inventor
Olivier Letessier
Jean-Marc Girard
Akinobu Nasu
Mindi Xu
Original Assignee
Air Liquide
Olivier Letessier
Jean-Marc Girard
Akinobu Nasu
Mindi Xu
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide, Olivier Letessier, Jean-Marc Girard, Akinobu Nasu, Mindi Xu filed Critical Air Liquide
Publication of WO2002076641A2 publication Critical patent/WO2002076641A2/en
Publication of WO2002076641A3 publication Critical patent/WO2002076641A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
    • B08B9/027—Cleaning the internal surfaces; Removal of blockages
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
    • B08B9/027—Cleaning the internal surfaces; Removal of blockages
    • B08B9/032—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • B08B9/08—Cleaning containers, e.g. tanks

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

To provide a cleaning apparatus and a cleaning method that require a smaller conduit population and less space and as a result cost less and provide an improved operability. A cleaning apparatus (30) contains a gastight container (32) for holding solvent; the interior of this container is partitioned in a gastight manner by a partition wall (34) into a feed compartment (36) that holds fresh solvent and a recovery compartment (38) that holds spent solvent. The partition wall (34) is slideably supported by a sliding support member (42) in such a manner that the pressure within the feed compartment (36) becomes equalized with the pressure within the recovery compartment (38). The feed compartment (36) is connected to a manifold (12) by a feed conduit (44) and the recovery compartment (38) is connected to the manifold (12) by a recovery conduit (46). A gas introduction conduit (52) is connected to the feed conduit (44) in order to introduce pressurization gas from a pressurized gas source (54). An exhaust conduit (62) is connected to the recovery conduit (46) in order to conduct vacuum exhaust using a vacuum exhaust source (64).
PCT/EP2002/002458 2001-01-22 2002-01-22 Cleaning apparatus and cleaning method WO2002076641A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001012663A JP2002224630A (en) 2001-01-22 2001-01-22 Cleaning apparatus and cleaning method
JP2001-12663 2001-01-22

Publications (2)

Publication Number Publication Date
WO2002076641A2 WO2002076641A2 (en) 2002-10-03
WO2002076641A3 true WO2002076641A3 (en) 2003-02-06

Family

ID=18879638

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2002/002458 WO2002076641A2 (en) 2001-01-22 2002-01-22 Cleaning apparatus and cleaning method

Country Status (3)

Country Link
JP (1) JP2002224630A (en)
TW (1) TW521006B (en)
WO (1) WO2002076641A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5146527B2 (en) * 2010-12-28 2013-02-20 東京エレクトロン株式会社 Liquid processing equipment
JP5146526B2 (en) * 2010-12-28 2013-02-20 東京エレクトロン株式会社 Liquid processing equipment

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996019303A1 (en) * 1994-12-20 1996-06-27 Salvatore Ajena Tank for fluids for use in urban cleansing vehicles
US5964230A (en) * 1997-10-06 1999-10-12 Air Products And Chemicals, Inc. Solvent purge mechanism

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996019303A1 (en) * 1994-12-20 1996-06-27 Salvatore Ajena Tank for fluids for use in urban cleansing vehicles
US5964230A (en) * 1997-10-06 1999-10-12 Air Products And Chemicals, Inc. Solvent purge mechanism

Also Published As

Publication number Publication date
JP2002224630A (en) 2002-08-13
TW521006B (en) 2003-02-21
WO2002076641A2 (en) 2002-10-03

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