WO2002045113A1 - Procede de formation de motif destine a un nanotube de carbone, cathode froide a emission de champ, et procede de fabrication de cette cathode - Google Patents
Procede de formation de motif destine a un nanotube de carbone, cathode froide a emission de champ, et procede de fabrication de cette cathode Download PDFInfo
- Publication number
- WO2002045113A1 WO2002045113A1 PCT/JP2001/010276 JP0110276W WO0245113A1 WO 2002045113 A1 WO2002045113 A1 WO 2002045113A1 JP 0110276 W JP0110276 W JP 0110276W WO 0245113 A1 WO0245113 A1 WO 0245113A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- carbon nanotube
- cold cathode
- pattern
- pattern forming
- etching
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/05—Preparation or purification of carbon not covered by groups C01B32/15, C01B32/20, C01B32/25, C01B32/30
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/304—Field-emissive cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
- H01J3/022—Electron guns using a field emission, photo emission, or secondary emission electron source with microengineered cathode, e.g. Spindt-type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
- H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/304—Field emission cathodes
- H01J2201/30446—Field emission cathodes characterised by the emitter material
- H01J2201/30453—Carbon types
- H01J2201/30469—Carbon nanotubes (CNTs)
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2329/00—Electron emission display panels, e.g. field emission display panels
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Nanotechnology (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Cold Cathode And The Manufacture (AREA)
Abstract
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/433,382 US20040043219A1 (en) | 2000-11-29 | 2001-11-26 | Pattern forming method for carbon nanotube, and field emission cold cathode and method of manufacturing the cold cathode |
KR10-2003-7007245A KR20030059291A (ko) | 2000-11-29 | 2001-11-26 | 카본 나노튜브의 패턴 형성 방법 및 전계 방출형 냉음극과그 제조 방법 |
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000362395A JP4802363B2 (ja) | 2000-11-29 | 2000-11-29 | 電界放出型冷陰極及び平面画像表示装置 |
JP2000-362395 | 2000-11-29 | ||
JP2000367341 | 2000-12-01 | ||
JP2000-367341 | 2000-12-01 | ||
JP2001337441A JP3843447B2 (ja) | 2000-12-01 | 2001-11-02 | カーボンナノチューブのパターン形成方法 |
JP2001-337441 | 2001-11-02 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2002045113A1 true WO2002045113A1 (fr) | 2002-06-06 |
Family
ID=27345293
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2001/010276 WO2002045113A1 (fr) | 2000-11-29 | 2001-11-26 | Procede de formation de motif destine a un nanotube de carbone, cathode froide a emission de champ, et procede de fabrication de cette cathode |
Country Status (2)
Country | Link |
---|---|
KR (1) | KR20030059291A (fr) |
WO (1) | WO2002045113A1 (fr) |
Cited By (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005027226A1 (fr) | 2003-09-12 | 2005-03-24 | Sony Corporation | Procede fabrication de dispositif a semiconducteur a effet de champ |
US7385266B2 (en) | 2003-05-14 | 2008-06-10 | Nantero, Inc. | Sensor platform using a non-horizontally oriented nanotube element |
US7416993B2 (en) | 2003-09-08 | 2008-08-26 | Nantero, Inc. | Patterned nanowire articles on a substrate and methods of making the same |
WO2009023304A2 (fr) * | 2007-05-02 | 2009-02-19 | Atomate Corporation | Dispositifs à nanotubes de haute densité |
US7598127B2 (en) | 2005-05-12 | 2009-10-06 | Nantero, Inc. | Nanotube fuse structure |
US7619291B2 (en) | 2001-07-25 | 2009-11-17 | Nantero, Inc. | Devices having horizontally-disposed nanofabric articles and methods of making the same |
US7719067B2 (en) | 2001-07-25 | 2010-05-18 | Nantero, Inc. | Devices having vertically-disposed nanofabric articles and methods of making the same |
US7835170B2 (en) | 2005-05-09 | 2010-11-16 | Nantero, Inc. | Memory elements and cross point switches and arrays of same using nonvolatile nanotube blocks |
US7859385B2 (en) | 2004-09-21 | 2010-12-28 | Nantero, Inc. | Resistive elements using carbon nanotubes |
US7927992B2 (en) | 2005-09-06 | 2011-04-19 | Nantero, Inc. | Carbon nanotubes for the selective transfer of heat from electronics |
US8044388B2 (en) | 2001-07-25 | 2011-10-25 | Nantero, Inc. | Method of forming a carbon nanotube-based contact to semiconductor |
US8110883B2 (en) | 2007-03-12 | 2012-02-07 | Nantero Inc. | Electromagnetic and thermal sensors using carbon nanotubes and methods of making same |
US8115187B2 (en) | 2007-05-22 | 2012-02-14 | Nantero, Inc. | Triodes using nanofabric articles and methods of making the same |
US8222704B2 (en) | 2009-12-31 | 2012-07-17 | Nantero, Inc. | Compact electrical switching devices with nanotube elements, and methods of making same |
US8351239B2 (en) | 2009-10-23 | 2013-01-08 | Nantero Inc. | Dynamic sense current supply circuit and associated method for reading and characterizing a resistive memory array |
US8525143B2 (en) | 2005-09-06 | 2013-09-03 | Nantero Inc. | Method and system of using nanotube fabrics as joule heating elements for memories and other applications |
US8551806B2 (en) | 2009-10-23 | 2013-10-08 | Nantero Inc. | Methods for passivating a carbonic nanolayer |
US8562937B2 (en) | 2005-12-19 | 2013-10-22 | Nantero Inc. | Production of carbon nanotubes |
US8586424B2 (en) | 2008-11-19 | 2013-11-19 | Nantero Inc. | Switching materials comprising mixed nanoscopic particles and carbon nanotubes and method of making and using the same |
US8587989B2 (en) | 2008-06-20 | 2013-11-19 | Nantero Inc. | NRAM arrays with nanotube blocks, nanotube traces, and nanotube planes and methods of making same |
US8631562B2 (en) | 2004-11-02 | 2014-01-21 | Nantero Inc. | Methods of making nanotube switches |
US8771628B2 (en) | 2004-12-16 | 2014-07-08 | Nantero Inc. | Aqueous carbon nanotube applicator liquids and methods for producing applicator liquids thereof |
US8895950B2 (en) | 2009-10-23 | 2014-11-25 | Nantero Inc. | Methods for passivating a carbonic nanolayer |
US8941094B2 (en) | 2010-09-02 | 2015-01-27 | Nantero Inc. | Methods for adjusting the conductivity range of a nanotube fabric layer |
US9196615B2 (en) | 2005-05-09 | 2015-11-24 | Nantero Inc. | Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same |
US9287356B2 (en) | 2005-05-09 | 2016-03-15 | Nantero Inc. | Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same |
US9299430B1 (en) | 2015-01-22 | 2016-03-29 | Nantero Inc. | Methods for reading and programming 1-R resistive change element arrays |
US9422651B2 (en) | 2003-01-13 | 2016-08-23 | Nantero Inc. | Methods for arranging nanoscopic elements within networks, fabrics, and films |
US9617151B2 (en) | 2010-02-12 | 2017-04-11 | Nantero Inc. | Methods for controlling density, porosity, and/or gap size within nanotube fabric layers and films |
US9650732B2 (en) | 2013-05-01 | 2017-05-16 | Nantero Inc. | Low defect nanotube application solutions and fabrics and methods for making same |
US9911743B2 (en) | 2005-05-09 | 2018-03-06 | Nantero, Inc. | Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same |
US9934848B2 (en) | 2016-06-07 | 2018-04-03 | Nantero, Inc. | Methods for determining the resistive states of resistive change elements |
US9941001B2 (en) | 2016-06-07 | 2018-04-10 | Nantero, Inc. | Circuits for determining the resistive states of resistive change elements |
US10096363B2 (en) | 2001-07-25 | 2018-10-09 | Nantero, Inc. | Methods of forming nanotube films and articles |
US10654718B2 (en) | 2013-09-20 | 2020-05-19 | Nantero, Inc. | Scalable nanotube fabrics and methods for making same |
US10661304B2 (en) | 2010-03-30 | 2020-05-26 | Nantero, Inc. | Microfluidic control surfaces using ordered nanotube fabrics |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100816815B1 (ko) * | 2007-02-09 | 2008-03-26 | 주식회사 나모텍 | 탄소나노튜브를 이용한 표시장치용 기판과 그의 제조방법 |
KR100924766B1 (ko) * | 2007-06-22 | 2009-11-05 | 삼성전자주식회사 | 금속 나노입자를 포함하는 탄소 나노튜브(cnt) 박막 및그 제조방법 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999028939A1 (fr) * | 1997-12-04 | 1999-06-10 | Printable Field Emitters Limited | Materiaux a emission electronique par effet de champ et dispositifs correspondants |
JP2000277002A (ja) * | 1999-03-25 | 2000-10-06 | Matsushita Electric Ind Co Ltd | 電子放出素子の製造方法 |
JP2000285795A (ja) * | 1999-03-31 | 2000-10-13 | Sony Corp | 電子放出源およびその製造方法ならびにディスプレイ装置 |
JP2000311578A (ja) * | 1999-04-28 | 2000-11-07 | Sharp Corp | 電子源アレイと、その製造方法、及び前記電子源アレイまたはその製造方法を用いて形成される画像形成装置 |
EP1096533A1 (fr) * | 1999-08-18 | 2001-05-02 | Lucent Technologies Inc. | Procédé de fabrication d'une couche structurée de nano-tubes en carbone |
-
2001
- 2001-11-26 WO PCT/JP2001/010276 patent/WO2002045113A1/fr not_active Application Discontinuation
- 2001-11-26 KR KR10-2003-7007245A patent/KR20030059291A/ko not_active Application Discontinuation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999028939A1 (fr) * | 1997-12-04 | 1999-06-10 | Printable Field Emitters Limited | Materiaux a emission electronique par effet de champ et dispositifs correspondants |
JP2000277002A (ja) * | 1999-03-25 | 2000-10-06 | Matsushita Electric Ind Co Ltd | 電子放出素子の製造方法 |
JP2000285795A (ja) * | 1999-03-31 | 2000-10-13 | Sony Corp | 電子放出源およびその製造方法ならびにディスプレイ装置 |
JP2000311578A (ja) * | 1999-04-28 | 2000-11-07 | Sharp Corp | 電子源アレイと、その製造方法、及び前記電子源アレイまたはその製造方法を用いて形成される画像形成装置 |
EP1096533A1 (fr) * | 1999-08-18 | 2001-05-02 | Lucent Technologies Inc. | Procédé de fabrication d'une couche structurée de nano-tubes en carbone |
Cited By (58)
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---|---|---|---|---|
US8058089B2 (en) | 2001-07-25 | 2011-11-15 | Nantero Inc. | Electromechanical memory array using nanotube ribbons and method for making same |
US8044388B2 (en) | 2001-07-25 | 2011-10-25 | Nantero, Inc. | Method of forming a carbon nanotube-based contact to semiconductor |
US10096363B2 (en) | 2001-07-25 | 2018-10-09 | Nantero, Inc. | Methods of forming nanotube films and articles |
US8400053B2 (en) | 2001-07-25 | 2013-03-19 | Nantero Inc. | Carbon nanotube films, layers, fabrics, ribbons, elements and articles |
US7719067B2 (en) | 2001-07-25 | 2010-05-18 | Nantero, Inc. | Devices having vertically-disposed nanofabric articles and methods of making the same |
US7619291B2 (en) | 2001-07-25 | 2009-11-17 | Nantero, Inc. | Devices having horizontally-disposed nanofabric articles and methods of making the same |
US9422651B2 (en) | 2003-01-13 | 2016-08-23 | Nantero Inc. | Methods for arranging nanoscopic elements within networks, fabrics, and films |
US10124367B2 (en) | 2003-01-13 | 2018-11-13 | Nantero, Inc. | Methods for arranging nanoscopic elements within networks, fabrics and films |
US8357559B2 (en) | 2003-05-14 | 2013-01-22 | Nantero Inc. | Method of making sensor platform using a non-horizontally oriented nanotube element |
US7538400B2 (en) | 2003-05-14 | 2009-05-26 | Nantero, Inc. | Sensor platform using a non-horizontally oriented nanotube element |
US7385266B2 (en) | 2003-05-14 | 2008-06-10 | Nantero, Inc. | Sensor platform using a non-horizontally oriented nanotube element |
US7416993B2 (en) | 2003-09-08 | 2008-08-26 | Nantero, Inc. | Patterned nanowire articles on a substrate and methods of making the same |
US7948082B2 (en) | 2003-09-08 | 2011-05-24 | Nantero, Inc. | Method of fabricating a patterned nanoscopic article |
EP1667238A4 (fr) * | 2003-09-12 | 2009-09-16 | Sony Corp | Procede fabrication de dispositif a semiconducteur a effet de champ |
WO2005027226A1 (fr) | 2003-09-12 | 2005-03-24 | Sony Corporation | Procede fabrication de dispositif a semiconducteur a effet de champ |
EP1667238A1 (fr) * | 2003-09-12 | 2006-06-07 | Sony Corporation | Procede fabrication de dispositif a semiconducteur a effet de champ |
US7859385B2 (en) | 2004-09-21 | 2010-12-28 | Nantero, Inc. | Resistive elements using carbon nanotubes |
US8631562B2 (en) | 2004-11-02 | 2014-01-21 | Nantero Inc. | Methods of making nanotube switches |
US8771628B2 (en) | 2004-12-16 | 2014-07-08 | Nantero Inc. | Aqueous carbon nanotube applicator liquids and methods for producing applicator liquids thereof |
US9911743B2 (en) | 2005-05-09 | 2018-03-06 | Nantero, Inc. | Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same |
US9767902B2 (en) | 2005-05-09 | 2017-09-19 | Nantero, Inc. | Non-volatile composite nanoscopic fabric NAND memory arrays and methods of making same |
US7835170B2 (en) | 2005-05-09 | 2010-11-16 | Nantero, Inc. | Memory elements and cross point switches and arrays of same using nonvolatile nanotube blocks |
US9406349B2 (en) | 2005-05-09 | 2016-08-02 | Nantero Inc. | Memory elements and cross point switches and arrays for same using nonvolatile nanotube blocks |
US10339982B2 (en) | 2005-05-09 | 2019-07-02 | Nantero, Inc. | Memory elements and cross point switches and arrays of same using nonvolatile nanotube blocks |
US9287356B2 (en) | 2005-05-09 | 2016-03-15 | Nantero Inc. | Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same |
US9196615B2 (en) | 2005-05-09 | 2015-11-24 | Nantero Inc. | Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same |
US7598127B2 (en) | 2005-05-12 | 2009-10-06 | Nantero, Inc. | Nanotube fuse structure |
US8630091B2 (en) | 2005-09-06 | 2014-01-14 | Nantero Inc. | Carbon nanotubes for the selective transfer of heat from electronics |
US8525143B2 (en) | 2005-09-06 | 2013-09-03 | Nantero Inc. | Method and system of using nanotube fabrics as joule heating elements for memories and other applications |
US7927992B2 (en) | 2005-09-06 | 2011-04-19 | Nantero, Inc. | Carbon nanotubes for the selective transfer of heat from electronics |
US8562937B2 (en) | 2005-12-19 | 2013-10-22 | Nantero Inc. | Production of carbon nanotubes |
US8110883B2 (en) | 2007-03-12 | 2012-02-07 | Nantero Inc. | Electromagnetic and thermal sensors using carbon nanotubes and methods of making same |
WO2009023304A2 (fr) * | 2007-05-02 | 2009-02-19 | Atomate Corporation | Dispositifs à nanotubes de haute densité |
WO2009023304A3 (fr) * | 2007-05-02 | 2009-07-09 | Atomate Corp | Dispositifs à nanotubes de haute densité |
US8115187B2 (en) | 2007-05-22 | 2012-02-14 | Nantero, Inc. | Triodes using nanofabric articles and methods of making the same |
US8587989B2 (en) | 2008-06-20 | 2013-11-19 | Nantero Inc. | NRAM arrays with nanotube blocks, nanotube traces, and nanotube planes and methods of making same |
US8969142B2 (en) | 2008-11-19 | 2015-03-03 | Nantero Inc. | Switching materials comprising mixed nanoscopic particles and carbon nanotubes and methods of making and using the same |
US10181569B2 (en) | 2008-11-19 | 2019-01-15 | Nantero, Inc. | Two-terminal switching devices comprising coated nanotube elements |
US9337423B2 (en) | 2008-11-19 | 2016-05-10 | Nantero Inc. | Two-terminal switching device using a composite material of nanoscopic particles and carbon nanotubes |
US9755170B2 (en) | 2008-11-19 | 2017-09-05 | Nantero, Inc. | Resistive materials comprising mixed nanoscopic particles and carbon nanotubes |
US8586424B2 (en) | 2008-11-19 | 2013-11-19 | Nantero Inc. | Switching materials comprising mixed nanoscopic particles and carbon nanotubes and method of making and using the same |
US8351239B2 (en) | 2009-10-23 | 2013-01-08 | Nantero Inc. | Dynamic sense current supply circuit and associated method for reading and characterizing a resistive memory array |
US9502675B2 (en) | 2009-10-23 | 2016-11-22 | Nantero Inc. | Methods for passivating a carbonic nanolayer |
US9281185B2 (en) | 2009-10-23 | 2016-03-08 | Nantero Inc. | Methods for passivating a carbonic nanolayer |
US8551806B2 (en) | 2009-10-23 | 2013-10-08 | Nantero Inc. | Methods for passivating a carbonic nanolayer |
US10084138B2 (en) | 2009-10-23 | 2018-09-25 | Nantero, Inc. | Methods for forming nanotube fabric layers with increased density |
US8895950B2 (en) | 2009-10-23 | 2014-11-25 | Nantero Inc. | Methods for passivating a carbonic nanolayer |
US8222704B2 (en) | 2009-12-31 | 2012-07-17 | Nantero, Inc. | Compact electrical switching devices with nanotube elements, and methods of making same |
US9617151B2 (en) | 2010-02-12 | 2017-04-11 | Nantero Inc. | Methods for controlling density, porosity, and/or gap size within nanotube fabric layers and films |
US10773960B2 (en) | 2010-02-12 | 2020-09-15 | Nantero, Inc. | Low porosity nanotube fabric articles |
US10661304B2 (en) | 2010-03-30 | 2020-05-26 | Nantero, Inc. | Microfluidic control surfaces using ordered nanotube fabrics |
US8941094B2 (en) | 2010-09-02 | 2015-01-27 | Nantero Inc. | Methods for adjusting the conductivity range of a nanotube fabric layer |
US9650732B2 (en) | 2013-05-01 | 2017-05-16 | Nantero Inc. | Low defect nanotube application solutions and fabrics and methods for making same |
US10654718B2 (en) | 2013-09-20 | 2020-05-19 | Nantero, Inc. | Scalable nanotube fabrics and methods for making same |
US9715927B2 (en) | 2015-01-22 | 2017-07-25 | Nantero, Inc. | 1-R resistive change element arrays using resistive reference elements |
US9299430B1 (en) | 2015-01-22 | 2016-03-29 | Nantero Inc. | Methods for reading and programming 1-R resistive change element arrays |
US9941001B2 (en) | 2016-06-07 | 2018-04-10 | Nantero, Inc. | Circuits for determining the resistive states of resistive change elements |
US9934848B2 (en) | 2016-06-07 | 2018-04-03 | Nantero, Inc. | Methods for determining the resistive states of resistive change elements |
Also Published As
Publication number | Publication date |
---|---|
KR20030059291A (ko) | 2003-07-07 |
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