WO2001020755A1 - Coil, and method and apparatus for manufacture thereof - Google Patents

Abstract

Coils are provided which can be closely arranged in series along their axes without gaps between them. A coil (20) includes one conductor (2) consisting of a first conductor part (2A) and a second conductor part (2B), which are sectioned at a predetermined position (2C). The first conductor (2A) is wound from the part (2c) from the axis to form a first coil of a predetermined width, while the second conductor (2B) is wound from the part (2c) in the direction opposite to the first coil (20A) to form a second coil (20B) that is narrower than the predetermined width. Two ends (21, 22) are exposed outside to serve as the coil terminals. Since the terminals of the coil are both positioned outside, they will not cause interference when a number of coils (20) are closely arranged in the axial direction.

Description

 Description Coil and method for manufacturing the same, and coil manufacturing apparatus

 The present invention relates to a coil, a method for manufacturing the same, and an apparatus for manufacturing a coil, and more particularly to a coil useful for an armature of Linamo and a method for manufacturing the same, and an apparatus for manufacturing a coil.

 Technology background

 Conventionally, a conductor is wound a plurality of times in the axial direction to form a cylindrical layer, and this is further laminated in multiple layers to form a coil in which a plurality of layers of the conductor are formed in the circumferential direction. Used in electrical equipment.

 The general structure of the coil 10 is shown in Figs.

 As shown in these figures, in a general coil 10, winding is performed from one end 11 of a conducting wire 1 constituting the coil 10 to an axis of a reel 19 of a winding device (not shown). As shown by the arrow in FIG. 29, one layer of the conductive wire 1 is wound in the axial direction of the reel 19. When the winding of one layer is completed, winding is continuously performed from the shaft center side (inner side) to the outer side, and when the coil 10 reaches a predetermined diameter, the winding is performed. Ends. Therefore, in the conventional coil 10, one end 11 is located on the axial center side, and the other end 12 is located on the outer peripheral side.

 However, when one end 11 is located on the axial center side and the other end 12 is located on the outer peripheral side as in the conventional coil 10, as shown in FIG. 30, a plurality of coils 10 are connected in series. When the terminals are pulled out to the outer peripheral side, a gap d is created between the coils 10, 10 ....

 Thus, if a gap d occurs when a plurality of coils 10, 10 ... are arranged in series in the coaxial direction, the coils 10, 10 ... cannot be arranged with high density in the axial direction. There is a defect.

In particular, the coils 1 0, 1 0… However, when the coils 10, 10,... Cannot be arranged at high density, there is a problem that the space factor of the coil portion is reduced and the efficiency of the motor is reduced. Disclosure of the invention

 The present invention has been made in view of such circumstances, and when arranging coils in series in the axial direction, a coil and a method of manufacturing the coil that can be arranged with high density without forming a gap between each other, and It is intended to provide a coil manufacturing device.

 In order to achieve the above object, the coil according to claim 1 includes a first conductive part from one end to a predetermined point and a second conductive part from the other end to the predetermined point. A coil formed by one conductive member, wherein the first conductive part is wound by a plurality of layers at a first predetermined width along the axial direction of the coil starting from the predetermined point. The first coil portion formed and the second conductive portion are formed along the axial direction in a direction opposite to the first conductive portion, starting from the predetermined point. A second coil portion formed by winding a plurality of layers with a predetermined width of 2. The two ends of the conductive member are both located on the outer layer side of the coil. For this reason, when arranging a plurality of coils coaxially, both ends (terminals) of the coil are both drawn out to the outer layer side, so that they can be arranged at a higher density than a conventional coil.

In addition, the coil according to claim 2 is a single conductive part having a first conductive part from one end to a predetermined point and a second conductive part from the other end to the predetermined point. A coil formed of a member, wherein the first conductive portion has a first predetermined width along an axial direction of the coil, with the one end as a starting point and the predetermined point as an end point. A first coil part formed by winding a plurality of layers at the second end, and the second conductive part having the other end as a start point and the predetermined point as an end point; Along the axial direction in the opposite direction to the conductive portion of the second A second coil portion formed by winding a plurality of layers with a predetermined width, and two ends of the conductive member are both located on the axis side of the coil. For this reason, when arranging a plurality of coils coaxially, both ends (terminals) of the coil are drawn out toward the axial center side, so that they can be arranged at a higher density than a conventional coil.

 The coil according to claim 3 is a substantially cylindrical coil having a predetermined diameter, wherein a plurality of conductive members are arranged in a circumferential direction at a first predetermined width along an axial direction from an axial center side of the coil. A first coil portion in which one end of the conductive member is located on the outer layer side and the other end is located on the shaft 、 side, and the conductive member is a coil of the coil. A plurality of layers are wound in the circumferential direction at a second predetermined width along the axial direction from the axis side, one end of the conductive member is located on the outer layer side, and the other end is located on the axis side. And a second coil portion located at an outer periphery of the first coil portion, and an end located at an outer peripheral side of the first coil portion and an end located at an outer peripheral side of the second coil portion are electrically connected to each other. The end of the first coil portion located on the axis side and the end of the second coil portion located on the axis side are two of the coils. It has become a electrical terminal. Also in this case, when two or more coils are coaxially arranged, the two terminals of the coil are both drawn out toward the axial center, so that they can be arranged at a higher density than a conventional coil. .

Further, the coil according to claim 4 is a substantially cylindrical coil having a predetermined diameter, wherein a plurality of conductive members are arranged in a circumferential direction at a first predetermined width along an axial direction from an axial center side of the coil. A first coil portion in which one end of the conductive member is located on the outer layer side and the other end is located on the axial center side; and the conductive member is a shaft of the coil. A plurality of layers are wound in the circumferential direction at a second predetermined width along the axial direction from the center side, one end of the conductive member is located on the outer layer side, and the other end is located on the axial side. And a second coil portion that is located on the axial side of the first coil portion and an end located on the axial side of the second coil portion is electrically connected. And the end located on the outer layer side of the first coil part and the end located on the outer layer side of the second coil part are two electrical terminals of the coil. . Also in this case, when two or more coils are coaxially arranged, the two ends (terminals) of the coil are both drawn out to the outer layer side. Can be placed.

 The coil according to claim 5 is the coil according to any one of claims 1 to 4, wherein the second predetermined width is smaller than the first predetermined width. For this reason, by manufacturing the first coil portion as a main coil portion and using the other as a subordinate coil portion, the number of variances at the time of manufacturing increases. At this time, there is no difference in the performance of the entire coil.

 Further, the coil according to claim 6 is the coil according to any one of claims 1 to 4, wherein the number of winding layers in the first coil unit is the same as that of the second coil. And the number of winding layers in the coil section is equal. As a result, a coil having a constant circumferential width is realized.

 Further, the coil according to claim 7 is the coil according to claim 1 or 2, wherein the first coil portion winds the first conductive portion at the first predetermined width. At least two cylindrical layer portions are laminated, and the second coil portion has at least two cylindrical layer portions obtained by winding the second conductive portion at the second predetermined width. The layers are stacked. As a result, a multilayer coil having both ends drawn out to the outer layer side (outer peripheral side) or the axial center side can be easily realized.

The coil according to claim 8 is the coil according to claim 1 or 2, wherein the conductive member is a conductor, and the second predetermined width is substantially equal to a diameter of the conductor. ing. As a result, the first coil portion becomes the main coil portion, and the second coil portion aligns the end of the conductor with the side from which the end of the first coil portion is drawn out, and removes the outside. It is provided for drawing out to the layer side (outer circumference side) or the shaft center side.

 The method for manufacturing a coil according to claim 9 is characterized in that the one conductive member includes a first conductive part from one end to a predetermined point and a second conductive part from the other end to the predetermined point. Dividing the first conductive portion along a predetermined axial direction from the predetermined point so that the one end is located on the outer layer side of the coil. Winding a plurality of layers at a first predetermined width, and positioning the second conductive portion with the predetermined point as a starting point so that the other end is located on the outer layer side of the coil. Winding a plurality of layers in a direction opposite to the conductive portion at a second predetermined width along the axial direction. In the coil manufactured in this way, both ends (terminals) of the coil are drawn out to the outer layer side. When a plurality of these coils are arranged coaxially, the coil has a higher density than conventional coils. These can be arranged.

 The method for manufacturing a coil according to claim 10 is the method for manufacturing a coil according to claim 9, wherein the coil having a length substantially equal to the first predetermined width is provided between the two flange portions. Providing a reel portion, winding the first conductive portion around the reel portion starting from the predetermined point to form a first coil portion, and attaching one of the two flanges to the reel. Forming a gap having a width substantially equal to the second predetermined width between the one flange part and the first coil part by moving the flange part in the axial direction; Winding the second conductive portion around the reel portion in a direction opposite to the first conductive portion starting from the predetermined point as a starting point to form a second coil portion. . In this case as well, in the manufactured coil, both ends (terminals) of the coil are both drawn out to the outer layer side, and when a plurality of such coils are arranged coaxially, the coil has a higher density than a conventional coil. These can be arranged.

Further, the method for manufacturing a coil according to claim 11 is characterized in that the one conductive member includes a first conductive part from one end to a predetermined point and a front part from the other end. Dividing the first conductive portion into the second conductive portion up to the predetermined point, and the first conductive portion so that the first end is located on the axis side of the coil. Winding a plurality of layers at a first predetermined width along a predetermined axial direction with the part as a starting point and the predetermined point as an end point; and the second end is the axis of the coil. The second conductive portion, the second end portion as a starting point and the predetermined point as an end point, in a direction opposite to the first conductive portion, the axis Winding a plurality of layers at a second predetermined width along the direction. In the coil produced by this, both ends (terminals) of the coil are both drawn out toward the axis, and when multiple coils are arranged coaxially, compared to conventional coils, These can be arranged at high density.

 The method for manufacturing a coil according to claim 12 is the method for manufacturing a coil according to claim 11, wherein a reel having a length substantially equal to the first predetermined width is provided between the two flange portions. Forming a first coil portion by winding the first conductive portion around the reel portion starting at the first end and ending at the predetermined point. Moving one of the two flanges in the axial direction with respect to the reel portion, and substantially equal to the second predetermined width between the one flange portion and the first coil portion. Forming a gap with a width, and between the gaps, the second conductive portion, starting from the second end portion, and having the predetermined point as an end point, opposite to the first conductive portion. Forming a second coil part by winding the reel part in the direction. In this case as well, the manufactured coil has two ends (terminals) of the coil that are both drawn out toward the axial center, and when a plurality of such coils are arranged coaxially, the coil has a higher density than conventional coils. These can be placed in

In addition, the coil manufacturing apparatus according to claim 13 includes a first flange member, a reel member that can rotate integrally with the first flange member by sharing a rotation axis with the first flange member, In the axial direction of the rotating shaft. A second flange portion which is movable with respect to the first flange member and a second flange portion which is rotatable integrally with the reel member while sharing a rotation axis with the first flange member. Thus, by relatively moving the first and second flange portions, one coil can be divided in the axial direction and can be individually wound.

 Further, the coil manufacturing apparatus according to claim 14 is the coil manufacturing apparatus according to claim 13, wherein the second flange member is a first member in the axial direction with respect to the reel member. And a first state in which the first flange member and the reel member rotate together with the first flange member and the reel member while sharing a rotation axis, and a first state different from the first position with respect to the reel member. The second state is fixed at the position 2 and moves relatively to the rotation direction between the first flange member and the reel member. Thus, after forming the coil with a predetermined width in the axial direction, a new coil can be wound adjacent to the coil regardless of the winding direction of the coil.

 A linear motor according to claim 15 is a linear motor that includes an armature having a coil and a magnet member that can move relative to the armature. It has the coil described in any one of 1 to 4. This linear motor has the same performance as conventional coils because the coils are arranged at a higher density than conventional coils.

 A stage device according to claim 16 is a stage device for moving a driven part to a predetermined position, the device having the linear motor described in claim 15 as driving means. In this case, the performance of the provided linear camera is enhanced, so that the overall performance of the stage device is enhanced.

An exposure apparatus according to claim 17 is an exposure apparatus that forms a predetermined pattern on a substrate using an exposure optical system, and includes the stage device described in claim 16, wherein the stage device The substrate Move to a predetermined position. In this case, the performance of the provided stage apparatus is enhanced, and the overall function of the exposure apparatus is enhanced.

 The exposure apparatus according to claim 18 is the exposure apparatus according to claim 17, wherein the exposure optical system projects the pattern formed on a mask onto the substrate. A stage device described in the range 16, wherein the mask is moved by the stage device. In this case, the performance of not only the stage device provided but also the stage device for moving the mask is improved, so that the overall function of the exposure apparatus is improved.

 Further, the device on which the predetermined pattern of claim 19 is formed is manufactured using the exposure apparatus described in claim 17. In such a device, the accuracy of mask alignment and the accuracy of substrate movement control are improved. Therefore, even if the design pattern is further densified, a device structure that is faithful to the design pattern is realized.

 BRIEF DESCRIPTION OF THE FIGURES

 FIG. 1 is a front view showing the shape of the coil 20 according to the first embodiment.

 FIG. 2 is a perspective view of the coil 20.

 FIG. 3 is an explanatory diagram showing the direction of winding of the conductive wire 2 in the coil 20.

 FIG. 4 is an explanatory diagram showing a state where the coil 20 is divided into a first coil unit 2OA and a second coil unit 20B.

 FIG. 5 is an explanatory diagram showing a manufacturing process of the coil 20.

 FIG. 6 is an explanatory diagram showing a state in which many coils 20 are coaxially arranged.

 FIG. 7 is a front view showing a coil 30 according to the second embodiment.

 FIG. 8 is an explanatory diagram showing the winding direction of the conductor 3 in the coil 30.

Fig. 9 shows the conductor 3 wound around the first coil 3OA of the coil 30. O 01/20755

9 is an explanatory diagram showing a state taken.

 Figure 10 shows the first coil section 3 O A of the coil 30 and the second coil section.

FIG. 3 is an explanatory view showing a state where a conductive wire 3 is wound at 30 B.

 FIG. 11 is an explanatory diagram showing a manufacturing process of the coil 30.

 FIG. 12 is a front view showing a coil 40 according to the third embodiment. FIG. 13 is an explanatory diagram showing the winding direction of the conductors 4 A and 4 B in the coil 40.

 Figure 14 shows the first coil section 4 O A of the coil 40 and the second coil section.

FIG. 4 is an explanatory diagram showing a state where conductors 48 and 4B are wound up at 408. FIG. 15 is a front view showing a coil 50 according to the fourth embodiment. FIG. 16 is an explanatory diagram showing the winding directions of the conductors 5A and 5B in the coil 50.

 FIG. 17 is an explanatory diagram showing a state in which the conductive wires 5A and 5B are wound around the first coil portion 5OA and the second coil portion 50B of the coil 50. FIG. FIG. 18 is a perspective view showing a linear motor 110 in which the coil 20 is used as a stator.

 FIG. 19 is a diagram showing a cross section of the linear motor 110.

 FIG. 20 is a longitudinal sectional view taken along the line XX—XX of FIG.

 FIG. 21 is a diagram showing a state in which the lead wires 21 and 22 of the coil 20 of the stator 111 are drawn in different directions from each other.

 FIG. 22 is a diagram showing a state in which the leads 21 and 22 of the coil 20 of the stator 111 are drawn in the same direction.

 FIG. 23 is a perspective view showing a stage device 100 to which the linear motor 110 is applied.

 FIG. 24 is a diagram showing an overall configuration of an exposure apparatus 200 in which a linear motor 110 is used for a drive section of a reticle stage 400.

 FIG. 25 is a perspective view showing reticle stage 400.

FIG. 26 is a diagram illustrating a process of manufacturing a semiconductor device using the exposure apparatus according to the present invention. FIG. 27 is a diagram showing a more specific manufacturing process of a semiconductor device using the exposure apparatus according to the present invention.

 FIG. 28 is a perspective view showing a conventional coil 10.

 FIG. 29 is an explanatory diagram showing the direction of winding of the conductive wire 1 in the conventional coil 10.

 FIG. 30 is an explanatory diagram showing a state in which many conventional coils 10 are coaxially arranged. BEST MODE FOR CARRYING OUT THE INVENTION

 (First Embodiment)

 Hereinafter, a first embodiment of the present invention will be described with reference to FIGS.

 In the coil 20 according to the first embodiment, as shown in FIGS. 1 and 2, both ends (terminals) 21 and 22 are located on the outer peripheral side of the coil 20.

 More specifically, as shown in FIGS. 3 and 4, the coil 20 has a first conductor portion (conductive portion) 2 A centered on a predetermined portion (predetermined point) 2 C of the conductor 2. The second conductor portion (conductive portion) 2B.

 The first conductive wire portion 2A forms a first coil portion 20A, and the second conductive wire portion 2B forms a second coil portion 20B.

 Here, the end 21 of the first conductor 2 A serves as one electric terminal of the coil 20, and the end 22 of the second conductor 2 B serves as the other electric terminal of the coil 20. Terminal.

Then, the first conductive wire portion 2A is wound on a reel 61A of the coil manufacturing device 60 from a predetermined portion 2C, and as shown by an arrow in FIG. 3, one layer in the axial direction. Conductor 2 is wound. When the winding of one layer is completed, the first conductive wire portion 2A is further wound on the outer peripheral side, and when the coil 20 reaches the predetermined diameter r1, the winding is performed. Ends Complete. At this time, the end 2 1 of the conductor 2 is located on the outer peripheral side (outermost layer side).

 On the other hand, with respect to the second coil portion 20B, in this embodiment, one winding is performed in the axial direction and a plurality of windings are performed in the circumferential direction. In this winding, winding is performed from a predetermined portion 2C (indicated by X in FIG. 3) toward the outer periphery, so that the end portion 22 is located on the outer peripheral side of the second coil portion 20B (the outermost layer). Side).

 Next, a method of manufacturing the coil 20 using the coil manufacturing apparatus 60 will be described with reference to FIG.

 The coil manufacturing apparatus 60 shown in FIG. 5 includes a first flange portion 61, a second flange portion 62, and a reel portion 61A formed integrally with the first flange portion 61. That is, the second flange portion 62 is slidable in the axial direction relatively to the first flange portion 61. The first flange section 61, the second flange section 62, and the reel section 61A are all configured to be coaxial (axis J). The second flange portion 62 can rotate integrally with the reel portion 61A (and the first flange portion 61) in the axial direction of the reel portion 61A, and the reel portion 61A It can move relatively to the axial direction.

 In addition, the reel unit 61A and the first flange unit 61 only rotate around the axis J, and the second flange unit 62 is configured to be stationary without rotating. I have.

 The reel section 61A and the flange section 61 do not necessarily need to be formed integrally, and it is sufficient that the reel section 61A and the flange section 61 are configured to be rotatable around the body.

Further, a winding portion 63 is provided in the second flange portion 62. In the coil manufacturing apparatus 60 thus configured, one end (end 22) of the conductive wire 2 is fixed to a fixed portion (not shown) formed on the winding portion 63, and a predetermined length of the conductive wire is provided. 2 (corresponding to the entire length of the second conductor portion 2B) It is wound by the take-up part 63. At this time, the predetermined part 2C is located at an intermediate point between the winding part 63 and the reel part 61A.

 With the conductor 2 (the second conductor 2 B) of a predetermined length wound around the winding part 63, the width W 1 is defined between the first flange part 61 and the second flange part 62. The first flange 61, the reel 61A, and the second flange 62 are fixed to the first position (the first predetermined width) as shown in FIG. 5 (a). Then, it is integrally rotated about the axis J in the direction of the arrow (first state). Thus, the remaining conductor 2 (first conductor 2A) is wound around the reel 61A.

 In this winding operation, first, the conductor 2 is wound one turn along the axial direction of the reel portion 61A from the second flange portion 62 to the first flange portion 61 to form a layer. When the first flange portion 61 is reached, it is turned back to the second flange portion 62 this time. This operation is repeated a predetermined number of times to form a first coil portion 2OA in which a predetermined number of layers are overlapped. When this winding is completed, the end 21 of the conductive wire 2 is positioned on the outermost side (outermost layer side) of the first coil section 20A. The state up to this point is shown in Fig. 5 (b).

 Next, the second flange portion 62 is fixed at the second position slid in a direction away from the first flange portion 61 by a predetermined width W2 (a second predetermined width; equivalent to the diameter of the conductor 2). Is done. At this time, the reel portion 61A is integral with the first flange portion 61. Therefore, the distance between the first flange portion 61 and the second flange portion 62 (the width of the reel portion 61A) is changed from W1 to W1 + W2.

In this state, the first flange 61 and the reel 61A are rotated with respect to the second flange 62 (second state). Thereby, the conductive wire 2 (the second conductive wire portion 2B) wound around the winding portion 63 is wound around the portion having the predetermined width W2. At this time, a substantial reel is formed by one surface 62A of the second flange portion 62 and the side surface 2OA of the first coil portion 2OA, and the second conductor portion is formed along these wall surfaces. 2 B Is wound (Fig. 5 (c)). The direction of rotation during winding is opposite to that during winding of the first coil unit 2OA.

 When this winding is completed, the other end of the conductor 2 (the end 22 of the coil 20) is located at the outermost periphery of the coil 20 in the same manner as the end 21 (see FIG. 5 (d )).

 Finally, the first flange section 61 and the reel section 61A of the coil manufacturing apparatus 60 are pulled out from the second flange section 62, and the coil 20 shown in FIGS. 1 and 2 is obtained. Can be

 In the coil 20 of the first embodiment, since both ends 21 and 22 of the conductive wire 2 are both located at the outermost periphery of the coil 20 and serve as terminals, as shown in FIG. When the coils 20, 20... Are arranged coaxially, high-density installation is possible without any gaps between them.

 In the configurations shown in FIGS. 1 to 6, both ends 21 and 22 of the conductor 2 are located adjacent to each other in the axial direction of the coil 20. However, the present invention is not limited to such a configuration. . For example, the end 21 of the first coil unit 20A may be configured to be located on the first flange unit 61 side in FIG. This can be adjusted by the number of windings (the number of layers) in the circumferential direction.

 The coil 20 configured as described above can be used, for example, as a coil portion of a linear motor.

 In this case, the coil section may constitute a linear motor slider or a stator.

 In the linear motor that uses the coil of the present embodiment, the propulsive force can be increased because the coil can be arranged at high density in the axial direction (the moving direction of the linear motor).

 The configuration using the coil 20 for the linear motor will be described later.

In the present embodiment, the second coil portion 20 B has a width of only one turn (substantially equal to the diameter of the conductor 2) in the axial direction of the reel portion 61 A. No. ), The same number of layers as the first coil unit 2OA are laminated, but the present invention is not limited to this. For example, winding may be performed so as to have a width equal to the first coil unit 20A. (Second embodiment)

 Next, a second embodiment of the present invention will be described with reference to FIG. 7 to FIG.

 In the second embodiment, as shown in FIGS. 7 and 8, both ends 31 and 32 of the coil 30 are located on the axial center side of the coil 30.

 In other words, the coil 30 is composed of one conductor 3, and a first conductor portion (conductive portion) 3 A centering on a predetermined portion (X mark in FIG. 8) 3 C of the conductor 3. And a second conductive part (conductive part) 3B (FIGS. 9 and 10).

 The first coil portion 30A constitutes a first coil portion 30A, and the second conductor portion 3B constitutes a second coil portion 30B.

 In the coil 30, both the first conductor 3 A and the second conductor 3 B are wound from the ends 31 and 32. Therefore, the predetermined portion 3C is located on the outermost side of the coil 30 (FIG. 8).

 That is, in the first coil portion 3OA, the end portion 31 is wound along the axis by a width (first predetermined width) W1 as shown by an arrow in FIG. Then, the conductive wire 3 is formed into a layer, which is sequentially stacked toward the outer peripheral side.

On the other hand, in the second coil portion 3 ◦B, its width (second predetermined width) W 2 is substantially equal to the diameter of the conductor 3, and therefore, the second coil portion 30 B has a structure in which the conductor 3 is in the axial direction. Is wound in a single row, many times around the circumference. Next, a method of manufacturing the coil 30 using the coil manufacturing apparatus 70 will be described with reference to FIGS. 9 to 11. The coil manufacturing device 70 has the same configuration as the coil manufacturing device 60 of the first embodiment, and includes a first flange portion 71, a reel portion 71A integral therewith, and a first flange portion 71A. And 2 flange portions 7 2.

 In this coil manufacturing device 70, one end (end portion 31) of the conductive wire 3 is fixed to a fixing portion 71B formed on the first flange portion 71. The second flange portion 72 remains fixed at the first position where the width between the first flange portion 71 and the first flange portion 71 becomes a width W 1 (first predetermined width). The reel section 71A and the second 7-lange section 72 are integrally rotated about the axis J in the direction of the arrow as shown in FIG. 11A (first state). As a result, the conductor 3 is wound around the reel portion 1A.

 At this time, as shown in FIG. 10 (a), the conductor 3 is wound a plurality of times along the direction of the axis J to form a cylindrical layer composed of the conductor 3, which is a predetermined number of times. At this point, the winding of the first coil section 30A is completed. At this time, the end 31 of the conductor 3 is located on the innermost circumference side (the innermost layer side) of the first coil section 30A. The state up to this point is shown in Fig. 9 and Fig. 11 (a).

 Next, the second flange portion 72 is moved and fixed to a position (a second position) where a predetermined width W2 (corresponding to the diameter of the conductive wire 3) is formed between the second flange portion 72 and the first flange portion 71. . As a result, the reel portion 71A is substantially expanded in the axial direction by a predetermined width W2. At this time, the end 32 of the conductor 3 is fixed to the fixing portion 72 provided on the second flange 72. This distribution is shown in Fig. 11 (b).

Then, by rotating the first flange portion 71 and the reel portion 71A (71D) with respect to the second flange portion 72 (second state), the remaining conductive wire 3 ( The second conductor 3B) is wound around a reel 71D having a predetermined width W2. At this time, the second conductor 3B is wound along the surface 72A of the second flange portion 72 and the side surface 32A 'of the first coil portion 30A. . As a result, the other end of the conductor 3 (the end 32 of the coil 30) is also located on the innermost circumference side (the innermost layer side) of the coil 30 similarly to the end 31 (FIG. 11). (c)).

 Finally, the first flange portion 71 of the coil manufacturing device 70 is pulled out from the second flange portion 72, and the coil 30 shown in FIGS. 7 and 8 is obtained.

 As described above, in the coil 30, both ends 3 1 and 3 2 of the conductor 3 are located on the innermost side (axial side) of the coil 30, and therefore, as in the case of the first embodiment. When arranging a large number of coils 30, 30... Coaxially, high-density installation is possible without forming a gap between each other.

 The coil 30 configured as described above can be used, for example, as a coil portion of a linear motor.

 In this case, the coil unit may constitute a moving element of the linear motor, or may constitute a stator.

 Also in the linear motor using the coil of the present embodiment, the propulsive force can be increased because the coils can be arranged at high density in the axial direction (the driving direction of the linear motor).

 In the present embodiment, the second coil portion 30B has a width of only one turn (substantially equal to the diameter of the conductor 3) in the axial direction of the reel portion 71A. Although the same number of layers as the coil portion 30A of the above are laminated, the present invention is not limited to this. For example, winding may be performed so as to have a width equal to the first coil portion 30A. (Third embodiment)

 Next, a third embodiment of the present invention will be described with reference to FIGS.

The coil 40 of the third embodiment has two coils 4 OA and 40 B composed of two conductors 4 A and 4 B, which are connected to each other at their ends 42 and 43. Electrically connected, and the remaining ends 4 1 and 4 4 One positioned coil 40 is configured (Fig. 12, Fig. 13).

 Specifically, as shown in FIGS. 13 and 14, one conductive wire 4A is wound one turn at a predetermined width W11 along the axial direction to form a cylindrical layer. . Then, a plurality of the layered conductive wires 4A are formed in the circumferential direction to form a first coil portion 40A. Further, the conductor 4B is wound one turn at a predetermined width W12 along the axial direction to form a cylindrical layer. The layered conductive wire 4B is formed in a plurality of layers (equal to the first coil 5OA) in the circumferential direction to form a second coil portion 40B.

 The end portion 42 of the first coil portion 40A and the end portion 43 of the second coil portion 40B are separately wound. Then, the first coil portion 40A and the second coil portion 40B separately manufactured are electrically connected to each other at their ends 42, 43 by soldering or the like. As a whole, one coil 40 is realized.

 In this case, in order to facilitate the connection between the ends 42 and 43, the number of turns can be reduced and a space for connection can be secured (space 40C in FIG. 13).

 The coil 40 configured as described above can be used for the linear motor as in the first and second embodiments. Also in this case, the propulsion force of the linear motor is increased because the coils 40 can be densely arranged in the axial direction.

 The predetermined width W 1 1 and the predetermined width W 1 2 may be set to the same width, or may be set to different widths such as making the predetermined width W 11 larger than the predetermined width W 12. Is also good.

 (Fourth embodiment)

 Next, a fourth embodiment of the present invention will be described with reference to FIGS.

The coil 50 of the fourth embodiment has two coils 5 OA and 50 B composed of two conductors 5 A and 5 B, each of which has an end 52, 53. One coil 50 is electrically connected to each other, and the remaining ends 51 and 54 are located on the outer peripheral side together (Figs. 15 and 16).

 Specifically, as shown in FIGS. 16 and 17, one conductive wire 5A is wound one turn at a predetermined width W11 along the axial direction to form a cylindrical layer. . A plurality of the layered conductors 5A are formed in the circumferential direction to form a first coil 50A having a predetermined width W11. In addition, the conductor 5B is wound one turn around the predetermined width W12 along the axial direction to form a cylindrical layer. The layered conductive wire 5B is formed in a plurality of layers (equal to the first coil 5OA) in the circumferential direction to form the second coil 50B.

 The end portion 52 of the first coil portion 50A and the end portion 53 of the second coil portion 50B are separately wound. The first coil portion 50A and the second coil portion 50B separately manufactured are electrically connected to each other at their ends 52, 53 by soldering or the like, and as a whole, One coil 40 is realized.

 In this case, too, the number of windings is reduced and a space for connection is secured (space 50 C in FIG. 16) to facilitate connection between the ends 52 and 53.

 The coil 50 configured as described above can also be used for a linear motor as in the first to third embodiments. Also in this case, in the linear motor, the propulsive force increases because the coils 50 can be densely arranged in the axial direction.

 The predetermined width W11 and the predetermined width W12 may be set to the same width, or may be set to different widths, for example, by making the predetermined width Wl1 larger than the predetermined width W12. You may.

In the embodiment of the present invention, the case where the coil of the present invention is used for a linear motor is described as an example. However, the use of the coil of the present invention is not limited to the linear motor. For example, if a device requires a plurality of coils to be arranged at a high density, the coil of the present invention is placed there. O 01/20755

19 Can be used. It can also be applied to electromagnetic lenses.

 (Fifth embodiment)

 Next, a fifth embodiment of the present invention will be described with reference to FIGS.

 The fifth embodiment uses a coil 20, 30, 40, 50 obtained by the above-described first to fourth embodiments to form a stator of a linear motor 110. This is a configuration of 1 1 1 (Fig. 18).

 The configuration of the linear motor 110 and the stage apparatus 200 using the same will be described below.

 Also, in the following description, an example will be described in which a large number of coils 20 shown in the first embodiment are coaxially arranged to constitute a stator 111 of a linear motor 110. Of course, the stator may be configured using the coils 30, 40, 50 described in the other second to fourth embodiments.

 As shown in FIG. 18, the linear motor 110 of the first embodiment is fixed to the stage device 200 (see FIG. 23) by support portions 113A and 113A. It comprises a cylindrical stator 111 and a cylindrical movable member 112 fixed to the movable stage 109 side. In this linear motor 110, a columnar stator 111 is inserted through a central portion of a cylindrical mover 112 with a predetermined gap M therebetween (FIG. 19). The outer periphery of the mover 112 is covered with a housing part 108, and the movable stage 109 is fixed to the housing part 108.

 Here, as shown in FIG. 19 and FIG. 20, the stator 1 1 1 includes a core member 1 1 1 and a plurality of coils 2 0, 2 0 ... wound around the core member 1 1 It consists of a pipe 150 to cover.

A first coolant flow path 114 is formed between the coils 20, 20, and the pipe 150, and the second coolant flow path is formed at the axis of the core member 151. Channels 115 are formed.

 As shown in FIG. 20, the core member 15 1 is composed of a plurality of rod-shaped members 15 5 A, 15 1 A... Having a substantially fan-shaped cross section (eight in the illustrated example). They are connected to each other with C,… on the inner circumference side to form a hollow cylinder. The coils 20, 20... Are wound around the outer periphery of the core member 15 1.

 Here, the core member 15 1 of the stator 11 1 is made of a laminated silicon steel sheet (a ferromagnetic material) (FIG. 20). Even if the magnetic flux from the permanent magnets 16 1, 16 1… can generate eddy currents in the core member 15 1, the flow of current is prevented at the interface between the layers, and the flow of eddy currents Is suppressed.

 On the other hand, as shown in FIGS. 19 and 20, the mover 111 of the linear motor 110 has a plurality of annular permanent magnets 161, 161,... The arrangement is made, and the periphery is surrounded by a cylindrical yoke 16 2.

 Of these, the cylindrical yoke 162 is made of low-carbon steel (for example, SS400).

 Next, the structure of the core member 151 of the stator 111 of the linear motor 110 will be described.

 The core member 15 1 is composed of a rod-shaped member 15 1 A (FIG. 20) having a fan-shaped cross section, and a plurality of (8 in the example shown) bundled together with a central portion 15 1 C therebetween. It is formed in.

 As shown in FIG. 20, the bar-shaped members 15 1 A, 15 1 A,... Having a sector cross section are formed by laminating a plurality of silicon steel plates and forming a column having a square cross section into a column shape having a sector cross section. It is manufactured by cutting out the center side from the main part at a predetermined curvature. By cutting out the center side from the main part, the second coolant flow path 115 is formed at the axis of the core member 151.

Here, the first cooling passage 114 is used as a heat insulating means for preventing heat generated in the coil 20 from being transmitted to the outside of the stator 111. It is also possible to use the two cooling passages 1 15 as cooling means for the coil 20. In this case, as the medium (refrigerant), for example, Fluorinert (registered trademark) may be allowed to flow in the first cooling passage 114 in a laminar state. The refrigerant may be allowed to flow as a refrigerant also in the second cooling passage 1 15. It is also possible to use water as a refrigerant. Next, a description will be given of an arrangement pattern of the lead wires 21, 22, 21, 22,... From the plurality of coils 20, 20... Wound around the core member 15 1.

 In Linear Motor 110, a coil 20 is installed on the stator 111 side. In this case, when current is supplied to all the coils 20 installed in the stator 1 1 1, the current flowing through the coil 20 that does not contribute to the movement of the mover 1 1 2 is wasted, and the efficiency is reduced. bad. In addition, the amount of heat generated by the coil 20 increases, and the fluctuation of air caused by the heat increases. Therefore, in the linear motor 110 using the coil 20, the moving of the mover 112 is performed so that only the coil 20 of the portion contributing to the movement of the mover 112 is energized. The coil 20 to be energized according to the position can be selected by a switch or the like. As the portion contributing to the movement of the mover 112, for example, a portion of the mover 112 that faces the permanent magnet 161 and coils 20 before and after the portion can be set. The selection of the coil 20 to be energized is controlled by a controller (not shown) based on the target position of the mover 112 and the spatial positional relationship between the coil 20 and the permanent magnet 161. be able to. Therefore, each coil 20 is connected to a lead 21 connected to a current input terminal (not shown) and a lead 22 connected to a GND terminal.

 Here, the lead wires 21, 22, 21, 22,... Are arranged between the inside of the coils 20, 20, and the core member 15 1 (FIG. 20).

As shown in FIG. 21, the pair of lead wires 21 and 22 drawn from one coil 20 are drawn in different directions from each other. this Therefore, no matter which of the plurality of coils 20, 20,... Is energized, the heat generated from the lead wires 21, 22 due to the energization is not biased in the stator 11 1. As a result, fluctuation due to heat generation does not occur in one place, and the influence of heat on the detection result of the stage position by an interferometer or the like can be reduced.

 As shown in FIG. 22, a pair of lead wires 21 and 22 drawn from one coil 20 are drawn in the same direction (left direction in the figure), and a coil 20 adjacent to this is drawn out. By drawing out the lead wires 2 1 and 2 2 from the other side in the opposite direction (rightward in the figure), the heat generated from the lead wires 2 1 and 2 2 when energized is distributed on the stator 1 1 1 Can be done.

 Next, the mover 112 of the linear motor 110 will be described. The mover 1 12 has a plurality of (six in the example shown) coaxially arranged annular permanent magnets 16 1, 16 1… in a cylindrical yoke 16 2 (FIG. 19). , Figure 20).

 The plurality of permanent magnets 16 1, 16 1… are arranged in the cylindrical yoke 16 2 with the polarity as shown in FIG. 19, and the permanent magnets 16 1, 16 1… repel each other. Compete with each other. The cylindrical yoke 16 2 is made of a ferromagnetic material (low carbon steel). When housed inside the cylindrical yoke 16 2, each permanent magnet 16 1, 16 1… Adsorb to the side of 16 2.

 The linear motor 110 constructed in this way has a large number of coils 20, 20,... Inserted into the pipe 150, arranged densely in the axial direction without any gaps between them. As a result, the space factor of the coils in the stator (armature) 1 1 1 is high, and the propulsion force as a whole increases. FIG. 23 is a perspective view showing a stage apparatus 100 in which the linear motor 110 is used. In the stage device 100, the linear motor 110 is used for driving the X stage 100X.

Here, first and second cooling passages 114, 115 are formed in a pipe 150 constituting the stator 111, and these passages 114, 115 are formed. Heat generated from stator 1 1 1 is absorbed by flowing temperature control fluid through It has become to be.

 The configuration of the two linear motors 120 used for driving the Y stage 100 Y is the same as that of the linear motor 110, and a detailed description thereof will be omitted.

 The stage device 100 in which the linear motors 110 and 120 are used as driving means is not limited in its use, but in this embodiment, a mask (not shown) is mounted on a wafer (substrate) W. It is used as a means for moving the wafer W in an exposure apparatus that transfers the formed pattern.

 That is, the stage device 100 is a two-axis XY stage device of the X axis and the Y axis, and is driven in the X direction (the direction indicated by the arrow X in the figure) on the base portion 102. Stage 100 The Y stage 100Y driven in the X and Y directions (the direction indicated by the arrow Y) and the sample stage (movable body) 104 are the main components.

 Here, the sample stage 104 is placed on the {stage 100}, and a sample stage (substrate) W is mounted on the sample stage 104 via a wafer holder (not shown).

 Above the wafer W, an irradiation unit (not shown) is arranged, and a resist pre-coated on the wafer W by exposure light irradiated from the irradiation unit via a mask (both not shown). (Not shown), the circuit pattern on the mask is transferred.

 The movement amounts of the X stage 100Χ and the Υ stage 100Y in the stage apparatus 100 are respectively the movable mirror 1 fixed to the X-direction end and the Υ-direction end of the sample stage 104. 05 X, 105 Y, and the laser interferometers 106 1, 106 た fixed to the base 102, respectively, so as to face them. A main controller (not shown) controls the movement of the sample stage 104 to a desired position on the base 102 based on the measurement result.

Here, the stators of the two linear motors 1 1 1, 1 1 0 1 1 1, 1 1 1 and 1 1 are both fixed on the base 102 with the mounting portions 1 1 1 A and 1 1 1 A (Fig. 18), and the movers 1 1 2 and 1 1 2 are fixed plates 1 0 7 respectively. , 107 through the X stage 100x.

 In addition, the stators 1 2 1 and 1 2 1 of Linear Motors 1 2 0 and 1 2 0 are both fixed to the X stage 100 X, and the movers 1 2 2 and 1 2 2 (only one shown) ) Is fixed to Y stage 100 Y.

 The X stage 100 X is mounted on the base unit 102 by two linear motors 110, 110 having a stator 111 in which a number of coils 20 are arranged in the axial direction (driving direction). Driven in the X direction. Since the Y stage 100 Y is installed on the X stage 100 X, it is driven in the X direction on the base unit 102 together with the X stage 100 X. The Y stage 100 Y has a base unit 1 by two linear motors 120 and 120 having a stator 121 in which a number of coils 20 are arranged in the axial direction (drive direction). The X stage is driven in the Y direction with respect to the X stage. As a result, the sample stand 104 placed on the Y stage 100 Y can move in the X and Y directions on the base unit 102.

 The inside of each of the stators 1 1 1, 1 1 1 1, 1 2 1, and 1 2 1 is cooled by a temperature adjusting fluid flowing through each of the first and second cooling channels. This fluid is temperature-controlled by the temperature controller 13 1. The stators 11 1, 11 1, 12 1, 12 1 and the temperature controller 13 1 are connected by a discharge pipe 13 2, a pipe 13 3, and the like.

 Further, the stage apparatus 100 is provided with an air guide 140 and a static pressure gas bearing (not shown), and a static air bearing is provided by an air blowing port 141 and an air suction port 144. An expression stage is configured. Thus, the X stage 100 X is guided in the X direction.

 (Sixth embodiment)

Next, a sixth embodiment of the present invention will be described with reference to FIGS. In the sixth embodiment, a linear motor 110 using the coils 20, 30, 40, 50 obtained by the above-described first to fourth embodiments is exposed to an exposure apparatus 3. It was used as a driving means for the reticle stage 400 (Fig. 25).

 In the sixth embodiment, the linear motor 110 (FIG. 18) using the coil 20 shown in the first embodiment will be described as an example. It is a matter of course that the stator may be configured using other coils 30, 40, 50.

 Here, the exposure apparatus 200 is a so-called step-and-scan exposure type scanning exposure apparatus.

 The exposure apparatus 200 includes an illumination system 210, a stage movable section 401 for holding a reticle (photomask) R, a projection optical system PL, and a wafer (substrate) W for X—Y. It has a stage device 300 that drives in a two-dimensional direction between the X direction and the Y direction in a plane, and a main controller 220 that controls these.

 The illumination system 210 irradiates the exposure light emitted from the light source unit to the rectangular (or arc-shaped) illumination area I AR on the reticle R with uniform illumination.

 In the reticle stage 400, as shown in FIG. 25, the stage movable section 401 is moved in the scanning direction along the guide rail 403 at a predetermined scanning speed on the reticle base. The reticle R is fixed on the upper surface of the stage movable portion 401 by, for example, vacuum suction. An exposure light passage hole 402 is formed below the reticle R of the stage movable section 401.

 The moving position of the stage movable section 401 is detected by the reflecting mirror 215 and the reticle laser interferometer 216, and the stage control system 219 detects the position of the detected stage movable section 401. The stage movable section 401 is driven in accordance with an instruction from the main control device 220 based on the moving position.

Further, the projection optical system PL is a reduction optical system, and as shown in FIG. 24, It is arranged below the reticle stage 400 and its optical axis AX (corresponding to the optical axis IX of the illumination optical system) is defined as the Z-axis direction. Here, a refraction optical system including a plurality of lens elements arranged at predetermined intervals along the optical axis AX direction so as to have a telecentric optical arrangement is used. Therefore, when the illumination area IAR of the reticle R is illuminated by the illumination system 210, a reduced image (partially inverted image) of the circuit pattern in the illumination area IAR of the reticle R is formed on the illumination area IAR on the wafer W. Is formed in the exposure area IA which is conjugate to.

 The stage device 300 drives the table 318 in the two-dimensional direction in the XY plane by using a plane motor 370 as a driving means using a coil as an armature. is there.

 In other words, the stage device 300 includes a base portion 321, a table 318 that is levitated above the upper surface of the base portion 321 through a clearance of about several m, and a table 318. It is equipped with a plane model that moves one bull 3 1 8 — 3 7 0. Here, a wafer (substrate) W is fixed on the upper surface of the table 318 during the exposure processing, for example, by vacuum suction.

 A movable mirror 327 is fixed to the table 318, and a laser beam is irradiated from the wafer interferometer 331 to detect a moving position of the table 318 in the X-Y plane. It has become.

 The information on the movement position obtained at this time is sent to main controller 220 through stage control system 219. Then, the stage control system 219 operates the plane motor 370 in accordance with an instruction from the main controller 220 based on this information, and moves the table 318 to a desired position in the XY plane. To the position.

The table 318 is supported at three different points by a support mechanism (not shown) on the upper surface of a mover (not shown) constituting the flat motor 370. In addition to driving in the X and Y directions, it can be tilted with respect to the XY plane or driven in the Z It can be moved. As the plane module 370, for example, the module disclosed in Japanese Patent Application Laid-Open No. 5-22924 can be used. To the extent permitted by the national laws of the designated or designated elected country in this international application, the disclosures in the above gazettes will be incorporated herein by reference.

 In the figure, reference numeral 3 21 denotes a base portion, and a fluid for preventing a temperature rise due to heat generated inside the base portion is provided by a supply pipe 29 2 and a discharge pipe 29 3. In the exposure apparatus 200 including the reticle stage 400 having such a configuration, the exposure processing is generally performed in the following procedure.

 First, reticle R and wafer W are loaded, and then reticle alignment, baseline measurement, alignment measurement, and the like are performed.

 After the alignment measurement is completed, a step-and-scan exposure operation is performed.

 In the exposure operation, the main controller 220 sends a command to the stage control system 219 based on the position information of the reticle R by the reticle interferometer 216 and the position information of W by the wafer interferometer 331. The reticle R and the wafer W are moved synchronously by the linear motors 110, 110 of the reticle stage 400 and the plane motor 370, so that the desired scanning exposure is performed. Will be

 In this manner, when the transfer of the reticle pattern to one shot area is completed, the table 318 is stepped by one shot area, and scanning exposure is performed for the next shot area. This stepping and scanning exposure are sequentially repeated, and the required number of shot patterns are transferred onto the wafer W.

Here, in the above reticle stage 400, the three-phase currents are appropriately applied to the coils 202, which constitute the stators 111, 111 of the linear motors 110, 110, respectively. Is supplied and the amount of movement is controlled. The reticle stage 400 of the exposure apparatus 200 has a large propulsive force and does not consume extra power.

 In the fifth and sixth embodiments, a moving magnet type linear motor in which the coil of the present invention is arranged on the stator side is described as an example of the linear motor. It is not limited to Linamo. For example, a moving coil type linear motor in which the coil of the present invention is arranged on the mover (mover) and the magnet is arranged on the stator side may be used.

 In the above embodiment, the case where the present invention is applied to a scanning stepper has been described. However, the mask pattern is transferred to the substrate while the mask and the substrate are stationary, and the substrate is sequentially stepped. Steps to move the mask An 'and' repeat type reduction projection exposure apparatus and a proximity exposure apparatus that transfers the mask pattern to the substrate by bringing the mask and substrate into close contact without using a projection optical system The present invention can be suitably applied.

 In addition, the present invention is not limited to an exposure apparatus for manufacturing a semiconductor, but may be, for example, an exposure apparatus for a liquid crystal for transferring a liquid crystal display element pattern onto a square glass plate, or a method for manufacturing a magnetic head for a film. It can be widely applied to any type of exposure equipment.

In addition, the illumination light for exposure of the exposure apparatus of the present invention is not limited to the ArF excimer laser light, but may be g-line (436 nm), i-line (365 nm), KrF excimer laser. light (2 4 8 nm), F 2 laser beam (1 7 5 η m), charged particle beams such as X-ray or electron beam may be used. For example, when using an electron beam as the electron gun, thermionic emission type Kisaborai bets to run Tan (L a B _6), it can be used tantalum (T a).

Further, when an electron beam is used, a structure using a mask may be used, or a pattern may be formed on a substrate by direct drawing using an electron beam without using a mask. That is, the present invention provides an optical As long as the electron beam exposure system uses an electron optical system, it can be applied to any of the pencil beam system, variable shaped beam system, cell projection system, blanking 'aperture system, and EBPS. It is possible.

Further, the magnification of the projection optical system may be not only the reduction system but also any one of the same magnification and the enlargement system. The projection optical system, using a material which transmits far ultraviolet rays such as quartz and fluorite as the glass material when using a far ultraviolet rays such as excimer one The catadioptric system or reflection when using the F ₂ laser or X-ray If the reticle is of a reflection type, an electron optical system including an electron lens and a deflector may be used as the optical system. It goes without saying that the optical path through which the electron beam passes is in a vacuum state.

 In an exposure apparatus using vacuum ultraviolet light (VUV light) having a wavelength of about 200 nm or less, a catadioptric system may be used as the projection optical system. Examples of the catadioptric projection optical system include, for example, Japanese Patent Application Laid-Open No. Hei 8-171504 and US Patent No. 5,668,672 corresponding thereto, and Japanese Patent Application Laid-Open No. A catadioptric system having a beam splitter and a concave mirror is used as a reflective optical element as disclosed in Japanese Patent Publication No. 0195/95 and corresponding US Pat. Nos. 5,835,275 and the like. be able to. In addition, Japanese Patent Application Laid-Open No. Hei 8-334649 and US Pat. No. 5,689,377 corresponding thereto, and Japanese Patent Application Laid-Open No. Hei 10-33939 and corresponding US Pat. U.S. Patent Application No. 873,605 (filing date: June 12, 1997), which discloses a concave mirror or the like without using a beam splitter as a reflective optical element. Can be used. To the extent permitted by the national laws of the designated country or selected elected country specified in this international application, the disclosures in the above publications and the corresponding U.S. patents and U.S. patent applications are hereby incorporated by reference into their disclosure. I do.

In addition, U.S. Pat.Nos. 5,031,976, 5,488,22 No. 9, and Nos. 5, 717, 518, No. 5, No. 5, No. 7, No. 7, No. 8, No. 5, No. 5, No. 5, No. 5, No. 7 A sub-mirror with a back mirror on which a reflection image is formed is arranged on the same axis, and an intermediate image of a reticle pattern formed by the plurality of refracting light elements is formed by the primary mirror and the sub-mirror. A catadioptric system that re-images on the wafer may be used. In this catadioptric system, a primary mirror and a secondary mirror are arranged following a plurality of refractive optical elements, and the illumination light passes through a part of the primary mirror and is reflected in the order of the secondary mirror and the primary mirror. Through the part and onto the wafer. To the extent permitted by national law in the designated country or selected elected country of this international application, the disclosures in the above US patents are incorporated by reference into this description.

Furthermore, a catadioptric projection optical system has, for example, a circular image field, and both the object side and the image side are telecentric, and the projection magnification is 1/4. A reduction system that doubles or 15 times may be used. In the case of a scanning exposure apparatus having a catadioptric projection optical system, the irradiation area of the illumination light has its optical axis substantially at the center of the field of view of the projection optical system, and the scanning direction of the reticle or wafer. It may be an evening stipulated in a rectangular slit shape extending along a direction substantially orthogonal to the above. According to a scanning exposure apparatus provided with such a catadioptric projection optical system, for example, even if using a laser beam having a wavelength of 1 5 7 nm of F ₂ as exposure illumination light, 1 0 0 nm L / S pattern about It is possible to transfer the fine pattern on the wafer with high precision.

Further, a linear motor disclosed in U.S. Pat. No. 5,632,853 or U.S. Pat.No. 5,528,118 may be used as a drive system for the wafer stage and reticle stage. In such a case, either an air levitation type using an air bearing or a magnetic levitation type using a Lorentz force or a reaction lancer may be used. To the extent permitted by the national laws of the designated or designated elected States in this International Application, the disclosures in each of the above U.S. Patents are incorporated herein by reference. You.

 When a plane motor is used as the stage drive device, one of the magnet unit and the armature unit is connected to the stage, and the other of the magnet unit and the armature unit is on the moving surface side of the stage. It may be provided.

 The stage may be a type that moves along a guide or a guideless type that does not have a guide.

 The reaction force generated by the movement of the reticle stage is, for example, as disclosed in JP-A-8-330224 and corresponding US Pat. Nos. 5,874,820. It may be mechanically released to the floor FD (ground) using a frame member. To the extent permitted by the national law of the designated date or selected elected country specified in this international application, the disclosures in the above publications and US patents are incorporated herein by reference.

 In addition, the illumination optical system and projection optical system consisting of multiple lenses are incorporated into the exposure device body to perform optical adjustments, and the reticle stage and wafer stage consisting of many mechanical parts are attached to the exposure device body. The exposure apparatus of the above-described embodiment can be manufactured by connecting wiring and piping, and performing overall adjustment (electrical adjustment, operation check, etc.). It is desirable that the exposure apparatus be manufactured in a clean room in which the temperature, the degree of cleanliness and the like are controlled.

 Further, in the case of a semiconductor device, a step for designing the function and performance of the device, a step for manufacturing a reticle based on the design step, a step for manufacturing a wafer from a silicon material, It is manufactured through the steps of transferring the reticle pattern onto the wafer by the equipment, device assembly steps (including dicing, bonding, and packaging processes), and inspection steps.

 Hereinafter, the device manufacturing method will be described in more detail.

Figure 26 shows an example of the manufacture of devices (semiconductor chips such as ICs and LSIs, liquid crystal panels, CCDs, thin-film magnetic heads, micromachines, etc.). The row chart is shown. As shown in Figure 26, first, in step 501 (design step), the function and performance of the device are designed (for example, circuit design of a semiconductor device, etc.), and the functions for realizing the function are performed. Perform pattern design. Subsequently, in step 502 (mask manufacturing step), a mask (reticle) on which the designed circuit pattern is formed is manufactured. On the other hand, in step 503 (wafer manufacturing step), a wafer is manufactured using a material such as silicon. Next, in step 504 (wafer processing step), using the mask (reticle) and ueno prepared in steps 501 to 503, the wafer is formed by lithography technology or the like as described later. An actual circuit or the like is formed thereon. Next, in step 505 (tevis assembly step), tevis assembly is performed using the wafer processed in step 504. Step 505 includes processes such as a dicing process, a bonding process, and a packaging process (chip encapsulation) as necessary.

 Finally, in step 506 (inspection step), inspection of the operation verification test, durability test, and the like of the device manufactured in step 505 is performed. After these steps, the device is completed and shipped.

 FIG. 27 shows a detailed flow example of the above step 504 in the case of a semiconductor device. In FIG. 27, in step 5 11 (oxidation step), the surface of the wafer is oxidized. In step 512 (CVD step), an oxide insulating film is formed on the wafer surface. In step 5 13 (electrode formation step), electrodes are formed on the wafer by vapor deposition. In step 5 1 4 (ion implantation step), ions are implanted into the wafer.

Each of the above steps 51 1 to 51 4 constitutes a pre-processing step of each stage of wafer processing, and is selected and executed according to a necessary process in each stage. In each stage of the wafer process, when the above-described pre-processing step is completed, the post-processing step is executed as follows. In this post-processing step, first, in step 515 (register forming step), a photosensitive agent is applied to the wafer. Subsequently, in step 516 (exposure step), the circuit pattern of the mask is transferred to the wafer by using the exposure apparatus described above. Next, in step 517 (development step), the exposed wafer is developed, and in step 518 (etching step), the exposed members other than the portion where the resist remains are etched. Remove by. Then, in step 519 (resist removing step), unnecessary resists after etching are removed.

 By repeating these pre-processing and post-processing steps, multiple circuit patterns are formed on the wafer.

 According to the device manufacturing method of the present embodiment described above, in the exposure step (Step 516), the linear motor using the coils of the first to fourth embodiments is used as the driving means. Since the exposure is performed by the apparatus, it is possible to produce a highly integrated device with a high yield by improving the exposure accuracy.

 Industrial applicability

 According to the coil of claim 1, since the two ends are both located on the outer layer side of the coil, when a plurality of coils are coaxially arranged, the two ends (terminals) of the coil are Both are pulled out to the outer layer side, and these can be arranged at a higher density than conventional coils.

 Further, since the two ends of the coil of claim 2 are both located on the axis side of the coil, when a plurality of coils are coaxially arranged, both ends (terminals) of the coil are It is pulled out to the shaft center side, and these can be arranged at a higher density than conventional coils.

In the coil according to claim 3, the end located on the outer peripheral side of the first coil part and the end located on the outer peripheral side of the second coil part are electrically connected. And the end located on the axial center side of the first coil unit and the end located on the axial center side of the second coil unit serve as two electrical terminals of the coil. Therefore, also in this case, when arranging a plurality of coils coaxially, since both terminals of the coil are drawn out toward the axial center side, they are arranged at a higher density than the conventional coil. be able to.

 Further, in the coil according to claim 4, the end located on the axis side of the first coil section and the end located on the axis side of the second coil section are electrically connected to each other, The end located on the outer layer side of the first coil part and the end located on the outer layer side of the second coil part and the force become two electrical terminals of the coil. When a plurality of coils are coaxially arranged, the two ends (terminals) of the coil are both drawn out to the outer layer side, so that they can be arranged at a higher density than a conventional coil.

 Further, the coil according to claim 5 is the coil according to any one of claims 1 to 4, wherein the second predetermined width is smaller than the first predetermined width, By manufacturing the first coil portion as the main coil portion and the other as the subordinate coil portion, variations in the manufacturing process increase.

 The coil according to claim 6 is the coil according to any one of claims 1 to 4, wherein the number of winding layers in the first coil unit is the same as that of the second coil. Since the number of winding layers in the coil portion is equal, a coil having a constant circumferential width is realized.

 The coil according to claim 7 is a coil according to claim 1 or 2, wherein the two ends are easily pulled out to the outer layer side (outer peripheral side) or the axial side. realizable.

Further, the coil according to claim 8 is the coil according to claim 1 or 2, wherein the conductive member is a conductor, and the second predetermined width is substantially equal to a diameter of the conductor. The first coil part is the main The second coil section is used to align the end of the conductor with the side from which the end of the first coil section is drawn out, and to pull this out to the outer layer side (outer circumference side) or the axis side. Available as

 In the method for manufacturing a coil according to claim 9, the first conductive portion extends along a predetermined axial direction starting from a predetermined point so that one end is located on the outer layer side of the coil. The second conductive part is wound around the first conductive part with a predetermined point as a starting point so that the first conductive part is wound by a plurality of layers at a first predetermined width, and the other end is located on the outer layer side of the coil. Is wound in the opposite direction along the axial direction for a plurality of layers at the second predetermined width, so that the produced coil has both ends (terminals) of the coil drawn out to the outer layer side, and When multiple coils are arranged coaxially, they can be arranged at a higher density than conventional coils.

 According to a tenth aspect of the present invention, there is provided the coil manufacturing method as described in the ninth aspect, wherein the reel portion having a length substantially equal to the first predetermined width is provided between the two flange portions. Is provided, and the first conductive portion is wound around the reel portion with the predetermined point as a starting point, to form a first coil portion. Further, one of the two flanges is moved in the axial direction with respect to the reel portion, and a gap having a width substantially equal to the second predetermined width is formed between the one flange portion and the first coil portion. It is formed. In this gap, a second coil portion is formed by winding the second conductive portion around the reel portion in a direction opposite to the first conductive portion, starting at a predetermined point. Therefore, in the manufactured coil, both ends (terminals) of the coil are drawn out to the outer layer side, and when arranging a plurality of coils coaxially, they are arranged at a higher density than the conventional coils. Can be placed.

Further, in the method for manufacturing a coil according to claim 11, the first conductive portion starts from the first end so that the first end is located on the axis side of the coil. And a predetermined point as an end point, and a plurality of layers are wound along a predetermined axial direction with a first predetermined width, and a second end portion of the coil is wound. The second conductive portion is positioned on the axis side of the first conductive portion, starting at the second end and ending at the predetermined point, in a direction opposite to the first conductive portion, A plurality of layers are wound in a second predetermined width along the axial direction. Therefore, in the manufactured coil, the two ends (terminals) of the coil are both drawn out toward the axis, and when a plurality of such coils are arranged coaxially, these coils have a higher density than the conventional coil. Can be arranged.

 Further, in the method for manufacturing a coil according to claim 12, in the method for manufacturing a coil according to claim 11, the first conductive portion starts from the first end and sets a predetermined point. The first coil portion is formed by being wound around the reel portion as an end point. Further, one of the two flanges is moved in the axial direction with respect to the reel portion, and a width substantially equal to the second predetermined width is provided between the one flange portion and the first coil portion. In the gap, the second conductive portion has a direction opposite to the direction of the first conductive portion with the second end as a start point and the predetermined point as an end point. Then, the second coil portion is formed by being wound around the reel portion. Therefore, in the manufactured coil, the two ends (terminals) of the coil are both drawn out toward the axis, and when arranging a plurality of these coils coaxially, these coils are densely arranged compared to conventional coils. Can be placed.

 Further, the coil manufacturing apparatus according to claim 13 is characterized in that the first flange member, a reel member that can rotate integrally with the first flange member by sharing a rotation axis with the first flange member, A second flange portion that is relatively movable in the axial direction of the shaft and that can rotate integrally with the first flange member and the reel member while sharing a rotation axis with the first flange member and the reel member; By relatively moving the flange portion 2, one coil can be divided in the axial direction and can be individually wound.

Further, according to the coil manufacturing apparatus of claim 14, after the coil is formed with a predetermined width in the axial direction, a new coil is formed adjacent to the coil regardless of the winding direction of the coil. Can be wound up. The linear motor according to claim 15 is a linear motor that includes an armature provided with a coil and a magnet member capable of relatively moving between the armature and the armature. Since it has the coil described in any one of items 1 to 4, the coil is arranged at a higher density than the conventional coil, so that improvement in propulsion can be expected. A stage device according to claim 16 is a stage device for moving a driven part to a predetermined position, and has the linear motor described in claim 15 as a driving unit. In this case, the performance of the provided linear camera is enhanced, so that the overall performance of the stage device is enhanced.

 An exposure apparatus according to claim 17 is the exposure apparatus, including the stage device described in claim 16, wherein the stage device moves the substrate to a predetermined position. In this case, the performance of the provided stage apparatus is enhanced, and the overall function of the exposure apparatus is enhanced.

 The exposure apparatus according to claim 18 is the exposure apparatus according to claim 17, wherein the exposure optical system projects the pattern formed on a mask onto the substrate. Since the mask is moved by the stage device, the performance of not only the provided stage device but also the stage device for moving the mask is improved. As a result, higher functionality is achieved.

 Further, the device in which the predetermined pattern of claim 19 is formed is manufactured by using the exposure apparatus described in claim 17 or claim 18. Therefore, the manufactured device has high accuracy in mask alignment and substrate movement control, and can realize a device structure that is faithful to the design pattern even if the design pattern is further densified.

Claims

 The scope of the claims

(1) A coil formed by a single conductive member having a first conductive portion from one end to a predetermined point and a second conductive portion from the other end to the predetermined point. So,

 A first coil portion formed by winding a plurality of layers at a first predetermined width along the axial direction of the coil from the predetermined point as a starting point, the first conductive portion;

 The second conductive portion is wound by a plurality of layers with a second predetermined width along the axial direction in a direction opposite to the first conductive portion with the predetermined point as a starting point. And a second coil part formed,

 A coil, wherein two ends of the conductive member are both located on the outer layer side of the coil.

 (2) A coil formed by a single conductive member having a first conductive portion from one end to a predetermined point and a second conductive portion from the other end to the predetermined point And

 The first conductive portion is formed by winding a plurality of layers at a first predetermined width along the axial direction of the coil with the one end as a start point and the predetermined point as an end point. A first coil section;

 The second conductive portion has a second predetermined width along the axial direction in a direction opposite to the first conductive portion, with the other end as a starting point and the predetermined point as an end point. And a second coil portion formed by winding a plurality of layers at

 The coil, wherein both ends of the conductive member are located on the axial center side of the coil.

 (3) A substantially cylindrical coil having a predetermined diameter,

A plurality of conductive members are wound in a circumferential direction at a first predetermined width along the axial direction from the axial center side of the coil for a plurality of layers, and one end of the conductive member is located on the outer layer side, and A first coil whose end is located on the axis side Department and

 A plurality of conductive members are wound in the circumferential direction at a second predetermined width along the axial direction from the axial center side of the coil by a plurality of layers, and one end of the conductive member is located on the outer layer side and the other end is positioned on the outer layer side. A second coil portion whose end is located on the axis side,

 An end located on the outer peripheral side of the first coil unit and an end located on the outer peripheral side of the second coil unit are electrically connected,

 An end located on the axis side of the first coil part and an end located on the axis side of the second coil part are two electrical terminals of the coil. And coil.

 () A substantially cylindrical coil having a predetermined diameter,

 A plurality of conductive members are wound in a circumferential direction at a first predetermined width along the axial direction from the axial center side of the coil for a plurality of layers, and one end of the conductive member is located on the outer layer side, and A first coil part whose end is located on the axis side,

 A plurality of conductive members are wound in the circumferential direction at a second predetermined width along the axial direction from the axial center side of the coil by a plurality of layers, and one end of the conductive member is located on the outer layer side, and A second coil portion whose end is located on the axis side,

 An end of the first coil unit located on the axial center side is electrically connected to an end of the second coil unit located on the axial center side,

 An end located on the outer layer side of the first coil part and an end located on the outer layer side of the second coil part are two electrical terminals of the coil. coil.

 (5) In the coil described in any one of claims 1 to 4,

 The coil, wherein the second predetermined width is smaller than the first predetermined width.

(6) The coin described in any one of claims 1 to 4 In

 A coil wherein the number of winding layers in the first coil portion is equal to the number of winding layers in the second coil portion. (7) The coil according to claim 1 or 2, wherein the first coil portion has at least a cylindrical layer portion formed by winding the first conductive portion at the first predetermined width. Two layers are stacked,

 The coil according to claim 2, wherein the second coil part is formed by laminating at least two cylindrical layer parts obtained by winding the second conductive part at the second predetermined width.

 (8) The coil according to claim 1 or 2, wherein the conductive member is a conductor, and the second predetermined width is substantially equal to a diameter of the conductor.

 (9) A method for manufacturing a coil, comprising:

 A step of dividing one conductive member into a first conductive portion from one end to a predetermined point and a second conductive portion from the other end to the predetermined point; and Winding the first conductive portion by a plurality of layers at a first predetermined width along a predetermined axial direction starting from the predetermined point so as to be located on an outer layer side of the coil;

 The second conductive part is moved in the direction opposite to the first conductive part, starting from the predetermined point, in the axial direction so that the other end is located on the outer layer side of the coil. Winding a plurality of layers along the second predetermined width along the

 A method for manufacturing a coil, comprising:

 (10) In the method for manufacturing a coil according to claim 9, a step of providing a reel portion having a length substantially equal to the first predetermined width between the two flange portions,

 Winding the first conductive portion around the reel portion with the predetermined point as a starting point to form a first coil portion;

Move one of the two flanges axially relative to the reel Forming a gap having a width substantially equal to the second predetermined width between the one flange portion and the first coil portion;

 In the gap, the second conductive portion is wound around the reel portion in a direction opposite to the first conductive portion, starting from the predetermined point as a starting point, to form a second coil portion. The process of

 A method for producing a coil, comprising:

 (11) A method for manufacturing a coil, comprising:

 Dividing one conductive member into a first conductive portion from one end to a predetermined point and a second conductive portion from the other end to the predetermined point;

 The first conductive portion is formed such that the first end portion is a start point and the predetermined point is an end point so that the first end portion is located on the axis side of the coil. Winding a plurality of layers along the axial direction at a first predetermined width;

 The second conductive portion is configured such that the second end portion is located at the start point of the second end portion and the predetermined point is an end point such that the second end portion is located on the axis side of the coil. Winding a plurality of layers at a second predetermined width along the axial direction in a direction opposite to the conductive portion;

 A method for manufacturing a coil, comprising:

 (12) In the method for manufacturing a coil according to claim 11, a step of providing a reel portion having a length substantially equal to the first predetermined width between the two flange portions,

 Winding the first conductive part around the reel part with the first end as a starting point and the predetermined point as an end point, thereby forming a first coil part;

 By moving one of the two flanges in the axial direction with respect to the reel portion, a gap having a width substantially equal to the second predetermined width is formed between the one flange portion and the first coil portion. The process of

In the gap, the second conductive portion, the second end portion as a starting point Winding the reel around the reel portion in a direction opposite to the first conductive portion with the predetermined point as an end point, thereby forming a second coil portion. .

 (13) The first flange member,

 A reel member that can rotate integrally with the first flange member while sharing a rotation axis with the first flange member;

 A second flange which is relatively movable with respect to the reel member in the axial direction of the rotation shaft, and which is integrally rotatable with the first flange member and the reel member while sharing a rotation shaft; A coil manufacturing apparatus characterized by having a head part.

 (14) In the coil manufacturing apparatus according to the item (13), the second flange member is fixed to the reel member at a first position in the axial direction, and the second flange member is fixed to the reel member at the first position. A first state in which the first flange member and the reel member share a rotation axis and rotate integrally, and a first position fixed to the reel member at a second position different from the first position; A second state in which the flange member and the reel member move relative to the rotation direction.

 (15) A linear motor having an armature provided with a coil and a magnet member movable relative to the armature,

 5. A linear motor, comprising: the coil described in any one of claims 1 to 4 as the coil.

 (16) A stage device for moving a driven part to a predetermined position,

 A stage device comprising the linear motor described in claim 15 as driving means.

 (17) An exposure apparatus for forming a predetermined pattern on a substrate using an exposure optical system,

A stage device according to claim 16 is provided. Accordingly, the exposure apparatus moves the substrate to a predetermined position.

 (18) The exposure apparatus according to claim 17, wherein

 The exposure optical system projects the pattern formed on the mask onto the substrate, and includes the stage device according to claim 16, wherein the stage device moves the mask. Exposure equipment characterized.

 (19) A device in which a predetermined pattern is formed,

 A device manufactured by using the exposure apparatus according to claim 17.